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TURBOVAC SL 300 - Ideal Vacuum Products, LLC

1. Protection cap L Fig 2 2 Mounting the frequency converter underneath the pump Wi The stop plate serves as a mounting aid With it the sliding nuts can be moved to their correct position H The attached parts may provided flanges and plugs are not in the way be fitted in 90 increments as required E When fitting as shown in the figures the 0 2 m long cable will do for the frequency converter When the power supply connector shall point in the other direction then the 0 4 m long cable will be needed 20 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum Installation Stop plate 4 flat head screws mounting aid 4 cylinder head screws Sliding nuts Bracket Frequency Air cooler socket converter Air cooler P di S 7 Protection cap 4 flat cross headed Screws Fig 2 3 Mounting air cooling and frequency converter beside the pump E Insert the connecting cable from the air cooler into the air cooler socket When fitting be sure not to pinch the cable E As the purge gas and venting valve use either valves with a M8 screw in thread or screw in the M8 DN16KF adapter and connect the valve to it See also Section 2 7 1380000761 002 A0 08 2008 Oerlikon Leybold Vacuum 21 Installation Caution Warning A High vacuum flange Cooling water connection C
2. 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 41 Interfaces Links for activation of the bus terminator 0 5 A 24 V DC 1 6 7 2 TxD RxD 3 TxD RxD ca 4 9 5 penc Fig 3 3 Pin assignment for the socket at the frequency converter for RS 485 interface male 3 3 2 RS 485 interface Standards ISO IEC 8482 EIA 485 Protocol acc to VDI VDE 3689 Transmission rate 19200 baud fixed Response delay default setting 10 ms parameter 180 Address range Ole 15 Max cable length 50 m with bus termination Type of cable 2 wire twisted pair twisted pair cable Differential voltage levels logic O see also Standards transmitter 1 5 5 V receiver gt 0 3 V logic 1 transmitter 1 5 5 V receiver 0 3 V Interface connector 9 way Sub D type socket on the instrument male thread UNC4 40 Note After having changed the bus address through the rotary switch the frequency converter must be switched off yellow power LED off and then on again so as to enable the new address setting Bus addresses over 15 can only be set via Parameter 37 Refer also to Operating Instructions GA 05 281 42 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum Interfaces Fig 3 4 Connection of the RS 485 bus 3 3 3 Profibus DP The Profibus DP used has been defined in the standards EN 50170 and VDI VDE 3689 For m
3. Possible Cause Frequency converter defec tive Forevacuum pressure too high Gas flow too high Rotor blocked Ambient temperature too high Poor cooling Forevacuum pressure too high Gas flow too high Forevacuum pressure too high Gas flow too high Fan defective Water cooling switched off Pump not connected cor rectly to frequency conver ter Frequency converter soft ware not current Hardware defective 130000761 002 AO0 08 2008 Oerlikon Leybold Vacuum Remedy Contact Oerlikon Leybold Vacuum Service Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process Check if the rotor turns freely Contact Oerlikon Leybold Vacuum Service if the rotor is damaged or blocked Ensure max ambient temperature of 45 C Improve cooling Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process Replace fan Switch on water cooling Check connection between pump and frequency converter Contact Oerlikon Leybold Vacuum Service Contact Oerlikon Leybold Vacuum Service Shut down yes yes yes yes yes yes Error code 82 83 84 101 103 106 111 116 117 128 143 Designation Meaning Fan voltage has fa
4. 27 Current norm oper 5 29 Relay function X1 0 Max Default Unit 65535 65535 65535 1500 150 65535 150 65535 150 150 60 1200 1200 1200 255 1200 99 60 0 10000 0 30 o 54 5 0 1000 525 500 1000 95 Field O specifies the function for normal operation Frequency dependent otor current dependent Fieldbus controlled E Pump at standstill f lt 3 Start command is present Ready for switch on STW N Ho go Ho Ho Ho th d oH og N O0omTm ONDARWN O Fieldbus controlled 44 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum Bit1 Trigger current bearing temperature P122 Venting function P247 P248 ield 1 specifies the function for the error relay Energised when an error is present Deenergised when an error is present Hz 0 1 V 0 1A 0 1 W C C IG 0 1 A Hz Hz Hz Hz r readable w writable r w Format Description r r r r w r w r w r w u16 u32 u16 6 4 u16 u16 u16 u16 u16 u16 u16 u16 u16 136 Turbo Drive 400 xx yy version zz correction index Actual rotor frequency Actual intermediate circuit voltage of the converter Actual motor current Actual drive input power Actual value of the motor temperature A write command with any value saves temporary data into nonvolatile memory Actual heat sink temperature of the converter Exceeding the motor temperat
5. Oerlikon Leybold Vacuum 23 Installation Warning Centering ring O ring FPM ISO K flange TROLL Outer centering ring Clamp Fig 2 6 Using type ISO K flanges Detach the shipping flange from the high vacuum flange and remove the desiccant Pay attention to scrupulous cleanliness when making the connec tion During operation the pump can become so hot that there is a danger of burns up to approx 80 C 176 F Provide protection against contact with the hot components Design with ISO K clamp flange Lay the O ring on the centering ring The O ring must be positioned so as to be smooth and flat it must not be twisted Then position the outer ring A collar flange with circlip and the appropriate gasket may be used to connect the pump A collar flange is required when using ultra vacuum sealing gaskets The order numbers for the flange components are given in the Oerlikon Leybold Vacuum Catalog 24 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum 2 5 Forevacuum connection The high vacuum pressure level which can be achieved is a function of the volume of gas flow Q to be pumped and the forevacuum pressure We recommend using the dry running SCROLLVAC SC 15 pump a dia phragm vacuum pump or TRIVAC rotary vane pump for this purpose Connect the clean forevacuum line The connecting flanges must be clean an undamaged The cross section of this line must be so wide that saf
6. Relay functions Pin assignment of the connector Relay Normal operation E While deceleration acceleration Stop 5 43 2 1 L me 4 connected to 5 as shown passive e com 4 W During normal operation f gt 0 9 f 00000 j 0000 J nc 4 connected to 3 active Relay Error m l 2 9 8 7 6 1 0 jg MINo error 1 connected to 2 as shown passive L COT 41 Error is present 1 connected to 9 active TURBO DRIVE 400 Pin assignment for the Start Stop input 7 2 kQ Switching threshold for 7 24V sv the Start Stop control input 26kQ 62V Low Level lt 9V Bt Hee High Level gt 10 5 V ale 3 6kQ TURBO DRIVE 400 Caution No power feed is allowed at pin 7 Fig 2 19 Pin assignment of the REMOTE X1 connector Start Stop operation Example 1 Operation via a PLC 0 V STOP 24 V START Relay output rating 42 V 0 5 A JO n Example 2 Operation via contacts Contact open STOP TURBO DRIVE 400 Contact closed START 7 6 L TURBO DRIVE 400 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum 37 Installation 2 8 4 Relay status Input data status Start Pump Normal stop rotating frequency present signal gt 90 of setpoint frequency Stop no no Stop yes no Stop yes yes Start no
7. minute During the time the pump is running down the green LED at the frequency converter will flash indicating that the rotor has not yet arrived at standstill When shutting down by switching off the power supply voltage there will be only enough power for the LEDs down to a speed of the pump of approximately 200 Hz Thus the pump may still turn without a LED being on For this reason when switching off without venting wait for approxi mately 15 minutes after the LEDs have turned off until the pump has arrived at standstill 50 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum Operation Unplug any connectors only when the mains voltage is switched off and the pump does no longer turn the green LED is off Warning 3 6 Venting Refer to Section 3 1 for suited gases Venting Methods There are three different methods of venting the turbomolecular pump In the case processes requiring a purge gas the pump must be vented via the purge gas and venting valve when shutting the pump down When additionally venting the vacuum chamber the venting function of the purge gas and venting valve must be opened before opening the chamber valve This will ensure the presence of a higher pressure in the area of the ball bearings compared to the remaining vacuum area This will prevent particles dust or aggressive gases from being forced through the bearings into the not yet vented motor chamber of the pump Cautious venting of
8. 17 19 30 31 51 R Radiation 18 52 Relay 10 37 38 40 44 45 Resonance damper 23 31 S Safety valve 4 18 25 Shock 49 Splinter guard 8 9 17 23 Split cage DC motor 8 Starting pressure 49 Index T Temperature sensor 8 57 V Venting valve 8 11 17 19 30 31 46 51 Vibration 22 23 25 49 58 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum 63 Sales and Service Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 1234 Fax 49 0 221 347 1245 sales vacuum oerlikon com www oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area North Northeast Branch Office Berlin Industriestrasse 10b D 12099 Berlin Phone 49 0 30 435 609 0 Fax 449 0 30 435 609 10 sales vacuum bn oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area South Southwest Branch Office Munich Sendlinger Strasse 7 D 80331 Munich Phone 49 0 89 357 33 9 10 Fax 449 0 89 357 33 9 33 sales vacuum mn oerlikon com service vacuum mn oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area West amp Benelux Branch Office Cologne Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 1270 Fax 49 0 221 347 1291 sales vacuum kn oerlikon com Oerlikon Leybold Vacuum GmbH Service Competence Center Emil Hoffmann Strasse 43 D 50996 Cologne Suerth Phone 49 0 221 347 1439 Fax 449 0 221 347 1945 service vacuum kn oerlikon com Oerlikon Le
9. M8 closure screw A purge gas and venting valve may be connected either directly or by using a M8 DN16KF adapter 1 2 Standard equipment The pumps are shipped sealed in a PE bag with a desiccant to absorb moi sture The maximum useful life of the desiccant is one year The high and forevacuum flanges are covered with protection caps The connection elements and the splinter guard are not part of the standard equipment A suitable DC coupling for the power supply is included In the case of pumps with integrated frequency converter it is supplied with the pump in the case of pumps with a separate frequency converter it is supplied with the frequency converter PE Polyethylene FPM Fluororubber resistant to temperatures up to 150 C 302 F 8 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 1 3 Technical data TURBOVAC High vacuum connection Pumping speed without splinter guard for N2 Ar He H5 Ultimate pressure with two stage oil sealed rotary vane pump with SCROLLVAC SC 30 with diaphragm pump Max permissible forevacuum pressure with N water cooled Weight Pump with ISO K flange with TURBO DRIVE 400 with TURBO DRIVE 400 and air cooler with TURBO DRIVE 400 and water cooling Pump with CF flange Recommended forevacuum pumps TRIVAC SCROLLVAC Diaphragm pump DIVAC at purge gas operation TRIVAC Operating speed Run up time Power consumption at run up at ultimate pressure Forevacuum connec
10. Vacuum 29 Installation Clamping ring DN 16 KF Adapter M8 DN 10 16 KF DN 10 KF aur ESO e Purge gas and venting valve Connection gas side Fig 2 12 Connecting the purge gas and venting valve 2 7 Connecting the purge gas venting valve The pumps are equipped with a purge gas facility The purge gas and venting connection has been blanked off as a standard with a M8 closure screw A purge gas and venting valve or a power failure venting valve or a venting valve may be either connected directly or using a M8 DN16KF adapter The power failure venting valve or venting valve vents the pump and the fore vacuum line when the pump is switched off and thus keeps oil vapor from diffusing back from the forevacuum line A choke nozzle in the vent port ensures that the pump is not vented too fast When having to decide which gases need or not need to be pumped with purge gas we are available to provide assistance Refer to Section 3 1 for suited gases When operating the pump with purge gas the pump needs to be vented via the purge gas valve after having shut down the pump see Section 3 5 Consider the additional purge gas flow when selecting a suitable backing pump We recommend a purge gas flow of 0 2 mbar l s 12 sccm with Nitrogen The pressure in the pump must not exceed 1200 mbar 0 2 bar over pressure 30 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum Installation 10
11. altitudes over 1000 m heat dissipation by the ambient air is impaired Please consult us The frequency converter must not be operated in explosive gas atmo spheres 130000761 002 AO0 08 2008 Oerlikon Leybold Vacuum Installation 2 screws G1 8 threads Fig 2 1 Pump with mounted water cooling 2 3 Fitting accessories Either a water or air cooling facility and a purge gas and venting valve can be fitted to the pump Moreover the frequency converter may be fitted beside or underneath the pump See Fig 2 1 to 2 3 When fitting the accessories note the following E For fitting place the pump with the protection cap in place on its high vacuum flange Wi Fitting the water cooling Unscrew 2 screws and bend the cooling coil cautiously a little bit open Mount it to the pump and fix the 2 screws The cooling water may be connected radially or axially to the connecting piece of the cooling coil see Fig 2 1 Blank off the unused G 1 8 threads using the screw in stoppers and gaskets supplied 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum 19 Installation Frequency converter Sliding nuts pee 4 cylinder head screws Mounting panel EN M 4 flat head screws Connection thread for pe i X lt the vibration sensor Closure screw for the purge gas connection gt
12. be read Starting pressure from the graph in Fig 3 5 Switch on the turbomolecular pump at the frequency converter Wi via pins 7 and 8 of the socket REMOTE X1 see Fig 2 19 For example via a remote control or with the aid of the plug with integrated ON OFF Switch see Section 1 5 Accessories E by a start command via the interface see Section 3 3 BI For the power supply units offered or recommended by Oerlikon Leybold Vacuum If the contacts 7 and 8 at the REMOTE X1 connector are closed the pump starts automatically when the DC voltage is switched on provided parameter 12 is set to O The turbomolecular pump accelerates The green LED flashes When the pump reaches normal operation the green LED lights up permanently Avoid the influences of shock and vibration when the pump is running Exposure of the pump to accelerating forces must be avoided or reduced Caution to such an extent that the rotor unit will not be excited by vibrations In the case of critical applications you must consult our Applications Dept first 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum 49 Operation Warning Generator operation Venting Emergency shut down Warning During operation the pump can become so hot that there is a danger of burns up to approx 80 C 176 F After a mains power failure the pump can run up automatically once more 3 5 Shutting down Switch off the pump at the frequency
13. converter Wi via contacts 7 and 8 of the socket REMOTE X1 if parameter 12 O E apply a stop command via the interface if parameter 12 1 or 2 BI for the power supply units offered or recommended by Oerlikon Leybold Vacuum switch off the DC voltage After switching off the green status LED will flash until the rotor of the turbo molecular pump is at standstill This may take several minutes With the DC power supply off the turbomolecular pump will act as a generator supplying the frequency converter with energy as indicated by the yellow power LED Switch off the forevacuum pump When using oil sealed forevacuum pumps vent the turbomolecular pump before it comes to a stop refer to Section 3 6 When using TRIVAC pumps the built in anti suckback valve will close auto matically shutting off the forevacuum line In forevacuum pumps without a vacuum retention valve close the valve in the forevacuum line When the system is not operating ensure that neither ambient air nor clean ing media can enter the pump If a failure occurs the turbomolecular pump will be shut down automatically The red LED at the frequency converter lights up In the case of an emergency shut down the pump is switched off as described above The rotor of the turbomolecular pump may be stopped faster by venting the pump Under vacuum conditions the pump may take up to one hour to run down when venting to atmospheric pressure it may take up to one
14. e g for adaptation of low performance power supplies Note values 100 reduce the pump performance and increase the run up time ntermediate circuit 0 150 0 0 1A r i16 Actual average intermediate circuit current current of the converter Standby frequency 0 1200 350 Hz rw u16 Standby operation frequency setpoint Enable standby 0 1 O rw u16 O normal speed P24 1 standby speed P150 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 45 Interfaces No 171 174 176 179 180 182 183 184 227 247 248 249 46 Designation Min Max Default Unit r w Format Description Error code memory 0 65535 0 r u16 Indexed parameter for storing the most recent 40 error codes The individual error memory entries are accessed via this parameter with additional index number The last error code is accessed with index O and the oldest with index 39 See Section 5 Troubleshooting for the error codes Error rotor frequency 0 65535 O Hz r u16 Actual speed when error occurred Access analogously as for parameter 171 Error operating hours 0 0 h r u32 Operating hours when error occurred 2147483647 Access analogously as for parameter 171 Fallback PZD1 0 65535 1024 rw u16 Response when cancelling the control rights or in the case of a communication interruption of the bus adapter Behaviour in case bit 10 in the control word of the bus adapter is cancelled or when interrupting the communication between conv
15. is adequately cooled for this see Section 2 8 3 and also Fig 2 17 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum Installation TURBOVAC with integrated frequency converter TURBO DRIVE 400 with air cooler Mains Power supply 24 V DC cable max 20 m TURBOVAC with integrated frequency converter TURBO DRIVE 400 without forced cooling Mains Power supply 24 V DC cable max 20 m TURBOVAC without integrated frequency converter without forced cooling Frequency converter TURBO DRIVE 400 Cooler optional Mains Power supply DC cable with shielding max 20 m 24 V DC cable max 5m Fig 2 14 Examples for connection 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum 33 Installation Scene 100 240 V 50 60 Hz N rt DW S max 20m z gt O gt 24V jore se TSA ZV Programmable logic control PLC Fig 2 15 Examples for connection 000000000000 0000000000000 100 240 V 50 60 Hz DC control cable top TURBOVAC with separate frequency converter to TURBO POWER 300 bottom TURBOVAC with integrated frequency converter to TURBO CONTROL 300 Warning 24 VDC cable Caution 2 8 2 Connecting the power supply The frequency converter must only be conne
16. relevant regulations We offer this service at fixed prices Further details are available on request Contaminated parts can be detrimental to health and environment Before Warning beginning with any work first find out whether any parts are contamina ted Adhere to the relevant regulations and take the necessary precauti ons when handling contaminated parts Separate clean components according to their materials and dispose of these accordingly We offer this service Further details are available on request When sending us any equipment observe the regulations given in Section 4 2 Oerlikon Leybold Vacuum service 130000761 002 AO0 08 2008 Oerlikon Leybold Vacuum 59 cerlikon leybold vacuum EC Manufacturer s Declaration in the spirit of Appendix Ilb to the 98 37 EG Machinery Guidelines We Oerlikon Leybold Vacuum GmbH herewith declare that operation of the incomplete machine defined below is not permissible until it has been determined that the machine into which this incomplete machine is to be installed meets the regulations of the EEC Directive on Machinery When using the appropriate Oerlikon Leybold Vacuum accessories e g connector lines and when powering the pump with the specified frequency converters the protection level prescribed in the EMC Guidelines will be attained Designation of the products Turbomolecular pump with integrated or external frequency converter Model TURBOVAC SL 300
17. the backing pump and install a bigger backing pump if req Seal leak check process Ensure min ambient tempera ture of 0 C Reduce water cooing Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process Contact Oerlikon Leybold Vacuum Service Contact Oerlikon Leybold Vacuum Service Shut down no no no no yes yes yes yes yes yes 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum 57 Troubleshooting Error code div 58 Error Yellow power LED is not on Red LED flashes urbomolecular pump oes not start ERROR ED does not light Ego Turbomolecular pump produces loud running noises and vibrations Turbomolecular pump does not reach ultimate pressure Running pump can not be stopped via X1 Possible Cause No DC power DC power miswired Frequency converter defective Warning message See Section 3 3 6 Warning codes for the possible reasons of the warning nterface protocol error No communication via the serial nterface REMOTE connector X1 connec ted wrongly REMOTE and SERVICE connec tors mixed up Wrong Profibus address set Rotor out of balance Bearing defective Measurement instrument defective Measurement sensors soiled Leaks at the equipment lines or the pump Pump soiled Forevacuum pump provides insuffi cient pumping speed or
18. the pump is possible from the high vacuum side since here the bearing forces will be lowest When doing so no free jet of gas must be allowed to form on the rotor so as to avoid exposing the rotor to additio nal forces When venting the pump through its foreline connection neither oil nor par ticles may be entrained in the gas flow from the forevacuum side into the pump Speed of the Pressure Rise All turbomolecular pumps may be vented at full speed However the pres Speed sure must not increase faster than specified through the pressure rise curve Pressure rise curve The pump must be vented significantly slower when there is the risk of par ticles entering into the pump from the process During venting the flow must Particles be of the laminar type in both the vacuum chamber and the turbomolecular pump The speed of the pressure rise during venting of the running pump will greatly influence the load on the rotor stator pack and the bearings The slower the pump is vented the longer the service life of the bearings will be The pump must not be vented to pressures above atmospheric pressure 1380000761 002 A0 08 2008 Oerlikon Leybold Vacuum 51 Operation 103 mbar 10 Forevacuum pressure Oo oO zi O 15 20 25 30 Time Fig 3 6 Maximum rise in pressure 3 7 Bakeout For TURBOVACs with CF flange If pressures in the range of 10 8 mbar or below are to be developed the v
19. 003 service vacuum InGoerlikon com Italy Oerlikon Leybold Vacuum Italia S p A 8 Via Trasimeno 1 20128 Milano Sales Phone 39 02 27 22 31 Fax 39 02 27 20 96 41 sales vacuum mi oerlikon com Service Phone 39 02 27 22 31 Fax 89 02 27 22 32 17 service vacuum mi oerlikon com Netherlands Oerlikon Leybold Vacuum Nederland B V Proostwetering 24N NL 3543 AE Utrecht Sales and Service Phone 31 30 242 6330 Fax 31 30 242 6331 sales vacuum ut oerlikon com service vacuum ut oerlikon com Leybold Vacuum USA Inc Phone 1 724 327 5700 1 724 325 3577 info vacuum ex oerlikon com Spain Oerlikon Leybold Vacuum Spain S A C Huelva 7 E 08940 Cornell de Llobregat Barcelona Sales Phone 34 93 666 46 16 Fax 434 93 666 43 70 sales vacuum ba oerlikon com Service Phone 34 93 666 49 51 Fax 34 93 685 40 10 service vacuum ba oerlikon com Sweden Oerlikon Leybold Vacuum Scandinavia AB Box 9084 SE 40092 G teborg Sales and Service Phone 46 31 68 84 70 Fax 4460 31 68 39 39 info vacuum gtGoerlikon com Visiting delivery address Datavagen 57B SE 43632 Askim Switzerland Oerlikon Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 CH 8050 Z rich Sales Phone 41 44 308 40 50 Fax 41 44 8302 43 73 sales vacuum zh oerlikon com Service Phone 41 44 308 40 62 Fax 41 44 308 40 60 service vacuum zh oerlikon com America USA Oerlikon Leyb
20. 0102V0002 with US plug 6 15P 800102V1002 with UK plug 800102V0003 o o Power supply and control unit TURBO CONTROL 300 800100V0001 o starr W supplies the TURBO DRIVE 400 with 24 V DC Siena 1 W plug amp play cables li desktop unit or rack mountable POWER W with power switch W with start stop switch for the turbomolecular pump E remote control o W status LEDs and status relays 24V DC Control cable TURBO DRIVE 400 TURBO CONTROL 300 STOP ERROR TURBO CONTROL 300 9 o o 1m 800091V0100 ET TE T 3m 800091V0300 J 5m 800091V0500 ae 10m 800091V1000 mf 20m 800091V2000 Mains cable for TURBO CONTROL 300 3 m long with EURO plug 800102V0002 with US plug 6 15P 800102V1002 with UK plug 800102V0003 Mechanical accessories Plug for connector REMOTE with integrated ON OFF switch for the pump Sub D plug 9 way 152 48 Heat sink for frequency converter 800110V0001 Top hat rail adaptor mounting aid for TURBO DRIVE 400 and TURBO POWER 300 800110V0003 16 130000761 002 AO0 08 2008 Oerlikon Leybold Vacuum Purge gas and venting valve 0 2 mbar I s at 1 bar 24V DC 230 100 V AC DN 10 KF G Pump connection Adapter M8 DN 16 KF incl O ring 9 25 x 1 78 and Adapter centering ring DN 10 16 KF with sinter filter Gas side connection G1 4 in adapter with filter Including O ring and gasket Venting valve 2
21. 08 Oerlikon Leybold Vacuum Description 130 m DN 100 80K DN h 100 ISO K 181 100CF 183 E DN 16 KF 22 DN 16 KF 190 160 100 Fig 1 4 Dimensional drawings for SL 300 pumps combination examples dimensions in mm 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 13 Description 1 4 Ordering data TURBOVAC SL 300 Part No High vacuum flange DN 100 ISO K 8001 70V3005 High vacuum flange DN 100 CF 8001 70V3006 1 5 Accessories Frequency converter TURBO DRIVE 400 with RS 232 C interface 800073V0002 with RS 485 C interface 800073V0003 with Profibus interface 800073V0004 with Ethernet IP interface 800073V0007 Connecting cable pump frequency converter 0 2 m long 800152V0021 0 3 m long 800152V0023 0 4 m long 800152V0022 1 0 m long 152 47 2 5 m long 864 49 3 0 m long 864 40 5 0 m long 864 50 Mounting kit TD 400 for TURBOVAC SL 300 Including 0 2 m long connection cable pump frequency converter For installing the frequency converter beside the pump 800110V0006 underneath the pump 800110V0009 Water cooling with G 1 8 connections 800135V0002 Accessories for water connections Adapter G 1 8 1 4 tube 200 91 671 2x Gasket 224 01 207 2x Adapter G 1 8 Hose nipple 10 mm 200 18 366 2x Gasket 230 02 106 2x A
22. 1 Turbomolecular pump 2 Forevacuum gauge port 3 Forevacuum pump 4 Resonance damper 5 Adsorption trap 6 Forevacuum valve 7 Purge gas and venting valve 8 High vacuum valve 9 Valve in the roughing pump line 10 Frequency converter Roughing line recommend to achieve the shortest possible cycle times Fig 2 13 Schematic of a turbomolecular pump system 1380000761 002 A0 08 2008 Oerlikon Leybold Vacuum 31 Installation Warning Caution 32 2 8 Electrical connection The TURBO DRIVE 400 frequency converter needed to operate the TURBO VAC SL 300 has either been integrated in the pump or is a separate unit For connection examples see Fig 2 14 and 2 15 The pump may be operated only with a suitable frequency converter and suitable connector cables Route all cables so as to protect them from damage Do not expose the pump the frequency converter or the connections to water Disconnect and connect the cable connections only while the pump is turning no longer green status LED off and with the mains power switched off yellow power LED off Otherwise there is the risk of damaging the TURBO DRIVE 2 8 1 Connecting pump and frequency converter Connect the pump to the frequency converter using a suitable connecting cable 15 way Sub D plug X3 Connect the Sub D plugs with the hexagon threaded bolts UNC 4 40x6 at the pump connector Make sure that the frequency converter
23. 4 4 1 Cleaning 54 4 2 Oerlikon Leybold Vacuum Service 54 5 Troubleshooting 55 6 Waste disposal 59 EC Manufacturer s Declaration 60 EC Conformance Declaration 61 Index 63 Important Safety Information Indicates procedures that must be strictly observed to prevent hazards to Warning persons Indicates procedures that must be strictly observed to prevent damage to Caution or destruction of the product The Oerlikon Leybold Vacuum TURBOVAC SL 300 has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions The TURBOVAC must only be operated in the proper condition and under the conditions described in the Operating Instructions It must be operated and main tained by trained personnel only Consult local state and national agen cies regarding specific requirements and regulations Address any further safety operation and or maintenance questions to your nearest Oerlikon Leybold Vacuum office 1380000761 002 A0 08 2008 Oerlikon Leybold Vacuum 3 Safety Information 4 Warning Failure to observe the following precautions could result in serious personal injury Mechanical hazards Danger of injury Avoid exposing any part of the human body to the vacuum Handle the equipment only wh
24. 4 V DC Power failure venting valve 24 V DC Spare filter PC software Turbo Drive Server for Windows 95 and higher CD ROM E Display change save and compare parameter lists E Integration of customer s software lll Record parameter data The software can also be downloaded from Description Part No 113 50 800152V0019 800110V001 1 800110V0012 800120V001 1 800120V0021 200 18 517 800110V0102 www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation Download Software Adapter RS232 RS485 for 220 V Euro plug GSD file for Profibus DP Can be downloaded from www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation Download Software Splinter guard coarse for DN 100 ISO K Splinter guard fine for DN 100 ISO K 800110V0101 800132V0101 800132V0102 Flange heater DN 100 CF only for pumps with CF flange 230 V 110V Copper gasket rings for CF flange Set of 10 pieces DN 100 CF Set of hex screws with nuts screws and washers for CF flange DN 100 CF Centering ring Al with O ring FPM DN 100 ISO K Clamps Set of 4 pieces Centering ring with O ring for DN 16 KF AI CR Al FPM Clamping ring Al DN 16 KF 854 27 854 28 839 45 839 04 q Y 268 42 re pe 267 01 183 26 N NGS 182 06 183 41 1380000761 002 A0 08 2008 Oerlikon Leybold Vacuum 17 Installation 18 Overpressure pro
25. 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Cologne A og OE Cologne LELA A Dr Ulrich Jung Harald Udelhoven Vice President Head of Quality Management Head of Product Developme Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 221 347 0 Fax 49 221 347 1250 documentation vacuum oerlikon com 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 61 cerlikon leybold vacuum Declaration of Contamination of Compressors Vacuum Pumps and Components The repair and or servicing of compressors vacuum pumps and components will be carried out only if a correctly completed declaration has been sub mitted Non completion will result in delay The manufacturer can refuse to accept any equipment without a declaration A separate declaration has to be completed for each single component This declaration may be completed and signed only by authorised and qualified staff Customer Dep Institute Reason for return applicable please mark C Repair O chargeable O warranty Address O Exchange O chargeable O warranty O exchange already arranged received Person to contact Return only Q rent O loan O for credit Phone Fax Calibration C DKD Q Factory calibration End user O Quality test certificate DIN 55350 18 4 2 1 A Description of the Leybol
26. Kawagishi machi Suita chi Osaka 564 0037 Phone 81 6 6393 5211 Fax 481 6 6393 5215 info vacuum osQoerlikon com sales vacuum os oerlikon com Oerlikon Leybold Vacuum Japan Co Ltd Tsukuba Technical Service Center Kogyo Danchi 21 Kasuminosato Ami machi Inashiki gun Ibaraki ken 300 0315 Service Phone 81 298 89 2841 Fax 81 298 89 2838 info vacuum iik oerlikon com sales vacuum iik oerlikon com Korea Oerlikon Leybold Vacuum Korea Ltd SF Jellzone 2 Tower 159 4 Jeongja Dong Bundang Gu Sungnam Si Gyeonggi Do Korea 463 384 Sales Phone 82 31 785 1367 Fax 482 31 785 1359 623 7 Upsung Dong Cheonan Si Chungcheongnam Do Korea 330 290 Service Phone 82 41 589 3035 Fax 482 41 588 0166 Singapore Oerlikon Leybold Vacuum Singapore Pte Ltd 1 Science Park Road Singapore Science Park 2 3102 12 Capricorn Building Singapore 117528 Sales and Service Phone 465 6303 7000 Fax 465 6773 0039 sales vacuum sg oerlikon com service vacuum sg oerlikon com Taiwan Oerlikon Leybold Vacuum Taiwan Ltd No 416 1 Sec 3 Chung Hsin Rd Chu Tung Hsin Chu Taiwan R O C Sales and Service Phone 886 3 500 1688 Fax 886 3 583 3999 sales vacuum hc oerlikon com service vacuum hc oerlikon com cerlikon leybold vacuum www oerlikon com
27. Oo S 9096 30 100 Minimum coolant inlet temperature at which condensation does not yet 25 7 occur as a function of maximum room temperature and maximum relative humidity Example 20 Max ambient temperature 25 C 5 10 15 20 25 o 30 Min coolant inlet temperature 17 C Minimum coolant inlet temperature Max relative humidity 6096 Fig 2 10 Dewpoint diagram 28 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum G1 8 threads Fig 2 11 Pump with water cooling Cooling water specifications Feed temperature 15 35 C Feed pressure 3 to 7 bar absolute Cooling water requirement See Fig 2 9 Appearance colourless clear free of oils and greases Sediments 250 mg l Particle size 150 um pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l Connecting the cooling water Screw on the cooling water lines Cooling water connection G 1 8 The cooling water may be connected radially or axially to the connecting piece of the cooling coil Blank off the unused G 1 8 threads using the screw in stoppers and gaskets supplied Adjust the cooling water temperature so that the formation of condensate is avoided When switching the cooling water supply on and off by means of an electric ally actuated valve connect the valve so that it will be switched on and off together with the pump Installation 130000761 002 A0 08 2008 Oerlikon Leybold
28. Part Nos 800170V3xxx Related harmonized standards Wi EN 1012 2 1996 Compressors and vacuum pumps Safety requirements Part 2 Vacuum pumps Cologne 6 0 Cologne 5 3 og Harald Udelhoven Dr Ulrich Jung L Head of Quality Management Vice President Head of Product Development Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 221 347 0 Fax 49 221 347 1250 documentation vacuum oerlikon com 60 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum cerlikon leybold vacuum C C EC Conformance Declaration We the Oerlikon Leybold Vacuum GmbH declare herewith that the products listed below in the embodiment which we have placed on the market comply with the applicable EC guidelines This declaration becomes invalid if modifications are made to the product without consultation with us Maintaining the EMC guideline assumes an EMC adapted installation of component within the plant or machine Designation of the products Turbomolecular pump with integrated or external frequency converter Model TURBOVAC SL 300 Part Nos 800170V3xxx The products comply to the following guidelines B EC Low Voltage Equipment Guidelines 2006 95 EG W EC Directive on Electromagnetic Compatibility 2004 108 EG Related harmonized standards W EN 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use Part 1 General requirements EN
29. acuum chamber and the components installed therein will have to be baked out In addition the TURBOVAC can be baked out using the flange heater provided for this purpose Protect the rotor against intensive direct heat radiation When baking out at the forevacuum side at a sorption trap for example ensure that the com ponents attached direct are not heated to more than 100 C 212 F The forevacuum pump must be in operation so as to eliminate the vapors liberated at the sorption trap 52 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum 3 8 Removing the pump from the system Shut down the pump and vent as described in Sections 3 5 and 3 6 If the pump has previously handled hazardous gases implement the pro per precautionary measures before opening the intake or exhaust connec tion If necessary use gloves a respirator and or protective clothing and work under an exhaust hood Disconnect the pump only when it has come to a full stop The green LED at the frequency converter must have gone out Then switch the mains power off and wait until the yellow power LED is off Then only disconnect any cable connections The pumps may be contaminated with process gases These gases may be toxic and hazardous to health In addition deposits with similarly dangerous properties may have formed Many of these gases and deposits form acids when they come into contact with humid air This will result in serious corro sion
30. ailure during active operation of the pump P4 gt Umax or P4 lt Umin Possible cause Forevacuum pressure too high Gas flow too high Fan defective Water cooling switched off Ambient temperature too high Poor cooling Ambient temperature too low Pump cooling too high Forevacuum pressure too high Gas flow too high Intermediate circuit voltage too low or maximum time for gene rator operation was exceeded DC power supply voltage below 24V Mains voltage failure 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum Remedy Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process Replace fan Switch on water cooling Ensure max ambient temperature of 45 C Improve cooling Ensure min ambient temperature of 0 C Reduce water cooling Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process Operation 10 mbar 10 Starting pressure 10 Sv Pumping speed of the forevacuum pump m h V Volume of the vacuum chamber m3 10 0 25 50 75 100 Sv V 125 Fig 3 5 Determining the starting pressure of a turbomolecular pump when evacuating large volumes 3 4 Switching on Switch on the 24 V DC power supply The yellow LED at the frequency con verter lights up The maximum starting pressure for the turbomolecular pump can
31. arts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 5 Safety Information Caution Figures Failure to observe the following precautions could result in damage to the pump The pumps are not suitable for pumping aggressive or corrosive media or those which contain dust Install a micropore filter when pumping media which contain dust Observe the information on media compatibility in Section 3 1 of these operating instructions Be careful not to damage the sockets and coolant connections during transportation For the pumps with stainless steel housing self protection of the pump is not ensured in case of unsufficient cooling Make sure to avoid dripping water or humidity The water cooled pumps need cooling air for the frequency converter Ensure correct polarity when connecting the TURBO DRIVE A wrong polarity may cause an internal fuse to blow The fuse can only be changed by the Oerlikon Oerlikon Leybold Vacuum Service The interface connectors have UNC 4 40 threads Do not use connectors with M3 treads The pump may be operated only with suitable connector cables Route all cables so as to protect them from damage Do not expose the pump the frequency converter or the connections to dripping water Disconnect and connect the cable connections only while the pump is turning
32. cerlikon Ik leybold vacuum deal I vacuum products www idealvac com TURBOVAC SL 300 Wide Range lurbomolecular Pump with Integrated or External Frequency Converter Operating Instructions 130000761_002_A0 Part Nos 8001 70V3005 8001 70V3006 Contents 1 4 1 2 1 8 1 4 1 5 2 1 2 2 2 3 2 4 2 5 2 6 2 7 2 8 2 8 1 2 8 2 2 8 3 2 8 4 3 1 3 2 3 3 3 3 1 3 3 2 3 3 3 3 3 4 3 3 5 3 3 6 3 4 3 5 3 6 3 7 3 8 Important Safety Information Description Design Standard equipment Technical data Ordering data Accessories Installation Conforming utilization Operating environment Fitting accessories Attach the pump to the vacuum chamber Forevacuum connection Connect the cooling Connecting the purge gas venting valve Electrical connection Connecting pump and frequency converter Connecting the power supply Mounting the frequency converter Relay status Operation Media compatibility purge gas Start up Interfaces RS 232 C interface SERVICE X5 RS 485 interface Profibus DP Ethernet IP interface Parameter list Warning codes for parameter 227 Switching on Shutting down Venting Bakeout Removing the pump from the system 2 180000761 002 A0 08 2008 Oerlikon Leybold Vacuum Page ik Kk A O O 0 N 18 18 19 22 25 26 30 32 32 34 35 38 39 39 39 40 41 42 43 43 44 48 49 50 51 52 53 Safety Information 4 Maintenance 5
33. cted to power supplies which meet the requirements for functional extra low voltage with positive isolati on in accordance with IEC 364 VDE 0100 Part 410 or local regulations SELV The power supply must meet the requirements given in Section 1 5 Peak loads in the kHz range may be present on the DC side The power supply should have a current limitation or control When connecting several frequency converters to a single power supply then each frequency converter must be fused separately Connect the frequency converter to the 24 V DC power supply or to the TURBO CONTROL 300 or to the TURBO POWER 300 via the 24 V DC cable Ensure correct polarity Pin 1 24 VDC Pin 2 OV Pin 3 GND 34 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum Installation Shielding Pin 3 GND Pin1 24V Pin2 OV Fig 2 16 Pin assignment of the DC connector X4 Model Hirose HS16P 3 Heat sink and forced cooling required ion possible without additional coolin Ambient temperature 1 2 3 4 5 A 6 Motor current Parameter 5 Fig 2 17 Cooling requirements for the TURBO DRIVE 400 when fitted separately The frequency converter is equipped with an internal 8 AT slow blow fuse It can only be replaced by Oerlikon Leybold Vacuum staff Connect the power supply to the mains Emergency shut down By shutting down the power supply voltage Please note the information on shutting down and emergen
34. cy shut down provided in Section 3 5 Shutting down 2 8 3 Mounting the frequency converter The frequency converter may be affixed with the aid of the enclosed M4 slid ing nuts The bottom side of the frequency converter must be cooled suffi ciently If the frequency converter is mounted without the optional heat sink ensure sufficient cooling by other means 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 35 Installation o 24V DC X4 TURBO DRIVE TD 400 DRIVE X3 wel Le oa o Ed teess o 8 c eese X SE VICE X5 FU REMOTE ft RROR EAT SINK HEAT SINK HEATSINK PEN e P x TN NA yo cater cog P ce c 3 qh wo cap e e gor e SECUS e J y 9 SN E sO QC o9 e xe Green LED STS off Pump at standstill 3 Hz flashes slowly 1 s Start command is present about 10 s after start flashes fast 3 s Running up or running down On Normal operation Yellow LED PWR off No supply voltage flashes Supply voltage too low or too high on Supply voltage is present Red LED ERR off No error no warning flashes Warning is present pump can be operated possibly with some restrictions on Fault is present pump stopped or can not be operated Fig 2 18 TURBO DRIVE 400 front and rear side 36 130000761 002 AO 08 2008 Oerlikon Leybold Vacuum Installation
35. d product Failure description Material description Catalog number Additional parts Serial number Application Tool Type of oil Forevacuum pumps Application Process B Condition of the equipment No Yes 0 Contamination No Yes 1 Has the equipment been used a DO oic QO a 2 Drained Product service fluid d m corrosive d Q 3 All openings sealed airtight QO flammable m 4 Purged a a explosive m a If yes which cleaning agent radioactive m a and which method of cleaning microbiological Q Q 1 if answered with No go to D eps other harmful substances Q Q C Description of processed substances Please fill in absolutely 1 What substances have come into contact with the equipment Trade name and or chemical term of service fluids and substances processed properties of the substances According to safety data sheet e g toxic inflammable corrosive radioactive Tradename Chemical name a b C d No Yes 2 Are these substances harmful a QO A 3 Dangerous decomposition products when heated d d If yes which Components contaminated by microbiological explosive or radioactive products substances will not be accepted without written evidence of decontamination D Legally binding declaration we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level Name of authorised person bloc
36. damage to the pump To avoid health hazards and corrosion damage when the pumps are detached from the system fasten a container of desiccant under the trans port cover of the high vacuum connection and then close the pump imme diately at all flange connections Store the pump with a desiccant in an air tight PE bag Corrosion damage due to faulty packing will nullify the guarantee Pack the pump so that it cannot be damaged during shipping and storage Pay particular attention to protection for the flanges and the electrical plug Observe the instructions in Section 4 2 if you forward the pump to Oerlikon Leybold Vacuum Operation Warning gt A Hazardous gases Deposits Desiccant 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 53 Maintenance 54 Contamination Form 4 Maintenance We recommend a standard bearing change after 15 000 operating hours at the latest Moreover we are recommending an exchange of the rotor unit after 45 000 operating hours at the latest Such maintenance work can only be done by the Oerlikon Leybold Vacuum Service If required contact the Oerlikon Leybold Vacuum service center nea rest to your location You can find the address on our internet page www oerlikon com At high pump loads for example during cyclic operation at high gas throughputs or at high ambient temperatures the aforementioned mainten ance work should be carried forward When an adso
37. dapter G 1 8 NPT 1 8 200 12 742 2x Gasket 238 20 110 2x Air cooler 800136V0002 is powered by the pump 14 130000761 002 AO0 08 2008 Oerlikon Leybold Vacuum Description E 24V DC X4 100 79 0 41 0 y O LJ IT TURBO DRIVE TD 400 SERVICE X5 SISO 8 OLR STATUS POWER oodgoo oopo 50 64 2 for Part No 800073V0007 KZ REMOTE X1 Fig 1 5 Dimensional drawing for the frequency converter dimensions in mm OEM power supply with screw terminals SITOP 24V 10A E supplies the TURBO DRIVE 400 with 24 V DC E other power supplies on request 152 50 24 V DC cable TURBO DRIVE 400 OEM power supply 3m 5m 10m 20m Mains cable for power supply 2 m long with EURO plug with US plug 5 15P 200 12 732 200 12 733 200 12 734 200 12 735 800102V0001 800102V1001 1380000761 002 A0 08 2008 Oerlikon Leybold Vacuum 15 Description Part No Power supply unit plug and play TURBO POWER 300 800100V0002 A O W supplies the TURBO DRIVE 400 with 24 V DC TU O W plug amp play cables TURBO POE Bia 1 Ear W desktop unit or rack mountable r ww oo 24V DC Power cable TURBO DRIVE 400 TURBO POWER 300 1m 800094V0100 3m 800094V0300 5m 800094V0500 10m 800094V1000 20m 800094V2000 Mains cable for TURBO POWER 300 3 m long with EURO plug 80
38. e opera tion of the pump can be ensured The forevacuum line must be tight Hazardous gases can escape at leaks or the gases being pumped can react with air or humidity Fig 2 13 is a schematic diagram of a pump system incorporating a turbo molecular pump and a TRIVAC forevacuum pump with an anti suckback valve A separate safety valve must be provided for oil sealed forevacuum pumps without an anti suckback valve The safety valve prevents oil flowing back from the forevacuum pump into the turbomolecular pump when the system is not running To ensure that the forevacuum space at the turbomolecular pump is kept lar gely free of oil vapors during operation as well we recommend installing an adsorption trap in the forevacuum line Alternatively purge the forevacuum line with inert gas In this case the pressure in the forevacuum line must be over 10 mbar Provide a roughing line to achieve the shortest cycle times Ensure that the pump is sufficiently isolated against vibrations generated by the forevacuum pump Installation Forevacuum pump Warning Safety valve Adsorption trap 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum 25 Installation Fig 2 7 Pump with air cooling 2 6 Connect the cooling Cooling of the pump depends on the required pumping power and the a
39. e overload operation and early detection of a failing pump Standby operation Troubleshooting Slow pressure control by changing the pumping speed Reducing the maximum motor current Starting the pump with a delay if several consumers are connected to the same PSU Frequency converter as a simple pressure gauge since motor current is dependent on the vacuum conditions Lowering the normal operation threshold Benefits to the customer Savings relating to the costs for signalling cables Savings related to repetitive manual work E Precise planning for maintenance E Improved reliability of sensitive production processes in a vacuum li Extending the service life for the ball bearings E Cutting energy consumption Quick analysis of problems Dispensing with a flow controller Cost savings through smaller power supply units if peak loads can be reduced Cost savings through smaller power supply units if peak loads can be reduced Dispensing with pressure gauges Normal operating mode is attained faster processes can be started faster 40 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum How to do it With Field Bus systems like Profibus For example by a control computer Monitoring of W Motor current P5 W Motor temperature P7 W Frequency converter temperature P11 Reducing the rotor s frequency through P24 Reading of error memories P171 P174 and P176 error code speed operatin
40. erter and bus adapter see also P182 Here it is assumed that the respective bus adapters perform a cyclic communication on the USS side so that the respective converter electronics is capable of detecting a communication interruption The bits in parameter 179 represent an equivalent to the control word in the USS protocol The actions linked to these bits are run provided bit 10 in the control word USS protocol for bus adapter is cancelled or if there are interruptions in the communication between converter and bus adapter Here bit 10 is of special significance Bit 10 O The control rights are returned to the next lower priority level All other bits are not relevant Bit 10 2 1 The control rights remain unchanged The actions linked to the other bits are run Resp delay time 0 20 10 ms rw u16 Response delay time Pause time between received and transmitted USS protocol string of the frequency converter s serial interface RS232 and RS485 We recommend not to change the default setting 10ms Watchdog timer USS 0 65535 10 0 1s rw u16 Delay when cancelling the control rights of the bus adapter and time out in the case of a communication interruption Defines the time characteristic when cancelling bit 10 in the control word of the USS protocol or when an interruption in the communication between bus adapter and converter and electronics is detected Handling when cancelling bit 10 or when there is an interruption on the commun
41. essentially the pump housing a multi stage rotor with the stator group and the drive The first section of the rotor is a turbomolecular pump rotor while the second tile represents a Holweck stage The Holweck pumping stage increases the permissible forevacuum pressure level markedly when compared with the classic turbomolecular pump Bearings The rotor shaft runs in two ceramic ball bearings lubricated with grease Motor The pump is driven by a split cage DC motor In this motor the rotor and stator windings are separated by a vacuum tight can Consequently the rotor runs inside the vacuum while the stator is outside the vacuum This eli minates any need of vacuum feedthroughs The pump is equipped with a temperature sensor and a resistor code Cooling Water cooling or an air cooling fan is available as optional equipment The intake flange should be fitted with a wire mesh splinter guard to protect the pump against mechanical damage caused by foreign objects Frequency converter The pump is driven by an electronic frequency converter TURBO DRIVE All functions like for example speed control pump sensing or temperature monitoring are monitored by the TURBO DRIVE This unit is powered by an external power supply The TURBO DRIVE may be installed beside or underneath the pump or up to 5 m away Purge gas connection The pumps are equipped with a purge gas facility The purge gas and venting connection is blanked off by default with a
42. g hours for error Changing the rotor frequency through parameter 24 With P139 motor current reduction factor With P36 delay Monitor motor current P5 second function for Normal Operation relay relay switches as soon as the motor current threshold is tripped Adjust second function P29 Set motor current thresh P27 Reduce frequency threshold through P25 Ei GND Shield 1 0 o 6 1 4 and 6 9 are TxD 2 0 internally connec O RxD 3 0 7 ted and must not ols be used 4 O olg GND 5 o Fig 3 1 Pin assignment for the socket at the frequency converter female SERVICE X5 1 4 and 6 9 are 2 internally connected TxD e and must not be used RxD 3 5 1 GND IN 4 TURBO DRIVE SERVICE X5 Fig 3 2 Providing a RS 232 connection 3 3 1 RS 232 C interface SERVICE X5 Standards Protocol Transmission rate Response delay Address range Max cable length Interface connector 9 pin IBM PC RS 232 interface DIN 66020 acc to VDIAVDE 3689 19200 baud default setting 10 ms parameter 180 non addressable 5m 9 way Sub D type socket on the instrument female thread UNC4 40 Note If on the controlling side an RS 282 interface in accordance with the PC standard with a 9 pin Sub D male connector is present then a straight through cable as shown in Fig 3 2 may be used Refer also to Operating Instructions GA 05 281 Interfaces
43. ication side of the USS bus adapter is the same Value 0 0 Indefinite time delay In this way a change of the control right is inhibited Values 0 1 6553 5 A change in the control right corresponding to the setting of parameter 179 is only effected after the time span defined through parameter 182 has elapsed Max passing time 0 1800 500 S r u16 Max permissible time during which the pump must with the start signal present have passed through the critical speed range between 60 Hz and P20 Converter operating 0 0 0 01 h r u32 Counts the operating hours of the hours 2147483647 converter during active pump operation Warning bits 1 0 65535 0 r u16 Active warnings described bit per bit See Section 3 3 6 Vent on frequency 0 1200 300 Hz rw u16 Frequenoy at which the venting valve shall be Switched on in the event of a mains power failure Power failure venting can be enabled through P240 Vent off frequency 0 1200 5 Hz rw u16 Frequency at which the venting valve shall be Switched off in the event of a mains power failure Power failure venting can be enabled through P240 Generator operation 0 1 0 rw u16 O inactive 1 active 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum No 303 312 315 918 947 Designation Actual operating status Catalog number of converter Product name Index O 10 usable Serial number of converter Index O 10 usable Act Profibus addr Current erro
44. ile vented The pressure in the pump must not exceed 1 2 bar absolute The pump is only intended for use in a vacuum If overpressure may occur in the system you must install a protection device e g an overpressure safety valve Danger of explosion The standard version of the equipment is not suited for operation in explosion hazard areas Contact us before planning to use the pump under such circumstances The high vacuum flange must be firmly mounted to the vacuum chamber If the mounting is not sturdy enough pump blockage could cause the pump to break loose internal pump components could be thrown in all directions Never operate the pump in bench testing for example with out proper flanging to the vacuum chamber Turbopumps as described in the following operation manual contain a high portion of kinetic energy due to their high rotational speed in combi nation with the specific rotor mass In case of a malfunction of the System for example rotor stator contact or even a rotor crash the rotatio nal energy is released To avoid the destruction of the equipment and to prevent injuries of the operating staff the leading European manufacturers of vacuum pumps strictly recommend to follow the installation instructions as given in this manual After a mains power failure the pump can run up automatically once more 1380000761 002 AO0 08 2008 Oerlikon Leybold Vacuum Safety Information Electrical hazards The
45. iled Motor temperature low warning Motor overtemperatu re warning overload warning Supply voltage warning ded overload error Motor undertempera The minimum permissi ble motor temperature is not attained ture error Permanent overload Motor current error Motor temperature sensor error Overspeed error The pump speed has dropped under the nor mal operation threshold Intermediate circuit vol tage too low or maxi mum time for generator operation was excee The pump speed has dropped under the minimum speed The speed of the pump error has dropped below the normal operation thres hold and has stayed there for a longer peri od of time Motor current less than nominal current Motor temperature sen Sor defective Troubleshooting Possible Cause Forevacuum pressure too high Gas flow too high DC supply voltage below 24V Mains voltage has failed Forevacuum pressure too high Gas flow too high Ambient temperature too low Pump cooling too high Forevacuum pressure too high Gas flow too high Cable fault Faulty connector Sensor defective short circuit or broken cable Remedy Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process Check the voltage at the power supply and if required set up cor rectly Remedy the cause for the mains power failure Check the ultimate pressure of
46. iltered oil free air or filte red ambient air may be used filter mesh lt 1m Change the filters after some time at least annually 3 2 Start up The TURBO DRIVE 400 offers the possibility of gently running in pumps which were not operated for a period between 6 and 12 months Before starting set up parameter 119 correspondingly Turbomolecular pumps which were not operated for a period of over 12 months should be returned to us For more information on this please contact your local sales partner 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum 39 Interfaces 3 3 Interfaces The frequency converter has a RS 232 interface as standard SERVICE X5 and is optionally equipped with serial interfaces B RS 485 C B Profibus DP B Ethernet IP The TURBO DRIVE 400 is configured through the parameters according to the parameter list Pxxx denotes parameter value xxx The PC software TURBO DRIVE Server allows convenient access by the user to the parameters of the frequency converter In the case of BETA units simultaneous operation of the RS 232 interface in parallel to the RS 485 interface or the Profibus interface is not yet reliably supported For this reason only one interface at a time should be connected to the unit Applications which can be implemented with the aid of the serial interface Application Networking of several pumps and other equipment Automation Avoidance of warnings and warnings befor
47. ional Trade Co Ltd Shanghai Branch Add No 33 76 Futedong San Rd Waigaoqiao FTZ Shanghai 200131 China Sales and Service Phone 86 21 5064 4666 Fax 86 21 5064 4668 info vacuum sh oerlikon com Service vacuum tjGoerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Guangzhou Office and Service Center 1st F Main Building Science City Plaza No 111 Science Revenue Guangzhou Science City GZSC 510663 Guangzhou China Sales Phone 86 20 8723 7873 Phone 86 20 8723 7597 Fax 86 20 8723 7875 info vacuum gz oerlikon com service vacuum tj oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Beijing Branch 1 908 Beijing Landmark Towers 8 North Dongsanhuan Road Chaoyang District Beijing 100004 China Sales Phone 86 10 6590 7622 Fax 86 10 6590 7607 sales vacuum bj oerlikon com ndia Oerlikon Leybold Vacuum India Pvt Ltd EL 22 J Block MIDC Bhosari Pune 411026 ndia Sales and Service Phone 91 20 3061 60000 Fax 91 20 2712 1571 sales vacuum pu oerlikon com service vacuum pu oerlikon com Japan Oerlikon Leybold Vacuum Japan Co Ltd Headquarter 23 3 Shin Yokohama 3 chome Tobu A K Bldg 4th Floor Kohoku ku Yokohama shi 222 0033 Sales Phone 81 45 47 11 3330 Fax 81 45 471 3323 info vacuum yh oerlikon com sales vacuum yh oerlikon com Oerlikon Leybold Vacuum Japan Co Ltd Osaka Sales Office 5 13
48. k letters Date Signatur of authorised person firm stamp 17200001 002 00 Oerlikon Leybold Vacuum 62 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum Index A Adapter 8 11 17 19 30 46 Adsorption trap 25 31 54 Air cooler 7 9 14 19 21 33 Air cooling 8 10 19 21 26 27 Ambient temperature 9 10 18 26 28 35 48 56 57 Anti suckback valve 25 50 B Bakeout 52 Bearing change 54 Cc Contamination 10 54 59 62 Cooling 6 10 14 19 22 26 29 33 35 36 45 48 56 57 Cooling water 10 22 28 29 D Danger of burns 5 24 50 Danger of ignition 39 Deposits 39 53 Desiccant 8 24 53 Dimensional drawings 12 13 Dripping or spraying water 18 Dust 6 18 23 39 51 54 E Emergency shut down 35 50 F Forevacuum connection 9 22 23 25 Forevacuum pressure 8 9 25 27 48 52 55 57 Forevacuum pump 7 18 25 31 49 50 52 58 Fuse 6 35 G Generator 44 46 48 50 57 H Hazardous gases 5 25 53 Heat sink 16 35 44 High vacuum flange 4 14 22 24 Holweck stage 8 Humidity 5 6 9 10 25 28 39 l nterface 6 14 36 40 50 55 58 L LED 5 6 32 36 38 42 49 51 53 58 M Magnetic field 18 Mains power failure 4 44 50 57 Media 6 18 39 50 Motor temperature 40 44 45 48 56 57 N Nitrogen 30 39 o Overpressure 4 18 30 Oxygen 18 39 P Particles 51 PLC 34 37 Pressure rise 51 Purge gas and venting valve 8 11
49. mbient temperature When the pump is insufficiently cooled it will shut down High gas throughputs cyclic operation or high ambient temperatures will necessitate air or water cooling Air or water cooling can be mounted to the pump see Section 2 3 Part Nos see Section 1 5 Air cooling When installing air cooled pumps within a system ensure that sufficient quan tities of fresh air are freely available The air cooling facility is powered via the pump 26 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum Installation Operation not possible Water cooling 50 I h 35 C Ambient temperature 40 C Air cooling Ambient temperature 25 C Air cooling Ambient temperature 40 C Gas flow in mbar l s 3 0 4 5 6 0 7 5 Forevacuum pressure in mbar For pumps with an ISO K flange and aluminium housing For pumps with a CF flange and in the case of special applica tions please ask us for informa tion Gas flow in mbar l s 6 0 7 5 90 105 12 0 Forevacuum pressure in mbar Fig 2 8 Cooling requirements of the SL 300 1380000761 002 A0 08 2008 Oerlikon Leybold Vacuum 27 Installation Cooling water flow wo e 15 20 25 30 35 40 o 45 Cooling water temperature Fig 2 9 Cooling water requirements Maximum relative humidity 2096 30 4096 45 C 50 40 60 t D lay 5 7096 t 35 2 8096 E
50. n Leybold Vacuum G 1 8 see Section 2 6 6 2W 80 m h 24 V 10 lt 3 0 24V 3 160 W O 1500 Hz 24 V 190W 8ADOC 2 200 W 5m 20 m 42V 0 5A 5 45 C 15 70 C 5 to 85 non condensing I 2 5 55 C 5 50 C lt 20 W IP 20 0 5 kg Description 350 l s 300 250 200 150 Pumping speed 100 50 1 o 1 0 9 1 0 4 1 03 1 0 1 n High vacuum pressure Fig 1 2 Pumping speed curves of the SL 300 Purge gas and venting valve Part No 113 50 800152V0019 Gas flow rate at 1 bar 0 2 mbar s 12 sccm Solenoid valves 2 normally closed Mains supply 24 V DC 230 100 V AC Power consumption 4W 6W Connection to pump DN 10 KF Needed for this Adapter M8 DN10 16KF P N 8001 10V001 1 Including O ring 9 25 x 1 78 and Adapter centering ring DN 10 16 KF with sinter filter Gas connection G1 4 in Recommended for this Adapter with filter including O ring and gasket 8001 10V0012 Dimensions 60 x 65 x 45 mm 61 x 65 x 45 mm 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 11 Description 140 2130 DN ho 1001SO K 181 100CF 183 Air cooler connection Fig 1 3 Dimensional drawings for SL 300 pumps combination examples dimensions in mm 12 130000761 002 AO0 08 20
51. no Start yes no Start yes yes Stop no no Stop yes no Stop yes yes Start no no Start yes no Start yes yes 38 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum Error is Motor no no no no no no yes yes yes yes yes yes Output data Relay Relay drive NORMAL ERROR off off off on on on OPERATION passi passi passi passi passi active passi passi passi passi passi passi ve ve ve ve ve ve passive passive passive passive passive passive active active active active active active LED LED STATUS ERROR green red off off flashes off flashes off off off flashes off green off off red flashes red flashes red off red flashes red flashes red Operating mode Other modes are not possible they indicate a failure affecting the TURBO DRIV Pump not operating Pump is decelerating E 400 Just after stop pump was in the normal operating mode before that Just after start Pump is accelerati ng Pump is in the normal operating mode Error Error Error Error Error is present p is present p is present p is present p ump ump has just occurred ump ump Error has just occurred is at standstill is decelerating is at standstill is decelerating Operation 3 Operation 3 1 Media compatibility purge gas The TURBOVAC SL 300 is suitable for pum
52. no longer green status LED off and with the mains power swit ched off yellow power LED off Otherwise there is the risk of damaging the frequency converter After replacing the pump or when switching on the supply voltage without a connected pump all changed parameter values will be reset to factory defaults The pump must only be opened by such persons who have been author ised by Oerlikon Leybold Vacuum to do so The references to diagrams e g 1 2 consist of the Fig No and the Item No in that order We reserve the right to alter the design or any data given in these Operating Instructions The illustrations are not binding Retain the Operating Instructions for further use 6 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum Description with air cooler and With air cooler and frequency purge gas connection converter mounted to the pump with frequency converter mounted under the pump with water cooling and frequency converter mounted under the pump Fig 1 1 Examples of SL 300 1 Description The TURBOVAC SL 300 is a wide range turbomolecular pump designed to Use evacuate vacuum chambers down to pressure levels in the high vacuum range It is suitable for pumping air and clean gases The TURBO DRIVE 400 frequency converter and a forevacuum pump are required for its operation 1380000761 002 A0 08 2008 Oerlikon Leybold Vacuum 7 Description 1 1 Design The pumps comprise
53. old Vacuum USA Inc 5700 Mellon Road USA Export PA 15632 Phone 1 724 327 5700 ax 1 724 325 3577 ifo vacuum ex oerlikon com ales astern amp Central time zones hone 1 724 327 5700 ax 1 724 333 1217 acific Mountain Alaskan amp awaiian time zones hone 1 480 752 9191 ax 1 480 752 9494 ervice hone 1 724 327 5700 Fax 1 724 325 3577 numcosszm U I nu 1UM Latin America Oerlikon Leybold Vacuum USA Inc Brazilian Office Av D ria 360 cj 12 Campo Belo 04635 070 Sao Paulo SP BRAZIL Sales Phone 55 11 3554 3117 Fax 55 11 3554 3117 Nelson Batistucci oerlikon com Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 O Fax 49 0 221 347 1250 info vacuum oerlikon com Asia P R China Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Beichen Economic Development Area BEDA No 8 Western Shuangchen Road Tianjin 300400 China Sales and Service Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 sales vacuum tjGoerlikon com service vacuum tj oerlikon com Oerlikon Leybold Vacuum Tianjin Co Ltd Beichen Economic Development Area BEDA No 8 Western Shuangchen Road Tianjin 300400 China Sales and Service Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 info vacuum tjGoerlikon com Service vacuum tjGoerlikon com Oerlikon Leybold Vacuum Tianjin Internat
54. onnection thread for the vibration sensor a Forevacuum connection Closure screw for the purge gas connection Power supply of the TURBO DRIVE Connection cable to TURBO DRIVE Fig 2 4 Connection elements 2 4 Attach the pump to the vacuum chamber Do not stand below the pump while connecting or removing it Do not open the packaging until immediately before installation Do not remove the covers and blind flanges on the pump until just before attachment to the equipment to ensure that assembly is carried out under the cleanest possible conditions Never touch the rotor Touching the rotor may cause injury and damage the rotor bearing The high vacuum flange must be solidly mounted to the vacuum cham ber If the mounting is not sturdy enough pump blockage could cause the pump to break loose internal pump components could be thrown in all directions Never operate the pump in bench testing for example without proper flanging to the vacuum chamber If the pump should suddenly seize an ensuing deceleration torque of up to 800 Nm will have to be absorbed by the system To accomplish this the fol lowing is required ISO K flange 6 steel clamps strength at least 8 8 torque 30 Nm CF flange stainless steel screws strength at least A2 70 torque 20 Nm 22 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum Installation Correct Wrong Fig 2 5 Installing the splinter guard In most ap
55. ore information on the Profibus system The New Rapid Way to Profibus DP Manfred Popp Profibus Nutzerorganisation e V Haid und Neu Str 7 76131 Karlsruhe Germany P N 4 072 www profibus com Upon request we shall be pleased to provide detailed information on the hardware and the protocol used for the data Refer also to Operating Instructions GA 05 281 3 3 4 Ethernet IP interface See additional Operating Instructions 17200908 The Operating Instruction will be delivered on a CD with Part No 800073V0007 or can be downloaded from our website 5V e 390 Q For longer cable runs zx Links for activation of the 49 ee ou tormina Bus terminator X5 for longer cable runs 1509 TxD RxD y o e e 8 j i 6 120 Q E ml ee st X5 i 390 Q TxD RxD 7 TURBO DRIVE X5 7 ys 8 X5 7 ys 8 l TURBO TURBO aaa DRIVE DRIVE Master 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 43 Interfaces 3 3 5 Parameter list No Designation Min 1 Converter type 0 2 Software version 0 3 Actual frequency 0 4 Actual intermediate 0 circuit voltage Actual current 0 Actual electrical power O Actual motor 10 temperature 8 Save data command 0 11 Actual converter 10 temperature 16 Motor temperature 0 warning threshold Nominal motor current 5 Maximum frequency 750 Minimum frequency 0 20 Critical frequency 0 23 Pump type 24 Setpoint frequency 0 25 Normal operation 35
56. ping air and clean gases These pumps are not suitable for E pumping liquids or gases containing dust or particulates E pumping corrosive or reactive gases H pumping gas mixtures with an oxygen share of gt 21 96 If reactive gases in low concentrations must be pumped operate the pump with purge gas During normal operation the pressures within the pump will be so low that many gas mixtures will be incapable of igniting But due to pressure bursts Danger of ignition during switching processes or due to malfunctions for example pressures can be attained rendering such gas mixtures ignitable During operation the pump can reach temperatures as high as 110 C 230 F Ignition sparks could occur in case of damage to the pump and these could ignite explosive mixtures We would be glad to consult with you as regards the media which can safely be handled with this unit Install a micropore filter when pumping media which contains dust Suited for venting or purging are all gases Suited gases BI which will not cause corrosion or pitting in aluminium and steel and BI which in connection with process deposits in the pump will not cause cor rosion or sticking For venting and as the purge gas we recommend inert gases like nitrogen or argon The temperature of these gases should be between 5 C and 80 C max relative humidity should not exceed 10 ppm The gas must be clean In individual cases and after consultation also dry f
57. ple checks Are the connections in good working order B Mains connection W 24 V DC cable to the frequency converter Bl Connector cable between the frequency converter and the pump Is the forevacuum pressure sufficient After having removed the cause for the error reset the error message at the TURBO DRIVE Wi n case of errors with error codes 1 to 7 by applying a STOP signal via the Socket REMOTE X1 or the serial interface or by switching the mains power off Wi n case of error code 8 by switching the mains power off The error codes can only be read if a serial interface is present The following table has been provided as a guide when determining the causes of errors 130000761 002 AO0 08 2008 Oerlikon Leybold Vacuum 55 Troubleshooting Error Designation code 1 Overspeed warning 2 Pass through time error 3 not used 4 Short circuit error 5 Converter tem perature error 6 Run up time error T Motor tem perature error 8 Pump error 56 Meaning The actual frequency exceeds the setpoint by over 10 Hz The pump has not rea ched the minimum speed after the maximum run up time has elapsed Overtempera ture at the power output stage or within the frequency con verter The pump has not rea ched the normal opera ting frequency after the maximum run up time The motor temperature has exceeded the shut down threshold Pump couldn t be identi fied or no pump is connected
58. plications the pump is flanged to the high vacuum flange at the apparatus The pump can be mounted and operated in any desired attitude No support is required If nonetheless an additional fastening is requested you can use the 4 boreholes in the pump s bottom If foreign objects could pass from the vacuum chamber into the pump Caution install a wire mesh splinter guard Foreign objects which enter the pump through the intake would cause serious damage to the rotor Damage resulting from foreign objects in the rotor section are excluded from gua rantee coverage Insert the splinter guard so that the surface curvature is at the top and apply some pressure lightly at the rim so that the splinter guard engages If dust could pass from the vacuum chamber into the pump then a micropo re filter must be installed between the vacuum chamber and the pump The pump is precision balanced and is generally operated without a reson Vibrations ance damper To decouple extremely sensitive equipment and to prevent transfer of external vibrations to the pump a special resonance damper is available for mounting at the high vacuum flange If several pumps are to be mounted to a system you must consult our Applications Dept in order to prevent that the pumps will be excited by vibra tions by each other Besides the forevacuum connection it is possible to connect a vibration sen sor thread M8 9 3 mm deep 130000761_002_A0 08 2008
59. pump must only be connected to power supplies which meet the requirements for functional extra low voltages with positive isolation in accordance with IEC 364 or local regulations SELV The OEM power supply unit must only be connected by qualified electrical personnel Unplug any connectors only when the mains voltage is switched off and the pump does no longer turn the green LED is off When the connector cable is attached the outputs at the frequency con verter are not free of voltage Qualified personnel Qualified electrical personnel in this instruction manual means a person who has received electrical engineering instruction or is an electrical expert in accordance with EN 60204 Part 1 3 30 respectivly 3 55 Thermal hazards During operation the pump can become so hot that there is a danger of burns 70 C 158 F Provide protection against contact with the hot components Hazards caused by materials and substances The forevacuum line must be tight Hazardous gases can escape at leaks or the gases being pumped can react with air or humidity If the pump has previously handled hazardous gases implement the pro per precautionary measures before opening the intake or exhaust connec tion 22 If necessary use gloves a respirator and or protective clothing and work under an exhaust hood Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any p
60. r number Min Interfaces Max Default Unit r w Format Description 65535 0 r 127 CHAR r 8000xxVOOOXx 127 TD 400 CHAR r 127 CHAR f 127 CHAR f XXXXXXXXXXX 65535 0 r 65535 0 r u16 Bit 0 Normal operation Bit 1 Ready for switch on Bit 2 Speed is increasing Bit 3 Speed is dropping Bit 4 Generator operation Bit 5 Standby Bit 6 reserved Bit 7 reserved Catalogue number of the converter One ASCII char per index Product name of the converter One ASCII char per index Only for DeviceNet purpose Serial number of the converter One ASCII char per index Active Profibus address Currently pending error See Section 5 Troubleshooting 130000761 002 A0 08 2008 Oerlikon Leybold Vacuum 47 Interfaces 3 3 6 Warning codes for parameter 227 P227 Bit 0 4 5 7 8 9 10 11 12 18 14 15 48 Designation Motor temperature warning Converter tempera ture warning not used Motor under temperature warning not used Overspeed warning not used Overload warning not used Power supply voltage warning Fan voltage has failed Meaning The motor tempera ture has passed the warning threshold Overtemperature at the power output stage or within the fre quency converter The minimum permis sible motor temperatu re warning threshold is not reached The pump speed has dropped under the normal operation threshold Supply voltage f
61. rption trap is used regenerate or renew the adsorption agent regularly refer to the operating instructions provided with the trap The frequency converter is maintenance free 4 1 Cleaning If required clean the turbomolecular pump of dust with a dry cloth 4 2 Oerlikon Leybold Vacuum Service Whenever you send us in equipment indicate whether the equipment is con taminated or is free of substances which could pose a health hazard If it is contaminated specify exactly which substances are involved You must use the form we have prepared for this purpose A copy of the form has been reproduced at the end of these Operating Instructions Declaration of Contamination for Compressors Vacuum Pumps and Components Another suitable form is available from www oerlikon com Oerlikon Leybold Vacuum Documentation Download Documents Attach the form to the equipment or enclose it with the equipment This statement detailing the type of contamination is required to satisfy legal requirements and for the protection of our employees We must return to the sender any equipment which is not accompanied by a contamination statement 130000761 002 AO0 08 2008 Oerlikon Leybold Vacuum Troubleshooting 5 Troubleshooting When the connector cable is attached the outputs at the frequency con Warning verter are not free of voltage Before you start searching for the source of the problem you should carry out a few sim
62. tection Ambient temperature Magnetic field Radiation shield Places of installation 2 Installation 2 1 Conforming utilization The TURBOVAC SL 300 is a wide range turbomolecular pump designed to evacuate vacuum chambers down to pressure levels in the high vacuum range It is suitable for pumping air and clean gases The TURBO DRIVE 400 frequency converter and a forevacuum pump are required for its operation These pumps are not suitable for E pumping liquids or gases containing dust or particulates E pumping corrosive or reactive gases E pumping gas mixtures with an oxygen share of gt 21 96 E operation without a forevacuum pump f reactive gases in low concentrations must be pumped operate the pump with purge gas Install a micropore filter when pumping media which contains dust The pressure in the pump must not exceed 1 2 bar absolute The pump is only intended for use in a vacuum If overpressure may occur in the system you must install a protection device e g an overpressure safety valve 2 2 Operating environment The maximum permissible ambient temperature is 35 C Do not expose the pump or the frequency converter to dripping or spraying water The pump must not be installed within a magnetic field The rotor must not be exposed to hot surfaces above 100 C Install an opti cal radiation shield if required Places of installation up to 1000 m above sea level 3300 ft are possible without restrictions At
63. ting will only be effective after the power supply has been switched off and on Bearing run in 0 1 0 rw u16 O deactivated function 1 new pump type starts with run in sequence Run in using the run in sequence specified through the pump table without run up time monitoring Run in Run in Run in Run in Run in Run in speed 1 time 1 speed2 time2 speed3 timeG3 Hz s Hz s Hz s 200 3600 430 5400 580 5400 Normal TMS 20 70 40 C rw u16 Switch on temperature for fan when P29 0 23 For P125 gt P122 the normal operation relay is energised Motor temperature 10 150 0 C r i16 like P7 Bearing temperature 10 150 60 C r i16 not used for SL 300 warning threshold Motor temperature 10 150 0 C r i16 like P7 Motor temperature 10 150 2 C r i16 Falling below the motor temperature lower warning lower warning threshold threshold results in a warning Motor temperature 10 150 10 C r i16 Falling below the motor temperature lower error threshold lower error threshold causes the pump to be switched off Bearing temperature 10 150 67 C r i16 not used for SL 300 error threshold Motor temperature 10 150 56 C r i16 Exceeding the motor temperature error threshold error threshold causes the pump to be switched off Enable cooling fan 0 19 19 rw 116 O Cooling fan off on turbopump 19 Cooling fan on Current reduction 30 100 100 96 rw u16 Is used for the reduction of the factor maximum consumption current
64. tion Purge gas connection Type of protection Noise level Ambient temperature during operation water cooled pump during operation air cooled pump storage Max rel air humidity Purge gas flow Purge gas Description SL 300 DN 100 ISO K DN 100 CF 270 s 260 ls 255 Is 190 Is lt 10 19 mbar lt 8 10 10 mbar 4 10 mbar lt 8 mbar 5 2 kg 5 8 kg 6 3 kg 6 1 kg 7 4kg D2 5E SC 5 SC 15 2 5 VT D8B 60 000 min approx 4 min 115 W 18W DN 16 KF M8 or DN 16 KF IP 20 lt 49 dB A 15 35 C 15 30 C 15 70 C 95 non condensing 12 sccm 0 2 mbar Is Nitrogen Argon or similar 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 9 Description Option water cooling Cooling water connections Cooling water data Option air cooling Power consumption Volume flow TURBO DRIVE 400 Supply voltage Residual ripple Output Voltage Power Frequency When operating a SL 300 Nominal voltage Max power consumption Max peak current input side Required power output from the power supply Max length of the DC cable shielded at 3 x 1 5 mm2 at 3 x 2 5 mm2 Relay output rating Ambient temperature during operation storage Relative air humidity Overvoltage category Contamination grade Temp of the cooling surface For Part Nos 800073V0004 07 Power consumption Type of protection Weight approx 10 130000761 002 AO 08 2008 Oerliko
65. ultimate pressure which is too high Frequency parameters program med wrongly Pump has been started via the serial interface the interface con trols the pump Shut down Remedy Check cables and power supply Ensure correct polarity of the DC cable Replace frequency converter The following may damage the freq converter li Disconnection of the DC cable while the pump was still rotating li Non compliance with the note related to connecting several pump to a single power supply The pump can continue to no run as long as operation limits are only exceeded for a short time In case of longer exceeding send pump and frequency conver ter to the OLV service Use USS protocol Connect bus as shown in Section 3 3 Connect as shown in Fig 2 19 Connect correctly Set address between 0 and 126 Balance the rotor no Replace the bearing Inspect the measurement sensor no Clean or replace the sensors Check for leaks Clean the pump Check the ultimate pressure of the forevacu um pump and install a higher capacity vacu um pump if necessary Check parameters Disconnect the DC supply or connect serial no interface and stop via bus 130000761 002 AO0 08 2008 Oerlikon Leybold Vacuum Disposal 6 Waste disposal The equipment may have been contaminated by the process or by environ Contamination mental influences In this case the equipment must be decontaminated in accordance with the
66. ure warning threshold results in a warning Maximum permissible motor current Highest permissible frequency Lowest permissible frequency Minimum frequency level When the pump is accelerating this frequency must be reached within the maximum passing time P183 6 SL 300 Setpoint of the rotor frequency Setpoint of the frequency dependent normal operation level Motor current dependent normal operation level If P29 0 1 Defines the normal operation level Normal operation if P5 lt P27 Parameter cannot be changed during operation of the system If required special functions can be assigned to the normal operation and the error relay o mains power failure or no generator operation P303 Bit 4 1 generator operation No 32 36 37 119 122 125 126 127 128 181 132 133 134 139 140 150 151 Interfaces Designation Min Max Default Unit r w Format Description Max run up time 30 2000 720 S rw u16 Max permissible time during which the pump must attain the normal operation threshold P24 P25 with the start signal present Start delay time 0 255 O 01min r w u16 Delays the start of the pump to allow lead time for the fore vacuum pump for example RS485 address 0 31 0 rw u16 Parameterizable RS485 address The address is specified either through the address switch or a value entered here provided the address switch is set to O A change of this parameter set
67. ybold Vacuum GmbH Mobil Customer Service Emil Hoffmann Strasse 43 D 50996 Cologne Suerth Phone 49 0 221 347 1765 Fax 449 0 221 347 1944 service vacuum knQGoerlikon com Oerlikon Leybold Vacuum Dresden GmbH Zur Wetterwarte 50 Haus 304 D 01109 Dresden Service Phone 49 0 351 88 55 00 Fax 449 0 351 88 55 041 info vacuum drGoerlikon com 08 08 Oerlikon 5700 Mellon Road USA Export PA 15632 Fax LV 09786 2008 Europe Belgium Oerlikon Leybold Vacuum Nederland B V Belgisch bijkantoor Leuvensesteenweg 542 9A B 1930 Zaventem Sales Phone 32 2 711 00 83 Fax 432 2 720 83 38 sales vacuum zv oerlikon com Service Phone 32 2 711 00 82 Fax 432 2 720 83 38 service vacuum zv oerlikon com France Oerlikon Leybold Vacuum France S A 7 Avenue du Qu bec Z A Courtaboeuf 1 B P 42 F 91942 Courtaboeuf Cedex Sales and Service Phone 33 1 69 82 48 00 Fax 33 1 69 07 57 38 sales vacuum or oerlikon com Oerlikon Leybold Vacuum France S A Valence Factory 640 Rue A Berg s B P 107 F 26501 Bourg l s Valence Cedex Phone 33 4 75 82 33 00 Fax 33 4 75 82 92 69 info vacuum vcGoerlikon com Great Britain Oerlikon Leybold Vacuum UK Ltd Unit 2 Silverglade Business Park Leatherhead Road UK Chessington Surrey KT9 2QL Sales Phone 44 13 7273 7300 Fax 44 13 7273 7301 sales vacuum InGoerlikon com Service Phone 44 20 8971 7030 Fax 44 20 8971 7

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