User Manual PZ200E - Physik Instrumente
Contents
1. Controller cceccececeeecececceceeeneeeneeeneeeneeeneeenes 40 Troubleshooting 42 Customer Service 43 Old Equipment Disposal 44 Technical Data 45 oe ee 01 1011 61210 ee 45 92 Frequency Response Diagram ccccccceecesecneceecereessseeececneeeeeenes 46 9 3 Block Diagram for E 616 SSOX ccccccceceeeeeeeeeennneeeeeeeeeeeeeeeneeeeeeeeees 48 94 Block Diagram for E 616 SOX ccccceeeeeeeeeeennaeeeeeeeeeeeeseeeneeeeeeeees 50 O5 gt Pin ASSIQHIMICMINGS reren nae dares aaa EA AAAA E AAS ESTES 52 95 1 PZT amp Sensor Connector of the E 616 880 ssseessenenenneeeeereree 52 952 PZT amp Sensor Connector of the E 616 80 c ccccceeecetteeeeeeeeees 53 953 Pin Assignment of Rear Main Connector for E 616 SS0 0 5 54 954 Pin Assignment of Rear Main Connector for E 616 S0 0 06 55 Introduction Piezo Nano Positioning PI 1 Introduction 1 1 Overview The E 616 is an OEM controller module for piezo based tip tilt mirrors and tip tilt platforms with high resolution strain gauge sensors A high peak output power of 10 W per channel allows dynamic operation of the tip tilt mirrors for applications such as laser beam steering and stabilization Average output power is 5 W All multi axis piezo tip tilt mirrors of PI are designed as parallel kinematics all actuators affect the same movable platform Two orthogonal rotation axes share a common pivot point For position con2. Mode CAUTION SGS MON MEASUREMENT Be sure to use an appropriate input impedance when you measure the following monitor voltages on the rear 32 pin connector SGS MON X pin C 14 SGS MON Y pin A 14 and SGS MON 1 to SGS MON 3 pins A 10 C 10 C 16 SGS MON X SGS MON Y Output impedance is 50 per channel SGS MON 1 to SGS MON 3 Output impedance is 10 kQ 10 nF Your measurement device may get damaged if you measure without appropriate input impedance NOTE To avoid an overflow of the amplifier in open loop mode do not exceed the allowable control input range Zero point adjustment can be performed in open loop mode as well To do so proceed as follows m With E 616 SSO 1 Display the sensor monitor signal SGS MON of the sensor channel to be adjusted SGS MON 1 SGS MON 2 2 To avoid an offset to the sensor signals caused by hysteresis effects perform a complete tilt motion of both tilt axes Apply a control input range from 2 V to 12 V to X Input respectively to Y Input 3 Apply a control input voltage of 0 V for X Input and Y Input to set the platform back to its initial position 4 Adjust the corresponding Zero potentiometer until you obtain 0 V as SGS MON signal The OFL LEDs no longer glow if you change to closed loop mode m With E 616 S0 1 Display sensor monitor signal SGS MON of the sensor channel to be adjusted SGS MON 1 SGS MON 2 SGS MON 3 Www pi ws E 616 PZ200E Release 1 0 2 Page 34 Calibrat
3. _ servo control module 2 for Y tilt axis Figure 8 Assignment of potentiometers to E 802 55 servo control modules Assignment of potentiometer to function P1 Slew Rate Limitation P2 Loop Gain P Term P3 Integration Time Constant I Term P4 Notch Frequency P5 is factory set for internal use not to be changed P6 is factory set for internal use not to be changed www pi ws E 616 PZ200E Release 1 0 2 Page 38 PI System Description Piezo Nano Positioning 5 System Description 5 1 The E 616 SSO0Ox Controller The E 616 SS0 controller module and the E 616 SSOG bench top controller are designed for tip tilt platforms based on differential drive The differential drive of the S 330 and S 334 series tip tilt platforms is based on two pairs of actuators operating in push pull mode to realize tilt motion Each pair of actuators is interconnected electrically so that one actuator expands while the other contracts With this principle of operation pure vertical motion in the Z axis is not possible Each pair of actuators i e each tilt axis is assigned to one E 802 55 servo control module to one sensor channel and to one amplifier channel To bring both axes in their initial position the output of the third amplifier channel is fixed to 100 V The following assignment is valid for E 616 SS0Ox Controllers wm Xtilt axis Control input Sensor monitor signal One tenth of internal control voltage One hundred
4. is 10 kQ 10 nF Your measurement device may get damaged if you measure without appropriate input impedance Monitoring the Sensor Signals The sensor signals can be displayed related to channels SGS MON 1 SGS MON 2 and with E 616 S0O SGS MON 3 and related to axes SGS MON X SGS MON Y The corresponding monitor channels are available on the rear 32 pin main connector Be sure to choose an appropriate input impedance for your measurement device when you measure the monitor voltage Www pi ws E 616 PZ200E Release 1 0 2 Page 29 Starting Operation Piezo Nano Positioning PI m E 616 SS0 The sensor channels can be assigned to the tilt axes X and Y ina one to one ratio Therefore SGS MON 1 equals SGS MON X SGS MON 2 equals SGS MON Y Channels SGS MON X pin C 14 and SGS MON Y pin A 14 display the differential sensor signals for the X and the Y axis Each sensor signal is based on a pair of sensors each pair is assigned to the corresponding tilt axis m E 616 S0 A transformation unit connects the three sensor channels and both tilt axes The sensor monitor channels SGS MON 1 pin A 10 SGS MON 2 pin C 10 and SGS MON 3 pin C 16 display the signals of the sensors attached to the piezo actuators The sensor monitor signals SGS MON X pin C 14 and SGS MON Y pin A 14 display the position of the tilt axes calculated by the transformation unit The axis related sensor signals SGS MON X and SGS MON Y are derived fro
5. p 19 m Overflow signals see Zero Point Adjustment p 31 m TTL signal for synchronizing 200 kHz For details on pin assignment see Pin Assignment of Rear Main Connector for E 616 S0 p 55 NOTE Note that the vertical motion commanded by the E 616 Controller for tripod design Z Offset always is in open loop mode independent from the operation mode of the X and Y tilt axes 3 3 Open Loop and Closed Loop Operation Www pi ws DANGER Procedures which require opening the case should be carried out by authorized qualified personnel only Disconnect the E 616 from power when opening the case and when resetting internal switches or jumpers When the E 616 must be operated with the case open voltages of up to 120 V can be exposed Do not touch internal conductors E 616 PZ200E Release 1 0 2 Page 19 Starting Operation Piezo Nano Positioning PI Www pi ws CAUTION The product described is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive
6. please have the following information about your system ready m Product codes and serial numbers of all products in the system m Current firmware version of the controller if present m Version of drivers and or host software if present m Operating system on host PC if present Www pi ws E 616 PZ200E Release 1 0 2 Page 43 PI Old Equipment Disposal Piezo Nano Positioning S Old Equipment Disposal In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente Pl GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Www pi ws E 616 PZ200E Release 1 0 2 Page 44 Technical Data Piezo Nano 9 Technical Data PI Positioning 9 1 www pi ws Specifications Function Tilt axes Sensor Servo characteristics Sensor type Sensor channels Ext synchronization Amplifier Control input voltage range Output voltage range Amplifier channels Peak output power per channel Average outpu
7. signal capacitance at room temperature The following equations describe the relationship between reactive drive power actuator capacitance operating frequency and drive voltage The average power a piezo driver has to be able to provide for sinusoidal operation is given by Pa C Umax Up p f Peak power for sinusoidal operation is Pmax T C Umax Up p f Where Pa average power W Pmax peak power W C piezo actuator capacitance Farad As v f operating frequency Hz Umax nominal voltage of the amplifier V Up p peak to peak drive voltage V E 616 PZ200E Release 1 0 2 Page 47 Technical Data PI Piezo Nano Positioning 9 3 Block Diagram for E 616 SSOx www pi ws The block diagram shows the structure of an E 616 SS0x Controller for tip tilt mirrors with differential drive ft IH i gt 3 i illar 3 al k 3 w p Q m um Ts bt 4012807 euediuosy C BE Bt Meee 208U85 8 12d r k REF i u H e gt a o D N 6 P W 3 f Strain Gauge 5 3 O o ENE 3 en 5 ajg TALLIA E s S 5 SSELTTETTITT ia LILII So O Q Gf a ae amp o amp oooga Figure 10 Block diagram of the E 616 SS0x Controller for tip tilt platforms of S 330 and S 334 series E 616 PZ200E Release 1 0 2 Page 48 G aon ONO io ome Technical Data Piezo Nano Positioning PI V MON X rep
8. the block diagram SGS MON 1 to SGS MON 3 represent the amplified sensor signals measured between strain gauge amplifiers and transformation board Www pi ws E 616 PZ200E Release 1 0 2 Page 55 Technical Data Piezo Nano Positioning PI NOTE Selection of Open Loop and Closed Loop Mode Servo OFF ON Pins By default E 616 Controllers are set to closed loop mode by an internal DIP switch Selection of open loop mode requires to open the device see section Open Loop and Closed Loop Operation p 19 When DIP switches 1 and 2 are in OFF position then servo control can be activated deactivated externally by commanding pin C 26 Servo 1 OFF ON for tilt axis X and pin A 26 Servo 2 OFF ON for tilt axis Y For example setting pin C 26 to HIGH results in open loop mode of tilt axis X setting this pin to LOW results in closed loop mode www pi ws E 616 PZ200E Release 1 0 2 Page 56
9. 0 to 10 V X Input Y Input open loop 2 to 12 V m E 616 S0 E 616 S0G Closed loop mode of tilt axes X Input Y Input 5 to 5 V Z Offset 3 to 3 V Open loop mode of tilt axes X Input Y Input 7 to 7 V Z Offset 3 to 3 V The E 616 amplifier output channel is deactivated If the internal temperature goes out of range 75 C 167 F the voltage output will be deactivated The tip tilt platform stops moving After a cooling down period at a hardware temperature of 60 C 140 F the voltage output is reactivated automatically How to avoid overheating m To avoid overheating reduce the ambient temperature Note that the difference in ambient temperature and hardware temperature is about 20 Kelvin 1 Kelvin corresponds to 1 C a temperature difference of 20 Kelvin equals a difference of 36 F m E 616 Sx OEM Controller modules need to be installed with an appropriate air circulation area Forced air cooling must be provided to prevent internal heat build up m Place the E 616 bench top controllers in a location with adequate ventilation to prevent internal heat build up Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side If this is not possible reduce the ambient temperature Www pi ws E 616 PZ200E Release 1 0 2 Page 42 Customer Service Piezo Nano Positioning PI 7 Customer Service Call your PI representative or write to info pi ws
10. D SGS B1 corresponds to the SGS1 sensor bridge signal connected to the positive input of the strain gauge amplifier The SGS1 B signal is connected to the negative input of the strain gauge amplifier Further sensor channels are connected accordingly www pi ws E 616 PZ200E Release 1 0 2 Page 53 Technical Data Piezo Nano Positioning PI 9 5 3 Pin Assignment of Rear Main Connector for E 616 SSO The rear connector of the E 616 Controller is a DIN 41216 standard connector version D The 32 pins of the D version all carry even number designations and are in rows A and C 2 GND GND 4 V MON X internal use 6 DC_IN_ DC_IN_ 8 DC_IN_ DC_IN 10 SGS MON 1 SGS MON 2 12 V MON Y internal use 14 SGS MON Y SGS MON X 16 V MON 3 internal use 18 V MON 1 V MON 2 20 X Input internal use 22 internal use Y Input 24 SYNC 200 internal use 26 Servo 2 OFF ON Servo 1 OFF ON 28 OFL1 internal use 30 not connected OFL2 32 GND GND A32 V MON X and V MON Y correspond to the signals X Out and Y Out on the block diagram see Block Diagram of the E 616 SSO0 Controller p 48 SGS MON 1 equals SGS MON X SGS MON 2 equals SGS MON Y NOTE Selection of Open Loop and Closed Loop Mode Servo OFF ON Pins By default E 616 Controllers are set to closed loop mode by an internal DIP switch Selection of open loop mode requires to open the device see section Open Lo
11. I V MON X represents the servo control output X Out whereas V MON Y represents the servo control output Y Out SGS MON X represents X In SGS MON Y represents Y In The formulas for calculation of the axis position SGS MON X SGS MON Y from the three sensor signals SGS MON 1 to SGS MON 3 are in section The E 616 S0x Controller p 40 as well as the calculation of the channel related amplifier output voltage V MON 1 to V MON 3 from the axis related V MON X and V MON Y channels To obtain the maximum tilt range the actuators of the tripod drive are supplied with an offset voltage when the system is calibrated For valid control input ranges see below NOTE CONTROL INPUT RANGE FOR E 616 S0 AND E 616 S0G With calibration of the tripod controllers E 616 S0x an offset voltage is applied to the piezo actuators to achieve a maximum tip tilt range By default E 616 Controllers are preset for closed loop mode There are different ranges of control input for closed loop and for open loop ae and E 616 S0G following control input ranges are valid Closed loop mode for tilt axes m X Input Y Input 5 to 5 V m Z Offset 3 to 3 V Open loop mode for tilt axes m X Input Y Input 7 to 7 V m Z Offset 3 to 3 V If you apply voltage exceeding these ranges the overflow LEDs glow Www pi ws E 616 PZ200E Release 1 0 2 Page 51 Technical Data Piezo Nano Positioning PI 9 5 Pin Assignments 9 5 1 PZT amp Sensor Connector o
12. Piezo Nano Positioning PI PZ200E User Manual E 616 SSO E 616 S0 OEM Controller for Piezo Multi Axis Tip Tilt Platforms Release 1 0 2 Date 4 09 2009 This document describes the following products m E 616 SSO Multi Channel Servo Controller Module for Piezo Tip Tilt Platforms with SGS and Based on Differential Drive m E 616 S0 Multi Channel Servo Controller Module for Piezo Tip Tilt Platforms with SGS and Based on Tripod Drive Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Moving the NanoWorld www pi ws Tel 49 721 4846 0 Fax 49 721 4846 299 SE info pi ws www pi ws Declaration of Conformity according to DIN EN ISO IEC 17050 2005 01 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der R6merstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Controller for Piezo Multi Axis Tip Tilt Platforms Model Numbers E 616 Product Options all complies with the following European directives 2006 95 EC Low voltage directive LVD 2004 108 EC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Electrical equipment which is intended to be integrated in other electrical equipm
13. affixed to the devices Re calibration should only be done by adequate trained personnel and after consultation with PI Otherwise preset data will be lost Only if an overflow LED OFL1 OFL2 glows a zero point adjustment will be necessary Www pi ws E 616 PZ200E Release 1 0 2 Page 13 Starting Operation Piezo Nano Positioning PI 3 2 Front and Rear Panel Elements 3 2 1 Front Panel of the E 616 S550 Controller PIEZO sonno eee amp PZT amp Sensor 4 20V 120V Power OFL1 OFL 2 2 Zero 1 9 Zero 2 zero 3 cael 25 pin sub D socket PZT amp Sensor Zero 1 and Zero 2 potentiometers OFL1 and OFL2 LED POWER LED For connecting tip tilt platforms with SGS sensors and based on differential design as e g those of the S 330 or S 334 series For pin assignment see PZT amp Sensor Connection of the E 616 SS0 Controller p 52 For zero point adjustment of the SGS sensor channels 1 and 2 Green light for overflow of the amplifier see Zero Point Adjustment p 31 for more information Green light glows permanently indicates connection to power supply Www pi ws E 616 PZ200E Release 1 0 2 Page 14 Starting Operation Piezo Nano Positioning PI NOTE Note that sensor channel 3 SGS MON 3 and potentiometer Zero 3 are deactivated with the E 616 Controller based on differential drive NOTE Overflow is possible in open l
14. cident prevention rules E 616 PZ200E Release 1 0 2 Page 7 Introduction Piezo Nano Positioning PI m Do not touch the pins of the sub D connector which carry the piezo output voltage and the sensor signals The high voltage output may be active whenever the controller is turned on Voltages between 20 V and 120 V can be present on the sub D connector m Be sure to connect pins A 32 and C 32 to a Protective Ground DANGER Procedures which require opening the case should be carried out by authorized qualified personnel only Disconnect the E 616 from power when opening the case and when resetting internal switches or jumpers When the E 616 must be operated with the case open voltages of up to 120 V can be exposed Do not touch internal conductors CAUTION The product described is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging CAUTION AIR CIRCULATION Provide for sufficient ventilation Insufficient air flow will cause overheating and
15. e Y tilt axis is in open loop mode Www pi ws E 616 PZ200E Release 1 0 2 Page 22 Starting Operation Piezo Nano Positioning PI NOTE Selection of Operating Mode by Rear 32 Pin Main Connector When DIP switches 1 and 2 are in OFF position then servo control can be activated and deactivated by pins C 26 Servo 1 OFF ON and A 26 Servo 2 OFF ON of the rear 32 pin main connector Use TTL signals for these pins 0 V to 0 5 V LOW Servo ON 3 V to 5 V HIGH Servo OFF NOTE Note that the vertical motion commanded by the E 616 Controller for tripod design Z Offset always is in open loop mode independent from the operation mode of the X and Y tilt axes 3 4 Analog Control Input Www pi ws For all E 616 models tip tilt motion of the mirror platform is commanded by analog signals Control input signals generated by external signal sources are connected to pins A 20 Input X C 22 Input Y and with the E 616 S0 tripod controller to C 24 Z Offset Computer control can be implemented using a DAC board in a PC to generate the analog input signal PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS driver set available for all newer controllers from PI A further option includes the patented HyperBit technology providing enhanced system resolution Download instructions are in Download of the GCS LabVIEW Driver Set for Analog Contr
16. ected to a suitable power supply 12 30 V 2 A and control input signals via the included multi point socket art no 588 For more information see Pin Assignment of the Main Rear Connector for E 616 SS0 p 54 respectively Pin Assignment of Rear Main Connector for E 616 S0 p 55 2 Be sure to connect pins A 32 and C 32 to a Protective Ground 3 Fix the module to the front panel using the four included cross head screws see Figure 2 below Doon D Q ZO CONTRO oa Power I OFL 1 OFL 2 Oreos o E CE Figure 2 Front panel of E 616 arrows indicate where to tighten the front plate to an appropriate case www pi ws E 616 PZ200E Release 1 0 2 Page 12 Starting Operation Piezo Nano Positioning PI 3 Starting Operation 3 1 Calibrated System If an E 616 Controller is ordered together with a tip tilt platform the system will be fully calibrated at PI according to your specifications before being shipped and will come with a calibration information sheet CAUTION CALIBRATION If you inform PI about your application your E 616 will be fully calibrated before being shipped Tip tilt platform and controller are matched and calibrated together Do not interchange controller whole devices or individual modules and or tip tilt platforms when they are calibrated together Respect the assignment of the tip tilt platforms to the controllers as indicated by the serial numbers on the labels
17. ent only conforms to the cited EMC Standards and normative documents if the user ensures a compliant connection when implementing the total system Possible necessary measures are installation of the component in a suitable shielded enclosure and usage of suitable connectors March 23 2009 Karlsruhe Germany ee ae Dr Karl Spanner President Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties LabVIEW The products described in this manual are in part protected by the following patents US Patent No 6 950 050 Copyright 2009 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 04 09 2009 Document Number PZ200E KSch Release 1 0 2 E 616_User_PZ200E102 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws BB About this Document Users of this Manual This manual is designed to help the reader
18. es in a one to one ratio whereas the output of amplifier PA3 is set fixed to 100 V The monitor channels V MON 1 to V MON 3 display one hundredth of the actual output voltage V MON 1 is assigned to pin A 18 and amplifier PA1 V MON 2 is assigned to pin C 18 and amplifier PA2 V MON 3 is assigned to pin A 16 and amplifier PA3 Www pi ws E 616 PZ200E Release 1 0 2 Page 28 Starting Operation Piezo Nano Positioning PI m E 616 S0 The three amplifier channels are related to the tilt axes X and Y via the transformation unit The output voltage V MON 1 to V MON 3 is split by a voltage divider and one hundredth of the actual output voltage is displayed as V MON signal V MON 1 is assigned to pin A 18 and amplifier PA1 V MON 2 is assigned to pin C 18 and amplifier PA2 V MON 3 is assigned to pin A 16 and amplifier PA3 The channel related monitor signals V MON 1 V MON 2 and V MON 3 are calculated by the axis related signals V MON X and V MON Y as follows V MON 1 0 1 Y V MON 2 0 1 0 867 X 0 5 Y V MON 3 0 1 0 867 X 0 5 Y where X V MON X X Out Y V MON Y Y Out CAUTION SGS MON MEASUREMENT Be sure to use an appropriate input impedance when you measure the following monitor voltages on the rear 32 pin connector SGS MON X pin C 14 SGS MON Y pin A 14 and SGS MON 1 to SGS MON 3 pins A 10 C 10 C 16 SGS MON X SGS MON Y Output impedance is 50 per channel SGS MON 1 to SGS MON 3 Output impedance
19. f the E 616 SSO The 25 pin sub D connector of the E 616 SSO Controller module for tip tilt platforms Ecce 1 internal use 2 not connected 3 SGS2 B1 4 SGS Reference 5 SGS1 B1 6 SGS Reference 7 internal use 8 internal use 9 internal use 10 GND 11 PZT1 OUT 12 PZT2 OUT 13 PZT3 OUT 14 internal use 15 not connected 16 SGS2 B2 17 SGS GND 18 SGS1 B2 19 SGS GND 20 internal use 21 internal use 22 internal use 23 PZT1 GND 24 PZT2 GND 25 PZT3 GND SGS B1 corresponds to the SGS1 sensor bridge signal connected to the positive input of the strain gauge amplifier The SGS1 B signal is connected to the negative input of the strain gauge amplifier Further sensor channels are connected accordingly www pi ws E 616 PZ200E Release 1 0 2 Page 52 Technical Data Piezo Nano Positioning PI 9 5 2 PZT amp Sensor Connector of the E 616 S0O The 25 pin sub D connector of the E 616 S0 Controller module for tip tilt mirror platforms 1 SGS3 B1 2 not connected 3 SGS2 B1 4 SGS Reference 5 SGS1 B1 6 SGS Reference 7 internal use 8 internal use 9 internal use 10 GND 11 PZT1 OUT 12 PZT2 OUT 13 PZT3 OUT 14 SGS3 B2 15 not connected 16 SGS2 B2 17 SGS GND 18 SGS1 B2 19 SGS GND 20 internal use 21 internal use 22 internal use 23 PZT1 GND 24 PZT2 GND 25 PZT3 GN
20. fety Precaution S asien A A a e aiei 7 14 Model Survey sveisere isro ierrnisesesnersi irnek ities enc nn ee eich else act 10 15 Optional Accessories for E 616 ccccceeeceeeceeeeeeeeeeeeeeeeeeeeeeeeeees 11 16 UNPACKING irate einiiioiin Ware OM Ra eee 11 Mounting of the E 616 Module 12 Starting Operation 13 31 gt Calibrated SY StS Msro oianean Mwai acca ana EEA E stele amyl xing 13 3 2 Front and Rear Panel Elements 0 ccccccecceecceeeeeeeeeeeeneeeneeeeeeens 14 32 1 Front Panel of the E 616 SSO0 Controller a 14 322 Rear Side of the E 616 SSO Controller 15 323 Front Panel of the E 616 SO Controller oo cece ee eeeeeseeeeeeeaee 17 324 Rear Side of the E 616 SO Controller cess eeecee ee eeesee ee eeeeas 18 3 3 Open Loop and Closed Loop Operation cssessseeseerseeeeeeneee 19 34 Analog Control IA pUbies cecs ccncecsaestes ot cttheen ninii iaiia siaii mata te 23 3 5 FirstOp ratlom e eec tel oeas tinier avid to aad tanie 24 3 6 Download of Analog GCS LabVIEW Driver Set eee 27 Set Monitor SIGNALS a rea aeaa aaa a Ose tadh nee her tdh cece sadethdentndeg 28 Calibration 31 41 Zero Point Adjustment c c cece e cee ee cece ects eee eeeeeeeeeeeeeeeeeeeteeeeeeess 31 42 Servo Controller Dynamic Calibration 0 eeeeeeeeeeeeeeeeeeeeeees 35 System Description 39 5 1 The E 616 SSOx Controller oo ceecceeccecececeeeceeeeeeeeeneeeneeeneeanes 39 52 The E 616 SOx
21. green overflow LEDs glows then a zero point adjustment is necessary Follow the instructions for zero point adjustment see Zero Point Adjustment in Closed loop Operation with E 616 Controllers p 31 NOTE To reduce disturbances by signal frequencies of other devices the E 616 Controllers can be supplied with a 200 kHz TTL signal for synchronization This can be necessary for example if you use measuring boards or if you operate another E 616 Controller 3 6 Download of Analog GCS LabVIEW Driver Set Updated releases of GCS LabVIEW drivers for analog controllers from PI and the corresponding manuals are available for download at www pi ws While the manuals are freely accessible you need a password for the software download This password is provided in the E500T0011 Technical Note delivered with the controller To download from the PI Website proceed as follows 1 www pi ws On the www pi ws front page click on Download Support in the Service section on the left On the Download Support page click on Manuals and Software Downloads On the PI Download Server page enter the Username and the Password which are provided in the separate Technical Note and click on Login Click on Download in the navigation bar across the top Click on the E Piezo Drivers amp Nanopositioning category Click on E 500 Click on Software if you click on Documents you will get the latest manuals Click the Down
22. he D A board is in the E 500 ACD driver set Activating HyperBit requires purchase of the password which can be obtained from PI under Order No E 500 HCD 1 6 Unpacking WWww pi ws Unpack the E 616 OEM Controller for Piezo Multi Axis Tip Tilt Platforms with care Compare the contents against the items covered by the contract and against the packing list The following components are included E 616 Sx PZ200 PZ150E 588 E500T0011 in ordered configuration User Manual for E 616 SS0 E 616 S0 this document User Manual for E 802 Servo Control Submodule 32 pin main connector DIN 416123 Technical Note contains access information for downloading the latest version of GCS LabVIEW driver set for analog controllers Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in case the product need be shipped again E 616 PZ200E Release 1 0 2 Page 11 PI Mounting of the E 616 Module Piezo Nano Positioning e Mounting of the E 616 Module CAUTION AIR CIRCULATION Provide for sufficient ventilation Insufficient air flow will cause overheating and premature failure For detailed information on overheat protection see Troubleshooting p 42 second section For mounting the E 616 Sx module proceed as follows 1 Insert the module into an appropriate case The rear 32 pin main connector of the E 616 module can be conn
23. ice E 616 SSOG E 616 SO0G see Figure 1 below r Figure 1 Front panel of E 616 SxG benchtop controller The bench top devices are described in a separate manual PZ219E You can download it from the PI website One E 802 55 servo control module for each of the X and Y tilt axes is integrated in the E 616 analog controllers Find more information on these servo control modules in the separate User Manual PZ150E included in the contents of delivery www pi ws E 616 PZ200E Release 1 0 2 Page 10 Introduction Piezo Nano Positioning PI 1 5 Optional Accessories for E 616 E 500 ACD E 500 HCD LabVIEW driver set for analog controllers available free of charge upon request Computer control can be implemented using a DAC board in a PC to generate the analog input signal PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI The PI Analog Controller drivers support all D A converter boards from National Instruments that are compatible with DAQmx8 3 LabVIEW compatibility is given from version 7 1 upwards The driver set is also available for download from the PI website Access to HyperBit Functionality for Enhanced System Resolution Supports Certain D A Boards PI s patented HyperBit technology for providing position resolution higher than that of t
24. ignals of the amplifier output voltage V MON 1 to V MON 3 are calculated using the output voltage of the axis related servo control modules V MON X V MON Y Calculation is performed using the following formulas V MON 1 0 1 Y V MON 2 0 1 0 867 X 0 5 Y V MON 3 0 1 0 867 X 0 5 Y where X V MON X X Out Y V MON Y Y Out Commanding Vertical Motion With the E 616 S0x vertical motion can be commanded using Z Offset irrespective of the current operating mode of the tilt axes Note that tilt angle and vertical motion are interdependent Values for nominal tilt motion respectively for nominal vertical motion in the data table of the tripod tip tilt platforms User Manual PZ148E for S 325 series tip tilt platforms refer to pure nominal tilt motion respectively to pure nominal vertical motion To calculate the actual possible tip tilt motion and vertical motion read Section 5 Working Principle of User Manual PZ148E for S 325 tip tilt mirrors Note the maximum control input for Z Offset ranges from 3 0 V to 3 0 V without any additional tip tilt motion Z Offset input is multiplied by a gain of 20 E 616 PZ200E Release 1 0 2 Page 41 Troubleshooting Piezo Nano Positioning PI G Troubleshooting Positioner does not move Cables not connected properly m Check the connecting cables Check whether the allowable control input range was met m E 616 SS0 E 616 SS0G X Input Y Input closed loop
25. ion Piezo Nano Positioning PI 2 To avoid an offset to the sensor signals caused by hysteresis effects perform a complete contraction expansion cycle by commanding a vertical motion Apply a voltage range from 3 0 V to 3 0 V to Z Offset pin C 24 3 Apply a control input voltage of 0 V to Z Offset 4 Apply a control input voltage of 0 V for X Input and Y Input to set the platform back to its initial position 5 Adjust the Zero potentiometer corresponding to the chosen SGS MON channel until you obtain about 5 V as SGS MON signal repeat this procedure for each of the three SGS MON channels The OFL LEDs no longer glow if you change to closed loop mode 4 2 Servo Controller Dynamic Calibration DANGER Procedures which require opening the case should be carried out by authorized qualified personnel only Disconnect the E 616 from power when opening the case and when resetting internal switches or jumpers When the E 616 must be operated with the case open voltages of up to 120 V can be exposed Do not touch internal conductors CAUTION The product described is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCB
26. is possible NOTE Note that the vertical motion commanded by the E 616 Controller for tripod design Z Offset always is in open loop mode independent from the operation mode of the X and Y tilt axes Coordinate Transformation The E 616 S0x Controller is designed to command S 325 series tip tilt platforms based on a tripod design This controller version integrates a circuit performing transformation of the commanded tilt angles into corresponding linear motion of the individual actuators The three actuators are supplied by corresponding amplifier output voltage A complicated external calculation of the linear motion of the three actuators is omitted Due to the internal transformation unit of E 616 S0 controllers there is no one to one assignment of tilt axes to sensor and amplifier channels Multiple amplifiers and multiple sensors can be involved in the motion of one tilt axis just as one amplifier or one sensor can participate in the motion of more than one tilt axis Therefore the axis related sensor signals SGS MON X SGS MON Y are calculated from the channel related sensor signals SGS MON 1 to SGS MON 3 This is done applying following formulas SGS MON X 0 867 S2 S3 SGS MON Y S1 0 5 S2 S3 E 616 PZ200E Release 1 0 2 Page 40 System Description Piezo Nano Positioning PI Www pi ws where S1 SGS MON 1 sensor signal 1 S2 SGS MON 2 sensor signal 2 S3 SGS MON 3 sensor signal 3 Monitor s
27. is reached and cannot be exceeded For further information see sections Analog Control Input p 23 respectively Zero Point Adjustment p 31 3 2 4 Rear Side of the E 616 S0O Controller The 32 pin connector contains connections for m Operating power input DC Input from 12 V to 30 V 2 A m V MON 1 to V MON 3 monitor channels carry one hundredth of the amplifier output PA1 PA2 PA3 see Block Diagram of the E 616 S0 Controller p 50 channel related not axis related m V MON X and V MON Y channels monitor the servo control module output for the X and Y tilt axes see Block Diagram of the E 616 S0 Controller p 50 axis related Www pi ws E 616 PZ200E Release 1 0 2 Page 18 Starting Operation Piezo Nano Positioning PI m SGS MON 1 to SGS MON 3 monitor channels carry the signals of the three SGS sensors i e the channel related input of the transformation board see Block Diagram of the E 616 S0 Controller p 50 channel related not axis related m SGS MON X and SGS MON Y channels monitor the transformed sensor signals X In and Y In see Block Diagram of the E 616 S0 Controller p 50 axis related m Control inputs X Input and Y Input for tilt motion of the X and Y tilt axes and Z Offset for vertical motion see Analog Control Input p 23 m Servo 1 ON OFF and Servo 2 ON OFF for changing between open loop and closed loop mode for the X and Y tilt axes Open Loop and Closed Loop Operation
28. le devices or individual modules and or tip tilt platforms if they are matched and calibrated together Controller and tip tilt platforms that were calibrated together are not exchangeable The serial number of the corresponding tip tilt platform is given on the calibration label of the E 616 The device is factory set to open loop mode Getting Started 1 Connect the controller via its rear 32 pin main connector to your case using the included 32 pin multi point socket connector art no 588 To do so consider the corresponding pin assignment see Pin Assignment of the Rear Main Connector for E 616 SS0 p 54 respectively Pin Assignment of the Rear Main Connector for E 616 S0 p 55 and connect pins A 32 and C 32 to a Protective Ground 2 Connect the E 616 to the tip tilt platform via the 25 pin sub D socket on its front panel 3 Connect the multi point socket connector to an external power supply via pins A 6 and A 8 respectively via pins C 6 and C 8 for power supply and connect the power supply to the line voltage Steady glowing of the green Power LED indicates readiness for operation 4 To cause tip tilt motion of the X respectively Y axis apply the following control input signals to pins A 20 X Input respectively C 22 Y Input Www pi ws E 616 PZ200E Release 1 0 2 Page 26 Starting Operation Piezo Nano Positioning PI with E 616 SS0 from 0 V to 10 V with E 616 S0 from 5 V to 5V If at least one of the
29. load button below the latest CD mirror includes the manuals that were with the release E 616 PZ200E Release 1 0 2 Page 27 Piezo Nano Positioning PI Starting Operation 3 7 Monitor Signals CAUTION V MON MEASUREMENT Be sure to use an appropriate input impedance when you measure the following monitor voltages on the rear 32 pin connector V MON X pin A 4 V MON Y pin A 12 and V MON 1 to V MON 3 pins A 18 C 18 A 16 V MON X V MON Y Output impedance is 11 KQ per channel V MON 1 to V MON 3 Output impedance is 1 KQ per channel Your measurement device may get damaged if you measure without appropriate input impedance Monitoring the Output Voltage The monitor channels of the rear main connector display the output voltage of the servo control modules as well as the output voltage of the amplifiers Be sure to choose an appropriate input impedance for your measurement device when you measure the monitor voltage The output voltage of both servo control modules is axis related for E 616 SS0 and for E 616 S0 The corresponding monitor voltages are displayed by pins A 4 V MON X and A 12 V MON Y of the 32 pin connector The amplifiers multiply the servo control output voltage by 10 With the E 616 S0 Controller the axis related V MON signal is transformed to a channel related voltage first Monitor channels of the amplifier output voltage m E 616 SS0 The amplifiers PA1 and PA2 are assigned to the tilt ax
30. m switch off power to the actuators concerned immediately and follows the instructions given in section Dynamic Calibration p 35 CAUTION SYSTEM ASSIGNMENT Connect only a matching tip tilt platform to the corresponding E 616 Controller version tip tilt platforms such as S 325 3SD tripod design to E 616 S0x SD versions of S 330 series or S 334 tip tilt platforms differential design to E 616 SSOx CAUTION V MON MEASUREMENT Be sure to use an appropriate input impedance when you measure the following monitor voltages on the rear 32 pin connector V MON X pin A 4 V MON Y pin A 12 and V MON 1 to V MON 3 pins A 18 C 18 A 16 V MON X V MON Y Output impedance is 11 kQ per channel V MON 1 to V MON 3 Output impedance is 1 kQ per channel Www pi ws E 616 PZ200E Release 1 0 2 Page 25 Starting Operation Piezo Nano Positioning PI Your measurement device may get damaged if you measure without appropriate input impedance CAUTION SGS MON MEASUREMENT Be sure to use an appropriate input impedance when you measure the following monitor voltages on the rear 32 pin connector SGS MON X pin C 14 SGS MON Y pin A 14 and SGS MON 1 to SGS MON 3 pins A 10 C 10 C 16 SGS MON X SGS MON Y Output impedance is 50 per channel SGS MON 1 to SGS MON 3 Output impedance is 10 kQ 10 nF Your measurement device may get damaged if you measure without appropriate input impedance Do not interchange controller who
31. m the channel related sensor signals as follows SGS MON X 0 867 S2 S3 SGS MON Y S1 0 5 S2 S3 where S1 SGS MON 1 sensor signal 1 S2 SGS MON 2 sensor signal 2 3 SGS MON 3 sensor signal 3 Www pi ws E 616 PZ200E Release 1 0 2 Page 30 Calibration Piezo Nano Positioning PI A Calibration 4 1 Zero Point Adjustment NOTE Zero Point Adjustment Only in Case of Overflow Performing a zero point adjustment is only required when at least one of the overflow LEDs OFL1 OFL2 glows A proper zero point adjustment is precondition for complete expansion of the piezo actuators over the maximum tilt range Performing zero point adjustment excludes exceeding the possible amplifier output range Thus an overflow of the amplifier is prevented Variation of temperature between calibration and operation of the controller may require a zero point adjustment The green overflow LEDs on the front panel indicate whether a zero point adjustment must be performed To adjust the zero point use the three Zero 1 to Zero 3 potentiometers on the front panel see Figure 6 below These potentiometers shift the signal voltage of the sensor output SGS MON and in closed loop mode the servo control output V MON X V MON Y as well as the amplifier output V MON 1 V MON 2 and with E 616 S0 is shifted additionally With the E 616 SS0 Controller for tip tilt platforms based on differential drive potentiometer Zero 3 is deactivated
32. nput and Y Input to set the platform back to its initial position Adjust the corresponding Zero potentiometer until you obtain 0 V as V MON signal corresponds to 0 V amplifier output voltage Now change the control input signal for X Input respectively Y Input in the range from 0 V to 10 V The overflow LEDs should no longer glow Permanent glow may indicate failure of the device m With E 616 S0 Display the monitor signal V MON of the amplifier channel with an overflow V MON 1 V MON 2 V MON 3 To avoid an offset to the sensor signals caused by hysteresis effects perform a complete contraction expansion cycle by commanding a vertical motion Apply a control input signal with a voltage range from 3 0 V to 3 0 V to Z Offset pin C 24 Apply a control input voltage of 0 V to Z Offset Apply a control input voltage of 0 V to X Input and Y Input to set the platform back to its initial position Adjust the Zero potentiometer corresponding to the chosen V MON channel until you obtain 0 5 V as V MON signal corresponds to 50 V amplifier output voltage repeat this procedure for each of the three V MON channels Now change the control input signal for X Input and Y Input in the range from 5 V to 5 V The overflow LEDs should no longer glow Permanent glow may indicate failure of the device Www pi ws E 616 PZ200E Release 1 0 2 Page 33 Piezo Nano Positioning PI Calibration Zero Point Adjustment in Open Loop
33. o 1 ON OFF and Servo 2 ON OFF for changing between open loop and closed loop mode for the X and Y tilt axes Open Loop and Closed Loop Operation p 19 Overflow signals see Zero Point Adjustment p 31 TTL signal for synchronizing 200 kHz For details on pin assignment see Pin Assignment of the Main Rear Connector for E 616 SS0 p 54 E 616 PZ200E Release 1 0 2 Page 16 Piezo Nano Positioning PI Starting Operation 3 2 3 Front Panel of the E 616 S50 Controller PIEZO conmo PZT amp Sensor f 20V 120V Power OFL 1 e OFL 2 2 Zero 1 o Zero 2 26103 ae 25 pin sub D socket PZT amp For connection of a tip tilt mirror with SGS Sensor sensors and based on a tripod design For pin assignment see PZT amp Sensor Connector of the E 616 S0 p 53 Zero 1 to Zero 3 For zero point adjustment of the sensor potentiometers channels 1 2 and 3 OFL1 and OFL2 LED Green light for overflow of the amplifier see Zero Point Adjustment p 31 for more information POWER LED Green light glows permanently indicates connection to power supply Www pi ws E 616 PZ200E Release 1 0 2 Page 17 Starting Operation Piezo Nano Positioning PI NOTE Overflow is possible in open loop mode In open loop operation exceeding the allowable control input range will cause an overflow condition of the corresponding amplifier In this case the maximum amplifier output voltage
34. ollers p 27 NOTE RANGE OF CONTROL INPUT FOR E 616 SS0 AND E 616 SS0G By default E 616 Controllers are preset for closed loop mode There are different ranges of control input for closed loop and for open loop mode For E 616 SSO and E 616 SS0G following control input ranges are valid m X Input Y Input closed loop 0 to 10 V m X Input Y Input open loop 2 to 12 V If you apply voltage exceeding these ranges the overflow LEDs glow E 616 PZ200E Release 1 0 2 Page 23 Starting Operation Piezo Nano Positioning PI NOTE CONTROL INPUT RANGE FOR E 616 S0 AND E 616 S0G With calibration of the tripod controllers E 616 S0x an offset voltage is applied to the piezo actuators to achieve a maximum tip tilt range By default E 616 Controllers are preset for closed loop mode There are different ranges of control input for closed loop and for open loop Be eS and E 616 S0G following control input ranges are valid Closed loop mode for tilt axes m X Input Y Input 5 to 5 V m Z Offset 3 0 to 3 0 V Open loop mode for tilt axes m X Input Y Input 7 to 7 V m Z Offset 3 0 to 3 0 V If you apply voltage exceeding these ranges the overflow LEDs glow 3 5 First Operation DANGER HIGH VOLTAGE E 616 Power Amplifiers output VERY HIGH VOLTAGES and HIGH CURRENTS which can cause death or injury Working with these devices requires adequately trained and educated operating personnel Follow general accident
35. oop mode In open loop operation exceeding the allowable control input range will cause an overflow condition of the corresponding amplifier In this case the maximum amplifier output voltage is reached and cannot be exceeded For further information see sections Analog Control Input p 23 respectively Zero Point Adjustment p 31 3 2 2 Rear Side of the E 616 SSO Controller The 32 pin connector comprises lines for m Operating power input DC Input from 12 V to 30 V 2 A m V MON 1 and V MON 2 monitor channels carry one hundredth of the amplifier output for the X and Y tilt axes PA1 PA2 see Block Diagram for E 616 SS0 p 48 Www pi ws E 616 PZ200E Release 1 0 2 Page 15 Starting Operation Www pi ws Piezo Nano Positioning PI V MON 3 monitor channel carries one hundredth of the fixed output voltage of amplifier PA3 see Block Diagram for E 616 SS0 p 48 V MON X and V MON Y channels monitor the servo control module output for the X and Y tilt axes see Block Diagram for E 616 SS0 p 48 SGS MON 1 and SGS MON 2 channels monitor the sensor signals of the two SGS sensor bridges see Block Diagram for E 616 SS0 p 48 SGS MON X and SGS MON Y channels monitor the differential sensor signals of the X and Y tilt axes exactly corresponding to signals SGS MON 1 and SGS MON 2 Control inputs X Input and Y Input for tilt motion of the X and Y tilt axes see Analog Control Input p 23 Serv
36. op and Closed Loop Operation p 19 When DIP switches 1 and 2 are in OFF position then servo control can be activated deactivated externally by commanding pin C 26 Servo 1 OFF ON for tilt axis X and pin A 26 Servo 2 OFF ON for tilt Www pi ws E 616 PZ200E Release 1 0 2 Page 54 Technical Data Piezo Nano Positioning PI axis Y For example setting pin C 26 to HIGH results in open loop mode of tilt axis X setting this pin to LOW results in closed loop mode 9 5 4 Pin Assignment of Rear Main Connector for E 616 S50 The rear connector of the E 616 Controller is a DIN 41216 standard connector version D The 32 pins of the D version all carry even number designations and are in rows A and C 2 GND GND 9 d 4 V MON X internal use 6 DC_IN_ DC_IN_ 8 DC_IN_ DC_IN 10 SGS MON 1 SGS MON 2 A2 12 V MON Y internal use 14 SGS MON Y SGS MON X 16 V MON 3 SGS MON 3 18 V MON 1 V MON 2 20 X Input internal use 22 internal use Y Input 24 SYNC 200 Z Offset 26 Servo 2 OFF ON Servo 1 OFF ON 28 OFL1 internal use 30 not connected OFL2 A32 32 GND GND i V MON X and V MON Y correspond to the X out and Y out signals on the block diagram see Block Diagram of E 616 S0 Controllers p 50 V MON 1 to V MON 3 correspond to one hundredth of the output voltage of the amplifiers PA1 to PA3 SGS MON X corresponds to X In SGS MON Y corresponds to Y In on
37. packaging Open Loop Operation All E 616 versions can be operated in open loop mode Open loop operation of the tip tilt platform axes means that any control input provided by the user X Input Y Input and with E 616 S0 Z Offset as well determines the output voltage directly Closed Loop Operation Closed loop operation requires a position sensor and a servo module Any control input provided by the user determines the position of the tip tilt platform axes The output voltage required to reach this target position is calculated internally by the servo loop based on the given target and the feedback of the position sensors In position control operation non linearity and drift effects are compensated E 616 Controllers feature one E 802 55 servo control module per tilt axis You find a description of the servo control modules in the E 802 User Manual PZ150E Selection of Open Loop and Closed Loop Operation All E 616 Controllers are set to closed loop mode and are calibrated To change to open loop mode open the device and use the internal DIP switches If these switches are set to open loop mode an external selection of the operation mode is possible using the rear 32 pin connector To open the device proceed as follows m Disconnect the device from line voltage by removing the external power supply from line voltage m Toremove the heat sink of the E 616 Controller module unscrew the six labeled cross head screws see Figure 3 belo
38. platforms differential design to E 616 SSOx CAUTION V MON MEASUREMENT Be sure to use an appropriate input impedance when you measure the following monitor voltages on the rear 32 pin connector V MON X pin A 4 V MON Y pin A 12 and V MON 1 to V MON 3 pins A 18 C 18 A 16 V MON X V MON Y Output impedance is 11 kQ per channel V MON 1 to V MON 3 Output impedance is 1 kQ per channel Your measurement device may get damaged if you measure without appropriate input impedance CAUTION SGS MON MEASUREMENT Be sure to use an appropriate input impedance when you measure the following monitor voltages on the rear 32 pin connector SGS MON X pin C 14 SGS MON Y pin A 14 and SGS MON 1 to SGS MON 3 pins A 10 C 10 C 16 SGS MON X SGS MON Y Output impedance is 50 per channel SGS MON 1 to SGS MON 3 Output impedance is 10 kQ 10 nF Your measurement device may get damaged if you measure without appropriate input impedance Www pi ws E 616 PZ200E Release 1 0 2 Page 9 Introduction Piezo Nano Positioning PI 1 4 Model Survey The following standard configurations of E 616 Controller modules are available E 616 SS0 Multi Channel Servo Controller Driver for Piezo Tip Tilt Mirror Platforms with SGS and Differential Drive E 616 S0 Multi Channel Servo Controller Driver for Piezo Tip Tilt Mirror Platforms with SGS and Tripod Drive Both versions are available with a housing as stand alone bench top dev
39. premature failure For detailed information on overheat protection see Troubleshooting p 42 second section CAUTION RESONANT FREQUENCY Most piezo actuators that can be connected to the E 616 can be destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your system www pi ws E 616 PZ200E Release 1 0 2 Page 8 Introduction Piezo Nano Positioning PI switch off power to the actuators concerned immediately and follow the instructions in section Dynamic Calibration p 35 CAUTION CALIBRATION If you inform PI about your application your E 616 will be fully calibrated before being shipped Tip tilt platform and controller are matched and calibrated together Do not interchange controller whole devices or individual modules and or tip tilt platforms when they are calibrated together Respect the assignment of the tip tilt platforms to the controllers as indicated by the serial numbers on the labels affixed to the devices Re calibration should only be done by adequate trained personnel and after consultation with PI Otherwise preset data will be lost Only if an overflow LED OFL1 OFL2 glows a zero point adjustment will be necessary CAUTION SYSTEM ASSIGNMENT Connect only a matching tip tilt platform to the corresponding E 616 Controller version tip tilt platforms such as S 325 3SD tripod design to E 616 S0x SD versions of S 330 series or S 334 tip tilt
40. prevention rules m Do not touch the pins of the sub D connector which carry the piezo output voltage and the sensor signals The high voltage output may be active whenever the controller is turned on Voltages between 20 V and 120 V can be present on the sub D connector m Be sure to connect pins A 32 and C 32 to a Protective Ground Www pi ws E 616 PZ200E Release 1 0 2 Page 24 Starting Operation Piezo Nano Positioning PI CAUTION The product described is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging CAUTION AIR CIRCULATION Provide for sufficient ventilation Insufficient air flow will cause overheating and premature failure For detailed information on overheat protection see Troubleshooting p 42 second section CAUTION RESONANT FREQUENCY Most piezo actuators that can be connected to the E 616 can be destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your syste
41. resents the servo control output X Out whereas V MON Y represents the servo control output Y Out SGS MON X represents X In SGS MON Y represents Y In NOTE RANGE OF CONTROL INPUT FOR E 616 SS0 AND E 616 SS0G By default E 616 Controllers are preset for closed loop mode There are different ranges of control input for closed loop and for open loop mode For E 616 SSO and E 616 SS0G following control input ranges are valid m X Input Y Input closed loop 0 to 10 V m X Input Y Input open loop 2 to 12 V If you apply voltage exceeding these ranges the overflow LEDs glow The amplifier output voltage ranges from 20 V to 120 V Www pi ws E 616 PZ200E Release 1 0 2 Page 49 PI Piezo Nano Positioning Technical Data 9 4 Block Diagram for E 616 S0Ox The block diagram shows the structure of the tripod E 616 SOx Controller ow no Oo nse NO 430 TONS o NO 4d0 t OANIS 0 NoW SssS 0 z NOW SeS O 1 NOW S9S A NOL 65 O z eves K Now 995 0o J zZ fpy osz coun oO z mun O 1 NOU f mmm e wsus A Mun eo X NOUN an a a evediwory HH 40sueS V Izd kel i uza 1 sos uno sbeis 404a dt sh S voles 4oysue 4 Figure 11 Block diagram of the E 616 S0x Controller for S 325 3SD tip tilt nezi OS 919 3 platforms Page 50 E 616 PZ200E Release 1 0 2 www pi ws Technical Data Piezo Nano Positioning P
42. s only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Dynamic calibration is necessary when the response time of the actuators has increased in case of overshoot or when the mechanics starts Www pi ws E 616 PZ200E Release 1 0 2 Page 35 Piezo Nano Positioning PI Calibration oscillating A change of applied load is the cause most often Dynamic calibration adjusts servo parameters such as P term l Term and the notch filter frequency of the integrated E 802 55 servo control modules To adjust servo control parameters proceed as follows 1 Disconnect the device from power supply 2 To remove the heat sink of the E 616 Controller module unscrew the six labeled cross head screws see Figure 7 below 3 Tune the corresponding potentiometers see Figure 8 To do so read Section 3 2 Equipment Needed for Calibration and Section 4 Dynamic Calibration in the servo control module User Manual PZ150E for more details Www pi ws E 616 PZ200E Release 1 0 2 Page 36 PI Piezo Nano Positioning Calibration er Power OFL 1 OFL2 e Zero 1 o Zero 2 20103 Figure 7 Fixation of the heat sink to the E 616 Controller module E 616 PZ200E Release 1 0 2 Page 37 Www pi ws Calibration Piezo Nano Positioning PI servo control module 1 for X tilt axis E 802 55 gt
43. se piezoceramic actuators E 616 Controllers must not be used for applications other than stated in this manual especially not for driving ohmic resistive or inductive loads Observe the safety precautions given in this User Manual The E 616 is a laboratory apparatus as defined by DIN EN 61010 It meets the following minimum specifications for safe operation any more stringent specifications in the technical data table are of course also met m Indoor use only m Altitude up to 2000 m m Temperature range 5 C to 40 C m Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C m Line voltage fluctuations not greater than 10 of the line voltage m Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 1 3 Safety Precautions Www pi ws Carefully read also the user manuals and or technical notes of all other components involved as e g of mechanics and software Failure to heed warnings in this manual can result in bodily injury or material damage or loss of warranty DANGER HIGH VOLTAGE E 616 Power Amplifiers output VERY HIGH VOLTAGES and HIGH CURRENTS which can cause death or injury Working with these devices requires adequately trained and educated operating personnel Follow general ac
44. since there is no third sensor channel Www pi ws E 616 PZ200E Release 1 0 2 Page 31 Calibration Www pi ws Piezo Nano Positioning PI PIEZO conci Power OFL 1 OFL 2 Zero 1 Zero 2 zero 3 Figure 6 Potentiometers Zero 1 to Zero 3 for zero point adjustment OFL and Power LEDs CAUTION V MON MEASUREMENT Be sure to use an appropriate input impedance when you measure the following monitor voltages on the rear 32 pin connector V MON X pin A 4 V MON Y pin A 12 and V MON 1 to V MON 3 pins A 18 C 18 A 16 V MON X V MON Y Output impedance is 11 KQ per channel V MON 1 to V MON 3 Output impedance is 1 kQ per channel Your measurement device may get damaged if you measure without appropriate input impedance The device is shipped calibrated and factory set to closed loop operation Following instructions refer to zero point adjustment for activated closed loop mode For zero point adjustment proceed as follows E 616 PZ200E Release 1 0 2 Page 32 Calibration Piezo Nano Positioning PI m With E 616 SS0 1 Display the monitor signal V MON of the amplifier channel with an overflow V MON 1 V MON 2 To avoid an offset to the sensor signals caused by hysteresis effects perform a complete tip tilt motion of both tilt axes Apply a control input signal in the range from 0 V to 10 V to X Input respectively to Y Input Apply a control input voltage of 0 V to X I
45. t power per channel Peak current Average current per channel Current limitation Voltage gain Amplifier bandwidth small signal Amplifier bandwidth large signal Ripple noise 0 to 100 kHz Amplifier resolution E 616 S0 Controller for piezo tip tilt mirror systems with strain gauge sensors tripod drive 2 P I analog notch filter SGS 3 200 kHz TTL X Y tilt axes 7 V to 7 V Z Offset 3 V to 3 V 20 V to 120 V 3 10 W 5W 100 mA 50 mA Short circuit proof X Y tilt axes 10 Z Offset 20 3 kHz See frequency diagram lt 20 mVpp lt 2 mVrms lt 1 mV E 616 PZ200E Release 1 0 2 E 616 SS0 Controller for piezo tip tilt mirror systems with strain gauge sensors differential drive 2 P I analog notch filter SGS 2 200 kHz TTL 2 V to 12 V 20 V to 120 V 3 10 W 5 W 100 mA 50 mA Short circuit proof 10 3 kHz See frequency diagram lt 20 mVpp lt 2 mVrms lt 1 mV Page 45 Technical Data Interfaces and operation Piezo sensor connector Analog input Sensor monitor output Sensor monitor socket Display Miscellaneous Operating temperature range Overheat protection Dimensions Mass Operating voltage Power consumption Piezo Nano 25 pin sub D connector 32 pin connector 0 to 10 V for nominal displacement 32 pin connector LEDs for Power and Overflow 5 C to 50 C Max 75 C deactiva
46. th of amplifier output voltage Servo control Overflow display Zero point adjustment E Y tilt axis Control input Sensor monitor signal One tenth of internal control voltage One hundredth of amplifier output voltage Servo control Overflow display Zero point adjustment E 616 PZ200E Release 1 0 2 X Input SGS MON 1 equals SGS MON X V MON X V MON 1 Servo control module 1 OFL 1 Potentiometer Zero 1 Y Input SGS MON 2 equals SGS MON Y V MON Y V MON 2 Servo control module 2 OFL 2 Potentiometer Zero 2 Page 39 System Description Piezo Nano Positioning PI 5 2 The E 616 S0Ox Controller Www pi ws The E 616 S0 controller module and the E 616 S0G bench top controller are designed for open loop and closed loop control of the S 325 series tip tilt platforms These tip tilt platforms are driven by three piezo actuators arranged symmetrically around the center point of the mirror platform The controller features two servo control modules for both tip tilt axes as well as one sensor channel and one amplifier channel for each of the three actuators The combination of this controller version with an S 325 tip tilt platform offers the following advantages compared to systems based on differential drive firstly internal coordinate transformation facilitates direct commanding of angles without any calculation efforts for the user Secondly a simultaneous vertical motion of the three actuators
47. tion of the piezo voltage output 186 mm x 128 4 mm x 10 HP incl handle 32 pin connector amp front panel Euro card format 3U 10HP 950 g 12 to 30 V DC 30 W PI Positioning 25 pin sub D connector 32 pin connector 0 to 10 V for nominal displacement 32 pin connector LEDs for Power and Overflow 5 C to 50 C Max 75 C deactivation of the piezo voltage output 186 mm x 128 4 mm x 10 HP incl handle 32 pin connector amp front panel Euro card format 3U 10HP 950 g 12 to 30 V DC 30 W www pi ws Frequency Response Diagram In order to achieve minimum distortion of the output waveform it is important to ensure that the amplitude of higher frequency control input is reduced in proportion to the fall off of the output voltage at these frequencies For exact information on maximum operating frequency with a given piezo load capacitance refer to the individual operating limit graphs in Figure 9 below E 616 PZ200E Release 1 0 2 Page 46 Technical Data Piezo Nano Positioning PI www pi ws 6 f E 1 i f of Figure 9 PZT loads open loop capacitance is measured in uF Note that the operating limits of a given piezo amplifier depend on the amplifier power the amplifier design and of course on the capacitance of the piezo actuator The capacitance of piezo ceramics changes significantly with amplitude temperature and load up to approximately 200 of the unloaded small
48. to install and operate the E 616 OEM Controller for Piezo Multi Axis Tip Tilt Platforms It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures Furthermore the manual describes the physical specifications of the E 616 OEM Controller for Piezo Multi Axis Tip Tilt Platforms Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death DANGER Indicates the presence of high voltage gt 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The mechanics submodules and the software tools which might be mentioned in this documentation are described in their own manuals Current releases can be downloaded from the PI Website as PDF files htt p www pi ws For updated releases contact your Physik Instrumente Sales Engineer or write info pi ws Contents Introduction 6 TA gt QV ORVICW EA A E E EEE E AA E A 6 aA eE E E E E EAE AE E E ive EET 7 13 Sa
49. trolled S 330 xSD or 334 2SD tip tilt mirrors the differential evaluation of two sensors per axis provides an improved linearity and resolution E 616 Controllers together with tip tilt platforms from PI make an ideally matched system and are available in two versions m E 616 S0 Controller OEM module for tip tilt platforms based on tripod design e g S 325 the platform is equipped with three piezo actuators spaced at 120 intervals m E 616 SSO0 Controller OEM module for tip tilt platforms based on differential design e g S 330 or S 334 four actuators operate in push pull mode Internal Coordinate Transformation Simplifies Control of Parallel Kinematics Designs Parallel kinematics require the transformation of the commanded tilt angles into the corresponding linear motion of the individual actuators In the E 616 S0 this is taken care of by an integrated circuit for the S 325 tip tilt platforms featuring three actuators eliminating the need of additional external hardware or software Additionally with the E 616 S0 all actuators can be commanded by an offset voltage simultaneously As a result a vertical motion for example for optical path tuning is obtained Www pi ws E 616 PZ200E Release 1 0 2 Page 6 Introduction Piezo Nano Positioning PI 1 2 Prescribed Use Based on their design and realization E 616 OEM Controllers for Piezo Multi Axis Tip Tilt Platforms are intended to drive capacitive loads in the present ca
50. w m Do also unscrew the two labeled cross head screws on the front of the module see Figure 4 below E 616 PZ200E Release 1 0 2 Page 20 PI Positioning Piezo Nano Starting Operation Figure 3 Fixation of heat sink to E 616 Controller module side D recone Eg 20V 120V re L1 OFL2 e Zero 1 o Zero 2 26 03 j lt Figure 4 Fixation of heat sink to E 616 Controller module front Www pi ws E 616 PZ200E Release 1 0 2 Page 21 Piezo Nano Positioning PI Starting Operation The DIP switches for operating mode selection are now accessible see Figure 5 below DIP switches in Off position servo control module 1 for X tilt axis A 2 gt servo control module 2 for Y tilt axis 7 Ye Figure 5 DIP switch and servo control modules E 802 55 in the E 616 Controller module m To change from closed loop servo on mode to open loop servo off mode use DIP switch 1 for servo control module 1 and DIP switch 2 for servo control module 2 Servo control module 1 is assigned to X tilt axis servo control module 2 is assigned to Y tilt axis To deactivate control of a tilt axis in principle set the corresponding DIP switch from On to Off NOTE Separate Control of the Tilt Axes Separate control of each of the two tilt axes is possible for both versions of the E 616 Controller For example X tilt axis can be operated in closed loop mode whil
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