MTN User Manual - Newport Corporation
Contents
1. Direction 4 In the above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage 5 5 Sensor Position Home Position Origin at Center of Travel Range EOR Limit UU Mechanical Zero Index Pulse Index Pulse a Stage Travel Range Motion Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source QD Newport Experience Solutions 9 EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages EDH0348En1021 07 15 Encoder Phase A Encoder Phase Encoder Phase B Encoder Phase B Feedback Signal Position 200000 Direction EJ2. 20 0 Direction Direction Motion gt Direction The incremental sensor consists of a optical scale an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Encoder Phase B 4 Pin 20 Newport User Stage Encoder Phase mes l Encoder Phase A ones gt 4 gt Encoder Phase Pin 24 Output Signals Index Pulse Phase Pin 15 i Index Pulse Phasel Pin 25 ndex Pulse Phase gt Pin 21 A 5 V 5 Encoders I e T 150 mA max amp Sensors 0v Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 261 531 or MC3487 Reception circuits to use are 26LS32 or MC3486 Newport 1 0 Experience Solutions Series Mid Travel Steel Linear Stages 5 7 Pinouts The 25 pin Sub D connection for the MTN stages is given in the following table MTN PP amp MTN PPV6 MTN CC UE56PP amp UE56PPV6 UE40CC 1 Phase 1 1 N C 2 Phase 1 2 N C 3 Phase 1 3 N C 4
3. CY Newport Experience Solutions 2 1 EDH0348En1021 07 15 NNevvport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
4. Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts QD Newport EDH0348En1021 07 1 5 1 2 Experience Solutions Series Mid Travel Steel Linear Stages 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up wit
5. MTN Series Mid Travel Steel Linear Stages PRENTAN C ed Compliant CN USER S MANUAL Nevvport Experience Solutions Precision Motion Guaranteed Series Mid Travel Steel Linear Stages Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used X A EDH0348En1021 07 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from Incorrect usage Load on the stage greater than ma
6. Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment except vacuum compatible versions CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 Storage temperature 10 to 40 in its original packaging Vacuum compatible versions can be steamed at 60 CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year QD Newport EDH0348En1021 07 15 viii Experience Solutions Series Mid Travel Steel Linear Stages Mid Travel Steel Linear Stages MTN Series m Introduction This manual pr
7. Phase 1 4 N C 5 Phase 2 5 Motor 6 Phase 2 6 Motor 7 Phase 2 7 Motor 8 Phase 2 8 Motor N C 9 N C oof 10 N C 10 N C e 11 N C 11 N C 12 N C 12 N C S 13 Mechanical Zero 13 Mechanical Zero E 14 Ground 14 Ground T e 15 Index Pulse I 15 Index Pulse 1 M 1g 16 OV 17 End of Run 17 End of Run 18 End of Run 18 End of Run 19 N C 19 Encoder Phase A 20 N C 20 Encoder Phase B 21 N C 21 5 Encoder 22 0V 22 0 V Encoder 23 N C 23 Encoder Phase A 24 N C 24 Encoder Phase B 25 Index Pulse 25 Index Pulse I CY Newport Experience Solutions 1 1 EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages m Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required
8. js 4 HOLES M4 THD 4 HOLES M6 THD ON SQR 2 48 63 lt gt DEPTH 31 8 ON SOR 1 34 34 C BORED FOR CAPTIVE SCREWS Imi x imal 60 rH Y Y fee YO 1 57 40 640 gt EUR 1625 lt IL A 10 56 AS 1 236 972 60 Y 9 Y 205 2 HOLES 0 41 10 5 ACCESS FOR MOUNTING lt L2 gt SUB D25M CONNECTOR TO BODY ON SOR 1 98 50 4 MODEL SHOWN MTN200PP TO BODY ON SOR 2 48 63 DIMENSIONS IN INCHES AND MILLIMETERS BOTH SIDES BOTH SIDES 4 HOLES M6 THD DEPTH 31 8 HOLE M5 THD DEPTH 39 10 FOR ACCESSORIES AND HANDLING FOR GROUNDING lt _ 083 54 y 90 9 9 9157 _ mE lt Y y eue 40 7 Toss 7 20 i B gt 13 RES B STEPPER MOTOR DRIVE lt gt lt 5 12 130 P gt lt 5 87 149 gt HOLES 0 41 10 5 4 HOLES 0 30 7 5 FOR MOUNTING ACCESS FOR CAPTIVE SCREWS ON SOR 1 97 50 AND SOR 2 00 50 8 TO CARRIAGE ON SOR 2 48 63 4 HOLES M6 THD 4 HOLES 0 30 7 5 DEPTH 39 10 ON SOR 5 04 128 FOR MOUNTING ON 08 2 48 63 DCMOTOR DRIVE x o Om E 27 a i 9 Y md E uM 1 97 2 00 543 0 94 50 50 8 E 138 24 2 La ds 42 o Kos 5 k 42 IT fs e L 4 9 9 L L i UT 4 HOLES 4 HOLES FOR 6 SCREWS FOR 1 4 20 SCREWS 3 86 98 gt E D HC 430 119 5
9. 87 200 C BORED 9 43 26 11x6 5 d 4 39 a ce p ZA C BORED 0 43 x 26 11x6 5 em A i 2 HOLES 0 47 12 d SQR 8 66 2 48 63 SPACING 220 mn L od m E 4 HOLES 0 26 6 6 ON 6 0 8 0 152 4 203 2 C BORED 0 43 x 26 116 5 NOTE For an XY assembly the lower stage must be equipped with a MTN base plate It also allows to fasten the stage to an interface with an imperial hole pat tern 9 3 MTN TP Top Plate This MTN TP top plate is necessary if you need an interface with an imperial hole pattern It must be to ordered separately 21 IS 1 4 20 THD 1 00 25 4 SPACING Z gt ap e y em e Y 2A e 47 12 em EUIS ls 084 gt 19 e 9 9 EF 120 i e o 9 3 4 HOLES 0 26 6 6 ON SQR 2 48 63 C BORED 43 26 11x6 5 QD Newport EDH0348En1021 07 15 18 Experience Solutions Series Mid Travel Steel Linear Stages 10 0 Maintenance 10 1 10 2 10 3 QD Newport Experience Solutions RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The MTN stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The MTN stage must be used
10. Angle by Step RMS Current Resistance Inductance Newport per Phase Q mH Utilization UE56PP 1 8 1 8 0 94 4 Micro Step UE56PPV6 1 8 1 25 0 8 2 9 Micro Step 5 2 Command Signals for the Stepper Motor Command Signals UE56PP amp 1 2 3 4 Phase 1 0000 6 Direction e e e 250 2 Phase 3 Direction Phase4 Direction Displacement Direction UE56PPV6 Characteristics Winding Temperature in Vacuum Environment at 20 m EST m operation Only High Vacuum Motor Continuous g Operation Possible 0 10 20 30 40 50 60 70 80 Continuous Operating Time mn Recommended Settings Nominal Current 48 V 400 rpm 1 2 Nominal Current 48 V 400 rpm Cooling Down Cooling Down 5 3 DC Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Voltage V Current Current 9 mH UE40CC 48 3 5 1 16 0 33 EDH0348En1021 07 15 Newport Experience Solutions Series Mid Travel Steel Linear Stages 5 4 Command Signals for the DC Motor Motor v Motor v Motor v po Displacement Direction Direction lt Displacement Motor v G00 P Direction eee E
11. MODEL B C D 12 MTN100CC 2 95 75 2 20 56 1169 297 5 94 151 MTN100PP 3 03 77 MTN200CC 3 54 90 4 69 119 3 94 100 6 00 1524 15 63 397 7 91 201 MTN200PP 3 62 92 MTN300CC 3 54 90 6 14 156 9 84 250 8 00 203 2 19 57 497 9 88 251 MTN300PP 3 82 92 GO Newport Experience Solutions 15 EDH0348En1021 07 15 Mid Travel Steel Linear Stages 8 2 MTN PPV6 Stages c 2 68 gt 4 HOLES M4 THD 9 HOLES M6 THD 68 DEPTH 31 8 ON SQR 1 34 34 DEPTH 39 10 98 25 SPACING gt Le 39 4 HOLES 0 26 6 6 4 HOLES M6 THD ON SQR 2 48 63 10 ON 6 0x8 0 152 4 x 203 2 C BORED FOR CAPTIVE SCREWS C BORED 9 43x 26 11x6 5 4 HOLES 0 26 6 6 ON SOR 7 87 200 C BORED 9 43x 26 11 5 OO M m i B E H Gq f Seq 5 Vt 6 40 E Z 5 1 2 162 5 H PDT ha 1 0 1 anes 82 9 toe 2 0 Pa Ol 4 EN 11 joo I SUB D25M CONNECTOR 244 2 HOLES 0 41 10 5 62 gt ACCESS FOR MOUNTING lt 12 gt TO BODY ON SOR 1 98 50 4 2 HOLES 9 41 10 5 ACCESS FOR MOUNTING TO BODY ON SOR 2 48 63 MODEL SHOWN MTN200PPV6
12. Step Drive Used in stepper motors where one pulse from the driver corresponds to a fraction of the motor s full step Full Step Drive Used in stepper motors where one pulse from the driver corresponds to a motor s full step Stepper Motor Performance Specifications Speed Mot nme otor MTN PP 40 UE56PP MTN PPV6 20 UE56PPV6 4 2 DC Servo Drive Version The DC motor driven configuration has a resolution of 0 2 pm DC Motor Performance Specifications Resolution Speed Mot otor pm mm s MTN CC 0 2 100 UEA0CC D 20 mm s max for vertical usage see curve below MTN CC Vertical Stage 20 Speed mm s 20 40 60 80 100 120 140 160 180 200 Vertical Load N Newport Experience Solutions 7 EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages mn Motor 5 1 Stepper Motor Characteristics Motor
13. DIMENSIONS IN INCHES AND MILLIMETERS BOTH SIDES 4 HOLES M6 THD DEPTH 31 8 FOR ACCESSORIES AND HANDLING BOTH SIDES HOLE M5 THD DEPTH 39 10 FOR GROUNDING 08 3 54 90 Es Y 1 18 30 lt alls 60 my PA 27 gt lt gt lt 5 16 131 4 6 SCREWS ON SOR 5 04 128 ON BODY STAGE 4 HOLES M6 THD DEPTH 39 10 HOLES 9 41 10 5 ACCESS FOR CAPTIVE SCREWS TO CARRIAGE ON SOR 2 48 63 m m O Q MODEL A B L1 12 MTN100PPV6 3 03 77 2 20 56 11 69 297 5 94 151 MTN200PPV6 3 62 92 4 69 119 15 63 397 7 91 201 MTN300PPV6 3 62 92 6 14 156 19 57 497 9 88 251 EDH0348En1021 07 15 dette D MM NOTE gt SOR 8 66 08 2 36 220 60 joo Y The base plate must be removed of the upper stage for an XY assembly with MTN PPV6 stages or in a Z mounting with the EQ160 bracket 16 CY Newport Experience Solutions Series Mid Travel Steel Linear Stages m Accessories 9 1 EQ160 Brackets The EQ160 right angle brackets to order separately
14. ar errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrolog
15. can be used for vertical mounting configurations of an MTN stage 47 12 p SB 3 86 198 SOR 3 94 NEN 100 O 2 4 HOLES 026 66 Y LLI e9 O41 C BORED 0 43 x 25 116 4 gt SOR 248 63 lt 2x9 HOLES M6 THD eH gt 98 2 5 SPACING BORED 9 43x 25 11x6 4 FOR FIXING ILS STAGES FOR FIXING MTN OR MTM STAGES E 236 9 r 9 po so 9 128 5 04 6 o BOTH SIDES os 504 3 Hc M5 SCREWS o 128 y FOR SETTING Ej __ THE SQUARENESS r 9 MINSM ON AND MTM STAGES 728 136 Y BEP S LH 345 A rt 128 200 200 4 ol o o o R 7 13 NM v y 181 i Q MTN100 i 1 6 14 156 417 4 72 3 54 106 120 80 12 Y Y Toe lt 449 114 lt 6 50 165 gt E 6 57 167 gt 7 44 189 gt The base plate of a MTN PPV6 stge must be removed for a vertical mounting with the EQ160 bracket QD Newport Experience Solutions 17 EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages 9 2 MTN BP Base Plate The MTN BP base plate must be to ordered separately except MTN PPV6 stages 4 HOLES 9 26 6 6 ON SQR 7
16. chanical Zero lin Max 10 mA V max 30 V If the Mechanical Zero output is not used a 1 0 25 W resistor must be connected between pins 13 and 21 Newport Stage 258 v End of Run ln max 16 mA V max 5 6 V Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 EDH0348En1021 07 15 14 Newport Experience Solutions Series Mid Travel Steel Linear Stages Dimensions 8 1 MTN CC and MTN PP Stages 9 HOLES M6 THD DEPTH 39 10 98 25 SPACING
17. echanical Specifications 5 3 3 Load Specification Definitions eeeeeereee eene nennen nne tnnt 5 3 4 Load Characteristics and Stiffness sse 5 3 5 Stage Weights cccsscssscssssecssessecsecssecsecsscssecssessecsesssecsecseeseesssesseeeeees 6 40 Drive 7 4 l Stepper Drive Versions ERE 4 2 DC Servo Drive 101 7 D 8 5 1 Stepper Motor Characteristics essere 8 5 2 Command Signals for the Stepper 8 5 3 DC Motor Characteristics sess 8 5 4 Command Signals for the DC Motor esses 9 bib Sensor 9 5 6 Feedback Signal Position 10 aA 11 6 0 Connection to Newport Controllers 12 6 1 Warnings on Controllers etos 12 6 2 Connection ei P EE VERRE EE RR WE EE e RR 13 SEED e 13 7 0 Connection to Non Newport Electronics 14 TE COBBECHODS1 E E iain doa ci 14 QD Newport Experience Solutions iii EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages EDH0348En1021 07 15 8 0 Dim
18. ensions 44 nnne 15 8 1 MTN CC and MTN PP Stages sss eene nennen 15 8 2 IMTNEPPV6 Stages iano OEN S 16 9 0 reete 17 9 1 EOI60 Bracket ente EGER N 17 9 2 MIN BP Base Plate deiecti 18 9 3 MTINETP Top Plate eh i ener terr nre ven dos 18 10 0 Maintenance certet 19 Maintenance eei D epe eeu devas t 19 10 2 REDA aee tee degeret ree nr nee eed E pr E EX EAR EN 19 LOS 19 Service 21 CY Newport iv Experience Solutions Series Mid Travel Steel Linear Stages EC Declaration of Conformity PSO 60 ONG fe S NS e A L3 CN K SS SUN AS QU OS QU ONG x NAT dee NA QD Newport Experience Solutions COSAS COS PSOPSOPSO 52 Series EC Declaration of Conformity following Annex II 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du bois sauvage F 91006 Evry FRANCE Hereby declares that the machinery Description MTN Function Mid Travel Steel Linear Stages Models MTN100 200 300 CC PP PP V6 the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France compl
19. h the supplied cable assemblies NOTE Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion system quickly and safely ESP These stages are ESP compatible Enhanced System Performance is COMPATIBLE 6 3 Cables our stages are delivered equipped with a MCAB 3 3 meter cable with a SUB D25M connector so they can be directly connected to our controllers drivers lt 2 28 58 gt DISCONNECTED LOCKING gt KNOBS CABLE CONNECTOR STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING lt STATIC CABLE gt 1 50 38 CABLE IN MOTION gt 3 78 96 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MCAB 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D25 connectors They are available in 5 m MCAB 5 7 m MCAB 7 or 10 m MCAB 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk CY Newpo
20. ies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director V EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially danger
21. include opposing single row bearings a lead screw and a precision nut The nut design includes anti backlash preloading and a sophisticated decoupling system ensuring little to no carriage movement The non migrating ball cage design prevents any ball cage drift particularly in vertical applications 2 1 Design Details Base Material Stainless Steel Bearings Linear ball bearings with anti cage migration Drive Mechanism Backlash compensated leadscrew Drive Screw Pitch 4 mm Feedback CC 20 000 cts rev PP No encoder Limit Switches Optical Origin Optical centered Vacuum Compatibility MTN PPV6 version to 105 hPa Cable 3 m included for ambient environment only NOTE This product complies with the RoHS directive Restriction of Hazardous Substances RoHS Compliant QD Newport Experience Solutions 3 EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages m Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Line
22. oad Q Maximum cantilever load a stage can move Cz 1 D 100 D Cantilever distance Load Characteristics and Stiffness MTN PP amp MTN CC MTN PPV6 Cz Normal centered load capacity on bearings 1000 N Cx Direct load capacity on X axis 200 N 50N Cx Inverse load capacity on X axis 21N Compliance in roll 4 urad Nm kay Compliance in pitch 6 prad Nm kaz Compliance in yaw 5 yrad Nm 0 Off center load where D Cantilever distance in mm Q Cz 1 D 100 REMARK For MTN PPV6 vacuum compatible stages to 105 hPa the max speed have to be divided by two and the CX axial load capacity is limited at 50 N 5 EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages 3 5 Stage Weights Weights indicated in the table below are average values Weight Ib kg MTN CC MTN PP MTN PPV6 MTN100 22 05 10 0 23 59 10 7 31 31 14 2 MTN200 21 12 12 3 28 66 13 0 36 38 16 5 MTN300 32 19 14 6 33 73 15 3 41 45 18 8 NOTE For a XY assembly with 2 MTN PPV6 stages reduce by 8 16 Ib 3 7 kg corresponding to the weight of the removed base plate of the upper stage QD Newport EDH0348En1021 07 15 6 Experience Solutions Series Mid Travel Steel Linear Stages m Drive 4 1 Stepper Drive Versions This version is not equipped with an encoder The micro step 0 1 pm is equivalent to 1 200 of the full step 20 pm Micro
23. or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your MTN stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your MTN stage to Newport once a year for recalibration to its original specifications 19 EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages QD Newport EDH0348En1021 07 15 20 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems
24. ous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user QD Newport EDH0348En1021 07 15 vi Experience Solutions Series Mid Travel Steel Linear Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request re
25. ovides operating instructions for the stage that you have purchased in the MTN Series e MTN PP e MTN PPV6 MTN CC D REMARK Vacuum compatible stages to 10 hPa In this case the max speed have to be divided by two and the CX axial load capacity is limited at 50 N MTN CC linear stages RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the MTN stage MTN200PP linear stage GO Newport Experience Solutions 1 EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages ria MTN300PPV6 linear stage ATTENTION Before the first use of your stage it is essential to remove MINPP amp MIN CC The clamping bracket of the carriage and the handling straps MIN PPV6 The clamping bracket of the carriage NOTE Keep removed components in order to re use them during a next transportation of the stage AD Newport ce Soluti EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages n Description The MTN Series linear stages are durable all steel construction linear stages with excellent stiffness load capacity and thermal stability They are available in DC and Stepper motor versions and are ideal for applications that require moving heavy loads with sub micron precision MIM Available up to 300 mm of travel MTN stages can bear up to 100 kg with an axial load capacity of up to 200 N Features
26. pairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit CY Newport Sons vii EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages Cautions CAUTION
27. rt Experience Solutions 13 EDH0348En1021 07 15 Series Mid Travel Steel Linear Stages El Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a MTN translation stage when it is used with non Newport controllers WARNING Newport guarantees compliance of the translation stages only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a MTN stage is used with non Newport controllers Sub D25 male Connector Connector Cap Connection UE56PP amp UE56PPV6 N C 222 Phase 1 Phase 1 Phase 1 Phase 1 2 2 Phase 2 Phase 2 Ground OV Mechanical Zero 1 N C Index Pulse I Index Pulse 1 End of Run 2 End of Run 2 N C 0v Connector Cap Connection UE40CC z o 2222 222 E020 Motor Motor Motor Motor Ground 0v Mechanical Zero Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B Index Pulse I Index Pulse 1 End of Run 2 End of Run 2 5 V Encoder 0 V Encoder Connector Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Me
28. ximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions Series Mid Travel Steel Linear Stages Table of Contents ii EC Declaration Of CONIOrmi v Definitions and Symbols 2 e hn e ERE ERREUR AE ERE FEES NUTS vi vii IC enire a M S viii 1 0 Introduction 71 sse 1 2 0 DESCFIDIOSB elatus 3 21 Design Details 1 2 ie RI PREFERITI EE HEL EI EAE Ra ies 3 3 0 Characterislics eeeen etre etos 4 Sil FRE ERE 4 3 2 M
29. y tutorial section in the Newport catalog or at www newport com QD Newport EDH0348En1021 07 15 4 Experience Solutions Series Mid Travel Steel Linear Stages QD Newport Experience Solutions 3 2 Mechanical Specifications MTN CC MTN PP MTN PPV6 Travel Range mm 100 200 300 inimum Incremental Motion um 0 6 MTN PP 0 1 MTN PPV6 0 4 Uni directional Repeatability um 1 5 Bi directional Repeatability 3 0 or 1 5 5 5 or 2 75 On Axis Accuracy 5 or 2 5 Travel 300 6 or 3 Speed mm s 100 No load 40 20 Pitch rad 9 40 or 20 Yaw 2 urag 9 35 or 17 5 3 3 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown for the definition of typical specifications which are about ZX better than the guaranteed values 2 For 100 mm travel 3 To obtain arcsec units divide mrad value by 4 8 With the PPV6 version the maximum speed is reduced by a factor of two CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered L
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