MPC Series Panel-Mount Mass Flow Controller User`s Manual
Contents
1. Name Model No Q ty Mounting bracket 81446917 001 1 Connector 1 User s Manual CP UM 5317E 1 SAFETY PRECAUTIONS ZAAWARNING Warnings are indicated when mishandling this product might result in death or serious injury to the user A CAUTION Cautions are indicated when mishandling this product might result in minor injury to the user or only physical damage to this product A WARNING Never allow combustible gases especially gases that are within explo sive limits to pass through this controller Doing so might result in an explosion Do not use this controller for gases other than standard compatible gas types nitrogen air argon and carbon dioxide Do not use this controller for medical instruments Prevent foreign matter from entering the device If rust water droplets oil mist or dust in the pipes enters the device measurement or control error or damage to the device might occur If there is a possibility of foreign matter entering the device provide an upstream filter strainer or mist trap capable of eliminating foreign mat ter 0 1 um or greater in diameter Be sure to inspect and replace the fil ter at regular intervals Make sure that wire scraps shavings water etc do not enter inside the case Failure to heed this caution may lead to malfunction or equipment failure Z CAUTION e Use this controller within the operating differential pressure range Also do not apply pressure outside the2. azbil Yamatake Corporation Advanced Automation Company Specifications are subject to change without notice 1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan Printed in Japan 1st Edition Issued in Nov 2003 W URL http www azbil com 5th Edition Issued in Aug 2007 A Printed on recycled paper 07
3. By changing the function setup the operation mode selection can be made by an external switch input For the details refer to gt MPC Series Panel Mount Mass Flow Controller Installation CP SP 1153E Item 4 3 Selecting the Operation Mode Troubleshooting E Alarm code display Countermeasure Flowrate deviation Insufficient alarm judgment delay time Request for repair service if there is lower limit alarm Insufficient power voltage Insufficient no problem on the items listed on inlet pressure etc or excessive the left operating temperature Flowrate deviation Insufficient alarm judgment delay time Request for repair service if there is upper limit alarm _ valve trouble sensor trouble etc no problem with the delay time Valve overheat During the control or fully open mode When the gas is continuously shut prevention limit is the gas is forcibly stopped by external off by external device set the set operated device for more than 5 minutes flowrate to zero or valve fully closed mode Sensor trouble foreign object attached If sensor is not restored after turning to sensor or entering of hydrogen or the power OFF then request for repair helium gas service Data corrupted due to electrical noise Request for repair service Sensor error I O correction data error Sensor calibration Data corrupted due to data error electrical noise User setup Power shutoff during writing of data dat
4. 5 Press the ENT key gt gt The present setting value initial value 1 Nitrogen air indicated on the lower display flashes 6 Press the A key or V key to select the desired gas type out of those listed below and then press the ENT key gt gt Set the gas type setting 0 Mixed gas The compensation factor C F of each gas type must be set by user 1 Nitrogen air 3 Argon 4 Carbon dioxide CO2 7 Press DISP key gt gt Display is returned to the one shown at power supply ON Note In case of mixed gases the compensation factor C F setting is required in parameter setup For details on parameter setup refer to gt MPC Series Panel Mount Mass Flow Controller Installation CP SP 1153E Chapter 5 APPLICATION OPERATION 33 gas type setting is indicated H Switching Displays Each press of the DISP key switches the display as shown below Power ON y 1 Instantaneous flowrate indication Upper 7 segment display a key 1s or more Set flowrate indication Lower 7 segment display y DISP key Less than 1s 2 Operation mode indication Lower 7 segment display i N Instantaneous flowrate indication Upper 7 segment display 4 Mu Sarip flowrate indication i 2 y DISP key 3 Integrated flowrate indication DISP key y DISP key 1 The operation mode indication is not displayed when the 0 no oper ation mode_selection by key setting is selected at the op
5. Jack 3 5 R Aa No LP amp re NS Nes a Ne H T S A o N 3 i Hi J x A 2 Ret 8 i Connection No 9 13 5 10 port IN Applicable panel late thickness is 2 to 7mm Panel cutout unit mm Vertical gang mounting i 48 X N 3y95 Horizontal gang mounting 20min 45 35 48 X N 3 9 L Individual mounting 405 0 45 38 20min N Number of mounted units Connector specifications e Part No MCVW1 5 9 STF 3 5 Phoenix Contact Mfg e Wire type Either of solid wire or stranded wire applicable e Compatible cable 0 08 to 1 5mm AWG 28 to 16 e Appropriate length of stripped wire 7mm 7mm e Compatible screw driver Tip size 2 5 x 0 4mm a flat head driver Wiring e Power supply 24Vde POWER 24V L POWER GND e Event output Load 8 Event output 1 Load Event output 2 L E SIGNAL GND e External switch input o o External switch input 1 co oO External switch input 2 O SIGNAL GND e Analog input output only for the model with analog I O func tion Oto5Vor WW_ 7 Analog input 1 to 5V input __ Analog output SIGNAL GND Oto5Vor 1 to 5V output e RS 485 communication only for the model with RS 485 communication function DA
6. ______ 7 DA DB 8 DB sG SIGNAL GND C Handling Precautions e Be sure to turn off the power before doing the wiring work Not doing so could cause equipment failure e Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction e Be sure that the event output does not exceed the spec ified output rating of this controller When driving a rely use the relay with a built in diode for coil surge absorp tion Doing so might cause faulty operation Part names and functions Basic Operation Ss MPC oe TER H H H H SP DISP key CED HHEH Lower display o0o0000 06l UO8 L Ok SP SP2 SP3 EVI EV2 lt vV A azbil Operation lamp ENT key 7 I lt V A keys Definition of terms SP Set Point Set flowrate value PV Process Variable Instantaneous flowrate value control flowrate Operation mode 3 mode of valve fully closed valve control valve fully open Upper display Displays the instantaneous flowrate value 7 segment display When the display is switched it also displays the integrated flowrate value upper 4 digits parameter setup item function setup item or alarm details Lower display Displays the set flowrate 7 segment display When the display is switched it also displays the operation mode inte grated flowrate values lower 4 digits value dri
7. 7mm of steel Mounting bracket x 2 Panel cutout NI NN y Main body Mounting bracket screws yo 100 CJ Handling Precautions To fasten this controller onto the panel tighten the mount ing bracket screws and turn one more half turn when there is no play between the bracket and panel Excessively tightening the screws might deform the con troller case Piping connection e When this controller is mounted on a panel use piping which does not give a stress to the controller case during and after the piping work e Connect the piping so that the gas flows in the direction from IN to OUT as indicated on the body e After connecting piping check for any gas leaks CJ Handling Precautions e When metal piping is directly connected to the piping connection port this controller cannot be mounted on a panel Doing so will deform or damage the case e When leak check is performed using leak check liquid ensure to avoid spillage or contact of liquid on to the case electrical wires and connectors Doing so might cause malfunction or faulty operation E External Dimensions Body unit mm 9 IT aa S55 Connector accessory H Mounting bracket accessory 2A 61 12 7 44 8 Connection 7 tise port OUT
8. pressure resistance range Doing so might damage this controller Be sure to use this product within the flowrate range stated in the speci fications To prevent excessive flow use a suitable means to control the supply pressure or use a throttle valve or the like to control the flowrate If the flowrate exceeds the upper limit both the flowrate display and the output value may indicate considerably lower values than the actual flowrate If damage could result from the abnormal functioning of this device include appropriate redundancy in the system design This controller is not provided with the capability of completely closing the valve If the valve is needed to be completely closed provide a shutoff valve separately When the external valve is closed it is necessary also to fully close the MPC valve using either of the following methods e Make the flowrate to zero e Set the operation mode to the fully closed mode If this valve is maintained in control mode despite of closing the external shutoff valve zero flowrate large excess flowrate will instantly flow when the external shutoff valve is opened If the external shutoff valve is closed for more than 5 minutes under control mode or valve forced fully open in the case of the MPC0020 the valve over heat limit 77 oper ates and the valve driving current is forcibly limited If this status exists for more than 30 minutes the valve is forced to full close condition When this contr
9. CP UM 5317E MPC Series Panel Mount Mass Flow Controller User s Manual Thank you for purchasing an MPC mass flow controller Before operating this product described in this user s manual please take note of the points below regarding safety Be sure to keep this manual nearby for handy reference RESTRICTIONS ON USE This product has been designed developed and manufactured for general purpose application in machinery and equipment Accordingly when used in applications outlined below special care should be taken to implement a fail safe and or redundant design concept as well as a periodic maintenance program e Safety devices for plant worker protection e Start stop control devices for transportation and material handling machines e Aeronautical aerospace machines e Control devices for nuclear reactors Never use this product in applications where human safety may be put at risk 2003 Yamatake Corporation ALL RIGHTS RESERVED This manual explains the handling precautions mounting wiring basic operation and main specifications See the user s manuals listed below for detailed handling procedures setting methods etc These manuals also contain information on using various functions Please read if necessary e MPC Series Panel Mount Mass Flow Controller Installation CP SP 1153E e MPC Series Panel Mount Mass Flow Controller Communications CP SP 1154E Check the following items when removing the MPC from its package
10. a error Request for repair service Set data again C Handling Precautions e Fini Valve overheat prevention limit is operated only for the MPC0020 If L sensor error occurs the control flowrate will become indefinite e When canceling the alarm make the alarm reset opera tion Alarm reset operation When the ENT key is continuously pressed while the instanta neous flowrate is displayed the alarm is reset after 3 seconds E Other troubles Countermeasure Match the primary pressure setting function setup 2 with the actual primary Flowrate display does not Zero point deviation due to the become zero even in spite influence of pressure of an actual zero flowrate Gas type setup is incorrect pressure used or use the PV forced zero Display does not become Condensation on sensor function function setup 2 OFF even if the valve is Foreign object attached to sensor eMatch the gas type setting fully closed function setup 8 with the actual gas used Insert a mist trap upstream eRequest for repair service Flowrate does not stabilize Operation differential pressure eReduce the primary pressure range is exceeded elnsert a regulator upstream Large primary pressure fluctuations Change the regulator pressure setting or apply Regulator interference the PV filter function setup 23 eLarge pressure loss Increase the pipe diameter Large fluctuation in primary pre
11. allowed Integra Indication range 10 00 to 0 0 to 0 0 to Oto tion 999 999 99L 9 999 999 9L 9 999 999 9L 99 999 999L function Indication resolution 0 01L 0 1L 0 1L 1L Backup timing 1 At each 5L count 1 At each 20L count 1 At each 50L count 1 At each 200L count 2 At each 1 hour from the previous backup Flowrate Output scale 0 to full scale flowrate scaling available output Standard output range O to 5Vdc 1 to 5Vdc selectable by function setup We Event Number of outputs 2 points output Output rating 30Vdc 15mA max open collector non insulated output Integrated pulse output 100ms 10 when the integrated pulse output is selected width Integrated pulse rate 0 01L pulse 0 1L pulse 0 1L pulse 1L pulse External Number of inputs 2 points switch Other party circuit type Non voltage contact or open collector input Power Rating 24Vdc current consumption 300mA max supply Allowable voltage range 22 8 to 25 4Vdc ripple 5 max Material of gas contacting parts Brass Ni plated stainless steel Teflon Viton Connection method Rc1 8 Mounting orientation Display surface must face to front inlet port down outlet port up Mass Approx 300g Accessory parts Mounting bracket 81446917 001 wiring connector Applicable standard EN61326 1997 Amendment A1 1998 A2 2001 1 L min standard indicates the volum
12. e flowrate L min per minute converted to 20 C and 101 325 kPa 1 atmospheric pressure The ref erence temperature can also be changed to 0 C 25 C and 35 C The controllable flowrate range varies according to the gas type Refer to the following table MPC9500 MPCO0002 Control flowrate range Setting indication resolution Control flowrate range Setting indication resolution L min standard L min standard L min standard L min standard Nitrogen air 0 020 to 0 500 0 002 0 08 to 2 00 0 01 Argon 0 020 to 0 500 0 002 0 08 to 2 00 0 01 Carbon dioxide 0 012 to 0 300 0 001 0 040 to 1 200 0 005 MPC0005 MPC0020 Control flowrate range Setting indication resolution Control flowrate range Setting indication resolution L min standard L min standard L min standard L min standard Nitrogen air 0 10 to 5 00 0 02 0 4 to 20 0 0 1 Argon 0 10 to 0 50 0 02 0 4 to 2 00 0 1 Carbon dioxide 0 06 to 3 00 0 01 0 3 to 16 0 0 1 2 The temperature and pressure at calibration 3 Differential pressure required for obtaining full scale flowrate When outlet preesure 0 0MPa gauge 4 Operation is possible even under the required differential pressure However the controllable flowrate range will become narrow For details refer to gt MPC Series Panel Mount Mass Flow Controller Installation CP SP 1153E 5 Applicable only to the model with analog input output function
13. e following locations e Locations subject to high and low temperature and humidity e Locations subject to sudden changes in temperature and condensation e Locations subject to be filled with corrosive gases and flammable gases e Locations whose atmospheres contain large amounts of dirt and dust salt conductive substances such as iron powder water droplets oil mist and organic solvents e Locations directly subject to mechanical vibration or shock e Locations subject to direct sunlight and rain e Locations subject to splashing of oil or chemicals e Locations close to sources of electrical noise e Locations where strong magnetic or electrical fields are generated E Mounting Procedure Joint connection e Connect the joint by holding the hexagonal section of the pipe connection port of the body with a spanner or wrench C Handling Precautions Do not hold the case of the controller with your hand when screwing the joint into the connection port Doing so might deform the body 9 G P e Screw the joint with an appropriate torque as recom mended by the joint manufacturer Exceeding the torque limits will cause damage the connection port e Apply appropriate amount of sealant Do not coat the top most thread of the screw Remove any dirt or burrs from inside the joint Good example Bad example N 7 Y Q 9 Sealant Sealant Mounting on a panel The mounting panel should be used with a thickness of 2 to
14. eration mode EIT 2 It S009 selection 4 2 in function setup 2 If no operation is made while the operation mode is displayed the dis play is automatically returned to the 1 instantaneous flowrate indica tion after approx 10 seconds 3 When the ENT key is pressed for approx 3 seconds while the inte grated flowrate is displayed the integrated flowrate is reset 4 The multi setup flowrate is displayed only when the multi setup 1 to 3 is selected at flowrate setup number selection 4 in function setup 5 If no setup change is made while the multi setup flowrate is dis played the display will automatically return to the 1 instantaneous flowrate indication after approx 10 seconds Note For details on function setup method refer to gt MPC Series Panel Mount Mass Flow Controller Installation CP SP 1153E Chapter 5 APPLICATION OPERATION E Setting the flowrate Follow the procedure below to change the SP value set flowrate 1 Press the DISP key gt gt The instantaneous flowrate and SP value set flowrate are dis played Display at power supply ON 2 Press the A key or V key to change the SP value gt gt The digit being changed flashes In addition when the lt key is pressed the digit being changed is moved 3 When you have reached the target value press the ENT key gt gt At this point the SP value is stored C Handling Precautions If the DISP key is
15. oller is mounted on a panel use piping which does not give stress to the controller case during and after the piping work Ifa metal piping is directly connected to the pipe connection port of this controller the case might be deformed or damaged The part between the power supply circuit of this controller and the I O circuit is not isolated Therefore ensure that the power supply of this controller is isolated from the power supply for external devices insulate the power supply If a common power supply is used for the controller and the external devices it might cause malfunction or faulty operation For the model with analog I O function do not apply a negative voltage or extremely large voltage more than 5V to the analog setting input terminal Doing so might cause malfunction or faulty operation Use Yamatake Corporation s SurgeNon if there is the risk of power surges caused by lightning Failure to do so might cause fire or faulty operation Introduction This device is a compact and lightweight mass flow controller for the general industrial market The integration of an array of advanced tech nologies the ultra high speed uF Micro Flow thermal flow velocity sensor made with proprietary Yamatake technology an ultra compact proportional solenoid valve a new flow channel system and advanced actuator control technology has made this panel mount mass flow con troller possible E Location Avoid mounting this controller in th
16. on Main specifications lodel No MPC9500 MPC0002 alve type Proportional solenoid valve alve operation Normally closed when de energized N C Standard full scale flowrate 0 500 2 00 5 00 20 0 Nitrogen conversion value 1 L min standard L min standard L min standard L min standard Standard compatible gas types _ Nitrogen air argon carbon dioxide CO2 Control Control range 1 4 to 100 FS MPC0005 MPC0020 2 to 100 FS Response Within 1 0s typ to set point 2 FS Accuracy i 2 FS max at standard temperature and differential pressure Repeatability t1 FS max Influence of temperature Within 0 1 FS C Influence of Q2 gt 40 FS 0 7 FS max 0 4 FS max 0 2 FS max 0 2 FS max pressure 10 FS lt 1 2 FS max 0 7 FS max 0 3 FS max Q flow rate Q lt 40 FS per 0 1MPa Q lt 10 FS 2 FS max 1 2 FS max 0 5 FS max Pressure Standard differential pressure 2 0 2MPa Inlet pressure 0 2MPa gauge Outlet pressure 0 0MPa gauge Required differential 0 05MPa 0 05MPa 0 1MPa 0 15MPa pressure 3 Operating differential 0 3MPa max 0 05 to 0 3MPa pressure range 4 Pressure resistance empe Standard operating rature temperature 2 0 5MPa gauge 25 C Allowable operating 10 to 50 C temperature range Allowable storage 10 to 60 C temperature range Humidity Allowable operating humidity range 10 to 90 RH no condensation
17. pressed without pressing the ENT key in the step 3 the SP value is not stored and returns to the previous value Note By changing the function setup the multi setup max 4 units or analog voltage setting only for the model with analog I O function can be made For the details refer to gt MPC Series Panel Mount Mass Flow Controller Installation CP SP 1153E Item 4 2 Setting the flowrate E Selecting the operation mode fully closed control fully open When the DISP key is pressed for less than 1 second while the instantaneous flowrate is displayed the display at power supply ON the upper display maintains the instantaneous flowrate indication and the lower display shows the operation mode enabling the selection of operation mode Follow the procedure below to select the operation mode 1 Press the DISP key gt gt The operation mode is displayed 2 Press the A key or V key gt gt The display is changed as shown below Select the desired operation mode Display flashes Wy w e A key ty V key Fultz Fully open mode oe an Control mode A key AY V key GFF Fully closed mode OFF A ivikey 3 Press the ENT key to set the operation mode gt gt The operation mode is set C Handling Precautions If no operation is made while the operation mode is dis played the display will automatically return to the instanta neous flowrate indication after approx 10 seconds Note
18. ssure according to flowrate Temperature reference does not Poor accuracy Match the temperature reference match the reference flowmeter Can be changed in the function setup 4 Regulator is vibrating slightly Change the regulator pressure setting Foreign object attached to sensor _ Request for repair service Model selection table Basic Control ka Mate Connec Gas No Option Option Option Option Code Specifications model No flow range rial __ tion typejuse 1 2 3 4 MPC Panel mount mass flow controller 9500 0 020 to 0 500 Limin standard 1 0002 0 08 to 2 00 L min standard 1 0005 0 10 to 5 00 L min standard 1 0020 _ 0 4 to 20 0 L min standard 1 B Model with integrated display B Brass R Rc1 8 N Nitrogen air 2 1 L min standard indicates the volume 2 o None flowrate L min per minute converted to 7 With analog input output function 20 C and 101 325 kPa without RS 485 communication function 1 atmospheric pressure 2 With RS 485 communication function The reference temperature can also be without analog input output function changed to 0 C 25 C and 35 C v 3 None jone 0 None 2 The air nitrogen is set as a factory setting D With test data The MPC can be used for argon and carbon dioxide Y Complying with traceability certification gases by setup change O Product versi
19. ve output parameter setup values function setup values Operation lamp L Indicates that the integrated flowrate is displayed Flashes when an integration event occurs OK Lights when the control flowrate is within the setting value allowable range Flashes when the operating mode is valve full open SP1 to SP3 The lamp corresponding to the SP No which is used at multi setup is lit EV1 EV2 Lights when the event output is ON DISP key Used when switching the details of display lt V keys Used when incrementing decrementing the digit or moving to a desired digit Used when setting the SP value and storing the value It also can be used for the integrated flowrate resetting and alarm resetting Gas type setting Gas type is initially set to the nitrogen air at factory before shipment When this controller is used for argon carbon dioxide or their mixed gases the required gas type setting can be set as per the following procedure ENT key 1 After the power is turned ON press the DISP key 2 times to display the integrated flowrate gt gt L lamp lights 2 Press the lt key for 3 seconds gt gt The upper display indicates 4 14 Parameter setup mode 3 Additionally press the lt key for 3 seconds gt gt The upper display indicates the setup item No Z 4 f Function setup mode 4 Press the A key or V key gt gt The setup item No amp 5
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