HXP1000-MECA User Manual
Contents
1. 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 552. HXP1000 MECA Hexapod High Load 6 Axis Parallel Kinematic Positioning System RoHS Compliant GO USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Warranty S A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K J EDH0328En1020 08 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorre
3. Newport Experience Solutions The HXP1000 MECA Hexapod is a high load capacity parallel kinematic motion device that provides six degrees of motion It also features long travel ranges fast speeds high stiffness and stability as well as very easy to use and flexible coordinate systems or pivot points Newport s HXP1000 MECA Hexapod is driven by six DC servo motor driven actuators which provide precise MIM and fast speed The quality of the actuators has obviously a strong impact on the overall motion performance of a Hexapod but of equal importance are the joints with which the actuators are attached to the base and the moving top plate The preloaded and backlash free cardan joints enhance not only the repeatability and positioning performance of the HXP1000 MECA but are also key to its position stability and stiffness The HXP1000 ELEC controller accurately masters the synchronized transformations from Cartesian input coordinates to the motion of the Hexapod legs In addition the HXP1000 ELEC feature instrument grade I O s hardware based input triggers event triggers high speed on the fly data acquisition fast TCP IP communication and integrated TCL programming language for on board processes All these make automating the application and programming much easier A requirement for many Hexapod motion applications is a virtual pivot point allowing the user to freely choose the pivot point in space for all rotations Newport has
4. taken this a step further by providing two pivot points The two user definable coordinate systems provided called tool moves with the Hexapod and work stationary coordinate system are programmable and flexible Imagine a machine tool where one can adjust the orientation of both the cutting tool and workpiece or in photonics the optical beam and the sample Incremental displacements are possible in either one in user friendly Cartesian coordinates and positions can be easily switched from one system to the other by a function call These powerful functions are a completely new way of mastering Hexapod motions without the need for complex external coordinate transformations A WORK i r i CARRIAGE Absolute moves and positions are i defined in the work coordinate system Incremental moves can BASE be done in the tool or in the work WORLD Be pecans ees coordinate systems gt 3 EDH0328En1020 08 15 HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Di Characteristics 3 1 Mechanical Specifications X Y Z x Dy z Travel range 62 93 mm 69 mm 39 5 mm 11 10 19 5 MIM Minimum incremental motion 0 3 ym 0 3 um 0 16 um 0 06 mdeg 0 06 mdeg 0 1 mdeg Uni directional repeatability typical 0 3 ym 0 3 um 0 16 um 0 06 mdeg 0 06 mdeg 0 1 mdeg Max speed 9 mm s 9 mm s 4 mm s 1 4 s 1 4 s 2 8 s Stiffness 2 10 Num 10 N um 100 Nium 1 Travel ranges are interdepen
5. terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user gt Newport EDH0328En1020 08 1 5 vi Experience Solutions HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Warni
6. 00 Radial Distance D mm 3 2 3 Horizontal Base Plate Lateral Force Force Position D 0 to 800 mm H 0 to 600 mm F au Any T T A rientation Le H 0 H 2000 Too H E SEU Be A he Sal H 300 ere H 400 S EE E H 500 SEN 10004 EE Ze H Force y 0 0 100 200 300 400 500 600 700 800 Radial Distance D mm 3 3 Weight Weight Ib kg Hexapod without cables 132 60 Cables 29 13 gt Newport Experience Solutions 5 EDH0328En1020 08 15 HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Di Connection to the HXP1000 ELEC Controllers 4 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents fr
7. all or tip over and cause injury If this Hexapod has been dropped or the case has been damaged switch off struts power and then disconnect the HXP controller from power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this Hexapod this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Eaperience Solitons vii EDH0328En1020 08 15 HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Cautions CAUTION Do not place this Hexapod in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not manipulate struts This may cause it to malfunction CAUTION Do not place this Hexapod in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this Hexapod in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this Hexapod if struts power is on Make sure that the cable to the electronics is disconnected before moving the Hexapod Failure to do so may damage the cable and cause an electrica
8. ct usage Load on the Hexapod greater than maximum specified load Carriage speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the Hexapod represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the Hexapod or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Table of Contents Warranty coi svcsalss sepagsn essence neas dececs leds das ness aa teens cap decors nec E aes ah canta stades ii EC Declaration Or CONOMIE RE ANR ee v D finitions and Sym Dols nsss eien eE E vi KE E vii EE Eeer viii 1 0 Introduction 1 LE Unpacking EEN H 2 0 Description 3 3 0 Characteristics 00 0 0 ccscscscscscscscscscsescscscssscsessseas 4 3 1 Mechanical Specifications sssssisisests stars nea iiasieis nia
9. dent The listed values are max travels per axis when all other axis are in their centered position Height 395 mm for Z 2 Stiffness depends on Hexapod position Values are given for all axis in their centred position CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 50 pm or better 3 2 Max Cantilever Distance of the Load 3 2 1 Horizontal Base Plate Load Position D 0 to 800 mm H 0 to 600 mm 5000 Lens Load Max Load N a 2000 1000 0 100 200 300 400 500 600 700 800 Radial Distance D mm 3 2 2 Vertical Base Plate Load Position D 0 to 800 mm H 0 to 600 mm 3000 l Fev Ba 2000 3 D SZ 1000 Load 0 100 200 300 400 500 600 700 800 Radial Distance D mm D Newport EDH0328En1020 08 15 4 Experience Solutions HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System 3 2 3 Base Plate at Any Position Load Position D 0 to 800 mm H 0 to 600 mm T T HE 2000 a HE A TRE S 8 1000 Load D 0 0 100 200 300 400 500 600 700 8
10. e direction of the cable output 175 between struts 3 and 4 y 8 8 8 1 Z k 6 38 162 916 7 X Y 425 y d BOTH PLATES 6 HOLES 9 35 9 C BORED 9 79 20 x 1 97 50 AT 60 ON 911 81 300 TX BOTH PLATES N L j 3 HOLES 0 35 9 So C BORED 9 79 20 x 1 97 50 SS AT 120 ON 915 35 390 l4 MODEL SHOWN HXP1000 MECA DIMENSIONS IN INCHES AND MILLIMETERS EACH SIDE 3 HOLES M6 THD 5 91 i DEPTH 47 12 rr 150 59 15 i A 2 59 65 CARRIAGE 15 55 415 395 395 HEXAPOD AT MIDDLE POSITION BASE 2 56 65 NOTE Top and base plates of the HXP1000 MECA Hexapod are made of anodized aluminum D Newport Experience Solutions 9 EDH0328En1020 08 15 HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Di Maintenance 6 1 6 2 EDH0328En1020 08 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The Hexapod requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The Hexapod must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to re
11. ee of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts gt Newport EDH0328En 1020 08 1 5 6 Experience Solutions HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System 4 2 Connection WARNING Always turn the controller s power OFF before connecting to a strut Anytime prior to power up each strut must be connected with the supplied cable to the corresponding SUB D25F plug located at the rear panel of the HXP1000 ELEC controller labeled MOTOR 6 SUB D25F CONNECTORS FOR MOTOR CABLES WARNING Each Hexapod strut label c
12. l shock CAUTION Be careful that the Hexapod is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this Hexapod always unplug the equipment from the power source for safety CAUTION Contact your Newport service facility to request cleaning and specification control every year D Newport EDH0328En1020 08 15 viii Experience Solutions HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System High Load 6 Axis Parallel Kinematic Positioning System HXP1000 MECA Hexapod Di Introduction This manual provides operating instructions for the Hexapod that you have purchased ATTENTION Do not manually turn struts CAUTION Please read all chapters of this manual carefully before operating your Hexapod NOTE This product complies with the RoHS directive Restriction of Hazardous Substances D Newport Experience Solutions 1 EDH0328En1020 08 15 HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System 1 1 Unpacking CAUTION The HXP1000 MECA weighs 60 kg Use proper lifting techniques and personnel protection to handle the HXP1000 MECA D Newport EDH0328En1020 08 15 2 Experience Solutions HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Di Description As a standard feature the HXP1000 ELEC controller allows the user to choose a virtual pivot point in space for all rotations GO
13. ngs WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this Hexapod when struts are emitting smoke or is unusually hot to the touch or are emitting any unusual odor or noise or is in any other abnormal state Stop using the Hexapod immediately switch off struts power and then disconnect the HXP controller from power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the Hexapod yourself as this can be dangerous WARNING Make sure that this Hexapod is not exposed to moisture and that liquid does not get into the Hexapod Nevertheless if any liquid has entered the Hexapod switch off struts power and then disconnect the HXP controller from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this Hexapod this may cause an electric shock or lock the drive Do not use this Hexapod if any foreign objects have entered the Hexapod Switch off struts power and then disconnect the HXP controller from power supply Contact your Newport service facility for repairs WARNING Do not place this Hexapod in unstable locations such as on a wobbly table or sloping surface where it may f
14. nna 4 3 2 Max Cantilever Distance of the Load 4 Horizontal Bas later emeetatie t sin GENEE ed A Vertical Bas PAS rai ioneeresreneeeteses cdesussandvvavesarcecodesstens 4 Base Plate at Any Position 5 Horizontal Base Plate Lateral Force ccccccccccccsesscceeessesceeeessnseeeeess 5 a WISN rd ege ee e 5 4 0 Connection to the HXP1000 ELEC Controllers 6 4 1 Warnings on Controllers scisciesdivsscestecercees caseatveniets na 6 A2 COMME CHOM E 7 43 CADIeS Linie a O E A E AAE TRE TEAN 8 5 0 Dimensions 9 6 0 Maintenance oo ccccscsscsscssessesssssessssesssseeesses 10 Gel Mateus EE Eege EA 10 6 2 EE eege ie eebe eege degen eebe dense tetes seed 10 Service POLI eege SUR RE 11 D Newport Experience Solutions iii EDH0328En1020 08 15 HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System gt Newport EDH0328En1020 08 1 5 iv Experience Solutions HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System EC Declaration of Conformity x Le Bs OS Ka Se Ka Se Ka En 2 QG TX KE S XXe S NI Se K OG re Ki Gs K i SA ITN XXe ENS gt Newport Experience Solutions NOL Ol OL Oe OL Ou Oo SE E e AM RS HXP1000 MECA ND ue LA S ES 6 EC Declaration of Conformity Newport Sc Ka following Annex II 1A Experience Solutio
15. ns Gi Lx of Directive 2006 42 EC on machinery 9 Ne re Ge Ve R RES OOOO EL S Lk The manufacturer MICRO CONTROLE Spectra Physics 9 rue du Bois Sauvage 91055 Evry CEDEX FRANCE Hereby declares that the machinery Description HXP1000 MECA e Function High Load 6 Axis Parallel Kinematic Positioning System Models HXP1000 MECA the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards e NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 6 PK ORIGINAL DECLARATION Ge AN Done in Beaune La Rolande on 26 June 2015 ie Sg Dominique DEVIDAL ie Quality Director d v EDH0328En1020 08 15 HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Definitions and Symbols The following
16. orresponds to the axis number on the HXP1000 ELEC controller This label is also indicated on connectors of the strut D Newport Experience Solutions 7 EDH0328En1020 08 15 HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System 4 3 EDH0328En1020 08 15 Cables Each Hexapod is equipped with cables terminated with SUB D25 connectors These cables must connect the struts to the corresponding axis on the HXP1000 ELEC controller CAUTION Numbering of axes is important for both motor and encoder connections A mismatch will cause fatal errors during initialization WARNING These cables are shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk NOTE A sticker indicates the axis number on the SUB D25 connectors of each cable WARNING The HXP1000 MECA must be grounded via a threaded hole to avoid electrical disturbances generated by ground loops see image below gt Newport 8 Experience Solutions HXP1000 MECA High Load 6 Axis Parallel Kinematic Positioning System Dimensions TOP VIEW BOTH PLATES 3x3 HOLES M8 ac DEPTH 63 1 3 94 P LE lt 100 gt n 1 1 oo 37 5 I NOTE 6 89 The X axis points in th
17. turn your Hexapod to Newport s After Sales Service after every 2000 hours of use for lubrication If your Hexapod is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the Hexapod that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your Hexapod please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a Hexapod without prior authorization will void your warranty D Newport 1 0 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 1 1 EDH0328En1020 08 15 Newport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel
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