Sheet C 204B
Contents
1. X Cancel E4 Print lt Previous Item Designation Signification Step name Name of the selected elementary step Parameter area Displays all parameters of the selected elementary step Print Prints the step parameters Previous Returns to the Step Edition window So you can modify one or several parameters if needed OK Saves the new step in the appropriate step library process or cleaning Cancel Cancels the step creation modification OOOO Alcatel Vacuum Technology France AMS 200 User s manual 6 62. ams01345 doc Edition 07 May 06 C 204B The Delay step edition window The same screen is used for process library and cleaning library But depending on this library some parameters are disabled Step edition Step Step type Name STEPO2 B C Proces Delay Chuck ti control Comment test Process time chuck options 14 Tempo duration 0h 0m jos l Next gt X Cancel Item Designation Signification 1 Step type The step to be created is a Delay step 2 Step name Name of the step to be created This field must be filled Comment Description of the step to be created O Tabs Two tabs let you set the different parameters of an elementary step Process Settings of the different times sequencing a step time Chuck Chuck parameter settings options Alcatel Vacuum Technology France AMS 200 User s manual 1 6 ams01345 doc Edition 07 May 06 C 204B The Delay step edition window 1 The Process time tab Step edition Step Step type Name STEPO2 Process T fea Delay oomeniaytest Chuck temp control Process time Chuck options Tempo duration 0h gt 0m 9 jos 2 3 Next gt Item Designation Signification Process time Access to the process time parameter settings Tempo duration Delay period at the end of which th
3. ay step edition window 2 2 Cleaning Library Step edition Step Step type Name STEPO2 C Process c fa SS Delay erie test C Chuck temp control Process time Chuck l Helium 1 flow 10 0 sccm rs x rs x Helium 2 flow 110 0 sccm 3 we Signification 1 Chuck options Access to the chuck parameter settings 2 Helium 1 flow Adjustment of the required helium flow during a cleaning step Injecting a helium flow allows to avoid a too low pressure inside the chuck One or two helium channels may be installed on the machine depending on its configuration Helium 2 flow Helium 1 flow is the helium flow at the center of the chuck always present Helium 2 flow is the helium flow on the circumference of the chuck Next gt Access to the Parameter report control window Cancel Cancels the creation of the step Alcatel Vacuum Technology France AMS 200 User s manual 5 6 ams01345 doc Edition 07 May 06 C 204B The Delay step edition window 3 The Parameter report control window Parameters report Step name STEPO2 1 Comment test Duration m Chuck options I Step end on He leak He 1 pressure 1 0E1 mbar Step end detect threshold 0 sccm pressure 1 0E1 mbar F t Helium pressure monitoring Tempo duration OhOm0s ESC enabled ESC time 55s L ESC voltage 0 V
4. ched If you check this option the helium pressure is no longer monitored Alcatel Vacuum Technology France AMS 200 User s manual 3 6 ams01345 doc Edition 07 May 06 C 204B The Delay step edition window Step edition Step Step type Name STEPa2 Process 3 i Delay omment test C Chuck temp control Process time Chuck options D 2 He 1 pressure 1 0E1 mbar j He 2 pressure 1 0E1 mbar F 3E Helium pressure monitoring IV ESC enabled 55 s 4 i a Item Designation Signification O ESC enabled Check this option to switch on the ESC power supplies during the ESC time step option available only for an ESC chuck ESC voltage If you check this option you have to adjust the ESC alternation time and the ESC power supplies voltage parameters applied during the step Whenever this time has elapsed the power supply polarity is inverted on the ESC chuck Notes m if ESC alternation time is set to zero seconds the power supply polarity will not be inverted m the ESC voltage parameter is available only if the Analog command of electro static chuck has been selected in the System presets O Next gt Access to the Parameter report control window O Cancel Cancels the creation of the step Alcatel Vacuum Technology France AMS 200 User s manual 4 6 ams01345 doc Edition 07 May 06 C 204B The Del
5. e step is stopped Maximum delay period is 9 h 00 min 00 s Next gt Access to the Parameter report control window Cancel Cancels the creation of the step Alcatel Vacuum Technology France AMS 200 User s manual 2 6 ams01345 doc Edition 07 May 06 C 204B The Delay step edition window 2 The Chuck options tab 2 1 Process Library Step edition Step Step type f Name STEPO2 C Process C t iftest 9 Tik L i C Chuck temp control Process time Chuck options D On Helium pressure monitoring 2 He 1 pressure 1 0E1 mbar j He 2 pressure 1 0E1 mbar F ltem Designation 1 Chuck options IV ESC enabled 4 55s ov i ap Signification Access to the chuck parameter settings 2 Helium 1 pressure Helium 2 pressure Adjustment of the helium pressure under the wafer during the step He pressure is used to ensure the thermal exchange between the chuck and the wafer One or two helium channels may be installed on the machine depending on its configuration He 1 pressure is the helium pressure at the center of the chuck always present He 2 pressure is the helium pressure on the circumference of the chuck Without Helium pressure monitoring If this option is unchecked the helium pressure is monitored and a fault will be triggered if the required pressure is not rea
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