Manual APEL-M
Contents
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3. Delay 10ms epe ear PWM 1 em PR m PWM2 PWM3 pu FT Protection switch1 pac cm m PO Pr CR WES E k I x qm LL ui uy E D Protection switch2 zem d wa 22 ry k y mm Delay 200ms lua P iis fics 4 EU bs Protection switch u N pm Eon RS485 E Um gt m e z m acd ed os sof roca L 22 1 M em sae 7 5 8 0013 EU m mid teow L 3t is uns 7 au anos d con ess sessi ease boat E Peso we reno jo EN Te 30 APPLIED ELECTRONICS Ltd Tomsk Russia Academichesky ave 15 office 80 Tomsk 634055 Russia Tel 7 3822 597451 Fax 7 3822 491295 e mail nss4 yandex ru www pronika ru 31
4. 10 10 3 Controller scheme description ERAT RR TEES 12 11 Troubleshooting eR ce RR o 16 12 MaIBlengnee 16 QE 17 14 Transportation du UOS eau inca 17 15 ea RN RUE pL OR DG PLAN EpL M br 17 Annex A Int rtaos controller 87 uuu Fiat odi exse che ra ula roads 18 Annex B Force igor anny 22 Annex C 23 Annex JE 24 Annex E Output switch 25 Annex F Output switch driver M 26 Annex Cy Contactor OU IM 27 Annex H Ignition board schematic Ne 28 I Analog controller Se Wem att 29 Annex J Digital controller schematic ddd 30 1 Introduction Thank you for purchasing the power supply APEL M 5PDC series Before operating please read this operation manual carefully The manual should then be stored for future reference in case of operating difficulties or functional descriptions 2 Function The power supply APEL M 5PDC is designed for supply regulated volta
5. APPLIED ELECTRONICS Ltd USER MANUAL A power supply for the magnetron sputtering systems APEL M 5PDC Please carefully read this instruction before use and save it 1 Contents T Tito a OL u uu tecti o ad OR 3 3 3 4 PackageContents oh ea UR c DA OP DR 3 3 5 7 General euidance etam 6 7 1 Unpacking of power supply Ne 0 7 2 Installation EO CENTS uu u ana 6 Rm 6 Be Operating CSOT uuu u alana 6 HER 6 8 2 Arrangement and appointment of control and adjustment 7 8 3 Information in LCD display uu e Pase tnc manaa 8 8 4 Sockets and slots arrangement CONS B RO Roten Uo iR RUM Fu 8 8 5 Power supply Tc 9 Ud fa qur 9 TO Circuit scheme 9 10 1 Force diagram description Annex 9 10 2 Control logic and drivers description Annex C
6. Jnie e ansio g m m 13 5 6 5 o a G z 9 23 Annex D Inverter driver R3 R2 R7 m C7 R4 VT1 R9 C1 J R5 XT2 24 lt a Annex E Output switch schematic XT1 XT2 50 16 07 VD3 FANS 0 16A 128 4 XP6 220uF 90 25 100k XT5 R1 R2 R3 R4 0 25 12k HFA16PB120 VD2 B 2 330 HFA16PB120 VD1 LAH25 NP Annex Output switch driver 100pF DA2 R2 20k PWL 5M 100pF 26 108 Annex Contactor s driver MOC30835 R4 iF 10nF 630V 27 Annex Ignition board schematic XT5 gt L R11 VD9 c M R10 28 Annex Analog controller schematic
7. DC mode fixed signal amplitude 5V LF mode pulse sequence with a given frequency and duty cycle Through intermediate stages and served optocoupler plug XT10 and then on the switch driver Power supply protection When driver outputkey protection is activated on the connector XT12 comes with a driver signal fault At the output ofthe optocoupler O10 find a permanently logical 1 and when ignited the optocoupler LED is reset to O This signal goes to the monostable DD8 2 which includes the decay of the input 1 is included at the time determined by R9 and C27 This time the time intervals between tripping of protection it adjusts to the desired value resistor R9 2 3ms Monostable generates the outputs of 13 and 4 1 and 0 respectively The signal from the output 4 goes to the input of DD2 2 which breaks the chain of key management and therefore stops the work as well as DD7 3 which stops the inverter The outputsignal 13 goes to the controller board to display the current protection the panel display and resets the current set point exposing the 1 at pin 16 DA3 in the case of mode stabilization by current Other The scheme was built DD1 2 is used to test the inverter control circuit phase adjustment To do this jumper J2 And closing the findings J1 generate one time control pulses DD6 1isused for generating control pulse to activate the contactor through time 1s after power source 11 10 3 Controller
8. TXD 97 SHUTTER 98 BLOK 99 lt 12 HE sg 1818 i 2 L1 PP iG MR XP1Current 2 FAN our tri t IN XP3 Current XP7 FAN m A D 19 XT3 22 24 4XT1 x74 OUT 11 L1 An 9 712 f 22 T2 2 13 Sensor OAT ets Invertor 15 3 HB 20 A7 FAN1 A14 A15 OUT IN Uos OUT 23 235 2 xpe xT 1 A2 Al A2 XII XI5 HXT 15 XI X3 4 A Gs 2 1 Lt Taraan LI 1 BL UL A 8 34 b 8 29 IN AS g zs 64 2 WN xT xn 5829 9298585 km yor Al 2 X3 8 X5 X66 X4 Control Board 12 T xn DRIVER e 3 gt 531 4 CONTACTOR DRIVER 1 2 CONTACTOR LARA ES T les ay contactor Tumbler A8 1 B 2 4 A5 C Les xn L P s N lese uin 82 Power 5V xn z 12ree Cntrl Bi n o 51 0 12 17 ie switch Protection 2 7 cN m n XT14 IN Ns i o Q o XT15 162 5 4 IN xT1 PEINE 103 EE 81 82 995 8 LIE A6 no NMTNORDHDO AMNTNO ANMNTNORDOD
9. This is determined by internal or external additional sensors The sensors are working in switching mode and activated when the gap shorted A signal at the input by the optocouple transmitted to microcontroller which turns off the source Protection switch Pic 13 Button connection schematic When activated the arc protection from the control board the stop signal arrives to the output switch At the output of the optocoupler is formed the 0 signal with a result that a one shot circuit is triggered Which generates two signals one goes to the panel display LED is lit arc the other on the microcontroller stops the output key to time determined by the monostable 15 An ignition and the output switch Pic 14 An ignition control schematic The controller generates ignition control pulses 30ms with a pause of 1s which run through the optocoupler to ignition An inductance is changed by the output switch with switching modes impulse or DC A control impulse is given by the controller through the optocoupler to the output switch driver 11 Troubleshooting Do not attempt to service this power supply yourself Please refer any service to the service centre Be sure to turn the unit off and disconnect the AC power cord before maintaining the unit Most possible problems and instructions for their removal are shown in the tabl 2 Table 2 Most possible problems and instructions for their removal Pr
10. from packing and to put in normal conditions within not less than one hour 14 Transportation Transportation of the power supply to the consumer in transport container can be carried out by all types of transport without acceptance of additional measures at the temperature of air from minus 50 to plus 500C In the process of transportation the protection of the device against falling atmospheric precipitation and dust should be provided It is not supposed racking and turning over the device 15 Guarantee maintenance The manufacturer guarantees that the product APEL M 5PDC conform to requirements of technical documentation follow all terms and rules of operation described in this manual Guarantee period 2 years after shipping This limited warranty covers manufacturing defects in materials and workmanship encountered in normal and shall not apply to the following including but not limited to damage which occurs in shipment delivery and installation applications and uses for which this product was not intended 17 Annex A Interface controller RS485 Using RS 485 interface is possible to control the power supply from PC Synchronization is available only on the bottom connector Assigning RS 485 connector pin 54321 Pin Designation Function 1 A Receive 2 B Transmit 3 GND Ground 4 Blocking Blocking 5 Blocking Blocking 6 Synch out Synch out 7 Synch out Synch out 8 Synch in Synch in h in h
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12. is formed by resistor R13 at the input 3 aresistor R29 is setting exceed 10V DA2has 2 inputs 2 output signal from the DA5 to pin signal from the controller board The signal from the controller board is a setting a constant voltage 10V DA2 converts both signal Vout U2 U1 x Koc where U2 setting U1 signal from the voltage sensor Koc coefficient of feedback If U2 lt U1 Vout is reset to 0 Koc is given by nominal resistance R2 100k which corresponds to 10 A time constant of the feedback 10ms is determined by the capacitor C1 A voltage reference diode at the output is set for the limiting an output voltage to 10V DA2 output goes to analog switch DA3 which is managed by a board of control which works like a normal key DA2 output goes to analog switch DA3 which is managed board control which works like a normal key If pin 1 will be put 0 this means that pins 2 and are closed according to the selected mode From DA3 signal is applied tothe converter voltage frequency DA8 which in the presence of voltage at the input generates a square wave If the input voltage increases increases the output pulse frequency to the maximum which is set by the clock The clock generator is a multivibrator built on a 3 logic elements 2NAND 009 1 9 3 frequency range is selected by the resistor R32 capacitor Resistor adjusted the frequency 200 kHz At the outpu
13. ka L1 25 veca msi C26 6 evs vec Res 1 i 2 R29 wir Xm xT6 xni E vec CEA 1 CEAN 1 so omi 2 2 EGR 2 2 VD19 Z 5 XT16 2 1 XT12
14. S XT14 Ignition 1 PE LIES Li rd XT18 XT8 100 Driver SES 191 contactor 2 2 9 ls 3 4 4 102 5 5 Controller Ignition 5 Vn 7 P 8 8 9 9 95 10 10 RS485 96 4 11 11 97 12 12 19 13 Blockin e 1 14 ENCODER XT20 xT21 Blocking i LCD MODIFY So n o A NO x i 0 I 0 0 Nn 0 O 0 O L N m in O A11 Panel sensor 22 95 96 97 98 es BLOK oN jojo og m m P2 em RXD TXD SHUTTER BLOK BLOK 1 2 3 4 5 6 7 8 9 Annex C Inverter schematic N Ny n 2 o XT7 N 5 B RB US a Se a ee ee P XT4 OUT 3001 LEO 859 5 5 S 5 D 2 E M G N 4 oji QMOGJdv9 k 6 6 5 5 x AL SZO ae zs 955 i ango 259 159 7 n NEL i 82 a jn8661 19 E 95 e gt 1 9 3160 5 e amp amp
15. fter the divider signal via repeater DA10 displayed on the controller board Then the signalapplied to the operational amplifier DA4 which has 2 inputs The second output signal from the current sensor goes to pin 3 with the controller board The signal from the controller board is a setting a constant voltage 10V DA4 converts both signals on the basis of Vout 02 01 x Koc where U2 setting U1 the signal from the voltage sensor Koc coefficient of feedback If U2 lt U1 Uout is reset to 0 otherwise itis a formula Koc is set by nominal resistance R21 100k which corresponds to Koc 10 A capacitor C4 is determined by the time constant of the feedback Stabilitron at the output is set to limit the output voltage to 10V Similarly stabilization scheme for voltage from the output DA4 signal applied to the voltage frequency converter via analog switch which is included in the current stabilization mode Power stabilization schematic the multiplier DA7 fed signals from the sensors voltage and current where they multiply and get feedback signal power Further the same modes of stabilization of current and voltage at the input of the operational amplifier is fed setting for power and signal from the multiplier Output switch control The control is performed by signals from the controller board depending on the mode of the source continuous or pulsed through the connector XT15 Signals have logical form
16. ge current or power and a protection signal from the output key The controller board gives signals to the control board for an interactive control of the source 6 Specification Table 1 Performance specification for APEL M 5PDC Characteristic Value Output voltage Output power Power consumption Output voltage adjustment range Control range of the average output current Control range of the average output power An amplitude of the ignition impulse Output voltage type Control range of the impulse frequency Control range of the duty factor Stabilization mode Stabilization accuracy The amplitude of the current protection The reaction time for arcing 3x200V 50 60 Hz 5 kW 5 6 kW 65 650V 0 1 8 0 5 5 kW 1000 V Negative DC or pulsed 1 100 kHz with step 1 kHz 10 80 96 with step 196 by voltage current or power 596 12A in DC mode 10 A in pulsed mode 0 5 microsecond Indication LCD display Cooling Air Blocking input Yes Weight 20 kg Case 4 U 19 Interface RS 485 7 General guidance before use 7 1 Unpacking of power supply For power supply unpacking it is necessary to open the top cover of a transport box after removing steel belts from a box and to take out the power supply The operational documentation and power cables are laid inside the transport box After unpacking power supply to check up completeness according to section 3 By external survey t
17. ge DC and pulsed current for the magnetron sputtering systems up to 5 kW which are used in the process of vacuum deposition of thin film coatings Operating conditions 1 Temperature of air from a minus 10 to plus 25 2 Relative humidity of air up to 95 96 at temperature plus 25 The power supply is made in a standard 19 inches case Can be used in a vacuum sputtering system as well as for scientific purposes in the study of vacuum discharges 3 Safety precaution Place the power supply only in closed rooms with controlled temperature and humidity Before turning on the power supply must be grounded through the terminal located at the back panel L For maintenance and repairs are not allowed contact with current carrying elements as on a power supply terminal block there is an alternating voltage 200 V and a output voltage amplitude up to 650 V Do not attempt to service this power supply yourself Please refer any service to the service centre Be sure to turn the unit off and disconnect the AC power cord before maintaining the unit 4 Package contents A delivery set includes Power supply APEL M 5PDC Connection cable for three phase mains 3 meters Output cable for the load supply 3 meters User manual Diagram manual 5 Operating principle The power supply is built according to the schematic of the resonant inverter which converts the voltage mains frequency in regulated output vol
18. hronization ON LED on stabilization by power Note LED is glow if byte value is equal zero Upper byte Ucur 4 Upper byte CRC 10 Lower byte Ucur 5 Lower Byte CRC 11 5 Register STATUS Byte number 0 Co 7 Run mode 0 DC mode 1 HF mode Not used Not used Locking 0 1 Not used Not used Not used Not used The power supply controller works correctly if 1 Port address is correctly defined 2 Checksum is correctly defined 3 Working address is 255 19 Value The power supply parameters realize by F6 function Table 6 F6 function Data Address Function Register Master 6 address Upper byte Byte number 1 3 Data Upper register Lower Register register always zero Byte number 5 6 7 Upper byte CRC 8 Register address Lower byte 4 Ta6n 7 Lower byte CRC 9 An equivalence between register address lower byte and register value is the next table Table 7 An equivalence between register address lower byte and register value Data Equivalence Not used 1 Register status quantized input 0 ON 1 OFF 2 Not used 3 Reset the timer 4 HF mode 5 Synchronization mode is turning off 6 Synchronization mode is turning on 7 DC mode 2 Register mode switcher 0 voltage stabilization 1 current stabilization 2 stabilization by power Setting value Setting value Setting value N O O W gt Se
19. in Table 1 Coupling parameters 3 Syren in eye In Element Control object Interface RS 485 Rate of exchange 19200 BPS Protocol Modified ModBus RTU Digit capacity 8 Bit binary number system Method of interaction Half duplex Communication Symbol table No parameters Number of stop bits 2 Data format 8 Mode of Parity check No Formatting check No Checksum Always available CRC Push OFF button and turn on power supply to check the port address If necessary you can change the actual port address using encoder For the saving a new address push OFF button one more time The power supply is controlled by remote PC with modified Modbus RTU protocol Actual protocol using two function F3 and F6 power supply address on default equal 1 Table 2 F3 function Data Address Function 3 Numbers of Upper byte Lower byte Slave 1 registers CRC CRC Byte number 1 2 3 4 5 F3 function can be read in the following form 18 Table 3 Inquiry answer F3 function Data Address Function Master 3 Byte number 1 2 Upper byte Lower byte Register lcur lcur LED 6 7 8 tabl 4 Numbers of registers 3 Register STATUS 9 tabl 5 Note Function F3 can be readied in 15 ms after last operation Table 4 Register LED Byte number NO NO LED current stabilization LED on voltage stabilization Value Output LED on stand by Ramp Not used F2 LED power supply ON LED power supply OFF LED sync
20. n DC mode is not available 00 00 min sec Timer The cursor indicates the parameter that will vary with the rotation of the encoder Moves by pressing the encoder 8 4 Sockets and slots arrangement Pic 4 Power supply back panel 8 appointment of the installation connectors and terminals POWER Automatic power switch ABC Terminals for the mains AC 3 phase N Neutral Terminals for the load RS 485 Connectors of remote control and blocking contacts connected in parallel Grounding 8 5 Power supply in use The power supply control can be performed locally or a from remote control via RS 485 9 Design Power supply APEL M 5PDC is design as a separate portable unit Elements of the unit s body are held together with screws Partial disassembly Unscrew 4 screws on the top cover unit Remove a bottom cover if it needs Assembly in the reverse order 10 Circuit scheme description 10 1 Force diagram description Annex B The power supply is connected to the 3 phase network through an automatic switch A1 When switching button A4 closes contactor K1 turn the electric supply on block A5 which feeds the fans control board and the controller The input capacitance ofthe inverter A7 begins to charge through a resistors R1 and R2 Then from the control board comes impulse to a drivers contactor A3 which switch on a contactor K2 Resistors a
21. nob for changing the output power source parameters Rotation Decrease increase the selected parameter Pressing Choosing a variable parameters 7 8 3 Information LCD display Information about the state of the power supply is reflected in two columns by 4 rows The left column is information about the set parameters of power source in the right column information about current settings Symbol Description Symbol Description Ur Ir 000 V A setting of the stabilized parameter for changing turn the encoder Depending on the selected mode of stabilization is reflected a setpoint voltage Ur current Ir or power Pr U 000 V Current value of the output voltage Mode DC Indicator of the working mode pulse mode with a low frequency or DC mode for changing turn the encoder If the power supply is in work a regime change is not possible I 0 00 A Current value of the output current In pulse mode is a value of an average current F 00 kHz A setting of the impulse repeat frequency in the pulse mode for changing turn the encoder If the power supply is in work a frequency change is also possible In DC mode is not available P 0 00 kW Current value of the output power In pulse mode is a value of an average power T 00 Duty cycle for changing turn the encoder If the power supply is in work a duty cycle change is also possible I
22. o be convinced of absence of defects and breakages At repeated packing PS together with power cables and the operational documentation are packed into a polyethylene film and are located in a transport box Amortizing materials in a transport box are pads and supplementary sheets from goffered cardboard or foam 7 2 Installation procedure It is necessary to make external survey e Completeness according to section 3 e Absence of visible mechanical damages e Presence and durability of fastening of control systems e Cleanliness of sockets connectors and plugs 7 3 Setting up procedures Before you begin carefully examine the technical description and operating instructions as well as get acquainted with the location and purpose of management and control on the front and rear of the unit Then to place the power supply at the desk and providing conditions for the natural ventilation Set Network switch on the back and switch on the front panel to the bottom position Set grounding on the device and connect AC 3 phase output cables Note a terminal is connected with the ground inside a case of the power supply 8 Operating procedure 8 1 Start up procedures Automatic main switch and power switch set at the up position it s should light up the LCD display and LEDs on the front Set using encoder the options and modes By REGULATION button choose a stabilization mode of voltage current or power 8 2 Arrangement and app
23. oblem Possible reason Suggested Solution LCD display works incorrect or Interference induction Check case grounding didn t work Power supply works only in DC Fault of output switch Replace output switch mode output voltage in impulse transistor transistor mode is similar DC mode There is no flick when the power 1 Contactor s driver works 1 Needs to check and supply switchs in impulse mode incorrect repair a drivers board 2 Open circuit 2 Search the open circuit 12 Maintenance Maintenance works are should be at least 1 time a year For the maintenance of a device during term of its operation needs to include following works a External survey of the device condition 1 Check a fastening of control and adjustment units 2 Check a completeness of the device 3 Check a condition of paint and galvanic coverings 16 b To survey an internal state of an assembly and a components is carried out after the warranty period A fastening of the units remove a dirt and corrosion Note The dust from the power supply is recommended to remove by the household vacuum cleaner 13 Storage regulation The power supply arrived to the customer for long storage contains in the transportation box in capital heated premises with the temperature of air from 5 to 300C at relative humidity up to 85 In premises for storage there should not be a dust steams of acids and alkalis causing corrosion At commissioning it is necessary to release the device
24. ointment of control and adjustment FUNCTION J lt Orr TURN TO SELECT TOSET Pic 2 Power supply control panel Control panel buttons function Output voltage on and off buttons After pressing the button On output voltage is applied After pressing the button Off output voltage is removed Timer control buttons TIMER START STOP Start stop timer TIMER RESET Timer reset Other buttons F1 Switch synchronization mode F2 Not used REGULATION Chose a stabilization mode by power current or voltage Note Activation of the button take place after release pressing followed by a LED indicator and a single sound signal LED indication Arc defense LED Lights when the magnetron discharge passes at arc shape or the current exceeds the maximum value of the magnetron RAMP Indicator of compliance with the current value of voltage current or power setpoint If the indicator blinks the discrepancy exceeds 10 which indicates the failure mode in chamber For example you set the mode at stabilization current value of 6A but this current is not achieved at the maximum output voltage 1000V LED of the chosen stabilization mode VOLTAGE Voltage CURRENT Current POWER Power Encoder Encoder control k
25. or the stabilization of voltage and current And a protection signal from the output switch to suspend an operation of the inverter Analogue controller A9 generates signals to digital controller providing interactive control with the remote A11 raising output parameters switching modes of operation and carries the indication 10 2 Control logic and drivers description Annex C Voltage stabilization schematic Voltage divider is installed at the output capacity which serves as a voltage sensor From low resistance part of the voltage divider is taking off a voltage 1 10V andis put the connector XT9 Nextisa divider arrangement for fine tuning the signal from the sensor voltage DA1 O1 DA5 consists of 2 operational amplifiers amp which function as input and output buffers for the opto coupler O1 following the documentation requirements for IL300 O1 is a linear optocoupler the input voltage is equal at its output Optocoupler is needed for galvanic isolation of circuit control board and power schemes Microcircuits power supply is galvanically isolated The output signal of the sensor voltage DA5 follows on the operational amplifier DA2 and on the controller board to convert and display as an values of output voltage through a repeater DA6 If the level will exceed 10 V the comparator DA11 will put 0 input circuits DD6 2 which turns off the inverter control At the input of the comparator 2 the reference voltage 10V
26. re shorted and the inverter is fed full voltage through a rectifier A2 Resistor R3 connected contactor K1 on a normally closed contact R3 is a discharge resistor for the capacitance of the inverter Inductance L1 and the input capacitance of the inverter input is a surge filter The inverter is a transistor bridge which converts the DC voltage at the input capacitances to the alternating sinusoidal inverter circuit in Appendix 2 1 Each part of the inverter is controlled by 2 channel driver A14 and A15 Annex 2 2 Transformer TR1 performs the function of electrical isolation but also increases the input voltage to the required level Choke L4 inductance of the resonant circuit Output switch A17 Annex 2 3 transfers energy to the output circuit and serves to protect the power supply from short circuits andto implementa pulsed mode Management by driver output switch A16 Annex 2 4 The output circuit consists of 2 chokes L2 and 13 switching between them can change the output inductor thereby adapting the source for the correct operating mode continuous or pulsed Switching occurs downstream contactor K3 which is controlled by the driver A12 Annex 2 5 The work of all blocks controlled by the control board A8 which gives atarget pulse to the inverter with a maximum frequency equal to the frequency of the resonant circuit and the output switch In addition this board receives and converts the feedback signal f
27. scheme description Controller schematic is in the annex 4 ATMEGA IQS Pic 5 Microcontroller Atmega128 Signal generation E 13 P rper 10k ELE PWMI 2 R53 2 18 Mad kn 45 lt 14 4 e s 25 pods 1 sy 298 4 8 PWM2 z sa T4608 Gn 1 888 cn rr E md PWM3 2 a oun mn Pic 6 Scheme of control signals formation for output switch Forming of the output switch control signals making by the chipCD74HC221E At the inputs and B is always 1 the output pulse occurs at the transition from 1 to 0 on the input A In the absence of signal PROTECT SWITCH formed an impulse low duration of about 10 ms Control signals are generated by the key of these pulses and the control signal PWM1 to the microcontroller which receives the input of the chip 74HCOO The received signals are sent to the input circuits 6N137 for their separation 12 An outputs of the digital socket 45v 5 7 wi NZ wa voa SI 2 voe 2 m2 m5 mn cum om om tary tnnt oma Pic 7 The chain of reference voltage Reference voltage reference voltage transferred from the microcontroller to the DAC Then the voltage is amplified and fed
28. t ofis a trigger 003 2 which serves to disable the inverter control pin 1 connector XT17 Through the intermediate cascades required for other parts of the scheme which will be described below includes a trigger DD3 2 If the trigger input 2 DD3 2 set to it means that its output will be a constant 0 An integrated circuit 21 DD4 1 will expose the constant on the output this means a ban on the passage of impulses from the DA8 Gate multivibrator DD1 1 is located after DD4 1 At the output of 5 and 12 are always 0 and 1 respectively It is included so that at the input 9 by changing from 1 to 0 5 is formed at the output of a single pulse of 0 to 1 the output 12 of the 1 to 0 duration determined by the RC chain of C16 R53 6us The output of the gate multivibrator is connected to the trigger DD3 1 which switches between an inverter control channels O3 O6 04 05 The maximum operating 10 frequency of the inverter is determined by the half frequency clock generator Control arranged through the optocouplers O3 O6 Current stabilization schematic 1 Stabilize the current scheme is similar to the voltage stabilization circuit For the current stabilization standard current probe is used which is powered from the control board by bipolar 15V and provides an output DC voltage of 1 10V to connector XT13 Next is a divider R20 R27for fine tuning the signal from the sensor voltage Immediately a
29. tage This device can work in stabilizing the voltage current or power response time of the arc control less that 0 5 microsecond Diode bridge Invertor Input circuit transformer Output switch Output circuit Control board analog Control board digital Control panel Pic 1 Block schem of APEL M 5PDC Input circuit commutes 3 phase voltage on the rectifier unit then handing power to the control units and cooling system The inclusion consist of two steps for smooth charging the input capacitance of the inverter through a rectifier The inverter is a transistor bridge which converts the DC voltage at the input capacitances to the AC sinusoidal This voltage is passed through a resonant circuit to step up transformer which acts as a galvanic isolation between input and output source Output switch transfers energy to the output circuit and serves to protectthe power supply from short circuits arcs as well as to implement a pulsed mode The output circuit consists of 2 throttles switching between them can change the output inductance therefore adapting the source for the correct operating mode continuous or pulsed The operation of all units controlled by the control board which is served by Target pulse to the inverter with a maximum frequency equal to the frequency of the resonant circuit and the output key In addition this board receives and converts the feedback signal for stabilizing the volta
30. to the input of the control board Uref Iref Output meterage of current and voltage from the control board receives two signals from current and voltage sensors Ucur Icur Which are served through dividers to the controller and displayed on the LCD Pic 8 Scheme of reference voltages formation and receiving voltage and current data Power supply control source control and data transfer to PC via RS 485 interface by using chip MAX1480 13 Pic 9 The scheme of organization and management interface RS485 Circuits mode is determined by state input and control signals Outputs A and B of a chip included by setting 1 If outputs are enabled the device acts as a transmitter If on the contrary then the receiver Survey of button on the front panel implement by the controller through an expander Each button is accompanied by sound signals Pic 10 Wiring diagram for control panel buttons encoders and buzzer The source control is implemented by encoder rotation which changes supports the current voltage or power and switch an operation modes of the source pulsed and DC Current Data on LCD Data transfer via the LCD chip 74HC244 14 Blocking Pic 11 Wiring diagram of the LCD display Pic 12 Scheme of blocking arrangement Blocking is required to interrupt operation of the source in case of emergency situations related to termination of water supply to the magnetron hot items etc
31. tting value Checksum function complies with ModBus RTU standart An example calculation is given below CRC cyclic redundance check only RTU mode unsigned int mbfCRC int cnt unsigned char volatile int Lj unsigned f mbCRC OxFFFF for i 0 i lt cnt i mbCRC mbCRC buf i for 1 j lt 8 j f mbCRC amp 0x0001 20 buf Setting value voltage 100 650 100 650 V current 10 80 1 8A Power 5 50 0 5 5 kWt frequency 1 50 1 50kHz time of the impulse 10 80 10 80 mbCRC mbCRC gt gt 1 if f mbCRC mbCRC 001 f mbCRC gt gt 8 mbCRC mbCRC lt lt 8 f return mbCRC 21 Reverse byte order Annex B Force diagram 95 XT2 OUT OUT 105 FAN2 104 105 1 gt 104 RXD
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