Home

User Manual MP130E - Physik Instrumente

1. 1 1 2 Symbols and Typographic Conventions seen 1 1 3 Biz EE 2 1 4 gum 3 1 5 Other Applicable 3 1 6 Downloading Manuals ane nnne nnns 3 2 Safety 5 2 1 Intended USE entere det E 5 2 2 General Safety Instructions essent entente 5 2 3 Organizational 6 3 Product Description 7 3 1 aie murs 7 3 2 FProduct Labeling EE 8 3 3 Scope of Delivery 10 3 4 Suitable Controllers esesssssssssssssseeeee eee nnne nns 10 3 5 Technical Features cinerem tree agr Reime dei oer LE 11 3 5 1 Linear Encoder Sensor sse 11 3 5 2 Reference Point Switch essere 11 4 Unpacking 13 5 Installation 15 5 1 General Notes on Installation 15 5 2 Connecting the N 765 to the Protective Earth 17 5 3 Mounting the N 765 on a Surface sss eee 19 5 4 Setting Up a Multi Axis System sssssssssseeeeeeennnren nns 22 5 4 1 General Information on Setting Up a Multi Axis System
2. 23 5 4 2 Setting Up a Z 23 5 5 Affixing the Load to the 765 25 5 6 Connecting the N 765 to the Controller 27 10 11 12 Start Up and Operation 6 1 General Notes on Start Up and Operation 6 2 Operating Parameters 6 3 Operating the N 765 6 4 Discharging the Piezo Actuators of the Drive Maintenance 7 1 General Notes on Maintenance 7 2 Performing a Maintenance Run 7 3 Cleaning the N 765 Troubleshooting 8 1 General Notes on Troubleshooting 8 2 Possible Causes and Correction Customer Service Technical Data 10 1 Specifications 10 1 1 10 1 2 10 1 3 10 3 1 10 3 2 10 3 3 Old Equipment Disposal EC Declaration of Conformity Maximum Ratings Ambient Conditions and Classifications 10 2 Dimensions 10 3 Pin Assignment Drive Connection for N 765 Sensor Connection for N 765 Pin Assignment of the N664B0001 Adapter PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Objective and Target Audience of this User 1 Symbols and Typographic Conventions sss 1 MIO M 2 mme M 3 Other Applicable 3 Downloading Manuals rictu 3 1 1 Objective and Target Audienc
3. all components must be firmly affixed to each other 16 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 2 Connecting the N 765 to the Protective Earth Conductor INFORMATION gt Observe the applicable standards for mounting the protective earth conductor On the N 765 there is an M4 hole next to the cable exit for connecting the protective earth conductor In the following figure this hole is marked with the symbol for the protective earth conductor Figure 4 N 765 Protective earth connection in the base body N 765 NEXACT Stage MP130E Version 1 0 0 17 5 Installation p I Figure 5 Mounting of the protective earth conductor profile view 1 Base body of the N 765 2 Flat washer 3 Safety washer 4 Screw 5 Cablelug 6 Protective earth conductor Prerequisites Y You have read and understood the general notes on installation 15 Y The N 765 is not connected to the controller Tools and accessories Suitable protective earth conductor Cross sectional area of the cable 20 75 mm Supplied M4 screw set for protective earth p 10 for mounting a protective earth conductor Suitable screwdriver Connecting the N 765 to the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connecti
4. products with CD Identify the password 1 2 3 Insert the product CD into the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and the password in the section User login for software download in the Release News Downloading Manuals 1 2 ge R Open the website http www pi ws Click Info If you have a user name and password a Click Login b Login with the user name and password Click Product Downloads In the Product Files area click the corresponding product category On the right hand side of the page select the corresponding sub category Navigate to the product code on the page The following manuals are displayed Freely accessible manuals Manuals that are protected by a password Click the desired manual and save it to the hard disk of your PC or to a data storage medium 4 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter USG norssi nianon 5 General Safety INStruCtions enne tentent snnt nnns 5 Organizational Meastlr s tert ee t oa eei D nad za Co ee LE RR Lotes 6 2 1 Intended Use The N 765 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in enclosed spaces and i
5. the load capacity of the stage p 39 gt Initiate all motions by sending motion commands to the controller Do not displace the moving platform manually NOTICE Malfunction due to soiling Any type of soiling e g dust oil lubricant or condensation will render the N 765 inoperable gt Keep the N 765 free from dirt and condensation NOTICE Malfunction due to radiation Radiation e g X rays will render the N 765 inoperable gt Protect the N 765 from radiation N 765 NEXACT Stage MP130E Version 1 0 0 15 5 Installation p I NOTICE Damage from incorrect mounting Incorrect mounting of the N 765 or incorrectly mounted parts can damage the N 765 gt Only mount the N 765 and the loads on the mounting fixtures holes intended for this purpose NOTICE Warping of the N 765 due to mounting on uneven surfaces Mounting the N 765 on an uneven surface can warp the N 765 Warping reduces the accuracy gt Mount the N 765 on an even surface The recommended evenness of the surface is lt 3 gt For applications with large temperature changes Only mount the N 765 on surfaces that have the same or similar thermal expansion properties as the N 765 NOTICE Damage from unsuitable cables Unsuitable cables can damage the stage and the electronics gt Only use cables provided by PI for connecting the N 765 to the electronics INFORMATION For optimum repeatablity
6. 0 0 11 PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacki N 765 NEXACT Stage ng Unpack the N 765 with care Compare the contents against the items covered by the contract and against the packing list Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact Pl immediately Keep all packaging materials in case the product needs to be returned MP130E Version 1 0 0 13 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation essssssssseseeeeeen eene 15 Connecting the N 765 to the Protective Earth 17 Mounting the N 765 on a Surface ssssssssssssssssseseeeenneenen enne 19 Setting Up a Multi Axis System ssssssssssssssese eene enne 22 Affixing the Load to the N 765 sssssssssesseeee eene nnne nnne 25 Connecting the N 765 to the Controller 27 5 1 General Notes on Installation NOTICE Damage from changes in position due to external forces Displacement of the moving platform of the stage from externally acting forces can damage the drive Changes in position of the moving platform that are triggered by externally acting forces can also damage the load or the environment gt Make sure that forces acting on the moving platform in the direction of motion do not exceed
7. 338 000036450 Accessories for connection to the grounding system 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2flat washers N664B0001 Adapter Sub D 15 m to HD Sub D 15 f for sensor connection MP137EK Short instructions for NEXACT stage 3 4 Suitable Controllers Controner pep E 861 1A1 Digital NEXACT Controller gt order contact our customer service department 37 10 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 5 Technical Features 3 5 1 Linear Encoder Sensor The stage is equipped with an optical linear encoder For the encoder resolution refer to the table in the Specifications section p 39 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 5 2 Reference Point Switch The stage is equipped with a direction sensing reference point switch that is located approx 1 mm in front of the lower travel range limit This sensor sends a TTL signal indicating whether the stage is on the positive or negative side of the reference point switch The commands that use the reference signal are described in the user manual of the controller and or in the corresponding software manuals N 765 NEXACT Stage MP130E Version 1
8. E Version 1 0 0 25 5 Installation p I Affixing the load to the N 765 Figure 8 Mounting holes for affixing the load to the moving platform 1 8xM2 5 holes with 5 mm thread depth 2 12xMP holes with 4 mm thread depth 3 4xMS holes with 6 mm thread depth For the exact position see Dimensions p 42 1 Align the load so that the selected mounting holes in the moving platform can be used for affixing it 2 Affix the load to the selected mounting holes in the moving platform using the Screws Maximum screw in depth in the moving platform of the N 765 screws 6 mm M2 5 screws 5 mm 2 screws 4 mm Maximum torque M3 screws 1 2 Nm 2 5 screws 0 7 Nm 2 screws 0 35 Nm 3 Check that the load is affixed firmly to the moving platform of the stage 26 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 6 Connecting the N 765 to the Controller Figure 9 N 765 Connections 1 HD Sub D 15 m drive connector 2 Sub D 15 f sensor connector 3 Adapter Sub D 15 m to HD Sub D 15 f Prerequisites You have read and understood the general notes on installation p 15 lt You have installed a suitable controller p 10 Y You have read and understood the user manual of the controller Y The controller is switched off Tools and accessories N664B0001 adapter in the scope of delivery p 10 Screwdriver for slotted
9. PI MP130E N 765 NEXACT Stage User Manual Version 1 0 0 Date 29 07 2015 This document describes the following product N 765 060 Precision Z Stage 6 5 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 25 N Push Pull Force Dimensions 65 x 110 x 56 mm W x L x H Piezoelectric Stepping Drive NEXACT Physik Instrumente GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PI amp PIC PICMA PlILine amp PIFOC PIMagG PiezoWalk8 NEXACT NEXLINEG NanoCube NanoAutomation 2015 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights The use of any text images and drawings is permitted only in part and only when indicating the source Original instructions First printing 29 07 2015 Document number MP130E LMo Version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Objective and Target Audience of this User
10. age approaches the target position too slowly or too fast or does not keep it stable servo jitter If uncontrolled oscillations occur during the operation of the N 765 gt Immediately switch off the servo control system of the affected axis gt Check the settings of the servo control parameters NOTICE Destruction of the piezo actuators by electric flashovers Using the N 765 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuators of the NEXACTO drive by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials e g metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the N 765 in environments that can increase the electrical conductivity gt Only operate the N 765 within the permissible ambient conditions and classifications p 41 INFORMATION Shock like impacts can cause encoder malfunction gt Protect the stage from shock like impacts gt Carry out a reference move see user manual of the controller 30 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation INFORMATION The positive direction of motion is upward INFORMATION The repeatability of the positioning is only ensured when the reference point switch is always approa
11. ax max 39 10 Technical Data Operating temperature range 10 50 Mass 0 8 kg 5 96 Material Al black anodized Dimensions 65 x 80 x 20 mm Cable length 3 m 10 mm Connector HD Sub D m 15 pin motor HD Sub D f 15 pin Sensor Recommended E 861 1A1 single axis motion controller controller driver E 712 modular controller system for up to 6 axes 10 1 2 Maximum Ratings The stage is designed for the following operating data Maximum Operating Maximum Operating Maximum Power Voltage Frequency Consumption 40 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the N 765 Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa Relative humidity Highest relative humidity 80 for temperatures to 31 C non condensing Decreasing linearly to 50 relative humidity at 40 C non condensing Operating temperature 10 C to 50 Storage temperature 20 C to 60 C Transport temperature 20 C to 60 C Overvoltage category in acc with EN 60664 1 2007 VDE 0110 1 Protection class acc to EN 61140 VDE 0140 1 Degree of pollution 1 acc to EN 60664 1 2007 VDE 0110 1 Degree of protection IP20 acc to IEC 60529 N 765 NEXACT Sta
12. bH Freiburger Strasse 30 79427 Eschbach Germany N 765 NEXACT Stage MP130E Version 1 0 0 47 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the N 765 an EC Declaration of Conformity has been issued in accordance with the following European directives 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 N 765 NEXACT Stage MP130E Version 1 0 0 49
13. ched from the same side Recommended controllers from PI fulfill this requirement with their automatic direction detection for reference moves to the reference point switch 6 2 Operating Parameters If you use the software included in the scope of delivery of the E 861 1A1 controller the operating parameters can be loaded from the PiMicosStages2 dat stage database gt Download the Update Finder from the PI website http update pi portal ws and use it to update the P MicosStages2 dat stage database on your PC For further information on the stage databases refer to the user manual of the E 861 1A1 controller 6 3 Operating the N 765 Prerequisites v You have read and understood the general notes on start up and operation p 29 You have read and understood the user manual of the controller You have read and understood the user manual of the PC software You have properly mounted the stage p 15 NN S lt The controller and the required PC software have been installed All connections with the controller have been established see user manual of the controller Operating the N 765 gt Follow the instructions in the manual of the controller used for startup and operation of the N 765 N 765 NEXACT Stage MP130E Version 1 0 0 31 6 Start Up and Operation p I 6 4 Discharging the Piezo Actuators of the Drive INFORMATION The N 765 is driven by NEXACT piezo actuators Temperature changes and compress
14. coder signal 2 sine inverted Output The sign indicates that the corresponding pin has not been assigned 44 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 3 Pin Assignment of the N664B0001 Adapter The pin assignments for the N664B0001 adapter that is included in the scope of delivery of the N 765 are as follows Sub D 15 m connector See Sensor Connection for N 765 p 44 HD Sub D 15 f connector See following table 5 1 amp e e j M 24 6 o nt 15 11 Figure 13 HD Sub D 15 f connector for sensor mating side Output Output Output The sign indicates that the corresponding pin has not been assigned N 765 NEXACT Stage MP130E Version 1 0 0 45 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with EU law electrical and electronic equipment may not be disposed of in EU member states via the municipal residual waste Dispose of your old equipment according to international national and local rules and regulations In order to fulfil the responsibility as the product manufacturer Pl miCos GmbH undertakes environmentally correct disposal of all old Pl miCos equipment made available on the market after 13 August 2005 without charge Any old PI miCos equipment can be sent free of charge to the following address PI miCos Gm
15. e of this User Manual This manual contains information on the intended use of the N 765 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual Dangerous situation If not avoided the dangerous situation will result in minor injury Actions to take to avoid the situation NOTICE n Dangerous situation 4 If not avoided the dangerous situation will result in damage to the equipment Actions to take to avoid the situation N 765 Stage MP130E Version 1 0 0 1 About this Document p I INFORMATION Information for easier handling tricks tips etc Symbol Meaning Label Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Detinition Load capacity Maximum load capacity in the vertical direction when the stage is mounted horizontal
16. er beam can cause glare and irritation gt Do not open or disassemble the N 765 gt Contact our customer service department if there is any malfunction of the N 765 N 765 NEXACT Stage MP130E Version 1 0 0 35 8 Troubleshooting P I 8 2 Possible Causes and Correction Target position is approached too Servo control parameters 1 Switch off the servo control slowly or with overshoot are not optimally set system immediately Target position is not kept stable Large changes in the load 2 Check the settings of the D servo control parameters Uncontrolled oscillation of the N 765 3 If necessary correct the settings of the servo control parameters Reduced holding force and feed Ceramic rail of the gt Contact our customer force NEXACTO drive is soiled service department p 37 No or limited motion Excessive load gt Reduce the load see Data Table p 39 Ruler of the encoder is Contact our customer soiled e g from being service department p 37 touched Encoder malfunction due gt Carry out a reference move to shock impact see user manual of the controller If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 37 36 Version 1 0 0 MP130E N 765 NEXACTO Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orde
17. ervals must be defined individually gt Do not lubricate the guidings of the N 765 without consulting our customer service department p 37 gt To lubricate the guidings follow the instructions given in the maintenance manual which you can obtain from our customer service department Ensure that the drive and ceramic rail of the N 765 do not come into contact with lubricants 7 3 Cleaning the N 765 Prerequisites v You have discharged the piezo actuators of the N 765 Y You have disconnected the N 765 from the controller Cleaning the N 765 gt Do do any ultrasonic cleaning gt When necessary wipe the surfaces of the N 765 clean with a cloth that is slightly dampened with isopropanol or a mixture of isopropanol and DI water 34 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting In this Chapter General Notes on Troubleshooting ccccceceeeceeeeeeeeeeceeeeecaeeeeeeeseeeeeseaeeesaeeeeeeeees 35 Possible Causes and Correction sess 36 8 1 General Notes on Troubleshooting Risk of glare and irritation The linear encoder of the N 765 uses a class 2 laser according to DIN EN60825 1 2007 Technical data of the laser Lmax s 1 mW 12655 nm On delivery and if used according to the intended use of the N 765 the laser is fully shielded Laser radiation can exit from the laser only if N 765 is opened The las
18. f used according to the intended use of the N 765 the laser is fully shielded Laser radiation can exit from the laser only if N 765 is opened The laser beam can cause glare and irritation gt Do not open or disassemble the N 765 gt Contact our customer service department if there is any malfunction of the N 765 NOTICE Damage due to improper maintenance The stage can become misaligned as a result of improper maintenance The specifications can change as a result p 39 gt Only loosen screws according to the instructions in this manual N 765 NEXACT Stage MP130E Version 1 0 0 33 7 Maintenance 7 2 Performing a Maintenance Run Depending on the operating conditions and the period of use of the N 765 the following maintenance measures are required Maintenance run The maintenance run is performed to distribute the existing lubricant on the guidings of the N 765 gt To evenly distribute the existing lubricant on the stage guidings perform a run across the entire travel range after 500 hours of operation or after 1 year at the latest gt If you move the N 765 continuously over a small working range 20 of the entire travel range in industrial operation perform a run across the entire travel range every 5000 motion cycles Lubrication Under laboratory conditions the guidings on the N 765 only need to be lubricated in exceptional cases For continuous industrial use the lubrication int
19. ge MP130E Version 1 0 0 41 10 Technical Data I 10 2 Dimensions Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Period All other dimensions Comma 2x 03 H7 Y6 4x 02 5 H7 V5 4 x M2 5x5 7 25 4 x M2 5x5 7 25 6 x M2x4 6 Ie i1l a 12 Ez 6 x M2x4 6 8 gels 4 x M3x6 8 5 4x 2 H7 V5 2x 03 H7 V6 2x 02 H7 V5 e un Figure 10 Dimensions of the N 765 42 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Pin Assignment 10 3 1 Drive Connection for N 765 The HD Sub D 15 m connector transmits the signals to control the drive B memes m BE EL B EE E ECC EE 1 The sign indicates that the corresponding pin has not been assigned N 765 NEXACT Stage MP130E Version 1 0 0 43 10 Technical Data p I This pin is connected to the GND in the connector shell In the E 861 1A1 controller this pin is used to activate the amplifiers 10 3 2 Sensor Connection for N 765 The Sub D 15 f connector transmits the signals to and from the integrated linear encoder and the reference point switch 4 men y P M 15 9 Figure 12 Sub D 15 connector f for sensor mating side exo Encoder signal 1 cosine Output Encoder signal 1 cosine inverted Output Encoder signal 2 sine Output En
20. interfere with the motion and can damage the stages gt Include the masses of the moved stages in the calculation of the load to be moved gt Forall stages in a multi axis system Do not exceed the maximum permissible load Onlyinstall and operate the multi axis system after you have read and understood the user manuals of all components of the multi axis system 5 4 2 Setting Up a Z System Prerequisites v You have read and understood the general notes on installation p 15 Y You have read and understood the general notes on setting up a multi axis system p 23 v You have accounted for the space required to route cables without bending and according to regulations Tools and accessories 5870500002 screw set from the scope of delivery of the N 765 p 10 2 dowel pins 3 m6 x 8 ISO 2338 for use as locating pins 4 socket head cap screws M3x16 ISO 4762 Suitable screwdriver N 765 NEXACT Stage MP130E Version 1 0 0 23 5 Installation P I Mount the N 765 on the N 565 Figure 7 Mount N 765 on N 565 1 Insert the two locating pins into the locating holes 3 mm H7 in the moving platform of the N 565 see figure above 2 Place the N 765 on the N 565 so that the locating pins are inserted into the corresponding locating holes on the bottom side of the N 765 3 Mount the N 765 on the N 565 a When the required mounting holes in the base body of the N 765 are covered by the moving platfor
21. ive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can stay charged for several hours Touching or short circuiting the contacts in the drive connector of the N 765 can trigger unpleasant electric shocks If you want to avoid these unpleasant electric shocks Discharge the stage before you pull out the drive connector from the controller Discharging the piezo actuators of the drive If you want to pull out the connector of the drive from the controller 1 If you are working in closed loop operation Switch off the servo mode on the controller 2 Setthe piezo voltage on the controller to 0 V by sending an RNP command see user manual of the controller 3 If possible Switch off the controller 4 Wait at least 10 seconds before disconnecting the controller 32 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance ssssssssssseeseeeee enne nennen nnne 33 Performing a Maintenance ener nennen nnns 34 Cleaning the N 765 iieri eet t edi ater ede tse 34 T 1 General Notes on Maintenance Risk of glare and irritation The linear encoder of the N 765 uses a class 2 laser according to DIN EN60825 1 2007 Technical data of the laser Lmax lt 1 mW 12655 nm On delivery and i
22. ly The contact point of the load is in the center of the platform Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller a reference point definition must be performed before absolute target positions can be commanded and reached 2 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals E 861 NEXACT Servo Controller PZ205E User Manual PIMikroMove SM148E Software Manual 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading gt Contact our customer service department p 37 INFORMATION For products that are supplied with software CD in the scope of delivery access to the manuals is protected by a password Protected manuals are only displayed on the website after entering the password The password is included on the CD of the product N 765 NEXACT Stage MP130E Version 1 0 0 3 1 About this Document p I For
23. m Start up the stage p 29 and move the moving platform to the lower travel range limit see user manual of the controller b Insert the four screws through the moving platform and the base body of the N 765 into the N 565 Tighten the screws with a maximum torque of 0 5 Nm each d Make sure that screw heads do not protrude from the countersunk holes 4 Checkthat the N 765 is affixed firmly to the N 565 24 Version 1 0 0 MP130E N 765 NEXACTO Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 5 Affixing the Load to the N 765 NOTICE Screws that are too long The N 765 can be damaged by screws that are screwed in too deeply gt Observe the depth of the mounting holes p 42 gt Only use screws of the correct length for the respective mounting holes Prerequisites Y You have read and understood the general notes on installation p 15 Y You have properly mounted the stage v You have prepared the load so that it can be affixed to the mounting holes the moving platform The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Atleast three points are provided for affixing the load on the moving platform Tools and accessories Atleast three screws of suitable length Options Me2screws 2 5 screws MS3screws Suitable tools for fastening the screws N 765 NEXACT Stage MP130
24. n an environment which is free of dirt oil and lubricants In accordance with its design and realization the N 765 is intended for positioning adjusting and shifting loads along the Z axis at various velocities The N 765 is only intended for horizontal mounting The N 765 is a stage for nanopositioning technology The feed is produced by NEXACT piezo actuators coupled to a ceramic rail PiezoWalk principle The N 765 is equipped with a linear encoder for direct position measurement The intended use of the N 765 is only possible when installed and in conjunction with a suitable controller p 10 The controller is not included in the scope of delivery of the N 765 2 2 General Safety Instructions The N 765 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the N 765 Only use the N 765 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the N 765 N 765 NEXACT Stage MP130E Version 1 0 0 5 2 Safety PI 2 3 Organizational Measures User manual Always keep this user manual available with the N 765 The latest versions of the user manuals are available for download p 3 on our website Add all informatio
25. n given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the N 765 on to other users also include this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage Only install and operate the N 765 after you have read and understood this user manual Personnel qualification The N 765 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Prod ct 7 Product Labeling 8 Scope Of PIU M 10 Suitable Gontrollers eet tette 10 Technical i i ETT IM T 11 3 1 Product View 2 3 4 Figure 1 N 765 product view Moving platform Cables for connecting sensor and drive to the controller Base body Side cover The arrow in the figure shows the positive direction of motion N 765 Stage MP130E Version 1 0 0 7 3 Product Description E i 3 2 Product Labeling 2 3 Figure 2 Position of the product labeling o
26. n the stage Figure 3 Position of the product labeling on the sensor connector f 8 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description penus 765 N 765 060 Product name Characters following the period identify the model exactly r 414000946 Serial number example individual for each N 765 Meaning of the places counting from left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive numbers A Warning sign Observe manual of origin Germany Country of origin WWW PIMICOS COM Manufacturer s address website Symbol for the protective earth conductor marks the protective earth connection of the N 765 p 17 Warning sign Observe manual here Top side of sensor connector Warning sign and values for the laser Leax simW A 655nm p 33 Notice of laser radiation p 33 here Top side of sensor connector Laserstrahl Laser Klasse 2 here Bottom side of sensor connector N 765 NEXACT Stage MP130E Version 1 0 0 9 3 Product Description 3 3 Scope of Delivery Hem femos OOOO Precision Z Stage 6 5 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 25 N Push Pull Force Dimensions 65 x 110 x 56 mm W x L x H Piezoelectric Stepping Drive NEXACT 5870500002 Screw set for mounting of the N 765 4 M3x16 socket head cap screws ISO 4762 2 dowel pins 3 m6 x 8 ISO 2
27. on of the N 765 as shown in the profile view 3 Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 18 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Mounting the N 765 on a Surface INFORMATION The mounting holes in the base body of the stage are accessible from above only when the moving platform is at the lower travel range limit delivery state If necessary Start up the stage p 29 and move the moving platform to the lower travel range limit see user manual of the controller Options for mounting the N 765 onto a surface The mounting holes of the N 765 are intended for the following mounting options Mounting option Mounting holes details see Dimensions p 42 Mounting from above with M3x16 screws Mounting from below with M4 screws N 765 NEXACT Stage MP130E Version 1 0 0 19 5 Installation p NOTICE Screws that are too long The N 765 can be damaged by screws that are screwed in too deeply gt Observe the depth of the mounting holes 42 gt Only use screws of the correct length for the respective mounting holes NOTICE Protruding screw heads Protruding screw heads can damage the N 765 gt Ensure that the screw heads do not protrude from countersunk holes
28. rs contact your PI sales engineer or send us an e mail info pi ws gt If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present gt If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download p 3 on our website N 765 NEXACT Stage MP130E Version 1 0 0 37 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data In this Chapter 10 Technical Data EM 39 Brie PI 42 iacere E 43 10 1 Specifications 10 1 1 Data Table Preliminary data N 765 060 Units Active axes Z Motion and Positioning Travel 6 5 mm Integrated sensor Optical linear encoder PlOne Sensor resolution 0 5 nm Min incremental motion 1 nm Velocity closed loop 2 5 mm s Unidirectional repeatability 20 nm Crosstalk angular error 75 urad at full travel range Mechanical Properties Load capacity 20 N Feed force active 25 N Holding force passive 25 N Drive Properties Motor Type NEXACT piezo stepping drive Operating voltage 10 to 45 V N 765 NEXACT Stage MP130E Version 1 0 0 Tolerance typ max typ typ max m
29. screws SL N 765 NEXACT Stage MP130E Version 1 0 0 27 5 Installation p I Connecting the N 765 to the E 861 1A1 controller 1 Connect the drive connector of the stage to the corresponding controller Socket see user manual of the controller 2 Connect the sensor connector f of the stage to the controller a Connect the sensor connector f of the stage to the connector side of the adapter Sub D 15 m b Secure the connection with the integrated screws against accidental disconnection Connect the female side of the adapter HD Sub D 15 f to the panel plug of the controller see user manual of the controller 3 Secure the connections on the controller with the integrated screws against accidental disconnection 28 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and 29 Operating Parameters eiiis aser es tiet eques ea acc qaa e anao SIE ER Ra RU 31 Operating the N 705 A 31 Discharging the Piezo Actuators of the 32 6 1 General Notes on Start Up and Operation Risk of crushing by moving parts There is a risk of minor injuries caused by crushing which can occur between the moving parts of the stage and a stationary part or obs
30. so that they do not interfere with the stage motion Prerequisites Y You have read and understood the general notes on installation p 15 v You have provided a suitable surface For the required position of the holes see Dimensions p 42 For mounting from above with M3x16 screws Four M3 holes with a depth of at least 6 4 mm are provided For mounting from below with M4 screws Four through holes with 4 5 mm for M4 screws are provided The thickness of the surface and the depth of the counterbores at the through holes in the surface are matched so that compliance with the maximum screw in depth of 7 mm in the N 765 is observed evenness of the surface is lt 3 um For applications with large temperature changes The surface should have the same or similar thermal expansion properties as the N 765 v You have accounted for the space required to route cables without bending and according to regulations 20 Version 1 0 0 MP130E N 765 NEXACTO Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Tools and accessories Screws according to the selected mounting option see above 4 MS3x16 screws ISO 4762 included in the scope of delivery p 10 or 4MA screws of suitable length not in the scope of delivery Suitable screwdriver Mounting the N 765 on a Surface 1 Only for mounting from above When the required mounting holes in the base body of the N 765 are covered by
31. tacle gt Keep your fingers away from areas where they can get caught by moving parts NOTICE Damage from collisions Collisions can damage the stage the load to be moved and the environment gt sure that no collisions are possible between the stage the load to be moved and the environment in the motion range of the stage gt Donot place any objects in areas where they can get caught by moving parts gt Stop the motion immediately if a controller malfunction occurs gt If possible adapt the travel range limits of your mechanical system in the software that you use for commanding the motion N 765 NEXACT Stage MP130E Version 1 0 0 29 6 Start Up and Operation p I NOTICE Damage from changes in position due to external forces Displacement of the moving platform of the stage from externally acting forces can damage the drive Changes in position of the moving platform that are triggered by externally acting forces can also damage the load or the environment gt Make sure that forces acting on the moving platform in the direction of motion do not exceed the load capacity of the stage p 39 gt Initiate all motions by sending motion commands to the controller Do not displace the moving platform manually Uncontrolled oscillation NOTICE Your application and the N 765 can be damaged by uncontrolled oscillations Uncontrolled oscillations can be identified by the fact that the st
32. the moving platform Start up the stage p 29 and move the moving platform to the lower travel range limit see user manual of the controller 2 Align the stage on the surface so that the corresponding mounting holes in the stage and the surface overlap 3 Screw the screws into the mounting holes according to the selected mounting option p 29 Mounting from above Insert the screws through the moving platform and the base body of the N 765 into the surface Mounting from below Insert the screws through the surface into the base body of the N 765 Maximum screw in depth 7 mm Maximum torque 0 5 Nm 4 Make sure that screw heads do not protrude from the countersunk holes 5 Check that the N 765 is affixed firmly to the surface N 765 NEXACT Stage MP130E Version 1 0 0 21 5 Installation P I 5 4 Setting Up a Multi Axis System The N 765 can be used as a Z stage in multi axis systems XZ or XYZ combinations p 23 Figure 6 Example of a XYZ system Two N 565 260 and one N 765 1 Upper stage here N 765 2 Middle stage here N 565 260 3 Lower stage here N 565 260 22 Version 1 0 0 MP130E N 765 NEXACT Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 1 General Information on Setting Up a Multi Axis System NOTICE 4 Impermissibly high load on the stages y In a multi axis system the stage used for the Y and or Z axis must also be moved Impermissibly high loads

User Manual MP130E - Physik Instrumente

Contents

Download Pdf Manuals

Related Search

Related Contents