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1. 1 Switch off the pump isolate the pump controller from the electrical supply and wait until the pump has stopped running 2 If your nEXT pump has a manual vent valve unscrew and remove it then continue at step 4 3 If your nEXT pump does not have a manual vent valve fit the vent valve adaptor to a suitable NW10 flange on your pump or vacuum system 4 Check that the TAV vent O ring Figure 8 item 4 is fitted and screw the TAV vent valve into the vent valve adaptor or into the 1 8 inch BSP hole vacated by the manual vent valve 5 Connect your dry nitrogen or other inert gas supply pipeline to the M5 inlet Figure 8 item 2 or use the riffled hose connector Figure 8 item 7 supplied 6 If you vent the pump with air fir the sintered bronze inlet filter Figure 8 item 1 to protect your system against the entry of dust 4 3 3 Electrical connection CAUTION Ensure that the electrical supply is correct If it is not you can damage the TAV vent valve The TAV vent valve requires a 24 V d c electrical supply The nEXT pump includes drive electronics which provide facilities for regulated pulsed venting see pump manual for details This ensures that your vacuum system can be vented to atmosphere as rapidly as possible without damage to the pump Alternatively you can connect the TAV vent valve to a TIC see TIC instruction manual for details or your own electrical supply Page 18 Edwards Limited 2010 All rights r2. 300 nEXT400 nEXT400 nEXT240 300 nEXT240 300 nEXT400 nEXT400 B810 00 808 B810 00 809 B800 00 825 B800 00 826 B800 00 821 B800 00 822 B800 00 823 B800 00 824 If the inlet screen is damaged notify your supplier and the carrier in writing within three days state the Item Number of the inlet screen together with your order number and your supplier s invoice number Retain all packing materials for inspection Do not use the inlet screen if it is damaged Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Page 21 Su92J2S 39 U SUu92J2S 39 U B811 00 880 Issue B Ep WARDS ul UJ N Fit or remove the inlet screen WARNING Before you install the accessory ensure that you switch off the pump and disconnect the power supply as described below WARNING If you remove the inlet screen there will be a risk of injury from exposed sharp edges in the pump CAUTION Do not remove the inlet screen unless you can be sure that debris cannot fall into the pump Debris which falls into the pump can seriously damage it 1 Switch off the pump isolate the pump controller from the electrical supply and wait until the pump has stopped rotating 2 Use the following appropriate procedure according to the type of inlet screen 5 3 2 1 Integral mesh centring ring inlet screen Refer to Figure 9 e Locate the inlet screen between the nEXT pump flange and the
3. Associated publications B811 00 880 Issue B Page BX bakeout band technical data er RO EERERRRE SERRE AER GUT SERUAERERMRA ER etek ec UE 5 ACX nEXT Air Cooler technical data sssssssssssee nene 9 ACX nEXT air cooler power requirements ssssssssss Ims nee 13 TAV vent valve technical data vo ete EEE EEE EEE EEE SEEDER nennen 16 Inlet screens technical data ssssssssssssse ennemi nnn 21 PRX10 purge restrictor technical data ssssssssss emnes 25 Nitrogen flow rate through the PRX10 purge restrictor sss 26 Vent port adaptor technical data ssssssssssssse meme hehehe eee eene 30 Extended vent port adaptor technical data sssssssssssssee menses 30 Vent restrictor technical data sssssssssssssse eee nnn 31 WCX water cooler technical data 0 0 meme hehehe hen nn nens 33 nEXT interface cable technical data sss mmm sess enne nns 35 Publication title Vacuum pump and vacuum system safety Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Publication number P400 40 100 Page iii S U9 U0 B811 00 880 Issue B Ep WARDS This page has been intentionally left blank Page iv Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 1 Introduction L1 Scope and definitions This manual prov
4. B58053170 ACX nEXT RADIAL KIT 24 V WIRED Powered via the nEXT drive electronics See section 4 2 B58053175 ACX nEXT RADIAL KIT 24 V STD Powered via the TIC or any suitable electrical power supply B58053180 ACX nEXT AXIAL KIT 24 V WIRED Powered via the nEXT drive electronics See section 4 2 B58053185 ACX nEXT AXIAL KIT 24 V STD Powered via the TIC or any suitable electrical power supply 3 4 1 1 Connector socket The nEXT turbo pump drive has a 3 way connector socket on the side of the pump as circled in Figure 5 When you receive the pump this connector may be concealed by a black protective cover If you intend to use the connector this cover should be removed by levering with a small screwdriver A mating plug for this connector is supplied with the pump and the following fan assemblies are available which has a mating plug pre wired e B58053170 ACX nEXT RADIAL KIT 24 V WIRED e B58053180 ACX nEXT AXIAL KIT 24 V WIRED Edwards Limited 2010 All rights reserved Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited S19 OOD AN x3U XOV B811 00 880 Issue B Ep WARDS Figure 5 nEXT connector plug and socket 1 24V d c Out 2 Chassis 3 24V d c Rtn 3 5 Operation WARNING There is no guard on the outlet of the axial air cooler Therefore you must not operate the air cooler unless it is installed on the pump When operating the ACX air cooler do not obstruct the fan inlet and ensure there is
5. UorjonpoJ3u uorjonpoJ3u B811 00 880 Issue B Ep WARDS Figure 2 Accessories for nEXT pumps general view continued nEXT240D DN100CF shown 141 016 05 09 1 BX250 Bake out band DN100CF envelope shown 2 BX 250 Bake out band position 3 WCX Water cooling accessory Page 4 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 2 BX bakeout band 2 1 Description You can fit an Edwards BX bakeout band to a nEXT pump to increase the rate of degassing of the pump body to achieve faster pump down and lower ultimate pressure You should only fit a BX bakeout band to CF flanged pumps intended for use at ultra high vacuum BX bakeout bands are available for use with electrical supplies of 110 or 240V a c from a rear panel socket on a TIC relay box or from any suitable electrical supply 2 2 Technical data Table 1 BX bakeout band technical data Electrical supply 110 to 120 V a c 50 60 Hz or 200 to 240 V a c 50 60 Hz Cable length 3m Termination 3 pin IEC reverse configuration plug Typical operating 80 C measured on the pump envelope above the bakeout band temperature Pollution degree EN61010 Part 1 Category 2 Equipment type Fixed equipment for indoor use only BX250 BX300 Approximate mass kg 0 55 0 65 Minimum diameter mm 119 140 Width of band mm 30 20 Input power W 60 80 Fuse rating 110 to 120 V 200
6. ACX nEXT air cooler installation alternative mounting positions sesssssss 10 ACX nEXT radial and axial air cooler installation sssssss mmm 12 NEXT connector plug and SOCKeE 22i ecipemestronetire tesa kr ret pex Ui hUDRK ned aca nn RARE DA REAN 14 TAV vent valve dimensions mm cccc cece ese c cess He eme e eene hene enean 16 Fitting the TAV vent ValVe i i ies iei taserketatennurctt kms o E iaia ia EU Ra REA RDLRS LINEAR 17 TAV vent valve connections cece cece eee eee eene hehehe nnne nnne nnn 19 Integral mesh centring ring inlet screen 1 mens eee eren nns 22 UTAH SE dCTl e ET 23 PRXIO DurgesresttICEOF ies ence meinen aana nda UE pU RUAUNLE RU La arn ob fo EE Up tud 27 Vent porb adaptOl cc cateuts ceasicdstas denieag ioa ipri sextae rcibubU cuir bbs bubnbtrenberr oE AiE ok ATEENA 29 Extended vent port adaptor sioe x edo avere a uve a vetri mai b Rx PLUR RD RUNE eee 29 VRX VentsrestriCEOE ciis accct va ker ecxe shales av ruptis kelines Ur eben Lada danees Ue dates Und wa nd tadaaind Kaum Paene dada 32 WCX Watercooling rontana urne ure iERP MER UEM IP RE DIM MBRLILDO IRR I A RI MEN DURER 34 NEXT Interface Cable sciat Dehesa eeepc bob rouRUPE oap Pac EUER UTDUREE UMEN NEUES Kuba df ua Dra Ra 36 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS Tables y o O CO O Ui 4 UJ NJ LP
7. If you can achieve the required flow rate you do not need to adjust the purge restrictor in this case continue at Step 5 below 4 Referto Figure 11 If you cannot achieve the required flow rate undo the locknut 3 on the purge restrictor and use a small screwdriver to turn the adjustment screw 4 clockwise to decrease the flow rate or anticlockwise to increase the flow rate Tighten the locknut 5 Turn off your purge gas supply remove the mass flow meter and connect your purge gas supply to the purge restrictor Table 7 Nitrogen flow rate through the PRX10 purge restrictor Nitrogen supply pressure Nitrogen flow rate bar geuge bar absolute Pa sem meis Pals 0 0 1 0 25 42 38 63 50 83 63 100 75 125 88 F 150 100 170 Page 26 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited pb WARDS Figure 11 PRX10 purge restrictor AW S769 A Filtered purge gas inlet to PRX10 purge restrictor O ring Locknut Adjustment screw Pun Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited B811 00 880 Issue B Page 27 4032143S2u0 ebund OTXYd B811 00 880 Issue B Ep WARDS This page has been intentionally left blank Page 28 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 7 Vent
8. inspection Do not use the interface cable if it is damaged 10 3 2 Fitthe interface cable to the pump WARNING Before you install the accessory ensure that you switch off the pump and disconnect the power supply as described below 1 Switch off the pump Isolate the pump controller from the electrical supply and wait until the pump has stopped rotating 2 Disconnect the nEXT pump logic interface cable from the TIC Turbo Instrument Controller or TIC Turbo Controller or from your own systems depending upon your connection method 3 Refer to Figure 16 for the interface cable connection diagram 4 Connect the 15 way female D type socket pump connection of the interface cable to the nEXT pump logic interface cable 5 Connect the 15 way male D type plug supply connection of the interface cable either to the back of the TIC refer to the TIC instruction manual for further information or to the pump connection of your own system depending upon your connection method 6 Connect the 9 way female D type socket PC connection of the interface cable either to the serial port of your PC or to a suitable USB to RS232 converter depending upon your PC serial port availability Edwards Limited 2010 All rights reserved Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited o geo e ejiau rxau o geo e ejiau rxau B811 00 880 Issue B Ep WARDS 10 4 Operation WARNING Ensure that the interface cable i
9. port adaptor 7 1 Description The 1 8 inch BSP P male to NW10 vent port adaptor can be used to convert the 1 8 inch BSP P female vent port on all nEXT pumps to an NW10 flange An alternative vent valve to the TAV 5 6 or a vent pipeline may then be fitted to this flange See Figure 12 Figure 12 Vent port adaptor 27 5 dcs 7395 002 NW10 flange O ring 1 8 inch BSP male thread Removable flow restrictor P E The vent port adaptor is supplied with a removable flow restrictor and an O ring to seal the adaptor to the pump It is suited for all nEXT pump types Also available is an extended vent port adaptor which is intended for use with the split flow turbo pumps where the backing port is too close to the vent port to allow the standard vent port adaptor to be used The extended vent port adaptor is supplied with an O ring to seal to the pump NW10 centering ring and NW10 16 clamping ring Refer to Figure 13 Figure 13 Extended vent port adaptor 50 NW10 flange O ring 1 8 inch BSP male thread M5 internal thread Qe dcs 7395 001 CAUTION The extended vent port adaptor is not supplied with a removable flow restrictor Venting a turbo pump from atmosphere through the extended vent port adaptor would cause damage to the turbo pump To vent a turbo pump when using the extended vent port adaptor you must either control the flow rate to the adaptor or incorporate a 0 8 mm orifice in the pipeline used to connec
10. restrictor for different purge gases sssssssssse 26 Edwards Limited 2010 All rights reserved Page i Edwards and the Edwards logo are trademarks of Edwards Limited Sjuo1u0 S U9 U0 B811 00 880 Issue B Ep WARDS 10 1 10 2 10 3 10 3 1 10 3 2 10 4 11 Vene porcadap ol senera a a E i Mal cq s ede End UR 29 DescripEIO i executor br n A A E E A Eua LU EE setae ties 29 Technical data cuc iei nts e uaned vo aa re er bury ez c Ever rr irnir inii Tru ieira Xd Ex DXZCE ainina biridi 30 InstallatiOn siivssieiprbesU t UERUQR EE P TER AG PS E DOMO DpPprE CLP ORA DIPRIM Lid Qr PEIPMTPUPDOK D DIR RUNE 30 Unpack and INSPECT s Cu sie eta nest erir ors onim edere sena bix inpr DoUUpDNLPX PRU DE IRUDUER UND LIXDSDI RR EE DEDE ER 30 Connect the vent port adaptor uii ees iter dat D ERRARE ER ARERARDQRERRUQRRRPUDGE DCANE ERRAN 30 VRX Vent PBSEFTICEOT seecexcoce Deetkitbetk reboot ra AAD bedttet ferta naei rit 31 Brest PI TEE 31 Technical data ix erp pp ERARROUPEPE DIU LPMEREPTDUER URP RESPULIRRSPELIEDCFERULDUPPETIPDOR RRERC ER X EUER 31 installato cmascsie aan naci ates rit barcode Dade noatri da Excerpta aTi a ipao utor feta bur MO ea UR 31 Unpacksand INSpect arenei airo pere ree bru Dux aM Rx dienes reheat eae MU EMINENS 31 VRX vent restrictor selection isses He hee e een een eene eae ehe n 31 Fit the vent restrictOr isssssssssssssse eI hehehe hene enne nena aa hae aa edes eene an 31 WCX Watercooler costsseimetebbtYo ve
11. to 240 V Item Numbers Model To fit pump Item Number BX250 110 V nEXT240 B580 52 041 BX300 110 V nEXT300 B580 52 048 BX450 110V nEXT400 B580 52 043 BX250 240 V nEXT240 B580 52 061 BX300 240 V nEXT300 B580 52 068 BX450 240 V nEXT400 B580 52 063 Edwards Limited 2010 All rights reserved Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited pueq 3noe eq xg pueq 3noe eq xg B811 00 880 Issue B Ep WARDS 2 3 Installation 2 3 1 Unpack and inspect Remove all packing materials and protective covers and check the BX bakeout band If the BX bakeout band is damaged notify your supplier and the carrier in writing within three days state the Item Number of the BX bakeout band together with your order number and your supplier s invoice number Retain all packing materials for inspection Do not use the BX bakeout band if it is damaged 2 3 2 Fit the BX bakeout band to the pump WARNING Before you install the accessory ensure that the pump is switched off and isolated as described below Refer to Figure 2 1 Switch off the pump isolate the pump controller from the electrical supply and wait until the pump has stopped rotating 2 Fit the BX bakeout band over the pump body below the inlet flange at the position shown by Figure 2 3 Tighten the clamping screw 2 3 3 Electrical connection to a TIC relay box Refer to the TIC relay box instruction manual for information on how to fit the correct fus
12. trademarks of Edwards Limited B811 00 880 Issue B Ep WARDS This page has been intentionally left blank Page 20 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited pb WARDS 5 Inlet screens 5 1 Description B811 00 880 Issue B Inlet screens are supplied with all new nEXT pumps If you have a nEXT pump without an inlet screen we recommend that you fit an inlet screen for additional safety The only exception to this is the main port in the END faces of split flow pumps Plastic covers must be retained on these variants until ready to install to minimise the risk of injury from impeller blades The inlet screen prevents the entry of debris into the pump and also prevents people from coming into contact with the blades if the pump is switched on when it is disconnected from your vacuum system 5 2 Technical data Note Refer to the pump instruction manual for details of performance reductions when an inlet screen is fitted Table 5 Inlet screens technical data Pump inlet flange size Pump model Memnumber 150100 coarse inlet screen 150100 fine inlet screen 50160 coarse inlet screen 150160 fine inlet screen CF100 coarse inlet screen CF100 fine inlet screen CF160 coarse inlet screen CF160 fine inlet screen 5 3 Installation 5 3 1 Unpack and inspect Remove all packing materials and protective covers and check the inlet screen nEXT240 300 nEXT240
13. B811 00 880 Issue B Instruction Manual nEXT Pump Accessories JFdeal e vacuum products ee Ep WARDS WWW EDWARDSVACUUNM COM This page has been intentionally left blank gea 0086 06 10 ED WARDS B811 00 880 Issue B Contents Section Page 1 IPRA MR TET LE ED EU IIT 1 1 1 sermoni 1 1 2 Installation and operation safety 2 0 0 meme eme ememememe eene nenne ee nnn 2 2 she cut wor Ma Tc 5 2 1 DOSChIDU OM eere LIMITI 5 2 2 ITI 5 2 3 Instalati oM x xcvess metre ecd tunes xipet sb DD Era unu UR dal EI PINE DDDMELINU MEN PLUIE TUAE iN 6 2 3 1 Unpack and INSPeCt iceucicersise areis eee te denedes On ONANAN EET EREEREER hod 6 2 3 2 Fit the BX bakeout band to the pump cece ee mI mess hen n nennen 6 2 3 3 Electrical connection to a TIC relay box 20 nine ed 6 2 3 4 Electrical connection to an independent electrical supply sse 6 2 4 erc MTM TETTE 7 3 pie Ot ae a STE I E 9 3 1 p izedajonie peer err ELI 9 3 2 Usine E MA 9 3 3 hcllunppeem m 9 3 3 1 Unpack and Inspect iz ssussocuta tutes tret RR uu Da Hae ne he SIR pe RURSUS und A 9 3 3 2 Side or Radial mounting sess meme enema enne nnns 9 3 3 3 AX AlIMOWACING Rr Cc 11 3 3 4 Combined radial and axial mounting ssssssssssssesee nineties 11 3 4 Electrical CODBeGEIDI cui esee t penu SERIA MURRABURUE MUR UAR E nU CN RR SOT RU EE pn Ea 13 3 4 1 Power Supply require
14. S19 OOD AN 1X4U XOV B811 00 880 Issue B Page 12 OE Edwards and the Edwards I dwards r ogo a pb WARDS Limited 2010 All rights reserved e trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 3 4 Electrical connection CAUTION Ensure that the electrical supply is correct If it is not you can damage the ACX air cooler CAUTION Ensure that the power supply to the cooling accessory can be isolated in a fault condition if required The ACX air cooler requires a 24 V d c electrical supply You can connect the ACX air cooler to a TIC Turbo Instrument Controller a suitable electrical supply or via the nEXT drive electronics With the air cooler powered via the nEXT drive electronics the turbo pump will operate satisfactorily with any of the supply voltages specified in the pump product manual SJB JOOD JV LX3U XOV Note Note For combined use of both the axial and radial ACX air coolers a TIC can be used to supply power to one air cooler only A separate 24 V power supply is required to power the second air cooler It is recommended that you fit a separate earth ground conductor to the earth of the air cooler use an un insulated braid or a separate insulated green yellow connector and use the M5 x 10 screw and shake proof washer supplied attached to the fan cowling to secure the earth conductor to the air cooler 3 4 1 Power supply requirements Table 3 ACX nEXT air cooler power requirements
15. X water cooling J 002 1 7eM XDM 2 D 9D Item number Product description Quantity 1 Water cooling block 1 2 M6 x 16 socket cap screw 2 3 Push fit connector 10 OD pipe 1 4 BSP 2 4 Plastic tube 10 OD ref only Page 34 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 10 nEXT interface Cable 10 1 Description The nEXT interface cable allows you to connect the serial link of an nEXT Pump to a PC Serial commands can then be used to control and monitor the nEXT Pump Refer to the pump instruction manual for information on the serial protocol utilisation including a full serial command set and details of the required message structure 10 2 Technical data Table 12 nEXT interface cable technical data Item number To fit pump models B800 00 808 All nEXT pumps Pump connection 15 way female D type socket dual entry back shell Supply connection 15 way male D type plug single entry back shell PC connection 9 way female D type socket single entry back shell 10 3 Installation 10 3 1 Unpack and inspect Remove all packing materials and check the interface cable If the interface cable is damaged notify your supplier and the carrier in writing within three days state the Item Number of the interface cable together with your order number and your supplier s invoice number Retain all packing materials for
16. an adequate supply of cooling air During operation if the temperature of any surface of the pump is higher than 60 C the pump is too hot and you must increase the cooling Page 14 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 4 TAV vent valve 4 1 Description To maintain cleanliness of your vacuum system we recommend that you vent the pump or vacuum system whenever you switch the pump off The TAV vent valves are 24 V d c electrical solenoid operated valves which you can use to vent your vacuum system with atmospheric air or dry nitrogen when you switch the nEXT pump off The TAV vent valve is normally open when the solenoid is de energised In the case of a power failure the vacuum system and pump will vent and the pump will slowly come to a halt Refer to Figure 8 The TAV vent valve is supplied with a sintered bronze inlet filter 1 a riffled hose connector 7 and 3 metres of cable You can connect your dry nitrogen supply to the hose connector An NW10 adaptor Figure 8 item 3 is also supplied to convert the 1 8 inch BSP outlet connector Figure 6 item 2 of the TAV vent valve for direct connection to your vacuum system The TAV vent valve can be powered by the nEXT drive electronics controlled from a TIC controller or from any suitable electrical supply CAUTION Correct venting is essential to prevent suck back of hy
17. c REREFUDI E EEREEEDRE ERES ETE EIT E RCM EVER EE OB ERROR 33 DESCHIPUOM norte orent sana tebe iat es teaginnanig uetate inbicagtanemesiadmbenesiadatuadeieoin Mera abr di A 33 Technical dat saisie iria deba reca rH rece ra re c EX Yu cR DR UE DU EF CP Y COD aa RR EE LU 33 InstallabiOFi cs soure EE taxi reas aded Dri avant Ya ur ia vXDr TR SUEBEERN TRE RU RD KT nar IU nDI aded Risa 33 Unpackand INSHECE kisses c Qvainainnmeed saanaiegsammewudadahaneld yeduineelnsaanalel E E aE EERE 33 Fit the water cooler to the pump 2 0 mmn meme e hene ehem enhn nennen nnns 33 elc ETa 34 NEXT Interface Cable eacten sentite spnt eU REPRE FERRE r Rad ex pln bud Ca MM AERE CIRC EENEN 35 DESCHIDUIOMN racks ianiai aiaa anaE AA hates Aa Yen n Rod ENS Da EAR MR 35 Technical dat sirri nna o n a a E A E EEEE NR 35 installato aeisi a a aa aa RUP Lad i i 35 Unpack and Bleu i a N E Ea AEE EEA Aa E EEA 35 Fit the interface cable to the pump 00 eens 35 OP STATION ssr inma ariaren M 36 Maintenance ices cians aati tania aeanieenk bobine teta quta rn none ee oes 37 For return of equipment complete the HS Forms at the end of this manual Illustrations Figure O CO O Ui 4 CJ NJ LP Page ii Page Accessories for nEXT pumps general view nEXT 240D pump shown csssseemm ee ee eee enna 3 Accessories for nEXT pumps general view continued nEXT240D DN100CF shown csssseeeee 4
18. connector type 2 pole and earth ground miniature DIN Vale inlet connection M5 female Valve outlet connection 1 8 inch BSP Figure 6 TAV vent valve dimensions mm 46 AW 5766 A 1 M5 female thread 2 1 8 inch BSP male thread Page 16 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 4 3 Installation 4 3 1 Unpack and inspect Remove all packing materials and protective covers and check the TAV vent valve If the TAV vent valve is damaged notify your supplier and the carrier in writing within three days state the Item Number of the TAV vent valve together with your order number and your supplier s invoice number Retain all packing materials for inspection Do not use the TAV vent valve if it is damaged 4 3 2 Fit the TAV vent valve to the pump SAICA USA AYL WARNING Before you install the accessory ensure that you switch off the pump and disconnect the power supply as described below CAUTION When fitting the TAV vent valve apply torque to the steel body only On no account should torque be applied to the solenoid body failure to do so could damage the valve which may cause it to leak Figure 7 Fitting the TAV vent valve Edwards Limited 2010 All rights reserved Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited SAICA USA AYL B811 00 880 Issue B Ep WARDS Refer to Figure 1
19. d the Edwards logo are trademarks of Edwards Limited uorjonpoJ3u uorirjo2npoJ3u B811 00 880 Issue B Ep WARDS 1 2 Installation and operation safety WARNING You must use the procedures described in this manual to install your accessory and you must obey all safety instructions and take note of all appropriate precautions If you do not you can damage the accessory or other equipment and can cause injury to people WARNING The user of the nEXT pump system is responsible for the safe operation and monitoring of the system WARNING Before you install the accessory ensure that you switch off the pump and isolate the controller podule as described below Before you install your accessory you must e Switch off the nEXT pump and wait until the pump has stopped rotating e Isolate the pump controller from the electrical supply Page 2 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B811 00 880 Issue B Figure 1 Accessories for nEXT pumps general view nEXT 240D pump shown DN10NW Adaptor VRX vent restrictor Manual vent valve fitted TAV Solenoid vent valve Purge plug fitted PRX purge restrictor DN10NW Adaptor ACX nEXT air cooler Radial ACX nEXT ait cooler Axial Oo a T ioo SO Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited 1A 041 05 09 Page 3
20. drocarbon vapour present in the backing line especially when using oil sealed rotary vane pumps To prevent suck back when stopping the nEXT pump always begin the venting sequence before the nEXT pump has slowed to 50 of normal rotational speed Always introduce venting gas to the venting port or to the high vacuum inlet Never vent to the backing line Edwards Limited 2010 All rights reserved Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited SAICA USA AYL B811 00 880 Issue B Ep WARDS N Technical data Table 4 TAV vent valve technical data Maxiumum inlet pressure 1 bar gauge 2 x 10 Pa 1 bar gauge 2 x 10 Pa Orifice diameter 0 5 mm 1 0 mm Helium leak rate valve closed 1x10 mbar I s 1x10 mbar s 1x10 Pals 1x10 Pals Valve inlet filter Sintered bronze Sintered bronze DAICA USA AYL Hose connector Riffled nozzle for 4 mm bore tube Riffled nozzle for 4 mm bore tube Dimensions See Figure 6 See Figure 6 Mass 0 08 kg 0 08 kg Item Numbers B580 66 010 B580 66 020 Configuration Normally open Pollution degree EN61010 Part 1 Category 2 Equipment type Fixed equipment for indoor use only Nominal electrical supply voltage 24 V d c Electrical supply voltage range 15 to 24 V d c Pull in voltage 14 V d c Drop out voltage 10 V d c Power consumption 1 8 W Cable type and length 2 core screened unterminated 3 m long Cable cores Red positive black negative Valve electrical
21. e and how to connect the bakeout band to the TIC relay box 2 3 4 Electrical connection to an independent electrical supply If necessary you can connect the BX bakeout band directly to an appropriate electrical supply Always ensure that the electrical supply to the bakeout band is interlocked so that it is automatically switched off whenever the nEXT pump operates below normal speed Check that the rating of the fuse fitted within your electrical supply corresponds to the fuse rating on the BX bakeout band Page 6 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 2 4 Operation WARNING Do not operate the BX bakeout band when it is not installed on a pump Without the cooling effect breakdown and fire WARNING Do not touch the BX bakeout band when it is switched on as it can get very hot during operation N of the pump body the temperature of the band can rise to 300 C with the danger of insulation CAUTION When using the bakeout heater accessory water cooling should always be used If using the heater accessory in combination with baking heaters on the vacuum system the pump inlet flange temperature should not exceed 80 C Generally this is ensured by allowing the mating flange on the system to reach a maximum of 120 C When you use the bakeout band ensure that there is adequate cooling for the pump and adequate ventilation f
22. ent port adaptor has an O ring 2 fitted and screw the adaptor into the 1 8 inch BSP vent port Tighten the adaptor so that it seals firmly against the face of the vent port 4 Connect your vent pipeline to the NW10 flange 1 of the adaptor with suitable fittings Page 30 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 8 VRX vent restrictor 8 1 Description Note A VRX vent restrictor can be fitted in any nEXT vent port or purge port Fit a VRX vent restrictor to your nEXT pump if you will vent the pump when the pump speed is above 50 of full rotational speed The vent restrictor restricts the flow rate of the vent gas into the nEXT pump You can fit the VRX vent restrictor directly to the inlet of a vent port adaptor together with a TAV vent valve if required Note that you must fit the vent restrictor before you fit the TAV vent valve or vent port adaptor 8 2 Technical data Table 10 Vent restrictor technical data fice diameter emMaber B580 66 021 B580 66 022 B580 66 023 B580 66 024 B580 66 025 8 3 Installation 8 3 1 Unpack and inspect Remove all packing materials and protective covers and check the vent restrictor The VRX identification number Figure 14 item 5 is located on the restrictor base for example if you have a VRX20 vent restrictor 20 will be shown on the base of the restrictor If
23. eserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 4 4 Operation CAUTION If you manually vent the pump when it is at full rotational speed and the rate of pressure rise is too high the pump life may be reduced When using the manual vent valve supplied we recommend that you either limit the vent or only open the vent valve after the nEXT pump speed has fallen to 50 of full rotational speed Do not vent the backing line as this may lead to contamination If you vent into your vacuum system and use an oil sealed rotary backing pump select a point upstream of the nEXT pump to prevent oil back streaming from the backing line SAICA USA AYL Operation of the TAV vent valve depends on how you have conneted it e f you have connected the TAV vent valve to the drive electronics of the nEXT pump refer to the nEXT pump instruction manual e f you have connected the TAV vent valve to a TIC refer to the TIC instruction manual for operating instructions e f you have connected the TAV vent valve to your own electrical supply switch on the electrical supply to operate the vent valve Figure 8 TAV vent valve connections AW S767 A l Air filter 5 Alternative electrical supply connector position 2 Inlet port 6 Electrical supply connector 3 Vent valve adaptor 7 Hose connector 4 O ring Edwards Limited 2010 All rights reserved Page 19 Edwards and the Edwards logo are
24. ged notify your supplier and the carrier in writing within three days state the Item Number of the ACX air cooler together with your order number and your supplier s invoice number Retain all packing materials for inspection Do not use the ACX air cooler if it is damaged 3 3 2 Side or Radial mounting WARNING Before you install the accessory ensure that you switch off and isolate the pump Refer to Figure 3 and 4 1 Switch off pump wait until the pump has stopped rotating Isolate the pump drive from the electrical supply 2 Remove the rubber mounting feet from the base of the pump 3 Using 4 off M8 x 12 mm button head screws supplied Fit the ACX radial air cooler mounting bracket to the base of the pump as shown on Figure 4 Ensure the fixing screws are secure To ensure the radial air cooler works most effectively it is recommended that the fan should be placed directly opposite the pump drive as shown in Figure 4 This ensures adequate cooling of the nEXT drive Alternative mounting positions are available as shown in Figure 3 Edwards Limited 2010 All rights reserved Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited SJB JOOD JV LX3U XOV S19 OOD AN 1X4 U XOV B811 00 880 Issue B Ep WARDS Figure 3 ACX nEXT air cooler installation alternative mounting positions C at M MEZZZZZZZ222222222225E0 1 ACX nEXT Air cooler recommended 2 Pump outlet port 3 Alternative mo
25. ides installation operation and maintenance instructions for the Edwards range of accessories for the nEXT pump range The accessories are shown in Figure 1 and 2 The Item Numbers for the accessories are listed in the appropriate sections You must use the accessories as specified in this manual Read this manual before you install accessories onto your nEXT pump Important safety information is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below WARNING Warnings are given where failure to observe the instruction could result in injury or death to people CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment and process Throughout this manual page figure and table numbers are sequential The units used throughout this manual conform to the SI international system of units of measurement When flow rates are specified the abbreviation sccm is used to mean standard cm min this is a flow of 1 cm min at an ambient temperature of 0 C and a pressure of 1013 mbar 1 013 x 10 Pa In accordance with the recommendations of EN61010 the following warning labels may appear on the pump or its accessories Warning refer to accompanying documentation Warning risk of electric shock Warning hot surfaces Edwards Limited 2010 All rights reserved Page 1 Edwards an
26. in all packing materials for inspection Do not use the water cooler if it is damaged 9 3 2 Fit the water cooler to the pump WARNING Before you install the accessory ensure that you switch off the pump and disconnect the power supply as described below 1 Switch off the pump Isolate the pump controller from the electrical supply and wait until the pump has stopped rotating 2 Refer to Figure 2 amp 15 Fit the water cooler to the pump as described below 9 3 2 1 WCX water cooler l If necessary remove the old water cooler from the pump and retain the fixing screws 2 Use the screws removed in step 1 or use the two supplied to secure the new water cooler to the pump in position as shown in Figure 2 3 Push the 10 mm OD plastic tube not supplied into the push fit connectors ensuring that they are securely inserted 4 Briefly turn on the cooling water supply and check for leaks Seal any leaks found Edwards Limited 2010 All rights reserved Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited B811 00 880 Issue B Ep WARDS 9 4 Operation CAUTION Ensure that the cooling water flow is correct for the pump operating conditions Insufficient or excess cooling water flow can damage the pump Refer to your nEXT pump instruction manual for e The operating conditions under which you must use water cooling e The necessary cooling water supply flow rates and temperatures Figure 15 WC
27. ipeline which must be terminated with an NW10 flange to the purge port with the PRX10 purge restrictor in place of the normal NW10 centring ring 4 Carefully secure the connection with the NW10 clamp 6 4 Operation 6 4 1 General The PRX10 purge restrictor as supplied is adjusted to restrict the flow rate of dry nitrogen at a supply pressure of 0 bar gauge 1 x 10 Pa to 25 sccm 0 42 mbar s 42 Pal s You can increase the supply pressure to increase the flow rate see Table 7 For most applications you can use a nitrogen flow rate of 25 sccm 0 42 mbar I s 42 Pal s to 30 sccm 0 5 mbar 1 50 Pa I s To do this your nitrogen supply pressure must be 0 1 to 0 2 bar gauge 1 1 x 10 to 1 2 x 10 Pa Do not exceed the maximum purge gas supply pressure given in the instruction manual supplied with your pump 6 4 2 Calibration of the PRX10 purge restrictor for different purge gases The purge gas flow rate at a particular supply pressure will change if you use a different purge gas If you want to use a different purge gas use the procedure below to adjust the flow rate 1 Fit the PRX10 purge restrictor to the pump as described in Section 6 3 2 Fit a calibrated mass flow meter between your purge gas supply and the PRX10 purge restrictor 2 Switch on the backing pump to evacuate the nEXT pump and then turn on your purge gas supply 3 Monitor the indicated purge gas flow rate while you adjust the purge gas supply pressure
28. mating flange on your vacuum system chamber Figure 9 Integral mesh centring ring inlet screen Page 22 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited pb WARDS 5 3 2 2 Mesh inlet screen Refer to Figure 10 e Insert the mesh inlet screen into the pump inlet as shown in Figure 10 Figure 10 Mesh inlet screen Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited B811 00 880 Issue B Page 23 SUu92J2S 39 U B811 00 880 Issue B Ep WARDS This page has been intentionally left blank Page 24 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 6 A PRX10 purge restrictor 6 1 Description The PRX10 purge restrictor shown in Figure 11 sets the purge gas flow rate The nEXT pump range has a purge port facility to allow you to purge the motor and bearing cavity with dry nitrogen or other inert gas Note You will need a vent port adaptor see Section 7 to fit the PRX10 purge restrictor 6 2 Technical data Table 6 PRX10 purge restrictor technical data Nominal nitrogen flow rate 255 sccm 0 42 mbar s 42 Pa s Flange size NW10 Item Number B580 65 001 At a supply pressure of 0 bar gauge 1 x 10 Pa 6 3 Installation 6 3 1 Unpack and inspect Remove all packing materials and pro
29. ments 22i ein Pott eee rennan A EN FERREA SER AA bere Sex aE Ur aad 13 3 5 erc UMS 14 4 DI ET OST NT T aoa ENEE a a E 15 4 1 DO SCE DEF mee 15 4 2 Technical datar sitim ep het DRE AUR NUUS RR dA ER a EU UR a uude AE d ERE Rd 16 4 3 uie RR 17 4 3 1 Unpack amd INSPECT is X 17 4 3 2 Fit the TAV vent valve to the pump ssssssssssse emm nemen meme e ehe enn ene ns 17 4 3 3 Electrical CONNECTION seii be pe MESURER EDI dub bu neben bL AA ID bue irE 18 4 4 ocu 19 5 WEES NITE I DEDE 21 5 1 BescripElofi anrai oenn e IM IPOD E NUR RUP VIRI MIR LI IM EE LU NEEDLE eR 21 5 2 Technical Gat ah e 21 5 3 INSEALIAEION saini A E AS A A T eU nies 21 5 3 1 Unpack and INSPECE s oxiseuses eros enis onsedad extet cenam vadadaredumiad ead phat ead ghde eth REA EGEE EEE 21 5 3 2 Fit or remove the inlet Screen ies vs davies e D seen eurn PRESE ENE IMPR T EENE ERE E eR 22 6 PRX10 p rge restrictor sicsiisocuu based tid rEoEUE pru Ea DE ELE tnb DETUR a bd PE ENE 25 6 1 Descriptio seir TEES 25 6 2 Technical data sirrien R A E d i DOMI EEE 25 6 3 ucl A 25 6 3 1 Uripackand iTisDecE c sevi epe bat italy nte tui n xd nen peta rA eV PLU RM E MR EenPIP NER 25 6 3 2 Fit the purge restriCtOr RO ari iae ED A iA AAA EE EA OTE RETA PENi 25 6 4 eric EET 26 6 4 1 General e L Oe 26 6 4 2 Calibration of the PRX10 purge
30. old vent restrictor 4 Fit a suitable M3 screw to the new restrictor and push the new restrictor fully into the vent port or purge port of the nEXT port 5 Remove the M3 screw and refit the vent valve or plug or reconnect the vacuum connections to the purge port Page 32 Figure 14 VRX vent restrictor A AW 6087 A Y SY T LAA ENS A x x AR NF S C5 l O ring 4 Orifice diameter 2 M3tapped hole 5 VRX identification number 3 Sealing washer Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 9 WCX water cooler 9 1 Description A WCX water cooler can be fitted to all nEXT pumps to provide water cooling during pump operation Refer to the pump instruction manual to determine the operating conditions under which you must use water cooling 9 2 Technical data Table 11 WCX water cooler technical data J 002 1 7eM X M Item number To fit pump models B80000815 All nEXT pumps Water connection dimensions Push fit connectors suitable for 10 mm OD plasic pipe 9 3 Installation 9 3 1 Unpack and inspect Remove all packing materials and protective covers and check the WCX water cooler If the water cooler is damaged notify your supplier and the carrier in writing within three days state the Item Number of the water cooler together with your order number and your supplier s invoice number Reta
31. or the bakeout band If you have connected the bakeout band to a TIC relay box refer to the TIC instruction manual for instructions on how to use the TIC to control the operation of the bakeout band Edwards Limited 2010 All rights reserved Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited pueq 3noe eq xg B811 00 880 Issue B Ep WARDS This page has been intentionally left blank Page 8 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 3 ACX nEXT Air Coolers 3 1 Description The ACX nEXT air cooler is an enclosed 24 V d c motor electric fan and a fixing bracket assembly which can be easily fitted to the nEXT range of pumps via bolt holes in the base of the pump The ACX nEXT air coolers are available for both radial and axial mounting It is possible to use both variants simultaneously if so desired and space allows TICs can provide power for one fan only 3 2 Technical data Table 2 ACX nEXT Air Cooler technical data Electrical supply 20 to 28 V d c Cable cores Red 20 28 V Black 0 Volts return Yellow and Green screen Pollution degree EN61010 Part 1 Category 2 Power consumption 2 7 Watts Noise emissions 39 dBA per fan 3 3 Installation 3 3 1 Unpack and inspect Remove all packing and materials and protective covers and check the ACX air cooler If the ACX air cooler is dama
32. s correctly and securely fitted before turning on the power supply and starting the pump as described in Section 10 3 2 Refer to your nEXT pump instruction manual for information detailing pump operation and serial protocol utilisation Figure 16 nEXT interface cable GEA B81 100 116 1 Pump connection 2 Supply connection 3 PC connection Page 36 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 11 Maintenance Edwards nEXT accessories require little user maintenance and contain no user serviceable parts To maintain the accessories in normal use do the appropriate checks below when you maintain the pump e Check that all mechanical fixings are secure e Check that any electrical connections are secure e Check that any electrical supply cables are undamaged Edwards Limited 2010 All rights reserved Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited DOUCUDIUIE B811 00 880 Issue B Ep WARDS This page has been intentionally left blank Page 38 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited
33. t to the extended vent port adaptor Edwards Limited 2010 All rights reserved Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited Jojdepe Wod jUs Jojdepe 3q4o0d 13uS9A B811 00 880 Issue B Ep WARDS The extended vent port adaptor is best suited to the following pump types e nEXT240 e nEXT300 e nEXT400 7 2 Technical data Table 8 Vent port adaptor technical data Internal diameter 0 8 mm Flange size NW10 Item number B580 66 011 Table 9 Extended vent port adaptor technical data Internal diameter M5 thread Flange size NW10 Item Number B580 66 028 7 3 Installation 7 3 1 Unpack and inspect Remove all packing materials and protective covers and check the vent port adaptor If the vent port adaptor is damaged notify your supplier and the carrier in writing within three days state the Item Number of the vent port adaptor together with your order number and your supplier s invoice number Retain all packing materials for inspection Do not use the vent port adaptor if it is damaged 7 3 2 Connect the vent port adaptor WARNING Before you install the accessory ensure that you switch off the pump and disconnect the power supply as described below 1 Switch off the pump isolate the pump controller from the electrical supply and wait for the pump to stop rotating 2 Unscrew and remove the manual vent valve from the nEXT pump 3 Refer to Figure 12 and 13 Check that the v
34. tective covers and check the PRX10 purge restrictor If the PRX10 purge restrictor is damaged notify your supplier and the carrier in writing within three days state the Item Number of the PRX10 purge restrictor together with your order number and your supplier s invoice number Retain all packing materials for inspection Do not use the PRX10 purge restrictor if it is damaged 6 3 2 Fit the purge restrictor WARNING Before you install the accessory ensure that you switch off the pump and disconnect the power supply as described below CAUTION Do not exert any sideways force on the purge restrictor when you clamp it into place If you do you can damage the seal between the O ring Figure 11 item 2 and the body of the purge restrictor If the seal is damaged gas may leak through the seal and you will not be able to properly control gas flow into the pump Note If you will use a purge gas other than nitrogen you must calibrate the purge restrictor refer to Section 6 4 2 before you connect your purge gas supply 1 Switch off the pump isolate the pump controller from the electrical supply and wait for the pump to stop rotating 2 Remove the blank and clamp from the purge port on the pump Edwards Limited 2010 All rights reserved Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited 4032143S2u0 ebund OTXYd 4032143S52u0 ebund OTXYd B811 00 880 Issue B Ep WARDS 3 Attach your purge gas supply p
35. the vent restrictor is damaged notify your supplier and the carrier in writing within three days state the Item Number of the vent restrictor together with your order number and your supplier sinvoice number Retain all packing materials for inspection Do not use the vent restrictor if it is damaged 8 3 2 VRX vent restrictor selection Make sure that you have the correct vent restrictor for your pump and vacuum system Refer to your nEXT pump instruction manual for selection details You must not exceed the maximum allowable rate of pressure rise specified in the nEXT pump instruction manual 8 3 3 Fit the vent restrictor WARNING Before you install the accessory ensure that you switch off the pump and disconnect the power supply as described below Use the following procedure to fit the vent restrictor to a nEXT pump Edwards Limited 2010 All rights reserved Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited JO D1N SBI JUSA XYA JO D14 S9I JUSA XYA B811 00 880 Issue B Ep WARDS 1 Switch off the pump isolate the pump controller from the electrical supply and wait until the pump has stopped rotating 2 Remove the vent valve or plug from the nEXT pump or disconnect the vacuum connections from the purge port as appropriate 3 Refer to Figure 14 If a vent restrictor is already fitted fit a suitable M3 screw into the M3 taped hole 2 in the restrictor and then pull the screw to remove the
36. unting position Page 10 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B811 00 880 Issue B 3 3 3 Axial mounting WARNING Before you install the accessory ensure that you switch off and isolate the pump The axial air cooler does not have an internal guard and MUST NOT operate unless attached to the pump Refer to Figure 4 mm Switch off pump wait until the pump has stopped rotating Isolate the pump drive from the electrical supply N Remove the rubber mounting feet from the base of the pump w Using the M8 x 12 mm button head screws supplied fit the ACX axial air cooler to the base of the pump as shown in Figure 1 Ensure the fixing screws are secure 3 3 4 Combined radial and axial mounting Refer to Figure 4 Maximum pump cooling can be obtained with the simultaneous use of radial and axial cooling fans The fan arrangements can be fitted as shown in Figure 1 m Switch off pump wait until the pump has stopped rotating Isolate the pump drive from the electrical supply N Remove the rubber mounting feet from the base of the pump w Using the M8 x 12 mm button head screws supplied fit the radial and axial air coolers to the base of the pump as shown in Figure 1 Edwards Limited 2010 All rights reserved Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited acc A 5J9 00 AN 1X4 U XOV
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