NanoPZ™ - Newport Corporation
Contents
1. 17 Interconnecting Components sssr 18 Local Operation 23 Operating Modes ccceccescsseeteeeeesseeeeceseeseeeneees 23 Local Manual Control 23 Reading the LED Status Lights 25 LED Indicator on PZC200 Controller s 00n0000 25 LED Indicators on PZC SB Switchbox 000 25 Utility Software 26 COVER VIS Woe he tas sabes gctehaubdeaits oat nhia sasea 26 RS 232 Communications Setup ceeceeseereees 26 Software Installation cece eeeeseeteeeeeeeeeeeeseeee 27 Controller Initialization 28 NetWork SCan siens e 29 Working with the Main Screen 30 Move Tab 31 Setup Tab 32 View all Tab 33 Stat s Tab eninr seed 34 About Tabernaso piei 35 ASCII Command Set 36 Command Set Introduction ce eeeeeeeeeeeeeeeeee 36 Address Field ss 36 Set or Query Commands cceceeseeseeseeeeeteeeeeeee 36 Saving Settings to Non Volatile Memory 37 Motion Commands ccceceesseeeeseeeeeeeeeeseeseeeneees 37 Command Set Summary eceeceeseeeteeseeeeeeteeeeeeee 38 gt Newport NanoPZ Ultra High Resolution Motion System gt Newport 6 3 Command Set Details 39 BX Scan switchbox eee eeeeseeseeeeeeeeeeeeeeeeeeee 39 BZ2. 37 to 47 5toi2 7 THD 3 8 40 UNS2A LI satis 037 88 A 3 97 9 9 52 Y SIT J ilezan S sa BXX XK 20000 2000 9 24 6 63 15 9 7 1 03 225 ng 26 23 6 35 49 1 Figure 6 Dimensions PZA12 Linear Actuator 44019 01 Rev E 05 10 gt Newport NanoPZ Ultra High Resolution Motion System PZA12 Design Details Base material Aluminum Drive mechanism Direct drive non rotating lead screw no gear Feedback Open loop no encoder Limit switches Fixed jam nut proof hard stops limit max min travel Origin None Motor Non resonant piezo micro stepping motor Average full step length Approx 160 nm depending on load speed and other parameters 16 micro steps per full step Cable length 3 m 10 ft Weight 0 13 kg 0 29 Ib Environmental See NanoPZ system specs section 2 8 PZA12 Specifications Travel 12 5 mm 0 49 Motion sensitivity 30 nm Max speed 0 2 mm s at full load Higher speeds possible at lower load Axial load capacity 50N 2 3 PZC200 Controller Driver The PZC200 is an integrated single axis piezo motor controller driver It is designed to be hand held but also provides through holes for bolting to an optical table with a 1 or 25 mm grid of mounting holes Used by itself the PZC200 provides easy and affordable means to control a single PZA12 actuator Use of an external PZC SB switchbox a
3. ccccecscesseeseeseeeteeeseeseenes 2 General Warnings cccscesceesseseeseceseeeceseeteeeaeeneens 2 General Cautions ssssssessseesssessessssesresessesresessersesesee 2 Manual Conventions ccccscesseesseeeesseeeeeseeeseeeees 3 Features amp Specifications 3 NanoPZ System Overview 3 PZA12 ACTUATOT ner 4 General Use rennes 4 Motion Principle 0 ccs eeeseeseeeeeceeeeeceeeeeeeeeeeeeeaees 4 Mechanical Compatibility 00 0 0 eeeeeeteeeees 6 PZA12 Design Details 7 PZC200 Controller Driver c cccccceessceeseeeseeeeneeees 7 PZC200 Specifications 9 PZC SB Switchbox 10 PZC SB Specifications ccccceeeeseeseeseeseeeteeeeeeee 11 NSC PS25 Power SUpply 12 NSC PS25 Specifications ccccceseseeseeeeeeeeeeees 13 NSC JB RS 485 Junction Box 14 NSC JB Specifications 15 NSC 485 232 I RS 485 to RS 232 Converter 15 iii 44019 01 Rev E 05 10 NanoPZ 2 8 3 0 3 1 3 2 3 3 3 4 4 0 4 1 4 2 4 3 5 0 5 1 5 2 5 3 5 4 5 5 5 6 6 0 6 1 6 2 44019 01 Rev E 05 10 Ultra High Resolution Motion System NSC 485 232 I Specifications 16 NanoPZ System Environmental Specifications 16 Getting Started 17 Unpacking and Handling 17 Inspection for Damage 17 Inventory of Parts
4. Ch3b Curve generation an Ch3a Curve generation 12 Ch2b Curve generation 13 Ch2a Curve generation 14 Ch1b Curve generation 15 Chla Curve generation 16 OA jog wheel position 17 OB jog wheel position 18 ENC push button on jog wheel 19 INC increase button 20 DEC decrease button 21 PGM Programming mode 22 PGC In Circuit Debugger and ICSP programming clock pin 23 PGD In Circuit Debugger and ICSP programming data pin 24 Temperature bit 0 25 Temperature bit 1 26 Temperature bit 2 27 Temperature bit 3 28 Temperature bit 4 29 Temperature bit 5 30 Temperature bit 6 31 Temperature bit 7 gt Newport 44019 01 Rev E 05 10 44 NanoPZ Ultra High Resolution Motion System Parameters Example Rel Commands PR Syntax Parameters Example Errors gt Newport 14PH TS TE Temperature Celsius BYTE 1024 500 Controller number integer from 0 to 255 Returns 32 status bits from controller 14 as a decimal number such as 147843 One way to convert this to binary is to use the Windows sci entific calculator Click on Start gt Programs gt Accessories gt Calculator gt View gt Scientific gt Dec decimal Copy and paste in the decimal num ber then click on Bin binary to display the binary equivalent The binary bits 0 32 are read from right to left
5. MO Syntax Parameters Example Errors Rel Commands MX Syntax Parameters 44019 01 Rev E 05 10 MO Motor ON ST Stop motion Motor OFF xxMF Turns motor off for controller xx XX Controller number integer from 0 to 255 AMF Turns motor off for controller 4 MO Motor ON Motor ON xxMO Turns motor on for controller xx XX Controller number integer from 0 to 255 3MO Turns motor on for controller 3 Driver fault Err 2 Driver fault thermal shut down No motor connected Err 8 No motor connected MF Motor OFF ST Stop motion Select switchbox channel xxMXy Causes controller xx to select switchbox chan nel y Upon execution the controller loads set tings from its non volatile memory for channel y If there is no switchbox or a motion is in progress the command is ignored and an error message is generated NOTE It is recommended to set motor off MF before switching to a new channel to avoid actu ator drift xxMX Returns active channel number for controller xx Returns 0 when no channel is active XX Controller number integer from 0 to 255 y Switchbox channel integer from 1 to 8 7 gt Newport NanoPZ Ultra High Resolution Motion System Example AMX8 Selects switchbox channel 8 connected to con troller 4 and loads appropriate settings from its non volatile memory 4MX Returns 4MX 8 for the above example where 4 is the controller number and
6. Ultra High Resolution Motion System USER S MANUAL Newport Experience Solutions NanoPZ Ultra High Resolution Motion System Warranty 44019 01 Rev E 05 10 Newport Corporation warrants that these products will be free from defects in material and workmanship and will comply with Newport s published specifications at the time of sale for a period of one year from date of shipment If found to be defective during the warranty period products will either be repaired or replaced at Newport s option To exercise this warranty write or call your local Newport office or representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the products freight prepaid to the indicated service facility Repairs will be made and the products returned freight prepaid Repaired products are warranted for the remainder of the original warranty period or 90 days whichever occurs last Limitation of Warranty The above warranties do not apply to products which have been repaired or modified without Newport s written approval or products subjected to unusual physical thermal or electrical stress improper installation misuse abuse accident or negligence in use storage transportation or handling This warranty also does not apply to fuses batteries or damage from battery leakage THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRE
7. LED Indicators on PZC SB Switchbox A bank of eight tri color LEDs on the front panel of the switchbox indicates the status of each channel LED Status GREEN RED YELLOW OFF Connected and selected Solid Disconnected and selected Solid Connected and unselected Solid Disconnected and unselected Off 25 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 5 0 Utility Software 5 1 5 2 44019 01 Rev E 05 10 Overview The NanoPZ Util utility software provides computer access to the most commonly used PZC200 controller functions including changing controller configuration monitoring status and issuing move or jog commands This program is distributed on CD ROM with the PZC200 controller RS 232 Communications Setup Cabling For computer control a PZC200 controller or a PZC SB switchbox has to be connected to the RS 232 COM Port of the PC via an RS 485 to RS 232 converter Model NSC 485 232 I Please refer to section 3 for hookup diagrams The converter is normally secured directly to the computer but a straight through serial data cable with a male DB9 connector on one end and a female DB9 connector on the other end can also be used to connect the converter and PC COM Port Setup 19200 bps 8 data bits no parity 1 stop bit xON xOFF flow control Handshake Protocol Handshaking between the host computer and controller is automatically provided by the uti
8. and computer commands are disabled Zeroing the actuator position Pressing the control knob for longer than 2 sec will set 23 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System the current actuator position to 0 and will clear the error of the controller if allowed by hardware This function is of main use in combination with remote mode It also resets the current positions with respect to the software limits Scanning of switchbox channels When a PZC200 is connected to a switchbox it must first learn which switchbox channels are connected and store this information in non volatile EEPROM Simultaneously press down the V and P buttons for 2 seconds and the controller will scan all eight channel positions The 8 LEDs of the switchbox will light up in sequence Following the scan the LED for each connected channel except one will be yellow The LED for the one selected channel will be green if there is no problem or red if there is an error or problem such as the actuator is at its limit of travel Selection of switchbox channel Press the V left button to decrement and P right button to increment the active switchbox channel The LED associated with the active switchbox channel will turn green no problem or red error or problem encountered When toggling the switchbox channels the PZC200 will skip those channels that had no PZA12 connected during the last scan Moving the actuator Simply
9. 8 is the current selected switchbox channel Errors y other than 1 8 Err 7 Parameter out of range Y missing Err 38 Command parameter missing Actuator y not in the table Err 214 Invalid axis Command during motion Err 226 Command not allowed during motion No switch box Err 227 Command not allowed Rel Commands BX Scan switchbox SA Set controller address OR Zero position Syntax xxOR Set position of active actuator of controller xx to 0 When a motion is in progress the command is ignored and an error message is generated Parameters XX Controller number integer from 0 to 255 Example SOR Set position of the actuator connected to con troller 5 to 0 Errors Motion in progress Err 226 Command not allowed during motion Rel Commands SL Set negative left travel limit SR Set positive right travel limit ST Stop motion Newport e 43 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System PH Get hardware status Syntax xxPH Returns 32 status bits from controller These are reported as a decimal number which needs to be converted to binary Bit Description LED red LED green EPROM WP DRS switch to default address Error motor detection disconnected SCL I2C Serial clock SDA I2C Serial data Ch4b Curve generation WOlO NID Al HP wl mle Chda Curve generation p
10. Figure 16 Connections 2 Controllers and 1 Supply gt Newport 44019 01 Rev E 05 10 20 NanoPZ gt Newport Ultra High Resolution Motion System Controller Pa PZC200 Actuator y e RS 485 Cable NSC CB1 0 3 m m NSC CB3 2 7 m 5 RS 232 to RS 485 Converter th Pe NSC 485 232 1 fl To RS 232 Computer Port Power Supply NSC PS25 m Ly Power Cord Figure 17 Connections 1 Controller 1 Supply and Computer Control Controller 1 dl PZC200 fi Actuator 1 ra PZAI2 Actuator 2 Controller 2 PZC200 ES RS 485 Cable NSC CB1 0 3 m NSC CB3 2 7 m RS 485 Junction Box 47 NSC JB NSC PSC3 3 m i i L TT f l RS 232 to RS 485 Converter Power Cable NSC PSC1 1m gt Power Cable NSC PSC1 1 m g NS085232 J lt ToRS 232 Computer Port EDH a Power Cord NSC PSC3 3 m a Figure 18 Connections 2 Controllers 1 Supply and Computer Control Power Supply _ NSC PS25 44019 01 Rev E 05 10 21 NanoPZ Ultra High Resolution Motion System 44019 01 Rev D 09 07 Power Supply NSC PS25 Power Cord Power Cable U NSC PSC3 Controller if PZC200 Driver Cable Fi 44415 01 1 8 m Cesta E RS 485 Cable NSC CB2 1 8 m RaZ RS 485 Cable _NSC CBI 0 3
11. Save settings to non volatile memory Yes No SR Set positive right travel limit Yes Yes ST Stop motion Yes No TE Read error code No Yes TP Read current position No Yes TS Controller status No Yes VE Read controller firmware No Yes QD Newport 44019 01 Rev E 05 10 38 NanoPZ Ultra High Resolution Motion System 6 3 Command Set Details BX Syntax Parameters Example Errors Rel Commands BZ Syntax gt Newport Scan switchbox xxBX xxBX XX 2BX 2BX Causes controller xx connected to a PZC SB switchbox to scan channels 1 8 and load a table which indicates which channels are connected to an actuator After the scan process if the last selected actuator is not found the first detected actuator is selected If no actuator is found the selected actuator is set to 0 Reports which switchbox channels from 1 8 are connected to an actuator for controller xx Response is a decimal representation of bina ry actuator8 actuator7 actuatorl where actuatorx 1 if it was connected and 0 if not Controller number integer from 0 to 255 Causes controller 2 connected to a PZC SB switchbox to scan channels Reports which switchbox channels of controller 2 were connected to an actuator during last scan For example the response 2BX 38 would indi cate that channels 1 2 and 5 were connected to an actuator 38 21 22 25 Bit0 corresponds to channel 1 and bit7 to channel
12. Status About Controll Channel Position micro steps Figure 27 View all Screen The View all screen shows at a glance which controller s are on the bus and which have an associated switchbox with channel s In case of a controller with no switchbox the channel is always 0 In case of a controller with a switchbox there may be 1 to 8 lines for that controller with channel running from 1 to 8 Also shown is the name of actuator associated with each controller and channel as assigned by the user in the Setup screen amp Newport 33 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Status Tab NanoPZ Util Move Setup View all Status About r Controller status Motor OH motion not in progress r Hardware status Green LED D Temperature bit 0 Red LED Q Temperature bit 1 D Motor detection Temperature bit 2 Device Reset Button Temperature bit 3 Button A DEC O Temperature bit 4 Button B NC Q Temperature bit 5 Jog Knob Switch Temperature bit 6 D Encoder D Temperature bit 7 Encoder B Temperature 33 2 C Figure 28 Status Screen The Status tab shows the controller and hardware status The controller status gets displayed by a short text message The hardware status gets displayed by 17 light buttons for the status of the actual LEDs limit switches buttons encoders and controller temperature A red button
13. asking if you want to initialize another controller If you do plug in the next not initialized controller and press the YES button The Initialize Controller window will open again allowing you to enter an address for that controller Note that only one not initialized controller may be connected to the network at a time for initializing re gt Newport NanoPZ Ultra High Resolution Motion System 5 5 Network Scan Scan controllers Do you want to scan for controllers on the bus Note that the time taken to scan the bus is proportional to the Maximum scan controllers addresses selected Maximum scan controller address 2 0 to 255 Yes No T Do not ask this question at startup Figure 24 Scan Controllers Screen After all controllers have been initialized the Scan Controller window shown above will open Enter the maximum address to scan for then press the Yes button The software will then scan the bus find any controllers and find any switchboxes connected to them It will also discover and identify any PZA actuators Note that while the highest possible address is 255 the time to scan the bus is proportional to the actual number of addresses to be scanned If the check box at the bottom left of the screen is checked the program will not scan the bus the next time the program is started Following the scan the main screen will open gt Newport 29 44019 01 Rev E 05 10 NanoPZ Ultra Hi
14. move in the positive gt or negative lt direction from its current position Move Setup View ali Status About Actuator name Right travel Limit Left travel Limit PZA12 10000000 micro steps 10000000 micro steps Save to controller Scan switchbox Restore to default Figure 26 Setup Screen The Setup tab brings up three data fields which apply to the selected controller and channel Actuator name Right travel limit Sets the name for the current select controller and channel Up to 10 characters are ue allowed but no space tab or Sets the value of the positive software limit or right allowed range of travel This value must be greater than 0 Negative travel limit Sets the value of the negative software limit or left allowed range of travel This value must be less than 0 The function of the other 3 buttons are as follow 44019 01 Rev E 05 10 gt Newport NanoPZ Ultra High Resolution Motion System Save to Controller Press to save any setup changes into the controllers non volatile EEPROM Scan Switchbox Press if you have added or disconnected an actuator to the selected switchbox This will initiate a new bus scan followed by an updated View all tab screen Restore to default Press to load default values into non volatile EEPROM of the controller View all Tab NanoPZ Util Move Setup View all
15. this equipment in an explosive atmosphere General Cautions Observe these cautions when operating or servicing this equipment Use only specified replacement parts e Follow precautions for static sensitive devices when handling this equipment This product should only be powered as described in this manual e There are no user serviceable parts inside the NanoPZ system components If this equipment is used in a manner not specified within this manual the protection provided by the equipment may be impaired Do not position this equipment in a location that would make it diffi cult to disconnect the AC power cord gt Newport 44019 01 Rev E 05 10 2 NanoPZ Ultra High Resolution Motion System 1 3 Manual Conventions The following conventions are used in this manual e Acronyms appear on the first occurrence enclosed in parentheses following their definition An acronym is a word formed from the initial letters of a string of words Example Read Only Memory ROM e Italics or boldface text are used as an alternative to quotation marks to highlight special text such as key board keys onscreen buttons or text entries Examples Press Enter AU command BJ Features amp Specifications 2 1 NanoPZ System Overview Newport s NanoPZ family of piezo motor actuators and controllers is designed to provide cost effective nanometer scale remote positioning of manual stages and optical mounts in a wid
16. 15 Vdc 4 6 A max The NSC PS25 comes with a 3 m 10 ft DC power output cable which is terminated by a coaxial DC power output connector with a 5 5 mm outer ground and a 2 5 mm positive center This connector can be plugged directly into the power jack of a PZC200 controller or split cable NSC PSC3 which will then in turn power the controller The connector can also be plugged into a power cable which branches power to two 2 DC power output connectors By daisy chaining branching power cables it is possible to power multiple controllers or switchboxes from the same supply gt Newport 44019 01 Rev E 05 10 12 NanoPZ Ultra High Resolution Motion System me j EH _a Power Cord Power Cable 3m Power Supply Sa NSC PS25 Figure 10 NSC PS25 Power Supply to One load mm i P fee T Figure 11 NSC PS25 Power Supply to Multiple Loads NSC PS25 Specifications Input voltage 90 246 Vac Input current max 1 5 A Output voltage nominal 15 Vdc Output current max 4 6 Supply efficiency 85 switching type Case size H x W x L 30 x 58 x 132 mm 1 2 x 2 3 x 5 2 Length of DC power output cord 3 m 10 ft DC power output connector Coaxial 5 5 mm outer ground 2 5 mm posi tive center DC power output branching cables optional NSC PSC1 1m 3 3 ft two DC power output connectors optional NSC PSC3 3 m 10 ft two DC power
17. 8 No switch box connected Err 227 Command not allowed MX ID Select switchbox channel Actuator description Restore EEPROM content to default xxBZ Restores all non volatile EEPROM factory default values for controller xx 39 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Parameters XX Controller number integer from 0 to 255 Example 5BZ Restores factory default settings for controller 5 Rel Commands RS Reset controller The following default parameters are set by the BZ command e Current position 0 OR e Actuator description PZA12 D e Positive software limit 10000000 SR e Negative software limit 10000000 SL e Controller address 0 SA e Switchbox channel 0 no switchbox MX ID Actuator description Syntax xxIDnn Assigns a user defined name to an active actua tor connected to controller xx directly or via a switchbox xxID Reads back user defined name of active actua tor of controller xx Parameters XX Controller number integer from 0 to 255 nn User defined actuator name up to 10 ASCII char acters long such as PZA12 1 Tab and space are automatically removed is not allowed Example 3IDaxisY Set description for active actuator on controller 3 to axisY 3ID Returns description of active actuator of con troller 3 Errors nn with more than 10 characters Err 7 Parameter out of range nn missing Err 38 Comm
18. 85 The following are some key points of understanding for the more complex systems Power Branching The NSC PS25 power supply comes with a DC power output cord which can be plugged into a PZC200 controller or split cable NSC PSC3 Multiple controllers or switchboxes can be powered by the same supply by daisy chaining branching power cords A single supply can power up to 7 controllers that are simultaneously driving actuators RS 485 Branching When an NSC JB RS 485 junction box is used up to five PZC200 controllers or PZC SB switchboxes can be connected to the same RS 485 line and be addressed digitally from the same computer COM port Junction boxes can be daisy chained For computer control an NSC 485 232 I converter is always required to convert the RS 232 signal of the computer to the RS 485 signal This converter is normally attached to the computer COM port When a switchbox is used with computer gt Newport NanoPZ Ultra High Resolution Motion System gt Newport control the switchbox is connected via a first RS 485 cable to the converter and via a second RS 485 cable to the associated controller When a switchbox is used without a computer there still has to be an RS 485 cable between the switchbox and controller so that these can exchange data A PZC SB switchbox always acts as a connection hub between the associated controller actuators and computer if any The switchbox can only drive one actua
19. A12 actuator and PZC200 piezo motor controller are high precision laboratory instruments Only use and store in a clean laboratory environment Avoid mechanical shock Max operating temperature 5 C to 40 C Recommended operating temperature 20 C to 25 C Operating relative humidity lt 85 non condensing Storage temperature 0 60 C Storage relative humidity lt 85 non condensing Altitude lt 2 000 m 6 562 feet Installation category Il Pollution degree 2 Use location Indoor use only gt Newport 44019 01 Rev E 05 10 16 NanoPZ Ultra High Resolution Motion System 3 0 Getting Started 3 1 3 2 3 3 gt Newport Unpacking and Handling It is recommended that the NanoPZ system components be unpacked in your lab or worksite rather than at the receiving dock Unpack the system carefully as small parts and cables are included Inspect the box carefully for loose parts before disposing of the packaging Save the packaging material in case you ever need to ship your equipment Inspection for Damage The NanoPZ system components have been carefully packaged at the factory to minimize the possibility of damage during shipping Inspect the box for external signs of damage or mishandling and inspect the contents for damage If there is visible damage to the equipment upon receipt inform the shipping company and Newport Corporation immediately WARNING
20. Controller status Read error code Position relative xxPRnn Initiates a move of nn psteps for controller xx nn The speed of the motion depends on the motion length given by nn For displacements bigger than 192 steps the final position will be round ed to the closest full step The command gets not accepted while a motion is in progress For details about step length please refer to sections 2 2 2 and 6 1 4 Controller number integer from 0 to 255 Relative position integer from 10 000 000 to 10 000 000 psteps There are 16 pisteps per full step 25PR1000 Initiates relative move of 1000 steps for actu ator connected to controller 25 Driver fault Err 2 Driver fault thermal shut down nn out of range Err 7 Parameter out of range No motor Err 8 No motor connected 45 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Rel Commands RS Syntax Parameters Example SA Syntax Parameters Example Errors SL Syntax 44019 01 Rev E 05 10 nn missing Err 38 Command parameter missing Motor off Err 213 Motor not enabled Command during motion Err 226 Command not allowed during motion ST Stop motion JA Start jog motion Reset controller xxRS Resets processor in controller xx NOTE The RS command also resets the controller address to 0 XX Controller number integer from 0 to 255 31RS Soft resets cont
21. Do not attempt to operate this equipment if there is evi dence of shipping damage or if you suspect shipping dam age Damaged equipment may present additional hazards to you Contact Newport technical support for advice before attempting to plug in and operate damaged equip ment Inventory of Parts Verify that you have received all of the system components that you have ordered Refer to the connection diagrams in this manual to verify that you have ordered and received all of the components that you will need 17 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 44019 01 Rev E 05 10 3 4 The following is a list of parts included with the PZC200 KT Piezo motor actuator and controller kit e 1 x PZC200 controller e 1x PZA12 actuator e 1x NSC PS25 power supply with AC power cord e 1 x NSC PSC3 DC power cable 3 meter e 1 x User s manual e 1 x CD Rom with utility software If you are missing any hardware have questions about the hardware that you have received or need to order additional hardware please contact Newport Interconnecting Components A NanoPZ system can range from simple to complex A simple system may consist of one PZA12 actuator one PZC200 controller and one NSC PS25 power supply Complex systems may include multiple PZC SB switchboxes and multiple PZC200 controllers powered by the same or several power supplies commanded by the same computer via RS 4
22. Restore EEPROM content to default 39 ID Actuator description 40 JA Start fog MOTION 41 MF Motor OFF 42 MO MotorONisssiessinmesnissnrenibeenstess 42 MX Select switchbox channel 42 OR Zero position ses 43 PH Get hardware status cccsseeseeseeseeeeeeee 44 PR Position relative 45 RS Reset controller 46 SA Set controller address 46 SL Set negative left travel limit 46 SM Save settings to non volatile memory 47 SR Set positive right travel limit 48 ST Stop motion 49 TE Read error code 49 TP Read current position ccccseseeseeeeeee 50 TS Controller status 51 VE Read controller firmware 51 7 0 Maintenance amp Service 0 0 ee 52 7 1 Enclosure Cleaning 52 7 2 Technical Support 52 Service Form v 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System EU Declaration of Conformity gt a a a E a a a a oO io a a a S E gt S ES dat EA ENES nk A P D S We declare that the accompanying product identified with the C Ge SO mark complies with requirements of the Electromagnetic LS NAS Compatibility Directive 89 336 EEC and the Low Voltage Directive SA Go 73 23 EEC CI ENES ee A x Re Product Name NanoPZ OY ON CRE iS a Co Model Number PZA12 NanoPZ actuator PZC200 NanoPZ cont
23. SR3000 Sets positive software limit to 3000 for con troller 7 7SR Read back positive software limit from con troller 7 nn out of range Err 7 Parameter out of range nn missing Err 38 Command parameter missing No actuator connected to nn channel at last scan Err 214 Invalid axis error Command during motion Err 226 Command not allowed during motion JA Start jog motion PR Position relative OR Zero position gt Newport NanoPZ Ultra High Resolution Motion System ST Syntax Parameters Example Rel Commands TE Syntax Parameters Example gt Newport SL Set negative left travel limit Stop motion xxST XX 1ST JA MO PR Stops motion in progress on controller xx Controller number integer from 0 to 255 Stops motion on controller 1 Start jog motion Motor ON Position relative Read error code xxTEnn Returns last memorized error code on controller xx and clears error if it is no more present Error Code Description 0 No error 2 Driver fault thermal shut down 6 Unknown command 7 Parameter out of range 8 No motor connected 26 Positive software limit detected 27 Negative software limit detected 38 Command parameter missing 50 Communication Overflow 213 Motor not enabled 214 Invalid axis 226 Command not allowed during motion 227 Command not allowed 240 Jog wheel over s
24. SSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT SPECIAL OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS First printing 2005 2006 by Newport Corporation Irvine CA All rights reserved No part of this manual may be reproduced or copied without prior written approval of Newport Corporation This manual is provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings Newport Corporation 1791 Deere Avenue Irvine CA 92606 USA Part No 44019 01 Rev E gt Newport NanoPZ Table of Contents gt Newport Ultra High Resolution Motion System Warranty RE DR ERP EE DL ii EU Declaration of Conformity 00 eee eeeeeeeseeneereeeeeneens vi Preface tersera NN re cae vii Confidentiality amp Proprietary Rights 0 0e010 vii Service Information vii Sales Tech Support amp Service viii 1 0 1 1 1 2 1 3 2 0 2 1 2 2 2 3 2 4 2 5 2 6 2 7 Newport Corporation USA Calling Procedure viii Safety Precautions 1 Definitions and Symbols s 1 European Union CE Mark cceeseeseeseeseeeeeeeeees 1 CUS CSA Mark os ccsscsccssssisesaudssesnsedsssnsansscecovaaasaesssaenesne 1 Direct Current DC ss 1 Warnings and Cautions
25. and parameter missing Rel Commands MX Select switchbox channel BX Scan switchbox gt Newport 44019 01 Rev E 05 10 40 NanoPZ Ultra High Resolution Motion System JA Start jog motion Syntax xxJAnn Starts a jog motion with speed setting nn for controller xx If motion is in progress command is ignored and an error message is generated For details about step length please refer to sections 2 2 2 and 6 1 4 xxJA Reads back current jog speed setting from controller xx Parameters XX Controller number integer from 0 to 255 nn Jog setting integer from 0 to 7 nn value Jog Speed 0 0 pstep s 1 3 2 pstep s 2 16 pstep s 3 80 pstep s 4 400 pstep s 5 2 000 pstep s 6 10 000 pstep s 7 48 000 pstep s Example 5JA 5 Starts jog motion at 2 000 ustep s for controller 5 5JA Returns last set jog speed of controller 5 Errors Driver fault Err 2 Driver fault thermal shut down nn out of range Err 7 Parameter out of range No motor Err 8 No motor connected nn missing Err 38 Command parameter missing Motor off Err 213 Motor not enabled No actuator connected to nn channel at last scan Err 214 Invalid axis Command during motion Err 226 Command not allowed during motion Newport e 41 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Rel Commands MF Syntax Parameters Example Rel Commands
26. are explained in the next chapters The Stop Motion button at the bottom of the screen stops motion for that channel The Exit button exits NanoPZ Util NOTE Only one PZC200 controller can be communicated with at any given time by NanoPZ Util software Control as well as the Stop Motion but ton apply only to the selected controller and controller channel Move Tab From the move screen see Figure 25 you can access to the following functions Motor ON Motor OFF To enable any motion you must turn the Motor ON When you don t want to do any further motion on that actuator you might want to turn the motor OFF ZERO Sets the current position to zero This function is useful for instance for referencing the actuator with respect to its software limits JOG Grab the blue bar with your mouse and move it right or left to start a jog motion in positive right or negative left direction The farther you move the bar the faster the actuator moves There are 7 predefined jogging speeds in each direction The current jog speed gets displayed under the speed bar When you release the blue bar the actuator stops motion RELATIVE MOVES Provides three fields with relative gt Newport 31 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Setup Tab NanoPZ Util positions in micro steps Press on the corresponding lt or gt button and the actuator will make that relative
27. ations Typical applications include fiber alignment micro assembly cell manipulation probing alignments of laser cavities phase matching and laser beam stabilization PZA12 actuators incorporate an innovative piezo stepping motor that ensures highly reliable motion with 30 nm sensitivity over 12 5 mm travel and no loss of position when power is removed To avoid contact surface wear PZA12 actuators feature a non rotating tip And a cover prevents damage to the drive train and protects from dust debris and other pollutants PZA12 actuators are compatible with an array of Newport products For details please refer to the latest Newport catalog or the Newport web page www newport com The PZA12 actuators get controlled by the PZC200 controller either directly or via one of the eight output ports of a PZC SB switchbox Motion Principle PZA12 actuators base on a piezo stepping motor This motor consists of several multi leg piezo elements When gt Newport NanoPZ Ultra High Resolution Motion System gt Newport supplying these piezo elements with a special voltage pattern the legs lift up move forward and come down again similar to human motion A number of these piezo elements are arranged in a circle and coupled by friction to a rotating nut This nut in turn is coupled to a screw that is blocked in rotation and that generates the resulting forth and back motion of the actuator tip On average one c
28. cifications Input connector computer side 6 position 4 wire RJ11 plug Output connectors controller side Five 6 position 4 wire RJ11 jacks Signal processing None Device is passive Environmental See NanoPZ system specs section 2 8 NSC 485 232 I RS 485 to RS 232 Converter The NSC 485 232 I is a line powered half duplex RS 485 to RS 232 converter which allows the RS 232 COM port of a computer to command one or multiple PZC200 controllers via a single RS 485 line A 6 position 4 wire RJ11 jack is on the controller side A female DB9 connector is on the computer side Normally the converter is plugged directly into the computer and is secured to the computer with two connector screws As an alternative the converter can be attached to the computer by means of a straight through serial data cable readily available in computer stores with a male DB9 connector on one end and a female DB9 connector on the other end 15 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Figure 14 NSC 485 232 Converter NSC 485 232 I Specifications Input connector RS 232 side DB9 connector female Output connector RS 485 side 6 position 4 wire RJ11 jack Power source RS 232 handshake lines Dimensions H x W x L 23 x 33 x 76 mm 0 9 x 1 3 x 3 0 Environmental See NanoPZ system specs section 2 8 2 8 NanoPZ System Environmental Specifications CAUTION The PZ
29. e range of opto mechanical systems NanoPZ system components as of June 2005 may include one or more of the following Model Description PZA12 NanoPZ actuator 12 5 mm travel PZC200 Hand held controller for PZA12 NSC PS25 AC power supply for PZC200 NSC PSC1 1 meter power supply output cable NSC PSC3 3 meters power supply output cable NSC 485 2321 RS 485 to RS 232 converter USB 232 RS 232 to USB converter Requires Windows operating system NSC JB Junction box to split 1 RS 485 channel into to 5 chan nels NSC CB1 0 3 meter RS 485 cable NSC CB3 2 7 meter RS 485 cable PZC200 KT Kit including 1 x PZA12 actuator 1 x PZC200 controller 1 x NSC PC25 power supply and 1 x NSC PSC3 power supply cable PZC SB Switchbox allowing one PZC200 to drive up to 8 PZA12 actuators Included cables 41791 01 1 8 m 6 ft power cable to controller Newport e 3 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 44019 01 Rev E 05 10 15769 02 1 8 m 6 ft driver cable to controller NSC CB2 1 8 m 6 ft RS 485 cable to controller 2 2 PZA12 Actuator Figure 4 PZA12 Actuator Figure 5 Mounted PZA12 General Use The PZA12 is a piezo motor driven actuator allowing nanometer scale remote adjustment of manual positioning stages and opto mechanical components over large distances in hard to reach spaces and in hazardous hands off applic
30. ean Union CE regulations 6 Figure 2 CSA Mark C US CSA Mark The presence of the C US CSA mark indicates that the equipment has been designed tested and certified as complying with all applicable US and Canadian safety standards Direct Current DC pr Figure 3 Direct Current Symbol This symbol indicates that the equipment is suitable for DC power only Newport e 1 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 1 2 Warnings and Cautions The following are definitions of Warnings Cautions and Notes that may be used in this manual to call your attention to important information regarding your safety to the safety and preservation of your equipment and to important tips WARNING Situation has potential to cause bodily harm or death CAUTION Situation has potential to cause damage to property or equipment NOTE Additional information the user or operator should consider General Warnings Observe these general warnings when operating or servicing this equipment Read all warnings on the unit and in the operating instructions e Do not use this equipment in or near water Only connect the power cord to a grounded power outlet e Route power cords and other cables so they are not likely to be damaged Disconnect power before cleaning the equipment Do not use liquid or aerosol cleaners use only a damp lint free cloth To avoid explosion do not operate
31. ensions H x W x D 35 x 182 x 151 mm 1 4 x 7 2 x 5 9 Case material Aluminum painted Connector for power input Coaxial mini jack positive center Connector to computer if used 6 position 4 wire RJ11 for RS 485 1 0 Connectors to actuators 8 connectors 6 pin mini DIN female Connectors to controller 6 position 4 wire RJ11 for RS 485 I O Coaxial mini jack positive center for power 6 pin mini DIN female for drive signal Cables to controller NSC PSC3 3 m 10 ft power cable 15769 02 1 8 m 6 ft driver cable NSC CB2 1 8 m 6 ft RS 485 cable Environmental See NanoPZ system specs section 2 8 Newport oe 11 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Power Supply NSC PS25 Power Cord Pi JAS aol fa Power Cable U SS NSC PSC3 Controller PZC200 Driver Cable 44415 01 1 8 m RS 485 Cable NSC CB2 1 8 m RS 485 Cable NSC CB1 0 3 m NSC CB3 2 7 m i RS 232 to RS 485 Converter LT NSC 485 232 1 To RS 232 Computer Port tl T Actuator 1 Actuator 2 PZA12 PZA12 FE Figure 9 Switchbox Connections 2 5 NSC PS25 Power Supply The NSC PS25 is a switching power supply designed to drive up to 7 PZC200 controllers either directly or through a PZC SB switchbox Input power can be 90 246 Vac 47 63 Hz Output power is
32. gh Resolution Motion System 5 6 Working with the Main Screen After the bus scan the Main Screen of the NanoPz Util software appears NanoPZ Util Move Setup View all Status About MOTOR OFF ZERO Jog speed 0 0 pstep s F Relative moves Increment 1 4 l a Increment2 32 Increment 3 1256 Figure 25 Move Screen Navigation through the screen is by means of five tabs Move Setup View all Status About With all five tabs the top 25 of the screen remains the same as follows The headline at the top shows the name of the channel as assigned by the user under the Setup tab PZA12 in this example The Controller field shows the bus address of the controller You can select a different controller by typing in a different number or by selecting from the list The Channel field shows the active channel number of the switchbox associated with the controller to the left When no switchbox is used this field is always blank A different switchbox channel can be selected by typing in a different number of by selecting from the list of gt Newport 44019 01 Rev E 05 10 30 NanoPZ Ultra High Resolution Motion System available channels The micro steps field shows the current position in micro steps For further information about the step size please refer to section 2 2 2 The five tabs Move Setup View all Status About bring up five sub screens which
33. her mode the status of each channel is indicated by the color of a bank of tri color LEDs labeled 1 8 When used switchbox serves as the connection hub between the power supply computer if applicable and actuators The controller detects the presence of the switchbox and automatically enables or disables functionalities as required Power The side of the switchbox features two coaxial mini jacks one labeled with a symbol for power in one labeled Controller Newport 44019 01 Rev E 05 10 10 NanoPZ Ultra High Resolution Motion System RS 485 1 0 In Remote mode the switchbox communicates with the computer via a first RS 485 cable and in turn communicates with the controller via a second RS 485 cable The side of the switchbox features two RJ11 jacks one labeled PC one labeled Controller In Local mode only the RS 485 cable to the controller is used Drive Signals The switchbox can drive up to eight PZA12 actuators and in turn is driven by the controller The back of the switchbox features eight female 6 pin mini DIN connectors for actuator cables The side of the switchbox features a single female 6 pin mini DIN connector for connection to the controller PZC SB Specifications Controller input channels 1 multiplexed by switchbox Actuator output channels 8 only channel active at a time Power requirements 15 Vdc 40 mA Channel status indication One tri color LED per channel Case dim
34. il utility program described in the previous section of this manual utilizes these commands Address Field Since multiple PZC200 controllers may be placed on the RS 485 Bus or be connected to a PZC SB Switchbox each controller has an assigned address xx or controller number from 0 to 255 By decoding the address field of the incoming message the controller can determine if the message is intended for it This address xx needs to be prefix to each command If the address does not match a specific controller that controller ignores the message If the address is missing there is no error message but the address is implied to be 0 If the address is out of range i e larger than 255 there is no error message and no controller will respond Set or Query Commands Commands are either Set or Query commands A Set command changes a setup parameter or initiates an action A Query command which is always terminated by a question mark reads back setup or status information When the controller responds to a query it first sends out the received command and then follows with the requested information For example if 234VE is sent to controller 234 it may respond with 234VE 1 0 depending on installed firmware version gt Newport 44019 01 Rev E 05 10 36 NanoPZ Ultra High Resolution Motion System gt Newport Saving Settings to Non Volatile Memory When a setting is changed using a Set command the new sett
35. indicates High a gray button indicates Low These buttons refer to some of the information that gets also returned by the PH Get Hardware Status command For further details please refer to the PH command in section 6 1 4 QD Newport 44019 01 Rev E 05 10 34 NanoPZ Ultra High Resolution Motion System gt Newport About Tab NanoPZ Util Move Setup View all Status About Controller address k PZC200 Controller Version 2 7 NanoPZ Util Version 1 0 1 Newport corporation 1791 Deere Avenue Irvine CA 92606 http www newport com Technical Support 800 222 6440 or 949 863 3144 Copyright 2005 Newport Corporation All rights reserved Figure 29 About Screen Pressing the About tab brings up a screen which shows the current versions of the software and controller firmware as well as Newport contact information for technical support 35 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 6 0 ASCII Command Set 6 1 Command Set Introduction This section describes the supported two letter ASCII commands that may be used to configure and operate the PZC200 controller in Remote mode Yellow LED when the controller is connected to a computer either directly or via a PZC SB switchbox These commands work with LabView Visual Basic C or any other computer application that can issue ASCII commands via a computer COM port For instance Newport s NanoPZ Ut
36. ing is written to RAM and is implemented immediately When power is removed and re applied the change is lost unless the setting has been saved to non volatile memory using the SM command Always execute an SM command if you want changed parameters to be saved Motion cCommands All motion related commands are referenced in units of micro step One micro step equals a linear displacement of the PZA12 actuator tip of approx 10 nm However because of the special nature of the piezo motor used in the PZA12 the actual step length can vary from actuator to actuator and depends further on load speed direction of motion and other parameters For highly repeatable or accurate positioning tasks an additional external feedback should be used For further details on the motion principle and step length please see also section 2 2 2 37 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 6 2 Command Set Summary Command Short Command Query Name Description ia BX Scan switchbox Yes Yes BZ Restore EEPROM content to default Yes No ID Actuator description Yes Yes JA Start jog motion Yes Yes MF Motor OFF Yes No MO Motor ON Yes No MX Select switchbox channel Yes Yes OR Zero position Yes Yes PH Get hardware status No Yes PR Position relative Yes No RS Reset controller Yes No SA Set controller address Yes No SL Set negative left travel limit Yes Yes SM
37. lity software The paragraph below is for background purposes only To prevent buffer overflow when data is transferred to the PZC200 input buffer a CTS RTS hardware handshake protocol is implemented The host computer controls transmission of characters from the controller by enabling a Request To Send RTS signal once the controller s Clear To Send CTS signal is ready Before sending any further characters the controller waits for a CTS from the host computer As soon as its command buffer is full the controller de asserts CTS Then as memory becomes available because the controller has read and executed commands in its buffer it reasserts the CTS signal to the host computer gt Newport NanoPZ Ultra High Resolution Motion System 5 3 Software Installation The utility program allows computer control of most features available in the PZC200 controller It is designed to run on a Pentium class PC with a minimum of 64 MB of RAM and Windows 98 2000 NT or XP To install the utility program load the distribution CD and double click on NanoPZutilsetup exe The program will give you the option of where to load the files or you can use the default directory C Program Files Newport NanoPZ Util After installation is complete open the NanoPZ Utility by double clicking on the newly created icon shown to the left on your desktop The Set Communication Port window will open Enter the Port to which the controller i
38. llows a single PZC200 to control up to eight PZA12 actuators one channel at time Two primary control modes are selectable whether or not a switchbox is used Local manual control or Remote computer control Selection of Local or Remote is by pressing the knob of the PCZ200 The control mode is indicated by the color of a tri color LED Remote is the default mode at power up For details on Local operation see Section 4 of this manual gt Newport 7 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 44019 01 Rev E 05 10 In Local mode the rotary knob at the front of the PZC200 is turned to select one of seven 7 speed settings for each direction plus a rest position Rotate the knob in one direction and the actuator moves in that direction Rotate the knob in the other direction and the actuator moves in that other direction The farther the knob is rotated the faster the actuator moves The knob is spring loaded and returns to its zero point when released thus stopping motion Remote computer control makes use of the PZC200 s digitally addressable RS 485 port which can be interfaced to a COM port or USB port of a PC The interface is provided by an RS 485 to RS 232 converter an optional RS 232 to USB converter an optional 1x5 RS 485 junction box plus cables all available from Newport In Remote mode the PZC200 accepts and executes ASCII commands These can be issued in
39. m NSC CB3 2 7 m RS 232 to RS 485 Converter mA Ts a NSC 485 232 1 D Fl T To RS 232 Computer Port th Actuator 1 Actuator 2 PZA12 PZA12 Figure 19 Connections 1 Controller 1 Switchbox and 2 Positioners gt Newport NanoPZ Ultra High Resolution Motion System 4 0 Local Operation 4 1 4 2 gt Newport Operating Modes The PZC200 controller has two operating modes Local manual mode and Remote computer mode At power up the Controller will default into remote mode In remote mode the controller will respond to computer communication only and the speed adjustment knob is disabled In local mode the speed adjustment knob is enabled and the computer communication is disabled Toggling between local and remote mode is done by pressing the control knob of the PZC200 The control mode is indicated by the color of a tri color LED see section 4 3 1 for details Tri color Control status LED knob Figure 20 PZC200 side view Local Manual Control Selection of Remote or Local mode Press the control knob to toggle between Local and Remote The new selection will only become effective after any ongoing motion has stopped In Remote mode yellow LED the controller responds to computer commands only and the control knob is disabled In Local mode green LED the control knob is enabled
40. mer or subsequently developed or acquired without reliance on the Newport Programs or 4 approved by Newport for release without restriction Service Information This section contains information regarding factory service for the source The user should not attempt any maintenance or service of the system or optional equipment beyond the procedures outlined in this manual Any problem that cannot be resolved should be referred to Newport Corporation vii 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Sales Tech Support amp Service North America amp Asia Europe Newport Corporation MICRO CONTROLE Spectra Physics S A 1791 Deere Ave 1 rue Jules Guesde B t B Irvine CA 92606 USA ZI Bois de l pine BP189 Sales 91006 Evry Cedex France 949 253 1461 or 800 222 6440 x31461 e mail sales newport com Sales amp Technical Support 33 0 1 60 91 68 68 Technical Support e mail france newport fr com 949 253 1406 or 800 222 6440 x31406 e mail tech newport com Service amp Returns 33 0 2 38 40 51 55 Service RMAs amp Returns 949 253 1694 or 800 222 6440 x31694 e mail istd service newport com Newport Corporation USA Calling Procedure If there are any defects in material or workmanship or a failure to meet specifications promptly notify Newport s Returns Department by calling 1 800 222 6440 US customers only or by visiting our website at www newport com
41. ng motion Err 226 Command not allowed during motion JA Start jog motion PR Position relative OR Zero position SR Set positive right travel limit Save settings to non volatile memory xxSM 6SM Saves controller configuration settings from RAM to non volatile EEPROM memory This command should be issued after modifying set tings so that these are not lost when controller is powered off Controller number integer from 0 to 255 Saves changes for controller 6 to non volatile memory 47 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Rel Commands SR Syntax Parameters Example Errors Rel Commands 44019 01 Rev E 05 10 ID Actuator description SA Set controller address SL Set negative left travel limit SR Set positive right travel limit Set positive right travel limit xxSRnn Sets value of right software limit or extreme right range of travel This value must be larger than 0 If motion is in progress command is not accepted and an error message is generated Because of the non repeatable special nature of the PZA12 the software limits can only act as approx limits For further details please refer to sections 2 2 2 and 6 1 4 xxSR Reports value of positive right software limit XX Controller number integer from 0 to 255 nn Positive software limit integer from 0 to 10 000 000 psteps 7
42. output connectors Environmental See NanoPZ system specs section 2 8 Newport oe 13 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 44019 01 Rev E 05 10 2 6 NSC JB RS 485 Junction Box The NSC JB is a passive junction box which allows a single 6 position 4 wire RJ11 jack to be branched into up to five jacks By using a single NSC JB a single NSC 485 232 I converter connected to a computer COM port can command up to five digitally addressable PZC200 controllers NSC JB junction boxes can also be daisy chained to increase the number of controllers The theoretical maximum number of controllers connected to a single RS 485 line is 32 Physically the NSC JB consists of a white plastic case with five RJ11 jacks plus a 3 6 m 12 foot cable terminated by an RJ11 plug Two mounting ears are provided All like pins are wired in parallel with no active components Figure 12 NSC JB RS 485 Junction Box T QD Newport NanoPZ Ultra High Resolution Motion System 2 7 gt Newport To PZC200 z To RS 485 Piezo motor i controllers Junction Box 3 To PZC200 Ee RS 485 Piezo motor d Junction Box 2 controllers HONN C RS 485 i Junction Box 1 W SA LS To RS 232 O Computer Port RS 232 to RS 485 Converter NSC 485 232 1 Figure 13 Branching with Multiple RS 485 Junction Boxes NSC JB Spe
43. peed XX 23TE Controller number integer from 0 to 255 Returns code of latest memorized error on con troller 23 NOTE When it is possible the error is cleared by this command 49 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System TP Read current position Syntax xxTP Returns the position in micro steps of the active actuator of controller xx For details about step length please refer to sections 2 2 2 and 6 1 4 xxTPnn When a switchbox is connected anda switch is done from actuator n1 to actuator n2 the position of nl is stored This command returns the latest stored posi tion of the actuator connected to controller xx and switchbox channel nn Parameters XX Controller number integer from 0 to 255 nn Channel 1 8 of a switchbox connected to con troller xx if applicable This term is only used when there is a switchbox If nn is omitted the position is returned for the active actuator associated with controller xx Example 25TP3 Returns position value in psteps of actuator connected to switchbox channel 3 of controller 25 25TP Returns position value in psteps of active actu ator associated with controller 25 NOTE The controller operates in an open loop fashion and it returns the theoretical value of the position Because of the possible sliding of the piezoelectric motor the actual actuator position may be different from the read back value Er
44. r 0 6 A 15 Vdc In standby mode 0 1 A 15 Vdc Compatible devices PZA12 piezo motor actuator Connectors Coaxial mini jack for power input 6 position 4 wire RJ11 jack for RS 485 6 pin mini DIN female to actuator Dimensions W x D x H 50 x 150 x 50 mm 2 x 6 x 2 Weight 0 250 kg 0 55 Ib Environmental See NanoPZ system specs section 2 8 2 MOUNTING HOLES 9 28 7 Sn 145 9 gt Newport 9 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 2 4 PZC SB Switchbox Figure 8 PZC SB Switchbox Front and Side The PZC SB switchbox is an intelligent multiplexer or switch which allows one PZC200 controller to drive up to eight PZA12 actuators one channel at a time The controller mode can be either Local or Remote mode In Local mode the channel is selected by using the V and P buttons on the PZC200 Pressing the P right button increments the selected channel pressing the V left button decrements the selected channel When pressing the V and P buttons simultaneously for about 2 seconds the controller scans all eight channel positions of the PZC SB to learn which channels are connected Following the scan the PZC200 will activate only those channels that had an actuator connected during the scan and will skip those channels that had no actuator connected In Remote mode the channel is selected under computer control In eit
45. returns within the warranty period to obtain a Return Material Authorization Number RMA Return the product to Newport Corporation freight prepaid clearly marked with the RMA and we will either repair or replace it at our discretion Newport is not responsible for damage occurring in transit and is not obligated to accept products returned without an RMA Email rma service newport com When calling Newport Corporation please provide the Customer Care Representative with the following information e Your Contact Information Serial number or original order number e Description of problem i e hardware or software To help our Technical Support Representatives diagnose your problem please note the following conditions e Is the system used for manufacturing or research and development e What was the state of the system right before the problem Have you seen this problem before If so how often e Can the system continue to operate with this problem Or is the sys tem non operational e Can you identify anything that was different before this problem occurred gt Newport 44019 01 Rev E 05 10 viii NanoPZ Ultra High Resolution Motion System NanoPZ Ultra High Resolution Motion System 1 0 Safety Precautions 1 1 Definitions and Symbols CE Figure 1 CE Mark European Union CE Mark The CE mark indicates that the equipment has been designed and tested to comply with all applicable Europ
46. roller QC ES PZC SB switchbox 6 OSS one A x Ca Year C mark affixed 2005 amp ES CRE x OY Type of Equipment Electrical equipment for measurement control Ce Ou ores SS and laboratory use es Se E ee SS Standards Applied aS Compliance was demonstrated to the following standards to the an gt ORA extent applicable Ne A x Q BS EN61326 1 1997 A1 A2 A3 Electrical equipment for o es measurement control and laboratory use EMC requirements 6y oy P i EN This equipment meets the CISPR 11 Class A Group 1 radiated and es OY quip p 8 oO conducted emission limits os CAC m a gt 4 oN e BS EN 61000 3 2 2001 Harmonic current emissions Class A OS e BS EN 61000 3 3 2002 Voltage fluctuations and flicker Lo Se 8 i renee A x RS e BS EN 61010 1 2001 2 Edition Safety requirements for electrical aN equipment for measurement control and laboratory use LS oO gt EA De Alain Danielo Dan Dunahay ue ve 9 es Re ue NAS CRE x eS fore 36 ars VP European Operations Director of Quality Ss GC Systems K mA ne 6S Zone Industrielle 1791 Deere Avenue Ce ee 45340 Beaune la Rolande France Irvine Ca USA ES XD Ee E EEEREN IR IRIN ISIN IR IRIS IR IRIS IRIS PRIA ROKK OE SK OE NK OR NK KER SR NKR SR ER NEAR NER MEISE gt Newport 44019 01 Rev E 05 10 vi NanoPZ Ultra High Resolution Motion System Preface gt Newport Confidentiality amp Proprie
47. roller 31 Set controller address xxSAnn Changes current controller address xx to new address nn XX Controller number integer from 0 to 255 nn New controller address integer from 0 to 255 0SA14 Changes controller address from 0 to 14 nn out of range Err 7 nn missing Parameter out of range Err 38 Command parameter missing Set negative left travel limit xxSLnn Sets value of negative software limit or extreme left allowed range of travel This value must be less than 0 If motion is in progress command is not accepted and an error message is generated gt Newport NanoPZ Ultra High Resolution Motion System Parameters Example Errors Rel Commands SM Syntax Parameters Example gt Newport xxSL xx nn Because of the non repeatable special nature of the PZA12 the software limits can only act as approx limits For further details please refer to sections 2 2 2 and 6 1 4 Reports value of negative left software limit Controller number integer from 0 to 255 Negative software limit integer from 10 000 000 to 0 steps 7SL 100 Sets negative software limit to 100 for con 7SL troller 7 Reads back negative software limit from con troller 7 nn out of range Err 7 Parameter out of range nn missing Err 38 Command parameter missing No actuator connected to nn channel at last scan Err 214 Invalid axis error Command duri
48. rors No actuator was connected on nn channel during latest scan Response xxTPnn and Err 214 Invalid axis No Switchbox xxTPnn will generate Error 227 Invalid command Rel Commands JA Start jog motion PR Position relative gt Newport 44019 01 Rev E 05 10 50 NanoPZ Ultra High Resolution Motion System TS Syntax Parameters Example Rel Commands VE Syntax Parameters Example gt Newport controller status xxTS Returns a status number for controller xx Motor ON motion not in progress 81 Q Motor ON motion in progress 80 P Motor OFF motion not in progress 64 XX Controller number integer from 0 to 255 25TS Returns status number for controller 25 MF Motor OFF MO Motor ON TE Read error code TP Read current position Read controller firmware xxVE Returns firmware version in Major Minor format XX Controller number integer from 0 to 255 3VE Returns firmware version of controller 3 such as 1 2 where 1 is the major and 2 is the minor firmware revision 51 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 7 0 Maintenance amp Service 7 1 7 2 44019 01 Rev E 05 10 CAUTION There are no user serviceable parts inside the PZA12 PZC200 and PZC SB Work performed by persons not authorized by Newport Corporation will void the warranty Enclosure Cleaning The NanoPZ sy
49. s connected such as Com4 press Open a message Communication COM4 is opened appears and then press the OK button Communication setting R5232 configuration Port COM4 Baud rate 19200 Data bits 8 Stop bits 1 Parity none Flow control Xon Xoff Terminator CR LF Communication COM4 is opened Figure 21 Set Communication Port Screen Newport oe 27 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System 44019 01 Rev E 05 10 5 4 Controller Initialization Connect a controller to the specified port If the program finds that the controller is not initialized controller address equal to zero as shipped from the factory the Initialize Controller window shown below will open Type the desired unique address 1 255 into the Controller Address field then press OK Initialize controller At least one not initialized controller with address equal to zero has been detected on the bus Please do the following 1 Leave only one uninitialized controller on the bus 2 Enter a desired address for this controller 3 Press OK button Press Exit button to exit this application Controller address 1 to 255 F Figure 22 Initialize Controller Screen NanoPZ Util 2 J Do you want to initialize another controller Non Figure 23 Initializing Another Controller Screen After initializing each controller the Initialize Controller screen opens
50. stem components should only be cleaned with a soapy water solution Do not use an acetone or alcohol solution as this will damage the finish of the enclosure Technical Support This section contains information regarding factory service for NanoPZ system components The user should not attempt any maintenance or service of the equipment Any problem that cannot be resolved should be referred to Newport Corporation Telephone 1 800 222 6440 Fax 1 949 253 1479 Address Newport Corporation Service Department 1791 Deere Ave Irvine CA 92606 Email tech newport com or istd service newport com Web Page URL http www newport com Support Technical_Help http www newport com Support Service_and_Returns Contact Newport to obtain information about factory service Telephone contacts number s are provided on a Service Form Please have the following information available Equipment model number PZA12 PZC200 PZC SB e Equipment Serial Number e Problem Description document this by using the Service Form If the instrument is to be returned for repair the user will be given a Return Authorization Number that needs to be referenced in their shipping documentation Complete a copy of the Service Form shown below and fax it to Newport at the number indicated gt Newport NanoPZ Ultra High Resolution Motion System Servi ce Form ae Local Representative Fax Name Ret
51. tary Rights Reservation of Title The Newport programs and all materials furnished or produced connected there with Related Materials contain trade secrets of Newport and are for use only in the manner expressly permitted Newport claims and reserves all rights and benefits afforded under law in the Programs provided by Newport Corporation Newport shall retain full ownership of Intellectual Property Rights in and to all development process align or assembly technologies developed and other derivative work that may be developed by Newport Customer shall not challenge or cause any third party to challenge the rights of Newport Preservation of Secrecy and Confidentiality and Restrictions to Access Customer shall protect the Newport Programs and Related Materials as trade secrets of Newport and shall devote its best efforts to ensure that all its personnel protect the Newport Programs as trade secrets of Newport Corporation Customer shall not at any time disclose Newport s trade secrets to any other person firm organization or employee that does not need consistent with Customer s right of use hereunder to obtain access to the Newport Programs and Related Materials These restrictions shall not apply to information 1 generally known to the public or obtainable from public sources 2 readily apparent from the keyboard operations visual display or output reports of the Programs 3 previously in the possession of Custo
52. tor at a time under control of a single controller and it does not materially add to power consumption There always has to be a set of three cables between the switchbox and its associated controller a Controller Switchbox cable 1 8 meter 6 ft cable with two male 6 pin mini DIN connectors P N 15769 02 b RS 485 data cable 1 8 m 6 ft cable with two 6 position 4 wire RJ11 connectors P N 15769 02 c DC power supply cable 3 m 10 ft extension cable with a male coax power connector on one end and a female coax connector on the other end P N NSC PSC3 Please refer to the illustrations below for examples of connected systems Only apply power after you have interconnected all system components and have studied the chapter 4 of this manual entitled Local Operation 19 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Controller fii i PZC200 5 a Power Cord gt JJ Actuator a al EE Power Supply NSC PS25 Figure 15 Connections 1 Controller and 1 Supply fi Controller 2 L PZC200 LS QU Controller 1 TT PZC200 Actuator 1 PZA12 cS l Actuator 2 PZA12 Power Cable NSC PSC1 1 m gt NSC PSC3 3 m Power Cable NSC PSC1 1 m Q NSC PSC3 3 m C FI 2 Power Cord Power Supply NSC PS25
53. turn the control knob in the forward or reverse direction and let go to stop motion There are seven speed settings for each direction As the knob is turned farther in either direction the velocity will increase for that direction The knob is spring loaded and the resting position corresponds to zero speed The speed settings are part of the default setting and can not be modified Resetting RS 485 bus address Use a small diameter rod to press the reset button on the back of the controller This will reset the RS 485 bus gt Newport 44019 01 Rev E 05 10 24 NanoPZ Ultra High Resolution Motion System gt Newport 4 3 address of the controller to its factory default setting of zero 0 so that the controller can be recognized as not initialized by the NanoPZ Util utility software Once a desired RS 485 bus address has been entered the controller can then be digitally addressed in Remote mode using either the NanoPZ Util utility software or ASCII commands NOTE The reset button must be pressed during a 3 second period to restore the RS 485 adress Reading the LED Status Lights LED Indicator on PZC200 Controller A tri color LED adjacent to the control knob indicates the controller operating mode and operating conditions LED YELLOW GREEN RED Solid REMOTE mode LOCAL mode Error Condition not in motion not in motion a hor REMOTE mode LOCAL mode Blinking in motion in motion
54. two primary ways NanoPz Util software distributed on CD with each PZC200 For details see Section 5 of this manual Other user written software that issues and receives ASCII commands as documented in Section 6 of this manual Tri color __ Control knob for status LED e Velocity control e Zeroing current position e Local or Remote mode selection Buttons to e Scan Switchbox e Select Switchbox channel Flat portion of housing to seat against optical table Reset button for RS 485 address Mounting holes for bolts to optical table Figure 7 PZC200 top and bottom views gt Newport NanoPZ Ultra High Resolution Motion System PZC200 Specifications Number of controlled axes 1 without PZC SB switchbox 8 with PZC SB switchbox Operating modes Local manual control mode Remote computer control mode Toggling between local and remote control Pressing down on control knob Controls Local manual mode Rotate knob to adjust speed Select active switchbox channel Toggle between local and remote mode Set current position to zero Controls Remote computer mode ASCII commands I O via RS 485 port Motion commands Micro steps 1 micro step equals approx 10 nm of linear motion of a PZA12 depending on load speed and other parameters Important Step size is not 100 accurate or repeatable see section 2 2 2 for details Power requirements When driving actuato
55. urn authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems Newport 53 44019 01 Rev E 05 10 Newport Experience Solutions Visit Newport Online at www newport com North America amp Asia Europe Newport Corporation MICRO CONTROLE Spectra Physics S A 1791 Deere Ave 1 rue Jules Guesde Bat B Irvine CA 92606 USA ZI Bois de l pine BP189 91006 Evry Cedex Sales France 49 253 1461 00 222 6440 x31461 a 231461 or 800 Sales amp Technical Support e mail sales newport com 33 0 1 60 91 68 68 Technical Support e mail france newport fr com 949 253 1406 or 800 222 6440 x31406 e mail tech newport com Service amp Returns 33 0 2 38 40 51 55 Service RMAs amp Returns 949 253 1694 or 800 222 6440 x31694 e mail istd service newport com
56. ycle or one step of the piezo motor results in a linear motion of the actuator tip of approx 160 nm Further electronic break down of steps into 16 micro steps results in an average motion of approx 10 nm per micro step IMPORTANT NOTE Because of the friction coupling between the piezo legs and the rotating nut the actual step size is not 100 accurate or repeatable It can vary from actuator to actuator and depends further on load speed direction of motion and other parameters For highly repeatable or accurate posi tioning tasks an additional external feedback should be used PZA actuators feature jam nut proof hard stops that limit the max min travel In addition software limits can be set to further reduce the travel range and to avoid motor stalling Anyhow motor stalling does not damage the actuator 5 44019 01 Rev E 05 10 NanoPZ Ultra High Resolution Motion System Mechanical Compatibility The PZA12 has a 0 375 x 40 pitch threaded shaft that is compatible with many Newport and other manufacturers mounts and manual stages With this common interface PZA12 actuators can directly replace manual adjustment screws in many existing setups and provide a huge variety of combinations A mounting nut and wrench is included with each actuator For a complete list of Newport compatible mechanics please refer to the latest Newport catalog or the Newport web page www newport com
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