ONE-XY User Manual - Newport Corporation
Contents
1. Series Integrated XY Linear Motor Stages I e USER S MANUAL Nevvport Experience Solutions Precision Motion Guaranteed ONE XY Series Integrated XY Linear Motor Stages Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used X A EDH0351En1010 08 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from Incorrect usage Load on the stage greater than maximum specifi2. 15 EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages 9 3 Calibration CAUTION It is recommended to return your ONE XY stage to Newport once a year for recalibration to its original specifications QD Newport EDH0351En1010 08 15 16 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems Newport Experience Solutions 1 T EDH0351En1010 08 15 Newport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
3. 6 9 w ojoj ojan e Max voltage 96 V e Max rms Current 3 1 A WARNING GROUNDING The stage s protective ground is located on pin 8 of the motor power connector If you are using grounds other than those provided by Newport you must connect pin 8 to a ground connection Encoder and End of Runs SUB D15M Connector Encoder Phase B Shield Ground Encoder Phase A 5 V Encoder 1 8 End of Run ndex Pulse 1 End of Run 00000000 0000000 e Encoder Phase B a m nco er Phase Shield Ground m 11 Encoder Phase A 12 5V 13 C 14 Index Pulse 15 QD Newport EDH0351En1010 08 15 12 Experience Solutions ONE XY Series Integrated XY Linear Motor Stages 7 2 ONE XY Cable Wiring All ONE XY stages are delivered with the three cables required for operation The wiring diagrams and connectors for these cables are provided in the following diagrams When operating the non Newport controllers it is recommended to adhere to the wiring conventions presented here and to use cabling with similar characteristics WARNING Newport guarantees compliance of the ONE XY translation stages only if they are used with Newport cables and controllers SUB D9M ONE XY Connector Stage Phase U Motor gt Phase U Motor 1 Phase V
4. 8 6 8 96 L Newport Experience Solutions EDH0351En1010 08 15 14 ONE XY Series Integrated XY Linear Motor Stages m Maintenance 9 1 9 2 QD Newport Experience Solutions RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The ONE XY stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The ONE XY stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your ONE XY stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair NOTE Install the shipping screws to hold down the stage prior to packing CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual This can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void the warranty
5. EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements pA amp was designed and built in accordance with the following harmonised standards A S EN 61010 1 2010 Safety requirements for electrical equipment for measurement OY control and laboratory use Part 1 General requirements s EN 55011 2009 Classe A KS S was designed and built in accordance with the following other standards s ve EN 61000 3 2 EN 61000 4 5 SN EN 61000 33 EN 61000 4 6 EN 61000 4 2 EN 61000 4 8 0 6 EN 61000 4 3 EN 61000 4 11 ve EN 61000 4 4 EN 62311 aN S Date 22 07 2015 Dominique DEVIDAL SENS Quality Director XQ gt MICRO CONTROLE Spectra Physics ONG Zone Industrielle Y F 45340 Beaune La Rolande France d FN CAN BCE Newport Experience Solutions EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be
6. c 3 94 124 724 236 6 0 ONE XY100 100 184 184 60 1524 o o o G 3 E 7 87 1083 10 83 2 36 6 0 K ONE XY200 200 275 275 60 152 4 6 L 69e 9 1181 19 69 19 69 3 94 12 0 F 9 se ONE XY300 300 500 100 3048 gt G eres ae o RON lo ae 8 S N BOTH SIDES MODEL SHOWN ONE XY100 HOLES J THD DIMENSIONS IN INCHES AND MILLIMETERS BOTH SIDES HOLES K THD MOVING CABLE Ja a o o o o o o HEIGHT BRACKET T LL Mr T STATIONARY C gt CABLE BRACKET STAGE MOUNT ON BOTH SIDES 8 HOLES FOR I SCREWS mn A TOP DOWN ACCESS BY TRANSLATING STAGE Pje o o A qo d e 6 9 qT MODEL B C D E F o 3 HOLES o 197 5 30 394 295 181 236 sc e JB ome 04 m d 4 0 4 92 3 94 1 81 472 WIDTH p o o 4 ONE D100 aoe 025 10 46 120 2 9 E opum 6 0 6 89 4 92 472 6 69 200 152 4 7 125 120 170 8 0 13 78 984 6698886 1083 yoo gt ONE XY300 2032 250 250 1708 225 275 1 Y MODEL G j K M io 158 138 1 420 4HOLES 4HOLES 35 or M6 M4 5 4 gt CABLE OUTPUT 276 1420 4HOLES 6HOLES 205 ONE XY100 70 or M6 M4 M5 52 276 1420 8HOLES 6HOLES 256 ONE X 200 70 or M6 5 M6 65 EC G y 3 94 5 16 18 8HOLES 6HOLES 378 LENGTH gt ONE S00 100
7. ONE XY stages require the following mounting conditions for best performance Installation Considerations Mounting surface flatness 5 um Mounting screw torque 7 Nm Mounting holes to a table whether a granite or flat steel table can be accessed by moving the stage manually Newport 4 Experience Solutions ONE XY Series Integrated XY Linear Motor Stages m Connection to Newport Controllers NOTE Visit www newport com for compatible Newport controllers 4 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions Specifications listed in this guide are based on operation with Newport Control and Drive Electronics The XPS Controller is delivered with a configuration file that has been developed at the factory for operation in a no load condition for immediate plug and play operation Newport has developed technical notes which guide the configuration process for operation of ONE XY stages with a non zero application specific payload For operation under such conditions the Scaling Acceleration Acceleration Limit and PID tuning parameters may need to be adjusted Please download our tech notes on Scaling Acceleration Tuning and configuring direc
8. 93 140 186 Continuous Current 2 9 2 9 3 2 3 2 3 2 Peak Force N 75 151 295 442 589 Peak Current NApk 92 9 2 10 3 10 3 10 3 Back EMF Constant V m s 8 1 16 3 28 7 43 0 574 Back EMF plus IR drop must not exceed maximum line to line bus voltage Resistance values do not include cable resistance Cable resistance adds 0 146 ohm m for Delta connection and 0 44 ohm m for Wye Connection 3 Continuous operating limits are based on continuous operation at maximum temperature with aluminum heat sink 300mm x 12 5mm x motor length Maximum on time at peak operating limits is 10 seconds CAUTION High RMS current will generate motor heating which will degrade characteristics of the stage including such attributes as repeatability accuracy etc Induced Voltages Coil Moving U V Vw U W EHA07248 2 2500 15 2000 1 05 1500 2 zs E tc lt 05 1000 1 500 1 5 2 0 50 0 50 100 150 Motion Direction T C Positive Temperature Coefficient Thermistor resistance as a function of temperature Motor heating is typically restricted to 20 C with Newport Controllers NOTE The values above indicate voltage induced by energized coil of one phase on next phase coil A positive value for U V would indicate a higher voltage on U relative to V QD Newport EDH0351
9. Details and Specifications for more information to help configure the stage with your controller Newport also provides a tech note on configuring third party stages with Newport controllers on ONE XY website which may be useful as a reference WARNING Newport is not responsible for malfunctions or damage to a stage and other hardware when used with non Newport controllers m Characteristics 6 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Newport Experience Solutions 7 EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages Repeatability Ability of a system to achieve a commanded pos
10. and precaution should be taken Connection On each stage there is a label which indicates the stage name and serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors labeled Motor at any time prior to power up with the supplied cable assemblies Cables ONE XY stages are delivered with a set of three 5 meter cables that can be directly connected to the Newport controller WARNING ONE XY Series translation stages can only operate with cable lengths of 3 m or less WARNING These cables are shielded For correct operation make sure to lock connectors ground continuity provided by cables WARNING Keep the cables at a safe distance from other electrical cables in your environment to avoid potential cross talk Newport 6 Eyperience Solutions ONE XY Series Integrated XY Linear Motor Stages mn Connection to Non Newport Controllers Newport stages can be operated with Non Newport controllers However under such operational conditions Newport makes no guarantee regarding achievable specifications To aid Newport customers using non Newport Controllers with ONE XY stages we have provided wiring conventions and motor characteristics below It should be noted damage caused by improper configuration or operation while in use with non Newport controllers is not covered by the warranty Please refer to Design
11. auus RETRO HERR IRR FETU ER HER 15 9 3 Cali DYAatiO ls user rci eee tera erbe aepo retia ere a debere odds 16 DEL VICE POEM 17 QD Newport EDH0351En1010 08 15 iv Experience Solutions ONE XY Series Integrated XY Linear Motor Stages EC Declaration of Conformity CASA OA OAS we ihe Chie h tle de X qo SS 6 Year mark affixed 2015 W EU Declaration of Conformity AS The manufacturer E e wpor orp 6 1 D ONG Irvine CA 92606 USA WA Hereby declares that the product NA Description ONE XY Y NS Function Integrated XY Linear Motor Stage 6 Type of equipment Special Purpose Laboratory Equipment Consisting of 2 Devices Se an X amp Y Axis Linear Motorized Stage and a CE Compliant Programmable Controller E with Interconnect Cable D a complies with all the relevant provisions of the Directive 2014 30 EU relating to electro c Ej magnetic compatibility EMC RA complies with all the relevant provisions of the Directive 2006 95 EC relating to electrical AN equipment designed for use within certain voltage limits Low Voltage se complies by exemption granted to test Measurement and Control equipment with all the e relevant provisions of the Directive 2011 65 EU relating to the restriction of the use of certain ONG hazardous substances in electrical and electronic equipment RoHS2
12. En1010 08 15 10 Experience Solutions ONE XY Series Integrated XY Linear Motor Stages 6 7 Encoder Signal description Voltage wiring Renishaw standard 1 Vpp Reference mark position see drawing Sensor Positions Resolution Scale pitch 20 um Maximum speed 10 m s Encoder Feedback Signal Position Direction Encoder Phase A 1 Encode Phase A 1 s Direction Encode Phase B i s Encoder 9 Direction lt lt Motion gt Direction 6 8 Sensor Positions Sensor Positions lt Stage Travel Range gt Negative Positive Software Limit Software Limit Home Position gt ess Origin 7 08 2 gt 1 i 1 1 li 1 End of Run Limit SS B 1 EM NES End of Run Limit _ dE qe E i Index Pulse 1 50 Direction Motion gt Direction Dimensions in inches and millimeters Newport Experience Solutions 1 1 EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages El Connectors and Cables 7 1 Pinouts SUB D pinouts for ONE XY stages are provided in the following tables Motor SUB D9M Connector U Motor U Motor V Motor V Motor Thermistor 1 W Motor W Motor Shield Ground Thermistor 2 1 5 e 00000
13. Motor c Phase V Motor 1 Phase W Motor c Phase W Motor Motor SOP 8 1 Ground Connector i i Connector Cap Cap SUB D15M Sub D15F Connector Connector 1 Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B 1 Index Pulse Index Pulse I End of Run End of Run 45 V Encoder Encoder amp End of Runs gt 2225 ooo 2 10 F m 1 Shield Ground Connector i i Connector Cap Cap NOTE This is the wiring of the cables that provided with the connection to Newport Controllers for third party controllers we recommend using a cable with similar characteristics Chapters 7 1 Pinouts and 7 2 ONE XY Cable Wiring Newport Experience Solutions 13 EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages Dimensions me gt i i 3 HOLES o 197 5 DEPTH 20 5 SLIP FIT FOR M5 DOWEL PIN A T i EE MODEL TRAVEL L w H A 236 4 92 4 92 2 36 40 V O19 ONE XY60 60 125 125 60 _ 1016
14. RE 4 4 0 Connection to Newport Controllers 5 41 Warnings on Controllers oe em PP rene des 5 AD CONECO uei eerte ib beer a doa eaten ites 6 Gables 6 5 0 Connection to Non Newport Controllers 7 i Mim OE 3 1 ne 7 6 1 Definitions iii gains aiaigiiiaaienninanneen 7 6 2 Design Details coiere tenete tereti Po cos RO He e eno ots 8 6 3 Mechanical Specifications er ene ee retia 9 64 Hard n e ere etes 9 6 5 Load Characteristics and Stiffness esses 9 6 6 Motor characteristics Direct Drive Brushless Motor 10 0 75 ENCOQET ERE 11 6 8 Sensor POSIUODS iuto ice i ic eni iie i i DRM 11 7 0 Connectors and 12 NEC E M 12 Motor SUB D9M COnneCtOr 5 nee triente eto 12 Encoder and End of Runs SUB D15M Connector 12 1 2 ONE XY Cable Wiring nee Renee ek ue eee tes 13 8 0 3 Dimensions 1 1 eere 14 CY Newport Experience Solutions iii EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages 9 0 Maintenance eterne ene 15 9 Maintenance s c sccscesscsocsscevavesveseccvsnaccsarcosenecconcacconvessssaccoseaccostesessascousacs 15 92
15. altitude 1000 m e Storage Operating humidity 10 to 80 non condensing Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Prior to transporting the stage secure the axis by re installing the shipping screws that lock the axis together CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year Newport Experience Solutions ix EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages QD Newport EDH0351En1010 08 15 x Experience Solutions ONE XY Series Integrated XY Linear Motor Stages Integrated XY Linear Motor Stages ONE XY Series m Introduction This manual provides operating instructions for the ONE XY stage Inside this manual you will find useful information and technical references It is recommended that the user download all support documentat
16. arries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING The magnetic channel included in this device has the potential to disrupt pacemakers Consequently it is recommended that individuals maintain a distance of 1 meter or more from the stage as a precautionary measure WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs Newport tiefe Solone vii EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages EDH0351En1010 08 15 WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this sta
17. ed load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions ONE XY Series Integrated XY Linear Motor Stages Table of Contents Warranty octauo I nasa aa ITQUD cay SR EOUIBED Gere ete vr ah tacts He Ord es ii EC Declaration Of irre teo al eee prep eb tate v Definitions and Symbols 9 e n e eme EH EEEREEREE ERE ERREUR RETE E FREE E vi ER vii CalitiOn arearen ix 1 0 Introduction 7 sse 1 2 0 DeSCPFIDIOB cooper toners ion onn el orans 2 3 0 Stage Installation onerare tbe tons 3 SMEs 3 3 4 Mounting Conditions onini eee He REFERRE ERE E
18. ength MTBF 20 000 hours NOTE RoHS Compliant EDH0351En1010 08 15 This product complies with the RoHS directive Restriction of Hazardous Substances Newport Experience Solutions ONE XY Series Integrated XY Linear Motor Stages 6 3 Mechanical Specifications ONE XY60 ONE XY100 ONE XY200 ONE XY300 ONE XY60HA ONE XY100HA ONE XY200HA ONE XY300HA ONE XY60 ONE XY100 ONE XY100HA ONE XY200 ONE XY200HA ONE XY300 ONE XY300HA Minimum Incremental Motion um 0 05 0 05 0 05 0 05 0 05 0 05 0 05 0 05 On Axis Accuracy um 3 0 3 3 0 3 4 04 6 0 6 Bi directional Repeatability nm 30 30 30 30 Straightness um 2 2 4 10 Flatness um 25 3 4 8 Pitch Yaw rad 58 58 72 86 Roll urad 58 58 72 48 Orthogonality urad 96 96 96 96 ax Speed m s 0 3 0 4 0 5 0 3 ax Acceleration G 0 3 0 3 0 2 0 2 ax Load Capacity N 100 120 150 350 Weight Ib kg 6 4 2 9 12 8 5 8 26 4 12 165 75 1 Specifications measured on stage centerline 50 mm above mounting surface Newport provides NIST traceable test results 2 Flatness specifications dependent on system base Contact Newport for more information 3 Stage performance values at no load Does not account for drive or resolution effects 4 To obtain arcsec units divide mrad value by 4 8 Note Speed and acceleration can be higher with other driver options NOTE The f
19. ge if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit WARNING Do not exceed speed and load limitations as specified in this manual Newport viii Experience Solutions ONE XY Series Integrated XY Linear Motor Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 0 to 50 C e Storage Operating
20. ion from the ONE XY page of the Newport website to have as reference ONE XY350 Stage RECOMMENDATION We recommend you carefully read the chapter Connection to electronics before using the ONE XY stage GO Newport Experience Solutions 1 EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages 20 Description The ONE XY series of integrated XY linear motor stages are designed to eliminate the integration of individual X and Y stages and increase system stiffness for dynamic applications The available travel ranges from 60 mm to 400 mm with precise orthogonality alignment between the X and Y axes The stages feature robust components and deliver high performance making them ideal solutions for precision industrial applications such as semiconductor wafer inspection microelectronics test and assembly metrology laser microprocessing The ONE XY has a monolithic aluminum middle plate that is stiffer than the conventional interface between two individual linear stages The linear motor drive is an iron less design that is suited for high precision positioning but at the same time offers high dynamic performance Cross roller bearings provide high load capacity as well as straight trajectories Precision position feedback is supplied by a highly repeatable linear scale mounted inside the stage The encoder signals are interpolated by Newport s XPS motion controller with 50 nm MIM for outsta
21. ition over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s 167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com 6 2 Design Details Base Material Aluminum Bearings High precision crossed roller bearings Drive System Motor Initialization 3 phase synchronous ironless core linear motor Done by controller Feedback Non contact optical encoder Limit amp Home Switches Integrated home and end of travel limits Cable High Flex 10M cycle 3 m l
22. nding Minimum Incremental Motion repeatability and stability Absolute home position and limit signals are incorporated to improve repeatability and reliability while simplifying the design with less electronics and mechanical parts Newport EDH0351En1010 08 15 2 Experience Solutions ONE XY Series Integrated XY Linear Motor Stages Stage Installation 3 1 Unpacking The ONE XY stage will be delivered to your site in packaging designed for safe transport Larger ONE XY stages will be delivered in Pelican cases All accessories will be included in this case Attached to the body of the stage are handles for safe removal from packaging It is recommended to carefully lift the stage from packaging using these handles CAUTION The largest stages are quite heavy and we recommd a two person job or by some cherry picker CAUTION Before operating the stage remove the screws that hold the stages during shipment GO Newport Experience Solutions 3 EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages EDH0351En1010 08 15 3 2 NOTE Put away shipping screws in case the unit needs to be returned to the factory The stage will come delivered with a control report that indicates performance of your stage within guaranteed specification These measurements were taken in a controlled environment under flat mounting conditions Mounting Conditions
23. ollowing specifications are controller drive dependent Refer to the ONE XY Series page on www newport com for specifications achievable with specific Newport controller drive combination MIM e Accuracy Repeatability Max Speed e Max Acceleration CAUTION To reach stated specifications the stages must be fixed on a plane surface with a flatness of 5 6 4 Hard Stop Hard stops are supplied only for emergency use 6 5 Load Characteristics and Stiffness Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications NOTE For other than centered loads please contact Newport technical support QD Newport Experience Solutions 9 EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages 6 6 Motor characteristics Direct Drive Brushless Motor ONE XY50 ONE XY100 ONE XY200 ONE XY300 ONE XY400 Magnet Pitch N N mm 30 48 30 48 30 48 30 48 30 48 Max Voltage Line to Line V 500 500 500 500 500 Electrical Time Constant ms 0 19 0 19 0 20 0 20 0 20 Max Motor Temperature C 130 130 130 130 130 Motor Connection DELTA DELTA DELTA DELTA DELTA Motor Constant N2 W Force Constant N Apk 8 1 16 3 28 7 43 0 57 4 Phase Resistance 25 Q 5 8 11 6 11 7 17 6 23 5 Phase Resistance 130 Q 8 2 16 4 16 6 24 9 33 2 Thermal Resistance C W Inductance mH 1 1 21 2 3 3 5 47 Continuous Force 23 47
24. t drive stages on the ONE XY page of the Newport website For additional information about controllers visit www newport com WARNING Disconnect the power plug under the following circumstances f the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way f the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles Newport Experience Solutions 5 EDH0351En1010 08 15 ONE XY Series Integrated XY Linear Motor Stages EDH0351En1010 08 15 4 3 WARNING This product operates with voltages that can be lethal Pushing objects of any kind into stage slots or holes or spilling any liquid on the product may affect voltage points or short out parts Any unauthorized access to internal electronics represents a potential shock hazard
25. used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user QD Newport EDH0351En1010 08 15 vi Experience Solutions ONE XY Series Integrated XY Linear Motor Stages WARNING When the ONE XY stage is installed or combined with other instruments in a machine additional testing to directive 2006 42 EC may be required It is the responsibility of the end user or integrator to perform a risk analysis and the necessary tests to conform to the EC directives Newport is not liable for damages caused by not executing this responsibility Warnings WARNING The motion of objects of all types c
Download Pdf Manuals
Related Search