ILS User Manual - Newport Corporation
Contents
1. 5 1 UE41UP Motor Characteristics Motor Angle by Step RMS Current per Resistance Inductance Newport C Phase A Q mH Utilization UE41UP 1 8 0 85 6 8 6 Micro Step 5 2 Command Signals for the Stepper Motor Phase 1 ees UN SES Direction Phase 2 co is Direction A Motion gt Direction 5 3 DC Motor Characteristics Nominal Max RMS Max Peak Resistance Inductance Motor Stage Voltage V Current A Current A Q mH UEA40482 ILS CC 24 2 2 4 1 75 0 47 UE404S2 ILS CCL 24 1 5 3 1 75 0 47 UE40CC ILS HA 48 2 0 4 1 16 0 33 5 4 Command Signals for DC Motors gt Newport Experience Solutions Motor v oo Motor v Motor v Motor v Displacement Direction Direction Displacement Lao A VN Direction e o o o o ISS E ot o OF D In the above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage 7 EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages 5 5 5 6 EDH0177En1071 07 15 Sensor Position Home Position Origin i at Center of Travel Range EOR Limit 4 Mechanical i Zero i vsus LU HIT2. INTERFACE PLATE 4 HOLES 0 28 7 25 ON SOR 3 97 100 8 Es lt S 27 4 HOLES Ma THD se A N 93 62 92 DEPTH 31 8 Ki ya i 441 112 92 36 60 N 6 30 F 160 1 97 ae Paes 0 50 EE De 5 HOLES M5 THD e ON 95 39 137 DEPTH 47 12 125 pt Y 215 pe 325 E 2x4 HOLES M6 THD DEPTH 47 12 DIMENSIONS IN INCHES AND MILLIMETERS e C KE 3 94 100 Y Le ig lee e o T BEE 3 94 Wi D id O 100 19 04 483 5 4 HOLES M6 THD o o ON SOR 3 94 1 00 DEPTH 47 12 TEE e p o o 394 3 POSITIONS 100 4 80 122 10 31 E C 1533 s qt 4 39 111 5 Y Y D y P 6 14 156 Le 334 100 gt Interface plate position of the EQ120 bracket KO o Til 4 80 m o 122 CY Newport Experience Solutions 17 EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages i H Maintenance 11 2 11 3 EDH0177En1071 07 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Mainte
3. 17 1L sse 16 10 0 Accessory EQ120 Bracket 17 11 0 Maintenance 7 eene 18 11 1 Maintenance nice dore mee E ne EGRE eet 18 Leer eege ee 18 11 3 Calibration EE 18 Service F r Meesun eiin E E ON EE EE 19 D Newport iv Experience Solutions ILS Series High Performance Mid Range Travel Linear Stages EC Declaration of Conformity SORA Cte CIS Ch te CSS tite de Con EN AS NE AS NE AS N SS ILS Series NY amp gt EC Declaration of Conformity NS K following Annex II 1A Experience Solutions of Directive 2006 42 EC on machinery qx KS P The manufacturer PAS MICRO CONTROLE Spectra Physics gt 9 rue du bois sauvage xS F 91055 Evry FRANCE SN x Hereby declares that the machinery K Description ILS ty Function High Performance Linear Stage ONG e Models M ILSSOPP CC CCL HA M ILS 100PP CC CCL HA M ILS150PP Ee CC CCL HA M ILS200PP CC CCL HA M ILS250PP CC CCL HA 96 es the technical file of which was compiled by PN A Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 Sch S F 45340 Beaune La Rolande France x complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility NC complies with all the relevant provisions of the Directive 2006 42 EC on machinery O d ANC K E was designed and built in accordance with the followin
4. ILS Series linear stages 50 100 150 200 and 250 mm travel ranges RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the M ILS stage M ILS150 translation stage D Newport Experience Solutions 1 EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages Di Description Three M ILS stages and one EQ120 bracket in an XYZ configuration 2 1 EDH0177En1071 07 15 The ILS Series linear stage offers 50 250 mm travel range and combines fast sub micron resolution motion with highly stiff and robust package designs Its extruded aluminum body has been optimized to avoid bending effects caused by the different thermal expansion coefficients of the aluminum body and steel rails The special U profile also provides stiffness to the structure while keeping the mass low A preloaded backlash free ballscrew provides rapid movements with fast step and settling times The screw is accurately profiled to reduce heating factors to a minimum and extend the lifetime of the stage Recirculating ball bearings slides ensure accurate linear motion and avoid ball cage migration found on linear ball bearings or crossed roller bearings Position measurements are read on a 4000 cts rev encoder located directly on the screw to avoid additional screw motor coupling errors For more demanding precision positioning requirements the HA versions f
5. ILS Series High Performance Mid Range Travel Linear Stages SE G ec mem Compliant GO USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed ILS Series High Performance Mid Range Travel Linear Stages Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K A EDH0177En1071 07 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from Incorrect usage Load on the s
6. Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Eee Stns vii EDHO177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or i
7. 203 14 358 4 8 123 155 3 6 3 159 M ILS100 2 z 3 0 76 2 2 10 253 16 408 4 8 123 175 44 63 159 M ILS150 2 30062 3 0 76 2 4 12 303 18 458 4 8 123 194 494 6 3 159 M ILS200 3 94 100 4 30 62 3 0 76 2 4 14 353 20 508 4 8 123 214 54 6 3 159 M JILS250 3 94 100 4 30062 3 0 76 2 4 16 403 22 558 4 8 123 234 5 6 3 159 8 2 ILS Stages Top Plate Interface m 3 0 75 gt 4 HOLES M4 THD ON 04 45 113 EQUIDISTANT AT 90 ni Po 25 P DEPTH 31 8 BD A Se Te kc IPLE Leges wl A 9S oN N Eeer rege 9 ST i lag 9o uS SQQ i 10 31 HOLES M6 THD 20 id S s gei 25 DEPTH 31 8 50 SS 125 p 5 O out RW DIMENSIONS IN INCHES S a 4 Se 4j AND MILLIMETERS CIUS MA Loo ui ed 5 6 HOLES M4 THD ON 03 62 92 GS Ze EQUIDISTANT AT 60 DEPTH 31 8 Le 20150 gt lt 4 0 100 Le 4 33 110 gt 24 6 Y AT 12 A A gt Newport EDH0177En1071 07 15 14 Experience Solutions ILS Series High Performance Mid Range Travel Linear Stages 8 3 ILS Stages without Top Plate Interface Sometimes it is necessary to remove the top plate interface of a M ILS stage to make an XY assembly for example To do that just unscrew the 4 CHc M6 x 47 12 on SQR 3 94 100 screws at the 4 corners of the plate with the wrench supplied with the stage Both ILS and M ILS stages will then have the same following interfaces
8. Boo o0 Q 4 HOLES M6 THD ON SOR 3 94 100 USABLE DEPTH 39 10 4 HOLES 1 4 20 THD ON SOR 4 0x3 0 101 6 76 2 USABLE DEPTH 39 10 poo ogg O 4 33 4 33 110 110 WARNING To put back the interface plate on the carriage a 7 Nm lightening moment must be apply on each screw whatever the class of the M6 screw used D Newport Experience Solutions 15 EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages Di XY Assemblies ATTENTION All configurations of XY travel ranges are possible However it is recommended to place the M ILS stage with the longer travel range at the bottom The maximum travel range of the top level M ILS stage depends on the cantilever load and dynamic specifications to reach FIXING OF STAGES 4 CHc M6 x 63 16 SCREWS SCREWING TORQUE 7 Nm gt Newport EDH0177En1071 07 15 16 Experience Solutions ILS Series High Performance Mid Range Travel Linear Stages 0 0 Accessory EQ120 Bracket Newport s EQ120 bracket to order separately is ideal for mounting our M ILS or M IMS Series of linear stages and RVS80 or RV120 rotation stages for stable and stiff muti axis positioning systems
9. 5 1 M ILS250 1 9 5 4 3 meter MMCABLE 3 Cable 54 0 7 3 meter MCAB 3 Cable 32 0 6 The weight variation between drive units is not very significant gt Newport Experience Solutions 5 EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages m Drive EDH0177En1071 07 15 4 1 4 2 Stepper Drive Version One stepper motor configuration is available M ILS PP This version is equipped with a 4000 cts rev rotary encoder located directly on the screw and is driven in micro step Micro Step Drive This is the drive for stepper or pulse driven motors transmitted by the electronic unit which entails a theoretical movement of the motor by one fraction of a full step For these translation stages the micro step is equivalent to 1 20 of the full step Stepper Motor Performance Specifications Resolution Speed Mot otor um mm s M ILS PP 0 5 50 UE41UP DC Servo Drive Versions Three DC motor configurations are available e Two versions equipped with a 4000 cts rev rotary encoder located directly on the screw M ILS CC and M ILS CCL e One version equipped with a linear encoder M ILS HA DC Motor Performance Specifications Resolution Speed um mm s ins M ILS CC 0 5 100 UEA40482 M ILS CCL 0 5 50 UEA40482 M ILS HA 0 1 100 UE40CC GN NOE ILS Series High Performance Mid Range Travel Linear Stages Di Motor
10. 5 PIN SUB D 8 24 MALE 85 54 ER DIMENSIONS IN INCHES CC AND MILLIMETERS Le 2 4 62 This regulator is available as an option Please note that for best efficiency this regulator should be attached to the stage to re adjust the 5 V coming from the controller through the long cable 6 5 MCAB 3 Cable c 2 28 58 DISCONNECTED LOCKING Sei KNOBS s CABLE CONNECTOR STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING m STATIC CABLE 21 50 38 CABLE IN MOTION 23 78 96 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MCAB 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D25 connectors They are available in 5 m MCAB 5 7 m MCAB 7 or 10 m MCAB 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk gt Newport EDH0177En1071 07 15 12 Experience Solutions ILS Series High Performance Mid Range Travel Linear Stages El Connection to Non Newport Electronics 7 1 gt Newport Experience Solutions Conn
11. Primer 3 To obtain arcsec units divide urad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pm Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings M ILS CC M ILS PP M ILS HA M ILS CC Specified Speed mm s 50 100 50 Specified Acceleration mm s 250 500 250 Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Q lt Cz 1 D 60 D Cantilever distance D Newport EDHO177En1071 07 15 4 Esparence Solone ILS Series High Performance Mid Range Travel Linear Stages 3 4 Load Characteristics and Stiffness with D Cantilever distance in mm Cz Normal center load capacity on bearings 250 N Cx Cx Direct Inverse load capacity on X axis 40 N kax Compliance in roll 15 urad Nm kay Compliance in pitch 10 urad Nm kaz Compliance in yaw 10 urad Nm Q Off center load Q Cz 1 D 60 3 5 Stage Weights Weights indicated into the below table are average values for stages with a typical drive unit installed Weight Ib kg M ILS50 9 3 4 2 M ILS100 9 9 4 5 M ILS150 0 6 4 8 M ILS200 1 2
12. UU UU UD UL Index Pulse Le Stage Travel Range Motion Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source Feedback Signal Position Encoder Phase A Encoder Phase Encoder Phase B OR az 6 Direction 5 E COo p amp er IE re e Ei Encoder Phase B Direction Motion gt Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Newport User Stage Encoder Phase A Pin 19 Encoder Phase A Pin 23 I Encoder Phase B L Pin 20 L Encoder Phase B n Pin 24 L Output Signals v Index Pulse Phase x Pin 15 gt T Index Pulse Phase _ Pin 25 H i T Le s 5V5 Encoders Pin 422 I 150 mA max amp Sensors 0v Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 D Newport 8 Eyp
13. eature an integrated linear scale providing 0 1 pim resolution feedback An upper rigid cover prevents damage to the drive train ILS Series stages also feature a center mounted origin for repeatable initialization limit switches to prevent over travel and elastomeric end of run dampers for smooth emergency braking For optimal performance we recommend the use of our motion controllers The ILS Series stages are supplied with a 3 meter cable for connection to our motion controllers Design Details Base Material Extruded Aluminum Bearings Double row recirculating ball bearings Drive Mechanism Backlash free ball screw Drive Screw Pitch mm 2 Feedback CC CCL PP Screw mounted rotary encoder 4 000 cts rev index pulse HA Linear steel scale 20 um signal period 0 1 um resolution Limit Switches Optical Origin Optical at center of travel including mechanical zero signal Cable 3 m long cable included NOTE This product complies with the RoHS directive Restriction of Hazardous Substances RoHS Compliant gt Newport 2 Experience Solutions ILS Series High Performance Mid Range Travel Linear Stages m Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depend
14. ections WARNING Newport is not responsible for malfunction or damage to a M ILS translation stage when it is used with non Newport controllers WARNING Newport guarantees compliance of the MJILS translation stages only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a M ILS translation stage is used with non Newport controllers Sub D25 male Connector 9r 10 115 12 21 22 Connector Cap Connection UE41UP oooo Phase 1a E Phase 1b b Phase 2a C Phase 2b Jp Ground 0 V logic Mechanical Zero Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B Index Pulse I Index Pulse I End of Run 2 End of Run 2 5 V Encoder 0 V Encoder Connector Cap Connection UE40CC amp UE404S2 z2c22 c222 CO oooo Motor Motor Motor Motor Ground 0 V logic Mechanical Zero Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B Index Pulse Index Pulse I End of Run 2 End of Run 2 5 V Encoder 0 V Encoder Connector Cap II The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA Open collector type with a 5 6 V protective Zener diode 1 Mechanical Zero lin max 10 mA V max 30V If the Mechanical Zero output
15. erience Solutions ILS Series High Performance Mid Range Travel Linear Stages 5 7 Pinouts The SUB D25 connection for the M ILS stages is given in the following table MILS PP MILS CC amp M gt ILS CCL M gt ILS HA UE41UP UEA40482 UE40CC 1 Phase la 1 N C 1 N C 2 N C 2 N C 2 N C 3 Phase 1b 3 N C 3 N C 4 N C 4 N C 4 N C 5 Phase 2a 5 Motor 5 Motor 6 N C 6 Motor 6 Motor 7 Phase 1b 7 Motor 7 Motor 8 N C 8 Motor 8 Motor 9 N C 9 N C 9 N C 14 5 1 10 N C 10 N C 10 N C o 11 N C 11 N C 11 N C E o 12 N C 12 N C 12 N C E O 13 Mechanical Zero 13 Mechanical Zero 13 Mechanical Zero a 14 Shield Ground 14 Shield Ground 14 Shield Ground 5 5 15 Index Pulse I 15 Index Pulse I 15 Index Pulse I CH Q4 6 0 V logic 16 0 V logic 16 0 V logic 17 End of Run 17 End of Run 17 End of Run 18 End of Run 18 End of Run 18 End of Run 19 Encoder Phase A 19 Encoder Phase A 19 Encoder Phase A 20 Encoder Phase B 20 Encoder Phase B 20 Encoder Phase B 21 5 V Encoder 21 5 V Encoder 21 5 V Encoder 22 0 V Encoder 22 0 V Encoder 22 0 V Encoder 23 Encoder Phase A 23 Encoder Phase A 23 Encoder Phase A 24 Encoder Phase B 24 Encoder Phase B 24 Encoder Phase B 25 Index Pulse I 25 Index Pulse I 25 Index Pulse I CY Newport Experience Solutions 9 EDH0177En1071 07 15 ILS Series High Perfor
16. g harmonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements GO NF EN 55011 2010 A1 2011 Class A CUS was designed and built in accordance with the following other standards NF EN 61000 4 2 Gei NF EN 61000 4 3 P NF EN 61000 4 4 d NF EN 61000 4 5 DS L NF EN 61000 4 6 Se OS ve ORIGINAL DECLARATION amp OAS Done in Beaune La Rolande on 26 June 2015 D x Dominique DEVIDAL K Quality Director 2 LA s b LAE SPP SNC SCA NOZ D Newport Experience Solutions V EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentia
17. is not used a 1 kQ 0 25 W resistor must be connected between pins 13 and 21 End of Run lin Max 16 mA V max 5 6 V Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 13 EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages m Dimensions 8 1 ILS Stages lt L1 gt POS 0 000S o o p Ovo CH g UNI es II Le 4 33 110 gt I amp 4 33 110 Le 13 gt 238 S D zi 60 e e d lt 4 53 115 gt gt lt L2 si ke 3 03 7 m A gt lt 3 94 100 zn A gt SUB D25M CONNECTOR 3 L 1 IT es Wl o ae Op ye o MODEL SHOWN ILS200 n1x2 CLEARANCE HOLES 3 94 DIMENSIONS IN INCHES AND MILLIMETERS FOR M6 SCREWS 100 Sot n2x2 CLEARANCE HOLES FOR 1 4 20 SCREWS o o ob bo r o m B gl C es B VERSIONS CC CCL AND PP VERSION CCHA MODEL METRIC A ni B n2 L2 Lu 13 Lu 13 M ILS50 2 5 0 127 2 8
18. lly hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user D Newport EDH0177En1071 07 15 vi Experience Solutions ILS Series High Performance Mid Range Travel Linear Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING
19. mance Mid Range Travel Linear Stages m Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to inser
20. n any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year gt Newport EDH0177En1071 07 15 viii Experience Solutions ILS Series High Performance Mid Range Travel Linear Stages High Performance Mid Range Travel Linear Stages ILS Series m Introduction This manual provides operating instructions for the stage that you have purchased in the ILS Series e MJILS PP e MJJILS CC e MJILS CCL e MJIILS HA
21. nance The ILS stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The ILS stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your ILS stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your ILS stage to Newport once a year for recalibration to its original specifications D Newport 1 8 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Descrip
22. ng table Stages Supplied Cable M ILS PP MMCABLE 3 M ILS CC M ILS CCL MCAB 3 M ILS HA 6 4 MMCABLE 3 Cable 2 60 66 gt DISCONNECTED LOCKING gt KNOBS i CABLE CONNECTOR STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE 21 97 50 CABLE IN MOTION 24 72 120 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MMCABLE 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application D Newport Experience Solutions 1 1 EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages These cables are specially shielded and terminated with Newport s standard SUB D25 connectors They are available in 5 m MMCABLE 5 7 m MMCABLE 7 or 10 m MMCABLE 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk For cable lengths in excess of 3 meters we recommend the MMCABLE REG to ensure a high quality regulated 5 V supply to the stages 25 PIN SUB D Ts FEMALE 2
23. nical Specifications issus e tiere egentes 4 3 3 Load Specification Definitions 4 3 4 Load Characteristics and Stiffness sse 5 3 5 Stage Weights eee 5 40 DANS omae nineteen sau 6 4 Stepper Drive Version 2 eene eere t n e eee de 6 4 2 DC Servo Drive Versions sine 6 DE MOLOE Lu n nd tete MU 7 5 1 UE41UP Motor CharacteristiCs 7 5 2 Command Signals for the Stepper Motor 7 5 3 DC Motor Characteristics sise T 5 4 Command Signals for DC Motors 0 ccccccssseseessesccesseseeeeeeseeseeeneeseeessenes 7 Sch Sensor POSITION secssecpeatienseas cdassaversiacsats eni i EEN EEEN 8 5 6 Feedback Signal POSITION 22i Rn 8 Bak PNW Saronsari na AER OA did 9 6 0 Connection to Newport Controllers 10 6 1 Warnings on Controllers ressens 10 6 2 Connection ibd ERR GRE ERREUR ES EN ein de VII EE REPRE den 11 6 9 Ca DIOS ci c rete ptt ERROR PE E 11 6 4 MMCGABLES Cable n an vasi redis to e a D Ere ee 11 Dh MCAB 3 Cable cient rent t TER HD ERROR TH RR TR CER TERCER TERI T e 12 7 0 Connection to Non Newport Electronics 13 Mek ee E 13 D Newport Experience Solutions iii EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages EDH0177En1071 07 15 8 0 Dimensions 17 sse 14 Sel ILS SAGES c ln 14 SZ ILS Stages Top Plate Interface tite 14 8 3 ILS Stages without Top Plate Interface 15 9 0 XY Assemblies
24. s on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C linear cycle with 21 data points on the travel and 4 c
25. t the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts gt Newport EDH0177En1071 07 15 10 Experience Solutions ILS Series High Performance Mid Range Travel Linear Stages 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely 6 3 Cables Our stages are delivered with a MMCABLE 3 or MCAB 3 3 meter cable according to the M ILS translation stage you bought This cable is equipped with a SUB D25M connector so it can be directly connected to our controllers drivers The cable supplied with your ILS stage is given in the followi
26. tage greater than maximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions ILS Series High Performance Mid Range Travel Linear Stages Table of Contents Warranty octauo PIN CHO I ness aa teens cap decors nec E aes ah canta He Ordres ii EC Declaration Of CONOMIE RE ANR ee v D finitions and Symbols sit e n e ease EH EEEHEEEREE ERE ERES ERIT AE ERE FEES NUS vi KE GS TR vii acu viii 1 0 TIotroducton 1 2 0 Geht 2 2 1 Design Details 1 2 ii mairlinnrtneneetentneieitee 2 3 0 Characterislics eeee eret 3 3k D finitions od iie ERREUR FRE EE 3 3 4 Mecha
27. tion Reasons of return of goods please list any specific problems CY Newport Experience Solutions 19 EDH0177En1071 07 15 Newport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
28. ycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com D Newport Experience Solutions 3 EDH0177En1071 07 15 ILS Series High Performance Mid Range Travel Linear Stages 3 2 3 3 Mechanical Specifications PP CC CCL HA Travel Range mm 50 100 150 200 250 Minimum Incremental Motion um 1 0 0 3 Uni directional Repeatability um 1 0 0 4 Bi directional Repeatability mm 2 0 or 1 0 0 7 or 0 35 On Axis Accuracy um ILS50 3or 1 5 4 or 2 ILS100 4 or 2 3 or 21 5 ILS150 5 or 25 4 or 2 ILS200 7 5 or 3 75 6 or 3 ILS250 10 or 5 7 5 or 33 75 Maximum Speed mm s PP CCL 50 100 CC 100 Pitch 213 urad ILS50 50 or 25 ILS100 100 or 50 ILS150 150 or 75 ILS200 200 or 100 ILS250 250 or 125 Yaw I urad ILS50 50 or 25 ILS100 75 or 37 5 ILS150 100 or 50 ILS200 130 or 65 ILS250 50 or 75 MTBF h 20 000 1 LS CCL used with the SMC100CC controller only 2 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology
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