PR4000B Digital Power Supply and Readout
Contents
1. Interconnection Cables from MKS The following table lists the standard cables provided by MKS Instruments They are all in compliance with the CE guidelines If the cable needed for your particular instruments is not listed there then please contact your MKS center The cable length is 3 meters standard length 5 m or 10 m optional For cable length greater than 10 m please contact your MKS center continued on next page 14 PR400B F Chapter 2 Installation Cables for combination with the PR4000 For pressure transducers or in line pressure controllers MKS Cable Type type or series 120 CBE 120 96 3M 121 CBE 112 14 3M 622 623 624 625 223 122A CBE 112 2 3M 621 626 627 628 127 128 722A with 15 pin type D connector CBE 259 5 3M 722 9 pin type D connector CBE 700 1 3M 722 terminal block CBE 700 99 3M For mass flow meters MFM or mass flow controllers MFC mit 15 pin type D connector 179 1179 2179 1479 1259 2259 258 358 1359 558 1559 M100 CBE 259 5 3M mit 9 pin type D connector 1179 2179 1479 M200 M330 CBE147 12 3M Table 1 Standard Interconnecting Cables Note ud Flow controllers with 9 pin connector do not have the Valve Close input y remotely closing of the control valve Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment Should you choose to manufacture your own cables follow the guidelines listed below 1 The cable2. displays text in the display 4 text text 32 byte string which will be written to display 4 display text HELLO return dislayed text blanks out display Request Key KY KY request most recently pressed key key number OFF 00007 ON 00008 ESC 00009 ENTER 00010 RIGHT 00011 LEFT 00012 UP 00013 DOWN 00014 No Key 00255 Number 0 n return key code which was pressed most recently If no key was pressed since last command then 00225 00000 is returned return key code and number of keys which were not polled since last command 49 Chapter 5 Interface PR400B F Dialog DG DG dialog set display to a specific dialog dialog dialog dialog index See also Appendix D Dialog Reference set display do dialog 2 return actually displayed dialog ID String ID ID retrieve ID string PR42vvrrsssss format vv version rr release sssss serial number returns ID string returns ID string Remote Mode RT RT enable enable set to remote operation enable OFF ON switch PR4000 to remote mode ask for remote mode switch PR4000 to local mode Access Channel AC ACc setpoint vlv actvalue vlv access channel setpoint actvalue 5 110 of FS formatted in selected range viv OFF ON set setpoint of channel 1 and retri
3. Remote Mode Alcaide sinning vei dad etd EE 50 Access Channel AG 2 2 t reet itor tati to eet E oe REESE RIA HER HERE LEER RRRALUISER Id reg 50 Actual Valls AV i ios rg ee ete ue Pee lara doge eee 51 EE DEET MM EE 51 External Input EX ii RIDE 51 Stats RE 51 Valves VE oi en eL ete e RC d ebd mt nte 52 Relays RD a eto tato no EE 52 Displays DP iiri i Elit dede eta a OAS 52 Display RE 52 Range BG eegenen AA ENEE a t Du cade e v T ea 53 EREECHEN 53 Offset OF amp ioni etre D TE 53 RED Offset RO haee ta Sh eee E 53 Aut zero AZ EE 54 lef E CAE E 54 O tp t Range OT EE 54 External Imput Range Elisa aldo 54 External Output Range EO seen enne 54 Signal Mode SM 355 3 ifr sserefad dai ciba iii lol olii 55 9S6ales S EE 55 Linearization EN ES ott literae teet 55 Limit Mode EM ciato rette ce et pere td eee dott ai 55 Dead Band DB ene alii es eA 56 Upper Limit UI WEE 56 Lower Limit ED t eet ed eee leet e bi ed eerie eene M s 56 Formula Relay FR ga te i et Ae Eo ente oe d 56 Formula Temporary F NEE 57 Parity PY e scu acit erat erra EE m eine eil ani e ai ae 57 Baudrate BD tette e eee tege i ea essetis ie He ets 57 elo Cfi 57 Interface Mode IM a a a aa aaa aa aaien 57 Table of Contents PDR900 Resolution Aia ims cott Ee e cet b e tec En t dee 58 Reset Status RE oia metae Ba t utis i ee e ERR 58 Defatilt DE Soo A A A E d 58 Ola fol dt M IPTE 58 LOCK
4. arrow shifts it to the right The new decimal point setting takes effect in all the dialogs in which measured values or values directly referred to them are displayed It does not affect device parameters such as Gain 26 PR400B F Chapter 4 Operation 4 3 Setup It is recommended to check all parameters for correct settings before starting operation Detailed information for operation of the different kind of transducers controllers etc are given later in this chapter For understanding these instructions it is necessary to have studied the setup informations before After switching on the power or pressing the escape key ESC you will see the first display configured for operation typically display 1 By consecutively pressing the down arrow key you will come to the operation setup level junction Entering Setup SETUP RESET Enter the setup submenu by pressing the right arrow key A cursor appears under the word SETUP Confirm by pressing the enter key ENTER Or simply press two times the enter key For deactivating the setup level refer to Exit Setup later in this chapter If you mark the word RESET with the cursor and confirm with RESET then all parameters are set to their default values Remember that you leave with they ESC key without changing anything in the particular window Note ud Access to the setup submenu can be locked and unlocked by applying d respective commands via the serial interface communication por
5. connection set up and warm up The elements on the front and rear panel and their functions are explained in the following chapter 18 PR400B F Chapter 3 Overview Chapter 3 Overview 3 1 Front Panel LED for set point Display LED for remote operation ee mks REMOTE PR4000B y SETPOINT CONTRAST POWER ESC 1 ON Screw for I contrast pe ENTER J OFF Power switch Escape key Enter key Arrow keys for On off switch Display POWER ENTER ESC Escape Arrow buttons ON OFF SETPOINT REMOTE CONTRAST dialog selection for set point Figure 4 Front Panel Two lines Each line 16 characters Simultaneous readout for both channels possible Button switch toggles between standby and operation For total breakup from mains use switch on the rear side The LED above indicates the device in operation Accepts and stores entered data Switches stepwis back finally to display 1 mode Navigation in the menues Switches the setpoint output Note Channel valve switch channel preselection must be activated for setpoint output LED lit when setpoint output active LED lit when unit is operated through serial interface Allows adjustment of display contrast 19 Chapter 3 Overview PR400B F 3 2 Rear Panel The rear panel provides all connectors the fuse holder and the receptable for the line
6. known the non linearity of each transducer connected to the instrument This menu provides 11 correction points PO P10 for each channel With the values SO S 10 you can determine how many calibration points shall be used Example for a pressure transducer 1 mbar full scale The 6 point calibration data sheet lists the known deviation Cal Point Pressure mbar Baratron Reading mbar 0 0 000 0 000 1 0 1051 0 1048 2 0 1996 0 2004 Suse LL ase LD hei 6 1 0137 1 0121 Then the settings for P and S for the correction point 2 would be LIN P2 S6 mbar 0 1996 lt gt 0 2004 The sequence of the correction points must be strong monotone Linearization is done by linear interpolation between two consecutive data points 34 PR400B F Chapter 4 Operation Trip Limits The PR4000B F provides three trip limit modes L MIT BAND and SLEEP The supervision modes LIMIT and BAND further provide a memory mode by selecting MLIMIT and MBAND respectively Limit Mode extra window for channel 1 and channel 2 LIM MODFE1 LIMIT DEAD BANDI 1 5 In the limit mode you can set two switchpoints and the hysteresis In the window shown the hysteresis DEAD BAND is set to 1 5 030 00 mbar 015 00 mbar The switchpoints shown are set to UL Upper Limit 2 30 00 mbar LL Lower Limit 15 00 mbar It is also possible to set a switchpoint to a negative value Set the cursor in front of the
7. menu will completely set to standard settings for MFC s and MFM DEFAULT P Setup menu will completely set to standard settings for Baratron pressure transducers In appendix B you will find a complete table showing the default settings for both flow and pressure RESOL16 activated indicated by a diamond shaped sign 4 5 digit display format recommended for pressure measurement with Baratron pressure transducers De activated no diamond sign 3 5 digit display format preferable for flow measuremnt and control with thermal flow devices EXIT Leaves the setup submenu To enter again the setup section you must select SETUP again Note id Resolution and conversion rate are dependent of the display format Refer to Appendix A Specifications 38 PR400B F Chapter 4 Operation 4 4 Control For routine operation e g flow readout and setpoint settings after the setup has been finished there will be 1 to three windows depending on the configuration choosen plus two displays for control parameters and status information Display for measurement values and setpoints Example for setting of display 1 05 160 mbar 17 690 sccm Example for display 2 17 690 sccm 20 000 sccm The windows above show the format which would come up when following the examples described in the section Setup To ease operation the setpoints SP1 or SP2 can be set here It is not necessary to enter the setup Messages OVE
8. must have a braided shield covering all wires Neither aluminum foil nor spiral shielding will be as effective using either may nullify regulatory compliance 2 The connectors must have a metal case which has direct contact to the cable s shield on the whole circumference of the cable The inductance of a flying lead or wire from the shield to the connector will seriously degrade the shield s effectiveness The shield should be grounded to the connector before its internal wires exit 3 With very few exceptions the connector s must make good contact to the device s case ground Good contact is about 0 01 ohms and the ground should surround all wires Contact to ground at just one point may not suffice 4 For shielded cables with flying leads at one end it is important at such end to ground the shield before the wires exit Make this ground with absolute minimum length After picking up the braid s ground keep wires and braid flat against the case With very few exceptions grounded metal covers are not required over terminal strips If one is required it will be stated in the Declaration of Conformity or in the instruction manual 15 Chapter 2 Installation PR400B F 5 In selecting the appropriate type and wire size for cables consider a b C 2 4 The voltage ratings The cumulative I R heating of all the conductors keep them safely cool The IR drop of the conductors so that adequate power or signal voltage ge
9. parameter and press the down key 35 Chapter 4 Operation PR400B F The switching mode of the relay RLY1 and RLY2 is configured in this menu In the example shown relay RLY1 is activated and simultaneously shown is it s status when the lower limit 1 here 15 00 mbar was passed or indicated by the logic symbol V the upper limit U1 here 30 00 mbar was passed To both limits the selected value for the hysteres must be added In the example shown relay RLY2 is set to an idle state Refer to the section Relay Settings at the end of this chapter to get detailed description and instructions of the numerous settings and logical criteria Temporary Criteria Transient events can also be combined with the relay operation For more instructions refer to the section Relay Settings at the end of this chapter 36 PR400B F Chapter 4 Operation Interface RS232 Selectable baud rates 110 1200 2400 4800 9600 19200 38400 57600 76800 115000 Baud BAUDRATE 9600 Bd PARITY ODD Parities Odd Even None For more instructions refer to chapter 5 INTERFACE Interface RS485 ADRESS IFACEMODE In this menu the adress and interface mode are selected Only for units with RS485 interface For more instructions refer to chapter 5 INTERFACE 37 Chapter 4 Operation PR400B F Exit Setup RESET DEFAULT F RESOL16 EXIT RESET All error messages will be reset DEFAULT F Setup
10. range between 1 V and 10 V in steps of 1 V This allows the use of MFC s with 10 V full scale flow and or 10 V setpoint signal or pressure transducers with for example 5 Volt full scale Select with the left right arrow keys the respective parameter and make the setting using the up down arrow keys IN1 OUT EI EO1 Signal full scale of the transducer or controller connected to channel 1 Pin 2 connector CHANNEL 1 Setpoint signal full scale for the MFC or pressure controller connected to channel 1 Pin 8 connector CHANNEL 1 External setpoint input for channel 1 Pin 1 connector EXTERN Monitor signal output of channel 1 Pin 3 connector EXTERN Respectively for channel 2 IN2 OUT2 El2 EO2 Signal full scale of the transducer or controller connected to channel 2 Pin 2 connector CHANNEL 2 Setpoint signal full scale for the MFC or pressure controller connected to channel 2 Pin 8 connector CHANNEL 2 External setpoint input for channel 2 Pin 2 connector EXTERN Monitor signal output of channel 2 Pin 4 connector EXTERN Confirm all settings with the ENTER key bevor you leave the window 31 Chapter 4 Operation Signalmode PR400B F extra window for channel 1 and channel 2 SIGMODE1 INDEP SCL1 10 000 mbar SIGMODE For controllers the parameter SIGMODE determines the source of the setpoint which shall be applied the the respective channel For meters this parameter determines to wh
11. range of channel 1 to 10 V retrieve input range Output Range OT OTc phyrange phyrange setup of physical output range phyrange 1 10 set output range of channel 1 to 10 V retrieve output range External Input Range El Elc phyrange phyrange setup of physical input range phyrange 1 10 set external input range to 10 V retrieve external input range External Output Range EO OTc phyrange phyrange setup of physical output range phyrange 1 10 set external output range to 10 V retrieve external output range 54 PR400B F Chapter 5 Interface Signal Mode SM SMc smode setup of signal mode smode smode 0 METER 1 OFF 2 INDEP 3 EXTRN 4 5 RTD set signal mode to independent retrieve signal mode Scale SC SCcl scale setup of scale scale scale 5 110 of FS formatted in selected range set scale retrieve scale Linearization LN LS LNc point x y setup of linearization table x y point O 10 X y 596 10096 of FS formatted in selected range set point of lin table retrieve point in lin table LSc size setup of table size size size 0 10 set table size retrieve table size Limit Mode LM LMc Imode se
12. the power cord To avoid electrical shock plug the power cord into a properly wired receptacle before connecting it to the product input or output terminals A protective ground connection by way of the grounding conductor in the power cord is essential for safe operation DANGER ARISING FROM LOSS OF GROUND Upon loss of the protective ground connection all accessible conductive parts including knobs and controls that may appear to be insulating can render an electrical shock USE THE PROPER POWER CORD Use only a power cord that is in good condition and which meets the input power requirements specified in the manual Use only a detachable cord set with conductors that have a cross sectional area equal to or greater than 0 75 mm The power cable should be approved by a qualified agency such as VDE Semko or SEV 10 PR400B F Chapter 1 General Information Chapter 1 General Information 1 1 General Description The control unit PR4000B is designed for the use with mass flow controllers MFC mass flow meters MFM pressure transducers and in line pressure controllers e g type 640 from MKS Instruments Compatibility is just restricted in case of disagreement of electrical specifications The PR4000B is available as single or dual channel power supply readout and control unit This instruction manual however describes only the dual channel version PR4000B F single channel version PR4000B S Two or more units PR4000B can be
13. the up down arrow keys or return to the main dialog at any time by pressing the ESC key The dialog table is divided in two parts an operation and a setup part Switching on Edit mode Edit mode can be switched on or off in the dialogs You can enter numeric values in Edit mode alter variables etc There are two ways of switching on Edit mode 1 With the ENTER key 2 With the left right arrow keys or gt 3 When you switch on Edit mode the cursor appears as a flashing underscore below the first or last alphanumeric character You can move the cursor within a line using the left right arrow keys or change the preset values with the up down arrow keys If 9 is displayed and you press the up down arrow keys again to scroll the number the display automatically creates two digits 10 the same applies analogously in the opposite direction If when you exit Edit mode by pressing the ENTER key the value you have set is outside the valid range the highest or lowest permitted value is stored instead Switching off Edit mode You can switch off Edit mode again by pressing the ENTER key The entered values are not stored until you press the ENTER key You can also exit Edit mode with the ESC key In this case however the values are not stored Decimal point You can mark the decimal point in this dialog with the left right arrow keys and shift it with the up down keys The up arrow shifts the cursor to the left while the down
14. voltage cable RS232 MAIN PWR ACCESS CHANNEL2 RS485 EXTERN CHANNEL RS485 ES i ER as e s FUSE e ar Bi AEN RELAY SERVICE USB O O x A 3 F2 d LINE IN G Connections ACCESS EXTERN RELAY CHANNEL 1 CHANNEL 2 RS232 RS485 SERVICE USB LINE IN MAIN PWR F1 F2 FUSE Figure 5 Rear Panel Connector ACCESS Direct access to the pins for inputs and outputs of signals of measurement setpoint and controls of the connectors CHANNEL 1 and CHANNEL 2 This connection is used to input external analog setpoint signals and to monitor measurement signals of both channels Access to the contacts of both relays Connection for pressure transducer mass flow controller etc to channel 1 Connection for pressure transducer mass flow controller etc to channel 2 Serial Interface RS232 Serial Interface RS485 Service and Diagnostics used only by MKS No connection Receptable for line power cord On unit can be toggled on and off by front panel button switch Fuses for process power output 15 V or 24 V respectively Line fuse For detailed informations to fuses refer to chapter 2 Line Power and Fuses 20 PR400B F Chapter 3 Overview 3 3 Connectors Channel 1 Channel 2 These connectors serve to connect pressure transducers flow meters flow or pressure controllers to t
15. 1 or high limit of channel 2 is not exceeded RLY2 R1 L1 E1 Relay 2 is active when R1 and El are activated and signal is below lower limit of channel 1 46 PR400B F Chapter 5 Interface Chapter 5 Interface 5 1 General The PR4000B F offers two serial interfaces a RS232 and a RS485 The RS232 is a connection between two devices Host and PR4000 The RS485 connects the host to up to 30 PR4000 what makes an address code for each command necessary The synchronization between host and PR4000 is maintained by a strict command reply cycle You may only send the next command if there was a reply received completely The parser brings an error on wrong commands but not on ambiguous commands In this case it processes the closest idea of the information received Terminate command only with CR never with lt CR gt lt LF gt 5 2 Command syntax The command syntax is defined as follows were tokens in brackets are optional and token divided by a separator are alternatives There are no blanks between command elements needed Yellow characters are constant gray characters represent placeholders for command values Gaa I cmdc cmd p1 p2 p3 TI CR aa address with two digit address flag This element is only used with the RS485 interface Delete this element when using the RS 232 port E g 912 identifies device with address 12 A request prefix causes the device to return the actual valu
16. 1 1 a ro e eine R 58 Tweak Control 0 1 ai 58 Appendix A Specifications ett d t Ea ui Ear Reb idea Ro nen 59 Appendix BE Error Messages erc n se t Ur Gne RP e ELA Feud 61 Appendix C Default Configuration i 63 Appendix D Dialog Reference i 65 MKS Worldwide Calibration amp Service Centers i 67 vi PR400B F Table of Contents List of Figures Figure 1 Rack angles assembly nano nc cnn AAT rr 16 Figure 2 Rubber feet assmbly sss nora rca 16 Figure 3 Dimensions tia ettet ett th ete 17 Figure 4 Front Panel iced get deer REENEN 19 PIQUIerS gt REAM Panel scott xen a 20 Figure 6 Structure of the menu 25 List of Tables Table 1 Standard Interconnecting Cales 15 RTE tele Ee DEE 18 vii Table of Contents PDR900 This page left blank viii PR400B F Safety Information Safety Information Symbols Used in This Instruction Manual Definitions of WARNING CAUTION and NOTE messages used throughout the manual procedure practice condition or the like which if not correctly Warning Vi The WARNING sign denotes a hazard t calls attention to a performed or adhered to could result in injury to personnel operating procedure practice or the like which if not correctly performed or adhered to could result in damage to or destruction of all or part of the product Caution The CAUTION sign denotes
17. 19G DK 3150 Helleb k Tel 45 44 92 92 99 Fax 45 44 92 94 99 Email mksdenmark mksinst com TAIWAN MKS Instruments Taiwan 10F No 93 Shoei Yuan Street Hsinchu City 300 Taiwan R O C Tel 886 3 575 3040 Fax 886 3 575 3048 67 GERMANY BENELUX MKS Instruments Deutschland GmbH Schatzbogen 43 D 81829 M nchen Tel 49 89 420008 0 Fax 49 89 42 41 06 Email mks germany mksinst com ITALY G Gambetti Kenologia Srl Via A Volta No 2 20082 Binasco MI Italy Tel 39 2 90093082 Fax 39 2 905 2778 JAPAN MKS Japan Inc Harmonize Building 5 17 13 Narita Higashi Suginami Ku Tokyo 166 Japan Tel 81 3 3398 8219 Fax 81 3 3398 8984 KOREA MKS Korea Co Ltd 1 Floor DK Plaza 375 1 Geumgok dong Bundang gu Seongnam Kyonggi do Korea 463 805 Tel 82 31 717 9244 Fax 82 31 714 9244 UNITED KINGDOM MKS Instruments U K Ltd 1 Anchorage Court Caspian Road Altrincham Cheshire WA14 5HH England Tel 44 161 929 5500 Fax 44 161 929 5511 SINGAPUR MKS Instruments Inc BLK 4010 Techplace 01 08 09 Ang Mo Kio Avenue 10 Singapore 569623 Tel 65 6451 1062 Fax 65 6451 0172
18. 2 In this menu you can switch on or off the indicated relay e g for test purposes Diamond sign activated relay is activated switched on Diamond sign not activated relay is de activated switched off Note ud The setpoint voltage will be applied only to channels which have been y pre selected with the valve switch VLV1 or VLV2 4 5 Operation with pressure transducers If just pressure transducers Baratron series are used it is recommended to simplify the setup settings by using the default configuration for pressure DEFAULT P All pressure readouts are set to mbar all analog inputs and outputs are set to 10 V See the table in appendix C for all default settings Make sure anyway that the data of your pressure transducer confirm with the defaults otherwise change the setup settings where needed With setup settings completed and zeroing done in most cases no more is necessary to be done You can immediately start measuring pressure using display 1 configurated for PR1 and PR2 41 Chapter 4 Operation PR400B F Operation with Baratron Type 120 Range Turndown This type pressure transducer has a recommended measurement range of five decades that means the lowest pressure displayed should be 1E 5 of full scale The readout of the PR4000F however will display only four decades thus the lowest pressure displayed would be 1E 4 of full scale The type 120 provides a digital input Range Turndown which allows when pulled to low sign
19. 85 i 37 SET DEN 38 4 4 COMO ici te dee guer ue puris elites 39 Display for measurement values and setpoints sss 39 Status RI e A0 Control DISplayz to eite LH DM D e HR mies 40 Note eti d eto etam t ettet eeu mass 41 4 5 Operation with pressure transducers sse 41 Operation with Baratron Type 120 nennen 42 Range TUMOGOWN EE 42 Example for a type 120 1 mbar full escale ii 42 4 6 Operation with mass flow controllers MEC arranco 43 Control Modes with Mass Flow Controllers 43 4 7 Operation with flow meters ennemis nnns 44 4 8 Operation with pressure controllers i 44 4 9 Limit switches and relavs arrancan 45 E DE 45 LIMIT Ec TEUER eae 45 BAND mM cds 45 MI IMi TE 00 4000 dd i doe Meal had dee Me Dine ee Ee 45 MBAND 5 3 aD p e etude is ted be RE eo 45 430 Relay SOMOS cai ia 46 Chapter 5 Interface eet ei dai 47 5 1 General Je es the sc o ino 47 5 2 Gommiand syntax i ied e ded d i ue t ere ba MR eeu 47 PR400B F Table of Contents 5 3 Fieply SynitaxX sats ee eu dite Ef Ge ima eu t cot a e sette te tai 48 5 4 Errortepiy dob ML diria 48 Etranger ua edet dea Pe ve ed atc Sane ee Uv duae 49 Sample GOMmMan tI EET 49 REESEN RE 49 Hequest Key KY ita alza etel d a EH e ea eb i ette 49 Dialog D int err invade pr a Heat i e de peace dd cd ts 50 DSim l9 a tos a te n t a la ed 50
20. MKS Instruments Deutschland GmbH PR 4000B F 2 Channel Power Supply and Readout for Flow and Pressure Instruction Manual e PR4000B SETPOINT ee mks REMOTE CONTRAST POWER E 1 ET l ENTER J OFF Y 1954002 Edition 02 2008 Copyright 2008 by MKS Instruments Deutschland GmbH All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Printed in the Federal Republic of Germany PR400B F Table of Contents Table of Contents Safety tte 9 Symbols Used in This Instruction Manual 9 Safety Procedures and Precautions e 10 Chapter 1 General Information sei enne nnne nnne nennen snnt entrent 11 1 1 General Description 11 1 2 CUSTOMER SUPP OMe ege ele nM ee gici e 12 1 3 Intended USO ir icd ei a d trei dades 12 Chapter 2 Installation rar e A ee erp dae ee handed e eel ave pa 13 2 1 UnpackINd EE 13 2 2 Unpacking Checklist eia a ea ee e T aaa Ea EETA 13 2 3 Cables tette tei eto tos tiit ALS 14 Interconnection Cables from MKS i 14 Generic Shielded Cable Description 15 2 4 Installation Montignac aaa aac 16 Rack Mounting or Table Top veis 16 DIMEN
21. Pin Function Pin Function 1 Channel 1 Pin 1 6 Channel 2 Pin 1 2 Channel 1 Pin 4 7 Channel 2 Pin 4 3 Channel 1 Pin 9 8 Channel 2 Pin 9 4 reserved 9 reserved 5 15 V Ground RELAY 15 pin Sub D Socket Pin Function Pin Function 1 Relay 1 Normally closed 9 Relay 1 Common 2 Relay 1 Normally open 10 Relay 2 Normally closed 3 Relay 2 Common 11 Relay 2 Normally open 4 reserved 12 reserved 5 reserved 13 reserved 6 reserved 14 reserved 7 reserved 15 reserved 8 15 V Ground 22 PR400B F Chapter 3 Overview RS232 9 pin Sub D Pin Pin Function Pin Function 1 No connection 6 No connection 2 RXD 74 No connection 3 TXD 8 No connection 4 No connection 9 No connection 5 GND RS485 15 pin Sub D Pin Function Pin Function 1 Shield 9 Send Data T B 2 Send Data T A 10 No connection 3 No connection 11 Receive Data R B 4 Receive Data R A 12 No connection 5 No connection 13 No connection 6 No connection 14 U2 15 V 24 V optional 7 GND 2 15 U1 5 V optional 8 GND 2 23 Chapter 3 Overview PR400B F This page left blank 24 PR400B F Chapter 4 Operation Chapter 4 Operation After switching on the power the following information is displayed for 2 3 seconds PR4000 2CHANNELS V 2 02 Oct30 07 here Version 01 29 Oct 11 1999 Then the unit switches automatically to
22. RFLW The measurement signal exceeds 11 V As an example this would be the case when an absolute pressure transducer with a low full scale range e g 1 mbar is connected to this channel and it s port is open to atmosphere UNDRFLW The measurement signal exceeds 11 V 39 Chapter 4 Operation Status Displays PR400B F RLY1 RTD1 OK RLY2 RTD2 RLY1 RLY2 RTD1 RTD2 OK EXXX Control Display A diamond sign indicates if the respective relay is activated A diamond sign indicates if the range turndown function is activated Error message appears here Refer to appendix B for a list of error codes and their interpretation Example 1 OK no error detected Example 2 E002 Error Can not perform autozeroing AZ1 VLV1 R1 AZ2 VLV2 R2 AZ1 AZ2 Zero adjustment AutoZero of channel 1 or channel 2 respectively To initiate the autozero cycle first indicate the respective channel with the left right arrow key and then press the ENTER key It is recommended to check that the readout will be set to zero 0 1 Digit Repeat the autozero cycle if necessary For correct zeroing please read the respective instructions for the transducers meters or controllers in use e g thermal stabilization proper evacuating of absolute pressure transducers etc The PR4000B F stores the detected offset of the transducer meter or controller in use and corrects automatically the reading by this value In case of MFC s or pre
23. SIONS 17 Line Power and FUSES cin dt rers ee e RE Er eR x Dee ER En aed 18 2 5 Switching on the unt 18 Chapter 3 Overview uccide eret diete He da ead deed Hear Redi da dede adag ale 19 3 1 ront Panel ean emt 19 3 2 Rear Fanal eoo UE 20 GONNECHONS e SEn a 20 3 3 ronem ai a 21 Channel 1 Ghanhel2 iia oc d DET IEEE 21 EXTEBNStu uisu etam oso cia 21 AGGESS AE m tuat m ut tutus 22 RELAY EE 22 HS5232x Stat tote cee eer Eege e M xn 23 SE EE 23 Chapter 4 Operation iin civics acus i ai Ava aa De ae Ru aeu av dt d da de eee du eda 25 4 1 Structure of the Men 25 4 2 EMO EE 26 Switching on Edit mode 22 aet EE 26 Switching off Edit mode ii 26 Re Lu Be EE 26 Table of Contents PDR900 4 3 Te TCR E RA a a ath Ste dates oh 27 ENEE e WE 27 Configuration of display 1 and display 3 28 Configuration of display 3 and display 4 28 EDD esiti e EM c rt ed 29 Rang E 29 Gain and Offset uade rae t He t Heat die vai Eat ded 30 Range Turndown Offset 30 Input Signal Range and Output Signal Hange conocia nannnnann cnn 31 STE ge t 32 Miriam 34 A cde teta RE Pim a ER DEC a Mead 35 Eti MOGOG tem ma e Ma 35 Temporary Criteria EE 36 Interface RS232 wince 2 inue Rau ete ce Ra a te tae adfert 37 Interface RS4
24. Side View Chapter 2 Installation PR400B F Line Power and Fuses Line cord plug the holder for the line fuse and the fuses of the power supply output are located at the rear panel see figure 4 Refer to the following table in case that the line fuses must be changed or replaced Process Power F1 F2 Wickmann Little Fuse No 372 TR5 1 6Amp Table 2 Fuse Information Use only fuses as specified in table 2 Before replacing any fuse the failure that caused the blow must be identified and eliminated Do not open the housing In any case of trouble switch the unit off and disconnect the line power cable from the PR4000B Do not perform any internal repair but contact MKS for service To replace the line fuse lift the fuse holder using a srewdriver with small blade There is a spare fuse placed in the holder The power output fuses F1 and F2 are being replaced by pulling them off the rear panel tightly grabbing with two fingers Caution Y Separate the instrument completely from mains before replacing any fuse Make sure the fuse type applies to the specifications given in this manual Protective Grounding Connect the power cord PR4000B only to a properly grounded outlet 2 5 Switching on the unit After all connections to the peripheral instruments e g pressure transducer mass flow controller etc are properly done the unit can be switched on Refer to the instructions for the peripheral units for proper installation
25. T enter setup mode reset status V01 28 19991001 version and generation date DATE DISPLAY1 tgc tgc setup of display 1 2 if both tags are off the display is DISPLAY tgc tgc not visible DISPLAY may be switched off DISPLAYS tgc tgc setup of display 3 4 DISPLAY4 b DISPLAY3 amp 4 may be switched off SP1 sd dddd unit setpoint setup SP2 sd dddd unit RNG1 d dddd unit range setup last digit may be suppressed for 3 5 digit RNG2 d dddd unit display GAIN1 sddd dddd gain 7 digits offset chn1 OFFS1 sddddd mV 0 001 lt gain lt 2 000 250mV lt offset lt 250mV GAIN2 sddd dddd gain 7 digits offset chn1 OFFS2 sddddd mV 0 001 lt gain lt 2 000 250mV lt offset lt 250mV RTDOFFS1 sddd mV RTD offset RTDOFFS2 sddd mV IN1 er OUT er full scale I O ranges chn1 EM er EO1 er 15 IN2 er OUT2 er full scale I O ranges chn2 El2 er EO2 er to be continued on next page 65 Appendix D Dialog Reference PR400B F continued SIGMODE1 smode SC1 sd dddd unit signal processing modes SC is for scaling of the source SIGMODE2 smode signal processing modes SC2 sd dddd unit SC is for scaling of the source 18 LIN1 pt n unit linearization table chn1 sd dddd lt gt sd dddd 11 points and a length spec 19 LIN2 pt In unit linearization table chn1 sd dddd lt gt sd dddd 11 points and a length spec 20 LIM MODE1 mode limit mode SLEEP LIMIT BAND MLIMIT MBAND DEAD BAND 1 d d hysterisis setup 21 UL1 sd dddd unit up
26. a hazard t calls attention to an Note ud The NOTE sign denotes important information It calls attention to a M procedure practice condition or the like which is essential to highlight Safety Information PR400B F Safety Procedures and Precautions The following general safety precautions must be observed during all phases of operation of this instrument Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment MKS Instruments assumes no liability for the customer s failure to comply with these requirements DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified service personnel only GROUND THE PRODUCT AND USE PROPER ELECTRICAL FITTINGS Dangerous voltages are contained within this instrument All electrical fittings and cables must be of the type specified and in good condition All electrical fittings must be properly connected and grounded This product is grounded through the grounding conductor of
27. al to increase the output voltage by a factor of ten The PR4000B F can support this function thus enabling the measurement in the range below 10 of the transducer s full scale range with full display resolution Example for a type 120 1 mbar full scale Range Signal Output O 1 mbar Range Turndown not active 0 10 V 1 mV equals 1 10 mbar O 0 1 mbar Range Turndown active 0 10 V 1 mV equals 1 10 mbar As explained before the PR4000B F will display the complete pressure measurement range of the type 120 with no restriction of the specified resolution provided the RTD mode has been selected To do this the unit will switch at 10 of full scale automatically the range down Simultaneously also the display format switches so the last digit represents 1E 5 of full scale The hysteresis at the switch point is 0 5 of full scale For the example given above this means hysteresis disregarded Pressure Readout RTD D uus 0 1 mbar 0 00000 0 09999 mbar active 0 1 1 mbar 0 1000 1 0000 mbar Not active When the autozero cycle is triggered the zero offset of both ranges will be separately determined and corrected The zero offset value in any range should not exceed 50 mV If this is the case then carefully check if all requirements for a correct zeroing are fullfilled and if necessary do a coarse zero adjustment directly at the type 120 pressure transducer Check aft
28. bration and service centers Caution Only qualified individuals should perform the installation and any W user adjustments They must comply with all the necessary ESD and handling precautions while installing and adjusting the instrument Proper handling is essential when working with all highly sensitive precision electronic instruments 2 2 Unpacking Checklist Standard Equipment e PR4000B F power supply amp readout unit e 4 rubber feet for tabletop use e Power cable e Mating connector kit e Instruction manual this book Optional e Connection cable s e g for transducers controllers etc 13 Chapter 2 Installation PR400B F 2 3 Cables The unit complies with the European standards e EN50011 1991 Interference Emmisions Group 1 Class B e EN50082 2 1995 Immunity from Noise ESD according to IEC801 2 1991 EMF according to ENV50140 1993 resp 50204 1995 Burst according to IEC801 4 1988 Line Noise according to ENV50141 1993 e EN61010 1 1993 Device Safety and thus it is labelled with the CE mark To fullfill the above listed guidelines it is mandatory to use the approbriate interconnection cables Note TE An overall metal braided shielded cable properly grounded at both ends i is required to meet CE specifications We recommend to use the cables offered by MKS Instruments Cables which are in compliance with the CE guidelines are marked with an E or S example CB259E or CB259S
29. claration of decontamination or any other regulations before shipping The ERA Number expedites handling and ensures proper servicing of your instrument Please refer to the last page of this manual for a list of MKS Calibration and Service Centers Warning All returns to MKS Instruments must be free of harmful corrosive radioactive or toxic materials 1 3 Intended Use The PR4000B is a power supply and readout unit for operation of MKS mass flow meters mass flow controllers pressure transducers and in line pressure controllers Combination with units of other manufacturers may be possible given operating specifications that match MKS hardware requirements However MKS Instruments does not guarantee any warranty for these system configurations and will not be liable for any consequential or incidental damages occurring through these combinations 12 PR400B F Chapter 2 Installation Chapter 2 Installation 2 1 Unpacking MKS has carefully packed the Type PR4000B unit so that it will reach you in perfect operating order Upon receiving the unit however you should check for defects cracks broken connectors etc to be certain that damage has not occurred during shipment Note ud Do not discard any packing materials until you have completed your 3 inspection and are sure the unit arrived safely If you find any damage notify your carrier and MKS immediately Please refer to the last page of this manual for a list of MKS cali
30. combined thus performing multichannel control units Further features e Display with four or five digits selectable e 2trip limits and 2 relays can be combined and configured in a wide variety of functions and combinations e linearization possible for both channels e Interface either RS232 standard or RS485 optional e 2different power supplies 15 V 1 5 A or 24V 1A e two line display configurable allows simultanous readout of both channels or one channel actual value plus setpoint e physical values displayed with engineering units e non volatile memory for easy restart after power loss or switching off power For more details and specifications refer to Appendix A Specifications 11 Chapter 1 General Information PR400B F 1 2 Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers listed on the last page In addition MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers Should any difficulties arise in the use of your PR4000B F or to obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument to MKS your service center can inform you about the need for an ERA Number Equipment Return Authorization Number or a form for de
31. display 1 which may be used for routine operation This section describes how to configurate the different displays and how to set the parameters for operation and control 4 1 Structure of the Menu The menu is divided in two levels 1 Displays for standard operation These displays show measurement values setpoints trip limit information etc 2 Setup Here the system configuration and the displays are set and parameters can be edited Displayl Display2 Display3 Display n Operation Level ENTER I I I EXIT I I llo Param n SES SD ni ii Param 3 Param 2 JPA Param 1 Setup Level Figure 6 Structure of the menu 25 Chapter 4 Operation PR400B F It is recommended to deactivate the entry into the setup see figure 4 after all parameters have been edited This allows quick switching through the 1 to 4 operational displays in a circular mode without stepping through all setup dialogs By pressing the escape key ESC one time it is easily possible to switch the unit back to the display 1 from any position in any level 4 2 Editor The PR4000B F is operated and configured by dialogs two line LCD or digital UO RS232 RS485 The dialogs are organized in a simple table hierarchy All the dialogs can be accessed and displayed easily you can change from one dialog to another using
32. e of the parameter identified by cmdc or cmd E g DG asks for the actual dialog default prefix causes the device to set the value of the parameter identified by cmdc or cmd to default E g OF1 sets for the offset to zero cmd cmdc command or cahnnel specific command identifies device parameter or function emdc is with channel specification 1 or 2 E g OF1 0 012 sets for the offset to 0 012 p1 p2 p3 parameter for the function or command E g OF1 0 012 0 012 is parameter pi CR command terminator carriage return 13 l token separator 47 Chapter 5 Interface PR400B F 5 3 Reply syntax The reply syntax is defined as follows were token in brackets are optional There are no blanks between command elements needed Yellow characters are constant gray characters represent placeholders for command values FAL r2 r3 ri r2 r3 reply values of command lt CR gt reply terminator carriage return 13 value separator 5 4 Error reply syntax nnn error codes error escape flag E010 syntax error E020 FAIL of a command execution e g OF command CR terminator carriage return 13 48 PR400B F Chapter 5 Interface 5 5 Commands Sample Command command description reply sample description 1 sample description 2 Display Text DT DT text
33. elays The two relays on the hardware may be assigned flexible to the channels and different signal sources The logic of the limit switches is configurable and also is the hysterisis i e dead band A switch delay is not available The PR4000B F provides 5 modes of trip limit operation SLEEP In this mode the trip limits are not active LIMIT In LIMIT mode the signal L is triggered if the actual input is below LL and the signal U is triggered if the actual input is above UL BAND In BAND mode the signal L is triggered if actual input is below set point minus LL And the signal U is triggered if actual input is above set point plus UL MLIMIT Same as Limit mode but including memory capability The memory can be reset with RESET MBAND Same as Band mode but including memory capability The memory can be reset with RESET 45 Chapter 4 Operation PR400B F 4 10 Relay Settings Configuration of relay control is done in the aforementioned menu Limit Mode in the setup section By the use of logical formulas almost each combination of different criteria for activating or de activating the relays can be realized This allows flexible adoption of both relays to many demands The PR4000B F supports the following criteria numbers indicate the respective channel R1 R2 gt Menu parameter for manual relay control RLY is switched on L1 L2 Signal is below the lower limit value U1 U2 Signal is above the higher li
34. er zeroing that the readout displays O 1Digit Repeat the autozero procedure if necessary 42 PR400B F Chapter 4 Operation 4 6 Operation with mass flow controllers MFC For the use with mass flow controllers MFC only it is recommended to simplify the setup settings by using the default configuration for flow DEFAULT F All flow readouts are set to sccm all analog inputs and outputs are set to 5 V Most if not all parameters to be edited are set to standard values but should be checked anyway See the table in appendix C for all default settings Change the setup settings where needed Always check the correct setting of parameter GAIN to consider the right gas correction factor As readouts one will preferably use display 1 and display 2 for displaying both flow and setpoint Example use display 1 for flow readout and display 2 to enter and display the setpoints The setpoints can be entered in either the setup menu or in the respectively configurated display Note To activate the setpoint output press the ON key The activation is indicated by the LED SETPOINT Press the key OFF to switch off the setpoint output If no LED SETPOINT is activated then none of both channels was pre selected that means the valve switch is off Refer to the section Control Display VLV1 VLV2 Note id The setpoint voltage will be applied only to channels which have been MP pre selected with the valve switch VLV1 or VLV2 Beside the thermal ma
35. eration SCL only SLAVE or EXTRN The value of SCL Scaler determines the ratio of the setpoint which will be applied to the slave Example for two mass flow controllers Channel 1 MFC 500 sccm full scale Mode Independent This is the master channel Channel 2 MFC 200 sccm full scale Mode Slave Scaler SCL set to 080 00 sccm When the masters flow readout ranges from 0 500 sccm the setpoint applied to the slave ranges proportionally from 0 80 sccm The gas mixing ratio therefore is set to 500 80 6 25 1 Example as before but for external setpoint mode EXTRN Channel 1 MFC 500 sccm full scale Mode EXTRN this makes channel 1 to be the slave of the external setpoint source Scaler SCL set to 350 00 sccm This means that the external setpoint applied to channel 1 will be scaled down by a factor of 350 500 0 7 Depending on configuration and operational mode it is possible to have the setpoint input s displayed This however is possible only in the INDEP mode For optimum control performance it is advised not to set the scaler to values below 20 off the MFC It is possible but you should instead use MFC s with lower ranges Note d The setting of the scaler does not affect the independence mode Ls INDEP 33 Chapter 4 Operation PR400B F Linearization extra window for channel 1 and channel 2 LINT PO SO mbar 00 000 lt gt 00 000 The PR4000B F offers the possibility to correct
36. essure signals 2 inputs for external setpoints 2 outputs for setpoints 2 outputs for signal monitoring Accuracy 0 01 1 Digit Temperature coefficient Input 0 1 mV K Ra lt 1 0 Output 0 075 mV K Display format and resolution Two line LCD 16 places per line configurable 4 digits 0000 9999 12 bit resolution 5 digits 00000 99999 16 bit resolution Conversion rate Mode EXTERN not EXTERN Rate 5 Hzat 16bit 20 Hz 20Hzat 12 bit Signal input range all 11 V to be scaled in steps of 1 V Signal output range all 11 V to be scaled in steps of 1 V Relays 2 Relays SPDT 220 VDC 125 VAC 2 A can be combined with any channel Interface Standard RS232 Option RS485 Power output Standard 15V 1 5A Option 24V 1A Input power 85 265 V 47 63 Hz Operation temperature 15 40 C CE RoHS yes Housing Ve x 19 Rack Mounting or top on table use Weight 2 4 kg 59 Appendix A Specifications PR400B F This page left blank 60 PR400B F Appendix B Error Messages Appendix B Error Messages Code Problem E 001 Communication Error E 002 ADC Overflow or Underflow E 003 Range Error Setpoint lt 0 or out of Range W 001 Offset gt 250 mV 61 Appendix B Error Messages PR400B F This page left blank 62 PR400B F Appendix C Default Configuration Appendix C Default Configurat
37. etup you may have therefore up to three operational displays whose contents can be individually configurated 28 PR400B F Chapter 4 Operation Setpoint SP1 05 000 mbar SP2 20 000 sccm Here you can enter the setpoint for massflowcontrollers MFC as well as for in line pressure controllers e g MKS type 640 The example shows an MFC on channel 2 and a pressure controller being operated by channel 1 The PR4000B F takes automatically into account any corrections which may be necessary because of zero offset compensation The adjustable range and the engineering units are determined by the choosen range as shown next Range RNG1 10 000 mbar RNG2 50 000 sccm Place the cursor by using the left right arrow keys under the parameter to be edited Edit range and engineering unit by using the up down arrow key Also the position of the decimal point can be edited The following engineering units are available mbar bar mTorr Torr kTorr Pa kPa mH20 cmH20 PSI N m sccm slm scm scfh scfm mA V C pubar All ranges may be set in a format between 99999 und 00000 29 Chapter 4 Operation PR400B F Gain and Offset extra windows for channel 1 and channel 2 GAIN1 01 0000 OFFS1 00043 mV GAIN is a factor which adapts the range and the measurement signal for correct readout A typical application is to use the gain factor as the gas correct
38. eve actual value set setpoint of channel 2 enable channel valve and retrieve actual value retrieve actual value 50 PR400B F Actual Value AV Chapter 5 Interface AVc setpoint actvalue get actual value setpoint actvalue 5 selected range 110 of FS formated in retrieve actual value retrieve actual value and set setpoint Setpoint SP SPc setpoint setpoint set setpoint setpoint 5 110 of FS formated in selected range set setpoint retrieve setpoint External Input EX EXc extinput access of EXTERN channels extinput 5 110 of FS formated in selected range retrieve external input Status ST ST hexsts request of hex status word hexsts bits comerr underrange AINO overrange AINO underrange AIN1 overrange AIN1 relay0 relay1 parameter changed by user zl OO P Go ch OH retrieve status 51 Chapter 5 Interface PR400B F Valves VL VLc enable set channel specific valve status enable enable OFF ON set valve of channel 1 disable valve of both channels retrieve vavle status of channel 1 Relays RL RLc enable set manual setting of relay enable enable OFF ON set relay 1 retrieve relay 1 status Displays DP DPd line tag chn enable setup configurable di
39. he unit 15 pin Sub D Socket Pin Function Pin Function 1 reserved 9 reserved 2 Signal Input 10 reserved 3 Flow controllers Valve Close 11 Signal ground Baratron type 120 Range Turndown for pin 2 and pin 8 4 Valve Override 12 same as pin 11 5 15 V Ground 13 reserved 6 15V 14 reserved 7 15V 15 Chassis ground 8 Setpoint output EXTERN This connector is preferable used to monitor the flow or pressure signal of the device connected to the respective channel and or to feed an external setpoint voltage into the instrument 9 pin Sub D Socket Pin Function Pin Function 1 External setpoint to CH 1 6 Signal input CH 1 2 External setpoint to CH 2 7 Signal input CH 2 3 Signal output CH 1 8 Signal ground for pin 6 4 Signal output CH 2 9 Signal ground for pin 7 5 15 V Ground Identical to Pin 2 of the corresponding channel connector Identical to pin 11 amp 12 of the corresponding channel connector 21 Chapter 3 Overview PR400B F ACCESS This connector provides access to different utility signals on the channel connectors without the need of making a split cable The access is a direct one that means there is no electronic circuitry between and it may also be used for troubleshooting or override the control valve of a mass flow controller or in line pressure controller 9 pin Sub D Socket
40. ich value the setpoint output is set INDEP OFF METER RTD SLAVE EXTHN external setpoint Independent Setpoint is set either by the front panel settings or by remote host computer Manual setpoint adjust can be done either in the setup submenu or in a window in the operational level if the window is configured for displaying setpoint Setpoint output voltage is set to a fixed voltage of about 0 5 V This ensures that the integrator of a controller connected to this channel does not wind up thus opening the control valve unintendendly The digital output connector CHANNEL1 or CHANNEL2 pin 4 is held to LOW This activates the input Valve Close of MFC s forcing the control valve to be closed Setpoint output voltage is set to zero volts Valve override line via pin 4 of the respective channel connector is set to HIGH Range Turndown RTD allows operation of a Baratron type 120 The digital output pin 4 of connector CHANNEL1 or CHANNEL2 is set to LOW when the signal of the type 120 is falls below 1 V This enables the PR4000B F to display also the lower pressure decades in full reolution Refer to section CONTROL detailed instructions The setpoint of a slave channel is derived from the other channel s signal This allows the control of gas mixing systems with a fixed flow ratio The channel s setpoint is derived by an external analog voltage source connected to connector EXTERN 32 PR400B F Chapter 4 Op
41. ion Parameter Default Flow Default Pressure DISPLAY1 2 FL1 SP1 FL2 SP2 PR1 PR2 off DISPLAYS 4 off off off off SP1 SP2 10096 10096 0 0 RNG1 RNG2 100SCCM 100SCCM 10mbar 10mbar GAIN1 OFFS1 1 0 0mV 1 0 0mV GAIN2 OFFS2 1 0 0mV 1 0 0mV RTDOFFS1 RTDOFFS2 OmV OmV IN1 OUT1 EI EO1 5V 5V 10V 10V IN2 OUT2 El2 EO2 5V 5V 10V 10V SIGMODE1 SCL1 INDEP 100 METER 0 SIGMODE2 SCL2 INDEP 100 METER 0 LIN1 1 1 zero points 1 1 zero points LIN2 1 1 zero points 1 1 zero points LIM MODE1 DEAD BAND SLEEP 0 096 SLEEP 0 096 UL1 LL1 2096 8096 2096 8096 LIM MODE2 DEAD BAND2 SLEEP 0 096 SLEEP 0 096 UL2 LL2 2096 8096 2096 8096 RLY1 RLY2 0 0 0 0 T1 T2 0 0 0 0 T3 T4 0 0 0 0 BAUDRATE PARITY 9600 ODD 9600 ODD ADDRESS IFACEMODE 0 0 0 0 RESOL16 no yes 63 Appendix C Default Configuration PR400B F This page left blank 64 PR400B F Appendix D Dialog Reference Appendix D Dialog Reference we mam O mem SOS tgc displa EI es ie configurable display 0 1 tgc display tgc display configurable display 1 2 tgc display configurable display 2 tgc display 3 XXXXXXXXXXXXXXXX i XXXXXXXXXXXXXXXX user display 4 RLY1b RTD1b err status display for relays RTD system errors and RLY2b RTD2b cmd display recent interface command ack with ENTER 5 AZ1 VLV1b Rib autozero trigger and switches for valves and relays AZ2 VLV2b R2b SETUP RESE
42. ion factor with thermal mass flow meters or mass flow controllers Available range setting 0 001 2 000 Example for a MFC at channel 1 calibrated for 200 sccm full scale of nitrogen The process gas used is carbon dioxide CO The gas correction table in the user manual of the mass flow controller indicates a gas correction factor of 0 70 Range setting RNG1 200 00 sccm Gas correction factor setting GAIN 00 7000 This finally results in a range of 0 140 sccm CO which is displayed correctly by the PR4000B F OFFS is the zero offset value of the respective input signal Typically the zero offset is corrected by the auto zero cycle refer to section Control and the resulting value is shown here It also possible to enter the respective value here which may be necessary in exceptional cases Range Turndown Offset RTDOFFS1 005 mV RTDOFFS2 000 mV The PR4000B F allows the user to switch a Baratron 120 series in the range turndown mode automatically This is described in detail in the section Control The auto zero mode determines the zero offset value of both ranges to achieve highest accuracy It is of course also possible to enter the offset values for both ranges manually as described in the menu before 30 PR400B F Chapter 4 Operation Input Signal Range and Output Signal Range extra windows for channel 1 and channel 2 INT 10V OUT1 5V EI 5V EO1 5V Each signal input and output can be set for a
43. mit value E1 E2 External digital Input relay connector is active V1 V2 gt Valve switch sequential setpoint switch of the channel is on D1 D2 gt RTD line in the range turn down mode is active T1 T4 gt Results of 4 temporary formulas to increase the flexiblity of combinations 0 e g 1 constant values for manual input of criterias These criteria are combined by logical formulas e g AND OR etc oprations An AND operation for example means that criteria A and B must be fullfilled to switch the relay The PR4000B F supports the following operations the symbols in parenthesis show the characters as they appear on the display AND Criteria A and B must be fullfilled OR v Criteria A or Criteria B or both must be fullfilled ESCLUSIVEOR either Criteria A or Criteria B must be fullfilled but not both NOT 7 Criteria must not be fullfilled Negation Here are two examples for the use of logic formulas for the relay status L1 v U2 L1 OR NOT U2 R1 L1 E1 R1 AND L1 AND E1 The PR4000B F applies these formulas to the relays RLY1 and RLY2 Use the cursor which allows the following settings dependent from his position RLY R1 Position under 2 Selection of numbers of criteria Position before or after criteria Choice of operation Position under a criteria Choice of criteria or of a constant value Examples RLY1 L1v7U2 Relay 1 is activated when the signal is below lower limit of channel
44. of gas mixing systems with fixed ratio e g for supplying gas burners deposition purposes etc An example is given in the SETUP section Combinations of these modes are possible 4 7 Operation with flow meters For the use with mass flow meters it is recommended to simplify the setup settings by using the default configuration for flow DEFAULT F All flow readouts will be set to sccm all analog inputs and outputs set to 5 V Most if not all parameters to be edited are set to standard values but should be checked anyway See the table in appendix C for all default settings Change the setup settings where needed Always check the correct setting of parameter GAIN to consider the right gas correction factor Because flow meters do not require setpoint signals one could use only display 1 for both flow readouts FL1 and FL2 4 8 Operation with pressure controllers This operation mode mainly affects in line pressure controllers from von MKS Instruments e g the types 640 641 or 649 In general the above given instructions for mass flow controllers apply also here In some cases the pressure controllers are configured for different voltage input output signals therefore check carefully the conformity of both the controller and the PR4000B F Note ud The setpoint voltage will be applied only to channels which have been d pre selected with the valve switch VLV1 or VLV2 44 PR400B F Chapter 4 Operation 4 9 Limit switches and r
45. per limit definition LL1 sd dddd unit lower limit definition 22 LIM MODE2 mode limit mode SLEEP LIMIT BAND MLIMIT MBAND DEAD BAND 2 d d hysterisis setup 23 UL2 sd ddad unit upper limit definition LL2 sd dddd unit lower limit definition 24 RLY1 formula relay formulas RLY2 formula 25 T1 formula temporary formulas T2 formula T3 formula temporary formulas T4 formula PARITY prty interface setup 1 parity amp baudrate BAUDRATE baud ADDRESS aa interface setup 2 adress and interface mode if aa gt 0 IFACEMODE ad then bus mode 29 RESET DEFAULT d reset to default reset status exit setup RESOL16 b EXIT setup of 12 16 Bit resolution 66 PR400B F MKS Worldwide Calibration amp Service Centers MKS Worldwide Calibration Service Centers UNITED STATES MKS Instruments Inc Corporate Service Center 90 Industrial Way Wilmington MA 01887 4610 Tel 978 284 4000 Fax 978 284 4303 MKS Instruments Inc HPS Division Vacuum Components Valves amp Gauging 5330 Sterling Drive Boulder CO 80301 Tel 303 449 9861 Fax 303 449 2003 CANADA MKS Instruments Canada Ltd 30 Concourse Gate Nepean Ontario Canada K2E 7V7 613 723 3386 Tel 800 267 3551 CAN only Fax 613 723 9160 FRANCE MKS Instruments France s a 43 Rue du Commandant Rolland B P 41 F 93352 Le Bourget Cedex France Tel 33 1 48 35 39 39 Telex 233817 F Fax 33 1 48 35 32 52 DENMARK MKS Denmark ApS Ndr Strandvej 1
46. rity parity parity O NONE 1 EVEN 2 0DD set parity retrieve parity Baudrate BD BD baudrate setup of baudrate baudrate baudrate 0 110 121200 2 2400 3 4800 4 9600 5 19k2 6 38k4 7 57k6 8 76k8 9 110k set baudrate retrieve baudrate Address AD AD address setup of address address address 0 31 set address retrieve address Interface Mode IM IM ifacemode ifacemode setup of interfacemode this command is not used at the moment set interface mode retriev interface mode 57 Chapter 5 Interface PR400B F Resolution RS RS enable setup of 16 bit resolution enable enable OFF ON set resolution to 16 bit retrieve resolution Reset Status RE RE reset status reset status Default DF DF dmode reset to default values Pres Flow dmode P pressure F flow set pressure default Unlock 0 unlock setup Lock 1 lock setup access possible Tweak Control 0 1 switch off Tweak Control e g for pressure controller type 640 switch on Tweak Control test Tweak Control status correct for pressure controller 640 58 PR400B F Appendix A Specifications Appendix A Specifications Number of channels 2 inputs for flow or pr
47. splays tag chn OFF line 1 2 tag 0 SP 1 VA 2 CH 3 FL 4 PR 5 EX chn 1 2 enable OFF ON sets display 1 line 1 to FL of channel 1 retrieve setting of display 1 switch display 2 off Display 4 DP4 DP4 enable setup configurable display 4 enable enable OFF ON switch display 4 on 52 PR400B F Chapter 5 Interface Range RG RGc range unit setup range and engineering units range unit range 5 digits unit ubar 0 mbar 1 bar 2 mTor 3 Torr 4 KTor 5 cHO 9 PSI 10 N qm 11 SCCM 12 SLM 13 SCM 14 SCFH 15 SCFM 16 mA 17 V 18 96 19 C 20 set range of channel 1 to 50 SCCM retrieve range and unit Gain GN GNcl gain setup gain gain gain 0 001 2 000 set gain of channel 1 retrieve gain Offset OF OF cL offset setup offset offset offset 250 250 set offset of channel 1 retrieve offset RTD Offset RO ROc offset setup RTD offset offset offset 250 250 set offset of channel 1 retrieve offset 53 Chapter 5 Interface Autozero AZ PR400B F AZc offset trigger autozero Offset 250 250 perform autozero function of channel 1 Input Range IN INc phyrange phyrange setup of physical input range phyrange 1 10 set input
48. ss flow controllers also pressure based MFC s by MKS Instruments type 1150 1151 and 1152 can be combined to the PR4000B F Control Modes with Mass Flow Controllers a INDEP Use this mode if the MFC shall be operated independently from the other channel and setpoints are entered manually through the front panel keys b EXTRN In this mode the MFC shall be operated independently too but the setpoint comes from an external signal source The range of the external setpoint voltage must be defined in the setup section for El1 or El2 respectively The setting of the scaler SCL determines the ratio of the external setpoint to be applied to the respective channel Example for an MFC control range 0 100 sccm external setpoint voltage range 0 5 VDC At 5 VDC external setpoint voltage a flow rate of 40 sccm shall be generated Therefore you must set the scaler SCL 40 sccm The external setpoint signal however could be derived from the flow signal of an other PR4000 sein This allows for example to configurate several channels to a gas mixing system The value of the external voltage can be displayed Use the EX mode in the display configuration ref to section Setup 43 Chapter 4 Operation PR400B F c SLAVE If one channel is configurated as a slave then the other channel of the unit becomes automatically the master of this slave The slave s setpoint is derived from the actual signal of the master This enables configurations
49. ssure controller the setpoint which is sent out will also be corrected automatically 40 PR400B F Chapter 4 Operation During the autozero cycle the display shows ACTIVE followed by a short report DONE if the procedure was completed successfully If the zero offset signal of the meter exceeds 250 mV the PR4000F will not perform the autozero process and display FAIL If this is the case you should carefully check if all requirements for a correct zeroing are fullfilled and if necessary do a coarse zero adjustment at the meter or transducer The zero offset value is displayed in the setup menu in the window OFFS When zeroing the type 120 the zero offset values in both ranges are determined and compensated provided that the range turndown function is activated For more information refer to section Operation with Baratron Type 120 later in this chapter VLV1 VLV2 Applies only to MFC s and pressure controllers VLV1 VLV2 are so called valve switches that means that a setpoint voltage will only be applied to a pre selected channel Mark the respective channel with the left right arrow keys until the cursor appears at the right side of VLVX Then use either the up or the down key to generate a diamond sign and confirm with the ENTER key Any channel marked with a diamond can be switched on with the ON key This allows to switch on or off channels individually or all channels simultaneously Refer also to Note in section 4 6 H1 R
50. t The commands are described in section 5 5 Note ud By using the default settings you can ease the setup procedure Refer to d Exit Setup last window of the setup level of how select either pressure or flow setup Once entered the setup submenu use the down up arrow keys to step successively to the different windows 27 Chapter 4 Operation PR400B F Configuration of display 1 and display 2 DISPLAY1 CH1 CH2 DISPLAY2 FL2 SP2 In this first window of the setup submenu display 1 and display 42 of the operational level are being configurated Use the arrow keys to select and set the settings CH1 2 select one or both channel s to be displayed VA1 2 display the signal output of channel 1 and or channel 2 sP1 2 display setpoint of channel 1 and or channel 2 EX1 2 external setpoint for channel 1 channel 2 PR1 2 display as pressure PR Pressure FL1 2 display as flow FL Flow You can activate and deactivate display 2 Place the cursor between the word DISPLAY2 and the following character then make your choice with the up down arrow keys Configuration of display 3 and display 4 DISPLAY3 DISPLAY4 Activation and configuration of display 3 is done the same way as described for display 1 and display 2 In display 4 you can write any information using the serial interface refer to chapter 5 The display itself however can be activated or deactivated only via front panel operation After completing s
51. ts to the device The capacitance and inductance of cables which are handling fast signals such as data lines or stepper motor drive cables and That some cables may need internal shielding from specific wires to others please see the instruction manual for details regarding this matter Installation Mounting The PR4000B F is designed for use in dry and warm environment with sufficient ventilation The device must be installed in such a way that air can circulate free Do not cover the openings at the instrument s housing If there are heat loss generating devices located next to the unit make sure that no excessive heat is transferred to the unit Rack Mounting or Table Top The PR4000B fits to a 19 half rack or on top of a table Three screws on each side allow dis assembling of the rack angles Rubber feet give the device a stable stand on a table Screws are TX10 Note Figure 1 Rack angles assembly Figure 2 Rubber feet assmbly ud Position the unit with proper clearance to allow air cooling so that the unit can operate within the specified temperature as listed in appendix A Do not cover the openings at the instrument s housing 16 PR400B F Dimensions Chapter 2 Installation m 241 226 i E N S E ES zl tr DE DER 203 3 DER i e eo Si 185 Figure 3 Dimensions above Front and Rear Panel below 17
52. tup limit mode Imode Imode O2 SLEEP 1 LIMIT 2 BAND 3 MLIMIT 4 MBAND set limit mode retrieve limit mode 55 Chapter 5 Interface PR400B F Dead Band DB DBc deadband setup of dead band HY is an alias deadband deadband 0 096 9 996 of FS set dead band retrieve dead band Upper Limit UL ULc upperlimit setup of upper limit upperlimit upper limit 5 110 of FS formatted in selected range set upper limit retrieve upper limit Lower Limit LL LLc lowerlimit setup of lower limit lowerlimit lower limit 5 110 of FS formatted in selected range set lower limit retrieve lower limit Formula Relay FR FRr neg src op neg src op neg src neg src op neg src op neg src setup of relay source r Number of formula 1 2 neg Sign for negation is src R1 R2 L1 L2 U1 U2 E1 E2 V1 V2 D1 D2 T1 T2 T3 T4 1 0 Op Operator is OR is AND x is XOR set formula retrieve actual formula 56 PR400B F Formula Temporary FT Chapter 5 Interface FTt neg src op neg src op neg src setup of temporary formula neg src op neg src op neg src t Number of formula 1 4 The rest is the same except that the four sources T1 T2 T3 T4 are not available set formula retrieve actual formula Parity PY PY parity setup of pa
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