URS75BPPV6 - Newport Corporation
Contents
1. EDH0225En1020 07 11 2 1 The URS BPPV6 rotation stages features an enhanced lower profile pack age providing easier top down mounting that is directly compatible with our vacuum compatible stages When using with our XPS or ESP301 motion controllers with high micro step capability low noise operation and very small incremental motions are guaranteed The URS BPPV6 rotation stage does not use encoder feed back but calculates position by the number of commanded steps and micro steps For this purpose the stepper motor is directly attached to the worm screw with a proprietary bellow coupling with high torsional stiff ness and no gear or belt drive in between Furthermore the high output torque of the stepper motor minimizes the risk of lost steps and provides optimum motion sensitivity with good linearity between commanded micro step and the actual motion of the stage The URS BPPV6 rotation stages features a proprietary 4 contact point ball bearing The unique 2 piece design of the URS BPPV6 provides a low pro file compact stage with exceptional stiffness high reliability and outstand ing wobble and eccentricity The tilted worm screw arrangement allows for 4 symmetric mounting holes as compared to other designs that only fea ture 2 or 3 mounting holes As a result the URS BPPV6 stages provides a higher stiffness for better support of higher or off centered loads Additionally the flexible preloading system for the worm ge2. 07 1 1 8 Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 6 2 Connection On each packing of stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE URS BPPV6 are ESP compatible stages Enhanced System Performance is Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely 6 3 Cables Our URS BPPV6 rotation stages are delivered equipped with a MSCABLE 3 standard Sub D15F Sub D25M 3 meter cable This cable is not vacuum com patible WARNING The MSCABLE 3 cable supplied is not designed for using in a vacuum environment The customer has the responsibility to link the rotation stage to the bulkhead coupling with a vacuum compatible cable and con nect the cable supplied between the controller and the bulkhead cou pling the Sub D15 connector must be removed WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by cables WARNING Keep the motor cables at a safe distance from other electrical cables i
3. NF EN 55011 2007 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 09 June 2011 Dominique DEVIDAL Quality Director DCI EN rev A D Newport Experience Solutions V EDH0225En1020 07 11 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations European Union CE Mark ATTENTION This stage is a Class A device In a residential environment this device can cause radioelectric interferences In this case suitable measurements must be taken by the user of this device Warnings and Cautions The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of
4. this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Eee Solone vii EDH0225En1020 07 11 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in a vacuum environment less than 105 hPa CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to
5. Precision Rotation Stages The 25 pin Sub D connection at the end of the cable is given in the following table URS50BPPV6 URS75BPPV6 UE16PPHSV6 UE41PPV6 1 Phase 1 1 Phase 1 2 Phase 1 2 Phase 1 3 Phase 1 3 Phase 1 4 Phase 1 4 Phase 1 5 Phase 2 5 Phase 2 6 Phase 2 6 Phase 2 7 Phase 2 7 Phase 2 8 Phase 2 8 Phase 2 52 1 9 N C 9 N C 2 o 10 N C 10 N C oe 11 N C 11 N C 9 E 12 N C 12 N C z 13 Mechanical Zero 13 Mechanical Zero 14 Ground 14 Ground T 15 N C 15 N C SU 16 Ground 16 Ground 17 N C 17 End of Run 18 N C 18 End of Run 19 Encoder Phase A 19 N C 20 Encoder Phase B 20 N C 21 5 V 21 5 V 22 Ground 22 Ground 23 Encoder Phase A 23 N C 24 Encoder Phase B 24 N C 25 N C 25 N C D Newport Experience Solutions 7 EDH0225En1020 07 1 1 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages m Connection to Newport Controllers NOTE Visit www newport com for compatible Newport controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operat ing the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power pl
6. in the forward and reverse directions for a total of 164 data points Guaranteed Specifications Guaranteed maximum performance values are tested per the Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or on the Newport web site at www newport com D Newport Experience Solutions 3 EDH0225En1020 07 1 1 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 3 2 Mechanical Specifications URS50BPPV6 URS75BPPV6 Travel Range 360 continuous 360 continuous Resolution 0 00142 0 0002 2 Minimum Incremental Motion 0 0015 0 0002 0 0005 in open loop mode Uni directional Repeatability guaranteed 0 004 0 004 or 0 002 or 0 002 Bi directional Repeatability guaranteed 0 006 0 014 or 0 003 or 0 007 Absolute Accuracy 0 04 0 03 or 0 02 or 0 01 Max Speed s 48 209 Wobble guaranteed urad 50 or 25 Eccentricity guaranteed um 6 or 3 3 or 1 5 With disabled limit switches 2 Equal to 1 2 of a full step for URS50BPPV6 and 1 100 of a full step for URS75BPPV6 3 URS5OBPPV6 1 6 s URS75BPP 8 s with an SMC100PP controller CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 um 3 3 Load Specification Definitions Normal Load Capacity Cz Maximum load a rotation stage can move while maintaining speci
7. 0BPPV6 Rotation Stage 91 180005 30 6 THREAD DEPTH 16 4 1 0625 20 UN2B va LJ ap 8 a 8 amp 84 sar 2 76 aq 70 N 6 8 gt B 1o P 4 HOLES 9 18 4 5 4 HOLES M3 THD ON SQR 1 14 29 ON SOR 2 48 63 USABLE DEPTH 16 4 E I wo Le SUB D15 MALE CONNECTOR Le 171 6 73 gt D Newport Experience Solutions 1 1 EDH0225En1020 07 1 1 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 9 2 URS75BPPV6 Rotation Stage 4 HOLES M3 THD ON SOR 1 26 32 SUB D15 MALE DEPTH 24 6 CONNECTOR 205 gt SQR 3 54 90 Y E 7 64 194 gt 91 97 50 I om qem nml 1 50 yr ve 7 E H 1 67 HO s ijj 5 ah aes DET e TI 17 y 90 je in PI FI 4 I A1 10 5 4 HOLES M3 THD 32 ON 91 34 34 4 HOLES o 31 7 8 C BORED 8 2 E r DEPTH 24 6 FOR 1 4 M6 ON SQR 2 98 75 6 gt Newport EDH0225En1020 07 1 1 1 2 Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 10 0 Maintenance 10 1 10 2 10 3 gt Newport Experience Solutions RECOMMENDATION It is recommended to contact Newport Service who can g
8. 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point by using the manual knob as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year gt Newport EDH0225En1020 07 1 1 viii Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Vacuum Compatible Precision Rotation Stages URS BPPV6 Series m Introduction This manual provides operating instructions for the URS BPPV6 rotation stage that you have purchased URSSOBPPV6 rotation stage URS75BPPV6 rotation stage RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the URS BPPV6 rotation stage gt Newport Experience Solutions 1 EDH0225En1020 07 11 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 20 Description
9. 41 i E SE E 1 12 5V 5V Connector 7 EM i MEA ___ Connector Cap Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newport Newport Stage i Mechanical Zero Stage End of Run lin max 10 mA lin max 16 mA V max 30 V V max 5 6 V If the Mechanical Zero output is not used a 1 k2 0 25 W resistor must be connected gt d between pins 13 and 21 Encoder and Index Pulse are differential pair type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 gt Newport EDH0225En1020 07 11 10 Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages m Disabling of Limit Switches NOTE The URS50BPPV6 stage is not equipped with limit switches The URS75BPPV6 stage is equipped with 160 optical limit switches This limit switch can be disabled for continuous 360 rotation NOTE On request URS75BPPV6 limit switches can be set in factory at the desired position Please contact our sales engineers ACTIVED LIMIT SWITCHES POSITION er INHIBITED LIMIT SWITCHES POSITION 160 TRAVEL RANGE X CONTINUOUS TRAVEL RANGE CER P m Dimensions 9 1 URS5
10. URS BPPVG Series Vacuum Compatible Precision Rotation Stages ER RoHS Compliant UsER S MANUAL Experience Solutions For Motion Think Newport URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Warranty A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inad equate packaging if the original packaging is not used F S Ne EDH0225En1020 07 11 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument trans portation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or mis use of any product or part CAUTION Warranty does not apply to damages resulting from ncorrect usage Load on the rota
11. ame Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 15 EDH0225En1020 07 1 1 Nevvport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail rma service newport com Europe MICRO CONTROLE Spectra Physics S A S 1 rue Jules Guesde B t B ZI Bois de l pine BP189 91006 Evry Cedex France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport fr com Service amp Returns Tel 33 0 2 38 40 51 55
12. anses tite ir HE eders Sets 13 SEFVICe FOLIES ine en EE aire deteste etat tte tin de RESET 15 gt Newport EDH0225En1020 07 1 1 iv Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages EU Declaration of Conformity CON OP to aC SOC ICON OS ER OP ER QT EN QT A A A A A SEER DS qa SNS NNE NNE AS SE NNE SLA SLM OOK Co PAS NP UA PI NP A NE A NP A URS BPPV6 Series EC Declaration of Conformit Newport following Annex II 1A of Directive 2006 42 EC on machinery Experience Solutions The manufacturer MICRO CONTROLE Spectra Physics 1 rue Jules Guesde ZI Bois de l Epine BP189 F 91006 Evry FRANCE Hereby declares that the machinery Description URS BPPV6 Function Precision rotation stages Models URSSOBPPV6 URS75BPPV6 the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2004 108 EC relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards NF EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements
13. ar has been improved to guarantee a backlash free operation with an MTBF of 20 000 hours Design Details Base Material Hardened steel with aluminum body Bearings Large diameter ball bearings Drive Mechanism Grinded worm gear with self compensating preload Worm Gear Ratio URS50OBPPV6 1 80 URS75BPPV6 1 90 Feedback URS50BPPV6 Motor Mounted Rotary Encoder 48 pts rev URS75BPPV6 None Limit Switches URS50BPPV6 None URS75BPPV6 Two independently adjustable optical limit switches Origin Optical fixed at position 0 Typical 0 04 repeatability Manual Adjustment Via Allen wrench included at the end of the worm screw Motor URS50BPPV6 UE16PPHSV6 URS75BPPV6 UE41PPV6 Cable Length Sub D15F Sub D25M cable length 3 m Not Vacuum compatible MTBF 20000 h at 2596 load and with a 3096 duty cycle NOTE This product complies with the RoHS directive Restriction of Hazardous Substances RoHS Compliant D Newport 2 Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages m Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of the position precision and repeatability of the machine tools with CNC This standard gives the definition of position uncertainty which depends on the 3 following quantities Absolute Accuracy Difference between ideal positio
14. fications This value is given with speed and acceleration specified for each rotation stage and with a load perpendicular to bearings Off Centered Load Q Maximum cantilever load a rotation stage can move Q lt Cz 1 D a D Cantilever distance a Construction parameter 3 4 Load Characteristics and Stiffness 1 URS50BPPV6 URS75BPPV6 1 D Cz N 50 100 Q a a mm 20 25 ko urad Nm 100 30 Mz Nm 0 25 0 5 Q Off center load Q lt Cz 1 D a Cz Normal center load capacity on bearings D Cantilever distance in millimeters a Construction parameter k Transversal stiffness Mz Nominal Torque gt Newport EDH0225En1020 07 1 1 4 Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 3 5 Stage Weights Weights indicated into the below table are values for stages without any cable Weight Ib kg URS50BPPV6 1 5 0 7 URS75BPPV6 3 7 1 7 3 meter Cable 0 66 0 3 m Drive 4 1 Specifications Full Step Resolution Speed C C s en URS50BPPV6 0 0028 4 UEPPHSV6 URS75BPPV6 0 02 200 UE41PPV6 D When used with Newport motion controllers this motor is driven in a dynamic micro stepping mode software commutation 2 1 6 s when used with a SMC100PP controller for URSS amp 0BPPV6 4 s for URS75BPPV6 m Motor 5 1 Motor Characteristics Motor Angle by Step Current Resistance Inductance Newpo
15. istics 0 ceccccccccsessessessesseseeseeseeesseseeaseneeneseenees 3 2 1 Definitions cialis beluis ER TIE LEE 3 3 2 Mechanical 5pecificati ns cin scene eressensrrssmenreenninndntsesemesnenndetites 4 3 3 Load Specification Definitions 4 3 4 Load Characteristics and Stiffness isse 4 3 b Stage Welglit i eiecit ierit no Ee ERR SERENE EEK SNEDE RENE RER 5 40 QUU lena sa REE EAEE AAEE Ra 5 Al Specifications irsinin indii uie iin asi ipa rb dias 5 GAP Motor da do to ou 5 5 1 Motor Characteristics enne 5 5 2 Command SNAS nanni o E ee eec a e re teas 5 5 3 URS50BPPV6 Sensor Position 6 DA PINOUtS onean ta EE EO EE E e DD AD E E E EH ERU bcn 6 6 0 Connection to Newport Controllers 8 6 1 Warnings on Controllers oe m RHET 8 0 2 COBIBeCHO d usi totes Tete SR nn Meo etur Net oed 9 6 3 ADIOS seen ee tei etae nn dan tetes te test fer Iu 9 7 0 Connection to Non Newport Controllers 10 8 0 Disabling of Limit Switches 11 9 0 Dimensions 11 9 1 URSS50BPPV6 Rotation Stage serrer 11 9 2 URS75BPPV6 Rotation Stage inaia 12 D Newport Eee Solone iii EDH0225En1020 07 11 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 10 0 Maintenance 1 1 cnn 13 10 1 Maintenance nn nennen enne nennen ette nnns senten es 13 10 2 Rep lribg i riore deeded ERE died A REEL TNT CREER sers 13 10 5 CaAlibratION es an nes tite int
16. n your environment to avoid potential cross talk gt Newport Experience Solutions 9 EDH0225En1020 07 11 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages El Connection to Non Newport Controllers WARNING Newport takes no responsibility for improper functioning or damage of an URS BPPV6 rotation stages when used with any non Newport elec tronics WARNING Newport guarantees the CC compliance of the URS BPPV6 rotation stages only if are used with Newport cables and electronics Nevertheless the figure below indicates the recommended wiring when an URS BPPV6 rotation stages are used with non Newport controllers Sub D25 male Sub D15 female Connector Connector URS50BPPV6 URS75BPPV6 9 ca N 10 pg bog 11 d p 12 bug p E 1 Phase 1 N C 2 ZEE 3 TT 1i PT 4 9 Phase 1 N C 4 7 1 m Y AE i 3 x 5 Ly 2 2 Phase 2 Motor Qu qq x 1 114 10 Phase 2 Motor 8 bog m 14 t i 16 yet Lo 22 p 1 i 13 A 1 A 1 3 Mechanical Zero Mechanical Zero 19 t 1 i L X 1 13 Encoder Phase A N C 23 6 Encoder Phase A N C 20 1 X3 T 14 Encoder Phase B N C 24 7 mii 1 7 Encoder Phase B N C 15 j 15 N C N C 25 r i 8 N C N C 17 3 mr 11 N C End of Run 2 18 4 N C End of Run 2 2
17. n and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear error sources Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follow Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Can be specified as uni directional or bi directional Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can be commanded to move and or detect Eccentricity Displacement of the geometric center of a rotation stage from the rotation axis in the plane defined by bearings Wobble Tilt of rotation axis during rotation of a stage The testing of on axis accuracy repeatability and reversal error are made systematically with our test equipment in an air conditioned room 20 C 1 C The test is comprised of 4 cycles each taking 21 data points
18. rt C A Q mH Utilization UE16PPHSV6 15 0 18 12 5 5 5 Mini Step bipolar UE41PPV6 1 8 0 85 5 7 11 3 Micro Step bipolar 5 2 Command Signals Phase 1 Direction Direction Phase 2 Direction Motion gt Direction End of Run and Mechanical Zero are TTL type 5 V 5 16 mA max D Newport Experience Solutions 5 EDH0225En1020 07 1 1 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 5 3 URS50BPPV6 Sensor Position mms M Mechanical Zero Le Stage Travel Range X Motion gt Direction CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source Use appropriate TTL type receivers 5 4 Pinouts The 15 pin Sub D connection for URS BPPV6 rotation stages is given in the following table EDH0225En1020 07 11 URS50BPPV6 URS75BPPV6 UE16PPHSV6 UE41PPV6 1 Phase 1 1 Phase 1 2 Phase 2 2 Phase 2 3 Mechanical Zero 3 Mechanical Zero 4 N C 4 End of Run s 2 1 5 Ground 5 Ground O 6 Encoder Phase A 6 N C O e 7 Encoder Phase B 7 N C D 8 N C 8 N C SON 9 Phase 1 9 Phase 1 10 Phase 2 10 Phase 2 11 N C 11 End of Run 12 5 V 12 5 V 13 Encoder Phase A 13 N C 14 Encoder Phase B 14 N C 15 N C 15 N C D Newport Experience Solutions URS BPPV6 Series Vacuum Compatible
19. the equipment or important tips WARNING Situation has the potential to cause bodily harm or death CAUTION Situation has the potential to cause damage to property or equipment NOTE Additional information the user or operator should consider gt Newport EDH0225En1020 07 1 1 vi Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Warnings WARNING The rotation of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage
20. tion stage greater than maximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the rotation stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the rotation stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior writ ten approval of Newport Corporation This manual has been provided for information only and product specifica tions are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Table of Contents Warranty TE RI L A ERE Et rer ii EU D claration of ConfOormity 2 5 1e Uere ea RARE te v D finitions and Symbols p rr ter bee E De eoa CREER ERES vi M armnps and Caution ee ein NM ini un vi Warnings aoc cates c HO En OUO ERO EDO HH DR Ee IR OUO E vii CITONS E is MA ni nn din viii 1 0 Introduction iara dede aide 1 2 0 Description 2 2 1 Design Details ener er erae Eee int ter eee re RH eee enirn 2 3 0 Character
21. ug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way f the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture gt 85 humidity Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle con tact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liq uid on the product may touch hazardous voltage points or short out parts gt Newport EDH0225En1020
22. uide you with the appropriate maintenance for your application Maintenance The URS BPPV6 stages require no particular maintenance Nevertheless this is a precision mechanical device that must be kept and manipulated with precaution PRECAUTIONS The URS BPPV6 stages must operate and be stocked in a clean environ ment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your stage to Newport Service after every 2000 hours of use for lubrication If your URS BPPV6 stage is mounted on a workstation and cannot be easi ly dismantled please contact Newport Service for further instructions Repairing CAUTION Never attempt to disassemble a component of the stage that has not been specified in this manual Disassembly of a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please immediately contact us to make arrangements for a repair CAUTION All disassembly attempts or repair of stage without authorization will void your warranty Calibration CAUTION It is recommended to return your stage to Newport once a year for a recalibration to its original specifications 13 EDH0225En1020 07 11 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages gt Newport EDH0225En1020 07 11 14 Experience Solutions Service Form Your Local Representative Tel Fax N
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