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M450_01 TSC

1. SECS GEM 11 8 5 VARIABLE DATA COLLECTION 11 8 5 1 Host Requests Report Step SECS Direction Description Message 1 56 19 gt Host requests data variables contained in report RPTID 2 56 20 gt Equipment responds with list of variable data for the given RPTID if the RPTID exists Else an empty list is returned 11 8 5 2 Host Requests Equipment Status Report Step SECS Direction Description Message 1 S1F3 H gt E Host requests report of selected status variables VIDs 2 51 4 gt Equipment responds with the requested status variable data 11 8 5 3 Host Requests Equipment Status Variable Name list Step SECS Direction Description Message 1 S1F11 gt Host requests Equipment to send descriptions name of selected status variables SVs 2 51 12 gt Equipment responds with the requested status variable descriptions 11 8 5 4 Host Sends Equipment Constants Step SECS Direction Description Message S2F15 gt Host requests change of Equipment Constants ECs 2 S2F16 gt Equipment responds with the requested status variable descriptions 11 8 5 5 Host Equipment Constants Request Step SECS Direction Description Message 1 S2F13 gt Host requests value of Equipment Constant s ECs 2 S2F14 gt Value of Equipment Constant s 11 8 5 6 Host Equipment Constant Namelist Request Step S
2. SECS GEM lt L NoOfVids lt 10000 lt V 1 SV gt gt gt Answet S6F2 Direction E gt H Exception A zero length STIME means no value is given and that the time is to be derived from SMPLN along with knowledge of the request 11 7 6 3 S6F2 Trace Data Acknowledge Description Acknowledge or error on Trace Report Structure lt ACKC6 gt Answer 5 Direction gt Exception 11 7 6 4 86 5 Multi block Data Send Inquire Description Request a multi block message transmission Only for S6F11 Structure L 2 lt DATAID gt lt DATALENGTH gt gt Answet S6F6 Direction E gt H Exception 11 7 6 5 S6F6 Multi block Grant Description Grant or reject permission to send multi block message Structure lt 1 GRANT6 gt Answer Direction E lt gt H Exception 11 7 6 6 S6F11 Event Report Send Description Sending of a defined linked and enabled group of reports from the Equipment to the Host on the occurrence of an event Structure lt L 3 lt DATAID gt lt V 1 CEID gt lt L NoOfReports lt 1000 lt 1 21 lt V 1 RPTID gt 5 USER MANUAL 11 44 TEMPRESS SECS GEM L NoOfValues lt 1000 lt VI gt gt gt gt gt Answet S6F12 Direction E gt H Exception If there are no reports linked to the event
3. Setup Serialnr z DPC Setup Configuration Messages DTC Paddle PF Calibration Calibration Value Al Pressure Temperature 211 Zn2 Zn3 RES aaa 0 0 0 0 0 dos 1 0 0 0 0 01 Units E 0 0 0 0 3 600 599 2 599 6 599 3 ae ETD 4 700 699 8 700 2 699 2 DTC Setup Misc 5 800 800 3 800 2 799 5 Configuration TouchScreen Paddle TC Screen _ apx PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup Import Export Port configuration Overview Operations Recipes System Data FIGURE 7 10 CALIBRATION TEMPERATURE FOR THE PADDLE THERMOCOUPLES To create a new paddle entry press and enter the unique name or serial number for this paddle Select the newly added paddle TC and fill in the calibration temperature and real measured values Calibration Temperature Enter the values at which the thermocouples have been calibrated These values must be ascending order and in the range 0 0 to 1500 0 C and will be automatically sorted Calibration Value For each paddle enter the calibrated value corresponding to the calibration temperature These values must be within 20 C of the calibration temperature TSC I Reference manual 7 18 l i gt AMTECH TEMPRESS SYSTEM Press to save the entered data or confirm the question Save Data or a
4. 7 41 7 3 7 2 aede etie 7 42 7 3 8 Import Export tube data sse 7 43 7 30 Shutting down the 7 44 5 _ AMTECH TEMPRESS TABLE OF CONTENTS 8 DATA 8 1 8 1 8 2 1 Defining a dataset ERRRENERCRRRUNRERRNERUNURRENEg E 8 3 8 127 History titre oe eee c ee tede 8 4 813 History LOW nena ne nets 8 4 81 4 History Teclpe 8 4 8155 History actual ne etaient eta 8 5 8 2 Displaying data ttt aede tite be th rete Hr b Dc Ene adenine 8 6 8 2 1 Logging data graphical 8 6 8 2 2 Logging data numbers 8 8 8 2 3 Logging data alarms and events 8 9 8 3 Run data active tubes tette tenens 8 10 8 4 Tube real time monitoring sse tette teretes 8 11 8 5 Main detail status treten tenete tenete tens 8 11 8 5 1 Temperature detail status 8 13 8 5 2 Normal temperature table sse 8 15 8 5 3 Profile temperature table seen 8 16 8 54 RECIPE CODEe DIES uer ore teo e ERR E TA 8 18 9 ALARM 9 1 10HELP 10 2 11 5 5 OPTIONAL
5. 11 61 11 80 15 SPOON t te 11 61 INDEX 67 AMTECH TU TEMPRESS LIST OF FIGURES LIST OF FIGURES Figure 1 1 Overview of the hardware architecture sss 1 3 Figure LT 2 3 Figure 152 os eile et ett ote tette eee 2 4 eam 2 4 194a emen maquette mdi maed DE 2 5 mua 5 2 5 T A a 2 6 ERA MATRE 2 6 2 7 edited 2 7 raa mec 2 8 Figure 3 1 Start Up screen of the TSO 1l 3 2 Figure 3 2 TSC software OVODVIBW eit etie be e e ee o e e ue oe 3 5 Figure 4 1 Overview rettet teretes 4 1 Figure 4 2 Tube selection and properties 4 3 Figure 5 1 The TSC operations screen eene ttsntnkeesienn 5 1 Figure 5 2 OH RE HDI 5 2 Figure 5 3 enata bi ta 5 4 Figure 5 4 Change a 5 5 Figure 6 1 The ESC Il recipe SCFOOLL
6. 6 11 IMPORT A RECIPE 6 5 RECIPE STATUS 8 18 IMPORT EXPORT TUBE DATA 7 43 RECIPE STEP STATUS 6 19 INSERT A NEW COMMAND RECIPES 8 3 2 6 2 7 2 7 3 RECIPE EXPLORER 6 10 REINIT DBASE 7 31 LIMITVARIABLE 11 22 63 REQUESTACTIVEALARMS 11 23 MAIN DETAIL STATUS 8 11 64 MAXIMUM SPIKE CORRECTION 11 2 11 19 11 54 TAB CE 7 21 RES 11 10 11 50 MAXSPOOLTRANSMIT11 25 11 510 1 11 10 11 50 11 59 27 11 62 63 S10F2 11 10 11 51 11 59 55 5 7 12 S10F3 11 3 11 10 11 51 11 59 MISCELLANEOUS SETUP 7 2 11 10 11 51 11 59 NEW RECIPE 6 3 SAFO 11 8 11 29 11 53 NEW RECIPE COMMAND 6 9 S1F111 8 11 17 11 29 11 53 11 NEW RECIPE STEP 6 7 56 NORMAL TEMPERATURE TABLE S1F11 11 8 11 30 11 55 E 6 16 8 15 S1F12 11 8 11 30 11 55 NUMBER OF ANALOG OUTPUT S1F1311 8 11 14 11 30 11 31 11 PORTS tete eerte 7 4 52 NUMBER OF DIGITAL OUTPUT S1F 1411 8 11 14 11 15 11 31 11 7 4 52 OPERATION SIMULATION 6 20 11 8 11 31 11 53 OPERATIONS 3 2 S1F16 11 8 11
7. STACK 01 3 NITRIDE Operations Recipes System Data rSetup DPC Setup Configuration Al SYSMASTER ID Messages Pressure AO Range DI DO DTC Setup Configuration Units Read Write Misc TouchScreen Paddle Operations Screen PID Spike Correction Profiling Recipes Read Write General TSC 2 Setup Reinit DB Profiling History FIGURE 7 14 READ WRITE DTC MENU Select the desired option to read from DTC or write to DTC A confirmation message is presented for successful read write actions Should problems occur when using the All option the individual options should be used Reading the Paddle Calibration Table from DTC is not possible Control of which calibrated paddle profile TC is used during the profiling process is provided through TSC 2 NOTE Current information will be overwritten TSC II Reference manual 7 24 l i gt AMTECH TEMPRESS SYSTEM 7 2 3 MISCELLANEOUS SETUP The Miscellaneous Setup contains general configuration screens It allows a backup of the graphical screen layout of the Touchscreen FPD to be made the Operations Screen to be configured the Database Reinitialization to be started and the Profiling History to be reviewed 7 2 3 1 Touch screen configurations The Touch screen menu provides a backup of the graphical screen l
8. 11 32 11 7 5 Stream 5 Exception Handling ssssssss 11 41 11 7 6 Stream 6 Data Collection sse 11 43 11 7 7 Stream 7 Process Program 11 46 11 7 8 Stream 9 System Errors sse 11 48 11 7 9 Stream 10 Terminal Services sse 11 50 11 8 SCENA OS xoi rette Re e P rettet idco OR eere tern 11 51 11 8 1 Communications sse 11 52 2 11 53 gt TEMPRESS TABLE OF CONTENTS 5120922 8 11 53 11 8 4 Event R ports 0 ccccccsessssescssescsssscssssesssscsssscsssscsssssssssesnsacsnsscensaeens 11 54 11 8 5 Variable Data Collection sse 11 55 11 8 6 Trace Reports sse tenente 11 56 11 8 7 Limits Monitoring retten 11 56 11 8 8 On line Identification sese 11 57 11 8 9 Alarm Management tenentes 11 57 11 8 10 Remote Commands eese 11 57 11 8 11 Process Program 11 58 11 8 12 Equipment Terminal Services see 11 59 11 8 13 Error Messages eee eeecessessessssssessessecsecsscussessessecsecuesussesseaseseeseeseenees 11 59 11 844 MOCK usu eda aUud nta
9. Export Selected item To first item Next screen tube overview Previous screen tube overview b To last item Previous item 5 USER MANUAL 1 4 AMTECH TEMPRESS 5 SOFTWARE INSTALLATION 2 5 SOFTWARE INSTALLATION This section describes the TSC I software installation procedures For a new installation see section 2 1 for upgrading an existing version see section 2 4 1 AN NOTE Make a backup of existing user files before upgrading an existing version 2 1 INSTALLING NEW TSC Il SOFTWARE Note To install the TSC II software administrator privileges are required Insert Select Select Select Choose CD Rom in CD Rom driver Setup exe Next after reading the text in the Welcome screen Yes after reading the Software License Agreement destination location by replacing C into D Program files Tempress Systems Inc Tempress System Controllers Select Select Select Select 10 Select 11 Choose 12 Select 13 Select 14 Select 15 Select 16 Select 17 Press 18 Fill in 00 1 19 20 Select 21 Select 22 Select 23 Accept 24 Press Ok Yes to create a new folder Next the type of installation Diffusion Conveyer Next setup Type Client server client server Next the system asks to copy database files Yes I want to copy the Database files Next
10. 11 7 3 4 S1F3 Selected Status Request Desctiption request to the equipment to report selected values of its status A zero length list means report all SVIDs Structure lt NoOfltems lt 1000 lt Vli SVID gt TSC II USER MANU AL 11 29 55 SECS GEM gt Answet S1F4 Direction H lt E Exception 11 7 3 5 81 4 Selected Status Data Description The equipment reports the value of each SVID requested in the order requested The host remembers the names of values requested Structure lt L NoOfltems lt 1000 lt V 1 SV gt gt Answet Direction gt Exception E 11 7 3 6 81 11 Status Variable Namelist Request Description A request to the equipment to identify certain status variables A zero length list means report all SVIDs Structure lt NoOfltems lt 1000 VI1 SVID gt gt Answet S1F12 Direction H gt E Exception 11 7 3 7 S1F12 Status Variable Namelist Reply Description The equipment reports to the host the name and units of the requested SVs Structure lt NoOfltems lt 1000 lt L 3 lt V 1 SVID gt lt Aflen2 lt 1000 SVNAME gt lt A len3 lt 1000 UNITS gt gt gt Answer Direction gt Exception Zeto length ASCII items for both SVNAME and UNI
11. 6 1 INTRODUCTION This chapter describes the Recipe Explorer which contains the screens used to create edit print delete and write a recipe to or read a recipe from the DPC Additionally the normal process temperature table must be defined here There two types of recipes NORMAL and ABORT Double clicking on the Normal list shows the current recipes stored on the local hard disk of the TSC server pc During daily process operation a normal recipe is used to run a process In the normal process recipe the command ABORT recipe can used to enable Abort recipe If an abort instruction is issued after this command the enabled Abort recipe will be executed instead of going to step 0 The Abort command cannot be used in step 0 of the normal recipe and can also not be used an abort recipe no nesting allowed recipe can be created and or modified at the tube level on the Touchscreen at each server and all client PCs The recipes can be read from DPC or written to DPC in the network At every Write to DPC the recipe is verified against the certifications inside the DPC to ensure the proper instructions used Information of date and user ID of the last modification to a recipe and also date of the last read write is logged in the system TSC I Reference manual 6 1 ot AMTECH TU TEMPRESS 5 With the Recipe storage server client PCs there
12. Description Change one or more Equipment Constants Structure lt L NoOfECIDs lt 1000 lt L 2 lt gt lt gt gt gt Answet S2F16 Direction gt Exception 11 7 4 5 SZF16 Equipment Constant Send Acknowledge Description Acknowledge on change of one or more Ecs Structure lt B 1 EAC gt Answet Direction gt Exception 11 7 4 6 82 17 Date And Time Request Description Request for date and time from Equipment or Host Structure Header only Answet S2F18 Direction E lt gt H Exception 11 7 4 7 SZF18 Date and Time Data Desctiption Actual date and time Structure lt A 16 gt Answer Direction E lt gt H Exception Time does not exist zero length item 11 7 4 8 S2F23 Trace Initialize Send Description The Host requests the Equipment to initialize a time driven trace operation Structure lt L 5 lt vii TRID gt lt DSPER gt lt TOTSMP gt lt V 1 REPGSZ gt lt L NoOfVIDs_ lt 10000 5 USER MANU AL 11 33 TEMPRESS SECS GEM lt SVID gt gt gt Answet S2F24 Direction gt Exception 11 7 4 9 S2F24 Trace Initialize Acknowledge Description Ac
13. gt Answet Direction E gt H Exception 11 7 4 14 S2F33 Define Report Description Define removes a group of reports for the Equipment A list of zero length following DATAID deletes all report definitions and associate links A list of zero length following RPTID deletes report type RPTID All CEID links to this RPTID are also deleted see 52 35 Structure lt 12 lt DATAID gt lt L NoOfReports lt 10000 lt 02 lt V 1 RPTID gt lt L NoOfVIDs lt 10000 lt VID gt gt gt gt gt Answet S2F34 Direction H gt E Exception 11 7 4 15 S2F34 Define Report Acknowledge Description Acknowledge or error on Define Report Request Structure lt DRACK gt Answet Direction E gt H Exception If an error condition is detected the entire message is rejected 5 USER MANUAL 11 35 4 AMTECH 7W TEMPRESS SECS GEM 11 7 4 16 S2F35 Link Event Report Description Request to link a number of reports to an event zero length list following CEID deletes all report links for that event Structure lt Lp2 lt DATAID gt lt L NoOfEvents lt 1000 lt L 2 V 1 gt L NoOfRIDs lt 10000 V 1 RPTID gt gt gt gt gt Answet S2F36 Direction
14. Device configuration FIGURE 11 7 SETTING DEVICE CONFIGURATION The user chooses a unique Device ID and selects a port 11 4 53 STARTING COMMUNICATION To start the SECS GEM communication with the host the user has to go to the Operations screen for the tube There he she pushes the button Disabled in the Secs Gem section See Figure 11 8 The Secs Gem interface is enabled and it will try to start the communication automatically FIGURE 11 8 STARTING SECS GEM 11 5 TECHNICAL SPECIFICATIONS SECS 11 5 4 INTRODUCTION This chapter contains the technical specifications of the SECS protocol This protocol contains the SECS I protocol for low level serial communications the HSMS protocol for low level TCP IP communications and the SECS II protocol The SECS II protocol defines a method to transmit information between Host and Equipment in the form of messages These messages are organized into categories of activities called streams which contain specific messages called functions TSC II USER MANUAL 11 7 SUUS AMTECH TEMPRESS SECS GEM objective of this chapter is to provide the support engineer with enough information to understand the SECS protocol Further technical specifications can be found in the following SEMI standards Standard Desctiption SEMI 4 0699 SECS I SEMI E32 0298 HSMS SEMI E5 0600 SECS II 11 5 2 SERIAL COMMUNICATION SECS I SECS I module on the Eq
15. MPRESS SECS GEM 11 8 8 ON LINE IDENTIFICATION 11 8 8 1 Host queries equipment for current Limits Step SECS Direction Description Message 1 S2F47 gt Host queries Equipment for current variable limit attributes definitions 2 S2F48 E gt H Equipment returns report containing requested variable limit attributes values 11 8 9 ALARM MANAGEMENT 11 8 9 1 Enable disable alarms Step SECS Direction Description Message 1 S5F3 H gt E Host requests to enable or disable certain alarms ALIDs 2 55 4 gt Acknowledge of Host Enable Disable Alarm request 11 8 9 2 Upload Alarm Information Step SECS Direction Description Message 1 S5F5 H gt E Host requests information current state text about alarms ALIDs 2 S5F6 E gt H Equipment sends Alarm information if the alarm is enabled 11 8 9 3 Send Alarm Report Step SECS Direction Description Message 1 S5F1 gt Alarm state change Equipment sends alarm report to Host if this alarm is enabled 2 S5F2 gt Acknowledge on Alarm Report 11 8 10 REMOTE COMMANDS 11 8 10 1 Host Command Send Scenario Step SECS Direction Description Message 1 S2F41 H gt E Host command Request TSC II U SER MANUAL 11 57 55 SECS GEM S2F42 E gt H Acknowled
16. ie etn 6 1 Figure 6 2 Creating new 1 2 testata testo tanta enn 6 3 Figure 6 3 Copying an existing recipe sees 6 4 Figure 6 4 Import a recipe ace ee pte pedet pede edes 6 5 Figure 6 5 Recipe properties tentent 6 6 Figure 6 6 Insert new recipe 1 21 4 0 00000000000000000000000008000080080000044 6 7 Figure 6 7 Copy recipe step eren tete tn tete tt tette t tetentese 6 8 Figure 6 8 Inserting new recipe step sss 6 9 Figure 6 9 Insert new command c cssccessscsssseersscsscnsessensenssensessensetsecnsenvensenscansesvensenss 6 10 Figure 6 10 Create a new command in the recipe 6 10 Figure 6 11 Export Delete or Check recipe 6 11 Figure 6 12 Export recipe ssssssssseseee eene tte tnnt tenentes 6 11 Figure 6 13 Delete a recipe tete ttntente tette tnttntents 6 12 Figure 6 14 Delete a recipe step 6 12 Figure 6 15 Delete a recipe command serene 6 13 Figure 6 16 AR IRURE a 6 13 5 USER MANUAL IX UTE I AMTECH MPRESS LIST OF FIGURES Figure 6 17 Print preview ette ere Eee 6 14 Figure 6 18 Zoom Print preview nitet theteste ee tbe tb re be 6 15 Figure 6 19 Normal temper
17. 6 13 DELETE A RECIPE 6 12 DELETE A RECIPE STEP 6 12 DIGITAL INPUT e 7 10 DIGITAL OUTPUT 7 11 DIGITAL PROCESS CONTROLLER 1 1 1 2 DPC1 1 1 2 1 3 1 4 8 7 2 7 3 7 4 7 5 7 7 7 10 7 11 7 13 8 18 11 1 11 3 SE UR csset tegat 7 3 DRAWING AND INSERT OBJECTS DTC1 1 1 2 1 3 1 4 8 6 16 6 17 7 2 7 3 7 16 7 18 7 21 7 23 11 1 11 3 DTG SETUP deti er 7 16 Ip 11 2 11 10 11 19 DVNAME enm 11 2 DVVAL 11 2 EC11 1 11 10 11 19 11 32 11 34 63 64 ECID11 2 11 23 11 32 11 33 11 34 11 56 ECIDCHANGED 11 20 63 65 EDIT RECIBE 6 6 EDIT RECIPE STEP PROPERTIES ES 6 9 EDITING OBJECTS 7 29 ENABLESPOOLING 63 ESTABLISHCOMMUNICATIONTIM EOU T tarifs 11 15 63 EVENTLIMIT 11 22 63 EXPORT A RECIPE 6 11 FLAT PANEL DISPLAYXXI 1 1 1 2 1 3 1 4 1 1 1 2 1 4 GEM 11 1 11 3 11 11 11 51 GENERAL ACTIVE TUBES RUN 8 10 GENERAL SYSTEM SETUP 7 33 HARDWARE ARCHITECTURE 1 3 HISTORY ACTUAL 8 5 HISTORY EOT nete es 8 4 HISTORY RECIPE 8 4 TSC II USER MANUAL x TEMPRESS INDEX HISTORY TIME 8 4 RECIPE COMMAND PROPERTIES HSMS 11 1 11 9 14775 11 80
18. AMTECH TU TEMPRESS LIST OF FIGURES Figure 7 32 TSC 2 product version numbers seen 7 42 Figure 7 33 Import export a tube 7 43 Figure 7 34 Shutting down 2 7 44 Figure 8 1 Logging data main SCFeBPL ee ent ores oae cx ases aote 8 2 Figure 8 2 Dataset parameter selection sse 8 3 Figure 6 3 LOGGING ees RUBRA MANN 8 6 Figure 8 4 Logging data customization graphics sse 8 7 Figure 8 5 Logging data alarm and events sse 8 9 Figure 8 6 Logging data active 2 1 1 112114201292000 1201 00 731 43 0 2044440 04 0 40 8 10 Figure 8 7 Monitoring main detail 5 1 2 10 2 21810 000001011000000 000000001 8 11 Figure 8 8 Monitoring temperature details eerte 8 13 Figure 8 9 Monitoring normal temperature 8 15 Figure 8 10 Monitoring profile temperature table sss 8 16 Figure 8 11 8 18 Figure 9512 Alarm WIDIQOW oe epe p RE Pp di pei e Rp uiderit 9 1 Figure 11 1 Basic System Architecture eerte rtnnetntenne 11 3 Figure 11 2 S
19. 25 sep 2002 14 21 STACK 01 A3 NITRIDE 0 amp Overview Operations Recipes System Data Range percentage o Range IO 00 00 ES 5 5 5 ID Setup DPC Setup Configuration Messages Al Pressure AO Range DI Units DO Read Write DTC Setup Misc Configuration TouchScreen Paddle TC Operations Screen PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup Import Export Alarm Help FIGURE 7 7 PRESSURE CONTROLLER PID CONFIGURATION TSC II Reference manual 7 13 a TEMPRESS 5 5 Range Percentage Enter the range in percentage of maximum scale of the corresponding Analog Output Up to 5 ranges may be defined P Enter the proportional factor in the range 0 to 255 I Enter the integral time in the range 0 to 25 5 seconds D Enter the derivative time in the range 0 to 255 seconds NOTE Press to save the entered data or confirm the question Save Data or all data will be lost The complete list of the Pressure Control PID settings can be printed using the Print button A predefined Pressure Control PID setting from another tube matching the same hardware may be imported using the Import button 7 2 1 7 Range Por DPC version 2 G or lower the range used in the analog inputs a
20. DTC Setup Misc Configuration TouchScreen Paddle TC Operations Screen PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup SYSMASTER iD Alarm Help FIGURE 7 6 MESSAGES CONFIGURATION TSC II Reference manual TEMPRESS SYSTEM The messages can be freely defined up to 12 characters long It is recommended to use simple and clear messages Number Mnemonic Description Enter the number of the Message Enter the name of the Message max 12 characters Optionally give a description of the Message Press to save the entered data or confirm the question Save Data or all data will be lost The complete list of the Messages can be printed using the Print button A list of predefined Messages from another tube matching the same hardware may be imported using the Import button 7 2 1 6 Pressure control If one analog output port is defined as pressure atm control the Pressure screen can be activated The Pressure screen contains the pressure controller PID parameters These are the proportional factor P in the range 0 to 255 the integral time I in the range 0 to 25 5 seconds and the derivative time D in the range 0 to 255 seconds The PID values can be divided in up to 5 pressure ranges Select Pressure to open the following screen
21. GRANT gt Answet Direction E gt H Exception E 11 7 4 22 S2F41 Host Command Send Desctiption Request from Host to Equipment to perform a specified remote command with the associated parameters Structure lt Lp2 lt RCMD gt L NoOfParams lt 256 lt L 2 V 1 CPNAME gt lt V t CPVAL gt gt gt gt Answet S2F42 Direction H gt E Exception 11 7 4 23 S2F42 Host Command Acknowledge Description Acknowledge or error on Host Command Request Structure Lp2 lt gt lt L NoOfParams lt 256 lt L 2 TSC II USER MANUAL 11 37 SUC AMTECH TEMPRESS SECS GEM lt vj CPNAME gt lt Bil CPACK gt gt gt gt Answet Direction gt Exception If there are no invalid parameters then a list of zero length will be sent NoOfParams 0 If command is not accepted due to one or more invalid parameters HCACK 3 then a list of invalid parameters will be returned containing the parameter name and reason for being invalid 11 7 4 24 S2F43 Reset Spooling Streams and Functions Description Request to spool certain streams and functions zero length list STREAM 0 turns off spooling for all streams and functions A zeto length list FUNCTION 0 turns off spooling for all functions for the associated stream Structure lt L STREAM lt 256 lt
22. Program Fies a winzip 2 3 ON v4 O2 4 ON TCA 5 ON DOUTB B ON EXTTC Delete Close Ci Screens C winzip2 7 C tsc_installatie 0 Print File name Save as type Recipes r Overview Open as read only Recipe Normal temp Read Write Simulation Graphical Recipe stepstatus Simulation Overview Operations Recipes System Data Alarm Help FIGURE 6 12 EXPORT RECIPE 0 TSC II Reference manual 6 11 SUC AMTECH x TEMPRESS RECIPES 6 6 DELETE A RECIPE A process recipe may be deleted by selecting the recipe and press Delete in the recipe edit menu A confirmation screen appears press Yes to delete or No to cancel Alternatively sue the right mouse button on the recipe once and select Delete Confirm by pressing Yes to delete Alternatively use the right mouse button on the recipe step once and select Delete wo 3x G Are you sure you want to delete this recipe LH FIGURE 6 13 DELETE A RECIPE 6 7 DELETE A RECIPE STEP recipe step can be deleted by clicking with the left mouse button on the recipe step name select Delete in the Recipe Edit menu The confirmation screen will appear we i Are you sure you want to delete the step Ne FIGURE 6 14 DELETE A RECIPE STEP Press Yes to delete or No to return to the recip
23. Repeat this step for all tubes 13 Select Recipes Read the recipes and normal temp table for each tube The configuration is finished 5 Reference manual 2 10 74 AMTECH 55 l TSC II SOFTWARE INSTALLATION 2 4 UPGRADING AN EXISTING TSC Il VERSION Existing TSC II version can be upgraded using this procedure AN NOTE Make a backup of the user files before proceeding Failure to do so will result in loss of data 2 41 BACKUP USER FILES Before uninstalling a previous version of TSC II make a backup of the user files TSC mdb and TscSvr mdb Use a file manager to copy those files to a backup location for example D Backup The configuration file Tsc mdb and the server file TscSvr mdb are located in the folder DB Go to D program files TEMPRESS SYSTEMS INC Tempress System Controller DB Close the TSC debug dialog by selecting the window and type CTRL C Acknowledge error messages from the tscgemsvr program so this program will stop as well 2 4 2 UN INSTALL CURRENT TSC II VERSION Note un install the current TSC II software version administrator privileges are required 1 2 4 5 6 7 9 Press Start gt Settings gt Control Panel Select Software The screen Properties for software will appear Select Add Remove select empress system Controller and press Add Remove The following question appears Are
24. TEMPRESS 5 5 Paddle Setpoint Enter the paddle thermocouple setpoint for the profile temperature recipe Spike Value The spike thermocouple value will be automatically stored in the corresponding profile temperature recipe if the temperature is stable for 15 minutes within the maximum profile deviation as described in section 7 2 2 1 Manually adding values is possible should a printed copy be the only backup Values must be within 20 C of the paddle setpoint Output Power The required output power will be stored after the spike temperature values are added to the profile temperature table recipe Values must be in the range 0 to 99 NOTE f Press Mill to save the entered data or confirm the question Save Data or all data will be lost The complete Profile Temperature Table can be printed using the Print button TSC II Reference manual 7 23 1 SUUM AMTECH 7 55 1 SYSTEM 7 2 2 6 Read Write DTC The Read Write DTC menu is used to store the DTC Setup in the memory of the DTC or read the DTC memory contents Select Read Write to open the following screen only available if a DPC is connected WrEMPRESS s STEMS DTC Write Read 25 sep 2002 14 51 Overview r Write to DIC from Configuration Configuration Paddle PID PID Spike Correction Spike Correction Profiling Profile Tab i m
25. USER MANUAL 9 1 1 UTE I AMTECH MPRESS HELP 10 HELP Not available yet TSC II USER MANUAL 55 SECS GEM 11 SECS GEM Optional module 11 1 INTRODUCTION This chapter contains all documentation about SECS GEM interface and describes its installation and functionality SECS GEM is optionally available to extend TSC II software functionality and is only accessible with the appropriate license This license can be purchased from Tempress Systems Inc The document is intended for two groups of users e System support engineer This engineer can use this manual to understand the SECS GEM protocol and how it is implemented in the TSC application He she will find the chapters 11 3 11 4 and 11 5 the most useful Programmer of host application This programmer can use this manual to get a list of all the functions he she can use to communicate with the Equipment This manual also provides him her with the implemented GEM scenarios Chapters 6 7 and 8 are especially useful for this programmer This manual describes the implementation of the standard for the specific TSC H application It does not describe all the details These details are described in the SEMI standards SEMI E5 0600 SECSIT and SEMI E30 0600 GEM 11 2 DEFINITIONS AND ABBREVIATIONS 11 2 1 DEFINITIONS Item Equipment Host Operator 11 2 2 ABBREVIATIONS Abbr
26. ar TEMPRESS SYSTEM 7 2 1 DPC SETUP The DPC configuration will be automatically selected when the System Menu is accessed with a tube preselected The DPC Configuration allows the setup of the tube to include a DTC determine the maximum number of process recipes define the type and length of the boat loader if present define the Analog and Digital Inputs Outputs set the Alarm Input Output configuration and allow Step names to be used in the process recipes The last 2 options are only available for DPC version 2 1 or higher The DPC Setup Configuration screen has the following details DTC Select this option if a DTC is installed Default is yes for a diffusion furnace but must match the DPC processor board jumper settings See TECHNICAL MANUAL DPC Number Recipes Enter the number of Process Recipes contained in the DPC This is either 8 8 x 1500 bytes ot 16 16 x 750 bytes Default value is 16 x 750 bytes Internal Press Atm Controller Select this option if the Tempress Internal Pressure Controller is present LPCVD tubes only The pressure range and associated PID settings can be edited once the internal pressure controller is selected here Do not select this option if an external pressure controller is present or no pressure controller at all atmospheric tubes PID settings for the external pressure controller must be set remotely Boat loader When an automatic boat loader is inst
27. 5 USER MANU AL 11 42 55 SECS GEM exist 11 7 5 8 S5F7 List Enabled Alarm Request Desctiption Request for a list of alarms that are enabled zero length list request all enabled alatms Structure lt U4 NoOfALIDs lt 256 ALID gt Answet S5F8 Direction gt Exception 11 7 5 9 S5F8 List Enabled Alarm Data Description Requested alarm information for enabled alarms Structure lt L NoOfALIDs lt 1000 lt L 3 lt B 1 ALCD gt lt V 1 ALID gt lt A length lt 80 ALTX gt gt gt Answer Direction E gt H Exception 11 7 6 STREAM 6 DATA COLLECTION This stream is intended to cover the needs of in process measurements and equipment monitoring 11 7 6 1 S6FO Abort Transaction Description Used as a reply when the transaction is aborted Function 0 is defined in every stream and has the same meaning in every stream Structure Header only Answet Direction lt gt Exception 11 7 6 2 S6F1 Trace Data Send Description This function sends trace reports time driven to the host Structure lt L 4 lt V 1 TRID lt SMPLN gt lt A 16 STIME gt 5 USER MANUAL 11 43 wt AMTECH TEMPRESS
28. 7 39 1 UTE MPRESS SYSTEM 7 3 51 ADD NEW USER OR TEMPLATE 1 Select New Select Yes to add new User 2 Select Yes again if a new Template is wanted Enter the name of the new Template 3 Select No to create a new User Enter the name of the new User 4 Enter the password twice and press OK 5 Modify the user rights as described in section 7 3 5 2 6 Press Save to save the new User 7 Press YES to update the user and save the changes 7 3 5 2 CHANGE ACCESS SETTINGS Each user may be granted access to the main functions of TSC 2 This includes viewing recipes editing recipes monitoring real time data modify system setup and even modify user access rights To allow a user to view the contents of specific menus activate the View setting to Yes To allow a user to edit functions activate the Edit setting to Yes as well 1 Select a User or Template from the user template browser The center screen shows the current access settings to the TSC 2 main functions 2 Select a particular function to change the access rights Press Change Settings once to change View only press Change Settings again to change Edit 3 To change the access rights to several functions at the same time make the appropriate selection using the SHIFT or CTRL left mouse button Press Change Settings once to change View only press Chang
29. CURRENT CONFIC 0 Export ermissions Copy Key Name ComputerlHKEY LOCAL MACHINE E FIGURE 2 6 Registey Editor JE fy Congaree Prrititeions fot HKEY_LOCAL_ MACHINE Select Users or Groups Select object Group ot uw Users Groups or Dudin security principals ff seo From this locaton P Erra TSC_FHG2 PP RESTRICTED the object names to select users FIGURE 2 7 5 Reference manual 2 6 1 D AMTECH W TEMPRESS TSC II SOFTWARE INSTALLATION 16 Add the user group Tsc Users by clicking on Add Figure 2 7 17 Select Tsc users 18 Click on OK Figure 2 7 19 Select the User Group Tsc Users and Allow the Group Full Control by activate the Allow box Figure 2 7 20 Click on Apply Figure 2 7 21 Click on Advanced the following screen appears Figure 2 8 Advanced Security Settings for HKEY LOCAL MACHINE yo Pemissions Aye Owner Elective Petmissons vew more about Special permitir select and Then chek Edi Peimission entries Type Pemibon From To Allow Adiverestiatote TSC Control Tres and subkeys Everyone Read This and subkeye RESTRICTED Read This subkeys SYSTEM Ful Control This
30. Spool Transmit Failure Message Recognition Type Dbi CEID Description Change of the Communication State 10002 Control State ON LINE OFF LINE 10003 Control State REMOTE gt LOCAL or OFF LINE gt LOCAL 524 10004 Control State LOCAL gt REMOTE or OFF LINE gt REMOTE Entry into RUNNING state 10006 Normal exit of RUNNING state C 529 10007 Result of ABORT command from Host or Operator 10008 Change of the Processing State lt gt 558 10009 Change of any Equipment Constant Recipe download Spooling State SPOOL INACTIVE gt SPOOL ACTIVE 10012 Spooling State SPOOL OUTPUT gt SPOOL INACTIVE 10013 Spooling State TRANSMIT SPOOL gt NO SPOOL OUTPUT lt gt 527 10014 Terminal Text Sent Type event lt gt on change C custom behaviour 5 USER MANUAL 65 AMTECH TEMPRESS APPENDIX C Appendix C Properties Number Default Value 300002 300003 300004 300005 300006 15 300009 300010 Description Control State 0 OFFLINE 1 ONLINE Control Offline Sub state 0 EQUIP_OFF 1 HOST_OFF 2 ATTEMPT_ONLINE Control Online Sub state 0 LOCAL 1 REMOTE Communication State 0 DISABLED 1 ENABLED Establish Communication Timeout Spooling enabled default 0 DISABLED 1 ENABLED This property will be used if Equipment Variable EnableSpooling is not initialized yet first
31. SpoolStartTime 11 7 SECS II MESSAGES This chapter provides a list of all implemented 5 5 messages and a description of the layout of these messages The objective of this chapter is to provide the programmer of a Host application with the necessary message detail 5 USER MANUAL 11 27 55 SECS GEM 11 7 1 SML NOTATION Message descriptions are shown using SECS Message Language SML notation SML 15 a general notation developed by GW Associates for describing SECS messages SML is similar to the notation used in the SECS Standards documents but SML is a more precise and regular notation In SML the format for a data item 1s as follows lt type count value gt The components are lt gt Angle Brackets Each Data Item within angle brackets les than greater than This notation implies that each Data Item has a Data Item Format and Data Item Length as required by SECS II Type This specifies the SECS II Data Item format It will have one of the following values A ASCII B Binary I2 14 I8 Signed Integers U1 U2 U4 U8 Unsigned Integers F8 Floating Point BOOLEAN Ttue False V Variant all formats are allowed Count Count of the element values that make up the item If present the count is enclosed within square brackets The count may be omitted in which case the square brackets are also omitted count specifies the number
32. TSC II Reference manual 7 8 1 UTE MPRESS SYSTEM list of predefined Analog Outputs from another tube matching the same hardware may be imported using the Import button WARNING After import check new settings to match the actual tube hardware TSC II Reference manual 7 9 TEMPRESS SYSTEM 7 2 1 3 Digital Inputs Digital Input Ports can be connected to any sensor that gives a digital signal such as pressure sensors door switches safety switches and comparison devices Select DI to open the following screen 25 sep 2002 14 15 STACK 01 A3 NITRIDE re TEMPRESS SYSTEMS SYSMASTER ID DPC Digital in Number m Configuration Messages 3 Al Pressure Mnemonic PRESS N2 AO Range Description n D qu DO Read Write z 7 DTC Setup Misc M a amp 8 Configuration TouchScreen Paddle TC PID Operations Screen Reinit DB Profiling Recipes Read Write General TSC 2 General Profiling History Setup Import Export Overview Operations Recipes System Data Alarm Help FIGURE 7 4 DIGITAL INPUT CONFIGURATION The Digital Inputs that must be defined here can be found in the electrical drawings of the furnace For a safe and reliable operation of the tube using TSC 2 the Digital Inputs described here MUST match actual
33. USER MANUAL 11 58 SUC AMTECH TEMPRESS SECS GEM S7F6 H gt E Recipe data send 11 8 12 EQUIPMENT TERMINAL SERVICES 11 8 12 1 Operator sends information to Host Step SECS Direction Description Message 1 510 1 gt Operator sends textual information via Equipment terminal x to Host 2 S10F2 H gt E Host acknowledges receipt of operator initiated message 11 8 12 2 Host sends information to an equipment s display device Step SECS Direction Description Message 1 S10F3 H gt E Host sends textual information to Equipment for display to the operator on terminal x 2 S10F4 E gt H Equipment acknowledges request to display text 11 8 13 ERROR MESSAGES 11 8 13 1 Message Fault Due to Unrecognized Device ID Step SECS Direction Description Message 1 SxFy H gt E Host sends a message 2 S9F1 E gt H Equipment detects an unrecognized device ID within the message from the Host it reports to the host that an unrecognized device was detected the received message 11 8 13 2 Message Fault Due to Unrecognized Stream Type Step SECS Direction Description Message 1 SxFy H gt E Host sends a message 2 59 3 gt Equipment detects an unrecognized stream type within the message from the Host it reports to the host that an unr
34. NITRIDEl 00 STEP 0 Message LOAD UNLOAD 4 Sonalert alarm No Normal recipe 00 Zonel 25 0 Slope 0 00 Zone2 25 0 C 0 00 Zone3 25 0 C Slope 0 00 profile table Boat to 2000 0 mm at 300 0 mm min with oscillation speed of 0 0 mm min Variable Command N2 1 at 0 0 1 Variable Command DCS 1 2 at 0 0 1 Variable Command Pages 4 FIGURE 6 18 ZOOM PRINT PREVIEW Slope zi With this feature the recipe overview be zoomed in or out in a range from 10 to 200 5 Reference manual 6 15 TEMPRESS 5 6 10 NORMAL TEMPERATURE TABLE The normal temperature table can be modified and printed with the Normal temp button re TEMPRESS SYSTEMS 06 Apr 2001 14 44 STACK 01 A2 TUBE 2 E SYSMASTER ID r Temperature recipe Recipenr 0 r Control 6 Spike Paddle r Control Independent Master Slave r Temperature Setpoint p Edit Setpoint Slope High Low Gain 5 25 0 0 00 00 00 100 NE eal 25 0 0 00 0 0 0 0 100 0 00 foo 100 Print r Overview Recipe Overview Operations Recipes System Data CEKALA Normal temp Read Write Simulation Graphical Recipe stepstatus Simulation FIGURE 6 19 NORMAL TEMPERATURE TABLE This screen allo
35. Variables Name Clock Communication State Control State ECIDChanged EnableSpooling EstablishCommunicationTimeout EventLimit LimitVariable MaxSpoolTransmit OverWriteSpool PPChangeName PPChangeStatus Process State New Dbi 547 Class EB 524 m 49 R lt 535 lt m O 536 m O 543 544 D lt A 20 537 DV 4 538 SV 529 Description The Equipment s current date and time See SEMI E5 for format The current Communication State The current Control State The last triggered event CEID Enable Spooling flag 0 no spooling 1 spooling Time in seconds defining how long the Equipment will delay after an unsuccessful Connect Request before sending another The LimitID relating to the most recent Limits Monitoring transition event that occurred The VID relating to the most recent Limits Monitoring transition The maximum number of spooled messages the equipment will send each time the Host reads the spool This EC determines the action to be taken by the Equipment when the Spool file reaches its capacity True Overwrite Spool False Do Not Overwrite Spool PPID of the Process Program most recently created changed or deleted The action create change delete taken on a Process Program The new value of the 4 AMTECH TEMPRESS
36. 5 6 12 3 OPERATIONS SIMULATION A process recipe can also be simulated on the Operations Screen NOTE The operation screen must be defined in system process configuration An example of an operation screen is given below PANI 25 scp 2002 13 38 STACK O1 A3 NITRIDE r Overview Recipe gt Normal temp pe Read Write Graphical Simulation Recipe Stepstatus Operations Thu 26 Sep 2002 00 00 00 0 Simulation i oJ aA Overview Operations Recipes System Data Alarm Help FIGURE 6 24 SIMULATION PROCESS RECIPE 0 In this screen a graphical overview of the tube and its parameters is shown There are two slide bars visible in the main field With the left slide bar the process time can be selected to see the graphical simulation at the selected time The right slide bar will skip to the step corresponding to the selected time With the right slide bar the process recipe step number can be selected to see the graphical simulation during the selected step The time slide bar will jump to the time corresponding to the selected step TSC II Reference manual 6 20 TEMPRESS SYSTEM 7 SYSTEM 7 1 INTRODUCTION The System Menu is the configuration menu for TSC 2 It allows the setup of TSC 2 how many tubes up to the license are connected the tube IDs and names can be
37. E AMTECH b TEMPRESS INTRODUCTION 1 5 HARDWARE ARCHITECTURE pi Mem SSeS CLIENT CLIENT CLIENT SSD CLIENT SERVER SERVER x 16 3 Al 4 lt gt ep hy POWER lt q FIGURE 1 1 OVERVIEW OF THE HARDWARE ARCHITECTURE The process temperature and motion controllers are all microprocessor based driven by operator commands recipes tables and internal routines They operate fully independent and also fully independent from the Flat Panel Display the 5 host computer system and the network 1 5 1 DIGITAL PROCESS CONTROLLER DPC Each tube has a dedicated DPC providing accurate control over process parameters such as timing boat loading gas flows and temperature setpoints See the DPC Reference manual 1 5 2 DIGITAL TEMPERATURE CONTROLLER DTC The Digital Temperature Controller controls the process temperature inside the tube The DTC provides precise control over the spike and paddle thermocouples See the DTC Reference Manual TSC II USER MANUAL 1 3 E AMTECH TU TEMPRESS E INTRODUCTION 1 5 3 FLAT PANEL DISPLAY FPD The Flat Panel Display provides an easy to use alternative user interface to the DTC and DPC at tube level It allows for real time process monitoring but lacks the TSC II capability of logging and backups See the Flat Panel Display Reference manual 1 6 SYMBOLS Save b Next item cs Print b New item Ba Import x Delete item
38. H gt E Exception E 11 7 4 17 S2F36 Link Event Report Acknowledge Description Acknowledge or error on Link Request S2F35 Structure lt B 1 LRACK gt Answet 2 Direction gt Exception If an error condition is detected the entire message is rejected 11 7 4 18 S2F37 Enable Disable Event Report Desctiption Enable or disable reporting for a group of events CEIDs list of zero length following CEED means all CEIDs Structure lt Lp2 lt BOOI 1 CEED gt lt L NoOfCEIDs lt 1000 lt gt gt gt Answet S2F38 Direction H gt E Exception lt L 0 gt 11 7 4 19 S2F38 Enable Disable Event Report Acknowledge Description Acknowledge or error on Enable Disable Event Report Request 52 37 Structure lt B 1 gt Answet 5 USER MANUAL 11 36 4 AMTECH 7W TEMPRESS SECS GEM Direction E gt H Exception If an error condition is detected the entire message is rejected 11 7 4 20 S2F39 Multi block Inquire Description Request a multi block message transmission Only for S2F23 S2F33 S2F35 S2F45 S2F49 Structure lt L 2 lt V 1 DATAID gt lt V 1 DATALENGTH gt gt Answet S2F40 Direction gt Exception 11 7 4 21 SZF40 Multi block Grant Desctiption Grant reject permission to send multi block message Structute lt
39. PID PARAMETER TABLE Spike Proportional Parameter Enter the spike proportional parameter for each temperature range The range of values is 1 to 100 C TSC II Reference manual ar TEMPRESS SYSTEM Spike Integral Parameter Enter the spike integral parameter for each temperature range The range of values is 0 0 to 25 5 minutes Spike Derivative Parameter Enter the spike derivative parameter for each temperature range The range of values is 0 to 255 seconds Spike Gain Parameter Enter the spike gain parameter for each temperature range The range of values is 1 to 100 Paddle Integral Parameter Enter the paddle integral parameter for each temperature range and each zone The range of values is 0 0 to 25 5 minutes Paddle Derivative Parameter Enter the paddle derivative parameter for each temperature range The range of values is 0 to 255 seconds NOTE Press to save the entered data ot confirm the question Save Data all data will be lost The complete setup of the PID parameters can be printed using the Print button A predefined setup of the PID parameters from another tube matching the same hardware may be imported using the Import button TSC II Reference manual 7 20 TU TEMPRESS SYSTEM 7 2 2 4 Maximum spike correction table The Maximum Spike Correction Table is used for a specific situation the combination of paddle
40. The username and password of the user Sysmaster are SYSMASTER name and SM password Select Access in the General TSC 2 Setup to add a new user or template or change access rights of existing users The following screen will appear 25 sep 2002 16 02 Tube setup 4 Server DOCUMENTATION rAcces control User Description view New 2 OPERATOR 2 SYSTEM ENGINE PROCESS ENGIN 43 SYSTEM MASTE Save Change Settings Print Change Password Overview Operations Recipes System Data SYSMASTER iD rSetup DPC Setup Configuration DTC Setup Misc Configuration Paddle TC Reinit DB Profiling History Profiling Read Write General TSC 2 Setup Import Export Close General Access Properties Version Alarm Help FIGURE 7 30 ACCESS CONTROL SCREEN The Access control menu contains editor buttons on the right a user and template browser on the left and setting information in the center New Add a new User or Template Delete Delete a User or Template Save Save the new or modified User or Template Change Settings Print Change Password Change the access settings of the selected function Print the access rights for the selected User or Template Change the password of a User TSC II Reference manual
41. Variable Command Yes Select step to copy hr min sec Variable Co 0 SLM Variable K SLM Variable Comm 0 STANDBY 1 CHECK 1 25 0 Slope 2 LOADING Zone3 25 0 Sl hrmin sec Variable 3 HEATUP 0 SLM Variable 4 OXIDATION 5 COOLDOWN at 200 0 mm min with oscilll amp UNLOAD mand No hr min sec Variable Command Yes Zone3 0 0 Slope FIGURE 6 7 COPY RECIPE STEP 4 Select from the pull down menu the desired recipe step and press OK The selected recipe step will be copied to the new step TSC II Reference manual 6 8 1 SU AMTECH x TEMPRESS RECIPES 6 3 2 INSERTING A NEW RECIPE STEP IN RECIPE EXPLORER A new recipe step can be inserted above an existing step by using the right mouse button once on the step above which the new step must be inserted 1 Click with the right mouse button on the recipe step name where the recipe step has to be inserted above The next screen will be shown Normal H NITRIDE1 T 01 ST iion step above 02 ST New oe 03 ST 04 STEP 4 05 STEP 5 STEP FIGURE 6 8 INSERTING NEW RECIPE STEP 2 Select the option Insert New Step Above 3 Enter the new step name and press OK 4 To copy an existing step into the new inserted step select from the desired recipe step and press OK 6 3 3 EDIT RECIPE STEP The name of the recipe s
42. 11 58 5 11 1 11 3 11 5 11 8 11 11 57 20 11 10 11 48 11 58 11 12 11 52 STFS 11 10 11 47 11 58 TSC USER IDENTIFICATION 3 6 11 10 11 47 11 58 TUBE SELECTION AND 11 10 11 48 11 58 PROPERTIES 4 2 57 6 11 10 11 48 11 58 11 59 TUBE 7 2 5 USER MANUAL 69
43. 15 o0 00 3 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 eom o e e e e e e s s e o o o o o o e e e e e s e e ele o o o o o e e e e e s s s e o o oa o o Overview Operations Recipes System Data STACK 01 A3 NITRIDE 5 5 5 ID Setup DPC Setup Configuration Messages Al Pressure E E Range 01 Units DO Read Write DTC Setup Misc Configuration TouchScreen Paddle TC Operations Screen PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup Import Export Alarm Help FIGURE 7 13 PROFILE TEMPERATURE TABLE The profile temperature table contains the Profile recipe number the Paddle Setpoint of each heating zone the corresponding Spike value and the required Output power Pour 4 different Profile Temperature Tables A B C D are available for use in different process environments such as dry wet or atmospheric vacuum paddle temperature setpoints defined one profile temperature table are used in the other 3 tables as well That provides a maximum of 16 profile temperature recipes NOTE The profile temperature recipes MUST be in ascending order TSC II Reference manual 7 22 a
44. 18 Control Host Initiated Yes Yes 0 11 6 1 PROPERTIES The Equipment has a fixed set of Properties for SECS GEM These Properties define the behavior of the SECS GEM Interface They are part of the complete set of Properties for the TSC II application and be handled in the same way complete list of Properties for SECS Gem is provided in Appendix B TSC II USER MANUAL 11 11 55 SECS GEM 11 6 2 VARIABLES The Equipment also has a fixed set of Variables for SECS GEM Appendix A contains a complete list of all the variables that are implemented Every section in this chapter has a list of the variables that are used with the capability described 11 6 3 EVENT CONFIGURATION A SECS GEM interface on a typical equipment has in normal operation a number of predefined events These events are triggered on certain occasions Por the TSC application a different strategy is chosen The TSC application contains a number of Equipment variables called Dbi points These points represent the complete dynamic behavior of the Equipment To give the system configurator as much freedom as possible a strategy is chosen where he she can link events to Dbi points A change in the value of a Dbi point triggers an event With this method any event can be configured and any report can be linked to these events To be compliant with the SECS GEM standard and to speed up the configuration of the sys
45. 2 Select process recipe tentes 5 2 5 9 oelect ai process TecIDe SteD uenerit eere 5 2 5 4 Start pause and continue a recipe 5 3 3 9 Edit Varable COMMAS seen euet ue onde uideret ido tapa 5 3 5 6 Abort process fomite Pee itte the Hot iios 5 3 5 7 Paddle assignment 5 4 9 8 Change LotID n ERE RERUM NUNT 5 5 DORECIPES AL LM MEE 6 1 6 1 Introd ctioh ce a ee oce tid Rute GR eee 6 1 6 2 Normal and Abort recipes 6 3 6 2 1 X Create a new FECIPE Qu cccccccessesessesessescssesessesessescsssscssesesssscessaceseaeeseaeees 6 4 6 2 2 Import a recipe A 6 5 6 2 3 Editrecipe properties 6 6 6 3 Edit Process Reclpes neni 6 7 6 3 1 New recipe step nennen 6 7 6 3 2 Inserting a new recipe step in recipe 6 9 I AMTECH TEMPRESS TABLE OF CONTENTS 0 3 3 dade liens 6 9 6 4 Recipe commands sentent tenete tenete tentent 6 9 6 4 1 Create a new recipe command 6 9 6 4 2 Insert a new command ssssseeeeeeeeneeetrettnteenetnens
46. 30 901 1200 degrees 20 STACK 01 A3 NITRIDE SYSMASTER ID i rSetup rDTC Configuration Number of Zones 3 s Configuration Messages Spike type 1 3 R PtRh M Al _ Pressure Range DI Units 00 Read Write DTC Setup Misc Operating temp 0 1400 Configuration TouchScreen Operati Range _ PaddeTC Temp range Heatup Profile Dev PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write 1201 1500 degrees 110 ps p p pe General TSC 2 Setup Overview Operations Recipes System Data General Import Export Alarm Help FIGURE 7 9 DTC CONFIGURATION The DTC Setup allows the setup of the temperature related items It includes the number of heating zones and the type of thermocouples used the maximum heat up rate the calibration tables for profile thermocouples the PID settings used in the temperature controller the maximum allowed deviation at the spike thermocouples the profiling temperatures and allows to read write data from and to the DTC 7 2 21 configuration The DTC Configuration contains the number of heating zones the type of thermocouple used the operating temperature range the maximum profile deviation and may include software restriction in the maximum heat up rate The following screen
47. 31 11 53 OVERVIEWT 8 3 1 3 2 3 6 4 1 11 8 11 31 11 53 6 16 7 38 7 41 51 18 11 9 11 32 11 53 OVERWRITESPOOQOL 63 S1F2 11 8 11 17 11 29 11 53 PADDLE TC CALIBRATION TABLE 51 3 inernetis 11 8 11 29 11 55 7 18 S1F4 11 8 11 30 11 55 PID PARAMETER TABLE 7 19 11 9 11 32 11 24 63 11 9 11 32 11 55 PPCHANGESTATUS 11 24 63 S2F14 11 9 11 32 11 55 PPID 11 2 11 47 11 48 11 58 63 92F15 itis 11 9 11 33 11 55 PRESSURE CONTROL 7 13 S2F16 11 9 11 33 11 55 PRINT A RECIPE 6 13 S2F17 11 9 11 33 11 61 PROCESS CONFIGURATION 7 26 S2F18 11 9 11 33 11 61 PROCESS STATE NEW 11 18 63 S2F23 11 9 11 33 11 37 11 56 PROCESS STATE OLD 11 18 64 S2F24 11 9 11 34 11 56 PROFILE TEMPERATURE TABLE 9S2F29 cess 11 9 11 34 11 56 Vaf d eb Evo 8 16 S2F30 11 9 11 34 11 56 PROFILING HISTORY 7 32 S29 T citi 11 9 11 35 11 61 PROFILING RECIPE TABLE 7 22 S2F32 11 9 11 35 11 61 READ WRITE 6 17 S2F33 11 9 11 35 11 37 11 54 READ WRITE DPC 7 14 S2F34 11 9 11 35 11 54 READ WRITE DTGC 7 24 S2F
48. 6 10 6 4 3 X Recipe command properties sse 6 11 0 5 Export a recipe e ete ne titii dente 6 11 6 6 Delete a recipe tette tete tenter 6 12 6 7 ttem tec e te ERR S 6 12 6 8 Delete a command sse 6 13 6 9 PRAT a FOCI DC eee titre n i ee d C RR RR to ied 6 13 6 10 Normal temperature table 6 16 6 11 Read Wite rari 5 eot i i o RE ee m 6 17 6 12 Process Simulation i e t eo e fatte deett 6 18 6 12 1 Graphical simulation ssssseeeennetetetetnes 6 18 6 12 2 Recipe step 6 19 6 12 3 Operations simulation serere 6 20 SYSTEM 7 1 Mntrod cton s e etie OR 7 1 2 Tube Setups edet ecd Re dite tectam tert 7 2 1 251 VDP C SOUP 7 3 2225 OPERE RITE 7 16 7 2 3 Miscellaneous Setup sse 7 25 7 3 General TSC 2 setup 7 33 1 941 Generalis cdm e RH 7 33 7 3 2 selecting server client for networking sss 7 36 T 39 9 Adding a clientss tte e tie Ub ed 7 37 7 3 4 Adding a server tenens 7 38 7 3 5 ACCESS control screen sse tenens 7 39 7 3 6 TSC 2 Language and Color
49. 7 7 3 87 2 Process Program Load Grant Description Permission for the transfer of the specified multi block process program Structure lt B 1 PPGNT gt Answet Direction E lt gt H Exception 1 7 7 4 S7F3 Process Program Send Description Sending of a process program Structure lt Lp lt 1 PPID gt lt V 1 PPBODY gt gt Answet 57 4 Direction E lt gt Exception 11 7 7 5 S7F4 Process Program Acknowledge Description Acknowledge or error after receiving Process Program Structure lt 7 gt Answer Direction E lt gt H Exception 5 USER MANUAL 11 47 55 SECS GEM 11 7 7 6 S7F5 Process Program Request Description Request the transfer of a Process Program Structure lt VI PPID gt Answet S7F6 Direction lt gt Exception 11 7 7 7 S7F6 Process Program Data Description Send Process Program on request Structure lt L 2 lt 1 PPID gt lt VI1 PPBODY gt gt Answet Direction E lt gt H Exception A zero length list means request denied L 0 gt 11 7 7 8 S7F19 Current EPPD Request Description Request for a list of all the Process Programs Structure Header Only Answet S7F20 Directi
50. Description Message ib S1F1 E gt H Equipment requests ON LINE 2 S1F2 gt Host grants ON LINE 11 8 2 2 Host Denies ON LINE request from Equipment Assumption Control State is OFF LINE Step SECS Direction Description Message S1F1 Equipment requests ON LINE S1FO Host denies ON LINE 11 8 2 3 Host sets OFF LINE Assumption Equipment is ON LINE Step SECS Direction Description Message 1 S1F15 H gt E Host requests OFF LINE 2 51 16 gt Equipment acknowledges request transitions to OFF LINE 11 8 2 4 Host sets ON LINE Assumption Equipment s Communication State is Enabled Not Communicating Step SECS Direction Description Message 1 51 17 gt Host requests ON LINE 2 S1F18 E gt H If Equipment is in HOST OFF LINE state then send Acknowledge else send Request denied 11 8 3 PROCESS The Process on the Equipment can be controlled by using Remote Commands See section 11 8 10 Remote Commands 5 USER MANUAL 11 53 UTE MPRESS SECS GEM 11 8 4 EVENT REPORTS 11 8 4 1 Event Notification 11 8 4 1 1 Collection Event occurs on the Equipment Step SECS Direction Description Message 1 56 5 gt If Event Report is multi block then send Multi block inquire Else go to step 3 2 56 6 gt Host sends Multi Block Grant if it can receive message Else it
51. Digital Outputs that must be defined here can be found in the electrical drawings of the furnace For a safe and reliable operation of the tube using TSC 2 the Digital Outputs described here MUST match actual tube hardware Number Enter the number of the Digital Output Mnemonic Enter the name for the Digital Output Description Optionally give a description of the Digital Input TSC II Reference manual 7 11 TU TEMPRESS SYSTEM Press to save the entered data or confirm the question Save Data or all data will be lost NOTE The complete list of Digital Outputs can be printed using the Print button A list of predefined Digital Outputs from another tube matching the same hardware may be imported using the Import button DANGER After import check new settings to match the actual tube hardware 7 2 1 5 Messages Messages can be used to notify the user about the status of the current process step The message command will be displayed throughout the execution of the step Select Messages to open the following screen TEMPRESS SY STEMS 25 sep 2002 14 20 rDPCMessage Number Mnemonic STANDBY Description n i Overview STACK 01 A3 NITRIDE is Operations Recipes System Data Setup DPC Setup Configuration Messages Al Pressure DI Units DO Read Write
52. INITIATED CONNECT WAIT DELAY A connection transaction failure has occurred The CommDelay timer has been initialized The Equipment waits for the timer to expire NOT COMMUNICATING HOST INITIATED CONNECT This state describes the behavior of the equipment in response to a host initiated connection request NOT COMMUNICATING HOST INITIATED CONNECT WAIT CR FROM HOST The Equipment waits for a Connection Request from the Host ENABLED COMMUNICATING Communications have been established The Equipment may receive any message from the Host 11 6 4 2 State Transitions The Finite State Diagram in Figure 11 9 shows the different state transitions of the communication between the Equipment and the Host These state transitions are described in Table 11 2 TSC II USER MANUAL 11 13 l EN Es AMTECH INT cR v WTEMPRESS SECS GEM FIGURE 11 9 COMMUNICATION STATE MODEL TABLE 11 2 COMMUNICATION STATE TRANSITIONS Current State Trigger New State Comment 1 Entry to System initialization System Default The system default may be set to DISABLED ot ENABLED property 300005 COMMUNI CATIONS 2 DISABLED Operator switches ENABLED SECS II communications are enabled from DISABLED to ENABLED 3 ENABLED Operator switches DISABLED No 5 5 communications DISABLED 4 Entry to Any entry to NOT May enter from system initialization to ENABLED ENABLED state COMMUNICATING ENABLED or thro
53. Range Units DTC Setup Configuration Read Write Misc TouchScreen Paddle TC PID Profiling Recipes Read Write Operations Screen FIGURE 7 23 REINIT DATABASE TSC II Reference manual 7 31 1 AMTECH TEMPRESS SYSTEM 7 2 3 4 Profiling history The profiling history menu is used to compare the contents of the new profile temperature table with previous values Select Short Term to compare two profile tables select Long term to compare more than 2 profile tables In general profiling is performed regularly and 2 5 degrees difference is acceptable More than 10 degrees difference indicates too long profiling intervals and it is recommended to increase the profiling frequency Select Profiling History to open the following screen NUI 25552002 1531 STACK 01 A3 NITRIDE ID HE a FIGURE 7 24 PROFILING HISTORY Refresh Select to refresh History Data after selecting profile tables Delete Select to delete a file with History Data Read Select to read a profile temperature table from the DPC Print Select to print the Profile Comparison data TSC II Reference manual 7 32 TEMPRESS SYSTEM 7 3 GENERAL TSC 2 SETUP The general TSC 2 setup controls the TSC 2 looks and which tubes connected to TSC 2 To activate the general TSC 2 setup the server must be
54. Recipes System Data Alarm Help FIGURE 7 25 ADDING A TUBE TO TSC 2 TSC II Reference manual 7 33 TEMPRESE SYSTEM 1 Add a tube by pressing the New symbol 2 Settings from an existing tube may be used as initial settings Select a tube from the pull down menu and press OK 3 Fill in or modify the tube name stack number tube position 4 Select Use Lot ID to activate this function the Operations Screen 5 Select the communication port 6 Select update time this specifies forced logging every x minutes 7 Divide the total remaining disk space by the number of tubes 8 Select the available logging file size 9 Define the SECS GEM configuration f Changing the logging file size results in loss of all existing logged data of Note This option is only available with the appropriate license Contact Tempress Systems Inc for information NITRIDE FIGURE 7 26 DEFINING SECS GEM CONFIGURATION NOTE this tube 10 Save data 11 Repeat this procedure for other tubes TSC II Reference manual 7 34 ot TU TEMPRESS SYSTEM 12 When finished use the Right Mouse Button on the System menu button and press update This will restart the TSC 2 server communication program so that the added ot modified tubes are available to the user TSC II Reference manual 7 35 l 7 AMTECH TU TE
55. S5F3 S5F4 S5F5 S5F6 S5F7 S5F8 S6F0 S6F1 S6F2 S6F5 S6F6 S6F11 On Line Acknowledge Abort Transaction Equipment Constant Request Equipment Constant Data New Equipment Constant Send Equipment Constant Send Acknowledge Date And Time Request Date and Time Data Trace Initialize Send Trace Initialize Acknowledge Equipment Constant Namelist Request Equipment Constant Namelist Reply Date and Time Set Request Date and Time Set Acknowledge Define Report Define Report Acknowledge Link Event Report Link Event Report Acknowledge Enable Disable Event Report Enable Disable Event Report Acknowledge Multi block Inquire Multi block Grant Host Command Send Host Command Acknowledge Reset Spooling Streams and Functions Reset Spooling Define Variable Limit Attributes Variable Limit Attribute Acknowledge Variable Limit Attribute Request Variable Limit Attributes Send Abort Transaction Alarm Report Send Alarm Report Acknowledge Enable Disable Alarm Send Enable Disable Alarm Acknowledge List Alarm Request List Alarm Data List Enabled Alarm Request List Enabled Alarm Data Abort Transaction Trace Data Send Trace Data Acknowledge Multi block Data Send Inquire Multi block Grant Event Report Send 5 USER MANUAL 11 9 TEMPRESS SECS GEM S6F12 S6F15 S6F16 S6F19 S6F20 S6F23 S6F24 S7F0 S7F1 57 2 5753 57 4 5755 S7F6 S7F19 S7F20 S9FO S9F1 S
56. The TSC II will starts in Overview modus In this screen an overview of all connected tubes per stack is presented maximum of 4 tubes per stack If more than 32 tubes are connected the black arrows in the main field can be used to make the remaining tubes visible A maximum of 4 screens is available per TSC II client 19 sep 2002 09 38 Overview Server DOCUMENTATION Server DOCUMENTATION STACK 01 A1 EMPTYATM Current user ID l WTEMPRESS SYSTEMS 1 EMPTYATM WETOXID NITRIDE SELECT A TUBE EMPTYLP SERVER SELECTION FOR STACK NR AND NAME OF THE NETWORKING SELECTED TUBE gt Overview Operations Recipes System Data Alarm Help FIGURE 4 1 OVERVIEW Tube selection is possible by directly clicking on the name of the desired tube in the desired stack Upon selection the stack number and tube name will appear in the drop down menu of the title bar to confirm the selection Alternatively the tube can be selected from the dropdown menu directly TSC II Reference manual 4 1 ot TU TEMPRESS OVERVIEW 4 2 TUBE COMMUNICATION PROPERTIES Select the tube in the drop down menu or click with the left mouse button in the field of the tube To enable communication with the tube click the right mouse button on the tube name in the desired stack The tube properties will appear see Figure 4 2 with the following options see Figure 4
57. abort recipes or the normal temperature table from DPC or DTC or to write the recipes or normal temperature table to DPC or DTC the Read Write button opens the appropriate menu a 25 sep 2002 13 07 STACK 01 A3 NITRIDE SYSMASTER ID r WritelRead Normal Recipes Edit r Writel Read Normal Recipes NTINITRIDE 1 9 New Edit Delete Close N3 N11 N4 N12 Print N14 Overview 8 N16 F Normal temp Write Read Abort Recipes A1 BADABOR ATIBADABORT 5 A8_SAFEABRT 3 A Read Write E B d 4 A8 SAFEABRT Read Normal Temp Write Normal Temp Recipe Stepstatus Table from DTC Table to DTC Operations Simulation Overview Operations Recipes System Data Alarm Help FIGURE 6 20 READ WRITE RECIPES OR NORMAL TEMPERATURE TABLE Drag and drop from right to left the desired Normal Recipe number or Abort Recipe Number to read from DPC Select Read Normal Temp Table to read from DTC Drag and drop from left to right the desired Normal Recipe or Abort Recipe on the desired DPC position to write Select Write Normal Temp Table to write to DTC TSC II Reference manual 6 17 SUUS AMTECH TEMPRESS 5 6 12 PROCESS SIMULATION When a recipe is completed a Simulation can be performed With this screen a Graphical step of operation simulation of
58. based on an existing recipe by selecting the appropriate recipe from the drop down list that occurs next Default selection is empty this will result in a completely new recipe TSC II Reference manual 6 3 SUC AMTECH x TEMPRESS RECIPES 6 2 1 CREATE A NEW RECIPE 1 To create a new recipe select the desired tube and click with the left mouse button on Normal or abort in the Recipe Explorer or use the right mouse button on Normal in the main field and select New Recipe 2 Select New in the Recipe Edit field The system will ask to add a new recipe Press OK 3 submenu will appear for entering the new recipe name see Figure 6 2 Enter the new recipe name and press OK 4 Another submenu appears giving the opportunity to copy from an existing recipe Recipe Selection BE Select Recipe to copy from FIGURE 6 3 COPYING AN EXISTING RECIPE 5 Press OK without using the dropdown menu to create an empty new recipe Use the dropdown menu to select the desired recipe to copy from and press OK This copies the selected existing recipe into the new recipe If an existing recipe has been selected accidentally and an empty new recipe is intended press Cancel This will create the new empty recipe instead of copying the selected one TSC I Reference manual 6 4 ar TEMPRESS 5 6 2 2 IMPORT A RECIPE Using the right mouse button on the No
59. be programmed in the range 0 0 25 5 Press to save the entered data or confirm the question Save Data all data will be lost The complete Maximum Spike Correction Table can be printed using the Print button 5 Reference manual 7 21 l gt AMTECH TEMPRESS SYSTEM A predefined Maximum Spike Correction Table from another tube matching the same hardware may be imported using the Import button 7 2 2 5 Profiling Recipes table The Profiling Recipes menu allows the profile temperature table to be configured Four 4 profile temperature tables A B C and D are available each table contains up to 16 profile temperature recipes Select Profiling Recipes to open the following screen 25 scp 2002 14 50 Table D Table Profile Temperature Extra info Table Paddle Setpoints Zonet Zone2 zones Zonet Zonez Spike Power Spike Power Spike Power oo o oo 00 00 00 00 oo 00 00 o0 00 00 oo oo 00 00 00 00 00 00 oo oo 00 oo 00 10 o0 50 00 11 00 o0 00 12 o0 o0 00 00 13 00 00 14 o0 00
60. control while using a paddle TC and Boat Out command Cold cleanroom air will enter the process tube and cool down the first 2 paddle thermocouples by as much as 100 C or more The DTC will respond with a power increase to the first 2 heating zones The latent heat that will be stored in the first 2 heating zones will result in a large overshoot and long stabilization times upon boat in The Maximum Spike Correction Table restricts the power output to the first 2 heating zones to the maximum indicated in this table The result is a smaller overshoot and shorter stabilization times upon Boat in command Select Spike Correction to open the following screen ER TEST MMESTACK O1 A3 NITRIDE ID rSetup 7 r Maximum Spike Correction r Spike DPC Setup Range Zone1 Zone2 Zone3 Configuration Messages 0 1500 Jeo 0 Jeo 0 feo 0 Al Pressure AO Range DI Units DO Read Write DTC Setup Misc Configuration TouchScreen E amp Ba Paddle TC Operations Screen PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup Overview Operations Recipes System Data FIGURE 7 12 MAXIMUM SPIKE CORRECTION TABLE Up to 4 different temperature ranges may be entered with a maximum of 1500 C The maximum temperature correction that is allowed can
61. gt v t gt lt L NoOfLimits lt 7 gt L 3 lt LIMITID lt V 1 UPPERDB gt lt V 1 LOWERDB gt 5 USER MANUAL 11 40 TEMPRESS SECS GEM gt gt Answet Direction E gt H Exception zeto length list after VID indicates that limits are not supported for the VID lt NoOfVIDS lt 1000 lt L 2 lt VID gt lt 10 gt gt gt zeto length list NoOfLimits 0 means no limits are currently defined for the specified variable 11 7 5 STREAM 5 EXCEPTION HANDLING This stream contains messages regarding binary and analog equipment exceptions Exceptions are classified into two categories errors and alarms Only the alarm functions are implemented 11 7 5 1 85 0 Abort Transaction Description Used as a reply when the transaction is aborted Function 0 is defined in every stream and has the same meaning in every stream Structure Header only Answet Direction E lt gt Exception 11 7 5 2 S5F1 Alarm Report Send Description Report of a change in or presence of an alarm condition Structure lt L 3 lt B 1 ALCD gt lt VI 1 ALID gt lt A length lt 40 ALTX gt gt Answet S5F2 Direction E gt H Exception 11 7 5 3 65 2 Alarm Report Acknowledge Description Ackno
62. gt TSC Diffusion 2 Wait until main overview screen appears 32 Click with the right mouse button on System in the navigation bar in the bottom field 33 Select Update The server shows the server name and 1 stack with 1 tube 2 3 CONFIGURATION OF THE TSC II Configuration of TSC II is only required for a fresh installation 1 To start up TSC II press Start Programs gt TSC Diffusion gt TSC Diffusion 2 2 The communication program will be started The TSC II will start up in Overview The main field will be empty Click with the right mouse button on System Select Update After a few minutes in the Tube selection field the name of the computer will appear for example TSC server Select this name Server TSC server 3 Select System 4 Login with User Name sysmaster and Password sm 5 Select General System Setup 6 Add a tube by pressing 7 Fill in the tube name stack nr position 8 Select a value for logging size Divide the available disk size by the number of tubes Select the nearest lowest value For example If the value of tube is 55 Mb select 50 Mb 9 Select update time 10 minutes This forces a logging every 10 minutes 10 Select COM3 for COM port first port of the moxa card 11 Save data Repeat this procedure for the other tubes When the system asks to use the tube as base press OR NOTE e Make sure the correct Communication port is selected Pres
63. messages If the sender has a multi block message to send then he she must receive permission from the receiver prior to sending the data For this purpose there are some special functions created the so called Inquire Grant functions The sender inquires if it is possible to send the multi block message The receiver can grant the transmission or reject it After reception of the grant the sender can send the message If the sender receives a reject from the receiver he has to cancel the transmission of the multi block message 11 7 3 STREAM 1 EQUIPMENT STATUS This stream provides a means for exchanging information about the status of the equipment 11 7 3 1 S1F0 Abort Transaction Description Used as a reply when the transaction is aborted Function 0 is defined in evety stream and has the same meaning in every stream Structure Header only Answet Direction lt gt Exception 11 7 3 2 S1F1 Are you there Description Establishes if the equipment or host is on line Structure Header only Answet S1F2 Direction E lt gt H Exception 11 7 3 3 S1F2 On Line Data Equipment to Host Description Data signifying that the equipment or host is alive Structure lt L 2 lt A 6 MDLN gt lt A 6 SOFTREV gt gt Answet Direction E lt gt H Exception lt L 0 gt
64. modified allocated disk space for logging can be changed In addition access rights can be granted per uset language properties can be selected version numbers can be viewed and tube setups can be stored and restored fot backup purposes a 25 sep 2002 15 45 Tube setup r Tube modification TubelD Tube Name NITRIDE Stack Stack 1 7 Position Position 3 T Use Lot Comm port COM 5 Update time minutes NOT USED M File size for logging 10 Mb E Client names Overview Operations Recipes System Data Server DOCUMENTATION SYSMASTER ID rSetup DPC Setup Configuration DTC Setup Misc Configuration Paddle TC Reinit DB Profiling History General TSC 2 Setup General Import Export Access Properties Version FIGURE 7 1 THE SYSTEM SETUP MENU At tube level the setup MUST match the actual hardware to be able to safely and reliably operate a tube using TSC 2 When a tube is selected from the pull down menu or via the overview screen and the System Menu is accessed a screen as presented in Figure 7 1 appears On the right three submenus can be used DPC Setup DTC Setup and Miscellaneous Each submenu will be described in this section The greyed out General TSC 2 Setup can be accessed similarly by using the pull down menu and select the server name TSC II Referenc
65. occurring on the Equipment This capability contains e Reporting an alarm state change to the Host e Uploading a list of alarm texts e Enabling and disabling the notification of specific alarms e Host query of alarms set and enabled on the equipment The variables used are Variable RequestActiveAlarms 11 6 13 REMOTE COMMANDS This capability gives the Host a level of control over Equipment operations The Host sends a request to run a command with certain parameters on the Equipment The following commands are implemented Command Parameters Description START Start executing process on ed Equipment see section 11 6 6 ABORT Abort executing process EN Equipment see section 11 6 6 PAUSE Pause executing process on Equipment see section 11 6 6 RESUME EU Resume executing process on Equipment see section 11 6 6 CHANGE VALUE Equipment Constant Change the value of an Equipment ID ECID Constant New value GoToLocal ES Switch Control State to LOCAL see section 11 6 6 GoToRemote Switch Control State to REMOTE 21 see section 11 6 6 PP SELECT Recipe number Select Recipe The Host only gets permission to execute these commands on the Equipment if the Control state is set to ON LINE REMOTE 11 6 14 PROCESS PROGRAM MANAGEMENT Process program management provides a way to transfer recipes between Host and Equipment The Recipes are always unformatted the binary cod
66. of value elements in the Data Item Value For String formats ASCII Binary count specifies the number of characters in the string For Numeric formats I1 12 14 I8 01 U2 U4 U8 F4 F8 BOOLEAN count specifies the number of values in the array For simple scalar numeric values count is usually 1 For LIST items count specifies the numbet of items in the list If count is omitted then the length of the Data Item is implied by the value which follows The count can range between known limits It may be specified as minimum and maximum counts separated by two dots For example 0 40 Value Value is a single item element Values are shown a notation that depends on the item type For example ASCII values are shown as characters enclosed in quotes Unspecified Binary values are shown in hexadecimal Ellipses is used to indicate additional elements may occur as for example where substructures may repeat in the List structure All the possible SECSH functions are described in detail in the SEMI standard SEMI 5 0600 In this chapter all the implemented functions are listed with a brief description The data items specific to SECSII are written in captions These data items are described in detail in the same SEMI standard SEMI E5 0600 TSC II USER MANUAL 11 28 UTE MPRESS SECS GEM 11 7 2 MULTI BLOCK SECS II messages that are longer than 244 bytes are referred to as multi block
67. press OK The dataset is now ready to be used to present data that is selected by one of the History menus 5 USER MANUAL 8 3 AMTECH ET gt x TEMPRESS DATA Server TSC_SVR 8 1 2 HISTORY TIME To select a specific period of time enter the beginning and the end time The start time may not be later than the stop time The logged data from this selected period as defined in the dataset will be shown in the View screen in tabular or graphical form Server TSC_SVR 8 1 3 HISTORY LOT Enter the name of the Lot ID to search for Use wildcards to speed up searching Checking the Find all tubes option searches for the Lot ID in all tubes logging files If no begin endtime and Lot ID are entered all Lot ID s will be shown Press Find to start searching Optionally the begin and end time can be entered as a filter Server TSC_SVR 8 1 4 HISTORY RECIPE Enter the name of the recipe to search for Use wildcards to speed up searching Checking the Find all tubes option searches for the Lot ID in all tubes logging files If no begin endtime and recipe name is entered all recipes will be shown Press Find to start searching Optionally the begin and end time can be entered as a filter 5 USER MANUAL 8 4 TEMPRESS DATA 8 1 5 HISTORY ACTUAL The real time data may be reviewed by se
68. selected The TSC 2 setup menu contains the following items General Add or remove tubes edit tube communication setup and add TSC 2 servers and or clients Access Change the user access rights to TSC 2 Properties Customize TSC 2 language and color Version View software and DPC DTC version numbers Import export Import export tubes Export Data Export tube certifications and server data Close Exit TSC 2 7 3 1 GENERAL The General Menu is used to add or modify tubes to TSC 2 to set the tube communication configuration to set the logging file size and to give clients access to the tube It is accessed by selecting the System Menu button while a server not a tube has been selected 7 311 DEFINING A TUBE To define a tube select the option General of the General TSC 2 Setup The following screen will appear 04 okt 2002 09 36 Tube setup Server DOCUMENTATION SYSMASTER 1D WrEMPRESS sYSTEMS r Tube modification r Setup TubelD 38 DPC Setup Configuration Tube Name NTRIDE wel Stack Stacki e Position Position3 Use Lot M D pad Comm port coM5 x DTC Setup Misc Configuration T Update time minutes y Paddle Ti teinit DB File size for logging 10 Mb b Client names Profiling History General TSC 2 Setup General Import Export Access Part configuration Properties Close M4 Version Overview Operations
69. the simulated actual values of the selected data To select more then one parameter hold the CTRL key or Shift key and select the desired parameters TSC II Reference manual 6 18 TEMPRESS AMTECH RECIPES 6 12 2 RECIPE STEP STATUS I a Step Datatype Step Datatype lt 005 STEP 5 El Temperature E Update 005 STEP 5 gt Temperature Update 1000 STEP 0 8 Output iption Type Digital Output 1002 STER 2 S Temperature E3003 STER 3 Paddle Zone 1 Boat Loader 004 STEP 4 E Messages 005 STEP 5 fone 2 Temperature Spike Zone 2 006 STEP 6 Temperature Paddle Zone 2 007 STEP 7 Temperature Spike Zone 3 Temperature Paddle Zone 3 FIGURE 6 22 RECIPE STEPSTATUS FIGURE 6 23 The recipe step status can be used to verify a process recipe step by step It can be accessed by pressing Recipe step status In this menu the recipe steps can be selected with their different types of data Analog output Digital Output Temperature Boat loader and All In the table the selected Data Type will be shown with a Description the Value and the Recipe Step number It allows modification of the parameters to be reviewed before the process recipe is used the table TSC II Reference manual 6 19 odi TEMPRESS
70. time startup Control Attempt Online Sub state 0 EQUIP_OFF 1 HOST_OFF Index 5 USER MANUAL 66 TEMPRESS INDEX INDEX ABORT ippen oneta 5 3 DIGITAL TEMPERATURE ABORT PROCESS RECIPE 5 3 CONTROLLER XXI 1 1 1 2 1 3 ACCESS CONTROL SCREEN 7 39 DISPLAYING DATA 8 6 ADD A NEW USER OR TEMPLATE Vbi wang 7 40 ADDING A CLIENT 7 37 ADDING A SERVER 7 38 ALARMS etri 3 2 9 1 11 2 11 41 11 42 11 43 ANALOG INPUTS 7 5 ANALOG OUTPUT 7 7 ASSIGN PADDLES 5 4 BOAT MAXIMUM 7 3 BOAT MINIMUM 7 3 BOATLOADER 6 19 7 3 CEID11 2 11 19 11 35 11 36 11 44 11 45 11 46 11 54 63 65 CHANGE LOT ID 5 5 CHANGE PASSWORD 7 40 CHANGE SETTINGS 7 40 CLOCK 11 11 11 24 11 61 63 65 COMMUNICATION STATE 11 14 11 15 11 52 11 53 63 65 66 CONFIGURATION OF THE TSC II 7 CONFIGURE THE DTC 7 16 CONTROL STATE11 15 11 16 11 17 11 23 11 53 63 65 66 COPYING AN EXISTING RECIPE 6 4 CREATING A NEW RECIPE STEP IN RECIPE EXPLORER 6 9 DATA 3 2 6 19 7 32 7 36 8 1 8 2 DATASE T teer 8 3 DEFINING A TUBE 7 33 DELETE A COMMAND
71. to ON LINE at transition 7 from the host ON LINE Operator actuates OFF EQUIPMENT OFF LINE 5 LINE switch Undefined Entry to ON LINE state ON LINE Sub state conditional on REMOTE LOCAL switch setting Property 300004 SC Operator sets front panel switch to REMOTE i Operator sets front panel switch to LOCAL ON LIN Equipment accepts Set HOST OFF LINE OFF LINE message from ost SIF15 HOST OFF Equipment accepts host LINE request to go ON LINE SIF17 HOST OFF Operator actuates OFF EQUIPMENT OFF LINE LINE LINE switch 12 The variables used are Variable Control State 11 6 6 PROCESS STATE The Process State is the state of the running process Through the SECS GEM interface the Host can control part of the process steps The SECS GEM interface holds a simplified model of the Process State Model 11 6 6 1 States The following Process States are defined IDLE In this state the Equipment is awaiting instructions RUNNING Running is the state in which the Equipment is executing a recipe automatically and can continue to do so without external intervention TSC II USER MANUAL 11 17 SU AMTECH TEMPRESS SECS GEM HOLD In this state processing is suspended and the Equipment is awaiting a command 11 6 6 2 State Transitions The Finite State Diagram in Figure 11 11 shows the different state transi
72. tsc T scSvr mdb 6 0 DELETE FROM tblRecipe IN tsctest tsc T scS vr mdb DELETE FROM tblLot IN tsctest tsc T scS vr mdb DELETE FROM tblTrend IN tsctest tsc T scSvr mdb INSERT INTO tblRecipe IN tsctesltse TscSvr mdb SELECT from tblRecipe INSERT INTO tblLot IN tsctest tsc T scS vr mdb SELECT from tblLot INSERT INTO tblTrend IN tsctesttsc T scSvr mdb SELECT from tblTrend 14 Close the window by pressing the X in the right top corner Now both databases are converted to the new format 5 Reference manual 2 15 SU AMTECH WM TEMPRESS BASIC OPERATION 3 BASIC OPERATION 3 1 GETTING STARTED 1 Turn on the computer 2 Login as TSC with password TSC 3 The server will automatically start 4 Press Start Programs TSC Diffusion TSC Diffusion 2 The TSC II client program will start and the main screen Overview will be displayed 3 2 BASIC SCREEN LAYOUT The screen Overview is a diagram of the floorplan of the equipment which is controlled by TSC II The design of the user interface is based on e split up of main screens in taskgroups general operations processing and system engineering The ability to navigate directly from one main screen to another Horizontal navigation e The possibility to switch Tubes within each main screen Vertical navigation The main screens mai
73. tube hardware Number Enter the number of the Digital Input Mnemonic Enter the name for the Digital Input Description Optionally give a description of the Digital Input NOTE all data will be lost Press to save the entered data confirm the question Save Data or The complete list of Digital Inputs can be printed using the Print button TSC II Reference manual TEMPRESS SYSTEM A list of predefined Digital Inputs from another tube matching the same hardware may be imported using the Import button WARNING After import check new settings to match the actual tube hardware 7 2 1 4 Digital Outputs Digital Outputs can be used to open valves or start an external torch Select DO to open the following screen 25 sep 2002 14 16 4 STACK 01 A3 NITRIDE i SYSMASTER ID DPC Digital out num Number Configuration Messages Al Pressure Mnemonic 2 5 Range Description ine Read Write DTC Setup Misc M 4 n Configuration TouchScreen Operations Paddle TC PID Screen Reinit DB Spike Correction Profiling Recipes Read Write General TSC 2 Setup Profiling History Import Export Overview Operations Recipes System Data FIGURE 7 5 DIGITAL OUTPUT CONFIGURATION The
74. will appear Number of zones Spike type 1 3 Enter the number of heating zones for the tube The possible values are 3 4 5 or 6 with the most common 3 or 5 zones Select the type of spike thermocouple for zones 1 to 3 Type K Platinel R S and B are available See the REFERENCE MANUAL DTC for more details about thermocouple type modification TSC II Reference manual D T AMTECH TU TEMPRESS 5 5 Spike type 4 6 Select the type of spike thermocouple for zones 4 to 6 when present Type K Platinel R S and B are available Paddle type 1 3 Select the type of profile thermocouple for zones 1 to 3 Type K Platinel R S and B are available Paddle type 4 6 Select the type of profile thermocouple for zones 4 to 6 when present Type K Platinel R S and B are available Operating Temp Enter the minimum and the maximum operating temperature of the tube This depends on the type of heating element used The appropriate thermocouple type must be selected for safe and reliable operation The range 0 to 1400 C Max heat up Enter the maximum heat up rate for the 5 temperature ranges This parameter sets the limit on the maximum ramp up speed for each temperature range and is used to increase lifetime of both heating element and process tube The range of possible values for this parameter is 0 0 to 25 5 C min If the rate is set on 0 0 C the maximum heat up rate is determined by the power transformer and heating ele
75. will reject the Inquire and the scenario ends 3 S6F11 E gt H Equipment sends Event Report 4 S6F12 H gt E Host acknowledges Event Report 11 8 4 1 2 Host requests event report Step SECS Direction Description Message 1 S6F15 H gt E Host requests an Event Report for a specific event CEID 2 S6F16 E gt H Equipment sends the requested event report 11 8 4 2 Dynamic Event Report Configuration 11 8 4 2 1 Collection Event Reporting Set up Step SECS Direction Description Message 1 52 39 gt If Define Report is Multi Block then send Multi Block inquire Else go to step 3 2 52 40 gt Multi block grant 3 S2F33 gt Send Report definitions The Equipment will erase report definitions with the same RID 4 S2F34 E gt H Report Definitions Receive Acknowledge 5 S2F39 gt If Link Event Report message is Multi Block then send Multi Block Inquire Else go to step 7 6 52 40 gt Multi Block Grant T S2F35 H gt E Link reports to events Any links from previous reports events are erased 8 S2F36 gt Link Report Event Definitions Receive Acknowledge 9 S2F37 H gt E Enable specific event CEID reporting 10 S2F38 E gt H Enable Event Reporting Receive Acknowledge 5 USER MANUAL 11 54 UTE MPRESS
76. 2 v Enabled v Disabled v In Service v Demo mode Enables communication to the tube The status indicator will turn green Disables communication to the tube The status indicator will turn brown Maintenance status of the tube Disables logging communication still enabled The status indicator will turn brown The status indicator will turn brown AN NOTE The default colors mentioned can be modified in the System Properties of the server See section 7 3 6 TSC II Reference manual 4 2 55 e oness svarews DELL STACK 01 A3 NITRIDE GUS TUBE SELECTION USER TUBE COMMUNICATION LOGIN PROPERTIES TUBE NAME FIGURE 4 2 TUBE SELECTION AND PROPERTIES TSC II Reference manual 4 3 SU AMTECH WM TEMPRESS OPERATIONS 5 OPERATIONS FW TEMPRESS SYETEMS 20 sep 2002 14 40 Operations Information STACK 01 A3 NITRIDE P4 Lou Recipe NITRIDE 1 LOT 01 CUSTOMER 1 Process Time ooo 00 00 LOT 02 CUSTOMER 1 Step 00 STEP 0 Step time 000 0000 03 CUSTOMER 1 LOT 04 CUSTOMER 2 Message LOAD UNLOAD Position 0 LOT 05 CUSTOMER 2 Wait for START SYSMASTER start Select Recipe Step 00 STEP 0 hd Edit Variable Commands Write recipe at start to DPC T Use lot info Paddle Assig
77. 2 11 57 SHUTTING DOWN THE TSC 7 44 11 9 11 42 11 57 SIMULATION GRAPHICAL 6 18 SOFO uon 11 9 11 42 11 57 SPOOLCOUNTACTUAL 11 27 64 hir M 11 9 11 43 SPOOLCOUNTTOTAL 11 27 64 ig MER M DNE 11 9 11 43 SPOOLFULLTIME 11 27 64 11 9 11 43 SPOOLSTARTTIME 11 27 64 S0F 1 oet 11 9 11 43 11 56 START A RECIPE 5 2 S6F11 11 3 11 9 11 10 11 44 11 54 START PAUSE AND CONTINUE A S6F12 11 10 11 45 11 54 5 3 56 15 11 10 11 45 11 54 STOPPING THE TSC ll 3 6 56 16 11 10 11 45 11 54 SV 11 2 11 10 11 19 11 30 11 44 56 19 11 10 11 46 11 55 SVID 11 2 11 29 11 30 11 34 906F2 11 9 11 44 11 56 SYSTEMXX 1 1 1 2 7 8 3 2 6 56 20 11 10 11 46 11 55 16 7 1 7 3 7 37 7 38 7 39 S6F23 11 10 11 27 11 46 11 62 TEMPERATURE DETAIL STATUS 6 2 comete tete tu 11340 111 46 11 02 2 8 13 SOF5 xat 11 9 11 44 11 54 TERMINAL ID 11 24 64 SOFO 11 9 11 44 11 54 TERMINAL TEXT 11 24 64 t oa 11 10 11 46 TIMEFORMAT 11 25 64 dtp 11 10 11 47 11 58 TOUCH SCREEN 57 19 11 10 11 48 11 58 CONFIGURATIONS 7 25 2 11 10 11 47
78. 3511 9 11 35 11 36 11 37 11 54 TSC II USER MANUAL 68 D AMTECH TEMPRESS INDEX S2F36 11 9 11 36 11 54 SOF Oss 11 10 11 48 Yd aie 11 9 11 36 11 54 S9E 1 onustus 11 10 11 49 11 59 S2F38 11 9 11 36 11 54 S9F11 11 10 11 50 11 60 S2F39 11 9 11 37 11 54 11 56 SOFT es 11 10 11 50 11 60 S2F40 11 9 11 37 11 54 11 56 S9F3 11 10 11 49 11 59 S2F44 11 9 11 37 11 57 SOP aside s 11 10 11 49 11 60 52 42 11 9 11 37 11 58 SOFT indecens 11 10 11 49 11 60 SOFAS 11 9 11 38 11 61 S9F9 11 10 11 49 11 60 11 9 11 38 11 61 SECS11 1 11 3 11 7 11 8 11 11 52 4511 9 11 22 11 37 11 39 11 11 14 11 27 11 28 11 29 11 51 SECS GEM11 1 11 3 11 4 11 5 52 46 11 9 11 39 11 56 11 6 11 7 11 8 11 11 11 12 11 S2F47 11 9 11 40 11 57 17 S2F48 11 9 11 40 11 56 11 57 SELECT A PROCESS RECIPE 5 2 SOF O cni enu s E Cache temas 11 9 11 41 SELECT A 7 34 11 9 11 41 11 57 SELECTING A TUBE 3 6 11 9 11 41 11 57 SERVER CLIENT FOR S5F39 11 9 11 42 11 57 7 36 55 4 11 9 11 4
79. 5 6795 7000 7000 205 7000 205 6795 7000 000 L3 Digital Output Main Nr Mnemonic a 1 N2 or Temperature EN ort Normal Tem Analog IO Analog Input pcs2 P Mnemonic Setp 4 An np Mnemonic Act Unit Seto SINS profile Temp 1 N2 00 1000 2 pcs1 00 1000 Recipe 3 pcs2 00 1000 4 NHS 00 1000 8 waterviv on 4 gt 8 PRESSURE 000 00 00 Branch Subroutine Step Branch Loop Step Counter Alarm Help FIGURE 8 7 MONITORING MAIN DETAIL STATUS 5 USER MANUAL 8 11 ras AMTECH TU TEMPRESS DATA The Main detail screen is divided in Process Information Temperature Analog IO Analog Input Digital Input and Digital Output sections Branch Subroutine and Branch Loop The Process Information sections contains the following items The tube ID and name The recipe and name The message for the current step The process time The step number and time The action for which the controller is waiting The boat position setpoint and speed The temperature section contains the following items for each zone The paddle setpoint and actual value The spike setpoint and actual value The deviation from the setpoint of the paddle thermocouple The ramp slope and power The analog IO section contains the following items for each analog I O The name of the gas The setpo
80. 9F3 S9F5 59 59 9 59111 S9F 13 S10F0 S10F1 S10F2 S10F3 S10F4 Event Report Acknowledge Event Report Request Event Report Data Individual Report Request Individual Report Data Request Spooled Data Request Spooled Data Acknowledgement Send Abort Transaction Process Program Load Inquire Process Program Load Grant Process Program Send Process Program Acknowledge Process Program Request Process Program Data Current EPPD Request Current EPPD Data Abort Transaction Unrecognized Device ID Unrecognized Stream Type Unrecognized Function Type Illegal Data Transaction Timer Timeout Data Too Long Conversation Timeout Abort Transaction Terminal Request Terminal Request Acknowledge Terminal Display Single Terminal Display Single Acknowledge 11 5 5 VARIABLES The Equipment has a fixed set of variables that can be read by the Host Each variable is identified by a unique Variable ID VID The variables that exist are shown in Appendix A There are three types of variables Status Variables SV Data Variables DV and Equipment Constants EC The Host can read Variables of any type but can set values only for Equipment Constants The Host can read values for Status Variables and Equipment Constants whenever the Equipment is On Line but the values for Data Variables are typically meaningful only immediately after certain Collection Events CEIDs and so are typically reported only in Event Rep
81. APPENDIX Process State Old RequestActiveAlarms SpoolCountActual SpoolCountTotal SpoolFullTime SpoolStartTime Terminal ID Terminal Text TimeFormat 559 sv Al20 sv Al20 14 560 Process State The previous value of the Process State A list of all active alarms A count of the number of messages actually present on the spool disk adjusted for any messages which have been overwritten or otherwise discarded A count of the number of messages the equipment attempted to write to the Spool The date and time at which the Spool area became full The date and time at which the first message was written to the current Spool The ID of the terminal to which the last text message was sent The text message last sent to a terminal The setting of this EC controls whether the equipment shall send the Data Items STIME and TIME in 12 or 16 byte format 0 12 byte format 1 16 byte format Spool State SV 14 565 Communication State 5 USER MANUAL 64 UTE MPRESS APPENDIX B Appendix B Preconfigured Events Name Communication State Change Control State OFF LINE Control State LOCAL Control State REMOTE Processing Started Processing Completed Processing Stopped Processing State Change Equipment Constant Change Process Program Selected Spooling Activated Spooling Deactivated
82. ECS Direction Description TSC II USER MANUAL 11 55 SUC AMTECH TEMPRESS SECS GEM Message 1 S2F29 H gt E Host requests name of Equipment Constant s ECID 2 S2F30 gt Name s of requested Equipment Constant s 11 8 6 TRACE REPORTS 11 8 6 1 Host Initiates Trace Report Step SECS Direction Description Message 1 52 23 gt Host sends Trace Data initialization Request containing the trace setup information The Host also can send a request to terminate trace by using the Trace ID and setting the total samples to 0 2 S2F24 E gt H Acknowledge trace initiated 3 56 1 gt Send Trace Report 56 2 gt Acknowledge receipt of Trace Report 11 8 7 LIMITS MONITORING 11 8 7 1 Host defines Limit Attributes Step SECS Direction Description Message 1 S2F39 gt If Define Limits message Multi Block then send Multi Block Inquire Else go to step 3 2 S2F40 E gt H Multi Block Grant 3 S2F45 gt Host defines new variable limit attributes 4 52 46 gt Equipment acknowledges receipt of Limit Define message 11 8 7 2 Host initiated Step SECS Direction Description Message 1 S1F1 H gt E Are you there 2 S2F48 gt Equipment replies with attributes MDLN SOFTREV 5 USER MANUAL 11 56 UTE
83. ECT PROPERTIES Select the desired property from the pull down menu select the desired condition and adjust the related parameters Condition Purpose Digital inverted Valves Off or On condition Normally Open Digital Valves On Off condition Normally Closed Absolute Text for temperature gasflow boat position Absolute with Absolute number multiplied multiply Relative Position Relative on the screen TSC I Reference manual 7 29 ar T AMTECH TU TEMPRESS SYSTEM Relative with Boat position relative on the screen and multiplied to fit within the multiply screen Datal AND Data2 Both condition must be On Datal OR Data2 Either condition must be On Data above value to change when gasflow is above the parameter value 0 1 Data below value to change when gasflow is below the parameter value 0 1 String value Text content Example conditions are indicated in bold Press apply to set the conditional properties Close the dialog box by pressing the cross in the upper right corner of the dialog box Press save to store the modified operations screen 7 2 3 2 4 Edit customer library objects The customer library can be expanded and existing objects modified by selecting Standard Library Objects are available to create and or modify the custom designed library objects The properties of the custom designed objects m
84. ETE FROM tblRecipes IN tsctest tsc TSC mdb DELETE FROM tblRecipeSteps IN tsctest tsc TSC mdb DELETE FROM tblRecipeStepLines IN tsctesttscNTSC mdb DELETE FROM tblCalibration IN tsctest tsc T SC mdb DELETE FROM tblConvevorProfiling IN tsctest tsc T SC mdb DELETE FROM tblDbi IN AtsctesttscsTSC mdb DELETE FROM tbIDTCNormalT emperatureD ataControZone IN tsctest tsc T SC mdb DELETE FROM tbIDTCProfileConveyor IN tsctest tsc TSC mdb DELETE FROM tbIDTCProfileHistory IN tsctest tsc TSC mdb DELETE FROM tbIDTCProfileT emperatureD ataControZone IN tsctest tsc T SC mdb FROM ai IN SSrectesH tees TSC mah 5 Close the window pressing the X in the right top corner 6 Press the Convert Database button again Db2Db xi Convert from D Memp TscSvr mdb 0 D Program Files TEMPRESS SYSTEMS INC Tempress System Co 6 0 Select from button Change file type to TSC server file 9 Select TscSvr mdb from the source directory 10 Select to button 11 Change file type again to server file 12 Select TscSvr mdb at the target folder 13 Then press the Convert button 5 Reference manual 2 14 1 SU AMTECH W TEMPRESS TSC II SOFTWARE INSTALLATION When ready the following screen will appear Db2Db from tsctest tsc backup T scS vr mdb 41 Convert to Atsctest
85. Files will be copied to the hard disk Yes I want to restart my computer now Finish Ctrl Alt Del to login on the computer username login as Administrator Password Hmi Post Install screen will open automatically unzip folder a rentior under it is no default folder Unzip Ok after successfully unzipping Close ignore Windows XP error message Mdac typ V2 5 exe the license agreements Next 2x 5 Reference manual 2 1 74 AMTECH 55 l TSC II SOFTWARE INSTALLATION 25 Press 26 Select 277 Press Finish when setup is completed Ok in the HMI PostInstall window to finish the installation X button in the upper right corner to close the window 2 1 1 TSC REGISTRY SETUP FOR WINDOWS NT 2000 1 Double 2 Double Select Select Fill in Select Select Select 9 Select 10 Select 11 Select 12 Select 13 Press 14 Select 15 Press 16 Click 17 Press 18 Type 19 Press 20 Press 21 Type RO 22 Press 23 Plug in AN 24 Press 25 Start 26 Select click on My Computer click on D Program Files Tempress System Inc Tempress System Controller Sharing by clicking with the right mouse button on Db directory Shared as Sharename TSC Permissions Everyone for Access Through Share Permission Remove Add Add users and groups Show users TSC user Add Full control Ok 2x X button in the upper right corner t
86. L 11 31 TEMPRESS SECS GEM Answet S1F18 Direction gt Exception 11 7 3 13 S1F18 On Line Acknowledge Description Request to go ON LINE acknowledge or error Structure lt B 1 ONLACK gt Answet Direction E gt H Exception 11 7 4 STREAM 2 EQUIPMENT CONTROL AND DIAGNOSTICS Messages which deal with control of the equipment from the host 11 7 4 4 S2F0 Abort Transaction Description Used as a reply when the transaction is aborted Function 0 is defined in every stream and has the same meaning in every stream Structure Header only Answet Direction E lt gt Exception 1 7 4 2 S2F13 Equipment Constant Request Description Equipment constants EC can be obtained using this message A zero length list means report all ECVs Structure lt L NoOfECIDs lt 1000 lt VI ECID gt gt Answet S2P14 Direction gt Exception 11 7 4 3 SZF14 Equipment Constant Data Description List of equipment constants as requested Structure lt L NoOfECVs lt 1000 lt ECV gt gt Answer Direction E gt H Exception If ECV does not exist ECV item in list is empty 5 USER MANUAL 11 32 55 SECS GEM 11 7 4 4 SZF15 New Equipment Constant Send
87. L 2 lt U1 1 STRID gt lt L FUNCTION lt 256 lt U1 1 FCNID gt gt gt gt Answet S2F44 Direction H gt E Exception 11 7 4 25 S2F44 Reset Spooling Acknowledge Description Acknowledge or error on Reset Spooling Request Structure lt Lp2 lt B 1 RSPACK gt lt L STREAM lt 256 lt L 3 lt U1 1 STRID gt lt Bil STRACK gt lt L FUNCTION lt 256 lt U1 1 FCNID gt gt gt gt gt 5 USER MANUAL 11 38 4 AMTECH TEMPRESS SECS GEM Answer Direction E gt H Exception If RSPACK 0 a zero length list STREAM is given indicating no streams or functions in error A zero length list FUNCTION indicates no functions in error for specified stream 11 7 4 26 SZF45 Define Variable Limit Attributes Desctiption Define a set of limits for a single variable or a set of variables zero length list NoOfVIDS 9 sets all limit values for all monitored VIDS to undefined zero length list NoOfLimits 0 sets all limit values for that VID to undefined zero length list after LIMITID sets that limit to undefined Structure lt Lp2 lt DATAID gt L NoOfVIDS 1000 lt L 2 lt VID gt lt L NoOfLimits lt 7 lt L 2 lt LIMITID gt lt L 2 V 1 UPPERDB gt V 1 LOWERDB gt gt gt gt gt gt gt Answe
88. MINAL SERVICES The purpose of the functions of this stream is to pass textual messages between the operator terminals attached to the Equipment and the Host 11 7 9 1 S10F0 Abort Transaction Description Used as a reply when the transaction is aborted Function 0 is defined in every stream and has the same meaning in every stream Structure Header only Answet Direction lt gt Exception 11 7 9 2 S10F1 Terminal Request Note Messages are supported but not implemented yet Description Send a terminal text message to the Host Structure L 2 lt B 1 TID gt 5 USER MANUAL 11 50 55 SECS GEM lt V 1 TXT gt gt Answet S10F2 Direction E gt Exception E 11 7 9 3 S10F2 Terminal Request Acknowledge Description Acknowledge or error on receipt of terminal text message Structure lt B 1 ACKC10 gt Answet Direction E lt gt Exception 11 7 9 4 S10F3 Terminal Display Single Description Send text from Host to specific terminal on Equipment Structure lt L 2 lt B 1 TID gt lt V 1 TXT gt gt Answet S10F4 Direction gt Exception 11 7 9 5 S10F4 Terminal Display Single Acknowledge Description Acknowledgement of or error on re
89. MODULE 11 1 uote dac tat mft etm SUT 11 1 11 2 Definitions and abbreviations sss 11 1 11 27 amp t stetit ttti Credere 11 1 11 2 2 Abbreviations eerte 11 1 over VIEW a 11 3 11 4 Basic Operati ee e o npe e tei pei tete eet 11 5 11 41 7Config ring DOFt ttt ete eee 11 5 11 4 2 Configuring Device ssssssseeeeeeene retener 11 6 11 4 3 Starting communication sss 11 7 AMTECH TEMPRESS TABLE OF CONTENTS 11 5 Technical specifications SECS seen 11 7 11 571 IntrodUctiODi Jo Roh rette Rete prote ein 11 7 11 5 2 Serial communication SECS I sse 11 8 11 5 3 Ethernet communication 5 5 11 8 11 5 4 SECS II Message SUMMALY c cc ccesessesessesessesseesessecesteseeseeseeseeneens 11 8 1 1 5 5 Variables reete tete 11 10 11 6 Technical specifications GEM sse 11 11 112071 SBEOD6TFtIeS crecer rate eiecti 11 11 11 6 2 Varlabl68 ease im en lcd i en 11 12 11 6 3 Event configuration sss 11 12 11 6 4 COMMUNICATION esessesesesessecsecsecseeneseeseesecsecusateseeesseeseeseeneene
90. MPRESS 1 SYSTEM 7 3 2 SELECTING SERVER CLIENT FOR NETWORKING TSC 2 has the capability for a server client interactive network The servers are connected to the tube controllers Servers can be accessed by clients and a server may also operate as a client to another server Up to 16 servers can be connected in the same network and each server can handle up to 16 furnace tubes This provides a total of 256 tubes that can be controlled in a network Each tube can be accessed by 8 different clients which is set at the tube configuration of the TSC 2 General setup A client can access one to ALL tubes User selection Server computers are located at the furnace area Client computers can be located anywhere in the furnace area the service area in the office or even fully remote All tube functions available on each server and are also available on each configured client This includes remote Recipe Editing Data Analyses and Alarm Status N CLIENT CLIENT CLIENT SEA S CLIENT SERVER CLIENT SERVER FIGURE 7 27 OVERVIEW OF THE CLIENT SERVER ARCHITECTURE There is one restriction in the client server architecture of Figure 7 27 The client running on the server computer has always access to all tubes of this server This provides increased safety and operability in case the network fails TSC II Reference manual 7 36 1 SUC AMTECH 7 55 1 SYSTEM 7 3 3 ADDING A CLIENT To a
91. PERATURE TABLE The Normal Temp screen shows the temperatures and limits used in all the zones of a tube during the normal operation of the furnace The fields contain the following information Recipe Number This allows any of the 16 possible recipes to be selected Control This shows the type of control independent or master slave and the thermocouple on which the control is to be exercised Temperature Setpoint Shows the temperature setpoint for each zone which has been set in the tube configuration Slope Shows the rate of increase in temperature for each zone in a range from 0 0 to 99 0 C High Low Limits The high limit shows the allowed maximum deviation above the temperature setpoint before an alarm is generated The low limit shows the allowed maximum deviation below the temperature setpoint before TSC II USER MANUAL 8 15 1 Y p AMTECH x TEMPRESS DATA an alarm is generated Both parameters must be in the range 0 0 to 25 5 Shows the gain setpoint for each zone This must be the range 0 to 255 8 5 3 PROFILE TEMPERATURE TABLE STACK 01 A3 NITRIDE iD rData Table Selection ETTS General Table Table Table C Table D Zone 1 Zone 2 700 0 7000 800 0 800 0 900 0 9000 Log data Zone 2 Zone 3 Run Tube 10100 1010 0 Main 1100 0 1100 0 Temp
92. R MANUAL 8 1 1 Y p AMTECH x TEMPRESS DATA 8 1 LOGGING DATA The Logging Data menu allows process results to be reviewed and current running status of all connected tubes to be monitored Press Log data to open the logging screen TEMPREss sySTEMs 26 2002 09 04 Data Server DOCUMENTATION r Selection r View rData NITRIDE Sm General History time I Main Title History lot 186 Sub Title Run History Recipe 170 History actual 160 140 Tube Fi Main Temperature Normal Temp profile Temp Recipe 130 Dataset Y Axis 120 110 100 m 10 20 30 40 50 70 80 90 100 110 120 130 bx X Overview Operations Recipes System Data Alarm Help FIGURE 8 1 LOGGING DATA MAIN SCREEN The logging data main screen contains two sections Selection and View The Selection menu allows a tube to be selected from a pull down menu define the search conditions in the History and define the Datasets that are used to present requested process information A Dataset needs to be defined first to select the requested process information such as spike temperature gasflows boat position and digital in
93. RIDE Data SYSMASTER 1D Setup DPC Setup Configuration Messages Al Pressure Units Read Write DTC Setup Misc Configuration TouchScreen Paddle TC Operations Screen PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup Import Export Port configuration FIGURE 7 2 ANALOG INPUT CONFIGURATION The Analog Inputs that must be defined here can be found in the electrical drawings of the furnace For a safe and reliable operation of the tube using TSC 2 the Analog Inputs described here MUST match the actual tube hardware Number Mnemonic Minimum Maximum Multiplier Enter the number of the Analog Input Enter the name for the Analog Input Enter the lowest value Enter the value matching the hardware maximum value closest to 2000 This value MUST be higher than the minimum value Select the multiplication factor to obtain the range that matches the range of the hardware connected to this Analog Input and give the desired resolution TSC II Reference manual 7 5 ar T AMTECH TU TEMPRESS SYSTEM Unit Pree programmable unit for DPC version 2 1 or higher only Up to 4 characters can be used For DPC versions 2 G or lower select the appropriate Unit from the pull down menu Range The range will be calculated automatically from the minimum maxi
94. TS indicates that the SVID does not exist 11 7 3 8 S1F13 Connect Request Description Attempt to initialize communication connection request Structure lt L 2 TSC II USER MANU AL 11 30 SUUM AMTECH TEMPRESS SECS GEM lt A 6 MDLN gt lt A 6 SOFTREV gt gt Answet S1F14 Direction lt gt Exception lt L 0 gt 11 7 3 9 S1F14 Connect Request Acknowledge Description Accept or Deny Establish Communication Request S1F13 Structure L 2 lt B 1ICOMMACK gt lt L 2 lt 6 MDLN gt lt A 6 SOFTREV gt gt gt Answer Direction E lt gt H Exception Request denied MDLN and SOFTREV are not available lt L 2 lt gt lt L 0 gt gt 11 7 3 10 S1F15 Request Off Line Description The host requests that the equipment transitions to the OFF LINE Control state Structure Header only Answet S1F16 Direction gt Exception 11 7 3 11 S1F16 Off line Acknowledge Description Request to go OFF LINE acknowledge or error Structure lt B 1 OFLACK gt Answet Direction E gt H Exception 11 7 3 12 S1F17 Request On Line Description The host requests that the equipment transitions to the ON LINE Control state Structure Header only TSC II USER MANUA
95. TUBE DATA To import or export tube configuration data for backup purposes the Import Export menu must be selected in the General TSC 2 Setup The following screen will appear piece 25 sep 2002 16 04 Tube setup Server DOCUMENTATION SYSMASTER 1D Import Import Server data rSetup rImport Export DPC Setup A1 EMPTYATM A1 A2 WETOXID A2 WETOXID MTS A3 NITRIDE A3 NITRIDE A4 EMPTYLP A4 EMPTYLP Export Tube Certifications Recipes Export logging data Export logging data Lot Export logging data Recipe Export Server data DTC Setup Configuration Paddle TC PID General TSC 2 Setup General Import Export Close Access Properties Version Overview Operations Recipes System Data Alarm Help FIGURE 7 33 IMPORT EXPORT A TUBE Two columns provide Import and Export functions They include the following items Import a tube Import Server Data Export Tube Certifications Recipes Export Logging Data Time Export Logging Data Lot Export Logging Data Recipe Export Server Data Import a tube database Import general server data Export the selected tube data to file Export logged data within a selected time range to file Export logged data of selected lots to file start and end time can be entered as filter for sear
96. Tempress System Controller II Reference Manual Tempress Systems Inc 5 manual M450_03 January 2004 This page intentionally left blank TEMPRESS TABLE OF CONTENTS TABLE OF CONTENTS TABLE OF CONTENTS 4h onpecssui abe eed onatncs usenahcarreeatavened II LIST OF FIGURES oro ie Mattie IX PREFACE XII RELATED XIII 1 4 40200242 41 47 0 000004404047 1 1 CHOI 1 1 5 EU 1 1 1 3 Minimum requirements sse nennen 1 2 1 4 Furnace control description sees 1 2 tS Hardware SAIC CLES ig RR 1 3 1 5 1 Digital process controller 2 2 21 2 2 00 40000 0000000000000501 1 3 1 5 2 Digital temperature controller sse 1 3 1 5 3 Flat Panel Display FPD senes 1 4 1 6 SymbOolgs xiii iic titii deci 1 4 2 TSC II SOFTWARE INSTALLATION ce 2 1 2 1 Installing new TSC II software 2 1 2 1 1 TSC registry setup for Windows 2000 2 2 2 1 2 TSC registry setup for Windows XP 2 3 2 2 Finish ti eterni e
97. a set of predefined events CEIDs The Host creates reports and links these to certain events see section 11 6 7 2 When an event CEID occurs the Equipment will send the configured report containing data values to the Host The Host can enable disable the event reporting per event The Host can request an event report for a certain event CEID 11 6 7 2 Dynamic Event Report Configuration This capability allows the Host to dynamically modify the Equipment event reporting setup It contains the following functionality e Host definition deletion of custom reports RIDs e Host linking unlinking of defined reports to specific events CEIDs e Host enabling disabling the reporting of specified collection events A report is a list of variables SV DV EC The Host sends this report with its ID RID to the host Then the Host sends a message containing the link between this RID and an event CEID The last step is enabling the event reporting for this event After this step the Equipment will send the report RID every time the specific event CEID occurs 11 6 8 VARIABLE DATA COLLECTION This capability allows the host to query for the equipment data variables and is useful during initialization and synchronization It contains the following function s The Host can request a report containing data variables from the Equipment by specifying the Report ID RID It is assumed that the report has been previously defined See s
98. ages ate put in the spool atea if Spooling is enabled The Equipment still tries to send Secondary messages answers to the Host These messages not put in the spool area This state has two sub states SPOOL LOAD and SPOOL UNLOAD These states can operate independently at the same time SPOOL LOAD He Equipment enters messages into spool area This state has two sub states SPOOL NOT FULL and SPOOL FULL SPOOL NOT FULL Spool area is not full messages are put into Spool area TSC II USER MANUAL 11 25 55 SECS GEM SPOOL FULL The Spool area is full The Equipment can be configured to overwrite old spool messages or to discard new messages This depends on the Equipment Constant OverwriteSpool SPOOL UNLOAD The Equipment handles the transmission of spooled messages to the Host This state has two sub states SPOOL OUTPUT and NO SPOOL OUTPUT NO SPOOL OUTPUT No messages are removed from the Spool area SPOOL OUTPUT Removal of messages from the Spool area state has two sub states TRANSMIT SPOOL and PURGE SPOOL TRANSMIT SPOOL The Host has requested the transmission of the spooled messages The Equipments sends the messages PURGE SPOOL The Host has requested to purge the spooled messages The Equipment removes all messages from the spool area and does not send them to the Host 11 6 18 2 State Transitions The Finite State Diagram in Figure 11 14 shows the different sta
99. alled select this option A High Speed Loader is a special loader with a maximum speed of 1 m sec For manually loaded tubes the boatloader option must be deselected Boat Minimum Enter the minimum value for the boat position Default is 10 mm and is equivalent to boat out Boat Maximum Enter the maximum value for the boat position The range is 10 to 3000 mm The boat maximum position is equivalent to boat in and should match the actual travel distance to allow accurate speed control Pulses per mm This option is only applicable to older tubes with step motors Current tubes use servomotors and this option is therefore ignored regardless of its value TSC I Reference manual 7 3 1 UTE I AMTECH MPRESS SYSTEM Number of I O used Analog Out Select the maximum number of Analog Outputs 8 or 16 This number must match the DPC processor board jumper settings See REFERENCE MANUAL DPC Analog In Select the maximum number of Analog Outputs 8 or 16 This must be the same as the number of Analog Outputs Digital Out Select the maximum number of Digital Outputs 8 16 24 or 32 This number must match the DPC processor board jumper settings See REFERENCE MANUAL DPC Digital In Select the maximum number of Digital Inputs 8 16 24 or 32 This number must match the DPC processor board jumper settings See REFERENCE MANUAL DPC Alarm IO config tubes without a Touchscreen a Digital Output Port Number ca
100. an empty report is assumed A zero length list for the number of reports means there are no reports linked to the given event CEID 11 7 6 7 86 12 Event Report Acknowledge Description Acknowledge or error of Report Send message Structure lt ACKC6 gt Answet E Direction gt Exception 11 7 6 8 S6F15 Event Report Request Description Request for reports that are linked to specified event CEID Structure lt VI CEID gt Answet SOF16 Direction gt Exception 11 7 6 9 S6F16 Event Report Data Desctiption Repotts linked to the specified event CEID Structure lt 3 lt 1 DATAID gt lt VI 1 CEID gt lt NoOfReports lt 1000 lt L 2 lt 1 gt L NoOfValues lt 1000 lt VII y gt gt gt gt gt Answet Direction E gt H TSC II USER MANUAL 11 45 55 SECS GEM Exception zero length list NoOfReports 0 means there are no reports linked to the given event CEID 11 7 6 10 S6F19 Individual Report Request Description Request for a specified report RPTID Structure lt 1 RPTID gt Answet S6F20 Direction H gt E Exception 11 7 6 11 S6F20 Individual R
101. arm Limit Parameters Paddle Profie contrat Main Alarm High 1 D Gan D Ready 5 Zonei Yes 00 00 10 60 30 00 Spike 2 Yes 0 0 00 10 50 30 98 00 Spike P 00 00 10 60 30 00 O No Spike Normal Temp profile Temp Maximum Spike Correction table Paddle Correction table Recipe Range Zone1 2 Zone3 Cal Tem TC1 0 1500 eoj 6o 60 1500 0 15000 15000 15000 1500 0 15000 15000 15000 PID parameters Thermocouple Type Spike Paddle Card P f e co e c Heat Up Prot Dev Spike o 300f 10 35 9 30 30 180 05 Paddle 300 amp 0 8 soj soj s so 15 15 15 150 05 600 900 e sof sof 55 90 10 10 10 130 05 Overview Operations Recipes System Data Alarm Help FIGURE 8 8 MONITORING TEMPERATURE DETAILS The monitoring temperature screen displays all the temperature data for the zones of the furnace The information for each zone consists of the following Temperature Setpoint and actual temperature for the paddle thermocouple Setpoint and actual temperature for the spike thermocouple 5 USER MANUAL 8 13 ot AMTECH TEMPRESS DATA Deviation from the setpoint of the paddle thermocouples The rate of increase in temperature slope The power The type of control INDEPENDENT or MASTER SLAVE The temper
102. ature table serene 6 16 Figure 6 20 Read Write recipes or normal temperature 6 17 Figure 6 21 Graphical simulation of the recipe ssssee 6 18 Figure 6 22 Recipe stepstatus Figure 6 23 6 19 Figure 6 24 Simulation process recipe sss 6 20 Figure 7 1 the system setup menu sse 7 1 Figure 7 2 analog input configuration csscssseescescesssssseesssesscsssseenscessanseseenssesconeeseensees 7 5 Figure 7 3 analog output configuration sss 7 7 Figure 7 4 digital input configuration oce ceret 7 10 Figure 7 5 digital output configuration sss 7 11 Figure 7 6 Messages configuration 7 12 Figure 7 7 pressure controller PID configuration sse 7 13 Figure 7 8 Read Write DPC menus ue ip oi tlie inedite 7 15 Figure 7 9 DTC configuFallOr ubt 7 16 Figure 7 10 Calibration temperature for the paddle thermocouples 7 18 Figure 7 11 pid parameter Table 7 19 Figure 7 12 maximum spike correction table see 7 21 Figure 7 13 profile temperature table sse 7 22 Figure 7 14 read write DTC menu tetettettetetetentennnns 7 24 Figure 7 15 Touch screen graphical layout bac
103. ay be set conditional which gives the possibility to create animated objects Edit library objects x Standard Library ineo B Customer library H bubbler gg 2 xl FIGURE 7 21 EDIT CUSTOMER LIBRARY OBJECTS 7 2 3 2 5 Set object properties Every object may have conditional properties which are defined in the Edit customer library objects section These conditional properties can be linked to any signal from the DPC and or DTC thus creating animated objects Figure 7 22 shows the conditional properties that can be activated for the selected object TSC II Reference manual 7 30 Y SUUS AMTECH TU TEMPRESS 4 SYSTEM FIGURE 7 22 LIBRARY OBJECT CONDITIONAL PROPERTY SELECTION LIST Line Color Rotation C X position C position C Width C Height C Value Cl Flip horiz C Flip vertical 7 2 3 3 Reinit dbase If DPC or DTC configurations have been modified and saved the TSC 2 database needs to be re initialized To re init the database press Reinit DB A window will automatically pop up if another menu is selected The following window will appear Overview Operations Recipes System Data 09 okt 2002 09 25 Tube setup C 4 Do you want to reinit DB STACK 01 A3 NITRIDE B rSetup DPC Setup Configuration SYSMASTER iD Messages Pressure
104. ayout that is used on the touch screen FPD Select Touch screen to open the following screen 25 Scp 2002 14 54 STACK 01 A3 NITRIDE Read Write Touchscreen Graphic Configuration Picture 13 3 2002 16 10 42 Read Write Delete Print Overview Operations Recipes System Data SYSMASTER ID rSetup DPC Setup Configuration Messages Al Pressure AO Range DI Units DO Read Write DTC Setup Misc TouchScreen Operations Screen Reinit DB Configuration Paddle TC PID Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup General Import Export Alarm Help FIGURE 7 15 TOUCH SCREEN GRAPHICAL LAYOUT BACKUP CONFIGURATION Select Read to create a backup of the touch screen graphical layout from the DPC Select Write to restore a backup of the touch screen graphical layout to the DPC Select Delete to remove a backup of the touch screen graphical layout from the list Select Print to create a printed hardcopy of the touch screen graphical layout TSC Il Reference manual 7 25 74 AMTECH WM TEMPRESS SYSTEM 7 2 3 2 Operations screen configuration The operations screen editor is used to create or modify a graphical screen layout for 5 2 Select Operations screen to open the following scre
105. ceipt of terminal text Structure lt 10 gt Answet Direction E gt H Exception 11 8 SCENARIOS This chapter provides an overview of all the mayor GEM scenarios possible between Equipment and Host The objective of this chapter is to provide the programmer of a Host application a description of how the different scenarios should be implemented The scenarios described in this chapter are the most common scenarios and do not include all the possible exceptions Chapter 11 7 SECS II Messages contains all the messages possible and also the exceptions 5 USER MANUAL 11 51 4 AMTECH TEMPRESS SECS GEM The scenarios do not contain any event reporting except the actual event reporting scenario S6F11 This is the case because the TSC application uses a strategy where one has a 100 freedom on choosing the event configuration See section 11 6 3 Event configuration for more information The data items specific to SECSII are written in Italic font These data items are described in detail in the same SEMI standard SEMI E5 0600 11 8 1 COMMUNICATIONS 11 81 1 Equipment establishes communication Assumption Equipment s Communication State is Enabled Not Communicating Step SECS Direction Description Message 1 S1F13 E gt H Equipment sends Establish Communication Request 2 Wait for reply If timer delay specified in EstablishCom
106. ching lots Export logged data of selected process recipes to file start and end time can be entered as filter for searching recipes Export general server data to file TSC II Reference manual 7 43 AMTECH x TEMPRESS SYSTEM Select the tube or data that has to be imported or exported Confirm the export or import action by pressing Yes Select in the browser the file where the tube has to be exported to or imported from 7 3 9 SHUTTING DOWN THE TSC To shutdown TSC 2 and exit the program from the system main menu select Close The following screen will appear gt LEa I ETiServer TSC_SVR SYSMASTER tube DPC Setup Configuration DTC Setup Misc DTC Configuration TSC2 Paddle d Dojou and te some General System Setup General Import Export Access Close Properties Version Overview Operations Recipes System Data Alarm Help FIGURE 7 34 SHUTTING DOWN TSC 2 Confirm the question to end the program by pressing Yes The TSC 2 client program will be closed The server communication program must be closed manually by pressing CTRL C TSC II Reference manual 7 44 1 UTE MPRESS DATA 8 DATA Data menu is used for real time monitoring of connected tubes and review logging data Its features include A
107. cipe to a file The pull down menu Zoom is used to Zoom in on the print preview Print recipe preview 4 25 sep 2002 12 56 STACK 01 NITRIDE 1D Normal o 4 NITRIDE1 NITRIDE2 PROFILE New Edit STANDBY Tesi Delete Close Abort A1 BADABORT Zoom 100 Recipe tix SYSMASTER Print ax 25 9 2002 12 52 Algemeen indeling Papier Kwalteit Recipe NITRIDE1 p Printer selecteren Normal temp Message 1 J HP Business Inkjet 2280 P E Koraal xe Read Write 0 00 C x Boat to Z Staus Gereed Afdrukken naar bestand Variable Localie Fifi Raa Graphical Opmerking zoeken Simulation Gas N2 1 pes Pesinaberek sm as 6 Alles Aantal exemplaren T ecipe Stepstatus Pages 4 1 gt S Selectie Huidige pagina Pagnas 1 Operations Voer slechts een paginanummer of een Simulation paginabereik bijvoorbeeld 5 12 Overview Operations Recipes System Data FIGURE 6 17 PRINT PREVIEW This prints a hard copy to the system printer 1 Export recipe This feature exports the recipe to a selected location as txt or html TSC II Reference manual 6 14 Y SUUS AMTECH TU TEMPRESS 4 RECIPES 2 Zoom in ot out the recipe overview SYSMASTER 25 9 2002 12 52 04
108. creen the available library objects can be accessed by pressing The following screen will open show library objects Standard Library Customer library FIGURE 7 19 DEFAULT LIBRARY OBJECTS TSC II Reference manual 7 28 7 AMTECH WM TEMPRESS 1 SYSTEM Two sections present the Standard Library and the Customer Library The Standard Library contains objects to create a line block circle ellipse arc polyline and text The Customer Library contains a valve MFC 3 zone and 5 zone furnace boat loader bubbler and orifice and can be expanded by creating and or editing library objects as described in section 7 2 3 2 4 To select an object click once on the desired object move the mouse pointer at the screen and click again To erase an object select the object with the pick tool and press delete on the keyboard To move an object select the object with the pick tool and drag the object to the desired position The position size and rotation of the inserted object can be modified at all times Conditional properties may have been activated in section 7 2 3 2 4 and can be modified by selecting the desired object with the Right Mouse Button An example screen is given below Library Object Properties Ed Fi Color Condition Digital Inverted Parameter 1 fal 1N2 z Passive Color m BLACK Active Color o BLACK FIGURE 7 20 OPERATIONS SCREEN OBJ
109. dd a client to the network go to General TSC 2 Setup and select General The following screen will appear a 10 okt 2002 15 25 Tube setup Server DOCUMENTATION SYSMASTER iD rSetup r Tube modification TubelD b DEC Configuration Tube Name NITRIDE Stack Stack 1 Position Position 3 Use Lot Comm port COM 5 DTC Setup Misc Configuration T Paddle TC Update time minutes 5 File size for logging v Gris Profiling History 7 Remove 7 General TSC 2 Setup General Import Export Access Port configuration 7 Properties Close A Woe xd S Version 7 7 Overview 7 Eperations Recipes System Data Alarm Help 4 FIGURE 7 28 ADDING A CLIENT TO THE NETWORK 7 7 7 7 f I Each tube must be specifically set available for the clients that exist in 1 Remove the network Go to the Client Names field and enter the names of Sery the client computers that need access to this tube A maximum of 8 Paste 1 clients can be granted access per tube 1 Click with the right mouse button in this field The following options are presented Add Remove Copy Paste 2 Select ADD to add a new client Enter the client computer name Press OK 3 Press SAVE to save the entered client name NOTE purchased The client names only apply in case a license for re
110. dification TSC II Reference manual 6 6 SUUS AMTECH TEMPRESS 5 6 3 EDIT PROCESS RECIPES The name of the process recipe can be modified by pressing Edit as described in section 6 2 3 The contents of the recipe consists of recipe steps which can be appended or inserted above existing recipe steps Each step contains commands which are described in section 6 4 6 3 1 NEW RECIPE STEP 1 To append a new recipe step click with the left mouse button on the Recipe Name in the Recipe Explorer in the left part of the main field and click New in the recipe Edit field Alternatively use the right mouse button to click once on the recipe name and select New Step to add a new step to the end of the recipe 2 The following screen will appear Give step name Cancel FIGURE 6 6 INSERT NEW RECIPE STEP 3 Give the new step a name to increase recipe readability and press OK Pressing Cancel will create a new step without a step name The new step will be automatically numbered If a new recipe step is created and existing recipe steps are present the user can copy an existing step into the new step See Figure 6 7 TSC II Reference manual 6 7 l stt AMTECH TEMPRESS 5 Zone1 0 0 C Slope hr min sec Variable Command Yes at 200 0 mm min with oscillation speed of 0 0 mm min Variable Command No hr min sec
111. e software installs any other software on the TSC server s or alters the original TSC server s hardware In this case support by Tempress Systems Inc will be supplied based on Tempress standard service chart Tempress Systems Inc is not responsible for any serial damage as a result of software deficiency TSC II USER MANUAL XII Te MPRESS RELATED DOCUMENTATION RELATED DOCUMENTATION Flat Panel Display Refetence Manual Digital Process Controller Refetence Manual Digital Temperature Controller Refetence Manual TSC II USER MANUAL XIII U TEMPRESS INTRODUCTION 1 INTRODUCTION 1 1 INTRODUCTION Tempress System Controller TSC ID is designed to provide centralized control of Tempress furnaces used for the production of silicon wafers The user interface is based on Microsoft Windows NT The TSC II has the possibility for a client server network Each server is protected by a parallel license key containing the customer name nr of tubes nr of 5 clients and number of SECS GEM modules The 5 can interface via the communication ports to the Digital Process Controller DPC and gain access to the Digital Temperature Controller DTC and the Flat Panel Display FPD to provide accurate control of all parts of a furnace A maximum of 16 DPCs can be connected to a communication extension card giving co
112. e Settings again to change Edit 4 Press Save to update the user or template 7 3 5 3 CHANGE PASSWORD 1 To change the password of a User select the option Change Password Confirm the question by pressing Yes 2 After the old password has been confirmed the new password can be entered twice Press Apply to use the new password 7 3 5 4 USE OF TEMPLATES Templates can be used to create settings for a group of users This allows quick generation of new user settings by dragging and dropping a selected Template on a user 1 select a template 2 drag drop the selected template by clicking and holding the left mouse button on the desired user 3 Confirm to update the user with the new settings TSC II Reference manual 7 40 SU AMTECH TEMPRESS SYSTEM 7 3 6 TSC 2 LANGUAGE AND COLOR PROPERTIES This option can be selected to customize TSC 2 to the desired language and color Select Properties to open the following screen 7empness systems Server DOCUMENTATION ID r System Properties Language Color 1 System colors B Configuration Enabled color Disabled color Merano MNNEEN DTC Setup Misc oon MEE n Apply Reinit DB Profiling History Overview Operations Recipes System Data Profiling Re Read General TSC 2 Setup Gene
113. e explorer Alternatively use the right mouse button on the recipe step once and select Delete TSC II Reference manual 1 4 7 AMTECH LENS x TEMPRESS RECIPES 6 8 DELETE A COMMAND A recipe command can be deleted by clicking with the left mouse button on the command and select Delete in the Recipe Edit menu Alternatively use the right mouse button on the command once and select Delete confirmation screen appears Press Yes to delete or No to return to the recipe explorer eo e Are you sure to delete the command Ne FIGURE 6 15 DELETE A RECIPE COMMAND 6 9 PRINT A RECIPE recipe can be printed by selecting the desired recipe and press Print A print preview will be generated This may take several minutes E Zoom Recipe Tube STACK 01 NITRIDE SYSMASTER 25 9 2002 11 16 34 NITRIDE1 00 STEP 0 Message LOAD UNLOAD 4 Sonalert alarm No Normal recipe 00 Zonel 25 0 Slope 0 00 Zone2 25 0 Slope 0 00 C min Zone3 25 0 Slope 0 00 profile table Fi MISI MINI Lc FIGURE 6 16 PRINT RECIPE TSC II Reference manual 6 13 SUUS AMTECH x TEMPRESS RECIPES The print preview screen contains two buttons and a pull down menu The amp button is used to give the Print command the l button is used to export the printed re
114. e is transferred between Host and Equipment This capability contains the following functions TSC II USER MANUAL 11 23 UTE 55 SECS GEM e Request a list of recipes Host Initiated Unformatted Recipe Upload Equipment to Host e Equipment Initiated Unformatted Recipe Upload Equipment to Host Host Initiated Unformatted Recipe Download Host to Equipment e Equipment Initiated Unformatted Recipe Download Host to Equipment The variables used are Variable PPChangeName PPChangeStatus 11 6 15 EQUIPMENT TERMINAL SERVICES Equipment Terminal Services allows the Host to display information on the Equipment s display device or the operator of the Equipment to send information to the Host The variables used are Variable Terminal ID Terminal Text 11 6 16 ERROR MESSAGES Error messages provide the Host with information describing the reason for a particular message communication fault detected by the Equipment The following faults are detected by the Equipment and reported to the Host e Unknown Device ID e Unknown Message Stream Type e Unknown Message Function e Wrong Message format e Wrong Data format Message too long e No reply within set period Transaction timer expired 11 6 17 CLOCK This capability enables the Host or Equipment to set or read the value of the internal clock of the other It can be used to synchron
115. e manual 7 1 ot TU TEMPRESS SYSTEM 7 2 TUBE SETUP A tube can only be safely controlled with TSC 2 if it is configured correctly Therefore TSC 2 MUST match the actual tube hardware Failure to do so may result in permanent damage to the furnace or cause serious if not deadly health risks WARNING TSC 2 setup must match the actual tube hardware Each tube is controlled by one DPC and one DTC The TSC 2 Setup submenu formerly known as certifications is used to correctly set up these controllers This Tube Setup screen is divided into three sections one for the DPC Setup one for the DTC Setup and one for Miscellaneous Setup The Tube Setup is activated by selecting the appropriate tube from the pull down menu Alternatively the tube can be selected in the Overview Menu and the Tube Setup is then activated by selecting the System Menu The DPC Setup consists of the following items e DPC configuration e Analog Inputs Analog Outputs e Digital Inputs e Digital Outputs e Messages e Pressure LPCVD only e Range e Units e Read Write The DTC Setup consists of the following items e DTC configuration e Paddle thermocouple e PID settings e Spike correction table Profiling Temperature Recipes e Read write The Miscellaneous Setup consists of the following items e Touch Screen backup e Operations Screen e Reinit DB e Profiling History 5 Reference manual 7 2
116. e program setup exe on the installation CD and follow the procedure as desctibed in section 2 1 steps 1 27 Make sure to have a backup of existing user files as described in section 2 4 1 2 Check if DB directory sharing properties are configured if not then follow steps 29 43 of the installation procedure 3 Finish the installation procedure as described in the steps 44 60 2 4 4 2 Converting existing database to new format To keep all the existing data the old database has to be converted to the new modified format From the startmenu select Programs gt TSC Diffusion gt HmiSim 5 Reference manual 2 12 SUUS AMTECH TSC II SOFTWARE INSTALLATION HmiSim fas Cemeseve Compare Properties 1 Press the button Convert database 2 Select the configuration file Tsc mdb from the backup folder in the from button by 1 click from button 2 select TSC mdb from the backup folder 3 Select the Tsc mdb from the Db folder in the to button 4 Then press the Convert button 5 Reference manual 2 13 1 SU AMTECH W TEMPRESS TSC II SOFTWARE INSTALLATION After a while the following screen will appear Db2Db from Stsctest tsc backup TSC mdb 6 0 Convert to Atsctest tse TSC mdb 6 0 DELETE FROM tblTubeGeneralData IN tsctest tsc TSC mdb DELETE FROM tbIDPCData IN tsctest tsc T SC mdb DEL
117. ecognized stream type was detected in the received message 5 USER MANUAL 11 59 TEMPRESS SECS GEM 11 8 13 3 Message Fault Due to Unrecognized Function Type Step SECS Direction Description Message 1 5 gt Host sends a message 2 S9F5 E gt H Equipment detects an unrecognized function type within the message from the Host it reports to the Host that an unrecognized function type was detected in the received message 11 8 13 4 Message Fault Due to Illegal Data Format Step SECS Direction Description Message 1 SxFy H gt E Host sends a message 2 5987 gt Equipment detects illegal data format within the message from the Host it reports to the Host that an illegal data format was detected the received message 11 8 13 5 Communication Fault Due to Transaction Timer Timeout Step SECS Direction Description Message 1 Equipment does not receive an expected reply message from the Host and a transaction timer timeout occurs 2 S9F9 E gt H Equipment reports to the Host that a Transaction Timer timeout occurred 11 8 13 6 Message Fault Due to Data Too Long Step SECS Direction Description Message 1 SxFy H gt E Host sends a message 2 S9F11 E gt H Equipment detects that the message from the Host contains more data than it can handle it rep
118. ection 11 6 7 2 Dynamic Event Report Configuration The host can request the value s of Status Variables SV by specifying the desired SVIDs e The host can request the names of Status Variables SV by specifying the desired SVIDs The Host can read and change the value of selected Equipment Constants ECs e The host can request the names of Equipment Constants ECs by specifying the desired ECIDs TSC II USER MANUAL 11 19 55 SECS GEM The variables used are Variable _ECIDChanged 11 6 9 TRACE REPORTS Trace reports provide a way to monitor data variables on a periodic basis This is especially useful for monitoring continuous data The Trace reporting procedure is as follows The Host creates list of variables a trace report to be monitored He she then determines the time interval DSPER the total number of samples to be taken TOTSMP and the number of samples per trace report REPGSZ The Host sends this information to the Equipment e The Equipment samples the specified data variables at the interval designated by the host and sends the Host defined trace report to the Host e The Equipment deletes the Trace Report configuration after the last trace report has been sent e The Host can change or re initiate a configured trace report at all times 11 6 10 LIMITS MONITORING The limits monitoring capability provides the host a means of m
119. ed at the indicated process step 5 USER MANUAL 8 18 1 i AMTECH WTEMPRESS HELP 9 ALARM The Alarm menu shows an ovetview of all alarms of all tubes when the TSC 2 server is selected The Alarm button will flash RED should an alarm occur that is not acknowledged yet alarms for a specific tube can be viewed after selecting the desired tube FR STACK 01 NITRIDE ID Tube D Alarm Description Status Acknowledge 5 r Edit Alarm ue po i 2 2 OS 0 Acknowledge A n 0 Acknowledge All Oveniew Operations Recipes System Data Help FIGURE 9 1 ALARM WINDOW The fields contain the following information e Tube ID Tube name and ID e Alarm Description Gives a description of the occurred alarms e Status of an alarm Active Not active e Acknowledge Acknowledged or Not acknowledged e Time Date Shows the time and date the alarm occurred e Count Counts how many times the same alarm occurred in the current process run e Use of color Active Not active grey Acknowledged Alarms To acknowledge any alarm the alarming tube must be selected This is quickly assessed in the Overview screen Select the tube and press the acknowledge button to confirm that the alarm has been seen The not active alarms will be removed from the list after acknowledging 5
120. een display name SYSTEM Current grid o 0 mm 97 y 384 Grid size and cursor position 7 2 3 2 1 Creating a new operations screen A new operations screen can be created by selecting New The following screen will open Copy display from Dialog i wetoxtlc NITRIDE Target display Copy objects into new display and overwrite display in current name Copy and merge objects in current disp FIGURE 7 17 CREATE A NEW OPERATIONS SCREEN Copy objects into new display allows the user to copy an existing operations screen layout from any tube on the selected server into a new display name Copy and overwrite display in current name allows the user to copy an existing operations screen layout from any tube into an existing display name 8 display Copy aud merge objects in current display allows the user to copy and merge an existing operations screen layout from any tube into an existing display Create empty display allows the user to generate a new empty display TSC I Reference manual 7 27 AMTECH s gt 2 x TEMPRESS SYSTEM 7 2 3 2 2 Open an operations screen An existing operations screen can be opened by selecting Open The following screen will Display selector x open FIGURE 7 18 SELECT AN EXISTING OPERATIONS DISPLAY 7 2 3 2 3 Creating operations screen objects To add objects into the new operations s
121. en STACK 01 A3 NITRIDE hd SYSMASTER osm ss S tube 3 zone Display nitide Curent gid 010 mm v x 328 y 358 Overview Operations Recipes System Data rSetup 4 DPC Setup Configuration Messages Al Pressure Range DI Units DO Read Write DTC Setup Misc Configuration TouchScreen Paddle TC Operations E Screen PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup Import Export Alarm Help FIGURE 7 16 OPERATIONS SCREEN EDITOR The following buttons are available in the title bar of the editor Open a operations screen Save the operations screen Delete the operations screen Cut Copy Paste Create a new operations screen FS een 5 horizontal vertical Move to the background Move to the foreground Show Library objects Edit Library objects Print operations screen layout TSC II Reference manual 7 26 1 SUUM AMTECH 7 55 1 f Line color Help x Fill color k About Rotate object Information about the current operations screen is available in the bottom Display nitide Current operations scr
122. eport Data Description Requested report data Structure lt NoOfltems lt 10000 lt VID gt gt Answet Direction E gt H Exception zero length list means report RPTID is not defined 11 7 6 12 S6F23 Request Spooled Data Description Request from Host to transmit or delete the messages currently spooled by the Equipment Structure lt U1 1 RSDC gt Answet S6F24 Direction H gt E Exception 11 7 6 13 S6F24 Request Spooled Data Acknowledgement Send Description Acknowledge request for transmission of deletion of spooled data Structure lt RSDA gt Answet Direction gt Exception 11 7 7 STREAM 7 PROCESS PROGRAM MANAGEMENT The functions in this stream ate used to manage and transfer process programs 11 771 S7F0 Abort Transaction Description Used as a reply when the transaction is aborted Function 0 is defined in evety stream and has the same meaning in every stream TSC II USER MANU AL 11 46 4 AMTECH TEMPRESS SECS GEM Structure Header only Answet Direction E lt gt H Exception 11 7 7 2 S7F1 Process Program Load Inquire Description Initiate the transfer of a multi block process program must precede multi block S7F3 S7F4 messages Structure L 2 V 1 PPID gt lt V 1 LENGTH gt gt Answet S7F2 Direction E lt gt H Exception 11
123. eral tubes Each tube can have its own SECS GEM interface This means that each tube can have its own connection with a separate Host Application on a separate PC Every connection has its own interface with a unique Device ID The Device ID is a number that is known by the Host and the Equipment and is used to communicate To communicate the SECS GEM interface has to know which physical port is going to be used Therefore a Port with a PortID is linked to every device Tube on the Equipment In case of a TCP IP port is it possible for different devices to use the same Port Port ID 5 USER MANUAL UTE I AMTECH MPRESS SECS GEM Host 1 Host 4 Device 1 Device 4 Host 2 Device 1 os 1 Port 5001 5 2 DEVICA a COM2 Device 6 Device 3 Port 5002 COM3 Equipment Host 3 Device 6 FIGURE 11 4 EXAMPLE LAYOUT Figure 11 4 is a possible layout of a SECS GEM network where different Hosts are connected to 1 Equipment Every Device is connected to a separate tube 11 4 BASIC OPERATION This chapter describes how a user can configure and start the SECS GEM communication on the Equipment This chapter is not intended to be a manual for the TSC Client a
124. erature Normal Temp profile Ternp Recipe 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 Overview Operations Recipes System Data Alarm Help FIGURE 8 10 MONITORING PROFILE TEMPERATURE TABLE The Profile temp screen shows the four profile temperature tables Each table contains values for all the 16 possible profile temperature recipes To select a profile temperature table press lt A gt lt B gt lt C gt or D PF Profile temperature recipe number Paddle Setpoint Shows the paddle thermocouple setpoint for the corresponding profile recipe Spike Value Shows the spike thermocouple value for the corresponding profile recipe This must be within 20 C of the paddle setpoint 5 USER MANUAL 8 16 ot TU TEMPRESS DATA Output Power Shows the output power for the corresponding profile recipe This must be in the range 0 to 99 5 USER MANUAL 8 17 l 74 AMTECH TEMPRESS DATA 8 5 4 RECIPE CONTENTS 26 sep 2002 09 47 Data STACK 01 A3 NITRIDE SYSMASTER 1 NITRIDE FIGURE 8 11 MONITORING RECIPES The Recipe screen displays all recipes stored in the DPC The selected recipe and its status is shown The first line shows the remaining process and step time r 7 The process recipe is running at the indicated process step CN process recipe is halt
125. erature and limits e Graphical Simulation Perform graphical simulation e Recipe Stepstatus Show recipe step status e Operations simulation Perform process simulation TSC II Reference manual 6 2 ar TU TEMPRESS 5 20 sep 2002 15 03 STACK 01 A3 NITRIDE Normal NITRIDE1 NITRIDE2 PROFILE STANDBY TEST Abort 1 BADABORT xi new recipe a name oK Cancel NOT Overview Operations Recipes System Data y Overview Alarm SYSMASTER ID New Edit Close Delete MB Print Recipe Normal temp Read Write Graphical Simulation Recipe Stepstatus i Operations Simulation Help FIGURE 6 2 CREATING A NEW RECIPE 6 2 NORMAL AND ABORT RECIPES Double clicking on the Normal list shows the names of the recipes that are stored on the harddisk of the server PC Double clicking on the Abort list shows the names of the abort recipes that are stored on the hard disk of the sever PC Pressing the New button or using the right mouse button and selecting New Recipe allows the user to create a new process recipe The editor asks for configuration or the creation of a new recipe and by continuing the new name can be entered NOTE Existing names will not be accepted Subsequently new recipe can be
126. es 11 12 11 6 5 Control SUA 11 15 11 6 6 Process State 2 2 11 1 12 2 2 200 2 020 2 40 00 600000000461011 8 00 0 04000140 11 17 11 6 7 Event Reports 11 19 11 6 8 Variable Data Collection senes 11 19 11 6 9 Trace 11 20 11 6 10 Limits Monitoring 11 20 11 6 11 X On line Identification 11 22 11 6 12 Alarm Management sse tenens 11 23 11 6 13 Remote Commands seen 11 23 11 6 14 Process Program 11 23 11 6 15 Equipment Terminal 11 24 11 6 16 Error 1 2 24 1 000005000000000000000000000000000 0 00 05 058 12 11 24 ITOAT Deed ee 11 24 1 6 18 5 11 25 1127 5 6 5 8 amp 11 27 11 7 1 SML notation terere tenete 11 28 T4572 MUlUSbIOONK oii Rie tates im adi ene seta 11 29 11 7 3 Stream 1 Equipment status sse 11 29 11 7 4 Stream 2 Equipment Control and Diagnostics
127. eviation DPC DTC TSC SECS GEM HSMS EC Definition The Tempress System Controller The computer that is connected to the equipment via the SECS GEM interface The person who physically has access to the equipment s control panel This is the person who operates the TSC Description Digital Process Controller Digital Temperature Controller Tempress System Controller SEMI Equipment Communications Standard Generic Equipment Model High Speed SECS Message Services Equipment Constant 5 USER MANUAL SUC AMTECH TEMPRESS SECS GEM ECID Equipment Constant Identifier SV Status Variable SVID Status Variable Identifier DVVAL Data Value DVNAME Data Value Identifier ALID Alarm ID CEID Collection Event ID PPID Process Program ID Recipe ID DV Data Variable RID Report ID 5 USER MANUAL 11 2 SUUS AMTECH TEMPRESS SECS GEM 11 3 SYSTEM OVERVIEW Figure 11 1 shows the basic system architecture Host Equipment SECS GEM SECS GEM Host SECS SECS Equipment Application GEM GEM Application FIGURE 11 1 BASIC SYSTEM ARCHITECTURE The Equipment consists of the DPC DTC connected to the TSC Server This server runs the SECS GEM driver The Host is a regular PC running some kind of SECS GEM Host application These PC s are connected through an Ethernet connection or a serial con
128. ge on Host command Host command Accepted or Rejected 11 8 11 PROCESS PROGRAM MANAGEMENT 11 8 11 1 Process Program Directory Request Step SECS Direction Description Message 1 S7F19 H gt E Request of current list of Recipes 2 57 20 gt Current list of Recipes 11 8 11 2 Host Initiated Recipe Upload Unformatted Step SECS Direction Description Message 1 S7F5 H gt E Request for upload of recipe with certain number PPID 2 S7F6 E gt H Recipe data for recipe with requested PPID 11 8 11 3 Equipment Initiated Recipe Upload Unformatted Step SECS Direction Description Message 1 S7F1 E gt H If the Recipe message is Multi Block send Multi Block Inquire first Else go to step 3 2 S7F2 H gt E Multi Block Grant 3 S7F3 E gt H Recipe data send 4 S7F4 H gt E Recipe data receipt acknowledge 11 8 11 4 Host Initiated Recipe Download Unformatted Step SECS Direction Description Message 1 S7F1 H gt E If the Recipe message is Multi Block send a Multi Block Inquire first Else go to step 3 2 S7F2 E gt H Multi Block Grant 3 S7F3 gt Recipe data send 4 S7F4 E gt H Recipe data receipt acknowledge 11 8 11 5 Equipment Initiated Recipe Download Unformatted Step SECS Direction Description Message 3 S7F5 gt Recipe data send request 5
129. int value actual value alarm limits e The units The digital input section contains the following items for each digital input The name of the digital input The condition On or Off The alarm signal monitored Yes or No The mnemonic condition and alarm active fields are empty if a digital input is not defined TSC II USER MANUAL 8 12 22 x TEMPRESS DATA The digital output section contains the following items for each digital output The name of the digital output The condition On or Off The mnemonic condition and alarm active fields are empty if a digital output is not defined The branch subroutine shows the step number to which each subroutine branches to branch loop shows the number of times each loop has to be executed 8 5 1 TEMPERATURE DETAIL STATUS 26 sep 2002 0944 N TEMPRESS SYSTEMS P Data STACK 01 A3 NITRIDE SYSMASTER r Data 34 r Temperature Control 52 2 EAD General SetPoint Actus SetPoint Actual Deviation Rampto Slope Power 1 700 28 7000 208 6792 7000 000 98 Type 2 7000 210 7000 210 0 7000 88 Number Log data Zone 3 7000 209 7000 209 79a 7000 000 98 Run Table hcm Parameter Table Al
130. ipe can be paused by selecting the appropriate button This action will only stop the timer in that particular process step all other commands will remain active z g the boat continues to move to its setpoint the temperature will increase or decrease to its setpoint and or MFC s will reach their programmed values Two situations require the Continue button to be pressed 1 A Pause command has been issued before and continuation of the timer and the rest of the process recipe is desired 2 The process recipe is waiting for start which is activated by the Wait for Operator instruction in the process recipe 5 5 EDIT VARIABLE COMMANDS Variable commands are instructions in the process recipe that can be quickly modified without the use of the recipe editor This is convenient when fine tuning a process during process qualifications or if minor adjustments to the process settings are required Currently only Analog outputs such as MEC setpoints boat position and Digital outputs are supported as Variable commands 5 6 ABORT PROCESS RECIPE The running recipe be aborted by selecting To avoid accidental abortion of the process recipe the user will be asked to confirm this selection A recipe cannot be aborted if the normal recipe is in step 0 If a recipe is aborted the process returns to step 0 in the current recipe and an abort alarm appears If in the process recipe an abort
131. is no limitation to the number of Recipes both temperature and process recipes in this configuration Recipe Editing The Tube controller recipe structure is based on programming changes only in the next step This gives a compact recipe that is easy to read and understand The TSC II software provides the Actual I O Status in every step like used in some furnace controllers Only the changes from one step to the other need to be programmed with full details of all parameters in each step are available At every Write to DPC a safety check is performed by verifying the targeted tube and if the same certifications are used in the recipe and in the DPC Relevant information about user ID time recipe and tube ID is logged at any Read or Write The Recipe editor has the following context sensitive buttons available Many of those can also be accessed with the right mouse button Context sensitivity lies in the selected item for example if the Normal process recipe list is highlighted the New button allows a new process recipe to be made If Recipe is highlighted the same New button allows new process recipe step to be added e New Create a new process recipe step or command e Edit Edit a recipe step or command e Delete Delete a process recipe step or command e Close Close a process recipe step or command e Print Print a recipe overview e Normal Temp Enter or change the normal process temp
132. ize times for time stamping purposes The functions are e Equipment requests time value from the Host e Host sets time value on Equipment e Host requests time value from the Equipment TSC II USER MANUAL 11 24 55 SECS GEM The variables used are Variable TimeFormat 11 6 18 SPOOLING Spooling is a capability whereby the Equipment queues messages intended for the Host during times of communication failure When communication is restored these messages can be delivered to the Host This way no messages are lost during communication failures Only Primary messages are spooled Primary messages are the first message in a scenario they are not a reply any other message from the Host The Host has the following possibilities e Enable Disable spooling e Define streams and functions to be spooled e Request for spooled messages to be transmitted Request for spooled messages to be deleted purged e Set the maximum number of spooled messages to be transmitted after a request Equipment Constant MaxSpoolTransmit Spooling State Model describes the functionality 11 6 18 1 States The following Spooling States are defined POWER OFF The Equipment has lost power for any reason POWER ON The Equipment is powered up SPOOL INACTIVE This is the normal operating mode No spooling occurs The Spool Area is empty SPOOL ACTIVE primary SECS II mess
133. key and subkeys D tsc users Ful Control This key and subkeys Add Edt Remove Inhest bom parent the pemission entries that apply to child objects Include these wath entries explicity detined hore Replace permisson ene on all chad objects with enmes shown heie that apply to chad objects FIGURE 2 8 22 Select Tsc users 23 Activate Replace permissions entries on all child objects 24 Click on Apply 25 Click on Yes in the next window Figure 2 9 Security This will remove explicitly defined permissions on all child objects and enable propagation of inheritable permissions to those child objects Only inheritable permissions propagated from HKEY_LOCAL_MACHINE will take effect Do you wish to continue FIGURE 2 9 26 Click on OK in the next window Figure 2 10 5 Reference manual 2 7 l 7 AMTECH TU TEMPRESS 5 SOFTWARE INSTALLATION 1 Registry Editor could not set security in the key currently selected or some of its subkeys FIGURE 2 10 27 Click on OK see Figure 2 8 28 Click on OK see Figure 2 7 29 Close Regedit 5 Reference manual 2 8 TEMPRESS 5 SOFTWARE INSTALLATION 2 2 FINISH INSTALLATION 28 Restart the computer 29 Logon Username TSC Password TSC 30 Press OK TSC Debug Dialog will start automatically 31 Start TSC Windows Start gt Programs gt TSC Diffusion
134. knowledge or error on trace initialization request Structure lt B 1 TIAACK gt Answer Direction E gt H Exception 11 7 4 10 S2F29 Equipment Constant Namelist Request Description Request of information about available Equipment Constants EC A zero length list means send information for all ECs Structure lt L NoOfECIDs lt 1000 V 1 ECID gt gt Answet S2F30 Direction gt Exception 11 7 4 11 S2F30 Equipment Constant Namelist Reply Description List of requested ECs and corresponding information Structute lt L NoOfECIDs lt 1000 lt L 6 lt V 1 ECID gt lt A ECNamelength lt 1000 ECNAME gt lt V 1 ECMIN gt lt ECMAX gt lt ECDEF gt lt A Unitslength lt 1000 UNITS gt gt gt Answet Direction gt Exception Zeto length ASCII items for ECNAME ECMAX ECDEF and UNITS indicates that the ECID does not exist 5 USER MANUAL 11 34 55 SECS GEM 11 7 4 12 S2F31 Date and Time Set Request Description Request from Host to set the date and time for Equipment Structure lt A 16 TIME gt Answet S2F32 Direction gt Exception 1 7 4 13 S2F32 Date and Time Set Acknowledge Description Acknowledge on set date time request Structure lt
135. kup configuration 7 25 Figure 7 16 Operations screen editor eerte rtnnenntenne 7 26 Figure 7 17 Create new operations screen esses 7 27 Figure 7 18 Select an existing operations 7 28 Figure 7 19 Default library objects sse 7 28 Figure 7 20 Operations screen object 7 29 Figure 7 21 Edit customer library objects sssssseeeeetees 7 30 Figure 7 22 Library object conditional property selection list 7 31 Figure 7 23 A Maite disnei 7 31 Figure 7 24 Profiling history sse teretes 7 32 Figure 7 25 Adding tube to TSC 2 7 33 Figure 7 26 Defining Secs Gem configuration sss 7 34 Figure 7 27 Overview of the client server architecture 7 36 Figure 7 28 Adding a client to the network eene 7 37 Figure 7 29 Adding a server to the network see 7 38 Figure 7 30 Access control screen eerte tette tte tnttenten ttes 7 39 Figure 7 31 TSC 2 language and Color 7 41 5 USER MANUAL X
136. lected It includes Main detail status Temperature details Normal temperature table Profile temperature table and Recipes The information is real time monitored from the DPC and DTC memory and can be used to check the current tube status and its temperature configuration NOTE The Tube Data is actual DPC DTC information not a TSC II hard disc copy 8 5 MAIN DETAIL STATUS The Main Detail screen displays a summary of the current tube status An example screen is presented below Overview Operations Recipes System Data veMpress sysrenes 10 0kt 2002 15 53 Data STACK 01 A3 NITRIDE ERETI iD 5 rData r Process Information r Digital Input Recipe NITRIDE1 Process Time 00 00 00 Position D Mnemonic Cond term General Message LOAD UNLOAD Step Setpoint 2000 1 PREssN2 ves _ 2 55 Ott Yes Wait For Start Time 0 00 00 Speed p ETE Log data 4 vacrat oft 75 jun Paddle Spike Setpoint Actual Setpoint Actual Deviation Rampto Slope Power me 1 7000 204 7000 204 6796 7000 0 00 98 lexcess lot ves Tube Zone 2 70 0 205 7000 20
137. lecting the History Actual Select the start time to present the real time information from that point on TSC II USER MANUAL 8 5 22 x TEMPRESS DATA 8 2 DISPLAYING DATA There are two methods of displaying logged data The data can be plotted in a graph or given in tabular form by selecting the appropriate tab Zooming in can be achieved by pressing and holding the left mouse button and drag the mouse to select the desired zoom data SYSMASTER iD 04 nov 2002 13 23 Server DOCUMENTATION r Selection r View rData WgwmpE General s Graphical Data I Alarm History time I Main Title History lot Sub Title Run History Recipe F History actual Fa TEMPRESS SYSTEMS Data Tube Main Dataset Y Axis Nitride 10 20 30 40 50 60 70 80 90 100 110 120 130 X Axis Overview Operations Recipes System Data FIGURE 8 3 LOGGING DATA 8 2 1 LOGGING DATA GRAPHICAL PRESENTATION graphic presentation can be customized to add titles change fonts size and colors and gridlines by pressing the right mouse button anywhere on the graphic 5 USER MANUAL 8 6 TEMPRESS DATA FIGURE 8 4 LOGGING DATA CUSTOMIZATION GRAPHICS The customization menu contains the foll
138. list Select Recipes This can only be accomplished if the current recipe is in step 0 5 3 SELECT A PROCESS RECIPE STEP Select the process step number from the dropdown list Step To prevent a step being jumped to accidentally the user is asked to confirm selection All commands in the newly selected step will be executed except for the time function The time function if present can be started by pressing Start DANGER Use this function only after verifying that the required action can only be accomplished by jumping directly Use this function only after verifying that the newly selected steps contains all the desired commands Selecting a wrong process step can cause life threatening danger TSC II Reference manual 5 2 ot TU TEMPRESS OPERATIONS NOTE Commands a process recipe step are active until changed 5 4 START PAUSE AND CONTINUE A RECIPE To start the process recipe press Start Starting a recipe from step 0 causes previous abort and branch alarms to be cleared In the center field a graphical layout of the process will be shown real time If a process recipe is selected it needs to be started to run No auto run facility is available a manual start command must be issued Once the process recipe is selected all commands in step 0 will be executed To continue with the process recipe it must be started The process rec
139. ll data generated by the tube controllers is automatically logged every second Only changed data will be stored e All events like start stop continue set and reset of alarms are logged in an event log file to provide a quick events check Provides an excellent base for data capture and storage required for ISO 900X Data is easily retrievable for process set up analysis and fault finding Wafer Lot information is stored with the run data and can also be used as search criteria for logged data Batch or Lot identification is widely used in the industry to track wafers throughout the production process TSC 2 provides Lot Identification during process start and allows process review based on Lot Identification At every recipe start the system can be set up to use the wafer LOT ID This LOT ID will be stored with the actual run data Retrieving data for a specific ID provides all process recipes that a lot has been running in one or any of the tubes connected to the TSC 2 network From the list of runs one can select the run that is required and view the actual data in graphical for or actual numbers The DATA screen contains two selection menus GENERAL and TUBE The General data shows the Logging Data History and Run Real time from all tubes The Tube Data shows the real time data per tube Main Details Temperature Normal Temperature Table Profile Temperature Table and Recipe 5 USE
140. ll data will be lost NOTE The paddle TC calibration table can be printed using the Print button 7 2 2 3 PID parameter table The PID parameter table displays the proportional integral derivative and gain parameters for the spike thermocouple and the integral and derivative parameters in all the zones for the paddle thermocouple over the five temperature ranges The default settings apply for the majority of all systems only in specific situations with temperature stability and overshoot problems should these settings be modified Select PID to open the following screen ME TEMPREss sySTEMS 25 sep 2002 14 44 Tube setup STACK 01 A3 NITRIDE DTC OTC PID SPI SPIKE Paddle emp rang P 1 100 10 25 5 D 0 255 G 1 100 12 D 0 300 10 6 30 35 3 3 3 80 301 600 8 5 30 45 1 5 1 5 1 5 90 601 900 6 4 30 55 1 1 1 80 801 1200 5 4 30 65 0 8 0 8 0 8 80 1201 1500 5 4 30 80 0 5 0 5 0 5 80 Ra Overview Operations Recipes System Data rSetup DPC Setup Configuration Messages Al Pressure i Range DI Units DO Read Write DTC Setup Misc Configuration TouchScreen Paddle TC Operations Screen PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup Import Export SYSMASTER ID Alarm Help FIGURE 7 11
141. ly one analog output channel be defined as Pressure Atm Control NOTE The Pressure Atm Control interlock is only available if the internal pressure controller is selected in the DPC CONFIGURATION Enter the lowest value Enter the value matching the hardware maximum value closest to 2000 This value MUST be higher than the minimum value Select the multiplication factor to obtain the range that matches the range of the hardware connected to this Analog Output Free programmable unit for DPC version 2 1 or higher only Up to 4 characters can be used For DPC versions 2 G or lower select the appropriate Unit from the pull down menu The range will be calculated automatically from the minimum maximum and multiplier values for DPC version 2 1 or higher only For DPC versions 2 G or lower select the appropriate Range from the pull down menu that matches the hardware connected to this Analog Input The upstream or downstream position of the interlocked Digital Output compared to the Analog Output can be entered here for DPC version 2 1 or higher only NOTE Setting the Valve position incorrectly may results in gas bursts during startup of Analog Outputs Optionally give a description of the Analog Output NOTE Press to save the entered data confirm the question Save Data all data will be lost The complete list of Analog Outputs can be printed using the Print button
142. m of 16 Nr lot ID s can be entered when Change Lot Info is selected The following sub screen will appear Lot Identification Enter a name with a maximum of 16 characters Lot Type Wafers First Slots Feme fte s pro jcustovert fes 1 a I Fs 3 Coe a Oooo a 4 ex Change lots FIGURE 5 4 CHANGE LOT INFO Ap agi w i Enter the wafer type Filler wafers are dummy wafers Product wafers are the actual process wafers Test wafers process monitor wafers Enter the number of wafers of each type Enter the first slot number for this lot Empty slots between different certification are also full positions and have to be counted 5 Reference manual 5 5 1 UTE MPRESS OPERATIONS NOTE Lot ID will only be used if the 475 Lot ID selection box is checked TSC II Reference manual 5 6 ar TEMPRESS 5 6 RECIPES 25 cp 2002 09 08 STACK 01 A3 NITRIDE iD Normal Edit New Edit Delete Close Print r Overview Recipe Normal temp Read Write Graphical Simulation Recipe Stepstatus Operations Simulation Recipes System Data Alarm Help FIGURE 6 1 THE TSC II RECIPE SCREEN Overview Operations
143. ment s current time value 11 8 15 SPOOLING 11 8 15 1 Define the Set of Messages to be Spooled Step SECS Direction Description Message i S2F43 H gt E Host defines messages to be spooled in case of communication failure 2 S2F44 gt Acknowledgement on spooling messages definition 11 8 15 2 Request or Delete Spooled Data Assumption Communications were lost and then re established Step SECS Direction Description Message TSC H USER MANUAL 11 61 4 AMTECH 55 SECS GEM 1 56 23 gt Host requests transmission or deletion of the spooled data 2 SOF 24 gt Acknowledgement on request to transmit or delete spooled data If it is a request to transmit data then the Equipment starts sending messages until maximum number of message to transmit MaxSpoolTransmit is reached If it is a request to purge the data then the Equipment deletes all messages and goes to step 5 3 S6F23 H gt E Host recognizes that MaxSpoolTransmit is reached Host requests additional spooled data 4 56 24 Acknowledgement on request to transmit or delete spooled data The Equipment starts sending messages until maximum number of message to transmit MaxSpoolTransmit is reached Go to step 3 D messages are deleted from the spool area Spooling is INACTIVE again TSC II USER MANUAL 11 62 Appendix
144. ment performance Profile deviation Enter the maximum profile deviation for the 5 temperature ranges This parameter is a limit used in profiling a tube The temperature in all zones must have been within this limit for at least 15 minutes to allow the profile table to be filled The range for this parameter is 0 5 to 9 9 NOTE Press to save the entered data or confirm the question Save Data or all data will be lost The complete setup of the DTC configuration can be printed using the Print button A predefined setup of the DTC configuration from another tube matching the same hardware may be imported using the Import button WARNING After import check new settings to match the actual tube hardware TSC I Reference manual 7 17 l i gt AMTECH TEMPRESS SYSTEM 7 2 2 2 Paddle TC calibration table The paddle thermocouple or profile TC calibration table is used to store calibrated temperatures for a paddle profile thermocouple A pull down menu allows the selection of the correct paddle thermocouple and should include the unique name or serial number of that paddle TC The temperature values must be in ascending order and will be automatically sorted when this menu is exited Select Paddle TC to open the following screen 09 okt 2002 09 05 Tube setup STACK 01 A3 NITRIDE SYSMASTER
145. model provides the host with three basic levels of control In the highest level REMOTE the host may control the Equipment to the full extent possible The middle level LOCAL allows the host full access to information but places some limits on how the host can affect equipment operation In the lowest level OFF LINE the equipment allows no host control and only very limited information 11 6 5 1 States The following Control States are defined OFF LINE When the OFF LINE state is active operation of the equipment is performed by the operator at the operator console While the Equipment is OFF LINE message transfer is possible however severely restricted OFF LINE has three sub states EQUIPMENT OFF LINE ATTEMPT ON LINE and HOST OFF LINE OFF LINE EQUIPMENT OFF LINE System awaits operator instructions to go ON LINE OFF LINE ATTEMPT ON LINE The Equipment has responded to an operator instruction to attempt to go to the ON LINE state The Equipment sends request to Host to go ON LINE OFF LINE HOST OFFLINE TSC II USER MANUAL 11 15 AMTECH Eu NES SECS GEM The Equipment has tried to go to ON LINE but the Host denied the request or switched to OFF LINE itself The Equipment is now waiting for the Host to send a request to go ON LINE ON LINE The Host is ON LINE with the Equipment which means that the Host has certain limited capabilities to operate the Equipment The ONLINE state has two sub
146. mote clients is TSC II Reference manual 7 37 ar T AMTECH TU TEMPRESS SYSTEM 7 3 4 ADDING A SERVER To add a server to the network use the Right Mouse Button on the System Menu The following screen will appear 1 2 3 4 6 The stack number must be unique with in the network For example for 2 servers with 8 tubes per server the first tube of the second server must Servers Update Syster FIGURE 7 29 ADDING A SERVER TO THE NETWORK Go to System in the navigation bar Click with the right mouse button on System The next options will be shown Servers and Update Select Servers A new window will appear with the options to Add Delete or Save a server Select Add Enter the Server name Select Save After saving the server name click with the right mouse button on System and select Update The system will try to make connection to all servers defined in step 3 Every tube must have granted access to the server to allow communication and control screen NOTE be named stack 3 tube 1 TSC II Reference manual 7 38 1 SUC AMTECH 7 55 1 SYSTEM 7 3 5 ACCESS CONTROL SCREEN Every user can be specifically granted access to each function of TSC 2 All actions are logged with user name time and date and action The user Sysmaster is encoded in the software and can not be modified
147. mputer Management Local System Tools administrators Administrators have complete and Event Viewer IS Backup Operators Backup Operators can override secu is z Shared Folders 2 Guests Guests have the same access as me er and Groups RS Network Configuration Members in this group can have som Grower Users Power Users possess most administr SS Remote Desktop Users Members in this group are granted t Device Manager E Replicator Supports file replication in a domain Users Users are prevented from making F t Removable Storage 2 Helpservicesaroup Group for the Help and Support Center Disk Defragmenter Disk Management Services and Applications Export List View Arrange Icons gt Line up Icons Help Creates a new local group FIGURE 2 1 6 Click on Add to select the users for this group Figure 2 2 5 Reference manual 2 3 1 4 D AMTECH W TEMPRESS TSC II SOFTWARE INSTALLATION Computer Management Sats tsc users k F Creates a new local group FIGURE 2 2 7 Click on Advanced Figure 2 3 to search for existing users Select Users Select this object type Users Built in security principals From this location TSC_FHG2 Locations the object names to select examples FIGURE 2 3 8 Click on Find Now Figure 2 4 in the enlarged wind
148. mum and multiplier values for DPC version 2 1 or higher only For DPC versions 2 G or lower select the appropriate Range from the pull down menu that matches the hardware connected to this Analog Input Description Optionally give a description of the Analog Input NOTE f Press Mill to save the entered data or confirm the question Save Data or all data will be lost The complete list of Analog Inputs can be printed using the Print button A list of predefined Analog Inputs from another tube matching the same hardware may be imported using the Import button WARNING After import check new settings to match the actual tube hardware TSC II Reference manual 7 6 l i gt AMTECH TEMPRESS SYSTEM 7 2 1 2 Analog Outputs The Analog Output supplies the setpoint to for example an MFC or a bubbler temperature controller with a range of 0 5V The corresponding linked analog input is used for monitoring the actual flow Select AO Analog Outputs to open the following screen 4 25 sep 2002 14 11 STACK 01 A3 NITRIDE r DPC Gaslines Number Mnemonic 2 Interlock Normally Closed Minimum 0 Maximum 0 Multiplyer 0 100 7 Unit Range is from 0100 Valve Upstream E Description ri Overview Operations Recipes System Data SYSMASTER iD rSetup DPC Setup Config
149. municationsTimeout has ended go back to step 1 3 S1F14 H gt E If COMMACK Accept go to Step 4 else go to Step 1 Communication is established 11 8 1 2 Host establishes communication Assumption Equipment s Communication State is either Enabled Not Communicating or Enabled Communicating Step SECS Direction Description Message 1 S1F13 H gt E Host sends Establish Communication Request 2 S1F14 E gt H COMMACK Accept 3 Communication is established 11 8 1 3 Simultaneous attempts to establish communication Assumption Equipment s Communication State is Enabled Not Communicating Step SECS Direction Description Message 1 S1F13 E gt H Equipment sends Establish Communication Request 2 S1F13 H gt E Host sends Establish Communication Request 3 51 14 gt The equipment responds with Establish Communications Acknowledge After this message is successfully sent communications is established 4 S1F14 H gt E The Host responds with Establish Communications Acknowledge This step could occur before step 3 in which case communications would be established in this step 5 Communication is established TSC II USER MANUAL 11 52 UTE MPRESS SECS GEM 11 8 2 CONTROL 11 8 2 1 Host Accepts ON LINE request from Equipment Assumption Control State is OFF LINE Step SECS Direction
150. n be assigned to activate an alarm buzzer an alarm buzzer is default connected to a Touchscreen Similarly a Digital Input Port Number can be assigned to silence the alarm buzzer comparable to touching the Touchscreen This option is only available for DPC version 2 1 or higher Download Stepnames When a process recipe is programmed each process step can be given a name to improve the readability The stepnames will be written to the DPC if this option is selected This option is only available for DPC version 2 1 or higher NOTE f Press to save the entered data or confirm the question Save Data or all data will be lost TSC II Reference manual 7 4 1 SUC AMTECH 7 55 1 SYSTEM 7 2 1 1 Analog Inputs The Analog Inputs are analog signals that are not controlled by the DPC The DPC uses Analog Inputs to verify safety conditions and present their settings to the user Up to 16 separate Analog Inputs are available The following screen will appear depending on the actual hardware different names and numbers may be used Analog inputs 04 nov 2002 09 57 Tube setup Number Minimum Maximum Multiplyer Unit Mnemonic Range is 0 0 SCCM Description 0 100 M 5 Overview Operations Recipes System STACK 01 A3 NIT
151. n screens consist of 3 fields The top field title bar which contains general information about time tube selection and login user ID The bottom field navigation bar with control push buttons to navigate between the main screens The center field main field consists of 2 information fields on the left and the operating field with push buttons on the right TSC II Reference manual 3 1 AMTECH s m 1 TEMPRESS BASIC OPERATION 19 sep 2002 09 07 STACK 01 A3 NITRIDE SYSMASTER 1D WETOXID NITRIDE EMPTYLP al FIGURE 3 1 START UP SCREEN OF THE TSC II The TSC II contains 7 main screens Overview Operations Recipes System Data Alarms 3 21 The title bar has basic layout which is the same for all screens and always available The left part of the title bar contains the Logo of Tempress Systems Inc By clicking the logo screen will appear with general information about Temptress Systems Inc The center part of the title bar shows the Date and Time and the title of the Main Screen A drop down menu with Tube selection and the logged in User ID can be found on the right In the top field quick navigation to another tube or login as a different user is possible ID login logout login screen automatically pops up when a user requests particular functions A u
152. nd analog outputs is hardware encoded and can not be altered For DPC version 2 1 or higher the range can be freely programmed in the Analog Output menu 7 2 1 8 Units Por DPC version 2 G or lower the units used in the analog inputs and analog outputs are hardware encoded and cannot be altered For DPC version 2 1 or higher the units can be freely programmed in the Analog Output menu 7 2 1 9 Read Write DPC The Read Write DPC menu is used to store the DPC Setup in the memory of the DPC or read the DPC memory contents Select Read Write to open the following screen only available if a DPC is connected TSC II Reference manual 7 14 SUUM AMTECH TEMPRESS TEMPRESS 4 O 25 55 2002 STACK 01 A3 NITRIDE SUSU aa mmm FIGURE 7 8 READ WRITE DPC MENU Select the desired option to read from DPC or write to DPC A confirmation message is presented for successful read write actions In case problems occur when using the All option the individual options should be used NOTE f Current information will be overwritten TSC II Reference manual 7 15 l i p AMTECH TEMPRESS SYSTEM 7 2 2 SETUP 25 sep 2002 14 41 Tube setup Paddle type 1 3 R PtRh 0 300 degrees 18 0 301 600 degrees 150 601 900 degrees
153. nection This manual describes the SECS GEM interface running on the Equipment PC Figure 11 2 shows the configuration when Host and Equipment communicate through a setial RS 232 connection Host Equipment RS 232 SECS GEM i SECS I RS 232 i Host SECS SECS IIIGEM Equipment Application GEM Application HSMS FIGURE 11 2 SYSTEM CONFIGURATION USING RS 232 The Equipment Application makes calls to a GEM module This module handles the GEM specific functionality like creating event and alarm reports handling remote commands etc The GEM module calls the specific SECS II messages like S6F11 S10F3 in the SECS II module The SECS II module watps these messages into packages to be transmitted Next it calls the appropriate communication module SECS I for serial communication and 5 5 TSC II USER MANUAL 11 3 UTE I AMTECH MPRESS SECS GEM for Ethernet TCP IP communication These modules handle the hardware specific functionality Host Host Application SECS GEM Equipment TCP IP SECS Exi quipmen SECS GEM SECS IIGEM Application HSMS TCP IP FIGURE 11 3 SYSTEM CONFIGURATION USING TCP IP Figure 11 3 shows the configuration when Host and Equipment communicate through an Ethernet TCP IP connection The Equipment usual consists of sev
154. nment Change Lot Info Overview Operations Recipes System Data Alarm Help FIGURE 5 1 THE TSC OPERATIONS SCREEN 5 1 INTRODUCTION The Operations screen is the control center for the process recipes There process recipes can be selected started paused continued or aborted In addition variable commands can be edited if available Lot info can be entered and the paddle thermocouple can be assigned main center screen shows a graphical view of the tube configuration including its current gas flows spike and paddle thermocouples readings and boat position information process message remaining total process and step time and wait condition Figure 5 2 TSC II Reference manual 5 1 ar T AMTECH TU TEMPRESS OPERATIONS LOT 01 CUSTOMER 1 LOT 02 CUSTOMER 1 LOT 03 CUSTOMER 1 LOT 04 CUSTOMER 2 LOT 05 CUSTOMER 2 Recipe NITRIDE 1 Process Time 000 00 00 Step 00 STEP 0 Step time 00 00 00 Message LOAD UNLOAD Position 0 Waitfor START FIGURE 5 2 RECIPE STATUS Recipe The name of the selected recipe Step Current step number and name Message Process message of current step Wait for Waits for a displayed condition to be fulfilled Process time Remaining process time Step time Remaining step time Position Position of the boat Lot Active Lot ID 5 2 SELECT A PROCESS RECIPE Select the desired process recipe from the drop down
155. nov 2002 13 34 Data STACK 01 A3 NITRIDE rData SYSMASTER 1D r Selection J AS NTRIDE History time History lot History Recipe History actual Dataset Profile r View Graphical I General Log data Run Data T Alarm Tube Temperature Normal Temp profile Temp Recipe Overview Operations Recipes System Data Alarm Help FIGURE 8 5 LOGGING DATA ALARM AND EVENTS The Alarm and events tab displays all alarms and events that occurred during the History selection Alarm signals that become active are SET and alarm signals that become de active are RESET Operator actions such as START STOP and ABORT will be presented as well TSC II USER MANUAL 8 9 1 AMTECH CN TEMPRESS TEMPRESS DATA 8 3 RUN DATA ACTIVE TUBES 04 nov 2002 13 13 Data STACK 01 A3 NITRIDE SYSMASTER ID FIGURE 8 6 LOGGING DATA ACTIVE TUBES The Run screen displays the tube ID and name the Lot IDs and current process information including the current Recipe Recipe Step Message Wait For and the expected Step Time and End Time 5 USER MANUAL 8 10 l i gt AMTECH TEMPRESS DATA 8 4 TUBE REAL TIME MONITORING The Tube Data menu allows the real time monitoring of a selected tube Therefore this menu is only accessible when a tube is se
156. ntrol to 16 tubes from one central computer 1 2 FEATURES Easy to operate Possibility of direct navigation between functional screens Software is built up like the Microsoft XP Internet Explorer User oriented structure instead of machine oriented Short learning time Based on the Sematech Userinterface Style Guide 1 0 Functional and non distracting design Direct visible result on operating input Easy to enter and modify input data Operation by mouse or track ball Expandable TSC II system using a client server network TCP IP up to 16 server 5 USER MANUAL 1 1 74 AMTECH TEMPRESS l INTRODUCTION 1 3 MINIMUM REQUIREMENTS Personal computer Pentium IV 500 Mhz PC 128 MB internal memoty 256 Mb for more than 8 tubes Operating System Microsoft Windows New Technology NT 4 0 English version service packs 6 Keyboard Windows 95 NT Operating components Mouse or Track Ball Monitor diameter 17 or more Resolution 1024 x 768 pixels Video Card 65536 colors Communication Interface RS422 compatible moxa card for 3 or more tubes 1 4 FURNACE CONTROL DESCRIPTION The configuration of the furnace control system comprises e Digital Process Controller DPC one for each tube Digital Temperature Controller DTC one for each tube e Hlat Panel Display one for each tube optional Temptess System Control one for up to 16 tubes TSC II USER MANUAL 1 2
157. o close window Windows Start gt Run tscsvr service Do not forget the space after sscsv7 Ok Windows Start gt Run tscgemsvr service Only in case of Gem communication Do not forget the space after Zsegezsvr Ok hardware license key dongle into the computer NOTE Before using the TSC II it is important to adjust the Eventlog of MS Windows NT otherwise the eventlog will get filled with data Windows Start gt Control panel Administrative Tools gt Event Viewer Event viewer Log Log Settings 5 Reference manual 2 2 1 f AMTECH TEMPRESS 5 SOFTWARE INSTALLATION 27 Change Log Settings for System Security and Application Select Overwrite events as needed Change these log settings for all three settings separately 2 1 2 TSC REGISTRY SETUP FOR WINDOWS TSC 2 writes settings to the MS Windows registry therefore it is important to grant TSC 2 users access to the registry on the server and client pc Follow the next steps 1 2 3 4 5 Make a User Group called TSC users Go to start Settings Control Panel Administrative Tools Computer Management Select Local users and groups in Computer Management Select Groups Select Action New Group to make a new group named 7 users ot right mouse button in the right screen see Figure 2 1 n Computer Management File Action View Window Help 9 28 Co
158. occur upon definition of a new limit or upon equipment startup when the value of the variable lies within the deadband 11 6 10 2 State Transitions The Finite State Diagram in Figure 11 13 shows the different state transitions of the limit These state transitions are described in Table 11 5 TSC II USER MANUAL 11 21 wt AMTECH TEMPRESS SECS GEM DISABLED 2 1 ENABLED 3 BELOW LIMIT ABOVE LIMIT iE 4 6 5 NO ZONE FIGURE 11 13 LIMITS STATE TRANSITIONS TABLE 11 5 LIMIT STATE TRANSITION TABLE 1 DISABLED Limit attributed defined ENABLED The sub state of ENABLED is determined S2F45 by the current value of the monitored vatiable 2 ENABLED Limit attributes set to DISABLED None undefined S2F45 3 BELOW Variable Increased to be ABOVE Zone Transition LIMIT 2UPPERDB LIMIT LIMIT LOWERDB LIMIT LOWERDB LIMIT 2UPPERDB LIMIT The variables used are Variable EventLimit LimitVariable 11 6 11 ON LINE IDENTIFICATION The ability to verify the presence of the Equipment and the abibility to request the current Equipment version Equipment Model Type MDLN and the Equipment Software Revision Code SOFTREV TSC II USER MANUAL 11 22 55 SECS GEM 11 6 12 ALARM MANAGEMENT The alarm management capability provides for Host notification and management of alarm conditions
159. og Alarm General information Tube Selection Client server selection ID login logout Recipe Start Recipe Edit Overview DPC Setup DTC Setup Miscellaneous General System Setup General Tube Edit Alarm Select Recipe Step Start Pause Continue Abort Edit Variable Commands Download Recipe at start Use Lot Info Paddle Assignment Change Lot Info New Delete Print Edit Close Recipe Normal temp Read Write Simulation Graphical Recipe stepstatus Simulation PRC Configuration Analog Input Analog Output Digital Input Digital Output Message Pressure Range Units Read Write DTC Configuration Paddle PID Spike Correction Profiling Recipes Read Write Touch Screen Process Config Reinit DB Profiling History General Access Properties Version Import Export Close Log Data Run Main Temperature Normal Temp profile Temp Graphical Recipe Acknowledge Acknowledge all FIGURE 3 2 TSC SOFTWARE OVERVIEW TSC II Reference manual 3 5 SU AMTECH TU TEMPRESS BASIC OPERATION 3 3 EXIT THE To close 5 the server must be selected in the title bar The System menu activates the context sensitive functions In the bottom right corner of the center field select Close and confirm to exit TSC II TSC II Reference manual 3 6 1 SU AMTECH x TEMPRESS OVERVIEW 4 OVERVIEW 4 1 INTRODUCTION
160. ommand above an existing command click with the right mouse button on the recipe command where the new command has to be inserted above The next screen will be shown Normal Ei NITRIDE 22 00 STEP 0 Insert New command above Boat to 2 Delete command Gas N2 1 0 0 Variable Command NCS 1 121 at 11 1 Mariahla Comm FIGURE 6 10 CREATE A NEW COMMAND IN THE RECIPE EXPLORER Select Insert New Command Above and the list of available commands appear TSC II Reference manual 6 10 1 Y p AMTECH x TEMPRESS RECIPES 6 4 3 RECIPE COMMAND PROPERTIES Each time a recipe command is selected its properties are shown and can be modified from pulldown menv s Changes are stored only when Update is pressed 6 5 EXPORT A RECIPE A process recipe may be exported for use in other tubes or as a backup 1 To export a recipe click with the right mouse button on the recipe name The next screen will be shown Normal Delete recipe New Step Check Recipe C E 04 STEP 4 3 eS FIGURE 6 11 EXPORT DELETE OR CHECK RECIPE 2 Select the option Export A browser will appear Figure 6 12 3 Browse to the desired location and press Save Lg STACK 01 2 TUBE 2 B SySMASTER io 9 Programs D amp e L Mssql A tsc_text New Edit C New Folder C TYVB24h
161. on gt Exception 11 7 7 9 S7F20 Current EPPD Data Description Send list of all the Process Programs stored in Equipment Structure lt L NoOfPP lt 1000 lt VI PPID gt gt Answer Direction E gt H Exception 11 7 8 STREAM 9 SYSTEM ERRORS This stream provides a method of informing the host that a message block has been received which cannot be handled or that a timeout on a transaction receive timer has occurred 11 7 8 1 S9F0 Abort Transaction Description Used as a reply when the transaction is aborted Function 0 is defined evety stream and has the same meaning in every stream TSC II USER MANUAL 11 48 TEMPRESS SECS GEM Structure Header only Answet Direction E lt gt H Exception 11 7 8 2 S9F1 Unrecognized Device ID Description The Device ID in the message block header did not correspond to any known device ID Structute lt B 10 MHEAD gt Answet Direction gt Exception 11 7 8 3 59 3 Unrecognized Stream Type Description The equipment does not recognize the stream type in the message block header This stream is not used Structure lt 10 MHEAD gt Answer Direction gt Exception 11 7 8 4 59 5 Unrecognized Function Type Descrip
162. onitoring equipment conditions The Host can configure the Equipment to monitor specific variables If one of these variables crossed a Host defined limit a limit transition event occurs This capability has the following functionality e The Host can define a standard set of monitoring zones and limits per variable up to 7 limits per variable e Reporting to the Host when selected Equipment variables transition between monitoring zones e Lets the Host modify the values of the variable limit attributes The Host provides two values per limit the UPPERDB and the LOWERDB The UPPERDB defines the upper boundary of the deadband of a limit The LOWERDB defines the lower boundary of the deadband of a limit When the variable value crosses one of these boundaries an event will occur Figure 11 12 shows how it works TSC II USER MANUAL 11 20 55 SECS GEM UPPERDB DEADBAND LOWERDB FIGURE 11 12 EXAMPLE LIMITS 11 6 10 1 States The following Limit States are defined ABOVE LIMIT A variable is considered to be above limit when its value increases to equal or exceed the upper boundary of the deadband UPPERDB BELOW LIMIT A variable is considered to be below limit when its value decreases to equal or fall below the lower boundary of the deadband LOWERDB NO ZONE In some circumstances it is possible for the variable value to be in neither the upper zone nor the lower zone This may
163. orts S6F11 5 USER MANUAL 11 10 55 SECS GEM 11 6 TECHNICAL SPECIFICATIONS GEM This standard describes a set of capabilities to which an interface should conform to If all the necessary capabilities are implemented the interface is GEM compliant Table 11 1 is the GEM Compliance Statement for this GEM interface It also contains a reference to the section where the capability is described TABLE 11 1 GEM COMPLIANCE STATEMENT FUNDAMENTAL GEM IMPLEMENTED GEM SECTION REQUIREMENTS COMPLIANT State Models Yes 11 6 4 0 Equipment Processing States Yes 0 Host Initiated S1 F13 F14 Yes 11 6 4 Scenario Event Notification Yes 11 6 7 1 On line Identification Yes 0 Error Messages Yes 11 6 16 Documentation Yes Control Operator Initiated Yes 0 ADDITIONAL IMPLEMENTED GEM SECTION CAPABILITIES COMPLIANT Establish Communications Yes Yes 11 6 4 Dynamic Event Report Yes Yes 11 6 7 2 Configuration Variable Data Collection Yes Yes 11 6 8 Trace Data Collection Yes Yes 11 6 9 Status Data Collection Yes Yes 11 6 8 Alarm Management Yes Yes 11 6 12 Remote Control Yes Yes 0 Equipment Constants Yes Yes 11 6 8 Process Program Management Yes Yes 11 6 14 Material Movement No No Equipment Terminal Services Yes Yes 11 6 15 Clock Yes Yes 11 6 17 Limits Monitoring Yes Yes 11 6 10 Spooling Yes Yes 11 6
164. orts to the Host that data too long was detected in the received message 11 8 13 7 Message Fault Due to Data Too Long Step SECS Direction Description Message 1 SxFy H gt E Host sends a message 2 SxFy 1 gt Equipment sends reply Equipment is now expecting specific message from the host as a result of the previous transaction 3 S9F13 gt Equipment has not received the expected message from TSC II U SER MANUAL 11 60 SUC AMTECH TEMPRESS SECS GEM the Host and a conversation timeout occurs it reports to the Host that a conversation timeout occurred 11 8 14 CLOCK 11 8 14 1 Equipment Requests Time Value Step SECS Direction Description Message 1 S2F17 gt Equipment request the current time value from the Host 2 S2F18 gt Current time value from Host 11 8 14 2 Host instructs Equipment to Set Time Value Step SECS Direction Description Message 1 S2F31 gt Host sends request to the Equipment to set its time to a certain value 2 S2F32 gt Acknowledge of change of internal time value to requested time value 11 8 14 3 Host Requests Equipment s Current Time Value Step SECS Direction Description Message 1 S2F17 gt Host requests Equipment s current time value 9 S2F18 gt Equip
165. ow 5 Reference manual 2 4 AMTECH TU TEMPRESS 5 SOFTWARE INSTALLATION Select Users 2 2 Select this object type Users or security prinespals Object Types From this location 5 2 Quaties ANONYMOUS LOGON Aulherticaled Users sib CREATOR GROUP CREATOR OWNER DIALUP Everyone FIGURE 2 4 9 Select the users to add Administrator TSC To select them at once hold the CTRL key while selecting the users 10 Click on OK Figure 2 3 is shown again 2 users have been selected for the TSC Users group 11 Click on OK and close Computer Management 12 Go to START and click on run 13 Type Regedit and click on OK Figure 2 5 Type the name of a program Folder document or Internet resource and Windows will open it For you FIGURE 2 5 5 Reference manual 2 5 1 4 SU AMTECH W TEMPRESS TSC II SOFTWARE INSTALLATION 14 Select the handle key HKEY LOCAL MACHINE Figure 2 6 in Registry editor 15 Click on the right mouse button and select Permissions Figure 2 6 Registry Editor File Edit View Favorites Help amp JB My Computer Name Data 89 0 HKEY CLASSES ROOT ab Default value not set H HKEY_CURRENT_USER m E 9 1 HARDWARE Collapse sam New w SECURITY Find SOFTWARE amp 0 SYSTEM Delete H HKEY_USERS Rename
166. owing options Viewing Style Font Size Numeric Precision Plotting method Data Shadows Viewing Style Font Size Numeric Precision Plotting Method Data Shadows Grid Lines Grid in Front Include Data Labels Mark Data Points m wm P pw Maximize Customization Dialog Export Dialog Help Color Monochtome Monochrome Symbol Latge Medium Small No Decimals 1 Decimals 2 Decimals 3 Decimals Point Line Bar Area Stick Points Best fitline Points Best fit curve Points line Points splitline Spline Off 5 USER MANUAL 8 7 1 UTE MPRESS DATA Shadow 3D Grid Lines Both X and Y axes Y axe X axe No gtid Grid in Front Include Data Labels Mark Data Points Maximize Customization Dialog Export Dialog Help customized graphic can be printed on paper or expotted to a file or the clipboard using the print and export buttons 8 2 2 LOGGING DATA NUMBERS PRESENTATION graphical information is deduced from absolute values which be reviewed printed and exported as well The actual values are available at the Data tab actual values can be printed on paper or exported to a file or the clipboard using the print and export buttons 5 USER MANUAL 8 8 SUUM AMTECH TU TEMPRESS 4 DATA 8 2 3 LOGGING DATA ALARMS AND EVENTS PRESENTATION TEMPREss sySTEMs 04
167. pplication See chapter General TSC 2 setup for specific topics There are three steps in setting up a SECS GEM connection with a Host 1 Configuring port 2 Configuting device 3 Starting communication 11 4 4 CONFIGURING PORT The user can configure a SECS GEM port on the Client application by selecting Port Configuration under General System Setup Figure 11 5 shows the window Select a type for the port TCP IP or RS 232 If TCP IP is selected a Port address must be entered This is the IP address or Computer Name of the Host PC TSC II USER MANUAL 11 5 4 AMTECH TEMPRESS SECS GEM Portname 5 Porttype TCP IP Port address FIGURE 11 5 SETTING PORT CONFIGURATION TCP IP PORT Figure 11 6 shows the same configuration screen for a serial port Here the user has to select to which COM port on the Equipment the Host PC is connected Portname B2 Porttype COM PORT Com nr COM gt rx X i amp FIGURE 11 6 SETTING PORT CONFIGURATION RS 232 PORT 11 4 2 CONFIGURING DEVICE A SECS GEM interface connects as mentioned before a tube on the Equipment PC with a Host PC Every connection has its own Device ID The user has to configure this device To do this he opens the Device Configuration for the tube on the Client application Tube Modification GEM Config Figure 11 7 shows the setup screen TSC II USER MANUAL TEMPRESS SECS GEM
168. put signals The History Time History Lot History Recipe and History Actual can be used to make a selection from the logging files based on time lot ID recipe name or real time 5 USER MANUAL 8 2 1 Y p AMTECH 2 x TEMPRESS DATA 8 1 1 DEFINING A DATASET A dataset is a set of parameters selected from all available DPC and DTC signals that will be presented graphically or numerically To create a new dataset press the New button Give a logical name and press modify an existing dataset double click on the desired dataset The following screen will appear Select Datapoints for viewing 8 43 NITRIDE Al BJPRESSURE v 43 NITRIDE 17 AO 1 N2 3 NITRIDE 18 AO 2 DCS 1 E 43 NITRIDE 19 3 DCS 2 v 43 NITRIDE 20 AO 4 NH3 v 43 NITRIDE 24 AO B PRESSURE E 43 NITRIDE 33 DI 1 PRESS 2 3143 NITRIDE 34 DI 2 PRESSAIR E 43 NITRIDE 35 DI 3JLOADDOOR 43 NITRIDE 36 DI 4 VACFAIL 143 NITRIDE 37 DI B WATRCOOL E 43 NITRIDE 39 DI 7 TEMP SCR 1143 NITRIDE 40 DI BJEXCESS E 43 NITRIDE 41 DI S FANCONTR E 43 NITRIDE 44 DI 12 OPERATE 3 NITRIDE 45 DI 13JWARNING 3143 NITRIDE 46 DI 14 FAILURE NITRIDE 65 DO 1 N2 mA rms Cancel FIGURE 8 2 DATASET PARAMETER SELECTION A window with all available DPC and DTC signals will be shown Select the desired parameters by checking the selection box and
169. qu te 2 9 2 3 Configuration of the TSC Il iiueues sse E 2 9 2 4 Upgrading an existing 5 version seen 2 11 2 4 1 Back p ser files ect e eee erts 2 11 2 4 Uncinstall current TSC II version sse 2 11 2 4 3 TSC II Version 4 xx to 6 XX eee 0 2 12 2 4 4 Version 5 630 10 0 390 sceed atitem inert tetas 2 12 III _ AMTECH TEMPRESS TABLE OF CONTENTS 3 BASIC 3 1 3 1 Getting 3 1 3 2 Basic screen IAYOUL ec ececessessesessesessessessecsscussussessecsecsscusaussessecsecseaueeeeseeneeseensensasens 3 1 du Te DS obire hp epist pac pin cdm aon o ee tun 3 2 3 2 2 gt Navigation i et ete taedet 3 4 22222 Main fielders aa a ped bau 3 4 3 24 software 1 3 5 snum epe et em ta A aman 3 6 4 OVERVIEW inicie E metu qot 4 1 A A IntrogdUje OP 6 EORUM Iz cet BON 4 1 4 2 Tube communication properties sss 4 2 SSOPERATIONS 5 1 tented ect ae et not eripi citu 5 1 5
170. ral Import Export Access Properties Close Version Alarm Help FIGURE 7 31 TSC 2 LANGUAGE AND COLOR PROPERTIES In the TSC 2 System Properties the following tabs are available Language Color System Color To change the language Three languages are available English German and Dutch The tab Numbers is used for software debugging and should not be used by customers Press Apply to use the new language 48 colors are available for the operations screen layout Select the colored box to open the color palette with basic colors and custom colors Press Define Custom Colors and set the R ed G reen B lue numbers within a range from 0 to 255 Press Add to custom colors The new color is now available to be placed in any of the 48 color positions Press Apply to use the new colors To change the color setting of a tube in the Overview screen to indicate Enabled Disabled Maintenance or Demo Mode NOT FUNCTIONAL YET TSC II Reference manual 7 41 d TEMPRESS TEMPRESS SYSTEM 7 3 7 TSC 2 VERSION Nam Product version FIGURE 7 32 TSC 2 PRODUCT VERSION NUMBERS Version menu shows all product versions of the 5 2 and connected DPC and D TC Not connected DPCs and DTCs will be presented as dated 1970 5 Reference manual 7 42 l i gt AMTECH TEMPRESS SYSTEM 7 3 8 IMPORT EXPORT
171. recipe is enabled this abort recipe will be executed first and then the process returns to step 0 TSC II Reference manual 5 3 s s x TEMPRESS OPERATIONS If a process recipe is aborted 2 commands are executed An abort alarm is generated and the actual process recipe is returned directly to step 0 if no abort recipe has been set active in this process recipe If an abort recipe is activated this will be executed When the abort recipe reaches its END command then the system returns to step 0 of the process recipe that was aborted 5 7 PADDLE ASSIGNMENT Paddle assignment F E x Assign paddles Paddle Zone1 Paddle 1 2 2 Paddle 2 Zone3 Not used Assign Paddle FIGURE 5 3 PADDLE ASSIGNMENT The paddle assignment allows the paddle thermocouple input signals to be used for temperature control Select the desired paddle from the pull down menu and Assign Paddle Enter name and password and Close to return to the Operations main screen DANGER Assigning the wrong paddle thermocouple input to a control zone may cause serious system damage TSC II Reference manual 5 4 TEMPRESS OPERATIONS 5 8 CHANGE LOT ID When a batch of wafers needs to be processed it often comes with Lot ID This Lot ID allows history tracing if process problems should occuts A maximu
172. rmal recipe list in the Recipe Explorer allows a recipe to be imported A browse menu appears and the desired recipe be selected rec Import Recipe H Bm PROFILE H STANDBY FIGURE 6 4 IMPORT A RECIPE Select the desired recipe and press Open The desired recipe will be imported to the recipe explorer can be modified and handled like any other recipe TSC II Reference manual 6 5 TEMPRESS RECIPES 6 2 3 EDIT RECIPE PROPERTIES The recipe name can be altered by changing the recipe properties These can be accessed by clicking once on the recipe to be modified and menu Edit 1 Select with the left mouse button the recipe name in the recipe explorer 2 Select Edit in the recipe edit menu The following screen will appear with the recipe properties Recipe Properties Recipe NITRIDE 1 Recipe Type Jormal Last modified 28 nov 2001 14 40 Last mod user Version 0 Recipe length 291 Memo UploadTime 28 11 2001 14 40 23 FIGURE 6 5 RECIPE PROPERTIES Recipe type Normal or Abort Last modified Last modified user Version Recipe length Update recipe Only the Recipe name can be modified Press Update to store the changes Selecting another recipe without pressing Update will cancel the mo
173. s Save to store the new modified settings 5 Reference manual 2 9 W TEMPRESS TSC II SOFTWARE INSTALLATION After adding all the tubes click with the right mouse button on System and select Update to activate modifications For 4 tubes in stack 1 the tubes has to be defined as follows Tube 1 Tube 2 Tube 3 Tube 4 Stack 1 Stack 1 Stack 1 Stack 1 Position 1 Position 2 Position 3 Position 4 Com 3 Com 4 Com 5 Com 6 1 Login as sysmaster sm 2 The Overview screen will appear again and the added tubes should be visible 3 Close 5 by selecting System Close Yes 4 After shutting down the program the communication program must also be closed by using CTRL C 5 Press Start gt Program files gt TSC Diffusion gt TSC Diffusion 2 6 The server program will be automatically started This will take a while because the first time the system will create the logging files for each tube 7 In the screen Overview all tubes must be visible with a green marking indicating communication is enabled Click with the right mouse button on tube 1 and select Enabled The first time the system will ask to log in Repeat this step for all tubes Select a tube Select System 10 Read all the DPC and DTC data 11 Press save to store the newly read configuration 12 After this press Reinit DB
174. server Other interfaces allow the connection of several terminals Additionally the TSC II has the possibility for a client server network Up to 16 servers can work in the same network with up to 8 clients per server For more than 4 clients per server it is recommended to operate TSC II netwotk in a separate segment This manual is part of a series of manuals dealing with the use of Amtech Tempress Systems furnace control products It is assumed that the operator is fully conversant with the procedures of furnace control It is further assumed that the user has a basic knowledge of the use of a personal computer see Operator manual Chapter 1 is an introduction to the TSC II Chapter 2 includes the installation procedures WARNING Never Install additional hardware and software other then TSC II related components or programs on the TSC server s This may cause serious control problems Chapter 3 describes the basic operations including such topics as menu selection and screen layout Each function of TSC II will be described in the remaining chapters Each chapter starts with some background information on the screens described in that chapter A more experienced user can go directly to the required screen to see the possible inputs for any parameter Chapter 11 describes Secs Gem and contains the information to connect TSC H to your local network if available warranty will be expired in case anyone modifies th
175. set is automatically logged out after 5 minutes of no activity TSC II Reference manual 3 2 1 7 AMTECH EN 1 TEMPRESS BASIC OPERATION 2 08 32 o Server DOCUMENTATION gt TSC 2 design PROCOS Engineers Consutants p aderit tel 31 578 699200 Overview Operations Recipes System Data Alarm Help General Information 09 okt 2002 08 38 STACK 01 2 WETOXID Server DOCUMENTATION STACK 01 zx EMPTYATM STACK 01 A3 NITRIDE STACK 01 A4 EMPTYLP Server or Tube selection STACK 01 A3 NITRIDE Current user 1 x TSC User identification T 0 tome ID Login TSC II Reference manual 3 3 E TEMPRESS BASIC OPERATION 3 2 2 NAVIGATION BAR The navigation bar in the bottom field is always visible like the title bar Clicking a push button on the requested main screen automatically closes the previous one 3 2 3 MAIN FIELD The contents of the center field changes according to the selection made either in the title tube or server selection or in the navigation bar The right side of the center screen contains context sensitive control buttons whereas the left side shows the related information TSC II Reference manual 3 4 SUC AMTECH TEMPRESS 3 2 4 5 SOFTWARE OVERVIEW Overview Operations Recipes System Datal
176. states LOCAL and REMOTE ON LINE LOCAL Operation of the Equipment by direct action of the operator The Host has the all the available capabilities except the use of remote commands ON LINE REMOTE Operation of the Equipment by direct action of the operator or remotely by Host The Host can use all the available capabilities 11 6 5 2 State Transitions The Finite State Diagram in Figure 11 10 shows the different state transitions of the Control model These state transitions are described in Table 11 3 Equipment OFFLINE Attempt 12 9 ONLINE Host OFFLINE FIGURE 11 10 CONTROL STATE MODEL TABLE 11 3 CONTROL STATE TRANSITION TABLE TSC II USER MANUAL 11 16 AMTECH Se SECS GEM Current State Trigger New State Comments Undefined Entry into CONTROL state CONTROL Sub state Equipment may be configured system initialization conditional on configuration to default to ON LINE or OFF LINE Property 300002 Undefined Entry into OFF LINI OFF LINE Sub state Equipment may be configured conditional on configuration to default to any sub state of OFF LINE Property 300003 T OFF LINE switch Host to go ON LINE S1F1 ATTEMPT Failure SIFO New state conditional on Configuration may be set to ON LINE configuration Property EQUIPMENT OFF LINE or 300010 HOST OFF LINE ATTEMPT Equipment receives expected ON LINE Host is notified of transition ON LINE Acknowledge message S1F2
177. t 52 46 Direction gt Exception 11 7 4 27 S2F46 Variable Limit Attribute Acknowledge Description Acknowledge or report error for Define Variable Limit Request Structure lt Lp2 lt B 1 VLAACK gt lt L 0 gt gt Answet Direction E lt gt H Exception If the Request S2F45 is not accepted due to one more invalid parameters LIMITACK 3 then a list of invalid parameters is returned TSC II USER MANUAL 11 39 AMTECH MPRESS UTE SECS GEM lt L 2 lt VLAACK gt lt L NoOfVIDS lt 1000 lt L 3 lt V 1 VID gt lt B 1 LVACK gt lt L 2 B 1 LIMITID gt lt B 1 LIMITACK gt gt gt gt gt zeto length list after LVACK indicates no invalid limit values for that VID 11 7 4 28 S2F47 Variable Limit Attribute Request Description Request for currently defined variable limit attribute definitions A zeto length list requests a list of all VID values that can have vatiable limit attributes Structure lt NoOfVIDS lt 1000 lt VID gt gt Answet S2F48 Direction E lt gt H Exception 11 7 4 29 S2F48 Variable Limit Attributes Send Description Values of requested variable limit attribute definitions in the order requested Structure lt NoOfVIDS lt 1000 lt L 2 lt V 1 VID gt lt A Unitslength lt 1000 UNITS lt 1 LIMITMIN
178. te transitions of the spooling These state transitions are described in Table 11 6 SPOOL INACTIVE POWER ON FIGURE 11 14 SPOOLING STATE TRANSITIONS TSC II USER MANUAL 11 26 TEMPRESS SECS GEM TABLE 11 6 SPOOLING STATE TRANSITIONS Current State Trigger New State Comment 1 SPOOL Communication state SPOOL The default state in each sub state is INACTIVE changes from ACTIVE entered The message which could not COMMUNICAT ING to be sent remains in the send queue and NOT COMMUNICAT is dealt with in Spool Active state ING or from WAIT CRA to WAIT DELAY and Enable Spool property 300009 is true 2 SPOOL NOT Message generate which SPOOL FULL area transition OUTPUT INACTIVE 4 Purge request 56 23 Initiates purging process OUTPUT received from Host SPOOL 5 6 TRANSMIT Communication failure or NO SPOOL SPOOL MaxSpoolTransmit OUTPUT reached 7 POWER ON POWER OFF 8 POWER OFF Equipment power on POWER ON If spooling were active prior to power down it shall continue The message which would not fit into FULL will not fit into spool the spooling area is dealt with after the NO SPOOL Transmit request S6F23 TRANSMIT Initiates message transmission from OUTPUT received from Host SPOOL spool The variables used are Variable EnableSpooling MaxSpoolTtransmit OverwriteSpool SpoolCountActual SpoolCountTotal SpoolFullTime
179. tem a limited number of events is preconfigured These events are listed in Appendix B 11 6 4 COMMUNICATION This paragraph describes the different states and state transitions of communication between the host and the equipment 11 6 4 1 States The possible communication states are DISABLED In this state communication with a host computer does not exist If the operator switches from ENABLED to DISABLED all communications cease immediately ENABLED The communication is enabled ENABLED has two sub states COMMUNICATING and NOT COMMUNICATING Whenever communications are enabled either during system initialization or through operation selection the sub state of NOT COMMUNICATING is active until communications are formally established ENABLED NOT COMMUNICATING Communication is enabled but not established yet The Equipment shall attempt to establish communications No other messages shall be sent This state has two sub states EQUIPMENT INITIATED CONNECT and HOST INITIATED CONNECT NOT COMMUNICATING EQUIPMENT INITIATED CONNECT The Equipment has tried to establish communication with the Host This state has two sub states WAIT CRA and WAIT DELAY TSC II USER MANUAL 11 12 55 SECS GEM NOT COMMUNICATING EQUIPMENT INITIATED CONNECT WAIT CRA An Establish Communications Request has been sent The equipment waits for the host to acknowledge the request NOT COMMUNICATING EQUIPMENT
180. tep can be modified by selecting the step and pressing Edit A screen appears with recipe step properties The modified step name is stored by pressing Update line 6 4 RECIPE COMMANDS process recipe consists of recipe steps which in turn contains recipe commands commands in a particular recipe step are executed simultaneously The sequence of commands is therefore not important except for alarm branch and abort commands It is recommended to use a similar sequence for all recipes to improve readability 6 4 1 CREATE A NEW RECIPE COMMAND 1 To insert a new command click with the left mouse button on the Recipe Step and select New in the recipe edit field Alternatively use the right mouse button on the recipe name once and select New command TSC I Reference manual 6 9 SUUM AMTECH x TEMPRESS RECIPES 2 A list of all available commands appears Append the desired command by double clicking the name or clicking it once and pressing OK If more than one sub command is available the command list will expand to show the possible sub commands Double click or click once and press OK to append the new command The contents of the newly added command are set when Update is pressed Select Command Gasflow Temperature Alarm Wait Branch Abort Recipe Abort Digital out Cancel FIGURE 6 9 INSERT NEW COMMAND 6 4 22 INSERT ANEW COMMAND To insert a new c
181. the selected parameters for example temperatures gasflows pressure are shown step by step where the X axis shows the steps time and the Y axis the simulated actual values of the selected data The TSC II software provides the Actual I O Status in every step like used in some furnace controllers Only the changes from one step to the other need to be programmed with full details of all parameters in each step are available 6 12 1 GRAPHICAL SIMULATION big OG Apr 2001 14 45 STACK 01 A2 TUBE 2 B svsmaster Main Title Sub Title Delete dd Print r Overview Recipe Normal temp Read Write Simulation Graphical Recipe stepstatus Update 10 20 30 40 50 60 70 80 90 100 110 120 130 Simulation Axis Overview Operations Recipes System Data Alarm Help FIGURE 6 21 GRAPHICAL SIMULATION OF THE RECIPE Y Axis 8 TREE SESS m A Emm rue To verify a process recipe three simulations are available When a recipe is completed a graphical simulation can be performed Select Simulation Graphical The following screen will appear Figure 6 21 The selected parameters for example temperatures gas flows pressure are shown step by step where the X axis shows the steps time and the Y axis
182. tion This message indicated that the function in the message ID is not recognized by the Equipment This function does not exist Structure lt 10 MHEAD gt Answet Direction gt Exception 11 7 8 5 S9F7 Illegal Data Description The stream and function are recognized but the data format of the message could not be interpreted not according to protocol Structure lt B 10 MHEAD gt Answet Direction E gt H Exception 11 7 8 6 S9F9 Transaction Timer Timeout Description This message indicated that a transaction receive timer has timed out and the corresponding transaction has been aborted Structure lt 10 MHEAD gt TSC II USER MANU AL 11 49 TEMPRESS SECS GEM Answet Direction E gt H Exception 11 7 8 7 89 11 Data Too Long Description This message indicates that a message to the Equipment is too long the Equipment can not handle it Structure lt B 10 MHEAD gt Answet Direction E gt H Exception 11 7 8 8 S9F13 Conversation Timeout Description Data were expected but none were received within a reasonable length of time Structure lt L 2 lt 6 gt lt V 1 EDID gt gt Answer Direction gt Exception 11 7 9 STREAM 10 TER
183. tions of the process These state transitions are described in Table 11 4 TABLE 11 4 PROCESS STATE TRANSITION TABLE IDLE RUNNING HOLD FIGURE 11 11 PROCESS STATE MODEL Current State 1 IDLE 2 RUNNING 3 HOLD 4 RUNNING from the host or the operator console uipment has received a START command uipment has received a PAUSE command from the host or the operator console uipment has received a RESUME command from the host or the operator console Equipment has received an ABORT command from the host or the operator console New State RUNNING HOLD RUNNING IDLE Comments The variables used are Variable Process State New Process State Old 5 USER MANUAL 11 18 55 SECS GEM 11 6 7 EVENT REPORTS This capability provides a dynamic and flexible method for the user to configure the Equipment to send user defined data reports on events The functionality can be broken into two logical parts host notification when an event occurs and dynamic configuration of the data attached to the event notification 11 6 7 1 Event Notification The purpose of this capability is to provide data to the host at specified points in equipment operation Events on the Equipment may trigger activity on the part of the host The Equipment supplies
184. ture recipe number in use Parameter table Whether or not a temperature alarm is set The high and low limits The spike PID and gain parameters The paddle I and D parameters The type of control spike or paddle Maximum Spike Correction table Maximum temperature range with a maximum of 1500 C Maximum Spike Correction Temperature of 0 to 259C for each zone Paddle Correction table Calibration Temperature The calibration value for each zone PID Parameters This shows the spike PID and gain value The integral parameter for each zone and the derivative parameter values of the paddle are then shown for the 5 temperature ranges Finally the maximum heat up and maximum profile deviation is shown for each temperature range Thermocouple types Shows the type of the thermocouple in use 5 USER MANUAL 8 14 1 SUC AMTECH x TEMPRESS DATA 8 5 2 NORMAL TEMPERATURE TABLE i ID rData Control Spike Independent General m Normal temperature table Zone Sp C Slope C m High Lim C Low Lim il 7000 1000 00 00 100 100 oo oo 100 3 00 7000 10 00 Log data Run 00 Main Temperature Normal Temp profile Temp Overview Operations Recipes System Data Alarm Help FIGURE 8 9 MONITORING NORMAL TEM
185. ugh operator switch to ENABLED 5 Entry to Any entry to NOT WAIT CRA Attempt to establish communications by EQUIPME COMMUNICATING sending request to Host SIF15 NT INITIATED CONNECT 6 WAIT CRA Connection transaction WAIT DELAY Delay timer is started Wait for timer to expire 7 WAIT CommDelay timer Wait for Acknowledge S1F14 from Host expired May receive Request S1F13 from Host 8 WAIT Received a message WAIT CRA Indicates opportunity to establish DELAY other than La communications Try again by sending Request Communication S1F13 TSC II USER MANUAL 11 14 AMTECH TEMPRESS SECS GEM Request SIF13 9 WAIT CRA Received expected COMMUNICATING Communications are established Acknowledge SIF 14 10 Entry to Any entry to NOT WAIT CR FROM Wait for Communication Request SIF13 from HOST COMMUNICATING HOST Host INITIATED CONNECT 14 COMMUNI Communication failure NOT COMMUNICATING CATING 15 WAIT CR Received COMMUNICATING Communications are established Reply FROM Communication S1F14 is sent HOST Request SIF15 The variables used are Vatiable Communication State EstablishCommunicationTimeout 11 6 5 CONTROL STATE Control State model defines the level of cooperation between the Equipment and the Host It also specifies how the operator may interact at the different levels of Host Control Control
186. uipment has to be configured so it can communicate with the Host PC The following communication parameters are used Parameter Desctiption Communication port used Baud trate of serial communications Baud rate 11 5 3 ETHERNET COMMUNICATION HSMS HSMS module on the Equipment has to be configured so it can communicate with the Host PC The following communication parameters are used Parameter Desctiption Port Active Passive Active Tcp Portnumber used The equipment behaves as Active Building of the communication link is always initiated by the equipment TSC The host should listen on port 5001 The source tcp portnumber is random 11 5 4 SECS II MESSAGE SUMMARY The following messages are supported by the TSC SECS GEM Interface Stream Function Name 51 0 Abort Transaction S1F1 Are you there S1F2 On Line Data Equipment to Host S1F3 Selected Status Request S1F4 Selected Status Data S1F11 Status Variable Namelist Request S1F12 Status Variable Namelist Reply S1F13 Connect Request S1F14 Connect Request Acknowledge S1F15 Request Off Line S1F16 Off line Acknowledge S1F17 Request On Line TSC II USER MANUAL 11 8 4 AMTECH TEMPRESS SECS GEM S2F18 52 25 52 24 52 29 52130 52531 52532 52533 52 34 52535 52536 52537 52138 52139 52 40 S2F41 S2F42 S2F43 S2F44 S2F45 S2F46 S2F47 S2F48 S5F0 S5F1 S5F2
187. uration Messages Pressure Range Units DO Read Write DTC Setup Misc Configuration TouchScreen Paddle TC Operations Screen PID Reinit DB Spike Correction Profiling History Profiling Recipes Read Write General TSC 2 Setup ersion Alarm Help FIGURE 7 3 ANALOG OUTPUT CONFIGURATION The Analog Outputs that must be defined here can be found in the electrical drawings of the furnace For a safe and reliable operation of the tube using TSC 2 the Analog Outputs described here MUST match actual tube hardware Number Mnemonic Interlock Enter the number of the Analog Output Enter the name for the Analog Output The interlock feature allows automatic control of the corresponding Digital Output Number with the setpoint of the Analog Output Number A setpoint of 0 zero automatically closes the related Digital Output a setpoint higher than 0 zero automatically opens the related Digital Output with the Sofistart feature See the REFERENCE MANUAL DPC for details on the interlock and softstart feature The interlock selection must match the type of Digital Output and can be one of the following options Normally Open Normally Closed None or Press Atm Control TSC II Reference manual 7 7 1 UTE I AMTECH MPRESS SYSTEM Minimum Maximum Multiplier Unit Range Valve AN Description AN NOTE On
188. wledge or error of an Alarm Report Structure lt B 1 5 gt Answer 5 USER MANUAL 11 41 55 SECS GEM Direction gt Exception 11 7 5 4 S5F3 Enable Disable Alarm Send Description Request to enable or disable reporting of a specific alarm of alarms zero length item for ALID means all alarms Structure lt L 2 lt B 1 ALED gt lt VIN ALID gt gt Answer S5F4 Direction H gt E Exception 1 7 5 5 S5F4 Enable Disable Alarm Acknowledge Description Acknowledge or error on enable disable alarm report request Structure lt 5 gt Answet Direction E gt H Exception 11 7 5 6 85 5 List Alarm Request Description Request for alarm information zero length item list requests all possible alarms Structure lt U4 NoOfALIDs lt 256 ALID gt Answet S5F6 Direction gt Exception 11 7 5 7 S5F6 List Alarm Data Description Requested alarm information Structure lt L NoOfALIDs lt 1000 lt L 3 lt B 1 ALCD gt lt V 1 ALID gt lt A length lt 40 ALTX gt gt gt Answet Direction E gt H Exception Zeto length list NoOfALIDs 0 no alarm information found zero length item for ALCD or ALTX means that the alarm does not
189. ws the temperatures and limits used in all zones of a tube during the normal operation of the furnace to be entered or changed The input fields are Recipe number Control Control Temperature setpoint Slope As of DTC version 2 1 an unlimited amount of temperature recipes can be stored Older DTC s can store a maximum of 16 recipes This selects the thermocouple type on which the control is to be exercised spike or paddle This selects the type of control independent or mastet slave Enter the temperature setpoint for each zone Each entry must be in the range set in the tube configuration screen System DTC Configuration Enter the rate of increase in temperature for each zone Each entry must be in the range 0 0 to 99 0 C TSC II Reference manual 6 16 l i gt AMTECH gt 2 x TEMPRESS RECIPES High low limits The first column in this field is the high alarm limit Enter the allowed maximum deviation above the temperature setpoint before an alarm is to be generated The second column in this field is the low alarm limit Enter the allowed maximum deviation below the temperature setpoint before an alarm is to be generated Both parameters must be in the range 0 0 to 25 5 Gain Enter the gain setpoint for each zone This must be in the range 0 to 255 Press save to store the entered data or print to print the normal temperature table 6 11 READ WRITE To read normal and
190. you sure you want to completely remove Tempress System Controller and all of its components select Yes The program will be removed When asked to Remove Shared File select Yes to all When asked again Remove Shared File select Yes Press Ok to close Remove Programs From Your Computer Close all windows Reboot computer 5 Reference manual 2 11 W TEMPRESS TSC II SOFTWARE INSTALLATION 243 5 VERSION 4 XX TO 6 XX The procedure of upgrading an existing TSC 2 version 4 xx to version 6 xx requires the following preparation step e Make a share for the DB folder in the installation directory D program files TEMPRESS SYSTEMS INC Tempress System Controller DB with the following properties see also steps 28 43 of the installation procedure section 2 1 e Share name TSC e Maximum number of users Grant the user TSC full access e Continue with the upgrade described for version 5 xx and higher 244 5 VERSION 5 XX OR 6 XX TO 6 XX The procedure of upgrading an existing TSC 2 version 5 xx or higher to version 6 xx requires the following steps e Backup existing data e Install the latest version of the TSC 2 software NOTE Press Yes to copy database files Failure to do so will result in a lot of extra work e Convert old database to new format 2 4 41 Installing the new TSC II version 6 0 1 Start th
191. ystem configuration using RS 232 sse 11 3 Figure 11 3 System configuration using TCP IP ssssssseeeeee 11 4 Figure 11 4 Example Layout RNUNASSENUR NUR URID SUM dA 11 5 Figure 11 5 Setting Port Configuration TCP IP 11 6 Figure 11 6 Setting Port Configuration RS 232 11 6 Figure 11 7 Setting Device Configuration ssssseeeeeeees 11 7 Figure 11 8 Starting Secs Gem sse 11 7 Figure 11 9 Communication State Model sse 11 14 Figure 11 10 Control State MOdel ioc e niit ben 11 16 Figure 11 11 Process State Model entree tettert centena etiatn 11 18 Figure 11 12 Example limits oiera a A EEA 11 21 Figure 11 13 Limits State Transitions 11 22 Figure 11 14 Spooling State Transitions serene 11 26 TSC II USER MANUAL XI et y AMTECH TU TEMPRESS PREFACE PREFACE This reference manual is a guide for the operation of the Tempress System Controller TSC ID The TSC II user interface is Microsoft Windows XP based and provides centralized control over furnaces used in the production of silicon wafers The user interface is easy to manage and reduces learning times It interfaces to the Digital Process Controller DPC to enable control of up to 16 process tubes per

M450_01 TSC

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