HPS 907 Operation/Maintenance Manual
Contents
1. emks Chi Of HPS Products HPS Products Series 907 Analog Convection Transducer ACT Vacuum Sensor OPERATION AND MAINTENANCE MANUAL HPS Products HPS Products Series 907 Analog Convection Transducer ACT Vacuum Sensor SEPTEMBER 1999 PART 109070001 REV A1 Analog Convection Transducer ACT Vacuum Sensor Part 1090700XX or 1090700XXCE Please fill in this number and have it readily available when calling for service or additional information The part number can be found on your packing slip For more information or literature contact MKS Instruments Inc HPS Products Inc 5330 Sterling Drive Boulder CO 80301 USA Phone 303 449 9861 800 345 1967 FAX 303 442 6880 1995 1996 by MKS Instruments Inc HPS Products Inc ll rights reserved trademark of MKS Instruments Inc HPS Products Inc Teflon and Viton are registered trademarks of DuPont Co VCR is a registered trademark of Swagelok Company Analog Convection Transducer ACT Vacuum Sensor Table of Contents Table of Contents Package Contents deiecit LR ec iie uis 1 Symbols Used in this 2 Safety decis i e aed eect 3 Specifications odo Qe ono dedos OO ede Oven e OO edu Du e 4 Feature and Control Locations 6 Typical Applications for the Series 902. ACT Vacuum Sensor Testing the ACT Sensor 21 Replacing the ACT Sensor Tube Disassembling the ACT Electronics Su bassembly reti e titty ete ae Mae alan Se Mer Rus 22 Calibrating the New Sensor Tube sese 22 Assembling the ACT Electronics Subassembly 22 Preparing the ACT for 22 ACBOSSOIIGS choro hbro dodo ioc eaa Co bu verbu rS ba vehi 23 Prod ct VV AR Fatily seo De a o Ee ees 25 Appendix A How the Series 907 ACT Works 26 Theory of a Thermal Conductivity 26 Measurement 0 26 e 27 Analog Convection Transducer ACT Vacuum Sensor Package Contents Before unpacking your Series 907 Analog Convection Transducer ACT Vacuum Sensor check all surfaces of the packing material for shipping damage Please be sure that your Series 907 ACT package contains these items 1 ACT unit integrated sensor tube and electronics 1 female 9 pin or 15 pin subminiature D D sub connector 1 HPS Series 907 Analog Convection Transducer ACT Vacuum Sensor User s Manual CERA This manual covers both the single set point and dual set point models When information differs for the two models the dual set poin
3. Rating Relay Response Power Requirement Output Voltage Installation Orientation Internal Volume Materials Exposed to Vacuum Display Electronic Casing 1 0 x 10 to 1 0 x 10 Torr 1 3x 10 to 1 3 x 10 mbar 1 3 x 107 to 1 3 x 10 5 Pa 5 0 x 10 to 1 0 x 10 Torr 6 5 x 10 to 1 3 x 10 mbar 6 5 x 10 to 1 3 x 10 Pa Air nitrogen 0 to 40 C 32 to 104 F 200 C 392 F or 100 C 212 F CE marked model without electronics 80 maximum for temperatures less than 31 C decreasing linearly to 50 maximum at 40 C 2000 m maximum Pollution Degree 2 1 or 2 nonvolatile independent relay set points atmospheric adjustment zero adjustment SPDT 1 A 24VAC DC resistive 150 msec maximum 12 to 30 VDC 0 2 A 0 38 to 5 66 VDC 1 maximum output impedance Horizontal only 2 0 in 33 0 cm maximum 304 stainless steel platinum glass nickel LED indicators for set points and power ABS Plastic with conductive coating for CE marked model 4 Analog Convection Transducer ACT Vacuum Sensor Casing Dimensions WxDxH Typical Weight with KF Flange Vacuum Connection CE Certification 410 x 134 x 234 114 mm x 44 mm x 71 mm 0 7 Ib 0 3 kg KF 16 KF 25 1 8 NPT M with Ye compression seal option 8 VCR F 12 1 3 CF non rotatable 234 CF non rotatable 15 0 mm x 30 0 mm tubing 18 0 mm x 30 0 mm tubing EMC Directive General Product Safety Directive Design and
4. the equation or an incorrect pressure reading will result Nitrogen Argon Helium Domain 0 38 V 4 85 Domain 0 38 V 4 03 Domain 0 38 V 7 40 3 29 3 558 24 442 b 24 98 b 17 26 b 148 0 98 0 982 0 9755 V 0 3752 V 0 375 0 3743 Nitrogen Argon Domain 4 85 lt V lt 5 18 Domain 4 03 lt V lt 4 3 d 4 929 d 4 085 f 1 6x 10 f 1 6x 10 g 225 g 169 12 Nitrogen Argon Domain is V gt 5 18 Domain is gt 4 3 h 22 0253 h 21 746 k 0 52703 k 20 4322 Analog Convection Transducer ACT Vacuum Sensor 19 Maintaining the Series 907 ACT Troubleshooting and Service A Ground yourself before handling the circuit board or any ofits components Do not place the circuit board or components on an insulating surface The circuit board of the ACT has paris which could be damaged by electrostatic discharge The Series 907 ACT is designed to be maintenance free under normal operation If a problem should occur the following chart lists symptoms possible causes and their remedies With this guide you should be able to diagnose some problems and correct them Those which fall outside the scope of this chart are generally not serviceable by the user and the ACT should be returned to HPS for repair Troubleshooting Chart Symptom Possible Cause Remedy Pressure readings are Contaminated sensor too low or too high 1 Test and replace if necessary Refer to page 21 Atm and Vac
5. the wire could ignite the gas mixture When using with gases other than air or nitrogen avoid overpressure to prevent any possibility of explosion Since the ACT is calibrated for air nitrogen the measured pressure of another gas will differ from its true pressure Calibrations diverge widely at higher pressures Since the different gases are not linearly related a gas correction factor could lead to hazardous overpressure Capacitance manometers and mechanical dial gauges are best suited for higher pressures Refer to page 17 for use with other gases In a system which is filled with a pressurized source install a safety relief valve or burst disc to safely limit pressure A Allow only qualified technicians to service the Series 907 ACT Users should not remove covers casings or plug in components Injury may result Any part replacement or internal adjustments must be performed by a qualified technician only The Series 907 ACT must be used as instructed by MKS Instruments Inc HPS Products Inc to ensure safe operation Use or modification of the equipment in a manner not consistent with specifications may render the product s inherent protection useless Analog Convection Transducer ACT Vacuum Sensor 3 opecifications Measuring Range Useful Set Point Range Calibration Gas Operating Temperature Range Maximum Bakeout Temperature Relative Humidity Altitude Insulation Coordination Controls Relay Contact
6. 12 Analog Convection Transducer ACT Vacuum Sensor Operating the Series 907 ACT Reading Pressure To measure gas pressure with the ACT refer to either the table below showing the voltage output as a function of pressure for nitrogen argon and helium the graph on the next page giving the same information or the equations on page 19 Since Pirani systems are gas dependent and the Series 907 ACT is calibrated for air nitrogen it indicates nitrogen equivalent pressure for argon helium or any other gas The table and graph do not give true pressure of gases other than nitrogen Refer to page 17 Using the Series 907 ACT with Other Gases to determine true pressure Pascal Voltage Pascal Voltage Nitrogen Helium Argon Nitrogen Helium Argo 1 0E 03 1 3E 01 0 387 0 384 0 382 6 0E 00 8 0 02 4 009 5 319 3 293 2 0E 03 2 7E 01 0 397 0 393 0 389 7 0E 00 9 3E 02 4 114 5 647 3 384 4 0E 03 5 3E 01 0 418 0 410 0 403 8 0E 00 1 1E 03 4 198 5 938 3 457 6 0E 03 8 0E 01 0 437 0 426 0 415 9 0E 00 1 2E 03 4 268 6 199 3 517 8 0E 03 1 1 00 0 456 0 441 0 428 1 0E 01 1 3E 03 4 327 6 435 3 568 1 0E 02 1 3E 00 0 473 0 456 0 440 2 0E 01 2 7E 03 4 627 3 830 2 0E 02 2 7E 00 0 551 0 523 0 494 2 5E 01 3 3E 03 4 695 3 891 3 0E 02 4 0E 00 0 619 0 581 0 542 3 0E 01 4 0 03 4 743 3 933 4 0E 02 5 3 00 0 679 0 634 0 586 4 0E 01 5 3 03 4 805 3 988 5 0E 02 6 7E 00 0 733 0 682 0 627 5 0E 01 6 7E 03 4 843 4 021 6 0E 02 8 0E 00 0 783 0 727 0 664 6 0E 01 8 0 03 4 8
7. 7 7 About the HPS Products Series 907 8 Installing the Series 907 9 m EH 9 Or a kra ga 9 CONTAMINATION nennen nnn 9 9 Electrical 10 Input Output 0 10 Relay Inductive Loads and Arc Suppression 12 Operating the Series 907 13 Reading Pressure 2044041 enne 13 Calibrating for Zero and 2 14 Adjusting the Set Point 2 nennen 15 Venting to Atmosphere 444 4 eene nene 15 Leak Detection eee ge p El bee AR eee 16 Using the Series 907 ACT with Other Gases 17 Nitrogen Equivalent Pressure pp 17 Calibrating for Other Gases 2 18 Using the Series 907 ACT with Computers 19 Analog to Digital A D Converter 19 Equations for Converting Voltage to Pressure 19 Maintaining the Series 907 ACT 20 Troubleshooting and 20 Cleaning the ACT Case and Sensor Tube 21 Analog Convection Transducer
8. 72 4 044 7 0E 02 9 3E 00 0 830 0 769 0 700 7 0E 01 9 3E 03 4 891 4 058 8 0E 02 1 1E 01 0 874 0 808 0 733 7 5E 01 1 0 04 4 898 4 064 9 0E 02 1 2E 01 0 915 0 846 0 765 8 0E 01 1 1E 04 4 904 4 069 1 0E 01 1 3E 01 0 955 0 882 0 795 9 0E 01 1 2E 04 4 914 4 077 2 0E 01 2 7E 01 1 271 1 179 1 042 1 0E 02 1 3E 04 4 923 4 084 3 0E 01 4 0 01 1 508 1 410 1 229 2 0E 02 2 7E 04 4 987 4 145 4 0E 01 5 3 01 1 701 1 605 1 382 2 5E 02 3 3E 04 5 025 4 182 5 0E 01 6 7E 01 1 864 1 777 1 513 3 0E 02 4 0E 04 5 071 4 227 6 0E 01 8 0 01 2 007 1 931 1 628 4 0E 02 5 3 04 5 183 4 336 7 0E 01 9 3E 01 2 133 2 073 1 730 5 0E 02 6 7E 04 5 301 4 432 8 0E 01 1 1E 02 2 246 2 204 1 822 6 0E 02 8 0E 04 5 397 4 511 9 0E 01 1 2E 02 2 348 2 326 1 905 7 0E 02 9 3E 04 5 478 4 577 1 0E 00 1 3E 02 2 442 2 441 1 982 7 5E 02 1 0E 05 5 514 4 607 2 0E 00 2 7E 02 3 083 3 341 2 510 8 0E 02 1 1 05 5 548 4 635 3 0E 00 4 0E 02 3 452 3 992 2 820 9 0E 02 1 2E 05 5 610 4 686 4 0E 00 5 3 02 3 698 4 512 3 028 1 0E 03 1 3E 05 5 666 4 732 5 0E 00 6 7E 02 3 875 4 946 3 179 Analog Convection Transducer ACT Vacuum Sensor 13 mpr LL n Lt tt EENIA A H 0 Hy VA 77 Output Voltage VDC BN TV 7 A 011111 LO hi 103 102 107 1 10 10 2 10 3 Pressure Tor CEP When using the graph
9. a gas that has a molecular weight different than that of the system gas Helium or argon gas is suitable for probing a system pumping air or nitrogen 1 Pump your vacuum system to a base pressure 2 Slowly and methodically probe with a small amount of gas Flooding the leak or moving quickly past the leak can confuse the search since time lags may be significant 3 Note the pressure reading The pressure will either rise or fall depending upon the thermal conductivity of the probe gas relative to the system gas The largest change in value indicates the probe gas is nearest the leak location 4 Repeat the test to confirm 16 Analog Convection Transducer ACT Vacuum Sensor Using the Series 907 ACT with Other Gases Before using the Series 907 ACT to measure pressure of gases other than air or nitrogen you should read and understand this section To answer further questions contact Applications Engineering at HPS at 1 303 449 9861 or 1 800 345 1967 The ACT is designed to give voltage output for air or nitrogen according to the table on page 13 or the graph on page 14 If the ACT is used to read pressure of gases with poorer heat transfer properties than nitrogen the true pressure may be much higher than shown This reading error could lead to a dangerous overpressure A system which is backfilled from a pressurized gas source should contain a safety device such as a burst disc Nitrogen Equiv
10. alent Pressure The thermal loss from a heated sensor element is a function of the transporting gas see page A 1 Theory of a Thermal Conductivity Sensor Since the ACT is such a sensor the voltage output depends upon the gas measured When used with gases other than nitrogen the ACT reads in nitrogen equivalent pressure For example when the ACT is set up to read pressure for nitrogen but is used with the gases helium or argon the data for helium and argon in the graph on page 14 are used to convert nitrogen equivalent pressure to true pressure 1 Locate the indicated pressure on the pressure axis of the graph Locate the point at which a vertical line from this point intercepts the curve for nitrogen 2 Locate the point at which a horizontal line from the point on the nitrogen curve intercepts the helium or argon curve 3 Locate the point at which a vertical line from the helium or argon curve intercepts the pressure axis This point corresponds to the true pressure for helium or argon measuring capabilities of the ACT For example a true pressure of 20 0 Torr of helium is equivalent to a nitrogen equivalent pressure of several thousand Torr The ACT is not capable of measuring this pressure of helium The nitrogen equivalent pressures of some gases can exceed the Analog Convection Transducer ACT Vacuum Sensor 17 Calibrating for Other Gases To determine the voltage pressure relationship for a gas which is not s
11. ay be required to present proof of original purchase Analog Convection Transducer ACT Vacuum Sensor 25 Appendix A How the Series 907 ACT Works The Series 907 ACT is a heat loss manometer which infers the pressure of a gas by measuring thermal loss from a heated wire Theory of a Thermal Conductivity Sensor A hot wire suspended from supports in a partial vacuum loses thermal energy in three ways gas transport which is pressure dependent loss to the supports and radiation to surrounding surfaces Convection enhanced Pirani and thermocouple sensors use pressure dependent gas transport from a hot wire to measure pressure Because end loss and radiation are constant for a wire at constant temperature they provide a masking signal which largely determines the low pressure limit of the sensor Optimizing parameters of the wire length and diameter thermal emissivity thermal conductivity and wire temperature can control but not eliminate these terms convection enhanced Pirani sensor may be operated at constant current voltage or resistance equivalent to temperature at the sensor wire The Series 907 ACT is operated at constant temperature to increase high pressure sensitivity At constant current or voltage the wire temperature at high pressure is much less than the temperature value at vacuum reducing the high pressure sensitivity Measurement Limits At 10 Torr the sum of end and radiation losses
12. e sensor tube Trying to clean it Replace the sensor tube if it becomes contaminated see Replacing the ACT Sensor Tube p 22 Testing the ACT Sensor Tube 1 Disconnect the D sub connector from the ACT 2 Remove the two screws from the ACT s electronics subassembly Gently pull the sensor tube away from it 3 With an ohmmeter check the resistance as specified in the first column of the chart below for the pins shown to the left of the chart The resistance readings of a normal sensor measured at atmospheric pressure and room temperature 20 C are listed in the middle column If the condition in the right column exists the ACT s sensor should be replaced as described in the following section Check Resistance If Reading Is F1 to F2 20 Q Higher filament is broken or burned out F1 to sensor port 20 MO Lower sensor is damaged or F2 to sensor port contaminated Sensor PC TC1 to TC2 270 Higher temperature compensation board winding is broken TC1 to sensor port Lower temperature compensation TC2 to sensor port winding is shorted to sensor body Analog Convection Transducer ACT Vacuum Sensor 21 Replacing the ACT Sensor Tube Disassembling the ACT Electronics Subassembly 1 If you have just tested the sensor tube as detailed in the previous section continue on from step 4 Otherwise follow the next step Screwlock 2 Disconnect the D sub connector from the ACT 3 Remove the two screws shown to
13. here vibration is minimal to give the most representative values Orientation The ACT can only be installed with the body set horizontally to work effectively in the convection region Convection is an effective heat transfer process at pressures above 200 Torr of nitrogen Install it in the direction indicated on the body of the sensor The ACT is factory calibrated with the vacuum port facing down At atmosphere the calibration may shift as much as 10 if the port is oriented otherwise If it is necessary to do so you should make a calibration adjustment see Calibrating for Zero and Atmosphere p 14 Contamination Locate and orient the ACT where contamination is least likely to occur For example if it is installed directly above a roughing pump oil vapor could contaminate the tube s filament wire and cause the calibration to shift Install the ACT with the vacuum port facing down whenever possible to prevent particulates falling or liquids flowing into the tube Using a screen or porous filter at the port is helpful Try an HPS seal and centering ring assembly with a screen see Accessories p 23 Vacuum Connection Standard ACT vacuum interfaces are shown on the next page To fit the KF 16 port to a KF 10 port or a KF 25 port to a KF 20 port use an HPS adaptive centering ring see Accessories p 23 To fit the ACT with the 1 8 do not use the case for tightening The vacuum tubing has 9 16 hex flats for tigh
14. hown in the graph or table you need to calibrate the ACT with it This requires a gas independent sensor such as a capacitance manometer to act as the calibration standard A curve like those on page 14 can then be generated CEP The Series 907 ACT is not intended to be calibrated for direct pressure readings of gases other than air or nitrogen The calibration is intended only to match the air nitrogen curve of the sensor 18 Analog Convection Transducer ACT Vacuum Sensor a 1 c P b y2 y2 1 P V d V dF 4fg uU RENE Using the Series 907 ACT with Computers The ACT is designed to operate in highly automated systems especially those that are controlled by digital computers It is compatible with many different computers interfaces and software programs This section illustrates only a few possibilities of the ACT s use with computers Analog to Digital A D Converter In order to take full advantage of the ACT s capabilities an A D converter should be used with an input voltage span of 0 to 6 V The A D conversion rate should be at least 6 Hz 150 msec conversion time A resolution of 12 bits is needed corresponding to 1 46 mV per bit The A D converter should have a differential input to ensure accurate measurements Equations for Converting Voltage to Pressure The following equations convert the ACT voltage reading Vin volts to a pressure reading P in Torr The voltage must be within the domain of
15. is about 10 times the energy lost to the gas through conduction This determines the practical lower limit for thermal conductivity sensors At pressures between 20 to 200 Torr the gas acts as an insulation layer around the filament which reduces the sensitivity of the sensor At pressures above 200 Torr convection currents contribute to energy transport from the filament increasing sensitivity at these pressures In the case of the Series 907 ACT the upper measurement limit is determined by the amount of energy the electronics is able to provide to the filament A 1 Analog Convection Transducer ACT Vacuum Sensor Notes Analog Convection Transducer ACT Vacuum Sensor A 2 28 Analog Convection Transducer ACT Vacuum Sensor
16. is second adjustment of the atmosphere potentiometer will not cause more than a few millivolts of error in the reading at vacuum Adjusting the Set Point Attach a digital voltmeter to the Common tip jack and either the Set point 1 or Set point 2 tip jack on the ACT Adjust the corresponding potentiometer with a small screwdriver until the voltage reading coincides with the desired set point pressure shown either in the table on page 13 or on the graph on page 14 When an LED is on the measured pressure is below the set point value the normally open relay contact is closed and the normally closed contact is open When an LED is off the measured pressure is above the set point value the normally open relay contact is open and the normally closed contact is closed If a power or sensor failure occurs the LED will turn off Venting to Atmosphere The ACT senses pressure by measuring heat loss from a heated fine wire Sudden venting at its port can greatly stress the ACT physically To avoid damage to the ACT vent the vacuum system to atmosphere before removing it Analog Convection Transducer ACT Vacuum Sensor Leak Detection Its inherent sensitivity to gas type makes the Series 907 ACT useful for detecting leaks at rates greater than 10 std cc sec of helium in foreline and roughing systems It is a useful complement to a mass spectrometer leak detector which locates smaller leaks Probe the suspected leak areas with
17. or specifications subject to change without notice Analog Convection Transducer ACT Vacuum Sensor 5 Feature and Control Locations 890 00000000000 Z CAUTION GAUGE CALIBRATED FOR ARE OR NITROGEN MOUNTED HORIZONTALLY WITH LINE LINE gt DO NOT USE WITH EXPLOSIVE GASES REFER TO INSTRUCTION MANUAL SERIES 907 Side View Front View Tip Jack for Common LED Set Point 2 Indicator LED Set Point 1 Indicator Tip Jack for Set Point 2 Set Point 2 Adjustment Potentiometer Set Point 1 Adjustment Potentiometer Zero Adjustment Potentiometer Tip Jack for Output Tip Jack for Set Point 1 LED Power On Off Indicator Atmospheric Adjustment Potentiometer Male 9 pin 15 pin D sub Connector Screws Access to Sensor Sensor Vacuum Port Analog Convection Transducer ACT Vacuum Sensor Typical Applications for the Series 907 ACT Measuring fore line and roughing pressures generated by mechanical vacuum pumps Controlling valves and pumps to automate system pump down using the relay set point s Sensing abnormal pressure and taking appropriate security measures using the relay set point s Controlling system pressure using the analog output as input to an automatic pressure controller Starting or stopping system processes using the relay set point s Measuring pressures of backfilled gases in the range of 10 to 10 Torr Activating high
18. ot function for a year If such items fail to give reasonable service for a reasonable period of time within the warranty period of the product they will at the option of HPS be repaired or replaced IV Defects or damages caused by modifications and repairs effected by the original PURCHASER or third parties not authorized in the manual Condition of Returned Products HPS will not accept for repair replacement or credit any product which is asserted to be defective by the PURCHASER or any product for which paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that is dangerous to the health of humans or is environmentally unsafe it is the responsibility of the PURCHASER to have the product cleaned by an independent agency skilled and approved in the handling and cleaning of contaminated materials before the product will be accepted by HPS for repair and or replacement In the course of implementing this policy HPS Customer Service Personnel may inquire of the PURCHASER whether the product has been contaminated with or exposed to potentially corrosive reactive harmful or radioactive materials gases or chemicals when the PURCHASER requests a return authorization Notwithstanding such inquiries it is the responsibility of the PURCHASER to ensure that no products a
19. r supply input may range from 12 to 30 VDC The side of the power supply is connected to pin 3 and the side is connected to pin 4 of the D sub connector The circuitry will be damaged if the polarity of the power supply input is reversed 015 mm x 30 mm tubing 018 mm x 30 mm tubing 10 Analog Convection Transducer ACT Vacuum Sensor 9 Pin Description Set point relay normally open contact Set point relay normally closed contact Power supply input 4 Power supply input Analog output voltage Set point relay common Set point relay disable Analog output voltage Set point relay output voltage 3 6 9 9 15 Pin Description Set point relay 1 output voltage Set point relay 2 output voltage Power supply input 4 Power supply input Analog output voltage Analog output voltage Not used Not used Not used Set point relay 1 normally open contact Set point relay 2 normally open contact Set point relay 2 common Set point relay 2 normally closed contact Set point relay 1 normally closed contact Male 15 pin Set point relay 1 common HD D sub connector 1 2 3 4 5 6 7 8 9 The analog output voltages are pins 5 5 and 8 6 Connect them to a differential input voltmeter or an analog to digital A D converter with a differential input in a sys
20. re returned to HPS which have been contaminated in the aforementioned manner Other Rights and Remedies l These remedies are exclusive HPS SHALL NOT BE LIABLE FOR CONSEQUENTIAL DAMAGES FOR ANTICIPATED OR LOST PROFITS INCIDENTAL DAMAGES OR LOSS OF TIME OR OTHER LOSSES INCURRED BY THE PURCHASER OR BY ANY THIRD PARTY IN CONNECTION WITH THE PRODUCT COVERED BY THIS WARRANTY OR OTHERWISE Some states do not allow exclusion or limitation of incidental or consequential damage or do not allow the limitation on how long an implied warranty lasts If such laws apply the limitations or exclusions expressed herein may not apply to PURCHASER Il Unless otherwise explicitly agreed in writing it is understood that these are the only written warranties given by HPS Any statements made by any persons including representatives of HPS which are inconsistent or in conflict with the terms of the warranty shall not be binding on HPS unless reduced to writing and approved by an authorized officer of HPS IIl This warranty gives PURCHASER specific legal rights and PURCHASER may also have other rights which vary from state to state IV For HPS products sold outside of the U S contact your MKS representative for warranty information and service Warranty Performance To obtain warranty satisfaction contact the following MKS Instruments Inc HPS9 Products Inc 5330 Sterling Drive Boulder CO 80301 USA at phone number 303 449 9861 You m
21. remember that the pressure scale is logarithmic and the voltage scale is linear Equal increments of distance along the pressure scale do not correspond to equal pressure changes Calibrating for Zero and Atmosphere Though factory calibrated the ACT s calibration may change due to reasons such as filament contamination or aging of the electronic components If necessary calibrate the ACT The two adjustments atmosphere and zero can be made independently but because of some interaction between them we recommend making the adjustments in the order below CE For best results let the ACT remain at the calibration pressure for at least 15 minutes before adjusting the potentiometers 14 Analog Convection Transducer ACT Vacuum Sensor Step 2 SERIES 907 Calibrating for atmosphere and vacuum 1 Connect a voltmeter to the Step 1 Step output and common tip jacks or analog outputs and on the D sub connector as shown to the left 2 With the ACT at a known pressure above 600 Torr adjustthe atmosphere potentiometer for a voltmeter reading CAUTION corresponding to the value GAUGE CALIBRATED FOR ARE OR NITROGEN MOUNTED HORIZONTALLY WITH LINE in the table on page 13 DO NOT USE WITH EXPLOSIVE GASES REFER TO INSTRUCTION MANUAL 3 With the ACT at any pressure below 10 Torr adjust the vacuum potentiometer fora voltmeter reading of 0 375 V 4 Repeat step 2 Th
22. rom the subassembly 2 Bake the standard sensor tube to a maximum of 200 C and the CE marked model to a maximum of 100 C Calibrating your new sensor tube 22 Analog Convection Transducer ACT Vacuum Sensor Accessories Part ACT 1 Set Point ACT 2 Set Points KF 16 109070019 KF 25 109070028 1 8 NPT M 109070020 w V Compression Seal 8 VCR F v2 109070021 11 3 CF 109070022 234 CF 109070023 015 mm x 30 mm Tubing 109070025 18 mm x 30 mm Tubing 109070026 ACT CE Marked 1 Set Point ACT CE Marked 2 Set Points KF 16 109070019CE KF 25 109070028CE 1 8 NPT M 109070020CE w V Compression Seal 8 VCR9 F v2 109070021CE 11 3 CF 109070022CE 234 CF 109070023CE 15 mm x 30 mm Tubing 109070025CE 18 mm x 30 mm Tubing 109070026CE Analog Convection Transducer ACT Vacuum Sensor 23 Seal amp Centering Ring Assemblies SensaVac Series 907 Analog Convection 109070001 Transducer ACT Vacuum SensorUser s Manual Please call HPS Customer Service Department at 1 303 449 9861 or 1 800 345 1967 to order any of these parts or to receive catalogs for other HPS Products 24 Analog Convection Transducer ACT Vacuum Sensor Product Warranty Extent of the Warranty MKS Instruments Inc HPS Products Inc warrants the HPS Products Series 907 Analog Convection Transducer ACT Vacuum Sensor and its accessories to be free from defects in materials and workmanship for one 1 year f
23. rom the date of shipment by HPS M or authorized representative to the original purchaser PURCHASER Any product or parts of the product repaired or replaced by HPS under this warranty are warranted only for the remaining unexpired part of its one 1 year original warranty period After expiration of the applicable warranty period the PURCHASER shall be charged HPS current prices for parts and labor plus any transportation for any repairs or replacement ALL EXPRESS AND IMPLIED WARRANTIES INCLUDING THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE LIMITED TO THE WARRANTY PERIOD NO WARRANTIES EXPRESS OR IMPLIED WILL APPLY AFTER THIS PERIOD Warranty Service The obligations of HPS under this warranty shall be at its option 1 to repair replace or adjust the product so that it meets applicable product specifications published by HPS or 2 to refund the purchase price hat Is Not Covered The product is subject to above terms only if located in the country of the seller from whom the product was purchased The above warranties do not apply to Damages or malfunctions due to failure to provide reasonable and necessary maintenance in accordance with HPS operating instructions Il Damages or malfunctions due to chemical or electrolytic influences or use of the product in working environments outside the specification Ill Fuses and all expendable items which by their nature or limited lifetime may n
24. t model information will follow the single set point information in brackets r y If any items are missing from the package call HPSe Customer Serviceat 1 303 449 9861 or 1 800 345 1967 Inspect the ACT for visible evidence of damage If it has been damaged in shipping notify the carrier immediately Keep all shipping materials and packaging for claim verification Do not return the product to HPS Analog Convection Transducer ACT Vacuum Sensor 1 Symbols Used in this Manual The first two symbols below that may be located on your Series 907 ACT identify critical safety concerns They are used throughout this manual to further define the safety concerns associated with the product The last two symbols identify other information in this manual that is essential to highlight or useful in achieving optimal performance from the ACT CAUTION Risk of electrical shock CAUTION Refer to manual Failure to heed message could result in personal injury or serious damage to the equipment or both Failure to heed message could result in damage to the equipment 46 be Information calling attention to important procedures practices or conditions 2 Analog Convection Transducer ACT Vacuum Sensor Safety Precautions N Do not use the Series 907 ACT with explosive gas mixtures or gases that are combustible in air If the control circuit fails or an exothermic catalytic reaction occurs at the sensor platinum wire
25. tem controller Do not connect the negative side of the analog output 8 6 to the power supply input pin 4 4 or to any other ground Half of the power supply current would flow through this wire The voltage drop from this current will produce very large errors in the measured output voltage The longer the cable the worse the error will be Access the set point relay voltage on pin 9 1 and 2 of the connector Measure this voltage during a start up check to be sure that it is adjusted correctly Connect 7 to the power supply input pin 4 to disable the set point relay on the single set point model STOP Do not connect the set point relay terminals to the analog output Analog Convection Transducer ACT Vacuum Sensor 11 Relay Inductive Loads and Arc Suppression If the set point relay is used to switch inductive loads e g solenoids relays transformers etc the arcing of the relay contacts might interfere with controller operation or reduce relay contact life Therefore an arc suppression network shown schematically below is recommended The values of the capacitance C and the resistance R be calculated by the equations C I 1 x 107 and R E F where C is in farads n sak 1989 current amperes RU Eis DC or AC source voltage in volts 1 50 5 Load Note that Relay arc suppression network Ran 0 5 Q and 1 0 x 10
26. tening Wrap a layer of Teflon tape on the threads of the tubing in the direction of installation to ensure a leak free seal Instead of the NPT fitting you may opt to use the 12 O ring compression seal against the vacuum tubing above the thread but the O ring seal cannot be used for positive pressure applications Analog Convection Transducer ACT Vacuum Sensor 9 E ues 1 14 141 28 9 mm 35 8 mm N Y Jy KF 16 KF 25 11 3 CF 234 CF Ensure a solid electrical connection between the ACT and the grounded vacuum system to shield the tube element from external electromagnetic sources In applications which the system will be exposed to large voltage fluctuations install a centering ring with a screen and then ground the screen and tubing 1 09 27 7 mm Electrical Connection Use a cable with a mating 9 pin 15 pin D sub connector with strain reliefs to ensure proper electrical connection and to reduce stress on the connectors Input Output Wiring The charts and accompanying figures at the top of the next page identify the pins and their functions in the ACT connectors The 9 pin D sub connector is used with the single set point model and the 15 pin D sub connector is used 1 9 NPT M with the dual set point model Make a cable using this information w 12 compression seal Use only a cable that is shielded with the drain wire connected to the metal hoods at both ends of the cable The powe
27. the right with a 1 Phillips head screwdriver Phillips head screws 4 Using 3 16 inch nut driver remove only the right screw lock from the D sub connector Carefully remove the front cover of the ACT case Calibrating the New Sensor Tube 1 Plug the new sensor tube into the electronics and replace the one screw through the half cover remaining being careful not to overtighten the screw which could crack the case 2 Install the partially assembled unit on a vacuum system connect the D sub connector and raise the system pressure to 760 Torr with air or nitrogen Make sure that the ACT is mounted horizontally preferably with the port down Disassembly of the ACT 3 Operate the unit for at least 20 minutes 4 Connect a voltmeter to TP1 and TP5 shown below Do not use the voltage at the output tip jack or the analog output on the D sub connector for this adjustment 5 Adjust potentiometer R38 to a voltmeter reading of 5 487 V TP1 6 Calibrate the sensor for vacuum and atmosphere following the steps on page 14 7 Disconnect the D sub connector Assembling the ACT Electronics Subassembly TP5 1 Carefully replace the front cover of the case 2 Secure the remaining sensor tube screw and the R38 screw lock Preparing the ACT for Bake out 1 Remove the two screws holding the sensor tube to the ACT electronics subassembly with a 1 Phillips head screwdriver Separate the sensor tube f
28. uum adjustments may 2 Refer to page 14 be incorrectly calibrated Connect D sub Turn power on Return to HPS for repair D sub is disconnected Power supply turned off Defective PC board No analog output voltage Analog output voltage higher than 7 V Analog output shorted to ground Defective PC Board Check cable connections at D sub Return to HPS for repair Set point relay will not operate 20 Analog Convection Transducer ACT Vacuum Sensor Set point voltage incorrectly set Broken or shorted tube filament Pin 7 of D sub connected to ground at power supply Single set point model only Defective PC Board Check set point 2 Test and replace if necessary Refer to page 21 Check any external switches which may be controlling this line Return to HPS for repair Cleaning the ACT Case and Sensor Tube The finish on the ACT case is designed to resist many laboratory solvents but it should be cleaned with water or alcohol Roughing pump oils and other fluids condensing or decomposing on the heated filament can contaminate the ACT tubing This changes the emissivity of the filament which in turn can cause the calibration to change especially atlow pressure may either deform or break the filament and the deformed filament would then cause additional error from a shift in the sensor soutput STOP It is not advisable to clean th
29. vacuum gauges in their operating range Analog Convection Transducer ACT Vacuum Sensor 7 About the HPS Products Series 907 ACT The HPS Products Series 907 Analog Convection Transducer ACT is a compact modular convection enhanced Pirani vacuum sensor pressure switch with an integrated electronic control circuit The ACT s simple modular design high reliability and low cost make it especially attractive to OEM equipment manufacturers It has an integrated sensor tube available with one of various standard vacuum interfaces The ACT is designed for applications which require pressure control in the range of 10 to 10 Torr Its rapid response and wide measurement range provide the equipmentdesigner with maximum flexibility Because it canoperate autonomously or as part of a control System it is adaptable to many roles including that of a monitor or an alarm For process control the ACT is available with one or two relay set points each independently adjustable with its own potentiometer LEDs indicate the status of the set points The ACT can be located out of sight pressure and set points are then read with a standard digital voltmeter or analog to digital converter and computer Analog Convection Transducer ACT Vacuum Sensor Installing the Series 907 ACT Location Locate the ACT where it can measure chamber or manifold pressure Install it away from pumps and gas sources and w
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