RF Plasma Source 4.5 Manual
Contents
1. Nitrogen Version 2 0 1 14 Page 4 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION O_o Unpacking and Assembly SVT Associates equipment is packaged with the utmost care in an effort to eliminate damage due to the shipping process Inspect all shipping containers and equipment for damage Any damage noticed should be reported to SVT Associates immediately Also be sure to inspect all contents of the package and compare to the packing list Report any missing items to SVT Associates The RF Plasma Source 4 5 is shipped in two boxes One box contains the plasma source head and PBN parts The second box contains the RF matching network Any optional items such as an RF generator will be shipped in separate boxes 1 Wear gloves to avoid contaminating the source Carefully remove the plasma source from its shipping container Figure 1 Remove the bolts holding the stainless steel shipping tube in place Carefully slide the source out of the shipping tube and place it in an appropriate holder The source is clean and has already been outgassed and tested in a UHV system RF Plasma Source Shipping g Tube Bolts located around flange Figure 1 Assembling the Plasma Source Note Remember to handle these components in a clean room environment Tools Required e Small Slotted Screwdriver e Tweezers e Hex Wrench Set e Isopropyl Alcohol Lay the tools out on the bench first It is recommend2. cccccccccceccceeeeeeeeeeceeeeeeeeeeeeeeseeeseeeeeeeeeeseeeseeeseesaeeseeeseeeseeseeeeeeseesseeeeeenaes Spectral ReSpoOnSe asian damcsaccietp roastnaateaw nes santero evan enacectaniep vations meestatys Several gain ranges available consult factory for details RF Power level 13 56 MHZ into 50 ONMS ec cceccc cece eeeceeeeeeeeeeeeseeeeaeeeseeeaeees Nominal 500 watts Continuous SSCS cacti ete er cere E cer crm ctr cts eases inert T E EA E EEE eret sted Gn sate EERE N RS e A AS E E E A E A E E E ateeen ames 15 5 0 sccm typ FANGO gece cele E E ect TEE E see E A E E E E E E T 4 5 Conflat OI SVS ie ais sere E AE E E E EE E agence O ne date E E E E E E E EE T E 290 COON eean T EE EEEE Water cooled with a flow rate of at least 0 17GPM Plasma Status ccccceccceecseeeneeeeeeees Viewport on back of RF Source allows eye or spectrometer view of plasma PROPRIETARY INFORMATION A nn SAAT SVT Associates Inc SVT Associates Proprietary Information 2013 SVT Associates Inc All Rights Reserved Page 23 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION Options Plasma chamber material one included FN eee rence ae Sere if oprah Sete A AAT E A EA AAA AAA A TAT ANT PBN Add on Options Aperture styles MUS ONS EE EES E A E E car ad sat weet P T E EE E E 015 diameter SS IONS EE S PE A E TE ens A E E A E E E E A 0 11 diameter x SOE m e e E E EA E A EE ES E E A A E A AE E A TA 0 05 diameter SER m e e
3. E E E E A E E E E A A E E TT 0 2 diameter LEE E e E E E E E A A E EE E A E E 16 0 016 diameter ELLE e E EE E A A E E EE A A E E 37 0 012 diameter MUERO oeae A R A E E E E E A EEE 37 0 020 diameter EE E E E P PE AEA A A A A AN I E anes A E AE A TA 8 holes Custom Source length UCI Ae E A A A E E N E E E E E E E 11 to 20 Custom RF Matching Network Standard Manual TUNING cccccecccseeccceeccceececsececeuceceusecsueeecueeesseeessusessueenseeeseeeesseeseneeeeneeeens Manual tuning Remote tuning Auto tuning Spare Parts List Part Number Size Description Quantity Stainless Steel Binding Head Screw 1 cca DEUS os Slotted on top shield cover L 5013171 2 56 X 34 Vented Stainless Steel Flat Head Screw 4 Phillips 5001752 6 32X Phillips Pan Head Screw ne 10 5003939 2 56 X SHCS Screw a 4 5000748 1 33 CF Flange Gasket OFHC D 2 5001342 4 5 CF Flange Gasket OFHC Sy 1 SO SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 2013 SVT Associates Inc All Rights Reserved Page 24 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION Component Data Sheet SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3
4. Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 17 of 27 10 Figure 31 Finally make one last inspection before replacing the side cover of the matching network Make sure all copper straps are securely mounted Make sure the type N RF connector is soldered securely to the strap Make sure all water lines are connected and tight and do not leak Make sure none of the water lines are touching the copper straps or the side of the RF Feedthrough This feedthrough can become very hot when operating Replace the three sided cover of the matching network tighten all the screws and replace the tuning knob Standard Tuning Model Make sure the dial is set at 50 before putting the cover back on Make sure to slide the coupling over the shaft and the pin on the shaft goes into the slot on the coupling You may need to turn the shaft to get the shaft and pin to line up g Pin on shaft goes into this slot Connect the RF generator output to the type N connector on the bottom of the matching box SVT Associates Inc ry y ae 4 a I ea ay ap er tye ak Ss i roprietar r Tormation L e O CA 2 IAP IWRSE VV ta AVY if WV WV we V CA Wt p Hayy mae LOL geome L f 1 14 a SA ee 1 14 Engines for Thin Film Innovation PROPRIETARY INFO
5. and remove any packing materials You will find a short igniter cable with MHV Miniature High Voltage connectors If equipped Set it aside for later use Auto Tuning Model 1 Loosen the two set screws on the knob Gently pull to remove the knob Figure 24 x Standard Tuning Model Set Screw If you have the standard tuning model you do not need to remove the knob Continue on to step 2 Figure 24b e Set Screw A ee Figure 24b Figure 24 2 Remove the screws that hold the cover on and remove the cover There are 18 total screws seven on each side and four on the bottom See Figure 25 Visually inspect and double check that none of the fittings came loose during shipping See Figure 26 SAMAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 15 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION Figure 26 Figure 25 3 Insert the RF Feedthrough of the source through the slot in the matching network Line up the four 1 4 tapped holes on the source to the four 1 4 holes on the matching network Secure the matching network to the flange with the four 1 4 x 20 x 3 4 bolts supplied See Figure 27 Matching Network RF Feedthro
6. s to reduce the reflected power to a minimum 4 Repeat steps 2 and 3 in 50 watt steps up to a final power of about 250 450 watts for Nitrogen Note In some cases reflected power value can be up to 100w The power supply has an internal safety shut off that limits reflect power values to 40 of forward power However it is recommended not to SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 20 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION a LLLL 10 A leave the source idle with such values over extended periods of time gt 5 min Once the source ignites the values will drop significantly Slowly turn the flow up to 1 sccm Make sure not to exceed the maximum pressure of the system At this time a dim purple glow should be visible through the view port of the RF source If the plasma does not ignite spontaneously push the red igniter button on the bottom of the matching box It will be necessary to push hard because this is a mechanical igniter Repeat if necessary Note In some cases the plasma does not spontaneously ignite In such case the following burst procedure is helpful Set the mass flow to 1 sccm this might vary between 0 75
7. 0 1 14 Page 7 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION 7 Carefully remove the top cover shield Figure 7 shows what you will see after removing the shield Figure Installing the Plasma Chamber Locate the PBN parts and the PBN hardware package they are packaged in the same box as the plasma source These parts are fragile handle with care puue PBN Parts and Hardware if PBN Shield gt e PBN Z wy Chamber Gas Feed Adapter Clip Mounting Clip Extender Tube T SALIT Maan Figure 9 Figure 8 1 Remove the two 6 32 X 7 stainless steel socket head cap screws F and pull out the Gas Feed Adapter Clip See Figure 8 2 Carefully slide the Extender Tube out toward the tip Remove the Extender Tube from the plasma source See Figure 9 Closed end PBN Chamber Installation Instructions SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information 2013 SVT Associates Inc All Rights Reserved Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 8 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION Remove j P Cover f Nuts RONNE AP H i s Figure 10 Figure 11 Note Follow steps 3 4 and omit step 5 if you have a closed end PBN Chamber If you need to install an option
8. 1 5 sccm depending on system condition Close the shut off valve connected to the gas inlet of the plasma source Watch the pressure inside the MBE chamber drop until it reaches values of around 10 Torr or less Then instantaneously open the shut off valve This provides a pressure spike that reliably ignites the plasma Reduce the flow rate until the intensity of the plasma increases sharply The source might spontaneously switch to this high intensity mode This flow rate should be 0 2 1 25 sccm The intensity increase is a step function and will be apparent This will also be noticeable as a change in reflected power In bright or inductive mode reflected power will be close to 0 watts If the plasma extinguishes without a jump in intensity it is possible that the reflected power may be too high To correct this increase the power so that the approximate difference in forward power to reflected power is near the desired maximum Then repeat the previous three steps Once the plasma is ignited it will be necessary to readjust the variable capacitor to reduce the reflected power Unless the gas flow is extremely uniform it may be better to adjust the capacitor so the reflected power is a few watts off minimum Otherwise slight variations in gas flow may extinguish the plasma The RF Source is now running and can maintain plasma as long as desired Very little adjustment of the variable capacitor should be needed during normal operat
9. 677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 25 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION SS Warranty and Limitations of Remedies SVT Associates warrants that all equipment manufactured by it shall be free from defects in materials and workmanship under normal use and service for a period of twelve 12 months from the date of shipment from SVT Associates manufacturing facility This warranty is subject to SVT Associates equipment being installed maintained and operated in accordance with the operating and maintenance instructions accompanying each item manufactured by SVT Associates Warranty shall be void if SVT Associates equipment is modified by the CUSTOMER or used in other than the recommended manner or applications Purchased equipment incorporated into any item supplied by SVT Associates will be covered by said manufacturer s warranty SVT Associates warrants that at the time of delivery any other products processed or manufactured and sold by it hereunder are free of defects in material and workmanship and conform to COMPANY specifications No warranty is provided by SVT Associates for products sold hereunder which are not manufactured or processed by SVT Associates but the manufacturer s warranty for such products if
10. DS documentation for all materials that are to be used in the RF Plasma Source Keep in mind that if toxic substances are to be used they may form on the exterior of sources or other in vacuum equipment e SVT Associates should be contacted to make arrangements to have any equipment returned for repair or replacement Do not discard any packing material If it becomes necessary to ship the source back for repair or replacement we request the source be shipped using the original packing material e All items included in this equipment package are fragile Improper handling could damage this product Handle with care SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 3 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION Flow Chart Unpacking and Inspecting the Plasma Source Assembling and Installation of the Plasma Source Maintenance of the Plasma Source Storage of the Plasma Source SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5
11. E tenia mache negtenan EE EAA nests Ea 400 1 200 W CS FION R O iese re ecient E E EEE A eee davegioneeise eco EEAS 2 6 sccm others available on request Mounino Flange orsoni res EE E ens E EEE EE vedio AREE nacine ation EE E E EEA EEEE 4 5 CF FS Ne E A E EE E T EEE E NE E E EEN E PBN Source to Target ISN sinrin eE EA EAE ea EAE ER EEE aaia a iea iS custom Maximum Bakeout Temperature cccccccccceecceeceeeeeeeeeeeeeeeaeeeeeenees 220 C Matching Unit and Cables Removed Normal Operating Temperature RAnge ccccccceecccececeeceeeeeeceseeecseeeseeeeeeeeeeeesaeesseeseeesaeeeseeegeeesaeeeaes 0 C to 50 C COO Peete eee E A ee ee ee eee ee Water Flow Rate 2 0 5 GPM Fittings compatible With ccccccececcceececececeeeceeeeeeeeseeesseeeseeeseeeeseesaeeseneeaeeeees Swagelok 1 4 male and 1 4 F NPT Valve Control Pressure Rang eee eee ee ee 60 100 psig PVN YS E E Satins eed arse cece clot sass EEE E E E E T compatible with Swagelok 1 4 male Nitrogen Gas Line cccccceeccceccceeeeeeeeseeeseeeeeeeeees Manual bakeable valve 315 C open electronic shut off valve Pneumatie i setts sername i oem nce ence rie oe eect asian ANE EEA EEE EREE Electronic valve control Plasma Monitor Power Fs CCUM SINS ag ccrccte see ee dertacoetssaeniogoncicaeiset soeae wnttisraituciemiu cease nersiteneeaaecsammis aneancbsncaameaeniaceeieceutk oamesaencnendatenetsaee Integral Plasma Monitoring Wavelength
12. JV U SVT Associates Inc Engines for Thin Film Innovation Model SVTA RF 4 5 Nitrogen User Manual THIS DOCUMENT CONTAINS PROPRIETARY INFORMATION OF SVT ASSOCIATES INC AND SHALL NOT BE USED DISCLOSED OR REPRODUCED IN WHOLE OR IN PART WITHOUT THE PRIOR WRITTEN CONSENT OF SVT ASSOCIATES INC 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com pl a a l l 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Engines for Thin Film Innovation 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Table of Contents TU OG WIG UOI cerere vise scace neice soem E neve nttaniose ee aces Sawaal N E E E E AE E T E tare iesecsecniecs 3 BS AUN OM eects estat sence S ge nt ae ere sea ects ie esse ee ee esd ge cies gear eae ac asec a 3 FCA ees acne coves er niente etn rv is te gnc pn ani seca srstcpo ac sla as ener ge alan cians a tan Sarde mee aca ee aa AaayneaeEE 4 Unpacking and ASSeEMBDI y seismise a aa ai a aiaa Eaa eain aada bp nasaia ianiai 5 POS SS HMO the Plasma SOUC E esiseina EEO aR a AE OAN OA AE aire oh Aa a A AAAA 5 Removal of the RF Plasma Source Top COVef ccccccccecceceecececeeeeaeeceeeceeesneceeeseeeseeeanecseeteeeeeeeseeteeeeneeeeeseesseeaaes 6 Insta
13. RMATION SS 11 Attach the water inlet line to the water inlet connection on the source Attach the water outlet line to the water outlet connection on the bottom of the matching box If necessary these connections can be reversed without any decrease in operating efficiency j gt Y T a E 9 a Dy Q a e 7 s te E gi B E ioa wy nN A Le x d i b B bin ss p rs inf Wt r b o of DAR ee v PAT sah REE ak Vi gt 7 A Figure 32 12 Attach the short igniter coaxial cable with MHV connectors between the MHV connector on top of the matching box and the MHV connector on the multiport flange Note The source is equipped with an igniter wire When attached to the matching box using provided cable it allows creation of a charge cloud by pressing the button on the matching network This charge cloud eases electrical breakdown and triggers ignition of the plasma Make sure the wire is in proximity to the aperture opening but outside the beam path to the substrate for optimum results 13 Connect the gas line to the gas inlet port on the mini tee flange 14 The RF Source is now installed Note The RF Source can be installed or removed without removing the matching network however this is quite awkward With the box attached it is difficult to achieve alignment into or out of the system without damaging the RF Source and or the nipple 15 Save the boxes and shipping tub
14. Y INFORMATION Aligning the PBN Chamber Center the PBN Chamber in the coil When tightening the four screws that secure the PBN Chamber give each screw about a turn Make sure the PBN Chamber is centered and give each screw another 4 turn Continue in this fashion until all the screws are snug but not tight To finally secure the PBN Chamber look to see which direction the PBN Chamber is tilted off center Now tighten the screw that is opposite that side Continue until all screws are tight to steer the PBN chamber into position Tighten the Gas Feed Adapter Clip screws F See Figure 14 Adapter Clip Figure 14 Closed end PBN Chamber 4 Next rotate the Deflection Plates back to their original position insert the 2 56 x _ G and 2 56 x 1 H screws and 2 56 nuts I making sure the wire is attached with the 2 56 x 3 6 screw G See Figure 15 Be careful not to damage the ceramic insulators H running along the length of the source Tighten all four q screws and nuts Refer to Figure 10 Skip to dd N Replacing the Shield Cover number 1 on page 12 G Wire Figure 15 Note If you are installing an optional aperture follow the instructions listed below instead of step 4 above to replace the PBN Cover PBN Chamber with Optional Aperture 1 Carefully Install the PBN Cover using the 2 56 X 1 4 titanium flat head screws D on the underside near the tip of the source
15. a ceramic alumina sheath take care not to break the ceramic Figure 22 Continue with step 6 Figure 22 Figure 21 6 You are now ready to install the PBN Chamber Slide the Mounting Clip over the PBN Chamber making sure the flared side on the Mounting Clip matches the flared end on the PBN Chamber Carefully feed the PBN Chamber outward through the copper coil and center hole in the PBN Cover as far as it will go Figure 13 Figure 12 7 Place the Extender Tube back into the plasma source Insert the PBN Shield into the Extender Tube Figure 12 Place the Extender Tube back into the plasma source Reinstall the Gas Feed Adapter Clip Figure 8 with its screws F but do not fully tighten the screws yet 8 Slide the PBN Chamber down toward the flange to mate with the PBN Shield and Extender Tube Use the four 2 56 X tantalum pan head screws J to fasten the pieces together rotating the Extender Tube as needed Figure 13 Do not fully tighten the screws yet Also be careful not to strip the screws Use isopropyl alcohol liberally to lubricate the threads SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information 2013 SVT Associates Inc All Rights Reserved Page 10 of 27 Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Engines for Thin Film Innovation PROPRIETAR
16. al aperture begin at step 5 instead to completely remove the PBN Cover 3 Next you must rotate the deflection plates to make room for installing the PBN Chamber To rotate the deflection plates first remove the upper 2 56 x 3 6 G and 2 56 x Ye H screws and 2 56 nuts I fastening the Deflection Plates to the PBN Cover Figures 10 and 11 Note Figures 10 and 11 show the PBN Chamber already installed your PBN Chamber will not be 4 Loosen the bottom 2 56 x 3 6 G and 2 56 x Ie H screws and 2 56 nuts I fastening the Deflection Plates to the PBN End Cover Figures 10 and 11 Now gently rotate the Deflection Plates to clear the center hole in the Cover Continue with step 6 SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information 2013 SVT Associates Inc All Rights Reserved Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 9 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION O_o PBN Chamber with Optional Aperture Installation Instructions 5 Remove the 2 56 X 1 4 titanium flat head screws D on the underside near the tip of the source Figure 21 There are two screws one on each side Removing these two screws will allow you to remove the PBN Cover Figure 22 Be careful with the tantalum wires that attach to the Deflection Plates the wires have
17. any shall be assigned to the CUSTOMER without recourse to SVT Associates The foregoing warranties are in lieu of and exclude all other warranties not expressly set forth herein whether expressed or implied by law or otherwise including without limitation any warranty of merchantability or fitness for a particular purpose In no event will SVT Associates be liable for any consequential damages IN THE EVENT OF SVT ASSOCIATES LIABLITY WHETHER BASED ON CONTRACT TORT INCLUDING BUT NOT LIMITED TO NEGLIGENCE AND STRICT LIABLITY OR OTHERWISE THE CUSTOMER S SOLE AND EXCLUSIVE REMEDY WILL BE LIMITED SVT ASSOCIATES HAS THE FOLLOWING OPTIONS TO REPAIR OR REPLACEMENT F 0 B SVT ASSOCIATES MANUFACTURING PLANT BY THE COMPANY OF ANY NON CONFORMING ITEM FOR WHICH CLAIM IS MADE BY THE CUSTOMER OR TO REPAYMENT OF THE PORTION OF THE PURCHASE PRICE PAID BY THE CUSTOMER ATTRIBUTABLE TO THE NON CONFORMING ITEM SVT ASSOCIATES WILL NOT BE LIABLE FOR ANY OTHER DAMAGES WHETHER DIRECT INCIDENTAL CONSEQUENTIAL OR OTHERWISE Return Policy Any request by the CUSTOMER for return of standard products other than for warranty claims under warranty hereof for all or any part of purchase order accepted by SVT Associates shall be subject to the following conditions A The CUSTOMER must make notification to SVT Associates within thirty 30 days of original shipping date B A RETURN GOODS AUTHORIZATION number must be assigned to and accompany all goods or mat
18. ation open the flow controller to full open when initially pumping down the source Allowing the gas to flow through for at least 30 minutes will flush the line flow controller and RF Source Other ways to reduce contamination in the gas may be to 16 Use only high purity gas 17 Use only stainless steel lines from the gas bottle to the flow controller 18 Use a heat tape to bake out the line 19 Always keep the inlet to the flow controller above atmospheric pressure we recommend 20 50 psi Operation Starting the Source CAUTION Always turn the water flow on first when starting the source and turn the water flow off last when ending the source use This avoids exposing the source to high temperatures When shutting down let the coolant flow for 15 minutes after shutoff 1 Turn on the coolant flow We recommend maintaining a coolant temperature of slightly below room temp approx 20 C at all times WARNING Take extreme care when operating at high RF power The RF energy can produce severe burns Make sure the system and all components are connected to a good RF ground This will minimize RF interference and provide increased safety 2 Turn on the RF generator Slowly turn the power up to 50 watts Slowly adjust the variable capacitor s to reduce the reflected power level to a minimum This minimum can be very sharp take care not to tune past it 3 Turn the RF power up to 100 watts Again tune the variable capacitor
19. cing Before shipping equipment for repair or servicing obtain a Return Authorization Number assigned by SVT Associates Liability Disclaimer SVT Associates Inc takes steps to assure that its published specifications and manuals are correct however errors do occur SVT Associates Inc reserves the right to correct any such errors and disclaims liability resulting therefrom No Liability for Consequential Damage In no event shall SVT Associates Inc or anyone else involved in the creation production or delivery of the accompanying product including hardware and software be liable for any damages whatsoever including without limitation damages for loss of business profits business interruption loss of business information or other pecuniary loss arising out of the use of or the results of use of or inability to use such product even if SVT Associates Inc has been advised of the possibility of such damages SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 27 of 27
20. com Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Appendix Specifications Source Gas Flow FL eC AUS RANGES aceasta oc psec E E enanese eee saaa owes ate ete a E EN 10 sccm N2 Maximum Mlet FESS UNG isione nace asad atic ee tasen aman EA AEE N EE 150 psig Fo 1110 Bn 2 1916 gt eee een ene ere ee ee ee eee 2 to 100 of Full Scale FUNS COMP ATIDIS Wit sioeecanictscnsncownesaccchanedessanicetencates a a dete r Swagelok 4 VCR male Gar Grade eee eee eee ee eee eee Nitrogen 5 0 or greater high purity gas inlet filter recommended Wetted Materials ipecec3 ceacdicced senecenweeeacasieceSoedesoneaeam canes coca tines eseauienemannneinen nea esedmereendiede ecedtendcs Standard 316L S S VAR RF Power Generator BC RCC y eae ee R demteceniet ae abet anne aetee ante conan E acme taenae snes E EE area E EEE E ATER 13 560 MHz Be OWO ices cere ores ene ae EE poms E E E sane E sense EE A eatin R 0 1200 W BEV SG ANC E E A A A A E E A E AEA A T E S 50 Ohms CONNECCION TYDE eainiie aee E E E pone E E EEEE E E EE E TE E EEEE EAEE ERTER N type OIA eeina ai EEE EE E ee EEEE E A E O EEE Forced air inlet at both sides outlet at rear PO FG OM eppen aetna eects E meena R R E AA OE E REEE E E a E E EER 0 95 0 99 Power REQUIFEMENS ccecccceeceeceeceecneceeceeeeeeeceeeneteeceeeeeeaeeeeeecgerseteesaesaeaeeees AC 50 60 Hz 187 240 V 1800 VA RF Plasma Source Operating TOW CF a cieesivscsuie secre seston inniinn never nann O a nines edie a
21. e for future transportation in case of repair or upgrades Electrical Connections When connecting the RF generator to the RF Source simply connect the output of the generator to the RF input of the matching network The input on the source is a Type N connector It is necessary the coax cable impedance be 50 Ohms We recommend a coax type of RG 213 Although it is not necessary it is beneficial to cut the transmission line to multiples of one half wave length This ensures maximum power transfer between the generator and the source regardless of the transmission line impedance a Length F Note Where C is the speed of light Vf is the velocity factor for the transmission line F is the frequency 13 56 MHz and Length is one unit of length SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 19 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION Rear View Front View MHV Plate 2 Shutter Ignitor Open Shutter MHV Plate 1 MHV Plate 2 RF Feedthrough Connecting the Gas The presence of stray gases can effect the operation of the source When the gas inlet is contaminated lighting the plasma tends to be more difficult To reduce contamin
22. ed that you use a Pana Vise rotatable desk vise to hold the flange and assembly SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 5 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION SESE EES ES eee Assembly a Letter Quantity Size Description Image Part Number Stainless Steel Binding Head Screw 1 TE Os Slotted on top shield cover SOME Vented Stainless Steel Flat Head Screw 3 i Or Phillips on top shield cover Pa SAALI Titanium Flat Head Screw Slotted o le uw Titanium Vented Binding Head Screw v8 B ee Slotted on top shield cover pecan E 2 56 X 5 4 Stainless Steel Binding Head Screw o 5001722 top shield cover F 6 32 X 2 Stainless Steel Socket Head Cap Screw 5002364 G a 2 56 X es Tantalum Pan Head Screw Slotted 5004104 H 2 2 56 X Tantalum Pan Head Screw Slotted 5003565 s zs mamio 0000 v J 2 56 X Tantalum Pan Head Screw Slotted wy 9004103 Removal of the RF Plasma Source Top Cover x slit o Holding Device Figure 2 1 Make sure the plasma source is securely fastened in a holding device with the 4 x 74 slit on top SAAT SVT As
23. erials being returned by the CUSTOMER to SVT Associates SVT Associates must assign said number prior to any and all returns Goods not accompanied by a RETURN GOODS AUTHORIZATION number will be refused by SVT Associates and returned at the CUSTOMER S expense C CUSTOMER shall prepay shipping charges for products being returned to SVT Associates D Products being returned to SVT Associates should be properly crated for shipment and the CUSTOMER shall bear the risk of loss until delivered to SVT Associates E Products being returned to SVT Associates must be returned in the condition originally received by the CUSTOMER and free from damage use or modification which would render the product unusable for resale by SVT Associates F All applicable taxes duties insurance and shipping charges shall be the sole responsibility of the CUSTOMER G Goods being returned for other than warranty repair shall be subject to a restocking charge of twenty 20 percent of the original sales price of the returned item SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 26 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION SO Returning Equipment for Repair or Servi
24. gure 18 4 Install the 2 56 X 1 vented titanium binding head screws C near the tip of the source Figure 19 There are two screws one on each side Figure 19 5 Next install the 2 56 X vented stainless steel flat head screws B near the flange Figure 20 There are six screws three on each side 6 Tighten all screws 7 Figure 20 SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 12 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION SS O_o mele the PBN Cover With the four tantalum screws securing the PBN Cover loose loosen the four screws about the perimeter of the shield See Note the Figure 3 adjustment 2 When those four screws are loose the PBN ae i n Cover can slide in and out of the source i x Slide the cover so it fits snug against the cae PBN Chamber or aperture 3 Tighten the four screws about the perimeter of the shield Figure 3 Adjusting the Aperture 1 Loosen the 2 56 X 6 stainless steel binding head screws E located around the shield near the flange See Figure 21 There are three screws spaced around the shield Figure 21 2 Looking at the tip of the source gently center the aperture by tip
25. ion The gas flow can be adjusted to achieve optimal deposition conditions without disrupting the plasma The RF power level can be varied significantly without extinguishing the plasma Normal operation is usually around 250 W to 400 W for Nitrogen Operating power levels of up to 500 W and down to about 130 W are possible Heating can become a problem at the high end and the plasma will become unstable and eventually extinguish if the power is too low The optimum operating conditions for a given system will have to be determined experimentally CAUTION If there is a sudden large change in reflected power this is an indication that something has gone wrong Check if any of the following has occurred the plasma has extinguished the gas flow has changed the cooling water flow has been disrupted the system pressure has changed an open short or arc has developed in the matching box or the RF source itself Turning off the Source 1 2 3 4 9 WARNING Please follow these steps in the following order to avoid damaging the source Turn off the RF supply Reduce the gas flow rate to zero Let the coolant flow for at least 15 minutes Turn off the coolant flow The RF Source is now turned off SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc A
26. ll Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 21 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION Maintenance Changing the PBN Cover The RF 4 5 is relatively maintenance free however it may be necessary to change the PBN Cover 1 Remove the source from the vacuum system Loosen the four tantalum screws at the end of the RF Source Carefully lift but do not remove the PBN Cover Be careful not to damage any of the ceramic wire insulators that pass through the PBN Cover Also be careful not to damage the deflector plates Using the tweezers remove the PBN Aperture If the aperture is snug use some isopropyl alcohol as a lubricant and carefully rotate the tip this will remove it from the PBN Chamber Place the new PBN Cover so the recessed end just sets inside the PBN Chamber Lower the PBN cover Replace the four tantalum screws The change is now complete Reinstall the source in the vacuum system SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information 2013 SVT Associates Inc All Rights Reserved Page 22 of 27 Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Engines for Thin Film Innovation 7620 Executive Drive Eden Prairie MN 55344 3677 USA Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta
27. lling the Plasma Chamber naannennennnnnnnnnennennnnnnnnnsnrnnrnnrnnrrrrrerrnnrrnrrerrerrnnrnnrrerrerrnnrrnrrerrerrnnrrnrrenrnrrnnrrnrreren nnnm 8 Closed end PBN Chamber Installation Instructions ccccccecccceceseecceeeeeeeeseeeseeeeseeeaeeeseeeeseeeseeeseeeeseeeseeseeesaeeeaes 8 PBN Chamber with Optional Aperture Installation Instructions cccccecceccceeceeeeeeeceeeeeeeeeeceeeceeceeeseeseeeeeeeaeeees 10 Along Wie PBN CNaMmDE sssrinin a E N aE a E E O E 11 Cocco end PBN CRAMO E arroen E E A RA A 11 PBN Chamber with Optional Aperture ccccccccccceccceceseeceeeceeeeeeceeeeeeeeeeeaecseeceeeseeseetaeeeneesgecseeteeseueeaeeteesneeaeeees 11 Replacing the Shield COVEN asics sisnactecendnent sates peshaency eetienteed chester desetenece yactiemios nsedqnede oekieamensiocbaloweeatiteeesekeetsheonertactiaactens 12 Adj sing Me PBN COVEP ireren ionene E ASEE e A EE E ETA E OE E OERE oscar sscondeueaa nase 13 Adjusting the ADORU gts ccs eps acrerien Seater ina ie E EEEE E EERE RS sai den top ne see strat A E E E E E rS 13 Installing the Shutter Paddle Optional 00 00nnannannnannannnnnnnnnnnnnnnnnnnnnnnnnrrnsnnennnnrrnrrnnrnnnnnrnrrrsnrnnrnnrrnrrnnrnnrnnrnnrennennnn 14 Installing the Source into the Deposition Chamber 0 ceccceeccceeeceeeeee cece eeeeeeeaeeeseeeseeeeseeseeesseesseeesseesseeeseeeseeees 15 The Matching Network centers se her ctes Sere spr rsitceetonienigtedteentaceoe deen dt aade oe ctatbice
28. lpanietbais lt am ay tesincieteenanina ane ceciunmeceeedenteeoneandectadeteneecenceeetds 15 Fiectical fo a aioie 6 4 cee teeta ee een ene een ee ee nee eee ee ee ee ee eee 19 COTA SG IG Ne G I ceases E E cae sens esadesnscieacaaunsiovade ents E A E A E 20 OPEO aa A E E A E E EE A ee E R 20 Saing ES SOUC Eiseres rnea EE EEA EDE E E a ENA Ei Eii 20 TNNT ON G OU E neor E E O EE E E A E N TE EEE OAE AEE E oi EEO 21 BVI FAN NG lt EEE TEE T E E A A A T T AAEE E E A E E E T ETTET 22 Ghanding tne PBN COVEI acces ro nnn EAE Aa E a ER E EERE e ORE OE a EEEO 22 AP PERIK ere E E T E A E A E E S E E E E te 23 SPECIMENON E eea ae dane un E E A EA A E A EEA E A A EEE A AAEE 23 CO ONS arts e E R E vine E E E E T E E EE 24 SeA g og A o Gene nee nee EE E A A E E E E ee E eee 24 Component Dala ONSE garters as a aa R o EE 25 Warranty and Limitations of Remedies ccccccccceccceecc asec cece ee eee eese cess eeae eee seeeaeeeseeeeseeeseeeseeeeseeeseeseeeeeeeseeeseeeegees 26 Ror eo Ch eee ee eee ene eee EER E E ee eer 26 Returning Equipment for Repair Or S rviCiing ccccccecccsccceeceeeceeceeeeueeeeeceeeceeeeeeeecessecseeeseesseeseeeseeeeeseeeseeeseeseeeneees 27 SAAT PROPRIETARY INFORMATION A n SVT Associates Inc SVT Associates Proprietary Information 2013 SVT Associates Inc All Rights Reserved Page 2 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION Introduction SVT Associates RF Plasma So
29. ping the shield side to side relative to the flange face Once the aperture is centered tighten the three 2 56 X 4 stainless steel binding head screws E SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information 2013 SVT Associates Inc All Rights Reserved Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com Page 13 of 27 Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Engines for Thin Film Innovation PROPRIETARY INFORMATION Installing the Shutter Paddle Optional The source is shipped with the shutter removed to prevent damage Once the source tip is installed the very last thing to do is install the shutter 1 Begin by setting the rotary feedthrough at zero on the indicator 2 The components needed for assembly are two Titanium nuts and a PBN shutter Install the first Titanium nut about half way down the threaded rod See Figure 22 2 2 Figure 22 3 Install the shutter so the shutter completely covers the aperture Secure the shutter with the other Titanium nut Be sure not to twist the shaft the nuts are place on Use two wrenches and tighten the nuts against each other See Figure 23 Figure 23 SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com ww
30. sociates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 6 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION TT ___ 2 Remove the 0 80 X stainless steel binding head screws A along the seam where the top and bottom shield covers meet Figure 2 There are six screws three on each side 3 Next remove the 2 56 X vented stainless steel flat head screws B near the flange Figure 3 There are six screws three on each side Figure 3 4 Remove the 2 56 X 4 vented titanium binding head screws C near the tip of the source Figure 4 There are two screws one on each side 5 Remove the 2 56 X 7 titanium flat head screws D near the tip of the source Figure 5 There are two screws one on each side Figure 4 Figure 5 6 Now remove the 2 56 X 46 stainless steel binding head screw E located on the top of the shield near the flange See Figure 6 Figure 6 SAMAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information 2013 SVT Associates Inc All Rights Reserved Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com Model SVTA RF 4 5 Nitrogen Version 2
31. to hold the PBN Cover in place Figure 21 There are two screws one on each side Locate the appropriate aperture with a small tweezers insert the aperture between the PBN Cover and the PBN Chamber Make sure the PBN Cover is flat against the aperture If the aperture is a snug fit use some isopropyl alcohol as a lubricant and turn the aperture as you insert or remove from the PBN Chamber Never push or pull the aperture directly on to the PBN Chamber Continue with Replacing the Shield Cover number 1 on page 12 SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 11 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION Replacing the Shield Cover 1 Begin by installing the 0 80 X stainless steel binding head screws A along the seam where the top and bottom shield covers meet Figure 16 There are six screws three on each side Do not fully tighten the screws yet Figure 16 2 Install the 2 56 X Yg stainless steel binding head screw E located on the top of the shield near the flange See Figure 17 Figure 17 3 Install the 2 56 X 1 4 titanium flat head screws D near the tip of the source Figure 18 There are two screws one on each side Fi
32. ugh Figure 27 SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates Proprietary Information Phone 952 934 2100 Fax 952 934 2737 Email sales svta com www svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 16 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION 4 Attach the copper strap to the RF feed through by removing the bottom of the connector placing the top half of the connector around the copper tube replacing the bottom half of the connector and tightening the screws Do not over tighten See Figure 28 and 29 a Figure 28 5 Bevery careful when attaching the copper clamp making sure you do not twist the RF Feedthrough Figure 29 6 You can loosen the screw shown in Figure 30 _ oa T Z to make installing the copper clamp easier a gt gt Figure 30 7 Attach the plastic water tube to the end of the RF Feedthrough by tightening the Swagelok connectors on the copper and plastic tubing Do not over tighten and take care not to bend the copper feedthrough See Figure 31 Be sure to use two wrenches The smaller wrench on the RF Feedthrough and the larger on the water line This copper feedthrough is delicate and will bend or break if not tightened carefully SAAT SVT Associates Inc 7620 Executive Drive Eden Prairie MN 55344 3677 USA SVT Associates
33. urce 4 5 has been optimized to break the Nz bond and supply sufficient nitrogen atoms for deposition and cleaning SVT Associates atom source can produce fluxes as high as 5 um hr under optimal growth conditions The RF 4 5 is designed to mount on a standard 4 5 nipple in any orientation This source requires water cooling a gas source a mass flow controller or leak valve and an RF generator if not ordered with the source We recommend an RF generator which is capable of supplying at least 500 watts into 50 ohms at 13 56 MHz and a gas supply with a maximum flow rate of 10 to 20 sccm Standard Cubic Centimeters per Minute Although the maximum power level and flow rate are not necessary for sustained operation they do simplify ignition of the plasma Precaution e Review the entire manual prior to installation and operation of the RF Plasma Source e SVT Associates RF Plasma Source is engineered for optimum performance and reliability Any modification of the equipment or operation of the equipment outside the prescribed conditions in this manual will void the warranty and may result in damage of the equipment e Before installing and operating your newly delivered RF Plasma Source inspect the shipping container inside and out and note any visible damage Notify SVT Associates immediately If any damage is noticeable please send an email to support svta com e Observe all warning and material handling instructions listed in the MS
34. w svta com 2013 SVT Associates Inc All Rights Reserved Model SVTA RF 4 5 Nitrogen Version 2 0 1 14 Page 14 of 27 Engines for Thin Film Innovation PROPRIETARY INFORMATION O_o Installing the Source into the Deposition Chamber The RF 4 5 is designed to be mounted on a 4 5 conflat flange 1 Insert the source into the chamber make certain the 4 x 14 slot in the shield cover does not contact the vacuum chamber If for example the source is inserted into a cooling shroud the slot must not contact the wall of the cooling shroud this will short circuit the source The source can be adjusted away from the shroud by adjusting the shield 2 After the source is inserted into the chamber attach the mini tee on the back of the source Align the tee so the viewport is along the axis of the RF Source This viewport is necessary for viewing the plasma state The tee has a rotatable flange so the tee can be rotated in a position that is most convenient for the gas feed An adapter is supplied with the source 3 Insert the RF source into the system flange with necessary gasket It can be mounted in any orientation Make sure there is room for the matching network box Note that the source is a snug fit into a standard 4 5 nipple Insert the source slowly Take care to keep it straight 4 Tighten the 8 bolts for the 4 5 conflat flange The Matching Network Carefully remove the matching network from the second box Unwrap it
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