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TV 301 Navigator - Agilent Technologies

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1. Figure 54 For ConFlat flange connections we recommend using Agilent hardware To facilitate assembly and dismantling apply Felpro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Attach the units and tighten each one in turn Repeat the sequential tightening until the flange faces meet Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock TV 301 Navigator User Manual 87 900 946 01 M 269 282 17 Technical Information TV 301Controller Installation Connection Configurations WITH ISO CLAMP WITH BOLT MB WITH BOLT M8 ISO 100 e ISO ROT FLANGE CUSTOM MADE 150 ROT FLANGE CUSTOM MADE ISO 100 180 ROT FLANGE CUSTOM MADE WITH BOLT MIO Ee gt ISO 100 d WITH BOLT MIO BASEPLATE WITH TAPPED HOLE N CFF 67 A 1 i 150 160 180 ROT FLANGE i CUSTOM MADE n AP ISO 160
2. TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 27 Window N 206 Bit Description 250 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Inlet Screen Installation Figure 28 Figure 29 The inlet screens mod 969 9302 and 969 9303 prevent the blades of the pump from being dam aged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure TV 301 Navigator User Manual 87 900 946 01 M 251 262 17 Technical Information Inlet Screen Installation Figure 30 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 31 252 282 TV 301 Navigator User Manual 87 900 946 01 M 17 Technical Information The following figure shows the overall flange di mensions with the protection screen fitted on pump with ISO flange and pump with CFF flange CFF 8 150 160 mi p i ESET mm FF T x L sat lt IME m inches Figure 32 253 282 TV 301 Navigator User Manual 87 900 946
3. Figure 21 Case 1 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Customers device device Customers 24 Vdc x Controller 5 Vdc 24 Vdc Controller 5 Vdc Figure 22 Case 2 with relay utilisation TV 301 Navigator User Manual 87 900 946 01 M 237 282 17 Technical Information How to Connect the Open Collector Inputs of the Controller 24 Vdc Customer s i device ET N Controller PNP N 5 Vdc EE JAK 24 Vdc ole Controller Customer s device pb 5 Vde JA K NPN K Figure 23 Case 2 with transistor utilisation 238 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the related simplified circuit of the controller The figure example refers to the programmable set point signal on pins 11 and 9 JS Controller 8 15 15 Figure 24 J6 Serial Figure 25 9pin connector This is a 9 pin D type serial input output connector to control via a
4. TV 301 Navigator User Manual 87 900 946 01 M 15 282 1 Istruzioni per uso Informazioni Generali Guesto manuale utilizza le seguenti convenzioni Pym mli messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni al apparecchiatura OVA ALIN messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Le note contengono informazioni importanti estrapolate dal testo 16 282 TV 301 Navigator User Manual 87 900 946 01 M Istruzioni per l uso 1 Immagazzinamento Per garantire il massimo livello di funzionalit ed affidabilit delle pompe Turbomolecolari Agilent devono essere osservate le seguenti prescrizioni a durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa da 0 a 95 non condensante a il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta a il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione NYHA Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre reinviare la pompa in fabbrica Per ogni informazione si prega di contattare il loca
5. W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent kt ry pozwoli na uzyskanie zregenerowanego systemu w zastepstwie uszkodzonego systemu Przed wysytka systemu do konstruktora celem naprawy lub advanced exchange service nale y obowi zkowo wype ni i przekaza do miejscowego biura sprzeda y kart Bezpiecze stwo i Zdrowie za czon do niniejszej instrukcji Jeden egzemplarz karty musi by w o ony do opakowania systemu przed jego wysy k 168 282 Je eli pompa musi by poddana rozbi rce rzyst pi do jej eliminacji zgodnie z obowi zuj cymi krajowymi normami w meritum sprawy TV 301 Navigator User Manual 87 900 946 01 M Podrecznik Instrukcji 12 Przetworstwo odpadow Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEF Uzyty ponizej symbol jest zgodny Z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki zroznicowanej Dlatego tez poleca sie uzytkownikowi po uprzedniej weryfikacji terminu i warunkow zawartych w kontrakcie sprzedazy nawiazac kontakt z dostawca lub sprzedawca urzadzenia w celu uruchomienia procesu zbiorki i przerobu TV 301 Navigator User Manual 87 900 946 01 M 169 282 12 Podreczni
6. pon I I un l l l l Figure 38 Model 969 9337 Ira N EN Figure 39 Model 969 9347 258 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 CAUTION The items of the plastic model kit must be assembled as shown in the following figure _ Figure 40 The assembled kit must be screwed into the suitable holes of the pump body with a recommended closing torque of 5 Nm The metallic model is assembled as shown in the figure Figure 41 TV 301 Navigator User Manual 87 900 946 01 M 259 282 17 Technical Information Water Cooling Kit Installation Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles These hoses must be held on the respective nozzles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 10 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 1 h The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to
7. 1 ABY BASEPLATE WITH TAPPED HOLE L y Figure 55 Connection B Fore Vacuum Pump A flange KF 16 NW is available to connect the Turbo V301 pump to the forevacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The Turbo V 301 pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil back streaming 210 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Connection C Electrical Figure 56 The turbopump is connected to the controller through an 6 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KQ resistance at 25 C and pin E is connected to the pump ground If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply TV 301 Navigator User Manual 87 900 946 01 M 271 282 17 Technical Information Pump Used with Corrosive Gases Pump Used with Corrosive Gases To pre
8. 10 Ohjek sikirja Varastointi T m k sikirja k ytt seuraavanlaisia merkint j Huomio merkinn t varoittavat toimenpiteist joiden laiminly nti voi johtaa laitteen vaurioitumiseen VOS Varoitus merkint jen teht v n on kiinnitt k ytt j n huomio erityisiin toimintatapoihin joiden virheellinen suorittaminen voi aiheuttaa vakavia henkil vahinkoja Huomiot sis lt v t t rke tekstist otettua tietoa Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C a Suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st Jos varastointiaika on jostain syyst pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta 136 282 TV 301 Navigator User Manual 87 900 946 01 M Ohjek sikirja 10 Valmistelut asennusta varten TV 301 Navigator toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pak
9. Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle Ennen pumpun l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla TV 301 Navigator User Manual 87 900 946 01 M 143 282 10 Ohjek sikirja H vitt minen H vitt minen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot 144 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual 11 Felhaszn l i K zik nyv
10. Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 A Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A O Non Billable L Billable amm New PO hard copy must be submitted with this form 3B exchange Repair upgrade Consignment Demo calibration Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this reguirement presents a problem The eguipment listed above check one e HA
11. To install the vent valve unscrew and remove the threaded plug see figure below Figure 46 Screw the flange mod 969 9108 on the pump taking care of the oring right position Assemble the seal ring and lock the vent device in position using the KF klamp Figure 47 TV 301 Navigator User Manual 87 900 946 01 M 263 282 17 Technical Information Vibration Isolator Installation Vibration Isolator Installation Four vibration isolators for ISO and CFF inlet flange version pumps are available as accessories The four model part numbers are the following model 969 9344 for ISO 100 flange model 969 9345 for ISO 160 flange model 969 9334 for CFF 6 flange model 969 9335 for CFF 8 flange They typically reduce the vibration transmitted from the TV 301 Navigator to the system by a factor of 20 Please refer to the relevant instruction manual Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure Figure 48 264 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 and then screw the gas purge valve with a torgue of 2 5 Nm as shown in the following figure Figure 49 Serial Cable Installat
12. 0x6 The command execution has been successfully completed NACK 1 byte 0x15 The command execu tion has been failed Unknown 1 byte 0x32 The specified window in the Window command is not a valid window Data Type Error 1 byte 0x33 The data type specified in the command Logic Numeric or Alphanu meric is not accorded with the specified Win dow Out of Range 1 byte 0x34 The value expressed during a write command is out of the range value of the specified window Win Disabled 1 byte 0x35 The specified window is Read Only or temporarily disabled for ex ample you can t write the Soft Start when the Pump is running 244 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Examples Command START Source PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC TV 301 Navigator User Manual 87 900 946 01 M 245 282 17 Technical Information RS 232 RS 485 communication description Command SOFT START ON Source PC Destination Controll
13. C do 70 C obmo je relativne vla nosti O do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja POZOR e zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum 198 282 TV 301 Navigator User Manual 87 900 946 01 M Priro nik za Navodila 15 Priprava za monta o TV 301 Navigator je dobavljen v posebni za itni embala i Ce je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne stresajte Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Slika 1 Normalna izpostavljenost na okolje ne more po kodovati naprave TV 301 Navigator Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom TV 301 Navigator User Manual 87 900 946 01 M 199 282 15 Priro nik za Navodila Monta a Monta a POZOR Lepljiv in za itni p
14. Vent Figure 14 P3 Vent This is a dedicated 24 Vdc connector to control the optional vent valve TV 301 Navigator User Manual 87 900 946 01 M 229 282 17 Technical Information Interconnections P5 External Fan COMMON 24VDC MAX 150mA Figure 15 External fan This is a dedicated 24 Vdc connector to supply the optional external fan J5 In Out Figure 16 In Out This connector carries all the input and output sig nals to remote control the TV 301 Navigator It is a 15 pins D type connector the available sig nals are detailed in the table the following paragraphs describe the signal characteristics and use 230 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Tab 4 Signal characteristics and use PIN N SIGNAL NAME IN OUTPUT 1 Start Stop In 2 Start Stop In 3 Interlock In 4 Interlock In 5 Speed setting In 6 Speed setting In 7 Soft start In 8 Soft start In 9 24 vdc Out 10 Spare 1 Programmable set point Out 12 Spare 13 Fault output Out 14 Programmable analog signal Out 15 e Ground Out e Programmable analog signal Signal Description Start Stop input signal to start or stop the pump With the supplied cover
15. ei tiivist v Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest TV 301 Navigator User Manual 87 900 946 01 M Ohjek sikirja 10 TV 301 Navigator tulee kytke p pumppuun ks Technical Information liitteen kaaviota TV 301 Navigator voidaan asentaa mihin tahansa asentoon Kiinnitt k TV 301 Navigator vakaaseen asentoon liitt m ll turbopumpun sis ntulolaippa kiinte n vastalaippaan joka kest 1000 Nm n momentin akselinsa ymp ri Esimerkiksi laippa ISO 100 K voidaan kiinnitt suurta rasitusta kest vill ter spuristimilla tyyppi Agilent IC 63250 DCMZ Seuraavassa taulukossa on lueteltu tarvittavat puristimet IC 63250 DCMZ jokaista laippakokoa kohti sek vaadittava kiristysmomentti Tab 1 LAIPPA KIINNIKE MAA RA KIRISTYS MOMENTTI ISO 100K Kaksoiskiinnike kierteitys M10 4 22 Nm ISO 160K Kaksoiskiinnike kierteitys M10 4 22 Nm Turbopumppu ConFlat sis ntulolaipalla tulee kiinnitt tyhji kammioon sopivien Agilentin mekaanisten varusteiden avulla Lis tietoja l ytyy Technical Information liitteest TV 301 Navigatoria ei voida kiinnitt perustansa kautta HUOMIO TV 301 Navigator kuuluu toiseen EN 61010 1 s nn sten mukaiseen asennusluokkaan tai ylij nniteluokkaan Kytke laite t m n vuoksi s hk verkkoon joka t ytt t m n luokan
16. limination conform ment aux r glementations nationales concernant la gestion des d chets TV 301 Navigator User Manual 87 900 946 01 M Mode d emploi 3 Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut TV 301 Navigator User Manual 87 900 946 01 M 53 282 3 Mode emploi Mise au rebut 54 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual A Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 56 Informaci n general 56 Almacenamiento 59 Preparaci n para la instalaci n 60 Instalaci n 61 Uso 63 Encendido y Uso del TV 301 Navigator 64 Parada del TV 301 Navigator 65 Parada de Emergencia 65 Mantenimiento 66 Eliminaci n 67 Traducci n de las instrucciones originales GEB Agilent Technologies 55 282 4 Manual de istrucciones
17. ndingsf rende dele Kontroll r at anordningen der er tilsluttet TV 301 Navigator har en passende isolering Dette g lder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudstyret TV 301 Navigator User Manual 87 900 946 01 M 103 282 7 Istruktionsbog Anvendelse Anvendelse ADVARSEL Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet b r samtlige elektriske og pneumatiske tilslutninger udf res I forbindelse med opvarmning af vakuumkammeret m indl bsflangens temperatur ikke overstige 120 C Pumpen m aldrig aktiveres hvis indl bsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen R r aldrig turbopumpen eller dens tilbeh r i forbindelse med opvarmningsprocedurerne Den h je temperatur kan resultere i skade p personer FORSIGTIG Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller delgasser der ikke indeholder st v eller faste partikler Indgangstrykket ved den specielle d r skal v re mindre end 2 bar over atmosf risk tryk I forbindelse med pumpning af aggressive gasser er disse pumper udstyret med en d r igennem hvilken det er n dvendigt at forsyne pumpen med del
18. rpalko na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je prilo en navodilom in ga poslate lokalni prodajni pisarni Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uni iti v skladu z dolo enimi nacionalnimi standardi Odlaganje opadkov Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov ele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe 204 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps General Information 207 Storage 208 Preparation for Installation 209 Installation 210 Use 212 Switching on and Use of TV 301 Navigator TV 301 Navigator Switching off 213 Emergency Stop 213 Maintenance 214 Disposal 215 Original Instructions XE Agilent Technologies 206 213 205 282 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as de
19. servis firmy Agilent kter m e dodat n hradn repasovanou vyv vu v m nou za porouchanou Pred odesl nim vyv vy v robci na opravu nebo v m nu za repasovan kus vypl te list Zdrav a bezpe nost p ilo en k tomuto n vodu a ode lete ho do kancel e m stn ho prodejn ho odd len Pred odesl n m pribalte k za zen kopii tohoto listu Pokud se m v v va vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami TV 301 Navigator User Manual 87 900 946 01 M 181 282 13 N vod k Pou it Likvidace Likvidace V znam loga WEEE nach zej c ho se na t tku N e uveden symbol odpov d sm rnic m CE pojmenovanym WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi domacimi nebo pr myslov mi odpady ale je nutno ho p edat do patri nych provozn ch sb ren kde mus b t tr d n a likvidov n odd len od m stsk ho odpadu U ivateli kter mini v robek likvidovat doporu ujeme aby se nakontaktoval pr mo s v robcem nebo prodejcem kter se po pat i n m prov en terminu a smluvn ch podminek postar o kompletn likvidaci uveden ho v robku 182 282 TV 301 Navigator User Manual 87 900 946 01 M N vod na Obsluhu 14 Likvidace e e e e e e e e oo 00 0 14 0 N vod na Obsluhu e a e E Bezpe nostn pokyny pre Turb
20. tani maxim lis nyom s 2 bar a l gk ri nyom s felett a h m rs klet 5 C t l 35 C ig l sd a nyom s h m rs klet diagramot a Technical Information f ggel kben relativ p ratartalom 0 95 nem kondenz l M gneses mez k jelenl t ben a szivatty t v deni kell ferrom gneses pajzs seg ts g vel R szletes inform ci rt l sd Technical Information A TV 301 Navigatort els dleges szivatty hoz kell csatlakoztatni l sd Technical Information TV 301 Navigator User Manual 87 900 946 01 M Felhaszn l i K zik nyv 11 A TV 301 Navigator b rmely helyzetben telep thet R gz tse a TV 301 Navigatort stabil helyzetben a turb szivatty bemeneti karim j t egy r gz tett ellenkarim ra csatlakoztatva amely k pes ellen llni 1000 Nm tengely k r li nyomat knak P ld ul az ISO 100 K karima r gz thet nagy teherb r s ac lkapcsokkal mint az IC 63250 DCMZ Agilent t pus A k vetkez t bl zat mindegyik karimam rethez megmutatja az IC 63250 DCMZ kapcsok sz ks ges sz m t s a hozz tartoz r gz t nyomat kot Tab 1 KARIMA ROGZITO ESZK Z N R GZ TO NYOMAT K ISO 100 K M10 kapcsok 4 22 Nm ISO 160 K M10 kapcsok 4 22 Nm A ConFlat bemeneti karim s turb szivatty t a megfelel Agilent hardverrel kell r gz teni a v kuumkamr hoz R szletes le r s rt l sd Technical Information A TV 301 Navigator nem r gz thet az a
21. verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacu m in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming Figuur 1 De TV 301 Navigator kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen 88 282 TV 301 Navigator User Manual 87 900 946 01 M Bedrijfshandleiding 6 Installatie a ve pile Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden Figuur 2 De pomp mag niet geinstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met ex plosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig Zijn max druk 2 bar boven de atmosferische druk temperatuur van 5 C tot 35 C zie grafiek in de bijlage Technical Information relatieve vochtigheid 0 95 niet condenserend In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd w
22. w odpowiedi wlot poprzez kt ry nale y dostarczy pompie przep yw oboj tnego gazu Azot Argon dla zabezpieczenia o ysk Patrz dodatek Technical Information Kiedy pompa jest stosowana do pompowania gaz w toksycznych atwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa pompy w obecno ci gaz w wybuchowych TV 301 Navigator User Manual 87 900 946 01 M 165 282 12 Podrecznik Instrukcji Uzytkowanie 166 282 Wlaczenie i Uzytkowanie systemu TV 301 Navigator Aby wtaczy TV 301 Navigator wystarczy dostarczy napiecie zasilania Wbudowany sterownik rozpoznaje automatycznie obecno sygna w interlock u i uruchomienia i uruchamia pomp Tryb Soft Start przewidziano w celu w czenia pompy po d u szym okresie postoju Aby mo liwe by o uruchomienie przy aktywnym Soft Start nale y w czy w w tryb poprzez oprogramowanie patrz paragraf RS 232 485 COMMUNICATION DESCRIPTION w dodatku Technical Information Zielona dioda led znajdujaca sie na panelu podstawy TV 301 Navigator wskazuje z cz stotliwo ci w asnego migania stan operacyjny systemu a Za wiecona na stale pompa znajduje sie w normalnych obrotach miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie Waiting for interlock a miga szybko okres 200 ms stan b du TV 301 Navigator User Ma
23. za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopravn nym z sahem do za zen nebo jakoukoli innost ktera je v rozporu s pokyny uveden mi v pr slu n ch st tn ch norm ch Vyv va TV 301 Navigator je integrovan syst m s turbomolekul rn v v vou a p slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Zarizeni m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic Cerp n zaji uje velmi rychl turb na max 56000 ot min poh n n vysoce v konn m trojf zov m elektromotorem V v va TV 301 Navigator neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vyZaduj c ist vakuum Je vybaveno p davn mi konektory pro p ipojen p davn ho ventil toru ovl d n odvzdu ovac ho ventilu kter je ovl d n na d lku pomoc hostitelsk ho po ta e p ipojen ho s riovou linkou RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information TV 301 Navigator User Manual 87 900 946 01 M 173 282 13 N vod k Pou it Uskladn ni Tento manu l pou v n sledujici standardn protokol V stra n hl en
24. 01 M 17 Technical Information Heater Band lnstallation Heater Band Installation Figure 33 The heater band model 969 9804 and 969 9808 can be used to heat the pump casing when a bakeout is needed The heater band is applied to the upper part of the pump casing as shown in the figure and heats it to a temperature of about 80 C The heater band must be mounted such that there is perfect thermal contact with the pump wall to obtain fast and efficient heating Figure 34 254 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Heater Band Installation Switch on the heater while the turbopump is in operation In the event of turbopump overheat the pump will be automatically cut out by the thermistor sensor NOTE The turbopump must be baked only when operating with an inlet pressure less than 10 mbar and with water cooling CAUTION If the chamber of the system is baked at a high temperature a shield should be installed to prevent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C TV 301 Navigator User Manual 87 900 946 01 M 255 262 17 Technical Information Air Cooling Kit Installation Air Cooling Kit Installation 256 282 TV 301with Navigator Controller An air cooling kit mod 969 9299 is available to improve the TV 301 cooling during heavy operational condi
25. 2 106 R W L Water cooling 0 NO 1 YES 107 R W L Active Stop write only in 0 NO stop 1 YES TV 301 Navigator User Manual 87 900 946 01 M 247 282 17 Technical Information RS 232 RS 485 communication description 248 282 N Read Write Datatype Description Admitted Values 108 R W N Baud rate 600 0 1200 1 2400 2 4800 3 9600 4 default 4 109 W L Pump life cycle time cycle To reset write number reset T 110 R W L Interlock type default 1 Impulse 0 Continuous 1 111 R W L Analog output type output 0 frequency voltage signal proportional to 1 power frequency or power default 0 120 R W N Rotational freguency setting 150 to 963 Hz default 963 121 R W N Maximum rotational 150 to 963 frequency in Hz active only in default 963 Stop condition 122 R W L Set vent valve on off On 1 on closed Off 0 default 1 123 Reserved to Agilent service 124 125 R W L Set the vent valve operation Automatic 0 see note 1 On command 1 see note 2 126 R W N Vent valve opening delay 0 to 65535 expressed in 0 2 sec corresponding to 0 to 13107 sec 130 Reserved to Agilent service 200 R N Pump current in mA dc 201 R N Pump voltage in Vdc 202 R N Pump power in W pump current x pump voltage duty cycle TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 N Read
26. 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires 42 Indications g n rales 42 Stockage 45 Preparation pour l installation 46 Installation 47 Utilisation 49 Mise en marche et utilisation du TV 301 Navigator 50 Arr t du TV 301 Navigator 51 Arr t d urgence 51 Entretien 52 Mise au rebut 53 Traduction de la mode emploi originale GEB Agilent Technologies 41 22 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires Normes de s curit pour Pompe Turbomol culaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e AHSA AU Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 42 282 TV 301 Navigator User Manual 87 900 946 01 M Mode d emploi 3 Indications g n rales Cet appareillage a t con u en vue d une utilisation professionnelle Avant toute utilisation de l appareil il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent qui d cline par cons qu
27. 301 Navigator bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen enkel deel onder spanning toegankelijk is Controleer of de inrichting verbonden met de TV 301 Navigator goed geisoleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 90 282 Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn TV 301 Navigator User Manual 87 900 946 01 M Gebruik Bedrijfshandleiding 6 In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Breng alle elektrische en pneumatische aansluitingen tot stand alvorens het systeem te gebruiken Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 120 C bedragen AARSCHUWING Laat de pomp nooit draaien als de inlaatflens niet op de vacu mkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken VOORZICHTIG Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische dr
28. 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 0 2 3452 2455 Fax 82 0 2 3452 3947 Toll free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2013 Printed in ITALY 03 2013 Publication Number 87 900 946 01 M Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 32450 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 29157
29. 87 900 946 01 M 45 282 3 Mode d emploi Preparation pour l installation Preparation pour l installation ATTENTION Le TV 301 Navigator est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant op ration ouverture de emballage veiller tout particuli rement ne pas laisser tomber le TV 301 Navigator et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de environnement Afin viter tout probleme de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e Figure 1 Le TV 301ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation 46 282 TV 301 Navigator User Manual 87 900 946 01 M Mode d emploi 3 Installation gega ili Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me Figure 2 Ne pas installer et ou utiliser la pompe dans des milieux expos s aux a
30. V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 301 Navigator sa mus pripoji k prim rnej v veve pozri Technical Information TV 301 Navigator User Manual 87 900 946 01 M N vod na Obsluhu 14 Zariadenie TV 301 Navigator m e by nain talovan v ubovo nej polohe Upevnite TV 801 Navigator do stabilnej polohy pripojen m vstupnej pr ruby turbov vevy k pevnej pr rube upevnenej tak aby vydr ala nam hanie kr tiacim momentom 1000 Nm okolo svojej osi Napr klad pr ruba typu ISO 100 K m e by pripevnen oce ov mi svorkami s vysokou pevnos ou napr model Agilent IC 63250 DCMZ Nasleduj ca tabu ka ukazuje pre ka d typ pr ruby potrebn po et svoriek IC 63250 DCMZ a pr slu n upev ovac kr tiaci moment Tab 1 PR RUBA UPEV OVAC MECHANIZMUS PO ET U AHOVAC KR TIACI MOMENT ISO 100K svorky M10 4 22 Nm ISO 160K svorky M10 4 22 Nm Turbov veva so vstupnou pr rubou ConFlat mus by pripojen k v kuovej komore pomocou vhodn ho hardware zna ky Agilent Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 301 Navigator sa nem e upevni pomocou vlastnej z kladnej dosky POZOR Zariadenie TV 301 Navigator patr do druhej in tala nej prep ovej kateg rie pod a smernice EN 6
31. a pump with a dedicated controller fixed to it The system is available in various models that differ in the high vacuum flange and the controller The TV 301 Navigator pump models are Model 969 8918 with ISO 100 high vacuum flange Model 969 8919 with ConFlat 6 external diameter high vacuum flange Model 969 8920 with ISO 160 high vacuum flange Model 969 8921 with ConFlat 8 external diameter high vacuum flange The TV 301 Navigator kit eight models are TV 301 Navigator User Manual 87 900 946 01 M Model 969 8824 with ISO 100 high vacuum flange and 24 Vdc controller Model 969 8825 with ConFlat 6 external diameter high vacuum flange and 24 Vdc controller Model 969 8826 with ISO 160 high vacuum flange and 24 Vdc controller Model 969 8827 with ConFlat 8 external diameter high vacuum flange and 24 Vdc controller Model 969 8828 with ISO 100 high vacuum flange and 120 220 Vac controller Model 969 8829 with ConFlat 6 external diameter high vacuum flange and 120 220 Vac controller Model 969 8830 with ISO 160 high vacuum flange and 120 220 Vac controller Model 969 8831 with ConFlat 8 external diameter high vacuum flange and 120 220 Vac controller 219 282 17 Technical Information Description of the TV 301 Navigator The controller is also available in two models a 24 Vdc controller model 969 8972 120 220 Vac controller model 969 8973 The following figures show the eight ki
32. dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Obalov materi l zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a spl a po iadavky smernice EEC 85 399 POZOR Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu Postava 1 Be n vystavenie vplyvu prostredia nem e zariadenie TV 301 Navigator po kodi Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii kontamin cie prachom TV 301 Navigator User Manual 87 900 946 01 M 187 282 14 N vod na Obsluhu In tal cia In tal cia POZOR Neodstra ujte lepiacu p sku a ochrann uz ver sk r ne pripoj te turbov vevu k syst mu 168 282 Postava 2 V vevu nein talujte ani nepou vajte v prostred vystavenom vonkaj m vplyvom d sneh ad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny pretlak 2 bary nad rov ou atmosf rick ho tlaku a teplota od 5 C do 35 C pozri z vislos tlaku od teploty v dodatku Technical Information a relat vna vlhkos 0 95 bez kondenz cie
33. delle operazioni di manutenzione al interno dell unit scollegare il cavo di alimentazione Arresto di Emergenza Per arrestare in condizioni di emergenza il TV 301 Navigator occorre staccare il cavo di alimentazione dal controller TV 301 Navigator User Manual 87 900 946 01 M 23 282 1 Istruzioni per uso Manutenzione Manutenzione II TV 301 Navigator non richiede alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato AVVERTENZA Prima di effettuare qualsiasi intervento sul sistema scollegarlo dal alimentazione mandare all aria la pompa aprendo l apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere una pompa rigenerata in sostituzione di quella guasta Prima di rispedire al costruttore una pompa per riparazioni o advanced exchange service indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione 24 282 Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche TV 301 Navigator User Manual 87 900
34. is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum It is equipped with auxiliary connectors to supply an additional fan to control the vent valve to be controlled from a remote site by means of an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information TV 301 Navigator User Manual 87 900 946 01 M 207 282 16 Instructions for Use Storage This manual uses the following standard protocol The caution messages are displayed before procedures which if not followed could cause damage to the equipment WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The notes contain important information taken from the text Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed a when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C a relative humidity range 0 to 90 non condensing a the turbomolecular pumps must be always soft started whe
35. ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st TV 301 Navigator on kokonaisj rjestelm joka muodostuu valvojalla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 56000 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori TV 301 Navigator j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin TV 301 Navigator j rjestelm n kuuluu lis ksi apuliittimi joiden avulla on mahdollista k ytt lis tuuletinta ohjata tuuletusventtiili ja k ytt j rjestelm kauko ohjauksella sarjakytketyn is nt tietokoneen avulla RS 232 RS 485 Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information TV 301 Navigator User Manual 87 900 946 01 M 135 282
36. jamais faire fonctionner la pompe si la bride entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi gue ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre origine de l sions graves ATTENTION Lorsgue la turbopompe fonctionne viter tout choc oscillation ou d placement brusgue car les paliers pourraient se d t riorer Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bar au del de la pression atmosph rique Pour le pompage de gaz agressifs ces pompes sont dot es d une porte sp ciale travers laquelle il est n cessaire de fournir la pompe un flux de gaz inerte azote ou argon pour prot ger les paliers voir l appendice Technical Information AVERTISSEMENT TV 301 Navigator Lorsgue la pompe est utilis e pour le pompage de gaz toxigues inflammables ou radioactifs suivre les proc dures typigues de chague gaz Ne pas utiliser la pompe en pr sence de gaz explosifs User Manual 87 900 946 01 M 49 282 3 Mode d emploi Utilisation 50 282 Mise en marche et utilisation du TV 301 Navigator Pour allumer le TV 301 Navigator il suffit de fournir la tension d alimentation Le contr leur incorpor recon
37. jsou uvedena pred postupy kter by v pripad nedodr en mohly po kodit za izeni 3 74 4H MW Varovn hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v pripad nedodr en mohly zp sobit v n raz Pozn mky obsahuj d le it informace p evzat z textu Uskladn ni POZOR Aby byla zajist na maxim ln provozuschopnost a spolehlivost turbomolekul rn ch vyv v firmy Agilent mus te dodr ovat n sleduj c pokyny a P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed a Teplotn rozp t 20 C a 70 C a Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rn v v vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rn vyv vy je 10 m s c ode dne doru en Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Agilent 174 282 TV 301 Navigator User Manual 87 900 946 01 M N vod k Pou it 13 Pr prava k instalaci Vyv va TV 301 Navigator se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky po kozen k n muZ mohlo dojit b hem prepravy kontaktujte va i m stn prodejn pobo ku Pri vybalov ni d vejte
38. leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il TV 301 Navigator un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocit 56000 giri min max mossa da un motore elettrico trifase ad alto rendimento Il TV 301 Navigator totalmente privo di agenti contaminanti ed quindi adatto per applicazioni che richiedono un vuoto pulito Ha inoltre dei connettori ausiliari tramite i quali possibile alimentare un ventilatore aggiuntivo comandare la valvola di vent pilotarlo da remoto tramite un computer host col legato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical information
39. o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente ATENCI N Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada Figura 1 El TV 301 Navigator no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo 60 282 TV 301 Navigator User Manual 87 900 946 01 M Manual de istrucciones 4 Instalaci n ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema Figura 2 No instalar ni o utilizar la bomba en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C v ase gr fico en el anexo Technical Information humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos la bomba ha de protegerse mediante panta
40. outline TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 300 2 gt 250 o n o E 200 a E amp 450 100 50 E 0 s a BSE NBA v a ci Ber 10 107 107 107 107 107 1 10 Inlet pressure mbar Figure 9 Graph of nitrogen pumping speed vs inlet pressure Nitrogen 2 e 7 5 10 n 5 Helium 5 E 10 o o Hydrogen 10 10 b 141141 i iiiti Hi 1 i lil i b i lilii 107 10 1 10 100 Foreline pressure mbar Figure 10 Graph of compression ratio vs foreline pressure TV 301 Navigator User Manual 87 900 946 01 M 227 282 10 17 Technical Information TV 301 Navigator Outline 100 g je 10 2 E 5 a o 1 2 X E 0 1 10 107 10 1 Inlet pressure mbar Figure 11 Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 300 sccm 5 E wu c 2 a u c n E 3 z 10 sccm 0 2 4 6 8 10 12 14 16 18 20 FORELINE PRESSURE mbar Figure 12 Graph of nitrogen throughput test 228 282 TV 301 Navigator User Manual 87 900 946 01 M Interconnections The following figure shows the TV 301 interconnections Technical Information 17 EXTERNAL FAN SERIAL LINE INPUT OUTPUT VENT VALVE Figure 13 TV 301 interconnections P3
41. s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as liga es el ctricas e pneum ticas Durante o eventual aquecimento da c mara a v cuo a temperatura na flange de entrada n o deve ser superior a 120 C ATEN O Nunca activar a bomba se a flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com a flange de fecho N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode causar les es s pessoas Evitar colis es oscila es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a sa da de ar da bomba utilizar ar ou g s inerte sem poeiras ou part culas A press o de entrada atrav s da porta espec fica deve ser inferior a 2 bar acima da press o atmosf rica Para bombear gases agressivos estas bombas est o equipadas com uma porta espec fica atrav s da qual necess rio fornecer bomba um fluxo de g s inerte Azoto ou Argon para proteger os rolamentos consultar o ap ndice Technical Information ATENCAO Ouando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presen a de gases explosivos TV 301 Navigator User Manual 87 900 946 01 M T1 282 5 Manual de Istru es Utiliza o 18 2
42. stanju Waiting for interloc a Hitro utripanje perioda pribli no 200 ms Napaka Izklop naprave TV 301 Navigator Za izklop naprave TV 301 Navigator morate prekiniti dovod napetosti Vgrajen kontroler takoj zaustavi rpalko SVARILO Za varnost operaterja mora biti krmilnik Turbo V napajan preko triveznega napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabijajte ta kabel in vtika skupaj s primerno ozemijeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Visoka napetost ki je prisotna v krmilniku lahko povzro i hude po kodbe ali smrt Preden za nete z vzdrzevalnimi postopki v notranjosti izvlecite napajalni kabel Zaustavitev v sili Za takoj enj izklop naprave TV 301 Navigator je treba izklju iti napetostni kabel iz napetosti TV 301 Navigator User Manual 87 900 946 01 M 203 282 15 Priro nik za Navodila Vzdr evanje Vzdr evanje Naprave TV 301 Navigator ni potrebno vzdr evati Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjeno rpalko s popravljeno Preden odnesete
43. udfyldes og sendes til den lokale forhandler En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af pumpen skal foreg i overensstemmelse med det p g ldende lands s rlige love TV 301 Navigator User Manual 87 900 946 01 M 107 282 7 Istruktionsbog Bortskaffelse Bortskaffelse 108 282 Betydningen af WEEE logoet p m rkaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun g ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverand ren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter n je at have kontrolleret betingelserne i salgskontrakten TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar 110 Allman information 110 F rvaring 112 Forberedelser f r installation 113 Installation 114 Anv ndning 116 Start och anv ndning av TV 301 Navigator 117 Att st nga av TV 301 Navigator 118 N dstopp 118 Underh ll 119 Bortskaffning 120 vers ttning av originalinstruktionerna GEB Agilent Technologies 109 282 8 Bruksanvisning S kerhetsanvisning
44. zik nyv 11 Karbantart s A TV 301 Navigator nem ig nyel karbantart st A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie VESZ LY A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett Miel tt jav t sra vagy cser re visszak ldi a rendszert a gy rt hoz az ehhez a g pk nyvh z csatolt Eg szs g s biztons g lapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz A lap egy m solat t sz ll t s el tt be kell illeszteni a rendszercsomagba Ha a szivatty t le kell selejtezni azt a specifikus nemzeti el r soknak megfelel en rtalmatlan tani kell TV 301 Navigator User Manual 87 900 946 01 M 155 282 11 Felhaszn l i K zik nyv Megsemmis t s Megsemmis t s A c mk n jelenl v WEEE logo jelent se A lent l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal e
45. 0 946 01 M 113 282 8 Bruksanvisning Installation Installation 1d Ta bort tejpen och skyddsproppen f rst n r turbopumpen ska anslutas till systemet 114 282 Figur 2 Installera och anv nd inte pumpen i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift a maximitryck 2 bar over atmosf riskt tryck temperatur fr n 5 C till 35 C se bild i Technical Information a relativ luftfuktighet 0 95 utan kondens I n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical information f r ytterligare upplysningar TV 301 Navigator m ste anslutas till en huvudpump se schemat i Technical information TV 301 Navigator User Manual 87 900 946 01 M Bruksanvisning 8 TV 301 Navigator kan installeras i valfri position Fast pumpen i ett stabilt l ge genom att ansluta pumpens intagsfl ns till en fast fl ns som m ste t la ett vridmoment p 1000 Nm kring sin axel Fl nsen ISO 100 K kan till exempel fixeras med h gh llfasta st lbyglar modell Agilent IC 63250 DCMZ I tabellen nedan beskrivs det antal byglar IC 63250 DCMZ som erfordras f r varje fl nsdimension och med vilket moment de ska dras t Tab 1 FL NS TYP AV KLAMMER ANT TDRAGNINGS MOMENT ISO 100K D
46. 00 946 01 M 33 282 2 Gebrauchsanleitung Installation Modell TV 301 Navigator kann in jeder beliebigen Position installiert werden Modell TV 301 Navigator ist stabil zu befestigen indem der Flansch am Eingang der Turbopumpe an einen festen Gegenflansch angeschlossen wird der mit einem Drehmoment von 1000 Nm um seine eigene Achse belastbar ist Der ISO 100 K Flansch kann z B mit hochfesten Stahlklammern befestigt werden wie das Agilent Modell IC 63250 DCMZ Die Tabelle im Anschluss zeigt die erforderliche Anzahl von IC 63250 DCMZ Klammern und das jeweilige Anzugsmoment f r jede Flanschgr fse Tab 1 FLANSCH KLEMMSCHELLE ANZ ANZUGSMOMENT ISO 100 K Doppelschelle mit Gewinde M10 4 22 Nm ISO 160 K Doppelschelle mit Gewinde M10 4 22 Nm Turbopumpen mit ConFlat Eingangsflansch sind mit dem speziellen Agilent Befestigungsmaterial an die Vakuum kammer anzuschlief en F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TV 301 Navigator kann nicht mittels seines Sockels befestigt werden VORSICHT Der TV 301 Navigator geh rt zur zweiten Installationsklasse berdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung muR daher an eine Speisungsleitung angeschlossen werden die dieser Kategorie entspricht Der TV 301 Navigator hat Verbinder f r den Ein und Ausgang und die Schnittstellenkommunikation die an die AuBenkreise an geschlossen werden m ssen sodaR kein Teil un
47. 1 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 1 12
48. 1010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Zariadenie TV 301 Navigator m konektory pre vstup v stup a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj iemu okruhu tak aby nebola dostupn iadna elektrick s as Presved ite sa i zariadenie pripojen k TV 301 Navigatoru m adekv tnu izol ciu aj pre pr pad samostatnej chyby pod a smernice EN 61010 1 O in tal cia doplnkovej v bavy pozri pr ru ku Technical Information TV 301 Navigator User Manual 87 900 946 01 M 189 282 14 N vod na Obsluhu Pou itie Pou itie NEBEZPE T to as popisuje z kladn sp soby pou itia zariadenia Sk r ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory nesmie prekro i 120 C Nikdy nepou vajte turbov vevu ak vstupn pr ruba nie je pripojen k v kuovej komore alebo ak nie je zablendovan V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani iadneho pr slu enstva Vysok teploty m u sp sobi pop leniny POZOR Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu preplachujte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na preplachovacom vstupe mus by ni
49. 20 of Ethyl Glycole is suggested 260 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent op eration TV 301 Navigator Controller Compatible Vent Valve mod 969 9834 Figure 42 This vent valve waits before opening a minimum time of about 5 sec This time can be increased up to about 220 min by means of a setting of the Navigator software optional To install the vent valve unscrew the threaded plug see figure below Figure 43 TV 301 Navigator User Manual 87 900 946 01 M 261 282 17 Technical Information Vent Accessories Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torgue of 2 5 Nm Figure 44 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suitable connector on the controller see the preceding paragraph INTERCONNECTIONS TV 301 AG Rack Controller Compatible Vent Valve mod 969 9644 ea EB Figure 45 262 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 For further details refers to the Rack Controller manual
50. 22 Nm ISO 160 K Collier double filet M10 4 22 Nm La turbopompe bride d entr e ConFlat doit tre fix e la chambre vide l aide des l ments m caniques Agilent pr vus cet effet Pour tout autre d tail se reporter l appendice Technical Information Le TV 301 Navigator ne peut tre fix par sa base ATTENTION Le TV 301 Navigator appartient la deuxi me cat gorie d installations ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositi une ligne alimentation compatible avec cette cat gorie Le TV 301 Navigator dispose de connecteurs pour les entr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de facon qu aucune partie sous tension ne soit accessible S assurer que l isolation du dispositif branch au TV 301 Navigator a une isolation appropri e m me en condition de panne individuelle selon les termes de la norme EN 61010 1 48 282 Pour l installation des accessoires en option se reporter Technical Information TV 301 Navigator User Manual 87 900 946 01 M Utilisation Mode d emploi 3 Ce paragraphe pr sente les principales proc dures op rationnelles Avant d utiliser le syst me effectuer tous les branchements lectriques et pneumatiques Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 120 C AVERTISSEMENT Ne
51. 23 Technical Specification 224 TV 301 Navigator Outline 226 Interconnections 229 P3 Vent 229 P5 External Fan 230 In Out 230 Signal Description 231 How to Connect the Open Collector Inputs of the Controller235 How to Connect the Outputs of the Controller 239 J6 Serial 239 Input power connection on the model 969 8972 241 RS 232 RS 485 communication description 241 Communication Protocol 242 Window Meanings 247 Inlet Screen Installation 251 Heater Band Installation 254 Air Cooling Kit Installation 256 TV 301with Navigator Controller 256 Water Cooling Kit Installation 258 Original Instructions GE Agilent Technologies 217 282 17 Technical Information Disposal Vent Accessories 261 TV 301 Navigator Controller Compatible Vent Valve mod 969 9834 261 TV 301 AG Rack Controller Compatible Vent Valve mod 969 9844 262 Vibration Isolator Installation 264 Purge Valve Installation 264 Serial Cable Installation 265 TV 301Controller Installation 266 Bottom Mounting 266 Side Mounting 267 Connection A High Vacuum Flange 268 Connection Configurations 210 Connection B Fore Vacuum Pump 270 Connection C Electrical 211 Pump Used with Corrosive Gases 212 Pump Used in Presence of Magnetic Fields 2 4 Accessories and Spare Parts 275 218 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Description of the TV 301 Navigator The TV 301 Navigator pumping system consists of
52. 46 01 M 179 282 13 Navod k Pou it Pou it Vypnuti v vevy TV 301 Navigator Pro vypnut v v vy TV 301 Navigator je nutn prerusit sitov nap t Vestav ny regul tor vyv vu okam it zastav Pro zaji t n bezpe nosti obsluhy mus b t controller erpadla Turbo V nap jen troj ilov m privodnim kabelem viz tabulka dil kter Ize doobjednat se z str kou mezin rodn schv lenou Pou vejte tento kabel se z str kou a patfi n uzemn nou z suvku abyste prede li razu elektrick m proudem a aby byly zaru en po adavky norem ES Vysok nap ti kter vznik v controlleru m e zp sobit v n zran ni i smrteln Pred prov d nim z sah dr by uvnitr jednotky pfivodni kabel odpojte Nouzov zastaven Pro okam it zastaven vyv vy TV 301 Navigator v nouzov situaci je treba odpojit nap jec kabel ze s ov z suvky 180 282 TV 301 Navigator User Manual 87 900 946 01 M N vod k Pou it 13 dr ba Vyv va TV 301 Navigator nevy aduje dnou dr bu Ve ker pr ce na tomto za zen mus prov d t opr vn n osoby 1 1743 4H MW Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte technick
53. 82 Acendimento e Utiliza o do TV 301 Navigator Para ligar o TV 301 suficiente fornecer a tens o de alimenta o O controller incorporado reconhece automaticamente os sinais de interlock e de activa o e acciona a bomba O modo Soft Start previsto para ligar a bomba ap s um longo per odo de paragem Para ter um arranque com Soft Start activo necess rio habilitar o modo mencionado anteriormente utilizando o software consultar o par grafo RS232 485 COMMUNICATION DESCRIPTION no ap ndice Technical Information A luz piloto verde LD1 posicionada no painel da base do TV 301 indica atrav s da frequ ncia de intermit ncia as condi es operacionais do sistema aceso fixo a bomba funciona normalmente jntermit ncia lenta per odo de aprox 400 ms o sistema est em estado de acelera o ou de paragem ou de Stop ou de waiting for interlock jntermit ncia r pida per odo de aprox 200 ms condi o de erro TV 301 Navigator User Manual 87 900 946 01 M Manual de Istru es 5 Paragem do TV 301 Navigator Para parar o TV 301 Navigator suficiente desligar a tens o de alimenta o O controller incorporado para imediatamente a bomba ATEN AO Para a seguran a do operador o controller Turbo V deve ser alimentado com um cabo de alimenta o com 3 fios ver a tabela das partes que podem ser encomendadas equipado de uma tomada aprovada a n vel internacio
54. 86 282 TV 301 Navigator User Manual 87 900 946 01 M Bedrijfshandleiding 6 Opslag Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen a tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C a relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum nf tel Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent TV 301 Navigator User Manual 87 900 946 01 M 87 282 6 Bedrijfshandleiding Uitpakken Uitpakken OORZICHTIG De TV 301 Navigator wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TV 301 Navigator niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het
55. 946 01 M Istruzioni per l uso 1 Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita TV 301 Navigator User Manual 87 900 946 01 M 25 282 1 Istruzioni per uso Smaltimento 26 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen 28 Allgemeine 28 Lagerung 31 Vor der Installation 32 Installation 33 Gebrauch 35 Einschaltung und Gebrauch von Modell TV 301 Navigator 36 Stoppen von Modell TV 301 Navigator 37 Not Aus 37 Wartung 38 Entsorgung 39 bersetzung der Originalanleitungen GEB Agilent Technologies 27 22 2 Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen Sicherheitshinweise fiir Turbomolekularpumpen 28 282 Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf
56. Biztons gi tmutat Turb molekul ris szivatty khoz 146 ltal nos inform 147 T rol s148 El k sz t s telep t sre 149 Telep t s 150 Haszn lat 152 A TV 301 Navigator bekapcsol sa s haszn lata 153 A TV 301 Navigator kikapcsol sa 154 V szle ll t s 154 Karbantart s 155 Megsemmis t s 156 Az eredeti utasit s fordit sa GE Agilent Technologies 145 282 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor s az ll r sz rintkez se vagy a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 146 282 TV 301 Navigator User Manual 87 900 946 01 M Felhaszn l i K zik nyv 11 Altal nos inform ci A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhat felel ss gre oly
57. CTOR l CONTROLLER CABLE Figure 7 Controller Description The dedicated controller is a solid state frequency converter which is driven by a single chip micro computer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase out put converts the single phase AC mains supply into a 3 phase low voltage medium freguency output which is reguired to power the pump The controller can be operated by a remote host computer via the serial connection A Windows based software is available optional TV 301 Navigator User Manual 87 900 946 01 M 223 282 17 Technical Information Technical Specification Technical Specification Tab 3 Technical Specification Pumping speed With CFF 8 or ISO 160 With CFF 6 or ISO 100 Nz 280 l s Nz 250 l s He 230 l s He 220 l s Hz 210 l s Hz 200 l s Compression ratio N2 gt 2 x 108 He 1 x 105 Hz 2 x 104 Base pressure with recommended forepump mechanical lt 2 x 10 10 mbar lt 1 5 x 10 10 Torr Inlet flange CFF 8 O D ISO 160 CFF 6 O D ISO 100 Foreline flange KF16 NW KF25 optional Rotational speed 56000 rpm Start up time 3 minutes Recommended forepump mechanical Agilent DS 102 mechanical Agilent DS 302 dry pump Agi
58. Indicaciones de Seguridad para Bombas Turbomoleculares Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podria ser liberada POE LAHU Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 56 282 TV 301 Navigator User Manual 87 900 946 01 M Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas El TV 301 Navigator es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vacio integrada por el controler correspondiente El sistema puede bombear cualquier tip
59. M Instruksjon Manual 9 Vedlikehold TV 301 Navigator er vedlikeholdsfritt Alt arbeid p systemet m kun utf res av autorisert personell ADVARSEL F r noe arbeid gj res p systemet m det frakoples str mtilf rselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom pumpen stanser m du ta kontakt med Agilent reparasjonservice eller med Agilent avanserte bytteservice som kan tilby en overhalt pumpe til erstatning for den delagte F r systemet returneres til produsenten for reparasjon eller som innbytte for et overhalt system m det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser TV 301 Navigator User Manual 87 900 946 01 M 131 282 9 Instruksjon Manual Eliminering Eliminering Betydelsen av symbolet p logo WEEE p etikettene Symbolet nedenunder som finnes er anvendt i henhold til EC direktiv kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverand ren av anordn
60. M10 clamps 4 22 Nm ISO 160 K M10 clamps 4 22 Nm The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TV 301 Navigator cannot be fixed by means of its base CAUTION The TV 301 Navigator belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 301 Navigator has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the TV 301 Navigator is adequate even in the case of single fault as per directive EN 61010 1 For installation of optional accessories see Technical Information TV 301 Navigator User Manual 87 900 946 01 M 211 282 16 Instructions for Use Use Use This paragraph details the fundamental operating procedures Make all electrical and pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillat
61. Manual 87 900 946 01 M Manual de istrucciones 4 Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 6 no condensante a el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez a el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente ATENCI N En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent TV 301 Navigator User Manual 87 900 946 01 M 59 282 4 Manual de istrucciones Preparaci n para la instalaci n Preparaci n para la instalaci n El TV 301 Navigator se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TV 301 Navigator y de no someterlo a golpes
62. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istru es Bedrijfshandleiding Istrukstionsbog Bruksanvisning 87 900 946 01 M 03 2013 TV 301 Navigator Pump models 969 8918 969 8919 969 8920 969 8921 Kit models 969 8824 969 8825 969 8826 969 8827 969 8828 969 8829 969 8830 969 8831 Controller models 969 8972 969 8973 Instruksjon manual Ohjek sikirja Felhaszn l i k zik nyv Podrecznik instrukcji N vod k pou it N vod na obsluhu Priro nik za navodila User Manual se De Agilent Technologies Notices Agilent Technologies Inc 2013 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 946 01 M Edition Edition 03 2013 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any infor
63. O 100 K M10 dr ala 4 22 Nm ISO 160 K M10 dr ala 4 22 Nm Turbo rpaklo z dovodno ConFlat prirobnico je treba fiksirati na vakuumsko le i e s pomo jo primerne Agilent strojne opreme Za dodatne informacije glejte prilogo Technical Information Naprave TV 301 Navigator ne morete fiksirati z njegovo lastno spodnjo ploskvijo Po direktivi EN 61010 1 spada TV 301 Navigator v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo Naprava TV 301 Navigator ima vhodne izhodne in serijske priklju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Prepri ajte se da je izolacija naprave priklju ene na TV 301 Navigator primerna tudi v primerno ene napake kar je opisano v direktivi EN 61010 1 Za namestitev opcijski dodatkov glej Technical Information TV 301 Navigator User Manual 87 900 946 01 M 201 282 15 Priro nik za Navodila Uporaba Uporaba SVARILO Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C Turbo rpalke ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline POZOR Izogibajte s
64. S NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed toxic L Corrosive L Reactive Flammable O Explosive O Biological L Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Date Pg 2 3 1 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION Does not start Noise V
65. SHO1101UNIV TV 301 Navigator User Manual 87 900 946 01 M 215 282 17 Technical Information Accessories and Spare Parts 216 282 TV 301 Navigator User Manual 87 900 946 01 M E Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilen
66. V 301 Navigator User Manual 87 900 946 01 M 163 282 12 Podrecznik Instrukcji Instalacja TV 301 Navigator moze by zainstalowany w jakiejkolwiek pozycji Zamocowa TV 301 Navigator w stabilnej pozycji taczac komierz wej ciowy turbopompy do ko nierza sta ego wytrzyma ego na obci enie 1000 Nm wok w asnej osi Na przyk ad ko nierz ISO 100 K mo e by zamocowany z zaciskami stalowymi o wysokiej wytrzymalno ci typ modelu Agilent IC 63250 DCMZ Niniejsza tabela przedstawia dla ka dego wymiaru ko nierza ilo potrzebnych zacisk w IC 63250 DCMZ i moment na jaki trzeba je dokr ci Tab 1 KO NIERZ TYP ZACISKU Nr MOMENT DOKR CENIA IS0100K Podw jny zacisk z gwintem M10 4 22 Nm IS0160K Podw jny zacisk z gwintem M10 4 22 Nm Turbopompa z ko nierzem wej ciowym ConFlat musi by zamocowana do komory pr niowej poprzez odpowiednie drobne uk ady mechaniczne firmy Agilent W celu dodatkowych informacji nale y zapozna si z dodatkiem Technical Information System TV 301 Navigator nie mo e by mocowany poprzez w asn podstaw TV 301 Navigator nale y do drugiej kategorii instalacji lub nadnapi cia przewidzianej przez norm EN 61010 1 Dlatego te pod czy urz dzenie do linii zasilania kt ra spe ni te wymogi TV 301 Navigator posiada konektory wej ciowe wyj ciowe i dla komunikacji szeregowej kt re musz by pod czone do obwod w zewn trznych w spos b aby adna c
67. Write Datatype Description Admitted Values 203 R N Driving frequency in Hz 204 R N Pump temperature in C 0 to 70 205 R N Pump status Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 206 R N Error code Bit description see the following figure 210 R seenote N Actual rotation speed in Hz 100 to 963 3 300 R N Cycle time in minutes zeroed 0 to 999999 by the reset command 301 R N Cycle number zeroed by the 0 to 9999 reset command 302 R N Pump life in hours zeroed by 0 to 999999 the reset command 320 Reserved to Agilent service to 399 400 R A CRC EPROM QE QE8XXXX where XXXX are variable 402 R A CRC Param PA PABXXXX where XXXX are variable 404 R A CRC Parameter structure XXXX 500 Reserved to Agilent service 503 R W N RS 485 address 0 to 31 default 0 504 R W L Serial type select 0 RS 232 1 RS 485 default 0 TV 301 Navigator User Manual 87 900 946 01 M 249 282 17 Technical Information RS 232 RS 485 communication description 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 3 These commands remove the pump motor sup ply for a short time If they are used continuous ly they can cause the pump stopping
68. a TV 301 Navigator User Manual 87 900 946 01 M 141 282 10 Ohjek sikirja K ytt TV 301 Navigatorin pys ytt minen TV 301 Navigatorin pys ytt miseen riitt ett se kytket n irti s hk verkosta Sis nrakennettu valvoja pys ytt pumpun v litt m sti VAROITUS K ytt j n turvallisuuden takaamiseksi Turbo V valvojan virran sy t n on tapahduttava pistokkeella kansainv lisesti hyv ksytty tyyppia ja 3 lla johtimella varustettua s hk kaapelia k ytt m ll katso tilattavien osien taulukkoa K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t Valvojassa kehittyv t korkeaj nnitteet voivat aiheuttaa vakavia onnettomuuksia tai jopa kuoleman Irrota s hk kaapeli ennen yksik n sis lle suoritettavien huoltotoimenpiteiden aloittamista H t pys ytys 142 282 TV 301 Navigator on pys ytett v h t tilassa irrottamalla s hk kaapeli ohjausyksik st TV 301 Navigator User Manual 87 900 946 01 M Huolto Ohjek sikirja 10 TV 301 Navigator ei vaadi lainkaan huoltoa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist
69. ada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 0 10 64397888 Fax 86 0 10 64391318 Toll free 800 820 3278 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Sales 8 Services GmbH 8 Co KG Vacuum Products Division Lyoner Str 20 60 528 Frankfurt am Main GERMANY Tel 49 69 6773 43 2230 Fax 49 69 6773 43 2250 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building
70. an esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A TV 301 Navigator egy integr lt rendszer turbo molekul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 56000 fordulat perc biztos tja A TV 301 Navigator szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra Fel van szerelve k ls csatlakoz kkal hogy tov bbi ventill tort t pl ljon vez relje a ventill tor szelepet amit t voli helyr l ir ny t egy soros vonalon RS 232 vagy RS 485 kereszt l csatlakoztatott gazdag p seg ts g vel A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben TV 301 Navigator User Manual 87 900 946 01 M 147 282 11 Felhaszn l i K zik nyv T rol s FIGYELEM Ez a k zik nyv a k vet
71. an festes ved bruke ekstra resistente st l klemmer som Agilent modell IC 63250 DCMZ F lgende tabell viser det n dvendige antall klemmer IC 63250 DCMZ og den tilsvarende festeanordning for hver enkelt flens dimensjon Tab 1 FLENS TYPE KLEMME ANT STRAMMEMOMENT ISO 100 K Dobbel klemme gjenge M10 4 22 Nm ISO 160 K Dobbel klemme gjenge M10 4 22 Nm Turbopumpen med ConFlat inngangsflens skal festes til vakuumkammeret ved hjelp av de spesielle l sedelene fra Agilent For detaljer henvises det til Technical Information TV 301 Navigator m ikke festes gjennom fundamentet FORSIKTIG TV 301 Navigator h rer til installasjonsklasse eller overspenningsklasse nummer 2 i f lge EN 61010 1 standarden Kople derfor anordningen til en hovedledning som tilfredsstiller kravene for denne klassen TV 301 Navigator er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som m koples til de ytre str mkretsene slik at ingen deler under spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til TV 301 Navigator har en egnet isolering ogs under forhold med en enkel feil i f lge EN 61010 1 standarden For installasjon av tilleggsutstyr vises det til Technical Information TV 301 Navigator User Manual 87 900 946 01 M 127 282 9 Instruksjon Manual Bruk Bruk Alle instruksjoner for korrekt bruk finnes i dette avsnittet Les n ye gjennom denne manualen f r systeme
72. ann der Agilent Service oder der Agilent advanced exchange service in Anspruch genommen werden der ein general berholtes System als Ersatz f r das defekte System zur Verf gung stellt Bevor Fa Agilent ein System zur Reparatur oder den Um tauschdienst eingesandt wird ist das Formular Sicherheit und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen 38 282 Eine eventuelle Verschrottung der Pumpe hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen TV 301 Navigator User Manual 87 900 946 01 M Gebrauchsanleitung 2 Entsorgung Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat TV 301 Navigator User Manual 87 900 946 01 M 39 282 2 Gebrauchsanleitung Entsorgung 40 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual
73. ar f r Molekyl ra turbopumpar S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 110 282 TV 301 Navigator User Manual 87 900 946 01 M Bruksanvisning 8 Allm n information Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador helt eller delvis till f ljd av sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala f reskrifter Systemet TV 301 Navigator best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stad
74. binding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 56000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De TV 301 Navigator is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacu m verlangen De TV 301 Navigator is bovendien van hulpconnectors voorzien waarmee een extra ventilator kan worden gevoed de luchtuitlaatkleppen kunnen worden aangestuurd en waarmee het systeem d m v een serieel aangesloten host computer op afstand kan worden bediend RS 232 RS 485 In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical information TV 301 Navigator User Manual 87 900 946 01 M 85 282 6 Bedrijfshandleiding Algemene informatie Deze handleiding maakt van de volgende symbolen gebruik a10 74 P tte Bij dit synbool staat tekst met procedures die indien niet opgevolgsd schade aan apparatuur kunnen veroorzaken WAVE Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht
75. ch do wytwarzania pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie Posta 1 System TV 301 Navigator nie mo e by uszkodzony poprzez wystawienie go na dzia anie atmosfery Mimo to zaleca si aby pompa do momentu jej instalacji na systemie pozosta a zamkni ta w celu unikni cia zanieczyszczenia jej py em 162 282 TV 301 Navigator User Manual 87 900 946 01 M Podrecznik Instrukcji 12 Instalacja Usun ta m klej c i zdj korek zabezpieczaj cy dopiero w momencie po czenia pompy do systemu Posta 62 Nie instalowa i lub u ytkowa pompy w otoczeniach wystawionych na czynniki atmosferyczne deszcz mr z nieg py y gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dzia ania obowi zkowo nale y przestrzega nast puj ce warunki otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym a temperatura od 5 C do 35 C patrz wykres graficzny w dodatku Technical Information wzgl dna wilgo 0 95 bez opar W obecno ci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg owego zapoznania si z tematem patrz dodatek Technical Information TV 301 Navigator musi by pod czony do g wnej pompy patrz schemat w dodatku Technical Information T
76. connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug amp Pump Interlock input signal to control the pump rotation With the supplied cover connector the interlock signal is connected to the 24 Vdc pin and the interlock signal to the GROUND pin Soft start this input is used to provide a soft start to the pump in this condition the ramp up time could be up to 45 min TV 301 Navigator User Manual 87 900 946 01 M 231 282 17 Technical Information Interconnections Speed setting PWM input signal to set the pump speed The PWM signal characteristics must be the following a frequency 100 Hz 20 amplitude from 5 to 24 V duty cycle range from 25 to 75 t T corresponding to a rotational frequency from 187 Hz to 963 Hz linearly With duty cycle lt 25 rotational frequency 187 Hz duty cycle gt 75 rotational frequency 963 Hz The duty cycle percentage is referred to the low level portion of the PWM signal 1000 Excitation Frequency Hz so Duty Cycle Figure 17 Programmable analog signal this output signal is a voltage from 0 to 10 Vdc proportional to a reference quantity frequency or power set by the user The default setting is the frequency see the fol
77. d protective cap before connecting the turbopump to the system 210 282 Figure 2 Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C see the diagram pressure temperature in the appendix Technical Information a relative humidity O 95 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TV 301 Navigator must be connected to a primary pump see Technical Information TV 301 Navigator User Manual 87 900 946 01 M Instructions for Use 16 The TV 301 Navigator can be installed in any position Fix the TV 301 Navigator in a stable position connecting the inlet flange of the turbopump to a fixed counter flange capable of withstanding a torque of 1000 Nm around its axis For example the ISO 100 K flange can be fixed using high strength steel clamps as Agilent model IC 63250 DCMZ The following table shows for each flange dimension the necessary number of clamps IC 63250 DCMZ and the relevant fixing torque Tab 2 FLANGE FIXING DEVICE N FIXING TOROUE ISO 100 K
78. da expedi o 80 282 Caso uma bomba tenha que ser destru da proceder sua elimina o respeitando as normas nacionais espec ficas TV 301 Navigator User Manual 87 900 946 01 M Manual de Istru es 5 Elimina o Significado do log tipo WEEE presente nos r tulos O s mbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este s mbolo v lido apenas para os pa ses da Comunidade Europeia indica que o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e elimina o ap s a oportuna verifica o dos termos e condi es do contrato de venda TV 301 Navigator User Manual 87 900 946 01 M 81 282 5 Manual de Istru es Elimina o 82 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 84 Algemene informatie 84 Opslag 87 Uitpakken 88 Installatie 89 Gebruik 91 Inschakeling en gebruik van de TV 301 Navigator 92 Afzetten van de TV 301 Navigator 93 Noodstop 93 Onderhoud 94 Afvalverwerking 95 Vertaling van de originele instructies GEB Agilent Technologies 83 282 6 Bedrijfshandleid
79. den ikke f lges kan medf re alvorlige skader Merknadene inneholder viktig informasjon som er hentet fra teksten Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C a Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang a Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato Se Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon 124 282 TV 301 Navigator User Manual 87 900 946 01 M Instruksjon Manual 9 Klargjere til installasjon TV 301 Navigator leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TV 301 Navigator pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse aus epa For a unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hen
80. dene Bruk alltid hansker eller andre og passende verneutstyr Figur 1 Normale milj messige belastninger kan ikke delegge TV 301 Navigator Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedst ving TV 301 Navigator User Manual 87 900 946 01 M 125 282 9 Instruksjon Manual Installasjon Installasjon Se Tapen og beskyttelsesproppen skal fjernes f rst n r turbopumpen koples til systemet 126 282 Figur 2 Ikke installer eller bruk systemet i milj er som utsettes for regn sn eller is st v aggressive gasser eksplosjonsfarlige milj er eller milj er med stor brannfare Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk a temperatur fra 5 C til 35 C se diagram i tillegget Technical Information relativ fuktighet 0 95 uten kondens Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Technical Information for detaljer TV 301 Navigator m koples til en hovedpumpe se skjema i Technical Information TV 301 Navigator User Manual 87 900 946 01 M Instruksjon Manual 9 TV 301 Navigator kan monteres i en valgfri stilling Fest TV 301 Navigator i en stabil stilling med inngangsflensen festet mot en fast koplingsflens med et dreiemoment p 1000 Nm rundt aksen For eksempel ISO 100 K flensen k
81. dn ozna enia POZOR Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia 4 1743 HUM Nebezpe ie maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie Pozn mky upozor uj na d le it inform cie z textu Uchov vanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce podmienky prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C a rozsah relat vnej vlhkosti 0 a 95 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy pou i re im soft tartu a skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania POZOR Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te v vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis 186 282 TV 301 Navigator User Manual 87 900 946 01 M N vod na Obsluhu 14 Pr prava na in tal ciu Zariadenie TV 301 Navigator sa dod va v peci lnom ochrannom balen Ak je balenie po koden o sa m e sta napr klad po as prepravy obr te sa na miestne zast penie spolo nosti Agilent Po as vyba ovania syst mu
82. e udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manj i od 2 bara nad pritiskom atmosfere Za rpanje agresivnih plinov so te rpalke opremljene s priklju kom ki omogo a stalen pretok inertnih plinov kot N2 Ar za za ito nosilcev glej prilogo Technical Information SVARILO Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalke ne uporabljajte v prisotnosti eksplozivnih plinov 202 282 TV 301 Navigator User Manual 87 900 946 01 M Priro nik za Navodila 15 Vklop in uporaba naprave TV 301 Navigator Za vklju itev TV 301 Navigator morate priklju iti napetost Vgrajeni kontroler samodejno prepozna zaporo in prisotnost signalov za vklop ter za ene rpalko Soft Start na in je predviden za zagon po dalj i neuporabi rpalke Za zagon Soft Start na ina je potrebno aktivirati ustrezen programski ukaz glej odstavek RS 232 485 COMMUNICATION DESCRIPTION v prilogi Technical Information Zelena LED dioda ki se nahaja na sprednji plo i TV 301 Navigator s hitrostjo utripanja ozna uje delovne pogoje sistema a Brez utripanja C rpalka je normalno vrti a Po asno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v
83. elen av TV 301 anger genom frekvensen av dess blinkningar hur systemet fungerar fast sken pumpen roterar normalt l ngsamt blinkande ungef r var 400 ms systemet r i l ge f r acceleration bromsning Stop eller Waiting for interlock a hastigt blinkande ungef r 200 ms feltillst nd TV 301 Navigator User Manual 87 900 946 01 M 117 282 118 282 Bruksanvisning Att st nga av TV 301 Navigator Om du vill st nga av TV 301 Navigator beh ver du bara dra ut elkabeln ur v gguttaget Den inbyggda styrenheten avbryter omedelbart pumpens funktion F r operat rens s kerhet b r Turbo V systemet vara anslutet med en str mkabel med 3 stycken ledare se tabellen ver ordinerbara delar tillsammans med kontakt godk nd p internationell niv Anv nd sladden och kontakten tillsammans med en jordad anslutning f r att undvika st tar och enligt kr vande EU normer Den h ga sp nningen som framkallas av styrenheten kan orsaka personskador eller till och med d da Dra d rf r alltid ur str mkabeln innan eventuella underh llsarbeten utf rs inuti enheten N dstopp Dra ut elsladden fr n styrenheten f r att utf ra ett n dstopp av TV 301 Navigator TV 301 Navigator User Manual 87 900 946 01 M Bruksanvisning 8 Underh ll TV 301 Navigator r underh llsfritt Allt servicearbete m ste utf ras av auktoriserad personal VARNING Innan n got arbete utf rs p systemet m ste p
84. en 28 Allgemeine Informationen 29 Lagerung 31 Vor der Installation 32 Installation 33 Gebrauch 35 Wartung 38 Entsorgung 39 TV 301 Navigator User Manual 87 900 946 01 M 5 282 Contents 6 282 Mode d emploi 41 Normes de s curit pour Pompe Turbomol culaires 42 Indications g n rales 43 Stockage 45 Preparation pour l installation 46 Installation 47 Utilisation 49 Entretien 52 Mise au rebut 53 Manual de istrucciones 55 Indicaciones de Seguridad para Bombas Turbomoleculares 56 Informaci n general 57 Almacenamiento 59 Preparaci n para la instalaci n 60 Instalaci n 61 Uso 63 Mantenimiento 66 Eliminaci n 67 Manual de Istru es 69 Indica es de Seguran a para Bombas Turbomoleculares 70 Informa es gerais 71 Armazenagem 73 TV 301 Navigator User Manual 87 900 946 01 M Contents Prepara o para a instala o 74 Instala o 75 Utiliza o 77 Manuten o 80 Elimina o 81 6 Bedrijfshandleiding 83 Veiligheidsinstructies voor Turbomoleculaire pompen 84 Algemene informatie 85 Opslag 87 Uitpakken 88 Installatie 89 Gebruik 91 Onderhoud 94 Afvalverwerking 95 7 Istruktionsbog 97 Sikkerhedsanvisninger for Molekyl re turbopumper 98 Generel information 99 Opbevaring 100 Forberedelser f r installation 101 Installation 102 Anvendelse 104 Nadstop 106 TV 301 Navigator User Manual 87 900 946 01 M 7 282 Contents 8 282 Vedligeholdelse 107 Bortskaf
85. ent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques Le TV 301 Navigator est un syst me int gr constitu d une pompe turbomol culaire con ue pour des applications de vide pouss et ultrapouss et dot d un contr leur Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant vitesse lev e 56000 tr min maxi mue par un moteur lectrique triphas haut rendement Le TV 301 Navigator est totalement exempt d agents polluants et il est par cons quent indiqu pour toutes les applications exigeant un vide propre Le TV 301 Navigator est en outre dot de connecteurs auxiliaires permettant d alimenter un ventilateur suppl mentaire de commander la soupape de ventilation de le piloter distance l aide d un ordinateur host connect par ligne s rielle Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appen dice Technical Information TV 301 Navigator User Manual 87 900 946 01 M 43 282 3 Mode d emploi Indication
86. entamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error TV 301 Navigator User Manual 87 900 946 01 M Manual de istrucciones 4 Parada del TV 301 Navigator Para parar el TV 301 Navigator nte con desenchufarlo de la corriente El controler incorporado detiene inmediatamente la bomba ADVERTENCIA Para seguridad del operador el controlador Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE Las altas tensiones que se desarrollan en el controlador pueden provocar graves da os o incluso resultar fatales Desconectar el cable de alimentaci n antes de ejecutar las operaciones de mantenimiento en el interior de la unidad requerimientos de las normas CE Parada de Emergencia Para detener en condiciones de emergencia el TV 301 Navigator es necesario desconectar del controlador el cable de alimentaci n TV 301 Navigator User Manual 87 900 946 01 M 65 282 4 Manual de istrucciones Mantenimiento Mantenimiento EI TV 301 Navigator no necesita ning n mantenimiento C
87. er 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 246 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Window Meanings Tab 8 Window Meanings N Read Write Datatype Description Admitted Values 000 R W L Start Stop in remote mode Start 1 the window is a read only Stop 0 008 R W L Remote default or Serial Remote 1 configuration Serial 0 default 1 100 R W L Soft Start YES 1 write only in Stop condition NO 0 101 R W N Set Point type 0 Frequency 1 Current 2 Time default 0 102 R W N Set Point threshold expressed default 867 in Hz mA or s 103 R W N Set Point delay time between 0 to 99999 the pump start and the set default 0 point check seconds 104 R W L Set Point signal activation 0 high level type the signal can be high active level active or low level 1 low level active active default 0 105 R W N Set point hysteresis in of 0 to 100 threshold default
88. er ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta espec fica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Arg n para proteger los rodamientos v ase el anexo Technical Information ADVERTENCIA Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos TV 301 Navigator User Manual 87 900 946 01 M 63 282 4 Manual de istrucciones Uso Encendido y Uso del TV 301 Navigator 64 282 Para encender el TV 301 Navigator basta con suministrar la tensi n de alimentaci n El controlador incorporado reconoce autom ticamente la presencia de las sefiales de interblogueo y de arrangue y activa la bomba La modalidad Soft Start est prevista para poner en marcha la bomba luego de un per odo prolongado de inactividad Para utilizar una puesta en marcha Soft Start activa es necesario habilitar la forma anteriormente indicada mediante software v ase el apartado RS 232 485 COMMUNICATION DESCRIPTION en el anexo Technical Information El LED verde LD1 situado en el panel de la base del TV 301indica con la frecuencia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba est en rotaci n normal parpadea l
89. ertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact vertemperature Temp 2 Purge flow Cooling defective Clogging sss OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier reguirements e Cust
90. et satisfaire les requis des normes CE Les tensions lev es qui se d veloppent dans le contr leur peuvent provoquer de graves endommagements ou la mort Avant d effectuer les op rations d entretien l int rieur de l unit d brancher le c ble d alimentation Arr t d urgence Pour arr ter le TV 301 Navigator en conditions d urgence il faut d brancher le cordon d alimentation du contr leur TV 301 Navigator User Manual 87 900 946 01 M 51 282 3 Mode d emploi Entretien Entretien Le TV 301 Navigator n exige aucun entretien particulier Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent qui permet d obtenir une pompe r g n r e en remplacement de la pompe endommag e Avant de renvoyer une pompe au constructeur pour r paration ou advanced exchange service remplir et faire parvenir au bureau de vente local la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emballage du syst me avant l exp dition 52 282 En cas de mise au rebut de la pompe proc der son
91. etnek Haszn ljon port l s szil rd r szekt l mentes leveg t vagy k z mb s g zt a szivatty szell ztet s hez A szell z porton l v nyom snak 2 barn l kisebbnek kell lennie a l gk ri nyom s f l tt Agressz v g zok szivatty z s hoz ezek a szivatty k fel vannak szerelve egy k l nleges porttal hogy lehet v tegy k k z mb s g z pl N2 Ar stabil raml s t v delmet visel szivatty sz m ra l sd Technical Information f ggel k VESZ LY Amikor a szivatty t m rgez t zvesz lyes vagy radioakt v g zok szivatty z s ra haszn lja k vesse az egyes g zok kezel s re vonatkoz elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben 152 282 TV 301 Navigator User Manual 87 900 946 01 M Felhaszn l i K zik nyv 11 A TV 301 Navigator bekapcsol sa s haszn lata A TV 301 Navigator bekapcsol s hoz r kell kapcsolni a t pfesz lts get A be p tett vez rl automatikusan felismeri a kapcsolatot s a start jel jelenl t t s elind tja a szivatty t A Soft Start m d a szivatty hosszabb le ll st k vet elind t s ra szolg l A Soft Start m d ind t s hoz azt aktiv lni kell a megfelel szoftver paranccsal l sd RS 232 485 COMMUNICATION DESCRIPTION a Technical Information f ggel kben A TV 301 Navigatoron elhelyezett z ld LED a villog s nak gyakoris g val jelzi a rendszer zemi k r lm nyeit a nem v
92. expected However if the effect is grater than the case should be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Accessories and Spare Parts Tab 9 Accessories and Spare Parts DESCRIPTION PART NUMBER Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and Navigator Software 969 9883 Inlet screen ISO 100 969 9302 Inlet screen ISO 160 969 9303 Heater band 120 V 969 9804 Heater band 220 V 969 9803 Water cooling kit 969 9337 Plastic water cooling kit 969 9347 Air cooling kit for Navigator Controller 969 9299 Fan extension cable 969 9949 Bracket for Navigator Controller side mounting 969 9970 Vibration isolator ISO 100 969 9344 Vibration isolator CF 6 969 9334 Vibration isolator ISO 160 969 9345 Vibration isolator CF 8 969 9335 Vent flange NW 10 KF M8 969 9108 Vent valve for TV 301 AG Rack Controller 969 9844 Vent valve for Navigator Controller 969 9834 Purge valve with KF16 flange 969 9239 Purge valve with 7 16 flange 969 9240 Purge valve KF16 M12 20 SCCM 969 9241 Purge valve 7 16 M12 20 SCCM 969 9242 Foreline flange KF25 1 4 gas 969 9130 Forepump DS 302 with 1 ph universal motor 949 9325 Forepump SH 110
93. felse 108 Bruksanvisning 109 S kerhetsanvisningar f r Molekyl ra turbopumpar 110 Allm n information 111 F rvaring 112 F rberedelser f r installation 113 Installation 114 Anv ndning 116 Underh ll 119 Bortskaffning 120 Instruksjon Manual 121 Sikkerhetsanvisninger for Turbomolekyl re pumper 122 Generell informasjon123 Lagring 124 Klargj re til installasjon 125 Installasjon 126 Bruk 128 Vedlikehold 131 Eliminering 132 10 Ohjek sikirja 133 Turbomolekyylipumppujen Turvaohjeet 134 TV 301 Navigator User Manual 87 900 946 01 M Contents Yleisi tietoja 135 Varastointi 136 Valmistelut asennusta varten137 Asennus 138 K ytt 140 Huolto 143 H vitt minen 144 11 Felhaszn l i K zik nyv 145 Biztons gi tmutat Turb molekul ris szivatty khoz 146 ltal nos inform ci 147 T rol s 148 El k sz t s telep t sre 149 Telep t s 150 Haszn lat 152 Karbantart s 155 Megsemmisit s 156 12 Podrecznik Instrukcji 157 Wskaz wki dotyczace bezpiecze stwa dla Pomp Turbomolekularnych 158 Og lne Informacie 159 Magazynowanie 160 Przygotowanie do instalacji 162 Instalacja 163 TV 301 Navigator User Manual 87 900 946 01 M 9 282 Contents 10 282 13 14 U ytkowanie 165 Konserwacja 168 Przetworstwo odpadow 169 N vod k Pou it 171 Bezpe nostn n vod pro Turbomolekul rni vyv vy 172 V eobecn informace 173 Uskladn ni 174 P prava k
94. gasser kv lstof eller argon for at beskytte lejerne se bilaget Technical Information ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser f lges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser 104 282 TV 301 Navigator User Manual 87 900 946 01 M Istruktionsbog 7 Start og anvendelse af TV 301 Navigator For at starte TV 301 er det tilstr kkeligt at tilslutte et forsyningsstik Den indbyggede styreenhed genkender blokerings og startsignaler automatisk og starter pumpen Soft Start moden bruges for at t nde pumpen efter lang stilstand For at aktivere SOFT START metoden skal ovenn vnte m de programmeres ved hj lp af software se afsnit RS 2327485 COMMUNICATION DESCRIPTION i bilaget Technical Information Den gr nne LED LDI der er anbragt p panelet p TV 301 s fundament angiver systemets funktion ved blink konstant t ndt pumpen er i normal rotation a langsomme blink periode p ca 400 ms systemet er i stilling for acceleration bremsning stop eller Waiting for interlock a hurtige blink periode p ca 200 ms fejl TV 301 Navigator User Manual 87 900 946 01 M 105 282 7 Istruktionsbog Nodstop Stop af TV 301 Navigator For at afbryde TV 301 Navigator er det tilstr kkeligt at afbryde stromtilforselen Den indbyggede styreenhed afbryder straks pumpen For operat rens sikker
95. gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine grof3e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise TV 301 Navigator User Manual 87 900 946 01 M Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist f r den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem fsem Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mifsachtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung Modell TV 301 Navigator ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuumanwendungen integriert mit einem entsprechenden Controller besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine max 56000 1 min erreicht die von e
96. gents atmosph riques pluie gel neige la poussi re aux gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique temp rature de 5 C 35 C Cf graphique dans Technical Information a humidit relative 0 95 non condensante En pr sence de champs magn tiques la pompe doit tre prot g e l aide d crans appropri s Pour tout autre renseignement se reporter l opuscule Technical Information Le TV 301 Navigator doit tre connect une pompe primaire Cf sch ma dans Technical Information TV 301 Navigator User Manual 87 900 946 01 M 47 282 3 Mode d emploi Installation Le TV 301 Navigator peut tre install e dans n importe quelle position Le fixer dans une position stable en reliant la bride d entr e de la turbopompe une contre bride fixe pouvant supporter un couple de serrage de 1000 Nm autour de son axe Par exemple le flasque ISO 100 K peut tre fix l aide de brides en acier haute r sistance comme le mod le Agilent IC 63250 DCMZ Le tableau suivant indique pour chaque dimension de flasque le nombre de brides IC 63250 DCMZ n cessaires et le couple de fixation correspondant Tab 1 BRIDE TYPE DECOLLIER N COUPLE DE SERRAGE ISO 100 K Collier double filet M10 4
97. gr nser och f rs ljningsvillkor TV 301 Navigator User Manual 87 900 946 01 M E Agilent Technologies TV 301 Navigator User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Generell informasjon 122 Lagring 124 Klargj re til installasjon 125 Installasjon 126 Bruk 128 Starte og bruke TV 301 Navigator 129 Stoppe TV 301 Navigator 130 N dstopp 130 Vedlikehold 131 Eliminering 132 Oversetting av den opprinnelige samsvarserkl ringen 122 121 282 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Sikkerhetsanvisninger for Turbomolekyl re pumper De turbomolekyl re pumpene som er beskrevet i den f lgende Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt L N IE For unng skader p utstyret og forebygge operatorskader ma installasjonsanvisningene beskrevet i denne manualen f lges n ye 122 282 TV 301 Navigator User Manual 87 900 946 01 M Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren bor lese denne brukerveiledningen og all annen informasjon fra Agilent for utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hende
98. gy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad 156 282 TV 301 Navigator User Manual 87 900 946 01 M Podrecznik Instrukcji 12 Megsemmisit s 1 00 0 12 0 Podrecznik Instrukcji e a e E Wskaz wki dotyczace bezpiecze stwa dla Pomp o Turbomolekularnych 158 Og lne Informacje 159 Magazynowanie 160 Przygotowanie do instalacji 162 Instalacja 163 U ytkowanie 165 W czenie i U ytkowanie systemu TV 301 Navigator 166 Zatrzymanie systemu TV 301 Navigator 167 Zatrzymanie Awaryjne 167 Konserwacja 168 Przetworstwo odpadow 169 Ttumaczenie instrukcji oryginalnej TV 301 Navigator User Manual 87 900 946 01 M 157 282 12 Podrecznik Instrukcji Wskaz wki dotyczace bezpiecze stwa dla Pomp Turbomolekularnych Wskaz wki dotyczace bezpiecze stwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obstugi posiadaja wysoka ilo energii kinetycznej spowodowanej bardzo wysok pr dko ci obrotow razem z masa w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z
99. hed skal Turbo V controller en str mforsynes med et 3 tr det fodekabel se tabellen over de bestilbare stykker fodekablet skal v re udstyret med et stik som skal v re godkendt p international plan Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at undg elektriske st d og opfylde kravene if lge CE EF normerne De h je sp ndinger som udvikles i controller en kan for rsage alvorlige skader eller d den F r der foretages vedligeholdelses operationer inde i enheden skal man koble f dekablet fra N dstop Afbrydelse af TV 301 Navigator i n dsituationer sker ved at koble ledningen fra styreenheden 106 282 TV 301 Navigator User Manual 87 900 946 01 M Istruktionsbog 7 Vedligeholdelse TV 301 Navigator beh ver ikke nogen vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale Inden der foretages noget som helst indgreb p systemet skal str mmen f rst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted der udskifter pumpen med en repareret pumpe Inden pumpen sendes til konstrukt rens reparationsv rksted eller advanced exchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual
100. i esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 35 C vedere grafico nel appendice Technical Information umidit relativa O 95 non condensante In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Technical Information per ulteriori dettagli Il TV 301 Navigator deve essere collegato ad una pompa primaria vedere schema in Technical Information TV 301 Navigator User Manual 87 900 946 01 M 19 282 1 Istruzioni per uso Installazione II TV 301 Navigator pu essere installato in gualsiasi posizione Fissare il TV 301 Navigator in posizione stabile collegando la flangia di ingresso della turbopompa ad una controflangia fissa capace di resistere ad una coppia di 1000 Nm attorno al proprio asse Per esempio la flangia ISO 100 K pu essere fissata con morsetti in acciaio ad alta resistenza tipo modello Agilent IC 63250 DCMZ La seguente tabella descrive per ogni dimensione flangia il numero di morsetti IC 63250 DCMZ necessari e con guale coppia di serraggio stringerli Tab 1 FLANGIA TIPO DI MORSETTO N COPPIADI SERRAGGIO ISO 100K Morsetto doppio con filettat
101. ia pomp nie nale y przekracza nastepujacych warunk w rodowiskowych temperatura od 20 C do 70 C a wzgl dna wilgo od 0 do 95 bez opar klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesi cy od daty wysy ki TV 301 Navigator User Manual 87 900 946 01 M Podrecznik Instrukcji 12 Magazynowanie Je eli z jakiegokolwiek powodu czas magazynowania jest dtu szy nale y odesta pompe do fabryki W celu jakiejkolwiek informacii prosimy skontaktowa sie z miejscowym przedstawicielem firmy Agilent TV 301 Navigator User Manual 87 900 946 01 M 161 282 12 Podrecznik Instrukcji Przygotowanie do instalacji Przygotowanie do instalacji System TV 301 Navigator jest dostarczany w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu TV 301 Navigator ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska Aby unikn problem w odgazowywania nale y nie dotyka go ymi r koma cz ci przeznaczony
102. il po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte kontaktn stredisko spolo nosti Agilent kde v m pokazen syst m vymenia Sk r ne syst m odo lete na opravu alebo v menu mus te vyplni dotazn k Zdravie a bezpe nos Dotazn k pripojen k n vodu na pou itie je potrebn vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia v vevy mus prebehn v s lade so pecifick mi predpismi danej krajiny TV 301 Navigator User Manual 87 900 946 01 M 193 282 14 N vod na Obsluhu Likvid cia Likvid cia V znam loga WEEE nach dzaj ceho sa na t tkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu E s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skontaktoval s dod vate om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja 194 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Splo ne informaci
103. ilent f r udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler TV 301 Navigator systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine 56000 omdr min Turbinen drives af en elektrisk trefasemotor med h j effekt TV 301 Navigator er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum TV 301 Navigator har endvidere hj lpestik der g r det muligt at forsyne ventilator styre ventilationsventilen og fjernstyre den ved hj lp af en v rtscomputer gennem seriel forbindelse RS 232 RS 485 De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger TV 301 Navigator User Manual 87 900 946 01 M 99 282 7 Istruktionsbog Opbevaring I brugsanvisningen anvendes f lgende standardrubrikker serie Denne advarselsmeddele
104. illog sn l a szivatty rendesen forog lassan villog kb 400 ms os peri dus a rendszer gyorsul sban f kez sben le ll s vagy kapcsolatra v r llapotban van a gyorsan villog kb 200 ms os peri dus az meghib sod st jelent TV 301 Navigator User Manual 87 900 946 01 M 153 282 11 Felhaszn l i K zik nyv Haszn lat A TV 301 Navigator kikapcsol sa A TV 301 Navigator kikapcsol s hoz le kell kapcsolni a t pfesz lts get A be p tett vez rl azonnal le ll tja a szivatty t A g pkezel biztons ga rdek ben a Turbo V vez rl egys get h romeres bet pk bellel kell ell tni l sd a megrendelhet alkatr szek t bl zat t ami egyik v g n nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen az EK normat v iban lefektetett biztons gi k vetelm nyeknek A magasfesz lts g ami az ellen rz egys gben keletkezik s lyos s r l seket s t hal lt okozhat Miel tt az egys g belsej ben karbantart si munk t v gezne kapcsolja le az egys gr l a t pfesz lts g szolg ltat k belt V szle ll t s A TV 301 Navigator v szhelyzetben val azonnali le ll t s hoz el kell t vol tani a t pk belt a h l zati dugaszb l 154 282 TV 301 Navigator User Manual 87 900 946 01 M Felhaszn l i K
105. inem Hochleistungs drehstrommotor angetrieben wird Modell TV 301 Navigator enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch f r Anwendungen die ein sauberes Vakuum erfordern Modell TV 301 Navigator verf gt des weiteren ber Zusatzanschl sse ber die ein zus tzlicher Ventilator versorgt das Entl ftungsventil gesteuert oder die Vorrichtung von einem Host Computer ber eine serielle Leitung gesteuert werden kann RS232 RS485 In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten TV 301 Navigator User Manual 87 900 946 01 M 29 282 2 Gebrauchsanleitung Allgemeine Informationen In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermafsen hervorgehoben VORSICHT Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausfiihrungsweise die bei unkorrekter Ausfiihrung schwere Verletzungen hervorrufen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 30 282 TV 301 Navigator User Manual 87 900 946 01 M Gebrauchsanleitung 2 Lagerung Um ein H chstma an Effizienz und Zu
106. ing Veiligheidsinstructies voor Turbomoleculaire pompen Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen MAP STA K A Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 84 282 TV 301 Navigator User Manual 87 900 946 01 M Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De TV 301 Navigator is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen plus bijbehorende controller bestaat Het systeem is in staat om elk type gas of gasver
107. ingen som kan v re et firma eller en forhandler som s rger for oppsamling og eliminering etter ha kontrollert avtal og betingelser i kj pekontrakten 132 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet 134 Yleisi tietoja 135 Varastointi 136 Valmistelut asennusta varten 137 Asennus 138 K ytt 140 TV 301 Navigatorin k ynnistys ja k ytt 141 TV 301 Navigatorin pys ytt minen 142 H t pys ytys 142 Huolto 143 H vitt minen 144 Alkuper isen ohjeiden k nn s GEB Agilent Technologies 133 282 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea maara kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergia saattaa vapautua VAROITUS T ss k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 134 282 laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v ltt miseksi TV 301 Navigator User Manual 87 900 946 01 M Ohjek sikirja 10 Yleisi tietoja Tama laite on tarkoitettu ammattimaiseen kaytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja
108. instalaci 175 Instalace 176 Pou it 178 dr ba 181 Likvidace 182 Navod na Obsluhu 183 Bezpe nostne pokyny pre Turbomolekularne wyvewy 184 V eobecne informacie 185 Uchov vanie 186 Pr prava na in tal ciu 187 In tal cia 188 Pou itie 190 dr ba 193 Likvid cia 194 TV 301 Navigator User Manual 87 900 946 01 M Contents 15 Priro nik za Navodila 195 Varnostna navodila za Turbomolekularne rpalke 196 Splo ne informacije 197 Shranjevanje 198 Priprava za monta o 199 Montaza 200 Uporaba 202 Vzdr evanje 204 Odlaganje opadkov 204 16 Instructions for Use 205 Safety Guideline for Turbomolecular Pumps 206 General Information 207 Storage 208 Preparation for Installation 209 Installation 210 Use 212 Maintenance 214 Disposal 215 17 Technical Information 217 Description of the TV 301 Navigator 219 Technical Specification 224 TV 301 Navigator Outline226 TV 301 Navigator User Manual 87 900 946 01 M 11 282 Contents 12 282 Interconnections 229 How to Connect the Open Collector Inputs of the Controller 235 Input power connection on the model 969 8972 241 RS 232 RS 485 communication description 241 Inlet Screen Installation 251 Heater Band Installation 254 Air Cooling Kit Installation 256 Water Cooling Kit Installation 258 Vent Accessories 261 Vibration Isolator Installation 264 Purge Valve Installation 264 Serial Cable Installation 265 TV 301Controller Installati
109. ion The supplied serial cable must be installed when the TV 301 Navigator or the optional vent valve have to be controlled by means of a remote computer The cable is installed fixing the 9 pin D type connector into the P2 serial connector as shown in the following figure Figure 50 TV 301 Navigator User Manual 87 900 946 01 M 265 282 17 Technical Information TV 301Controller Installation TV 301Controller Installation The controller can be mounted in two position bottom mounting as per the complete system side mounting To install the controller execute the following procedures Bottom Mounting See the following figure 1 2 J 6 GI R Turn the pump upside down Screw the 4 fixing studs provided with the accessories bag in the holes on the bottom of pump Place the controller on the studs aligning the 4 rubber holes on the top of the controller case Press the controller towards the pump Turn the pump again Plug the line cord and connect the pump cable to the pump Connect the mating connector with the jumper on the interlock signal to start the pump ANA Figure 51 Mounting 1 266 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Side Mounting The L shaped bracket P N 969 9970 is available as an option See the following figure 1 Screw the 4 fixing st
110. ions or harsh movements of the pump when in operation The bearings may become dam aged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like N2 Ar for pump bearing protection see the appendix Technical Information 212 282 When employing the pump for pumping toxic flammable or radioactive gases please follow the reguired procedures for each gas disposal Do not use the pump in presence of explosive gases TV 301 Navigator User Manual 87 900 946 01 M Instructions for Use 16 Switching on and Use of TV 301 Navigator To switch on the TV 301 Navigator it is necessary to supply the mains The integrated controller automatically recognizes the interlock and start signals presence and start up the pump Soft Start mode is used to start the pump after it has stopped for a long time To start with the Soft Start function on activate the mode in the software see paragraph RS 232 485 COMMUNICA TION DESCRIPTION in the Technical Information appendix The green LED located on the TV 301 Navigator base front panel indicates with its flashing frequency the system operating conditions a with no flashing the pump is normally rotating a slowly flashing period of about 400 ms the sy
111. je 196 Shranjevanje 198 Priprava za monta o 199 Monta a 200 Uporaba 202 Vklop in uporaba naprave TV 301 Navigator Izklop naprave TV 301 Navigator 203 Zaustavitev v sili 203 Vzdrzevanje 204 Odlaganje opadkov 204 Prevod navodil v izvirniku XE Agilent Technologies 196 203 195 282 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 196 282 TV 301 Navigator User Manual 87 900 946 01 M Priro nik za Navodila 15 Splo ne informacije POZOR Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupo tevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi TV 301 Navigator je integriran sistem s turbomolekularno rpalko za
112. k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak FIGYELEM G zkivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alkalmas v delmet Abra 1 A k rnyezetnek val norm l kitetts g nem tudja k ros tani a TV 301 Navigatort M gis aj nlatos z rva tartani a rendszerbe val telep t sig igy megakad lyozva a por ltali szennyez d s b rmely form j t TV 301 Navigator User Manual 87 900 946 01 M 149 282 11 Felhaszn l i K zik nyv Telep t s Telep t s FIGYELEM Ne t vol tsa el az ntapad cs kot s a v d kupakot csak a turb szivatty rendszerre csatlakoztat sa el tt 150 282 bra 2 Ne telep tse valamint ne haszn lja a szivatty t atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos
113. k Instrukcji Przetworstwo odpadow 170 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual N vod k Pou it Bezpe nostn n vod pro Turbomolekul rn v vevy 172 V eobecn informace 173 Uskladn ni 174 P prava k instalaci 175 Instalace 176 Pou it 178 Zapnut a pou v n v v vy TV 301 Navigator 179 Vypnut v v vy TV 301 Navigator 180 Nouzov zastaven 180 dr ba 181 Likvidace 182 P eklad origin ln ho n vodu GE Agilent Technologies 171 282 13 N vod k Pou it Bezpe nostn n vod pro Turbomolekul rn vyv vy Bezpe nostn n vod pro Turbomolekularni v vevy Turbomolekul rn vyv vy jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V pr pad syst mov nefunk nosti napr kontaktu rotoru anebo statoru nebo pri zhroucen rotoru m e doj t k uvoln n rota n energie 4 1243 HM Pokyny k instalaci uveden v tomto n vodu mus b t p sn dodr ov ny za elem prevence po kozen za izeni a zran ni obsluhy 172 282 TV 301 Navigator User Manual 87 900 946 01 M N vod k Pou it 13 V eobecn informace Toto zar zen je ur eno pro odborn ky U ivatel by si m l pred pou it m zarizeni prec st tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d
114. kauksen purkamisen aikana tulee varoa erityisesti TV 301 Navigatorin putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta HUOMIO Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta Kuva 1 TV 301 Navigator ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen TV 301 Navigator User Manual 87 900 946 01 M 137 282 10 Ohjek sikirja Asennus Asennus HUOMIO Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n 138 282 Kuva 2 Pumppua ei tule asentaa ja tai k ytt ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen a l mp tila 5 C 35 C ks Technical Information liitteen kaaviota suhteellinen kosteus 0 95
115. kez figyelmeztet jelz seket haszn lja A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem tartanak be az a berendez s k rosod s t okozhatja VESZ LY A vesz lyt jelz zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra ami ha nem megfelel en v gzik el s lyos szem lyi s r l sekhez vezethet A megjegyz sek fontos a sz vegb l kivonatolt inform ci kat tartalmaznak T rol s FIGYELEM A Agilent turbomolekul ris szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni a szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni a h m rs klettartom ny 20 C 70 C a relativ p ratartalom 0 95 nem kondenz l a A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti ket a Egy turbomolekul ris szivatty rakt roz si ideje 10 h nap a sz ll t s d tum t l sz m tva Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty t vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Agilent v kuumkereskedelmi s szolg ltat si k pviselethez 148 282 TV 301 Navigator User Manual 87 900 946 01 M Felhaszn l i K zik nyv 11 El k sz t s telep t sre A TV 301 Navigatort
116. koms med hj lp av en h gvarvig turbin max 56000 varv minut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i TV 301 Navigator som d rf r passar f r till mpningar som kr ver ett rent vakuum TV 301 Navigator har dessutom en hj lpkontakt som g r det m jlig att f rse str m till en extra ventilator att kontrollera avluftningsventilen och att fj rrstyra den med hj lp av en host dator som r ansluten genom seriell f rbindelse RS 232 RS 485 De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical information TV 301 Navigator User Manual 87 900 946 01 M 111 282 8 Bruksanvisning F rvaring OBSERVER I bruksanvisningen anv nds f ljande standardrubriker Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna annat fall finns risk f r sv ra personskador Detta visar p viktig information texten F rvaring OBSERVER Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respe
117. kteras Temperaturomr de 20 C till 70 C a Relativ fuktighet 0 till 95 2 utan kondens a Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift f r f rsta g ngen De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information 112 282 TV 301 Navigator User Manual 87 900 946 01 M Bruksanvisning 8 F rberedelser f r installation TV 301 Navigator levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TV 301 Navigator inte tappas eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd Piard Komponenter som skall uts ttas f r vakuum f r inte hanteras med bara hander pga kontamineringsrisken Anv nd alltid handskar eller liknande skydd Figur 1 Normal p verkan fr n omgivningen kan inte skada TV 301 Navigator Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den TV 301 Navigator User Manual 87 90
118. lapj n kereszt l FIGYELEM A TV 301 Navigator a m sodik telep t si vagy t lfesz lts g kateg ri hoz tartozik az EN 61010 1 direkt va szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zathoz A TV 301 Navigatornak olyan bemeneti kimeneti s soros kommunik ci s csatl z sai vannak amelyeket gy kell k ls ramk r kh z csatlakoztatni hogy elektromos r szek ne legyenek hozz f rhet k Gy z dj n meg r la hogy a TV 301 Navigatorhoz csatlakoztatott eszk z megfelel egyes hiba eset n is az RN 61010 1 direkt va szerint Opcion lis tartoz kok telep t s hez v lassza a Technical Informationt TV 301 Navigator User Manual 87 900 946 01 M 151 282 11 Felhaszn l i K zik nyv Haszn lat Haszn lat Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra meleg t se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 120 C ot Soha ne haszn lja a turb szivatty t ha a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz nem z rja azt le a lez r karima Ne rintse meg a turb szivatty t vagy annak tartoz kait a meleg t si folyamat k zben A magas h m rs klet g si s r l seket okozhat 19430301 Ker lje a szivatty t s t razasat vagy durva mozgat s t zem k zben A csap gyak megs r lh
119. lats med l sfl nsen Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika brannskador Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r igang Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser som rfria fran damn eller andra partiklar Ingangstrycket mot ratt d rr masteunderstiga 2 bar ut ver det atmosfariska trycket F r pumpning av fratande gaser ar dessa pumpar f rsedda med en speciell ppning igenom vilken man ska leda en str m av delgas kv ve eller argon f r att skydda lagren se bilagan Technical information 116 282 D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten av explosiva gaser TV 301 Navigator User Manual 87 900 946 01 M Bruksanvisning 8 Start och anv ndning av TV 301 Navigator F r att starta TV 301 beh ver du bara ansluta till ett eluttag Den inbyggda styrenheten k nner automatiskt igen f rreglings och startsignaler och startar pumpen L get Sof Start har f ruts tts f r att t nda pumpen efter ett l ngre stillast ende F r en start med Sof Start m ste man aktivera ovann mnda l ge genom mjukvaran se stycket RS 232 485 COMMUNICATION DESCRIPTION i bilagan Technical information Den gr na lysdioden LD1 p underd
120. le rappresentante della Agilent TV 301 Navigator User Manual 87 900 946 01 M 17 282 1 Istruzioni per uso Preparazione per installazione Preparazione per l installazione II TV 301 Navigator viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il TV 301 Navigator e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente mia rat 3 Onde evitare problemi di degasamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata Figura 1 II TV 301 Navigator non pu essere danneggiato rimanendo semplicemente esposto all atmosfera Si consiglia comunque di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere 18 282 TV 301 Navigator User Manual 87 900 946 01 M Istruzioni per l uso 1 Installazione NYHA Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema Figura 2 Non installare e o utilizzare la pompa in ambient
121. lent SH 110 Operating position any Cooling requirements Natural air convection Forced air or water optional Operating ambient temperature 5 Cto 35 C Coolant water flow 200 l h 0 89 GPM temperature 10 C to 30 C pressure 3 to 5 bar 45 to 75 Psi Bakeout temperature 120 C at inlet flange max CF flange 80 C at inlet flange max ISO flange Noise level lt 45 dB A at 1 meter Pwr supply mains Input voltage 100 240 Vac Input freg 50 60 Hz Max input pwr 300 VA Stand by pwr 10 W Max oper power 150 W with water or air cooling Protection fuse 4 A 224 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Pwr supply 24 Vdc Input voltage 24 Vdc Max input pwr 200 W Stand by pwr 10 W Max oper power 150 W with water or air cooling Protection fuse 8A Compliance with UNI EN 292 1 UNI EN 292 2 EN CENELEC 55011 IEC 1000 4 2 ex 801 2 IEC 1000 4 3 ex 801 3 IEC 1000 4 4 ex 801 4 EN 61010 1 IEC 1010 1 EN 1012 2 Power cable With European or NEMA plug 3 meters long optional Serial communication Navigator RS232 cable with a 9 pin D type male connector kit and a 9 pin D type female connector and Navigator software optional Pump Input 75 Vac three phase 963 Hz Lubricant permanent lubrication Installation category Pollution degree 2 Storage
122. llas oportunas V ase el anexo Technical Information para m s detalles El TV 301 Navigator ha de conectarse a una bomba primaria v ase diagrama en Technical Information TV 301 Navigator User Manual 87 900 946 01 M 61 282 4 Manual de istrucciones Instalaci n El TV 301 Navigator puede instalarse en cualquier posici n Fijar el TV 301 Navigator en posici n estable conectando la brida de entrada de la turbobomba a una contrabrida fija gue puede resistir a un par de 1000 Nm alrededor de su eje Por ejemplo la brida ISO 100 K puede ser fijada con mordazas en acero de alta resistencia tipo modelo tipo Agilent IC 63250 DCMZ La tabla siguiente describe para cada dimensi n de brida el n mero de mordazas IC 63250 DCMZ necesarios y con cual par de apriete apretarlos Tab 1 BRIDA TIPO DEMORDAZA N PAR DE APRIETE ISO 100 K Mordaza doble con rosca M10 4 22 Nm ISO 160 K Mordaza doble con rosca M10 4 22 Nm La turbobomba con brida de entrada ConFlat ha de fijarse a la c mara de vac o mediante los accesorios mec nicos espec ficos Agilent Para m s detalles v ase el anexo Technical Information EI TV 301 Navigator no puede fijarse utilizando su base ATENCI N El TV 301 Navigator pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categ
123. ln m otvorem kter umo uje plynul p tok inertn ho plynu nap N2 Ar pro ochranu lo isek v v vy viz p lohu Technical Information NEBEZPE Pokud pou ivate vyv vu pro erpani toxick ch horlavych nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu Vyv vu nepou vejte v p tomnosti v bu n ch plyn 178 282 TV 301 Navigator User Manual 87 900 946 01 M N vod k Pou it 13 Zapnut a pou v n vyv vy TV 301 Navigator Pro uveden vyv vy TV 301 Navigator do provozu je nutn priv st s ov nap t Integrovan regul tor automaticky zji uje blokov n pritomnost spou t c ch signal a uvede vyv vu do provozu Re im Soft Start slou k zapnut vyv vy po del m vyrazeni z provozu Chcete li zapnout re im Soft Start mus te jej aktivovat pat i n m programov m p kazem viz odstavec RS 232 485 COMMUNICATION DESCRIPTION v pr loze Technical Information Zelen kontrolka um st n na eln m panelu z kladny v v vy TV 301 Navigator indikuje provozn stavy syst mu blik n m a bez blik ni vyv va se ot norm ln pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokov n a rychl blik n interval cca 200 ms poruchov stav TV 301 Navigator User Manual 87 900 9
124. lowing example diagram 232 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 0 b Output V Frequency Hz Figure 18 Fault this open collector output signal is ON when a system fault condition is detected Programmable set point this open collector output signal is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vdc when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example a reference quantity frequency threshold 500 Hz a hysteresis 1 activation type high level TV 301 Navigator User Manual 87 900 946 01 M 233 282 17 Technical Information Interconnections N R D 2 2 g 3 o E o a o 0 495 500 595 Freguency Hz Figure 19 Set point output The set point output stays at O Vdc until the fre quency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes at 24 Vdc and stays at 24 Vdc until the frequency be comes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to delay the set
125. lse vises f r procedurer der skal f lges naje for ikke at risikere maskinskader POLARE Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res pr cist efter anvisningerne modsat fald er der risiko for sv re personskader Dette g r opm rksom p vigtig information i teksten Opbevaring Det er n dvendigt at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent a S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C a relativ fugtighed fra 0 til 95 ikke kondenserende a Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for f rste gang a De turbomolekyl re pumper m opbevares i 10 m neder fra forsendelsesdatoen diste e Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger f s ved henvendelse til den lokale Agilent repr sentant 100 282 TV 301 Navigator User Manual 87 900 946 01 M Istruktionsbog 7 Forberedelser f r installation TV 301 Navigator leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transpo
126. lser som skjer p grunn av manglende oppf lging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser TV 301 Navigator systemet best r av en turbo molekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller faste partikler Pumpingen oppn s med en h yhastighetsturbin maks 56000 opm koplet til en trefaset elektrisk motor TV 301 Navigator har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum TV 301 Navigator har dessuten hjelpekontakter som gir muligheter for forsyning av en ekstra vifte styring av utluftingsventilen og fjernstyring av systemet med en serietilkoplet vertsmaskin De f lgende avsnitt inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information TV 301 Navigator User Manual 87 900 946 01 M 123 282 9 Instruksjon Manual Lagring Denne manualen bruker f lgende standardprotokoll NS ere Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan f re til at utstyret skades OKA Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis
127. mation contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government user
128. mmand this field is not present The field length is variable according to the data type as per the following table Tab 6 DATA TYPE FIELD LENGTH VALID CHARACTERS Logic L 1 0 off V on Numeric N 6 JI JO right justified with 0 Alphanumeric A 10 from blank to ASCII a ETX End of transmission 0x03 a lt CRC gt z XOR of all characters subseguent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt TV 301 Navigator User Manual 87 900 946 01 M 243 282 17 Technical Information RS 232 RS 485 communication description The controller can answers with the following response types Tab 7 Response types Type Length Value Description Logic 1 byte After a read instruction of a logic window Numeric 6 bytes After a read instruction of a numeric window Alphanumeric 10 bytes After a read instruction of an alphanumeric window ACK 1 byte
129. munication Format 8 data bit a no parity TV 301 Navigator User Manual 87 900 946 01 M 241 282 17 Technical Information RS 232 RS 485 communication description a I stop bit a baud rate 600 1200 2400 4800 9600 pro grammable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character a lt STX gt Start of transmission 0x02 a lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 a lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph a lt COM gt Command 0x30 to read the window 0x31 to write into the window 242 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 a lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading co
130. n RS 232 or RS 485 connection the TV 301 TV 301 Navigator User Manual 87 900 946 01 M 239 282 17 Technical Information How to Connect the Open Collector Inputs of the Controller Tab 5 Signal characteristics and use 2 2 SIGNAL NAME 5 V OUT TX RS232 RX RS232 A RS422 Optional GND A RS485 B RS422 Optional B RS485 O O M lo BR GN RESERVED Note that the vent valve can also be controlled by means of the serial connection A serial communication kit with a serial cable and the Navigation software is available optional 240 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Input power connection on the model 969 8972 The following figure shows the input power connection relevant to the model n 969 8972 CND EARTH 4 COMMO Figure 26 CAUTION In order to avoid damage to the connector all the pins must be connected to the external power source RS 232 RS 485 communication description Both the RS 232 and the RS 485 interfaces are available on the connector J6 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navigator software Com
131. n received and operated for the first time by the customer a the shelf life of a turbomolecular pump is 10 months from the shipping date If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations 208 282 TV 301 Navigator User Manual 87 900 946 01 M 16 Instructions for Use Preparation for Installation The TV 301 Navigator is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection TV 301 Navigator User Manual 87 900 946 01 M JH JA SA Figure 1 Normal exposure to the environment cannot damage the TV 301 Navigator Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 209 282 16 Instructions for Use Installation Installation CAUTION Do not remove the adhesive an
132. n lengre periode For sette i gang en Soft Start er det n dvendig stille inn modusen via programvare se avsnittet RS232 485 COMMUNICATION DESCRIPTION i tillegget Technical Information Den gr nne lysdioden LD1 p TV 301 basepanel angir systemets funksjon ved hjelp av blink a den lyser fast pumpen roterer normalt den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock den blinker hurtig ca hver 200 ms feiltilstand TV 301 Navigator User Manual 87 900 946 01 M 129 282 9 Instruksjon Manual Bruk Stoppe TV 301 Navigator TV 301 Navigator stoppes ved kople det fra str mforsyningen Den innebygde styreenheten stanser pumpen umiddelbart Turbo V styreenheten m forsynes med en 3 tr ds str mkabel se tabellen for deler som kan bestilles og utstyrt med et st psel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overholde EU forskriftene H yspenningene som utvikler seg inne i styreenheten kan f re til alvorlige skader eller d dsulykker F r man utf rer vedlikeholdsoperasjoner inne i enheten er det n dvendig kople fra str mkabelen N dstopp Trekk ut nettkabelen fra styreenheten for stoppe TV 301 Navigator i en n dsituasjon 130 282 TV 301 Navigator User Manual 87 900 946 01
133. nait automatiquement la pr sence de signaux d interlock et de d marrage et il actionne la pompe Le mode Soft Start a t con u pour permettre d allumer la pompe apr s une longue p riode d inutilisation Pour mettre en marche en mode Soft Start il est n cessaire d activer ce mode op ratoire l aide du logiciel Cf paragraphe RS232 485 COMMUNICATION DESCRIPTION dans l appendice Technical Information La LED verte LD1 plac e sur le panneau de la base du TV 301 indique par sa fr quence de clignotement les conditions op rationnelles du syst me a allum e fixe la pompe est en rotation normale a clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente interlock a clignote rapidement p riode d environ 200 ms condition d erreur TV 301 Navigator User Manual 87 900 946 01 M Mode d emploi 3 Arr t du TV 301 Navigator Pour arr ter le TV 301 Navigator il suffit de retirer la tension d alimentation Le contr leur incorpor arr te imm diatement la pompe AVERTISSEMENT Pour la s curit de l op rateur le contr leur Turbo V doit tre aliment par un c ble d alimentation 3 fils voir le tableau des parties qui peuvent tre ordonn es dot d une fiche approuv e niveau international Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d charges lectriques
134. nal Utilize este cabo e tomada juntos com uma tomada adequadamente conectada a terra para evitar choques el ctricos e satisfazer os requisitos das normas CE As altas tens es que se desenvolvem no controller podem provocar graves danos ou at morte Antes de realizar opera es de manuten o no interno da unidade desligar o cabo de alimenta o Paragem de Emerg ncia Para parar o TV 301 Navigator em condi es de emerg ncia necess rio desligar do controller o cabo de alimenta o TV 301 Navigator User Manual 87 900 946 01 M 79 282 5 Manual de Istru es Manutenc o Manutenc o O TV 301 Navigator n o requer qualquer manuten o Todas as opera es devem ser efectuadas por pessoal autorizado ATEN O Antes de executar qualquer opera o no sistema deslig lo da alimenta o introduzir ar na bomba abrindo a v lvula espec fica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Agilent que permite obter uma bomba regenerada que substitua a que apresenta defeito Antes de reenviar ao fabricante uma bomba para as repara es ou o advanced exchange service indispens vel preencher e enviar ao escrit rio de vendas local a ficha Seguran a e Sa de anexa ao presente manual de instru es A c pia da mesma deve ser colocada na embalagem do sistema antes
135. nditioned pump to replace that broken down Before returning the pump to the constructor for repairs or advanced exchange service the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping 214 282 If a system is to be scrapped it must be disposed of in accordance with the specific national standards TV 301 Navigator User Manual 87 900 946 01 M Instructions for Use 16 Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale TV 301 Navigator User Manual 87 900 946 01 M 215 282 16 Instructions for Use Disposal 216 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual 17 Technical Information Description of the TV 301 Navigator 219 Pump Description 220 Controller Description 2
136. ne 2 bar pretlakov V vevy s vybaven peci lnym vstupom na vy erp vanie agres vnych plynov ktor umo uj stabiln tok inertn ho plynu napr klad N2 Ar kv li ochrane lo sk v vevy pozri dodatok Technical Information NEBEZPE Ak v vevu pou vate na od erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov 190 282 TV 301 Navigator User Manual 87 900 946 01 M N vod na Obsluhu 14 Zapnutie a pou itie zariadenia TV 301 Navigator Ak chcete zapn zariadenie TV 301 Navigator mus te ho pripoji ku zdroju nap jania Integrovan kontroln modul automaticky rozpozn pr tomnos sign lov spojenia a spustenia a zapne v vevu Re im Soft Start sl i na zapnutie v vevy po dl om vyraden z prev dzky Ak chcete re im Soft Start odblokova mus te ho aktivova vhodn m softwarov m pr kazom pozri as RS 232 485 COMMUNICATION DESCRIPTION v dodatku Technical Information Zelen di da LED na z kladnom elnom paneli zariadenia TV 301 Navigator indikuje frekvenciou blikania sp sob innosti syst mu a iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t chto stavov n beh brzdenie Stop alebo akanie na spojenie a
137. netick ch pol se v v va mus chr nit feromagnetickym stin nim Viz podrobn informace v p loze Technical Information Vyv va TV 301 Navigator se mus p ipojit k prim rn mu erpadlu viz Technical Information TV 301 Navigator User Manual 87 900 946 01 M N vod k Pou it 13 Vyv vu TV 301 Navigator Ize instalovat v libovoln poloze Vyv vu TV 301 Navigator upevn te v n jak stabilni poloze a p vodn p rubu turbov v vy p ipojte k pevn protip rub kter snese torzn moment 1000 Nm kolem sv osy Nap p rubu ISO K lze p ipevnit p chytkami z vysoce pevn oceli jako je typ IC 63250 DCMZ firmy Agilent N sleduj c tabulka uv d nezbytn po et pr chytek IC 63250 DCMZ pro ka dou pr rubu a pr slu n utahovac moment Tab 1 PR RUBA PR CHYTN ZAR ZEN PO ET UTAHOVAC MOMENT ISO 100 K Spony M10 4 22 Nm ISO 160 K Spony M10 4 22 Nm Turbomolekul rn vyv va se vstupn p rubou ConFlat se mus p ipevnit k vakuov komo e pou it m p slu n ho materi lu firmy Agilent Viz podrobn popis v p loze Technical Information V v vu TV 301 Navigator nelze p ipevnit pomoc jej podstavy POZOR Podle sm rnice EN 61010 1 pat v v va TV 301 Navigator do druh elektroinstala n nebo p ep ov t dy Za zen p ipojte do nap jec s t kter spl uje uvedenou t du V v va TV 301 Navigator je vybavena vst
138. nual 87 900 946 01 M Gebrauchsanleitung 2 Stoppen von Modell TV 301 Navigator Zum Stoppen von Modell TV 301 Navigator ist die Versorgungsspannung abzuschalten Der eingebaute Controller sorgt f r den sofortigen Pumpenstopp WARNUNG F r die Sicherheit des Bedieners muss der Controller Turbo V mit einem dreidr htigen Stromkabel siehe Tabelle der Bestellteile versorgt werden das mit einem auf internationaler Ebene genehmigten Stecker ausgestattet ist Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschl ge zu vermeiden und den Anforderungen der EG Richtlinien zu entsprechen Die Hochspannungen die sich im Controller entwickeln k nnen zu schweren Sch den oder zum Tod f hren Vor den Wartungsarbeiten innerhalb der Einheit die Stromkabel trennen Not Aus Zur Stillsetzung von Mod TV 301 Navigator in Notsituationen ist vom Controller das Netzkabel abzuziehen TV 301 Navigator User Manual 87 900 946 01 M 37 282 2 Gebrauchsanleitung Wartung Wartung Modell TV 301 Navigator erfordert keine Wartung Eventuelle Eingriffe d rfen nur von autorisiertem Fachpersonal ausgef hrt werden WARNUNG Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe ber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten k
139. nual 87 900 946 01 M Podrecznik Instrukcji 12 Zatrzymanie systemu TV 301 Navigator Aby zatrzyma TV 301 Navigator wystarczy odtaczy napiecie zasilania Wbudowany sterownik zatrzyma natychmiast pompe ZAGROZENIE Dla zagwarantowania bezpiecze stwa operatorowi kontroler Turbo V powinien by zasilany kablem zasilajacym o 3 przewodach zobacz tabele cze ci dajacych sie zam wi i zamontowana wtyczka zgodna z miedzynarodowymi normami Kabel ten podtaczy wraz z wtyczka do kontaktu uziemionego celem unikniecia pora e pradem elektrycznym oraz spe nienia wymog w norm CE Du e si y wewn trzne wytwarzaj ce si w kontrolerze mog spowodowa powa ne uszkodzenia cia a lub mier Przed przeprowadzeniem czynno ci konserwacyjnych wewn trz tego urz dzenia od czy kabel zasilaj cy Zatrzymanie Awaryjne Aby zatrzyma w stanie awaryjno alarmowym TV 301 Navigator nale y od czy kabel zasilania ze sterownika TV 301 Navigator User Manual 87 900 946 01 M 167 282 12 Podrecznik Instrukcji Konserwacja Konserwacja System TV 301 Navigator nie wymaga zadnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowazniony personel Przed wykonaniem jakiejkolwiek interwencji na systemie nalezy odtaczy go od zasilania otworzy odpowiedni zaw r wlotu powietrza odczeka a do catkowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy bedzie poni ej 50 C
140. number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product
141. o Por exemplo a flange ISO 100 K pode ser fixada com grampos de a o de alta resist ncia como o modelo Agilent IC 63250 DCMZ A tabela seguinte descreve para cada dimens o de flange o n mero de grampos IC 63250 DCMZ necess rios e o torque de aperto a utilizar Tab 1 FLANGE TIPO DE BORNE N TOROUE DE APERTO ISO 100 K Borne duplo com rosca M10 4 22 Nm ISO 160 K Borne duplo com rosca M10 4 22 Nm A turbobomba com flange de entrada ConFlat deve ser fixada na c mara de v cuo atrav s de parafusos espec ficos da mec nica Agilent Para ulteriores detalhes consultar o ap ndice Technical Information O TV 301 n o pode ser fixado atrav s da sua base O TV 301 Navigator pertence segunda categoria de instala o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimenta o apropriada para esta categoria O TV 301 Navigator tem dois conectores para as entradas saidas e para a comunica o de s rie que devem ser ligados aos circuitos externos de modo a n o permitir o acesso s partes sob tens o Assegure se de que o isolamento do dispositivo ligado ao TV 301 Navigator esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 16 282 Para a instala o dos acess rios opcionais consultar Technical Information TV 301 Navigator User Manual 87 900 946 01 M Utiliza o Manual de Istru es 5 Neste par grafo
142. o deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta TV 301 Navigator User Manual 87 900 946 01 M 67 282 4 Manual de istrucciones Eliminaci n 68 262 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual 5 Manual de Istru es Indica es de Seguran a para Bombas Turbomoleculares 70 Informa es gerais 70 Armazenagem 73 Prepara o para a instala o 74 Instala o 75 Utilizac o TI Acendimento e Utiliza o do TV 301 Navigator 78 Paragem do TV 301 Navigator 79 Paragem de Emerg ncia 19 Manuten o 80 Elimina o 81 Tradu o das instru es originais GE Agilent Technologies 69 27 5 Manual de Istru es Indica es de Seguran a para Bombas Turbomoleculares Indica es de Seguran a para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a ene
143. o nom s lade s t mito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek postupom ktor je v rozpore so pecifick mi tandardmi danej krajiny Zariadenie TV 301 Navigator predstavuje integrovan syst m s turbomolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje ve mi r chla turbina max 56000 ot ok min tu poh an vysokov konn m 3 f zovym elektrick m motorom Zariadenie TV 301 Navigator neobsahuje iadne kontamina n inidl a preto sa hod pre aplik cie vy aduj ce ist v kuum Zariadenie je vybaven pomocn mi konektormi na pripojenie al ieho ventil tora na ovl danie vetracieho ventilu a kv li mo nosti ovl dania zo vzdialen ho miesta pomocou hostite sk ho po ta a pripojen ho cez s riov komunika n linku RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information TV 301 Navigator User Manual 87 900 946 01 M 185 282 14 N vod na Obsluhu Uchov vanie N vod na pou itie obsahuje tieto tandar
144. o de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 56000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento El TV 301 Navigator no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vac o limpio Asimismo el TV 301 Navigator posee conectores auxiliares con los que se puede alimentar un ventilador adicional accionar la v lvula de ventilaci n pilotarla a distancia con un ordenador host conectado mediante l nea serial RS 232 RS 485 A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TV 301 Navigator User Manual 87 900 946 01 M 57 282 A Manual de istrucciones Informaci n general Este manual utiliza las convenciones siguientes ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que al no respetarse podr an provocar da os al equipo LL ALIA IN Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una operaci n espec fica que al no realizarse correctamente podr a provocar graves lesiones personales Las notas contienen informaci n importante extra da del texto 58 282 TV 301 Navigator User
145. of waiting for interlock a knippert snel periode van circa 200 ms fouttoestand TV 301 Navigator User Manual 87 900 946 01 M Bedrijfshandleiding 6 Afzetten van de TV 301 Navigator WAARSCHUWING Hiervoor behoeft slechts de stroomvoorziening te worden onderbroken De ingebouwde controller stopt onmiddellijk de pomp Voor de veiligheid van de bediener dient de controller Turbo V gevoed te worden met een driedradige voedingskabel zie de tabel met de bestanddelen die u kunt bestellen voorzien van een stekker met internationale goedkeuring Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen De in de controller ontwikkelde hoge voltage kan ernstige letsels of de dood veroorzaken Maak de voedingskabel los alvorens onderhoudswerkzaamheden in het systeem uit te voeren Noodstop Om de TV 301 Navigator in noodomstandigheden te stoppen moet de stroomtoevoerkabel van de controller losgemaakt worden TV 301 Navigator User Manual 87 900 946 01 M 93 282 6 Bedrijfshandleiding Onderhoud Onderhoud De TV 301 Navigator is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd perso neel worden uitgevoerd WAARSCHUWING Alvorens werkzaamheden aan het systeem uit te voeren de voeding loskoppelen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil
146. okrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem 200 262 Slika 2 Napravo name ajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere a temperatura from 5 C to 35 C glejte diagram pritisk temperatura v prilogi Technical Information a Relativna vla nost 0 95 brez kondenza V prisotnosti magnetnih polje mora rpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical Information TV 301 Navigator morate priklju iti na primarno rpalko glej Technical Information TV 301 Navigator User Manual 87 900 946 01 M Priro nik za Navodila 15 TV 301 Navigator lahko montirate v tevilne pozicije TV 301 Navigator namestite v stabilem polo aj tako da pove ete vhodno prirobnico turbo rpalke na pritrjeno tevno prirobnico ki lahko prenese navor 1000 Nm okoli svoje osi ISO 100 K prirobnico lahko na primer pritrdite s pomo jo jeklenih dr al kot pri Agilent modelu IC 63250 DCMZ Naslednja tabela za vsako prirobnico prikazuje tevilo potrebnih IC 63250 DMZ pritrjeval ter potreben navor za pritrjevanje Tab 1 PRIROBNICA NAPRAVA ZA PRITRJEVANJE N NAVOR IS
147. omers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e f requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Can
148. omoleculares pela primeira vez o cliente deve activ las sempre em modalidade Soft Start 0 tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedi o CUIDADO Se por uma raz o qualquer o per odo de armazenagem for superior ser necess rio enviar outra vez a bomba para o fabricante Para mais informa es contatar o representante local da Agilent TV 301 Navigator User Manual 87 900 946 01 M 73 282 5 Manual de Istru es Prepara o para a instala o Prepara o para a instala o O TV 801 Navigator fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remo o da embalagem tomar muito cuidado para n o deixar cair o controller e para n o submet lo a choques ou vibra es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 899 para a protec o do meio ambiente CUIDADO Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposi o do v cuo Utilizar sempre luvas ou outra protec o adequada Figura 1 O TV 301 Navigator n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no
149. omolekul rne v vevy 184 o V eobecn inform cie 185 Uchov vanie 186 Pr prava na in tal ciu 187 In tal cia 188 Pou itie 190 Zapnutie a pou itie zariadenia TV 301 Navigator 191 Vypnutie zariadenia TV 301 Navigator 192 N dzov zastavenie 192 dr ba 193 Likvid cia 194 Preklad origin lneho n vodu TV 301 Navigator User Manual 87 900 946 01 M 183 282 14 N vod na Obsluhu Bezpe nostn pokyny pre Turbomolekul rne v vevy Bezpe nostn pokyny pre Turbomolekul rne v vevy Turbomolekul rne v vevy op san v nasleduj cej pr ru ke sa vyzna uj vysokou kinetickou energiou a to v aka vysokej r chlosti ot ania v kombin cii so pecifickou hmotnos ou svojich rotorov V pr pade syst movej poruchy napr pri kontakte rotora a statora alebo pri zlomen rotora sa mo e uvolni rota n energia NEBEZPE Pokyny k in tal cii uveden v tomto n vode musia by d sledne dodr ovan aby nedo lo k po kodeniu zariadenia alebo k zraneniu obsluhy 184 282 TV 301 Navigator User Manual 87 900 946 01 M N vod na Obsluhu 14 V eobecn inform cie Toto zariadenie je ur en pre profesion lnych pracovn kov Sk r ne za nete zariadenie pou va pre tajte si n vod na pou itie a v etky al ie pokyny spolo nosti Agilent Spolo nos Agilent nenesie iadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je v s lade dokonca ani v iast
150. on 266 Pump Used with Corrosive Gases 272 Pump Used in Presence of Magnetic Fields 274 Accessories and Spare Parts 275 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari Informazioni Generali 14 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 19 Uso 21 Accensione ed Uso del TV 22 Arresto del TV 301 Navigator 23 Arresto di Emergenza 23 Manutenzione 24 Smaltimento 25 Traduzione delle istruzioni originali E Agilent Technologies 14 13 282 1 Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore energia di rotazione potrebbe essere rilasciata ANTA TAN Per evitare danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 14 282 TV 301 Navigator User Manual 87 900 946 01 M Istruzioni per l uso 1 Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve
151. onare mai la pompa se la flangia di ingresso non collegata alla camera a vuoto o non chiusa con la flangia di chiusura Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu causare lesioni alle persone ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa guando in funzione cuscinetti potrebbero danneggiarsi Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas aggressivi queste pompe sono dotate di una apposita porta attraverso la quale necessario fornire alla pompa un flusso di gas inerte Azoto o Argon per proteggere i cuscinetti vedere l appendice Technical Information AVVERTENZA Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi TV 301 Navigator User Manual 87 900 946 01 M 21 282 1 Istruzioni per uso Uso 22 282 Accensione ed Uso del TV 301 Navigator Per accendere il TV 301 Navigator sufficiente fornire la tensione di alimentazione II controller incorporato riconosce automaticamente la presenza dei segnali di interlock e di avvio ed avvia la pompa II modo Soft S
152. or a El TV 301 Navigator tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tensi n quede accesible Controlar que el aislamiento del dispositivo conectado al TV 301 Navigator mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 62 282 Para instalar los accesorios opcionales v ase Technical Information TV 301 Navigator User Manual 87 900 946 01 M Uso Manual de istrucciones 4 En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vacio la temperatura de la brida de entrada no ha de ser superior a 120 C jADVERTENCIA No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbo bomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas ATENCI N Ev tense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta deb
153. orden Zie de bijlage Technical Information voor meer informatie TV 301 Navigator User Manual 87 900 946 01 M 89 282 6 Bedrijfshandleiding Installatie De TV 301 Navigator moet op een primaire pomp aangesloten zijn zie schema in Technical information De TV 301 Navigator kan in alle standen worden geinstalleerd Bevestig de TV 301 Navigator in een stabiele positie en verbind de in laatflens van de turbopomp met een vaste contraflens die een koppel van 1000 Nm rondom de eigen as kan verdragen De flens ISO 100 K kan bijvoorbeeld worden bevestigd met stalen klemmetjes met grote weerstand zoals model Agilent IC 63250 DCMZ De volgende tabel geeft per flensafmeting het benodigde aantal klemmetjes IC 63250 DCMZ en het bijbehorende aandraaimoment Tab 1 FLENS KLEMTYPE NR AANHAAL KOPPEL ISO 100 K Dubbele klem met M10 schroefdraad 4 22 Nm ISO 160 K Dubbele klem met M10 schroefdraad 4 22 Nm De turbompomp met ConFlat inlaatflens moet aan de vacu mpomp worden bevestigd met behulp van de speciale mechanische bevestigingselementen van Agilent Zie voor meer informatie de bijlage Technical information De TV 301 Navigator kan niet met behulp van zijn eigen basis worden bevestigd OORZICHTIG De TV 301 Navigator behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet De TV
154. oss vel alimentar um ventilador adicional comandar a v lvula de vent accion lo por um controlo remoto atrav s de um computer host conectado por meio de linhas seriais RS 232 RS 485 Nos seguintes par grafos est o descritas todas as informa es necess rias para garantir a seguran a do operador durante o uso da aparelhagem Informa es detalhadas s o fornecidas no ap ndice Technical Information TV 301 Navigator User Manual 87 900 946 01 M 71 282 5 Manual de Istru es Informa es gerais Este manual utiliza as seguintes conven es CUIDADO As mensagens de cuidado s o visualizadas antes de proceder que se n o observadas poderiam causar danos aparelhagem Dua e LE As mensagens de aten o atraem a aten o do operador num procedimento ou uma pr tica espec fica que se n o executada de modo correto poderiam provocar graves les es pessoais As notas cont m informa es importantes estrapoladas pelo texto 72 282 TV 301 Navigator User Manual 87 900 946 01 M Manual de Istru es 5 Armazenagem Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser observadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C humidade relativa de O a 95 n o condensante a ao accionar as bombas turb
155. point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings a reference guantity frequency threshold 867 Hz a hysteresis 2 a activation type high level a delay time O second The Navigator Software optional allows the operator to set all the programmable feature 234 282 When no external input output device is available this connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND input see the following figure TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Figure 20 How to Connect the Open Collector Inputs of the Controller Here below there are the typical connections of the open collector input of the integrated controller to an external system Two cases are considered 1 the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open collector pin are available TV 301 Navigator User Manual 87 900 946 01 M 235 282 17 Technical Information How to Connect the Open Collector Inputs of the Controller 236 262 24 Vdc E gt 5 Vdc Customers device Controller ui JAK A NPN AL 24 Vdc PNP 5 Vdc Customer s device Controller Je
156. powodu p kni cia wirnika energia obrotowa mo e by zwolniona ZAGROZENIE Aby unikna uszkodzenia aparatury i zapobiec uszkodzeniom ciata operator w nale y obowiazkowo przestrzega zalece dotyczacych instalacji opisanych w niniejszej instrukcji obs ugi 158 282 TV 301 Navigator User Manual 87 900 946 01 M Podrecznik Instrukcji 12 Og lne Informacje Ta aparatura jest przeznaczona do uzytku zawodowego Uzytkownik musi przeczyta bardzo uwa nie niniejsza instrukcje ka da dodatkowa informacje dostarczona przez firme Agilent przed u ytkowaniem aparatury Firma Agilent uchyla sie od jakiejkolwiek odpowiedzialno ci w przypadku cz ciowego lub ca kowitego braku przestrzegania instrukcji w przypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych System TV 301 Navigator jest zintegrowanym systemem sk adaj cym si z pompy turbomolekularnej dla zastosowa wysokich i ultra wysokich pr ni jak i przez odpowiedni system sterowania tzw kontroler System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci max 56000 obr min nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci System TV 301 Navigator jes
157. pozor aby zafizeni nespadlo a chra te jej p ed v emi nenad l mi n razy otresy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l Ize 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 POZOR Aby se zamezilo probl m m s odply ovanim nepou vejte hol ruce pri manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu Postava 1 V normalnim prostiedi se vyv va TV 301 Navigator nem ze po kodit Presto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem TV 301 Navigator User Manual 87 900 946 01 M 175 282 13 Navod k Pou it Instalace Instalace POZOR Pred p ipojen m turbomolekul rn vyv vy do syst mu nesundavejte adhezni a ochrann v ko 176 282 Postava 2 V v vu neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je tfeba dodr ovat n sledujici podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem a teplota od 5 C do 35 C viz diagram tlak teplota v pr loze Technical Information relativni vlhkost 0 95 bez sr en V pr tomnosti mag
158. r TV 301 Navigator skal tilsluttes en hovedpumpe se skemaet Technical Information TV 301 Navigator User Manual 87 900 946 01 M Istruktionsbog 7 TV 301 Navigator kan installeres i en hvilken som helst position Fastg r TV 301 Navigator i en stabil position ved at slutte turbopumpens indl bsflange til en fast kontraflange der t ler et moment p 1000 Nm omkring akselen Flangen ISO 100 K kan for eksempel fastg res med klemmer af h jstyrkest l type Agilent model IC 63250 DCMZ Nedenst ende tabel viser hvor mange klemmer af typen IC 63250 DCMZ der kr ves alt efter flangens st rrelse samt med hvilket sp ndingsmoment de skal strammes Tab 1 LANGE KLEMMETYP ANT DREJNINGS MOMENT IS0100K Dobbelt klemme med M10 gevind 4 22 Nm ISO 160K Dobbelt klemme med M10 gevind 4 22 Nm Turbopumpen med ConFlat indlobsflange skal tilsluttes p vakuumkammeret ved hj lp af Agilent monteringsudstyret I bilaget Technical Information findes yderligere detaljer Navigator TV 301 kan ikke fastg res i fundamentet am lee TV 301 Navigator h rer til den anden installationsklasse eller oversp ndingsklasse jf normen EN 61010 1 Slut derfor anordningen til en forsyningslinie som opfylder kravene i denne klasse TV 301 Navigator er forsynet med konnektorer til ind udgange og til seriel kommunikation Konnektorerne skal tilsluttes de eksterne kredsl b s ledes at det ikke er muligt at opn adgang til de sp
159. r chle blikanie interval asi 200 ms chybov stav TV 301 Navigator User Manual 87 900 946 01 M 191 282 14 N vod na Obsluhu Pou itie Vypnutie zariadenia TV 301 Navigator Ak chcete vypn zariadenie TV 301 Navigator mus te ho odpoji od zdroja nap jania Zabudovan kontroln modul v vevu okam ite zastav NEBEZPE Z d vodu bezpe nosti obsluhuj ceho pracovn ka mus by kontroln zariadenie nap jan pomocou 3 ilovej n ry vi tabu ku dielov ktor mo no objedna so z str kou medzin rodne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemne nou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Vysok nap tie v kontrolnom zariaden m e sp sobi v ne kody alebo smrt Prv ne za nete prev dza dr b rske pr ce v tejto jednotke odpojte nap jaciu n ru N dzov zastavenie 192 282 Ak chcete zariadenie TV 301 Navigator okam ite vypn v stave n dze mus te vytiahnu k bel nap jania zo z suvky zdroja nap jania TV 301 Navigator User Manual 87 900 946 01 M N vod na Obsluhu 14 dr ba Zariadenie TV 301 Navigator nevy aduje iadnu dr bu Ak ko vek pravy a opravy syst mu mus vykona autorizovan person l 33711518 Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n vent
160. ressiivisten kaasujen pumppausta varten aukolla jonka l pi pumppuun kuljetetaan jalokaasuja typpi tai argon laakereiden suojaamiseksi katso Technical Information liite VAROITUS Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell 140 282 TV 301 Navigator User Manual 87 900 946 01 M Ohjek sikirja 10 TV 301 Navigatorin k ynnistys ja k ytt TV 301 Navigatorin k ynnistykseen riitt ett se kytket n s hk verkkoon Sis nrakennettu valvoja tunnistaa automaattisesti lukitus ja k ynnistyssignaalit ja k ynnist pumpun Soft Start tapa on k ytett viss pumpun k ynnist mist varten pitk n seisonta ajan j lkeen Jotta k ynnistys voitaisiin saataisiin suorittaa uudelleen Soft Start menetelm ll tulee yll mainittu on aktivoitava uudelleen ohjelmiston kautta ks kappale RS 232 485 COMMUNICATION DESCRIPTION Technical Information liitteess Vihre LED LDI joka sijaitsee TV 301 n perustan paneelissa osoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet a palaa jatkuvasti pumppu py rii normaalisti a vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa a vilkkuu nopeasti noin 200 ms n jakso virhetil
161. rgia de rota o poderia ser liberada ATEN AO Para evitar danos aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instru es de instala o descritas neste manual 10 282 TV 301 Navigator User Manual 87 900 946 01 M Manual de Istru es 5 Informa es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instru es e todas as informa es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instru es pelo uso indevido por parte de pessoas n o treinadas por opera es n o autorizadas ou pelo uso contr rio s normas nacionais espec ficas O TV 801 Navigator um sistema integrado constitu do por uma bomba turbomolecular para aplica es de alto e ultra alto v cuo integrada no relativo controller O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade 56000 r p m m x movida por um motor el ctrico trif sico de alto rendimento O TV 301 Navigator totalmente isentos de agentes contaminadores e portanto adequado para aplica es que requerem um v cuo limpo Al m disso o TV 301 Navigator tem conectores auxiliares atrav s dos quais p
162. rten S rg for at TV 301 Navigator ikke tabes eller uds ttes for st d ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse ETAT Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse Figur 1 Normal atmosf risk p virkning kan ikke skade TV 301 Navigator Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer st v i pumpen TV 301 Navigator User Manual 87 900 946 01 M 101 282 7 Istruktionsbog Installation Installation uiia Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet 102 282 Figur 2 Install r og anvend ikke pumpen i milj er der uds ttes for p virkninger fra atmosf ren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj Folgende krav til omgivelsesforholdene g lder ved drift a max tryk 2 bar over det atmosf riske tryk temperatur fra 5 C til 35 C se illustrationen i bilaget Technical Information a relativ luftfugtighed 0 95 ikke kondenserende Hvis pumpen er anbragt i nerheden af elektromagnetiske felter skal den afsk rmes Se bilaget Technical Information for yderligere oplysninge
163. s g n rales Cette notice utilise les signes conventionnels suivants unfall Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage AWTS ERS SS Sie Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui effectu e de facon impropre risque de provoquer de graves l sions Les notes contiennent des renseignements importants isol s du texte 44 282 TV 301 Navigator User Manual 87 900 946 01 M Mode d emploi 3 Stockage Pour garantir les performances et la fiabilit maximales des pompes Turbomol culaires Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante a Ala premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche par le client en mode soft Start a Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition Zvaja jali En cas de d passement du temps de stockage pour toutes raisons la pompe doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone TV 301 Navigator User Manual
164. s will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator TV 301 Navigator TV 301 Navigator User Manual 87 900 946 01 M 3 282 TV 301 Navigator 4 282 TV 301 Navigator User Manual 87 900 946 01 M Contents 1 Contents Istruzioni per uso 13 Indicazioni di Sicurezza per Pompe Turbomolecolari 14 Informazioni Generali 15 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 19 Uso 21 Manutenzione 24 Smaltimento 25 Gebrauchsanleitung 27 Sicherheitshinweise f r Turbomolekularpump
165. scribed in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to eguipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 206 282 TV 301 Navigator User Manual 87 900 946 01 M Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The TV 301 Navigator is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liguids or solid particles The pumping action is obtained through a high speed turbine max 56000 rpm driven by a high performance 3 phase electric motor The TV 301 Navigator
166. sistema para evitar eventuais acumula es de p 14 282 TV 301 Navigator User Manual 87 900 946 01 M Manual de Istru es 5 Instala o CUIDADO Remover a etiqueta autocolante e retirar a tampa de protec o somente no momento de ligar a turbobomba ao sistema Figura 2 N o instalar e ou usar a bomba em ambientes expostos a agentes atmosf ricos chuva gelo neve poeiras gases agressivos em ambientes com possibilidade de explos o ou com elevado risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condi es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 35 C consultar a planilha no ap ndice Technical Information humidade relativa 0 95 n o condensante Na presen a de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information TV 301 Navigator User Manual 87 900 946 01 M 75 282 5 Manual de Istru es Instala o O TV 801 Navigator deve ser ligado a uma bomba prim ria consultar esquema em Technical Information O TV 801 Navigator pode ser instalado em qualquer posi o Fixar o TV 301 Navigator em posi o est vel ligando o flange de entrada da turbobomba a um contra flange fixo capaz de resistir a um torque de 1000 Nm ao redor do pr prio eix
167. staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent in te schakelen zo krijgt men een geregenereerde pomp ter vervanging van de defecte pomp Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veiligheid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij het systeem in de verpakking worden gevoegd 94 282 Mocht de pomp gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk TV 301 Navigator User Manual 87 900 946 01 M Bedrijfshandleiding 6 Afvalverwerking Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd TV 301 Naviga
168. stem is in ramp or in braking or in Stop or in Waiting for interlock status fast flashing period of about 200 ms error condition TV 301 Navigator Switching off To switch off the TV 301 Navigator it is necessary to remove the mains The integrated controller immediately stops the pump WARNING The Turbo V controller must be powered with 3 wire power cord see orderable parts table and plug internationally approved for users safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE reguirements High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable Emergency Stop To immediately stop the TV 801 Navigator in an emergency condition it is necessary to remove the supply cable from the mains plug TV 301 Navigator User Manual 87 900 946 01 M 213 282 16 Instructions for Use Maintenance Maintenance The TV 301 Navigator does not require any maintenance Any work performed on the system must be carried out by authorized personnel Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reco
169. t Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REOUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO OUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS TEL N FAX N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc ES Agilent Technologies 4 JN Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 9 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA
170. t ca kowicie bez czynnik w zanieczyszczajacych i dlatego te jest to system odpowiedni do zastosowa gdzie jest wymagana tzw czysta pr nia Poza tym posiada konektory pomocnicze poprzez kt re istnieje mo liwo zasilania dodatkowego wentylatora sterowania zaworem wentylatora zdalnego pilotowania go poprzez g wny komputer host pod czonego z szeregowym portem RS232 lub RS485 W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information TV 301 Navigator User Manual 87 900 946 01 M 159 282 12 Podrecznik Instrukcji Magazynowanie W tej instrukcji zastosowano nastepujace umowne znaczenia Komunikaty zwiekszonej uwagi sa wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury ZAGROZENIE Komunikaty zagrozeniu przyciagaja uwage operatora co do danej procedury lub danego postepowania kt rego nieprawidtowe wykonanie mogtoby spowodowa powazne uszkodzenia ciala Sa to wa ne informacje wyciagniete z tekstu Magazynowanie 160 282 W celu zagwarantowania najwyZszego poziomu funkcjonalno ci i niezawodno ci pomp Turbomolekularnych Agilent nale y przestrzega nastepujacych zalece podczas transportu przestawiania i magazynowan
171. t models Pump Description The pump consists of a high freguency motor driving a turbine fitted with 8 bladed stages and 3 Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium al loy machined from a single block Figure 3 Model 969 8921 Model 969 8827 Model 969 8831 220 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Figure 4 Model 969 8919 Model 969 8825 Model 969 8829 Figure 5 Model 969 8918 Model 969 8824 Model 969 8828 Figure 6 Model 969 8920 Model 969 8826 Model 969 8830 TV 301 Navigator User Manual 87 900 946 01 M 221 282 17 Technical Information Description of the TV 301 Navigator 222 282 Proceeding from the high vacuum to the forevacuum region the turbine stages seguence is a Ist stage with a blade angle of 42 a 2nd stage with a blade angle of 28 8rd stage with a blade angle of 24 Ath and 5th stages with a blade angle of 20 a 6
172. t tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 120 C ADVARSEL Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Unng st t svingninger eller plutselige bevegelser av turbinpumpen n r den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosf risk trykk Ved pumping av etsende gasser er disse pumpene utstyrt med en spesiell pning Til denne pningen skal flyt av inaktive gasser argon eller kvelstoff koples for beskytte lagrene se Technical Information ADVARSEL N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene f lges Pumpen skal ikke brukes i eksplosjonsfarlige milj er 128 282 TV 301 Navigator User Manual 87 900 946 01 M Instruksjon Manual 9 Starte og bruke TV 301 Navigator TV 301 startes ved sette str mkabelen i veggkontakten Den innebygde styreenheten kjenner automatisk igjen blokkerings og startsignaler og starter pumpen Modusen Soft Start brukes n r pumpen skal startes igjen etter ha st tt stille e
173. tart amp previsto per accendere la pompa dopo un prolungato periodo di fermo Per avere una partenza con Soft Start attivo occorre abilitare il modo suddetto tramite software vedere il paragrafo RS232 485 COMMUNICATION DESCRIPTION nel appendice Technical Information II LED verde posto sul pannello della base del TV 301 Navigator indica con la freguenza del suo lampeggio le condizioni operative del sistema acceso fisso la pompa in rotazione normale lampeggiante lentamente periodo di circa 400 ms il sistema in stato di rampa o di frenata o di Stop o di Waiting for interlock lampeggiante velocemente periodo di circa 200 ms condizione di errore TV 301 Navigator User Manual 87 900 946 01 M Istruzioni per l uso 1 Arresto del TV 301 Navigator Per arrestare il TV 301 Navigator sufficiente togliere la tensione di alimentazione Il controller incorporato arresta immediatamente la pompa AVVERTENZA Per la sicurezza dell operatore il controller Turbo V deve essere alimentato con un cavo di alimentazione a 3 fili vedere la tabella delle parti ordinabili dotato di una spina approvata a livello internazionale Utilizzare guesto cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i reguisiti delle norme CE Le alte tensioni che si sviluppano nel controller possono provocare gravi lesioni o la morte Prima di eseguire
174. temperature 20 Cto 70 C Weight kg Ibs Kit Controller ISO 100 and 160 4 5 10 CFF 6 and 8 8 17 6 1 2 2 According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump When the TV 301 Navigator has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature TV 301 Navigator User Manual 87 900 946 01 M 225 282 17 Technical Information TV 301 Navigator Outline TV 301 Navigator Outline The following figure shows the TV 301Navigator outline dimensions 226 282 are in inches mm 69 1740 24V CONTROLLER FRONT PANEL CI VIEW FROM A te s 174 0 94 2384 hi Wu 42 107 0 1 8 47 0 25 641 i B m PREJS Water Coaling 33 650 Water Cooling 42 107 0 1 8 GAS 1 8 GAS Figure 8 TV 301 Navigator
175. ter Spannung zug nglich ist Sicherstellen daR die Isolierung der an den TV 301 Navigator an geschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlinie EN 61010 1 vorgesehen wird 34 282 F r die Installation der Optionsteile siehe im Anhang Technical Information TV 301 Navigator User Manual 87 900 946 01 M Gebrauch Gebrauchsanleitung 2 In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert Vor Benutzung des Systems sind alle elektrischen und pneumatischen Anschl sse auszuf hren W hrend der eventuellen Aufheizung der Vakuumkammer darf die Temperatur am Eingangsflansch 120 C nicht berschreiten Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlussflansch verschlossen ist W hrend des Aufheizens diirfen weder die Pumpe noch eventuelle hei e Zubeh rteile ber hrt werden Es besteht Verbrennungsgefahr VORSICHT W hrend des Betriebs sind StoR und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel ftungsanschlu soll unter 2 bar ber dem atmosph rischen Druck betragen Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer ffnungsklappe ausgestattet ber die z
176. th 7th and 8th stages with a blade angle of 10 The Macrotorr stages are in the form of four discs The turbine rotor is supported by permanently lu bricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are made of stain less steel These are supported and accurately po sitioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy During normal operation the motor is fed with a voltage of 54 Vac three phase at 933 Hz To re duce losses during start up to a minimum the fre quency increases according to a ramp with a higher initial voltage frequency ratio The pump can be water cooled or air cooled in the first case the customer can use the dedicated channels on the pump body in the second case an external optional fan is available A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a resid ual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 16 NW flange KF25 optional TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 m E SPY CONNE
177. tions optional Figure 35 Fan specifications a air flow 140 m3 h a input voltage 24 Vdc dimensions 119 x 119 x 32 mm power 2 6 W The fan bracket is shaped so that it can be mounted close to the pump When the pump is supplied by the rack C U 969 9437 or 969 9537 please utilize the special fan extension cable 969 9949 To fix the fan to the TV 301 case execute the following procedure see the following figure TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 1 Fix the fan to the suitable bracket by means of the furnished screws 2 Fix the bracket to the pump body between the pump and the controller 3 Connect the fan supply to the P4 connector of the controller Figure 36 Figure 37 TV 301 Navigator User Manual 87 900 946 01 M 257 282 17 Technical Information Water Cooling Kit Installation Water Cooling Kit Installation Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbers are 969 9337 metallic model and 969 9347 plastic model Pisa A x i l l l og I En DI m T I ZA NT I od od
178. tor User Manual 87 900 946 01 M 95 282 6 Bedrijfshandleiding Afvalverwerking 96 282 TV 301 Navigator User Manual 87 900 946 01 M TV 301 Navigator User Manual 1 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper Generel information 98 Opbevaring 100 Forberedelser for installation 101 Installation 102 Anvendelse 104 Start og anvendelse af TV 301 Navigator 105 Stop af TV 301 Navigator 106 Nodstop 106 Vedligeholdelse 107 Bortskaffelse 108 Overs ttelse af originalinstruktionerne E Agilent Technologies 98 97 282 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes MONAGAS For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning 98 282 TV 301 Navigator User Manual 87 900 946 01 M Istruktionsbog 7 Generel information Dette udstyr er beregnet til professionel anvendelse Brugeren b r l se denne brugsanvisning og anden yderligere information fra Ag
179. ualquier operaci n deber ser realizada por personal autorizado ADVERTENCIA Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent que permite obtener una bomba regenerada para sustituir la averiada Antes de enviar al fabricante una bomba para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo 66 282 En caso de que la bomba se tenga que desguazar eliminarla respetando las normas nacionales espec ficas TV 301 Navigator User Manual 87 900 946 01 M Manual de istrucciones 4 Eliminaci n Significado del logotipo WEEE presente en las etiquetas El s mbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este s mbolo v lido s lo para los pa ses miembros de la Comunidad Europea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrari
180. ubbel klammer g nga M10 4 22 Nm ISO 160K Dubbel klammer ganga M10 4 22 Nm Turbopumparna med intagsfl ns ConFlat ska f stas till vakuumkammaren med hj lp av Agilent f stdelar F r detaljer h nvisas till bilaga Technical Information TV 301 Navigator systemet kan inte fastsp nnas med sin egen bas OBSERVER TV 301 Navigator tillh r den andra installationsklassen eller versp nningsklassen enligt standard EN 61010 1 Anslut d rf r anordningen till en elledning som uppfyller kraven f r denna klass TV 301 Navigator r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon sp nningsf rande del Kontrollera att anordningen som r ansluten till TV 301 Navigator har en l mplig isolering ven vid ett enskilt fel enligt standard EN 61010 1 Installation av tillbeh rsutrustning beskrivs i Technical Information TV 301 Navigator User Manual 87 900 946 01 M 115 282 8 Bruksanvisning Anv ndning Anv ndning OBSERVER Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan du anv nder systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppv rms f r temperaturen vid inloppet aldrig verstiga 120 C S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad p p
181. uds provided with the accessories bag in the holes on the L shaped bracket 2 Place the controller on the studs aligning the 4 rubber holes on the top of the controller Press the controller towards the bracket Turn the pump upside down Place the bracket on the pump bottom G R W Screw a little bit the three screws M4 in the holes on the pump bottom Rotate the bracket until the controller is on the chosen position 8 Tighten the screws properly 9 Turn the pump again 10 Plug the line cord and connect the pump cable to the pump 11 Connect the mating connector with the jumper on the interlock signal to start the pump TV 301 Navigator User Manual 87 900 946 01 M 267 282 17 Technical Information TV 301Controller Installation MEW FROM BOTTOM Figure 52 Mounting 2 Connection A High Vacuum Flange To connect the Turbo V301 pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure O RING REMOVE OUTER RING TURBO PUMP PROTECTIVE E EDGE Figure 53 268 282 TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 Then fix the two flanges with the clamps as shown in the figure CLAMPING CLAMPING SCREW SCREW O RING SES N JAF TURBO PUMP
182. uk bedragen Deze pompen zijn voor het pompen van agressieve gassen van een speciale poort voorzien waardoor de pomp een stroom inert gas stikstof of argon ter bescherming van de lagers krijgt geleverd zie bijlage Technical Information WAARSCHUWING Wanneer de pomp wordt gebruikt voor het pompen van giftige brandbare of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen TV 301 Navigator User Manual 87 900 946 01 M 91 282 6 Bedrijfshandleiding Gebruik 92 282 Inschakeling en gebruik van de TV 301 Navigator Om de TV 801 Navigator in te schakelen is het voldoende om deze van stroom te voorzien De ingebouwde controller herkent automatisch de aanwezigheid van interlock en startsignalen en start de pomp De Soft Start modus is voorzien om de pomp na een langdurige periode van stilstand in te schakelen Om met Soft Start te starten moet bovengenoemde modus via de software worden vrijgegeven zie paragraaf RS 2327485 COMMUNICATION DESCRIPTION in de bijlage Technical Information De groene LED LD1 op het paneel van de basis van de TV 301 geeft door de freguentie van zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal a knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop
183. um Schutz der Lager Inertgas Stickstoff oder Argon zuzuleiten ist siehe Anhang Technical Information Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden TV 301 Navigator User Manual 87 900 946 01 M 35 282 2 Gebrauchsanleitung Gebrauch 36 282 Einschaltung und Gebrauch von Modell TV 301 Navigator Zur Einschaltung von Modell TV 301 ist es mit der erforderlichen Versorgungsspannung zu versorgen Der eingebaute Controller erfafst automatisch das Vorhandensein von Interlock und Anlaufsignalen und startet die Pumpe Der Modus Soft Start sieht vor die Pumpe nach einem langen Stillstand einzuschalten Um die Pumpe im Modus Soft Start zu starten ist dieser Modus mittels der Software freizugeben siehe Abschnitt RS 232 485 COMMUNICATION DESCRIPTION im Anhang Technical Information Die gr ne LED LD1 an der Bodenplatte von Modell TV 301 gibt mit der H ufigkeit ihres Blinkens die Betriebsbedingungen des System an Daueranzeige Die Pumpe befindet sich im normalen Betrieb a Langsame Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus TV 301 Navigator User Ma
184. umpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad som kan ers tta pumpen med en renoverad pump Innan systemet l mnas in till tillverkaren f r reparation eller advanced exchange service m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen Skrotning av pumpen skall ske enligt g llande lagstiftning TV 301 Navigator User Manual 87 900 946 01 M 119 282 8 Bruksanvisning Bortskaffning Bortskaffning 120 282 Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de l nder som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tids
185. ung kommen nicht mit den bloBen H nden angefasst werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden Abbildung 1 Modell TV 301 Navigator kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden 32 282 TV 301 Navigator User Manual 87 900 946 01 M Gebrauchsanleitung 2 Installation VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei Anschluss der Turbopumpe an das System abnehmen Abbildung 1 Die Pumpe darf nicht in Umgebungen die ungesch tzt vor Wetter Regen Frost Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsf higen oder erh ht brandgef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb m ssen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 35 C siehe Diagramm im Anhang Technical Information Relative Luftfeuchtigkeit 0 90 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TV 301 Navigator ist an eine Prim rpumpe anzuschlief en siehe Schema in Technical Information TV 301 Navigator User Manual 87 9
186. upn mi a v stupn mi konektory a konektory pro s riovou komunikaci kter se mus p ipojit k extern m obvod m tak aby dn elektrick sou st nebyla p stupn Zajist te aby izolace za zen p ipojen ho k v v v TV 301 Navigator byla p im en i v p pad jedin poruchy podle sm rnice EN 61010 1 Chcete li informace o dopl kov m p slu enstv viz Technical Information TV 301 Navigator User Manual 87 900 946 01 M 171 282 13 N vod k Pou it Pou it Pou it NEBEZPE Tento odstavec popisuje podrobnosti z kladn ch pracovn ch postup Pred pou it m syst mu prove te v echna elektrick a pneumatick p ipojen P i zah v n vakuov komory teplota p vodn p ruby nesm p ekro it 120 C Turbomolekul rn vyv vu nikdy nepouzivejte nebude li privodni priruba p ipojen k vakuov komo e nebo nem li uta enou zav rac p rubu B hem zah v n se turbomolekul rn v v vy ani jej ho p islu enstv nedot kejte Vysok teplota m e zp sobit pop leniny B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr vac m otvoru mus b t men ne 2 bary nad atmosf rick m tlakem Pro erp n agresivn ch plyn jsou tyto v v vy vybaveny speci
187. ura M10 4 22 Nm ISO 160K Morsetto doppio con filettatura M10 4 22 Nm La turbopompa con flangia di ingresso ConFlat deve essere fissata alla camera da vuoto per mezzo dell apposita minuteria meccanica Agilent Per ulteriori dettagli vedere appendice Technical Information II TV 301 Navigator non pu essere fissato tramite la sua base ATTENZIONE II TV 301 Navigator appartiene alla seconda categoria di installazione o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria II TV 301 Navigator ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile Assicurarsi che l isolamento del dispositivo connesso al TV 301 Navigator abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 20 282 Per l installazione degli accessori opzionali vedere Technical Information TV 301 Navigator User Manual 87 900 946 01 M Uso Istruzioni per l uso 1 In questo paragrafo sono riportate le principali procedure operative Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 120 C AVVERTENZA Non far funzi
188. vaatimukset TV 301 Navigator laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan p st k siksi Varmista ett TV 301 Navigator laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla Ks Technical Information liitett lis varusteiden asentamista varten TV 301 Navigator User Manual 87 900 946 01 M 139 282 10 Ohjek sikirja K ytt K ytt T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 120 Citta VAROITUS lk k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 2 baaria yli atmosf risen paineen Pumput on varustettu agg
189. vent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar l s To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar s This value can be exceeded according to the process requirements Please contact Agilent for specific applications 212 282 The purge gas throughput with the recommended forepump of 15 m3 h 11 CFM allows to achieve a high vacuum pressure in the 10 8 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system 3 Turn off the Turbopump 4 Open the Turbo V vent port slowly until to reach atmospheric pressure in the system 5 When the Turbo V pump and the backing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is ad
190. verl ssigkeit der Agilent Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlagerung der Pumpen diirfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start in Gang zu setzen Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum VORSICHT Falls die Lagerdauer aus verschiedenen Griinden die genannte Frist berschreiten sollte ist die Pumpe an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter TV 301 Navigator User Manual 87 900 946 01 M 31 282 2 Gebrauchsanleitung Vor der Installation Vor der Installation VORSICHT Modell TV 301 Navigator wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell TV 301 Navigator ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St f en und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hr
191. visable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating TV 301 Navigator User Manual 87 900 946 01 M Technical Information 17 A di i 1 3 gt Purge gas line Pressure regulator Gas purge valve Gas purge port Forevacuum pump Turbopump GEN er SEE bs A Vent valve Figure 57 Purge layout TV 301 Navigator User Manual 87 900 946 01 M 213 282 17 Technical Information Pump Used in Presence of Magnetic Fields Pump Used in Presence of Magnetic Fields 214 282 Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem should be
192. visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine maks 56000 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor TV 301 Navigator ne vsebuje onesna evalnih agentov in je primeren za isto vakuumiranje Opremijen je s pomo nimi prilju ki za dodaten ventilator ki skrbi za nazor obe za zrak ki je nadzorovana z ra unalnikom preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information Navodila so napisana po naslednjem standardnem protokolu Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme SVARILO Svarilo so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i Opombe vsebujejo vse najbolj pomembne informacije iz besedila TV 301 Navigator User Manual 87 900 946 01 M 197 282 15 Priro nik za Navodila Shranjevanje Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr ati naslednjih vodil a Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij a temperaturno obmo je 20
193. z znajduj ca si pod napi ciem nie mog a by dost pna Nale y upewni si e izolacja pod czonego urz dzenia do TV 301 Navigator posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 164 282 Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Technical Information TV 301 Navigator User Manual 87 900 946 01 M Podrecznik Instrukcji 12 U ytkowanie W tym paragrafie zostaly przedstawione gl wne procedury operatywne Przed zastosowaniem systemu nale y wykona wszystkie potaczenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pr niowej temperatura na ko nierzu nie mo e przekroczy 120 C ZAGROZENIE Nigdy nie nale y uruchomi pompe w przypadku kiedy ko nierz wej ciowy nie jest pod czony do komory lub nie jest zamkni ty z ko nierzem zamkni cia Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temperatura mo e spowodowa uszkodzenia cia a na osobach UWAGA Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza pompy zastosowa powietrze lub oboj tny gaz bez py u lub innych cz stek Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 2 bar ponad ci nienie atmosferyczne Dla pompowania niszcz cych gaz w pompy te s wyposa one

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