342 Ion Gauge Controller with Digital Display built for Agilent
Contents
1. 104 OF Altitude Maximum Relative Humidity Up to 2000 meters 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Transient Voltages Installation Category overvoltage category II Pollution Rating Micro lon Gauge Degree 2 in accordance with IEC 664 1 5 Service Guidelines Sensitivity 11 Torr nominal Emission Current 0 1 mAdc Collector Potential 0 Vdc Grid Potential 180 Vdc Filament Potential 30 Vdc See Service Guidelines on page 19 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C a r D 2 lt go 5 2 ix E Notes 10 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 2 1 Installation Safety Notices WARNING Using the Micro Ion Gauge to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage or personal injury Do not use the Micro Ion Gauge to measure the pressure of flammable or explosive gases WARNING Exposing the Micro Ion Controller to moisture can cause fire or electrical shock resulting in severe property damage or personal injury Install the Controller ONLY in an indoor environment 3 a S E o 5 2 2 Pressure Relief Devices Before you install the module you should install appropriate pressure relief devices in the vacuum system Granville Phillips2. CAUTION Safety Check Upon completion of any service or repairs to this product ask the Qualified Service Person to perform safety checks to assure that the product is in safe operating order 4 3 Troubleshooting CAUTION The service and repair information in this manual is for the use of Qualified Service Personnel To avoid shock do not perform any procedures in this manual or perform any servicing on this product unless you are qualified to do so CAUTION Do not substitute parts or modify the product Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the product Return the product to a service facility designated by Granville Phillips for service and repair to ensure that safety features are maintained Do not use this product if it has unauthorized modifications 20 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C Service amp Maintenance WARNING High voltages are present within the power supply of the Controller capable of causing electrical shock injury or death Use extreme caution while troubleshooting when power is applied to the Controller The Controller contains static sensitive electronic parts thus the following precautions must be followed when troubleshooting Use a grounded conductive work surface Wear a high impedance ground strap for personal protection Use co
3. does not supply pressure relief valves or rupture disks Suppliers of pressure relief valves and pressure relief disks can be located Via an online search and are listed on ThomasNet com under Relief Valves and Rupture Discs Confirm that these safety devices are properly installed before installing and operating the product 2 3 Installation Procedure The installation procedure includes the following steps 1 Mount the benchtop Micro lon Gauge Controller 2 Attach the Micro lon Gauge to the vacuum chamber 3 Connectthe power cable and the Controller Gauge interconnect cable 4 Connect ground wires between the Micro lon Gauge and the vacuum chamber and any other ground connections to assure the system is safe and protects personnel from electrical shock Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 11 Chapter 2 Step 1 Mount the Benchtop Mounted Micro lon Controller Locate the Controller where it can be easily accessed For greatest accuracy and repeatability locate the Controller in a stable room temperature environment Ambient temperature should never exceed 40 C 104 F operating non condensing or 85 C 185 OF non operating Locate the Controller away from internal and external heat sources and in an area where ambient temperature remains reasonably constant Step 2 Install the Micro lon Gauge on the Vacuum Chamber Do not locate the Gauge near the pump where gauge pre
4. safety signs symbols and labels Each caution or warning statement explains a The specific hazard that you must prevent or unsafe practice that you must avoid b The potential result of your failure to prevent the specified hazard or avoid the unsafe practice and c What you must do to prevent the specified hazardous result Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 7 Chapter 1 1 2 Reading and Following Instructions 1 3 Definitions of Terms You must comply with all instructions while you are installing operating or maintaining the module Failure to comply with the instructions violates standards of design manufacture and intended use of the module MKS Instruments Inc disclaims all liability for the customer s failure to comply with the instructions Read instructions Read all instructions before installing or operating the product Follow instructions Follow all installation operating and maintenance instructions e Retain instructions Retain the instructions for future reference Heed warnings and cautions Adhere to all warnings and caution statements on the product and in these instructions e Parts and accessories Install only those replacement parts and accessories that are recommended by MKS Granville Phillips Division Substitution of parts is hazardous Table 1 1 Terms Describing the Micro lon Vacuum Gauge Controller and the Micro lon Gaug
5. Series 342 Granville Phillips Series 342 lon Gauge Controller with Digital Display built for Agilent Technologies Model G3882A semks Technology for Productivity Granville Phillips Instruction Manual Instruction manual part number 342077 Revision C October 2014 Granville Phillips Series 342 lon Gauge Controller with Digital Display built for Agilent Technologies Model G3882A This Instruction Manual is for use only with Granville Phillips Series 342 Controller built for Agilent Technologies A list of applicable catalog numbers is provided on the following page sernks Technology for Productivity Granville Phillips For Customer Service or Technical Support 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4691 or 1 800 776 6543 FAX 1 303 652 2844 Email gp csr mksinst com Corporate Office MKS Instruments Inc 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 978 645 5500 www mksinst com Instruction Manual 2014 MKS Instruments Inc All rights reserved Granville Phillips is a are registered trademark and Mini lon is a trademark of MKS Instruments Inc All other trademarks and registered trademarks are the properties of their respective owners Granville Phillips Series 342 lon Gauge Controller with Digital Disp
6. acement gauge See Section 4 1 Figure 4 1 Micro lon Gauge Controller Connections Filament 0 2 Q Common Filament _ Collector Grid Grid n wo ix wo go Ej wo 5 o ix wo 0 Q Micro lon Gauge Pinout Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 23 Chapter 4 Notes 24 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C Numerics C Caution and Warning Statements 7 D Damage Requiring Service 19 Definitions of Terms 8 Dimensions 8 F Figures Dimensions 8 Installation Pressure Relief Devices 11 Procedure 11 lon Gauge Illustration 16 0 Operation 16 P Pressure Relief Devices 11 R Reading and Following Instructions 8 Relative Gas Sensitivities 17 S Service Guidelines 9 19 Specifications Controller 9 Gauge 9 T Theory of Operation 15 Troubleshooting 20 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 25 Index 26 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C Granville Phillips Series 342 lon Gauge Controller with Digital Display for Agilent Technologies Model G3882A sernks Technology for Productivity Granville Phillips For Customer Service or Technical Support 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 MKS Granville Phillips Divisi
7. e Term Micro lon Gauge Controller Micro lon Controller Controller Description The Micro lon Vacuum Gauge Controller See Figure 1 1 and Figure 2 2 Micro lon Vacuum Gauge Micro lon Gauge The Bayard Alpert type ionization gauge which indicates pressure by producing a current that is proportional to gas density See Figure 1 1 and Figure 2 1 1 4 Specifications Figure 1 1 Dimensions of the Vacuum Gauge Controller and Micro lon Vacuum Gauge Power ON LED X Agilent Technologies 63882A Gauge Cable Power ON OFF Power Cord Connector Rocker Switch Connector lonization Gauge Controiier Gauge ON OFF Pushbutton Switch Ground Connection Replaceable Fuse 8 32 Thread Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C Safety amp Introduction Table 1 2 Specifications of the Vacuum Gauge Controller and the Micro lon Vacuum Gauge Parameter Specification Controller Pressure Range Less than 5 x 108 Torr to 5 x 10 Torr using 0 1 mAdc emission current Accuracy 5 of reading at ambient temperature of 25 0C 77 0F Display Resolution Scientific notation 2 significant digits Enviromental Conditions Display Update Time 0 5 sec Electrical Voltage 100 240 VAC 10 47 63 Hz Power 25 W Max Fuse Rating 50 Amp Buss MDA 1 2 or Littlefuse 326 500 Indoor Use Only Temperature Range 0 C to 40 C 32 OF
8. lay Catalog numbers for Series 342 Controller and lon Gauge lon Gauge Controller with digital display lon Gauge 342076 355052E YD Chapter 1 Safety amp Introduction 7 1 1 Caution and Warning Statements 7 1 2 Reading and Following Instructions 8 1 3 Definitions of Terms eee Ie remm Reels 8 1 4 Specifications 25 225 re hi hie gba oa eT ne Sasa 8 1 5 Service Guidelines 9 Chapter 2 InStallal an iie oum nuces is nr uita hi ME 11 2 1 Installation Safety Notices 11 2 2 Pressure Relief Devices 11 2 3 Installation Procedure 11 Step 1 Mount the Benchtop Mounted Micro lon Controller 12 Step2 Install the Micro lon Gauge on the Vacuum Chamber 12 Step3 Connect the Gauge and Power Cables 13 Step4 System Grounding 14 Chapter 3 Operation eee ost cae stone edet aet a nr 15 3 1 Theory of Operation sss eked reet v matt 15 3 2 Operation za nee realen 16 Gas Sensitivity Correction 17 Chapter 4 Service amp Maintenance 19 4 1 Service Guidelines 19 4 2 Damage Requiring Service 19 4 3 Troubleshooting 20 4 4 Micro lon Gauge Continuity Tes
9. llips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility For Customer Service or Technical Support 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 Email gp csr mksinst com MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4691 or 1 800 776 6543 FAX 1 303 652 2844 Disconnect this product from the power source and refer servicing to Qualified Service Personnel if any the following conditions exist The gauge cable power supply cord or plug is damaged Liquid has been spilled onto or objects have fallen into the product The product does not operate normally even if you have followed the Operation Instructions Adjust only those controls that are covered in this instruction manual The product has been dropped or the enclosure has been damaged Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 19 N ix Ro D 5 z E D E ix Chapter 4 CAUTION Replacement Parts When replacement parts are required be certain to use the replacement parts that are specified by Granville Phillips or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards
10. n the grid and filament All of the electrons eventually collide with the grid but many first traverse the region inside the grid many times When an energetic electron collides with a gas molecule an electron may be dislodged from the molecule leaving it with a positive charge Most ions are then accelerated to the collectors The rate at which electron collisions with molecules occur is proportional to the density of gas molecules and hence the ion current is proportional to the gas density or pressure at constant temperature The amount of ion current for a given emission current and pressure depends on the ion gauge design This gives rise to the definition of ion gauge sensitivity frequently denoted by K K ion current emission current x pressure The Micro lon Gauge has a sensitivity of 11 Torr when used with nitrogen Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 15 REED Chapter 3 or air The Micro lon Gauge Controller varies the heating current to the filament to maintain a constant electron emission and measures the ion current to the collector The pressure is then calculated from these data Figure 3 1 lon Gauge Illustration grid 180 V filament 30 V 1 180 V ion collectors 30V 0 V A i i i 3 2 Operation Power ON OFF Depress the top half of the rocker power switch located on the rear pa
11. nductive or static dissipative envelopes to store or ship static sensitive devices or printed circuit boards Do not operate the product with static sensitive devices or other components removed from the product Do not handle static sensitive devices more than absolutely necessary and only when wearing a ground strap Do not use an ohmmeter for troubleshooting MOS circuits Rely on voltage measurements Use a grounded electrostatic discharge safe soldering iron n wo ix wo go Ej E wo o ix wo Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 21 Chapter 4 Table 4 1 Failure Symptoms Causes and Solutions Symptom Possible Causes Corrective Action The Power LED does not illuminate 1 No power to the Controller 2 Controller input power fuse blown 1 Check to be sure proper power is connected to the Controller See Table 1 2 and Step 3 of Section 2 3 2 Replace the fuse with the correct type and value as listed on the rear panel of the Controller The Controller fuse blows when the Power is turned ON 1 Incorrect power source 2 Incorrect fuse rating 3 Defective Controller 1 Check to be sure proper power is connected to the Controller See Table 1 2 and Step 3 of Section 2 3 2 Replace the fuse with the correct type and value as listed on the rear panel of the Controller 3 Contact Customer Service See Section 4 1 and Sec
12. nel to turn ON power to the Controller The green LED on the front panel will illuminate Depress the lower half of the power switch to turn OFF the Controller Gauge ON OFF Use the pushbutton on the front panel to turn the Micro lon Gauge ON or OFF The digital display will turn ON immediately and display 9 9 9 After an approximate 6 second delay the actual pressure will be displayed 16 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C Operation Figure 3 2 Micro lon Gauge Controller Power ON Gauge Cable Power ON OFF Power Cord LED Connector Rocker Switch Connector INPUT POWER 100 240 VAC 25 WATTS Gauge ON OFF Replaceable Fuse 8 32 Thread Pushbutton Switch Ground Connection Gas Sensitivity Correction The Micro lon Gauge Controller is calibrated to read pressure for nitrogen or air If used with other gases it is required that the pressure reading be corrected for the gas in use Table 3 1 gives some typical sensitivity ratios To correct the pressure curve reading divide the indicated pressure reading by the relative sensitivity ratio Gauge Reading True Pressure Relative Sensitivity Rx i fos i lon gauge sensitivity ratios Ry shown in Table 3 1 are from NASA Technical Note TND5285 lonization Gauge Sensitivities as Reported in the Literature by Robert L Summers Lewis Research Center National Aeronautics and Space Administration Table 3 1 Rela
13. nual p n 342077 Rev C 13 Chapter 2 Step 4 System Grounding A WARNING Improper grounding could cause severe product failure or personal injury Follow ground network requirements for the facility Maintain all exposed conductors at Earth ground e Ground the Micro Ion Gauge to the vacuum chamber as illustrated in Figure 2 1 Check the entire system to be sure all components are properly grounded 14 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 3 1 Theory of Operation WARNING Using the Micro Ion Gauge to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage personal injury or death Do not measure the pressure of flammable or explosive gases WARNING Exposing the Micro Ion Controller to moisture can cause fire or electrical shock resulting in severe property damage or personal injury Install the Controller ONLY in an indoor environment Do not install the module in any outdoor environment The functional parts of a typical ionization gauge are the filament cathode grid anode and ion collector which are shown schematically in Figure 3 1 These electrodes are maintained by the gauge controller at 30 180 and 0 volts relative to ground respectively The filament is heated to such a temperature that electrons are emitted and accelerated toward the grid by the potential difference betwee
14. on 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4691 or 1 800 776 6543 FAX 1 303 652 2844 Email gp csr mksinst com Corporate Office MKS Instruments Inc 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 978 645 5500 www mksinst com Instruction Manual Instruction manual part number 342077 Revision C October 2014
15. ssure might be lower than normal vacuum pressure Do not locate the Gauge near a gas inlet or other source of contamination The NW16KF flange requires O rings and centering rings between mating flanges a Tighten the clamp to compress the mating flanges together b Seal the O ring c Connecta ground wire from the Micro lon Gauge to a known system Earth ground See Figure 2 1 Figure 2 1 Ground Connection on the Micro lon Gauge 12 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C Installation Step 3 Connect the Gauge and Power Cables Controller Gauge Connection Connect the provided cable to the Controller and Gauge Power Cord Connection The Controller will operate over a line voltage range of 100 Vac to 240 Vac 10 47 63 Hz All that is required is that a line cord be selected to match your available power receptacle to the power input connector located on the rear of the Controller a Connecta ground wire from the ground connection on the rear of the Controller to a known system ground b Connect the power cable but do NOT apply power at this time Figure 2 2 Micro lon Gauge Controller Connections Power ON Gauge Cable Power ON OFF Power Cord LED Connector Rocker Switch Connector 5 o 2 5S D z E INPUT POWER 100 240 VAC 25 WATTS Gauge ON OFF Replaceable Fuse 8 32 Thread Pushbutton Switch Ground Connection Series 342 lon Gauge Controller Instruction Ma
16. t 22 ir epa an ee nn E E RITU P ne 25 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 5 Table of Contents 6 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C The instructions given in this user manual explain how to install operate and maintain the Granville Phillips Micro lon Gauge Controller and the Micro lon Vacuum Gauge 1 1 Caution and Warning This manual contains Caution and Warning statements with which you Statements MUST comply to prevent inaccurate measurement property damage or personal injury CAUTION Caution statements alert you to hazards or unsafe practices that could result in inaccurate measurement minor personal injury or property damage Each caution statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice a r x D 2 lt go EJ 3 S 2 ix E WARNING Warning statements alert you to hazards or unsafe practices that could result in severe property damage or personal injury due to electrical shock fire or explosion Each warning statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice Caution and warning statements comply with American Institute of Standards Z535 1 2002 through Z535 5 2002 which set forth voluntary practices regarding the content and appearance of
17. tion 4 2 The Micro lon Gauge filament does not turn ON when the Gauge pushbutton switch is pressed The display on the Controller reads 9 9 9 for approximately 30 seconds and then turns OFF 1 The Gauge cable is not connected 2 Open filament in the Micro lon Gauge 3 Defective Controller 1 Check to be sure the gauge cable is properly connected to the gauge and the Controller 2 Test the continuity of the Micro lon Gauge see Section 4 4 and replace the gauge if necessary 3 Contact Customer Service See Section 4 1 and Section 4 2 The Micro lon Gauge filament turns ON when the Gauge pushbutton switch is pressed the display on the Controller reads 9 9 9 for approximately 30 seconds and then turns OFF 1 Chamber pressure is too high to permit emission 2 The pressure in the gauge is higher than the overpressure shutdown level from the electrometer circuit 3 Defective filament in the Micro lon Gauge 4 Defective Controller 1 Decrease the pressure in the vacuum chamber 2 Decrease the pressure 3 Test the continuity of the Micro lon Gauge see Section 4 4 and replace the gauge if necessary 4 Contact Customer Service See Section 4 1 and Section 4 2 4 4 Micro lon Gauge Continuity Test If a problem with pressure measurement is traced to the Micro lon Gauge the gauge can be tested with an ohmmeter This test should be performed ONLY while the Micro lon Gauge is exposed to a
18. tive Gas Sensitivities Gas Ry Gas Rx He 0 18 H O 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H 0 46 CO 1 42 N 1 00 Kr 1 94 Air 1 00 SF 2 5 O 1 01 Xe 2 87 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 17 Chapter 3 Notes 18 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C 4 1 4 2 Service Guidelines Damage Requiring Service If a qualified service person makes repairs at the component level repairs properly made with equivalent electronic parts and rosin core solder do not void the warranty If the product requires service contact the MKS Granville Phillips Division Customer Service Department at 1 800 227 8766 or 1 303 652 4691 for troubleshooting help over the phone If the product must be returned to the factory for service request a Return Material Authorization RMA from Granville Phillips Do not return products without first obtaining an RMA In some cases a hazardous materials document may be required The MKS Granville Phillips Customer Service Representative will advise you if the hazardous materials document is required When returning a products to Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules separated from the gauge assembly must be handled using proper anti static protection methods and must be packaged in anti static packaging Granville Phi
19. tmospheric pressure and power to the Controller is OFF The continuity test can detect an open filament or shorts between gauge elements but may not detect inaccurate pressure measurement associated with vacuum leaks or adsorbed gases within the gauge 22 Series 342 lon Gauge Controller Instruction Manual p n 342077 Rev C Service amp Maintenance WARNING Removing or replacing the Micro Ion Gauge in a high voltage environment can cause an electrical discharge through a gas or plasma resulting in serious property damage or personal injury due to electrical shock or fire Vent the vacuum chamber to atmospheric pressure and turn OFF power to the Controller before you test remove or replace the Micro Ion Gauge Turn OFF power to the ion gauge Controller 1 Use a digital multimeter to measure the resistance between the filament pins see Figure 4 1 The reading should be approximately 0 2 Q 2 Measure the resistance of filament pins to the gauge case The reading should be infinity 3 Measure the resistance across the grid pins The reading should be approximately 0 Q 4 Measure the resistance of the grid pins to the gauge case The reading should be infinity 5 Measure the resistance of the collector pin to the gauge case The reading should be infinity If resistance values are not the specified values the Micro lon Gauge is defective Contact Granville Phillips customer service to order a repl
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