Operations manual - Sitek Process Solutions
Contents
1. 411001 33410 899061 YANNI YMALAWOS 41173 59111 NOILV3dO 11165 ELLIPSOMETER 1 3 Sample Table Vacuum and Alignment continued Observe the intersection of the two wide diagonal lines and the intersection of the narrow crosshairs Slowly rotate as needed the X and Y plane tilt adjustment controls Figure 2 4 to center the diagonals precisely on the crosshairs intersection This makes corrections for the sample surface out of flatness condition NOTE The width height of the intersection of the diagonals is four arc minutes This may be used as a reference in determining the approximate tilt adjustment needed Using the adjustment wheel under the rear of the table and the TMAX option of the program STDS Section 3 Standard Programs raise or lower the table for the maximum reading Figure 2 5 clockwise rotation of the wheel raises the table If the reading from the previous step overshoots the graph upper limit or is too low press the s key on the computer keyboard to change sensitivity Then readjust the table slightly for a maximum reading Repeat the adjustment of the drum and the table vertically as needed for a maximum reading Repeat steps e through g as often as necessary to fine tune the sample table adjustment Tighten the sample table clamp screw See the standard single point2. 5 Burs edoos ajdwes 4 66 pue 3113 uolleulquoo e seu Ajquassy 40 juow Ajquassy 4olluow o2ejuns jo JO x420 q ol e 51 eanjaede yndjno ajnpow JeziJejod ueeq All52e4402 10 2 1 pue 1 1 4 49214 104 775 SLN3NOdWOO udidWOSd Tl3 075 59111 NOiLdluD2saq 11165 ELLIPSOMETER DESCRIPTION SAMPLE MONITQR EYEPIECE EMISSION INDICATOR ASSEMBLY KEY OPERATED AC ON OFF SWITCH POLARIZER MODULE ARM 39 POWER MICROSCOPE NES LIS MICROSPOT OPTICS Optional ANALY ZER MODULE 150mm DIAMETER TABLE ARM ROTATION STAGE VACUUM HOSE TRANSLATION STAGE Figure 1 2 Front view components of the 1116 Ellipsometer 7109 2295 1 10 5622 3 6011 alqe1 pepuels euj adesuns ui 061 40 00 uour ued dias onse d alduexa 5 alqel uo ajdwes
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4. suits 40 pue jo spojaed 0 uselJo si uees sy wid 559 595 177 WYViDONd QuVQNVIS 5415 05 411713 59111 STANDARD PROGRAM STDS 11165 ELLIPSOMETER 2 1 565 655 Film Subprogram continued NMEAS 7 and NFXD F8 The automatic fixing or measuring of the index N can be avoided by using function keys and Meas These keys fix the index N and measure the index N respectively regardless of sensitivity considerations although sometimes answers may not be puted For example if attempting to measure the index N of very thin films under 100 Ang stroms or 10 nm it may not be possible to compute an answer But if the index is fixed the thickness will be computed One oxide film example is this appears in the center of Figure 3 1 while Select optional from below disappears SAMPLE xxx THICK Nf PSI DEL 1051 1 464 44 48 79 33 The LIST key F9 gives the thickness and the eight smallest possible thicknesses with a given period example is this appears in the lower right of Figure 3 1 LISTING PERIOD 28194 1051 9508 17965 3870 12327 20784 6689 15146 23603 One nitride film example of a display is this center of Figure 3 1 SAMPLE nnn THICK Nf PSI DEL 268 1 986 15 81 106 07 The LI
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6. 4 JN 24 14 9PIXO 129195 4equnu ou 49144 55844 5 55844 pue paddy eq ued S499 4 jejJos ajdwes y sjueueJnseeui 559 21 1 aleJnooe 150 40 0 pue 05 04 je sluaue4nseseu Saye SLS 139195 ol ONVOML d 55944 Jenj e 0 pepeeu jo om je sjy 0 JOU 51 ssauloid j ejDue 0 e ye uu 27682 YZERZ s polaed e 2016 404 4 4 e uiui umoux oj seu Jo 55 pejoedxe aousploul jo euo Ajuo uonounj 1 14 4 45 84 JUaWaunseaw SSQUYIIYY 4 9 54 9 241 o SLS t z GYVGYNLS 5415 33130541113 59111 STANDARD PROGRAM STDS L116S ELLIPSOMETER 2 3 575 Two Angle continued The LISTING key F7 gives all of the possible thicknesses within the minimum 0 and maximum 20000 entered for 70 and 50 from which the actual thickness is matched Nifferent maximum values can be selected a listing will appear on the right side of the screen Following 15 a listing obtained using the above minimum and maximum THICKNESS LISTING PHI 70 1 50 265 268 2057 1981
7. 5 1 0 Trouble Analysis 7 1 1 Measurement system 7 1 2 Troubleshooting 7 1 2 Diagnostics 1 7 1 Photodetector Zero Offset Adjustment 7 7 2 Automatic Amplifier Gain Check ae E S 3 Optica Alignment Check 7 7 0 2 2 2 LIST OF FIGURES 7 1 Measurement System Functional Diagram 7 2 7 2 11165 Left and Rear View DV 7 3 Diagnostic Program DIAG Main Men Se X v 74 28 758 7 4 7 9 7 5 7 1 Test Display A D Board Outputs DIAG Alignment Display DIAG a 5 Uy D 115 5 7 1 Troubleshooting Guide 3 7109 C 229S 7 0 1 2 5622 3 6011 uo 1 58 eq Pinoys LINI 1V8 LINI 913 Aq pezijeniur eq ysnw AllinulluoosIip pue sallddns je seunsse Bursi e sy pue dnies o ul 15 swoydwAs ayy uole
8. 11 0 Aq se opea 154 Jo al6uv IHd 5 5 40 9AHl2P4JeJ JO uonounx3 115615 94 anleA xeput JO uonounxa Dureq wyiy 94 jeay JN S108WAS SNOILVIAd3HgV 072 014 413553 11165 ELLIPSOMETER DESCRIPTION 3 0 INTRODUCTION This section describes the components of this ellipsometer and shows how the ellipsometer analyzes the effect of reflection on the polarization of the laser light striking the surface of materials such as bare substrates to acquire measurement data identifying properties critical to quality control Interpretation of the data yields the optical constants of the material or if the material surface is film covered the thickness and optical constants of the film Once initiated by the user analysis and measurement are automatic utilizing a programmed desktop computer inter faced with the ellipsometer Parameters are entered by the user via the computer keyboard Queries requiring operator computer interaction and actual measurement data are displayed on the computer screen Measurement data may be printed for a permanent record Optional equipment is in the Optional Components sectio
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10. OPTIONAL PROGRAMS 511 TABLE OF CONTENTS SECTION PAGE 1 0 Introduction 2 0 561 3 0 Starting the Program totes ABA 4 0 Working in the Engineering Mode 4 Mo 6 4 1 Setting Parameters SEE 4 1 1 Film Parameters bo cs CR ele fas eos eo to 0556 6 4 2 Setup Files mp 5 0 Working the Production Mode LIST OF FIGURES Figure 4 6 1 Option Portion of the WS11A Main Menu Screen e 4 6 1 Figure 8 6 2 Typical Parameter Section of Engineering Mode Screen so 4 6 2 Figure 4 6 3 Typical Engineering Mode Screen of WS11A Program 6 3 Figure 4 6 4 Example of Parameters Option Screen ae BOBS Figure 4 6 5 Example of Film Parameters Option Screen Be 486 Figure 4 6 6 Example of Film Parameters Option Screen o ele ae 987617 Figure 4 6 7 Example of Engineering Mode SETUP Files List Screen ox wow wo Figure 4 6 8 Example of SETUP Files List in Production Mode essees o H 6 9 Figure 4 6 9 Example of Attempt to Retrieve Out of Mode File 4 6 10 LIST OF CHARTS Chart 4 6 1 WS11A Modification of WS Flow Chart C x 7109 230 4 6 0 1 9 t 9 i d0
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12. souaploul uoneipe4 191 22 uey 5591 gt 4 14611 19527 uideg UIPIM suolsueulQ Buiddiys SNOILVOIAIDAdS 0 1 5 11165 ELLIPSOMETER DESCRIPTION 1 0 SPECIFICTIONS Continued This ellipsometer has the detented angles of incidence in the table below for measurement purposes There are also detents for 90 but this angle is only for adjustments Beam on Sample Standard Beam on Sample The Microspot Optics are optional components for the polarizer and analyzer arms See Optional Components section 6 Microspots 70 Table 1 1 Standard and Microspot beam dimensions the sample wafer 7109 2295 1 4 5 5 Alddns uonezi4e Jod JO 91e1S 4932593045 49 4132 3 Jo 4 40 2 3 O M MS 15 AldS 405 WS 1938 0144 YALAWOSdITIA 59111 6 1 041400 J91euoueN Jenuew 40129194 1043002 2neuoiny NYW W 13 745 OLNV V 5 fav 5622 2 6014 se
13. wji SNLVLS 594 juiod sunseay 00 St 0070261 uu eip 00071 007061 0004 552442141 3014 8259 v Sualdwvilvd 5 34 14 04 4 SYALINVEVd LNAWNYLSNI al5uv aeziJejoqd 02070 Sx 06846 SN 242415906 000 0 PXJ ZJM 000 2 PXJ ZJN 001 2 2 41 650 0 090 PXJ JN 005 40 UO uooI IS JOd 40 5 wyty 4534 911 4011 35 4 191 AILJWOSdi NI 26111 VLLSM 5 TIVNOILdO L115C D WAFERSKAN ELLIPSOMETER OPTIONAL PROGRAMS WS11A 1 2 Setup Files The active set of parameters can be stored into a SETUP File and used later in the Production Mode Press the F3 SetupFiles key in the Engineering Menu Figure 4 6 3 to display the SETUP files list Disc Drive C N00TTT 5 files Files currently on disc File name Date Store Option Film Mode REDI 05 22 1995 SETUP DATA ws RED2 05 22 1995 SETUP DATA WS TESTI 12 06 1995 SETUP DATA WS11A TEST2 12 06 1995 SETUP DATA WS11A TEST3 12 06 1995 SETUP DATA WS11A lt lt lt lt End of File List gt gt gt gt Select option 1 Store 3 Delete 7 Up 8 Down 10 Exit Figure 4 6 7 Example of an Engineering Mode SETUP files
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15. 4959 yeu 49zl4elod 5 J9se 4 g zc9 456 jou yxau 9 ayy 6ullas 17 aldues leju pue jo y pue u4ni eouepioul Jez A eue pue 5 sepnj ur dnjes 40135 LN3W3u SV3W3Hd 0 YALAWOSdI 59111 NOIL 1116 ELLIPSOMETER OPERATION CAUTION For 90 Angle of Incidence the L116S has Microspot Optics rotate the 150 mm table so that its lifting slot is under the analyzer Microspot Move the table to the left and down so that neither Microspot Optic will contact the table when both of the arms are at 90 SAMPLE ILLUMINATOR CONTROL SAMPLE MONITOR ASSEMBLY POLARIZER DRUM DRUM LOCKING SCREW 7 YA ANALYZER M 632 8 nm RED LASER POLARIZER ARM B LOCATOR PIN 227 CLAMP SCREW ELLIP SOME TER TIME LAG FUSES 80A 115 230V MICROSPOT STOPS Optional GPIO SOCKET FOR THE CABLE TO THE COMPUTER The optional 200 mm diameter table cannot be moved out of the way of the optional Microspot Optics Therefore the arms cannot be set at 909 with both of these options Figure 2 1 Rear and left view of the L116S Ellipsometer with the standard tabl
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17. 3 e jenuey s 4es 3 e 5 se 91 4 21eJ5 Buiddiys ul pejquesse peddius 5 4euj4ser u313WOdSITI3 59 11 NOILVTIVLSNI 1 1165 ELLIPSOMETER INSTALLATION INSPECTION Thoroughly inspect the ellipsometer for shipping damage If there is damage from transit notify the carrier A key should be installed in the keylock switch located on the right side of the Sample Monitor Assembly above the sample table it should be off Check that good a fuse is in the ellipsometer Verify that all applicable items have been included in the shipment LOCATION CONSIDERATIONS The Gaertner ellipsometer is designed for use in either a production or laboratory facility under relatively constant room temperature and a relatively dry dust free atmosphere The ellipsometer requires a clean level solid work surface sufficient to also accommodate the interfaced computer The input ac line voltage must be free of large transients having harmonics in the range from audio frequencies to several megahertz not obstruct the ventilation holes on any of the equipment INTERCONNECTIONS DO NOT plug or unplug any component into or from ac power or make connections to other equipment with its power ON OFF switch ON The ac line cable for the ellipsometer is on the left side near the rear of the instrumen
18. SM eui JO uols4eA e 5 1 5 10021115 Jo 4948 uo uoolllsAlod e jo uondaosqe pue sseuxolub 1 4e3nduo WY ue pue 4ejeuosdi 3 0 05117 4eul4eeD aul YIM Buiquosqe 1112945 e 51 VLISM 0 1 33413 0 91113 NVNSHAAVM 28111 VLISM SWV3DO3Sd 1140 L115C D WAFERSKAN ELLIPSOMETER OPTIONAL PROGRAMS 511 4 0 WORKING IN THE ENGINEERING MODE To start the Engineering Mode press the F2 Engineering key in the Main Menu A screen similar to Figure 4 6 2 appears SETUP file Default Solve Kf index Film parameters for the Polysilicon on Oxide or Nitride Poly Thick exp 7 Nf fxd 4 060 Kf exp 0 049 Oxide Thick2 fxd 0 Nf2 fxd 1 460 Kf2 fxd 0 000 Substrate Ns 3 850 Ks 0 020 INSTRUMENT PARAMETERS 5 Point WAFERSKAN PARAMETERS 6328 Plot Thickness Wavelength A Phi 70 00 Wafer diameter mm 150 00 Ambient Polarizer Angle 1 000 Quter meas dia mm 132 00 45 00 5 5 Figure 4 6 2 Typical parameter box section of the Engineering Mode screen Enter these parameter values in the following order 1 Poly thickness expected thickness
19. 494140 40 Ajipeas A quesse ol Aluo jo esneo 1 105 01 euuosJed 4 euop eq 5 514 514104 pue 06 1504 jo asn suojduAs jo pjnous 515 31gncoML O L YALAWOSdITIA 59111 321AM3S 11165 ELLIPSOMETER SM MODULE 1 ZERO OFFSET ADJUST PHOTODET AMP ZERO OFFSET ADJUST ZERO OFFSET ADJUST PHOTODET ZERO OFFSET ADJUST SAMPLE AND HOLD BOARD SAMPLE AUTO 5 HOLD GAIN SAMPLE AUTO amp HOLD GAIN SAMPLE AUTO amp HOLD GAIN AUTO GAIN SAMPLE 5 HOLD i e DIGITAL SERVICE A D COMPUTER INTERFACE CARD COMPUTER AID PORT COMPUTER PORT COMPUTER PORT COMPUTER AID PORT COMPUTER PORTS TIMER uo cap Figure 7 1 Measurement System Functional Diagram 7109 2295 7 2 SUPPLY VOLTAGES 5 1 5622 20 601 4euj49e 404 Ajddns jueunJijsu JO
20. Su3SY JHL ONIONIONI SUu313WOSdlT13 YANLYAVS AHL 30 SLNANOdWOD 21412313 1VOINVHO3W 1140 JHL dO TIV 3413 0 31713 59111 534 11165 ELLIPSOMETER DESCRIPTION LASER SAFETY GOVERNING REGULATION The Gaertner ellipsometer utilizes a helium neon laser light source The accessible radiation does not exceed one milliwatt and therefore is classified as a Class II laser product as defined by Radiation Performance Standards 21CFR Subchapter J Federal Register Volume 10 148 July 31 1975 Appropriate WARNING and Conformance labels are affixed to the ellipsometer to alert person nel of the presence of laser radiation during operation WARNING Logotype Attached to the polarizer arm and reads LASER RADIATION DO NOT STARE INTO BEAM CAUTION HELIUM NEON 1mW CLASS N LASER CERTIFICATION Label Not Shown Attached to the left front face of the vertical plate and reads THIS LASER COMPLIES WITH DHEW CDRH RADIATION PERFORMANCE STANDARDS 21CFR SUBCHAPTER J 7109 2295 1 2 Label Attached to the exit aperture of the polarizer module and reads AVOID EXPOSURE LASER RADIATION 15 EMITTED FROM THIS APERTURE CAUTION Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure sjuaujsn pe Ajuo st yeu inq 7506 Osje 51
21. AO 4958 Ajddns 4958 e speeN 40 4 5 9A1129Je N3dO OL pesoj SIU peso si aJnl4ade 2427142104 eui 34 uonisod 29u2 51 146 ON ye eq 5 wasse JO Ajddns 5 1ueseJd 1115 1 j duel ino due you seop 40je2Ipur 40 55 43 9 4 94nDi4 5 vcz Aout 3A129Jep aoelda4 sasnj 42942 ue pejees si NO 5 Jejeuosdijo PYL JjIJ9A aul ON 49jeuosdi je ol ON NOILV IOSI LINYA 3snvo2 318 5504 WOLdWAS AGIND ONILOOHSATANOML 71 1 318 1 YALAWOSdIT19 59111 30835 11165 ELLIPSOMETER SERVICE TABLE 7 1 TROUBLESHOOTING GUIDE continued SYMPTOM Inconsistent or inaccurate ments POSSIBLE CAUSE FAULT ISOLATION Failure to use Upon exiting the TMax program option TableMax program the autoranging gain circuitry is prior to measurement activated Hence TMax must be run See Section 3 whenever P PHI or the sample is changed Inaccurate Polarizer Observe the Polarizer drum scale
22. ul unnoeA pue wnnoeA alqeL 6 5405 44 pue uondiaoseg y ui 2 1 20jenusjje eu uedo 72 21 S 1958 8 89 Jo eq pjnous Jesel ayy ol sj ejeurun j pynoys due 40322Ipu 5 z z 327614 NO 2s143201 2 Ajquassy uo 4 ayy uu g zeg ad pue Jejeuosdi je uo uonoes uonej eisu ad o 4ejnduos pue 99 pue uo uanj 271 59111 NOIL 40 11165 ELLIPSOMETER EYEPIECE EMISSION INDICATOR ON OFF KEY SAMPLE ILLUMINATION CONTROL SAMPLE MONITOR CONTROL Figure 2 2 Ellipsometer controls and indicators on the Sample Monitor Assembly 7109 2295 2 4 8 4 S62 2 6014 14 Jejeue p 002 jeuondo jo do 40 sluauoduoD jeuondg ul 1 9 ees e qei sldues 9 06 jo MalA 401 6 2
23. pue uondo ayy sleuluJel 014 75401214351 SM JO ees 5 40 5 1 0149 ulod 6 34104 65 40 5 195 51717 uonoes 995 sJeyaueed 4 yes 40352413 kay usados 5 ajdwexy 9 5 aunbig MX3 01 ues 49jeM ty uondo snivis 1uiod gt eanseew 00 55 1 007261 uu eip 000 1 007061 00701 1019 8059 5 5 34 5 Sudldwvivd LNIWNYLSNI 02070 isj 068876 5 324354 000 0 PXJ Z 39 0950 PXJ ZJN 001 DPXJ Z92IUu14 6 0 0 dxe 33 090 PXJ JN GOS 9 40 uo 211154 04 40 1 34 05 21531 el 401354 115 109 28111 VLLSM IVNOILdO L115C D WAFERSKAN ELLIPSOMETER OPTIONAL PROGRAMS WS11A 8 1 1 Film Parameters Choose the F1 Film option from the Parameters Menu Figure 8 6 4 and the Film Parameters Menu
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25. 4 5591 014 wily 494044 pue 04 pue 006 304 je sjueursJnseau saye YdIyM 6 6 129195 64 85944 UODIIIS 5916415405 5 5 ol YLSANS 24 55944 1 6 4 4 ees 5 JO ur 559 595 5 129 95 oi WIA 14 55944 ONVOMLE 5 5 3 1534 SV M0738 WO ld A3 1937135 eonpoad 4514 24 40 LNIdd 14 Jedlla 64155944 85844 eq oj 5 pue uo pue peloeuuoo 1 494149 id 55944 LNIYdt 01341534 Sv AJJ 423135 499442 JO 1 9 4 0 aq 5 5 6uld4osqeuou 4948 9 e si 5141 5415 5405 SSD SLS 595 WvDONd QHVQNVIS 0 15 5415 33130051113 59111 STANDARD PROGRAM STDS 11165 ELLIPSOMETER 2 1 565 G5S Film Subprogram When the Film subprogram is selected these are the Default Values left side of Figure 3 1 3 6 Silicon substrate 3 85 K 02 Wavelength 63284 632 8 nm 5102 oxide film Estimated index N 1 46 Mode of measurement Measure N and thickness
26. 4 314 ejJe6IN snudAD 1esJD 4514 YIN Ajdde seullapln6 oj Asessadou 51 451 6 YWAN Bnid sn s 50014 YAMGd YSLAWOSdI114 59111 NOILVTIVLISNI 11165 ELLIPSOMETER INSTALLATION Computer and Printer Connect the Centronics Interface Cable 7108 E 239t to the parallel receptable on the rear of the computer and at the connector on the printer See Figure 5 3 ellipsometer rear view and Figure 5 4 IBM PS 1 computer Hand tighten the connector thumb screws SOFTWARE INSTALLATION AND LOADING NOTE Wherever in this instruction the prompt is to type in some specific characters the charac ters are in boldface and just after type Type in the characters and press Enter Software Installation on the Customer Supplied Computer The computer will load DOS from the hard disc which must have at least three megabytes of free space drive C a Turn on the computer allow it to boot up and insert the program disk into drive A The screen should show that drive C is the default by displaying for example the following press Enter to make the default i e Type install and press Enter All of the files on the program disk will then be put on hard disc C Remove the program disc to step c for instal
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28. 3849 3694 5641 5407 7433 7120 9225 8833 11017 10546 12809 12259 14601 13972 16393 15685 18185 17398 19977 19111 For films of thicknesses less than 400A or within 4004 of a periodic multiple the index will be fixed at 1 46 for oxides and 2 00 for nitrides Any other default index may be entered as prompted 7109 C 229S 3 9 01 S627 2 6014 1 1 5 1 6 14242 a 4 13 3 4 pua 26024 paspors sais WYuDOuUud GYVGNVLS sais 313 0 41773 59111 STANDARD PROGRAM NOTES 7109 C 229S STDS 3 11 L116S ELLIPSOMETER 11165 ELLIPSOMETER 5 45 Single layer with Time Option GC6S Single layer absorbing GC8S Two layer nonabsorbing 854 Four layer nonabsorbing GC9S Two layer absorbing GC9S3 Three layer absorbing 105 Two angle two layer absorbing 5 115 Polysilicon on Oxide Nitride on Silicon 5 125 Oxide on Polysilicon Oxide Nitride on Silicon PDS Psi and delta STDS RS 232 STDS and Optional Programs SINGLE POINT MEASUREMENTS TABLE OF CONTENTS INFORMATION ON THE ABOVE OPTIONAL PROGRAMS OPTIONAL PROGRAMS 4 6 1 4 on n n S 4 8 1 eee ww n 8 9 1 41001 eese o o o BS 1 0 0 IS AVAILABLE THROUGH GAERTNER SCIENTIFIC CORPORATION 7109 2295 L115C D WAFERSKAN
29. Angle of incidence 70 Polarizer drum angle POL 20 For the silicon nitride films the estimated index is N 2 00 NOTE To change any parameter below press SETUP F3 Any one of the following can be selected by using the corresponding key in the Film program menu bottom of Figure 3 1 Key Function F1 PRINT DISP This allows the choice of printed or displayed output F2 TMAX This activates the TableMax subprogram Section 2 F3 SETUP This allows the setup of the input parameters F4 SAMPLE The user enters identifying numbers and or letters F5 OXIDE This automatically fixes or measures index N NITRIDE This is the same as the above except for nitrides F7 N MEAS This calculates index N and thickness F8 FXD This fixes index N and calculates only thickness F9 LIST This gives a listing of all of the possible thicknesses periodic multiples F10 MENU This returns the main menu to the screen where the substrate or two angle subprogram can be selected 7109 2295 3 3 h E 5622 2 6011 40 0 1 435 4 pejoeJes 5 94 3 lulIN 5 oues paxij seuju49jep
30. 4 6 9 Example of an attempt to retrieve an out of mode file RED1 is WS Film Mode file and cannot be retrieved while working in the WS11A optional program Only files TEST1 TEST2 and TEST3 can be retrieved at this time 7109 C 230F Rev 4 6 10 1179 A93 J0 2 2 6014 gt SM M uopneoijipou viISM 1 9 amp PIANE td 9 d t i 32842 epow 01 uanjey 11 32245 44 5 3313105 91113 NVOISSSHVAM 28 11 VIISM 5 WNOILdO 11165 ELLIPSOMETER TABLE OF CONTENTS Unpacking Inspection EC Location Considerations Interconnections Ellipsometer and Computer Computer amp Printer Software Installation and Loading Computer Circuit Board Installation LIST OF FIGURES A D 7 109 2295 AC Power Plugs Interface 5 1 5 2 11165 System Interconnection Diagram 5 3 Ellipsometer Left and Rear View 5 4 IBM PS 1 Computer and Connections 5 5 5 6 A D Interface with Cable Adapter removed 5 0 INSTALLATION IBM COMPUTERS 597 ae eee BAK 5 6 5 7 05 8 1 8 5622 2 6011 e npou 4ez AJeue pue Ajquasse Jese uoeu uiijeu Duryoed 905
31. Azimuth P Ensure that it matches that which is displayed by the computer program Inaccurate incidence Ensure that the angle of both arms angle PHI match that which is displayed by the computer program Check the detents and tighten the knobs Sample table Check the tilt and table height misalignment 7 109 2295 7 4 5 4 5622 2 6011 JANNOSYHd 1 35 pesseJppe ue qoad siut LNAWNYLSNI AHL NOMWaY OL LdWALLV LON OG uon2es 295 DVIQ asn Aq 40 13NNOSH3d 9351835 eq pjnoys ue qoad 5 41 Z uonoes 295 DVIQ gt sJnilej Bulasasyo eq 40 2 sey siueu OVIG 195440 40129 epioud 10 1ueisisuoo2u 5 LINYA 3 318 5504 WOLdWAS ONILOOHSATANONL 71 1 318 1 334 3 0 41113 59111 331435 11165 ELLIPSOMETER SERVICE CAUTION For 90 Angle of incidence If the ellipsometer
32. D WAFERSKAN ELLIPSOMETER OPTIONAL PROGRAMS WS11A 4 0 WORKING IN THE ENGINEERING MODE continued Key F1 Pmtrs F2 Exe F3 SetupFiles F4 Sample F5 PrtON OFF F10 Exit Choose any option of the Engineering Mode in any order as needed Function Set or change the values of the parameters section 4 1 Execute a measurement with the current status of the parameters being displayed active set of parameters A menu choice is available between single point and wafer scan measurement section 1 2 of the WS instructions Save an active set of parameters or delete an existing set section 4 2 Assign a sample ID to a graphic screen This is a toggle function Press Menu Display Printer Response F5 PrtON F5 PrtOFF a Automatically print the measured value after each measurement during the Execution OR b When the current parameters are displayed press F5 PrtON choose the corresponding options from the F1 Pmtrs menu and press F10 Exit to print the parameters F5 PrtOFF F5 PrtON The printer is deactivated Terminate the Engineering Mode and return the WS11A Main Menu to the screen 4 1 Setting Parameters Use the F1 Pmtrs key to review and set change the sample parameter values The Engineering Mode menu is replaced by the Parameters menu when the F1 Pmtrs key is pressed Figure 4 6 4 7109 C 230F Rev 4 6 4 S 9 t 40 2 6011 99425 oj nueu
33. WS 3d 71 104 21 GaNunL ATIVANVW 2 us WHO N3ZluV Od KS 21 4 YOLVNNILLV YyaSVT 934 wu 559 d o z lt WAY 2 Wav 3714 104 59111 NOILdl2dSad 11165 ELLIPSOMETER DESCRIPTION 4 0 OPTICAL SYSTEM Continued A low power Class 11 laser light source is employed a helium neon laser having a beam wavelength of 632 8 nm The 632 8 nm red laser is in the fine of the optical axis and the beam passes through a polarizer prism passing through this prism the beam polarization is converted from circular to linear The reflected light with its polarization altered by the optical properties of the sample is cap tured by the Stokesmeter SM measurement head The four detector voltages of the Stokesmeter are then computer analyzed and converted into a measurement of the State of Polarization SOP of light of the reflected light 5 0 ELLIPSOMETER COMPONENTS The main components of the single wavelength 1116 ellipsometer are shown in Figure 1 2 5 1 Laser Assemblies A red laser with a fixed wavelength of 632 8 nm has an attenuator that reduces the laser power to Class which is for under one milliwatt built in quarter wave depolarizer in the laser out put produces a circular polarization of the beam NOTE When the beam attenuator subsection 5 2 is pulled out the laser beam strikes
34. entry is required in the initial film setup 2 Poly 4 default value 4 060 at 63284 3 Poly default value 0 049 at 63284 4 Oxide Thick2 fxd entry is required in the initial film setup 7109 C 230F Rev 4 6 2 79 40 2 2 6011 u q sanjea 4 5 jo apow 122194 1 9 g 144 5 aldues y sajlgdnjag g exg z SAW 4 1 uondo 12ej es SNLVLS S9A 3ulod elueD2 sunseay 00 58 sazisejog OO ZEL 00021 007051 0004 5590432 4 80 69 5 13 4 18 04 4 5 LNAWNULSNI 020 0 5 058 SN 415405 000 0 233 09851 PX3 ZIN 001 PXJ 2M2IUL 6 070 dxe JJ 090 PXJ JN 00 4 Ajod JO 111 54 04 991 40 5 4 e Jos sl 35 VIISM 9 amp 94n5j4 03 aejnuis s Aejdsip sanieA 49jeutPJed penunuo 3GOW ONIN33NION3 NI ONINYOM O t 31 30541113 0 25111 VLLSM TVNOILdO L115C
35. has Microspot Optics turn the table so that its notch lifting slot Is under the analyzer arm Move the table to the left and down so that neither Microspot Optic will touch the table when the arms are at 90 RED 632 8 nm LASER ELLIPSOMETER TIME LAG FUSES 80A 115 or 230V MICROSPOT STOP OPTIONAL GPIO SOCKET FOR THE CABLE TO THE COMPUTER The optional 200 mm dia table cannot be moved out of the way of the optional Microspot Optics Thus the arms cannot be set at 90 with both options Figure 7 6 Rear and left view of the L116S Ellipsometer 7109 C 229S 7 6 1 1 5622 2 6011 SW3idOSd LNAWNOIW YANLYAVS LINSNOD Fyn 11 4 NOILVUSIIVD ASNVD SIHL LNAWNSLSNI SIHL 40 LNAWNOIIV JHL LSnrqv OL ldWaillv LON NOILnYD 0 40 143 asn ayy ol 40144 2 2 uonoesqns peunsesw 1 ALON eaue ayy Suleyssous yo ay Aq payed ipul 75 2 Aq Aejdsip spla nuew jo 14 jo 401329195 g z A6 AL 291 st 40 2 3 4 94 j 4n220 ou pue uado aq pjnoys 4ejjnus 1958 164 sloN 5 4 9406 4 uwous Aq ued ule6 6
36. list screen DIRECTRY 00TTT Key Function F1 Store Store the active set of parameters to an external SETUP file to use later Only WS11A film mode files can be created and then used in the Production Mode with this WS11A optional program F3 Delete Delete any existing SETUP file in the list WS or any other optional program film mode i e WS6A WS8A etc F7 Up Roll the screen up The number of files in the list appears in the upper right corner Screen capacity is 14 files more files are available the legend more appears at bottom of the page F8 Down Roll the screen down F10 Exit Terminate the SETUP Files program and return the Engineering Mode menu to the screen 7109 C 230F Rev 8 6 8 6 9 t 6 nuew 294 u4njeJ pue epow eui 5 49uJ02 14611 ul 5 si 151 9u 5911 30 241 5 St uaauos 291 joy aq ues 1 5141 ul 1ueueJunseeu jo uojjnoexe 40 913 401135 VIISM 41 4 4062 2 6011 11 3 013 84 40 24 9 91419u 1J epow VILSM JO us942S 1541 S ur FST ej 40136 Jo
37. pallelsui 1 pae e uQ 19 5 uorsuedxe 4alnduwuoo e paeleas 5 adi 9 5 94nbi4 ul se saydepe Ppenunuo 32VdH3i1NI 3343 0 91173 59111 NOILVTIVLSNI 11165 ELLIPSOMETER OPTIONAL COMPONENTS TABLE OF CONTENTS Page Hand Positioning stages L116HXY6 and 1116 5 s e 6 1 1 Micrometer Positioning Stages L116MXY6 and L116MXY5 6 1 1 Fine Motion Height Adjustment 1117 6 1 1 Microspot Optics 1118 5 6 1 2 Interface 185232 Video Monitor L115VM 6 1 2 Wafer Handler L116WH 6 1 2 200 mm Sample Table 6 1 2 FIGURE 6 1 1 200 mm Sample Table Top View 6 1 3 7109 C 229S 6 0 OPTIONAL COMPONENTS L116S ELLIPSOMETER HAND POSITIONING STAGES L116HXY6 This stage accepts 6 inch samples and enables the sample table to be moved by hand in X Y and directions to facilitate measurement at any desired point on the sample surface The X and Y coordinates translation facilitates measurement on a rectangular or grid pattern zero 0 to 2 inch left to right translation X direction 1 inch in the Y direction from center and 1 32 inch in the direction Total rotational travel direction is 0
38. 01 0 uoiejo4 pue 49jue2 uonoeJip x eui ul Jeau 1 5141 e2ejuns ejdues uo lulod Aue ejqe1 ejdues jo Buiuonisod pue sldues pue ajdwes 4958 pue 043 2 5 snolJeA JO 15 044 Ajddns aamod 1 5 ay 10 4 eansoj oue Je21149A 51 5141 Ajddng jueunJajsu 78 5 pue pue jdwes jo 515502 f seq ui st jquesse 5141 5 55242 510442313 9 5 sJeieueJed sayoys 5 49 1460 JO dOS 0 pezAJPue 4ejnduoo 100 jo sjeubis juepiour enbijgo ye 346 noads 4noj Jo 6ullsisuoo 4919 e WS JUaWaunseay 4919 9 01S alnpoW Jez euy 6 5 lt 59111 NOI Ldl32saq 11165 ELLIPSOMETER
39. 3 Rear and left view of the 1 1165 Ellipsometer with the 6 inch diameter table and the 632 8 nm helium neon laser 1109 2295 5 6 1 8 5622 2 6014 511 pue gt 1 64 8 6 eanby4 OL 37872 AJIVAYALNI SOINOHLN3O JHL Od 133206 TaTWuvd YALAWOSdIT1Ia OL 149 4 LANDOS 71 2v OL WH313WOSdiTl3 59111 NOILYTIVLSNI 11165 ELLIPSOMETER INSTALLATION COMPUTER CIRCUIT BOARD INSTALLATION INTRODUCTION NOTE If the computer was supplied by Gaertner along with the L116S then the circuit boards men tioned here were already installed Ignore this and the next two pages These instructions for installing the A D and GPIB Interface Cards and Cable assemblies into the PS 1 computer for use with the 11165 Ellipsometer for tests A D INTERFACE CARD The A D Interface card with cable adapter is shown in Figure 5 5 This unit must be partially disassembled prior to installation in the computer Begin by removing the stand offs indicated in the Rear View of Figure 5 6 STAND OFFS FRONT VIEW Figure 5 5 Photograph of the A D Interface Card 7109 2295 5 8 6 5 5622 2 6011 saidepy aldeD eoejaeju Q V Jo 9 6 4 eina e LES 7e uejubn Ajwa 5 10 5 pue 9 qe 4
40. AND SET UP Gaertner Ellipsometer program software is supplied on two types of discs for use on the IBM PC and PS Series Computers The program software for the IBM computers are as follows PC and XT Computers are supplied on discs compatible with 360k byte 5 1 4 drive The IBM PS 1 Computer is supplied on discs compatable with a 1 4M byte 3 1 2 drive The AT Computer is supplied on discs compatible with 1 2M byte 5 1 4 drive This system is set up according to Section 5 Installation 1 1 Software installation and Loading See Software Installation and Loading in the Installation Section 5 of this manual 1 2 The Sample Stage or Table Alignment See Sample Table Vacuum and Alignment in the Operation Section 2 of this manual 1109 2295 3 1 5622 3 6011 013 ANAW 241 56844 uaa 52s ol 491 v nueu s 5841 445 el6ue sqns 1 415405 6460 595 2 1 4 40 24 714 uonounj 55944 pue Aeidsip 540 sosip ayy jjo ol ue 2SIP 4eujoue uo uo Aue yey os
41. DESCRIPTION 6 0 DETERMINATION OF PSI AND DELTA The state of polarization of the beam is determined by the relative amplitude amplitude ratio and the relative phase shift phase difference between the two component plane waves resolved from the electric field of the beam If the phase difference between the components is either 0 or 180 the beam is linearly polarized All other phase differences result in elliptical polarization When a monochromatic beam of polarized light strikes the surface of a sample the reflection of the light causes a change in the relative phases of the component plane waves and a change in the ratio of their amplitudes The angle DELTA 4 is defined as a phase difference PSI v is defined as the arctangent of the amplitude ratio The phase difference A and the amplitude ratio thus characterize the ellip tically polarized light reflected from the sample surface These parameters are used to calculate the optical constants of bare surfaces or substrates and if film covered the thickness and refractive index of the film The refractive index Nf is used to determine the physical com position of the film and in the case of transparent films to establish the magnitude of the period i e the thickness cycle before ellipsometric readings repeat Using measurement data obtained from the four detectors of the StokesMeter the computer calculates the Stokes parameters of the reflected light This informatio
42. JDVLIOA QHVOS 321IA33S 11165 ELLIPSOMETER SERVICE Beam Position On Target Alignment Screen Figure 7 5 Alignment Display DIAG 1109 2295 7 10
43. ST key F9 gives lower right of the screen the thickness and the eight smallest possible thicknesses with a given period example is this LISTING PERIOD 28194 264 5691 11118 2073 7500 12927 3882 9309 14736 1109 2295 3 5 9 6 5622 2 6011 5 wyd ejdsip 42 g uondo 152 95 WviDOHd amp 13 0 41773 SILVWOLNV S S 595 5975 59 HaNLH3VO 15 5415 3330 31173 59111 STANDARD PROGRAM STDS 1116 ELLIPSOMETER 2 2 SubS Substrate Press F2 SUBSTR when the main menu is displayed see subsection 2 0 Standard Program and sub program SubS is selected so that the optical constants PSI DEL real Ns and extinction ks of a bare substrate can be evaluated These constants are needed before making any film measurements Pressing MENU F5 enters the main menu The angle of incidence 709 is selected automatically Verify that the polarizer drum is at 20 e Angle of incidence PHI 709 Polarizer drum angle POL 20 Any one of the following can be selected by using the corresponding key Key Function F1 PRINT DISP Allows the choice of printed or displayed output F2 TMAX Activates the TableMax subprogram F3 PHI Allows change of angle of incidence to other than 70 F4 MEAS Instructs the ellipsometer and c
44. USER MANUAL MODEL L116S ELLIPSOMETER TABLE OF CONTENTS 1 DESCRIPTION Fe 23 Ne Son 3 STANDARD PROGRAM 4 OPTIONAL PROGRAMS INSTALLATION 6 OPTIONAL COMPONENTS 7109 2295 GAERTNER SCIENTIFIC CORPORATION 7 SERVICE 1201 West Wrightwood Avenue Chicago IL 60614 11165 ELLIPSOMETER DESCRIPTION TABLE OF CONTENTS Warranty NUI NS ORIATUR REN EW ae Je AST Laser Safety 1 1 0 Specifications 2 500 2 0 Abbreviations and Symbols ee ee ee ee om oe n 1 5 3 0 Introduction eee e eme oh m m m om 1 6 4 0 Optical System 1 6 5 0 Ellipsometer Components 1 8 5 1 Laser oce 5 2 21 84 5 3 Sample Monitor Assembly 1 9 5 4 Reference Sample 1 5 5 Analyzer We crues eb se DeL e Gals wt er e 5 6 Elect onic ae X ace o uec del 5 7 Instrument Power Supply 5 8 Sample Stage and Table 6 0 Determination of Psi and Delta 1 12 7 0 Standard Programs 1 13 LIST OF FIGURES 1 1 Optical System Functional Diagram s
45. able See pages 6 2 1 and 6 2 2 for detailed information 7109 C 229S 6 1 1 1 9 5622 2 6011 206 16 suJe Dunes 40 ieu AUe sny sl6ue 06 e 1e 195 eq Ady 164 OS swe ad 100 alqel siu 01 slqlssod you 131 51340 10450421 pue ajge 000 seu aejeuosdijje ue 1 310N slqel 514 30 e 9 4 ees 40 005 pue 051 ggz 001 92 40 SI alqel 49 48 siu 31dWVS 4 6 002 pue ueaj gt ajdwis st jo jo adAy 941 Jeau 513464 ou 6 Je pueH uo 31 gt P ol dn jo pepueijeun JalpueH 91171 2 HM9111 YATONVH J9jeuosdij e ue si Jolluou 5 JoOlluom e dues eui 1904 uo 51 U231IAs L W uy paepuejs uonippe ul 25 152 uo
46. analyzer optical or precision electro mechanical components Contact Gaertner Scientific Corporation for the repair or replacement of these items 3 1 Cleaning Interior cleaning of the ellipsometer i e the four detector measurement head monitor assembly and instrument power supply should not be needed These units are designed to keep foreign matter out When not being used the ellipsometer should be enclosed by the dust cover supplied with the instrument Exposed optical surfaces may be cleaned with a camel hair brush or clean dry compressed air not to exceed 5 PSI other external surfaces may be wiped clean using a soft lint free cloth If a solvent is needed a cloth dampened with wood or isopropyl alcohol is recom mended 7109 2295 2 10 11 2 5622 2 6014 5310 YMaLAWOSdI 113 59111 NOILVH3do 11165 ELLIPSOMETER 5105 STANDARD PROGRAM TABLE OF CONTENTS SUBSECTION PAGE 1 0 Introduction and set up 3 1 1 Software installation and loading 1 2 Sample stage or table alignment 2 0 Standard program 565 575 055 SubS 3 2 2 1 565 G5S Film subprogram 2 2 SubS Substrate 2 3 575 Two Angle LIST OF FIGURES 3 1 Program menu of standard film subprogram 3 1 Standard program chart woe tom oS s oo tm os n 5 3 10 7109 2295 3 0 STANDARD PROGRAM STDS L116S ELLIPSOMETER 1 0 INTRODUCTION
47. appears at the bottom of the screen Reference Figures 4 6 5 and 4 6 6 SETUP file TEST3 Solve Kf index Film parameters for the Polysilicon on Oxide or Nitride Poly Thick exp 500 Nf fxd 4 060 Kf exp 0 049 Oxide Thick2 fxd 100 Nf2 fxd 1 460 Kf2 fxd 0 000 Substrate Ns 3 850 Ks 0 020 INSTRUMENT PARAMETERS 5 Point WAFERSKAN PARAMETERS Wavelength A 6328 Plot Thickness Phi 70 00 Wafer diameter mm 150 00 Ambient 1 000 Outer meas dia mm 132 00 Polarizer Angle 45 00 Measure center point Yes STATUS Select film parameters 2 Poly Layer 3 0xide Thk Nitride Figure 4 6 5 Example of the Film Parameters option screen The second layer is an Oxide Key Function F2 Poly Layer Enter new value s for thickness refractive index and or absorption of the Poly Layer Top Layer F3 OxideThk Nitride Thk Enter new thickness for the second layer The F3 key label is changed automatically when the F4 key is toggled F4 Nitride Oxide Toggle function Change the second layer from Oxide to Nitride press 3Nitride or from Nitride to Oxide press Oxide F10 Exit Terminate the Film Parameters option and return the Parameters menu to the screen 7109 C 230F Rev 4 6 6 279 0 4062 2 6014 S 1948 5 5 Wily Jo ejduex3 9 9 4 4 01 JaAe 7 5
48. e 7109 C 229S 2 2 t 5622 2 6011 9 2 uo panulluo2 6 uses se uj peeJje jeuobeip jo e 1e os 2 0 sqoux 041403 ajdweg euo sJteusso42 06 30 snooj ysadueys 404 Jo Burysnd jsn pe pue 4 40 j041u02 aldues IlquessY 4olluoN sldues oyu slqel ejdues 29 uesoo 4 esou s 1 p dund wnnoea uo uang 17015 uol4asul EIA uo e Bulqaosqeuou 194 40 ejdues e2ue42j24 e ind 218 5 1 7 dais Buiuuibaq eanpe oad siu g z 9 ves 10 yng JajeA Jepun 115 ayy Ajuo 4919uosdijje Y pe12euuoo 51 ug 1243 19915 ssayuleys peay 48 1X08 04
49. ejduex3 g g g MX3 0l uMoq g 3 4 1 uondo euo lt lt lt lt 1517 913 20 pug gt gt gt gt VIISM vivd 80135 8661 90 21 VLLSM 35 5661 90 21 VIISM Viva dnias 5661 90 21 SM 135 5661 22 50 SM 35 5661 24 40 4 uodo 22015 1531 21631 11631 1094 aueu uo 59114 5 111002 259 SM se awes s eMujed apoy spon uononpoag ul 1 9 eJ4nBi4 nuay Ady 4 14 55944 NI ONINYOM 075 4 28111 VLLSM SWV3IDOSHd TVNOILdO L115C D WAFERSKAN ELLIPSOMETER OPTIONAL PROGRAMS WS11A 5 0 WORKING IN THE PRODUCTION MODE continued Disc Drive C 00TTT 5 files Files currently on disc File name Date Store Option Film Mode 05 22 1995 SETUP WS RED2 05 22 1995 ws TEST 12 06 1995 SETUP DATA WS11A TEST2 12 06 1995 SETUP DATA WS11A TEST3 12 06 1995 SETUP DATA WS11A lt lt lt lt End of File List gt gt gt gt Filename to retrieve for a WS11A only Not a WS11A file ENTER key 5 retry To Exit press just lt ENTER gt key Figure
50. ling any optional programs b NOTE The following occur during the software installation 1 A directory is created c gsc 2 of the driver and executable files are copied in that directory 3 Autoexec bat and config sys files on c root directory are created If the autoexec bat and config sys files already exist on drive it copies them to autoexec bak and config bak before installing new ones OPTIONAL PROGRAM INSTALLATION If one or more optional programs has been ordered place each optional program disc into drive A The default drive should be A it is not type a and press Enter so that A is the default Type install and press Enter Remove the program disc 7109 C 229S 5 4 8 8 5622 2 6011 L Sd Wal 994 SI 59117 Ajddns 49 499 Jey 4910 3 59111 Z S aanbig 16 2 3 8011 319YD SOINOHIN3O 00294 DAN a 59111 33130591113 G3HVOHA3 1 54 8 19101 2 37873 1 1 YALNdWOD 01393 041109 LINQ AVIdSIG Wgl 417113 59111 NOILVTIVLSNI 11165 ELLIPSOMETER INSTALLATION RED 632 8 nm LASER MICROSPOT STOP ELLIPSOMETER SLOW BLOW FUSE 75A 115 or 230 2 ey P fx GPIO SOCKET FOR THE CABLE TO THE COMPUTER TO AN AC OUTLET Figure 5
51. losl 1 asAlela ajqissod jo 5151 g uo 4 15 1 271 sis eue JelnduoD eui Aq peau pue sjeubis ou Ajjeulj Ag ol 4e1nduoo Aq pajdwes pejdues 5 5141 5 5 pue 40 4 66141 eptAoad linoJ4I2 sasind 0 1 02 3161 1 4 406 4 ees ploH pue ajdwes jo 01 pue palJlldue 4e1ewsexois sebDej oA 40129 ep 4noj y 5 6 171 s40449 403 4 40 51 14 91515402401 ou Aq 5 5 s uonounjjeu pue
52. n 4 0 OPTICAL SYSTEM Reference Figure 1 1 Ellipsometric measurements involve illuminating the surface of a sample wafer with monochromatic light of a known wavelength and polarization and then analyzing the polarization of the reflected light The light is projected along a fixed path or angle of incidence 4 This ellipsometer has provisions for precise pin located settings of the angle of incidence at 30 459 509 559 609 659 70 75 80 or 90 For measurement purposes the angle of reflection is always set at the same angle as the angle of incidence Since the two angles are always equal it is usual to refer to both angles as angles of incidence With the angles properly set their respective optical axes intersect the vertical center line of the plane of incidence at the same point ample table is raised or lowered so that the intersection of the incidence an eflective optical axes occurs on the sample surface and that sample surface is normal to the rtical centerline of the plane of incidence This ensures that the light from the polarizer aperture is reflected from the sample surface into the analyzer aperture 7109 C 229S 1 6 1 1 5622 6011 9 5 40 waysds Jeondo eui s 5141 1 1 840614 NO 314 4 5 93713703 28 g 215 04 33015 ATIV3NIT
53. n coupled with the known incident state of polarization is used to determine the surface parameters PSI and DELTA 7 109 2295 1 12 1 1 15 5 yo sexepul Sy uonounxe pue SN v 4 154 Indino uiu eq 51461500 95941 12415 jo sluelsuoo 1140 siu dgivalsHfls ai6ue 40 Dunsi pue 5 1 1 uoee peseq 13 jo ssauyoldq 3 s04 pue 205 38 sluaua nseau 1 5405 uoollls wji uoollls Jo 5592 214 Y 5 8141 310NV 01 Ajuo yo ue pejen ulld ol 4811 15 1 5141 21412345 uondo 1 4 pue V 154 sseuxorur jnding sleJ3qns 14021115 e uo aplJIu 5 40 Bulqaosqeuou 4 4846 al6
54. n the two arms are not at the same angle of incidence 2 1 Standard and Optional Programs Valid measurements are dependent upon the selection of a program applicable to the sample being measured and correct interaction by the user with the computer The standard programs supplied with the ellipsometer are in the Standard Programs section The optional programs available by spe cial order are identified in the Optional Programs section first page 7109 2295 2 8 6 4 56260 2 6011 9 lndlno BHulAejdsip dayndwoy 6 2 oJn6jj Jupe pue 0 55844 m jo ujod Ajuo asp AuAnisues 55844 XVWLI pue 55944 ejdues mau 404 seje2ipui 14614 eur alqel Jo 1111 9 5 318 1 YALIWOSdIT14 59111 NOIL 40 11165 ELLIPSOMETER OPERATION 3 0 USER MAINTENANCE These maintenance instructions are operator level procedures for routine servicing See the Service Section regarding trouble analysis adjustment and replacement qualified service personne only of defective components Instructions are not included for the replacement of any laser polar izer
55. omputer to make a meas urement with the given input parameters F5 MENU Terminates the Substrate subprogram and returns the program to the main menu F6 SAMPLE Allows identifying numbers and or letters to be entered F7 POLRZR Allows the input of the polarizer drum setting nor mally 20 for the best overall sensitivity By setting the polarizer drum close to the value of PSI sensitivity and stability can be increased At 709 one substrate produced these measurements middle of the screen SAMPLE Sss Ns Ks PSI DEL 3 791 0 153 9 99 173 21 1109 2295 3 7 8 6 5622 2 6011 0t fiN3We 71341548 15114 d idWVS9 iJNS 3GIXOE XVWlZ LNIYdL 89c 892 SS3NJDIHL G3HOLVW 00072 JN 00072 JN 05 1Hd 0 uuu 5 49942 jo 4 44 j se Aejdsip aplayju e jo ue 51 4 01 00006 pue 0 se 5 sasseuyi5ldl 91915504 pue por4ed e uiui BABY 941 sujj JO sseuxoiuj JEN pue sojeJjs 405 405115 uo Swi 14 jo 0 12 3 uj el6ue Jesn gt
56. program instructions such as STDS in the Standard Programs Section for the loading instructions and use the Film program or subprogram Proceed to make a measurement Compare the thickness data measurement with previously acquired sample thickness data The com pared data should be within 33 10 3 7109 2295 2 6 1 2 5672 2 601 pue abeyg ejdues 29111 t z 940614 1 NOILVISNVHL X 39 16 5 1 NOILVIOu f yat pap ape er o ogg A 5 1111 dWV12 5 lN3WIS fQV 1 5 1111 LSnrqv NOILISOd TWOILYSA N313WOSdITI3 59111 NOILV YJdO 11165 ELLIPSOMETER 2 0 MEASUREMENT PROCEDURE Place the sample wafer on the sample table load the program software into the computer and tiate the measurements Once the measurements are started press the keys as the screen and instructions request then measurements are automatic Some measurements can be made after a 15 minute ellipsometer warmup the stability of the laser improves after a few hours which is better for important measurements If the ellipsometer is in use several times a day the laser should operate continuously WARNING To avoid the hazard of laser beam disper sion the beam attenuator must be closed while you adjust the polarizer or ana lyzer arm or whe
57. t ew tee 1 2 Ellipsometer Components Identification Right Front 1 10 1 1 Standard and Microspot Beam Dimensions the Sample Wafer 1 4 1109 2295 1 0 1 1 5622 09 601 SHOVWYG TVILNSNDASNOD 303 LON TIVHS xY3aNLJ3YD 35043 4 YVINDILEVd 03 ALITIAVLINS ANY ALINISVELNVHOYAW ALNVHNVM 03114441 OL GALIWIT LON LNG ONIGNTONI 40 355334 3 SI H3HLO 1 SIHL Q333A02D LON 33V YANLYAVD AB 43114405 LON 5 dO 351 JHL ONIGNIONI JHL 40 ASNSIW JHL GALVL ISS3O3N 33V LVHL SulvddH GOludd JHL 1 SAAOUd 1 41003 YO NOILdO LV TUM WdlfidWOO JHL SNOILIGNOD 15 YISHL yd3ynLDvd NNVW YALNdWOD JHL A8 Q31NV3Gi M SI 3430 41773 59111 JHL HLIM 04114405 YSLNdWOD 803 dIHSNVWAYOM 54234344 5311 LON 33V 13 05434 321AW3S JHL 51502 ONIDGOT 5 ONIddIHS 71602 ON LV H3N133VO 9319343095 1 51424434 ANY 1 ALYA JHL 031
58. t power supply and is labeled INPUT POWER The ac line cable for the helium cadmium laser assembly is at the rear of the laser power supply CAUTION Verify that the power switches on all of the components are OFF before connecting or disconnecting the interface cabling An interconnection diagram for the ellipsometer is shown in Figure 5 2 Ellipsometer and Computer See Figure 5 3 ellipsometer rear view and Figure 5 4 IBM PS 1 computer See Figure 5 5 A D interface card and Figure 5 6 A D interface card with cable adapter removed 7109 C 229S 5 2 6 8 5622 2 6011 uasJ6 s uolyelnsul Ayajes 464 3 s 5 413 ieJ3neN sl 5 10u 40 056 teue Joloauuoo pue eseud ejDuis 3LON 1 6 94nBI4 pue eiqe4y 211 adoung pue 4 3 3 une 333 Sn 40 3n puejeoz M N pue 9 454 pue sale1S 4 pue elsapouy 4
59. the sample wafer or table surface both the polarizer and analyzer arms must be at the same angle of incidence Then the ellipsometer can make measurements and will be safe to work with 5 2 Polarizer Reference Figures 1 1 and 1 2 Polarizer Drum and Prism The polarizer prism mounted in the polarizer drum is a Glan Thompson calcite prism that converts the circularly polarized light from the laser to linearly polarized light Any given angle of prism orientation from 0 to 360 can be set by adjusting the polarizer drum The angle can be set to within tenths of a degree by setting a number in whole degrees indicated on the drum just below zero 0 on the 0 to 1 vernier scale and then aligning a gra duation on the vernier scale to one on the drum scale For automatic measurements the user should fix the polarizer drum at exactly 20 by inserting the locking screw into the drum s detent 7 109 2295 1 8 6 1 5622 2 6011 yuawysnipe ui 5 JI49A ol 40 pesn ajdwes 5 Jo 55892044 uj ejdues ol pesn eq plnous ejdues J4ejeuosdi e petllddns 08 1 jo sseuxotui ul epixo uooj is JeKe ejDuis
60. to 3609 If the white plastic retainers are removed from the table translation in the Y direction is increased to 1 inch L116HXY5 This stage is identical to the L116HXY6 stage except that this table will allow measure ments on samples 5 inches in diameter or less The front to back translation Y direction is 1 inch from the center MICROMETER POSITIONING STAGES L116MXY6 This stage is identical to the L116HXY6 stage except micrometer thimbles are added to allow fine motion translation in the X and Y directions to facilitate positioning within rectangular scribe lines One division on the thimble equals 0 001 inch This stage 15 especially useful with the Microspot Optics L116MS accessory L116MXY5 This stage is identical to the L116MXY6 stage except that this will allow measurements sample wafers no greater than 5 inches in diameter FINE MOTION HEIGHT ADJUSTMENT 1 117 This feature may be added to any type of sample stage and consists of a rotatable inclined plane acting through a transfer plate and the standard height vertical position adjustment to raise or lower the table 0 010 inch maximum from the mid position reference after setting the standard vertical position One half turn of the knob moves the table 0 010 inch The knob is at the mid position when the center line of the reference hole on the knob is at the centerline of the table clamp screw A clockwise rotation of the knob raises the table CCW lowers the t
61. ul6ue4olne y sadoud uleD 49111 4 271 LVG HnD NAVA peueu ur 5 51 SIUL eanseeu ol 4 55944 o4ez uou 5 Aue 000 0 pinoys Jellnus 1958 5 Aq 19530 7 1 Aq Aejdsip nuew jo 24 uonoejes quawysn py 1953JO 0492 40 1 peAe dsip 4 94n514 nuaw 6uluun4 uodn pie se pesn 5 514 si perjddns u q seu 3X3 DVIJd 1 5 v SDILSONDVIGC 072 331305 dITIA 59111 35143435 11165 ELLIPSOMETER SERVICE THE STOKESMETER kkkk MAIN MENU kkkkk F1 ALIGNMENT DISPLAY F2 TEST AND DISPLAY A D BOARD OUTPUTS F3 EXIT THIS PROGRAM Gaertner Scientific Corporation 1992 Ver 1 0 Figure 7 3 Diagnostic Program Main Menu 7109 C 229S 7 8 405495 401115043 4032 Jnod 313 0 31113 59111 6 2 5622 3 6014 Dviq sindingo paeog Aejdsig pue 1691 t 4 eanby4 ying zj 10984400 x4eg e4nseew 14 AV1dSIG
62. uls e jo xapul 9AH2e4je4 pue sauluJalap 5141 WTId S620 2 6014 5406 515 495 50 9 400 659111 pue 54111 4304 40 54 5 559 5 5 595 165 1utod ejbuis Wd ue sey paliddns st 5015 5 1 141 2534 WviDONd QHVQNVJLS 01 343 0 41113 59111 NOILdI32S3q 11165 ELLIPSOMETER SUBSECTION 1 0 Premeasurement Setup 1 1 Setting the Angle of Incidence 1 2 Turn on and Warmup TABLE 1 3 Sample Table Vacuum and Alignment 2 0 Measurement Procedure 2 1 Standard and Optional Programs 3 0 User Maintenance 3 1 Cleaning LIST OF FIGURES 2 1 L116S Ellipsometer Rear View 2 2 Ellipsometer Controls and Indicators 2 3 150 mm Diameter Table 2 4 L116S Sample Stage and Table 2 5 TableMax Display Screen 7109 C 229S 5 2 1 2 1 2 8 2 3 2 10 2 10 2 2 2 4 1 2 5620 2 6011 alqe1 206 12 195 JOUURD 5104504218 158 ayy 1501 ysiuayse 5 2104 jo 06 12 21390
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