User Manual PZ176E - Physik Instrumente
Contents
1. Troubleshooting Piezo Nano Positioning PI 4 Troubleshooting Positioner does not move Cables not connected properly m Check the connecting cables W Note the required voltage range for the analog signal at Control In The control input range is basically one one hundredth of the output voltage see Analog Operation p 8 4 1 Customer Service Still having problems Call your PI representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system W Current firmware version of the controller if present W Software version of drivers and or host software if present m Operating system on host PC if present WWW pi ws E 464 PZ176E Release 1 0 1 Page 12 PI Amplifier channels Average output power per channel Peak output power per channel 5 ms Average current per channel Peak current per channel 5ms Amplifier bandwidth small signal Amplifier bandwidth large signal Ripple noise 0 to 100 kHz Current limitation Voltage gain Control input voltage Input impedance Interface and operation PZT voltage output socket Control input socket DC Offset Display Miscellaneous Operating voltage Operating temperature range E 464 PZ176E Release 1 0 1 Technical Data Piezo Nano Positioning 5 Technical Data 5 1 Specifications E 464 00 Function Power amplifier for PICA high volta2. switch the device off and disconnect it from the line power 3 1 AC Power and Line Power Fuses Unless otherwise requested the unit will be set up for the power predominant in your country New line power fuses are required when changing the supply voltage CAUTION Both fuses are active and have to be checked if there is a fault Figure 4 Fuse carrier Figure 3 Position of the line fuses and fuse carrier only one of two fuses visible To access the line power fuses proceed as follows 1 Switch off the E 464 and remove the line cord 2 Waita minute to be sure that any residual voltage has dissipated WWW pi wS E 464 PZ176E Release 1 0 1 Page 10 Maintenance Piezo Nano Positioning PI 3 Pryopen the door that covers the fuse carrier and pry out the fuse carrier see figures above 4 Be sure to replace both fuses with fuses of the type appropriate for the new voltage 220 VAC to 240 VAC IEC 0 8 AT slow blow 100 VAC to 120 VAC IEC 1 6 AT slow blow 5 Rotate the fuse carrier so that the valid voltage setting 115 V or 230 V will show through the window when the door is closed 6 Reinstall the carrier and close the door 3 2 Cleaning The outside surface of the case can be cleaned using mild detergents or disinfectant solutions Organic solvents must not be used IEC fuses are cited other fuse standards may require higher nominal current rating Wwww pi ws E 464 PZ176E Release 1 0 1 Page 11
3. edet te d 15 53 11 2 Pin High Voltage Connechor 15 Index 17 Introduction Piezo Nano Positioning PI 1 Introduction 1 1 Overview Figure 1 E 464 bench top piezo amplifier for three channels The E 464 is a bench top piezo driver amplifier for PICA high voltage PZTs Its three low noise 4 quadrant amplifiers provide a gain of 100 and can output and sink a peak current of 25 mA and an average current of gt 3 mA each If only 1 channel is operated an average output power of 12 W can be achieved Three 372 digit LED displays show the output voltage of each individual channel Analog Control E 464 amplifiers are designed to provide precise control of open loop piezo positioning systems The amplifier output voltage is determined by the analog signal at the Control Input combined with the DC offset potentiometer setting 7 2 Prescribed Use www pi ws Based on their design and realization E 464 PICA HVPZT Piezo Amplifiers are intended to drive capacitive loads in the present case piezoceramic actuators E 464s must not be used for applications other than stated in this manual especially not for driving ohmic resistive or inductive loads Observe the safety precautions given in this User Manual The E 464 meets the specifications as defined by DIN EN 61010 for safe operation under normal ambient conditions See the specifications table for details see Specifications p 13 E 464 PZ176E Release
4. provides the following operating elements DC Offset turning knob 10 turn potentiometer for DC Offset see Analog Operation p 8 CONTROL INPUT BNC Connection of control signal see Analog socket Operation p 8 HV PZT LEMO socket High voltage output for PZT see Connectors p 14 3 digits LED Display Display for PZT high voltage The power connection see Line Voltage Connection p 6 input voltage selection and line fuses p 10 are located on the rear panel www pi ws Line Voltage Connection Unless you request otherwise upon delivery the E 464 will be set up for the voltage predominant in your country either 115 V 50 60 Hz or 230 V 50 60 Hz To adapt the E 464 to a different line voltage the line power fuses must be replaced See AC Power and Line Power Fuses p 10 for instructions and for the required fuse types Connect the included line cord from the E 464 rear panel to an appropriate power outlet E 464 PZ176E Release 1 0 1 Page 6 Operation Piezo Nano Positioning PI 2 3 Piezo Actuator Connection A www pi ws DANGER HIGH VOLTAGE E 464 Power Amplifiers output VERY HIGH VOLTAGES and HIGH CURRENTS which can cause death or injury Take special care if connecting products from other manufactures Follow general accident prevention rules Working with these devices requires adequately trained and educated operating personnel During operation do NOT touch
5. 1 0 1 Page 2 Piezo Nano Positioning PI Introduction 7 3 Safety Precautions Carefully read also the user manuals and or technical notes of all other components involved such as controllers or software Failure to heed warnings in this manual can result in bodily injury or material damage or loss of warranty DANGER HIGH VOLTAGE E 464 Power Amplifiers output VERY HIGH VOLTAGES and HIGH CURRENTS which can cause death or injury Take special care if connecting products from other manufactures Follow general accident prevention rules Working with these devices requires adequately trained and educated operating personnel During operation do NOT touch any part which might be connected to the HV output d E WARNING PZTs Sensitive to Overvoltage or Reverse Polarity Exposing some PZTs to voltages too far outside their operating range will destroy the active element in the actuator Make sure that both the polarity and the voltage as seen by the PZT are within the allowable range Be especially vigilant regarding polarity when using older actuators adapter cables and controllers set up for non standard voltage ranges CAUTION Read this before operating the equipment covered in this manual Always keep the User Manual safe and close to the described device In case of loss or damage to the instructions please order a new copy from your PI distributor or download one from www pi ws http www pi ws Also keep a
6. 7 1 upwards Connection of a sensor monitor signal from a sensor or servo module e g E 509 is required The driver set is also available for download from the PI website Access to HyperBit Functionality for Enhanced System Resolution Supports certain D A boards Pl s patented Hyperbit technology for providing position resolution higher than that of the D A board is in the E 500 ACD driver set Activating Hyperbit requires purchase of the password which can be obtained from PI under Order No E 500 HCD E 464 PZ176E Release 1 0 1 Page 4 Piezo Nano Positioning PI Introduction 1 5 Unpacking Unpack the E 464 PICA HVPZT Piezo Amplifier with care Compare the contents against the items covered by the contract and against the packing list The following components are included E 464 00 HVPZT Piezo Amplifier 3 Channels 1100 V Bench Top 3763 line cord PZ176E User Manual for E 464 00 this document E500T0011 Technical Note for GCS LabVIEW driver set Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in case the product need be shipped again WWW pi ws E 464 PZ176E Release 1 0 1 Page 5 Operation Piezo Nano Positioning PI e Operation 2 1 Front and Rear Panel Elements Figure 2 E 464 front panel with operating elements The E 464 amplifier has 3 amplifier channels Every channel
7. Positioning P I Piezo Nano PZ176E User Manual E 464 PICA HVPZT Piezo Amplifier Release 1 0 1 Date 10 07 2007 This document describes the following product m E 464 00 PICA HVPZT Piezo Amplifier 3 Channels Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws i SC 2 info pi ws www pi ws Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI amp PICA Copyright 1999 2007 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 10 07 2007 Document Number PZ176E BSc Release 1 0 1 E 464 User PZ176E doc Subject to change without notice This manual is superseded by any new release The newest release is available for download atwww pi ws http www pi ws Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der R merstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product N
8. able shield for protective ground front view WwWW pi ws E 464 PZ176E Release 1 0 1 Page 15 Index 2 2 Pin High Voltage Connector 14 A AC Power and Line Power Fuses 6 10 Analog Operation 6 8 12 Analog signal 8 12 B Bipolar Piezo Actuators e 8 C Cleaning 11 Computer Control 4 Connectors 6 14 Customer Service 12 D DC Offset potentiometer 8 F First Operation 9 Frequency Response Diagram 14 Front and Rear Panel Elements 6 Fuses 10 H High voltage connection 14 Introduction 2 L Line Voltage Connection 6 9 M Maintenance 10 O Operation 6 Overview 2 p Piezo Actuator Connection 7 Prescribed Use 2 S Safety Precautions 3 Scope of delivery 5 Specifications 2 13 T Technical Data 13 Troubleshooting 12 U Unipolar Piezo Actuators 8 Unpacking e 5 W Wiring Example 8
9. ame Power Amplifier for HVPZT Model Numbers E 464 Product Options all complies with the following European directives 73 23 EEC Low voltage directive 89 336 EEC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 February 19 2007 Karlsruhe Germany 7 Dr Karl Spanner President About this Document Users of this Manual This manual is designed to help the reader to install and operate the E 464 PICA HVPZT Piezo Amplifier It assumes that the reader has a fundamental understanding of motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the E 464 PICA HVPZT Piezo Amplifier as well as the installation procedures which are required to put the system into operation Conventions The notes and symbols used in this manual have the following meanings WARNING gt P Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death DANGER Indicates the presence of high voltage gt 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if
10. any part which might be connected to the HV output DANGER IMPROPER WIRING CAN CAUSE DEATH INJ URY DAMAGE AND VOID WARRANTY Modification of HIGH VOLTAGE Connectors should only be carried out by the manufacturer Any unauthorized modification may jeopardize operating personnel Treat HIGH VOLTAGES and HIGH CURRENTS with respect Connect the piezo actuator to the E 464 HV output If you are connecting other actuators or wiring your own connector read the discussion of actuator type carefully and any documentation that came with the actuator WARNING PZTs Sensitive to Overvoltage or Reverse Polarity Exposing some PZTs to voltages too far outside their operating range will destroy the active element in the actuator Make sure that both the polarity and the voltage as seen by the PZT are within the allowable range Be especially vigilant regarding polarity when using older actuators adapter cables and controllers set up for non standard voltage ranges E 464 PZ176E Release 1 0 1 Page 7 Operation Piezo Nano Positioning PI 2 3 1 Bipolar Piezo Actuators Here the output voltage swing is so chosen that the actuator sees both negative and positive high voltages The output always has one lead at 0 V and here the other is in a zero crossing range commonly 500 V 2 3 2 Unipolar Piezo Actuators The notation of positive and negative polarity of piezo actuators does not refer to their direction of motion Unipolar
11. ge PZTs Amplifier Output voltage 0 to 1000 V optionally 250 to 750 500 to 500 250 to 750 0 to 1000 3 gt 3 5 W up to 12 W if 1 channel is operated 25 W gt 3 5 mA up to 12 mA if 1 channel is operated 25 mA 1 kHz 3 5 Hz 660 nF 35 Hz 70 nF 5 mVnus 50 mVp p 100 nF Short circuit proof 100 1 0 to 10 V 100 kO LEMO EGG 0B 701 CJL1173 3 x BNC 3 x 10 turn pot adds 0 to 10 V to Control IN 3 x 32 digit LED display for output voltages 100 120 or 220 240 VAC selectable fuse change required 5 C to 50 C over 40 C max av power derated 10 Page 13 Technical Data Piezo Nano Positioning PI Mass 4 3 kg Dimensions 236 x 88 x 273 mm handles 5 2 Frequency Response Diagram Figure 5 E 464 operating limits with various PZT loads Values shown are capacitance in nF WwWW pi ws E 464 PZ176E Release 1 0 1 Page 14 Technical Data Piezo Nano Positioning PI 5 3 Connectors 5 3 1 2 Pin High Voltage Connector DANGER IMPROPER WIRING CAN CAUSE DEATH INJ URY DAMAGE AND VOID WARRANTY Modification of HIGH VOLTAGE Connectors should only be carried out by the manufacturer Any unauthorized modification may jeopardize operating personnel Treat HIGH VOLTAGES and HIGH CURRENTS with respect Typ LEMO EGG 0B 701 CJL 1173 HV OUT 0 1100 Pin Assignments HV OUT HV output up to 1100 V PGND Controller socket PGND Power ground Housing c
12. nd add all further information e g extended instructions or Technical Notes to the User Manual WWwW pi ws E 464 PZ176E Release 1 0 1 Page 3 Introduction Piezo Nano Positioning PI CAUTION AIR CIRCULATION Do not cover the ventilation slots on the top side of the E 464 The device needs to be installed horizontally with 3 cm air circulation area Vertical mounting prevents internal convection Insufficient air flow will cause overheating and premature failure 1 4 Computer Control WWwW pi ws Optionally digital control via a D A converter is possible For several D A boards from National Instruments PI offers a corresponding LabVIEW driver set which is compatible with the Pl General Command Set GCS the command set used by all PI controllers A further option includes the patented Hyperbit technology providing enhanced system resolution E 500 ACD E 500 HCD CD with Driver Set for Analog Controllers available free of charge upon request Computer control can be implemented using a DAC board in a PC to generate the analog input signal PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI The PI Analog Controller drivers support all D A converter boards from National Instruments that are compatible with DAQmx8 3 LabVIEW compatibility is given from version
13. not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints The motion controller and the software tools which might be mentioned in this documentation are described in their own manuals All documents are available as PDF files via download from the PI Website www pi ws http www pi ws For updated releases contact your Physik Instrumente sales engineer or write info pi ws mailto info pi ws Contents Introduction 2 LT e 2 12 Prescrib d se aad 2 13 7 Safety PIECAULIONS Snr eege edel 3 14 Computer Gontrol iet hee tenant cre tence entrare dee dent 4 15 Unpacking EE 5 Operation 6 21 Front and Rear Panel Elements 6 22 Line Voltage Connection RER 6 23 Piezo Actuator Conpechon nennen 7 23 1 Bipolar Piezo Achiators sss 8 232 Unipolar Piezo Achuaiors sss 8 23 33 Wiring EXamMmplE eeri eie teret Hee tete de nee rh ne eae 8 24 Analog QOS ANON EE 8 25 First Operation ehe a e RR e REOR ELE ER ERR GER n 9 Maintenance 10 31 AC Power and Line Power Fuses enssseseeeeeeeeeeeeeeenreesrresrrrsseren een 10 32 CI e TEE 11 Troubleshooting 12 41 Customer Service uir Rt e e ex dM EE qo eds 12 Technical Data 13 bd Specifications steterit rere e ne ge de e Pe deed ae ds 13 52 Frequency Response Diagram c ccceeeeeeeeeeeeeeeceeeeeeeeeeeennanaees 14 53 OGohnectorS us up ie ROT ette
14. piezos of any polarity will elongate when a higher voltage is applied to their than to their terminal Positive and negative refers to the sign of the voltage on the core of the cable All standard PI piezo actuators with 3 conductor LEMO connectors have positive polarity 2 3 3 Wiring Example In the wiring example shown at right a HU OUT positive piezo is connected so as to have 0 to 1100 V applied To achieve this the positive terminal possibly labeled 1100 V is connected to the variable HV Out and the negative terminal to PGND 9 110QU PGND 2 4 Analog Operation The output voltage is controlled by an analog signal Control IN applied to the BNC input added the DC offset voltage The magnitude of the sum must be in a range equal to 1 100th of the factory set output voltage range usually to 1100 V Control In Signal The external voltage applied to the Control In BNC socket can be anywhere in the range of 10 to 10 V but may not have an active swing more than 11 V wide WWwW pi ws E 464 PZ176E Release 1 0 1 Page 8 Operation Piezo Nano Positioning PI DC Offset potentiometer Depending on the position of the potentiometer a DC voltage between 0 and 10 V is made available If you require a constant DC offset e g 0 make sure the knob stays at the required position NOTE Due to the constant gain of 100 the range of the Amplifier IN signal is set to 1 100 of the output voltage
15. range If an optional output range is set the Amplifier In signal has to be chosen accordingly The analog control signal range is always 1 100 of the output voltage range 2 5 First Operation 1 Connect the sensor cable to the corresponding socket 2 Turn the DC offset potentiometer full counterclockwise CCW 3 Make sure that voltage at Control In is set to 0 V 4 Connect the amplifier to line power The connection is on the rear panel see Line Voltage Connection section see Line Voltage Connection p 6 5 Turn on the line power 6 Command the first motion of the piezo actuator by turning the offset potentiometer full clockwise CW then back full CCW to run the actuator over the complete nominal travel range The PZT voltage can be seen on the display make sure that the full voltage swing is attained 7 Ifan external analog signal is used connect the signal source to the Control In BNC socket If the signal range is not 1 100 of the output voltage NOTE If only one or two amplifier channels are operated the full output power becomes available to the channels in use see specifications table Wwww pi ws E 464 PZ176E Release 1 0 1 Page 9 Piezo Nano Positioning PI Mlaintenance 3 Maintenance WARNING LINE VOLTAGE E 464s need to be installed in such a way that they can quickly and easily be separated from the line voltage Before cleaning the E 464 changing the AC fuses and removing or installing modules
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