IMS-V User Manual - Newport Corporation
Contents
1. DEPTH 35 9 5 HOLES M4 THD ON 93 62 92 EQUIDISTANT AT 60 DEPTH 31 8 ala 2 48 75 3 62 100 6 0 63 92 150 i 4 HOLES M4 THD ON 3 94x 2 95 100x75 i DEPTH 31 8 M IMS V Stages without Top Plate Interface Sometimes it is necessary to remove the top plate interface of a M IMS V stage To do that just unscrew the 4 CHc M6 x 16 0 of the plate with the wrench supplied with the stage Both IMS V and M IMS V stages will then have the same opposite interfaces O O O O A PE O o o 4 HOLES M6 THD ON SOR 5 91 150 DEPTH 47 12 3 03 7 05 lt m y 179 4 HOLES 1 4 20 THD ON 6 0x5 0 152 4x 127 DEPTH 47 12 o Galo O O Y O O O O MODEL SHOWN IMS100V DIMENSIONS IN INCHES AND MILLIMETERS 3 L EDH0211En1040 08 15 14 4 CLEARANCE HOLES FOR M6 SCREW BACK SIDE 37 HOLES 1 4 20 M6 THD DEPTH 39 10 DIMENSIONS IN INCHES MILLIMETERS 150 screws at the 4 corners D Newport Experience Solutions IMS V Series High Performance Linear Stages for Vertical Use EN Maintenance 9 1 9 2 gt Newport Experience Solutions RECOMMENDATION It is recommended to co2. IMS V Series High Performance Linear Stages for Vertical Use C BE FX ES Compliant OS USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed IMS V Series High Performance Linear Stages for Vertical Use Warranty S A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K J EDH0211En1040 08 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on
3. high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year D Newport EDH0211En1040 08 15 viii Experience Solutions IMS V Series High Performance Linear Stages for Vertical Use High Performance Linear Stages for Vertical Use IMS V Series 1 0 Introduction This manual provides operating instructions for the stage that you have purchased in the IMS V Series IMS V Series linear stages 100 and 300 mm travel ranges RECOMMENDATION We recommend you read carefully t
4. A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com D Newport Experience Solutions 3 EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use Maximum Speed vs Payload 3 2 3 3 20 Speed mm s 0 40 100 200 300 Load on Carriage N EDH0211En1040 08 15 400 Mechanical Specifications M IMS100V M IMS300V Travel Range mm 100 300 Minimum Incremental Motion um 0 3 um with XPS 0 6 um with ESP301 or SMC100CC Uni directional Repeatability um 0 5 0 5 Bi directional Repeatability um 1 0 or 0 5 1 0 or 0 5 On Axis Accuracy um 5 or 2 5 10 or 5 Maximum Speed 20 mm s with up to 100 N load 5 mm s with higher loads Pitch urad 100 or 50 250 or 125 Yaw urad 100 or 50 200 or 100 MTBF 20 000 h with 300 N load and with a 10 duty cycle Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Pri
5. Solutions IMS V Series High Performance Linear Stages for Vertical Use EC Declaration of Conformity SPV VOOM OL STS gt CRIS PTS CLD CLS CALS th Le ES Con KROES y SS IMS V Series es OS i Ne PS EC Declaration of Conformity LS o gt following Annex II 1A CO Q of Directive 2006 42 EC on machinery e LR SIS es oi V The manufacturer 4 PAS MICRO CONTROLE Spectra Physics LE gt 9 rue du bois sauvage Gr Os F 91055 Evry FRANCE 9 9 he ss ENS Hereby declares that the machinery A Se Description IMS V Es Q Function High Performance Linear Stages for Vertical Use e e Models M IMS100V M IMS300V 2 Me NS pA i Ka the technical file of which was compiled by Ge Mr Dominique DEVIDAL Quality Director s Pai MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 oF we F 45340 Beaune La Rolande France oe 5 land A e 4 Ne PUS complies with all the relevant provisions of the Directive 2006 42 EC on machinery WA ne e complies with all the relevant provisions of the Directive 2014 30 EU relating to electro Ce magnetic compatibility DORNO CAS a iy x O K was designed and built in accordance with the following harmonised standards Le NF EN 61326 1 2013 Electrical equipment for measurement control and SS laboratory use EMC requirements Part 1 General requirements KL ve ve NF EN 55011
6. completely closed design of the IMS V Series with an upper rigid cover underlining its robustness and long lasting values M IMS stages also feature a motor side mounted origin for repeatable initialization limit switches to prevent over travel and elastomeric end of run dampers for smooth emergency braking For optimal performance we recommend the use of our motion controllers to choose in accordance with the payload The M IMS Series stages are supplied with a 5 meter cable for connection to our motion controllers Design Details Base Material Extruded Aluminum Bearings Four way equal loaded caged recirculating ball bearings Drive Mechanism Precision ground 16 mm diameter lead screw High wear resistance polyethylene terephthalate nut no preload Drive Screw Pitch mm 3 Feedback Linear steel scale 20 pm signal period 0 1 um resolution Limit Switches Optical Origin Optical approx 8 mm from motor side limit Motor DC servo Cable 5 m long motor cable included NOTE This product complies with the RoHS directive Restriction of Hazardous Substances gt Newport 2 Experience Solutions IMS V Series High Performance Linear Stages for Vertical Use EN Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard
7. generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 D Newport 1 2 Experience Solutions IMS V Series High Performance Linear Stages for Vertical Use E Dimensions 8 1 M IMS V Stages 1 18 o o A 30 o A 8HOLES CLR 0 gt O O FOR M6 SCREW A A B 1 o LE re o o ll Y A 0 Oo o o o 9 o 8 HOLES CLR o o o 2o o FOR 1 4 20 SCREW 5 6 5 s in nes E o o o o o o o o oF o o o 072 o o o o Y o Y o o a dla 9 o o B Il A o o A o o y SUB D25M 5 73 CONNECTOR a 145 5 Y Y 7 09 pe 180 gt MODEL SHOWN IMS300V DIMENSIONS IN INCHES AND MILLIMETERS i MODEL METRIC A B La A TRAVEL M IMS100V 1 97 50 2 00 50 8 19 78 502 5 12 32 313 3 94 100 EN la kg M IMS300V 6 91 150 5 00 127 27 66 702 5 20 20 513 11 81 300 TA Y 28 Y ni D Newport Experience Solutions 1 3 EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use 8 2 8 3 Top Plate Interface 5 HOLES M5 THD ON 06 85 174 EQUIDISTANT AT 60 DEPTH 35 9 5 HOLES M5 THD 95 39 137 EQUI DISTANT AT 60
8. that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user gt Newport EDH0211En1040 08 15 vi Experience Solutions IMS V Series High Performance Linear Stages for Vertical Use Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless i
9. the stage greater than maximum specified load Carriage speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions IMS V Series High Performance Linear Stages for Vertical Use Table of Contents Warranty iaa ii EC Declaration Of Conor io id v Definitions and Symbols i sicssceiesies monte itestirmernsttissnernrneleisteenennitertiiennnee vi E vii CaAUTIONS iii ada e viii 1 0 Introduction 1 2 0 Description it 2 2 1 Design Detalls viii aia 2 3 0 Chiaracieristlos conoscan 3 Sil D finitions incisi n 3 3 2 Mechanical Specifications ss 4 3 3 Load Specification Definiti nS iii ice 4 3 4 Load Characteristics and Stiffness ooon
10. used with non Newport controllers Sub D25 male Connection Connector M IMS V 9 gt 1 N C 10 1 N C M1 1 N C 12 2 N C 1 N C 2 m 1 1 N C 3 i i m 1 N C 4 i i N C x ial by A Bc gt Motor 6 m i m 1 Motor 7 1 Motor 8 Ke T i I gt Motor Y pa 1 Y 4 gt i i gt Ground 3 it ty 4 6 ame ae my 0 V logic 3 7 i i i Mechanical Zero 1 9 1 Encoder Phase A 23 i La Encoder Phase A 20 x r Encoder Phase B 24 Encoder Phase B 5 TE m Index Pulse 25 f 1 Index Pulse I 7 End of Run 2 8 m i gt End of Run 2 21 i 5 V Encoder 22 Ta 7 i 0V Encoder Connector i Connector CAD LL ARA IA Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newport Newport Stage Mechanical Zero Stage End of Run lin max 10 mA lin max 16 mA V max 30 V V max 5 6 V If the Mechanical Zero output is not used a 1 k92 0 25 W resistor must be connected between pins 13 and 21 Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits
11. 0 23 and 24 of the SUB D25 connector 7 EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use 5 5 1 N C 2 N C 3 N C 4 N C 5 Motor 6 Motor 7 Motor 8 Motor 9 N C 14 en 10 N C o E 11 N C o 12 N C ES z 13 Mechanical Zero ES o 14 Shield Ground o 15 Index Pulse I 25 o 3 16 0 V logic 17 End of Run 18 End of Run 19 Encoder Phase A 20 Encoder Phase B 21 Encoder Power 5 V 22 0 V Encoder 23 Encoder Phase A 24 Encoder Phase B 25 Index Pulse I D Newport EDH0211En1040 08 15 8 Bovis eae Newport Stage Encoder Phase A Pin 19 Y D Encoder Phase A I Pin 23 Encoder Phase B Pin 20 Output Signals eS Encoder Phase B I Pin 24 Y Index Pulse Phase _ Pin 15 if Index Pulse Phase Pin 25 YY YY Y Y 1 Pin 21 HO QD OO OO 5 V 5 Encoders a ov Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 Pinouts The 25 pin Sub D connection for the M IMS V stages is given in the following table IMS V Series Hi
12. 1 0 Experience Solutions IMS V Series High Performance Linear Stages for Vertical Use 6 5 Cables All our IMS V stages are delivered equipped with a MCAB 5 5 meter cable This cable is equipped with a SUB D25M connector so it can be directly connected to our controllers drivers WARNING IMS V Series translation stages operate only with a 5 meter max cable 2 28 58 DISCONNECTED LOCKING gt KNOBS I STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE gt 1 50 38 CABLE IN MOTION gt 3 78 96 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable WARNING Keep this cable at a safe distance from other electrical cables in your environment to avoid potential cross talk gt Newport Experience Solutions 11 EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use 7 0 Connection to Non Newport Electronics 7 1 Connections EDH0211En1040 08 15 WARNING Newport is not responsible for malfunction or damage to a M IMS V translation stage when it is used with non Newport controllers WARNING Newport guarantees CE compliance of the M IMS V translation stages only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a M IMS V stage is
13. 2010 A1 2011 Class A de gt oN NG was designed and built in accordance with the following other standards y A Ce E NF EN 61000 4 2 gt CAD NF EN 61000 4 3 b NF EN 61000 4 4 AS NF EN 61000 4 5 ue NF EN 61000 4 6 Ga ee 2 9 Se yA gt ORIGINAL DECLARATION O gt PRA A Done in Beaune La Rolande on 26 June 2015 z De 0 one PAS Dominique DEVIDAL zZ l 7 6 Ge Disab CO ONG SISIDIIIRIZAAARIAS RES RS RS RR RS RAS RAS RRA RS RSS D Newport Experience Solutions V EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information
14. NG Because of the use of a friction lead screw and the stick slip effect the sensitivity of M IMS V stages at full load depends a lot on the controller driver features and tuning Back and forth motions of a few counts after settling are normal The self locking of the lead screw allow to turn off the servo loop to stop these oscillations without getting unwanted motion WARNING To reach the specifications stated for a M IMS V stage the Top mounting bracket or the fastening support of the stage must N Position have a minimum stiffness at the level of the load in top ES position as indicated below Max Min Y load stiffness 100 N 5 N um 400 N 10 N pm 3 5 Stage Weights Weights indicated into the below table are average values for stages with a typical drive unit installed Weight Ib kg M IMS100V 30 0 13 6 M IMS300V 37 5 17 0 D Newport Experience Solutions 5 EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use 4 0 Drive DC Motor Performance Specifications Resolution Speed Mot otor um mm s M IMS V 0 1 20 UE511CC D With up to 100 N load EW Motor 5 1 UE511CC Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Voltage V Current A Current A Q mH UE511CC 48 1 5 2 3 5 1 3 2 5 2 Command Signals for the DC Motor H j Motor v A Motor v Mot
15. f any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Eserco Suns vii EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or
16. gh Performance Linear Stages for Vertical Use 6 0 Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are
17. gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C
18. he chapter Connection to electronics before using the M IMS V stage gt Newport Experience Solutions 1 EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use EN Description The EQ180 bracket must be used with a stage e M IMS100V when payload is lt 500 N e M IMS300V when payload is lt 100 N 2 1 EDH0211En1040 08 15 The IMS V Series linear stage complements the M IMS Series by providing linear travel ranging of 100 and 300 mm The stages feature robust designs with high performance but without high cost making them cost effective solutions for precision industrial and laboratory applications Using the same industry proofed technology as the M ILS Series the IMS V Series features a FEM optimized aluminum extruded body that is highly stiff while minimizing the bending effect caused by different thermal expansion coefficients of the aluminum body and the steel rails Smooth running recirculating ball bearing slides with ball separators provide accurate linear motion and avoid ball cage migration found on linear ball bearings or crossed roller bearings A highly stiff backlash free 3 mm pitch friction lead screw ensures vertical movement with capability to handle high payload For more demanding precision positioning requirements the IMS V Series is equipped with a highly interpolated linear scale providing 0 1 pm resolution feedback The
19. mer 2 To obtain arcsec units divide urad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 um Load Specification Definitions Depends on the Controller Payload N 100 400 Specified Speed mm s 20 5 Specified Acceleration mm s 80 20 The variation of the speed is linear between 100 N and 400 N CAUTION To go over the indicated speed in accordance with the payload may damage the stage mechanism Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Qy lt 1500 1 D 90 but not greater than Cx Max D Cantilever distance D Newport 4 Experience Solutions IMS V Series High Performance Linear Stages for Vertical Use 3 4 Load Characteristics and Stiffness Min Cx Cx 40 N Max Cx Cx 400 N with XPS 100 N with ESP301 kay Compliance in pitch 0 2 urad Nm kaz Compliance in yaw 1 urad Nm Qy Off center load Qy lt 1500 1 D 90 D Cantilever distance in mm between the center of mass of the load and the bearings center Distance between top surface and the bearings center 66mm NOTES 1 The vertical load must be within the axial Cx and cantilevered Qy load limit 2 Motor down orientation is preferred for easier tuning 3 Minimum preload is required WARNI
20. nccnncnnoonnnonononcconcnonccnnnonancnanannnos 5 3 07 Stage Wel8hts iia ni 5 40 DRIVE oa 6 DO MOotort cria 6 5 1 UE511CC Motor CharacteristiCs 6 5 2 Command Signals for the DC Motor cccccsssesesseeseeeeeeeceseeeseeseeeseenes 6 5 3 Sensor POSitiON i c00 cescvsseesdeacvsedvetvislhadeversedshcsedsbdedgsaetsssebesssatsents daa 7 5 4 Feedback Signal Position c cccccsssssesssessessssesessesssessessseseesssesseeeeens 7 A 8 6 0 Connection to Newport Controlleys 9 6 1 Warnings on Controllers iii iio 9 6 2 Connection to XPS Controller rer 10 6 3 Connection to ESP301 Controller ns 10 6 4 CONMNMectH M sin ai R aired 10 Go Cables ninas ai da dd cd Ea ia 11 7 0 Connection to Non Newport Electronics 12 RE COMMECH ONS o ai A it 12 D Newport Experience Solutions iii EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use 8 0 Dimensions 13 8 1 M IMS V Stages 0 ccecsccccssssssessessecsscssecseeeseeseesseeseessesseeseessesseessesseesees 13 8 2 Top Plate Interface ius munie 14 8 3 M IMS V Stages without Top Plate Interface 14 9 0 Maintenance oonccinininononononononononononononononononononononononononononononens 15 JE IE O listes titre tetes da 15 O12 Rellano 15 93 2 Cal AO riada 15 Service PO A A A iaa 17 gt Newport EDH0211En1040 08 1 5 iv Experience
21. ntact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The M IMS V stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The M IMS V stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your M IMS V stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your M IMS V stage to Newport once a year for recalibration to its original specifications 15 EDH0211En1040 08 15 IMS V Series High Performance Linear Stages for Vertical Use gt Newport EDH0211En1040 08 1 5 1 6 Experience Solutions Service Form Your Local Repre
22. or v po Displacement Direction Direction lt Displacement Motor v Direction In the above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage gt Newport EDH0211En1040 08 15 6 Experience Solutions IMS V Series High Performance Linear Stages for Vertical Use gt Newport Experience Solutions 5 3 5 4 Sensor Position lt Home Position EOR Limit S el EOR Limit Se A Mechanical Zero Index Pulse rt Index Pulse a Stage Travel Range Motion Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source Feedback Signal Position Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B o lb 4 A Direction KE Motion gt Direction Direction 0 The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 2
23. sentative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 1 T EDH0211En1040 08 15 Newport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
24. unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts D Newport Experience Solutions 9 EDH0211En1040 08 15 IMS V Series EDH0211En1040 08 15 High Performance Linear Stages for Vertical Use 6 2 Connection to XPS Controller Max Payload N 100 400 Max Speed mm s 20 5 6 3 Connection to ESP301 Controller Max Payload N 100 Max Speed mm s 20 WARNING With these controllers the payload can t be over than 100 N 6 4 Connection On each stage is represented a label which indicates its name and its serial number Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion system quickly and safely WARNING Always turn the controller s power OFF before connecting to a stage COMPATIBLE D Newport
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