User Manual PZ125E - Physik Instrumente
Contents
1. 334 XY Tip Tilt Mirror User Manual PZ 125E 0 Manufacturer Declarations 0 1 Quality and Warranty Clauses Certification Physik Instrumente PI certifies that this product met its published specifications at the time of shipment Warranty This Pl product is warranted against defects in materials and workmanship for a period of one year from date of shipment Duration and conditions of warranty for this product may be superseded when the product is integrated into becomes a part of other PI products During the warranty period Pl will at its option either repair or replace products which prove to be defective Limitation of Warranty The foregoing warranty shall not apply to defects resulting from improper or inadequate maintenance by the Buyer Buyer supplied products or interfacing unauthorised modification or misuse operation outside of the environmental specifications for the product or improper site preparation or maintenance The design and connection of any circuitry to this product is the sole responsibility of the Buyer PI does not warrant the Buyer s circuitry or malfunctions of Pl products that result from the Buyer s circuitry In addition Pl does not warrant any damage that occurs as a result of the Buyer s circuit or any defects that result from Buyer supplied products No other warranty is expressed or implied Physik Instrumente specifically disclaims the implied warranties of merchantability and fitness for a pa2. Technical Documenta User Manual PZ 125E S 334 Tip Tilt Mirror Release 1 10 Product Description and Operating Notes This Document is valid for the following Products 334 2SL Piezo Tip Tilt Mirror 25 mrad Closed Loop Release 1 10 Release Date 2003 06 05 Physik Instrumente P I GmbH amp Co KG 76228 Karlsruhe Germany FAX 49 721 4846 299 E Mail info pi ws Internet www pi ws S 334 XY Tip Tilt Mirror User Manual PZ 125E Table of Contents Manufacturer Declarations cccccccceccseececceeeceseeeeeuseueeuueeuseueseneeeseans 2 0 1 Quality and Warranty Clause8sS ooocoonicononcconnncccccnnnanannnnnnncncnanan non nncnnnnnnns 2 0 2 Safety A thas A Aaa AAKA TE aae 2 INTFOU CON A E A E E a an eae 3 Fe E acl gt 0 i A 3 O O 3 QUICK Sara lia 4 Working Principles ds 4 3 1 POSITION SensSorS oocccoccocccncccncconcnoncconccnncnonononcnonrnnnrn ANE EEan 4 3 2 Operating VOTES ii cee es Wanccehcpesesceuaasdeccnsetnr ned 5 3 9 Motion Pola tia 5 Drive El6CtrOnics isi ee 6 Dynamic Behavior sce scicc so ccsocc seca cece sacs secs sacasese sacs cesses saseciecseesieaieeee 7 S 334 2SL Technical Data ccccccccecceessecceeeseseeeeeuseuseuesuseeeeenseueeeeees 8 OMS PEC CAMAS RAS Las 8 LA SA n a aa idea eddies eee ens eden 8 A RN 9 Copyright 2003 by Physik Instrumente PI GmbH 8 Co KG Release 1 10 File S 334UserPZ125E110 doc 145920 Bytes Release 1 10 Wwww pi ws Page 1 S
3. at unit If necessary switch on the control electronics using the power switch on the rear of the chassis without the tip tilt mirror connected verify that servo is ON and then switch it off again 2 Connect the S 334 2SL tip tilt mirror to the E 509 S3 servo control module The sensor cables of the S 334 which are labeled AXIS 1 and AXIS 2 must be plugged into the corresponding sockets of the servo control module labeled SERVO 1 and SERVO 2 3 Connect the S 334 2SL tip tilt mirror to the E 503 00S amplifier module The supply voltage cables of the S 334 2SL are labeled PZT CH1 PZT CH2 and PZT 100V They must be plugged into the corresponding output sockets of the amplifier module Note Do not mix up the cables while connecting since the amplifier channels are connected internally so as to supply mirror channels 1 and 2 with variable drive signals while its third PZT channel is supplied with a constant and very stable voltage of 100 volts Warning Resonance Can Cause Permanent Damage The system must never be operated close to the resonant frequency or permanent damage can result Keep large signal values below 200 Hz and small signal values below 300 Hz If you hear or see resonant behavior switch off the unit immediately Never operate with servo control OFF open loop or with the sensors disconnected 4 Switch on the control electronics Consult the E 500 User Ma
4. e S 334 tip tilt platform is equipped with cables for supply voltage and sensor signals and LEMO connectors to match the amplifier and servo controller modules The supply voltage cables of the S 334 2SL are labeled PZT CH1 PZT CH2 and PZT 100V The sensor cables of the S 334 2SL are labeled AXIS 1 and AXIS 2 Release 1 10 Wwww pi ws Page 8 S 334 XY Tip Tilt Mirror User Manual PZ 125E 6 3 Dimensions 25 A 38 4 M3V6 5 _ O bal o N f ES a gs o A 5 a 1 a IS 4015 15 0 6 34 5 20 10 max mirror size 12 mm x4 mm DIN 6784 Fig 3 S 334 2SL shown without mirror dimensions in mm decimal places separated by a commas in drawings Release 1 10 Wwww pi ws Page 9
5. ion above 50 volts tilting in the other A O to 10 V control input thus covers the full tilt range Operation over an extended range of 20 to 120 V is possible with certain limitations 3 3 Motion Polarities The diagram below shows the relative positions of the four PZT stacks and makes the relative rotation polarities clear IN AXIS 2 O IN AXIS 1 AXIS 1 Fig 2 S 334 viewed from above with axis 2 running left and right PZT stacks connected to the fixed 100 V supply contract with increasing input grounded stacks expand In other words after a positive axis 1 tilt CH 1 looking uphill across the platform a subsequent positive axis 2 CH 2 tilt would go up to the left and down to the right Conversely facing uphill after a positive axis 2 ch 2 tilt a positive axis 1 ch 1 tilt would go down to the left and up to the right Release 1 10 www pi ws Page 5 S 334 XY Tip Tilt Mirror User Manual PZ 125E Drive Electronics The S 334 tip tilt platform can be controlled by electronics of the E 500 series Amplifier and servo control modules are always required other modules are required as noted below Amplifier choice of the following always required E 503 00S Amplifier module special connected for differential drive LVPZT tip tilt platforms 2 channels with variable drive signals output sockets CH1 and CH2 plus 100 V fixed output output socket CH3 E 505 00 Single Channel amplifie
6. nual and if you have an E 516 interface module installed the E 516 E User Manual for information on commanding the S 334 tip tilt platform 3 Working Principle The PZT actuators of the S 334 tip tilt platform in each pair are connected in differential push pull mode any change in the operating voltage causes one actuator of the pair to see a voltage increase the other to see a decrease of the exact same magnitude 3 1 Position Sensors As a closed loop system the S 334 2SL is equipped with two pairs of strain gauge position feedback sensors operated in a bridge circuit for ultra high resolution and Release 1 10 Wwww pi ws Page 4 S 334 XY Tip Tilt Mirror User Manual PZ 125E angular stability These sensors permit angular movements to be executed with sub prad resolution and repeatability Because of the symmetrical design of the tip tilt platform system temperature changes will not effect the angular orientation but only the Z axis position axial thermal drift Most applications are much less sensitive to this kind of instability as long as the angular orientation remains stable 3 2 Operating Voltages Each tilt axis of the tip tilt platform system requires one controlled operating voltage in the range of 0 to 100 volts and one constant voltage of 100 V At the zero position tilt angle zero both actuators of a pair are expanded to 50 of their maximum expansion Control voltages below 50 volts cause tilting in one direct
7. ounted on four lever amplified LVPZT stacks located at the corners of a square Tilting around one axis requires synchronized movement of two diagonally opposite LVPZT actuators To ensure that one actuator will contract by exactly the same amount as the other expands the actuator pairs are individually matched at the factory The actuators in each pair are then connected electrically in differential push pull mode eliminating Z axis freedom Note that with this design the pivot point is fixed and the same for both rotation axes Whether you choose to measure the angles in vertical planes or in planes perpendicular to the platform depends on the requirements of your application Release 1 10 Wwww pi ws Page 3 S 334 XY Tip Tilt Mirror User Manual PZ 125E 2 Quick Start The following instructions describe starting the S 334 2SL tip tilt platform using Pl s E 500 series control electronics E 500 or E 501 chassis including E 503 00S amplifier module and E 509 53 servo control module If you use other modules from the E 500 series the steps are the same but the connections details may differ In this case please consult Drive Electronics Section on p 6 for further information 1 Make sure that the control electronics is set up to start in closed loop mode with the mirror not connected See the E 500 and the E 509 User Manuals for details If you have an E 516 i3 interface module installed please see also the User Manual for th
8. prox 2 mm Operating temperature range 0 to 60 C Voltage connection 3 x Lemo fem 2 m cable Sensor connection 2 x Lemo 2 m cable Weight w o cables 65 g 5 Material Titanium Notes 1 Range Operation over a 20 to 120 V range is possible if excursions to the limits are of short duration See Lifetime of PZTs in the PI Catalog for more information Special open loop version with 2 5 mrad for 0 100 V is available on request Resolution of PZT tip tilt platforms is not limited by friction or stiction Value is typical RMS 10 noise equivalent motion with E 503 amplifier module Full Range Repeatability Typical values closed loop mode Since repeatability is a percentage of angle traveled repeatability is significantly better for small ranges Dynamic Operating Current Coefficient in pA per hertz and prad Example Sinusoidal scan of 100 prad at 10 Hz requires approximately 0 22 mA drive current Resonant Frequency with Mirror This value is valid for the tip tilt stage with factory installed standard mirror 10 mm in diameter and 2 mm thick If you use a custom mirror with up to 12 5 mm diameter call your local PI representative for the resulting resonant frequency Standard range other temperature ranges on request Closed loop systems are calibrated for optimum performance at room temperature Recalibration is recommended if operation is at a significantly higher or lower temperature 6 2 Connectors Th
9. r module 3 modules required PZT CH1 must be connected to the leftmost module PZT CH2 to the center module and PZT 100V to the rightmost E 505 Note On amplifiers for tip tilt mirrors the DC offset potentiometer for channel 3 if present at all is disabled and the output is clamped internally to 100 volts The analog input of this channel is also disabled External control voltages thus must be supplied to the CONTROL INPUT sockets of CH1 and CH2 Controller always required E 509 S3 Position servo control module for SGS sensors channel 1 and 2 labeled SERVO 1 and SERVO 2 shall be used with the appropriate sensor cables third channel input socket SERVO 3 is not used Display Module displays position or voltage of axes not required E 515 03 3 4 digit LED position or voltage display for each of 3 channels channel 3 not used E 515 01 3 digit LED position or voltage display 1 channel 2 modules needed for 2 axis display Computer Interface and Display Module replaces display above required for computer controlled operation E 516 i3 Computer Interface and Display Module 3 channels channel 3 not used The discontinued E 515 i3 can also be used Release 1 10 www pi ws Page 6 S 334 XY Tip Tilt Mirror User Manual PZ 125E Dynamic Behavior In addition to the amplifier servo controller and sensor bandwidths the maximum operating frequency of a tilt mirror depends on i
10. rticular purpose 0 2 Safety Precautions Warning To avoid irreparable damage S 334 Tip Tilt Mirrors should never be operated in open loop servo OFF mode or be subjected to frequencies above 200 Hz 300 Hz for small signal frequencies Warning Handle the factory installed mirror with care Never try to remove the mirror Release 1 10 Wwww pi ws Page 2 S 334 XY Tip Tilt Mirror User Manual PZ 125E 1 Introduction The S 334 2SL tip tilt mirror is an active tip tilt platform system based on the differential piezo drive design incorporating two pairs of LVPZT low voltage piezoelectric translator actuators The tip tilt platform is equipped with a factory installed mirror 10 mm in diameter and 2 mm thick flatness A 5 reflectivity gt 98 from 500 nm to 2 um Custom coatings and mirrors up to 12 5 mm diameter are available on request It is designed for fast and precise laser beam steering in two orthogonal axes and for stabilizing and correcting optical axes or paths The tip tilt range is 25 mrad with sub prad resolution 1 1 Features gt Tilt Range up to 25 mrad 1 5 in 2 Fixed Orthogonal Axes 1 0 kHz Resonant Frequency with Mirror Closed Loop Version For Mirrors up to 12 5 mm 0 5 Diameter Operating Voltage lt 100 V Sensor Configuration for Excellent Temperature Stability gt gt gt gt gt Fig 1 S 334 Tip Tilt Mirror 1 2 Design The S 334 2SL tip tilt platform is m
11. ts mechanical resonant frequency See S 334 2SL Technical Data on p 8 for the resonant frequency of the tip tilt platform equipped with the factory installed standard mirror 10 mm in diameter and 2 mm thick Warning The system must never be operated close to the resonant frequency since permanent damage can result Keep large signal values below 200 Hz and small signal values below 300 Hz Never operate with servo control OFF open loop or with the sensors disconnected Increasing the effective mass of the loaded platform reduces the resonant frequency of the system If you use the S 334 tip tilt platform with a custom mirror call your local PI representative for the resulting resonant frequency Release 1 10 Wwww pi ws Page 7 S 334 XY Tip Tilt Mirror User Manual PZ 125E 6 S 334 2SL Technical Data 6 1 Specifications Models S 334 2SL Units Active axes 2 fixed orthogonal tilt axes Design Differential piezo drive 4 LVPZT stacks Tip tilt range 0 to 100 v 25 mrad 20 Closed loop tilt angle 25 mrad Integrated feedback sensor 2 x strain gauge full bridge Open loop closed loop resolution lt 5 urad Closed loop linearity typ 0 25 Electrical capacitance 3 6 axis uF 20 Dynamic operating current coefficient DOCC 4 0 22 axis pA Hz x urad Resonant frequency w 10 x 2 mm glass mirror 1 kHz 20 Distance pivot point to platform surface ap
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