"user manual"
Contents
1. DB15 Pins CS Figure 2 19 Illustration of Connecting Power for 24V 24 42 Power Scurce 008 2 508 15 008 3 008 1 008 8 008 8 008 16 008 16 Cable 18 47 008 175 208 8 008 16 D08 1GM 208 28 008 38 Cable 20 49 005 28 208 38 208 3 208 4 208 48 DO8 2t DOS 3E DOB 4E To Switch Power of User 85232 85485 Converter E cene 0815 Pins CS DBS Pins CS CS Line 53 Line 53 Line 53 Figure 2 20 Illustration of Connecting CS Products Sevenstar manufactures all standard cables RS485 adaptor customized cables and some accessories For more details contact Sevenstar or its local agent 2 5 Checking Before Operation Before operating the MFC the following checks should be completed 25 42 2 5 1 Check that tubing is leak free 2 5 2 Check the process sequence and proper function of all other gas components involved 2 5 3 Check the voltage of command signals and power supply to the MFC MFM 2 5 4 Check that the appropriate type of gas is being supplied at the rated pressure 2 5 5 Warm up MFC MFM for 20 minutes and then check the zero level output 2 5 6 Use dry inert gas for test runs 2 5 7 Before using the MFC for extremely corrosive gases purge MFC with a dry inert gas for one hour SECTION3 FUNCTIONS 3 1 General Based on new sensor driver technology zero balance technology and VCP technology CS3 MFC MFM presents high performance and reliability An2. 235 F S 0 35 F S lt 35 5 0 5 F S 40 2 F S lt 15 standard 0 05 0 35MPa FLOWS10SLM 0 05 0 35MPa FLOWS10SLM 0 15 0 35MPa 10SLM lt FLOWs30SLM 0 02 Mpa 0 15 0 35MPa 10SLM FLOWs30SLM lt 0 02MPa 0 25 0 35MPa 30SLM lt FLOW lt 50SLM 0 25 0 35MPa 30SLM lt FLOW lt 50SLM Zero lt 0 05 F S C Span lt 0 1 F S C FLOW lt 30SLM Span lt 0 2 F S C 30SLM lt FLOW Max 3 5MPa 435pisg 1x10 Pa m3 sec He Seal Operation RE Temperature Digital RS485 or DeviceNet Digital RS485 or DeviceNet on Analog 0 5 VDC Analog 0 5 VDC Input Signal Output Signal Power Supply Fittings Electronic Connector Weight VCR1 4 M Compression Fittingc10 Compression Fitting 3 8 Compression Fitting 1 8 6 inner x1hose Digital RS485 or DeviceNet Analog 0 5 VDC lt 0 6 F S per year without autozero 8 16 VDC bipolar or 14 28 VDC unipolar Surface P vco1 4 M Compression Fitting 6 Compression Fitting1 4 Compression Fitting 3 5 1 5 c4 inner x1hose 9 pin male sub D 15 pin male sub D DeviceNet male 08g T 7 42 NotesA MFC MFM is calibrated by as a standard gas Units SCCM Standard Cubic Centimeter Min SLM Standard Liter Min Standard Situation Tem 273 15 0 Air Pressure 101325 760mm For Sevenstar MFC MFM the unit of SCCM is identical to mL
3. from 100 tol00 F S Please refer to Digital MFC Communication User Manual for more details 3 9 Total Flow Accumulator The Total Flow accumulator will record the amount of gas in SCC that has been delivered by CS3 MFC MFM The amount of purge will not be accumulated in the total flow amount For example the total reading is 3000 means the amount of gas delivered by MFC is 3000SCC Please refer to Digital MFC Communication User Manual for more details 3 10 Alarm The CS3 MFC MFM will monitor and store certain abnormal conditions as 28 42 described below These conditions can be read and reset from the RS485 interface Provisions will be made for masking disabling the alarms or warnings on an individual basis Warning and Alarms Sensor Zero Drift EEPROM Failure Valve Coil Failure Temperature Alarm After power up the LED on the top of the CS3 MFC MFM is turned GREEN A warning condition will be announced by a blinking RED Whenever an alarm condition is detected it will be set continuously to RED Please refer to Digital MFC Communication User Manual for more details 3 11 LED There is a green red LED located on the top of the MFC The constant green LED indicates the power on Green blinking indicates that the MFC is zeroing A blinking red LED indicates warning condition Constant red indicates error condition In DeviceNet connection there will be 2 LED on the top of 53
4. t 9 9 9 Iw errr t Type A Elastomer type 1 5 Ra 25 u inch C Metal type 1 5 Ra 5 u inch D Metal type 1 5 Ra 25 v inch 0 9 9 Gas Standard SEMI52 0302 For example 013 N2 000 Mixture Gases please consult d for details iv Type of Valve 4 O Normally open Normally closed N No Valve w Function of Pressure Compensation 4 P With the function of pressure compensation available to type C D only and unavailable to MFM W Without the function of pressure compensation r r r r Full Scale g 001C 1SCCM Minimum 001C 1SCCM available to type C D only 002C 2SCCM available to type C D only 003C 3SCCM available to type C D only 005C 5SCCM 010C 10SCCM 020C 20SCCM 030C 30SCCM 050C 50SCCM 100C 100 200C 200SCCM 300C 300SCCM 500C 500SCCM 001L 1SLM 002L 2SLM 003L 3SLM 005L 5SLM 010L 10SLM 0200 20SLM a s d 38 42 0301 30SLM 0504 50SLM available to type A only 000C customized Full scale please consult d for details Electronic connector R DB 9 pin D DB15 pin DeviceNet connector Fittings AA Compression Fitting 3mm available to type A only and FLOW lt 5SLM GG Compression Fitting 6mm available to type
5. 2 3 5 10 20 30 SLM 1 0 S P 235 F S 0 80 S P 230 F S optional 0 35 F S lt 35 F S 0 24 F S lt 30 F S optional Linearity 0 5 F S Repeatability 0 2 F S lt 0 8 sec standard Differential 0 05 0 35MPa Flowx 10slm 0 05 0 35MPa Flowx 10slm 0 02 Mpa 0 02 Pressure 0 15 0 35MPa Flow 10slm 0 15 0 35MPa Flow gt 10slm Temperature Coefficient Max Pressure 3 5MPa 435pisg Accuracy Zero lt 0 02 5 Span 0 0596 F S C Leak 1x10 Pa m3 sec He integrity Seal Operati perauon 0 50 C Temperature Digital 5485 or DeviceNet Digital RS485 or DeviceNet Input Signal N A N A Analog 0 5 VDC Analog 0 5 VDC Output Digital RS485 or DeviceNet Signal Analog 0 5 VDC Zero Drift lt 0 6 F S per year without autozero Power Supply 8 16 VDC bipolar or 14 28 VDC unipolar Surface Finish Ra 25 y inch VCR 1 4 M 1 5 B 1 125 C Type 15 C 1 257 W Typs Electronic 9 pin male sub D 15 pin male sub D DeviceNet male Connector Fittings 6 42 CS310A CS320A Valve Type Normally Closed or Normally Open Normally Closed or Normally Open Full scale range Accuracy Repeatability Response Time Differential Pressure Temperature Coefficient 0 5 10 20 30 50 100 200 300 500 SCCM 0 1 2 3 5 10 20 30 50 SLM 1 0 S P
6. 2400 DENSITY g l 0 1 2930 CONVERSION FACTOR 1 001 004 0 1250 1 7837 1 420 035 0 1168 3 4780 0 673 079 070 0 0647 0 1217 11 1800 5 2270 0 378 0 450 048 0 1779 3 0250 0 508 058 0 5020 1 2350 0 441 101 0 1297 6 8600 0 306 063 0 1659 3 9636 0 420 028 0 5318 0 7150 0 722 042 0 4049 1 1620 0 596 038 0 3658 1 2510 0 597 054 0 4241 1 3420 0 482 068 0 3633 1 7870 0 421 069 089 0 3659 0 3990 1 8770 1 9670 0 411 0 358 093 0 3515 2 4130 0 322 104 0 3723 2 5030 0 299 117 0 4040 2 6500 0 261 240 0 3916 3 2190 0 217 176 0 3277 1 4300 0 584 136 0 3398 2 0550 0 392 112 0 1654 5 9500 0 278 009 0 2488 1 2500 1 000 025 0 2017 1 9640 0 793 059 0 2608 2 3220 0 451 019 014 018 0 1145 1 7325 0 1970 3 1630 0 1798 1 6950 0 858 0 997 0 931 113 0 1072 9 5650 0 267 41 42 GAS CODE 52 0302 043 Cal g C 0 1405 DENSITY g 10 C 3 4180 CONVERSION FACTOR 0 570 007 3 4224 0 0899 1 010 PCI PF POCI SiCl SiF SiH
7. 3mm available to type A only and FLOW lt 5SLM GG Compression Fitting 6mm available to type A only JJ Compression Fitting 10mm available to type A only BB Compression Fitting 1 8 available to type A only and FLOW lt 5SLM CC Compression Fitting 1 4 available to type A only HH Compression Fitting 3 8 available to type A only 1 4 male Fitting UU VCO 1 4 male Fitting available to type A only SC IGS C seal available to type C D only SW IGS w seal available to type C D only RR 6 inner x1hose available to type A only VV q5 inner x1 5hose available to type A only 4 inner x1hose available to type A only XX customized fittings please consult d for details is Seal Materials V Viton available to type A only Metal available to type C D only d Description 36 42 Take CS310C013CP500CDMMMS as the example CS310 C 013 Model CS310 4 Type Metal type IO lu 500C Io E In Gas No Valve Type Normally closed Function of Pressure Compenasation With the Function Full Range 50 0SCCM Electronic connector DB15 Fittings 1 4 Seal material 316L Customized requiremen For example Customized requirement In Chinese Differential pressure 0 3 0 5 MPa customized fittings customized calibration temperature 40 C 37 42 Appendix 5320 Selection Guide CS320
8. min 0 1atm and the unit of SLM is identical to L min 0 C 1atm ES Full Scale 1 6 Calibration Features Normally CS3LIL MFC MFM is calibrated according to customer s requirements the requirements should be accorded with the specification Without customer s information the MFC is calibrated under standard conditions 1 6 1 Standard conditions Without special conditions specified by the customer the is calibrated under the following standard conditions Pressure Outlet Atmospheric Normally gas mass flow rate is transferred to gas volume flow rate at standard state Mass flow rate unit SCCM Standard cubic centimeter per minute SLM standard liter per minute Standard state Temperature 0 C 273 15K Pressure 101325 760mmHg At standard state the gas density will be constant The multiplication of density and volume flow rate is equal to the mass flow rate Therefore at the standard state the volume 8 42 flow rate will represent mass flow rate 1 6 2 Manufacturing Environment The CS3LIL MFC MFM is assembled in a class 100 clean room calibrated packaged and controlled in class 1000 environment The calibration temperature is 2332 1 6 3 Precision Adjustment CS3LILIMFC MFM is burned for 24 hours after manufacturing The accuracy the dynamic response the stability to pressure variations are double checked Only qualified product could be sent to custome
9. regulated by an accurate pressure regulator to prevent gas flow oscillation c Electrical connection requirements are as follows 33 42 The system must be wired carefully non observance of the pin out may irreversibly damage the electronic board inside the MFC in which case the warranty will be invalidated d Gas connections The fittings must be handled carefully Sevenstar guarantees that all fittings have been individually inspected and are scratch free e Fitting procedure The fitting procedure set out in the manual must be followed meticulously Specifically the purge procedure is very important if corrosive gases or toxic gases are used f The mass flow must not be dismounted The MFC warranty will be invalidated if the seal between the MFC block and cover is torn 6 3 Services Sevenstar can provide services like start up service software development gas system design training etc Please visit www mfcsevenstar cn for more information and find your nearest service and calibration centre 6 4 Disclaimer Beijing Sevenstar Electronics Co Ltd is not responsible for loss as following situation Nature disaster and calamity Unsuitable operation and unreasonable usage Operating and storing in inappropriate or execrable circumstance Usage of instrument beyond user s manual 5 Unauthorized change or replacement of product For example It is whether that gas path is not cleared before using corrodible gas or MFC
10. 00 refer to CS200MFC CS220 DnetSpecification V1 01 for more details AttentionA When the Valve of MFC is posited on PURGE it can be functioned as a MFM In that case the maximum flow testing voltage could reach beyond 10V please be careful while flow is beyond F S 5V Full Scale the real flow will have no linearity corresponding with flow testing voltage While it s purging flow display will be inaccurate even showing reduce while the real flow is enhanced please be sure it ll be no damaged to device itself 29 42 SECTION 4 MAINTENANCE 4 1 General No routine maintenance is required to be performed on the MFM or MFC Other than occasional cleaning and re calibration It can be used about 3 or 4 years with an ultra clean and non corrosive gas It can be used about 1 or 2 years with a low purity gas or a corrosive gas For any other problems contact Sevenstar 4 2 CautionA 4 2 1 Medium Forbidden The gas should be purified without dust liquid and oil stain If necessary the filter should be added to gas system for purification If the outlet of 15 connected to liquid sources a One way valve should be added to avoid the liquid back to destroy MFC AttentionA For the cases that the MFC MFM used with toxic pyrophoric flammable or corrosive gas you should ensure that the fixing and fitting are airtight It becomes necessary to remove the controller from the system purge the controller thoroughl
11. 4 81 1 0 1588 0 14890 8 4650 13 2900 5 8580 42 42 Sevenstar Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co Ltd CS Series Mass Flow Controller Beijing Sevenstar Electronics Co Ltd Mass Flow Meter Subsidiary Co Ltd Address No 1 East Rd Chaoyang District Beijing China P O BOX 342741 Beijing China Post code 100015 Tel 86 10 64361831 ext 8527 Fax 86 10 64362923 Homepage www mfcsevenstar cn E Mail mfcsales sevenstar com cn Shanghai Office Rm 722 Bldg 29 No 368 Zhangjiang Rd Pudong New Area Shanghai China Tel 86 21 63532370 Fax 86 21 63533265 Shenzhen Office Room 712 Section Qiche Tower No 45 Zhenhua Road Futian District Shenzhen China Zip code 518031 Tel 86 755 88290258 Fax 86 755 88294770 Description may be changed following improvements to product The information contained in this document is subject to change without notice If there is any mistake in this uses manual please feel free to contact us 2010 Beijing Sevenstar Electronics Co Ltd
12. A only JJ Compression Fitting 10mm available to type A only BB Compression Fitting 1 8 available to type A only and FLOW lt 5SLM CC Compression Fitting 1 4 available to type A only HH Compression Fitting 3 8 available to type A only MM VCR 1 4 male Fitting UU VCO 1 4 male Fitting available to type A only SB IGS B seal available to type C D only SC IGS C seal available to type C D only SW IGS w seal available to type C D only RR 6 inner x1hose available to type A only VV q5 inner x1 5hose available to type A only 4 inner x1hose available to type A only XX customized fittings please consult d for details is Seal Materials V Viton available to type A only Metal available to type C D only d Description 39 42 Take CS320C013CP500CDMMMS as the example CS320 C 013 Model CS320 Type Metal type IO 500C lo In Gas No Valve Type Normally closed Function of Pressure Compenasation With the Function Full Range 50 0SCCM Electronic connector DB15 Fittings 1 4 VCR Seal material 316L Customized requiremen For example Customized requirement In Chinese Differential pressure 0 3 0 5 MPa customized fittings customized calibration temperature 40 C 40 42 APPENDIX CONVERSION FACTOR GAS CODE 52 0302 008 Cal g C 0
13. C PCB problems Attention Mark indicates that repair and adjustment must be dealt under specialist advices For any other problems contact Sevenstar SECTION 6 WARRANTY AND SERVICES 6 1 Guarantee of Sevenstar Sevenstar and its authorized distributors assure that there are not flaws in the materials and quality of products within 12 months from the date of purchase The compensation for customer is only limited to invalid part for substitution installation and processing flaw It is guaranteed that all parts chosen by customers are suitable to relative manufacturer Other relative statements guarantee and obligation of status and usage of product whether direct or indirect are definite to be excluded In any circumstance Sevenstar is not charged of any obligation of direct or indirect loss for customers or others 6 2 Product Warranty 6 2 1 Sevenstar products are guaranteed against defects in materials and workmanship if used in accordance with specifications and not subject to physical damage contamination alteration or retrofit Warranty periods One year 6 2 2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax phone or e mail as soon as possible after accepting the goods 6 2 3 During the warranty period products must only be repaired by authorized Sevenstar 32 42 service centers otherwise the Sevenstar product warranty will be invalidated 6 2 4 Repairs will be fre
14. REV 3 3 CS Family User s Manual SECTION1 INTRODUCTION 1 1 Declaration I2 Attention ioc ee Debes 1 3 The notice of safety General rn etes 1 5 Specification 1 6 Calibration features SECTION 2 INSTALLATION 2 1 General 22 Unpacking res 2 3 Mechanical Installation i 2 3 General bee Ob PE 2 3 2 Installation 2 3 2 1 1 AVCR Installation 2 3 2 2 Two ferrule Connector Installation 2 3 2 3 IGS Connector Installation 2 4 Electrical Installation DAV Genet ales oor en 2 4 2 Connections 2 4 3 Table of 2 5 Checking Before Operation SECTION3 FUNCTIONS 3 1 General 32 Control Mode TO Contents 3 4 Soft Start 27 1 3 5 E 27 2 3 6 Valve Command Mode 27 2 3 7 Valve 27 3 3 8 Multi Gas and Multi Flow 28 5 3 9 Total Flow Accumulator 28 8 3 10 Alarm 28 uiia nhe D
15. d more digital functions are developed in CS3 products 3 2 Control Mode 5300 MFC MFM is available for digital and 0 5V analog control mode When customer chooses one of the two control modes another will be blocked The analog output and digital output are sent out all the time Please refer to Digital MFC Communication User Manual for more details 3 3 Zero The Zero function can be commanded through the digital interface or zero button 26 42 Before zero please make sure that no gas flow through Then zero through the digital interface or zero button The zero button must be pressed continuously for 0 5 seconds in order to start zero process The green LED will blink during the zero process After zero finished the green LED will be on constantly 3 4 Soft Start The CS3 MFC MFM supports soft start function Soft start allows customer change the setting of MFC with definite rate Please refer to Digital MFC Communication User Manual for more details 3 5 Delay Delay is used to postpone the start of flow from zero to Setpoint It is programmed in millisecond but the MFC internally rounds up any value to 100ms For example when the delay value is 200 MFC will delay 200ms then receiving the operate command When the Setpoint is less than the minimum control rate the valve will shut off and when larger than the minimum control rate MFC will start after the set delay time Special
16. dding the electric connector 2 3 2 Installation Place MFC MFM according to the flow direction 2 3 2 1 1 4VCR Connection Refer to figure 2 8 and figure 2 9 Check the gland to gland space including the gaskets Remove the plastic gland caps When using loose VCR original style gaskets inserting the gasket into the female nut For VCR retainer gaskets snap the gasket onto the male coupling Tighten the nuts finger tight Scribe both nut and body in order to mark the position of the nut While holding the body with a wrench tighten the nut 1 8 turn past finger tight for 316L stainless steel and nickel gaskets Figure 2 9 VCR retainer gasket 19 42 2 3 2 2 Two ferrule Compression Fitting Connection Refer to figure 2 10 Check the gland to gland space Remove the gland protector caps Insert the tubing to the shoulder inside the fitting and check that the ferrules are positioned as shown in figure2 10 Tighten the nuts finger tight Use two spanners one spanner locking the fitting stable wrench another one to tighten in 1 25 turns to prove it s not blow by after installing the front ferrule back ferrule and nut Gland Nut Back ferrule Front ferrule Fitting Figure 2 10 Compression Fitting Connector Installation AttentionA When installing the fitting you should manually use spanner to wrench it tighten by 1 2 turn pulling up imported Compression Fitting should use spanner to be tighten in 1 25 turns to prov
17. default Values from 1 to 49 ms will be programmed as 100ms 3 6 Valve Command Mode 5300 MFC MFM is available for valve close or valve open by input digital signal or analog voltage directly The Valve Command Mode is used to select one of three ways to interpret the analog signal of Valve Command Please refer to Digital MFC Communication User Manual for more details 3 7 Valve Type cs300 has two types of valve Normally open NO or Normally closed 27 42 NC When does not have power supply the type valve will open the type valve will shut down Please mention the valve type when you order the MFC 3 8 Multi Gas and Multi Range The multi gas and multi range technology has been developed in the CS3LILI series MFC MFM Customer can change gas convert factor full scale of MFC via digital interface Full scale of CS3 MFC MFM can be re ranged from 30 to 110 F S For example an MFC with 100SCCM full scale the new full scale can be re ranged between from 30SCCM to 110SCCM 5300 MFC MFM support customer offset by the target null value The target null value is a customer programmed constant used to offset the flow output independently of all other sensor offset constants including the zero process For example set Target Null Value 20 F S then when no flow through MFC MFM the reading will be 20 5 With gas flow 20 F S through MFC MFM the reading will be O F S Offset range 15
18. e its not blow by after your installing the front ferrule back ferrule and nut Please note you should use two spanners to operating one spanner for locking the fitting stable and another one for revolving the nut Especially when you dismantle the tube you should operate by the two spanners otherwise fitting will become flexible which will affect its airproof function 20 42 2 3 2 3 IGS fitting installation Refer to figure 2 11 To select the correct seal according to type of IGS fitting W Type or C Type which is put in IGS fitting and fix it on gas line of MFC by screw with 5N mm IGS fitting AS Screw Figure 2 11 IGS fitting Installation 2 4 Electrical Installation 2 4 1 General With simple switching power supply CS3 MFC MFM is available for 8 to 16 VDC dual ending or 14 to 28 VDC single ending Customer can choose as need Customer can choose 9 pin male Sub D or 15 pin male sub D connector 9 pin male Sub D connector is the SEMI Standard compatible only 0 5V analog signal control and 21 42 output available CS3LIL MFC MFM can communicate with PC via RS485 or DeviceNet 2 4 2 Connections 9 pin male Sub D connector 15 pin male sub D connector RS485 connector DeviceNet connector and RS232 RS485 connector are shown in figure2 12 figure2 13 figure2 14 figure 2 15 and figure 2 16 AttentionA Although sharing with the same ap
19. e of charge during the one year warranty period If MFC is out of warranty Sevenstar will notify the owner of replacement or repair costs before proceeding Factory service and repairs are guaranteed 90 days The warranty excludes consumable materials and wear parts in teflon viton etc 6 2 5 No MFC will be accepted for repair or warranty without a decontamination and purge certificate 6 2 6 Each MFC is individually checked visual inspection of fittings helium leak test and flow calibration Sevenstar shall not be responsible for any damage caused by gas leakage or the use of a dangerous gas Users are responsible for following the safety rules applicable to each gas they use Improper use of a Sevenstar MFC will void the warranty and MFC that have been damaged as a result of improper use will not be replaced by Sevenstar 6 2 7 Specific warranty requirements are as follows a Gas must be clean and particle free which means a filter must be fitted in the gas line upstream of the MFC b Gas must comply with the following pressure specifications 1 Gas pressure must never exceed 3MPa 2 Differential pressure must be more than 0 05MPa for full scale flow through the MFC valve unless another value is specified in the user s manual 3 Differential pressure must be less than 0 35MPa for the MFC valve to regulate without gas flow oscillation unless another value is specified in the user s manual 4 Pressure at the mass flow inlet must be
20. earching etc The typical applications include microelectronic process equipment such as diffusion oxidation epitaxy CVD plasma etching sputtering ion implantation vacuum deposition equipment optical fiber melting micro reaction equipment mixing amp matching gas system capillary flow control system gas chromatograph and other analytical instruments The CS3LIL MFC MFM is the latest generation digital MFC of Sevenstar for 3 42 semiconductor applications and industrial applications where high accuracy and flexibility in interfacing are required The CS3LIL MFC MFM incorporates pressure compensation standard IGS fitting a dual interface voltage as well as RS 485 and DeviceNet digital interfaces It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring CS3 MFC MFM supports wide range of power supply available for 8 16 VDC 14 28 VDC In addition auto alarm multi gas and multi range are available through the digital interface Customer Development of control software information sample software and example source code are available in the product accessories 5300 default configuration MAC Address 32 RS 485 baud rate 19200 Control Mode 0 5V analog control For more information Please refer to Digital MFC Communication User Manual in the disc 4 42 1 5 Specification CS3 C Type CS310C CS320C Valve Type No
21. h to hut 29 9 SECTION 4 MAINTENANCE 9 meal 30 10 4 2 Caution 30 10 4 2 1 Medium Forbidden 30 19 4 2 2 Seal of Valves eiie nter 30 19 SECTION 5 TROUBLESHOOTING 20 5 1 Initial check 31 21 5 2 Troubleshooting 31 21 SECTION 6 WARRANTY AND SERVICES 21 6 1 Guarantee of Sevenstar 32 22 6 2 Product 32 23 6 3 Services dE UR 34 25 6 4 34 APPENDIX 35 26 APPENDIX II 38 26 APPENDIX ed ee 41 User s Manual SECTION 1 NTRODUCTION 1 1 Declaration The copy right of The user s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Electronics Co Ltd following abbr Sevenstar which is not allowed to duplicate store and distribute any part of this manual in mean of electric mechanical photocopy recording or other way without permission of Sevenstar This manual is not assured that there is no mistake and missing in which have been corrected strictly and the publisher is under no obligation to the mistake or missing meanwhile the publisher is not in charge of any loss that this manual leads to Beijing Seven
22. he instrument 15 installed e Please abide by proper steps of purging Product should be purged and handled with gloves f Do not use the instrument in explosive environment Do not use the instrument in explosive environment unless the safety certificate is 2 42 5 i available Please use proper fittings and keep the rules fittings of instrument must be matched according to the listing in manual Please read manual carefully before screwing tightly Please do leakage check Please check carefully all of vacuum parts and make sure that there is not leakage in the system Please make sure that instrument is working under safe pressure Please make sure that the pressure of inlet gas is less than maximum working pressure referring to maximum working pressure in manual Please keep the whole system away from pollution When system running do not use polluting gas such as particle of dust dirt fibre glass or scrap iron Please do warm up instrument before working Please do warm up instrument especially in using dangerous gas Please close valve completely to make sure that there is not error flow 1 4 General Mass flow controller MFC accurately measures and controls mass flow rates which is widely applied in the fields as semiconductor and IC fabrication special materials science chemical industry petrolic industry pharmaceutical industry environmental protecting and vacuum system res
23. is contaminated or blocked by particle such as dust 34 42 Appendix CS310 Selection Guide CS310 t t Tvpe A Elastomer type 1 125 Ra 25 inch C Metal type 1 125 Ra 5 u inch D Metal type 1 125 Ra 25 n inch 0 9 9 Gas Standard SEMI52 0302 For example 013 N2 9 9 9 000 Mixture Gases please consult d for details v Type of Valve O Normally open Normally closed N Valve w w Function of Pressure Compensation 4 P With the function of pressure compensation available to type C D only and unavailable to MFM W Without the function of pressure compensation Lrrr FulScale g 001C 1SCCM Minimum 001C 1SCCM available to type C D only 002C 2SCCM available to type C D only 003C 3SCCM available to type C D only 005C 5SCCM 010C 10SCCM 020C 20SCCM 030C 30SCCM 050C 50SCCM 100C 100SCCM 200C 200SCCM 300C 300SCCM 500C 500SCCM 001L 1SLM 002L 2SLM 003L 3SLM 005L 5SLM 010L 10SLM 020L 20SLM 030L 30SLM r r r r a f f s d 35 42 0504 50SLM available to type A only 000C customized Full scale please consult d for details a Electronic connector d cu C E Y DB 9 pin D 0815 pin DeviceNet connector ff Fittings AA Compression Fitting
24. pearance of CS3LILI MFC the 0 5V Setpoint Input and the valve Over ride of 53 00 MFM are not available That means pin1 and pin6 of D sub 9 figure 2 12 and pin1 pin7 pin8 and pin12 of D sub 15 figure 2 13 in MFM not available Setpoint Ret S GND KK 0 SV Flow Signal Output 0 5 Setpoint Input __SV Flow Out Ret C SV SP Flow Out Ret Valve Over ride P S GND 15V 24V option 5 SP Flow Out Ret 15V with 15V only EGND 0 5V Setpoint Input Figure 2 12 9 pin male D sub connector Figure 2 13 15 pin male D sub connector 2 1 1 Signal Common 1 Drain 3 B 2 V 123456 4 h 5 5 3 4 Figure 2 14 RS485 Figure 2 15 DeviceNet Figure 2 16 RS232 RS485 22 42 2 4 3 Table of Cable and its Illustration of Connection D08 2B 3B 4B 2E 3E 4E D08 1 2 4 2F 3F 4F D08 1F 1FM 1FS 8C 8CM 1G 1 GM To Serial Port of Computer To USB of Computer MFC DB15 Pin QCX 19 QCX P19 QCX 48 QCX 17 QCX P17 QCX 46 QCX 34 QCX 50 MFC DB9 pin QCX 20 QCX P20 QCX 49 QCX 18 QCX P18 QCX 47 Table 2 2 Table of Cable 85232 85485 pc c t Serial Port converter DB 15 Pins CS Figure 2 17 Illustration of Connecting Power D08 1D 1F QCX 34 QCX 50 23 42 Power 15 DBS Pins CS Figure 2 18 Illustration of Connecting Power for 15V Power 24V Gas supply
25. rmally Closed or Normally Open Normally Closed or Normally Open Full scale 0 1 2 3 5 10 20 30 50 100 200 300 500 SCCM range 0 1 2 3 5 10 20 30 SLM 1 0 S P 235 F S 0 80 S P 30 F S optional 0 35 F S lt 35 F S 0 24 F S lt 30 F S optional Linearity 0 5 F S Repeatability 0 2 F S PR lt 0 8 sec standard ime Differential 0 05 0 35MPa_ Flow lt 10sim mom 0 05 0 35MPa Flow 10slm mm Pressure 0 15 0 35MPa Flow 10slm 3 0 15 0 35MPa Flow 10slm Temperature Accuracy i Zero lt 0 02 5 Span 0 0596 F S C Coefficient Max 7 3 5MPa 435 9 Leak 1x10 Pa m3 sec He integrity Seal Operation 0 50 Temperature Digital RS485 or DeviceNet Digital RS485 or DeviceNet Input Signal N A N A Analog 0 5 VDC Analog 0 5 VDC Output Digital RS485 or DeviceNet Signal Analog 0 5 VDC lt 0 6 F S per year without autozero Power Supply 8 16 VDC bipolar 14 28 VDC unipolar Surface Cr Fe ratio 2 0 CrO thickness gt 20 Angstroms Chemistry Surface Finish Ra 5 inch VCR1 4 M Fittings 1 125 C Type 1 125 W Type Electronic 9 pin male sub D 15 pin male sub D DeviceNet male Connector Weight 0 8kg 1 2kg 5 42 CS3 D Type CS310D CS320D XS NAA Full scale 0 1 2 3 5 10 20 30 50 100 200 300 500 SCCM range N2 0 1
26. rom shock or vibration The dimensions of the product are shown in figure2 1 figure2 2 figure2 3 figure2 4 and figure2 5 Do not remove the protective end caps of the fittings until installation 10 42 127 20 PRESSURE3 5 MPa FLOW 25 40 S N OQCS31000001 Figure 2 1 CS310C D 1 125 168 11 42 MAX PRESSURE 3 6 MPa FLOW i 28 60 Figure 2 2 CS310C D 1 125 DeviceNet 12 42 Figure 2 3 CS310C D 1 125 1 AVCR Fitting 13 42 PRESSURE 3 5 MPa FLOW S N 0MCS31C00001 Figure 2 4 CS310A 1 125 Product dimensions with different fittings 14 42 Compression Fitting 6 Fitting Compression Fittingl 4 Compression Fitting 1 8 Compression Fitting 10 Compression Fitting3 8 4 inner x1hose 14 M VCOI 4 M Length Compression Fitting 3 Selnner 5 inner x1 5hose L mm 112 8 116 6 117 6 124 Table 2 1 The length of the product with different fittings 15 42 2 M4 Depth 5 42 Figure 2 5 CS320A 1 5 Product dimensions with different fittings 16 42 Figure 2 6 CS320C D 1 5 IGS 17 42 Figure 2 7 CS320C D 1 5 DeviceNet 18 42 AttentionA The height which is shown in figure 2 1 figure 2 3 figure 2 4 figure 2 5 and figure 2 6 of 127 20mm are height without electric connectors of cable It should be added around 50mm more after a
27. rs SECTION2 INSTALLATION 2 1 General WARNING Toxic corrosive or explosive gases must be handled with extreme care After installing the MFC the system should be thoroughly checked to ensure it is leak free Purge the MFC with a dry inert gas for one hour before using corrosive gases IMPORTANT When installing the MFC ensure that the arrow on the back of the unit in the same direction as the gas flow 2 2 Unpacking The CS3 MFC MFM is assembled calibrated and packaged under clean room conditions These products are packaged with two separately sealed plastic bags The outside is common plastic bag and the inside is clean vacuum bag The outside bag should be removed in the entrance to the clean room In order to minimize the contamination the 9 42 second clean bag should be removed in the clean room when installed in the system 2 3 Mechanical Installation 2 3 1 General Most applications will require a positive shutoff valve in line with the MFC Pressurized gas trapped between the two devices can cause purge effects and consideration must be given to the sitting of the shutoff valve upstream or downstream in relation to the process sequencing It is recommended to install an in line filter upstream to the controller in order to prevent MFC from contamination CS3LIL should be mounted in the position accord with the requirement in the purchase order The gas should be clean and dry The mounting should be free f
28. star Electronics Co Ltd 1 42 1 2 Attention Dear customer thanks for using CS mass flow controller and mass flow meter This manual describes in detail important issues about correct and safe operations of the product User of the product should read and comprehend this manual and pay attention to the text with labels and notices Sevenstar assumes no liability for the customer s failure to comply with this manual This manual is necessary for your installation and maintenance please keep it carefully 1 3 The notice of safety Please pay attention to the below notices when reading this manual We are not responsible for any result without abiding by the below notices a Do not replace any components or disassemble instrument Do not replace any components or disassemble the instrument without any authorized and make sure that the label or and seal of product is not removed when returning for reworking recalibration and maintenance b Please contact professional for technical service Do not replace any components Any technical support is provided by professional who must be authorized by Sevenstar c Please pay more attention to use dangerous gas Instrument should be purged completely and keep safety if dangerous gas is used Meanwhile make sure that moist gas must not react with material of seal and instrument d Please pay attention to purging instrument The whole system should be purged by dry gas after and before t
29. y with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to purge the controller could cause a fire or explosion resulting in death 4 2 2 Seal of Valves The Solenoid Valve of MFC is only for adjustment can not be used for shut off Generally shut off valves should be added in upstream and downstream of MFC for protection Normally leakage of MFC valve is not more than 1 5 30 42 SECTION 5 TROUBLESHOOTING 5 1 Initial Check 5 1 1 Check the gas supply pressure and check the flow path to the MFC MFM has been opened 5 1 2 Ensure that the power supply and command signals are correctly transmitted to the D connector pins and RS485 5 1 3 Check that the cable and connector are ready 5 2 Troubleshooting Use the following table to locate the fault SYMPTOMS Gas flow is actuall Check closure of shutoff valve Output reading without gas flow is Zero drift Zero MFC not zero Gas connection incorrect Check gas connection Pressure incorrect Check pressure condition Wiens control mode Change the control mode by the software Check Power and pin position MFC out of control EYES Setpoint incorrect Check setpoint signal PCB problems Contact Sevenstar 31 42 Defective Mechanics Contact Sevenstar Check Power and pin position MFC dose not Cable problems Check cable and connector communicate with Address conflict Check address of MFC PC Check baud rate of MF
Download Pdf Manuals
Related Search