uhv bayard-alpert gauge controller model ngc2
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1. AIG17P AIG17G AMLDATA SHEET AIG Issue H AIGL3 and AIGL3P Bayard Alpert Gaugeheads and leads for Ultrahigh Vacuum AML BA gauges and leads are widely acknowledged as the best available in the industry New product introductions and enhancements confirm and extend this lead The use of AML double screened BA gauge leads is essential to ensure that AML Pressure Gauge Controller installations comply with EU EMC Directive AIG17G is a nude UHV Bayard Alpert gauge intended for electron bombardment degas It has an individual glass compression seal around each feedthrough pin These glass seals are more economical and robust than ceramic resulting in a less expensive and more rugged gaugehead with the central collector pin inherently guarded against leakage currents by the grounded bulk of the flange Twin tungsten filaments are standard AML have improved the construction and method of attachment of the Molybdenum grid The grid has a closed end light rigid structure resulting in high sensitivity The X Ray induced electron desorption current at the collector is minimised by geometry and screening The connector pins are gold plated shrouded and polarized Sensitivity is 19 per millibar for nitrogen Sensitivity for other gases is tabulated overleaf X Ray asymptote is 3 x 10 millibar Maximum bakeout temperature is 250 C Mounting flange is NW35CF FIL17 is a replacement twin tungsten filament a2. of a single fan does not inhibit use Cost saving packages including gauges leads and extended warranty are available This document and the designs depicted are the copyright of Arun Microelectronics Ltd Specifications are subject to change confirm before ordering E amp OE AML acknowledges the rights of the owners of all trademarks and registered names AMIL ARUN MICROELECTRONICS LTD AML DATA SHEET NGC2 Issue A SPECIFICATION DIMENSIONS Nett Weight 3 5 kg Shipping Weight 5 0 kg Carton Dimensions 60 x 40 x 13 cm BAYARD ALPERT GAUGE AML AIG17G is recommended BA gauges from many other manufacturers are suitable without adjustment other than sensitivity A list of tested and approved gauges is available from AML The use of non approved gauges and leads may result in unstable emission or non compliance with EU legal requirements and is not covered by AML s warranty From 1 x 10 to below 3 x 10 mB with a UHV gaugehead with tungsten filaments The low limit is dependent on gaugehead cable construction and length and conditions of use The upper limit is determined by the acceptable life of the filament and may be extended by the use of thoria or yttria coated iridium filaments Accuracy and Determined principally by the gaugehead controller errors are much smaller Emission at 0 5mA is recommended Repeatability Electrometer logarithmic conformance lt 1 within any decade from 0 1 mA to 10 pA lt 5 to 1
3. EEC can only be guaranteed if AML BA gauge leads and screened Pirani gauges are used AML pursues a policy of continuous product improvement and reserves the right to make detail changes to specifications without consultation Unless otherwise stated all specifications are typical and at 25 Celsius after 1 hour operation E and OE Ordering information NGC2 Pressure Gauge Controller Related products AIG17G UHV Bayard Alpert gauge twin tungsten filaments AIGL3 6 9 3 6 9 metre screened bakeable BA gauge lead PVU2 Pirani gauge non bakeable with integral screened 3 metre lead PVB2 Pirani gauge bakeable with integral screened 3 metre lead AIG17P UHV Bayard Alpert gauge twin tungsten filaments with integral Pirani gauge AIGL3P Lead for AlG17P screened bakeable 3metre PVX10 10 metre non bakeable screened Pirani extension lead Arun Microelectronics Ltd Fitzalan Road Arundel West Sussex BN18 9JP England Tel 01903 884141 Fax 01903 884119 International Tel 44 1903 884141 www arunmicro com sales tectra GmbH Reuterweg 65 D 60323 Frankfurt M Germany tel 49 0 69 720040 Fax 49 0 69 720400 info tectra de www tectra de ARUN MICROELECTRONICS LTD
4. set for filament material Filament in use selected from the front Integral variable sensitivity leak detector with panel lon gauge is grounded when not operating audio output on Pirani1 or ion gauge Variable BA gauge sensitivity 4 internal power relays 5A 240V flexibly assignable to gauges from the front panel All Reduced emission current Instrument advises external relay wiring is connected through a optimum emission current at low pressure pluggable screw terminal block which has a retaining safety shield Automatic start of BA gauge in pump down Non volatile relay setpoints with manual BA gauge interlock by Pirani or external signal override and inhibit facility Simple setpoint contact closure adjustment and interrogation while measuring pressure Electron bombardment degas program with independent adjustment of ramp power and dwell RS232 compatible interface for data logging time Variable quick degas program with ramped and control cost option start Manual degas Excessive or inappropriate degas is limited or inhibited Recorder output 1 0 volt decade on pluggable 4 way screw terminal block with capacitance Pirani gauges may be switched on or off from the manometer and inhibit signals front panel Supplied with a mains lead relay and auxiliary Comprehensive temperature management with connectors spare fuse and brief user manual early indication of the need to replace a fan Failure
5. ARUN MICROELECTRONICS LTD AML DATA SHEET NGC2 Issue A AML s NGC2 UHV BA controller is a powerful new generation instrument which has improved performance compared to PGC1 and PGC2 which it replaces In 98 of cases it is a direct plug in replacement Operation is even simpler and more resistant to student abuse It has a longer brighter LED display All functions and setup are available from the front panel Two fans are fitted used alternately and monitored for performance NGC2 UHV PRESSURE GAUGE CONTROLLER 1U high full width steel cased instrument for easy Bright green LED display shows bargraph or rack mounting Operates on 100 to 240v 50 60Hz numeric pressure trend diagnostics etc lines without adjustment Display in mBar Torr or Pascal Permanent bargraph of Pirani pressures Controls 1 BA gauge plus 2 AML Pirani gauges plus a Capacitance Manometer simultaneously Simple guided setup is re entrant and divided by function Setup can be password protected Continuous measurement range 1 Bar to 3 x 10 millibar Preset adjustable bakeout program with control of temperature time and overpressure AML and approved equivalent gaugeheads may be limit Integral K thermocouple amplifier exchanged or lead lengths altered without adjustment Many other BA gauges are suitable o Automatic control of sublimation pump with countdown cancellation of imminent firing Filament current limit automatically
6. brated for dry nitrogen Calibration instructions are supplied with all gauges AML Pirani gauges are intended for use with AML Pressure gauge controllers and 1U high controllers manufactured by AML for other vendors Such controllers may be identified by the AML copyright marks on the printed circuit boards Ordering information PVU2 Pirani Gauge non bakeable 3m lead PVB2 Pirani Gauge bakeable 3m lead PVX10 Pirani Extension lead non bakeable 10 metres Related Products AIG17P BA gauge with Integral Pirani Gauge AIGL3P Lead for AlG17P bakeable 3m For new installations the use of combination gauges will save cost and reduce the number of ports required AIG17P AIGL3P Arun Microelectronics Ltd Fitzalan Road Arundel sales West Sussex BN18 9JP England A MI L tectra GmbH Reuterweg 65 D 60323 Frankfurt Germany Tel 01903 884141 Fax 01903 884119 tel 49 0 69 720040 Fax 49 0 69 720400 International Tel 44 1903 884141 info tectra de www tectra de
7. djustments enable them to be used with other orientations and gases Materials exposed to the vacuum are stainless steel nickel cobalt iron glass and tungsten Features of specific AML Pirani Gauges PVU2 is a low cost non bakeable gaugehead with an integral 3 metre lead and connector The feedthroughs use matched glass to metal seals which have better life and leak performance than the epoxy or compression seals used on other low cost Pirani gaugeheads The standard flange is NW16KF PVB2 is a UHV compatible stainless steel Pirani gauge with an integral 3 metre lead and connector which can be baked at 250 C The standard flange is NW16CF PVX10 is a 10 metre extension cable for use with PVU2 or PVB2 These cables extend the Kelvin sensing of AML PGCs so that the extension does not affect the calibration This document and the designs depicted are the copyright of Arun Microelectronics Ltd Specifications are subject to change confirm before ordering E amp OE AML acknowledges the rights of the owners of all trademarks and registered names ARUN MICROELECTRONICS LTD AML DATA SHEET PV Issue B GAUGEHEAD DIMENSIONS ORDERING INFORMATION 3000 _ A iss ea oe o PVU2 3000 p jea Ea o0 Gauges are supplied cali
8. han 50 C hotter in normal emission Yttria also has better adhesion and consequently longer life Oxide coated filaments adsorb water in storage and may require more power initially to evaporate it The filament power supply must be capable of providing high currents to develop adequate power in the low resistance of a cold filament and sufficient voltage to compensate for drops in a long hot cable A power limited supply of 40 watts capable of providing up to 12 volts and up to 4 amps will drive any AlG17G gauge operating under any conditions including degassing during bakeout at 250 C with an AIGL9 lead AML BA gauge controllers exceed these requirements and include comprehensive filament protection features EU EMC Directive 89 336 EEC AML Pressure gauge controllers were tested for compliance with AIGLx cables and AML screened Pirani gauges Installations using other cables without overall screens and controlled grounding may not comply with legal requirements in the EU AIG17G AIG17P Ordering information AIGL3 or AIGL6 or AIGL9 AIGL3P FIL17 FIL19 Arun Microelectronics Ltd Fitzalan Road Arundel West Sussex BN18 9JP England Tel 01903 884141 Fax 01903 884119 International Tel 44 1903 884141 UHV UHV Lead Lead Twin Twin BA Gauge twin tungsten filaments BA Gauge twin tungsten filaments with integral Pirani gauge for AlG17 bakeable 3m 6m 9m for AlG17P bakeable 3m tungsten filament as
9. mA and lt 20 to 2 pA at 25 C incoming air temperature Slope temperature compensation lt 0 02 per degree Celsius Differential linearity of the 12 bit A to D converter is less than 0 1 LSB Emission current initial accuracy lt 2 stability lt 1 Gauge Supplies Grid 200 volts in emission 500 volts at lt 60 mA in degas Filament 50 volt bias lt 12 volts at lt 4 2 A Tungsten lt 2 6 A Yttria with filament power limited at gt 30 watts CAPACITANCE MANOMETER CM Capacitance Manometers of any manufacture having a 10 volt full scale output at 1 10 100 or 1000 Torr or millibar and which are self powered are suitable Pressure indication can be in units different to the full scale units defined for the Capacitance Manometer PIRANI GAUGES AML types PVU2 and PVB2 A constant voltage bridge circuit reduces contamination at high pressures AML Pirani gaugeheads may be exchanged or extension leads may be connected without adjustments being necessary GENERAL Pressure Display Scientific notation with a 2 digit mantissa for all gauges Bargraph displays may be selected Operating Temperature 5 to 35 Celsius for specified performance Incoming air temperature is measured and displayed and operation is inhibited at gt 40 C Supply Voltage 100 V to 240 V nominal at 48 to 65 Hz without adjustment Power Consumption lt 20 watts idling lt 75watts in emission EMC Compliance Compliance with EU EMC Directive 89 336
10. o change confirm before ordering E amp OE AML acknowledges the rights of the owners of all trademarks and registered names N ARUN MICROELECTRONICS LTD 3000 AMLDATA SHEET AIG Issue H Age A O o Lo AIGL3 and Cas S E a z AIG17G _ p 71 00 35 00 80 00 3000 a 2 O o Lo oz Q S AIGL3P and AIG17P q 71 00 35 00 80 00 lt Recommended Operating Conditions Sensitivity S mBar ee 0V These bias conditions produce sensitivity shown in the table on the right Divide S by 100 for Pa multiply by 1 33 for Torr Filament Types Filament power varies over the useful life of a filament due to gradual erosion of bare tungsten or loss of the oxide coating In general yttria coated iridium filaments require about one quarter the power of tungsten at mid life Thoria is radioactive toxic and no longer recommended Yttria has similar properties and runs less t
11. sembly yttria coated iridium filament assembly Le I a creas tectra GmbH Reuterweg 65 D 60323 Frankfurt M Germany sales tel 49 0 69 720040 Fax 49 0 69 720400 info tectra de www tectra de ARUN MICROELECTRONICS LTD AML DATA SHEET PV Issue B Aml produce a range of Pirani gaugeheads to complement their Pressure Gauge Controllers All models include an integral lead for convenience and economy in installation Ee a g 2 fae LL PVU2 PVB2 PIRANI GAUGES Pirani gauges detect the cooling effect of residual gas molecules on a heated filament The rate of heat transfer to the gas is related to pressure and causes a change in the electrical resistance of the filament or the amount of power required to maintain it at constant temperature The filament is normally connected in a bridge circuit General Features of AML Pirani Gauges AML Pirani gaugeheads are intended for use in constant voltage bridge circuits which reduces the filament temperature and the rate of filament corrosion or contamination at high pressures Range 1 bar to 1 x 10 millibars May be interchanged between any AML PGC series or equivalent controllers without re calibration Extension cables do not affect the calibration Supplied calibrated for vertical installation in dry nitrogen Internal calibration a
12. ssembly The assembly is held by Allen set screws in socket receptacles and a key and replacement screws are provided FIL19 is a twin yttria coated iridium filament assembly Yttria is a safe and equivalent alternative to the toxic and radioactive thoria formerly used AIGL3 is a 250 C bakeable 3 metre lead for use with AIG17G and similar ionisation gauges connected to AML controllers AIGL6 and AIGL9 are 6 and 9 metre versions AML use gold plated connectors exclusively these are essential for reliable long term measurement of the ion current after baking The cable is rated for the worst case operating conditions of 50 watt degas with a new tungsten filament during a 200 C bake This product uses an entirely PTFE insulated custom cable and incorporates an overall electrical screen and fully screened and guarded collector with gt 1x10 Q insulation The connector housing is machined from PEEK and the e AIG17P incorporates a Pirani gauge on the cable clamp is a bright nickel plated casting same flange as the BA gauge To use the Pirani gauge it must be connected to the PGC with an AIGL3P has an additional connector AIGL3P lead The use of this combination gauge incorporating calibration adjustments for the integral leads to significant cost saving and eliminates a port Pirani gauge on AIG17P on the vacuum chamber This document and the designs depicted are the copyright of Arun Microelectronics Ltd Specifications are subject t
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