Model FS8000
Contents
1. regulated to power the circuit The sensor output is dependent on the accuracy of the power supply and the 5 power accuracy will ensure the performance The sensor consumes less than 10 mA normally but the minimum supply current must be larger than 10 mA for stable performance Vout The analog output pin SDA and SCL For I C please contact Siargo for protocol 3 Mechanical Dimensions and Mountings The Fs8000 series have two mounting holes for easy installation and manifold configuration Be sure to align the arrow mark on the sensor body with the measurement flow direction The sensor dimensions are shown in Figure 3 1 FS8001 FS8003 42 1 Rc1 8 6 5 Figure 3 1 The FS8000 mechanical dimensions www siargo com FS8000 VA 1 3 6 MEMS Mass Flow Sensors 4 Pressure loss JEN e The FS8000 series mass flow sensors have very low pressure drop at the full scale less than 50Pa for both FS8001 500 and FS8001 1000 max configurable to 1000 sccm The same value holds for FS8003 6 The pressure loss for high flow mode of FS8003 25 is shown in Figure 4 1 Press loss hPa 650 600 550 500 450 400 350 300 250 200 150 100 50 Mass flow SLPM 4 Ordering Guide 4 1 Sensor Selection Thesensor part number is composed of the model number and output format Referto the followings for details Fseo EN Output V analog output EV analog output and IC Full Scale Flow Rate Refe2. 759 0613 Email mpresar sentechmeas com Representative in Japan Marubeni Information Systems Co Ltd Device Solutions Department 3 12 18 Shibuya Shibuya ku Tokyo 150 0002 Japan Phone 81 3 5778 8661 Representative in Europe IDENTIC Stefanie Trojan Roehlichstrasse 19 68723 Oftersheim Germany Phone 49 0 6202 574198 Email trojan identic de This document is intended for distribution to customer s only Siargo and its subsidiaries reserve the rights to change the specifications and or descriptions without prior notice www siargo com FS8000 VA 1 6 6
3. JEN e Siargo Ltd Model FS8000 SIARGO MEMS FLOW SENSING PRODUCTS MEMS Mass Flow Sensors VA 1 MEMS Mass Flow Sensors FS8000 Series User Manual Document No 03 2015 S1 EN Issue date March 2015 Revision VA 1 Siargo Ltd 2041 Mission College Boulevard Suite 250 Santa Clara CA 95054 USA Tel 1 408 969 0368 Email info siargo com Copyright 2015 by Siargo Ltd Gah ww Siargo Ltd Siargo Ltd and its subsidiaries reserve the rights to change the specifications and or descriptions without prior notice For further information and updates please visit www Siargo com MEMS Mass Flow Sensors Model FS8000 Features e Fast response time e High sensitivity and accuracy e Small form factor e Linearized analog and digital output e Easy for manifold configuration Description The FS8000 mass flow sensors are designed and manufactured using Siargo s proprietary MEMS flow sensing and package technology The small form factor of FS8000 mass flow sensors with manifold configuration enables its applications in various gas flow control equipmentin process automation The packaging enclosure is made of the chemically inert and thermally stable polyphenylene sulfite PPS FS8001 or polycarbonate PC FS8003 material and silicon nitride forthe additional wetted materials Working Principle JEN e Siargo Ltd Applications Airsensitive pickand place automation e Vacuu
4. argo to prove to be defective at its sole option to refund repair or replacement of the products No action regardless of form may be brought against Siargo more than 365 days after a cause of action has accrued The products returned under warranty to Siargo shall be at user or purchaser s risk of loss and will be returned if at all at Siargo s risk of loss Purchasers or users are deemed to have accepted this limitation of warranty and liability which contains the complete and exclusive limited warranty of Siargo and it shall not be amended modified or its terms waived except by Siargo s sole action This warranty is subjectto the following exclusions 1 Products that have been altered modified or have been subject to unusual physical or electrical circumstances indicated but not limited to those stated in this document or any other actions which cannot be deemed as proper use ofthe products 2 Siargo does not provide any warranty on finished goods manufactured by others Only the original manufacturer s warranty applies 3 Products re sold to the third parties FS8000 VA 1 5 6 MEMS Mass Flow Sensors Contact Information Headquarters Siargo Ltd 2041 Mission College Blvd Suite 250 Santa Clara California 95054 USA Phone 01 408 969 0368 Email info Siargo com Representative in USA Sentech Measurements Inc P O Box 675265 6916 Circo Diegueno Court Rancho Santa Fe CA 92067 Phone 1 858
5. ety requirements Additional safety measures during handling and installation should be applied To prevent ESD electrostatic discharge damage and or degradation take customary and statutory ESD precautions when handling Do power the product with the correct polarity voltage and amperage All precautions and measures for electrical voltage handling must apply This product contains no user serviceable components Do not attempt to disassemble substitute parts or perform unauthorized modifications to the product Doing so will forfeit the terms of the warranty and cause the liability to any damages thereafter It should only be serviced by authorized personnel Upon requests Siargo will provide necessary technical support and or training of the personnel Cautions for Product Applications The product is designed for use with general purpose gases such as air and nitrogen It is advised that the products are best used for non explosive clean gases The sensors cannot be used for gas metrology of fluoride or fluoride containing gases For updates of the product certification information please contact the manufacturer Use for other gases such as extreme corrosive and toxic gases may cause the product malfunctioning or even severe damages Don t expose the product s outer surface to any liquids the unit does not have a water resistive electronics package Don t flow gas in conditions that can cause condensing water vapor to be t
6. m equipment Leak detection e Handheld air sampler and analyzer e Wire binder and automation Medical device and equipment with gas control The MEMS sensor chip utilizes the calorimetric principle It is packaged on a plate installed inside the flow channel which provides additional flow conditioning from the boundary layer configuration resulting in a laminar flow The mass flow measurement is established as the gas carries heat away from the heater leading to the redistribution of the temperature field Accurate flow rate is obtained by calibration with standard gas at preset conditions Flow direction www siargo com Time averaged velocity profile boundary layer Turbulent Free stream Laminar Sensor FS8000 VA 1 1 6 MEMS Mass Flow Sensors A w 14 Sensor Performance 1 1 Performance Specifications All data unless otherwise noted apply for measurement conditions air 20 C 101 325 kPa absolute pressure in a fixed flow channel of 8mm in diameter Model FS8001 FS8003 Flow range 0 500 sccm 0 6 0 25 SLPM Accuracy 2 0 0 5FS Repeatability 1 0 FS Output Linear analog 1 C Analog Output Range 0 5 4 5 Vdc Null Shift 30 mVdc Output Shift lt 0 12 Jo C Response Time 10 msec Power Supply 8 24 Vdc Max Working Pressure 0 5 MPa Working Temperature 0 55 C Storage Temperature 20 65 C Humidity lt 95 RH No icing or co
7. ndensation Mechanical Connection M5 Rc 1 8 Inlet M5 Outlet Connector SM05B SRSS TB JST Calibration Air 20 C 101 325kPa To obtain accurate flow measurement let the sensor warm up 1 minute at power up For best performance both inlet and outlet s connecting pipe diameters should not be smaller than the specified mechanical sizes of the products 1 2 Flow Characteristics The FS8000 provides a linear analog output corresponding with 0 full scale The typical output characteristics of Fs8000is illustrated in Figure 1 1 The data are obtained with a 12 Vdc supply Typical Output Curve FS8000 Mass flow Typical analog output dd Output Voltage sccm mV mV 4000 0 500 20 1300 ue 4096 2100 2596 6096 2900 1000 80 3700 3 00 Flow Rate 100 4500 sccm 0 20 40 60 80 100 Figure 1 1 The typical analog output curve of FS8000 www siargo com FS8000 VA 1 2 6 MEMS Mass Flow Sensors 2 Electrical Interface 2 1 Pin Definition The FS8000 series have a 5 pin electrical interface The sensor pin configuration is shown in Figure 2 1 FS8001 OOo a o 12345 FS8003 Pin Definition 1 SCL FC 05 GND Ground 4 VCC Power supply n2 4 Vout Analog output sa 5 SDA PC Figure 2 1 FS8000 pin configuration 2 2 Pin Description VCC and GND The FS8000 requires a power supply of 8724 Vdc The voltage is internally filtered and
8. r to the specification datasheet Product Series Name 01 or 03 Flow rate number only without unit The default unit of FS8001 is sccm of FS8003 is SLPM The sensor standard output is analog while digital output is optional 4 3 Order Contact and Customer Support The sales offices are listed at the end of this document through Siargo website www siargo com or the sales office office or distributors or sales representatives For large quantities For small quantities the order can be placed either please contact the sales Siargo is making every effort to ensure the quality of the products In case of questions and or product supports please contact customer service listed at the end of the document We will respond your request in a timely fashion and will work with you toward your complete satisfaction www siargo com FS8000 VA 1 MEMS Mass Flow Sensors Important Notices Wetted Materials and Compatibility The sensor body is made of polyphenylene sulfite FS8001 or polycarbonate FS8003 The sensor chip comprises of silicon silicon nitride and silicon dioxide and the sensor chip surfaces are passivated with silicon nitride and silicon dioxide The electronic sealing is provided by RTV room temperature vulcanizing silicone sealant WR 704 composed of HOCH SiO CH H Cautions for Handling and Installations The product at the time of shipment is fully inspected for product quality and meets all saf
9. rapped inside the unit as the accuracy could be significantly altered It is suggested to design your application so that nominal flow rate is approximately 70 of the full scale flow rate of the sensor Don t use a sensor with an extreme flow range for instance don t use a 10 m s sensor for a 0 2 m s application www siargo com JEN e Warranty and Liability effective June 2009 Siargo warrants the products sold hereunder properly used and properly installed under normal circumstances and service as described in the user manual shall be free from faulty materials or workmanship for 180 days for OEM products and 365 days for non OEM products from the date of shipment This warranty period is inclusive of any statutory warranty Any repair or replacement serviced product shall bear the same terms in this warranty Siargo makes no other warranty express or implied and assumes no liability for any special or incidental damage or charges including but not limited to any damages or charges due to installation dismantling reinstallation or any other consequential or indirect damages of any kind To the extent permitted by law the exclusive remedy of the user or purchaser and the limit of Siargo s liability for any and all losses injuries or damages concerning the products including claims based on contract negligence tort strictly liability or otherwise shall be the return of products to Siargo and upon verification of Si
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