User`s Manual - Newport Corporation
Contents
1. gt Newport Experience Solutions 1 EDH0378En1010 12 14 HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System 1 1 Remove the Locking System Hexapod ball studs can be damaged if they are subject to pulling This can happen while handling or transportation of the HXP50 To avoid damages the HXP50 MECAV6 is delivered with a locking system that includes a center rod and a clamping wheel CAUTION Remove the locking system before operating the HXP50 MECAV6 Hexapod Remove the clamping wheel Remove the center rod NOTE Pictures shown are for the standard HXP50 MECA please use proper precautions when handling the vacuum compatible unit gt Newport EDH0378En1010 12 14 2 Experience Solutions HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System 20 Description The HXP50 MECAV6 hexapod is a parallel kinematic motion device that provides six degrees of freedom X Y Z pitch roll and yaw Hexapods are well known as effective solutions for complex motion applications that demand high load capacity and precision in up to six independent axes Yet they still have the image of being complex and highly priced With the HXP50 MECAV6 Newport continues to introduce Hexapods that are not only affordable but also extremely easy to use The HXP50 MECAV6 is driven by six stepper motor driven actuators with encoder feedback encoder on t2. Experience Solutions WARNING The motion of objects of all types presents potential risks for operators Protect the operators by prohibiting access to the pinch points marked by the icon on the left Supplement this with personnel training of the potential risks involved WARNING Stop using the Hexapod when an abnormal condition occurs Turn off the controller immediately and unplug the power when safe Abnormal conditions are when an actuator is hot to the touch an actuator is visibly locked or when an actuator emits an unusual odor or smoke Contact your Newport service person for guidance and request repairs Never attempt to repair the Hexapod yourself as this can be dangerous WARNING Do not expose the Hexapod to moisture and avoid fluids spilling onto the Hexapod If spills occur turn the controller off immediately and unplug the power when safe Contact your Newport service person for guidance and request repairs Never attempt to repair the Hexapod yourself as this can be dangerous WARNING Do not insert objects into the Hexapod as this may lock the drive or eventually cause an electric shock Do not use the Hexapod if any foreign objects are found within the Hexapod Switch off the controller and then disconnect the HXP controller from the power supply when safe Contact your Newport service person for guidance and request repairs Never attempt to repair the Hexapod yourself as this can be dangerous
3. HXP50 MECAVG Hexapod Vacuum Compatible 6 Axis Parallel Kinematic Positioning System RoHS Compliant Dol SEES USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System Warranty A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used F N EDH0378En1010 12 14 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damage
4. Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems QD Newport Experience Solutions 1 1 EDH0378En1010 12 14 Newport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
5. MECA Series EC Declaration of Conformity following Annex II 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du Bois Sauvage 91055 Evry CEDEX FRANCE Hereby declares that the machinery Description HXP50 MECA Function 6 Axis Kinematic Positioning System Models HXP50 MECA HXP50 MECAV6 the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2004 108 EC relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards NF EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Part General requirements NF EN 55011 2007 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Donc in Beaune La Rolande on 25 February 2013 HE Dominique DEVIDAL Quality Director v EDH0378En1010 12 14 HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System Definitions and Symbols The following terms and symbols are use
6. V6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System 6 0 Maintenance 6 1 6 2 EDH0378En1010 12 14 Maintenance The Hexapod requires no particular maintenance Nevertheless like any precision mechanical device it must be treated and handled with care PRECAUTIONS The Hexapod must be operated and stored in a clean environment without dust excessive humidity solvents or other substances RECOMMENDATION It is recommended to return your Hexapod to our After Sales Service after every 2000 hours of use for maintenance If your Hexapod is mounted on a workstation and cannot be easily handled please contact our After Sales Service for further instructions Repairing CAUTION Never attempt to disassemble an element of the Hexapod that has not been specified in this manual To disassemble a non specified element can cause a malfunction of the Hexapod If you observe a malfunction in your Hexapod please contact Newport immediately to arrange for a repair CAUTION Any disassembly or attempts to repair the Hexapod without proper authorization will void your warranty D Newport 1 0 Experience Solutions HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System e Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O
7. WARNING Do not place this Hexapod in unstable surfaces like wobbly tables or sloped surfaces where there is risk of falling or tipping over which could cause injury If this Hexapod has been dropped or is suspected of being damaged switch off the controller and then disconnect the HXP controller from the power supply Contact your Newport service person for guidance and request repairs Never attempt to repair the Hexapod yourself as this can be dangerous WARNING Do not modify this Hexapod this may cause an electric shock or downgrade its performance Any modification of this Hexapod will void the warranty WARNING Do not exceed the usable depth indicated for the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit vii EDH0378En1010 12 14 HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System Cautions CAUTION Do not place this Hexapod in a hostile environment such as X Rays or UV Improper use of this Hexapod may cause damage and voids the warranty CAUTION Do not use the top plate or struts for handling This may cause it to malfunction CAUTION Do not manipulate or turn struts This may cause it to malfunction CAUTION The locking system must be set up on the hexapod before handling Use handles for transportation CAUTION Do not place this Hexapod in a location with dust oil fumes or steam This may cause an
8. d in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user D Newport EDH0378En1010 12 14 vi Experience Solutions HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System Warnings gt Newport
9. deg 0 2 mdeg 0 4 mdeg Bi directional repeatability typical 2 2 um 2 um 1 um 1 mdeg 1 mdeg 2 mdeg Max speed 2 mm s 1 8 mm s 0 8 mm s 0 9 s 0 9 s 2 s Stiffness 2N um 2N um 25 N ym 1 Travel ranges are interdependent The listed values are max travels per axis when all other axis are in their centered position Height 151 mm for Z 2 With standard setting 3 Stiffness depends on Hexapod position Values are given for all axis in their centered position 4 Open loop Closed loop CAUTION To reach the specifications stated stages must be fixed on a plane surface with a flatness of 50 pm or better 3 2 Max Cantilever Distance of the Load 3 2 1 Horizontal Base Plate Load Position D 0 to 120 mm H 0 to 150 mm 60 T T H 0 te 50 KR eso D 2 SRY H 75 40 H 100 Q Load SSS H 125 z SSS Fee A 30 20 10 0 20 40 60 80 100 120 Radial Distance D mm 3 2 2 Base Plate Upside Down Load Position D 0 to 120 mm H 0 to 150 mm 30 Max Load N teases Load lt D gt 0 20 40 60 80 100 120 Radial Distance D mm D Newport Experience Solutions EDH0378En1010 12 14 4 HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System 3 2 3 V
10. electric shock CAUTION Do not leave this Hexapod in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this Hexapod if power is on Make sure that cables to the HXP controller are disconnected before moving the Hexapod Failure to do so may damage cables and cause an electrical shock CAUTION Be careful that the Hexapod is not bumped when it is being carried This may cause it to malfunction CAUTION Before handling this Hexapod always unplug the equipment from the power source for safety CAUTION Contact your Newport service facility to request cleaning and testing every year gt Newport EDH0378En1010 12 14 viii Experience Solutions HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System Vacuum Compatible 6 Axis Parallel Kinematic Positioning System HXP50 MECAV6 Hexapod 1 0 Introduction This manual provides operating instructions for the hexapod HXP50 MECAVE6 CAUTION Do not use the top plate or struts for handling CAUTION Remove the locking system before using CAUTION Do not manually turn struts CAUTION Please read all chapters of this manual carefully before operating your Hexapod NOTE This product complies with the RoHS directive Restriction of Hazardous Substances
11. ertical Base Plate Load Position D 0 to 100 mm H 0 to 100 mm 5 T T H 0 H Ni H 40 z 4 H 60 RSS Se nll 2 E gt H 100 D Sa he a Yy 3 nes Load Te I 0 20 40 60 80 100 Radial Distance D mm 3 2 4 Base Plate at Any Position Load Position D 0 to 80 mm H 0 to 100 mm Max Load N Load 0 20 40 60 80 Radial Distance D mm 3 2 5 Horizontal Base Plate Lateral Force Force Position D 0 to 120 mm H 0 to 150 mm T 20 With Any T ne Orientation gt eed a aa A Max Force N 0 20 40 60 80 100 120 Radial Distance D mm 3 3 Weight Weight Ib kg Hexapod without cables 3 8 1 7 Cables 2 2 1 0 gt Newport Experience Solutions 5 EDH0378En1010 12 14 HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System 4 0 Connection to the HXP50 ELEC Controller 4 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Discon
12. he motor providing precise MIM low backlash and fast speed The HXP50 MECAV6 can be run in open loop or closed loop allowing the choice of different levels of performance like MIM and repeatability The quality of the actuators has obviously a strong impact on the overall motion performance of the HXP50 MECAV6 but of equal importance are the joints with which the actuators are attached to the base and the moving top plate With size and rigidity in mind our engineers came up with innovative spherical joints that are not only very simple but also enhance the stiffness of the hexapod The HXP50 ELEC controller accurately masters the synchronized transformations from Cartesian input coordinates to the motion of the Hexapod legs In addition the HXP50 ELEC provides advanced features including instrument grade I O s hardware based input triggers event triggers high speed on the fly data acquisition fast TCP IP communication and integrated TCL programming language for on board processes All these features improve accuracy and throughput making the programmer s life much easier Two main advantages of the HXP50 MECAV6 as with the other Newport hexapods are the ability to program two pivot points represented by the Tool and Work coordinate systems and RightPath Trajectory Control The Tool CS moves with the top plate and the Work is stationary Imagine a machine tool where one can adjust the orientation of both the cutting tool and work
13. nect the power plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual and the HXP controller manual before using the Hexapod for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact an electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into the wall plug receptacle contact an electrician to perform the necessary alterations to ensure that the green green yellow wire is connected to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may cause electrical shorts gt Newpor
14. ome preset and backlash on the Sub D25 connector These parameters have to be set into the HXP50 ELEC controller for each strut This is done at our factory when the HXP50 MECAV6 Hexapod is ordered with the HXP50 ELEC controller WARNING The HXP50 MECAV6 via a threaded hole must be grounded to avoid electrical disturbances generated by ground loops D Newport EDH0378En1010 12 14 8 Experience Solutions Vacuum Compatible 6 Axis Parallel Kinematic Positioning System HXP50 MECAV6 3114 ASVa ASvd SL 19 NOILISOd FICCI 1V G0dVX3H ce LGL sx 066 ASVINYVI NOILVLHOdSNYHL 404 STIONVH 114VAOWE Z L LNULS 9 INULS ZL Lt H1d30 001 76 62 NO 009 IV ZL Lv HLd30 OHLIN SJ10H 9 06 Z6 L YDS NO OHL SIN SJ10H t z ANULS S LNYLS Imensions D t ANULS LNULS ISHLINITIN ONY S3HONI NI SNOISNIWIG 9AVIJJW 0SdXH NMOHS 1100W 06L 829 NO 0Z1 1Y 9 9 97 3404 9 t t LLS STIOHE 7 001 vee 62 G67 y 002 a rs ay L819 1 i 1 D 061 lt NT NOTE The X axis points in the direction of the cable output between struts 3 and 4 NOTE Top and base plates of the HXP50 MECAV6 Hexapod are made of aluminum 12 14 EDH0378En1010 Experience Solutions gt Newport HXP50 MECA
15. piece or in photonics the optical beam and the sample Incremental displacements are possible in either system in user friendly Cartesian coordinates and positions can be easily switched from one system to the other by a function call or by numerical input in the HXP s web site interface RightPath Trajectory Control enables scanning in a path along a defined trajecotry line arc or rotation with minimal runout and at a constant and definable speed enabling smooth well defined motion These powerful functions are a completely new way of mastering Hexapod motions without the need for complex external coordinate transformations peel CARRIAGE i 1 1 1 BASE WORLD As a standard feature the HXP50 ELEC controller allows the user to choose a virtual pivot point in space for all rotations Absolute moves and positions are defined in the work coordinate system Incremental moves can be done in the tool or in the work coordinate systems D Newport Experience Solutions 3 EDH0378En1010 12 14 HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System EW Characteristics 3 1 Mechanical Specifications X Y Z x ey z Travel range 17 mm 15 mm 7 mm 9 8 5 18 MIM Minimum incremental motion 0 2 pm 0 8 um 0 2 pm 0 8 pm 0 1 ym 0 4 ym 0 1 mdeg 0 4 mdeg 0 1 mdeg 0 4 mdeg 0 2 mdeg 0 8 mdeg Uni directional repeatability typical 0 4 um 0 4 um 0 2 um 0 2 m
16. ristiCS 4 Sub Mechanical Specifications ierisinde tnt hens 4 3 2 Max Cantilever Distance of the Load 4 Horizontal Bas Plate i240 baiiieg esis ovine Ghia Aanitenidnk 4 Base Plate Upside Down ss 4 Vertical Base Plate ici sciscaisisdiisiiaciscdijvincdovseacavascaviancavsaiedvesoudersevsdvenssdovied 5 Base Plate at Any Position 5 Horizontal Base Plate Lateral Force ccccccccceesscesseecessseeessseesseeeees 5 343 Wehi rannani E A T a 5 4 0 Connection to the HXP50 ELEC Controller 6 4 1 Warnings on Controllers inserer 6 AR EO 0 D CEE C0 DERE AA E EEE EEE E E E E A EEE 7 AES CADIRS EAA APENE E tee Sistavinanceeigsasen vias dune en terme tie its see 7 5 0 Dimensions 9 6 0 Maintenance 200 cccccccsecsscssessesessssssssesesseenes 10 61 Maintenance ss RS nec beceh ven see vovusaceeea ccs tatne tee ete cescet sea 10 6 2 R DAIFINE n e teinte ere fier ileistes 10 Service FOr iii 11 gt Newport Experience Solutions iii EDH0378En1010 12 14 HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System gt Newport EDH0378En1010 12 14 iv Experience Solutions HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System EC Declaration of Conformity LOSES OAS vo gt Newport Experience Solutions PSO SOP SOP SOP SOON HXP50
17. s resulting from e Incorrect usage Load on the Hexapod greater than maximum specified load Carriage speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the Hexapod represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the Hexapod or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System Table of Contents Warranty oeeie R E ved vats Conczes acne snees R A sabe teendewsncaea a chats eases ii EC Declaration Of COmfOrmiuty nn RER nes v Definitions and Sy Mi DONS acrin a a EE vi WArnIngs insert EE EEEE EE EEE vii CAUTIONS 52 arriere a O A E a nae TO sec elealen at viii 1 0 Introduction 1 1 1 Remove the Locking System ss 2 2 0 Descrbliou udannanuinmdaauns 3 3 0 Characte
18. t EDH0378En1010 12 14 6 Experience Solutions HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System 4 2 Connection WARNING Always turn the controller s power OFF before connecting or disconnecting a strut Anytime prior to power up each strut must be connected with the supplied cable to the corresponding Sub D25 plug located at the rear panel of the HXP50 ELEC controller labeled MOTOR 6 SUB D25 CONNECTORS FOR MOTOR CABLES WARNING Each Hexapod strut corresponds to the axis number of the HXP50 ELEC controller This label is indicated on the Sub D25 connector of the strut 4 3 Cables Each Hexapod is equipped with cables terminated with 25 pin Sub D connectors These cables are directly connected to the HXP50 ELEC There are 6 cables total to connect to the corresponding plugs on the controller D Newport Experience Solutions 7 EDH0378En1010 12 14 HXP50 MECAV6 Vacuum Compatible 6 Axis Parallel Kinematic Positioning System CAUTION Numbering of axes is important for both motor connections A mismatch will cause fatal errors during initialization WARNING These cables are shielded properly For correct operation make sure to lock the connectors ground continuity provided by the cable WARNING Keep the motor cables at a safe distance from other electrical cables in the vicinity to avoid potential cross talk NOTE On each connector a sticker indicates the h
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