Chapter 2 SQM
Contents
1. A NY Tooling Toolin g Over 100 Under 100 Monitor Monitor sensors halt deposition when their Thickness setpoint is reached Sensor 3 Monitors CoDeposited Material Ss NUE Sensor 1 Controls Sensor 2 Controls Material 1 Rate Material 2 Rate Often sensors are configured to tightly control the deposition rate of a material such as Sensor 1 amp 2 above However you might also use a monitor sensor near the substrate to more accurately monitor the final thickness of the co deposited material Setpoint The material thickness in KA measured by a monitor sensor that will halt deposition Chapter 2 SQM 242 CoDep Analog The SAM 242 analog input card measures DC voltages in the 10 volt range These voltages may represent temperature flow or any other process variable The analog frame allows you to modify the display to show values in the desired units using a linear y mx b transformation Assume you have a temperature transmitter that sends OV at 0 C and 10V at 100 C You want to control temperature to 200 F it s an example Set the analog input Gain to 18 Offset to 32 and Units to Deg F F 9 5C 32 The SQM 242 will display setpoints and measurements associated with the analog input in degrees F To leave the analog input display in Volts set Gain 1 and Offset 0 Gain The gain term for transforming voltage to measured units This is the m ter2. i i TIL Note Before using the LabView demo it s best to familiarize yourself with operation of the SQM 242 CoDep program To run the demo click Load DLL Use Card and then set the Sensor and Output parameters as desired Click Start Readings to display readings Be sure to click Unload DLL before stopping the LabView program Otherwise a Windows error will occur and LabView may shut down 5 1 Chapter 6 Interfacing to the Card 6 0 Introduction The diagram below illustrates basic concepts for interfacing to the SQM 242 card SQM242a DLL SQM242a Class 2 Control Outputs per card 4 Sensor Inputs per card mm D mum p obj SQS 242 indows Deposition Ethemet NE Program Program Properties Methods Events Digital I O PLC ASCII Commands Communications with the SQM 242 card are through a 32 bit DLL SQM242a DLL placed in the Windows system directory This is a standard DLL which does not require registration A description of each DLL function is listed later in this Chapter The Visual Basic C and LabView programs on the CDROM demonstrate the syntax for calling the DLL You can also use Sigma s optional SQS 242 deposition control program as the user interface This program provides multi layer processes graphing data logging and digital I O It can be controlled from your application by sending just a few ASCII text commands This is an exce
3. It is intended as a learning tool for new users and a programming example for interfacing to user applications However it is also a deceptively powerful deposition monitor and controller 2 1 Main Screen With no cards installed or with two SQM 242 cards and an SAM 242 card installed you will see the display below The number of output frames shown on the display will change depending on the number of cards installed in your system For example with only one SQM 242 card installed the main display shows only two output frames SQM 242 CoDep Default dat File View Help EBeam 1 EBeam 2 Output 3 Gas Flow Output 41 r Output amp 2 Thickness Thickness Thickness 0 007 0 007 Stn 100 0 200 0 300 0 Rate Rate Rate CFH 5 00 20 00 30 00 1 00 Power Power Power Power 0 0 0 0 0 0 0 0 Auto Auto Auto Auto C Auto C Auto C Manual C Manual C Manual C Manual C Manual C Manual C Record Record C Record C Record C Record Record C Off C Off C Off Off e DE C off E dit Edit E dit E dit Edit Edit Zero Zero Zero Zero Zero Zero Zero All Each output frame corresponds to a physical output on an SQM 242 card On the screen above the first three outputs are each configured to use quartz sensors to measure rate and thickness The frame labeled Gas Flow is a little different This output uses an
4. long OutputNum Sets a control output 0 to 13 thickness reading to zero by setting each assigned sensor thickness to zero Sif142Material long Sensor double Density double Zfact double Tooling Sets up the material specific parameters for each of the sensors Sensor A bit weighted value of which sensor s the parameter is for For example to set the sensor two of 0 to 23 place 100 in the lowest three bits Send 111 in the lowest three bits to set sensors 0 1 and 2 Density Sets the density of the material Valid values are from 0 4 to 99 99 gm cc Zfact Z Factor of the material This is a unitless number and can be found in material tables Values are from 0 5 to 25 Tooling Accounts for the difference in deposition rate at the sensor vs the substrate Has a range from 0 to 9 99 representing 0 to 999 Sif142GetMaterial double SensorParams 0 to 23 0 to 2 double SystemParams 0 to 4 Read material parameters density zfactor and tooling 0 to 23 0 to 2 and system parameters max freq min freq init freq period norm sim 0 to4 6 3 Chapter 6 Interfacing to the Card Sif142FullScale long Output double FullScaleVolts double MaxPwr double SlewRate Sets the source output operating parameters Output The output these parameters are for O to 13 FullScaleVolts Maximum voltage the output is scaled to This is the output at 100 power Values from 10 to 10 are valid MaxPwr Maximum power tha
5. 13 00 3 000 103 0 v 150 000 E 1 4 14 00 4 000 104 0 104 000 Analog Gain Offset Units Monitor gt SetPt v 1 10 00 0 00 CFM E 1 00 2 2 00 0 00 Volts 2 00 3 3 00 0 00 Volts M 3 00 4 4 00 0 00 Volts E 4 00 Sensors Frame Settings in this frame control a sensor s calculation of rate and thickness They also allow a sensor to be assigned as a Final Thickness monitor independent of any output control assignment Density The density of the material measured by this quartz sensor in grams per cubic centimeter Material density can be found in the appendix and numerous handbooks Z Factor ZFactor compensates for the mechanical stress a material causes to the quartz crystal Z Factor has an effect only during the last 70 of crystal life If you cannot find the ZFactor of a material set the value to 1 and change crystals when the Crystal Life approaches 7096 See the appendix for more information Note The appendix contains additional technical information on these settings and the equation governing quartz crystal monitor QCM calculations 2 7 Chapter 2 SQM 242 CoDep Tooling Adjusts for measured deposition rates that differ from the actual substrate deposition rate If the sensor sees only 50 of the substrate rate set the value to 200 This multiplies the sensor reading by 2 P d ES Z E A N ff Substrate A P Substrate AU if
6. Silver 10 5 0 529 Copper 8 93 0 437 Silver Bromide 6 47 1 18 Copper Sulfide 4 6 0 82 Silver Chloride 5 56 1 32 Copper Sulfide B 5 8 0 67 Sodium 0 97 4 8 Copper Sulfide A 5 6 0 69 Sodium Chloride 2 17 1 57 Dysprosium 8 54 0 6 Sulfur 2 07 2 29 Erbium 9 05 0 74 Tantalum 16 6 0 262 Gadolinium 7 89 0 67 Tantalum Oxide 8 2 0 3 Gallium 5 93 0 593 Tellurium 6 25 0 9 Gallium Arsenide 5 31 1 59 Terbium 8 27 0 66 Germanium 5 35 0 516 Thallium 11 85 1 55 Gold 19 3 381 Thorium Fluoride 6 32 1 Hafnium 13 1 0 36 Tin 7 3 0 724 Hafnium Oxide 9 63 1 Titanium 4 5 0 628 Holnium 8 8 0 58 Titanium Oxide 4 9 1 Indium 7 3 0 841 Titanium Oxide IV 4 26 0 4 Indium Intimnide 5 76 0 769 Tungsten 19 3 0 163 Indium Oxide 7 18 1 Tungsten Carbide 15 6 0 151 Iridium 22 4 0 129 Uranium 18 7 0 238 Iron 7 86 0 349 Vanadium 5 96 0 53 Lanthanum 6 17 0 92 Ytterbium 6 98 1 13 Lanthanum Fluoride 5 94 1 Yttrium 4 34 0 835 Lanthanum Oxide 6 51 1 Yttrium Oxide 5 01 1 Lead 11 3 1 13 Zinc 7 04 0 514 Lead Sulfide 7 5 0 566 Zinc Oxide 5 61 0 556 Lithium 0 53 5 9 Zinc Selenide 5 26 0 722 Lithium Fluoride 2 64 0 774 Zinc Sulfide 4 09 0 775 Magnesium 1 74 1 61 Zirconium Oxide 5 6 1 001 Appendix A Material Properties The equation governing all quartz crystal thin film monitors and controllers is m Fq Fo F q NqD Z tan T D mF eZ Tr atan where the constant terms for the quartz crystal are AT crystal constant Na 1 668 199 P2 ae
7. sensor causes the sensor to continue to monitor deposition but have no effect on output control SensLoop Array 0 to 23 of sensor to output assignments 0 to 13 Sif142MapAnSensors long AnLoop 0 to 3 An array that associates each analog input 0 to 3 with an output 0 to 13 for PID control An output value of 1 for an input causes the input to continue to monitor voltage but have no effect on output control AnLoop Array 0 to 3 of analog input to output assignments 0 to 13 Sif142GetReadings double SensorArray 0 to 23 0 to 2 double OutputArray 0 to 13 Fills two arrays with measurement data In the second dimension of the SensorArray the elements are Rate A S Thickness A and Frequency Hz Negative frequency values indicate a sensor error The OutputArray element is output power 0 to 1 If a O is returned from this function there are no new readings available A non zero value means that there is new data with the returned value indicating the number of readings in the buffer The buffer is 10 readings long To flush it keep reading until there is no new data Sif d2GetAnReadings double AnalogArray 0 to 3 double OutputArray 0 to 13 Fills two arrays with measurement data The AnalogArray is voltage The OutputArray is filtered power If a O is returned from this function there are no new readings available A non zero value means that there is new data with the returned value indicating th
8. the Input that will generate a Full Scale 10V output In the sample above a measured rate of 10A s will generate a 10V recorder output If you select 1000KA then a measured thickness of 1000kA will generate a 10V output to the recorder Input Reading Displays the measured value of the selected input The units of the input reading are determined by the type of measurement rate thickness power or voltage selected for the recorder output Output Reading The output voltage currently supplied to the recorder by the recorder output Chapter 2 SQM 242 CoDep 2 4 File Menu Open Selects a setup DAT file to be used for thin film deposition Save As Saves the current setup to disk It can replace the information in the current file or be saved under a different name Multiple setups can be saved as different files This is convenient for storing different configurations materials rates etc Exit Exits the SQM 242 program Before closing the program you are prompted to save changes Select Yes to overwrite the current setup DAT file no to abandon any changes or Cancel to return to the program 2 5 View Menu Readings Selecting the View menu then Readings displays a grid of all sensor and analog inputs It also provides a convenient place to view the overall input output configuration of your system EE 5948080 2 00 000 5942220 7 000 5950000 0 Analog 3 000 5950000 0 Analog 4 Unlike the main screen w
9. Density of Quartz D q 2 648 cm For example a material and sensor frequency change of Density of material D i 2 70097 cm Z Factor of material Z 1 00 Starting Frequency F q 6000000 Hz Ending Frequency F c 5999995 Hz Yields a Thickness in Angstroms of Tpm 2272 Z Factor is used to match the acoustic impedance of the deposited material Zm to that of the base quartz material Z4 8 83 of the sensor crystal Z Factor Zq Zm For example the acoustic impedance of gold is Z 23 18 so Gold Z Factor 8 83 23 18 381 Appendix B SQM 242 Inputs Number of Sensors Connectors Sensor Frequency Range Reference Frequency Accuracy Reference Frequency Stability Frequency Resolution Thickness Resolution Rate Resolution 2 readings sec Density 2 70 gm cc SAM 242 Inputs Number of Inputs Connectors Input Range Input Impedance Resolution SQM 242 SAM 242 Outputs Number of Outputs Connector Output Voltage Source Impedance Resolution Setup Parameters Material Density Z Factor SensorTooling Full Scale Voltage Max Power Slew Rate P Term Term D Term Rate Mode Output Control Sensor Output Map Analog Output Map SAM 242 Measurement Period Specifications 4 Active Oscillator BNC 1 0 MHz to 10 0 MHz 00296 2ppm total O to 50 C 06Hz 6MHz 027 055 A s 4 non isolated BNC 0 to 10 Vdc 20 kOhms 15 bits plus sign 2 non iso
10. Frequency Mode m Cee Cog RENE ee Re D D D N Penod Fier 0 000 D D D IE B Mmm fs L IL ILIL Freg Max Freg Min Freq Init Pwrl Pwr2 Pwrl Pwr2 6100000 5000000 6000000 50 6 m Sensor Settings Card 2 Card 5 i Card Sensor Thick Rate Dev Frequency Thick Rate Dev Frequency sse sr wv LL mm ud mM 0 oM JM NM NM NM es 1 1 1 1 55 Material is gt Pwrl Pwr2 Pwrl Pwr2 m Output Settings TN 1 TI m 1 Card 3 Card 6 J Thick Rate Dev Frequency Thick Rate Dev Frequency c Manual CET Jn Ww WU mme 3 4 9 oi 0151 0 007 um mme Volts MaxPwr Slew Pwrl Pwr2 Pwrl Pwr2 gem s ow lt N 1L On startup the program displays the firmware revision of each card that is properly installed If an SQM 242 is installed but no revision e g Card 1 2 00 is displayed then consult the card installation section of this manual Operation of the SQM 242 Multi program is very similar to SQM 242 CoDep Refer to the previous chapter for descriptions of the parameter settings and readings text boxes 4 1 Operation Send All Sends all of the stored parameters to the SQM 242 card s in preparation for a Read command Normally you will click Send All to initialize the card then make individual Sensor and Output setting changes as needed Current settings are stored in an INI file in the application directory on exit from the p
11. Hz quartz crystal sensors simultaneously Controls two deposition source supplies simultaneously co deposition Install multiple cards for up to 24 sensors and 12 control outputs Measure four 10V analog inputs with optional SAM 242 piggyback card Installs in any PC running Windows 98 2000 ME XP Interfaces to your program with Windows DLL and Active X interfaces Sample Visual Basic and LabView programs with source code are included SQM 242 Deposition Control Card The sample SQM 242 CoDep software included with SQM 242 card allows you to Co deposit up to six materials using up to eight sensors Use analog inputs to control heaters gas flow and other process variables Use outputs for recording rate thickness power or voltage Save film setup parameters and deposition data to disk Simulate deposition for developing and testing film setups The optional SQS 242 software allows multi layer deposition recipes graphics flexible PLC based digital I O and RS 232 Ethernet external control 1 1 Chapter 1 Installation 1 1 SQM 242 Card Installation Jumper each SQM 242 card before installation as shown below Card 1 Card 2 Card 3 Card 4 Card 5 Card 6 JP5 JP5 JP5 JP5 JP5 JP5 OO a a z reri OO OO a OO OO OO OO OO OO a OO OO OE OO OO OO a OO OE ONN OO OO OO a If you are installing a SAM 242 Analog piggyback card it must be connected to Card 1 Set the Card 1 jumper as shown bel
12. SQM 242 Quartz Crystal Card SAM 242 Analog Input Card SQM 242 CoDep Co Deposition Control Software User s Guide Version 2 03 Copyright Sigma Instruments Inc 1999 2004 gt Sigma instruments Safety Information Read this manual before installing operating or servicing equipment Do not install substitute parts or perform any unauthorized modification of the product Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained Safety Symbols WARNING Calls attention to a procedure practice or condition that could possibly cause bodily injury or death CAUTION Calls attention to a procedure practice or condition that could possibly cause damage to equipment or permanent loss of data Refer to all manual Warning or Caution information before using this product to avoid personal injury or equipment damage Hazardous voltages may be present Earth ground symbol Chassis ground symbol yb eS Equipotential ground symbol Warranty Information Hardware Warranty This Sigma Instruments product is warranted against defects in material and workmanship for a period of 2 years from the date of shipment when used in accordance with the instructions in this manual During the warranty period Sigma will at its option either repair or replace products that prove to be defective Software Warranty Sigma Instruments warrants that the media on which this so
13. a non zero Card Revision for each installed SQM 242 card If not follow the installation instructions in Chapter 1 Also be sure that Freq Max 6 1MHz Initial 6 0MHz and Min 5 0MHz Crystal Fail or Erratic Readings from Sensors Verify that the sensors oscillator and cabling are connected as shown in Section 1 Disconnect the deposition source supply This eliminates the possibility that a noisy source or poor loop tuning is causing an unstable PID loop In the SQM 242 CoDep program select View Readings Since a QCM is basically a frequency counter we will use the measured frequency for troubleshooting A test crystal is supplied with each Sigma oscillator Disconnect the 6 M F BNC cable from the feedthrough and attach the 5 5 MHz test crystal to the 6 BNC cable la PE The frequency should read about 5 5 MHz very stable If not move the cabling to a different SQM 242 input If there is still no frequency reading then the cable and oscillator assembly may be bad If possible test the assembly on another QCM Or try a known good cable and oscillator assembly on the SQM 242 Once you have a stable 5 5MHz reading reconnect the 6 BNC cable to the sensor feedthrough If there is no reading or an unstable reading replace the quartz crystal Crystals sometimes fail unexpectedly or exhibit erratic frequency shifts before total Appendix C Troubleshooting failure Depending on the material crystals may fail
14. ale In Manual mode the Power Setpoint can be edited to manually adjust output power The option buttons control the function of each output As mentioned previously Auto mode uses a PID control loop to control rate Manual mode allows you to manually adjust the output power That can be useful for material preconditioning or error conditions The Record button configures the output as an analog recorder A recorder output provides a signal that is proportional to thickness rate power or analog voltage Finally the Off button sets the output to 0 volts and hides the displays Start Stop When Start is displayed starts SQM 242 readings and PID output control When Stop is displayed stops readings and sets the power outputs to zero When Stop is displayed a Hold button is also visible Hold Resume Clicking Hold sets all output power levels to zero and changes the button legend to Resume Clicking Resume continues deposition without zeroing thickness Zero All Sets all material i e output thickness readings to zero Zero Sets the selected material thickness reading to zero Edit Displays a dialog box with additional settings for an output 2 2 Chapter 2 SQM 242 CoDep 2 2 Edit Auto Manual Mode When Edit is clicked while Auto or Manual mode is selected a dialog box is displayed which contains additional output control settings Note The type of dialog displayed depends on whether the output is configured as a control ou
15. analog input on the SAM 242 card to control backfill gas The SAM 242 card can use any analog voltage for control More about this feature later Output A1 above is turned off while Output A2 is used as a recorder output The output labels are easily edited to provide descriptive names Displays within in each output frame will change depending on the function of that output Chapter 2 SQM 242 CoDep Outputs configured for quartz sensor inputs like the first three in the sample screen display rate and thickness information The first display is the Thickness Measurement for the material in kA Immediately below the Thickness Measurement display is the Thickness Setpoint setting You can edit the Thickness Setpoint at any time When the Thickness Reading reaches the Thickness Setpoint deposition will stop Note To adjust a Setpoint click on the setting and type a new setting Press Enter to send the setting without moving to another field To move to another field use the Tab key or your mouse Each time you move to another field the setting is updated Below the thickness displays are the Rate Reading and Rate Setpoint displays in A sec In Auto mode the SQM 242 control loop continuously adjusts the output power to maintain the deposition Rate Reading at the desired Rate Setpoint Below the rate displays are the output Power Reading and manual Power Setpoint The Power Reading displays the current output power in 9o Full Sc
16. ant effect on rate thickness calculations Z Factor corrects for stresses as a crystal is coated If readings are initially accurate but deteriorate as crystal life drops below 60 70 you need to adjust the Z Factor or replace crystals more frequently The relationship between Z Factor and Acoustic Impedance is discussed in Appendix A Poor Rate Stability First be sure that a stable rate can be achieved in Manual mode as explained in the previous sections Once a stable rate is achieved in Manual mode set the PID control parameters as described in Section 2 Also set the Slew rate to limit the amount of power that can change per second Adjust these parameters as necessary to achieve desired performance Appendix C Inadequate Rate Resolution Troubleshooting QCM resolution is affected by material density and measurement period Low density materials cause little frequency change per angstrom of thickness hence low resolution Increasing the measurement period significantly increases QCM resolution as shown below for material Density 1 Measurement Frequency Thickness Rate Rate Period Resolution Resolution Resolution Density 2 25 sec 11 Hz 16A 64 A s 32 Als 50 055 08 16 08 1 0 028 04 04 02 1 5 018 03 02 01 2 0 014 02 01 005 Increasing the Filter value only increases displayed resolution Technical Support Contact Sigma Instruments at Sig
17. d installation status Values gt 900 are errors CardStatus 1 to 6 Firmware revision of card 1 to 6 Zero is no card found Card Status 7 Firmware revision of SAM 242 card Sif142Init double Xfmax double Xfmin double Xinit double Period Initializes the measurement engine Should be called before readings are taken Xfmax Maximum crystal frequency 10MHz Max Any measurement greater than Xfmax results in a Crystal Failure Xfmin Minimum crystal frequency 1MHz Min Any measurement less than Xfmin results in a Crystal Failure Xinit Initial frequency of a new crystal Usually either 6 00 MHz or 5 00 MHz Must be between Xfmax and Xfmin Period Sets the period of the measurement system between 0 1 and 2 Seconds Sif142Simulate long Mode Sets the operating mode Normal mode requires SQM 242 card s sensors and a deposition power supply for proper operation In simulate mode no SQM 242 card is needed The DLL simulates the frequency readings and power output required for PID loop control Note that in this mode the initial sensor frequency is fixed at 5 95MHz and at least 50 output power is required to start simulating deposition Mode 1 turns on simulate mode O turns on normal mode 6 2 Chapter 6 Interfacing to the Card Sif142StartMeas Starts the card measuring frequency and zeros the sensor thickness reading Sif142ZeroSensor long SensorNum Sets a sensor 0 to 23 thickness reading to zero Sif142Zero2
18. e is set to PID then that sensor serves as the measured rate input to the PID loop If multiple sensors are assigned to an output then the average of all assigned sensors is used as the measured rate input to the PID loop If multiple sensors are assigned to an output and a sensor fails it is automatically excluded from the average Material Sends the Density Zfactor and Tooling parameters to the selected sensor s Manual PID Sets the output mode for the selected output s In PID mode output power is controlled by the output s Loop settings to achieve the desired Rate setpoint In Manual Power mode output power is fixed at the Power setting To change the output power in ManPwr mode enter a new Power value then click Set Power Alternates Sends the Density Zfactor and Tooling parameters to the selected sensor s Loop Sends the PID and rate setpoint parameters to the SQM 242 card s FullScale Sends the Full Scale Volts Maximum Power and Slew Rate parameters to the SQM 242 card s Chapter 5 LabView Demo 5 0 Introduction The LabView demonstration program VI is located on the Utilities CDROM in the folder SQM242 Card LabView Source LabView 6 or higher is required igma Instruments SQM 242 VI Example aterial Setup Send Material pe Select J J mn gm cc 2 Factor Ej Send Sensor Map Send Sensor Map rm Stop Readings Zero Thickness Send Output Hd TT m d
19. e number of readings in the buffer The buffer is 10 readings long To flush it keep reading until there is no new data Sif142GetPower double PowerArray 0 to 13 Fills the array with the current output powers Unlike the Sif142GetReadings OutputArray the value is an instantaneous unbuffered value 6 5 Appendix A Material Properties Material Density ZFactor Material Density ZFactor Aluminum 2 73 1 08 Magnesium Fluoride 3 1 Aluminum Oxide 3 97 1 Manganese 7 2 0 377 Antimony 6 62 0 768 Manganese Sulfide 3 99 0 94 Arsenic 5 73 0 966 Mercury 13 46 0 74 Barium 3 5 2 1 Molybdenum 10 2 0 257 Beryllium 1 85 0 543 Neodymium Fluoride 6 506 1 Bismuth 9 8 0 79 Neodymium Oxide 7 24 1 Bismuth Oxide 8 9 1 Nickel 8 91 0 331 Boron 2 54 0 389 Niobium 8 57 0 493 Cadmium 8 64 0 682 Niobium Oxide 4 47 1 Cadmium Selenium 5 81 1 Palladium 12 0 357 Cadmium Sulfide 4 83 1 02 Platinum 21 4 0 245 Cadmium Teluridium 5 85 0 98 Potassium Chloride 1 98 2 05 Calcium 1 55 2 62 Rhenium 21 04 0 15 Calcium Fluoride 3 18 0 775 Rhodium 12 41 0 21 Carbon Diamond 3 52 0 22 Samarium 7 54 0 89 Carbon Graphite 2 25 3 26 Scandium 3 0 91 Cerium Fluoride 6 16 1 Selenium 4 82 0 864 Cerium Oxide 7 13 1 Silicon 2 32 0 712 Chromium 7 2 0 305 Silicon Dioxide 2 2 1 07 Chromium Oxide 5 21 1 Silicon Oxide 2 13 0 87 Cobalt 8 71 0 343
20. ept the terms of this agreement Licensee may terminate this license by destroying all copies of the software Table of Contents Chapter 1 Installation 1 0 Introduction 1 1 1 1 SQM 242 Card Installation 1 2 1 2 SQM 242 Driver Installation 1 3 1 3 CoDep Software Installation 1 3 1 4 SQM 242 Card Connections 1 4 1 5 SAM 242 Card Connections 1 6 1 6 Digital O s te tees 1 6 Chapter 2 CoDep Program 2 0 Introduction sce eet 2 1 2 1 Main Screen issue 2 1 2 2 Edit Auto Manual Mode 2 3 2 3 Edit Recorder Mode 2 5 2 4 File Menu 2 6 2 5 View Menu Readings 2 6 2 6 View Menu Input Setup 2 7 2 7 View Menu Card Setup 2 8 Chapter 3 Monitor Program 3 0 Introduction sss 3 1 Chapter 4 Multi Program 4 0 Introduction 4 1 4 1 OperallOri z sierra eoiuns 4 1 Chapter 5 LabView Demo 5 0 Introduction 5 1 Chapter 6 Interfacing to the Card 6 0 Introduction 6 1 6 1 DLL Functions 6 2 Appendix A Material Parameters B Specifications C Troubleshooting Chapter 1 Installation 1 0 Introduction The SQM 242 Card is a powerful Thin Film Deposition Controller on a PCI card Significant features include Measure four 1MHz to 10M
21. ftware is supplied will be free from defects for a period of 90 days from the date of shipment Sigma Instruments does not warrant that 1 the software and any updates will be free from defects 2 the software will satisfy all of your requirements 3 the use of the software will be uninterrupted or error free Limitation of Warranty Defects from or repairs necessitated by misuse or alteration of the product or any cause other than defective materials or workmanship are not covered by this warranty NO OTHER WARRANTIES ARE EXPRESSED OR IMPLIED INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE UNDER NO CIRCUMSTANCES SHALL SIGMA INSTRUMENTS BE LIABLE FOR CONSEQUENTIAL OR OTHER DAMAGES RESULTING FROM A BREACH OF THIS LIMITED WARRANTY OR OTHERWISE Return Policy The purchaser may return this product in new condition within 30 days after shipment for any reason In case of return purchaser is liable and responsible for all freight charges in both directions Sigma Instruments 120 Commerce Drive Unit 1 Fort Collins CO 80524 USA 970 416 9660 970 416 9330 fax Software License Agreement Sigma Instruments grants to you the Licensee a non exclusive license to use this software on any computer as long as only one copy is used at a time Sigma Instruments retains ownership of the software Licensee may transfer the software to another party so long as the party agrees to acc
22. gain of the control loop High gains yield more responsive but potentially unstable loops Try a value of 25 then gradually increase decrease the value to respond as desired to step changes in the rate setpoint Term The integral term controls the time constant of the loop A small I term say 5 to 1 seconds will smooth the response and minimize overshoot to step changes D Term The differential term causes the loop to respond quickly to changes Use 0 or a very small value to avoid oscillations Name It may be helpful give an output a more meaningful name perhaps the material being deposited or the evaporation supply being controlled Chapter 2 SQM 242 CoDep 2 3 Edit Recorder Mode When Recorder mode is selected for an output the output is not controlled by the PID loop Instead the output supplies a voltage that is proportional to an input value Recorder Output A2 xi Input Output Sensor Analog E C EBeam1 I EE me 3 Cancel C EBeam 2 I 3B C Output 3 eo ee C3 Update C Gas Flow v4 Cg C4 Input Reading Output Full Scale RatefA Rate Thickness Power Voltage erui 104 s C 100k 10 C 71 Volt C 1004 s C 1000kA 100 10 Volts Input Selects the sensor analog input or control output that is being measured Only one input can be selected Output The recorder output voltage can vary from OV to 10V Output Full Scale establishes the measured value on
23. hich may show the average of several sensors assigned to an output this screen displays raw input readings The size of the grid is adjusted to display only the components installed in your system In the sensor grid the Life column displays the life remaining for each sensor based on the sensor Min Max values entered in the Setup screen In the analog input grid two readings are displayed Volts shows the measured voltage on the analog input while Units displays the reading in the units displayed on the main screen i e CFM The next section explains how to define analog input units The last column shows the function assigned to each input output control setpoint monitor or unassigned If an input is assigned to a control loop that output is listed An input assigned as a setpoint monitor see the next section shows Monitor If an input is assigned as both a control input and a setpoint monitor only the control function is listed Unassigned inputs show None Chapter 2 SQM 242 CoDep 2 6 View Menu Input Setup The Input Setup screen configures each input on the SQM 242 and SAM 242 cards Inputs are numbered consecutively starting with Card 1 Sensors 1 to 4 then Card 2 Sensors 5 to 8 etc The SAM 242 analog input card is shown as Analog 1 to 4 NIST Sensors Density ZFactor Tooling Monitor gt SetPt A OK 1 11 00 1 000 101 0 M 110 000 2 1200 f 2000 f 1020 jv 210 000 Cancel 3
24. ined for monitor only applications With SQM 242 Monitor you enter sensor Density Tooling and Z factor parameters then click Start to begin taking readings SQM 242 Monitor Default dat E 5 x File Setup About stan Zero All Sensor Setup Density Tooling Z Factor Rate A s Thick kA Freg Hz Life gm cc 0 0 000 54995422 d 1000 1000 1000 0 000 Fail 0 000 Fail 0 000 Fail Since this is a monitor only program there are no settings for output control The Setup screen contains only monitor related functions Simulate mode is not available because it would provide no additional information SQM 242 Monitor Setup Card Revision Card 1 Card 2 2 00 0 00 Cancel Period Filter Show a v Sec im Rdgs Sensors Z Xtal Freq Initial M Max in MHz 6 100 6 000 5 000 Log to File saw242 0G Capabilities to save setup parameters and log data to the hard disk are identical to those of SQM 242 CoDep Chapter 4 SQM 242 Multi 4 0 Introduction The SQM 242 Multi program extends the capabilities of the SQM 242 CoDep program to include up to six SQM 242 cards With the SQM 242 Multi program you can monitor up to twenty four sensors and control up to 12 source outputs SQM242 Multi Card Deposition E x Stop m Card 1 2 00 m Card 4 _Send A _Show Outputs Ce Thick Rate Dev Frequency Thick Rate Dev
25. l control components should be tied to a common earth ground using a low resistance cable This is particularly important in high noise Ebeam systems 1 5 Chapter 1 Installation 1 5 SAM 242 Card Connections The input and output and connectors on the SAM 242 card are identical to those on the SQM 242 card Input Connections BNC cables connect the SAM 242 input to the signals to be measured The SAM 242 accepts input voltages within 10VDC CAUTION The BNC connector shield of each SAM 242 input is connected to a common analog ground Input signals to the SAM 242 must be within 10V DC and share a common ground Failure to observe this constraint can result in damage to your equipment and or the SAM 242 card Output Connection The SAM 242 outputs are identical to the SQM 242 See the previous section for hookup instructions 1 6 Digital I O The SQM 242 card and SQM 242 CoDep software do not support the digital I O required to automatically open and close shutters rotate source pockets etc Sigma s optional SQS 242 CoDeposition software adds this capability to the SQM 242 card Using an inexpensive PLC the SQS 242 software provides virtually unlimited digital I O capabilities Contact Sigma Instruments for more information on interfacing the SQM 242 card to your system s digital I O 1 6 Chapter 2 SQM 242 CoDep 2 0 Introduction The SQM 242 CoDep program illustrates most of the capabilities of the SQM 242 card
26. l the Windows drivers as explained in section 1 2 Pay particular attention to any Windows version specific instructions in the README file 1 3 Chapter 1 Installation 1 4 SQM 242 Card Connections The control output and sensor input connectors to the SQM 242 card are shown below Refer to this drawing in the subsequent hookup instructions Sensor 932 000 Computer In Vac Cable 902 014 Source Shutter Feedthrough 930 000 10 BNC Cable 902 012 gt User Supplied had Control Cable JA Control Input e 6 BNC Cable 902 011 Evaporation Power Supply Output Chassis Ground Oscillator 900 010 Sensor Connections i a d dd ontrol Outputs A BNC cable connects the SQM 242 sensor input to the instrument f connector on the remote oscillator The maximum length is 50 feet 15 meters Sensor 1 4 Sensor 2 a Sensor 3 To ensure proper operation of the SQM 242 use oscillators manufactured by Sigma Instruments PN 900 010 Oscillators made by Sycon and Maxtek should also work The SQM 242 will not work with Inficon ModeLock oscillators l 7 Sensor 4 The connection from the remote oscillator teedthru connector to the vacuum chamber feedthrough is made using a short 6 inch 15 cm cable with BNC male to female connectors PN 902 011 Inside the vacuum chamber your in vac cable must be no longer than 30 inche
27. lated 1 4 Dual Phone Jack 0 to 10VDdc 1 kOhms 15 bits plus sign 0 4 to 99 99 gm cc 0 50 to 25 00 0 to 399 96 0 to 10V 0 to 10096 0 to 100 sec 0 to 9999 0 to 99 9 sec 0 to 99 9 sec 0 to 999 9 A s Normal or Simulate PID or Manual Any sensor s control any output An analog input controls any output 1 to 2 sec Appendix B General Specifications SQM 242 Card Type SQM 242 Max Cards per Computer SAM 242 Card Type SAM 242 Max Cards per Computer Power Consumption Operating System Operating Environment Storage Environment Dimensions HxW Weight Specifications PCI 32 bit 5V 33MHz 6 Slave to SQM 242 ribbon cable 1 5 W max Windows 98 ME NT 2000 XP 0 to 8096 RH non condensing 0 to 2 000 meters Indoor Use Only Class 1 Equipment Grounded Type Suitable for Continuous Operation Ordinary Protection not protected against harmful ingress of moisture Pollution Degree 2 Installation Overvoltage Category II for transient overvoltages 40 C to 70 C 107mm x 150mm 2 kg Appendix C Troubleshooting Defective crystal or improper software setup cause most SQM 242 problems Follow the procedures below to identify and correct common problems No Readings Be sure that the card is installed properly in Windows Verify that the cards show properly in Windows Device Manager as discussed in Chapter 1 The SQM 242 CoDep program View Card Setup screen must show
28. llent option if you have an application that already communicates with a stand alone deposition controller via RS 232 The Utilities CD ROM contains a fully functional copy of the SQS 242 program limited to 30 uses and a demo communications program First run the SQS 242 program then start the SQS242 Comm program and go to the Utility tab Select ActiveX then Version and click Send You will see the Version 3 XX response from the SQS 242 program including header and checksum characters The same ASCII commands are used to control the SQS 242 program from a different computer via RS 232 or Ethernet Visual Basic source code for SQM242 Comm is also on the CDROM 6 1 Chapter 6 Interfacing to the Card 6 1 DLL Functions In the function descriptions below long indicates a 32 bit integer double indicates a double precision real Array parameters require a pointer to the first element of the array standard C calling convention Note These function definitions are for SQM242A DLL which supports up to 6 SQM 242 cards and the SAM 242 card Contact Sigma Instruments for information on interfacing to the older SQM242 DLL Sif142Startup2 long Mode long CardStatus 0 to 7 Loads the DLL and initializes the card Must be called with Mode 0 before any other function The card status parameter is an array that returns card installation status information Mode 1 unloads the DLL any other value loads the DLL CardStatus 0 DLL and car
29. ly not installed properly in Windows See Section 1 2 for installation and troubleshooting information Frequency The frequency values for the quartz crystal sensors used as inputs to the SQM 242 Sensor readings outside the Max Min values cause a crystal fail error Values 1MHz to 10MHz are permitted but 6MHz crystals are most common Min Max values are also used to calculate the Life remaining on the sensor screen For 6 MHz crystals set the Max value to the highest possible new crystal frequency typically 6 1 MHz Set the Initial frequency to the nominal new crystal frequency MHz Set Min Frequency to the lowest useable crystal frequency typically 5MHz Keep in mind that some materials cause premature crystal failure Period Sets the measurement period between 2 seconds 5 readings per second and 2 seconds A longer period gives higher reading accuracy especially in low rate applications Filter Sets the number of readings used in the reading filter A low setting gives rapid response to process changes high settings give smoother readings Log to File Enables data logging to disk Enter a filename without path to save data in the application directory Enter a full path to save data in another directory Data is saved in comma delimited format easily imported import into any spreadsheet 2 10 Chapter 3 SQM 242 Monitor 3 0 Introduction The SQM 242 Monitor program is a version of SQM 242 CoDep that has been streaml
30. m in y mX b Offset The offset term for transforming voltage to measured units This is the b term in y mx b Units The units that you wish to display for the analog input Monitor An analog input can also act as a monitor to stop deposition For example an analog signal from an optical monitor could stop deposition when a certain voltage is reached A voltage input from a pressure transducer might also prevent deposition until a certain vacuum is reached Setpoint The voltage measured by a monitor input that will halt deposition Analog setpoints are entered in Volts not calculated units 2 9 Chapter 2 SQM 242 CoDep 2 7 View Menu Card Setup This dialog controls the most basic functions of the SQM 242 card It also provides useful installation and troubleshooting information Card Setup 51 xl Freq MHz M Simulate OK Max Initial Min o 6 101 6 002 5003 Card 1 2 00 t Card 2 0 00 Cancel Period Filter Analog 2 00 so 4 DLL Loaded UPdete Log to File SQM242 L0G Simulate Normally the SQM 242 card uses the quartz crystals as inputs for controlling the source outputs The SAM 242 card uses analog input voltages for control Simulate mode simulates these inputs No SQM 242 or SAM 242 card needs to be installed for the simulate mode Card 1 Card 2 Analog Shows the firmware revision of each installed card A value of 0 00 indicates that the card is not seen by the software and is probab
31. ma Instruments 120 Commerce Drive Unit 1 Fort Collins CO 80524 USA Phone 970 416 9660 Fax 970 416 9330 EMAIL support sig inst com
32. of Windows 5 Verify that the card was installed properly in Device Manager Right click on My Computer then left clicking on Properties Click on the Device Manager tab Hardware tab in Windows 2000 or XP then Device Manager You should see Sigma Instruments listed with the SQM 242 cards in the sub folder If the card is not listed or has a red x or yellow exclamation point repeat the installation procedures above carefully Note Occasionally it may be necessary to completely uninstall and reinstall a card Highlight the improperly installed card in Device Manager and press Delete Next run the Clean program in the SQM242 Card Drivers folder of the Sigma CD ROM Reboot the computer then follow the steps in this section carefully 1 3 CoDep Software Installation SQM 242 Card programs are also on the Sigma CD ROM Insert the CD ROM click the Windows Start button and then select Run Enter D SQM242 Card Setup exe and click OK Accept the default installation prompts When installation completes you may be prompted to restart your computer To run the SQM 242 CoDep program click Start then Program then Sigma Instruments and select the SQM 242 CoDep program To verify the SQM 242 cards are properly installed start SQM 242 CoDep Select the View menu then Card Setup If the card revision for each installed card is greater than 0 00 then it is installed properly Note f the version is shown as 0 00 then reinstal
33. ow when the optional SAM 242 card is used Card 1 Jumper Card 1 with SAM 242 with SAM 242 card installed Ribbon Cable installed JP5 OO OO O The SAM 242 card can go on either side of SQM 242 Card 1 as long as the ribbon cable is not twisted red stripe on the top or bottom of both cards Once each card is jumpered 1 Turn off the computer unplug the power cord and remove the computer cover 2 Locate an empty PCI slot and remove the screw holding the blank bracket for the slot Remove the blank bracket 3 With the card s gold contacts down place it above the PCI slot with the BNC connectors on the card extending through the back of the computer Press down firmly on the card to seat it into the connector Repeat with each card 4 Replace the screw at the top of the card bracket to secure the card Replace the cover on the computer and plug in the power cord 1 2 Chapter 1 Installation 1 2 SQM 242 Driver Installation 1 Turn on the computer and start Windows Windows should find New Hardware and prompt to Install Device Drivers 2 If you are prompted for the location of the Device Drivers insert the Sigma CD ROM and direct Windows to D SQM242 Card Drivers assuming D is your CD drive 3 When driver installation is complete you may be prompted to restart your computer 4 Check the README file in the SQM242 Card Drivers folder of the Sigma CD ROM for additional steps that are specific to your version
34. rogram 4 1 Chapter 4 SQM 242 Multi Show Sensors Show Outputs Toggles the card reading area between displaying individual sensor readings and the average of all sensors assigned to an output Read Stop Starts and stops the SQM 242 card s from measuring and controlling deposition When the card is stopped all outputs are set to zero Mode Alternates between reading sensors and simulating sensor readings Simulate mode is useful for training purposes since no sensors or even an SQM 242 card need to be installed In Simulate mode sensors will not indicate a rate reading until the output power reaches at least 5096 Also we introduce some noise into the readings in Simulate to better mimic an actual deposition process Init Enter card initialization values then press the Init button to send the values to the SQM 242 card s This must be done before sending any other settings The values will be saved on exit from the program Zero Sets the thickness reading of the selected sensor to zero You can select a specific sensor to zero all sensors on a card or all sensors on all cards using the Card Sensor dropdown boxes First select the sensor to be zeroed then click Zero Map Sensors Assigns each sensor to an output If a sensor is assigned to Monitor then it displays rate and thickness but does not contribute to the control of any output to rate setpoint If a single sensor is assigned to an output and the output mod
35. s 75 cm It connects from the feed through to the crystal sensor Note Sigma Instruments offers a Sensor Kit PN 934 003 single sensor or 934 004 dual sensor that includes crystals oscillators and all of the cables needed to complete the SQM242 sensor inputs to crystal head connections Chapter 1 Installation Output Connections Note If you are using the SQM 242 as a monitor only no output connection is needed The SQM 242 output connection is via a 74 Stereo Phone Jack A standard 74 Stereo Phone Plug is shown below with outer collar removed to show the contacts Output 1 is on the ring Output 2 is on the tip and a common ground is on the sleeve eee 1 Ring SLEEVE I gt V Ground x ee Sleeve Chan 2 Tip Connect the SQM 242 output to your evaporation power supply recorder or other equipment as described in the equipment s User Manual CAUTION Special care must be taken in connecting the SQM 242 card output to the input connector of your equipment Failure to understand and follow the equipment manufacturer s instructions can result in damage to the equipment and or SQM 242 card The SQM 242 output is O to 10 VDC See section 3 of this manual for instructions on setting the SQM 242 output Full Scale level to match your power supply If your equipment needs a 4 20 mA control signal you must obtain a voltage to current converter Ground Connection The chassis of al
36. sors to measure and control deposition of your EBeam or thermal power supply In another example you might want control deposition rate by controlling temperature You can assign an analog input to a control output measure and control temperate then use a quartz sensor as a final thickness setpoint monitor If you select a sensor or analog input that is already assigned to another output an error message will be displayed when you try to update the configuration You will have the choice of abandoning the change or overriding the previous configuration Your choice could leave a control output with no inputs In that case output power is fixed at 096 Note The sensor or analog input selected does not have to be on the same SQM 242 or SAM 242 card as the control output Full Scale The output voltage that corresponds to 100 output power Full scale values to 10 volts are possible The full scale output voltage is a function of your power supply s input specifications Max Power The maximum output power allowed for an output in percent of full power This limits the maximum of Full Scale voltage that will be sent to the source supply Note In Simulate mode at least 55 power is required to simulate deposition This simulates a minimum power that might be required to vaporize a material Slew Rate The maximum Full Scale power change per second allowed on an output during PID control P Term The proportional term sets the
37. t the loop is allowed to output expressed as 0 0 to 1 0 representing 0 to 100 SlewRate Maximum rate of change that the output can change expressed as Percent of full scale x 0 01 Second Sif142Auto long Output Exits manual power control and starts the control loop running on the indicated output channel Output 0 11 indicating the output to place in PID control Sif142Loop2 double Rate double P double I double D long Output Sets the control loop parameters for an output The sensors specified in the Sif142MapSensors function are averaged to provide the input parameters to the PID loop Rate Specifies the rate that we wish to control to from 0 to 999 9 Angstroms Second P Proportional gain term of the PID loop A unitless number from 0 to 9999 I Integral term from 0 to 99 9 expressed in seconds D Derivative term from 0 to 99 9 expressed in seconds Output The output 0 to 13 the parameters apply to Sif142SetPower long Output double Power Sets the control voltage value in manual mode If an output was in Auto mode turns off PID control and places the output in Manual mode Output Specifies which output 0 to 13 Power Power is between 0 0 and 1 0 representing 0 to 100 of full scale 6 4 Chapter 6 Interfacing to the Card Sif142MapSensors long SensLoop 0 to 23 An array that associates each sensor 0 to 23 with an output 0 to 13 for PID control An output value of 1 for a
38. tput Auto Manual Off or as a Recorder output See the next section for information on recorder outputs These controls are common to most dialog boxes in the program OK Saves the settings in the dialog box sends them to the SQM 242 card and closes the dialog box Cancel Closes the dialog box without saving the settings or sending them to the SQM 242 card Update Saves the settings in the dialog box sends them to the SQM 242 card but does not and close the dialog box output 1 5 x Input r Output OK Sensors Analog FullScale P adi gt ow 5 0 50 0 Cancel EN DNE S Max Pwr EMI DENEN S 100 0 1 00 Update M 4 8 LI Slew Rate D Name 100 0 1 00 EBeam 1 Input Selects the sensor s or analog input used as an input to the output s PID control loop Click Sensors to configure the loop for quartz sensor inputs If more than one sensor is selected their averaged rate and thickness readings are used by the PID control loop and displayed on the main screen If an analog input is selected quartz sensors are disabled Only a single analog input can be selected Analog inputs extend deposition control to non quartz sensor inputs Perhaps you want to control a backfill gas during deposition You can use an analog input to measure pressure from a manometer and the control output to drive a gas flow 2 3 Chapter 2 SQM 242 CoDep valve You can still use one or more quartz sen
39. well before their typical value If you find that crystals consistently fail early you may want to set Min Frequency to a higher value If the frequency reading is zero or unstable check the InVac cable from the feedthrough to the sensor Also check that the crystal is seated properly in the sensor head While not depositing observe the frequency readings for each sensor The value should be stable within 3Hz When the frequency reading is stable reconnect the source supply Start the deposition process in Manual mode with 0 Power The frequency readings should remain stable In Manual mode slowly raise the Power until a Rate reading is displayed on the screen As material is deposited on the crystal the frequency should drop slowly and consistently If not check your source supply for erratic output Also assure that the sensor is not too close to the source particularly in sputtering An increasing frequency indicates that the sensor is not adequately cooled Incorrect Rate or Thickness Measurement First complete the procedures in the previous section to assure reliable sensor operation Set the crystal Tooling as described in Section 3 Incorrect crystal Tooling values will cause consistently low or high rate thickness values for every material Verify that the Density and Z Factor values match those in the Material Parameters Appendix If the material is not listed check a materials handbook Density has a signific
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