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Pscan manual

1. pe DUM Select ADC6on ACL Z ERR LEER om e a peg su see CH 1 above memes ZSEN G 1 255 CS8 0 D07 D00 A B 1 WR 0 Z Sensor Gain DAC value 255 1 mee meme ree emt Lom meses p restreint T X16 1 X15 0 X14 1 0 turmae OS 5 lt 20 1 X19 1 18 0 m p DAMES ANE 0 a i LR_F X24 1 X23 1 X22 1 Lateral Force Filter aaa Range selection Re see X24 1 23 1 X22 0 a PID 12 1 T ELI FEEDBACK X8 0 X12 1 External X8 Any 12 0 7 1 X33 1 Z SEN PID_DEM inactive PID_DEM X7 0 X33 1 Bypass demod ere 00 a oor 98 2 6 5 SPM CONTROLLER 27 6 5 ZERR_G 1 255 CS2 0 D07 D00 A B 0 WR 0 Z ERR Gain DAC value 255 1 0 255 CS3 0 007 000 B 1 WR 0 PID proportional DAC value PR 0 255 CS2 0 007 000 B 1 WR 0 PID Integral DAC value 0 255 CS3 0 007 000 0 WR 0 Derivative DAC value D Z SET 0 255 CS1 0 D07 D00 A B 0 WR 0 Z Setpoint DAC value 8 0 10 000mV bit PID X4 0 PID off Open Loop OFF ON OFF LG ow DEMOD DEM G X9 1 X10 1 11 Demodulator Gain SELECTS selection 1 1 X9 0 10 1 11 1 2x
2. MR scale F_UNIT characters none Master software only Force Calibration units Characters pog Constant y i NON SCL_CORR none Master software on Disable Scale Nonlinearity Disable Correction P needs S double float none Master software only 5x3 Xsen Xsen Xsen V 2 00 8 double float none Master software only Yreal Sy1 sen none SY2 double float none Master software on Sy2 Ysen Ysen 53 double float none Master software only 5 3 sen Y sen Y sen V 2 IMG CORR none Software flow control No imagenonlinearity correction 1 none Software flow control On line image correction On line acquire 2 none Master software only Off line image correction Off line resample doublefloat Software flow control xsen A 1 xreal none 103 SPM CONTROLLER pixels 1 A 2 xreal xreal A 3 xreal xreal xreal ysen B1 yreal B2 yreal yreal B3 yreal yreal yreal image image pixels 2 none Software flow contro none 0 10 000 mV pixels 1 tware flow contro pixels 2 twareflow contro none Sofi twareflow contro twareflow contro pixels image scans Theresolution of reference scans reference scan order coeff 1st reference reference scan Hyst Correction 2nd order coeff 2n
3. SPM CONTROLLER Technical Support Form Photocopy this form and update it each time you make changes to your software or hardware and use the completed copy of this form as a reference for your current configuration Completing this form accurately before contacting Pacific Nanotechnology Inc for technical support helps our applications engineers answer your questions more efficiently If you are using any Pacific Nanotechnology Inc hardware or software products related to this problem include the configuration forms from their user manuals Include additional pages if necessary Name Company Address Fax Phone Computer Brand Model Processor Operating system include version number Clock speed MHZ RAM MB Display adapter Mouse yes Other adapters installed Hard disk capacity MB Brand Instruments used PNI hardware product model Revision Configuration PNI software product Version Configuration The problem is Error messages The following steps reproduce the problem 126 PSCAN2 Documentation Comment Form Pacific Nanotechnology Inc encourages you to comment on the documentation supplied with our products This information helps us provide quality products to meet your needs Title PScan2 Controller User Manual Edition Date January 2002 Part Number Please comment on the completeness clarity and organization of the manual If you find errors in the manual plea
4. angstroms 77 3 some arbitrary units Y_UNIT 0 Y scale unit type 0 um microns 1 nm nanometers 2 angstroms 3 some arbitrary units Z SCALE 10 00 10 00 in Z UNITs um full scale Z HGT 2 UNIT 0 Z scale unit type 0 um microns 1 nm nanometers 2 angstroms 3 some arbitrary units LA 4 mV millivolts 75 SCALE 10000 10000 2 UNITs nm full scale Z SEN 100 00 100 00 in Y_UNITs um when fully zoomed out Y_SCALI ZS_UNIT 1 2 scale unit type 0 um microns 1 nm nanometers 2 angstroms 3 some arbitrary units ey 4 mV millivolts AUX1_SCALE 20000 20000 in AUX1_UNITs mV full scale AUX IN1 AUX1_UNIT 4 2 scale unit type 0 um microns 94 SPM CONTROLLER 27 6 5 1 nm nanometers 2 angstroms 3 some arbitrary units 4 mV millivolts AUX2 SCALE 20000 20000 in AUX2 UNITs mV full scale AUX IN2 AUX2 UNIT 4 2 scale unit type 0 um microns 1 nm nanometers 2 2 A angstroms 3 some arbitrary units 4 mV millivolts ADC SCALE 20000 20000 in ADC UNITs mV full scale other ADC ADC UNIT 4 Z scale unit type 0 um microns 1 nm nanometers 2 angstroms 3 some arbitrary units 4 mV millivolts X POS 2000 X DAC output 12 bit 0 4095 0 10 000 mV
5. Select PID Values 3 X 8 Bits Z PID ON OFF STATE PID On off 1 Bit DEMOD SELECTS Demod Gain 3 Bits Demod Filter 3 Bits for 10 Hz 100 Hz 1000 Hz Full Range Z PIEZO Output to Drive Piezo Z Dac out 12 Bits X Y CONTROL X y Offset 8 Bits Each Axis Zoom 8 Bits P I Control of X and Y Feedback Loops 2 X 8 Bits Each Axis FREQUENCY SYNTHESIZER Frequency Select 32 Bits Amplitude Select 10 Bits Frequency Sweep W Oscilloscope Window AUX 1 amp 2 OUTPUTS Select Value 12 Bits 0 10 V 107 SPM CONTROLLER 27 6 5 LASER MOTORS Motor Select 6 Steppers 0 5 Amp Phase Test Routine Direction Full half Step Enable Clock Laser On off 1 Bit Dc Motor Forward and Reverse Values 8 Bits Test Routine Dc Motor Apply Time SCAN IMAGE SETUP Resolution Number of Points amp Lines Select Forward And or Reverse Scan Selected in Software Scan Rate Select Lines per Second Scan Rotation Select 360 360 Deg Two Software Options Tbd Calculate X Y Coord on Master Calculate on Slave Couple of Issues Re Overscan Slow Reverse Accel Select Number of Channels to Acquire From 1 to 4 108 SPM CONTROLLER 27 6 5 Appendix TopoMetrix File Extension Assignments Use of Topometrix Image File Types for PScan2 PSc
6. Input sources Input gain range Output signal interconnect Imaging signal 2 related Signal Conditioning amp Control for PID feedback loop Photodetector top quadrants minus bottom quadrants Demodulated signal of Photodetector top quadrants minus bottom quadrants External signal source Demodulated signal of External signal source Z sensor signal Offset 0 to 10 VDC 8 bit resolution Gain 1 to 255 8 bit resolution Filter 10 Hz 100 Hz 1 kHz and full oandwidth Output For Z PID loop or Imaging signal Inverted negative going and non inverted positive going Range 0 to 10 VDC or 10 to 0 VDC 8 bit resolution Positive or negative level 1x Summing Amplifier Output to PID circuitry and for Imaging signal 1 to 255 8 bit resolution 1 to 255 8 bit resolution 1 to 255 8 bit resolution 1 to 255 8 bit resolution To Z Driver Amplifier or for Imaging signal 1x or 3x gain Oto 10 VDC 8 bit resolution Disengages PID loop but allows software selectable Offset to set Z output for independent Z piezo positioning 10 VDC signal applied to Z Driver Amplifier for rapid probe retract during initial probe approach to surface Input types from Signal direction Z Set point level Comparator PID Circuitry Gain Proportional Output Offset Comparator Analog switch Offset Probe Retract Integral Derivative 47 SPM CONTROLLER 27 6 5 X Y Raste
7. OMAN AU 5 UN H AN GND FOR DETECTOR PREAMP DET T L DETECTOR PREAMP TOP LEFT AN GND DET T R DET PREAMP TOP RIGHT AN GND DET B L DET PREAMP BOTTOM LEFT GND DCMTR DET B R DET PREAMP BOTTOM RIGHT EXT EXTERNAL INPUT COMMON EXT EXTERNAL INPUT 10 VDC 15 VDC POWER NC 15 VDC POWER NC LZR RET LASER RETURN LZR PWR LASER POWER 5 VDC DCMTR DC MOTOR FOR PROBE APPROACH Z PY2 Z PIEZO MODULATOR OUTPUT Z RT2 RETURN FOR Z PIEZO MODULATOR Z PY1 Z PIEZO ACTUATOR OUTPUT Z RT1 RETURN Z PIEZO MODULATOR Y PIZ Y PIEZO ACTUATOR OUTPUT Y RET RETURN Y PIEZO X PIZ X PIEZO ACTUATOR OUTPUT X RET RETURN X PIEZO Z HIGH VOLTAGE BOARD OPTION HIGH VOLTAGE BOARD OPTION HIGH VOLTAGE BOARD OPTION X HIGH VOLTAGE BOARD OPTION HIGH VOLTAGE BOARD OPTION GND X 61 PSCAN2 SPM CONTROLLER 27 6 5 CONNECTOR 5A FOR PACIFIC NANOTECHNOLOGY SCAN HEAD 15 PIN COMPACT D FEMALE Y RET AN GND X RET DET T L Z RT1 DET T R X Y Z SENSOR BOARD CONNECTOR 9 10 PIN SINGLE ROW MOLEX 0 120 POCKET HEADER TYPE MALE X SEN 6 zs GND Y SEN Y SEN Y SEN ZS POWER IN HIGH VOLTAGE 1 GND BLK 4 62 SPM CONTROLLER 27 6 5 Appendix Block Diagrams for PScan2 Controller Level 1 and Level 2 Master Slave Electronics Block Diagram PScan2 CONTROLLER LINEARI
8. Extra Zoom By double clinking the left mouse button when the cursor is within the scanned image anew window is opened The grid region represents the current zoomed area The user may zoom 2x or 4x anywhere within the area by clicking on the zoom buttons at bottom of the window and moving the outlined area by pointing the cursor within the area and dragging the outline while pressing the left mouse button Clicking the Apply button locks in the new scan region Force Distance Curve This function allows the user to measure a force distance curve at any arbitrary location within a scan area Typically the F D curve refers to measuring the Error signal Z Err which is the cantilever deflection as a function of the Z actuator position It represents how the cantilever bends as the tip approaches the surface to contacts and the degree of adhesion of the tip onto the surface on retraction There may or may not be deformation of the surface depending on the hardness of the surface relative to the stiffness of the cantilever SPM CONTROLLER 27 6 5 Select the F D location by pressing the control key and clicking the left mouse key when the cursor is pointing at the location within the scanned image display A black dot appears on the scanned image By selecting Force D istance Curve under the pull down Tools menu a new window appears for selecting the F D parameters activating the D D routine and displaying the approach Curve 1
9. X5 and terminate current mode Acquire channel set by CH TIP parameter value and compare acquired value with the SRF TIP value if value is close then set Z DC motor DAC to zero output level activate the Z PI D On Off switch X4 line into ON state and complete current mode If one of the eight stepper motors is selected by ZMTR TIP parameter value the Controller accesses parameters DIRDWN STEPDWN and CYCLES TIP in the Slave ini file section TIP APPROACH and uses their values for stepper direction full half step and acquisition rate selection Then the Controller enters into the following loop Generate one pulse for the selected stepper motor Check for a STOP FLAG if found then activate fast retract line X5 set ZDAC output to 10 Volt level Z piezo fully retracted deactivate fast retract line X5 and terminate current mode Acquire channel set by CH TIP parameter value and compare acquired value with the SRF TIP value if value is close then activate the Z PID On Off switch X4 line into ON state and complete current mode Repeat current step the number of CYCLES TIP value times Every acquisition cycle takes approximately 15 microseconds The CYCLES TIP value determines the number of acquisition cycles between step pulses Thus the CYCLES TIP value determines the actual speed of the tip approach using stepper motor When the tip approach mode is completed or terminated the Controller wri
10. 13 Z SEN MON7 Output from distance sensor along the Z axis 14 GND 15 Z HGT MON8 1x or buffered Z PID Signal proportional to Z height topology 16 GND 17 Z L R MON Difference signal from quadrant photodetector Left half minus right half 18 GND 11 SPM CONTROLLER MON 10 Difference signal from quadrant photodetector top half minus bottom half MON 11 Output signal for X piezo driver MON12 Output signal for Y piezo MON 13 Set point for X linearizer feedback loop MON14 Set point for Y Jinearizer feedback loop MON 15 Output from distance sensor along the X axis MON 16 Output from distance sensor along the Y axis MON17 Output to X piezo from linearizer feedback loop MON 18 Output to Y piezo from linearizer feedback loop MON 19 Output signal for Z piezo 20 Sum of Photodetector quadrants Start scan DIG GND also pin 50 P2 50 P3 AN INPUT For Pulse Force scanning AN OUTPUT External start scan Auxiliary 2 Output AN INPUT AN INPUT LO AN INPUT HI AN INPUT LO Flag set clear for each data point Z T B GND X DAC GND Y DAC GND X SET GND Y SET GND X SEN GND Y SEN GND X CTL GND Y CTL GND Z PIZ GND Z SUM GND FLGSS also pin 20 P3 DIG OUT also pin 15 P1 EXT MOD was PIXCLK also pin 35 P1 AUX1 DAC EXTSS also pin 34 P1 AUX2 DAC AUX1 AUX1 AUX2 AUX2 AUX1 DAC AN
11. 4 4 t 100 10 Hz DEMOD X26 27 28 Z PM FILTER GAIN gt 5 PHASE 1 2 3 4X GAIN 4 FULL 1K 6 1 100 10 Hz gt 1 X26 27 28 MODULATOR W PHASE Z SET ZSET SHIFTER 0 10V 8 obo x CS1A Z DFB x33 0 SIG IN o T B EXT ol 4 le x Z 2 5 OF J 2 Z SEN ELTE ADC 4 100 10 Hz 14 15 16 NOTES CS LINES CS13 NOT DESIGNATED X LINES X3 UNASSIGNED X13 UNASSIGNED X17 UNASSIGNED X21 UNASSIGNED X25 UNASSIGNED MONITOR POINTS ZDEM ADC 6A X30 ZERR_ 7 31 GAIN 1 255 52 FILTER FULL 1K 100 10 Hz X18 19 20 INTEG 1 255 CB DERIV 1 255 PROPOR 1 255 CS3B MODULATOR Z POS INVERTED Z ERR ADC 1 gt GAIN 4X 1X 6 Z PID 1 M iov REF X4 Z DAG 4 10 0V J 12 BIT 4 510 Hh 64 2 6 5 Z HGT anc 2 i 2 gt V 9 Z RT1 SPM CONTROLLER 27 6 5 12 AUX1 DAC DAC gt 0 10V csi 12 AUX2 DAC gt 0 10V 512 STEPPER STEPPER STEPPERS LOGIC DRIVER y AUX1 CS4A
12. CS14 1 00 1 5 11 YZM O G CS15 1 00 B 2 1 6 10 L R CS16 1 00 1 7 09 X LINES POLARITY ZSIG NONINVERTPOL SEN 1 00 2 1 0 24 POLARITY ZSET NONINVERTPOL SET x1 1 00 CH2 1 1 23 UNASSIGNED 2 1 00 C42 1 C2 22 HI FOR LASER ON LASER x3 1 00 CH 1 C3 21 HI FOR OPEN LOOP OPEN LOOP X4 1 00 1 C4 20 HI TO RETRACT RETRACT X5 1 00 C42 1 5 19 LO FOR 3X ZGAIN Z ADC 3X X6 1 00 CH2 1 C6 18 LO FOR DEMOD BYPASS DEMOD BP X7 1 00 CH2 1 7 17 8 00 GROUND FROM I O BOARD LOCAL GND PIN 50 5 VDC FROM l O BOARD NC PIN 49 EXT T B SWITCH LO FOR EXT X8 1 00 17 A0 32 LO FOR DEMOD X2 GAIN DEMOD 2X X9 1 00 17 1 1 LO FOR DEMOD GAIN DEMOD 3X 0 1 00 7 A2 30 LO FOR DEMOD GAIN DEMOD 4X 1 1 00 AHB 7 29 LO TO SELECT Z SEN X12 1 00 17 8 SPARE X13 1 00 7 A5 27 LO FOR BWIDTH Z SENSOR ZSBW 10 X14 1 00 7 A6 26 LO FOR BWIDTH Z SENSOR ZSBW 100 X15 1 00 7 A7 25 LO FOR BWIDTH Z SENSOR 1 ZSBW 1000 X16 1 00 BH 7 40 UNASSIGNED X17 1 00 B 3 7 B1 39 LO FOR BDWIDTH Z POS 1X PBW 10 X18 1 00 7 2 38 LO FOR BDWIDTH Z POS 1X PBW 100 X19 1 00 7 B3 37 LO FOR BDWIDTH Z POS 1X PBW 1000 X20 1 00 7 4 36 UNASSIGNED x21 1 00 BH 7 B5 35 LO FOR BWIDTH L R ADC LRBW 10 X22 1 00 BH 7 B6 34 LO FOR BWIDTH L R ADC LRBW 100 x23 1 00 7 B7 33 8 00 LO FOR BWIDTH L R ADC LRBW 1000 X24 1 00 CHS 7 C0 48 UN
13. Controller get a message or status information from the Controller or supply configuration parameter values to the Controller There are four major groups of DCEx protocol components Command files D ata files Log files and one Configuration file Appendix F These are described below Commands constitute empty files except CHANGE FLAG that are created by the Master Workstation and checked deleted by the Controller They are used to put the Controller into one of the designated functional modes exit from a current mode STOP FLAC or notify the Controller about configuration parameter value changes 19 SPM CONTROLLER 27 6 5 CHANGE FLAG The CHANGE FLAG file contains a text string with the parameter s section name that was changed and needs to be reapplied If this file contains more than one string then only the Controller services the last line entry IMPORTANT NOTE In order to exit from a current functional mode the Controller needs a STOP FLAG command This is because mode commands cannot interrupt each other except DCMTR FWD and DCMTR REV mode commands which allow for an interrupt Data files are created and filled by the Controller and can be read by the A pplication software on the Master Workstation T hese D ata files contain AD C measurements for oscilloscope modes for the frequency sweep mode for scanning mode and Red D ot alignment mode T hey are stored in either binary or ASCII format depending
14. DCEx commands are used to navigate the Controller through functional modes initiate a specific operation or abort current operation STOP FLAG request current status PING FLAG or notify the Controller about operating parameters change CHANGE FILE In addition to 13 functional modes there are two Standalone modes that are designed for the Controller s network configuration and the Controller s software update Standalone here means that the Controller is not connected to the Master workstation There are two Standalone commands CONFIGURE FLAG and UPDATE FLAG Standalone commands are supplied to the Controller via floppy disk drive and are checked by the Controller only during boot up and only in standalone configuration the Controller is not connected to the Master workstation ET IDLE MODE Command STOP_FLAG Default mode for power on and reboot Time unlimited Logs used ERR_LOG PING_LOG PID_LOG Data files none The Idle mode is the default mode that the Controller enters after first power up reboot or after the STOP FLAG command is issued Being in this mode the Controller polls D evice Directory for the occurrence of any Command flag command file The following cycled order is used for commands polling 22 SPM CONTROLLER 27 6 5 Reset RESET_FLAG Ping PING_FLAG Change CHANGE FILE Tip retract TIP UP Change CHANGE FILE Tip approac
15. DEM_F X28 1 X27 1 X26 1 Demodulator Filter Full Range selection Demodulator mode selection Z PIEZO Z_OUT 0 4095 11 00 510 0 1 11 00 Z Output to drive 0 10 000 mv piezo 12 bit 5 5 0 2 DAC applied to Z piezo Z DAC APPLIED 1 X5 1 Z piezo fully retracted FULLY RETRACTED X OFS 0 255 CS14 0 DO7 D00 A B 1 WR 0 X Offset DAC value 8bit 0 10 000 mV CONTROL 97 27 71 Y 5 25 CS15 0 DO7 D00 A B 1 WR 0 Y Offset DAC value 8bit 0 10 000 mv 6 ZOOM 0 255 514 0 D07 D00 A B 0 WR 0 X Zoom gain DAC value 8bi it D00 A 1 8bit it aa Ea 515 0 DO7 D00 A B 0 WR 0 Y Zoom gain DAC value 8bit XFBK_P 1 255 CS6 0 D07 D00 A B 1 WR 0 X Feedback proportional 255 1 DAC value 1 0 255 CS6 0 D07 D00 A B 0 WR 0 X Feedback integral DAC value YFBK_P 1 255 57 0 007 000 B 1 WR 0 Y Feedback proportional 255 1 DAC value 4 D00 1 DAC YFBK I 0 255 CS7 0 D07 D00 A B 0 WR 0 Y Feedback integra value 0 13 0 X Feedback open loop 0 21 0 Y Feedback open loop 1 X21 1 Y Feedback closed loop ON EXTRA_ZOOM 1 none Software flow control 1x Extra Zoom on DAC 1x zoomed out 2 none Software flow control 2x Extra Zoom on DAC 2x zoomed in 99 SPM CONTROLLER 27 6 5 4 none Software flow control 4x Extra Zoom on DAC 4x zoomed in fF EXTRA_XOFS none Sof
16. ERR LOG Then the Controller accesses the parameter MOTOR STEP DIR STEP PULSES and PACK ET values from the Slave ini file section STEPPERS The MOTOR value selects one of the eight stepper motor available the STEP DIR value selects either forward or reverse stepping direction the STEP value selects either full or half step Parameter PULSES value defines the overall number of stepping pulses to be output to the stepper motor Stepping pulses are output by packets the number of pulses per packet is defined by the PACK ET value The Controller performs network input output operation only between packets therefore the actual rotation speed of stepper motor is defined by the PACKET value The default value of PACKET is 1 The Controller forms 1 ms duration stepping pulses and checks forthe STOP FLAG command every time between pulse packets If STOP FLAG is detected the Controller aborts current mode operation and retums to the Idle mode When the Controller terminates or aborts the stepper motor mode it writes an empty line into the log file ERR 106 34 SPM CONTROLLER 27 6 5 512 1012 DC MOTOR FORWARD MODE Command DCMTR FWD Time limited Logs used ERR LOG Data files none This mode is designed for the D irect Current D C motor operation The D C motor is driven by a control voltage on a Digital to Analog Converter DAC which may vary from 5 000 mV to 5 000 mV Different control volt
17. GND AUX2 DAC AN GND FLAGPT also pin 19 P1 ADC 8B 5 V REFB 5 V REFB NC NC Steppers Digital I The six stepper drivers are rated for 12 V 0 5 A stepper motors The pin out description for the 50 pin dual in line connector is presented in Appendix PSCAN2 SPM CONTROLLER 27 6 5 Chapter Description of Operation This chapter contains a functional overview of the PSCAN2 Controller and explains the operation of each functional unit comprising PSCAN2 Controller 4 1 Overview Today Scanning Probe Microscopy encompasses a large number of techniques for positioning or scanning a small sensing element relative to the sample or specimen of interest The sensing element may be in continually or intermittently in contact oscillating modes with the sample or just above the sample With most of these techniques there are mandatory functions that the controller must perform The principal functions are discussed below High speed analog signal input output acquisition and digital control Most SPM techniques and scanner require repositioning the probe relative to the sample e g output new X amp Y analog voltages and acquire data through one to several analog channels at a rate of a few times per minute to several kHz Feedback loops in X Y and Z Precise reproducible and independent positioning of the tip sensor probe is accomplished by sensing each of the relative motions a
18. Scan mode operation Then the typical Application software actions would include the following Issuea STOP FLAG command to exit from the current mode creates file stop flg in D evice D irectory Modify parameters in SLAVE INI file if needed Issuea SCAN START command to start scan operation creates file scanstrt flg in D evice D irectory Periodically read text line from the LINE LOG file and read the corresponding data set from the SCAN DAT file and update scan progress indicator and process display image Modify parameters in the SLAVE INI file and create a CHANGE FLAG file in the D evice D irectory with a changed section name in it one at a time if needed while scan operation is still in progress Issuea STOP FLAG command if needed in order to terminate scan operation before its completion 21 SPM CONTROLLER 27 6 5 5 2 Commands and Controller Functional Modes The Controller is designed to operate in one of the specific functional modes There are currently 13 functional modes each functional mode represents a specific task performed by the Controller Functional mode can be either time unlimited or time limited An example of a time unlimited mode is the Oscilloscope time mode the Controller is allowed to stay in this mode as long as appropriate An example of a time limited mode is the Scan Image mode the Controller will exit this mode as soon as the scan operation is completed
19. for each axis provide a buffer zone below the lower limit and above the upper limit in order to assure that the signal in the feedback loop will not exceed the actuator s mechanical range There is a succession of eight windows presented in order to provide a visual sense as to how well each axis is operating Tip Approach Retract The primary control of engaging and retracting cantilever tip relative to the scanning surface are three icon buttons Stop is in the center of the window Retract is just above and Approach is just below the Stop icon The motor for Z motion is selected in the box just to the right of the Stop icon If a stepper motor is selected then the relative position of the tip cantilever is shown in the box just below the motor selection box Approach For systems using DC motor the Voltage box sets the rate of approach The voltage may be positive or negative For systems using Steppers the Step Size and Direction may be selected The approach rate is fixed but may be changed if needed See User s Manual D CEx initialization file structure Select Channel Any signal sensing the Z cantilever tip interacting with the surface i e the feedback error signal may be selected Typically it is Z Err for contact mode and Z D em for oscillating modes Surface Value amp Deviation In order to provide for both positive going and negative going feedback error signals as the tip cantilever approaches the
20. frequency sweep mode line into the log file ERROR LOG The Controller further accesses parameter values in the Slave ini file section FREQ SWEEP which are used fora frequency sweep operation Before the actual frequency sweep operation is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS XY CONTROL Z FEEDBACK DEMOD SELECTS AUX 1 amp 2 LASER D uring the actual frequency sweep operation the Controller programs the numerically controlled oscillator for 400 different frequency values evenly distributed over the frequency range determined by the FREQ 5 and the FREQ E values from the Slaveini file section FREQ SWEEP The 400 frequency point are produced at the rate of approximately 12 ms the overall frequency sweep duration is about 5 6 seconds The data for 4 selected input channels are acquired for every frequency point on a first acquire then increment principle Thus the settling time for every frequency point is approximately 12 ms The values acquired for each frequency point are written by the Controller into the data file SWEEP DAT using ASCII text format Thus every line in the data SWEEP DAT contains four decimal values in ASCII text format representing ADC data for 4 input channels The Controller checks for a stop flag STOP FLAG after each frequency point acquisition If the stop flag is detected the Controller writes an empty line into the
21. half step and acquisition rate selection Then the Controller enters into the following loop Generate one pulse for the selected stepper motor Check fora STOP FLAG if found then activate fast retract line X5 set ZDAC output to 10 Volt level Z piezo fully retracted deactivate fast retract line X 5 and terminate current mode 26 SPM CONTROLLER 27 6 5 Acquire channel set by _ parameter value and compare acquired value with the SRF_TIP value if value is close then activate the Z PID On Off switch X4 line into ON state and complete current mode Repeat current step the number of CYCLES TIP value times Every acquisition cycle takes approximately 15 microseconds the CY CLES TIP value determines the number of acquisition cycles between step pulses Thus the CYCLES TIP value determines the actual speed of tip approach using stepper motor When the tip approach mode is completed or terminated the Controller writes an empty line into the log file ERROR_ 106 5 572 56 RED DOT ALIGNMENT MODE Command REDDOT START Time unlimited Logs used ERR LOG PING LOG PID LOG Data files REDDOT DAT The Red Dot Alignment mode is designated to trace the position of a reflected laser beam on a four quadrant photo detector AFM application When the Controller enters into this mode it first writes the Red D ot alignment line into the log file ERROR 106 Then the
22. 0008 51 0 OPTB1 0 0012 0 1 36642 IMG_CORR 1 1 0 00397 96 SPM CONTROLLER 27 6 5 PX2 0 0000102 0 1 23007 Scale Factor primary correction vs Zoom 1 0 00331 1 0 0 pyl Zoom LSB py2 Zoom LSB 2 2 0 00000962 CX0 0 0000175 X Scale Factor secondary correction vs X offset 1 0 00000000233 Lx 1 0 0 cxl Xoffs mV Xoffs mV CY0 0 0000445 Y Scale Factor secondary correction vs Y offset CY1 0 Ly 20 cyl Yoffs mV Yoffs mV 10 5 Hysteresis correction via FFT Last known coefficients A2 0 001484 Xreal 81 a2 Xpos 2 pixels 1 0 6215 Yreal 1 b2 Ypos 2 pixels B2 0 001484 AUTO LINEARIZER Auto linearizer preferences NO LONGER Master ini SINCE VERSION 2 2 4 MOVED INTO Slave ini DEVICE SPECIFIC XOFS ADJUST 300 X offset adjustment 10 000 10 000 mV YOFS ADJUST 300 Y offset adjustment 10 000 10 000 mV XPIX_ZOOM 0 9 X pixel zoom factor 0 00 1 00 YPIX_ZOOM 0 9 Y pixel zoom factor 0 00 1 00 97 SPM CONTROLLER kei a RL IN PUT CH1 none Select ADCO ACL Z POS Sel o me ect ADC10nACL HM senes e none Select ACL Z SEN E e e
23. 13 12 V NC 14 A GND A GND 15 D GND D GND PIN 42 P5 16 COUT 0 NC 17 EXTTRG NC 18 NC 19 45V NC 20 ALLO LOCAL GND 21 ALL1 LOCAL GND 22 ALL2 LOCAL GND 23 ALL3 LOCAL GND 24 ALL4 LOCAL GND 25 ALLG LOCAL GND 26 ALL7 LOCAL GND 27 LOCAL GND 28 AGND X DAC 29 AGND Y DAC 30 1 X DAC 31 EXT REF 2 NC 32 AO2 Y DAC 33 GATE 0 NC 34GATE 1 EXTSS PIN 45 P5 35 COUT 1 EXT MOD PIN 43 P5 36 NC 37 EXTCLK 54 SPM CONTROLLER 27 6 5 96 BIT DIGITAL I O BOARD CONNECTORS 1 amp t 7 50 PIN HEADERS MALE CONTROL LINES GROUND FROM I O BOARD LOCAL GND PIN 50 5 VDC FROM l O BOARD N C PIN 49 DATA BUS LSB Doo A00 1 00 DATA BUS D01 A01 1 00 DATA BUS 002 A02 1 00 DATA BUS D03 A03 1 00 DATA BUS 004 A04 1 00 DATA BUS 005 05 1 00 DATA BUS 006 A06 1 00 DATA BUS 007 07 DATA BUS DATA BUS DATA BUS DATA BUS DATA BUS DATA BUS DATA BUS DATA BUS MSB WRITE TO CHIP WR CHIP SELECT AB AD7008 SYNTHESIZER TCO TC1 TC2 A20 21 LOAD 22 RESET A23 CHIP SELECT LINES SYNTHESIZER AD7008 Z SET PID COMPARATOR Z MTR Z G PID LOOP Z P D PID LOOP STP STEPPER SELECTS STP SS DIR STEPPER SELECTS X FEEDBACK LOOP Y FEEDBACK LOOP ZSEN O0 G UNASSIGNED ZDAC 55 SPM CONTROLLER 27 6 5 AUX1 CS11 1 00 1 B3 13 AUX2 CS12 1 00 1 4 12 XZM 0513 NOT DESIGNATED
24. 255 0 10 000 mV ZOOM 255 X amp Y Zoom 0 255 XFBK P 255 X feedback proportional value 1 255 XFBK I 255 X feedback integral value 0 255 YFBK P 255 Y feedback proportional value 1 255 YFBK I 255 Y feedback integral value 0 255 XPI ON 1 X feedback On Off state 0 open loop 1 closed loop YPI ON 1 Y feedback On Off state 0 open loop 1 closed loop EXTRA ZOOM 1 Extra zoom on ACL DACs 1 1x default 2 2x 4 4x Extra Y Offset on ACL DAC 0 4095 Frequency Synthesizer Section EXTRA YOFS 1024 FREQUENCY SYNTH FREQ 4294967295 Frequency select 0 4294967295 20 1 000 kHz F 512 Amplitude select 0 512 0 10 000 mV PHASE 0 Phase shift 0 4095 0 00 360 00 deg Extra X Offset on ACL DAC 0 4095 EXTRA XOFS 1024 AUX 1 amp 2 AUX 1 amp 2 Output selects Section AUX1 4095 AUX 1 output 0 4095 0 10 000 mV AUX2 4095 AUX 2 output 0 4095 0 10 000 mV STEPPERS Steppers Section MOTOR 4 Stepper motor select 0 7 STEP DIR 1 Stepper direction select 0 Forward 1 Reverse STEP 1 Stepper step select 0 Full step 1 Half step PULSES 1000 Pulses to output to stepper 0 65535 PACKET 100 Number of step pulses per packet network IO between 91 SPM CONTROLLER PSCAN2 packets only Controls speed of stepper mot
25. ASCII text line in the line log file always represents the number of the line scan data sets in the data file SCAN DAT 28 SPM CONTROLLER 27 6 5 The Controller checks for a stop flag STOP FLAC after each line scan operation If the stop flag is found the Controller writes an empty line into the log file ERROR_LOG and terminates Scan Image operation The Controller also checks for change flag CHANGE FILE indicator after each line scan If this flag is found and indicates that IN PUT SELECTS Z FEED BACK DEMOD SELECTS FREQUENCY SYNTH PID ON OFF Z PIEZO AUX 1 amp 2 or LASER section was modified then the Controller applies parameter values from that section of the Slave ini file and continues Scan Image operation Else if the change flag indicates SCAN IMAGE or XY CONTROL modified section the Controller wnites the Scan Image mode restarted line into the log file ERROR_LOG and restarts the Scan Image operation from the very beginning When Scan Image operation is completed the Controller writes an empty line into the log file ERROR LOG and retums into the Idle mode DnE OSCILLOSCOPE TIME MODE Command OSC1 START Time unlimited Logs used ERR LOG PING LOG PID LOG Data files 0501 DAT This mode is designed for 4 input channel acquisition at the real time scale O ne hundred data points per channel are acquired during every TimeBase interval Thus
26. Controller applies parameter LR G LR OFS LR values from INPUT SELECTS section and parameter PID POL PID SET ZERR G Z SET values from Z FEED BACK section of file The Controller further selects T B photo detector signal as an input for Z feedback channel and selects to bypass the demodulator Then the Controller enters into the following loop Acquire 2 ERR Z LR Z SUM ADC input channel Write acquired values into the data file REDDOT DAT starting from its zero position data represented as an ASCII text line comma separated Check fora STOP FLAG if found then output an empty line into the log file ERROR and terminate current mode 27 SPM CONTROLLER 27 6 5 Check fora CHANGE FLAG if found then apply parameter values from an appropriate section of the Slave ini file When the Red D ot Alignment mode is terminated the Controller writes an empty line into the log file ERROR 106 52221 6 SCAN IMAGE MODE Command SCAN START Time limited Logs used ERR LOG LINE LOG PING LOG PID LOG Data files SCAN DAT aka 05062 DAT This mode is designed for SPM image acquisition When the Controller enters into this mode it first writes the Scan Image line into the log file ERROR LOG Then the Controller opens the line log file LINE LOG and outputs the 0 line into it which means no line is scanned at that moment The Controller further accesses parame
27. DC to 20 Hz min Noise Ground mV rms nom External 5 VDC 3mV rms nom Instantaneous max output 500 mA min per axis Average continuous output 50 mA per axis power supply limited Power Rating output amplifier 85 watts 48 OLLER SPM CONTR PSCAN2 for driving tube type piezo drivers 225 V to 225 V DC to 20 kHz 10 mV rms nom 10 mV rms nom 50 mA min 50 mA power supply limited 15 watts High Voltage Option Add on board Driver output voltage range Frequency range Noise Ground External 5 VDC Instantaneous max output Average continuous output Power Rating output amplifier Accessory Functions 2 each 0 to 10 VDC polarity reversed with on board jumper 12 bits 1 to 10 kHz approximate software dependent Operate probe approach motor on some SPM scanners 5 to 5 VDC 8 bit resolution 150 mA max software driven relay connected with laser on off set initially to off then on during initialization Operate miniature geared stepper motors for probe approach and coarse X Y amp Z motions 6 each 12 VDC max 0 50 A max enable reduced current with no activity set direction step Driver chips may be bypassed to allow larger external stepper drivers Additional 2 each 3 bit ports for additional steppers or other use FLGSS Start Scan indicator PIXCLK Deleted on Rev B NOW Ext Mod External Modulation Input to Z o
28. DUTY TIME value is designated for the calibration of an Oscilloscope storage mode The idea is that the Controller spend some amount of time for an acquisition and data transfer and some correction of a delay between every two data points is required The DUTY TIME value may vary from 0 to 1900 ms After all 300 data points are collected the Controller waits for an OSCSTO NEXT command before proceeding with the next 300 data point acquisition This hand shake confirmation allows the synchronization of the display procedure on the Master Workstation with the data acquisition procedure on the Controller The Controller stays in the O scilloscope storage mode until this mode is interrupted by a STOP FLAG command Itis permissible to change the TIME BASE value during the O scilloscope storage mode operation The CHANGE FILE command must be issued to force the Controller to apply an updated TIME BASE value The Controller checks for a change flag CHANGE FILE indicator after each data point acquisition If this flag is detected and indicates that section INPUT SELECTS Z FEEDBACK DEMOD SELECTS FREQUENCY SYNTH PID ON OFF Z PIEZO AUX 1 amp 2 LASER XY CONTROL or OSC TIME was modified then the Controller applies parameter values from that section of the Slave ini file and continues Oscilloscope storage mode operation 4 11 STEPPER MOTOR MODE Command STEPPER START Time limited Logs used ERR LOG Data fi
29. External 5 VDC 3mV rms nom Instantaneous max output current 500 mA min per axis Average continuous output current 50 mA per axis power supply limited Power Rating of output amplifiers 85 watts Number 2 differential buffered 2 analog gnd Signal level Range 10 V to 10 V Oto 100r0to 10 V Resolution 1 2 mV 2 4 mV Update rate 16 kHz min 10 kHz min DC motor driver Use Operate probe approach motor Output voltage 5 5 VDC 8 bit resolution Output current 150 max Stepping Motor Drivers Use Operate for probe approach and or coarse X Y amp Z motions Number in controller 6 each Operating voltage 12 VDC max Current rating 0 50 A max Software functions enable reduced current set direction step Options Chip bypass for larger external stepper drivers 6 bit port for additional steppers or other use 44 SPM CONTROLLER 27 6 5 Other Features Digital Flags Output FLGSS Start Scan indicator Output PIXCLK X amp Y Increment indicator optional Output FLGPT Set clear bit to flag a data point Input EXTSS External start scan 16 bit Digital bus 10 KHz min update High Voltage Option Add on board for driving tube type piezo drivers Driver output voltage range 225 V to 225 V Frequency range DC to 20 kHz Noise Ground 10 mV rms nom External 5 VDC 10 mV rms nom Instantaneous max output current 5
30. MODE Command TIP UP Time limited Logs used ERR LOG PID LOG Data files none 75 SPM CONTROLLER 27 6 5 This mode is used for SPM probe tip retract operation D uring this operation the Controller first writes the Tip Retract line into the log file ERR LOG then performs fast retract by activating the fast retract line X5 The Controller further accesses parameter ZMTR TIP in the Slave ini file section TIP APPROACH and uses its value for a Z motor selection If Z DC motor is selected the Controller accesses parameter DCREV_TIP and DCTIME TIP values in the Slaveini file section TIP APPROACH The values are used to apply a specified DC motor voltage for a specified period of time If one of the eight stepper motors is selected the Controller accesses parameter DIRUP STEPUP TIP PULSES TIP and PACKET TIP values in the Slaveini file section TIP APPROACH The values are used to select the direction full half step the number of pulses and pulse packet size for tip retraction using the stepper motor Stepper pulses are produced at a 1 kHz rate the network I operation which takes additional time out of stepping is performed only between pulse packets Thus the PACKET TIP value determines the actual speed of tip retraction using the stepper motor Tip retraction can be terminated before the completion DCTIME TIP elapsed time or PULSES TIP stepper pulses by a sto
31. Parts and accessories that are expendable and replaceable in the course of normal operation Products not properly placed and installed per our installation instructions Products not operated within the acceptable parameters noted per our installation instructions 5 Products that have been altered or customized without prior written authorization from Pacific Nanotechnology 6 Products that have had their serial number removed altered or otherwise defaced 7 Improper or inadequate care maintenance adjustment alteration or calibration by the user Software License Source Code License Agreement by Pacific Nanotechnology Inc You the Licensee assume responsibility for the selection of the program to achieve your intended results and for the installation use and results obtained from the program IF YOU USE COPY MODIFY OR TRANSFER THE PROGRAM OR ANY COPY MODIFICATION OR MERGED PORTION IN WHOLE OR PART EXCEPT AS EXPRESSLY PROVIDED FOR IN THIS LICENSE YOUR LICENSE IS AUTOMATICALLY TERMINATED LICENSE You may Use the program on a single machine and copy the program into any machine readable or printed form for backup or support of your use of the program on the single machine Modify the program and or merge it into another program for your use on the single machine Any portion of the program merged into another program will continue to be subject to the terms of this Agreement You must reproduce and i
32. Y POS 1024 Y DAC output 12 bit 0 4095 0 10 000 mV PID ON 1 Turn PID On Off 1 0 before moving 0 PID Off e g before Incremental Tip Approach 1 PID On e g when on sample TIP XY Tip XY positioning mode via XY DACs scan voltage IDLE PARK Park Idle Piezos featur ENABLE 1 0 Disable 1 Enable TIME 1 Idle Timeout in minutes FORCE DIST Force distance curve measurement ZDAC 5 0 Start value of Z DAC output 12 bit 0 4095 0 10 000 mv ZDAC E 4095 End value of Z DAC output 12 bit 0 4095 0 10 000 mV CH 8 ADC signal channel for deflection measurement FORCE RATE 1 Rate in milliseconds per point overall 512 data points PIX 256 Resolution in pixels per each curve DEF LIMIT 3276 Deflection Limit 10 000 10 000 mV 32767 32767 95 CONTROLLER SPM PSCAN2 Number of curves to acquire and average 1 100 Continuous acquisition mode 0 disabled 1 enabled Force calibration full scale corresponds to full ADC scale 10 000mV or 32768 32767 Force calibration unit name characters Cantilever spring constant K in nN nm same as in N m Non Linearity Correction Scale Non linearity correction 0 Disabled 1 Enabled Volts Xreal 5 1 Sx2 Xsen 2 Sx3 Xsen 3 NUMBER 1 CONT INUE 0 F_SCALE 20 0 F_UNIT nN SPRIN
33. a complete high speed PC computer containing data I O boards which provide scan control parameter settings data acquisition and image storage capability for each individual Scanner Each PScan2 Controller is connected to a Master Workstation via an Ethernet link as indicated in Figure 1 1 Image data is acquired independently from each scanner controller and transferred to the Master Workstation on request The Master Workstation operated under Windows 95 and Windows NT environment can then coordinate other tasks which will facilitate specimen throughput such as automated specimen handling SPM CONTROLLER 27 6 5 Slave Controller In Appendix C 1 a simplified block diagram is shown for the Slave PC and Interface Board that comprise the PScan2 Controller Note that the PScan2 Controller is designed to drive the stacked type piezo drivers such as those that are incorporated in TopoMetrix s large range scanners The detection and feedback circuitry incorporate a number of features that are typically found in more costly controllers These include modulation and demodulation circuits for oscillating cantilever modes analog feedback linearizers for X and Y piezo drivers conditioning filter gain and offset for various data signals and on board stepper motor drivers O ther functions are outlined in the attached Specification Summary Software The PScan2 Controller communicates with the Master Workstation via
34. a default directory for storing and retrieving Image files bmp gif jpg formats for exporting into other programs Image Files The user may select a default directory for storing and retrieving Image files in TopoMetrix Nanoscope and Digital Surf formats Auto linearizer The user may select the size of the lower and upper buffer regions for use by the auto linearizer routine The size of the buffers for the X and Y axis may be set separately The lower buffer is set in millivolts which is typically 200 to 700 mV The smaller the value the smaller is the buffer region If the setting is too small that the lower voltage side of the scanned image depending on rotation angle will appear distorted along that axis The upper buffer is set as a percentage and is typically 90 to 9696 If the value is set too high then the higher voltage side of the scanned image will be distorted for that axis Smaller mV and higher percent value will increase the scan range However thermal SPM CONTROLLER 27 6 5 effects and piezo performance may cause small changes in the operating range of the actuators requiring more frequent use of the auto linearizer function Miscellaneous The user may select several among display and activity options for operating convenience Typical Mode The user may select certain properties as to how the Typical Mode is displayed and as to which image analysis program is activated Calcula
35. an Ethernet file structure communication software The slave controller operates under DOS 6 22 operating environment while the Master Workstation operated under Windows 95 or Windows NT By using Microsoft Visual Basic programming the user will have access to proprietary D S based drivers located on the slave for handling all the essential scan control functions It is important to note that there is an O pen Architecture Access for both the hardware as well as the Visual Basic level software SPM CONTROLLER 27 6 5 1 2 What You Need to Get Started To set up and use your PScan2 Controller you will need the following PScan2 Controller PScan2 User Manual this manual Scanning Head or other input device Interface Cabling between Scanning Head and PScan2 Controller The following software packages and documentation DCEx Protocol D river Software Visual Basic Utility Your Master computer with Windows 95 98 NT or Windows XP Master Workstation minimum requirements Pentium 133 MHZ or faster processor 32 MB RAM memory 1 GB Hard Disk larger preferred as needed by user 1 GB removable media Hard Drive optional as needed by user 3 5 inch Floppy D rive 100 Mbit sec Ethemet interface Video capability as needed by user SPM CONTROLLER 27 6 5 1 3 Software Programming Choices Visual Basic Application Software There are several optio
36. are appropriate in the particular situation to prevent serious injury or death should always continue to be used when Pacific Nanotechnology Inc products are involved Pacific Nanotechnology Inc products are NOT intended to be a substitute for any form of established process procedure or equipment used to monitor or safeguard human health and safety in medical or clinical treatment SPM CONTROLLER 27 6 5 Chapter Introduction his chapter describes the PScan2 Controller lists what you need to get started describes software programming choices optional equipment and custom cables and explains how to unpack the PScan2 Controller 1 1 About the PScan2 Controller Thank you for purchasing the Pacific Nanotechnology Inc PScan2 Controller The PScan2 multiple SPM Controller sets a new performance standard the operation of multiple scanning microscopes under the control of one master workstation This new standard allows the user to operate one or more slave controllers that are linked to one main computer Therefore one overlay program within the master work station can control the scanning parameters and display acquired image data obtained from each slave controller No other company offers such a multiple unit SPM controller system The PScan2 Controller concept represents one of the most cost effective advances for controlling one or more Scanning Probe Microscopes Each PScan2 Controller contains
37. be preconditioned to a range of 0 10 V the operating range of the summing amplifier which sums the incoming position signal with the X Y SET positioning voltage to form an error signal which is conditioned by a feedback circuit With the X Y CTL switch set in the 2 3 position the resultant corrected signal drives the piezo power amplifiers a b Signal conditioning for the probe Z Sensor signal There are a number of switches and amplifiers that have the purpose of selecting the source of the incoming signal and conditioning the selected signal which will be used in the PID feedback circuitry to generate the error signal In the case of a quadrant photodetector there are four conditioning circuits The four signals are summed to monitor the total signal level Z SUM The summed right and left halves of the detector are compared L R and further conditioned by gain and filtering to provide a signal Z LR that represents torsion on the cantilever as observed in frictional force microscopy The summed top and bottom halves of the detector are compared T B and the resultant signal is used directly in the Z feedback loop SIG IN The summed top and bottom halves of the detector are compared T B and the resultant signal is used in a demodulator circuit The demodulated output can be used in the Z feedback loop SIG IN and as an acquisition signal Z DEM with some filtering 1 2 16 SPM CONTR
38. be sent to the motor the size of the packet number determines the pulses that the controller sends to the stepper motor as a packet This packet method for pulse transfer allows the controller to check for a user interrupt between packets such as STO P The Step size may be Full or Half Step DC Motor Some scanners incorporate a 5 V DC motor for controlling the tip cantilever approach and withdrawal The Forward and Reverse voltages are controlled separately in mV for a given D uration in msec The Stop button sets the voltage to zero XY Z Scales X amp Y Full Scale TheX amp Y axis scales may be set independently and can be expressed in Angstroms A nanometers nm or microns um If the two axes are not in feedback the numbers entered represent the actual full scale of the scanned image For systems with X amp Y feedback and linearization the situation is more complicated resulting in the need to enter larger numbers than the actual scan range Z Full Scale The Z Hot represents the voltage applied to the actuator in Z PID loop in order to maintain feedback Z Sen is the output of the optional independent sensor The scales for both signals may be presented in the three units mentioned above All other AD C voltages are given the same full scale factor and units SPM CONTROLLER 27 6 5 Non linearity X Y To correct for non linearity of the X amp Y actuators or linearization sensor
39. green line and retract curves Curve 2 red line provided the cantilever is sufficiently stiff The F D curve may be obtained when Z PID loop is in feedback and the Z actuator Z Hgt is in mid scale The range of the Z actuator is approximately 10 microns The Z D voltage is the inverse of the extension The actuator is fully retracted at 10000 mV and fully extended at 0 mV The Start position should be a higher value less extended than the Stop position If Z Hgt is about mid scale 5000 mV then a typical Start position might be 8000 mV and Stop position at initially 3 4000 mV The degree of deflection of the cantilever relative to the Z actuator position is dependent on a number of factors The user should refer to the large body of F D literature for further understanding of the nature and implications of the measurement In addition to the usual scaling parameters for the display the user may select the resolution Pixels usually 256 and the rate of data acquisition When the data rate is set to 0 ms pixel the data acquisition rate is set for maximum about 15 to 25 microseconds depending on the controller processor speed Color palette This feature opens a directory that contains the available color palettes that can be selected for displaying images The contents listed are the windows that have been opened in the Main Window Additional information on the various functions listed above Information on the
40. of the cantilever a negative error signal see above the Set point is usually negative As an example the setting ranges from 0 5 to 0 7x of the Error Signal out of feedback for hard intermittent contact mode to 0 8x to 0 9x for light intermittent contact mode The actual preferred setting depends on the cantilever tip characteristics as well as the particular experiment at hand Demodulation Bypass is selected for contact mode D emod activates the demodulator circuits and is selected for any oscillating mode Error Signal Gain The Signal ain compensates for variations in cantilever reflection intensity For contact mode if Z Sum is at or near max about 40 of full scale the Error Signal ain is typically 1 increasing to a value of 10 15 for Z Sum at its minimal value The Error Signal G ain ranges from 1 to 255 SPM CONTROLLER 27 6 5 PID Values P Proportional I integral and D D erivative gains may be set from 1 to 255 The higher the value the greater is the influence of the parameter A typical setting for contact or intermittent contact modes is P 8 1 20 D 1 Frequency Synthesizer Frequency The frequency of the driving oscillator for the oscillating modes may be set from a few Hertz to several MHz The typical range for this system is from 50 kHz to 500 kHz Amplitude The peak to peak amplitude may be set from a few millivolts to 10
41. on volume and throughput The Log file ERRO R LOG is created and filled by the Controller and can be accessed by the Application software on the Master Workstation It is a text file in which each line is a message string or status string from the Controller The Controller sends an empty string when it comes to the Idle mode The last line of ERRO R LOG represents the most recent message from the Controller The Log file LINE LOG contains one text line with the number of scan lines for which data has already been acquired It can be used by the Application software for scan progress monitoring and scan image data tracking The Configuration file SLAVE INI is represented as a generic INT file structure SECTION1 NAME NAME KEY1 VALUE KEY2 NAME KEY2 VALUE SECTION2 NAME KEY3 NAME KEY3 VALUE KEY4 NAME KEY4 VALUE The section name must be in square brackets The parameter description string starts with a key name followed by sign then by the parameter value and ends with an Enter The order of keys within a section and the order of sections are not important The detailed description of all configuration parameters their values and related Controller hardware signals are provided in Appendix Slaveini xls and Slaveini doc 20 SPM CONTROLLER 27 6 5 A typical example of a DCEx communication transaction Assume that the Controller is in Oscilloscope time mode and the next activity is a
42. protocol is designed for both command and data exchange The data is transferred in binary file format The commands are issued by the presence or absence of specific files in a predefined control directory of the master computer The slave computer checks periodically the content and status of the control directory Whenever a new command is issued the slave notices the presence of a flagged file and responds appropriately The slave confirms its updated status by writing a status line into the log file that may be displayed in the master program The network requirements commands and command structure and data file formats are described below and in Appendix F 5 1 PScan2 Scanning Probe Microscope System Configuration System components The PScan2 SPM System consists of 1 Master Workstation that operates under MS Windows 95 or MS Windows NT operating system and runs A pplication Software 2 Controller that operates under MS D O S 6 22 and runs Controller Software 3 Scanner scanhead that is connected to Controller s Interface Board 4 Ethemet network link between the Master Workstation and Controller that is implemented via a Twisted Pair TP D irectLink Ethemet cable two regular TP cables and Ethernet TP Hub or a coaxial Ethernet cable and two Ethernet 18 SPM CONTROLLER 27 6 5 network cards 10Mbps or 100Mbps in the Master Workstation and Controller correspondingly See Figure 5 1 for
43. scale It is analogous to the Oscilloscope time mode except longer TimeBase values are used The name Storage is derived from an analogy to an electronic digital storage oscilloscope As in the case of an electronic storage scope the O scilloscope storage mode is useful for an acquisition of a slow changing signal Three hundred data points per channel are acquired during every TimeBase interval Thus the time interval between two data points is equal to the TimeBase 300 The TimeBase value can vary from 2000 ms to 10000 ms 2s to 10 s The acquired data point values are transferred before the next data point is acquired T his transfer on a per point basis allows an application on a Master Workstation to trace the data during the prolonged TimeBase interval which may constitute from 2 to 10 seconds When the Controller enters into the given mode it first writes the O scilloscope Storage mode line into the log file ERR LOC Before the actual data acquisition is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS Z FEEDBACK DEMOD SELECTS FREQUENCY SYNTH AUX 1 amp 2 XY CONTROL The Controller further accesses parameter TIME BASE and DUTY_TIME values in the Slave ini file section OSC STORAGE The DUTY TIME value is subtracted from the TIME BASE value the result is used by the Controller as a TimeBase value The 83 SPM CONTROLLER 27 6 5
44. scanning region SPM CONTROLLER 27 6 5 TheX amp Feedback parameters also set within this section The respective feedback loops may be manually tumed on or off for test purposes Z feedback PID Channel One of three inputs may be selected for the Z Feedback Loop 1 T B Photodiode from the AFM scanner 2 External and 3 Z Sensor if option is installed Input Polarity The PScan2 Controller is capable of engaging in feedback for both positively going and negatively going error signals Typically SPM users are more familiar with the former ie with the error signal response from a lower more negative signal to a more positive signal For contact mode the Input Polarity is set for Positive For the oscillating mode it is set for Negative Set point Polarity For contact mode the Set point is typically set to zero and the Set point Polarity setting is not important If a positive Set point value is required the setting is Positive and visa versa if a negative Set point value is needed For oscillating modes the Error Signal is always negative see above the Set point Polarity is negative Set point Value The Set point range is from 0 to 10 volts the sign depends on the Set point Polarity For contact mode the Set point typically set for zero volts initially may be increased or decreased to change the force on the cantilever For the oscillating modes involving a resonance
45. selected resonance frequency should be relatively flat less than 1096 variation This assures that the amplitude is substantially constant over the Z actuator range When operating in the Typical Mode two additional functions are presented Full Range sets the sweep range from 50kHz to 400kHz Autoset sets the frequency at 90 of the maximum value to the left of the peak and sets the setpoint so that error signal Z Err is zero at two thirds of maximum amplitude Detector Sensitivity T he amplitude of the cantilever oscillation under typical conditions for cantilevers in the 250 350 kHz resonance frequency range is SPM CONTROLLER 27 6 5 approximately 0 12 nm mV drive amplitude for N anosensor cantilevers and approximately 0 31 nm mV drive amplitude for K tek cantilevers Dual trace Storage Scope Mode This mode is similar to the time mode except that the full scale time ranges from 2000 to 10000 ms Although only two signals may be displayed at any time the two signals are synchronized to within 15 to 45 microseconds depending on which channels are selected This mode is useful for observing long term drift effects Automatic Linearizer This function automatically maps the X and Y actuator movements onto a selected region within the sensors full scale range From the Preferences window the lower limit selected as millivolt offset and the upper limit selected as a percentage of the maximum available range
46. surface the motor can be stopped within any range of positive or negative signal voltage The Surface Value is the center of the required voltage range and Deviation is the voltage above and below the center voltage For example for most AFM systems the feedback error signal is negative going positive with zero volts as the cross over i e the voltage above which will stop the approach motor A Surface Value and SPM CONTROLLER 27 6 5 Deviation setting of 5000 mV and 5000 mV respectively will stop the motor if the feedback error signal is between zero and 10 V Incremental Approach This function activates a Z voltage ramp during tip approach that provides a more gentle interaction of the tip with the surface during tip engagement Prior to each downward motion of the stepper motor a few microns the Z piezo is ramped at a set rate with the PID feedback loop off The process is stopped when the Z Err becomes positive and PID loop is activated If the recommended parameters displayed when the Advanced window is opened are used the tip will be positioned approximately mid scale for Z Hgt The parameter settings listed from top to bottom are Fast Approach 500 50 20 20 1 Medium 500 200 20 20 1 and Slow 500 500 20 20 1 The approximate approach rates for each speed overall rate followed by actual ramp rate in microns per second Fast 2 0 0 9 Medium 0 9 1 5 Slow 0 5 0 6 Monitored Value As the tip
47. the rear panel Warning Connections that exceed any of the maximum ratings of input or output signals on the PScan2 Controller can damage the board and the computer In general INPUT voltages are not to exceed 20 VDC The description of each signal includes information about maximum input ratings if specified different than above Pacific Nanotechnology Inc is NOT liable for any damages resulting from any such signal connections 3 1 I O Connector Pin Description Linearizers There are two connectors labeled LINEA RIZERS I and LINEARIZERS II which can connect two different types of sensors depending on the option if any requested by the user For TopoMetrix scan heads that use strain gauge sensors the LINEARIZER II connector is active This 9 pin sub D connector is connected intemally to a Topo Metrix strain gauge interface board The signal connections are as follows 9 pin D Sub female 12 pin Molex Rear panel designators on TopoMetrix strain gauge interface board 1 VREF 2 EDX 3 EDX 5 EDY 6 EDY 9 EDZ 10 EDZ 11 VREF 47812 NC m N 10 SPM CONTROLLER 27 6 5 Scanner The scan head or scanner is connected to the PSCAN2 Controller with a 37 pin sub D connector The signal connections are as follows 20 DET T L detector preamp top left 21 DET T R det preamp top right 22 DET B L det preamp bottom left 23 DET BA det preamp bottom right 24 E
48. then by the parameter value and ends with an Enter The order of keys within a section and the order of sections are not important The detailed description of all configuration parameters their values and related Controller hardware signals is provided in separate documents Slaveini xls and Slaveini doc 71 SPM CONTROLLER 27 6 5 3 ATYPICAL EXAMPLE OF A DCEX COMMUNICATION TRANSACTION Let s assume that the Controller is in Oscilloscope time mode and the next activity is a Scan mode operation Then the typical A pplication software actions would include the following Issue a STOP FLAG command to exit from the current mode creates file stop flg in Device Directory Modify parameters SLAVE INI file if needed 15506 a SCAN START command to start scan operation creates file scanstrt flg in Device Directory Periodically read text line from the LINE LOG file and read the corresponding data set from the SCAN DAT file and update scan progress indicator and process display image Modify parameters in the SLAVE INI file and create a CHANGE FLAG file in the Device Directory with a changed section name in it one at a time if needed while scan operation is still in progress ssueaSTOP FLAG command if needed in order to terminate scan operation before its completion 4 COMMANDS AND CONTROLLER S FUNCTIONAL MODES The Controller is designed to operate in
49. time the Controller completes or aborts current functional mode operation it retums into the Idle mode and proceeds with the command polling according to the cycled order above Let us assume as an example that the Controller has just completed scan image operation then it will enter the Idle Mode and check for the presence of the Oscilloscope time mode OSC1 START command then the Oscilloscope line mode O 502 START command and so on Let us assume further that the Controller encounters the Oscilloscope line mode OSC2 START command Then the Controller would enter into the Oscilloscope line mode functional mode and operate there until stop command STOP FLAG is issued When the stop command is issued the Controller retums to the Idle mode and continues command polling with the Frequency sweep command checked next see cycled polling order above Whenever the Controller is initialized on power up or software reboot it writes the Controller Software version information and the D evice Initialized line into the log file ERR LOG and enters into the Idle mode 74 SPM CONTROLLER 27 6 5 4 2 RESET MODE Command RESET FLAG Time limited Logs used ERR LOG PID LOG Data files none The purpose of the reset mode is to reinitialize the Controller s Interface Board and to reopen the log file ERR LOC The Controller s computer is not reinitialized reset or affected by any me
50. 0 min Average continuous output current 50 mA power supply limited Power Rating of output amplifier 15 watts Signal Access Module Option External flat cable amp BNC type connector box to monitor more than 25 incoming outgoing and internal signals Connections for Digital Flags 45 SPM CONTROLLER 27 6 5 Specifications for PScan2 SPM Controller Secondary Level Primary Scanning Functions Basic A D conversion Conversion range 10 V to 10 V orO to 10 V depending on input type Resolution 16 bits Number of Input Channels 4 Sampling rate gt 20 kHz for 1 2 or 3 channel acquisition 16 kHz for 4 channel acquisition Freq Response before De DC to 500 kHz nom Freq Response Z PID lo DC to 20 kHz 3 db down double Butterworth filter Input types software selected For PID loop Internal designed to 4 Inputs for 4 sector Photodetector accommodate light lever type For detection of vertical topography cantilever motions sensors Inout sum of top 2 quadrants minus bottom 2 quadrants For detection of torsional lateral friction cantilever motions Input sum of right 2 quadrants minus left 2 quadrants For alignment purposes Input sum of all quadrants External For other AFM sensors and STM sensing Range 10 V to 10 V Differential buffered input Z sensor Provision for a sensor which monitors absolute Z piezo motion e g strain gaug
51. 0 DC Motor forward tip 5000 mv ic cal tip retract as tip retract eye E p NEN ERGENME S S 3E a2 retract ME PULSES TIP 0 65535 D 0 7 0 1 CS4 0 1 Number of stepper pulses 0 65535 PULSES tip retract D 08 15 1 655 0 1 Stepper direction reverse REVERSE tip engage STEPDWN_TIP D 0 7 0 55 0 1 Stepper FULL step tip FULL engage deflt cycles per step 1 65535 1 none Software flow control Number of steps between 1 65535 coo 1 1 D 08 15 0 55 0 1 Stepper direction forward FORWARD tip engage BIENES SLE routine routine RUN INC 1 65535 20 none Softwareflow control Number of half steps per steps defit increment 101 SPM CONTROLLER none Software flow control Z DAC ramp increment none Software flow control Delay per Z DAC ramp ms increment CS0 0 D 15 D00 WR 0 1 0 20 MHz MSW D15 D00 WR 0 1 LSW 50 1 TCO TC2 0 TC3 1 LOAD 1 CS0 0 D 15 D00 WR 0 1 MSW D15 D00 WR 0 1 LSW 50 1 TCO TC2 0 TC3 1 LOAD 1 650 0 D15 D00 0 WR 0 1 MSW D15 D10 0 D09 D00 WR 0 1 LSW 50 1 TCO TC1 1 TC2 0 TC3 1 LOAD 50 9 0 D15 D00 0 WR 0 1 MSW D15 D12 0 D11 D00 WR 0 1 LSW 50 9 1 TCO TC1 1 TC2 0 TC3 1 LOAD
52. 0 Z DC motor DAC value 5 000 8bit ERI DCMTR TIME 5 none Software flow control Z DC motor ON time 100 65535 ms ms IMAGE line image SCAN_RATE double none C1 amp C2 ACL pacer Scan rate lines per 0 TBD floating point dividers second 100 SPM CONTROLLER 27 6 5 D 360 00 360 00 none Software flow control ADC acquires data during Forward ee 0 7 1 none Software flow control ADC acquires data during Reverse aS eee ee fwd rev scan CH 1 4 none Software flow control ACL acquires CH E c 3 DATA none Software flow control Transfer scan data after by Line lin T ud ELEM 1 none Software flow control Transfer scan data after Whole E SKEW 10 00 10 00 none Software flow contro Skew correction angle 10 10 deg OVERSCAN 0 127 none Software flow contro 0 127 points PRESCAN 0 127 none Software flow contro Number of prescan lines 0 127 APPROACH retract engage actor retract engage CH TIP 0 10 see INPUT SELECTS section Select input channel to SRF TIP 32768 32767 none Software flow control Select close to surface 4 10000 mV DEV_TIP 328 32767 none Software flow control Deviation from the 100 10000 DCREV_TIP 128 127 CS1 0 D07 D00 A B 1 WR 0 DC Motor reverse tip 5000 mv time DCFWD_TIP 128 127 CS1 0 D07 D00 A B 1 WR
53. ASSIGNED X25 1 00 CHS 7 C1 47 LO FOR BWIDTH DEMOD 10 ZDBW 10 X26 1 00 CHS 7 2 46 LO FOR BWIDTH DEMOD 10 ZDBW 100 X27 1 00 CHS 7 45 LO FOR BWIDTH DEMOD 10 ZDBW 1000 X28 1 00 CH3 7 C4 44 56 5 43 6 42 C7 41 A0 08 A1 07 A2 06 A3 05 4 04 A5 03 A6 02 1 1 15 2 14 3 4 12 B5 11 B6 10 B7 09 24 1 23 3 22 4 21 5 20 C6 19 C7H8 C7H7 0 16 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 5 5 EE SPM CONTROLLER 27 6 5 LO FOR A CHAN OF ADC 5 X29 1 00 LO FOR A CHAN OF ADC 6 X30 1 00 LO FOR A CHAN OF ADC 7 X31 1 00 8 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 8 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS NC 1 00 RESERVED 16 BIT 0 BUS 1 00 8 00 SPARE BIT INPUT 1 00 SPARE BIT INPUT 1 00 SPARE BIT INPUT 1 00 SPARE BIT INPUT 1 00 FLAGSS FLAG FOR START LAST NIBBLE 1 00 FLAGPT SET CLEAR PER DATA POINT 1 00 LO FOR A CHAN OF ADC 8 X32 1 00 LO FOR DEMOD ENA
54. BACK DEMO D SELECTS FREQUENCY SYNTH PID ON OFF Z PIEZO AUX 1 amp 2 LASER or OSC TIME section was modified then the Controller applies parameter values from that section of the Slave ini file and continues Oscilloscope time mode operation 5472 3482 OSCILLOSCOPE LINE SCAN MODE Command 0502 START Time unlimited Logs used ERR_LOG LINE_LOG PING_LOG PID_LOG Data files 0502 DAT aka SCAN_DAT This mode is designed for repetitive acquisition of up to 4 selected input channels during one line of XY raster scanning This mode is analogous to the Scan Image mode except only one line is scanned D ata can be acquired during either forward or reverse or both directions of the line scan When the Controller enters into this mode it first writes an Oscilloscope line mode text string into the error log file ERROR LOC Then the Controller opens the line log file LINE LOG and writes 0 into it which means no line is scanned at that moment The Controller then accesses parameter values in the section of the Slave ini file called SCAN IMAG E which are used for line scan operation Before the actual image scan operation is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS XY CONTROL Z FEED BACK DEMOD SELECTS FREQUENCY SYNTH AUX 1 amp 2 LASER Then the Controller carries out the slow tip position ini
55. BLE X33 1 00 4 00 ASSIGNED 76 00 OF 96 BITS 57 SPM CONTROLLER 27 6 5 STEPPER LETTER USE USE PHASE C2 PHASE C3 PHASE C4 PHASE 1 PHASE C2 PHASE C3 PHASE C4 1 2 4 1 2 3 4 1 2 4 1 12 3 14 CLK X CLOCK STE HS X HALF STEP ST X SET BIAS DIR X DIRECTION CLK X CLOCK STE HS X HALF STEP ST X SET BIAS DIR X DIRECTION T5 VDC GND N C GND N C N C N C N C N C N C N C N C N C N C N C N C N C N C 58 SPM CONTROLLER 27 6 5 ANALOG SIGNALS INPUTS AND OR MONITOR INPUT SIGNALS TO ANALOG FUNCTION amp SIGNAL CONDITIONING MUX CHAN 2 POS ERROR SIGNAL Z ERR WITH GAIN amp FILTERS Z HGT 1X OR 3X BUFFERED Z PID SIGNAL PROPORTIONAL Z L R SIGNAL LEFT MINUS RIGHT FROM QUAD INPUT PHOTODETECTOR Z SEN Z SENSOR WITH OFFSET GAIN amp FILTER AUX IN1 AUXILIARY INPUT 1 X SEN X SENSOR OUTPUT Z DEM DEMODULATED SIGNAL Z DMO WITH FILTERS Y SEN Y SENSOR OUTPUT Z ERR ERROR SIGNAL ABSOLUTE FROM COMPARATOR Z SUM SUMMED SIGNAL OF QUAD INPUT PHOTODETECTOR AUX IN2 AUXILIARY INPUT 2 NC NOT USED 1 Z SET SET POINT FOR Z FEEDBACK LOOP 2 Z POS ERROR SIGNAL Z ERR WITH GAIN amp FILTERS 3 Z MOD OUTPUT SIGNA
56. CLK 4B SEL AUXI ADC CS5A STEP SIZE 5B DIR ADC 5A X29 AUX1 H 5V 1 255 AUX2 AUX2 AUX2 ADC mm ADC 8A X32 Z MTR X SEN 5V LZR PWR Dc MOTOR ADC 5B X29 gt gt T INTEG 1 255 CS6A X SENS ERROR PROPOR 1 255 08 41 6 X DAC X CTL ZOOM XPZ 4 X SET done 5 T CS14A OFFSET 1 255 0 10V Y SEN 08148 ADC 6B X30 5 INTEG 1 255 cea Y SEN Y SENS ERROR PROPOR 12255 Y SEN Y CTL Y PIZ 4 Y SET X21 t lt OFFSET 1 255 0 10V CS15B 65 SPM CONTROLLER Appendix E PScan2 Controller Network Configuration The Controller network configuration is stored in a file drives bat on the Controller s hard disk drive Example contents of this file is shown below net use I Master PScan2 password PERSISTENT NO YES where net use is a Microsoft Network Client for DOS drive ver 3 0 command I is a network drive letter I is used by default by the Controller software see Master is a Master Workstation s network name Figure 11 PScean2 is name of shared resource on the Master Workstation B Device Direc
57. DCMTR TIME value if equals then terminate current mode operation When the Controller terminates aborts the D C Motor reverse mode operation it sets DC motor DAC to a zero volt level and writes an empty line to the log file ERR LOC 36 SPM CONTROLLER 27 6 5 5 2 14 AUTO CONFIGURATION STANDALONE MODE Command CONFIGURE FLAG Standalone Controller Logs used none Data files none The auto configuration standalone mode is designed for the Controller s network configuration Standalone here means that the Controller is not connected to the Master workstation Standalone commands are supplied to the Controller via floppy disk drive and are checked by the Controller only during boot up and only in standalone configuration the Controller is not connected to the Master workstation The Controller attempts to connect to the Master workstation specified by the net use command in the drives bat file and create a log file ERR LOG in the D evice Directory every time the Controller is reboot If the connect fails Ethernet cable not connected specified Master workstation name or D evice D irectory name do not exist in the network or access password is invalid the Controller checks the floppy disk drive If the floppy disk is present in the drive the Controller first checks for the CONFIGURE FLAG command represented by an empty configurflg file If this command is detected the Contr
58. End Frequency 32 bit 0 20MHz Modulation Amplitude 10 bit 0 512 0 10000 mv Phase shift 0 4095 0 00 360 00 deg Sweep rate in ms per point 1 65 535 ms 10 default Parameters for oscilloscope time mode DCREV TIP 127 DCTIME TIP 10000 DCFWD TIP 127 DIRUP 0 STEPUP_TIP 0 PULSES_TIP 500 DIRDWN_TIP 0 STEPDWN_TIP 0 CYCLES_TIP 500 PACKET_TIP 100 FREQ_E 4294967 TIP_INC 0 RUN_INC 20 RAMP_INC 20 ELAY INC 1 EEP 4 J 1 FREQ SW F_PHASE 0 SWEEP_RA OSC TIM 93 SPM CONTROLLER 27 6 5 TIME BASE 10 Acquisition time period 10 1000 ms 100 points per TIME_BASE period are acquired OSC STORAGE Parameters for storage scope mode TIME BASE 3000 Acquisition time period 2000 10000 ms 300 points per TIME BASE period are acquired DUTY TIME 1200 Time used for scope calibration Ld XYZ SCAL X Y Z Scale sizes not used by Controller s software they are device specific and stored in Slave ini X SCALE 100 00 100 00 in X UNITs um when fully zoomed out X scale unit type 0 um microns 1 nm nanometers 2
59. G_K 0 65 NON LINEAR SCL_CORR 0 5 1 0 956289878691135 5 2 5 58554564856925 03 5 3 8 97179016859237 04 Yreal Syl Ysen Sy2 Ysen 2 Sy3 Ysen 3 Volts Y120 926743237609507 5 2 4 23723511526169 02 Image Non linearity correction 0 No 1 On line 2 Off line xsen Al xreal A2 xreal 2 A3 xreal 3 pixels A1 1 04786333930482 2 4 98515946291684 04 5 04553013638955 07 ysen Bl yreal B2 yreal 2 B3 yreal 3 pixels 1 1 04786333930482 2 4 98515946291684 04 3 5 04553013638955 07 X offset of calibration image 0 255 0 10 000 mv Y offset of calibration image 0 255 0 10 000 mV Zoom of calibration image 0 255 Resolution of calibration image 128 1024 pixels Hysteresis correction model Educational system open loop XY he zoom of reference scans must be forward at 180 The resolution of reference scans The offset of lower right reference scan lst reference Hysteresis correction second order coefficient from FFT The offset of upper left reference scan 2nd reference Hysteresis correction second order coefficient from FFT vs Zoom 1 0 px0 pxl Zoom LSB px2 Zoom LSB 2 5 6 48429909653124 03 Scale Factor primary correction X_OFS0 69 Y OFS0 69 200 0 120 0 512 HYST CORR 200 0 128 0 256 50 128 0 0
60. IME TIME BASE 10 1000 OSC TIME_BASE 2000 10000 STORAGE XYZ SCALE X_SCALE double float 1 Y_SCALE double float 2 3 1 102 SPM CONTROLLER 27 6 5 AUX2_SCALE float none Master software only The full Z scale size in AUX IN 2 AUX2 UNITs arbitrary mV P IE Other ADC ADC UNITs arbitrary mV TIP XY X_POS none Software flow control X DAC voltage 0 10000 mV _ 5 none Software flow control Y DAC voltage X4 0 Turn PID OFF before OFF moving 1 X4 1 Turn PID ON before moving IDLE PARK ENABLE none Software flow control Disable Park Idle Piezos feature 1 none Software flow control Enable Park Idle Piezos Enable feature 0 65535 none Software flow control Idle Timeout minutes FORCE DIST ZDAC_S 0 4095 none Software flow control Start value for Z DAC 0 10000 mV poer recen ZDAC E 0 4095 none Software flow control End valuefor Z DAC 0 10000 mV 1 CH 0 11 see INPUT SELECTS CH 1 ADC signal channel for see CH 1 force dist PIX 1 104 none Software flow control Resolution in pixels per 16 512 1024 each curve DEF LIMIT 32767 32767 Software flow control Deflection Limit value 10000 mv NUMBER 1 100 none Software flow contro The number of curves to 1 100 CONTINUE 0 1 none Software flow contro Continuous acquisition Ena Dis
61. IS WITHOUT WARRANTY OF ANY KIND EITHER EXPRESS OR IMPLIED INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTIES OR CONDITIONS OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE IN NO WAY SHALL PACIFIC NANOTECHNOLOGY INCORPORATED BE LIABLE FOR ANY LOSS OF PROFITS LOSS OF BUSINESS INTERRUPTION OF BUSINESS LOSS OF DATA LOSS OF USE OR FOR SPECIAL INCIDENTAL INDIRECT OR CONSEQUENTIAL DAMAGES OF ANY KIND EVEN IN THE EVENT OF SUCH DAMAGES ARISING FROM ANY DEFECT OR ERROR IN THIS PUBLICATIONS OR IN THE MODE EZ MODE SOFTWARE The trademarks or registered trademarks of Pacific Nanotechnology are PScan2 Nano R X Pert Mode and EZMode vi Safety Statement WARNING REGARDING MEDICAL AND CLINICAL USE OF PACIFIC NANOTECHNOLOGY INC PRODUCTS Pacific Nanotechnology Inc products are not designed with approved components and testing procedures intended to ensure a level of reliability suitable for use in treatment and diagnosis of humans Applications of Pacific Nanotechnology Inc products involving medical or clinical treatment can create a potential for accidental injury caused by product failure or by errors on the part of the user or application designer Any use or application of Pacific Nanotechnology Inc products for or involving medical or clinical treatment must be performed by properly trained and qualified medical personnel and all traditional medical safeguards equipment and procedures that
62. If operation is completed successfully the Controller produces the sound indication of 6 short beeps and halts the system In case of an error the Controller produces the sound indication of 1 long beep and halts the system The error message is output to the Controller s console When the Controller completes the auto update mode operation it always halts the system Reboot the Controller for the software update to take effect 88 SPM CONTROLLER Appendix G slave ini File Structure including Sample File PSCAN2 CONFIGURATION FILE SLAVE INI INPUT SELECTS input selects to ADC section CH1 0 Channel 1 input select 0 Z POS 1 Z HGT 2 Z L R 3 Z SEN 4 AUX 5 X SEN 6 Z DEM tf 7 Y SEN 8 Z ERR 9 Z SUM 10 AUX IN2 11 8 CH2 1 CH3 2 Channel 2 input select 0 11 CH4 3 Channel 3 input select 0 11 ZSEN_G 255 Channel 4 input select 0 11 ZSEN_O 255 2 sensor Gain 1 255 ZSEN_F 0 2 sensor Offset 0 255 2 sensor Filter 0 Full range 1 1000 Hz 2 100 Hz 3 10 Hz ZPOS F 2 error signal Z POS filter 0 Full range 1 1000 Hz 2 100Hz 3 109 2 ZHGT_G 0 Z HGT Gain select 0 1x 1 4x 89 PSCAN2 SPM CONTROLLER 27 6 5 Lateral Force L R Gain value 1 255 Lateral Force L R Offset val
63. L FROM FREQUENCY SYNTHESIZER 4 Z DMO OUTPUT SIGNAL FROM DEMODULATOR 5 Z ERR COMPARATOR OUTPUT SIGNAL Z SET Z SIG 6 Z PID OUTPUT SIGNAL FROM THE Z PID FEEDBACK CONTROLLER 7 Z SEN OUTPUT FROM DISTANCE SENSOR ALONG THE Z AXIS 8 Z HGT 1X OR 3X BUFFERED Z PID SIGNAL PROPORTIONAL TO Z HEIGHT 9 Z L R DIFFERENCE SIGNAL FROM QUADRANT PHOTODETECTOR LEFT HALF MINUS RIGHT HALF 10 Z T B DIFFERENCE SIGNAL FROM QUADRANT PHOTODETECTOR TOP HALF MINUS BOTTOM HALF 11 X DAC OUTPUT SIGNAL FOR X PIEZO DRIVER 12 Y DAC OUTPUT SIGNAL FOR Y PIEZO 13 X SET SET POINT FOR X LINEARIZER FEEDBACK LOOP 14 Y SET SET POINT FOR Y LINEARIZER FEEDBACK LOOP 15 X SEN OUTPUT FROM DISTANCE SENSOR ALONG THE X AXIS 16 Y SEN OUTPUT FROM DISTANCE SENSOR ALONG THE Y AXIS 17 X CTL OUTPUT TO X PIEZO FROM LINEARIZER FEEDBACK LOOP 18 Y CTL OUTPUT TO Y PIEZO FROM LINEARIZER FEEDBACK LOOP 19 Z PIZ OUTPUT SIGNAL FOR Z PIEZO 20 Z SUM SUM OF PHOTODETECTOR QUADRANTS OTHER DIGITAL SIGNALS INPUT EXTERNAL START SCAN OUTPUT FLGSS START SCAN PIXCLK CLOCK AVAILABLE AS OPTION FLAGPT FLAG SET CLEAR FOR EACH DATA POINT 59 SPM CONTROLLER PSCAN2 CONNECTOR 4 60 PIN HEADER MALE TYPE MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR PIN 15 PDIG GND AN OUTPUT AN OUTPUT AN INPUT LO AN INPUT LO SIGNAL USE SOURCE GND G
64. LINE LOG starting from the zero file position Thus the ASCII text line in the line log file always represents the number of the line scan data sets in the data file OSC2 DAT This number can be 0 no data currently available 1 data for one line scan are collected or 2 data for both forward and reverse lines are collected DIR 2 The repetitive data for each line scan operation are written to the data file OSC2 DAT always starting from the zero file position 81 SPM CONTROLLER 27 6 5 The Controller checks for a stop flag STOP FLAG after each line scan operation If the stop flag is found the Controller writes an empty line into the log file ERR LOG and terminates line scan operation and retums into the Idle mode The Controller also checks for a change flag CHANGE FILE indicator after each line scan If this flag is found and indicates that IN PUT SELECTS Z FEED BACK DEMOD SELECTS FREQUENCY SYNTH PID ON OFF Z PIEZO AUX 1 amp 2 or LASER section was modified then the Controller applies parameter values from that section of the Slave ini file and continues the Oscilloscope line scan operation Else if the change flag indicates SCAN IMAGE or XY CONTROL modified section the Controller writes the Line scan mode restarted line into the log file ERR LO G and restarts the Oscilloscope line mode operation from the very beginning 4 9 FREQUENCY SWEEP MODE Command SWEE
65. MALE HEADER SIGNAL MONITORS AND EXT START SIGNAL ACCESS MODULE 15 PIN SUB D FEMALE CONNECTOR AT SCANNER HEAD 25 PIN SUB D FEMALE PARTIAL CONNECTION TO SCANNER HEAD LOW VOLTAGE 37 PIN SUB D FEMALE MAIN CONNECTION TO SCANNER HEAD LOW amp HIGH VOLTAGE 37 PIN SUB D FEMALE ANALOG SIGNAL TRANSFER BETWEEN CPU amp INTERFACE BOARD 50 PIN MALE HEADER DIGITAL SIGNAL TRANSFER BETWEEN CPU amp INTERFACE BOARD 6 PIN 0 156 WALD MALE HV POWER TRANSFER BETWEEN CPU amp INTERFACE BOARD 10 PIN 0 120 MOL PKT HDR X Y amp ZSENSOR INTERFACE BOARD 60 PIN CON FOR ANALOG SIGNALS INPUTS AND OR MONITOR Input signals to Function amp Signal Conditioning A D MUX Z POS ERROR SIGNAL Z ERR WITH GAIN amp FILTERS Z HGT 1X OR 3X BUFFERED Z PID SIGNAL PROPORTIONAL Z L R SIGNAL LEFT MINUS RIGHT FROM QUAD INPUT PHOTODETECTOR Z SEN Z SENSOR WITH OFFSET GAIN amp FILTER AUX IN1 AUXILIARY INPUT 1 X SEN X SENSOR OUTPUT Z DEM DEMODULATED SIGNAL Z DMO WITH FILTERS Y SEN Y SENSOR OUTPUT 52 PSCAN2 SPM CONTROLLER ERROR SIGNAL ABSOLUTE FROM COOPERATOR SUMMED SIGNAL OF QUAD INPUT PHOTODETECTOR Function amp Signal Conditioning SET POINT FOR Z FEEDBACK LOOP ERROR SIGNAL Z ERR WITH GAIN amp FILTERS OUTPUT SIGNAL FROM FREQUENCY SYNTHESIZER OUTPUT SIGNAL FROM DEMODULATOR COOPERATOR OUTPUT SIGNAL Z SET Z SIG OUTPUT SIGNAL FROM THE Z PID FEEDBACK CONTROLLER OUTPUT FROM DISTANCE SEN
66. Metrix format Settings Device Directory Setup Ping the Controller Red Dot Alignment Tool Bar Oscilloscope time mode Oscilloscope line mode Oscilloscope frequency sweep Dual trace Storage Scope Auto Linearizer Tip Approach Retract Scan Control Panel Display Scanned Image Menu Menu File Open Configuration File Save Configuration As Edit Configuration File Save Image s in TopoMetrix format Save raw scan data Open raw scan data Export Displayed Image Preferences Configuration Directory Image files Directory Settings Tabs Raw data Directory Export Image D irectory Auto Linearizer Exit Menu Settings Menu Device Directory Setup 40 SPM CONTROLLER 27 6 5 Create D evice Directory Create Configuration Diskette Ping Menu Tools Menu Display Menu Window Menu Help MDI Child Windows Red Dot Alignment Oscilloscope time mode Oscilloscope line mode Oscilloscope frequency sweep Dual trace Storage Scope Auto Linearizer Tip Approach Retract Scan Control Panel Display Scanned Image Status Bar Device Directory Status String Traffic Light Icon PID state Icon Settings Tabs Input Selects to ADC Z Piezo PID On Off Scan Image Setup X Y Control Z Feedback Frequency Synthesizer AUX 1 amp 2 Outputs Demod Selects Laser Motors For the latest detailed information on these topics please click on the Help Topics icon in the Help Menu of the SPM Cock
67. ND GND GND GND GND GND GND GND GND GND GND GND GND GND GND GND GND GND GND DIG O AUX1 DAC AUX2 DAC AUX1 AUX2 AN GND AN GND ADC 8B 5 V REFB NC SIGNAL DESIGNATOR TYPE MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR MONITOR DIG OUTPUT PIN 50 P2 DIG GND PIN 50 P3 DIG GND AN INPUT PIN 35 6 PIN 34 P6 DIG INPUT AN INPUT HI AN INPUT HI SIGNAL USESOURCE Z SET MON1 Z POS MON2 Z MOD MON3 Z DMO MON4 Z ERR MON5 Z PID MONG Z SEN MON7 Z HGT MON8 L R MON9 Z T B MON10 X DAC MON11 Y DAC MON12 SET MON13 SET MON14 SEN MON15 SEN MON16 CTL MON17 CTL MON18 Z PIZ MON19 Z SUM MON20 FLGSS PIN 20 EXT MOD EXTSS AUX1 AUX2 AUX1 DAC AUX2 DAC FLAGPT PIN 19 P1 FLAG DATA POINT 5 V REFB NC SIGNAL DESIGNATOR 60 SPM CONTROLLER POWER IN LOW VOLTAGE CONNECTOR 2 10 PIN 0 156 WALDOM HEADER MALE NC 12 VDC FROM COMPUTER YEL GROUND FROM COMPUTER PS BLK 5 VDC FROM COMPUTER POWER SUPPLY GROUND FROM COMPUTER PS BLK 15 VDC ORG ANALOG GND BLK 15 VDC GRN CHASSIS GROUND SPM SCANNING HEAD AN GND AN GND AN GND GND DCMTR EXT 15 VDC NC 15 VDC NC LZR RET LZR PWR DCMTR 2 2 2 2 Z PY1 Z RT1 Y PIZ Y RET X PIZ X RET
68. NES 200 SCAN RATE 20 ROTATE 180 XYMODE DIR 0 TIP APPROACH ZMTR_TIP 0 CH_TIP 8 32768 328 92 TROLLER SPM CON PSCAN2 328 32767 100 10 000 mv 2 DC Motor Reverse Voltage 128 127 5000 5000 mV for tip retract 2 DC Motor Reverse ON time 100 65535 ms 100 ms increment 2 DC Motor Forward Voltage 128 127 5000 5000 mV for tip engage Stepper Direction 0 Forward 1 Reverse for tip retract Stepper Step 0 Full 1 Half for tip retract Number of stepper step pulses for tip retract 0 65535 Stepper Direction 0 Forward 1 Reverse for tip engage Stepper Step 0 Full 1 Half for tip engage Number of acquisition cycles between approach steps 1 65535 Each acquisition is 15us Controls approach Number of step pulses per packet network IO between packets only 1 65535 Controls retract speed of stepper motor Default is 1 pulse per packet Used by Tip Retract only 0 Generic Tip Approach routine 1 Incremental Tip Approach routine Number of stepper half steps per each iteration of Incremental Tip Approach default 20 half steps stepper speed Default is 500 Used by Tip Approach only Z DAC ramp increment value default 20 50mV Delay ms per each Z DAC ramp increment default 1 ms Parameters for frequency sweep mode Start Frequency 32 bit 0 20MHz
69. OLLER 27 6 5 Also the Z position sensor Z S appropriately conditioned with gain and frequency filter selections can be switch into Z feedback loop input SIG IN for precise Z positioning The conditioned Z S signal can also be acquired say when scanning with the Z feedback loop controlled by photodiode or external input modes Z PID Feedback Loop In the first part of this section the input signal SIG IN is compared to a reference level Z SET to generate an error signal Z ERR Software controlled switches provide the options of an inverted or non inverted SIG IN and a positive or negative Z SET value Following a gain stage the Proportional Integral and D erivative signals of the error signal each with controllable gains within each section a summed to provide a buffered signal Z PID With optional gain this signal forms the data acquisition signal Z HGT The Z PID signal is also power amplified to form Z PY 1 the voltage for driving the Z piezo actuator Modulator The modulator consists of a sinusoidal frequency synthesizer and a power amplifier The synthesizer possesses a 20 MHZ clock and is capable of generating frequencies from a few kHz to several hundred MHZ as determined by the bandwidth of the power amplifier With 32 bit resolution frequency increments are less than 0 005 Hz The output amplitude ranges from 0 to 10 V p p at 9 bit resolution about 40 mV Signal conditioning for Auxiliary Ana
70. P START Time limited Logs used ERR LOG PING LOG PID LOG Data files SWEEP DAT This mode is designed for a 4 input channel acquisition during frequency sweep on a numerically controlled oscillator This mode allows an acquisition of a signal frequency response in a selected frequency range When the Controller enters into this mode it writes the O scilloscope frequency sweep mode line into the log file ERR LOG The Controller then accesses parameter values in the Slave ini file section FREQ SWEEP which are used for a frequency sweep operation Before the actual frequency sweep operation is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS XY CONTROL Z FEEDBACK DEMOD SELECTS AUX 1 amp 2 LASER D uring the actual frequency sweep operation the Controller programs the numerically controlled oscillator for 400 different frequency values evenly distributed over the frequency range determined by the FREQ 5 and the FREQ E values from the Slaveini file section FREQ SWEEP The 400 frequency points are produced at the rate of approximately 12 ms the overall frequency sweep duration is about 5 6 seconds The data for 4 selected input channels are acquired for every frequency point on a first acquire then increment principle Thus the settling time for every frequency point is approximately 12 ms The values acquired for each frequency point are wri
71. PACIFIC NANOTECHNOLOGY PScan2 SPM Controller 2002 Pacific Nanotechnology Inc 3350 Scott Boulevard Building 29 Phone 408 982 9492 Fax 408 982 9151 CHAPTER 6 SPMCockpit User Interface 39 39 41 42 51 52 62 63 64 65 66 68 69 88 89 104 105 108 109 110 124 125 127 6 1 Introduction 6 2 Description of Contents T oco gt K TX X X X X X X X gt gt gt gt gt gt gt gt gt gt gt CU UU UU CU UU m rm rm a 22 o Z 2 oz 2 2 oc gt UU Table of Contents Important Information i Product Warranty ii iv Software License Copyright Information vi Safety Statement vii CHAPTER 1 Indtroduction 1 1 About the PScan2 Controller 1 1 2 What You Need to Get Started 1 3 Software Programming Choices 1 4 Optional Equipment A 1 5 Unpacking CHAPTER 2 Installation amp Ethernet Configuration 2 1 Installation 7 2 2 Hardware Configuration 8 9 CHAPTER Description of External Signal Connections 3 1 I O Connector Pin Description 10 12 CHAPTER 4 Description of Operation 4 1 Overview 13 14 4 2 Detailed Block Diagram 15 4 3 Description 16 17 CHAPTER 5 DCEx 5 1 PScan2 System Configuration 18 21 5 2 Commands amp Controller Functional Modes 22 38 Important Information How to Contact Us Technical Support Pacific Na
72. RR_LOG PING_LOG PID_LOG Data files none The Idle mode is the default mode that the Controller enters after first power up reboot or after the STOP FLAG command is issued Being in this mode the Controller polls D evice Directory for the occurrence of any Command flag command file The following cycled order is used for commands polling Reset RESET FLAG Ping PING FLAG Change CHANGE FILE retract UP Change CHANGE FILE approach TIP DOWN Change CHANGE FILE Red Dot alignment REDDOT START Change CHANGE FILE Scan Image SCAN START Change CHANGE FILE Oscilloscope time mode OSC1 START Change CHANGE FILE Oscilloscope line mode OSC2 START 73 SPM CONTROLLER 27 6 5 Change CHANGE FILE Frequency sweep SWEEP START Change CHANGE FILE Oscilloscope storage mode OSCSTO START Change CHANGE FILE Stepper motor STEPPER START Change CHANGE FILE DC motor forward DCMTR FWD Change CHANGE FILE DC motor reverse DCMTR REV Once command flag is detected the Controller performs an appropriate action or enters into one of the functional modes The CHANGE FILE command flag is checked every time between two functional mode command flag checks If CHANGE FILE is detected the parameter values from the appropriate section of the Slave ini file are applied Every
73. RSE MODE Command DCMTR_REV Time limited Logs used ERR LOG Data files none This mode is designed for the D irect Current D C motor operation The D C motor is driven by a control voltage on a Digital to Analog Converter DAC which may vary from 5 000 mV to 5 000 mV Different control voltage polarity yields to different DC motor rotation direction Thus forward and reverse D C motor direction depends on a custom hardware wiring of D C motor The two D C motor related modes of the Controller operation allows user to define which control voltage is considered forward and which one is considered reverse When the Controller enters into the described mode it writes the D C Motor Reverse line into the log file ERR LOG Then the Controller accesses the parameter DCMTR TIME and DCMTR REV values from the Slave ini file section DC MOTOR The DCMTR TIME value specifies the duration of aD C motor action and should be a multiple of 100 ms The DCMTR REV value specifies the control voltage which may vary from 5 000 mV to 5 000 mV The polarity of the control voltage determines the direction of DC motor rotation the amplitude determines the speed of DC motor rotation The Controller outputs the control voltage specified by the DCMTR REV value to the DC motor DAC and enters into the following cycle check fora STOP FLAG command if detected abort current mode operation wait 100 ms and compare elapsed time with the
74. SOR ALONG THE Z AXIS 1X OR 3X BUFFERED Z PID SIGNAL PROPORTIONAL TO Z HEIGHT DIFFERENCE SIGNAL FROM QUADRANT PHOTODETECTOR LEFT HALF MINUS RIGHT DIFFERENCE SIGNAL FROM QUADRANT PHOTODETECTOR TOP HALF MINUS BOTTOM OUTPUT SIGNAL FOR X PIEZO DRIVER OUTPUT SIGNAL FOR Y PIEZO SET POINT FOR X LINEARIZER FEEDBACK LOOP SET POINT FOR Y LINEARIZER FEEDBACK LOOP OUTPUT FROM DISTANCE SENSOR ALONG THE X AXIS OUTPUT FROM DISTANCE SENSOR ALONG THE Y AXIS OUTPUT TO X PIEZO FROM LINEARIZER FEEDBACK LOOP OUTPUT TO Y PIEZO FROM LINEARIZER FEEDBACK LOOP OUTPUT SIGNAL FOR Z PIEZO SUM OF PHOTODETECTOR QUADRANTS START SCAN SET CLEAR BIT TO FLAG DATA POINT EXTERNAL START SCAN EXTERNAL MODULATOR INPUT E G FOR PULSE FORCE MODE REV B WAS PIXCLK REV A SPECIFICATIONS PSCAN2 CONTROLLER INTERFACE BOARD AUXILIARY INPUT 2 NOT USED External monitor signals buffered Z SET Z POS Z MOD Z DMO Z ERR Z PID Z SEN Z HGT X CTL Y CTL Z PIZ Z SUM OUTPUT FLGSS OUTPUT FLGPT INPUT EXTSS INPUT EXT MOD 2 6 5 Z ERR Z SUM AUX IN2 53 SPM CONTROLLER 27 6 5 INTERNAL FUNCTIONS WITH CONNECTOR AND PIN ASSIGNMENTS ANALOG I O BOARD CONNECTOR 6 37 PIN SUB D FEMALE PINOUTS 1 ALHO ADC1 2 ALH1 ADC2 3 ALH2 ADC3 4 ALH3 ADC4 5 ALH4 ADCS 6 ALH5 ADC6 7 6 ADC7 8ALH7 ADC8 9 A GND A GND 10 A GND A GND 11 V REF 12 EXT REF 1 NC
75. Stop Scan Scan Progress Indicator and Elapsed Time Option Show Oscilloscope Line Mode and Display Scanned Image Same Time RED DOT ALIGNMENT 1 MODELESS WINDOW TIP APPROACH 1 MODAL WINDOW Tip Engage Select Z Motor Stepper or Motor Select Channel to Monitor See Selection Below Select Close to Surface Value Select Z ADC Final Nominal Value Tip Retract Select Z Motor Stepper or Dc Motor Select Dc Motor Reverse Value Select Dc Motor Reverse Time Tabbed windows Modeless INPUT SELECTS TO ADC SELECT UP TO 4 CHANNELS 11 Channels to Select 8 Bit Port Addr amp 4 Bits See Selection above Z SENSOR SIGNAL SELECTS Gain 8 Bits Offset 8 Bits Filter 3 Bits for 10 Hz 100 Hz 1000 Hz Full Range ERROR SIGNAL Z POS SELECTS Filter 3 Bits for 10 Hz 100 Hz 1000 Hz Full Range Z ADC SELECTS Gain 1 Bit for 1x 3x LATERAL FORCE SELECTS Gain 8 Bits Offset 8 Bits Filter 3 Bits for 10 Hz 100 Hz 1000 Hz Full Range 106 SPM CONTROLLER 27 6 5 2 PID Channel Select 2 Bit T b Photodet or External Input or Z sen Select Demod Mode 2 Bit Demod or Bypass Demod Select Input Polarity 1 Bit Select Setpoint Polarity 1 Bit Select Setpoint Value 8 Bits Select Error Signal Gain 8 Bits
76. TROLLER 27 6 5 4 6 SCAN IMAGE MODE Command SCAN START Time limited Logs used ERR LOG LINE LOG PING LOG PID LOG Data files SCAN DAT aka 05 2 DAT This mode is designed for SPM image acquisition When the Controller enters into this mode it first writes the Scan Image line into the error log file ERR LOG Then the Controller opens the line log file LINE LOG and outputs 0 line into it which means no line is scanned at that moment The Controller further accesses parameter values in the Slave ini file section SCAN IMAG E which are used for Scan Image operation Before the actual Scan Image operation is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS XY CONTROL Z FEED BACK DEMOD SELECTS FREQUENCY SYNTH AUX 1 amp 2 LASER Then the Controller carries out the slow tip position initialization the SPM tip is moved from its current arbitrary XY position to the scan start XY point The tip is moved via a straight line using the number of POINTS increment with the rate of a given SCAN RATE The actual Scan Image operation consists of the number of LINES alternating forward line scan and reverse line scan operations The acquired data are transferred into the data SCAN DAT after line scan operation depending on the acquisition direction parameter D IR value If DIR value is 0 forward scan then dat
77. XT external input 10 VDC 25 NC 26 NC 27 LZR PWR laser power 5 VDC 28 Z PY2 Z piezo modulator output 29 Z PY 1 Z piezo actuator output 30 Y PIZ Y piezo actuator output 31 X PIZ X piezo actuator output 32 33 34 35 Z high voltage board option 36 Y high voltage board option 37 X high voltage board option 1 GND for detector preamp 2 AN GND 3 AN GND 4 GND DCMTR 5 EXT external input common 6 15 VDC power 7 15 VDC power 8 LZR RET laser return 9 DCMTR dc motor for probe approach 10 Z RT2 return for Z piezo modulator 11 Z RT1 return Z piezo modulator 12 Y RET return Y piezo 13 X RET return X piezo 14 N C 15 N C 16 N C 17 high voltage board option 18 X high voltage board option 19 GND Signal Access A number of internal signals can be monitored and certain input signals can be coupled to the PScan2 Controller via a 60 pin dual in line connector The signal connections are as follows 1 Z SET MON1 Set point for Z feedback loop 2 GND 3 Z POS MON2 Error Signal Z ERR with gain amp filters 4 GND 5 Z MOD Output signal from Frequency Synthesizer 6 GND 7 Z DMO Output signal from Demodulator 8 GND 9 Z ERR MON5 Comparator output signal Z SET Z SIG 10 GND 11 Z PID MONS Output signal from the Z PID feedback loop 12 GND
78. ZER X X PIEZO 12 BIT D A X SENSOR LINEARIZER Y Y PIEZO X SEN Y SENSOR COUNTER Z SUM TIMER Z HGT 2 PIEZO Z ERR FEEDBACK 5 CONTROLLER Z E Z SEN Z SENSOR 16 BIT A D 8 Z L R 4 QUADRANT PHOTODETECTOR WITH ON BOARD AMPLIFIER ISA PCI BUS DAQ Z DEM AUX IN1 ADC SELECTS AUX IN2 EXTERNAL FEEDBACK 8 BIT DAC GAIN FILTER 3x8 BIT DACS 8 BIT DAC MODULATOR 12 BIT DACS 8 BIT DAC 12 BIT DAC Z MOTOR CONTROL X Y STAGE STEPPERS SOLID STATE SWITCHES OPTIONAL BUS 2x12 BIT DAC ZOOM DEMOD PID SET POINT SYNTHESIZER X Y OFFSETS GAIN Z RAMP Z MOTOR X Y STAGE SWITCHES 16 BIT BUS AUX OUTPUTS MASTER PC Z MOTOR X Y STAGE LASER SCANNING HEA DIGITAL I O CONTROLLER PC INTERFACE BOARD LEVEL 63 SPM CONTROLLER Appendix D Schematic Diagrams for PScan2 Controller Rev B external input 10 10 V from 4 quadrant photodiode 4 lt 26 SUM lt SOURCE SELECT x GAIN OFFSET 4 J Z S 1 255 m Z SUM ADC 7B X31 FILTER ZAR GAIN FULL 1K ADC 3 100 10 Hz 1 um 7 516 X22 23 24 FILTER E FULL 1K
79. a are transferred only after forward line scan operations If DIR value is 1 reverse scan then data are transferred only after reverse line scan operations And finally if DIR value is 2 forward reverse scan then data are transferred after both forward and reverse line scan operations Whenever scan line data are transferred into the data file SCAN DAT the Controller increments the scan line counter and writes its value into the line log file LINE LOG starting from the zero file position Thus the ASCII text line in the line log file always represents the number of the line scan data sets in the data file SCAN DAT The Controller checks for a stop flag STOP FLAC after each line scan operation If the stop flag is found the Controller writes an empty line into the log ERR LOG and terminates Scan Image operation The Controller also checks for a change flag CHANGE FILE indicator after each line scan If this flag is found and indicates that IN PUT SELECTS Z FEEDBACK DEMOD SELECTS FREQUENCY SYNTH PID ON OFF Z PIEZO AUX 1 amp 2 or LASER section was modified then the Controller applies parameter values from that section of the Slave ini file and continues Scan Image operation Else if the change flag indicates SCAN IMAGE or XY CONTROL 79 SPM CONTROLLER 27 6 5 modified section the Controller wnites the Scan Image mode restarted line into the log file ERR_LOG a
80. ack engage operation When the Controller enters into this mode it writes the Tip Engage line into the log file ERROR LOG Then the Controller sets the Z PID On Off switch X4 into the state according to the value of the PID ON parameter Slaveini file PID O N OFF section The Controller further sets the Z D AC output to OVolt level that means Z piezo is fully extended After that the Controller accesses parameters ZMTR TIP CH TIP and SRF TIP from the Slave ini file section TIP APPROACH If the Z DC motor is selected the Controller accesses parameter DCFWD TIP in the Slave ini file section TIP APPROACH and uses its value for Z DC motor DAC output Then the Controller enters into the following loop Check fora STOP FLAG if found then activate fast retract line X5 set Z DC motor DAC to zero output level set Z DAC output to 10 Volt level 7 piezo fully retracted deactivate fast retract line X 5 and terminate current mode Acquire channel set by parameter value and compare acquired value with the 5 value if value is close then set 7 DC motor DAC to zero output level activate the Z PID O n Off switch X4 line into ON state and complete current mode If one of the eight stepper motors is selected by ZMTR TIP parameter value the Controller accesses parameters DIRDWN TIP STEPDWN TIP and CYCLES TIP in the Slave ini file section TIP APPROACH and uses their values for stepper direction full
81. age polarity yields to different DC motor rotation direction Thus forward and reverse D C motor direction depends on a custom hardware wiring of D C motor The two D C motor related modes of the Controller operation allows user to define which control voltage is considered forward and which one is considered reverse When the Controller enters into the described mode it writes the D C Motor Forward line into log file ERR LOG Then the Controller accesses the parameter DCMTR TIME and DCMTR FWD values from the Salve ini file section DC MOTOR The DCMTR TIME value specifies the duration of a D C motor action and should be a multiple of 100 ms The DCMTR FWD value specifies the control voltage which may vary from 5 000 mV to 5 000 mV The polarity of the control voltage determines the direction of DC motor rotation the amplitude determines the speed of D C motor rotation The Controller outputs the control voltage specified by the DCMTR FWD value to the DC motor DAC and enters into the following cycle check fora STOP FLAG command if detected abort current mode operation wait 100 ms and compare elapsed time with the DCMTR TIME value if equals then terminate current mode operation When the Controller terminates or aborts the D C Motor forward mode operation it sets DC motor DAC to azero volt level and writes an empty line to the log file ERR LOG 35 SPM CONTROLLER 27 6 5 DC MOTOR REVE
82. an2 PScan2 File extension Topometrix File Type Comments Channel Signal ForwardhReverse 0 Z POS zfr 27 Topography or 1 Z HGT tfr trr Topography or Topo True topography 2 Z LR fr Arr Lateral Force or LFM 3 Z SEN ffr Feedback sensor or Sensor 4 AUX IN1 fr Arr External Input 1 or ADC1 5 X SEN XIT Not recognized by Topometrix Software 6 Z DEM 5 Modulation or Spectro 7 Y SEN yfr Not recognized by Topometrix Software 8 Z ERR mfr mrr Fast Track 9 Z SUM ufr urr Not recognized by Topometrix Software 10 AUX IN2 2fr 2tr External Input 2 or ADC2 11 ADC8B 8fr ADC8B auxiliary input recognized by Topometrix Software The first letter of a file extension represents the signal source the second line acquisition direction forward f reverse r the third letter represents the image origin raw r processed p As appears in Topometrix Software In order to be processed by Topometrix Software the file must be manually renamed to a file name with one of the recognized file extensions Select a Topometrix extension that does not currently hold data already acquired by PScan2 controller 109 SPM CONTROLLER Appendix J Flow Chart for SPM Cockpit Program Located in Separate Volume Typical Mode This mode is intended for the occasional user It provides access to a limited number o
83. ans during this mode noris the Controller s software reloaded H ardware power on reset must be used for a complete Controller system reinitialization This mode is designed to handle network communication failures in network link between the Controller and the Master Workstation It is recommended that the A pplication Software on the Master Workstation issues reset command RESET FLAG right after the stop command STOP FLAG every time it is loaded Let us assume as an example that the Controller is in the Image scan mode and then suddenly the Master Workstation hangs The Controller will then be stuck on a network I O operation After the Master Workstation reboots the Controller resumes anetwork operation and continues functioning All information that designated to data and log files that were open by Controller before the Master Workstation was rebooted is going nowhere and is lost The Controller remains in the same functional mode that it was in at the moment of the Master Workstation hang up When the Application Software issues the stop command the Controller is in the Idle mode but log messages are still going nowhere Then the reset command forces the Controller to reopen the log file and the Controller is ready to proceed with operation Whenever the Controller services the reset command it writes the Controller Software version information and the D evice Ready line into the log file ERR LOG 4 3 TIP RETRACT
84. antial expertise and the user is advised to consult with a person with knowledge in this art PSCAN2 SPM CONTROLLER 27 6 5 The current configuration operates using Microsoft NetBIO 5 Extended User Interface NetBEUI protocol on both Master Workstation and Controller Microsoft Network Client version 3 0 for MS DOS is installed on the Controller side and provides a file level network access to the Master Workstation s shared resources The following Network software components are required on the Master Workstation Ethemet Adapter driver NetBEUI protocol driver Client for Microsoft N etworks File and Printer Sharing for Microsoft N etworks service TIP Use Settings Control Panel gt N etwork to add required network components orto edit their properties Y our original Windows 95 or NT disk may be required for completing installation The necessary protocol bindings are required on Master Workstation NetBEUI to Ethernet A dapter Client and File amp Printer Sharing to NetBEUI The File Sharing capability on the Master Workstation must be enabled Settings gt Control Panel gt Network File and Print Sharing gt I want to be able to give others access to my files check box checked SPM CONTROLLER 27 6 5 Chapter Description of External Signal Connections This chapter includes specifications and signal connection instructions for PScan2 Controller connectors located on
85. ata point acquisition This hand shake confirmation allows the synchronization of the display procedure on the Master Workstation with the data acquisition procedure on the Controller The Controller stays in the O scilloscope storage mode until this mode is interrupted by a STOP FLAG command Itis allowed to changethe TIME BASE value during the O scilloscope storage mode operation The CHANGE FILE command must be issued to force the Controller to apply an updated TIME BASE value The Controller checks for a change flag CHANG E FILE indicator after each data point acquisition If this flag is detected and indicates that section INPUT SELECTS Z FEEDBACK DEMO D SELECTS FREQUENCY SYNTH PID ON OFF Z PIEZO AUX 1 amp 2 LASER XY CONTROL or OSC TIME was modified then the Controller applies parameter values from that section of the Slave ini file and continues Oscilloscope storage mode operation 33 SPM CONTROLLER 27 6 5 5 2 11 STEPPER MOTOR MODE Command STEPPER START Time limited Logs used ERR LOG Data files none This mode is designed to operate one of eight available stepper motor Stepper motors are driven by stepping pulses only one stepper motor at a time can be active in current mode Multiple stepper motors should be operated consecutively via multiple STEPPER START commands When the Controller enters into the given mode it writes the Stepper motor line into the log file
86. ator output 2 x 12 bit DAC outputs for user 8 bit DAC for 5 to 5 v Analog I O board Digital 1 0 Synthesizer Set point A4oop Z signal gain Z signal bandwidth Z DAC PI X DAC dc offset Y DAC dc offset X Y zoom Zsensor Demod filter Aux out 1 amp 2 DC motor 50 SPM CONTROLLER selects polarity of sensor value relative to z piezo direction selects polarity of set point value relative to z piezo direction switch for laser diode enables rapid tip retraction during engagement of feedback enables z offset dac gain switch for decreasing z range selects or oscillating scanning modes selects photodetector sensing or external sensor for feedback demodulator gain setting demodulator gain setting demodulator gain setting bandwidth reduction from z sensor bandwidth reduction from z sensor bandwidth reduction from z sensor bandwidth reduction for lateral force measurements bandwidth reduction for lateral force measurements bandwidth reduction for lateral force measurements bandwidth reduction from demodulator bandwidth reduction from demodulator bandwidth reduction from demodulator selects 4 of 8 possible input sources disconnect PID output from z feedback for indentation measurements enable and set direction amp increment for 6 low current stepper motor 16 bit bus w two input and 2 output control bits available for external use on analog I O board
87. ays in the Oscilloscope time mode until this mode is interrupted by a STOP FLAG command Itis permissible to change the TIME BASE value during the O scilloscope time mode operation The CHANGE FILE command must be issued to force the Controller to apply an updated TIME BASE value The Controller checks for a change flag CHANGE FILE indicator after each series of data point acquisition If this flag is found and indicates that IN PUT SELECTS Z FEEDBACK DEMO D SELECTS FREQUENCY SYNTH PID ON OFF Z PIEZO AUX 1 amp 2 LASER or OSC TIME section was modified then the Controller applies parameter values from that section of the Slave ini file and continues O scilloscope time mode operation 80 SPM CONTROLLER 27 6 5 4 8 OSCILLOSCOPE LINE SCAN MODE Command 0502 START Time unlimited Logs used ERR LOG LINE LOG PING LOG PID LOG Data files OSC2 DAT aka SCAN DAT This mode is designed for repetitive acquisition of up to 4 selected input channels during one line of XY raster scanning This mode is analogous to the Scan Image mode except only one line is scanned D ata can be acquired during either forward or reverse or both directions of line scan When the Controller enters into this mode it first writes the O scilloscope line mode line into the log file ERR LOG Then the Controller opens the line log file LINE LOG and writes the 0 line into it which mea
88. basic system block diagram Network software components The current configuration operates using Microsoft NetBIO S Extended User Interface NetBEUI protocol on both Master Workstation and Controller Microsoft Network Client version 3 0 for MS DOS is installed on the Controller side and provides a file level network access to the Master Workstation s shared resources The following Network software components are required on the Master Workstation Ethernet A dapter driver Figure 5 2 NetBEUI protocol driver Figure 5 4 Client for Microsoft N etworks Figure 5 6 File and Printer Sharing for Microsoft Networks service Figure 5 7 TI P Use Settings Control Panel gt N etwork to add required network components or to edit their properties Y our original Window 95 or NT disk may be required for competing installation The necessary protocol bindings are required on Master Workstation NetBEUI to Ethernet A dapter Figure 5 3 Client and File amp Printer Sharing to NetBEUI Figure 5 5 The File Sharing capability on the Master Workstation must be enabled Settings Control Panel gt N etwork gt File and Print Sharing I want to be able to give others access to my files check box checked see Figure 5 8 Data Command Exchange DCEx protocol structure The D ata Command Exchange D CEx protocol is an Application level protocol which can be used to send a command to the Controller receive data from the
89. cantilever approaches the surface the feedback error signal is periodically updated in this box Retract For DC motors the extent to which the cantilever tip is retracted from the surface is set by a combination of the applied Voltage and the Duration in ms of the voltage pulse For steppers the Step Size Direction and Number of steps are set The rate is preset at the maximum rate for reliable operation The Distance movement of the cantilever tip is indicated in the box adjacent to the step number Scan Control Panel Scanning and image acquisition is controlled from this window with the Start and Stop buttons If the Repeat Scan box is checked the scan routine will restart a few seconds after completion The Elapsed Time and Lines Remaining for the scan are updated during scanning Display Scanned Image By successively clicking on the grid icon up to four different signals can be imaged during scanning See the Settings section for selecting available signals A ny of the displayed images may be expanded to full screen The color bar on the left of the image represents the range of signals for the data acquired Checking the H istogram Correction box allows the user to define the Z scale of interest with the upper and lower limits set as a percent of full scale For some SPM CONTROLLER 27 6 5 viewing situations the quality of the image may be enhanced by checking the Shading box and selecting the apparent dir
90. d reference pixels Lx0 2px0 px1 Zoom LSB px2 Zoom LSB 2 Y Scale Factor primary correction vs Zoom LyO py0 py1 Zoom LSB py2 Zoom LSB 2 none Master software on none Master software on X Scale Factor secondary Correction vs X offset Lx 0 4 cxO cxT Xoffs mV Xoffs mV Y Scale Factor secondary correction vs Y offset Ly Ly0 0 Cy I Y offs mV Y offs mV FFT last known coeff Xreal al Xpos a2 Xpos 2 pixels Yreal b1 Y pos b2 Y pos 2 pixels t none Master software only mv mv X pixel zoom factor 96 default 0 9 9096 Y pixel zoom factor default 0 9 9096 MS none Master software 6 Oat 2 doublefloat Software flow contro double float none Software flow contro double float double float none Software flow contro ES Rae 255 ZOOMO 0 255 none Software flow control Zoom of calibration image al PIXO 128 1024 none Soft HYST CORR ZOOMO 0 255 none Master software only PIXO 128 1024 none Master software only 0 255 none Master software only efloa none Master software only EE none Master software only y y efloal none Master software only t none Master software only X Scale Factor primary correction vs Zoom none Master software only none Master software only none Master software only y y no
91. d voltage ranges are shown The computer and analog digital I O support functionality is not shown Rather the digital output chip select and switch lines are represented as 5 and X xx designators which are adjacent to the block representing the function The designators or names for the analog signal lines also used in the schematic diagrams are shown adjacent to the functional block This includes the signals which can be acquired represented by the AD C xx designator which are just below the signal name Analog signal lines that can be monitored externally are represented by a triangle buffering amplifier and a circle enclosing a number designator 1 15 SPM CONTROLLER 27 6 5 4 3 Description X Y sensing and feedback loops Non feedback mode The X amp Y DAC scan signals from the computer enter the Interface Board circuitry through their respective differential buffering amplifier followed by an amplifier ZO O M with digital gain This signal is summed with a digitally controlled voltage source OFFSET to produce aX Y SET signal which can be used to control an feedback loop for each direction If the downstream switch is set in the 1 2 position the X Y SET drives the power amplifier PA directly The outputs X Y PIZ are wired directly to their respective piezo actuators Feedback mode The differential inputs from the X and Y position sensors must
92. driving frequency and amplitude and measuring the signal amplitude as a function of applied Z piezo voltage The scaling boxes are similar to the modes above To the lower left of the graph is the selected Signal The Sweep Rate is typically set to 5 10 ms The Start and End frequencies are typically set around the anticipated resonance frequency or they may be set to scan the full range The Start and Stop Sweep initiate and terminate the frequency sweep The driving amplitude and phase for phase detection mode may be set at anytime T wo successive sweeps are displayed the current sweep is green the previous sweep is red For convenience the left mouse key may be pressed while the cursor is within the graph screen in order to sweep a particular range The range is fixed and the graph screen reset to the new sweep ranges by a right mouse click Positioning the cursor on the desired frequency and double clicking the left mouse button sets the indicated frequency amplitude and phase into the Settings windows when the user is ready for tip cantilever approach The Z gt button is used to ascertain whether the cantilever and mount are in satisfactory mechanical contact as a function of the applied Z piezo voltage O nce the desired frequency is selected pressing the Z gt button will ramp the output voltage to the Z actuator from high to low to high voltage and retum to the initial state The resulting plot of the amplitude at the
93. e shared resource You don t need to use this option unless the password is optional Specifies which connections should be restored the next time you log on to the network It must be followed by one of the values below 5 Specifies that the connection you are making and any subsequent connections should be persistent NO Specifies that the connection you are making and any subsequent connections should not be persistent LIST Lists your persistent connections SAVE Specifies that all current connections should be persistent CLEAR Clears your persistent connections Specifies that the password you type should not be saved in your password list file You need to retype th password the next time you connect to this resource Carries out the NET USE command without first prompting you to provide information or confirm actions Breaks the specified connection to a shared resource Carries out the NET USE command responding with NO automatically when you are prompted to confirm actions Makes a connection to your HOME directory if one is specified in your LAN Manager or Windows NT user account PSCAN2 drive port computer directory printer password PERSISTENT SAVEPW NO NO HOME 67 SPM CONTROLLER 27 6 5 To list all of your connections type NET USE
94. e to be incorporated into a z feedback loop for absolute Z positioning Differential buffered input Range 0 to 10 V Auxiliary Inputs 2 each Aux 1 and Aux 2 Range 10 V to 410 V Differential buffered inputs External Modulator Pulse force 0 to approx 10V input to 2 output amp 0 10 kHz Input signals to MUX Designate Function amp Signal Conditioning Voltage Range Z POS Error Signal Z ERR with gain amp filters 10V Z HGT 1x or 3x buffered Z PID Signal proportional 10V Z LR Signal left minus right from quad photodetector 10 V Z SEN Z sensor with offset gain amp filter 10V AUX IN1 Auxiliary Input 1 10V X SEN X sensor output 0 10V Z DEM Demodulated Signal Z DMO with filters 0 10V Y SEN Y sensor output 0 10V Z ERR Error Signal absolute from cooperator 10V Z SUM Summed Signal of quad input photodetector 0 10V 46 SPM CONTROLLER PSCAN2 10 V 10 V Auxiliary Input 2 Not used AUX IN2 NC Indicates a signal suitable for acquiring images Balanced Demodulator sometimes called synchronous demodulation amplitude detection 50 500 kHz DC 20 kHz Demodulated oscillating probe or other external AC signal for PID feedback loop or imaging signal 1 2x 3x or 4x Z PID feedback loop with 10 Hz 100 Hz 1 kHz filters or full oandwidth Demodulator Type Frequency range Demodulated bandwidth
95. ection of the light source N S E amp W The image can be leveled on a line by line basis by checking the Auto leveling box The color bar and scaling are corrected automatically Zoom An area to be zoomed may be defined by pressing the left mouse button on the upper left region to be outlined and drawing the cursor across the scanned image The zoomed area is locked in by releasing the left mouse button and clicking on the right button To zoom out to a previously zoomed region a small box is formed just outside the scanned image but within the window This procedure may be performed successively expanding the zoomed area until the maximum scanned area is accessed An alternative means for zooming is accomplished by double clicking the left mouse button when the cursor is outside of the scanned image A new window is opened which defines the entire area accessible by the X Y sensors The maximum scanned area is defined by white dotted lines this represents the region in which the linearize routine has selected By pointing the cursor within the outlined green region the scan area may be positioned anywhere within the range of the sensor However if the green outline is outside of the white dotted line the scanned are is not linear and will cause a distorted image For convenience the Start and Stop points are indicated When scanning at angles other than 0 90 180 and 270 degrees the actual scan area is marked by the red outline
96. er sensing scheme quadrant photodetector and low voltage piezo actuators Also we will assume that the scanner has internal sensors e g strain gauge or capacitance sensors for monitoring X Y and Z motions of the scanning tip or scanning sample Therefore it is possible to locate or position the tip sensor probe absolutely in X Y and Z by incorporating respective feedback loops to the piezo actuators The simplified block diagram in Appendix C 1 shows the PSCAN2 Controller as seven main blocks or sections The computer section left side generates and receives the analog and digital signals for operating the other six sections that provide the interface with the Scanner Stage and any Auxiliary Signal Components The sections are presented so as to approximately match the primary functions of a SPM controller 14 SPM CONTROLLER 27 6 5 4 2 Detailed Block Diagram In Appendix C 2 a more detailed block diagram is shown which present a more complete picture of how the controller functions Please note several items Each block represents approximately one function For brevity only the primary functions are shown For example some buffering circuits are not indicated Triangles represent one of the following amplifiers buffering amplifier differential amplifier summing amplifier or power amplifier Rectangular boxes represent a circuit function that is labeled inside the box Where appropriate the bit resolutions an
97. f functions on the PScan2 Controller These functions are arranged as a sequential menu and offer a step wise method for initializing the scanner setting scanning mode beam alignment tip engagement and retract selected scanning options image display and direct access to an image analysis program optional program This mode will over ride certain parameters in the configuration file using instead default parameters that minimize the possibility of an improper cantilever tip engagement Expert Mode This mode provides access to all the functions currently available on the PScan2 Controller Open Configuration File The configuration file contains the operating parameters that have been previously set and saved Any directory can be accessed the default directory can be set under Preferences The SPMCockpit program opens with the setup and scanning parameters from the previous session Save Configuration File as This function will save the setup and scanning parameters in the current session at any time Edit Configuration File Under some conditions it may be useful to manually change a particular parameter in the Configuration File A text editor is opened to allow changes The file must be saved when exiting the editor in order for the changes to take place Save Images An image is acquired for each of the selected channels see Scan Image Setup 1 through 4 They may be saved in one or any of three format
98. for 3 axis sensor scanners The Z sensor gain and offset are factory calibrated to approximately overlap the Z Hgt span in microns 7 10 microns For correct ranging the gain is typically set at 7 and the offset is adjusted so that the center of the Z Hogt range zero volts and the center of the Z Sen range are approximately the same T he decade filter allows for more precise height measurements although at lower scan rate Error Signal Z Pos Filter The Z Pos signal is the inverted Z Err with the addition of decade filters full range 1000 Hz 100 Hz and 10 Hz This signal is useful for reducing noise and noise spikes in either contact mode or oscillating mode Z Hgt Gain The Z Hgf bit resolution can be doubled particularly for enhancing the image quality of features of small height The Z range is also reduced a factor of two with the extended half of the range being active 0 to 10 V of the 10 to 10 V Z Piezo With the PID setting off and the Fast Retract set to Z DAC applied the Z piezo voltage may be set directly with this function The voltage range of the piezo is the inverse of the set voltage 10 000 to 0 mV for 0 to 130 140V in newer units V output to the Z piezo The fully retracted setting of the fast retract function is intended for a specialized application the normal setting is Z DAC applied PID On Off The PID loop may be turned on or off manually at any time In any event d
99. h DOWN Change CHANGE FILE Red Dot alignment REDDOT START Change CHANGE FILE Scan Image SCAN START Change CHANGE FILE Oscilloscope time mode 0501 START Change CHANGE FILE Oscilloscope line mode OSC2 START Change CHANGE FILE Frequency sweep SWEEP START Change CHANGE FILE Oscilloscope storage mode OSCSTO START Change CHANGE FILE Stepper motor STEPPER START Change CHANGE FILE DC motor forward DCMTR FWD Change CHANGE FILE DC motor reverse DCMTR REV Once command flag is detected the Controller performs an appropriate action or enters into one of the functional modes The CHANGE FILE command flag is checked every time between two functional mode command flag checks If CHANGE FILE is detected the parameter values from the appropriate section of the Slave ini file are applied 23 SPM CONTROLLER 27 6 5 Every time the Controller completes or aborts current functional mode operation it retums into the Idle mode and proceeds with the command polling according to the cycled order above Let assume as an example that the Controller has just completed scan image operation then it will enter the Idle Mode and check for the presence of the Oscilloscope time mode OSC1 START command then the Oscilloscope line mode OSC2_START command and so on Let assume further that the Contro
100. he oscillation sensor elements such as cantilevers tuning forks or optical fibers Depending on the need the output may be either capacitively coupled to an X Y or Z piezo actuator or directly driving a small bimorph piezo actuator which is mounted near the oscillating element Signal conditioning for Auxiliary Analog Input and Output Signals Often an SPM technique requires additional analog input and output signals These signals should be buffered in order to minimize damage from excessive voltages Also the input signals should be operated in the differential mode so as to minimize grounding loops and to permit the simple addition of extemal voltage off set and gain circuitry Motor Laser control and secondary 1 0 lines Motors are used for probe sample approach coarse movement of sample stage in Y and Z and other motions particular to the SPM technique Most SPM systems use either a small DC motor or a stepping motor for probe sample approach and both options should be available in the controller Although some systems use heavy duty stepper motors for coarse movements in the three axes others incorporate relatively small stepper motors less than 0 5 amp per phase The controller should have provision operating either the small steppers directly or digital lines for controller external heavy duty stepper drivers For purposes of this discussion we will assume that the user is operating an AFM type scanner using the light lev
101. he Controller s software update Standalone here means that the Controller is not connected to the Master workstation Standalone commands are supplied to the Controller via floppy disk drive and are checked by the Controller only during boot up and only in standalone configuration the Controller is not connected to the Master workstation The Controller attempts to connect to the Master workstation specified by the net use command in the drives bat file and create a log file ERR LOG in the Device Directory every time the Controller is reboot If the connect fails Ethernet cable not connected specified Master workstation name or D evice D irectory name do not exist in the network or access password is invalid the Controller checks the floppy disk drive If the floppy disk is present in the drive the Controller first checks for the CONFIGURE FLAG command represented by an empty configurflg file If this command is detected the Controller enters into the auto configuration mode If no CONFIGURE FLAG command is detected the Controller checks for the UPDATE FLAG command represented an empty update flg file If an UPDATE FLAG command is detected the Controller enters into the auto update mode The Controller in the auto update mode saves the current version of the Controller s software executable as a pscan bak file and copies the pscan exe file from the floppy disk to the Controller s hard disk drive
102. ing every TimeBase interval T hus the time interval between two data points is equal to the TimeBase 300 The TimeBase value can vary from 2000 ms to 10000 ms 2s to 10 s The acquired data point values are transferred before the next data point is acquired This transfer on a per point basis allows an application on a Master Workstation to trace the data during the prolonged TimeBase interval which may constitute from 2 to 10 second When the Controller enters into the given mode it first writes the O scilloscope Storage mode line into the log file ERR LOC Before the actual data acquisition is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS Z FEEDBACK DEMOD SELECTS FREQUENCY SYNTH AUX 1 amp 2 XY CONTROL The Controller further accesses parameter TIME BASE and DUTY_TIME values in the Slave ini file section O SC STORAGE TheDUTY TIME value is subtracted from the TIME BASE value the result is used by the Controller as a TimeBase value The DUTY TIME value is designated for the calibration of an O scilloscope storage mode The idea is that the Controller spend some amount of time for an acquisition and data transfer and some correction of a delay between every two data point is required The DUTY TIME value may vary from 0 to 1900 ms After all 300 data point are collected the Controller waits for an OSCSTO NEXT command before proceeding with the next 300 d
103. itten to the data OSC2 DAT always starting from the zero file position The Controller checks for a stop flag STOP FLAG after each line scan operation If the stop flag is found the Controller writes an empty line into the log file ERROR LOC and terminates line scan operation and returns into the Idle mode The Controller also checks for a change flag CHANGE FILE indicator after each line scan If this flag is found and indicates that IN PUT SELECTS Z FEED BACK DEMOD SELECTS FREQUENCY SYNTH PID ON OFF Z PIEZO AUX 1 amp 2 or LASER section was modified then the Controller applies parameter values from that section of the Slave ini file and continues the Oscilloscope line scan operation Else if the change flag indicates SCAN IMAGE or XY CONTROL modified section the Controller writes the Line scan mode restarted line into the log file ERROR LOC and restarts the Oscilloscope line mode operation from the very beginning 5 2 9 FREQUENCY SWEEP MODE Command SWEEP START Time limited Logs used ERR LOG PING LOG PID LOG Data files SWEEP DAT This mode is designed for a 4 input channel acquisition during frequency sweep on a numerically controlled oscillator This mode allows an acquisition of a signal frequency response in a selected frequency range 31 SPM CONTROLLER 27 6 5 When the Controller enters into this mode it writes the O scilloscope
104. king on one of the primary axis setting T he slight distortion effect of the skew correction setting in the first few scanned lines along the X axis may be removed by setting the rotation angle the same as the skew angle thereby the zero angle for scanning becomes the skew angle Scan Data Transfer Image data can be transferred form the Controller to the Master Computer on a line by line basis or after the whole image is acquired Scan Image Direction The image may be acquired in the Forward Reverse or Both directions of the fast axis X Y Control The X Offset Y offset and Zoom set the effective scan range and start of scan position which is also dependent on the rotation angle T he initial offsets and maximum zoom are set by the configuration file or by running the Auto linearizer routine see below These values can be adjust for smaller scan range and location by using the two zoom features box click mouse on the image for zoom in or box click mouse adjacent to the image for zoom out or double click adjacent to the image to open a separate window for zoom in or zoom out Alternatively the user may adjust these boxed values to select a particular value In addition to the zoom features above an Extra Zoom with O ffsets can be selected for higher resolution or positioning capability By double clicking within an image new extra Zoom window is opened The user may select a zoom value of 2X or 4X and locate
105. les none This mode is designed to operate one of eight available stepper motors Stepping pulses drive stepper motors only one stepper motor at a time can be active in current mode Multiple stepper motors should be operated consecutively via multiple STEPPER START commands When the Controller enters into the given mode it writes the Stepper motor line into the log file ERR LOG Then the Controller accesses the parameter MO TOR STEP DIR STEP PULSES and PACKET values from the Salve ini file section STEPPERS The MOTOR value selects one of the eight stepper motors available the STEP DIR value selects either forward or reverse stepping direction and the STEP value selects either full or half step Parameter PULSES value defines the overall number of stepping pulses to be output to the stepper motor Packets output 84 SPM CONTROLLER 27 6 5 stepping pulses the number of pulses per packet is defined by the PACK ET value The Controller performs network input output operation only between packets therefore the actual rotation speed of the stepper motor is defined by the PACKET value The default value of PACKET is 1 The Controller forms 1 ms duration stepping pulses and checks for the STOP FLAG command every time between pulse packets If STOP FLAG is detected the Controller aborts current mode operation and retums to the Idle mode When the Controller terminates or aborts the stepper motor mode it write
106. ller encounters the Oscilloscope line mode OSC2 START command Then the Controller would enter into the Oscilloscope line mode functional mode and operate there until stop command STOP FLAG is issued When the stop command is issued the Controller retums to the Idle mode and continues command polling with the Frequency sweep command checked next see cycled polling order above Whenever the Controller is initialized on power up or software reboot it writes the Controller Software version information and the D evice Initialized line into the log file ERROR_LOG and enters into the Idle mode 2 RESET MODE Command RESET FLAG Time limited Logs used ERR LOG PID LOG Data files none The purpose of the reset mode is to reinitialize the Controller s Interface Board and to reopen the log file ERROR LOC The Controller s computer is not reinitialized reset or affected by any means during this mode nor the Controller s software is reloaded H ardware power on reset must be used for a complete Controller system reinitialization This mode is designed to handle network communication failures in network link between the Controller and the Master Workstation It is recommended that the A pplication Software on the Master Workstation issues reset command RESET FLAG right after the stop command STOP FLAG every time it is loaded Let s assume as an example that the Controller is in the Image scan m
107. log file ERROR LOG terminates the Oscilloscope frequency sweep mode operation and returns into the Idle mode The Controller also checks for a change flag CHANGE FILE indicator after each frequency point acquisition If this flag is detected and indicates that PID ON OFF Z PIEZO AUX 1 amp 2 or LASER section was modified then the Controller applies parameter values from that section of the Slave ini file and continues the Oscilloscope frequency sweep mode operation The Controller do not take any actions if the change flag indicates INPUT SELECTS FREQ SWEEP Z FEED BACK DEMOD SELECTS or CONTROL modified section The Oscilloscope frequency sweep mode must be restarted by the user in order for the changes in sections mentioned above to take effect 20 OSCILLOSCOPE STORAGE MODE Command OSCSTO_START OSCSTO_NEXT Time unlimited Logs used ERR_LOG PING_LOG PID_LOG Data files OSCSTO_DAT 32 SPM CONTROLLER 27 6 5 This mode is designed for 4 input channel acquisition at the real time scale It is analogous to the Oscilloscope time mode except longer TimeBase values are used The name Storage is derived from a an analogy to an electronic digital storage oscilloscope As in the case of an electronic storage scope the O scilloscope storage mode is useful for an acquisition of a slow changing signal Three hundred data point per channel is acquired dur
108. log Input and Output Signals The auxiliary input signals AUX 1 and AUX2 are each buffered with a differential input amplifier before entering the A D multiplex circuitry The input voltage range is 0 10 V and is resolved at 16 bits by the A D converter about 0 16 mV The differential input allows the incoming signals to be easily inverted and offset externally The auxiliary output signals range from 0 10 V and are generated at 12 bit resolution 2 5 mV Motor Laser Control and secondary 1 0 lines The motor laser control section comprises a means for driving 6 small stepper motors one DC motor and a switch for turning the laser on and off The drivers for the small steppers are rated at 0 5 amp phase and independent control lines for motor select step size full half step direction and current control The output driver for the DC motor provides an output of 5 VDC at 100 150 mA at 8 bit resolution about 40 mV The solid state switch that enables the D C motor relay also enables the laser This prevents inadvertent turning on of these components during computer boot up and initialization of hardware signal states Schematic diagrams are provided in Appendix D separate volume 17 SPM CONTROLLER 27 6 5 Chapter Data Command Exchange DCEx The purpose of the DCEx protocol is to provide reliable data transfer between master and the slave over the Ethernet using standard Windows drivers T his
109. ly Pacific Nanotechnology replacement parts Use only Pacific Nanotechnology approved consumables such as filters lamps cantilevers etc Provide safe and adequate working space for servicing of the products by Pacific Nanotechnology personnel REPLACEMENTS AND REPAIRS Any product part or assembly returned to Pacific Nanotechnology for examination or repair must have prior approval A Return Materials Authorization RMA number obtained from Pacific Nanotechnology prior to shipment must identify a return It must be returned freight prepaid to the designated address by the customer Return freight costs will be prepaid by Pacific Nanotechnology if the product part or assembly is defective and under warranty Pacific Nanotechnology will either replace or repair defective instruments or parts at its option Repair and replacement of instruments or parts does not extend the time of the original warranty Replacement parts or products used on instruments out of warranty are themselves warranted free of defects in materials and workmanship for 90 days with the exception of consumables such as filters lamps cantilevers etc WARRANTY LIMITATIONS This warranty does not cover 1 Any loss damage and or product malfunction caused by shipping or storage accident abuse alteration misuse or use of usersupplied software hardware replacement parts or consumables other than those specified by Pacific Nanotechnology
110. m For more precise beam positioning at low light levels a 1x to 4x Scale switch is provided This scale setting does not affect the Z PID loop For convenience the Laser may be turned on and off from this window Oscilloscope time mode The time dependence of up to 4 signals may be presented graphical form The time base ranges from 10 to 1000 ms The update interval depends on the time base setting and the performance of the master computer but is typically several times a second As with all oscilloscope modes the voltage rangeis 10 volts The scaling may be set at Full scale one time A uto scale or continuous auto scale with box checked With the Auto box unchecked the Half Range and Offset settings can be independently controlled TOOLS SPM CONTROLLER 27 6 5 Oscilloscope line mode This mode is similar to the time mode except that the abscissa becomes the voltage ramp of a line scan The repetition rate is set under the Scan Image Setup scan rate as is the resolution pixels If the Z Hgt or Z Sen signals are selected an Auto leveling box is available for observing the line scan corrected for background slope Oscilloscope frequency sweep mode This mode is for determining the characteristics of a demodulated signal as a function of driving frequency and amplitude It provides a convenient means for frequency scanning nominally 50 kHz 500kH2 determining the resonance frequency setting the
111. m that the voltage rating that is printed on the rear label is correct for your in house line voltage 2 Confirm that the enclosed power cord is correct for your in house outlets 3 Connect the power cord and turn on the power switch located adjacent to the power cord inlet 4 In addition to a low level sound of fans operating the controller should beep three times within 30 seconds 5 If the beeps are not heard call the Pacific Nanotechnology representative for further checks SPM CONTROLLER 2 2 Hardware Configuration Master Computer Controller Ethernet Cabling Twisted pair connection The communication between the Master computer and the Pscan2 Controller requires a 10 Mbit sec Ethernet connection If no hub controller is need for in house communication between the Master Computer and other computers then only a simple crossed wire twisted pair cable is required A 6 to 15 ft cable with male RJ 45 connectors provides the simplest and most satisfactory bullet proofHe 1 pnection Hub type connection Various low cost 10 100 Mbit sec hubs are available commercially from local computer stores T he user is advised to consult an expert in Ethernet communications forthe particular needs at hand For convenience Pacific N anotechnology offers a name brand local hub and cabling Network cards and connectors You can use any ISA or PCI network board but we strongly recommend that you purchase a major brand board such a
112. main power on off linearizer on off select normally software selectable for 5 VDC 12 VDC 15 VDC 140 VDC power supplies on interface board 12 VDC filtered for steppers 5 VDC filtered for digital circuits low voltage 15 VDC high voltage 140 VDC adjustable 125 140 VDC 2 6 5 Digital selects Polarity sensor Polarity set point Laser on off Tip retract 1 12 gain Z offset 2 gain reduction Detection mode Ext t b switch Gain for Demod 2x Gain for Demod 3x Gain for Demod 4x Bandwidth 10 Hz Bandwidth 100 Hz Bandwidth 1000 Hz Bandwidth 10 Hz Bandwidth 100 Hz Bandwidth 1000 Hz Bandwidth 10 Hz Bandwidth 100 Hz Bandwidth 1000 Hz ADC mode select off PIDOUT Stepper selects Digital 1 0 Additional 16 bits Switches External J umper selects Indicators Power supplies Internal from slave computer Internal add on linear power supplies In Controller CPU box 51 SPM CONTROLLER Appendix B Connectors and Pin Assignments Internal and External LOCATION ON TOP ON TOP AT REAR AT REAR AT SCANNER INTERNAL AT REAR ON TOP ON TOP ON TOP ON TOP CONNECTORS FOR INTERFACE BOARD NUMBER 50 PIN MALE HEADER DIGITAL SIGNAL TRANSFER BETWEEN SLAVE CPU amp INTERFACE 10 PIN 156 WALDOM MALE LO VOLTAGE POWER BETWEEN SLAVE CPU amp INTERFACE BOARD 50 PIN MALE HEADER STEPPER MOTOR amp DC MOTOR OUTPUTS 60 PIN
113. motor selection If Z DC motor is selected the Controller accesses parameter DCREV_TIP and DCTIME TIP values in the Slaveini file section TIP APPROACH The values are used to apply a specified DC motor voltage for a specified period of time If one of the eight stepper motor is selected the Controller accesses parameter DIRUP STEPUP TIP PULSES and PACKET TIP values in the Slaveini file section TIP APPROACH The values are used to select the direction full half step the number of pulses and pulse packet size for tip retraction using stepper motor Stepper pulses are produced at 1 kHz rate the network I O operation which takes additional time out of stepping is performed only between pulse packets Thus the PACKET TIP value determines the actual speed of tip retraction using stepper motor Tip retraction can be terminated before the completion DCTIME TIP elapsed time or PULSES TIP stepper pulses by a stop command The Controller checks for a STOP FLAG at about every 100 ms time interval if a D C motor is used and after each stepper pulse packet if a stepper motor is used When the tip retraction is completed or terminated the Controller writes an empty line into the log file ERROR 106 25 SPM CONTROLLER 27 6 5 5 2 4 TIP APPROACH MODE Command TIP DOWN Time limited Logs used ERR LOG PID LOG Data files none This mode is used for SPM probe tip approach and Z PID feedb
114. mple a complex series of high speed I operations on the optional 16 bit data bus may be necessary If this is the case please contact a Pacific Nanotechnology representative SPM CONTROLLER 27 6 5 1 4 Optional Equipment Pacific Nanotechnology Inc offers a variety of products to use with your PScan2 Controller including cables connector blocks and other accessories as follows Cables and cable assemblies no connector open ended on user side Scanner 37 pin sub D connector with 4 ft cable analog signals shielded Linearizer 9 pin sub D connector with 4 ft cable analog signals shielded Signal Access 50 pin dual in line with 6 ft flat ribbon cable Steppers D igital I 60 pin dual in line with 6 ft flat ribbon cable Signal Access Console Breakout box with BNC connectors for connecting to and monitoring various intemal signals extemal analog input and output signals and digital flags includes 3 ft flat cable with 50 pin connectors on both ends HV 450 Board For operating external quadrant tube type scanners Z Including 5 high voltage amplifiers with two power supplies 225 VDC Factory Installed includes internal cables For pricing and more information about these products please call our office Custom Cabling Pacific Nanotechnology Inc offers cables and accessories for you to prototype your application or to use if you frequently change board in
115. n is complete and the Controller is rebooted A hi lo hi series of three beeps indicates that the Controller has been successfully connected to the Ethernet This may be confirmed by using the Ping function DEVICE SPM CONTROLLER 27 6 5 Ping This function provides a quick means for confirming that the PScan2 Controller is connected to the Master Computer and is operating properly If network and controller are working there is an almost immediate response indicating that the system is operational A time out error message is displayed after a few seconds if the system is not working Multiple Unit Setup Two or more controller scanners can be operated from one master workstation This function allows the user to set up one program to operate two controllers independently by setting a multiple device capability D uring operation simply selecting the device menu can operate each controller scanner Park Idle Piezos The performance characteristics of the piezo actuators may deteriorate if substantial voltage is applied to the actuators over an extended period This function provides a time out capability when the controller is in Idle Mode that is when there is no active data acquisition such as oscilloscope or image acquisition modes The piezo voltages are brought to zero volts after a specified time period 11 the tip is in feedback a tip retract operation will be performed Any movement of
116. nclude the copyright notice on any copy modification or portion merged into another program Transfer the program and license to another party if either party agrees to accept the terms and conditions of this Agreement If you transfer the program you must at the same time either transfer all copies whether in machine readable form or printed form to the same party or destroy any copies not transferred this includes all modifications and portions of the program merged into other programs TERM The license is effective on the date you accept this agreement and remains in effect until terminated as indicated above or until you terminate it If the license is terminated for any reason you agree to destroy the program together with all copies modifications and merged portions in any form Copyright Notice covers all attached documents Pacific Nanotechnology Incorporated 2001 2002 All nghts reserved Pacific Nanotechnology retains all ownership rights to this documentation and all revisions of the PScan2 Controller computer program and other related software options Reproduction of any portion of this document or any image depicted in this publication without prior written authorization with the exception of archival purposes or for the specific use of the program with Pacific Nanotechnology equipment is prohibited by law and is a punishable violation of the law PACIFIC NANOTECHNOLOGY INCORPORATED PROVIDES THIS PUBLICATION AS
117. nd providing a feedback loop for setting the voltage or current levels or the actuators for each direction of motion Signal conditioning for the probe Z Sensor signal Provision is made for Z sensor signal that may be derived from the output of a quad photodetector is typically used in a light lever AFM sensor or a single pole source such as a piezo resistive sensor probe As required for oscillating modes such as with vibrating cantilever or tuning fork sensing a demodulation circuit is incorporated in order to provide a signal proportional to the amplitude of the oscillating device The primary output signal conditioned by gain and filtering provides the comparison signal that is used in the Z PID feedback loop below A dditional output signals are conditioned for data acquisition see detailed description below 13 SPM CONTROLLER 27 6 5 Z PID feedback loop The conditioned Z sensor signal is compared to a Z SET level positive or negative voltage so as to generate a positive or negative going error signal The error signal is further conditioned within the PID circuitry and amplified with sufficient power so as to drive a piezo actuator And to complete the feedback loop the Z piezo actuator with sensor or sample attached at the free end moves in the direction and to the extent so as to minimize the error signal Modulator and driver A sinusoidal frequency synthesizer with amplitude control is used to drive t
118. nd restarts the Scan Image operation from the very beginning When Scan Image operation is completed the Controller writes an empty line into the log file ERR_LOG and retums into the Idle mode 4 7 OSCILLOSCOPE TIME MODE Command 05 1 START Time unlimited Logs used ERR LOG PING LOG PID LOG Data files 0501 DAT This mode is designed for 4 input channel acquisition at the real time scale O ne hundred data point per channel is acquired during every TimeBase interval Thus the time interval between two data points is equal to the TimeBase 100 The TimeBase value can vary from 10 ms to 1000 ms The acquired 100 point data are transferred as a whole set between every two TimeBase intervals the time required for data transfer being lost from data acquisition When the Controller enters into this mode it first writes the O scilloscope time mode line into the log file ERR LOC Before the actual data acquisition is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS FEEDBACK DEMOD SELECTS FREQUENCY SYNTH AUX 1 amp 2 The Controller further accesses parameter TIME BASE value in Slaveini file section SC TIME and uses this value as a TimeBase interval After 100 data point are collected the Controller writes 100 16 bit values into the data file 0561 DAT using binary format and starts next 100 data point acquisition The Controller st
119. ne Master software only none Master software only y y none Master software none Master software only efloa 255 PSCAN2 emnt t E Bl HENCE e B3 0 OFSO doubl 2 doubl CXO doubl CX1 doubl CYO doubl 1 doubl efloal LINEARIZER 10 000 10 000 default 300 mV o qoi lomesom 1 10 000 10 001 default 300 mV ee y float B2 doubl YPIX ZOOM 104 SPM CONTROLLER Appendix H Software Specification Summary for SPM Cockpit Utility Program to Test Functional Groupings of Controller MDI Window Multiple D ocument Interface Menu Toolbar Status Bar Child Windows OSCILLOSCOPE TIME MODE UP TO 4 MODELESS WINDOWS Select Channel Select Range Select Offset Select Time base Apply Button OSCILLOSCOPE FREQUENCY SWEEP MODE 1 MODELESS WINDOW Select Channel to Monitor Select Frequency Range Select Modulation Amplitude Start Sweep Stop Sweep OSCILLOSCOPE SCAN LINE MODE UP TO 4 WINDOWS MODELESS WINDOWS Select Channel Select Range Select Offset Select Number of Pixels DISPLAY SCANNED IMAGE UP TO 4 MODELESS WINDOWS Select Channel Select Forward reverse 105 PSCAN2 SPM CONTROLLER 27 6 5 SCAN CONTROL PANEL 1 MODELESS WINDOW Start Scan
120. nnect to the Master workstation specified by the net use command in the drives bat file and create a log file ERR LOG in the D evice Directory every time the Controller is reboot If the connect fails Ethernet cable not connected specified Master workstation name or D evice Directory name do not exist in the network or access password is invalid the Controller checks the floppy disk drive If the floppy disk is present in the drive the Controller first checks for the CONFIGURE FLAG command represented by an empty configurflg file If this command is detected the Controller enters into the auto configuration mode If no CONFIGURE FLAG command is detected the Controller checks for the UPDATE FLAG command represented by an empty update flg file If an UPDATE FLAG command is detected the Controller enters into the auto update mode The Controller in the auto update mode saves the current version of the Controller s software executable as a pscan bak file and copies the pscan exe file from the floppy disk to the Controller s hard disk drive If operation is completed successfully the Controller produces the sound indication of 6 short beeps and halts the system In case of an error the Controller produces the sound indication of 1 long beep and halts the system The error message is output to the Controller s console When the Controller completes the auto update mode operation it always halts the system The Con
121. none Software flow control Sweep rate ms 1 65 535 ms point none Software flow control Acquisition time period 10 1000 ms none Software flow control Acquisition time period 2000 10000ms noe none Master software only The fully zoomed out X in X UNITs scalesize um nanometers nm A n mee 7 scale size um nm A Start frequency 32 bit 0 20MHz 0 10 000 mV Modulator phase shift 12 0 End frequency 32 bit Modulator amplitude 10 bit none Master software on none Master software on none Master software on none Master software on arbitrary units none Master software on y nanometers none Master software on e me The full 2 scalesize Z SEN microns nanometers A arbitrary mV The full Z scale size AUX IN 1 microns nanometers arbitrary mV in ZS UNITs m m n u n A m i AUX1 UNITs Z_SCALE double float none Master software only The full Z scalesize Z inZ UNITs HGT ZS SCALE double float none Master software on ZS UNIT none Master software only AUXI SCALE float none Master software only 1 2 3 none Master software on 4 1 UNIT 0 4 as above none Master software only PSCAN2 4095 20 default 1 65535 20 defit 0 4 294 967 295 0 4 294 967 295 a imn 0 0 a 0 SWEEP_RATE 1 65 53510 def OSC T
122. not connected specified Master workstation name or D evice D irectory name do not exist in the network or access password is invalid the Controller checks the floppy disk drive If the floppy disk is present in the drive the Controller first checks for the CONFIGURE FLAG command represented by an empty configurflg file If this command is detected the Controller enters into the auto configuration mode If no CONFIGURE FLAG command is detected the Controller checks for the UPDATE FLAG command represented by an empty update flg file If an UPDATE FLAG command is detected the Controller enters into the auto update mode The Controller in the auto configuration mode copies the drives bat file from the floppy disk to the Controller s hard disk drive If operation is completed successfully the Controller produces the sound indication of 4 short beeps and halts the system In case of an error the Controller produces the sound indication of 1 long beep and halts the system The error message is output to the Controller s console When the Controller completes the auto configuration mode operation it always halts the system The Controller must be rebooted in order for the configuration changes to take effect 87 SPM CONTROLLER 27 6 5 4 15 AUTO UPDATE STANDALONE MODE Command UPDATE FLAG Standalone Controller Logs used none Data files none The auto update standalone mode is designed for t
123. not interrupt each other except DCMTR FWD and DCMTR REV mode commands which allow for an interrupt 70 SPM CONTROLLER 27 6 5 Data files are created and filled by the Controller and can be read by the Application software on the Master Workstation These D ata files contain AD C measurements for oscilloscope modes for the frequency sweep mode for scanning mode and Red D ot alignment mode They are stored in either binary or ASCII format depending on volume and throughput The Log file ERROR LOG is created and filled by the Controller and can be accessed by the A pplication software on the Master Workstation It is a text file in which each line is a message line or status line from the Controller The Controller sends an empty line when it comes to the Idle mode The last line of the ERROR LOG represents the most recent message from the Controller The Log file LINE LO G contains one text line with the number of scan lines for which data has already been acquired It can be used by the Application software for scan progress monitoring and scan image data tracking The Configuration file SLAVE INI is represented as a generic INI file structure SECTION1 NAME 1 NAME KEY1 VALUE KEY2 NAME KEY2 VALUE SECTION2 NAME KEY3 NAME KEY3 VALUE 4 4 VALUE The section name must be in square brackets The parameter description line starts with a key name followed by sign
124. notechnology Inc 3350 Scott Blvd 29 Santa Clara CA 95054 3105 Telephone Support U S Telephone 408 982 9492 Fax 408 982 9151 Web Address http www pacificnanotech com E mail info pacificnanotech com PACIFIC NANOTECHNOLOGY PRODUCT WARRANTY Coverage Pacific Nanotechnology warrants that products manufactured by Pacific Nanotechnology will be free of defects in materials and workmanship for one year from the date of shipment The product warranty provides for all parts excluding consumables and maintenance items labor and software upgrades Instruments parts and accessories not manufactured by Pacific Nanotechnology may be warranted by Pacific Nanotechnology for the specific items and periods expressed in writing on published price lists or quotes However all such warranties extended by Pacific Nanotechnology for those specific items and periods expressed in writing on published price lists or quotes are limited in accordance with all the conditions terms and other requirements noted in this warranty Pacific Nanotechnology makes no warranty whatsoever concerning products or accessories not of its manufacture except as noted Customers outside the United States and Canada should contact their local Pacific Nanotechnology representative for warranty information that applies to their locales CUSTOMER RESPONSIBILITIES Complete ordinary maintenance and adjustments as stated in Pacific Nanotechnology manuals Use on
125. ns no line is scanned at that moment The Controller then accesses parameter values in Slave ini file section SCAN IMAGE which are used for line scan operation Before the actual image scan operation is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS XY CONTROL Z FEEDBACK DEMOD SELECTS FREQUENCY SYNTH AUX 1 amp 2 LASER Then the Controller carries out the slow tip position initialization The SPM tip is moved from its current arbitrary XY position to the scan start XY point The tip is moved via a straight line using the number of POINTS increment with the rate of a given SCAN_RATE The actual line scan operation consists of altemating forward line scan and reverse line scan operations The acquired data are transferred into the data 05 2 DAT after each line scan operation depending on the acquisition direction parameter DIR value If DIR value is 0 forward scan then data are transferred only after forward line scan operations If DIR value is 1 reverse scan then data are transferred only after reverse line scan operations And finally if DIR value is 2 forward reverse scan then data are transferred after both forward and reverse line scan operations Whenever scan line data are transferred into the data file O SC2 DAT the Controller increments the scan line counter and writes its value into the line log file
126. ns to choose from when programming your Pacific Nanotechnology Inc The ASPM Cockpit which is included with the purchase of the PScan2 controller is a test utility and basic data acquisition program It has been created in Microsoft Visual Basic language a language that is convenient for the non programmer to built and modify existing programs but includes extensive functions and flexibility with defined parameters Programming may also be performed in C amore comprehensive language and geared for meeting specific and more ranging requirements of the user PScan2 Driver Software TheDOS6 22 code for controlling the PScan2 hardware is proprietary to Pacific Nanotechnology Inc The function calls and documentation for accessing these calls through Visual Basic ASPM Cockpit program are available in this manual see Chapter 5 and 6 At present most but not all of the functions and capabilities of the controller can be accessed with the current version of the SPMCockpit New functions will be made available on a quarterly basis Should the user have specific needs such as a new specific function or unique combination of functions for which the Controller software must be modified please contact a Pacific Nanotechnology representative An added function may be useful to other users Register Level Programming Under some circumstances the user may need to access certain operations at the register level For exa
127. ode and then suddenly the Master Workstation hangs The Controller will then be stuck on a network I O operation After the Master Workstation reboots the Controller resumes anetwork operation and continues its functioning All information that designated to data and log files that were open by Controller before the Master Workstation was 24 SPM CONTROLLER 27 6 5 reboot is going nowhere and is lost The Controller remains in the same functional mode that it was in at the moment of the Master Workstation hung up When the Application Software issues the stop command the Controller is in the Idle mode but log messages are still going nowhere Then the reset command forces the Controller to reopen the log file and the Controller is ready to proceed with operation Whenever the Controller services the reset command it writes the Controller Software version information and the Ready line into the log file ERROR LOG 5 2 3 TIP RETRACT MODE Command TIP UP Time limited Logs used ERR LOG PID LOG Data files none This mode is used for SPM probe tip retract operation D uring this operation the Controller first of all writes the Tip Retract line into the log file ERROR LOC then performs fast retract by activating fast retract line X5 The Controller further accesses parameter ZMTR TIP in the Slave ini file section TIP APPROACH and uses its value for a Z
128. oller enters into the auto configuration mode If no CONFIGURE FLAG command is detected the Controller checks for the UPDATE FLAG command represented by an empty update flg file If an UPDATE FLAG command is detected the Controller enters into the auto update mode The Controller in the auto configuration mode copies the drives bat file from the floppy disk to the Controller s hard disk drive If operation is completed successfully the Controller produces the sound indication of 4 short beeps and halts the system In case of an error the Controller produces the sound indication of 1 long beep and halts the system The error message is output to the Controller s console When the Controller completes the auto configuration mode operation it always halts the system The Controller must be reboot in order for the configuration changes to take effect 37 SPM CONTROLLER 27 6 5 2 AUTO UPDATE STANDALONE MODE Command UPDATE FLAG Standalone Controller Logs used none Data files none The auto update standalone mode is designed for the Controller s software update Standalone here means that the Controller is not connected to the Master workstation Standalone commands are supplied to the Controller via floppy disk drive and are checked by the Controller only during boot up and only in standalone configuration the Controller is not connected to the Master workstation The Controller attempts to co
129. one of the specific functional modes T here are currently 13 functional modes Each functional mode represents a specific task performed by the Controller Functional mode can be either time unlimited or time limited An example of a time unlimited mode is the Oscilloscope time mode The Controller is allowed to stay in this mode as long as appropriate An example of a time limited mode is the Scan Image mode The Controller will exit this mode as soon as the scan operation is completed DCEx commands are used to navigate the Controller through functional modes initiate a specific operation or abort current operation STOP FLAC request current status PING FLAG or notify the Controller about operating parameters change CHANGE FILE In addition to 13 functional modes there are two Standalone modes that are designed for the Controller s network configuration and the Controller s software update Standalone here means that the Controller is not connected to the Master workstation There are two Standalone commands CONFIGURE FLAG and 72 SPM CONTROLLER 27 6 5 UPDATE FLAG Standalone commands are supplied to the Controller via floppy disk drive and are checked by the Controller only during boot up and only in standalone configuration the Controller is not connected to the Master workstation 4 1 IDLE MODE Command STOP_FLAG Default mode for power on and reboot Time unlimited Logs used E
130. or Default is 1 pulse per packet Laser control Section Laser on off control 0 off 1 on 2 DC Motor section approach DC motor forward voltage value 128 127 5000 5000 DC motor reverse voltage value 128 127 5000 5000 mV DC motor ON time 100 65535 ms by 100 ms increment Scan Image Setup Section Scan resolution 10 1500 Scan resolution equals to POINTS Scan rate lines s 0 1000 Scan rotation 360 360 deg X Y calculation mode select 0 on Master 1 on Slave line acquisition direction 0 Forward 1 Reverse 11 2 forward reverse Number of Channels to acquire during scan 1 4 Transfer scan data mode 0 by Line default 1 Whole Skew correction 10 00 10 00 deg Number of over scan points 0 127 default 0 Number of pre scan lines 0 127 default 0 Parameters for tip engage retract mode Select Z motor for tip retract engage 0 2 DC motor 1 8 Stepper motor Select input channel to monitor for close to surface condition 0 10 see INPUT SELECTS section Value of input parameter considered as close to surface 32768 32767 10 000 10 000 mV deviation from the Surface value above for tip approach LASER ll p LASI DC MOTOR DCMTR FWD 127 R REV 128 DCMI R_TIME 1000 DCMI SCAN IMAGE POINTS 200 LI
131. p command The Controller checks for a STOP FLAG at about every 100 ms time interval if the DC motor is used and after each stepper pulse packet if the stepper motor is used When the tip retraction is completed or terminated the Controller writes an empty line into the log file ERR LOG 4 4 TIP APPROACH MODE Command TIP DOWN Time limited Logs used ERR LOG PID LOG Data files none This mode is used for SPM probe tip approach and Z PID feedback engage operation When the Controller enters into this mode it writes the Tip Engage line into the log file ERR LOG Then the Controller sets Z PID On Off switch X4 into the state according to the value of the PID ON parameter Slaveini file PID O N OFF section The Controller further sets the Z D AC output to OVolt level that means Z piezo is fully extended After that the Controller accesses parameters ZMTR TIP and SRF from the Slave ini file section TIP APPROACH 76 SPM CONTROLLER 27 6 5 If the Z DC motor is selected the Controller accesses parameter in the Slave ini file section TIP APPROACH and uses its value for Z DC motor DAC output Then the Controller enters into the following loop Check for a STOP FLAG if found then activate fast retract line X5 set Z DC motor DAC to zero output level set Z DAC output to 10 Volt level Z piezo fully retracted deactivate fast retract line
132. pit Program 41 SPM CONTROLLER 27 6 5 Appendix A Specifications for PScan2 Controller This appendix lists the specifications of the PSCAN2 Controller These specifications are typical at 70 deg F 20 C unless otherwise stated Rev 11 00 Summary General Physical Size 15in x 15 in h x 17 in d 38 1 cm 38 1 cm x 43 2 cm Weight 65 lb 29 5 kg Operating Voltage 115 230 VAC 50 60 Hz Current 0 95 0 45 Amp Temperature 50 95 deg 10 35 C Humidity 5 60 RH non condensing Processing PC based 200 MHZ or greater 16 Mbyte RAM 2 1 Gbyte Hard Disk Drive 1 44 Mbyte Floppy Drive SVGA video card for diagnostics Connecting AC Power Ethernet 10 100 Mbit sec Scanner Stage Input Output lines Linearizer Inputs X Y amp Z Signal Access Port Stepper Motor Port 42 SPM CONTROLLER 27 6 5 Primary Functions 10 V to 10 V or 0 to 10 V 16 bits 1to4 gt 20 kHz 1 2 or 3 channel acquisition gt 16 kHz 4 channel acquisition DC to 500 kHz nominal DC to 20 kHz 4 Inputs for 4 sector Photodetector Tuning fork Sensor For other AFM sensors and STM sensing Range 10 V to 10 V Differential buffered input Provision for a sensor absolute Z piezo motion e g strain gauge to be incorporated into 2 feedback loop for absolute 2 positioning Range 0 to 10 V Differential buffered input Sinusoidal digitally synthe
133. r scanning Signal Conditioning Input Types a Direct input from X amp Y scan signals generated by algorithm during acquisition or by look u Signal range 0 to 10 VDC Resolution 12 bits Update rate Same rate as A D converter b Through PI feedback loop from external X amp Y Sensors Linearizer circuitry Signal range Oto 10 VDC Linearizer circuitry can be bypassed by on board jumpers switches for Direct input from X amp Y DA Linearizer Circuitry X amp Y PI feedback loop Proportional 1 to 255 8 bit resolution Integral 1 to 255 8 bit resolution Offset Oto 10 VDC 8 bit resolution Zoom 1x to 255 x gain 8 bit resolution Output Amplifiers Z Driver output from PID loop Driver output voltage range 15 V to 140 V Frequency range DC to 20 kHz Noise Ground 3 mV rms nominal External 5 VD 3mV rms nominal Instantaneous max output 500 mA min Average continuous output 50 power supply limited Power Rating of output a 85 watts Modulator Output Waveform Sinusoidal digitally synthesized Frequency Range 50to 500 kHz Clock frequency 20 MHZ Frequency Resolution 32 bit Output Voltage range Oto 10 V peak to peak Output Voltage Resolution 9 bits Output Connections Two options capacitive coupled to 1 anindependent piezo 2 an external resistor connected to Z piezo driver X amp Y Drivers Driver output voltage range 15 V to 140 V Frequency range
134. required on the Master Workstation Ethernet Adapter driver Figure 2 NetBEUI protocol driver Figure 4 Client for Microsoft Networks Figure 6 File and Printer Sharing for Microsoft Networks service Figure 7 Tip Use Settings gt C ontrolPanel gt N etwork to add required network components or to edit their properties 69 2 6 5 SPM CONTROLLER 27 6 5 The necessary protocol bindings are required on Master Workstation NetBEUI to Ethernet Adapter Figure 3 Client and File amp Printer Sharing to NetBEUI Figure 5 The File Sharing capability on the Master Workstation must be enabled Settings gt Control Panel gt Network gt File and Print Sharing gt I want to be able to give others access to my files checkbox checked see Figure 8 1 3 SHARED COMMUNICATION SPACE DEVICE DIRECTORY The DCEx protocol is a file level protocol that is all commands messages and data are represented by file structures The communication space that hosts all these file structures constitutes a shared directory on the Master Workstation s hard disk drive called D D iretory This directory has to be shared with access type full and can be password protected see Figures 9 10 The Controller maps its network drive to the D evice D irectory and the Master Workstation s network name at a boot time Therefore before the Controller is switched on the Master Workstation must be up and
135. running all required network software components installed and the D evice D irectory shared The Master Workstation network name is set in Settings Control Panel gt N etwork gt Identification The Controller s network configuration is described in A ppendix1 2 DATA COMMAND EXCHANGE DCEX PROTOCOL STRUCTURE The D ata Command Exchange DCEx protocol is an A pplication lerd protocol thatcan be used to send a command to the Controller receive data from the Controller get a message or status information from the Controller or supply configuration parameter values to the Controller There are four major groups of DCXE protocol components Command files D ata files L og files and one C onfiguration file Table 1 These are described below Commands constitute empty files except CHANGE FLAG that are created by the Master Workstation and checked deleted by the Controller T hey are used to put the Controller into one of the designated functional modes exit from a current mode STOP FLAG or notify the Controller about configuration parameter value changes CHANGE FLAG The CHANGE FLAG file contains a text line with the parameter s section name that was changed and needs to be reapplied If this file contains more than one line then the Controller services only the last line entry Important note In orderto exit from a current functional mode the Controller needs a STOP FLAG command This is because mode commands can
136. s TopoMetrix ThermoMicroscopes Nanoscope D igital Instruments Veeco and D igital Surf which can be accessed by the corresponding image analysis software A list of extensions for each type of image acquired is provided in the appendix of the User s Manual Please note that in the Typical Mode only one image the clicked on 2 6 5 USER FILE SPM CONTROLLER 27 6 5 highlighted image can be saved in the image bank under scanner controls However all the images can still be saved under the file menu selection as in the Expert Mode Open Images Images of any of the three above mentioned formats may be opened for viewing The image can then be saved in another format or exported discussed below Save Raw Scan Data The primary scan data may be saved in a Pacific Nanotechnology format Open Raw Scan Data This function opens a Raw Scan D ata file for viewing The image may then be saved in another format or saved in a standard format for exporting into other word processing and spreadsheet program files Export Displayed Images Images may be saved for export as Bitmap bmp GIF gif JPEG jpg or TIF tif files Preferences Configuration The user may select a default directory for storing and retrieving Configuration cfg files Raw Data The user may select a default directory for storing and retrieving Raw D ata files Export Image The user may select
137. s several options are available for up to third order correction Scale Correction With the Image Correction turned off and the Correct box checked the image scale is corrected to positional non linearity for any zoomed region within the full scan area Image Correction Off line A correction is applied to an uncorrected scanned image The data is then re sampled when stored in the Digital Surf format The Comect box of the Scale Correction may be either on conveniently displaying the proper range when scanning or off On line A correction is applied during scanning eliminating the need for off line correction The actual correction parameters for all options are factory set Red Dot Display This display provides a convenient means for aligning the laser beam onto the detector For contact mode AFM the red dot is located below the horizontal median line within the green region The Set point is typically set at zero volts so that the red dot crosses the median line in an upward direction as the cantilever tip contacts the surface The more negative lower the red dot the higher the contact force If Lateral Force images are to be acquired which may require increased gain settings for Lateral Force see Settings then the red dot should be set slightly to the left of the vertical median line and below the horizontal median line The bar meter to the right of the red dot region shows the total light intensity on the detector Z Su
138. s 3 Com There are so many networking products on the market it is not easy to diagnose or anticipate all the possible problems that you may encounter A dding to or upgrading your computer system requires certain knowledge and experience with computer hardware and software If you do not have this expertise you may want to enlist the assistance of a responsible computer professional before attempting such an upgrade All Pacific Nanotechnology Inc support notes whether on line or in hard copy are designed to assist our customers in the use and maintenance of their Pacific Nanotechnology equipment T hese notes are not replacements for professional technical assistance when warranted Pacific Nanotechnology Inc cannot be responsible for after sale printer or other hardware upgrades not completed by the authorized Pacific Nanotechnology Inc representatives Please send your network questions to help pacificnanotech com Include a complete description of the network configuration you plan to use with your PScan2 system Network software components The Windows gt 95 NT network communications package offers several protocols for linking computers A brief summary of how the communications between a Windows based Master Computer and the DO S based PScan2 Controller is provided below Please refer to the section on the DCEx Protocol in Chapter 5 for more detail Understanding and implementing a communications network requires subst
139. s an empty line into the log file ERR_LOG 4 12 DC MOTOR FORWARD MODE Command DCMTR_FWD Time limited Logs used ERR LOG Data files none This mode is designed for the D irect Current D C motor operation A control voltage drives the DC motor on a Digital to Analog Converter D AC that may vary from 5 000 mV to 45 000 mV Different control voltage polarity yields to different D C motor rotation direction Thus forward and reverse D C motor direction depends on a custom hardware wiring of DC motor The two D C motor related modes of the Controller operation allows the user to define which control voltage is considered forward and which one is considered reverse When the Controller enters into the described mode it writes the D C Motor Forward line into log file ERR LOG Then the Controller accesses the parameter DCMTR TIME and DCMTR FWD values from the Salve ini file section DC MOTOR The DCMTR TIME value specifies the duration of a DC motor action and should be a multiple of 100 ms The DCMTR FWD value specifies the control voltage that may vary from 5 000 mV to 5 000 mV The polarity of the control voltage determines the direction of DC motor rotation the amplitude determines the speed of D C motor rotation The Controller outputs the control voltage specified by the DCMTR FWD value to the DC motor DAC and enters into the following cycle Check for a STOP FLAG command if detected abort c
140. se record the page numbers and describe the errors Thank you for your help Name Title Company Address Phone C Mail to Pacific Nanotechnology Inc Fax to Pacific Nanotechnology Inc Headquarters FAX 408 982 9151 3350 Scott Blvd 29 Santa Clara CA 95054 3105 127
141. sized 50 to 500 kHz 20 MHZ 32 bit 1 Hz 0 to 10 V peak to peak 10 bits 10 mV 10 bits 10 mV 10 bits 10 mV 10 bits 10 mV Two options capacitive coupled to 1 Z piezo driver via ext resistor 2 to an independent piezo driver Balanced Demodulator 50 kHz 500 kHz DC 20 kHz 1x 2x 3x or 4x Oto 140 V DC to 20 kHz 3 mV rms nom Conversion range Resolution Number of Input Channels Sampling rate Freq Response before Demod Freq Response Z PID loop Z feedback Loop Digitally controlled analog Inputs Internal Inputs External Z height sensor For Oscillating Modes Modulator Output Waveform Frequency Range Clock frequency Frequency Resolution Output Voltage range Output Voltage Resolution Output Voltage Resolution Output Voltage Resolution Output Voltage Resolution Output Connections Demodulator Type Frequency range Demodulated bandwidth Input gain range Output Amplifiers Z Driver output from PID loop Driver output voltage range Frequency range Noise Ground 43 SPM CONTROLLER 27 6 5 Noise External 5 VDC 3 mV rms nom Instantaneous max output current 500 min Average continuous output current 50 power supply limited Power Rating of output amplifier 85 watts X amp Y Scan Drivers Driver output voltage range V to 4140 V Frequency range DC to 20 Hz min Noise Ground 3 mV rms nom Noise
142. te Nondinearity This function is reserved for qualified technical persons Exit This function closes the image acquisition program Directory Setup The Input output I directory for a particular PScan2 Controller may be selected from this menu item Be sure to double click on the directory of choice in order to bring the directory name into the lower window before clicking OK Create Device Directory When first installing a new PScan2 Controller to the Master Computer a new directory must be created Usually the name of the directory is the same as serial number of the Controller For example the directory can be named PscanX XX where is the last three digits of the serial number of the Controller Create Configuration Diskette Before the PScan2 Controller can recognize the existence of the Master Computer on the Ethemet a Configuration Diskette must be generated by the Master Computer and installed on the Slave Using an empty diskette follow the instructions displayed in the window Remember to disconnect the Ethemet cable to the Controller before rebooting the Controller in order for the Controller to accept and read the diskette generated from the Master Computer This operation takes only a few minutes A series of four medium length beeps indicates that the diskette was read and information transferred Also remember to reconnect the Ethernet cable when the configuration file installatio
143. ter values in Slave ini file section SCAN IMAGE which are used for Scan Image operation Before the actual Scan Image operation is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS XY CONTROL Z FEED BACK DEMOD SELECTS FREQUENCY SYNTH AUX 1 amp 2 LASER Then the Controller carries out the slow tip position initialization the SPM tip is moved from its current arbitrary XY position to the scan start XY point The tip is moved via straight line using the number of POINTS increment with the rate of a given SCAN_RATE The actual Scan Image operation consists of the number of LIN ES alternating forward line scan and reverse line scan operations The acquired data are transferred into the data SCAN DAT after line scan operation depending on the acquisition direction parameter D IR value If DIR value is 0 forward scan then data are transferred only after forward line scan operations If DIR value is 1 reverse scan then data are transferred only after reverse line scan operations And finally if DIR value is 2 forward reverse scan then data are transferred after both forward and reverse line scan operations Whenever scan line data are transferred into the data file SCAN DAT the Controller increments the scan line counter and writes its value into the line log file LINE 1 06 starting from the zero file position T hus the
144. terconnections You can interface the PScan2 Controller to a wide range of scanner heads test instruments I O racks and modules screw terminal panels and almost any device with a parallel interface Please read through the detailed specification sheet and accompanying wiring diagrams to familiarize yourself with your options SPM CONTROLLER 27 6 5 1 5 Unpacking Your PScan2 Controller is shipped in high impact packaging in order to prevent and or minimize damage by mishandling Please inspect your Controller box for external damage If necessary remove the outer 3 sided cover to visually inspect for intemal damage DO NOT POWER UP If there is reason to believe that the Controller was dropped open the top cover to confirm that boards and cables appear to be seated The top cover may be lifted up by removing twelve screws torx head from the front and rear panels top and sides only and four screws along each side near the bottom of the top cover Should there appear to be damage please carefully document the extent of damage and notify the shipper of the situation Also please call a representative of Pacific Nanotechnology SPM CONTROLLER 27 6 5 Chapter Installation and Ethernet Configuration This chapter describes how to install and configure the PScan2 Controller 2 1 Installation Quick check This procedure will confirm that your PScan2 controller has arrive safely 1 Confir
145. tes an empty line into the log file ERR LOG 77 SPM CONTROLLER 27 6 5 4 5 RED DOT ALIGNMENT MODE Command REDDOT START Time unlimited Logs used ERR_LOG PING_LOG PID_LOG Data files REDDOT_DAT The Red Dot Alignment mode is designated to trace the position of a reflected laser beam on a four quadrant photo detector AFM application When the Controller enters into this mode it first writes the Red D ot alignment line into the log file ERR LOG Then the Controller applies parameter G LR OFS LR values from INPUT SELECTS section and parameter PID POL PID SET ZERR Z SET values from Z FEEDBACK section of the Slave ini file The Controller further selects T B photo detector signal as an input for Z feedback channel and selects to bypass the demodulator Then the Controller enters into the following loop Acquire Z ERR Z LR Z SUM ADC input channel Write acquired values into the data file REDDOT DAT starting from its zero position data represented as an ASCII text line comma separated Check for a STOP FLAG if found then output an empty line into the log file ERR LOG and terminate current mode Check for a CHANGE FLAG if found then apply parameter values from an appropriate section of the Slave ini file When the Red Dot Alignment mode is terminated the Controller writes an empty line into the log file ERR_LOG 78 SPM CON
146. the control voltage determines the direction of DC motor rotation the amplitude determines the speed of D C motor rotation The Controller outputs the control voltage specified by the DCMTR REV value to the DC motor DAC and enters into the following cycle Check for a STOP FLAG command if detected abort current mode operation Wait 100 ms and compare elapsed time with the DCMTR TIME value if equals then terminate current mode operation When the Controller terminates or aborts the D C Motor reverse mode operation it sets DC motor DAC to azero volt level and writes an empty line to the log file ERR LOG 86 SPM CONTROLLER 27 6 5 4 14 AUTO CONFIGURATION STANDALONE MODE Command CONFIGURE FLAG Standalone Controller Logs used none Data files none The auto configuration standalone mode is designed for the Controller s network configuration Standalone here means that the Controller is not connected to the Master workstation Standalone commands are supplied to the Controller via floppy disk drive and are checked by the Controller only during boot up and only in standalone configuration the Controller is not connected to the Master workstation The Controller attempts to connect to the Master workstation specified by the net use command in the drives bat file and create a log file ERR LOG in the D evice Directory every time the Controller is reboot If the connect fails Ethernet cable
147. the time interval between two data points is equal to the TimeBase 100 The TimeBase value can vary from 10 ms to 1000 ms The acquired 100 point data are transferred as a whole set between every two TimeBase intervals the time required for data transfer being lost from data acquisition When the Controller enters into this mode it first writes the O scilloscope time mode line into the log file ERROR LOC Before the actual data acquisition is started the Controller applies parameter values for the following sections of the Slave ini file INPUT SELECTS Z FEEDBACK DEMOD SELECTS FREQUENCY SYNTH AUX 1 amp 2 The Controller further accesses parameter TIME BASE value in Slave ini file section SC TIME and uses this value as a 29 SPM CONTROLLER 27 6 5 TimeBase interval After 100 data point are collected the Controller writes 100 16 bit values into the data file O 501 DAT using binary format and starts next 100 data point acquisition The Controller stays in the Oscilloscope time mode until this mode is interrupted by aSTOP FLAG command It is allowed to change the TIME BASE value during the Oscilloscope time mode operation The CHANGE FILE command must be issued to force the Controller to apply an updated TIME BASE value The Controller checks for a change flag CHANGE FILE indicator after each series of data point acquisition If this flag is found and indicates that IN PUT SELECTS Z FEED
148. the mouse will reactivate the actuator voltage setting but the tip engagement routine will not be performed The minimum time out range is 1 minute the maximum is 1000 minutes Diagnostics This function is reserved for qualified technical persons Input Selects to ADC Channel Selects Up to four channels of twelve possible signals may be monitored using the various oscilloscope functions and scan image functions see the User s Manual for a list and description of these signals Certain channels ones in which simultaneous monitoring is not typically needed cannot be acquired at the same time If a conflict during selection occurs an error message will be displayed One or more channels are only available for oscilloscope line display and image acquisition if the appropriate numbers of channels are selected in the Scan Image Setup section All four channels are available in the oscilloscope time mode Lateral Force Normally a gain of one and offset of 255 is sufficient for most lateral force imaging situations If a higher gain is needed the Red Dot should be set to the left of the vertical mid line near the left border of the green zone The gain and offset can then be adjusted while scanning for optimal image acquisition An optimal filter setting full range 1000 Hz 100 Hz and 10 Hz can also be established SETTINGS SPM CONTROLLER 27 6 5 2 Sensor Z Sen These parameters are only active
149. tialization the SPM tip is moved from its current arbitrary XY position to the scan start XY point The tip is moved via a straight line using the number of POINTS increment with the rate of agiven SCAN RATE 30 SPM CONTROLLER 27 6 5 The actual line scan operation consists of altemating forward line scan and reverse line scan operations The acquired data are transferred into the data file 05 2 DAT after each line scan operation depending on the acquisition direction parameter DIR value If DIR value is 0 forward scan then data are transferred only after forward line scan operations If DIR value is 1 reverse scan then data are transferred only after reverse line scan operations And finally if DIR value is 2 forward reverse scan then data are transferred after both forward and reverse line scan operations Whenever scan line data are transferred into the data file OSC2 DAT the Controller increments the scan line counter and writes its value into the line log file LINE LOG starting from the zero file position Thus the ASCII text line in the line log file always represents the number of the line scan data sets in the data file OSC2 DAT This number can be either 0 no data currently available 1 data for one line scan are collected or 2 data for both forward and reverse lines are collected DIR 2 The repetitive data for each line scan operation are wr
150. tory means PERSISTENT NO is command switch and YES positive answer to all command questions A complete reference on net use command usage is given below Connects or disconnects your computer from a shared resource or displays information about your connections 1211 EAR YES NO NET USE drive computer directory password PERSISTENT YES NO SAVEPW NO YES NO NET USE port computer printer password PERSISTENT YES NO SAVEPW NO YES NO E drive computer directory DELETE YES E port computer printer DELETE YES E DELETE YES E PERSISTENT YES NO LIST SAVE C E drive HOME 0 0 ey A uA 66 PSCAN2 SPM CONTROLLER Specifies the drive letter you assign to a shared directory Specifies the next available drive letter If used with DELETE specifies to disconnect all of your connections Specifies the parallel LPT port name you assign to a shared printer Specifies the name of the computer sharing the resource Specifies the name of the shared directory Specifies the name of the shared printer Specifies the password for the shared resourc Specifies that you want to be prompted for the password of th
151. troller must be reboot in order for the software update to take effect 38 SPM CONTROLLER 27 6 5 Chapter SPM Cockpit User Interface 6 1 Introduction As a consequence of the Master Slave architecture the software consists of two parts The PScan2 Controller software stored and executed on the PScan2 PC under DOS and the Windows based application software Thus we have the advantages of the Windows user interface while the performance critical scanning tasks are operating under D OC The Ethernet link provides an asynchronous interface which uncouples the loose interrupt environment of Windows from the tightly controlled timing requirements of data acquisition Written in industry standard Visual Basic this package is designed to satisfy basic scanning needs as well as to provide a means for testing the controller Source code and DLL library are provided with each unit This gives advanced users the power to program the software for particular applications 6 2 Description of Contents The SPM Cockpit User software is relatively self explanatory D etailed descriptions of the functions are contained in the help file contained in the compiled program and outlined below CONTENTS OF HELP FILE PScan2 SPM Cockpit User Software About PScan2 SPM CockpitAbout PScan SPM Cockpit 39 SPM CONTROLLER 27 6 5 Open Configuration File Save Configuration As Save Image s in Topo
152. tten by the Controller into the data file S WEEP DAT using ASCII text format Thus every line in the data file SWEEP DAT contains four decimal values in ASCII text format representing AD C data for 4 input channels 82 SPM CONTROLLER 27 6 5 The Controller checks for a stop flag STOP FLAG after each frequency point acquisition If the stop flag is detected the Controller writes an empty line into the log file ERR LOG terminates the Oscilloscope frequency sweep mode operation and returns into the Idle mode The Controller also checks for a change flag CHANGE FILE indicator after each frequency point acquisition If this flag is detected and indicates that PID ON OFF Z PIEZO AUX 1 amp 2 or LASER section was modified then the Controller applies parameter values from that section of the Slave ini file and continues the Oscilloscope frequency sweep mode operation The Controller do not take any actions if the change flag indicates INPUT SELECTS FREQ SWEEP Z FEED BACK DEMOD SELECTS or CONTROL modified section The Oscilloscope frequency sweep mode must be restarted by the user in order for the changes in sections mentioned above to take effect 4 10 OSCILLOSCOPE STORAGE MODE Command OSCSTO_START OSCSTO_NEXT Time unlimited Logs used ERR_LOG PING_LOG PID_LOG Data files OSCSTO DAT This mode is designed for 4 input channel acquisition at the real time
153. tware flow control Extra X Offseton DAC 0 10000 nma EXTRA YOFS none Software flow control Extra Y Offseton DAC 0 10000mv FREQ 0 4 294 967 295 CS0 9 0 D15 D00 WR 0 1 Modulator frequency 32 0 20M Hz MSW D15 D00 WR 0 1 LSW bit 50 9 1 TCO TC2 0 TC3 1 LOAD 2 650 9 0 D15 D00 0 WR 0 1 Modulator amplitude 10 0 10 000 mV MSW bit D15 D10 0 D09 D00 WR 0 1 LSW 50 9 1 TCO TC1 1 TC2 0 TC3 1 LOAD 0 51 0 409 650 9 0 D15 D00 0 WR 0 1 Modulator phase shift 12 0 MSW D15 D12 0 D11 D00 WR 0 1 LSW 650 9 1 TCO TC1 1 TC2 0 TC3 1 LOAD AUX 1 amp 2 AUX1 NEAL AUX1DAC Output 12 0 10 000 mV bit AUX2 D11 D00 CS12 0 1 11 00 AUX2DAC Output 12 0 10 000 mv bit STEPPERS MOTOR 0 7 D 08 15 0 654 0 1 Select Stepper by pe eem es _ PULSES D MOTOR E od 08 0 D 08 15 1 CS5 0 1 Rev Set bit DIMOTOR REVERSE 1 08 a D 0 7 1 655 0 1 Half step DIMOTOR 1 HALF 1 65535 1 def PACKET none Software flow control Number of steps between 1 65535 network IO Een ee 947 2 dp copo oun qose dE INT DC MOTOR DCMTR FWD 128 127 CS1 0 007 000 A 1 WR 0 2 DC motor DAC value 5 000 mV 8bit DCMTR REV 128 127 CS1 0 DO7 D00 1 WR
154. ue 0 255 Lateral Force Filter 0 Full range 1 1000 Hz 2 100Hz 3 10Hz Z FEEDBACK 2 feedback parameters section PID_CH 0 PID Channel select 0 T B Photodetector 1 External 2 Z SEN PID DEM 1 PID Demodulator select 0 Bypass demodulator 1 Demodulate PID POL 0 PID Input polarity select B CONSEMAE 7 1 INVERSE PID 5 0 Setpoint polarity select NORNA 1 INVERSE ZERR G 255 error signal Z ERR gain select 1 255 PID 255 PID value 1 proportional 0 255 PID I 255 PID value 2 integral 0 255 PID D 255 PID value 3 derivative 0 255 Z SET 0 7 Setpoint value 0 255 0 10 000 mV PID ON OFF Z PID feedback On Off section PID 0 PID on off select 0 off 1 on DEMOD SELECTS Demod selects section DEM G 3 Demod Gain 0 1x 1 2x 2 3 4x DEM 0 Demod Filter 0 Full range 1 1000 Hz 2 100Hz 3 10Hz DEMOD 0 Demodulation mode 0 phase 1 amplitude 90 SPM CONTROLLER 27 6 5 2 PIEZO Z piezo and sensor selects 7 DAC output to drive piezo 0 4095 0 10 000 mv Fast Retract 1 Fully retracted 0 Z DAC applied to Z piezo XY CONTROL X Y Control Section X OFS 255 X offset 0 255 0 10 000 mV Y OFS 255 X offset 0
155. uring tip approach the PID is turned on before approach motor activity D uring tip retract the PID is turned off after the motor pulls back Scan Image Setup Resolution Over all scan ranges the images may be acquired at resolutions from 16 x 16 to 1024 x 1024 pixels Overscan Under some conditions it may be useful to reduce artifacts associated with reversing tip scan direction When scanning in the forward direction up to 127 pixels may be removed at the beginning of the line D epending on the resolution the range will be reduced proportionally The resulting image is still at the specified scanning resolution SPM CONTROLLER 27 6 5 Prescan As above under some conditions it is useful to remove a few lines at the beginning of a scan Up to 127 lines may be eliminated from the acquired image A gain the resulting image is still at the specified scanning resolution Scan Rate The scan rate may be varied from a few thousandth of a line per second up to about 15 lines per second for four channel acquisition Above 0 2 105 user interrupts are only allowed at the end of a scanned line interrupts are allowed after each point below 0 2 Ips Channels Oneto four channels may be acquired simultaneously and stored Skew The extent of skew between the X amp Y axis is corrected during image acquisition It is typically less than one degree Rotation The angle for the fast scan axis can be set manually or by clic
156. urrent mode operation 85 SPM CONTROLLER 27 6 5 Wait 100 ms and compare elapsed time with the DCMTR TIME value if equal then terminate current mode operation When the Controller terminates or aborts the Motor forward mode operation it sets DC motor DAC to azero volt level and writes an empty line to the log file ERR LOG 4 13 DC MOTOR REVERSE MODE Command DCMTR REV Time limited Logs used ERR LOG Data files none This mode is designed for the D irect Current D C motor operation A control voltage drives the DC motor on a Digital to Analog Converter D AC that may vary from 5 000 mV to 45 000 mV Different control voltage polarity yields to different D C motor rotation direction Thus forward and reverse D motor direction depends on a custom hardware wiring of DC motor The two DC motor related modes of the Controller operation allows the user to define which control voltage is considered forward and which one is considered reverse When the Controller enters into the described mode it writes the D C Motor Reverse line into the log file ERR LOG Then the Controller accesses the parameter DCMTR TIME and DCMTR REV values from the Salve ini file section DC MOTOR The DCMTR TIME value specifies the duration of a D C motor action and should be a multiple of 100 ms The DCMTR REV value specifies the control voltage that may vary from 5 000 mV to 5 000 mV The polarity of
157. utput amp FLGPT Set clear bit to flag a data point EXTSS External start scan Auxiliary Output signals Number Signal level Resolution Update rate DC motor driver Use Output voltage range Output current On off control Stepping Motor Drivers Use Number on controller Operating voltage Current rating Software driven function Options Input output Flags Output Output Output Input External monitor signals buffered Set point for Z feedback loop Error Signal Z ERR with gain amp filters Output signal from Frequency Synthesizer Output signal from Demodulator Cooperator output signal Z SET Z SIG Output signal from the Z PID feedback controller Output from distance sensor along the Z axis 1x or 3x buffered Z PID Signal proportional to Z height Difference signal from quadrant photodetector Left half minus Right half 2 3 4 5 6 7 8 9 49 SPM CONTROLLER Difference signal from quadrant photodetector Top half minus bottom half Output signal for X piezo driver Output signal for Y piezo Set point for X linearizer feedback loop Set point for Y linearizer feedback loop Output from distance sensor along the X axis Output from distance sensor along the X axis Output to X piezo from Linearizer feedback loop Output to X piezo from Linearizer feedback loop Output signal for Z piezo Sum of Photodetector quadrants 2 6 5 Digital I O 16 bit output bus
158. version of image acquisition software that is currently in operation DISPLAY WINDOW HELP SPM CONTROLLER Appendix K Customer Communication For your convenience this appendix contains forms to help you gather the information necessary to help us solve your technical problems and a form you can use to comment in the product documentation When you contact us we need the information on the Technical Support Form and the configuration form if your manual contains one about your system configuration to answer your questions as quickly as possible Pacific Nanotechnology Inc has technical assistance through electronic fax and telephone systems to quickly provide the information you need O ur electronic services include an e mail support If you have a hardware or software problem first try the electronic support system If the information available on these systems does not answer you questions we offer fax and telephone support through our technical support center which are staffed by application engineers Electronic Services E Mail Support You can submit technical support questions through e mail at the Intemet address listed below Remember to include your name address and phone number so we can contact you with solutions and suggestions Fax and Telephone Support Pacific Nanotechnology Inc Telephone Fax Headquarters 408 982 9492 408 982 9151 3350 Scott Blvd 29 Santa Clara CA 95054 3105 PSCAN2
159. volts in approximately 20 mV increments Phase For Phase D etection varying the phase of the detected signal relative to the reference signal may enhance the contrast of the acquired image The range is 0 to 360 degrees AUX 1 amp 2 Outputs The Auxiliary outputs AUX 1 and AUX2 provide the user with 0 10 V DC 10 mA outputs with 12 bit resolution Demod Selects Demod Gain Four settings are available 1x 2x 3x and 4x The higher gains are used to assure a satisfactory signal level for the demodulator section Demod Filter High frequency effects can be reduced after demodulation by the use of decade filters 10 Hz 100 Hz 1000 Hz and full range Demode Type This switch selects the type of detection in the demodulator Amplitude Detection typical for oscillating mode and Phase D etection used to control the PID loop by sensing small changes in the phase of the oscillating cantilever tip SPM CONTROLLER 27 6 5 Laser Motors Laser The Laser is ON under typical program initialization It can be turned off at any time Stepper Motors Motor Select Any of six micro stepper motors rated at 12 V 0 5 A per phase can be selected Just to the right of the select window is a window that indicates the motor location on a relative scale The primary motor for AFM is motor 1 Control An individual stepper may be moved in the Forward or Reverse direction and stopped at any time Any number of Pulses may
160. w two input and 2 output control bits Additional 16 bit I O bus available for external use nternal functions 8 channels differential input 16 bit further split to 12 channels on interface board 2 x 12 bit d a drives x amp y scan piezo actuators with 8 bit offset and 8 bit zoom on Master clock using counter timer increments memory addresses for x amp y outputs latches and digitizes up to 4 channels of analog signals internal clock flags to start amp stop clock keyboard internal start scan external start scan indicate next pixel Data rate output x amp y DAC input 1 to 4 channels 20 kHz sampling rate for 1 to input channels 15kHz sampling rate for 4 input channels 96 bit I O card some lines are multiplexed on interface board Analog control by DAC s 32 bit frequency generator for oscillating AFM modes 10 bit amplitude set 8 bit level select 3 x 8 bit settings for z feedback control loop 8 bit setting to ADC for increased z detection resolution 8 bit setting of z signal to ADC for reduced bandwidth 12 bit ADC for fine tip approach and indentation measurements 2 x 8 bit setting feedback parameters for x feedback loop 2 x 8 bit setting feedback parameters for y feedback loop 8 bit setting of scan offset in x direction 8 bit setting of scan offset in y direction 8 bit setting of x y scan range 2 x 8 bit setting for filter and gain of 2 sensor 3 bandwidth settings for demodul
161. without options To see this information one screen at a time type the following at the command prompt or HELP USE MOR 68 SPM CONTROLLER Appendix F DCEx Protocol Components 1 PSCAN2 SCANNING PROBE MICROSCOPE SYSTEM CONFIGURATION 1 1 SYSTEM COMPONENTS PScan2 SPM System Consists Of Master Workstation that operates under MS Windows 95 98 NT or XP operating systems and runs Application Software A Controller that operates under MS DOS 6 22 and runs Controller Software A Scanner that is connected to Controller s Interface Board Ethernet network link between the Master Workstation and Controller that is implemented via a Twisted Pair TP DirectLink Ethernet cable two regular TP cables and Ethernet TP Hub or a coaxial Ethernet cable and two Ethernet network cards 10Mbps or 100Mbps in the Master Workstation and Controller correspondingly See Figure 1 for basic system block diagram 1 2 NETWORK SOFTWARE COMPONENTS The current configuration operates using Microsoft NetBIO S Extended User Interface NetBEUT protocol on both Master Workstation and Controller icosoft N ework Client version 3 0 for M S D OS is installed on the Controller side and provides a file level network access to the Master Workstation s shared resources The following Network software components are

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