Type 647C - MKS Instruments, Inc.
Contents
1. 7 P wering Oi EE 7 KEE EE EE 8 1 10 ACC8SS0ri68 m 8 d Mee 9 e IEEE 9 2 Operating Instr ctloris otn pea cuni wed ema BHdwelaes 11 2 1 The Usor Interface nern ro eite er eene ro Rc DEO ER greges 11 2 2 The Menu Tree iiid Hal 13 2 3 Reset of System un HL 14 2 4 Display adjustment cer ERE iae 14 Se ie ET 15 Sot The MAIN MENUJ setting bsec epe ads 15 3 2 The USER DISPLAY merit itii ri t ere Pd pec e ead 15 3 3 The EXTENDED DISPLAY menu 16 3 4 The PRESSURE CONTROL menu 17 3 5 Tuning Me FD Controller rhet E elle 18 3 6 Diagnosis Of SVSEOTTL EEN 20 3 6 1 The ERROR LISTING menu sse 20 3 6 2 The SIGNALS men 21 3 7 Instrument Setup nette a EE 21 Contents 647C 3 7 1 Range Selection eeteseee einen nhe EREA nis 22 EEN EE 23 3 723 Mode SeleCtion E 24 3 7 4 Zero AdjUStMONt EE 26 3 7 5 Trip Limit Supervision sss 27 3 7 6 Gas Composition 2 uuusssssseennennsnennnnnnnennnnnnnennnnnnnnnnennnennnnrnn enne 28 3 8 SYSTEM Setup EE 29 3 8 1 RS232 Setup iz umi eue oe t edet et edet md 29 3 8 2 System Parameters sorea aie a G aere ae aA era aa 32 3 9 Pressure SE 33 3 10 Information about the System ssssssssssseee eene 34 4 Remote EE 35 el RE elle Lull e EE 35 4 2 Command Syntax edo ie es eter a or e top eet eager 35 4 3 Table of Comtnarnds terr eet tt ee tres 36 4 4 RESPONSE EE 39 5 Application of2. CH5 CH6 CH7 CH8 0 000 0 000 0 000 0 000 GAIN 01 00 PRESSURE UNIT INTEG 02 00 Torr LEAD 00 30 0 3501 SETPOINT MODE PCS 0 467 OFF 0 3500 00 ERRORS FLOW ON INPUT DIRECT Figure 8 The PRESSURE CONTROL menu displays the actual flows and the actual pressure with its unit During an application with an external pressure controller the corrective action is also shown in PCS Pressure Control Signal The pressure is controllable through the pressure setpoint and the two pressure modes OFF set point for pressure regulation is turned off AUTO set point for pressure regulation is turned on All parameters are edited as usual 17 3 Functionality 647C 3 5 Tuning the PID Controller There are three additional parameters to setup the PID algorithm with the PID optional only The best procedure to tune the PID controller is to make the step response of the application evaluate the parameters dead time Tt and rise time Ts and then calculate the PID parameters K 4 gt kkkxkkkkkkkkkkkkkkkk e e Sas 63 D H KREK Lk Tt Ts t Figure 9 tuning for optimal step response gain 0 6 K integral action 1 Ts lead 0 5 Tt tuning for optimal disturbance response gain 0 95 K integral action 2 4 Ts lead 0 42 Tt K is the relation of actual pressure to actual total flow both are to be taken as percent of full scale To improve the speed o
3. result xxxxx enter low limit channel low limit in 0 1 percent of full scale check for low limit result xxxxx enter mode for trip limits channel mode SLEEP mode LIMIT mode BAND check for trip limit mode result m enter setpoint in a gas set channel gas set 1 to 5 setpoint in 0 1 percent of full scale check for setpoint in gas set result xxxxx zero adjust pressure result xxxxx offset value in mV error occurred pressure controller controller code STD i e standard 250 152 652 146 check for pressure controller result c O4 0NPPO ll Pressure unit Unit code 29 2 mTorr 58 5 mbar 37 4 Remote Control PU LD ON DU P DO MN PR N HHH HH HMH HH GD GD D D GD D D bo KH D NO U B A MN O OH AN Om Um B HM KO 10 mTorr 100 mTorr 1000 mTorr 1 Torr 10 Torr 100 Torr 1000 Torr 1 kTorr 10 kTorr 100 kTorr 1 uBar 10 Bar 100 uBar 1000 n Bar 1 mBar 10 mBar 100 mBar 1000 mBar 1 Bar 10 Bar 100 Bar 1 Pa 10 Pa 100 Pa 1 kPa 10 kPa 100 kPa 1000 kPa FFFFH Ce 647C 30 5 mTorr 59 20 mbar 31 20 mTorr 60 50 mbar 32 50 mTorr 61 200 mbar 33 200 mTorr 62 500 mbar 34 500 mTorr 63 2000 mbar 35 2000 mTorr 64 5000 mbar 36 5000 mTorr 65 2 bar 37 2Torr 66 5 bar 38 5 Torr 67 20 bar 39 20 Torr 68 50 bar 40 50 Torr 69 2Pa 41 200 Torr 70 5 Pa 42 500 Torr
4. 1 48 35 39 39 Telex 233817 F Fax 33 1 48 35 32 52 TAIWAN MKS Instruments Taiwan 10F No 93 Shoei Yuan Street Hsinchu City 300 Taiwan R O C phone 886 3 575 3040 Fax 886 3 575 3048 53 GERMANY BENELUX MKS Instruments Deutschland GmbH Schatzbogen 43 D 81829 Munchen phone 49 89 420008 0 Fax 49 89 42 41 06 e mail mks germany mksinst com ITALY G Gambetti Kenologia Srl Via A Volta No 2 20082 Binasco MI Italy phone 39 2 90093082 Fax 39 2 905 2778 JAPAN MKS Japan Inc Harmonize Building 5 17 13 Narita Higashi Suginami Ku Tokyo 166 Japan phone 81 3 3398 8219 Fax 81 3 3398 8984 KOREA MKS Korea Co Ltd 1 Floor DK Plaza 375 1 Geumgok Dong Bundang gu Seongnam Kyonggi do Korea 463 805 phone 82 31 717 9244 Fax 82 31 714 9244 UNITED KINGDOM MKS Instruments U K Ltd 2 Cowley Way Weston Road Crewe Cheshire CW1 6AE England phone 44 1270 253400 Fax 44 1270 848382
5. Tetrachloride Carbon Tetraflouride Freon 14 Chlorine Chlorodifluoromethane Freon 22 Chloropentafluoroethane Freon 115 Chlorotrifluoromethane Freon 13 Cyanogen Deuterium Diborane BH Dibromodifluoromethane CBr F 2 Dichlorodifluoromethane CCLF Freon 12 Dichlorofluoromethane CHCLF Freon 21 Dichloromethysilane CH SiCl Table continued on next page 47 T Gas Correction Table 647C SYMBOL SPECIFIC HEAT Cp DENSITY CONVERSION cal g C g l 0 C FACTOR Dichlorosilane 1 2 Dichlorotetrafluoroethane Freon 114 1 1 Difluoroethylene Freon 1132A 2 2 Dimethylpropane Ethane Fluorine Fluoroform Freon 23 Freon 11 Freon 12 Freon 13 Freon 13 Bl Freon 14 Freon 21 Freon 22 Freon 23 Freon 113 Freon 114 Freon 115 Freon 116 Freon C318 Freon 1132A Helium Hexafluoroethane Freon 116 Hydrogen Hydrogen Bromide Table continued on next page 48 647C T Gas Correction Table SYMBOL SPECIFIC HEAT Cp DENSITY CONVERSION cal g C g l 0 C FACTOR Hydrogen Chloride Hydrogen Fluoride Isobutylene Krypton Methane Methyl Fluoride Molybdenum Hexafluoride Neon Nitric Oxide Nitrogen Nitrogen Dioxide Nitrogen Trifluoride Nitrous Oxide Octafluorocyclobutane Freon C318 Oxygen Pentane Perfluoropropane Phosgene Phosphine Propane Propylene Silane Silicon Tetrachloride Silicon Tetraf
6. The 647C can accept 30 commands at maximum speed until it stops the transfer There are three kinds of handshake modes for the communication with the host computer no handshake software handshake XON XOFF hardware handshake RTS CTS The usage of one of the above modes depends on the connection to the computer If the communication is run without handshake and the calculating speed do not match loss of data may appear 3 8 1 4 Interface Connections When the 647C software is booting e g at power on or hardware reset it detects the handshake mode through the cable type on the RS232 line This mode is displayed in the menu 30 647C Nem PO NN WW Du Zu Zu Zu Ow sub d 9 sub d 9 no handshake software handshake hardware handshake 3 Functionality sub d 9 Figure 22 A typical error in handling the RS232 line is to plug in the cable after having switched the device on before As a result the 647C works with no handshake although the host computer expects a handshaking At installation time it may be helpful to check the actual handshake mode 31 3 Function ality 647C 3 8 1 5 RS232 Line Status In order to make the debugging of a RS232 installation easier a status display is inserted in the SYSTEM SETUP menu The so called RS232 STATUS display three events on the RS232 line OE overrun error bytes were lost Bytes were lost on the
7. USER AIR CO He FACTOR 1 000 1 000 0 700 1 450 STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 15 This menu contains the table of Gas Correction Factors GCF for mass flow controllers which are calibrated in nitrogen under standard conditions DIN 1871 In this case standard pressure means 1013 mbar and standard temperature is 0 degree centigrade The cursor keys UP DOWN are used to scroll through the table entries of each channel For gases which are not included in the table there is the position USER which allows a direct numerical input of the GCF of any gas For a description how to calculate GCF see the manual of the mass flow controllers A direct numerical input of the GCF is also allowed for the gases helium and hydrogen which are normally calibrated directly with these gases The 647C automatically calculates the actual range of each mass flow controller RANGE FS from the product GCF x RANGE E g for a flow controller which is calibrated in 1 slm nitrogen at a correction factor of 0 72 methane the actual flow range RANGE FS displayed in EXTENDED DISPLAY menu is 0 720 slm 23 3 Functionality 3 7 3 Mode Selection MGC 647C V3 0 CH1 CH2 CH3 CH4 ACT FLOW 0 000 1 750 1 400 0 000 UNIT SCCM SCCM SLM SLM MODE INDEP INDEP INDEP SLAVE INDEX 1 STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 16 647C The Mode Selection defines the source of setp
8. input line of 647C This is typical if the handshake protocol does not work Check for the correct connection on the line and for fitting handshake protocols PE parity error the parity check failed A byte was transferred with a parity error This is typical for noise on the line Check the ground line FE framing error recognition of stopbit failed Synchronization of bytes did not work i e stop bit was not present This is typical for noise on the line Check the ground line two dashes no error occurred 3 8 1 6 Example The followin g examples show the usage of a 647C through the RS232 interface The examples are given in Power BASIC Program to display the act flow of channel 1 10 OPEN 20 PRINT 30 INPUT 40 PRIN 50 PRINT 60 PRINT 70 PRIN 80 PRIN 90 INPUT 100 PRINT 110 GOTO 120 END COM2 9600 0 8 1 AS 1 7 10 ID 1 110 AS T AS T 10 FS 1 0500 T 10 ON 1 T 10 ON 0 T 10 FL 1 1 110 AS A AS 80 3 8 2 System Parameters For description of the parameter HOST MODE see chapter Remote Control page 30 For the description of RESET function in SYSTEM SETUP menu see the chapter Reset of System page 9 32 647C 3 9 Pressure Setup h o Aaa nanc NO ND NONO NONO IND NO IND D O101010101010101 C1 2 2 2 2 2 2 MGC 647C MS s PRESSU
9. main valve 11 Master Slave 25 MEMORY 12 MFC range 16 O OUTPUT OVERFLOW 20 OUTPUT UNDERFLOW 20 overrun error 33 P parity 30 parity error 33 PCS 26 PID 25 PID Controller 18 Pin Assignment 45 Power Up Reset 14 PRESSURE CONTROL 17 PRESSURE CONTROL mode 26 R Range Selection 23 Relay Option 28 Reset to Default 14 rise time 18 RS232 30 RS232 Line Status 33 RTS CTS 31 S Safety information 6 Index 647C Setpoints 16 U SIGNALS menu 21 SLAVE 25 USER 24 SLEEP 28 USER DISPLAY menu 15 software handshake 31 software release 35 WwW SC geg 18 word length 30 T X TEST 25 XON XOFF 31 test signal 27 TOTAL FLOW 15 Z TRIP HIGH LIMIT 20 Zero Adjustment 27 Trip Limit 28 ZERO VALUE 27 TRIP LOW LIMIT 20 Trouble Shooting 44 Truth Table 29 52 647C Customer Support Centers Customer Support Centers UNITED STATES MKS Instruments Inc Corporate Service Center 651 Lowell Street Methuen MA 01844 phone 978 682 4567 Fax 978 682 8543 MKS Instruments Inc HPS Division Vacuum Components Valves amp Gauging 5330 Sterling Drive Boulder CO 80301 phone 303 449 9861 800 345 1967 Fax 303 442 6880 CANADA MKS Instruments Canada Ltd 30 Concourse Gate Nepean Ontario Canada K2bE 7V7 phone 613 723 3386 800 267 3551 CAN only Fax 613 723 9160 FRANCE MKS Instruments France s a 43 Rue du Commandant Rolland B P 41 F 93352 Le Bourget Cedex France phone 33
10. to CH8 Sub D female 15 pol I 9 flow signal 2 10 flow feedback valve close 3 11 signal GND valve open 4 12 signal GND PGND 5 13 Se 15V 6 14 gt 15V gi 15 chassis setpoint output 8 for use with cable type CB147 1 or CBE259 5 Figure 27 6 5 PRESSURE connector Sub D female 9 pol pressure signal 1 6 PGND pressure setpoint 2 7 reserved 15V 3 8 reserved 15V 4 9 AGND PCS 5 Figure 28 45 6 Pin Assignment of rear connectors 647C 6 6 ACCESS connector Sub D female 25 pol reserved 1 14 external setpoint 1 valve open 1 2 15 external setpoint 2 valve close 1 3 16 external setpoint 3 flow signal 1 4 17 external setpoint 4 valve open 2 5 18 15V valve close 2 6 19 15V flow signal 2 7 20 PGND valve open 3 8 21 PGND valve close 3 9 22 AGND flow signal 3 10 23 Ee valve open 4 11 24 valve close 4 12 25 chassis flow signal 4 13 Figure 29 46 647C T Gas Correction Table T Gas Correction Table Conversion factors are related to calibration with nitrogen or air SYMBOL SPECIFIC HEAT Cp DENSITY CONVERSION cal g C g l 0 C FACTOR Acetylene Air Ammonia Argon Arsine Boron Trichloride Bromine Carbon Dioxide Carbon Monoxide Carbon
11. to Default sets all process parameters to their default value This reset is triggered in SYSTEM SETUP menu After the device has been turned off one should wait for ca 15 seconds before turning it on again 2 4 Display adjustment The viewing angle of the LCD display and the timeout setting of its back light saver may be set in SYSTEM BACKUP menu 14 647C 3 Functionality 3 Functionality 3 1 The MAIN MENU After turning on the power switch 1 the MAIN MENU is displayed From this menu the different submenus are accessible See also figure 4 3 2 The USER DISPLAY menu MGC 647C V3 0 CH1 CH2 CH3 CH4 0 000 1 750 1 400 0 000 SCCM SCCM SLM SLM CH5 CH6 CH7 CH8 0 000 0 000 0 000 0 000 SLM SCCM SCCM SCCM PRESSURE 0000 0 mbar TOTAL FLOW 001 4 SLM GAS MENU X 00 ERRORS FLOW ON INPUT DIRECT Figure 6 The USER DISPLAY menu allows monitoring the system during operation It displays all gas flows of the connected Mass Flow Controllers All gas flow values are displayed in a 4 digit format without limiting the resolution Additionally the physical unit of the gas flow is shown below The sum of all gas flow values TOTAL FLOW is displayed additionally The unit of the total flow can be selected through the keyboard The user can select one out of five predefined composition ratios see also GAS COMPOSITION menu through the GAS MENU parameter The stored composition ratios are labeled
12. 20 00 SCCM 24 20 00 SCFH 5 50 00 SCCM 25 50 00 SCFH 6 100 0 SCCM 26 100 0 SCFH 7 200 0 SCCM 27 200 0 SCFH 8 500 0 SCCM 28 500 0 SCFH 9 1 000 SLM 29 1 000 SCFM 10 2 000 SLM 30 2 000 SCFM 11 5 000 SLM 31 5 000 SCFM 12 10 00 SLM 32 10 00 SCFM 13 20 00 SLM 33 20 00 SCFM 14 50 00 SLM 34 50 00 SCFM 15 100 0 SLM 35 100 0 SCFM 16 200 0 SLM 36 200 0 SCFM 17 400 0 SLM 37 500 0 SCFM 18 500 0 SLM 38 30 00 SLM 19 1 000 SCMM 39 300 0 SLM RA c R check for range result rr GC io ftt enter gas correction factor c 1 8 channel 36 647C f 10 180 GC c R MO c m i c 1 8 m 0 m 1 m 2 m 3 m 9 d el MO c R AZ c c 1 8 x 500 500 x i R5 HL C XXXX c 1 8 x 0 1100 HL cR C XXXX c 14548 x 0 1100 C R TM c m c 1 8 m 0 m 1 m 2 TM c R GP C S XXXX c 1 8 s 1 5 x 0 1100 GP c s R PZ x 500 500 x E5 GT c c 20 5 CT R Pu uu U 0 86 O 1mrTorr 4 Remote Control factor in percent check for gas correction factor result fffff enter mode channel mode independent mode slave mode extern mode PCS mode test modeindex reference to master only if m equal 1 check for mode result m i zero adjust MFC result xxxxx channel offset value in mV error occurred enter high limit channel high limit in 0 1 percent of full scale check for high limit
13. 53858590 ll Il FPoOBWNHERORF oo E o Q ps enter PID parameter gain gain in percent check for PID parameter gain result xxxxx enter PID parameter integral action integral action in 10 ms check for PID parameter integ act result xxxxx enter PID parameter lead lead in 10 ms check for PID parameter lead result xxxxx enter mode extended command channel mode independent mode slave mode extern mode PCS mode PID PID extension mode test mode mode index number of master channel for m 1 only Check mode result m I Contact MKS Instruments if you have questions concerning the 147B syntax in case of using 647C to emulate a type 147B 4 4 Response Syntax The 647C typically responses with an ASCII integer value terminated with cr and nl and new line If no result value is available also an empty response lt cr gt nl is possible If an error has been detected in the command string an error message is sent before the acknowledge signal In this case the command has not been executed 39 4 Remote Control 647C vl v2 E ec cr n1 vl v2 result values E indicator for an error ec error code 0 Channel error A invalid channel number was specified in the command or the channel number is missing 1 Unknown Command A command has been transmitted which is unknown to the 647C 2 Syntax error Only one character has bee
14. 71 20Pa 43 2000 Torr 72 50 Pa 44 5000 Torr 73 200 Pa 45 2kTorr 74 500 Pa 46 5 kTorr 75 2 kPa 47 20 kTorr 76 5 kPa 48 50 kTorr 77 20 kPa 49 2 ubar 78 50 kPa 50 5 pubar 79 200 kPa 51 20 ubar 80 500 kPa 52 50 ubar 81 2000 kPa 53 200 ubar 82 5000 kPa 54 500 ubar 83 1Mpa 55 2000 ubar 84 2 Mpa 56 5000 ubar 85 5 Mpa 57 2 mbar 86 10 Mpa check for pressure unit result rr open valve main valve corresponds to ON ALL channel valve close valve main valve corresponds to OFF ALL channel valve check for status of a channel result xxxxx incompatible channel status value bit 0 lt 0 1 channel off on bit 4 lt trip limit low bit 5 lt trip limit high bit 6 overflow in bit 7 lt underflow in bit 8 lt overflow out bit 9 lt underflow out 38 647C 4 Remote Control DF mm dd YYYY bit 15 lt not used keyboard disable menu display is switched to user keyboard enable menu display is switched back to previous sett all parameters to default perform a hardware reset like power up check for identification result MGC 647C V2 2 mm dd yyyy month of release day of release year of release The following host commands respectively the command extensions are only available with the PID option GN xxxx XXXX GN R 0 59999 IA xxxx XXXX IA R 05 29999 LD xxxx XXXX LD R 0 9999 MO c m i 53
15. IN MENU MGC 647C V3 0 title USER DISPLAY EXTENDED DISPLAY PRESSURE CONTROL DIAGNOSTICS INSTRUMENT SETUP SYSTEM SETUP PRESSURE SETUP lt datafield WOO BWNE 9 INFORMATION 0 POWER OFF 00 ERRORS FLOW OFF INPUT DIRECT lt statusline comment the cursor is shown as underline in this document Figure 4 If errors occurred detailed error descriptions are available through the menu ERROR LISTING see page 16 In order to turn off all gas flows at once there are the main valve functions The main valve is switched on with the key combination lt ON gt lt ALL gt and switched off with key combination lt OFF gt lt ALL gt The current state of the main valve is displayed as FLOW ON open and FLOW OFF closed respectively 11 2 Operating Instructions 647C The state of the keyboard is displayed in the INPUT field of the status line DIRECT input from keyboard enabled ON last input was ON OFF last input was OFF LOCKED The keyboard is locked through RS232 MEMORY A stored gas menu is active IDLE No commands will be accepted In the 8 channel version it is not possible to display all channels simultaneously on the display Therefore it is possible to scroll through the channels display horizontally 12 647C 2 Operating Instructions 2 2 The Menu Tree MAIN MENU 1 USER D
16. ISPLAY 2 EXTENDED DISPLAY 3 PRESSURE CONTROL aes e 4 DIAGNOSTICS 4 1 ERROR LISTING 5 INSTRUMENT SETUP L 4 2 SIGNALS 5 1 RANGE SELECTION 5 2 GAS SELECTION 5 3 MODE SELECTION 5 4 ZERO ADJUST 5 5 TRIP LIMITS L_ 5 6 GAS COMPOSITION 6 SYSTEM SETUP 7 PRESSURE SETUP L 9 INFORMATION L 0 POWER OFF Figure 5 13 2 Operating Instructions 647C 2 3 Reset of System There are three types of Reset Power Up Reset Hardware Reset Reset to Default Attention ud All of the above resets will switch off all gas flow controllers If the device refuses to come up on power on press button 8 while switching the device on in order to perform a total reset equal to First Start Reset This problem can have 2 reasons Data in memory was destroyed through a transient The described procedure will fix this problem There is an error in the hardware If the Start Up problem occurs more than once contact your local MKS service center Power Up Reset is performed every time the system is switched on It resets all data which are needed for system administration Data of process parameters are not affected Hardware Reset is similar to Power Up Reset It is triggered by the keys OFF and cursor right pressed at the same time In any case Power Up or Hardware Reset leads to the MAIN MENU Reset
17. Press the side marked with I down The LCD will be illuminated and after about 10 s the boot cycle is completed During the booting some messages appear on the screen and finally the main menu will be displayed If you have problems booting the system you should refer to the chapter Reset of System and Applications of the 6470 Powering Off Before switching off the instrument it is recommended to switch off all flow channels and if necessary the pressure control mode Activate the menu 0 POWER OFF in the main menu The 15 V power supply to all channels will be switched off immediately and the display shows Please Wait and a few seconds after Switch Power on with ESC In the status line the message IDLE appears The unit is now in a standby state and after about 30 s more the LCD backlight is switched off All settings remain stored 1 General 647C To switch the unit on again press the JESC key once or twice until the main menu appears The 15 V power supply voltage is switched on simultaneously e g external devices will be powered again All setpoint outputs are switched to 0 5 V to prevent any erratic gas flow or pressure control Caution When switching off the unit via the 0 POWER OFF menu function the power supply to the flow devices and pressure transducer is de activated Consider that the units may need certain warm up time when being re powered To switch off the instrument completely use the re
18. RE 0 0000 RANGE FS 1 0000 Torr ZERO VALUE 0 001 ZERO ADJUST EXE CONTROLLER ST GAIN 01 00 INTEG ACT s 02 00 LEAD s 00 30 00 ERRORS FLOW OFF INPUT DIRECT Figure 23 47C supports several pressure ranges listed below 5 digits 0 20 50 100 200 500 1000 2000 5000 20 50 100 200 500 1000 2000 5000 0 50 100 0 50 100 200 500 1000 2000 5000 0 50 100 200 500 1000 2000 5000 0 50 100 0 50 100 200 500 0 50 100 200 500 1000 2000 5000 3 Functionality The zero adjust works similar to that of an MFC channel see chapter Zero Adjust page 20 Different external pressure controllers such as 250 152 153 652 or 146 type may be used The setup must show the applicated controller type 652 is valid also for 651 controller For the parameters of the PID controller see chapter Pressure Control page 13 1 The pressure ranges are programmed in a different order See therefore the RS232 code page 37 38 33 3 Functionality 647C 3 10 Information about the System MGC 647C V3 0 MKS Instruments Aug 23 2001 TC 00 ERRORS FLOW ON INPUT DIRECT Figure 24 This menu gives information about the device such as company Software release code internal code If you call MKS for support in case of problems please be prepared to give this information to MKS 34 647C 4 Remote Control 4 Remote Control 4 1 Compatibility 647B The 647C uses the
19. S232 13 Connector SERVICE to be used only by MKS Figure 3 Rear Panel Channel 1 to 4 1 General 647C 1 7 Safety Information 1 7 1 Symbols Used in this Instruction Manual Definitions of WARNING CAUTION and ATTENTION messages used throughout the manual procedure practice condition or the like which if not correctly Warning V The WARNING sign denotes a hazard It calls attention to a performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like which if not correctly performed or adhered to could result in damage to or destruction of all or part of the product Attention d The NOTE sign denotes important information It calls attention to a H i procedure practice condition or the like which is essential to highlight 1 7 2 Safety Instructions This device is state of the art and save But danger may appear by the device if not used according to the instructions or the professional knowledge Only spare parts of the manufacturer may be used for replacements The device must not be used in explosive environments Safety and reliability is only given in the following cases the device is used according to the manual the device is serviced by personal of the manufacturer only The installation of the device complies to the national directives and standards Cleaning of the de
20. Y 1950647 Multi Channel Flow Ratio Pressure Controller Type 647C Instruction Manual MKS Instruments Deutschland GmbH Rev 2012 06 Copyright 2009 by MKS Instruments Deutschland GmbH All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Cajon and VCR are registered trademarks of Cajon Company Macedonia Ohio Kalrez and Viton are registered trademarks of E DuPont de Nemours and Co Inc Wilmington Delaware Neoprene is a trademark of Vibration Mountings amp Controls Inc Bloomingdale New Jersey Swagelok it a registered trademark of Crawford Fitting Company Solon Ohio 647C Contents Contents 1 Gener l r nr E s 1 1 1 The Multi Gas Controller MGC Type 647C ssse emen 1 1 2 CE COMO se EE 1 NC Hie TI ER 2 RE TE 2 1 5 Technical Specifications A 3 1 6 Drawingsan rn Me tt ee te m Modelismo ren 4 1 6 Front Panel ia ihn ind 4 1 6 2 Rear Panel 4 ide ee ae dde dl v ida ck ad ev nelle 5 tr Saey Informations cs a Gaede aiid conan EE 6 1 7 1 Symbols Used in this Instruction Manual 6 1 7 2 Safety Instructions iaasa A ens EREA E EREA EE RA 6 E Wl le EE 7 Ee
21. ansducers for cable information The cables listed for type 647A and 647B are the same as for the type 647C 1 12 Service In case of problems or failure of the device please contact your local MKS representative The last page of this manual contains a list of service and calibration centers Fuses On units with serial number 104783G40 and up the fuses for the 15 V supply are accessible on the rear panel Type TR5 2A MKS part number Y0250004 1 General 647C This page left blank 647C 2 Operating Instructions 2 Operating Instructions 2 1 The User Interface The device is operated via menus A menu consists of submenus input fields or display fields Submenus can be reached by typing the number labeling them on the screen or selecting them with the cursor and typing ENTER They can be exited pressing the lt ESC gt button Input fields are highlighted by a cursor frame when they are selected for input Using the cursor keys different input fields can be selected i e the cursor keys move the cursor on the screen The input fields allow values to be edited or selected by scrolling up and down through a table In some cases certain input fields are not active The top line of the screen title displays the device type MGC Multi Gas Controller and software version The status line on the bottom of the screen displays the number of errors the status of the main valve and the input status of the keyboard see also MA
22. ar panel power switch press side 0 All settings remain stored and after switching power on again the setpoint outputs of all channels are pulled down to 0 5 V Note Do not switch off the line power as long as the message Please Wait appears on the screen If you do so all settings are completely reset You would have to configure the unit again completely Note The display is switched off automatically after the time out period as set in the menu SYSTEM SETUP LCD ON TIME has passed If you are not certain in which state the unit is with LCD being dark you can first press the ESC key and use the line power switch only when you are sure that the unit was switched off completely 1 9 Symbols at the case The device may show some symbols which are explained here The A says to watch the documentation manual The type label gives information about the device type the serial number and some technical date The label close to the fuse holder tells the specification of spare fuses T2A 250V 1 10 Accessories The 647C comes with the following accessories Sub D connector sets for the instruments 4 channel device ZB 19 8 channel deivce ZB 20 Power cable Y 0984492 Manual Y 1957647 2 handles for the case Y 5150011 4 screws for the handles Y 1600005 647C 1 General 1 11 Cables Refer to the instruction manuals of the respective mass flow meters mass flow controllers and pressure tr
23. at it is usually not noticed The measured value the zero offset of the sensor of the mass flow controller is displayed in the field ZERO VALUE In order to correct the zero offset this value is subtracted from actual flow and added to the setpoint output This way the controller gets a corrected setpoint and thus equalizing the sensor signal s error If necessary one can enter the zero offset directly 26 647C 3 Functionality 3 7 5 Trip Limit Supervision MGC 647C MS s CH1 CH2 CH3 CH4 ACT FLOW 0 000 1 750 1 400 0 000 UNIT SCCM SCCM SLM SLM MIN LIMIT 3 000 0 750 0 000 0 000 MAX LIMIT 4 000 0 250 1 400 1 450 SUPERVIS LIMIT BAND SLEEP SLEEP STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 18 There are three modes to supervise the process gas flows SLEEP mode LIMIT mode BAND mode In SLEEP mode no supervision is performed In LIMIT mode the actual flow is supervised to remain between the trip limits If the actual flow exceeds the high limit or falls below the low limit an error will be generated The limits are considered as absolute values The BAND mode is similar to LIMIT mode but the limits are considered as deviation to the setpoint The low limit represents negative deviation The supervision becomes active 1 second after the selection of a mode Two relays are driven by each channel if the Relay Option is used The logic of the relays depends on t
24. case check the setup of the device 42 647C 6 Pin Assignment of rear connectors 6 Pin Assignment of rear connectors 6 1 RS232 connector Sub D male 9 pol 1 6 RxD 2 7 RTS TxD 3 8 CTS 4 9 GND 5 Figure 25 6 2 Service connector Sub D male 9 pol This connector is for use only by MKS personal 43 6 Pin Assignment of rear connectors 647C 6 3 RELAYS connector Two relays are available for each channel The relay data are type max max max max of relay Switch voltage Sub D female 25 pol legend 1 switch with n o and n c position SPDT 28 VDC AC not specified power 3W Switch load 250 mA response time 55 ms relay 11 nc 1 14 relay 11 cmn relay 11 no 2 15 relay 12 nc relay 12 cmn 3 16 relay 12 no relay 21 nc 4 17 relay 21 cmn relay 21 no 5 18 relay 22 nc relay 22 cmn 6 1 9 relay 22 no relay 31 nc 7 20 relay 31 cmn relay 31 no 8 21 relay 32 nc relay 32 cmn 9 22 relay 32 no relay 41 nc 10 23 relay 41 cmn relay 41 no 11 24 relay 42 nc relay 42 cmn 12 25 relay 42 no chassis 13 nc normally closed no normally open cmn common pin relay 12 relay 2 of channel 1 Figure 26 44 647C 6 Pin Assignment of rear connectors 6 4 MFC connector CH1
25. ed shielded cables must be used We recommend to use the cables offered by MKS Instruments Cables which are in compliance with the CE guidelines are marked with an E or S example CB259E or CB259S 1 General 647C 1 3 Options The available options are identified in the model code 647C X Y C R where Options Designation Channels X Four 4 Eight 8 Interface Y RS 232 R Control Option C None 0 PID 1 Relay Option R None N Relays T 1 4 Software This user manual meets software version V3 0 647C 1 General 1 5 Technical Specifications channels for gas flow max number of channels input voltage output voltage error range temperature drift 4 optional 8 0 5 5 5 V 0 5 5 5 V digit 0 075 C 5 pressure channel input voltage output voltage resolution error range temperature drift max 1 channel 0 5 10V 0 5 5V 16 bit 3 digit 0 075 C 5 external setpoint 0 5 5 5 V measuring rate output rate 20 Hz channel 20 Hz channel operation temperature 15 40 C humidity lt 70 3 4 Power supply voltage 100 240 V fuse T2 A 250 V slow blow frequency 50 60 Hz consumed power 200 W power supply for sensors voltages 15 V 5 96 max current per sensor 500 mA 1 max total current 3 3A 2 Housing 19 x 3 HE Rack de
26. efined gas menu has been selected in the previously described USER DISPLAY menu In this case the set points of the channels cannot be changed Due to instabilities at the ower end of MFC range the lowest setpoint is limited to 1 Setpoints less than that are displayed as zero and an output value of 0 5 V is transferred to the MFC The displayed full scale ranges RANGE FS are the ranges of each controller scaled with the gas correction factors E g channel 4 controls a MFC with a range of 1 slm calibrated in nitrogen The regulated gas is helium and has a correction factor of 1 450 with respect to the calibration gas nitrogen i e the actual full scale range is RANGE FS 1 1 45 1 45 slm The actual gas flow of each channel is displayed in the line ACT FLOW Here the correction factors and ranges of the selected gases are also automatically taken into account Values higher than 110 are displayed as an overflow through dashes The lowest displayed flow value is 1096 See also Zero Adjust Typing lt ON gt lt x gt turns on the valve of channel x and causes its set point to be sent to the mass flow controller In addition to provide the possibility of turning on and off all controllers at the same time there is the switch lt ON OFF gt lt ALL gt 16 647C 3 Functionality 3 4 The PRESSURE CONTROL menu MGC 647C V3 0 CH1 CH2 CH3 CH4 0 000 1 750 1 400 0 000
27. f your application first increase the value of the gain parameter then change the integral action If you cannot record a step response of your process it is also possible to estimate the necessary values Measure the time between the opening of the valves and the beginning change of the actual pressure as Tt Then measure the time until pressure has gained 63 of the final pressure value Configuration of an Application see next page 18 647C 3 Functionality Typical Configuration lt MFC 1 lt lt MFC2 lt lt 647C 3 MFC n J process gt Baratron Figure 10 Configuration of a typical system with three flow controllers MFC plus pressure control with a Baratron capacitance manometer No extra pressure control unit is required The gas flow rates are kept at a constant ratio 19 3 Functionality 647C 3 6 Diagnosis of System 3 6 1 The ERROR LISTING menu If the status line indicates the occurrence of errors details about these errors and the affected channels can be retrieved from the ERROR LISTING menu MGC 647C V3 0 ERROR LISTING CHANNELS TRIP LOW LIMIT 12 TRIP HIGH LIMIT 2 INPUT OVERFLOW INPUT UNDERFLOW OUTPUT OVERFLOW OUTPUT UNDERFLOW LIST MODE HISTORY 03 ERRORS FLOW ON INPUT DIRECT Figure 11 Error messages TRIP LOW LIMIT The actual flow is lower than the low
28. he actual Supervision Mode SLEEP mode In this mode relay 1 represents the status of the channel s valve Relay 2 is idle BAND mode In this mode relay 1 also represents the status of the channel s valve Relay 2 however will become active if the actual flow is outside of the defined band LIMIT mode If the actual flow is below low limit relay 1 will become active and if it is above high limit relay 2 will become active 27 3 Functionality 647C Truth Table Mode Relay amp Valve Low limit High limit Relay status SLEEP 1 OFF X X inactive SLEEP 1 ON X X active SLEEP 2 X X X inactive BAND 1 OFF X X inactive BAND 1 ON X X active BAND 2 X not exceeded not exceeded inactive BAND 2 X X exceeded active BAND 2 X exceeded active LIMIT 1 X not exceeded X inactive LIMIT 1 X exceeded X active LIMIT 2 X X not exceeded inactive LIMIT 2 X X exceeded active X any condition Figure 19 3 7 6 Gas Composition MGC 647C V3 0 CH1 CH2 CH3 CH4 SET 1 1 000 1 700 0 000 0 000 SET 2 1 010 142750 0 000 0 000 SET 3 1 020 1 800 0 000 0 000 SET 4 1 040 1 850 0 000 0 000 SET 5 0 000 0 000 0 000 0 000 UNIT SCCM SCCM SLM SLM STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 20 Up to 5 different gas compositions SET 1 to SET 5 can be defined here which can be selected in the menu USER DISPLAY through the item GAS MENU 28 647C 3 Functional
29. int of MFC setpoint in EXTENDED MENU auxiliary input 5 V 3 7 3 4 PCS Mode In the PRESSURE CONTROL mode PCS the 647C serves as the regulating unit for a pressure controller e g type 250 All gas flow channels which are configured in the PCS mode are regulated through the pressure control signal PCS according to the ratio of their set points 25 3 Functionality 647C 3 7 3 5 PID Mode In this mode MFCs are driven by a PID algorithm see also menu PRESSURE CONTROL This mode is only available with the PID option 3 7 3 6 Test Mode In this mode the 647C generates a test signal which may be useful for installation procedures The test signal is a saw tooth between zero and 100 with a period of 4 sec 3 7 4 Zero Adjustment MGC 647C V3 0 CH1 CH2 CH3 CH4 ACT FLOW 0 000 1 750 1 400 0 000 UNIT SCCM SCCM SL SLM ZERO VALUE 0 005 004 0 002 002 ZERO ADJUST EXEC EXEC EXEC EXEC STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 17 To trigger the Auto Zero function the status needs to be changed from EXEC executable to ACT active through the cursor keys The status DONE or FAIL displays the completition of the function The status FAIL indicates that the offset was too large and a new zero value was not generated FAIL status may also appear if the channel is switched on The status ACT appears on the screen for a very short time so th
30. is associated with the slave channel The advantages hereby are that the master remains free for declaration in other modes and more than one master is possible With this declaration technique however useless circular reference chains which might even be dangerous for the application could appear In order to avoid this the software checks out each input and rejects it if necessary Therefore this solution offers full advantages without risks Example 1 menu extract CH1 CH2 CH3 CH4 MODE INDEP SLAVE SLAVE INDEP INDEX d 2 In this example channel 1 is master of channel 2 which is master of channel 3 This is an open reference chain The index number of a slave indicates its master channel This declaration technique applicated to channel 2 as master has the advantage that this channel may be declared as slave while being a master Channel 4 is independent Example 2 menu extract CH1 CH2 CH3 CH4 HODE SLAVE SLAVE SLAVE INDEP INDEX 3 1 2 This example shows a circular reference chain which will never appear on 647C screen The software prevents its appearance by consequently rejecting wrong input This is the reason why some of the user s input might be rejected 3 7 3 3 External Mode This mode enables external control of the MFCs through the auxiliary connector The MFC s setpoint is calculated as the product of setpoint in menu EXTENDED MENU and the signal at the auxiliary input E g Setpo
31. is transmitted instead of the command parameter Cmd cn R p1 p2 p3 cr lt nl gt Cmd command 2 bytes see table of commands Cn channel number 1 4 8 P1 p2 p3 parameters numerical input is always in decimal ASCII format R request of the parameters cr carriage return OD hex for terination ni new line 0A hex optional 35 4 Remote Control 647C 4 3 Table of Commands GMs Select gas menu S20 gas menu X normal setpoints are used s 1 5 gas menu 1 5 GM R check for gas menu result s FS c xxxx enter setpoint of a channel gom channel x 0 1100 setpoint in 0 1 percent of full scale FS cR check for setpoint result xxxxx FL c check for actual flow of a channel result xxxxx eom hn channel x 0 1100 actual flow in 0 1 percent of full scale PS xxxx nter pressure setpoint x 0 1100 setpoint in 0 1 percent of full scale PSR check for pressure setpoint result xxxxx PR check for pressure result xxxxx x 0 1100 actual pressure in 0 1 percent of full scale PC check for PCS result xxxxx x 0 1100 actual PCS signal in 0 1 percent of full scale PM m nter pressure mod m 0 mode off m 1 mode auto PM R check for pressure mode result m RA c rr enter range c 1 8 channel r 0 39 range code 0 1 000 SCCM 20 1 000 SCFH 1 2 000 SCCM 21 2 000 SCFH 2 5 000 SCCM 22 5 000 SCFH 3 10 00 SCCM 23 10 00 SCFH 4
32. ity 3 8 System Setup 3 8 1 RS232 Setup MGC 647C V3 0 BAUDRATE 9600 PARITY ODD BITS 8 bit STOPBITS 1 bit HANDSHAKE NONE RS232 STATUS cu AIO LCD VIEW ANGLE 023 LCD ON TIME min 010 HOST MODE C MODE RES ET EX EC 00 ERRORS FLOW OFF INPUT DIRECT Figure 21 The 647C implements a standard V24 RS232 interface with standard parameters 3 8 1 1 Baudrate The baudrate defines the transfer speed of characters on the line The transfer rate of commands and data is determined by this baudrate and by the processing speed of 647C The first 30 commands will be directed to a buffer at maximum speed while the transfer of further commands is controlled by a handshake protocol The baudrate must fit to the baudrate of the host computer supported baud rates 50 75 110 150 300 600 1200 1800 2000 2400 3600 4800 7200 9600 Baud 3 8 1 2 Data Link Parameters The data link parameters must fit to setup of the host computer Change it according to the setup of the host word length 7 bit 8 bit parity NONE EVEN ODD stop bits 1 bit 2 bit 29 3 Functionality 647C 3 8 1 3 Handshake Protocol The handshake protocol synchronizes different processing speeds of 647C and host computer If the receiving device is busy with calculating and therefore not ready to accept more date it stops the transfer through a handshake protocol
33. limit see also TRIP LIMITS menu page 22 TRIP HIGH LIMIT The actual flow is higher than the high limit see also TRIP LIMITS menu page 22 INPUT OVERFLOW INPUT UNDERFLOW The input signal of the displayed channel is higher than 10V or lower than 10V OUTPUT OVERFLOW OUTPUT UNDERFLOW The output signal is higher than 10 V or lower than 10V Since the calculated value cannot be transmitted to the controller this can disturb the regulation behavior of closed loops Two display modes are possible in ERROR LISTING The HISTORY mode stores all errors having occurred until leaving the error listing In the ACTUAL mode only actual valid errors are displayed 20 647C 3 Functionality 3 6 2 The SIGNALS menu MGC 647C V3 0 OUTPUT INPUT EXTERN CH1 00250 0250 0250 CH2 001746 01746 01746 CH3 005002 05002 05002 CH4 00500 0500 0500 CH5 00500 0500 0500 CH6 00500 0500 0500 CH7 00500 0500 0500 CH8 00500 0500 0500 PRE 00250 0015 PCS 0250 SIGNAL PROCESSING RUNNING 00 ERRORS FLOW ON INPUT DIRECT Figure 12 Attention ud When stopping signal processing the process is also stopped This menu is designed for test and maintenance purposes only It displays all signals of the interface to the process The display unit is mV It is possible to enter setpoints in mV directly if the signal processing is stopped If you leave the signals menu then signal pr
34. luoride Sulfur Dioxide Table continued on next page 49 T Gas Correction Table 647C Sulfur Hexafluoride Trichlorofluoromethane Freon 11 Trichlorosilane 1 1 2 Trichloro 1 2 2 Trifluoroethane Freon 113 Tungsten Hexafluoride Xenon 1 Empirically defined DENSITY SYMBOL SPECIFIC HEAT Cp cal g C g l 0 C SF CCLF SiHCI CCL FCCIF or C ChF CONVERSION FACTOR 2 Consult MKS Instruments Inc for special applications NOTE Standard Pressure is defined as 760 mmHg 1013 25 mbar Standard Temperature is defined as 00C NOTE This table may contain more or less gases than that of the unit 50 647C T Index INDEX A Actual gas flow 16 ACTUAL mode 20 ASCII format 37 B BAND 28 baudrate 30 B MODE 37 C C MODE 37 Commands 38 D dead time 18 DIN 1871 24 DIRECT 11 E ERROR LISTING 20 EXTENDED DISPLAY 16 EXTERN 25 External Mode 26 F First Start Reset 14 FLOW OFF 11 FLOW ON 11 framing error 33 G gain 18 Gas Composition 29 GAS COMPOSITION 15 Gas correction factor 49 Gas Correction Factors 24 Gas Correction Table 49 GAS MENU 15 GCF 24 H handshake 30 hardware handshake 31 Hardware Reset 14 helium 24 HISTORY mode 20 51 HOST MODE 33 hydrogen 24 independent mode 25 INPUT OVERFLOW 20 INPUT UNDERFLOW 20 integral 18 Interface Connections 31 L lead 18 LIMIT 28 LOCKED 12 M MAIN MENU 14
35. n sent instead of the expected 2 byte command 3 Invalid expression The command parameter does not have decimal form or invalid characters were found within the parameter e g 100 3 the decimal point is an invalid character 4 Invalid value The transmitted parameter is outside the parameter range e g 1200 is outside the range of a set point 5 Autozero error There was a trial to set the zero offset of an active channel Before setting the zero offset either the channel OF or the gas OF 0 has to be switched off lt cr gt carriage return 0D hex for termination nl new line 0A hex 40 647C 5 Application of the 647C 5 Application of the 647C 5 1 Mass Flow Controllers The mass flow controllers must have a linear DC voltage output of 0 5 V The input impedance must not be lower than 1 MOhms Some mass flow controllers of other manufacturers can be damaged by a constant set point 0 V Other possible symptoms are undesired oscillations when the setpoint is varied or disturbances of the regulation loop To operate mass flow controllers it is important that the allowed maximum of input signals are not exceeded The mass flow controllers must have a linear DC voltage input and output of 0 5 V MKS mass flow meters types 0258A B C 579A 179A can be operated with the same cables as for MKS mass flow controllers types 259 1259 2259 1179 2179 1479 1579 1559 and MET 41 5 Ap
36. ocessing is restarted This avoids problems concerning general 647C usage 3 7 Instrument Setup MGC 647C V3 0 RANGE SELECTION GAS SELECTION MODE SELECTION ZERO ADJUST TRIP LIMITS GAS COMPOSITION DOP GA r 00 ERRORS FLOW ON INPUT DIRECT Figure 13 The instrument setup contains all parameters which are related to the process 21 3 Functionality 3 7 1 Range Selection MGC 647C V3 0 CH1 CH2 CH3 CH4 ACT FLOW 0 000 1 750 1 400 0 000 UNIT SCCM SCCM SLM SLM RANGE FS 5 000 5 000 2 000 1 000 STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 14 The following ranges are available 1 sccm 2 sccm 5 sccm 10 sccm 20 sccm 50 sccm 100 sccm 200 sccm 500 sccm 1 slm 2 sim 5 slm 10 slm 20 slm 30 slm 50 slm 100 slm 200 slm 300 slm 400 slm 1 scmm 1 scfh 2 scfh 5 scfh 10 scfh 20 scfh 50 scfh 100 scfh 200 scfh 500 scfh 1 scfm 2 scfm 5 scfm 10 scfm 20 scfm 50 scfm 100 scfm 200 scfm 500 scfm sccm slm scmm scfh scfm standard cubic centimeter per minute standard cubic liter per minute standard cubic meter per minute standard cubic feet per hour standard cubic feet per minute 22 647C 500slm 647C 3 Functionality 3 7 2 Gas Selection MGC 647C MS CH1 CH2 CH3 CH4 ACT FLOW 0 000 1 750 1 400 0 000 UNIT SCCM SCCM SLM SLM GAS
37. oint for each MFC channel Possible modes are INDEP independent SLAVE dependent to the actual flow of another channel EXTERN external source for setpoint PCS external controller PID built in PID controller TEST test for maintenance and installation 3 7 3 1 Independent Mode In the independent mode a MFC is driven by the entered setpoint which is constant 3 7 3 2 Slave Mode In the Master Slave configuration the ratio between the setpoints of the slaves and the setpoint of the master is kept at the selected ratio of gas composition If the setpoint of the master is changed the 647C also changes the setpoints for the slaves according to this ratio Additionally in this mode the master channel governs the gas flows of the slave channels Le the setpoints for the slave channels are calculated from the ACTUAL FLOW of the master channel according to the desired composition ratio and transmitted to the controllers instead of the setpoints displayed on the screen If for instance the gas flow of the master decreases because of a fault in the process the gas flows of the slaves are also brought down as can be seen from the ACT FLOW display If the gas flow of a slave is disturbed however the composition ratio for this channel is incorrect 24 647C 3 Functionality E g a ratio of 5 1 master slave means Setpoint of slave act flow of master 0 2 The master channel is determined by the index which
38. plication of the 647C 647C 5 2 Trouble Shooting Symptom Possible Causes and Remedies 1 No display 2 Display of gas flow is close to zero or not correct 3 Display of gas flow is on for a short time and goes back to zero 4 There are periodical peak pulses at constant gas flow 5 Entering data is not possible or there are unreadable characters on the display Power Failure Wrong position of voltage selector switch Loose mains connection No power in the outlet Fuse is defectiv Power supply is broken Loose connection Power supply is broken Mass flow controller is warming up Set point is not being transmitted Valve in the supply line is closed Defect in the pipe line system Supply line valve is closed Pressure is down check gas supply No differential pressure e g pump is turned off Pressure regulator is defect frequent defect varying supply pressure may help It is recommended to replace the pressure regulator Disturbance by external sources change the path of power lines screen sources of disturbance There is probably inconsistent data in battery backuped RAM The First Start Reset will fix this problem If the trouble is limited to a part of the eight possible channels it is recommended to localize the source of trouble by exchanging mass flow controllers and their connecting cables In any
39. pth without connectors 245 mm Total depth with handles mounted 285 mm Weight 5 0kg 4 channel 5 3 kg 8 channel Consider also the warm up period of the sensors For all channels i e gas flow and pressure Relative humidity within the specified temperature 1 2 3 4 5 range For use in closed heatable rooms without condensation of max signal within the range of operation temperature Fuses inside the instruments may only be replaced by service people from MKS Instruments Figure 1 Technical Specifications 1 General 647C 1 6 Drawings 1 6 1 Front Panel O O oo mks pP B O Technology for Productivity S A 1 2 3 OFF O ALL ON ENTER ESC CLEAR O O MJLTI GAS CONTROLLER 647C A Monitor LCD Display B Keyboard Figure 2 Front Panel 647C 1 General 1 6 2 Rear Panel 4 8 4 8 3 7 2 6 1 5 2 6 1 5 Channel 5 to 8 01 Power Supply Connector 02 Power Switch 1 5 Channel 1 or 5 for MFC 2 6 Channel 2 or 6 for MFC 3 7 Channel 3 or 7 for MFC 4 8 Channel 4 or 8 for MFC 9 Connector ACCESS 10 Connector RELAY 11 Connector PRESSURE 12 Connector R
40. same software as its predecessor 647B except the menu POWER OFF and some internal functions but is incorporated in a more compact housing with improved shielding properties Also the RS232 communication is fully compatible 147C The 647C as well as the 647B offers more functionality than the 147B which leads to some incompatible constructs in the remote control syntax To avoid this incompatibility the 647C distinguishes two host modes C MODE offers actual 647C and B commands B MODE offers 147B commands In B MODE the device is compatible with 147B so it is possible to use old configuration software without any changes The full 647C functionality is only available in C MODE In the beginning the C MODE will be initialized and the device will act like an actual 647C If a 147B command is used the 647C will switch to B MODE eo MO c 1 PL 1 3 It is also possible to Switch to B MODE through menu SYSTEM SETUP and vice versa For setup see section System Parameters page 32 4 2 Command Syntax In general all commands are transmitted in ASCII format Each command string must be terminated by a carriage return and there is no discrimination between upper and lower case letters In order to improve readability blanks 20 hex may be included as delimiters between command channel number and command parameters however this is not necessary All parameters can be read by the host For this purpose a R for Request
41. the 64 7G ic ete ER ante een Ga aaa as 41 ol iMass Flow Gontrollers 5 3 pita sed Ster cA EH R ates tak ee ed DESEN 41 9 2 Tro ble Slhootinig TT 42 6 Pin Assignment of rear Connectors eene nnne 43 6 189232 NEE 43 6 2 serviceic nniector eege vie Lutte eae e eed ev tod eae A ee 43 6 3 RELAYS connector i ee IR Me Ex e ed Hn de D edie de ous 44 6 4 MFC connector CH1 to CHO raa a A A E A 45 6 5 PRESSURE connector arrra E AE A O ER MEHR 45 6 6 ACCESS CONNECCION esoe Eeer 46 7 Gas Correction Table cit tes HEEN AEA 47 INDEX 5 tun eerte esset dd e ena cies mtu te eM a Is 51 647C 1 General 1 General 1 1 The Multi Gas Controller MGC Type 647C The 647C is designed to control Mass Flow Controllers MFC with complex requirements to the process It allows different configurations Various master slave configurations within several groups of channels External control of mass flow controllers Regulation of the pressure with a constant gas flow ratio Warning The safety instructions in this document must be followed Please take also a special note of all highlighted text in this document 1 2 CE conformity The unit complies with the European standards and thus it is labeled with the CE mark To fullfill the above listed guidelines it is mandatory to use the appropriate interconnection cables Note 1 The instrument complies to EN 61326 2 2 with the requirements for D industrial applications Braid
42. vice must performed if it is disconnected from power supply and if the cleaning is performed dry Warning The device may be opened by MKS service personal only If the device is open danger for life by high voltage may occur Attention ud ns read this instruction carefully and follow it before using this evice 647C 1 General 1 8 Installation The device must be used in a dry and heated room see ambient temperature The device produces heat due to the power consumption In order to avoid overheating do not mount it close to other hot instruments or devices Position the unit with proper clearance to allow air cooling so that the unit can operate within the product temperature specifications listed above Keep the air inlet slots at the bottom of the housing free so that air can enter the instrument for cooling Attention D MASA the line voltage to meet the specified power supply voltage of the Follow the steps below For installation of the device Hook the device to the power plug If you use a transformer it must be able to supply 200 Watt Hook the instruments to the device according to the pinout of the connectors or use the appropriate cables Switch the device on and perform the setup in the menues INSTRUMENT SETUP and SYSTEM SETUP If the digital interface is used RS232 the setup in the SYSTEM SETUP menu is of special importance Powering On Switch on the unit with the rear panel power switch
43. with numbers 1 to 5 X means that none of the stored ratios is activated In this case the setpoints for the mass flow controllers are the ones defined in EXTENDED DISPLAY The displayed value of TOTAL FLOW is the sum of all single gas flows Because flow units of different decades e g SCCM and SLM are added it might come to discrepancies between the two displays which are due to rounding errors Step through the flow units of the TOTAL FLOW in order to optimize TOTAL FLOW display Since negative flow values are not added to TOTAL FLOW channels which are turned off can not cause errors 15 3 Functionality 647C 3 3 The EXTENDED DISPLAY menu MGC 647C V3 0 CH1 CH2 CH3 CH4 ACT FLOW 0 000 1 750 1 400 0 000 SETPOINT 4 500 1 250 1 400 0 728 UNIT SCCM SCCM SLM SLM RANGE FS 5 000 5 000 1 4000 1 450 GAS USER AIR CO He MODE INDEP INDEP INDEP SLAVE STATUS OFF ON ON ON PRESSURE 0000 0 mbar 00 ERRORS FLOW ON INPUT DIRECT Figure 7 The EXTENDED DISPLAY menu allows controlling the system before and during operation It contains the most important information needed to control the system Here the setpoints of all channels can be set and changed The setpoints are selected by using the cursor keys The input is done either numerically by typing in the values or by scrolling using the cursor keys If MEMORY is displayed in the INPUT field of the status line a pred
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