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Brooks® Compact Pressure Controller

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1. E j i 17 3 I E j T 4 33 1 01 mI 110 00 0 28 4 1 Ram 0 76 22 DIA lol 38 F 3 62 5 6 735 9 6 187 K 92 0 4 PLCS 16 17 4 0 4 3 DIA 1 18 He 30 T s Hu vi gj DIAC BORE 9 0 ia DEEP 3 45 8 32 UNC 2B X 1 4 DP 19 2 PLACES 33 MOUNTING HOLE 42 0 M4 X 7 12 3 0 DEEP 1 LEGACY MOUNTING HOLE DIA 2 MOUNTING HOLES SEMI STANDARD MOUNTING Figure A 2 Typical Downport MFC MFM Dimensional Drawing Fittings for Models 5850EMF 5964D 5866 and 5866RT Model 5866 Installation and Operation Manual X PR 5866E 5866M eng PN 541 C 005 AAA April 2008 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replaceme
2. TIG Hdextpo Maywrwiho Zuu ar rntas 89 336 EEC Orwo nnore perdlerar tov Kakwdiov TOU a uaros ypneuioxomei pe pyava xou pEpovv CE H Brooks zpoundeber xot rnta oroia moroxoinan CE n emhoy tov afpurtog rivet ax cac va oxoio va v pet nANpec m rua xat va xap ysi wpaxion 10094 Ot ovvdesuor D y Kuduxoi kaw iow va Bwparilovzat ue Bop xian RP REI XPTJOLLOTOT VTAL Herakukoi kaAo iov TOV va c v cong TOV TOV xakwdiov To z4 yyuo tov RP REI petao nepipAnua orumofiizrn kat Bwpakiletat 600 360 po pes apEze oz yeimans Oi xapr v eivar ra kua TOV p rt t va p povv xA yna Bup xian 100 ya va vzakovovv omv motoroinon
3. 5 6 Orifice SIZIN ES 5 12 MAZIMAZOO Brooks Instrument Model 5866 Mass Flow Controller Section 6 Calibration Page Calibration Procedure 6 1 Gas Conversion Factors 6 2 Section 7 Parts List CIE 7 1 Appendix A CE Certification CE Certification for Mass Flow Equipment A 1 Figures 1 1 Model 5866 Pressure Transducer 1 2 1 2 Model 5866 Silicon Chip Configuration 1 2 1 3 Model 5866 System Block Diagram 1 2 1 4 Model 5866 Dimensions 1 3 1 5 Model 5866 Upstream Controller 1 4 1 6 Model 5866 Downstream Controller 1 4 1 7 Typical Application of Downstream Controller 1 5 1 8 Typical Application of Upstream Controller 1 6 2 1 Customer Connections and Settings 2 4 3 1 Error Signal Step Response 3 1 3 2 Proportional Control nenea aaa 3 3 3 3 Integral Control i 3 3 3 4 PIC ONO a it daia ca a eT cet dat Data is 3 4 5 1 Torque Sequence for the Valve Retainer Plate 5 6 5 2 Adjustment Test Setup 5 7 5 3 Valve Adjusting Spacer Locations 5 9 5 4 Valve Adjusting
4. D Ako e CE 360 100 9 Czech Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Cesky jazyk VSechny elektrick elektronick pristroje Brooks kter jsou oznaceny znackou byly sp sn testov ny na elektromagnetickou kompatibilitu pfedpis EMC 89 336 EEC vyberu signaliza nich kabel kter chcete u pfistroj se zna kou CE pouzit je treba v novat zvySenou pozornost Kvalita signaliza nich kabel kabelovych pr chodek a pfipojovacich svorek Br
5. H Gop xicm va GE AKPO KTI yeloonc my Maparakobpe avapepheire ooxAricto Od nyoy A 5 Section CE Certification of Installation and Operation Manual Mass Flow Equipment 541 C 005 AAA Rev D DRAFT Model 5866 April 2007 Italiano Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Oggetto Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennaio 1996 Questa strumentazione elettrica ed elettronica prodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richieste dalla direttiva per la Compatibilit Elettomagnetica Direttiva EMC 89 336 EEC E richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE Qualit dei cavi di segnale e dei relativi connettori Brooks fornisce cavi di elevata qualit che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 10096 connettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale pe
6. If one of these is shorted an Ohmmeter reading will be obtained Minimum 1 k Ohm Maximum 4 k Ohm Depending on sensor used NOTE Remove the sensor connector from the P C board for this procedure Between the different wires Brooks Instrument Model 5866 Pressure Controller 8 Remove the three screws 29 and jack posts 32 attaching the electronics cover Remove the electronics cover 31 A CAUTION Be careful not to stress the transducer lead wires to transducer assembly junction when removing the sensor connector from the printed circuit board If the transducer lead wires are stressed an open in the transducer wiring could result 9 Unplug the sensor connector from the printed circuit board Remove the two screws 29 securing the bracket 28 and printed circuit board 30 Remove the bracket and board A WARNING Do not remove the transducer before reading the following instructions Failure to heed this warning can result in personal injury 10 Transducer removal should be avoided The Model 5866 pressure transducer is not serviceable and only needs to be removed when the transducer is replaced or when the O rings are replaced Transducer removal will require the use of compressed gas to force the transducer from the body This pressure may exceed the maximum withstand pressure of the transducer creating the need for adjustment or replacement Be sure the transducer needs to be removed befo
7. A 8 Installation and Operation Manual Section A CE Certification of 541 C 005 AAA Rev D DRAFT Mass Flow Equipment April 2007 Model 5866 Polski Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Wszystkie urzadzenia elektryczne elektroniczne typu Brooks oznaczone znakiem CE byly pomy lnie kontrolowane pod wzgl dem wymaga zgodno ci elektromagnetycznej przepisy EMC 89 336 EEC Natomiast szczeg ln uwag nale y po wi ci na wybranie odpowiednej kabli instalacyjnej do urz dze oznaczonych znakiem CE Jako kabli instalacyjnych d awnic kablowych i z cz Brooks zapewnia okablowanie o wybitnej jako ci co odpowiada wymaganiom wytycznych CE Aczkolwiek Pa stwo zamierzacie stosowa w asny kabel instalacyjny to nale y wybra odpowiedny kabel ekranowy przykryty oplotem minimum w 100 Wszystkie stosowane z cze typu D lub kable koncentryczne powinne by przykryte oplotem z drut w miedzianych Je eli da si zastosowa to nale y os ony kablowe zgromadzi d awnicami kablowymi Os ony kablowe nale y pod czy do d awnic lub do metalowych pokryw ochronnych kt re na obydwuch ko cach musz by zat umione w 360 Pokrywy musz by pod czone do z cz uziemnionych Drukowane do kart z cze s niemetalowe jako normy Stosowane kable ekranowe maj by przykryte oplotem w 100 poniewa wymagania CE to przepisuj kt rym kable musz odpowiada Portugues Br
8. Metal Seals Figure 1 8 Typical Application of Upstream Controller Mass Flow Controllers Model 5866E Reactor Introduction Flow Rates 0 30 000 sccm Nitrogen Equivalent Standard pressure and temperature in accordance with SEMI Semiconductor Equipment and Materials Institute standard 32 F 0 C and 101 kPa 760 Torr Other reference conditions available upon request Accuracy 1 00 full scale including linearity and hysteresis Repeatability 0 1 full scale Control Range 20 1 Zero Stability 0 001 full scale per 30 days Temperature Range ambient and gas 32 F to 150 F 0 C to 65 C Temperature Coefficient 0 1 full scale C Maximum Transducer Pressure 21 75 psia for 0 14 5 psia range 108 5 psia for 14 5 72 5 psia range 435 psia for 72 5 290 psia range 1 450 psia for 290 1 450 psia range Maximum Design Pressure 1 450 psig 1 5 Controller Specifications Input Output Offset lt 0 2 full scale voltage lt 1 5 full scale current Proportional Gain Adjustable 1 to 200 Integration Time Adjustable 0 05 to 5 seconds Control Action Upstream or downstream pressure control Valve Type Standard Normally Closed Optional Normally Open Materials of Construction Model 5866 Model 5866M Wetted Parts 316 SS 316L Var SS Seals Valve Seats Viton Metal Options Buna N Teflon Kalrez Brooks Instrument Model 5866 Pre
9. 420 0 0 9 020 020 I OOOO 0 0 0 e 0 DOO NIA 6687 I Air gap spacer small dia Increase air O CJ O Ko o S05 2 ee R 909 6000 400 Se O O o 09090940994 0909090909 0909090909 0909090909 0909090909 09090909 0909098909 09090909 0909090909 IL 0909090909 090909 9090909 KAN O O 0909 e e to e a 5 O 909 525 O O O Se a O 2 e 000 atei RR en 230 SG 20 V e e e V 505 25 O O Q2 e O 2 O 99 9 090 06000066064 HQ 0 0 7 DORT 0 0 0 0 0 0 0 DOOOOOOGOJI 9 9 9 0 9 0 9 50 NG C OC DX 000000 000 00 0 0 9 0 0 1 00 9 07000 DOOR 9 0 0 0 0 0 e 9 0 0 0 60 0 00 PE es O 2 O 2 V e Q O O o Q NG CX 0000 AN 0909 0 0909 0909090 29 Cx Q 2 O O 2 e Q2 0909 NG 22 RKO 09 90 09 te e O Q o 6 S0 x 0999 0909 O PAA TRS EL CIE NLA 00000 6 050 000 0 0 0 00 REL RRR Valve clearance Orifice N O spacer shim s large dia Increase Lower guide spring Vaive seat 5 11 Broo
10. 5 2 1 Troubleshoot the transducer using the steps given in Table 5 2 If any of the steps do not give the expected result the transducer assembly is defective and must be replaced 2 If the transducer is defective refer to Sections 5 3 and 5 4 for the disassembly and assembly procedures for replacing the transducer Note Do not attempt to disassemble the transducer 5 3 Disassembly The Model 5866 pressure controller may be disassembled in the field by the user for cleaning re ranging or servicing The disassembly procedures below detail the upstream control version of the Model 5866 with a Normally Closed control valve The procedures for the upstream control version and the Normally Open control valve are substantially the same Disassemble the controller as follows Note The controller should be disassembled in a clean environment to prevent contamination CAUTION Do not attempt to disassemble the controller until pressure has been removed and purging has been performed Disassembly Procedure numbers in refer to Figure 7 1 1 Remove the jam nut 1 on top of the valve assembly 2 Unplug the valve connector from the electronics cover and remove the coil assembly 2 3 Remove the hex socket screws 3 securing the valve retaining plate 4 attaching the valve stem assembly 6 A CAUTION When performing the following procedure the valve stem must be removed without cocking it to
11. BMA S 715 Z 051 AAG S 715 Z 050 AAG S 715 Z 163 AAA S 715 Z 049 AAA 715 Z 181 BNT Hastelloy BV 019 Z 235 BMF 753 A 322 AWA 320 B 182 BMA 320 B 136 BMA 320 B 150 BMA 320 Z 101 BMA 315 Z 036 BMA 315 2 034 BMA 315 Z 035 BMA 315 Z 033 BMA 375 B 906 Refer to Section 5 6 for Sizing ID 0 0013 577 Z 375 BMT 577 Z 404 CVA Controller Body BV 092 B 095 BMT ID 0 002 577 Z 376 BMT 577 Z 405 CVA ID 0 003 577 2 377 577 Z 406 CVA ID 0 004 577 2 378 577 Z 407 CVA ID 0 007 577 Z 381 BMT 577 Z 410 CVA BV 774 Z 001 GDE BV 774 Z 002 GDE BV 774 Z 003 GDE BV 774 Z 004 GDE Pressure Transducer 0 1 Bar Pressure Transducer 0 5 Bar Pressure Transducer 0 20 Bar Pressure Transducer 0 100 Ban ID 0 010 577 Z 383 BMT 577 Z 412 CVA Base Plate BV 613 H 106 BMF ID 0 014 577 Z 385 BMT 577 Z 414 CVA PC Board Mounting Bracket 079 7 135 ID 0 020 577 Z 387 BMT 577 Z 416 CVA Screw PC Board Cover 753 L 056 AWZ ID 0 032 577 Z 391 BMT 577 Z 420 CVA PC Board Assembly 5866 097 B 190 ZZZ ID 0 048 577 Z 393 BMT 577 Z 422 CVA Electronics Cover Can 219 Z 256 EAD ID 0 062 577 Z 395 BMT 577 Z 424 CVA Pot Hole Plug 620 Z 434 SXA ID 0 078 577 Z 397 BMT 577 Z
12. CE Certification Installation and Operation Manual Mass Flow Equipment 541 C 005 AAA Rev D DRAFT Model 5866 April 2007 Romana Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Fiecare aparat Brooks electric electronic pev zut cu inscriptia CE a fost testat cu succes potrivit cerintelor compatibilitatii electromagnetice standardul EMC 89 366 EEC insa o atentie deosebita trebuie acordat la alegerea cablurilor de semnal pentru aparatura prevazuta cu inscriptia CE Calitatea cablurilor de semnal a glandelor si a conexiunilor Brooks asigura a cablare de calitate excelenta care satiface cerintele standardelor CE Insa in cazul in care doriti sa utililizati un cablu de semnal propriu trebuie sa alegeti un cablu de semnal izolat in proportie de cel putin 10096 o integrala Orice conexiune de tip D sau coaxiala utilizata trebuie sa fie cu armatura metalica in cazul in care acesta este utilizabila invelisul cablului trebuie strans cu glande metalice Este necesara fixarea invelisului cablului invelisul metalic sau la glande in asa fel inc t la ambele capete ale cablului sa asigure o ecranare de 360 Invelisul trebuie conectat clem de p m ntare Conform standardelor conexiunile imprimate pe cartele nu sunt considerate conexiuni metalice in vederea conformarii standardelor CE cablurile utilizate trebuie sa asigure o ecranare de 100 Slov
13. Dichlorosilane 1 2 Dichloroethane 1 2 Dichlorotetrafluoroethane f 114 2 2 Dichloro 1 1 Difluoro 1 Chloroethane 1 1 Difluoroethane 1 1 Difluoroethylene Diethylsilane Difluoromethane f 32 Dimethylamine Dimethylether 2 2 Dimethylpropane Disilane Ethane Ethanol Ethylacetylene Ethyl Chloride Ethylene Ethylene Oxide Fluorine 2 Fluoroform f 23 CHF Germane GeH Germanium Tetrachloride GeCl Halothane R 123B1 C HBrCIF Helium Hexafluoroacetone Hexaflorobenzine Hexafluoroethane f 116 Hexafuoropropylene HFP Hexamethyldisilane HMDS Hexane Ref No J 836D508 gasdata doc Vsn 8 6 6 4 Calibration Table 6 1 Conversion Factors Nitrogen Base Continued FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR kg m Hydrogen H 1 008 0 269 0 090 Hydrogen Bromide HBr 0 987 1 695 3 645 Hydrogen Chloride HCL 0 983 1 141 1 639 Hydrogen Cyanide HCN 0 744 0 973 1 179 Hydrogen Fluoride HF 0 998 0 845 0 893 Hydrogen lodide HI 0 953 2 144 5 789 Hydrogen Selenide H Se 0 837 1 695 3 613 Hydrogen Sulfide H S 0 850 1 108 1 539 lodine Pentafluoride IR 0 283 2 819 9 907 Isobutane C H 0 260 1 440 2 593 Isobutene C H 0 289 1 435 2 503 Isopentane C H 0 211 1 605 3 222 5 12 Krypton 1 382 1 729 3 708 Methane 0 763 0 763 0 717 Methylacetylene 0 473 1 196 1 782 Methyl Bromide 0 646 1 834 4 236 3 Methyl 1 butene 0 252 1 584 3 127 Methyl Chloride 0 687 1 347 2 308 Methyl Fluoride 0 761 1 102 1 518 Methyl Merca
14. Instrument Neonstraat 3 6718 WX Ede The Netherlands Valamennyi CE jellel ell tott Brooks elektromos elektronikus berendez st sikeresen teszteltek az elektrom gneses sszef rhet s g k vetelm nyeinek megfelel en EMC el r s 89 336 EEC Azonban a CE jellel ell tott berendez sekhez haszn land jelk belek kiv laszt s ra k l n s figyelmet kell szentelni A jelk belek k bel t mszelenc k s csatlakoz k min s ge A Brooks kit n min s g k belez st biztos t ami eleget tesz a CE ir nyelvek k vetelm nyeinek Ha azonban saj t jelk bel t szeretn haszn lni egy legal bb 100 96 ban burkolt teljesen rny kolt jelk belt v lasszon B rmelyik felhaszn lt D vagy koaxi lis csatlakoz f mv rtezettel kell legyen rny kolva Ha alkalmazhat a k belburkol st f m k belt mszelenc kkel kell sszefogni A k belburkol st a f m v d burkolathoz vagy t mszelenc hez kell kapcsolni s mindk t v g n 360 9 os rny kolts got kell biztos tson A burkol st egy f ldel kapocshoz kell csatlakoztatni A k rty ra nyomtatott csatlakoz k nemf mesek mint szabv nyok A felhaszn lt k belek ahhoz hogy megfeleljenek a CE ir nyelveknek 100 96 os rny kolts ggal kell rendelkezzenek Section CE Certification Installation and Operation Manual Mass Flow Equipment 541 C 005 AAA Rev D DRAFT Model 5866 April 2007 Nederlands Brooks Instrument Neonstraat 3 671
15. Mounting Holes 6 mm Compression 5 02 127 5 10 mm Compression 5 16 131 1 3 8 or 1 2 M VCR 5 18 131 6 3 8 or 1 2 M VCO 5 00 125 0 1 4 F NPT 5 36 136 1 Model 5866M Outlet See Note 8 32 UNC x 1 4 Deep 2 Mounting Holes 15 Position Male D Connector NOTE 1 1 4 VCR Fitting Shown Connection Brooks Instrument Model 5866 Pressure Controller Figure 1 5 Model 5866 Upstream Controller Figure 1 6 Model 5866 Downstream Controller When the pressure controller is used in the downstream pressure regulation mode as shown in Figure 1 6 the pressure in the process vessel will be constant independent of upstream variation provided the upstream pressure does not fall below the downstream setting Pressure measurement and control takes place at the inlet side of the pressure vessel The most common application of the pressure controller is in conjunction with a mass flow controller refer to Figure 1 7 Mass flow controllers accurately measure and control the required quantity of process gas flows In this figure the mass flow controllers will supply the desired quantity and mixture of process gas while the pressure controller will maintain the desired reactor pressure by varying the gas outflow This system allows the process reactants to be varied while maintaining a constant reaction pressure The Model 5866 Pressure Controller has proportional and
16. Spacer Locations Normally Open N O Valve inician i ee iL Re cres 5 11 5 5 Application Configuration 5 12 5 6 Example Application of Orifice Sizing Procedure 5 14 7 1 Model 5866E Parts Drawing 7 2 7 2 Model 5866M Parts Drawing 7 4 Tables 2 1 D Connector Pin Arrangement 2 5 5 1 Bench Troubleshooting 5 3 5 2 Sensor Troubleshooting 5 3 5 3 Minimum Flow Values 5 10 5 4 Model 5866 Orifice Selection 5 14 6 1 Conversion Factors ii 6 4 7 1 Model 5866E Parts List 7 3 7 2 Troubleshooting Aids and Spare Parts Kit for Model 5866 1 ee Cim t eed 7 3 7 3 Model 5866M Parts 7 5 i Introduction Section 1 1 Purpose This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Brooks Model 5866 Pressure Controller This manual is organized into seven sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance Section 5 Troubleshooting and Repair Section 6 Calibration Section 7 Spare Parts It is recommended that
17. TFE 1 905 4 526 Tetrafluorohydrazine 1 926 4 624 Trichlorofluoromethane f 11 2 244 6 281 Trichlorosilane 2 201 6 038 Trimethyloxyborane TMB A 1 929 4 638 1 1 2 Trichloro 1 1 2 Triflouroet f 113 2 520 7 920 Trimethylamine 1 467 2 639 Tungsten Hexafluoride WF 3 264 13 28 Uranimum Hexafluoride 3 548 15 70 Vinyl Bromide 1 985 4 772 Vinyl Chloride 1 492 2 788 Vinyl Fluoride 1 281 2 046 Water Vapor 0 802 0 804 2 180 5 851 Ref J 836D508 gasdata doc Vsn 8 6 6 5 Brooks Instrument Model 5866 Pressure Controller 6 6 Parts List Section 7 7 1 General Replacement parts for the Model 5866 are readily available worldwide through the factories and customer service facilities listed on the back cover of this manual Parts can also be ordered through authorized repair stations and sales agents When ordering replacement parts please specify Brooks serial number model number part description part number and quantity Refer to Figure 7 1 and Table 7 1 for Model 5866E parts drawing and list and Figure 7 2 and Table 7 3 for Model 5866M parts drawing and list Table 7 2 lists tools and parts that are useful for troubleshooting and repair Brooks Instrument Model 5866 Pressure Controller Figure 7 1 Model 5866E Parts Drawing NORMALLY OPEN VALVE NORMALLY CLOSED VALVE DOWNSTREAM CONTROL WITHOUT VALVE 7 2 Part
18. and certification Area Certified for use in hazardous areas in Europe G EEx nA II T4 KEMA 03ATEX1532 X Per EN 60079 15 2003 The modules shall be installed in a suitable enclosure providing a degree of protection of at least 54 according to EN 60529 taking into account the environmental conditions under which the equipment will be used Installation Section 2 1 Receipt of Equipment When the equipment is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability A report should be submitted to the Product Service Department Brooks Instrument 407 West Vine Street Hatfield Pennsylvania 19440 Remove the envelope containing the packing list Carefully remove the equipment from the packing case Make sure spare parts are not discarded with the packing material Inspect for damaged or missing parts 2 2 Recommended Storage Practice If intermediate or long term storage is required for the equipment as supplied be Brooks Instrument it is recommended that said equipment be stored in accordance with the following a Within the original shipping container b Store in a sheltered area with the following conditions 1 Ambient temperature 70 F 21 C nominal 90 F 32 C maximum 45 F 7 C minimum 2 Relative humidity 45 nominal 60 maximum 25 minimum Upon r
19. atbilstu CE mar juma pras b m izmantotajiem kabe iem j b t ekran tiem izmantojot ekr nu ar 100 laukumu A 6 Installation and Operation Manual Section A CE Certification of 541 C 005 AAA Rev D DRAFT Mass Flow Equipment April 2007 Model 5866 LietuviSkai Neonstraat 3 6718 WX Ede The Netherlands Visi CE Zenklu paZymeti Brooks elektros elektroniniai prietaisai s kmingai testuoti pagal Elektromagnetinio suderinamumo reikalavimus EMC direktyva 89 336 EEC Taciau reikia skirti ypatinga d mesi parenkant CE Zenklu pazym tiems gaminiams naudojamus duomeny kabelius Duomenu kabeliy kabeliu rieboksliu ir kistuky kokybe Brooks uztikrina puikios kokyb s duomeny siuntim kabeliu atitinkantj CE direktyvu reikalavimus Jei nepaisant to Jus pageidaujate naudoti savo duomeny kabeli rinkit s maziausiai 100 padengta pilnai ekranuota duomeny kabeli Jis turi b ti ekranuotas bet kokiu panaudotu D arba koaksialiniu jungiamuoju metalo Sarvu Jei jmanoma kabelio danga suverzti metaliniais kabelio riebokSliais Kabelio danga reikia prisegti prie metalin s apsaugin s dangos arba riebok lio ir abiejuose galuose turi b ti uztikrintas 360 ekranavimas Danga reikia prijungti prie jZeminimo apkabos Ant kortel s spausdinti kiStukai nemetaliniai atitinka standartus Tam kad jie atitikty direktyvas panaudoti kabeliai turi b ti 100 ekranuoti Magyar Brooks
20. band is too low the system may overshoot the command or oscillate Turning the potentiometer counterclockwise c c w will increase the integration time making the system respond slower but more stable Adjust the P and potentiometers until the optimum response is achieved Check the adjustment in the system over the expected range of pressures and flows Fastest controller response to set point changes are obtained with the P potentiometer fully counterclockwise and the potentiometer fully clockwise 3 2 Operation Figure 3 2 Proportional Control 3 P Response Open Loop Controller Output Manipulated Variable Output _ 100 Input 7 Proportional Setting Controller Input Error Signal Figure 3 3 Integral Control Response Open Loop Controller Output Manipulated Variable Controller Input Error Signal PA 3 3 Brooks Instrument Model 5866 Pressure Controller Figure 3 4 PI Control o pl o a S 5 o gt O e gs to 8 Og 5 gt Controller Input Error Signal P l Response Open Loop 34 Section 4 1 General No routine external maintenance is required for Brooks thermal mass flow controller If an in line filter is used for the Model 5866 the filtering element should periodically be replaced or cleaned Brooks Instrument Model 5866 Pressure Controller 4 2 Troublesho
21. bijgesloten instruktie handboek Norsk Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Vedrerende Vedlegg til h ndbok Referanse sertifisering av utstyr for massestr msm ling og regulering Dato Januar 1996 Til den det Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt pr ver som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utforelse av signalkabel og tilhorende plugger e Brooks Instrument tilbyr levert med utstyret egnet kabel som meter de krav som stilles til CE sertifisering e Dersom kunden selv velger kabel m kabel med fullstendig 100 skjerming av lederene benyttes D type og runde plugger og forbindelser m v re utf rt med kappe i metall og kabelnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m tilknyttes metallet i pluggen eller nippelen i begge ender over 3607 tilkoblet elektrisk jord e er normalt utf rt i kunststoff De tilh rende flatkabler m v re utf rt med fullstendig 100 skjerming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen
22. damage the transducer or at least significantly alter its operating characteristics 3 Inspect the orifice for clogging by holding it in front of a light source and looking for light through the bore Clean by soaking in a suitable non residuous solvent and directing a stream of compressed dry nitrogen through the bore 4 Deposits of silicon dioxide may be removed by soaking the internal parts in a solution of 5 hydrofluoric acid 5 parts hydrofluoric HF 95 parts water H O followed by Freon TF 5 Blow all parts dry with dry nitrogen and reassemble Refer to Section 5 4 Assembly Procedure Purge the assembled controller with dry nitrogen Perform calibration procedure in Section 6 if needed When the controller is reinstalled in the system the connections should be leak tested and the system should be purged with dry nitrogen or argon for thirty minutes prior to start up to prevent the formation of deposits NO 5 4 Assembly The assembly procedures below detail the downstream control version of the Model 5866 with a Normally Closed control valve The procedures for the upstream control version and the Normally Open control valve are substantially the same A CAUTION Do not get halocarbon grease on the hands This is a special inert lubricant which is not easily removed Note It is recommended that all O rings be replaced during assembly All O rings should be lightly lubricated with
23. disconnecting the gas connections Failure to correctly purge the controller could result in fire explosion or death Corrosion or contamination of the pressure controller upon exposure to air may also occur 5 2 Troubleshooting A Bench Troubleshooting Table 5 1 1 Connect the pressure controller to a 15 Vdc power supply and a command voltage source Connect an output signal readout device a 4 1 2 digit voltmeter is recommended to Terminals 2 and 10 refer to Table 2 1 2 Apply power to the controller close the valve using the valve override closed input and allow it to warm up for fifteen minutes Do not connect the controller to a gas source at this time 5 1 Brooks Instrument Model 5866 Pressure Controller 3 Observe the output signal and if necessary perform the zero adjustment procedure Section 6 4 If the output signal will not zero properly troubleshoot the sensor using the procedures given in Section 5 2B If the sensor is electrically functional the printed circuit board is defective and will require replacement 5 Connect the controller to a source of the gas it is calibrated for Command 1009 pressure and adjust the inlet and outlet pressures to the calibration conditions Verify that the output signal reaches and stabilizes at 5 00 Volts 6 Vary the command voltage over the 5 to 10096 range and verify the output signal follows the set point B Transducer Troubleshooting Table
24. easy removal if the instrument is to be removed for cleaning or test bench troubleshooting 2 5 Installation A WARNING Do not operate this instrument in excess of specifications Failure to heed this warning can result in serious personal injury and or damage to the eguipment A CAUTION When installing the instrument insure that no foreign materials enter the inlet or outlet of the meter Do not remove the protective end caps until time of installation CAUTION Any Brooks Instrument mass flow meter or flow controller with 15 pin D Connector PC Board bearing the CE Mark must use 100 shielded cable and metal shell mating connectors The shield is tied over 360 degrees to the shell at both ends This is mandatory to be in compliance with the EMC Directive 89 336 EEC Refer to Appendix A Recommended Installation Procedures The Model 5866 should be located clean dry atmosphere relatively free from shock and vibration Leave sufficient room for access to the electrical components c Install in such a manner that permits easy removal if the instrument requires cleaning A CAUTION When used with a reactive sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the controller purged with dry nitrogen before use See Brooks Technical Bulletin T 086 for fur
25. flow is less than the minimum flow increase the valve clearance by adding a large 0 005 spacer 10 above the spring spacer 19 and repeat Steps 5 and 6 8 Apply 18 Volts to the valve using the variable power supply and observe the flow Note The maximum allowable leak through in controllers with an elastomer valve seat is 296 of the values listed in Table 5 3 multiply by 0 02 The maximum allowable leak through for controllers with a metal or Teflon valve seat is 8 of the values listed in Table 5 3 multiply by 0 08 Orifice Minimum Flow Minimum Flow Size with 10 psig pressure with 5 psig pressure inches sccm 0 C 70 F sccm 0 C sccm 70 F 001 5 3 5 7 3 9 4 0 002 12 5 13 5 8 8 9 5 003 39 2 42 2 27 7 29 8 004 82 5 88 9 58 5 62 9 007 374 403 264 285 010 748 806 529 570 014 1 364 1 470 964 1 039 020 2 673 2 879 1 890 2 040 032 6 490 7 000 4 590 4 940 048 13 000 14 000 9 180 9 890 062 22 000 23 700 15 500 16 800 078 31 900 34 400 22 500 24 300 093 42 500 45 800 30 000 32 400 69 300 74 700 49 000 52 800 5 10 Troubleshooting Figure 5 4 Valve Adjusting Spacer Locations Normally Open N O Valve Upper guide spring Plunger air gap Plunger extension Insert N O valve Valve stem 4 x 0 Co v RO Clearance spacer 20 sm all dia ELLE Decrease clearance 1006006060000
26. halocarbon lubricant prior to their installation Note Gloves should be worn to reduce the possibility of contaminating the Model 5866 or process A Assembly Procedure numbers in refer to Fig 7 1 1 Examine all parts for signs of wear or damage replace as necessary 2 Install the transducer O ring 5 on the transducer assembly 26 The O ring 5 is placed below process side the Teflon backup ring on the transducer 3 Install the transducer 26 and base plate 27 securing it with two screws 3 tightened to 15 in lbs Note The orifice can easily become clogged with skin or other foreign matter during assembly Do not touch the orifice with the bare hand during installation Use rubber gloves finger cotts or pliers to start the orifice in the body 5 5 Brooks Instrument Model 5866 Pressure Controller 4 Install the orifice 12 and its O ring 13 using a 3 8 nut driver Insure that the orifice is fully seated but do not overtighten 5 Insert the valve preload spacers 10 if used into the valve cavity in the controller body 25 Use care to preserve the correct order 6 Install the valve plunger assembly 7 8 9 and 11 on the preload spacers 10 Install air gap spacers if used on top of the valve springs 7 Install the valve stem assembly 6 secure with the valve retaining plate 4 and four hex socket screws 3 When installing the screws insure that the plate makes full contact all the
27. integral control action The reset or integral control is combined with the proportional control action normally referred to as PI control Both proportional band 0 5 to 100 and integration time 0 05 to 5 seconds are customer adjustable Tuning of the pressure controller to perform as a stable optimum for each application is performed in process by adjusting easily accessible P l action potentiometers refer to Figure 1 4 Note The Controller Mode and valve type are determined at the time of order Mechanical parts must be changed to convert modes or valve types R Model 5866E Pressure Controller Model 5866 Pressure Controller Vessel 1 4 Introduction Upstream Controller Mode sets the controller to maintain the upstream process pressure constant independent of downstream pressure or flow variations ref Fig 1 5 For jumper positions on the PC board see Figure 2 1 Downstream Controller Mode sets the controller to maintain the downstream process pressure constant independent of upstream pressure or flow variations For jumper positions on the PC board see Figure 2 1 Normally Open Normally Closed Control Valve Both Normally Open N O and Normally Closed N C configurations are available Normally Closed is the standard valve type The Normally Open valve may be specified when Safety Operation or Process
28. listed in Table 5 3 go to Step 13 12 lf the observed flow does not achieve the minimum flow then increase the air gap by adding a large 005 air gap spacer 10 to increase the valve travel Repeat Steps 8 9 10 and 11 13 Apply 11 5 Volts to the valve using the variable power supply Observe the flow and compare it to the minimum flow values listed in Table 5 3 14 If the observed flow is greater than the flow listed in Table 5 3 the valve adjustment is complete 15 lf the observed flow is less than the flow listed in Table 5 3 decrease the air gap by adding a small 0 005 air gap spacer 9 Repeat Steps 13 and 14 Troubleshooting Figure 5 3 Valve Adjusting Spacer Locations AIR GAP UPPER GUIDE SPRING PLUNGER COIL ASSEMBLY AIR GAP SPACER SMALL DIA DECREASES AIR GAP 8 2 LOWER GUIDE SPRING no P 5 7 SPACER PRELOAD 5 A SMALL DIA LARGE DIA INCREASES PRELOAD DECREASES PRELOAD VALVE SEAT 11 Note Bracketed numbers refer to Table 5 1 Parts List 5 9 Brooks Instrument Model 5866 Pressure Controller Table 5 3 Minimum Flow Values B Adjustment procedure Normally Open N O control valve Refer to Figure 5 4 for spacer locations and nomenclature for the Normally Open N O type control valve Refer to Section 7 spare parts for the spacer part numbers and the spacer kit part number The valve clearance determines the maximum space
29. printed circuit board Refer to Sections 5 3 and 5 4 Connect command signal Refer to Figures 2 1 and 2 2 for terminal assignments Output signal follows setpoint at higher commands but will not go to zero Leaky control valve Excessive resistance in valve voltage return ine Disassemble and repair valve Refer to Sections 5 3 and 5 4 Reduce wiring resistance Output signal follows setpoint at lower commands but does not reach full scale nsufficient inlet pressure or pressure drop Partially clogged valve Valve out of adjustment Valve guide spring failure Adjust pressures check calibration Refer to Section 5 1 Disassemble and repair control valve Refer to Sections 5 3 and 5 4 Adjust valve Refer to Section 5 5 Controller oscillates see below Controller oscillates Pressure drop or inlet pressure excessive Oversized orifice Valve out of adjustment P I adjustment not correct Faulty pressure regulator Defective printed circuit board Table 5 2 Sensor Troubleshooting to P C Board CN1 Adjust pressures Check orifice size Refer to Section 5 6 and Table 5 4 Adjust valve Refer to Section 5 5 Adjust P I potentiometers Refer to Section 3 2 Check regulator output Replace printed circuit board Refer to Sections 5 3 and 5 4 OHMMETER CONNECTION 4 Sensor wires to body ground Pin 1 to 4 to body RESULT IF ELECTRICALLY FUNCTIONAL Open circuit on Ohmmeter
30. signal such as a capacitance manometer Jumper J2 C or D must be moved to the Position B Jumper J2 A can be in either Position a or b depending on valve controller type The external sensor signal 0 5 or 0 10 Vdc must be connected to Terminals 15 and 10 refer to Figure 2 1 and Table 2 1 2 12 Valve Test Point The valve voltage may be monitored on Terminal 7 of the D Connector Brooks Instrument Model 5866 Pressure Controller 2 13 Optional Valve Return Units manufactured after January 1992 with a Normally Closed valve can be configured so the valve current can be returned to the power supply on a separate line This is recommended if the power supply lines are longer than 10 feet The feature is enabled by connecting Pin 3 of the D Connector to power supply common with a separate lead and moving Jumper J3 to the Position a Operation Section 3 1 Operation a Purge the system with dry nitrogen for at least thirty minutes prior to start up to prevent the formation of deposits if reactive gas is to be used b In unpressurized piping apply power to the controller and allow approximately fifteen minutes for it to warm up and stabilize its temperature c Slowly apply gas pressure to the system d Set the command for the desired pressure to assume normal operation 3 2 Proportional Band and Integration Time Constant Adjustment Figure 3 1 Error Signa
31. this manual be read in its entirety before attempting to operate or repair the Model 5866 1 2 Description The Brooks Model 5866 Pressure Controller accurately measures and controls upstream or downstream pressures The heart of the system is a solid state pressure transducer which produces an electrical output proportional to pressure The electronics use this signal to operate the control valve and to provide an output signal 1 3 Principle of Operation The pressure to be measured acts on a stainless steel diaphragm Via silicone oil this pressure is transmitted to the actual sensing element a silicon chip refer to Figure 1 1 The chip consists of an anisotropically etched diaphragm with four piezo resistive resistors configured in a Wheatstone bridge etched into its surface refer to Figure 1 2 The mechanical deformation of this diaphragm results in an imbalance of the resistors which is proportional to pressure An amplifier provides output to the control circuit as well as the electrical output signal In addition to the pressure transducer the Model 5866 has an integral control valve and control circuitry A difference between the pressure and setpoint signals will cause the electronics to modulate the control valve to maintain the desired pressure A system block diagram is shown in Figure 1 3 The integration of pressure transducer control electronics and control valve into one unit results in a comp
32. 426 CVA ID 0 093 577 Z 398 BMT 577 Z 427 CVA ID 0 116 577 Z 399 BMT 577 Z 428 CVA ID 0 120 577 Z 400 BMT 577 Z 429 CVA Jack Post 760 Z 037 ACS QTA Viton SUA Buna TTA Kalrez Table 7 2 Troubleshooting Aids and Spare Parts Kit for Model 5866E 5850 Break Out Board Assembly 5850 Valve Shim Kit P N S 273 Z 668 AAA P N S 810 A 372 BMA Installs directly between mass flow controller and interconnecting cable Allows convenient access to all signals for easy troubleshooting of system Contains 1 Break Out PC Board 1 5 Foot Extension Cable 1 Terminal PC Board Contains 1 010 Large Spacer 2 005 Large Spacers 1 010 Small Spacer 2 005 Small Spacers Brooks Instrument Model 5866 Pressure Controller Figure 7 2 Model 5866M Parts Drawing LABEL SHEE m m rlol SEE NOTE 3 ASSEMBLY SHOWN WITH VSR STD FITTINGS ITEMS 1 4 38 APPEARANCE WILL BE DIFFERENT WHEN OTHER FITTINGS ARE USED ITEMS 6 7 30 31 4 4 26 BOX LABEL 26E 8 26H ARE USED IN PACKING AS REQUIRED FOR VALVE ADJUSTMENT Parts List Table 7 3 Model 5866M Parts List SEQ COMPONENT DESCRIPTION QTY 7 SPACER 002 THK 1 8 OD SPACER 005 THK 1 8 OD SPACER 010 THK 1 8 OD 25 2 013 H SEAL 5866EM H IS IN A o 11 12 13 14 15 16 17 18 19 20 T SOC HD CAP SCREW 10 32 UN 4 7 5
33. 6 to a mass spectrometer type helium leak detector is a good way to achieve a suitable vacuum Adjust the signal output to 0 000 V using zero potentiometer P4 6 1 Brooks Instrument Model 5866 Pressure Controller Note a vacuum pump is not available and the atmospheric pressure is accurately known the zero pressure signal output can be adjusted using the following formula Vdc Output at Output at 100 Atmospheric Atmospheric Pressure x Pressure Vdc Pressure at 100 psia psia The above formula will be most accurate with high pressure transducers where the output at atmospheric pressure is a small fraction of the full scale pressure 4 Apply the desired full scale pressure to the transducer side of the Model 5866 and adjust the span potentiometer P3 so the Model 5866 output agrees with the output of the precision pressure indicator If the output cannot be adjusted to the correct value with the span potentiometer change the course gain setting by moving jumper J1 5 Apply a vacuum to the transducer side of the Model 5866 and check zero pressure output If the zero pressure output is correct the calibration is complete If zero pressure output is not correct repeat Steps 3 and 4 Readjustment will probably only be required if the atmospheric pressure method of adjustment was used to set zero 6 2 Gas Conversion Factors If a mass flow controller is operated on a gas other than the gas it was calib
34. 8 WX Ede The Netherlands Onderwerp Addendum voor Instructie Handboek Referentie CE certificering voor Mass Flow Meters amp Controllers Datum Januari 1996 Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen e Brooks levert standaard kabels met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 100 e D of ronde kabelconnectoren moeten afgeschermd zijn met een metalen connector Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of wartel verbonden worden Het scherm moet worden verbonden met aarde e Card edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 10096 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het
35. Brooks Instrument Model 5866 Pressure Controller 7 6 Installation and Operation Manual Section A CE Certification of 541 C 005 AAA Rev D DRAFT Mass Flow Equipment April 2007 Model 5866 Bulgarian Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands c CE Brooks ca EMC 89 336 EEC Brooks Ako na c none 100 na e
36. C just greater than the C determined in Step 3 5 Check to see if the maximum operating pressure drop is greater than the maximum allowable pressure drop for the orifice size selected If the pressure drop is too high for the orifice selected the instrument will not be able to function correctly This situation can be corrected by reducing the pressure drop to the allowable level or reducing the maximum flow so a smaller orifice will be selected An example Model 5866 application is shown in Figure 5 6 to illustrate the orifice sizing procedure Given Controller Type Upstream Gas 5 8 Nitrogen 3 8 Hydrogen Temperature 70 F 530R Maximum Flow 800 sccm Calibration Pressure 100 psig 114 7 psia Reference Pressure 1 atmosphere 14 7 psia Max Flow 10 slpm 0 C ref temp Calculations SG Mixture 3 8 x 0 070 5 8 x 0 964 629 Minimum Pressure Drop 114 7 x 05 5 7 psi Maximum Pressure Drop 114 7 14 7 100 psi P1 14 7 5 7 20 4 psia P2 14 7 psia P2 P1 14 7 20 4 0 721 which is gt 0 5 therefore use equation 1 800 0 629 x 530 20x10 800 000 20 4 14 7 x 14 7 9 13 Brooks Instrument Model 5866 Pressure Controller Since the C calculated is the same as listed for the 014 orifice the 020 orifice should be selected The last step is to check the maximum pressure drop for the application The maximum pressure drop for the 020 orifice is 300 psi this is
37. Installation and Operation Manual X PR 5866E 5866M eng PN 541 C 005 AAA April 2008 Brooks Compact Pressure Controller Model 5866 ONTRO WS d Model 5866 BROOKS www BrooksInstrument com IN ST RUMENT Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance Section 5 Troubleshooting Contents Page P Ul DOSO ctia ae dum 1 1 Descripti n pm 1 1 Principle of Operation 1 1 Specifications u Ut arse eher 1 6 Controller Specifications 1 7 Receipt of Equipment 2 1 Recommended Storage Practice 2 1 General ie aaa a PANIE 2 1 Gas Connections 2 1 Installation a ie 2 2 In Eine Filter avoid eee 2 3 Electrical Interface a 2 3 Remote Setpoint Command Input 2 3 MEDTSO C Kor 2 5 Precision 5V Reference 2 5 Remote Transducer Input 2 5 Valve Test Point 2 re ee ee ne 2 5 Optional Valve Return 2 6 Operan cica T 3 1 Proportional Band and Integration Time Constant Adjustment 3 1 Generali u d a at as na fa 4 1 General c 5 1 Troubleshooting 5 1 Disassembly ea nennen 5 2 DIT lel 5 5 Adjusting the Control
38. VALVE RETURN CURRENT OUTPUT 5V REFERENCE 15V SUPPLY 15V SUPPLY VALVE VOLTAGE OUT PROPORTIONAL GAIN COMMAND INPUT 9 SUPPLY VOLTAGE COMMON FINE SPAN ADJUST 10 0 5V SIGNAL COMMON 11 5V REFERENCE OUTPUT ZERO 12 VALVE OVERRIDE 13 415V CURRENT I O ONLY INTEGRATION TIME 14 CHASSIS GROUND 15 EXTERNAL XDCR INPUT CN3 VALVE CONNECTOR JUMPERS amp SWITCHES Jt COURSE SPAN SETTING 42 SEE TABLE J3 VALVE DRIVE a REMOTE VALVE RETURN b N O VALVE DRIVE 30V VALVE DRIVE 15V 44 VO SELECT X CURRENT VO 9 VOLTAGE 1 0 J5 CURRENT SELECT X 4 20mA VESSEL VESSEL 0 0 20mA X JUMPER PRESENT OR SWITCH IN 0 NO JUMPER OR SWITCH OUT 5866 5866 UPSTREAM CONTROLLER DOWNSTREAM CONTROLLER J2 CONSISTS OF A PAIR OF JUMPERS THAT MUST BE CONFIGURED AS A PAIR THE POSSIBLE COMBINATIONS ARE SHOWN IN THE FOLLOWING TABLE VALVE CONTROLLER TYPE VOLTAGE CURRENT Vo vo A 2 DOWNSTREAM UPSTREAM B m B Boe N C VALVE VALVE UPSTREAM DOWNSTREAM N C VALVE N O VALVE INSTRUMENTS MANUFACTURED AFTER JANUARY 1992 2 4 Installation Table 2 1 D Connector Pin Arrangement FUNCTION COLOR CODE O 000000009 y Command Common Command Pot CCW Black 2000000 Voltage Signal Output White Remote Valve Return Red NOTES Current Output Green 1 Pin 13 does not have to be 15 Supply Orange ss if current is 15 Vdc Supply Blue 2 Cable shield tied t
39. abel sollten Sie darauf achten da eine 100 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m glich sollten Kabeldurchf hrungen mit Anschlu m glichkeiten f r die Kabelabschrimung verwendet werden Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzuschlie en Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm ige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 100 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Erdpotential zu verbinden Die Belegung der Anschlu pins k nnen Sie dem beigelegten Bedienungshandbuch entnehmen 2 Installation and Operation Manual Section A CE Certification of 541 C 005 AAA Rev D DRAFT Mass Flow Equipment April 2007 Model 5866 English Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention however is required when selecting the signal cable to be used with CE mark
40. ablit peaksite valima taielikult varjestatud kaabli vahemalt 100 varjestusega Kasutatavad pool mar v i mar hendused tuleb varjestada metallekraaniga V imaluse korral tuleb kaablivarje kinnitamiseks kasutada metallist kaablihoidikuid Kaabliekraan tuleb hendada metallkesta v i tihendiga ning varustada m lemas otsas varjestusega 360 ulatuses Varjestus tuleb hendada maandusklemmiga Plaadi k lg hendused on tavaliselt mittemetalsest materjalist CE sertifitseerimisn uetele vastamiseks peavad kasutatavad kaablid olema varustatud 10096 varjestusega A 3 Section CE Certification Installation and Operation Manual Mass Flow Equipment 541 C 005 AAA Rev D DRAFT Model 5866 April 2007 Espanol Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Asunto Addendum al Manual de Instrucciones Referencia Certificacion de los Equipos de Caudal Masico Fecha Enero 1996 Los equipos de Brooks el ctricos electr nicos en relaci n con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magn tica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de sefial cuando se va a utilizar un equipo con marca CE Calidad del cable de sefial prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la certificaci n CE Si usted adquiere
41. act size The mounting dimensions are comparable to a mass flow controller Refer to Figure 1 4 The upstream pressure regulation mode shown in Figure 1 5 places the pressure controller at the outlet of the pressure vessel The pressure in the process upstream of the controller will be constant independent of downstream variation Pressure measurement and control takes place at the outlet side of the pressure vessel 1 1 Brooks Instrument Model 5866 Pressure Controller Figure 1 1 Model 5866 Pressure Transducer Pressure Figure 1 2 Model 5866 Silicon Chip Configuration Figure 1 3 Model 5866 System Block Diagram Downstream version REMOTE PRESSURE IRAN ma E TRANSDUCER EN lust N ES N PA AIN COMMAND COMPARISON CONTROL VALVE INPUT AMPLIFIER VALVE VALVE OVERRIDE OVERRIDE LOGIC COMMAND 5VOLT A POT REFERENCE OPTIONAL 1 2 Introduction Figure 1 4 Model 5866 Model 5866E Dimensions PM NS 15 Pin Male D Connector Proportional Adjustment Valve Height w pownsiream Adapter Integral Adjustment Upstream Downstream Flow Indicator Label 9 16 18 UNF Upstream Outlet Both Ends Downstream Inlet Upstream Inlet Downstream Outlet Connection A Dim 11 4 M VCR 4 88 124 0 1 4 M VCO 4 56 115 8 1 8 Compression 4 84 122 9 1 4 Compression 5 02 127 5 8 32 UNC 2B x 1 4 Deep 3 8 Compression 5 14 130 6 2
42. between the orifice 12 and the valve seat 11 If the valve clearance is too small the controller will not achieve full flow If the valve clearance is too large the control valve will not close properly The air gap is the space between the plunger 16 and insert 17 in the control valve The air gap determines the magnetic force available to operate the valve If the air gap is too large the magnetic force will be insufficient and the valve will not close If the air gap is too small the valve will have insufficient travel and the valve will not close 1 Make the bench testing set up as shown in Figure 5 2 Disconnect the valve connector from the side of the Model 5866 and connect it to the variable power supply and volt meter as shown Polarity is not important 2 Remove gas pressure Disassemble the control valve following the procedure given in Section 5 3 above Note the orifice size which is marked on the orifice face Referring to Figure 5 4 note the number location and thickness of all spacers 9 and 10 3 Reassemble the valve and set the variable voltage power supply to zero Volts 4 Apply 5 psig to the inlet of the Model 5866 if equipped with 0 1 bar transducer Apply 10 psig for instruments equipped with other transducers 5 Observe the flow and compare it to the values listed in Table 5 3 6 If the observed flow is greater that the listed value for the orifice size that is installed then go to Step 8 7 If the
43. ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me c ble vous devez utiliser un c ble blind 100 Les connecteurs D ou de type circulaire doivent tre reli s la terre Si des presse toupes sont n cessaires ceux ci doivent tre m talliques avec mise la terre Le blindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s la terre Les connecteurs de type card edge sont non m talliques Les c bles utilis s doivent tre blind s 100 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre Se r f rer au manuel d instruction pour le raccordement des contacts A 4 Installation and Operation Manual 541 C 005 AAA Rev D DRAFT April 2007 Section A CE Certification of Mass Flow Equipment Model 5866 Greek Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands O pa Eyzeipi to O npdv Lyeni xa Merono non CE Opr vov M rpnonc Hapozijs Malas Hueponnvia lavov ptog 1996 Kupiec K ptot pyava mg Brooks oxoia CE youv 542188 cuupova pe
44. considerations warrant this type of valve Remote Pressure Sensor Input allows the use of the integral control electronics and the valve to regulate the process pressure in response to the remote pressure transducer signal refer to Section 2 11 Voltage and Current Inputs Outputs Jumpers are provided on the PC board to allow 0 5 V 0 10 V 0 20 mA or 4 20 mA input output 0 5 V input output is the standard configuration For maximum accuracy the Model 5866 should be calibrated with the input output configuration it will ultimately use Controllers will be configured at the factory if requested at the time of ordering Figure 1 7 Typical Application of Downstream Controller Model 5866E Reactor Mass Flow Controllers Vacuum Pump 1 5 Brooks Instrument Model 5866 Pressure Controller Valve Override permits the user to fully open and close the valve independent of the command setting refer to Section 2 9 Precision 4 5 Volt Reference is provided to be used conjunction with user supplied command potentiometer to generate a 0 5 V command signal 1 4 Specifications AWARNING Do not operate this instrument in excess of the specifications listed below Failure to heed this warning can result in serious personal injury and or damage to the equipment Pressure Ranges 7 25 psia to 1450 psia full scale Elastomer Seals 7 25 psia to 72 5 psia full scale
45. daviek elektromagnetickej zhody EMC predpis 89 336 EEC Av ak pri vo be sign lov ch k blov k pr strojom vybaven m zna kou CE sa mus zaobch dza s ve kou opatrnos ou Kvalita sign lov ch k blov k blov ch izola n ch krab c a pr pojok Brooks zabezpe uje vynikaj cu k bel ktor vyhovuj po iadavk m smernice CE Ale ak by ste chceli pou va vlastn sign lov k ble vyberte si aspo do 100 pokryt plne tienen sign lov k bel Ktor ko vek pou it D pr pojka alebo koaxi lna pr pojka mus by tienen kovov m krytom Ak je mo n k blov pokrytie sa mus zdru i izolovan mi krabicami pre k blov Pokrytie k blov sa musia pripoji k ochrann mu krytiu alebo izola n mi krabicami a na oboch koncoch sa mus zabezpe i 360 ove tienenie Krytie sa mus pripoji uzem ovaciemu uzlu Pr pojky tla en na karty s drah kovy pod a noriem Aby vyhoveli po iadavk m smernice CE pou it k ble musia disponova s 100 n m tienen m Suomi Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Asia Lis ys Kayttoohjeisiin Viite Massamaaramittareiden CE sertifiointi Paivamaara Tammikuu 1996 Brooksin CE merkilla varustetut sahk iset laitteet ovat lapaissyt EMC testit direktiivi 89 336 EEC Erityista huomiota on kuitenkin kiinnitettava signaalikaapelin valintaan Signaalikaapelin kaapelin lapiviennin ja liittimen laatu Brooks toimittaa kork
46. e gas pressure Disassemble the control valve following the procedure given in Section 5 3 above Note the orifice size which is marked on the orifice face Referring to Figure 5 3 note the number location and thickness of all spacers 9 and 10 3 Decrease the preload of the valve by 005 by either removing a 005 small 9 preload spacer or by adding a 005 large 10 preload spacer 4 Reassemble the control valve following the assembly procedure in Section 5 4 above 5 Apply 5 psig to the inlet of the Model 5866 if equipped with 0 1 bar transducer Apply 10 psig for instruments equipped with other transducers 6 Apply zero Volts to the control valve and observe the flow 7 If the valve leaks through remove the gas pressure and increase the preload by 005 and go to Step 8 If the valve does not leak through repeat Steps 2 through 6 8 Apply 5 psig to the inlet of the Model 5866 if equipped with 0 1 bar transducer Apply 10 psig for instruments equipped with other transducers 9 Apply 14 5 Volts to the valve using the variable power supply and observe the flow 10 Compare the flow with the minimum flow listed in Table 5 3 The minimum flows have been listed with reference to both 0 C and 70 F for convenience Be sure to use the column that is correct for the flow meter used in the set up The outlet pressure at the controller must be less than 0 4 psig 10 inches of water 11 If the observed flow is greater than the flow
47. ealaatuisia kaapeleita jotka tayttavat CE sertifikaatin vaatimukset Hankkiessaan signaalikaapelin itse olisi hankittava 100 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mikali mahdollista tulisi k ytt metallisia kaapeliliittimia kiinnitett ess suojaa Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa paissa 360 n matkalta Suojan tulisi olla maadoitettu Card Edge Connector it ovat standarditoimituksina ei metallisia Kaapeleiden taytyy olla 100 sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Nastojen liittaminen katso liitteena oleva manuaali Ystavallisin terveisin Section CE Certification Installation and Operation Manual Mass Flow Equipment 541 C 005 AAA Rev D DRAFT Model 5866 April 2007 Svensk Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 Brooks elektriska elektronik utrustning som CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet p signalkabel och anslutningskontakter Brooks levererar som standard kablar av h g kvalit
48. ed equipment Quality of the signal cable cable glands and connectors Brooks supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with 100 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to a earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 10096 shield to comply with CE certification The shield should be terminated to a earth ground For pin configuration Please refer to the enclosed Instruction Manual Eesti Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Brooksi CE marki kandev elektriline ja elektrooniline seadmestik on edukalt labinud katsed vastavalt elektromagnetilise hilduvuse eeskirjadele elektromagnetilise hilduvuse direktiiv 89 336 EM Signaalikaablite valimisel kasutamiseks koos CE vastavusmarki omavate seadmetega tuleb siiski j rgida spetsiaalseid n udeid Signaalikaablite labiviiktihendite ja pistikuhenduste kvaliteet Brooks valmistab kvaliteetkaableid mis vastavad CE sertifitseerimise spetsifikatsioonidele Kui te aga soovite kasutada oma signaalika
49. emoval from storage a visual inspection should be conducted to verify the condition of the equipment is as received If the equipment has been in storage for an excess of ten 10 months or under conditions in excess of those recommended all pressure boundary seals should be replaced and the device subjected to a pneumatic pressure test in accordance with applicable vessel codes 2 3 General A pressure controller system can be built in upstream or downstream control configurations refer to Figures 1 7 1 8 When the controller is placed downstream upstream pressure controller of the pressure vessel the flow is usually determined by MFC s in the line upstream of the vessel With the pressure controller upstream of the vessel downstream pressure controller the most likely application is controlling a subatmospheric pressure in the vessel The inlet of the pressure controller can be at atmospheric gas pressure or at vapor pressure of a liquid source The flow in this situation is usually determined by the characteristics of a vacuum pump 2 4 Gas Connections Standard inlet and outlet connections on the Model 5866 and 1 4 compression fittings Optional VCOTM VCR connections are available upon request Brooks Instrument Model 5866 Pressure Controller Prior to installation insure that all piping is clean and free of obstructions Install the piping in such a manner that permits
50. ensko Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Vse elektri ne elekronske naprave Brooks z zaznamovanjem CE so uspe no testirane primerno zahtevam elektromagnetne kompatibilnosti EMC predpis 89 336 EEC Medtem ko mora se posvetiti posebna pozornost za izbiro signalnih kabl ki se uporabijo naprave z zaznamovanjem CE Kakovost signalnih kabl kabelskih tulcev in prikljuckov Brooks zavaruje kabliranje odli ne kakovosti kar zado uje zahtevam CE direktiv Ce medtem ko Zelite uporabiti svoj signalni kabel izbirajte signalni kabel ki je vsaj v 100 zavit in popolnoma zasenceni signalni kabel Kateri koli D ali koaks priklju ek mora bit zasen en s kovinsko opremo e je uporabivo kabelsko oblogo je potrebno zajemati skupaj s kovinskimi tulci za kable Kabelsko oblogo je potrebno povezovati s kovinsko za itno oblogo ali s tulci in obeh koncih je potrebno da zavaruje senco od 360 Oblogo je treba spojiti z ozemijitvijo Prikljucki tiskani na so nekovinski kot standardi da ustrezajo direktivam CE uporabljeni kabli morajo razpolagati s senco od 100 96 Installation and Operation Manual Section A CE Certification of 541 C 005 AAA Rev D DRAFT Mass Flow Equipment April 2007 Model 5866 Slovensky Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands V etky zariadenia elektrick elektronick Brooks vybaven so zna en m CE boli spe ne testovan pod a po ia
51. et som motsvarar de krav som st lls f r CE godk nnande Om man anv nder en annan signalkabel ska kabeln i sin helhet vara sk rmad till 100 eller runda typer av anslutningskontakter ska vara skarmade Kabelgenomf ringar ska vara av metall alternativt med metalliserad sk rmning Kabelns sk rm ska i bada ndar vara ansluten till kontakternas metallk por eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en jordf rbindelse Kortkontakter r som standard ej metalliserade kablar som anv nds m ste vara 10096 skarmade f r att verensst mma med CE certifieringen Sk rmen ska avslutas med en jordf rbindelse F r elektrisk anslutning till kontaktstiften h nvisas till medf ljande instruktionsmanual Addendum April 5 2004 Attach to the following publications X 5850EM December 1998 Issue 3 X 5964 dated April 1996 Issue 2 X 5866 dated April 1998 Issue 2 X 5866RT dated May 1998 Issue 2 Brooks Thermal Mass Flow Common Body Dimensions Issue Dimensional drawings appearing in the above listed instruction manuals do not depict current body fitting configurations being offered Action The latest revision VCR body fitting configurations offer a modified mounting configuration adding the SEMI standard mounting hole configuration and only one 1 of the legacy Brooks mounting holes When specifying any of the models listed below please refer to the attached Figures A 1 thru A 2 for m
52. greater than the 100 psi pressure drop required for the application so the 020 orifice is correct Table 5 4 Model 5866 Orifice Selection C Size Pressure Drop psi 5 0x105 001 1500 2 0x105 002 1500 5 0x105 003 1500 1 1x10 004 1500 4 0 x10 007 1500 9 0x104 010 750 2 0x103 014 550 4 7x103 020 300 1 4 102 032 175 3 5x10 048 85 5 5 102 062 55 8 0x102 078 50 1 0x10 093 50 1 4x10 116 50 1 5x10 120 50 Figure 5 6 Example Application of Orifice Sizing Procedure UN A Atmosphere Model 5850E Mass Flow Controller 500 sccm Full Scale 100 psig Maximum Model 5866 Desired Pressure Reactor Model 5850E Mass Flow Controller 300 sccm Full Scale 5 14 Calibration Section 6 1 Calibration Procedure The calibration of the Model 5866 Pressure Controller can be divided into three parts Transducer Adjustment Control Valve Adjustment and Control Electronics Adjustment The control valve adjustment and sizing procedures are given in Sections 5 5 and 5 6 respectively The adjustment of the control electronics is best done in the actual system the Model 5866 will be installed in and this procedure is covered in Section 3 2 This section of the manual will cover the calibration of the pressure transducer Please refer to the above sections of the manual if the co
53. iner Plate Troubleshooting Figure 5 2 Adjustment Test Setup Variable Power Supply Nitrogen gt or Air Pressure Regulator The valve is adjusted in Brooks pressure controllers by adding spacers 9 and 10 to the control valve to vary the initial position of the parts The proper initial position is required so the valve will have the proper travel and force available to insure reliable control Screw type adjustments are not used in Brooks control valve since they can change with pressure and vibration Screw type adjustments also introduce a dynamic seal that is a potential leak site and source for contamination The adjustment procedures below require the use of a variable voltage power supply pressure regulator pressure gage voltmeter flow meter and a supply of nitrogen or air The test set up is shown in Figure 5 2 The power supply must be capable of delivering 400 mA at 30 V If the proper equipment or facilities are not available to perform this procedure please return the instrument to the factory or an authorized repair station Refer to Figure 7 1 for the location of the parts Section A describes the adjustment of the Normally Closed control valve Section B describes the adjustment of the Normally Open control valve Please refer to the proper section for your valve type A CAUTION When testing upstream type pressure controllers be certain n
54. is proportional to the error input signal to the controller Refer to Figure 3 2 It provides very rapid response and is relatively stable Used alone proportional control has one major disadvantage at steady state it exhibits an offset That is there is a difference between the desired value or setpoint and the actual value of the controlled variable An integral action added to the proportional mode eliminates offset Integral Control Integral or reset action is an integration of the input error signal over time Refer to Figure 3 3 This means that with integral action the value of the manipulated variable changes at a rate proportional to the error With integral action present there can be no offset at steady state since the manipulated variable will continue to change as long as an error is present Characteristics of Control By using both proportional and integral control actions rapid control can be achieved with out a steady state offset Refer to Figure 3 4 Typically there is a slight decrease in system stability due to the presence of the integral mode The dynamic response of the system is better than the response would be with integral alone Because the two controller modes are interactive the PI controller is somewhat more difficult to tune Tuning the control Turning the P potentiometer clockwise c w will increase the proportional band thus increasing the offset and system response time If the proportional
55. itrogen equivalent flow 20 945 21 16 slpm Nitrogen It is generally accepted that the mass flow rate derived from this equation is only accurate to 2595 The sensor conversion factors given in Table 6 1 are calculated based on a gas temperature of 21 C and a pressure of one atmosphere The specific heat of most gases is not strongly pressure and or temperature dependent However gas conditions that vary widely from these reference conditions may cause an additional error due to the change in specific heat caused by pressure and or temperature Brooks Instrument Model 5866 Pressure Controller Table 6 1 Conversion Factors Nitrogen Base FACTOR FACTOR kom Acetylene Air Mae Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f 13B1 1 3 Butadiene Butane 1 Butene CIS 2 Butene Trans 2 Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetrafluoride f 14 Carbonyl Fluoride Carbonyl Sulfide Chlorine Chlorine Dioxide Chlorine Trifluoride 2 Chlorobutane Chlorodifluoromethane f 22 Chloroform Trichloromethane Chloropentafluoroethane f 115 Chlorotrifluoroethylene Chlorotrifluoromethane f 13 Cyanogen Cyanogen Chloride Cyclobutane Cyclopropane Deuterium Diborane Diboromodifluoromethane f 12B2 1 2 Dibromotetrafluoroethane f 114B2 Dichlorodifluoromethane f 12 Dichlorofluoromethane f 21
56. ks Instrument Model 5866 Pressure Controller 9 If the flow shuts off is less than the maximum allowable leak through for the type of valve seat installed the adjustment is complete 10 lf the leakage at 18 Volts is excessive add a large 0 005 spacer 10 to decrease the air gap and repeat Steps 8 and 9 5 6 Orifice Sizing The Model 5866 Pressure Controller can be configured with the valve on the outlet to control the pressure upstream of the instrument This configuration is called an upstream controller The Model 5866 can also be configured with the valve on the inlet to control the pressure downstream of the instrument This configuration is called a downstream controller The calibration or sensed pressure is the pressure that is controlled This is the upstream pressure for an upstream controller or downstream pressure for a downstream controller The reference pressure is the pressure opposite the calibration pressure The reference pressure would be the downstream pressure for an upstream controller and the upstream pressure for a downstream controller The reference pressure is usually relatively constant The calibration pressure is the pressure to which the electronics is calibrated to give 10096 output signal The calibration pressure is the maximum sensed pressure The above definitions are shown in Figure 5 5 To properly size the control valve orifice in the Model 5866 the following information must be know
57. l Step Response The Model 5866 Pressure Controller has proportional and integral control action The reset or integral control is combined with the proportional control actions commonly referred to as PI control Both proportional band and integration time are user adjustable Refer to Figure 1 4 for P and adjustment potentiometer locations The dynamic behavior of the control system is influenced by flow range pressure range fluid type orifice size and system volume Therefore Model 5866 may have to be adjusted in the field to achieve the best dynamic response The factory settings are typically proportional band minimum 0 5 potentiometer fully counterclockwise c c w and integration time minimum 0 05 seconds potentiometer fully clockwise c w This combination of adjustments usually results in stable control For most systems the dynamic response is adequate with the factory settings Improved response can be had by final tuning the P and potentiometers in the system by the user The tuning of the P and constants does not affect the calibration of the instrument Definitions Both proportional and integral control actions are defined with respect to a step response error signal Refer to Figure 3 1 pd a z u c 20 5 6 5 o o u Brooks Instrument Model 5866 Pressure Controller Proportional Control Proportional control is a basic continuous control mode in which the controller output
58. n Calibration Pressure psia Reference Pressure psia T Gas Temperature approximate R R F 460 Ax Max Flow sccm 0 C reference temperature SG Gas Specific Gravity reference Air Q 14 7 psia and 70 F 1 0 1 Determine the minimum pressure drop across the pressure controller For an upstream controller this will be when the sensed inlet pressure is 596 of the calibration pressure or 1 5 psi whichever is larger For a downstream controller this will be the reference pressure minus the calibration pressure 2 Determine the P1 and P2 in psia For an upstream controller P1 is the reference pressure plus the minimum pressure drop P2 is the reference pressure 1 minimum pressure drop P2 P Ref Figure 5 5 Application Configuration P 2 VESSEL CALIBRATION CALIBRATION VESSEL OR OR SENSED I REFERENCE pr SENSED B B Re LJ PRESSURE PRESSURE PRESSURE UPSTREAM CONTROLLER DOWNSTREAM CONTROLLER 5 12 Troubleshooting For a downstream controller P1 is the reference pressure P2 is the calibration pressure P1 P per P2 P Cal 3 Determine the C for the application The ratio between P1 and P2 will determine the calculation to use Equation 1 P2 Q SG T gt 0 5 use C v P1 800 000 V P1 P2 P2 Equation 2 P2 Q ax f 0 5 use _VSG T P1 397 000 P1 4 Select the orifice size from Table 5 4 that has a
59. ntrol valve or control electronics require adjustment Note Calibration of the Model 5866 Pressure Controller requires the use of a precision pressure and vacuum source precision pressure indicators and a digital voltmeter DVM The calibration may also involve high pressure is recommended the calibration procedure be performed by qualified personnel A CAUTION Excessive pressure can damage the pressure transducer and make it inoperative Care must be taken not to allow the pressure transducer to be exposed to more than the maximum over range pressure The maximum over range pressure is specific to the range of the pressure transducer These pressures are listed in Section 1 4 of this manual to Figures 1 9 and 1 10 for locations for the adjustment potentiometers jumpers and D Connector pins 1 Connect power to the instrument and allow it to warm up for approximately 15 minutes 2 Connect the DVM positive lead to the 5 Volt reference output Pin 11 and the DVM negative lead to signal ground Pin 10 Adjust the 5 Volt reference output to 5 000 V using P1 3 Connect the DVM positive lead to the pressure signal output Pin 2 and the negative lead to signal ground Pin 10 Connect the transducer side of the Model 5866 to a vacuum source capable of achieving an absolute pressure less than 0 02 psia 1 Torr Put a cap or some suitable plug on valve side inlet Attaching the transducer side of the Model 586
60. nts or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS LOCAL AND WORLDWIDE SUPPORT Brooks Instrument provides sales and service facilities around the world ensuring quick delivery from local stock timely repairs and local based sales and service facilities Our dedicated flow experts provide consultation and support assuring successful applications of the Brooks flow measurement and control products Calibration facilities are available in local sales and service offices The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant international standards START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service
61. o chassis Valve Voltage Out External Valve Control Wht Blk ground in meter connector Command Input Command Pot S Red Blk Supply Voltage Common Grn BIk Voltage Signal Common Org Blk 5 Volt Reference Command Pot CW Blu Blk Valve Override Blk Wht 15 Supply 1 Red Wht Chassis Ground 2 Grn Wht External Sensor Input Blu Wht 1 2 3 4 5 6 7 8 9 2 9 Valve Override The valve override function allows full opening and closing of the valve independent of the command setting The valve override for the pressure controller is as follows a To open the valve apply 15 Vdc to the valve override terminal b close the valve apply 15 to the valve override terminal The valve override function is accessed from Terminal 12 refer to Figure 2 1 and Table 2 1 Note For normal operation Terminal 12 may be left open floating or grounded 2 10 Precision 5V Reference The Model 5866 is eguipped with a precision 5 Vdc reference The reference is used internally for precise zero adjustment and is also available as a buffered output for use in conjunction with a 1 to 10 k ohm potentiometer to provide 0 5 set point The 5 reference is available at Terminal 11 refer to Figure 2 1 and Table 2 1 2 11 Remote Transducer Input To allow the Model 5866 control circuitry and valve to be used with external transducer
62. ollowing connections must be made for new installations Pin Number Description 1 Command Common 20r4 Signal Output 5 15 Supply 15 Vdc Supply Command Input Supply Voltage Common Voltage Signal Common 15 Supply Current I O Note The Command Return is internally connected to Signal Return and Supply Voltage Common 2 8 Remote Setpoint Command Input If the pressure controller will be commanded by an external voltage or current signal the command potentiometer is not used The command hookup is as follows a Voltage Signal Connect the external command signal to Terminal 8 and the external command return to Terminal 1 Refer to Figure 2 1 and Table 2 1 b Current Signal Connect the command signal to Terminal 8 and the command return to Terminal 1 Jumper J4 should be ON Refer to Figure 2 1 and Table 2 1 Note The command return is internally connected to signal return and power supply common Current supplied by the device providing the set point will not be returned on the current loop 2 3 Brooks Instrument Model 5866 Pressure Controller Figure 2 1 Customer Connections and Settings CONNECTORS TRANSDUCER CONNECTOR 1 SUPPLY BLACK 2 SUPPLY WHITE 3 OUTPUT BLUE 4 OUTPUT RED CN2 CUSTOMER CONNECTION 15 PIN D CONNECTOR ADJUSTMENT 1 COMMAND RETURN POTENTIOMETERS 2 OUTPUT SIGNAL 3 REMOTE
63. ommer specifikationerne til CE maerkning Hvis der anvendes andre kabel typer skal der benyttes et skeermet kabel med hel skaerm med 100 deekning Forbindelses stikket type D eller cirkulaere skal vaere skaermet med metalhus og eventuelle PG forskruninger skal enten veere af metal eller metal skaermet Skeermen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader Sk rmen b r v re forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et sk rmet kabel med hel sk rm med 10096 daekning Skeermen ber veere forbundet til jord Forbindelse af stikket venligst referer til vedlagte instruktions manual Med venlig hilsen Deutsch Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Subjekt Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Vertraglichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Gerate elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel f r CE zertifizierte Ger te sind spezielle Anforderungen zu beachten Qualit t der Verbindungskabel Anschlu stecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungsk
64. ooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Assunto Adenda ao Manual de Instru es Referencia Certificagao CE do Equipamento de Fluxo de Massa Data Janeiro de 1996 O equipamento el ctrico electr nico Brooks com a marca CE foi testado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE ser necess rio ter uma atengao especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fornece cabo s de qualidade superior que cumprem os requesitos da certificac o CE Se fornecerem o vosso pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 100 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizarse buchas met licas de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado blindagem ou bucha met lica em ambas as extremidades em 360 blindagem deve terminar com a ligagao massa Os conectores Card Edge s o em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 10096 nos termos da Certificac o CE blindagem deve terminar com ligagao massa Relativamente da cavilha queiram consultar o Manual de Instruc es A 9 Section
65. ooks zabezpe uje spolehlivou kabel z kter vyhovuje poZadavk m sm rnic CE Chcete li pou t vlastn signaliza ni kabel volte kabel s kryt m nejm n 100 95 s pln m st n n m Jak koliv pou it koaxi lni pfipojovaci svorka nebo D svorka musi b t stin na kovov m pl st m Je li to fe iteln kryt kabel je nutn zabezpe it kovovou kabelovou pr chodkou St n n kabelu je tfeba propojit s kovov m ochrann m krytem nebo kovovou kabelovou pr chodkou a obou dvou konc ch kabelu mus b t zaji t no st n n 360 Kovovy kryt se musi propojit s uzem ovac svorkou Pripojovac svorky nalisovan na kartu nejsou kovov jako je ve standardech st n n pou it ch kabel mus b t minim ln 100 96 aby vyhov ly sm rnic m A 1 Section CE Certification Installation and Operation Manual Mass Flow Equipment 541 C 005 AAA Rev D DRAFT Model 5866 April 2007 Dansk Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Emne Till g til instruktions manual Reference maerkning af Masse Flow udstyr Dato Januar 1996 Brooks Instrument har gennemf rt CE maerkning af elektronisk udstyr med succes henhold til regulativet om elektrisk stoj EMC direktivet 89 336 EEC Der skal dog ggres opmaerksom pa benyttelsen af signalkabler i forbindelse med CE meerkede udstyr Kvaliteten af signal kabler og stik Brooks lever kabler af haj kvalitet der imedek
66. ot to exceed the maximum overpressure specification for the pressure transducer installed as specified in Section 1 4 For the 0 1 bar transducer this is only 7 psig Voltmeter BROOKS PRESSURE CONTROLLER O gt Pressure Gage Model 5866 Flow Meter 5 7 Brooks Instrument Model 5866 Pressure Controller A CAUTION The procedure described below requires the disassembly of the control valve Be certain to remove gas pressure priorto disassembly to prevent injury A Adjustment procedure Normally Closed N C control valve Refer to Figure 5 3 for spacer locations nomenclature for the Normally Closed N C control valve Refer to Section 7 spare parts for the spacer part numbers and the spacer kit part number The preload determines the initial force required to raise the valve seat off the orifice and start gas flow If the preload is insufficient the valve will not fully close and gas will leak through when the valve is closed If preload is excessive the magnetic force generated between the plunger and stem will be insufficient to raise the plunger and the valve will not open 1 Make the bench testing set up as shown in Figure 5 2 Disconnect the valve connector from the side of the Model 5866 and connect it to the variable power supply and voltmeter as shown Polarity is not important 2 Remov
67. oting Section 5 1 General A CAUTION It is important that this controller be serviced only by properly trained and qualified personnel A System Checks The Model 5866 is generally used as a component in gas handling systems which can be quite complex This can make the task of isolating malfunction in the system difficult one An incorrectly diagnosed malfunction can cause many hours of unnecessary down time If possible make the following system checks before removing a suspected defective pressure controller for bench troubleshooting or return to the factory especially if the system is new 1 Verify a low resistance common connection and that the correct power supply voltage and signals are reaching and leaving the controller The Break out Board P N S 273 Z 649 AAA will make this job much easier 2 Verify that the process gas connections have been correctly terminated and leak checked 3 If the pressure controller appears to be functioning but cannot achieve set point verify that sufficient inlet pressure and pressure drop are available at the controller to provide the required flow 4 Verify that all user selectable jumpers are in their desired positions refer to Figure 2 1 AWARNING If it becomes necessary to remove the controller from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the controller thoroughly with a dry inert gas such as nitrogen before
68. ounting holes and Downport configuration information 5850EMF 59640 5866 5866RT Addendum April 5 2004 Attach to the following publications X 5850EM December 1998 Issue 3 X 5964 dated April 1996 Issue 2 X 5866 dated April 1998 Issue 2 X 5866RT dated May 1998 Issue 2 Brooks TMF Common Body Dimensions INCH DIMENSIONS MM FT la 15 POSITION MALE 2 D CONNECTOR 50 12 7 WRENCH FLAT TYP 1 4 MVCR 1 4 CONNECTION CONNECTION Y INLET OUTLET 68 37 7 17 3 1 41 38 96 n 35 9 0 8 32 UNC 2B X 1 4 MOUNTING HOLE M4 X 7 12 3 0 DEEP 1 LEGACY MOUNTING HOLE 2 MOUNTING HOLES SEMI STANDARD MOUNTING Figure A 1 Typical MFC MFM Dimensional Drawing with VCR Fittings for Models 5850EMF 59640 5866 586681 Addendum April 5 2004 Attach to the following publications X 5850EM December 1998 Issue 3 X 5964 dated April 1996 Issue 2 X 5866 dated April 1998 Issue 2 X 5866RT dated May 1998 Issue 2 Brooks TMF Common Body Dimensions INCH DIMENSIONS MM 15 POSITION MALE l D CONNECTOR
69. prevent damage to the valve spring 4 Carefully remove the valve stem assembly 6 Remove the plunger assembly 7 8 9 and 11 Remove and note the position of the valve spring spacers 10 Spacers may be used above and or below the lower valve springs 8 7 Unscrew the orifice 12 from the flow controller body 25 5 2 Troubleshooting Table 5 1 Bench Troubleshooting Possible Cause Outpu mand and there is pressure on the controller stays at zero Volts regardless of com Defective Sensor Replace sensor Refer to Section 5 3 and Table 5 2 Output stays at zero Volts regardless of command and there is no flow through the controller Clogged Control Valve 15 V applied to the valve override input Defective printed circuit board Check Pin 7 if the voltage is more than 11 V Disassemble and repair the control valve Refer to Sections 5 3 and 5 4 Check valve override input Refer to Figure 2 2 for terminal assignments Replace printed circuit board Refer to Sections 5 3 and 5 4 Output signal stays at 14 V regardless of command and there is flow through the controller Valve stuck open or leaky 415 applied to the valve override input Defective printed circuit board Command input floating Clean and or adjust control valve Refer to cleaning procedure and or Section 5 5 Check the valve override terminal Refer to Figure 2 2 for terminal assignments Replace
70. prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas gp 1 888 554 FLOW ISO Europe gy 31 318 549290 Within Netherlands gy 0318 549 290 C Asia 011 81 3 5633 7100 SEEM Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice TRADEMARKS BFOOKS i i iaa datat Brooks Instrument LLC Freon TF pa DuPont de Nemours 8 Hastelloy cansa area aa Haynes International Mz iii a DuPont Dow Elastomers ov DuPont de Nemours amp DuPont Performance Elastomers Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 318 549 300 T 011 81 3 5633 7100 T 215 362 3700 F 31 318 549 309 F 011 81 3 5633 7101 F 215 362 3745 E Mail B
71. ptan 0 588 1313 2 146 Methyl Silane i 1 283 2 061 Methyl Trichlorosilane MTS i 2 310 6 675 Methyl Vinyl Ether 1 435 2 567 Monoethanolamine 4 1 477 2 728 Monoethylamine 1 269 2 013 Monomethylamine 1 067 1 420 Neon 0 847 0 902 Nickel Carbonyl i 2 371 7 008 Nitric Oxide 1 030 1 339 Nitrogen 1 000 1 251 Nitrogen Dioxide 1 713 2 052 Nitrogen Trifluoride 1 598 3 168 Nitrogen Trioxide 1 649 3 389 Nitrosyl Chloride E 1 529 2 913 Nitrous Oxide 1 259 1 964 Octofluorocyclobutane A 2 672 8 933 Oxygen O 1 067 1 429 Oxygen Difluoride 1 388 2 402 Ozone 1310 2 138 Pentafluorethane f 125 2 070 5 360 j 1 605 3 222 Perchloryl Fluoride 1 905 4 571 Perfluorobutane A 2 918 10 61 Perfluoro 2 Butene 2 672 8 933 Perfluoromethyl vinylether E 2 029 5 131 Perfluoropropane A 2 591 8 396 Pentane n Pentane 1 605 3 222 Phosgene 3 1 881 4 418 Phosphine 1 100 1 517 Phosphorous Pentafluoride i 2 109 5 620 Phosphorous Trifluoride 1 770 3 906 Propane same as CH CH CH j 1 274 2 008 Propylene Propene 1 234 1 875 Rhenium Hexafluoride E 3 279 13 41 Silane i 1 070 1 440 Silicon Tetrachloride 8 2 465 7 579 Silicon Tetrafluoride 8 1 931 4 648 Sulfur Dioxide 3 1 529 2 858 Sulfur Hexafluoride 5 2 348 6 516 Sulfur Tetrafluoride 1 957 4 776 Sulfur Trioxide E 5 1 691 3 575 Sulfuryl Fluoride 1 931 4 648 Tetrachloromethane 2 345 6 858 Tetrafluoroethylene
72. r entrambe le estemita Lo schermo deve essere collegato ad un terminale di terra I connettori Card Edge sono normalmente non metallici II cavo impiegato deve comunque avere una schermatura del 10096 per soddisfare la certificazione CE Lo schermo deve essere collegato ad un terminale di terra Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento Latviski Neonstraat 3 6718 WX Ede The Netherlands Latviski Visas Brooks elektriskas elektroniskas iekartas ar CE markejumu ir veiksmigi parbauditas saskana ar noteikumiem par elektromagn tisko saderibu EMC direktiva 86 336 EEK Ta u Ipa a uzmaniba ir japiever izveloties signala kabelus kas tiks lietoti kopa ar iekartam kam pieSkirts CE markejums Signala kabelu kabelu uzgalu un savienotaju kvalitate Brooks piedava augstas kvalitates kabelus kas atbilst CE mark Sanas noteikumiem Ta u ja velaties izmantot savu signala kabeli izvelieties pilnrba ekranetu kabeli kura laukums ir vismaz 100 Visi izmantotie D tipa vai apalas formas savienotaji jaekrane izmantojot metala ekranu NepiecieSamibas gadijuma lai iesp l tu kabela ekran jumu j izmanto kabelu uzga i Kabe a ekran jums j savieno ar met la aulu vai uzgali un ekran jumam abos kabe a galos j b t 360 Ekran jums j savieno ar zem juma spaili Parasti druk to sh mas pla u savienot ji nav izgatavoti no met la Lai
73. rated with a scale shift will occur in the relation between the output signal and the mass flow rate This is due to the difference in heat capacities between the two gases This scale shift can be approximated by using the ratio of the molar specific heat of the two gases or by sensor conversion factor A list of sensor conversion factors is given in Table 6 1 To change to a new gas multiply the output reading by the ratio of the gas factor for the desired gas by the gas factor for the calibration gas used Factor of the New Gas Actual Gas Flow Rate Output Reading _ gt 948 _ Factor of the Calibration Gas Example The controller is calibrated for Nitrogen The desired gas is Carbon Dioxide The output reading is 75 sccm when Carbon Dioxide is flowing Then 75 x 0 773 57 98 sccm In order to calculate the conversion factor for a gas mixture the following formula should be used 100 Sensor Conversion Factor ye p p AS o Sensor Sensor Sensor Conversion Conversion Conversion Factor Factor Factor 6 2 Calibration Where percentage of gas 1 by volume percentage of gas 2 by volume percentage of gas by volume Example The desired gas is 2096 Helium He and 8096 Chlorine by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is i c cU A Mixture Factor 50 R 50 0 945 1 386 0 876 N
74. re proceeding 11 Remove the two screws 3 from the base plate 27 then reinstall them 2 3 turns into the body Reinstall the valve stem 6 retaining plate 4 using the four hex socket screws 3 Cap the outlet port The screws 3 are to be reinstalled to prevent violent ejection of the transducer when the pressure is applied Personal injury can result if the transducer is not captured by these loose screws 12 Slowly pressurize the inlet port to force the transducer 26 from the body 25 and against the loosened base plate 27 Remove the pressure once the transducer 26 is against the base plate 27 Remove the base plate 27 transducer 26 and valve stem 6 from the body 25 A CAUTION Do not scratch the transducer O ring sealing surfaces or touch the transducer diaphragm surface 13 Remove the O ring 5 from the transducer assembly 26 The Teflon backup ring may remain in place Note Steps 10 11 12 and 13 may be eliminated if the transducer is not to be removed B Cleaning Procedures Should the Model 5866 Pressure Controller require cleaning due to contamination with foreign material use the following procedures 5 4 Troubleshooting 1 Remove the unit from the system 2 Refer to Section 5 3 to disassemble the controller A CAUTION Do not soak the pressure transducer assembly in a cleaning solution If solvent seeps into the transducer assembly it may
75. rooksEu EmersonProcess com E Mail BrooksAs EmersonProcess com E Mail BrooksAm EmersonProcess com www Brooksinstrument com BROOKS Copyright 2008 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
76. s List Table 7 1 Model 5866E Parts List Part Number 375 B 008 BV 810 A 326 CEA BV 839 Z 042 BMT BV 622 Z 118 AAA BV 456 C 179 CEA BV 622 Z 117 BMT BV 810 A 327 BMT 751 C 343 ACZ Part Number 573 B 027 ACK S 185 Z 271 AAA 751 C 322 AWA 715 Z 169 CZ 375 B 016 Description Jam Nut Coil Assembly Valve Transducer Screw Retaining Plate O ring Valve Stem Transducer Size 016 Valve Stem N C Valve Plug w o valve Backing Ring w o valve Plunger Assy N C Lower Guide Spring Small Valve Spacer 005 TK Small Valve Spacer 010 TK Large Valve Spacer 005 TK Large Valve Spacer 010 TK Valve Seat w Viton Insert Valve Seat w Buna Insert Valve Seat w Kalrez Insert Valve Seat w Teflon Insert Valve Seat Stainless Steel Orifice Stainless Description O ring Orifice Size 008 Spacer Nut N O Valve Valve Stem N O Valve Plunger Assembly N O Valve Insert Sleeve N O Valve Plunger Ext N O Valve Spacer Spring N O Valve Screw Downstream Control Adaptor Downstream Control Adaptor 8 32 Mounting Screw Fittings 1 8 Compression Swagelok 1 4 Compression Swagelok 3 8 Compression Swagelok 6mm Compression Swagelok 1 4 VCR 3 8 or 1 2 VCR 1 4 VCO 3 8 or 1 2 VCO O ring Fitting 949 7 203 QOA 953 7 068 763 Z 064 QTA S 622 Z 165 AAA 820 Z 083 BMA 810 A 362 BMA 810 A 363 BMA 810 A 368 BMA 810 A 361
77. ssure Controller Power Requirements N C 3 5 watts 15 15 35 mA 15 15 180 mA 10 5 watts 15 45 350 mA Class Ill Equipment The dc Mains input shall supplied from SELV Separated Extra Low Voltage source Output Signals Standard 0 5 Vdc min load resistance 1 k ohm Optional 0 10 Vdc min load resistance 2 k ohm O or 4 20 mA into maximum 500 ohm 5 Volt Reference Output 5 Volts 20 296 min Load 1 k ohms Pressure Setpoint Signals Standard 0 5 input impedance 1M ohm Optional 0 10 Vdc input impedance 1M ohm O or 4 20 mA input impedance 250 ohm Remote Pressure Sensor Input Standard 0 5 input impedance 1M ohm Optional 0 10 Vdc input impedance 1M ohm Dimensions Refer to Figure 1 4 Valve Type Standard Normally Closed Optional Normally Open Process Connections Standard 1 4 stainless steel compression fittings Optional 1 4 VCR 1 4 VCO 1 8 compression Electrical Connection 15 pin D Connector DA 15P Environmental Conditions Installation Category I Pollution Degree 2 Humidity 50 8096 Relative Humidity Meter Altitude 6562 feet 2 000 meters For Indoor Use ONLY Mains supply voltage fluctuations not to exceed 10 of the nominal voltage Environmental Effects EMC Effects Meets the requirement of the EMC directive 89 336 EEC EN 61000 4 2 thru 4 8 PED Sound Engineering Practice SEP Area classifcation
78. su propio cable de se al deber a usar un cable que est completamente protegido en su conjunto con un apantallamiento del 10090 Cuando utilice conectores del tipo D Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deber n utilizar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados La pantalla deber conectarse a tierra Los conectores estandar de tipo tarjeta Card Edge no son met licos los cables utilizados deber n ser protegidos con un apantallamiento del 10096 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Para ver la configuraci n de los pines Por favor consultar Manual de Instrucciones adjunto Francais Brooks Instrument Neonstraat 3 6718 WX Ede The Netherlands Sujet Annexe au Manuel d Instructions Reference Certification CE des Debitmetres Massiques a Effet Thermique Date Janvier 1996 Messieurs Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les r gles de la Compatibilit Electromagn tique directive CEM 89 336 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du c ble utilis pour v hiculer le signal d un appareil portant le label CE Qualit du c
79. ther information d The Model 5866 pressure controller may be installed in any position Note The control valve in the Model 5866 provides precision control and is not designed for positive shut off If positive shut off is required it is recommended that a separate shut off valve be installed in line 2 2 Installation A CAUTION Since the Model 5866 Control Valve is not a positive shut off a separate solenoid valve may have been installed for that purpose It should be noted that a small amount of gas may be trapped between the downstream side of the pressure controller and the solenoid resulting in a surge upon opening of the solenoid valve This surge can be reduced in magnitude by locating the controller and solenoid valve close together or by moving the solenoid valve upstream of the controller 2 6 In Line Filter It is recommended that an in line filter such as the Brooks Model 5848 be installed upstream from the controller to prevent the possibility of any foreign material entering the meter The filter porosity should be approximately ten times smaller than the orifice used in the installation however it is recommended that the minimum porosity that does not restrict the flow rate being used The filtering element should be periodically replaced or cleaned 2 7 Electrical Interface To insure proper operation the Model 5866 must be connected per Figure 2 1 As a minimum the f
80. way around the stem Torque the screws securing the retaining plate in a diagonal pattern refer to Figure 5 1 to 15 in Ibs 8 Install the coil assembly 2 over the valve stem assembly 6 and secure with jam nut 1 9 Install the printed circuit board 30 secure with the bracket 28 and two screws 29 Plug the connector from the sensor onto the printed circuit board 10 Install the electronics cover 31 on the controller secure with three screws 29 and two standoffs 33 Plug the connector from the valve coil into the printed circuit board through the hole in the electronics cover 11 Prior to installation leak and pressure test the controller to any applicable pressure for the transducer refer to Section 4 1 5 5 Adjusting the Control Valve numbers in refer to Figure 7 1 The Model 5866 control valve has been factory adjusted to insure proper operation Adjustment is not normally required during the life of the instrument Readjustment may be required if any of the following parts have been replaced Normally Closed Valve Normally Open Valve Orifice 12 Orifice 12 Valve Stem 6 Valve Stem 15 Plunger 7 Plunger 16 Lower Guide Spring s 8 Lower Guide Spring 8 Valve Seat 11 Valve Seat 11 Downstream Control Downstream Control Adaptor 21 Adaptor 21 Plunger Extension 18 Spring Spacer 19 Insert Sleeve 17 Figure 5 1 Torque Sequence for TOP VIEW the Valve Reta

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