Karl Suss Scriber Operating Instructions
Contents
1. The movement controls will now be activated so you can line up the mark the machine made to the cross hairs on the microscope ii See the user s manual for exact positioning of the mark in reference to the cross hairs oO Qa o iii Press Mark iv This tells the machine you are lined up with the reference mark d Press Test i The machine will scribe another mark 20um to the left of the first mark ii Look in the microscope to verify that the marks are parallel and are similar to the diagram in the users manual iii If the marks are satisfactory press Return If not repeat this step 6 Press Pattern Set a Press Block Left Out i This allows you to define one corner of the sample ii Using the Left and Out control keys align the sample so it is in the lower left quadrant defined by the microscope cross hairs iii Once aligned press Mark b Press Block Right In i This allows you to define the second corner of the sample on a diagonal with the first corner ii Using the Right and In control keys align the sample so it is in the upper right quadrant defined by the microscope cross hairs iii Once aligned press Mark c Press Define Scribe i This lets you determine what type of scribe the machine will make ii Press Edge Scribe d Press Define Home i The sample will move to the center of the area you blocked ii This allows you to m2. Karl Suss Scriber Operating Instructions The Karl Suss scriber is used for precise cleaving of semiconductor substrates These instructions are provided as a reference only You should familiarize yourself with the user s manual The manual is quite good at describing the operation of the tool In addition the on screen instructions are easy to follow The scriber can handle scribing a wafer up to 4 in diameter The units on the scriber are set to microns Do not ask us to change the units we won t do it The scriber can measure in 1 micron increments The minimum space between scribes is 20 microns and the maximum space is 10000 microns The scriber can make up to 40000 scribes in a 200x200 grid If you try to make more scribes you will get an error message There are a few basic rules to remember when using the scriber e Record your use of the tool in the logbook e Do not try to scribe a sample while it is in a gel pak Use either wafer bond or the blue mylar film e Clean up your work area after use Do not expect us to throw away your trash for you e lf you aren t sure how to use the system find someone who knows how We would rather answer many questions than try to repair the system because someone didn t know what they were doing e Some of the buttons are quite sensitive You may press one twice without meaning to You will hear two beeps when you press a button twice In general all you need to do is repeat the step twi
3. ark the center of the first scribe the machine will make iii Using the control keys move the sample so that it is in the lower half of the microscope as defined by the cross hairs also like to move the sample so that one of the edges is in the microscope field of view to maximize the usable area of the sample iv Press Mark once you are satisfied with the position v Sometimes you will get an error message saying that the position defined is not in the blocked area The sample will return to somewhere near the center of the blocked area You need to reposition the sample and press Mark again e Press Scribe Length i This allows you to define the length of scribe the machine makes ii The length of the scribe depends on the size of the sample the thickness of the sample and where the pattern is on the sample iii Enter a number and press Scribe Length again f Press Map Horizntl i This allows you to enter the distance between scribes and is determined by the sample ii Enter a number and press Map Horizntl again iii The distance between scribes should not be greater than the wafer thickness 9 g Press Beeper Test while looking in the microscope i This allows you to look at the locations the system will scribe before it begins scribing h If the scribes are in appropriate locations press Start Scribe to let the machine scribe the sample If not press Defin
4. ce and you will be fine e f you get error messages refer to the user s manual If you still can t figure out what needs to be done find someone in Dr Lester s group to help you e f you need to change any of the settings make sure you return the settings to their original positions 1 Mount samples on blue sticky film or wafer bond If your sample is large enough to cover the vacuum holes on the chuck you don t have to use the blue mylar film Press lightly on back to make sure sample adheres to film Make sure that the film is cut so it will cover the vacuum holes on chuck Do not use a gel pak Your sample thickness must be less than half the distance between scribes If it isn t thin your sample first or don t complain when you can t scribe properly 2 Turn on scribing unit a Turn on electronics b Turn on vacuum pump c Turn up the screen intensity after approximately 30 seconds d Record your name and date on the user log sheet along with as much data as you can fill in pe 0AdDSa 3 Press Load Wafer a The chuck will initialize and then display should say to load wafer and align If not stop and consult manual Load sample to cover the vacuum holes on the chuck Turn on vacuum switch to hold sample in place Move sample under microscope and align as needed using the in out left right and rotation controls e Once sample is aligned press Mark 4 Press Diamo
5. e Home and repeat the steps listed above i Once the machine has finished scribing it will beep at you While looking in the microscope press Examine Scribe The machine will show you each scribe it has made Press Return twice a Press Load Wafer to unload your sample b Turn off the vacuum and remove sample from the vacuum chuck Put a new sample on if needed and repeat above steps When finished scribing your samples turn off the system a Turn down the intensity on the screen b Turn off the vacuum pump and electronics c Finish recording data in the logbook
6. nd Adjust a Press Mark Chuck i Move sample so that scribing tip will touch blue sticky film when lowered ii Press Mark iii The scribe tip will lower touch the blue mylar and set the zero reference point for the system b Press Mark Wafer i Sometimes this button is very sensitive and can be inadvertently pressed twice ii Move sample so that scribing tip will touch sample when lowered iii Press Mark iv The scribe tip will lower and touch the sample to determine the wafer thickness v It is a good idea to check the thickness in several places to see how uniform the sample thickness is Each time you check the thickness you need to press Mark Wafer vi Record at least one of these values on the log sheet c Once the sample thickness is determined press Set Depth i Enter a number corresponding to how deep you want your scribes to be ii Scribes can be no more than 50 the thickness of the sample iii Once the number has been entered press Set Depth again to enter the number d Press Return to return to the main menu 5 Press M scope Adjust a Press Align Wafer i Align sample so that the scribe tip will come down on an unused corner of the sample ii Press Mark b Press Scribe Reference i This instructs the machine to make a small mark 200um long on the sample at the place you marked earlier c Press Mark Cross i
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