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TV 551/701 SEM Navigator - Ideal Vacuum Products, LLC

1. Figure 35 Model 969 9337 E 3 7 x A I a ra H i PR IN 4 Figure 36 Model 969 9347 250 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 The kit is assembled as shown in the figure Figure 37 Model 969 9347 Two rubber or plastic hoses from the water supply must be fitted to the two water cooling banjos Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 10 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 1 h To T The water electrical conductance must be lt 500 s cm When the conductance is higher in closed water circuit the use of up to 20 of Ethyl Glycole is suggested TV 551 701 SEM Navigator User Manual 87 900 958 01 G 251 276 17 Technical Information Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent operation TV 551 701 SEM Navigator Controller Compatible Vent Valve mod 969 9834 50 mm Figure 38 This vent valve waits before opening a minimum time of about 5 sec This time can be increased up to about 220 min by means of a setting of the Navigator software optional To install the vent valve
2. Figure 43 Screw the flange mod 969 9108 on the pump taking care of the o ring right position Assemble the seal ring and lock the vent device in position using the KF klamp Flange Seal ring KF klamp Valve Figure 44 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 255 276 17 Technical Information Vibration Isolators Single Damper Two vibration isolators are available as accessories The four models part number are the following model 969 9345 for ISO 160 K flange model 969 9346 for ISO 200 K flange model 969 9373 for ISO 160 F flange model 969 9374 for ISO 200 F flange They typically reduce the vibration transmitted from the TV 551 701 SEM Navigator to the system by a factor D gt 20 For more information please refer to the relevant instruction manual Double Damper This is a high performance damper and typically is able to reduce transmitted vibrations by a factor D gt 100 In the following picture its transfer function is shown It is available in two versions model 969 9377 for ISO 160 F flange model 969 9378 for ISO 200 F flange 256 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 lalve Installat For more information please refer to the relevant instruction manual Double Damper transfer function i Max speed 714 2 gt o E 3 a f S a o 2 2 s 0 100 200 300 400 500 600 frequency Hz
3. 10 10 10 10 10 Inlet pressure mbar 800 TV 701 SEM Pumping speed l s 10 10 10 10 10 10 1 10 Inlet pressure mbar Figure 8 Graph of nitrogen pumping speed vs inlet pressure with inlet screen 218 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Foreline pressure mbar 10 Nitrogen 10 2 T E 10 a Helium N g 10 5 Hydrogen 10 1 Ly iwi W ETI OS A Ri eo A O 10 10 1 10 100 Figure 9 Graph of compression ratio vs foreline pressure TV 551 701 SEM Navigator User Manual 87 900 958 01 G 219 276 17 Technical Information TV 551 SEM 100 y y rs 10 2 E 5 a El El 1 e E E 0 1 10 10 10 1 10 Inlet pressure mbar TV 701 SEM 100 Z 10 g 2 E 3 e lt Es 1 2 E 0 1 A 10 10 10 1 10 Inlet pressure mbar Figure 10 Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 220 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Interconnections The following figure shows the TV 551 701 SEM interconnections VENT VALVE EXTERNAL FAN SERIAL LINE INPUT OUTPUT Figure 11 TV 551 701 SEM Navigator User Manual 87 900 958 01 G
4. When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the TV 551 701 SEM Navigator Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust TV 551 701 SEM Navigator User Manual 87 900 958 01 G 199 276 16 Instructions for Use Figure 1 Installation CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system Figure 2 200 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C see the diagram pressure temperature in the appendix Technical Information relative humid
5. e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned 4 Return only products for which the RA was issued 5 Praduct being retumed under a RA must be received within 15 business days 6 Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product 7 Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 7
6. 221 276 17 Technical Information P3 Vent Figure 12 This is a dedicated 24 Vdc connector to control the optional vent valve P4 External Fan Figure 13 This is a dedicated 24 Vdc connector to supply the optional external fan 222 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 J1 In Out Figure 14 This connector carries all the input and output signals to remote control the TV 551 701 SEM Navigator It is a 15 pins D type connector the available signals are detailed in the table the following paragraphs describe the signal characteristics and use Tab 3 PIN N SIGNAL NAME INPUT OUTPUT 1 START STOP 2 START STOP I 3 INTERLOCK I 4 INTERLOCK l 5 SPEED SETTING l EE E EEEE 11 PROGRAMMABLE SET POINT 0 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 223 276 17 Technical Information PIN N SIGNAL NAME INPUT OUTPUT 13 FAULT OUTPUT 14 PROGRAMMABLE ANALOG SIGNAL 15 GROUND 0 PROGRAMMABLE ANALOG SIGNAL Signal Description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the i
7. to the rotor Accessories and Spare Parts 268 276 Tab 9 Description Part number Mains cable NEMA Plug 3m long 969 9958 969 9957 969 9883 969 9347 AS Air cooling kit for Navigator controller 969 9339 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Description Part number Bracket for Navigator Controller side mounting 969 9349 aa e or e a y pd E e Single vibration isolator ISO 200 K 969 9346 Si ibration i ator 160 F 9 9373 969 9374 Single vibration isolator ISO 200 F Double vibration isolator ISO 160 F 969 9377 Double vibration isolator ISO 200 F 969 9378 naa WAKE Ma ee eee ae Vent device with adjustable delay time for standard rack 969 9831 controller ent valve for Navigator Controller Purge valve with KF16 flange 10 SCCM 969 9239 Purge valve with 1 4 Swagelock 10 SCCM 969 9240 Purge valve KF16 20 SCCM 969 9241 Purge valve 1 4 Swagelock 20 SCCM 969 9242 Forepump DS 302 with 1 ph universal motor 949 9325 SH010001UNIV Forepump SH 100 Triscroll Dry Vacuum Pump PTS 300 single phase PTS03001UNIV universal motor Triscroll Dry Vacuum Pump PTS 300 3 phase universal PTSO3003UNIV motor TV 551 701 SEM Navigator User Manual 87 900 958 01 G 269 276 17 Technical Information Accessories and Spare Parts 270 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Agilent Technologies Vacuum Products Divi
8. unscrew the threaded plug see figure below 252 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Vent Accessories Figure 39 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2 5 Nm Figure 40 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suitable connector on the controller see the preceding paragraph INTERCONNECTIONS TV 551 701 SEM Navigator User Manual 87 900 958 01 G 253 276 17 Technical Information Standard Rack Controller Compatible Vent Valve mod 969 9843 Figure 41 This vent valve has a fixed delay time of about 5 sec This value can be used only with rack controller To install the vent valve execute the same steps as the vent valve model 969 9834 see the above paragraph Vent Device mod 969 9831 Hie ES p p LINE Figure 42 254 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 The vent device has adjustable delay time up to 36 min This value can be used only with rack controller To install the vent device unscrew and remove the threaded plug see the following figure
9. 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Command SOFT START ON Source PC Destination Controller Technical Information 17 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC TV 551 701 SEM Navigator User Manual 87 900 958 01 G 237 276 17 Technical Information Command READ PUMP STATUS Source PC Destination Controller with address 3 02 83 32 30 35 30 03 38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command READ SERIAL TYPE Source PC Destination Controller with address 3 in 485 mode 02 83 35 30 34 30 03 38 31 STX ADDR WINDOW WR ETX CRC Source Cont
10. 8th stages with a blade angle of 16 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 The Macrotorr stages are in the form of four discs The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump The static blades of the stator are made of stainless steel These are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy The pump can be water cooled or air cooled in the first case the customer can use the dedicated channels on the pump body in the second case an external optional fan is available A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a residual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 25 NW flange LLE Figure 4 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 211 276 17 Technical Information Controller Description The dedicated controller is a solid state frequency converter which is driven by a single chip microcomputer and is composed of two PCBs
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12. Figure 45 Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve itis necessary to unscrew the purge port cover as shown in the following figure Figure 46 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 257 276 17 Technical Information and then screw the gas purge valve with a torque of 2 5 Nm as shown in the following figure Figure 47 Figure 48 Serial Cable Installation The supplied serial cable must be installed when the TV 551 701 SEM Navigator or the optional vent valve have to be controlled by means of a remote computer The cable is installed fixing the 9 pin D type connector into the P2 serial connector as shown in the following figure Figure 49 258 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 TV 551 701 SEM Controller Installation The controller can be mounted in two position bottom mounting as per the complete system side mounting To install the controller execute the following procedures Bottom Mounting See the following figure 1 2 Turn the pump upside down Place the three fixing blocks with the through holes toward the inside and fix them with the three M6 screws to the pump bottom Place the controller on the blocks with the pump cable toward
13. If the vent valve can t be kept opened the backing pump should be left operating TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 ith Corrosive Gases Dd S al Figure 55 Purge layout Tab 8 1 Pressure regulator Gas purge valve Gas purge port um pump Turbopump Nama gr ooN Vent valve TV 551 701 SEM Navigator User Manual 87 900 958 01 G 267 276 17 Technical Information Pump Used in Presence of Magnetic Fields Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied
14. It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator TV 551 701 SEM Navigator TV 551 701 SEM Navigator User Manual 87 900 958 01 G 3 276 TV 551 701 SEM Navigator 4 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Contents 1 Contents Istruzioni per l uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni generali 17 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Fissaggio della pompa 21 Uso 22 Manutenzione 25 Smaltimento 26 Gebrauchsanleitung 27 Sicherheitshinweise f r Turbomolekularpumpen 28 Allgemeine Informationen 29 Lagerung 30 Vor der Installation 31 Installation 32 Befestigung der Pumpe 33 Gebrauch 34 Wartung 37 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 5 276 Contents 6 276 Entsorgung 38 Mode d
15. Pump Used with Corrosive Gases 265 Pump Used in Presence of Magnetic Fields 268 Accessories and Spare Parts 268 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 13 276 Contents 14 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 52 Informaci n general 53 Almacenamiento 54 Preparaci n para la instalaci n 55 Instalaci n 56 Fijaci n de la bomba 57 Uso 58 Encendido y Uso del TV 551 701 SEM Navigator 59 Parada del TV 551 701 SEM Navigator 60 Parada de Emergencia 61 Mantenimiento 61 Eliminaci n 62 Traducci n de las instrucciones originales r Agilent Technologies 51 276 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podr a ser liberada LONE ae Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 52 276 TV 551 701 SEM Navigator User Manual 87 900
16. Technical Information 17 RS 232 RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector J2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a message CRC to the controller SLAVE 2 the controller answer with an answer CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where TV 551 701 SEM Navigator User Manual 87 900 958 01 G 233 276 17 Technical Information When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric character indicating the window number from 0
17. and a 9 pin D type female connector and Navigator software optional Weight kg Ibs pump 19 4 43 controller 5 4 12 NOTE When the TV 551 701 SEM Navigator has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature Acceleration mm sec L 1 LL 0 100 200 300 400 500 600 700 Rotational frequency Hz Figure 5 Vibration graph TV 551 701 SEM Navigator User Manual 87 900 958 01 G 215 276 17 Technical Information TV 551 701 SEM Navigator Outline The following figures show the TV 551 701 SEM Navigator outlines dimensions are in inches mm 60 F FLANGE FORFLINE PO Figure 6 TV 551 SEM Navigator outline 216 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 TV 551 701 SEM Navigator Outline 150 200 F FLANGE KE 25 NW FORELINE PORT fico sooo 150 200 K FLANGE ELECTRICAL CONNECIOR VIEW FROM 3 all Figure 7 TV 701 SEM Navigator outline TV 551 701 SEM Navigator User Manual 87 900 958 01 G 217 276 17 Technical Information TV 551 SEM 600 500 400 Pumping speed l s 300 200 100 ii 10 1 10
18. conventions Warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The caution messages are displayed before procedures which if not followed could cause damage to the equipment Notes contain important information taken from the text Storage 198 276 In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 10 months from the shipping date TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 Preparation for Installation CAUTION If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations Preparation for Installation The TV 551 701 SEM Navigator is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office
19. herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard
20. not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Paar vacuum Main seal leak Bellows leak Vacuum leak High voltage prablem Solenoid failure Damaged flange Error cade on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier
21. pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent o el Agilent advanced exchange service que permite obtener un sistema regenerado para sustituir el averiado Antes de enviar al fabricante un sistema para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que el sistema se tenga que desguazar eliminarlo respetando las normas nacionales espec ficas TV 551 701 SEM Navigator User Manual 87 900 958 01 G 61 276 4 Manual de istrucciones Eliminaci n 62 276 Significado del logotipo WEEE presente en las etiquetas El s mbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este s mbolo v lido s lo para los pa ses miembros de la Comunidad Europea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fa
22. the fan to the TV 551 701 SEM case execute the following procedure see the following figure 1 Fix the fan to the suitable bracket by means of the furnished screws 2 Fix the bracket to the pump body between the pump and the controller 3 Connect the fan supply to the P4 connector of the controller Figure 32 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 247 276 17 Technical Information TV 551 701 SEM Pump with Standard Rack Controller When the TV 551 701 SEM pumps are used with the standard rack controller itis necessary to utilize the air cooling kit model 969 9314 Figure 33 Fan specification 248 276 air flow 25 1 s 51 CFM input voltage 120 Vac 50 60 Hz maximum power 17 W dimensions 119 x 119 mm 4 69 x 4 79 inches TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 001ING Kit Installation To fix the fan to the pump position it ensuring that the holes in the plate line up with those in the pump base Insert the respective washers and screws and tighten with a screwdriver Connect the fan to the controller Figure 34 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 249 276 17 Technical Information Water Cooling Kit Installation The water cooling kit mod 969 9347 or 969 9337 must be installed when the pump is used under heavy load conditions or when air cooling is insufficient
23. the pump body Fix the controller to the blocks by means of the three socket head screws M5 Turn the pump again Plug the line card and connect the pump cable to the pump Connect the mating connector with the jumper on the interlock signal to start the pump TV 551 701 SEM Navigator User Manual 87 900 958 01 G 259 276 17 Technical Information TV 551 701 SEM Controller Installation Figure 50 260 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Side Mounting The L shaped bracket P N 969 9349 is available as an option See the following figure 1 oo nN Ow Place the L shaped bracket on the controller with the pump cable toward the bracket and fix it by means of the three socket head screws M5 the washers and the nuts The 6 holes on the bracket allows to mount the controller with the rotation angle that you like Turn the pump upside down Place the bracket on the pump bottom the hole on the bracket has the same diameter as the pump bottom flange Screw a little bit the three screws M6 in the holes on the pump bottom Rotate the bracket until the controller is on the chosen position Tighten the screws properly Turn the pump again Plug the line card and connect the pump cable to the pump Connect the ma
24. to the constructor for repairs or replacement with a reconditioned unit the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping If a system is to be scrapped it must be disposed of in accordance with the specific national standards TV 551 701 SEM Navigator User Manual 87 900 958 01 G 205 276 16 Instructions for Use Disposal 206 276 Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 17 Technical Information Description of the TV 551 701 Navigator 209 Pump Description 210 Controller Description 212 Technical Specification213 TV 551 701 SEM Navigator Outline 216 Interconnections 221 P3 Vent 222 P4 Externa
25. 0 958 01 G ATENCI N Manual de istrucciones 4 En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent Preparaci n para la instalaci n ATENCI N El TV 551 701 SEM Navigator se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TV 551 701 SEM Navigator y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada El TV 551 701 SEM Navigator no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo TV 551 701 SEM Navigator User Manual 87 900 958 01 G 55 276 4 Manual de istrucciones Figura 1 Instalaci n ATENCI N Despegar el adhesivo y quitar
26. 00 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Tab 5 Data Type Field Length Valid Characters Logic L 1 0 OFF 11 0N O 9 right justified with 0 from blank to _ ASCII lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type 234 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt The controller can answers with the following response types Tab 6 Type Length Value Description Louie 1 byte After a read instruction of a logic window A After a re
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28. 81 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all retums 1 CUSTOMER INFORMATION Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only Ol Taxable O Non taxable 2 PRODUCT IDENTIFICATION Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A O Non Billable O Billable mum New PO hard copy must be submitted with this form 3B Lexchange CRepair Cupgrade Lconsignment Demo Ccalibration Cevatuation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed abeve check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If
29. 958 01 G Agilent DS 302 Agilent SH 100 Forced air or water cooling use water with electrical conductivity lt 500 uS cm 213 276 17 Technical Information 214 276 CHARACTERISTIC TV 551 SEM TV 701 SEM Cooling water Bakeout temperature Vibration level when water cooled Data measured with an indicated bearing temperature of 20 C see vibration graph in the following figure Lubricant Power supply Input voltage Input freq Max input power Stand by power Max operating power flow 200 1 h 0 89 GPM temperature 10 C to 30 C pressure 3 to 5 bar 45 to 75 Psi 120 C at inlet flange max CF flange residual unbalance lt 350 mm sec permanent lubrication lt 45 dB A at 1 meter 100 to 240 Vac 50 60 Hz 500 VA 30 to 35 W TV 551 SEM 325 W water cooling 220 W air cooling TV 701 SEM 350 W water cooling 250 W air cooling Protection fuse Compliance with Pollution degree Power cable UNI EN 292 1 UNI EN 292 2 EN CENELEC 55011 IEC 1000 4 2 ex 801 2 IEC 1000 4 3 ex 801 3 IEC 1000 4 4 ex 801 4 EN 61010 1 IEC 1010 1 EN 1012 2 With European or NEMA plug 3 meters long optional TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Technical Specification CHARACTERISTIC TV 551 SEM TV 701 SEM Serial communication Navigator RS232 cable with a 9 pin D type male kit connector
30. 958 01 G Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas El TV 551 701 SEM Navigator es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vac o integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 42000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento El TV 551 701 SEM Navigator no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vac o limpio Asimismo el TV 551 701 SEM Navigator posee conectores auxiliares con los que se puede alimentar un ventilador adicional accionar la v lvula de ventilaci n pilotarla a distancia con un ordenador host conectado mediante l nea serial RS 232 RS 485 A continuaci n se facilita toda la informaci n necesari
31. DUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS TEL N FAX N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc 3 i Agilent Technologies h Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials 2 After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Retum is submitted We will quote any necessary services evaluation repair special cleaning eg 3 Important steps for the shipment of returning product
32. M PUMP A flange KF 25 NW is available to connect the Turbo V551 701 SEM pump to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The Turbo V551 701 SEM pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming 264 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Connection C ELECTRICAL Figure 54 The turbopump is connected to the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KQ resistance at 25 C and pin E is connected to the pump ground pins G and H are not connected If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply Pump Used with Corrosive Gases To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge valve betwe
33. TV 551 701 SEM for more infos CLICK HERE Navigator Pump models ca 969 8935 969 8936969 8937 969 8938 vacuum products Controller models www idealvac com 969 8976 969 8977 User Manual Manual de Instrucciones 87 900 958 01 G 04 2011 oe Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 958 01 G Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained
34. The system is available in two models for TV 551 and two models for TV 701 The models of each group differ in the high vacuum flange The TV 551 SEM Navigator pump two models are Model 969 8935 with ISO 160 K high vacuum flange Model 969 8936 with ISO 160 F high vacuum flange The TV 701 SEM Navigator pump two models are Model 969 8937 with ISO 200 K high vacuum flange Model 969 8938 with ISO 200 F high vacuum flange The following figures show the four models The controller is available as an option in two models Model 969 8976 for TV 551 SEM Navigator Model 969 8977 for TV 701 SEM Navigator TV 551 701 SEM Navigator User Manual 87 900 958 01 G 209 276 17 Technical Information Figure 3 Model 969 8935 Model 969 8936 Model 969 8937 Model 969 8938 Pump Description 210 276 The pump consists of a high frequency motor driving a turbine fitted with 8 bladed stages and 4 Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The envelope is made of STT The turbine is made of high strength aluminium alloy machined from a single block Proceeding from the high vacuum to the for vacuum region the turbine stages sequence is Ist stage with a blade angle of 40 2nd stage with a blade angle of 34 3rd stage with a blade angle of 28 Ath and 5th stages with a blade angle of 24 6th stage with a blade angle of 20 7th and
35. a para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TV 551 701 SEM Navigator User Manual 87 900 958 01 G 53 276 4 Manual de istrucciones Este manual utiliza los siguientes s mbolos convencionales ADVERTENCIA Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una operaci n espec fica que al no realizarse correctamente podr a provocar graves lesiones personales ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato Las notas contienen informaciones importantes extrapoladas del texto Almacenamiento 54 276 Para garantizar el nivel maximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deberan aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente TV 551 701 SEM Navigator User Manual 87 90
36. ad instruction of a Numeric 6 bytes ae numeric window Alphanumeric 10 bytes After a read instruction of an alphanumeric window ACK 1 byte 0x6 The command execution has been successfully completed NACK 1 byte 0x15 The command execution has been Unknown Window 1 byte 0x32 failed The specified window in the Data Type Error 1 byte 0x33 0x34 Win Disabled 1 byte 0x35 TV 551 701 SEM Navigator User Manual 87 900 958 01 G The data type specified in the command Logic Numeric or Alphanumeric is not accorded with the specified Window The value expressed during a write command is out of the range value of the specified window The specified window is Read Only or temporarily disabled for example you can t write the Soft Start when the Pump is running 235 276 17 Technical Information Examples Command START Source PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 236
37. ad this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The TV 551 701 SEM Navigator is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine max 42000 rpm driven by a high performance 3 phase electric motor The TV 551 701 SEM Navigator is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum It is equipped with auxiliary connectors to supply an additional fan to control the vent valve to be controlled from a remote site by means of an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information TV 551 701 SEM Navigator User Manual 87 900 958 01 G 197 276 16 Instructions for Use This manual uses the following
38. bricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 196 General Information 197 Storage 198 Preparation for Installation 199 Installation 200 Pump Fixing 201 Use 202 Switching on and Use of TV 551 701 SEM Navigator 204 TV 551 701 SEM Navigator Switching off 204 Emergency Stop 205 Maintenance 205 Disposal 206 Original Instructions r Agilent Technologies 195 276 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 196 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 General Information This equipment is destined for use by professionals The user should re
39. e following figure 300 R N Cycle time in minutes 999999 zeroed by the reset command 301 R N Cycle number zeroed by 9999 the reset command 302 R N Pump life in hours 999999 zeroed by the reset command 320 Reserved to Agilent service to 399 400 R A CRC EPROM QE QE5XXXX where XXXX are variable 402 R A CRC Param PA PA5XXXX TV 551 701 SEM Navigator User Manual 87 900 958 01 G where XXXX are variable 241 276 17 Technical Information N Read Data Description Admitted Values Write Type 500 Reserved to Agilent service ae de nm sado er ea a pe default 0 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 7 6 5 4 3 2 1 0 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 24 Window N 206 Bit Description 242 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Inlet Screen Installation Figure 25 Figure 26 The inlet screens mod 969 9304 and 969 9316 prevents the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however doe
40. el tap n de protecci n s lo al conectar la bomba al sistema Figura 2 56 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de istrucciones 4 No instalar ni o utilizar la bomba en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C v ase gr fico en el anexo Technical Information humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles El TV 551 701 SEM Navigator ha de conectarse a una bomba primaria v ase diagrama en Technical Information Fijaci n de la bomba En caso de da arse el rotor la conexi n entre la bomba y el sistema puede ser sometida a un par de fuerza excesivo En estas circunstancias la conexi n podr a no resistir a dicho par de fuerza y como consecuencia la bomba podr a separarse del sistema o el motor podr a separarse respecto del contenedor de la bomba En este caso fragmentos de metal pueden ser proyectados por la bomba o por el sistema con consiguiente grave riesgo de lesiones o muerte y o da os a los aparat
41. emploi 39 Normes de s curit pour Pompe Turbomol culaires 40 Indications Generales 41 Stockage 42 Preparation pour l installation 43 Installation 44 Fixation de la pompe 45 Utilisation 46 Entretien 49 Mise au rebut 50 Manual de istrucciones 51 Indicaciones de Seguridad para Bombas Turbomoleculares 52 Informaci n general 53 Almacenamiento 54 Preparaci n para la instalaci n 55 Instalaci n 56 Fijaci n de la bomba 57 Uso 58 Mantenimiento 61 Eliminaci n 62 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Contents 12 276 16 Instructions for Use 195 Safety Guideline for Turbomolecular Pumps 196 General Information 197 Storage 198 Preparation for Installation 199 Installation 200 Pump Fixing 201 Use 202 Maintenance 205 Disposal 206 17 Technical Information 207 Description of the TV 551 701 Navigator 209 Pump Description 210 Controller Description 212 Technical Specification 213 TV 551 701 SEM Navigator Outline 216 Interconnections 221 P3 Vent 222 P4 External Fan 222 J1 In Out 223 J2 Serial 232 RS 232 RS 485 Communication Description 233 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Contents Inlet Screen Installation 243 Air Cooling Kit Installation 246 Water Cooling Kit Installation 250 Vent Accessories 252 Vibration Isolators 256 Purge Valve Installation 257 Serial Cable Installation 258 TV 551 701 SEM Controller Installation 259
42. en the pressure regulator and the pump TV 551 701 SEM Navigator User Manual 87 900 958 01 G 265 276 17 Technical Information Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar l s To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar I s This value can be exceeded according to the process requirements Please contact Agilent for specific applications 266 276 The purge gas throughput with the recommended forepump of 15 m h 11 CFM allows to achieve a high vacuum pressure in the 10 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system 3 Turn off the Turbopump 4 Open the Turbo V vent port slowly until to reach atmospheric pressure in the system 5 When the Turbo V pump and the backing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures
43. frequency see the following example diagrams TV 551 701 SEM Navigator User Manual 87 900 958 01 G 225 276 17 Technical Information 0 Output V 714 Frequency Hz Figure 16 The screen can be mounted on each pump model x 0 Output V Power W Figure 17 FAULT this open collector output signal is ON when a system fault condition is detected 226 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 PROGRAMMABLE SET POINT this open collector output signal is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vde when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity frequency threshold 500 Hz hysteresis 1 activation type high level 24 3 2 E 2 3 o o 2 YN 0 495 500 595 Frequency Hz Figure 18 The set point output stays at 0 Vdc until the frequency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes at 24 Vdc and
44. ing period of about 200 ms error condition TV 551 701 SEM Navigator Switching off To switch off the TV 551 701 SEM Navigator it is necessary to remove the mains The integrated controller immediately stops the pump The Turbo V controller must be powered with 3 wire power cord see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE requirements High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 Emergency Stop To immediately stop the TV 551 701 SEM Navigator in an emergency condition it is necessary to remove the supply cable from the mains plug Maintenance The TV 551 701 SEM Navigator does not require any maintenance Any work performed on the system must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned system to replace that broken down Before returning the system
45. iodo de 200 ms aproximadamente condici n de error Parada del TV 551 701 SEM Navigator Para parar el TV 551 701 SEM Navigator nte con desenchufarlo de la corriente El controler incorporado detiene inmediatamente la bomba ADVERTENCIA Para seguridad del operador el controlador Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE Las altas tensiones que se desarrollan en el controlador pueden provocar graves da os o incluso resultar fatales Desconectar el cable de alimentaci n antes de ejecutar las operaciones de mantenimiento en el interior de la unidad 60 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Manual de istrucciones 4 Parada de Emergencia Para detener en condiciones de emergencia el TV 551 701 SEM Navigator es necesario desconectar del controlador el cable de alimentaci n Mantenimiento El TV 551 701 SEM Navigator no necesita ning n mantenimiento Cualquier operaci n deber ser realizada por personal autorizado jADVERTENCIA Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta que el rotor se
46. ity 0 95 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TV 551 701 SEM Navigator must be connected to a primary pump see Technical Information Pump Fixing WARNING If a rotor failure occurs the connection of the pump to the system could be subjected to a significant torque If the connection is not sufficient to withstand that torque the pump could detach from the system or the motor housing could detach from the pump envelope In this case metal fragments could be projected from the pump or system which could cause serious injury or death and or damage to surrounding equipment Fix the TV 551 701 SEM Navigator in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a torque of 8600 Nm around its axis For example the ISO K flange can be fixed using high strength steel clamps like Agilent model IC63250DCMZ The following table shows for each flange the necessary number of IC63250DCMZ clamps and the relevant fixing torque TV 551 701 SEM Navigator User Manual 87 900 958 01 G 201 276 16 Instructions for Use Tab 1 FLANGE N FIXING TORQUE ISO 160 K 10 35 Nm ISO 200 K 8 35 Nm See the appendix Technical Information for a detailed description The TV 551 701 SEM Navigator can be installed i
47. l Fan 222 J1 In Out 223 Signal Description 224 How to Connect the Output Open Collector of the Controller 229 J2 Serial 232 RS 232 RS 485 Communication Description 233 Communication Format 233 Communication Protocol 233 Examples 236 Window Meanings 239 Inlet Screen Installation 243 Original Instructions 0 Agilent Technologies 207 276 17 Technical Information Air Cooling Kit Installation 246 TV 551 701 SEM with Navigator Controller 246 TV 551 701 SEM Pump with Standard Rack Controller 248 Water Cooling Kit Installation 250 Vent Accessories 252 TV 551 701 SEM Navigator Controller Compatible 252 Vent Valve mod 969 9834 252 Standard Rack Controller Compatible 254 Vent Valve mod 969 9843 254 Vent Device mod 969 9831 254 Vibration Isolators 256 Single Damper 256 Double Damper 256 Purge Valve Installation 257 Serial Cable Installation 258 TV 551 701 SEM Controller Installation 259 Bottom Mounting 259 Side Mounting261 Connection A HIGH VACUUM FLANGE 262 Connection Configurations 263 Connection B FORE VACUUM PUMP 264 Connection C ELECTRICAL 265 Pump Used with Corrosive Gases 265 Pump Used in Presence of Magnetic Fields 268 Accessories and Spare Parts 268 208 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Description of the TV 551 701 Navigator The TV 551 701 SEM Navigator pumping system consists of a pump with a dedicated controller fixed to it
48. ler n Sk E NPN 24 Vdc PNP i 45 Vide Customer s i device i Controller Sg Figure 20 Case 1 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 229 276 17 Technical Information 230 276 24 Vdc Customer s gevice Controller Ma 5 Vdc _ S 24 Vdc Controller Customer s 5 Vde device C Ss Na A Figure 21 Case 2 with relay utilization TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Customer s device Customer s device 24 Vdc PNP 24 Vdc NPN Controller 5 Vdc Controller 5 Vde Figure 22 Case 2 with transistor utilization TV 551 701 SEM Navigator User Manual 87 900 958 01 G 231 276 17 Technical Information J2 Serial Figure 23 This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TV 551 701 SEM 232 276 Tab 4 PIN N SIGNAL NAME 2 TX RS232 3 RX RS232 4 SPARE 6 A RS485 7 SPARE 8 B RS485 9 RESERVED Note that the vent valve can also be controlled by means of the serial connection A serial communication kit with a serial cable and the Navigation software is available optional TV 551 701 SEM Navigator User Manual 87 900 958 01 G
49. lock type default 1 111 R W L Analog output type output voltage signal proportional to frequency or power 117 R W N Low Speed frequency Hz 120 R W N Rotational frequency setting Hz 121 R W N Maximum rotational frequency in Hz active only in Stop condition 122 R W L Set vent valve on off on closed 123 Reserved to Agilent service 124 125 R W L Set the vent valve operation 126 R W N Vent valve opening delay expressed in 0 2 sec YES 600 0 1200 1 2400 2 4800 3 9600 4 default 4 To reset write 1 Impulse 0 Continuous 0 frequency 1 power default 0 272 to Maximum rotational frequency win 121 default 476 272 to 714 default 714 272 to 714 default 714 On 1 Off 0 default 1 Automatic 0 see note 1 On command 1 see note 2 0 to 65535 corresponding to 0 to 13107 sec 240 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 N Read Data Description Admitted Values Write Type 130 Reserved to Agilent service 200 R N Pump current in mA dc 201 R N Pump voltage in Vdc 202 R N Pump power in W pump current x pump voltage duty cycle 203 R N Driving frequency in Hz 204 R N Pump temperature in C 0to70 205 R N Pump status Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 206 R N Error code Bit description see th
50. n any position The TV 551 701 SEM Navigator cannot be fixed by means of its base The TV 551 701 SEM Navigator belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 551 701 SEM Navigator has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the TV 551 701 SEM Navigator is adequate even in the case of single fault as per directive EN 61010 1 Use 202 276 This paragraph details the fundamental operating procedures Make all electrical an pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C TV 551 701 SEM Navigator User Manual 87 900 958 01 G Instructions for Use 16 WARNING Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gase
51. nput supply Plug Pump INTERLOCK input signal to control the pump rotation With the supplied cover connector the INTERLOCK signal is connected to the 24 Vdc pin and the INTERLOCK signal to the GROUND pin SPEED SETTING PWM input signal to set the pump speed The PWM signal characteristics must be the following frequency 100 Hz 20 amplitude 0 24 V max duty cycle range from 25 to 75 corresponding to a pump speed from 272 Hz 25 to 714 Hz 75 linearly 224 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 800 714 700 600 500 400 Excitation Frequency Hz 300 200 20 30 40 50 60 70 80 25 Duty Cycle 3 Figure 15 If any signal isn t applied no connection the pump speed is set to High Speed 714 Hz max and settable by window 121 If a continuous signal is applied pin 5 fixed at 24 V and pin 6 fixed to ground the pump speed is set to Low Speed The Low Speed frequency is settable by window 117 see RS232 RS485 Communication Description SOFT START this input is used to provide a soft start to the pump in this condition the ramp up time could be up to 45 min PROGRAMMABLE ANALOG SIGNAL this output signal is a voltage from 0 to 10 Vdc proportional to a reference quantity frequency or power set by the user The default setting is the
52. os adyacentes Fijar el TV 551 701 SEM Navigator en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del sistema con conexi n capaz de resistir a un par de 8600 Nm en torno a su propio eje A modo de ejemplo la brida ISO K puede fijarse con mordazas de acero de alta resistencia como el modelo Agilent IC 63250 DCMZ En la siguiente tabla se indican respecto de cada brida la cantidad de mordazas IC 63250 DCMZ necesarias y el par de apriete con el cual fijarlas TV 551 701 SEM Navigator User Manual 87 900 958 01 G 57 276 4 Manual de istrucciones Tab 1 BRIDA N PAR DE APRIETE ISO 160 K 10 35 Nm ISO 200 K 8 35 Nm Para m s detalles v ase el anexo Technical Information El TV 551 701 SEM Navigator puede instalarse en cualquier posici n El TV 551 701 SEM Navigator no puede fijarse utilizando su base ATTENTION El TV 551 701 SEM Navigator pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a El TV 551 701 SEM Navigator tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tensi n quede accesible Controlar que el aislamiento del dispositivo conectado al TV 551 701 SEM Navigator mantenga una acci n aisladora incl
53. ree 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura
54. requirements Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or retuming a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part Retums for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document lfrequesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll F
55. rmation ADVERTENCIA Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos Encendido y Uso del TV 551 701 SEM Navigator Para encender el TV 551 701 SEM Navigator basta con suministrar la tensi n de alimentaci n El controlador incorporado reconoce autom ticamente la presencia de las se ales de interbloqueo y de arranque y activa la bomba TV 551 701 SEM Navigator User Manual 87 900 958 01 G 59 276 4 Manual de istrucciones La primera salida de la bomba se realiza en el modo Soft Start que al final del ciclo de puesta en marcha se deshabilita autom ticamente por lo tanto cuando la bomba se ponga en marcha posteriormente se har sin Soft Start Para volver a utilizar una puesta en marcha Soft Start activa es necesario rehabilitar la forma anteriormente indicada mediante software v ase el apartado RS 232 COMMUNICATION DESCRIPTION en el anexo Technical Information El LED verde LD1 situado en el panel de la base del TV 551 701 indica con la frecuencia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente per
56. roller Destination PC 02 83 35 30 34 30 31 03 42 30 STX ADDR WINDOW RD DATA ETX CRC 238 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 Window Meanings Tab 7 N Read Data Description Admitted Values Write Type 000 R W L Start Stop in remote Start 1 mode the window is a Stop 0 read only 001 R W L Low Speed activation NO 0 YES 1 default 0 008 R W L Remote default or Remote 1 Serial configuration Serial 0 default 1 100 R W L Soft Start write only in YES 1 Stop condition NO 0 101 R W N Set Point type 0 Frequency 1 Current 2 Time default 0 102 R W N Set Point threshold default 643 expressed in Hz mA or s 103 R W N Set Point delay time 0 to 99999 between the pump start default 0 and the set point check seconds 104 R W L Set Point signal 0 high level active activation type the 1 low level active signal can be high level default 0 active or low level active 105 R W N Set point hysteresis in 0 to 100 default 2 of threshold 106 R W L Water cooling 0 NO 1 YES TV 551 701 SEM Navigator User Manual 87 900 958 01 G Active Stop 0 NO 239 276 17 Technical Information N Read Data Description Write Type Admitted Values write only in stop 108 Baud rate 109 Ww L Pump life cycle time cycle number reset 110 R W L Inter
57. s these pumps are fitted with a special port to allow a steady flow of inert gas like N2 Ar for pump bearing protection see the appendix Technical Information When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases TV 551 701 SEM Navigator User Manual 87 900 958 01 G 203 276 16 Instructions for Use 204 276 Switching on and Use of TV 551 701 SEM Navigator To switch on the TV 551 701 SEM Navigator it is necessary to supply the mains The integrated controller automatically recognizes the interlock and start signals presence and start up the pump The first pump start up is in Soft Start mode When the start up cycle is finished the Soft Start mode automatically is disabled and the following start ups are without the Soft Start mode To re enable the Soft Start mode it must be activated by the suitable software command see the paragraph RS 232 485 COMMUNICATION DESCRIPTION in the appendix Technical Information The green LED located on the TV 551 701 SEM Navigator base front panel indicates with its flashing frequency the system operating conditions with no flashing the pump is normally rotating slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status fast flash
58. s reduce the pumping speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure TV 551 701 SEM Navigator User Manual 87 900 958 01 G 243 276 17 Technical Information Figure 27 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 28 The following figure shows the overall flange dimensions with the protection screen fitted on pump with ISO flange and pump with CFF flange 244 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information Inlet Screen Installation 17 gt ISO 160 F 160 K Thr gt el Y Toe A a o DIMENSIONS mm inches Figure 29 DIMENSIONS mir Figure 30 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 245 276 17 Technical Information Air Cooling Kit Installation TV 551 701 SEM with Navigator Controller An air cooling kit mod 969 9339 is available to improve the TV 551 701 SEM cooling during heavy operational conditions optional Figure 31 Fan specifications air flow 200 m h input voltage 24 Vdc dimensions 127 x 127 x 38 mm 5 x 5 x 1 5 in power 4 7 W The fan bracket is shaped so that it can be mounted close to the pump 246 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 To fix
59. sion Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRO
60. stays at 24 Vdc until the frequency becomes lower than 495 Hz that is 500 Hz 1 of 500 Hz TV 551 701 SEM Navigator User Manual 87 900 958 01 G 227 276 17 Technical Information It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings reference quantity frequency thereshold 643 Hz hysteresis 2 activation type high level delay time 0 second The Navigator Software optional allows the operator to set all the programmable feature When no external input output device is available this connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND input see the following figure p MATING CONNECTOR lt lt Figure 19 228 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 How to Connect the Output Open Collector of the Controller Here below there are the typical connections of the output open collector of TV551 701 SEM Navigator to an external system Two cases are considered the customer supplies the 24 Vdc the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open collector pin are available 24Vdc 5 Vde Customer s device i Control
61. this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed LItoxic O Corrosive O Reactive O Flammable O Explosive Ol Biological O Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be hold responsible for al costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature ssssesesss Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next page for suggestions of failure terms Detailed Description of Malfunction Please provide the error message Application system and madel l understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Date Pg 2 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does
62. ting connector with the jumper on the interlock signal to start the pump TV 551 701 SEM Navigator User Manual 87 900 958 01 G 261 276 17 Technical Information Figure 51 Connection A HIGH VACUUM FLANGE For ISO K flange connections fix the two flanges with the clamps as shown in the figure LAMPI LA E E 7 7 gt SS O7 Figure 52 262 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Information 17 WARNING It is mandatory to connect the pump in such a way to withstand the torque specified in the INSTRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torque To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that the connections can be made only with the bolt in the lower side Attach the units and tighten each one in turn Repeat the sequential tightening until the flange faces meet CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock Connection Configurations Figure 53 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 263 276 17 Technical Information Connection B FORE VACUU
63. uso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 Para instalar los accesorios opcionales v ase Technical Information Uso En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 120 C 58 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G jADVERTENCIA ATENCI N Manual de istrucciones 4 No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas Ev tense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta espec fica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Arg n para proteger los rodamientos v ase el anexo Technical Info
64. which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase output converts the single phase AC mains supply into a 3 phase low voltage medium frequency output which is required to power the pump The controller can be operated by a remote host computer via the serial connection or via remote I O signals A Windows based software is available optional 212 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Technical Specification 17 Technical Information Tab 2 CHARACTERISTIC TV 551 SEM TV 701 SEM Pumping speed with inlet screen 150160 150200 Nz 550 l s 690 I s He 600 I s 620 1 s Hz 510 1 s Compression ratio N2 1x109 1x109 1x107 1x107 1x106 1x106 Base pressure with minimum recommended mechanical According to standard DIN 28 pump 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump Inlet flange lt 1 x 10 10 mbar lt 1x 10 10 Torr with minimum recommended diaphragm pump 2 x 10 2 mbar 1 5 x 10 2 torr ISO 200 Rotational speed Start up time Recommended forepump Mechanical Diaphragm positi Operating ambient temperature Cooling requirements TV 551 701 SEM Navigator User Manual 87 900

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