RVS80 User Manual - Newport Corporation
Contents
1. 14 N C Encoder Phase B 24 ai T N C Encoder Phase B 15 NF 1 1 2 15 N C Index Pulse 25 i 1 8 N C Index Pulse 1 17 i 511 End of Run 2 End of Run 2 18 IX Gs 4 End of Run 2 End of Run 2 21 12 45 V 5 V 22 n 1 5 OV OV Connector i Connector ZI Qu Cap The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA Open collector type with 5 6 V protective Zener diode Newport Stage A Mechanical Zero End of Run ln max 10 mA lin max 16 mA V max 30 V V max 5 6 V If the Mechanical Zero output is not used 1 kQ 0 25 W resistor must be connected mm M between pins 13 and 21 Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 261 531 or MC3487 Reception circuits to use are 26LS32 or MC3486 Newport Experience Solutions 1 1 EDH0219En1030 07 15 RVS80 Series High Performance Precision Rotation Stages Disabling of Limit Switches In standard RVS80 rotation stages are equipped with limit switches limited to 170 for protecting the equipment A switch enables inhibiting the limit switches in order to use the rotation stage over 360 or more SWITH POSITIONS FOR LIMIT SWITCHES SWITCH FOR IN2. RWSSO Series Hish Performance Precision Rotation Stages G Ws COM Plant lt USER S MANUAL Nevvport Experience Solutions Precision Motion Guaranteed RVS80 Series High Performance Precision Rotation Stages Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used X A EDHO219En1030 07 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from Incorrect usage Load
3. EDH0219En1030 07 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The RVS80 stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The RVS80 stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your RVS80 stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your RVS80 stage to Newport once a year for recalibration to its original specifications Newport 1 4 Eyperience Solutions Service Form Your Local Representative Tel Fax Name Return aut
4. all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements gt NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director V EDHO219En1030 07 15 RVS80 Series High Performance Precision Rotation Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially da
5. position 0 Typical 0 0025 repeatability for RVS80CC and 0 02 repeatability for RVS80PP Manual Adjustment Via a knob at the end of the motor box Motor RVS80CC DC servo motor UE34CC RVS80PP 2 phase stepper motor UE34PP 1 Full step 0 01 Cable SUB D15F SUB D25M cable length 3 m MTBF 20000 h RoHS Compliant EDHO219En1030 07 15 NOTE This product complies with the RoHS directive Restriction of Hazardous Substances Newport Experience Solutions RVS80 Series High Performance Precision Rotation Stages m Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Fact
6. rotation stages RVS80PP or RVS80CC RVSSOPP and RVSSOCC rotation stages RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the RVS80 rotation stage RVS80 rotation stage and UTS translation stages XY z configuration GO Newport Experience Solutions 1 EDHO219En1030 07 15 RVS80 Series High Performance Precision Rotation Stages 20 Description The new RVS80 rotation stages are the successor of our popular RV80 series They provide high precision angular positioning accuracy combined with high load capacity in a compact annular design RVS80 rotation stages are available in two variants The DC motor option features an ultra high resolution 8 000 cts rev rotary encoder with index pulse for precision homing and is the recommended choice for applications requiring accurate bi directional positioning For the tightest position control the rotary encoder is directly mounted on the worm screw This eliminates most of the possible error sources appearant with indirect position read out The high torque DC motor provides the highest dynamic speed range and allows for rotating speeds up to 40 s The stepper motor version is a more economic variant for less demanding applications When using with our XPS or ESP300 motion controllers with high micro step capability low noise operation and very small incremental motions are guaranteed The stepper motor version
7. 5 N C 15 Index Pulse I The SUB D25 connection at the end of the cable is given in the following table RVS80PP RVS80CC UE34PP UE34CC 1 Phase 1 1 N C 2 N C 2 N C 3 Phase 1 3 N C 4 N C 4 N C 5 Phase 2 5 Motor 6 N C 6 Motor 7 Phase 2 7 Motor 8 N C 8 Motor 9 N C 9 N C 14 a 1 10 N C 10 N C e o 11 N C 11 N C 12 N C 12 N C 13 Mechanical Zero 13 Mechanical Zero DI 14 N C 14 Shield Ground 15 15 Index Pulse I 25 e T 16 N C 16 0 V logic 17 End of Run 17 End of Run 18 End of Run 18 End of Run 19 N C 19 Encoder Phase A 20 N C 20 Encoder Phase B 21 5 V 21 5 V 22 0V 22 0 V Encoder 23 N C 23 Encoder Phase A 24 N C 24 Encoder Phase B 25 N C 25 Index Pulse I QD Newport EDH0219En1030 07 15 8 Experience Solutions RVS80 Series High Performance Precision Rotation Stages m Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cabl
8. Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or hish humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year QD Newport EDH0219En1030 07 15 viii Experience Solutions RVSS0 Series High Performance Precision Rotation Stages High Performance Precision Rotation Stages RVS80 Series m Introduction This manual provides operating instructions for the RVS80 series
9. HIBITION OF ACTIVE INACTIVE LIMIT SWITCHES END OF RUNS END OF RUNS RVSSOCC and RVSS0PP rotation stages Newport EDH0219En1030 07 15 12 Experience Solutions RVS80 Series High Performance Precision Rotation Stages Dimensions A A 2 x 4HOLES M3 THD ON 22 24 57 DEPTH 16 4 TOP AND BOTTOM HOLES ARE ALIGNED 1 10 3 0 63 E 7 7 Mi 16 1 95 49 5 lt gt SUB D15M 129 i CONNECTOR 02 44 MODEL SHOWN RVS80CC DIMENSIONS IN INCHES AND MILLIMETERS menm DE n 98 25 Y is gt 3 6 71 lt 170 6 d BOTTOM VIEW OF THE RVS80PP 591 gt 1 HOLE M4 THD 150 ON 03 62 92 5 35 DEPTH 7 136 gt 4 HOLES M4 THD E ON SQR 2 48 63 EE DEPTH 7 OX S A 2 40 61 J 11 41 l A B E Y E 259 v 5 HOLES AT 60 ON 03 62 82 C BORED FOR M4 SCREW 331 lt 84 gt Newport Experience Solutions 13 EDH0219En1030 07 15 RVS80 Series High Performance Precision Rotation Stages 10 0 Maintenance 10 1 10 2 10 3
10. Inertia kg m 0 1 Q Off center load N Q Cz 1 D 30 Where D Cantilever distance mm Newport 4 Eyperience Solutions RVS80 Series High Performance Precision Rotation Stages 3 5 Stage Weights Weights indicated into the below table is the one of a rotation stage without any cable Weight Ib kg RVS80 4 0 1 8 3 meter MSCABLE 3 Cable 0 66 0 3 m Drive 4 1 DC Motor Drive Version Resolution Speed C C s Motor RVS80CC 0 00025 40 UE34CC 4 2 Stepper Motor Drive Version Full Step Resolution Speed C s Motor RVS80PP 0 01 20 UE34PP D When used with Newport motion controllers this motor is driven in a dynamic micro stepping mode software communication In that case the mechanical sensitivity is approx 1 100 of a full step m Motor 5 1 UE34PP Motor Characteristics Motor Angle by Step 5 Current per Resistance Inductance Newport C Phase Q mH Utilization UE34PP 1 8 0 71 1 7 2 8 Micro Step 5 2 Command Signals for the Stepper Motor o Direction d NIE l 5 ka o x Direction Phase 1 Phase 2 e m Direction Motion Direction Newport Experience Solutions 5 EDH0219En1030 07 15 RVS80 Series High Performance Precision Rotation Stages 5 3 UE34CC Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Voltage V Curr
11. Rotation Stages 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely 6 3 Cables Our RVS80 rotation stages are delivered with a MSCABLE 3 3 meter cable This cable is equipped with a SUB D25M connector so it can be directly connected to our controllers drivers 6 4 MSCABLE 3 Cable lt 2 24 57 gt DISCONNECTED LOCKING KNOBS gt EL CABLE a CONNECTOR STAGE Ce if SUB D15 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE gt 94 24 CABLE IN MOTION 22 76 70 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MSCABLE 3 included with your stage is not adequate Newport offers a 10 m longer length cable MSCABLE 10 designed to ensure the integrity
12. and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit Newport spere Solone vii EDHO219En1030 07 15 RVS80 Series High Performance Precision Rotation Stages
13. e move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Newport User Stage Encoder Phase A J Pin 19 Q ki Encoder Phase A I Pin 23 Encoder Phase B Pin 20 Ls Encoder Phase 1 Pin 24 Y Pin 15 Index Pulse Phase Index Pulse Phase Pin 25 gt Output Signals Y Y Y Y 0 0 T a Pin 21 1 5 V 5 Encoders e I 150 mA max 8 Sensors t f 0v Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 261 531 or MC3487 Reception circuits to use are 26LS32 or MC3486 CY Newport Experience Solutions 7 EDHO219En1030 07 15 RVS80 Series High Performance Precision Rotation Stages 5 7 Pinouts The SUB D15 connection for RVS80 Series rotation stages is given in the following table RVS80PP RVS80CC UE34PP UE34CC 1 Phase 1 1 N C 2 Phase 2 2 Motor 3 Mechanical Zero 3 Mechanical Zero 4 End of Run 4 End of Run 5 0V 5 ome 6 N C 6 Encoder Phase A 7 N C 7 Encoder Phase B 5 8 N C 8 Index Pulse I a 9 Phase 1 9 N C 15 10 Phase 2 10 Motor 11 End of Run 11 End of Run 12 5 12 5 V 13 N C 13 Encoder Phase A 14 N C 14 Encoder Phase B 1
14. ent A Current A Q mH UE34CC 48 0 9 1 8 2 52 0 51 5 4 Command Signals for the DC Motor Motor v ee Motor v Motor v Displacement Direction Direction Displacement Motor v Direction 4 Direction In above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage 5 5 Sensor Position lt Home Position Origin EOR Limit 1 EOR Limit Mechanical Zero Index Pulse Only DC Versions Index Pulse H amp Stage Travel Range gt Motion wj Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source QD Newport EDH0219En1030 07 15 6 Experience Solutions RVS80 Series High Performance Precision Rotation Stages 5 6 Feedback Signal Position Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B Direction Motion Direction Direction Rt Direction 4 The incremental sensor consists of a optical scale and an encoder head When the carriages of the stag
15. es are frayed or damaged in any way If the power plug is damaged in any way If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts Newport Experience Solutions 9 EDHO219En1030 07 15 RVS80 Series High Performance Precision
16. g or at www newport com Mechanical Specifications RVS80PP RVS80CC Travel Range 360 continuous Minimum Incremental Motion 0 0002 0 001 Uni directional Repeatability 0 002 0 001 Bidirectional Repeatability 0 003 or 0 0015 Absolute Accuracy 0 015 or 0 0075 Max Speed s 20 40 Wobble 28 urad 40 or 20 Eccentricity um 4 0 2 With disabled limit switches 2 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 3 To obtain arcsec units divide urad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pm Load Specification Definitions Normal Load Capacity Cz Maximum load a rotation stage can move while maintaining specifications This value is given with speed and acceleration specified for each rotation stage and with a load perpendicular to bearings Off Centered Load Q Maximum cantilever load a rotation stage can move Q Cz 1 D 30 D Cantilever distance Load Characteristics and Stiffness 3 point 5 point mounting on a 120 mounting flatness plane 5 um Cz Normal centered load capacity N 90 Ka Transversal stiffness urad Nm 5 3 5 Mz Nominal Torque Nm 2
17. horization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems Newport Experience Solutions 1 5 EDH0219En1030 07 15 NNevvport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
18. ls a ii RI RR nea M FREE E 2 3 0 Characteristics eret 3 Sil Definitions osse 3 3 2 Mechanical Specifications sasha 4 3 3 Load Specification Definitions nine ees 4 3 4 Load Characteristics and Stiffness 4 3 07 Stage Welghts title kai u ERE RUE EARS 5 4 0 Drive i odo Doo DEN u AAN AN Sind 5 4 1 DC Motor Drive Version 5 42 Stepper Motor Drive Version 5 D 5 5 1 UE34PP Motor Characteristics 5 5 2 Command Signals for the Stepper Motor 5 5 3 UE34CC Motor Characteristics 6 5 4 Command Signals for the DC Motor 6 5 5 Sensor uoo a ed espo E eR Pe 6 5 6 Feedback Signal Position uuu a 7 5 7 8 6 0 Connection to Newport 9 6 1 Warnings on Controllers ees 9 6 2 Connection 10 10 6 4 MSCABLE3 Cable eio ai ice ani nia din 10 7 0 Connection to Non Newport Electronics 11 7 1 Connection
19. ngerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark C The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user QD Newport EDH0219En1030 07 15 vi Experience Solutions RVS80 Series High Performance Precision Rotation Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility
20. of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D15 and SUB D25 connectors WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk QD Newport EDH0219En1030 07 15 10 Experience Solutions RVS80 Series High Performance Precision Rotation Stages El Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a RVSS0 rotation stage when it is used with non Newport controllers WARNING Newport guarantees compliance of the RVS80 rotation stages only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a RVS80 rotation stage is used with non Newport controllers SUB D25M SUB D15F RVS80PP RVS80CC Connector Connector UE34PP UE34CC 9 W a 10 Lo bg 11 ba po 12 a po 1 1 Phase 1 N C 2c i rg 3 _ 9 Phase 1 N C 4 ke it 3 bog i 4 x 5 2 Phase 2 Motor 6c ua tj put De 7 10 Phase 2 Motor ga W Z M M Y bg LI Y 14 kt p 1 po BE Ba YN bag ji a 13 r3 L j 3 Mechanical Zero Mechanical Zero 19 Lt j 13 N C Encoder Phase A 23 ET L Ne 1 6 N C Encoder Phase A 20 x
21. on the stage greater than maximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions RVS80 Series High Performance Precision Rotation Stages Table of Contents Warranty octauo e past CHO I ness aa vi Oo FQ aoaaa uqha ah dan ake He Ordres ii EC Declaration Of L ka u Qasa isa oka tae v Definitions and Symbols 3 9 e n e ease kasuwaq ERIT AE ERE FEES NUS vi vii CAUTIONS enire a M S viii 1 0 Introduction 771 1 1 sse 1 20 Description tado a catione ead i auris 2 21 Design Detai
22. or x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Eccentricity Displacement of the geometric center of a rotation stage from the rotation axis in the plane defined by bearings Wobble Tilt of rotation axis during rotation of a stage measured on a reference surface The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Newport Experience Solutions 3 EDH0219En1030 07 15 RVS80 Series High Performance Precision Rotation Stages 3 2 3 3 EDHO219En1030 07 15 Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalo
23. s iecore ED 11 CY Newport Experience Solutions iii EDH0219En1030 07 15 RVS80 Series High Performance Precision Rotation Stages 8 0 Disabling of Limit Switches 12 9 0 Dimensions 1 1 mentem 13 10 0 Maintenance creen nenne 14 10 1 Mainte riatice un RENE au Siqa RENE REUS ee Ue RUE 14 10 2 Lg 14 10 3 CaliDratlORH 14 SerVICE 15 QD Newport EDH0219En1030 07 15 iv Experience Solutions RVS80 Series High Performance Precision Rotation Stages EC Declaration of Conformity PSO 9 ONG fe S NS Se A es Se e W K SS SUN AS QU Se QU OAS ONG x NAT QD Newport Experience Solutions lt lt VASE ANS ANS RVS Series EC Declaration of Conformity following Annex II 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du Bois Sauvage F 91055 Evry FRANCE Hereby declares that the machinery Description RVS Function High Performance Precision Rotation Stages Models RVS80CC PP the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with
24. s do not use encoder feedback but calculate position by the number of commanded steps and micro steps For this purpose the stepper motor is directly attached to the worm screw with a proprietary bellow coupling with high torsional stiffness and no gear or belt drive in between Furthermore the high output torque of the stepper motor minimizes the risk of lost steps and provides optimum motion sensitivity with good linearity between commanded micro steps and the actual motion of the stage All RVS80 rotation stages are constructed of tool steel with the rotation accuracy ensured by a double row of preloaded ball bearings on hardened surfaces This allows for high off center loads within a reduced footprint The single monolithic design offers improved stiffness without compromising dynamic performance characteristics The flexible preloading system for the worm gear has been improved to guarantee a backlash free operation with an MTBF of 20 000 hours 2 1 Design Details Base Material Hardened steel body Bearings Double row of preloaded ball bearings Drive Mechanism Grinded worm gear with self compensating preload Additional 1 2 75 drive belt with RVS80CC versions no belt on RVS80PP versions Worm Gear Ratio 1 180 Feedback RVS80CC Worm mounted rotary encoder 8 000 cts rev index pulse RVS80PP None Limit Switches Two independently adjustable optical limit switches Origin Optical fixed at
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