Dektak 150 stylus surface profiler operation manual
Contents
1. be set anywhere from 3 to 200 seconds Scan Type Only Standard Scan and Map Scan can be selected Stylus Force You can set the stylus force from Img to 15 mg force Measurement Range The available vertical resolution depends upon the Measurement Range selected When measuring extremely fine geometries the 65 kA range provides a vertical bit resolution of 1 A For general applications the 10 A vertical resolution of the 655 kA range is usually adequate When measuring thick films or very rough or curved samples select the 5240 kA range with 80 A resolution Profile The Profile setting scales the measurement range according to the profile selected Three different profiles are available for a variety of sample surface characteristics e Valleys Provides 90 of the measurement range below the zero horizontal grid line Used primarily for measuring etch depths Hills and Valleys Provides 50 of the measurement range above the zero horizontal grid line and 50 percent below Used in most applications especially if the surface characteristics of the sample are not well known or if the sample 1s out of level e Hills Provides 90 of the measurement range above the horizontal grid line Used primarily for measuring step heights DATA COLLECTION 1 Click Window gt Sample positioning from system menu bar or click Sample e e e e Positioning Window icon 2 To run a scan routine click Run gt Scan from the system menu or2. click the Run a gt Currently Active Scan Routine icon Scan Parameter Parameter Value Scan Type Standard Scan oA wal Ph iD o ee KN Aaa MM yea ly Seyis Rede 5 um iai i ill j Location 0000 ymn S0000 pam O 0 Length 2000 um Duration 13 Repohubinn 0 515 pm saenph Force 3n Measurement Ranga 1000 um FProf s akes Display Farge Auto R Cursor Pos 100 pm Width 0 pm Hi Curto Pos 1900 um Width 0 um Arabica Resu Func BR FB M M Rasut R iw oO tia 6 2631 E01 p iw g j LEH a 100 oO 1 1 6414E 00 wale ID O 1 12066 4000 in oO 1 L oF2GE 00 t il Pr oil i pid ha ty a i T i mm e a aaa fs ad T Taaa ahii iii Y Watch List P Cursor Legend S g A F Vaje TAN yuri Pos 100 win Width Linn ASH 30064E 001i ym Ver J0064E 001 pn lt 1 F iC LEDU urn M Cursor SSS a um Pos umo Width em R Vv M Figure 2 Data Plot Window after Scan Completion The reference R cursor and measurement M cursor define the portion of the profile trace for leveling or performing analytical functions You can adjust the bandwidth at each cursor to average the data points within the cursor s bandwidth This is useful for leveling and average step height measurements SOFTWARE LEVEL and STEP HEIGHT 1 Position the R and M cursors along the baseline of the step and adjust the bandwidth 4 2 Click the Level icon ft or press F7 or select Plot gt Level from the system menu bar The profile trace replots and level
3. the end of the scan Click Enter button The start location and length are determined Note that it is also possible to edit the value with the keyboard 9 Click the close box at the upper right corner to close the dialog box 10 Select Window gt Scan Routines from the system menu bar or click the Switch to Scan Routines Window icon to display the Scan Routines window 11 Click any of the underlined items in the Scan Parameters section of the window to open the ScanParameters dialog box to adjust the illumination to view Scan Parameters for Routine 1 of 1 Nominal Map Stitching Stylus Type Radius 2 5 um wt Location Length Duration Sample uri Secs 12000 points Resolution Scan Type 0 083 uro sample Standard Scan Stylus Force Meas Range 3 00 Profile Additional Parameters OHills J L O valleys ar E Tower Up After Scan HillsValleys Figure 1 Scan Parameters Dialog Box 12 If desired adjust the scan parameters in the dialog box such as scan ID Duration horizontal Resolution Stylus Force Measurement Range and Tower Up After Scan 13 Click Apply and then click OK to accept your entries and close the dialog box SCAN PARAMETERS All of the scan parameters are user selectable and can be accessed from the Scan Routines window Scan ID This parameter allows you to assign a fifteen digit scan identification file name or number Stylus Type The Stylus Type parameter allows yo
4. Dektak 150 Stylus Surface Profiler Operation Manual Note To abort a Dektak 150 operation press the Esc or A key on the keyboard The stylus is very expensive take caution when you load and unload your samples START UP 1 Double click the Dektak icon to start the Dektak 150 software SAMPLE LOADING 1 Open the enclosure 2 Verify that the tower is raised 3 Position the sample in the center of the stage right below the stylus DEFINING SCAN LOCATION and LENGTH 1 Select Profiler gt Tower Down or click at icon E i an 2 Use the Illumination Adjustment icons the sample 3 From stage control panel click arrows to move sample and find desired area 4 Initiate Stage Tracking left click in the camera view pane for fine sample positioning The image should now track the motion of the mouse 5 With the stylus reticle properly positioned on the sample click the mouse button a second time to deactivate Stage Tracking This is your starting point 6 Select Edit gt Define Scan Location Length The Location Length for Routine 1 of 1 dialog box appears The X Y and T fields display the current X Y stage position 7 Click the Enter button in the Current Location section to assign the coordinates to the scan routine This is the scan start point 8 Under the Current Length in the Location Length for Routine 1 of 1 dialog box click Track button Then roll the mouse until the stylus reticle is at
5. s with the R and M cursor intercepts at zero 3 Measure the step height with R and M cursors SAVING THE DATA PLOT 1 Click File gt Save as to save the original data in C user data your folder 2 Click File gt Export to save as CSV format 3 Right click on the data plot select Save as Image if you want the graphic format SHUT DOWN U Click Window gt Sample positioning from system menu bar or click Sample T Positioning Window icon Select Tower up from Profiler menu bar or click Tower Up icon After the tower is raised remove your sample carefully Select File gt Exit from the Dektak menu bar to exit the Dektak software
6. u to specify which stylus type is used in your system Scan Location This parameter displays the X and Y location in um for this particular scan routine Scan Length Scan lengths from 50 um to 55 000 um 50 mm are possible using the standard Dektak 150 system Scan Duration Speed The Duration setting displays the amount of time it takes to complete a given scan Scan duration in conjunction with scan length determines the horizontal resolution of a scan Therefore scan speed is directly related to the resolution Scan Resolution The Resolution parameter displays the horizontal resolution for the scan length and scan speed duration entered into the scan routine The scan resolution is expressed in um sample indicating the horizontal distance between data points Data points are the points along the scan path at which data samples are taken The more data points taken during a given scan length the shorter the distance between data samples Therefore a scan routine with the lowest number of um per sample provides the best possible horizontal resolution The Dektak 150 provides horizontal resolution with a maximum 60 000 data points available per scan Scan length and scan duration determine the horizontal resolution of the Dektak 150 The profiler maintains a constant sampling rate of 300 data points per second By slowing scan speed you can process more samples with a given scan length over a longer period of time Scan duration may
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