Brief Manual for 3D Optical Microscope
Contents
1. b High tilt n fc Medium tilt d Low tilt Once the focus and tilt have been adjusted the magnification can be increased using the turret wheel to rotate the objective lenses Make sure that the magnification selected in the Measurement Setup tab corresponds to the objective lens in use Click the Measurement button from the top panel to collect data calibrate the data and perform tilt correction in the image If the sample is completely flat then you can select Tilt Only Plane Shift option by right clicking on Terms Removal and selecting Edit Settings If the sample is not flat then you can select the Tilt Only Plane Shift option and also check the Use Terms Mask option You can then click the Edit Mask button to select the area you want to use for the tilt correction In the Data Analysis window you can select the 3D Plot button on the left side of the screen to generate a 3D image of your sample The scrolling wheel on the mouse allows you to zoom in or out and you can also increase or decrease the magnification using the arrows on the right side of the window The slider arrows on the x and y axes of the plot could be used to obtain 1D profiles of a selected region of the graph For a big area you can use stitching function by Enable Stitching You can save the raw data in C USER DATA your folder with extension of OPDx You also can export X and Y profile as CSV file Raise the2. Area Threshold A 314 4 pm Y 235 8 um E S Illumination Reference ME Use Default E Subtract 0 491 um c o pente _ Sener Settings Auta ae Averaging i R E Average 2 Measurements Autofocus Auto Intensity Aiai Prompt For Focus Enabled Prompt For User Data End scan 10 pm after 50 of data collected Prompt Message Stitching Processing Method More Settings Type Resolution Advanced Advanced Options Stitching 8 Scan Options Speed is 1X Backscan is 5um Length should be greater than the surface roughness 10 11 12 13 In the Data Analysis window select the Terms Removal option from the Analysis Toolbox in order to 14 15 16 17 18 19 Press the AUTO button on the Intensity window to automatically adjust the brightness of the sample if there are red dots present on the screen then the sample is over saturated with light Once the intensity is optimized press the AUTO button again to turn this setting off Slowly adjust the Z axis to bring your sample into focus till you can see the interference fringe Use the tilt knobs on the instrument to adjust the tilt and reduce the fringes present on the sample First adjust the knob on the left side of the instrument to make the fringes horizontal Then adjust the knob on the center of the instrument to reduce the fringes The Z axis should also be adjusted during this process to keep the sample in focus See below
3. Brief Manual for 3D Optical Microscope Log in FOM Open the Vision64 program on the instrument computer 3 Turn the objective lenses to start with the 5X magnification WARNING DO NOT CHANGE THE OBJECTIVE LENSES BY GRABBING THE LENSES USE THE TURRET WHEEL TO TURN THE LENSES Adjust the Z axis to raise the objective lenses and place your sample on the stage While watching your sample adjust the Z axis to lower the objective lenses to within a 5 mm of your sample WARNING MAKE SURE TO WATCH YOUR SAMPLE WHILE LOWERING THE LENSES TO AVOID CRASHING THE LENSES INTO THE STAGE 6 In the Measurement Setup window select your measurement mode PSI or VSI PSI is typically used for very smooth surfaces with features that are less than 160 nm VSI is typically used to measure features between 160 nm and 10 mm 7 Open Measurement Parameters window from More Settings Measurement button B Instrument O QO 4 4 NO ee Analyze Preferences E 327 amp Single Measurement Cancel Open Save Measurement Automation Data Data General Units and Acquisition gt Setup Setup Acquisition Analysis Preferences Numbers Measurement Files Current View Ser Measurement Setup lt x Measurement Measurement Parameters 7 VSUVxI U x x 1 0 x gt Scan Options speed i E Home Scanner After Measurement Based On L 50 __ of Pixels Backscan From Top Length i From Bottom Measurement
4. objective lenses and remove your sample Log off FOM
Download Pdf Manuals
Related Search