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959 Hot Cathode Controller Operation and

1. A18 13 7 6 Emission Current EC A19 13 8 Status messages 20 13 8 1 Pressure Reading PRX sak aranana aaa aa aa da daka a A20 13 8 2 Filament Status FS asasaran na a aa a ag Ba aaa A21 13 8 3 Degas Status DS ile cd A22 13 8 4 Set Point Status SSX ocoonnonccnncncnonncnnnnonnononnnnconanacnnnnononnnos A23 13 8 5 Control Set Point Status CSS A24 13 8 6 Units selection Usa aana anaa aaa aaa aa ennn aa aa aa ag aan 25 13 8 7 Manufacturer MF sawak saga a naka Pa 26 13 8 8 Model Designation MD 27 13 8 9 Device regente teen 28 13 8 10 Serial Number SNX nnen ennen sneven vennen A29 13 8 11 Firmware Version FVx esee A30 13 8 12 Hardware Version A31 14 Appendix B Serial Communication Error Codes B1 AAA eet etd et nen etie a B1 15 Appendix C Gauge Theory rasstandaard eneen C1 15 1 Theory of the Thermal Conductivity Gauge C1 15 2 Theory of the Hot Cathode lonization Gauge C3 1 Package Contents Before Unpacking your Series 959 Hot Cathode Controller check all
2. 11 4 3 SIDS MW rr ea d 13 4 4 1 Standard Pirani nanne 13 4 4 2 Convection Enhanced 14 4 4 3 Low Power Nude 14 4 44 Mini B en erae ete td estt does 15 5 Typical Applications for the 959 Hot Cathode Controller 16 6 About the 959 Hot Cathode Controller 17 7 Installing the 959 Hot Cathode Controller 19 7 1 Controller Installation 19 7 1 1 Controller Mounting garan sasana Dan aa 19 7 2 Pirani Sensor Installation sasae eaaa eaaa nane nana anana aane 19 7 2 1 General Pirani Information unne 19 7 2 2 Locating a Pirani Sensor s asasaran siwa KAN sa ga na aaa 20 7 2 3 Preventing Contamination in a Pirani Sensor 20 7 2 4 Cleaning the Pirani 20 7 2 5 Connecting a Pirani Sensor to a Vacuum Chamber 20 7 3 Series 315 345 Standard Pirani Sensor Installation 21 7 3 1 Orienting the Series 315 345 21 7 3 2 Connecting the Series 315 345 Sensor 21 EMm 7 3 2 1 Connecting the Series 315 Sensor to the 959 Me eevee 21 7 3 2 2 Connecting the Series 345 Sensor to the 959 Controller 22 7 3
3. cese dai 30 7 6 5 Hot Cathode Connector Pin Out 30 7 1 Accessory COMMOCION ien tette dicere ee uta rab 31 TO edis TD 32 8 1 Front Panel Overview sicario 34 8 1 1 Front Panel Switch 34 8 2 Pressure Measurement Modes nnen eneen ennen 36 8 2 1 Normal Pressure 36 8 2 2 Control Pressure 36 8 2 3 Combined Pressure Measurement 36 8 3 Pressure Measurement nnn nnen nennen eneen enne enne nennen nana 37 8 4 Degas Operation est uga nan ianooii aa aab ayasa aaa d wi data ga aaa ak nnne 36 8 5 Set Point Operation sasa adasa aane aaa aaa a deng aaa Ta ain aka 37 8 5 1 Relay Set Point Operation sanagara asarana be aana nana na sag ikan 37 8 5 2 Sensor Module Exceptions and Set Point Operation 38 8 5 3 Set Point Configuration Displays 38 8 5 4 Set Point 1 Value Assignment nnn nennen reen 39 8 5 5 96t Polit Enable iecore dt Ga ENG a 39 8 5 6 Set Point 2 Value 40 8 5 7 Set Point 2 Enable et ehe eet ces 40 8 5 8 Control Set Point Operation sse 41 8 5 9 Control
4. am Mount 4 screwlocks in connector hood assemblies for strain relief Customizing a Series 317 and 345 series Sensor Cable 959 Hot Cathode Controller 29 30 7 6 3 Low Power Nude Tube REO length up lo 50 feel GAUGE CONTROLLER GREEN 5 2 CENTER A2 OUTER GND 7 6 4 Mini BA mE length up to 50 feet m GAUGE CONTROLLER 2 Ar A 4 7 1 3 5 6 GREEN 1 Y AS 7 d A2 CENTER gt A2 OUTER RETAINING SPRING V y W ES 7 959 Hot Cathode Controller 7 6 5 Hot Cathode Connector Pin Out Ool oooeeo0 o HOT CATHODE Mini BA Sensor Detect Not Used Filament 1 959 Hot Cathode Controller 31 7 7 Accessory Connector ACCESSORY 1 8 060000000 0000000 7 8 AC Power IC q Pirani Analog PiraniAnalog Output C S oere E EN Hot Cathode Analog Output Not Used The Series 959 Controller is shipped with a North American standard 120 VAC 50 60 Hz power cord with a female IEC 320 connector If a different power cord is required use only a harmonized detachable cord set with conductors having a cross sectional area equal to or greater than 0 75 mm The power cord should be approved by a qualified agency such as N Semko or SEV Properly ground the Controller and vacuum system 32 959 Hot Cathode Controller The Controller is grounded through the ground conductor of the power cor
5. FP OFF 959 Hot Cathode Controller A 15 13 7 3 Degas Power DG Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Command Query Response A 16 Turns gauge Degas on and off Once initiated the Degas operation will automatically complete and turn itself off Degas can be arbitrarily turned off with this command The query returns the current state of the Degas operation on or off Degas power cannot be turned on if the filament power has not been turned on DG Command and Query Enumerated ASCII text OFF ON Off OFF ON TD DS DG ON DG ACKON 959 Hot Cathode Controller 13 7 4 Combined Pressure Measurement CMB Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Command Query Response Enables or disables the combined sensor pressure measurement operation When enabled a smoothing algorithm is applied to the pressure measurements in the overlap range of the two sensors This mode can only be enabled if the Pirani sensor is installed and operational The query returns the current state of the combined sensor pressure measurement operation on or off CMB Command and Query Enumerated ASCII text OFF ON Off OFF ON PRC CMBION CMB ACKON 959 Hot Cathode Controller A 17 13 7 5 Set Point Enable ENx Description Keyword
6. Range depends upon sensor options selected 959 Hot Cathode Controller 5 Fuse Rating Size Number of Channels Process Control Relay contact Rating Relay response Front Panel Controls Range for Sensor Sensitivity Electronic Casing Dimensions WxDxH Size Weight 3 2 Standard Pirani Pressure Range Set Point Range Control Set Point Range Calibration Gas Installation Orientation Reproducibility Materials Exposed to Vacuum Internal Volume T 1 6 A 5x22mm 2 Two nonvolatile independenily set pressure dependent set point relays 2A 30 VAC or 30 VDC resistive load SPDT lt 1000 msec Momentary push buttons 0 1 to 99 Torr Aluminum anodized 33 4 x 10 x 334 96 mm x 254 mm x 96 mm 1 4 DIN 3 17 lb 1 438 kg LO IO toi Ox 10 ror VEO O 118 IOS 2 0 x 10 to 9 5 x 10 Torr 2 6 x 10 to 1 2 x 10 mbar 2 6 x 10 to 1 2 x 10 Pa LR OT 10 11 00 2 11072 ESIA OOR SO mban 131040 1 5104 Air nitrogen Any 5 of indicated pressure T SS 304 platinum alloy alumina ceramic silver brazing alloy nickel 200 0 5 in 8 0 cm maximum 6 959 Hot Cathode Controller Operating Temperature Range Maximum Bakeout Temperature Diameter Length Typical Weight with KF Flange Vacuum Connection 3 3 Convection Enhanced Pirani Pressure Range Set Point Range Control Set Point Range Calibration Gas Installation O
7. 13 1 Serial Communications Overview The 959 controller implements a software command set to allow ts features to be programmatically controlled The user initiates all communication with the controller The controller only responds to commands or requests for information it never initiates communication with the user s host computer All messages are composed of variable length ASCII characters 13 1 1 Message Format The basic message format from the host to the controller contains a command or request field an optional parameter field and a message terminating field The basic response to the host from the controller contains a response field and a response terminating field All terminating fields are defined to be the 3 character ASCII sequence FF Blank spaces are not allowed between fields The controller is case insensitive allowing upper and lower case characters to be intermixed in messages sent to it without changing the message meaning All responses generated by the controller are in upper case 13 1 2 Message Compatibility The message format used for the 959 controller mimics that used by the MKS 689 transducer Whenever possible identical commands are used to reference identical operations Commands for new or enhanced 959 capabilities are defined using the same 2 or 3 character keyword philosophy established for the 689 The intent of this message compatibility is to allow a user s host computer to send the same de
8. 55 0 687 550 6 91 7 6 94 6 95 6 20 f 6 24 6 30 6 33 6 35 6 37 6 41 E 41 00 6 42 6 44 75 6 45 6 46 6 49 6 50 0 0055 0 0550 550 0 0 0060 0 0600 600 0 5 39 0 600 5 89 6 00 6 85 6000 0 0065 650 0 7 41 0 0070 5 70 5 77 5 80 0 0045 0 0450 0450 583 450 450 0 5 85 500 0 5 87 5 91 5 92 0 0085 0 0090 0 0095 0 800 5 55 8 00 800 0 0850 596 850 646 850 6 56 8500 0900 5 98 9 0__ 6 45 90 0 628 900 0 0 950 95 0 6 99 950 0 EN EN CEN CHEN 959 Hot Cathode Controller 61 0 0080 5 5 5 5 5 5 5 5 5 5 5 5 5 70 74 77 80 83 85 87 91 92 94 95 96 99 6 41 6 97 0 700 16 42 6 92 0750 504 750 6 44 75 0 6 94 750 0 6 45 6 95 6 46 16 49 62 8 17 Hot Cathode Curves Voltage vs Pressure EE LII O LL LL LL LLL E EEUU O 01111 E L Lili Lah hi d PEDE T ool 1 0 10 1 0 09 1 0 08 1 0 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 Pressure Torr 959 Hot Cathode Controller 9 Maintaining The 959 Hot Cathode Controller 9 1 Cleaning the Controller Front Panel The 959 Controller front panel is designed to resist most Laboratory solvents It can be cleaned with water or isopropyl alcohol S Do not use aceton
9. ACKCEP 959 Hot Cathode Controller 13 8 10 Serial Number SNx Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Query Response Returns the serial number of the selected module as a constant ASCII numeric integer The x in the keyword refers to the module in question D for Display module H for HOT CATHODE P for Pirani SND SNH SNP Query only None Controller dependent decimal integer Controller dependent decimal integer MD DTx MF SND ACK0000001 234 959 Hot Cathode Controller A 29 13 8 11 Firmware Version FVx Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Query Response A 30 Returns revision number of a controller module s firmware The x in the keyword refers to the module in question D for Display module H for Hot Cathode P for Pirani FVD FVH FVP Query only None Controller dependent ASCII alpha numeric text Controller dependent ASCII alpha numeric text HVx FVH ACKO0100 959 Hot Cathode Controller SSeS 13 8 12 Hardware Version HVx Description Returns revision number of a controller module s hardware The x in the keyword refers to the module in question D for Display module H for Hot Cathode P for Pirani Keyword HVD HVH HVP Type Query only Parameter N
10. N The outside of the nipple can get hot and may burn skin 7 5 5 2 Connecting a Hot Cathode Sensor to the 959 Controller A sensor cable with a 13 pin D sub connector See Accessories Page 70 is required for operation but is purchased separately from the 959 Controller system When exerting excessive force on the cable use a separate strain relief to prevent damage to the sensor or Controller Cables are available in standard lengths of 10 25 amp 50 feet only Connect the cable to the rear of the Controller at the sensor port labeled Hot Cathode Tighten the cable jackscrews into the mating screw locks to ensure proper electrical connection and to prevent stress on the connectors Remove power from the Controller before connecting or disconnecting the cable from the sensor or Controller Hot Cathode cables have several special requirements including lethal voltages and therefore only cables supplied by HPS Products should be used 26 959 Hot Cathode Controller 7 5 6 Testing the Hot Cathode Sensor This test will only identify a nonfunctioning sensor This will not detect damage from contamination misuse or rough handling that affects calibration of a functioning gauge The most common cause of sensor failure is filament failure To check for this failure test the sensor using an ohmmeter with less than 5 mA of current The resistance readings of a normal Hot Cathode sensor are shown here Of particular importance is th
11. pressure When utilizing a Set Point within the pressure te range from 8 0 x 10 Torr to 1 0 x 10 Torr the Controller should be placed in the non Auto emission current mode for best results 48 959 Hot Cathode Controller 8 8 Leak Test Operation 8 8 1 Entering Leak Test Mode Leak Test mode is entered when the user has pressed the Front Panel function key until it selects Leak Test mode Leak Test mode can only be entered via the front panel Serial communications does not support Leak Test mode When the Leak Test mode selection has been detected a display is depicted that allows the user to select the leak test sensor This is the only configured leak test parameter Pressing the INC and DEC buttons while in Leak Test mode toggles the lower LCD 16 segment display between PIR and Hot Cathode If only the Hot Cathode sensor module is present or operational the leak test sensor defaults to the Hot Cathode sensor and pressing the INC or DEC buttons has no affect After the leak test sensor has been determined pressing the SELECT button initiates the leak test operation The appropriate Hot Cathode or PIR indicator is illuminated to identify the selected leak test sensor The leak test value is displayed on the lower read out The leak test value is the difference between the leak test sensors A D value and the baseline pressure s A D value It is displayed as a digital number A positive difference i e the leak test value is greate
12. to 1 0 x 10 Torr 18 10410 1 85 10 1 IOO US 100 Pa Bayard Alpert Y203 12 Torr 20 5 W max 180 VDC 30 VDC 1 8 VDC O 2A 3 x 1019 Torr Air nitrogen Any 304 SS glass tungsten platinum clad molybdenum yttria coated iridium 0 to 50 C 32 to 122 F 959 Hot Cathode Controller 9 Bakeout Temperature Typical Weight with CF Flange Vacuum connection 60 with cable attached 300 max with CF cable removed 150 max with KF and Viton Seal cable removed 816 Ib 36 kg 1 OD Tube 1 1 3 mini CF 2 3 4 CF NW 25 KF NW 40 KF NW 16 KF 3 4 OD Tube Design and or specifications subject to change without Notice 10 959 Hot Cathode Controller 4 Feature and Control Locations 959 HOT CATHODE oe BB 088 98 88 TORR PASCAL mBAR COMBINED mA FPLOCK FIL 12 ON ON DEGAS ON CONTROL SP SP1 5 2 SET POINTS SET UP LEAK TEST DEC ZERO SELECT FUNCTIO ON OFF FILAMENT DEGAS N 4 1 Front View 3O0O0H1V2 10H 1v 1 73803 SLYM Og ZH 09 09 WA OvC 00 4 2 Rear View 959 Hot Cathode Controller 11 12 6066666660666066 4 3 Side View Liquid Crystal Display LCD Power On Off Push Button Switch Filament Power Push Button Switch Degas Power Push Button switch Function Menu Push Button Switch Item Selection Push Button Switch Decrement Leak Test Zero Push Button Switch Increment Leak Test Beeper Push Button Switch
13. A 11 13 6 8 Front Panel Lock FPL Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Command Query Response A 12 This command enables or disables the Controller s front panel set up switches When the front panel is locked the front panel set up switches are disabled and the user can only enter controller set up parameters remotely via the RS232 serial communications link When the front panel is unlocked the user may enter controller set up parameters locally via the front panel switches or remotely with the RS232 serial link The query version of the command returns the current front panel lock state FPL Command and Query Enumerated ASCII text ON front panel lock is on switches disabled OFF front panel lock is off switches enabled Off N A N A FPLION FPL ACKON 959 Hot Cathode Controller 13 6 9 Factory Default FD Description Places the controller into a known state This command modifies many device operation setup values and should only be used with caution After the Factory Default command has been issued the device has the following configuration set values Front Panel unlocked Filament Power Off Degas Power Off Active Filament 1 Degas Time 3 minutes Hot Cathode Gauge Correction 9 Torr or 12 Torr Pirani Calibration No Correction Set Point Value OFF Control Set Point Value OFF Combined
14. Pirani Sensor Connector Female 9 pin D Accessory Connector Male 15 pin D Hot Cathode Sensor Connector Female 13 pin D AC Power Connector with fuse holder 320 Panel Mounting Fastener Holes Slots for optional rack mounting brackets 959 Hot Cathode Controller 4 4 1 Standard Pirani 315 Standard Pirani Sensor Male Octal Socket 345 Standard Pirani Sensor Sensor Vacuum Port Male 9 Pin D connector 959 Hot Cathode Controller 4 4 2 Convection Enhanced Pirani N BR 317 Convection Enhanced Pirani Vale 9 pin D connector Sensor Vacuum Port 4 4 3 Low Power Nude Tube LPN Hot cathode sensor Filament 1 Filament 2 Grid and Supports lon Collector Sensor Vacuum Port and Flange 959 Hot Cathode Controller 4 4 4 Mini BA Mini BA Sensor Call outs Sensor Vacuum Port o Sensor Cable Connection Male Sensor Socket Pins 959 Hot Cathode Controller 15 5 Typical Applications for the 959 Hot Cathode Controller 4 4 4 4 4 4 4 Measurement of Base Vacuum Control of high vacuum systems and process sequencing using relay setpoints Sensing abnormal pressure and taking appropriate security measures using relay set points Controlling system pressure using analog output as input to an automatic pressure controller Startin
15. Risk of electrical shock Calls attention to important procedures practices or conditions Failure to read message could result in damage to the equipment 28 gt gt 2 959 Hot Cathode Controller 2 2 Safety Precautions The following general safety precautions must be observed during all phases of operation of this instrument Failure to comply with these precautions or with specific warnings else where in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment MKS Instruments Inc assumes no liability for the customer s failure to comply with these requirements N Properly ground the controller This product is grounded through the grounding conductor of the power cord To avoid electrical shock plug the power cord into a properly wired receptacle before connecting it to the product input or output terminals A protective ground connection by way of the grounding conductor in the power cord is essential for safe operation Upon loss of the protective ground connection all accessible conductive parts including knobs and controls that may appear to be insulating can render an electrical shock Do not substitute parts or modify instrument gt Do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to an MKS Calibration and Service center for service and repair to ensure that all safet
16. Set Point Constraints 41 8 5 10 Control Set Point Assignment 42 8 5 11 Control Set Point Enable 42 8 5 12 Protect Set Point Operation 43 8 5 13 Protect Set Point Constraints 43 8 5 14 Protect Set Point Assignment 43 8 6 Set Up Configuration sicrie ananiita 44 8 61 Filament Select datar 44 8 6 2 Combined Pressure Measurement 44 8 6 3 Combined Mode Constraints 45 8 6 4 Hot Cathode Sensitivity sse 45 Aeris cue 46 irit e ed lecce cete vie Le epee vale Senex Ee ud yn 46 8 7 2 Vacuum Calibration sess 46 8 7 3 Atmospheric Calibration sunan aaa eaaa ennen ennen anain 46 8 7 4 Pirani Atmospheric Calibration 47 8 7 5 Pirani Vacuum Calibration aa ienai 47 8 7 6 Degas TME sacan a T 48 8 7 7 Emission Current Assignment nnen nennen rennen ennn 48 8 8 Leak Test Operation eee etaed een tne d 49 8 8 1 Entering Leak Test Mode nnn ennen enen 49 8 8 2 Resetting the Ba
17. V is 1 to 7 5V and the pressure is in Torr No other unit of measure is available on the analog outputs 959 Hot Cathode Controller 59 8 13 Standard Pirani Pressure to Voltage Curve 100 0000 TUNG TU 0 INTI 10 0000 PARA sure 1 0000 0 1000 Voltage vs Pres P ST 0 0100 0 0010 8 8 0 0001 eo N 1 eo 1ndingo Bojeuy Pressure in Torr 2 E o o o gt o and o AL 3 o o o A E M o 6 00 10 0 16 50 350 677 400 6580 450 6 83 500 685 100 0 250 6 20 250 670 300 624 300 674 550 637 550 687 0600 5 89 6 00 639 600 687 750 644 750 6 94 F00 645 800 695 400 630 450 633 5 00 63 0650 591 650 641 650 691 0700 s2 700 642 700 692 0 850 5 96 850 646 850 6 96 0300 598 900 648 900 6 98 950 649 950 639 0250 5 70 0300 574 sz7 o350 5 77 350 627 0400 580 0450 5 83 0500 585 0550 5 87 0 750 594 0800 595 0 950 599 EN N lo LO co t e N N N N st LO t 507 0 140 557 140 6 07 140 657 5 10 0 160 5 50 160 610 160 6 60 518 0 180 563 1 80 6 13 180 6 63 520 524 5 30 15 33 1535 537 5
18. a control sensor to automatically turn on and turn off the Hot Cathode without user intervention The user can assign the pressure value that turns on and off the cold cathode sensor see Control Set Point Operation Both sensors must be located on the same process chamber for this mode to be effective Each sensor has its own pressure displayed on the LCD Refer to control setpoint operation section 8 2 3 Combined Pressure Measurement Evaluated and combined into a single pressure measurement Only the single combined pressure measurement is displayed on the LCD This mode allows the user to have a single smooth output continuously available from UHV through atmosphere At low pressure the hot cathode s pressure is displayed and at high pressure the Pirani s pressure measurement is displayed At pressures within the overlap range of the two sensors 1x10 Torr to 1x10 Torr the two sensor s readings are combined and averaged into a single display on the LCD See Combined Pressure Operation This is an automated mode of operation where the Pirani sensor controls the Hot Cathode sensor The user cannot assign the control set point in this mode because the algorithm used for calculating the combined pressure value requires the Hot Cathode turn on and off at a specific pressure value Both sensors must be located in very close proximity to each other for this mode to be effective 8 3 Pressure Measurement As soon as power to the 959 is turn
19. a lower or higher thermal conductivity or ionization probability than the gas in the user s system however for optimal sensitivity the search gas should be selected to maximize the difference between its thermal conductivity or ionization probability and that of the system gas Always use a search gas in small quantity to aid in pinpointing the leak In general the sensitivity of the leak test is greater for lower system pressures 959 Hot Cathode Controller 51 If the leak test method outlined above fails to indicate the location of a leak consider that unexpected high pressures may be caused by a virtual leak that is outgassing of a system component The Series 959 can be used effectively to locate outgassing parts or virtual leaks as well as true gas leaks using the rate of pressure rise method With the gauge controller in Pressure Measurement or Leak Test mode the system is pumped down to a base pressure Then the pump is valved off The rise of the pressure indication over a time interval is then measured By valving off or removing suspect components from the system and repeating this procedure the leaking component is isolated 52 959 Hot Cathode Controller 8 9 Leak Test Displays The Leak Test mode is entered by pressing the FUNCTION key until the LEAK TEST display appears on the bottom of the LCD While in Leak Test mode the user uses the SELECT push button to sequence through the list of configured leak test attribut
20. a pressure of 10 Torr This determines the practical lower limit for thermal conductivity gauges Measurement of lower pressures is possible however long term stability becomes a serious problem From the energy loss equation above it is clear that the signal from a thermal conductivity gauge is not calculable from first principles and is dependent upon gas type Because the energy transfer is dependent upon the rate of molecular collision with the wire surface and upon the energy transfer by each molecule the gas transport is dependent upon the molecular weight the internal degrees of vibrational freedom of the molecule and the accommodation coefficient of the gas For pressures greater than 107 Torr it is not possible to write an equation for the energy transfer by the gas However since the indications of thermal conductivity gauges are reproducible for a given gas in this range they may be calibrated against absolute standards for pressure measurements applications A Pirani type gauge may be operated at constant current constant voltage or constant resistance equivalent to constant temperature at the sensor wire At constant current or voltage the wire temperature at high pressures is much less the an the value at vacuum reducing the high pressure sensitivity The HPS Series 959 control circuit maintains the sensor wire at a constant temperature extending the useful pressure range ENERGY TRANSFER WATTS 10 10 10 1
21. energized the Normally Closed relay contact is open and the Normally Open contact is closed Two indicators SP1 and SP2 appear on the LCD display when the set points relays are energized 959 Hot Cathode Controller 37 The set point operation can be both enabled and disabled Disabling the set point operation maintains the set point pressure value in nonvolatile memory Set point pressure values as well as their enable disable state are maintained in nonvolatile memory between power cycles Set Points are always disabled after assignment and must be enabled before becoming active Set Point hysteresis is 5 of measured pressure It is not user adjustable 8 5 2 Sensor Module Exceptions and Set Point Operation When the Hot Cathode filament power is removed set point relays assigned to the Hot Cathode sensor module are de energized When filament power is reasserted enabled set point relay signals are driven based on the value of subsequent Hot Cathode pressure readings If the Hot Cathode sensor is disconnected from the controller set point relays assigned to that sensor are de energized If the Hot Cathode pressure reading goes below its measurement range the set point signal state remains at the value determined by the last valid pressure reading If the Pirani sensor is disconnected from the controller set point relays assigned to that sensor are de energized If the Pirani controller detects a broken filament the s
22. exclusive HPS SHALL NOT BE LIABLE FOR CONSEQUENTIAL DAMAGES FOR ANTICIPATED OR LOST PROFITS INCIDENTAL DAMAGES OR LOSS OF TIME OR OTHER LOSSES INCURRED BY THE PURCHASER OR BY ANY THIRD PARTY IN CONNECTION WITH THE PRODUCT COVERED BY THIS WARRANTY OR OTHERWISE Some states do not allow exclusion or limitation of incidental or consequential damage or do not allow the limitation on how long an implied warranty lasts If such laws apply the limitations or exclusions expressed herein may not apply to PURCHASER Il Unless otherwise explicitly agreed in writing it is understood that these are the only written warranties given by HPS Any statement made by any persons including representatives of MKS which are inconsistent or in conflict with the terms of the warranty shall not be binding on MKS unless reduced to writing and approved by an authorized officer of MKS This warranty gives PURCHASER specific legal rights PURCHASER may also have other rights which vary from state to state IV For MKS products sold outside of the U S contact your MKS representative for warranty information and service Warranty Performance To obtain warranty satisfaction contact the following MKS Instruments Inc Vacuum Products Group 5330 sterling Drive Boulder CO 80301 USA at phone number 303 449 9861 You may be required to present proof of original purchase 959 Hot Cathode Controller 70 13 Appendix Serial Communications
23. expressed in scientific notation Min 1x10 Torr Max 1x10 Torr 1 0E 2 Torr numerical value expressed in scientific notation SPx CSP PRO ACK1 0E 2 PRO 2 0E 3 PRO ACK2 0E 3 959 Hot Cathode Controller A 7 13 6 4 Gauge Correction GC Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Command Query Query Response Assigns the sensitivity value for the Hot Cathode controller The 959 controller is calibrated for air nitrogen gas correction factor 1 0 and has a nominal Hot Cathode gauge sensitivity factor of 9 0 Torr The Gauge Correction factor is used to modify the controller sensitivity for gases other than nitrogen The Gauge Correction value is the product of the Hot Cathode gauge sensitivity and the gas correction factor The raw pressure measurement is adjusted by the Gauge Correction factor to determine the appropriate pressure measurement for the gas in use The corrected pressure value is reflected in the controller voltage output the programmed response to the Pressure Measurement command and the Set Point signal operation GC Command and Query Numerical value in floating point format Min 0 1 Max 99 Allowable values 0 1 0 2 0 3 0 9 1 2 3 4 99 9 Torr LPN 12 Torr mini BA Numerical value in floating point format ATM VAC GC 12 GC ACK12 EXAMPLE Argon has gas correction factor of 1 3 If
24. from the Accessory port on the rear panel The combined analog output signal includes a smoothing function for the decade where the Pirani and Hot Cathode read simultaneously 959 Hot Cathode Controller 17 Set Points Two independently adjustable relay set points are available They may be set or disabled from either the front panel or by RS232 The set points are nonvolatile remaining unchanged after powering down or during a power failure Leak Test With the Leak Test mode medium to gross leaks can be found by utilizing the indirect measurement properties of the Hot Cathode and Pirani sensors and a tracer gas other than air The Leak Test mode consists of a digital display and variable rate beeper to locate system leaks The mode operates with either Hot Cathode or Pirani sensors Computer Interface Direct computer communication via RS232 is available on the accessory connector to control front panel functions or read pressure and other information remotely 18 959 Hot Cathode Controller 7 Installing the 959 Hot Cathode Controller 7 1 Controller Installation 7 1 1 Controller Mounting The Series 959 Hot Cathode Controller is designed for either panel mounting or for stand alone use Regardless of the method you choose assure adequate ventilation to the Controller with at least a 1 2 of an inch left open above and below the perforated panels An optional hardware kit is also available for mounting the Controlle
25. of the Controller at the Gauge port Tighten the connector jackscrews into the mating screw locks to ensure proper electrical connection and to prevent stress on the connectors Turn off the Controller before connecting or disconnecting the cable from the Sensor or Controller In applications for which special cables are required i e where the connection must be routed through restrictive barriers or through a conduit customize the cable using the figure shown below For short lengths any cable wired straight through e g pin 1 to pin 1 will suffice For longer lengths a cable with three twisted pairs and an overall shield is recommended Use a D sub connector with jackscrews for strain relief in all applications 22 959 Hot Cathode Controller 7 3 3 Testing the Series 315 345 Sensor This test is for function only Slight damage by contamination or rough handling can affect calibration but the sensor may still indicate pressure The most common cause of sensor failure is a broken filament due to improper handling Test the sensor with an ohmmeter with less than 5 mA of current The resistance readings of a normal Series 315 345 sensor measured at atmospheric pressure and at room temperature 20 are shown here Of particular importance is the filament resistance pins 6 to 7 Series 345 pins 4 to 6 series 315 Series 315 Series 345 Pin Numbers Pin Numbers Resistance Q Resistance Q Octal Connector D sub co
26. successful calibration each subsequent pressure reading is corrected by the calibration value Pressing INC and DEC simultaneously will reset the Pirani atmospheric calibration back to the factory default value 8 7 5 Pirani Vacuum Calibration This display allows the user to calibrate the Pirani sensor for reading vacuum This operation is only available when the Pirani module is installed in the controller The calibration operation makes use of the display s U indicator to depict vacuum calibration When illuminated the Pirani sensor has been calibrated for vacuum by the user CE when in Pressure Measurement mode the U on the display indicates if the controller has been calibrated for either atmosphere or vacuum The lower readout depicts the current vacuum pressure reading Pressing either the INC or DEC button instructs the controller to use the current pressure reading as vacuum Each subsequent pressure reading is corrected by the calibration value Limits exist on the allowable range of vacuum adjust Attempts to calibrate to a pressure beyond these limits are not permitted Valid calibration values will advance the display to the next item in the menu list If the menu display does not advance the user must adjust the vacuum chamber s pressure or use the factory default vacuum calibration value Pressing INC and DEC 959 Hot Cathode Controller 47 simultaneously will reset the controller s Pirani vacuum calibration ba
27. test sensitivity depends on the pumping system and the location of the sensor with respect to the leak as well as the difference in ionization probability between the probe gas and the system background gas Since the indicated pressure of a Pirani or Hot Cathode gauge is dependent upon the type of gas being measured introducing a probe gas through the leak into a steady state system will change the indication The Series 959 Controller uses a zero centered numerical display with increased sensitivity to indicate gas leaks in high vacuum systems 50 959 Hot Cathode Controller This is activated when the controller is switched to the leak test mode The pressure indication remains visible Audible indication of leak signals is user selectable from the front panel While the leak test sensitivity varies with the pressure range in the best case it is as low as 10 Torr liters second To use the Leak Test function of the HPS Series 959 pump the system to its base pressure then enter the LEAK TEST mode An audio indicator emits beeps with a repetition rate proportional to the amplitude of the leak signal The audio indicator can be silenced or reactivated by pressing the Audio push button A probe gas entering the gauge through a leak will cause a change in the numerical value of the digital Leak display To locate a leak in the vacuum system probe the suspect areas with a search gas which has an ionization probability different than the
28. which is often referred to as a nude tube The main reason for the success of the BA configuration is due to its reduced vulnerability to x rays By virtue of its small diameter the ion collector minimizes the area exposed to the soft x rays emitted from the grid X ray emission from the grid is an undesirable side effect of electron impact upon the grid surface Some of these x rays strike the ion collector releasing electrons via the photoelectric effect This photoelectric current is added to the pressure dependent ion current and is indistinguishable to the electrometer making the measurement Ultimately at low pressures approximately 1x10 Torr the photoelectric current can fully mask the ion current which establishes a useful low pressure measurement limit known as the x ray limit Another important characteristic that limits practical low pressure measurement is the sensitivity of the gauge The sensitivity k is a constant of proportionality relating the measured pressure P to the ratio of the collector current i to the number of electrons emitted from the filament e i k e Sensitivity includes such factors as ionizing efficiency and temperature and is usually expressed in units of inverse pressure It can be seen that a constant value of sensitivity is required for the gauge tube to have a linear relationship with pressure A gauge with a high sensitivity provides a larger signal ion current for a given emi
29. 07 10 101 102 10 NITROGEN PRESSURE TORR Energy Loss Curve for Constant Temperature Pirani Filament 2 959 Hot Cathode a a ani 15 2 Theory of the Hot Cathode lonization Hot cathode ionization gauges use electrons emitted from a hot filament thermionic electrons to create ions whose number is proportional to pressure The electrons are accelerated through the gauge by a potential difference between the hot filament and the grid anode The energy acquired by the electrons on their passage through the gauge is sufficient to ionize resident gas molecules The positively charged ions are consequently attracted to the negatively charged ion collector electrode where they are neutralized by an electron current Since the gas molecules are singly ionized there is a one to one correspondence between the number of ions neutralized and the neutralizing electron current Hence the electron current is often called the ion current which is proportional to the pressure in the gauge The ion current is measured by the 959 s electrometer and converted to a pressure indication on the 959 display and an analog output accessible from the rear panel see Accessory Connector section page 67 Many types of hot cathode gauges have been developed for commercial use since the 1950 s however the Bayard Alpert BA gauge has been the most successful Bayard Alpert gauges are available in glass envelopes or mounted on a flange
30. 3 Testing the Series 315 345 Sensor 23 7 4 Series 317 Convection Enhanced Pirani Sensor Installation 23 7 4 1 Orienting the Series 317 23 7 4 2 Connecting the Series 317 Sensor 23 7 4 2 1 Connecting the Series 317 Sensor to the 959 oii ai 23 7 4 3 Testing the Series 317 24 7 5 Low Power Nude Tube and Mini BA Hot Cathode Sensor Installatio 25 7 5 1 Locating a Hot Cathode Sensor 25 7 5 2 Preventing Contamination in a Hot Cathode 25 7 5 3 Cleaning the Hot Cathode 25 7 5 4 Orienting a Hot Cathode Sensor 25 7 5 5 Connecting a Hot Cathode 25 7 5 5 1 Connecting a Hot Cathode Sensor to a Vacuum COD a kaag aa ana 25 7 5 5 2 Connecting a Hot Cathode Sensor to the 959 ero migell gem 26 7 5 6 Testing the Hot Cathode 27 7 6 Sensor Cable Diagrams and Pin 27 AE 28 7 6 2 Series 345 and Series 317 28 7 6 3 Low Power Nude Tube 29 7 6 4 Mini gt
31. 39 541 542 544 545 546 5 48 15 49 LO 014 016 020 025 030 035 0 040 045 050 055 0 0 0 018 0 0 0 0 0 0 0 1 0 065 92 0 0 0 94 0075 5 0 080 6 0 085 0 98 0 090 0 0095 4 99 0 095 0 00 st xt s P DI st Sf eo LO co 9 9 3 gt 0 010 5 0 100 1 00 4 0 0014 4 0 0018 4 4 0 0035 0 0060 4 89 0 060 9 0 0010 0 0016 0 0020 0 0025 0 0030 0 0040 0 0045 0 0050 0 0055 0 0065 0 0070 0 0075 0 0080 0 0085 0 0090 0 0100 5 lol x Rio Of FIN oleo LON o Ja t Lo o 9 9 9 e st SE SE E LO gt a SIS S ISIS tt E st E E E 8T E 8T E E y E 959 Hot Cathode Controller 60 8 15 Convection Enhanced Pirani Pressure to Voltage Curve CEP Voltage vs Pressure E LLLI Li L LIBE Jah T TTT 1111 o gt 3 2 gt o 9 c EN aoo dii TTT T d e 0 001 0 010 0 100 1 000 10 000 100 000 1000 000 Pressure in Torr 8 16 Convection Enhanced Pirani Pressure to Voltage Table ooo 4 50 looo soo Jo100 155 100 e amp oo 109 650 1000 7 00 0 0016 460 0 0160 510 0 160 5 60 1 60 6 10 16 0 660 1600 710 250 6 20 25 0 6 70 250 0 720 3 00 6 24 30 0 674 3000 724 5 00 X 6 35 50 0 X 6 85 550 6 57
32. A EC AUTO EC ACK1MA AUTO 959 Hot Cathode Controller 19 13 8 Status messages These query only messages return factory preset or operational status information about the controller 13 8 1 Pressure Reading PRx Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Query Response Query Response Query Response A 20 Returns the current pressure reading in scientific E notation or the current sensor status The x in the keyword reference refers to the sensor being read Valid values are H for the Hot Cathode P for the Pirani or C for the Combined pressure The returned pressure value is the linearized version of the raw voltage from the sensor s With the Hot Cathode pressure reading the returned value reflects any user assigned sensitivity factors With the Pirani pressure reading the returned value reflects any user assigned calibration factors With the Combined pressure reading the returned value reflects the internally applied smoothing algorithm for the overlap pressure range If a valid pressure reading can not be made a NAK response is returned with the corresponding sensor error code PRH PRP PRC Query only None Numerical value expressed in scientific notation OFF Over Under Protect N A N A PRH ACK5 2E 7 NAK4 Pirani Sensor reading LOW PRC ACK 1 0E 2 959 Hot Cat
33. Control Set Point operation can be both enabled and disabled Disabling the Control Set Point maintains the set point pressure value in nonvolatile memory The Control Set Point pressure value as well as its enable disable state is maintained in nonvolatile memory between power cycles When Control Set Point is enabled neither the Front Panel Filament Power switch nor ASCII serial commands can be used to turn filament power on or off When Control Set Point is disabled the Hot Cathode filament power remains in its previous state Control Set Point hysteresis averages 596 of measured pressure Hysteresis is not user adjustable 8 5 9 Control Set Point Constraints The Control Set Point operation is not allowed if the Pirani module is not installed User adjustment of the Control Set Point is not allowed if the controller is in Combined mode In Combined mode the Control Set Point defaults to 1 0 x 10 Torr 959 Hot Cathode Controller 41 8 5 10 Control Set Point Assignment This display allows the user to assign a Control Set Point Each time this menu is entered the current default Control Set Point value is displayed A value of 1 0 x 10 Torr is the factory default value After an assignment by the user that assignment becomes the default Control Set Point value This display depicts the current Control Set Point value Pressing the INC and DEC buttons modifies the bottom display through the range of allowable Control Set Poin
34. Controller at the Gauge port Tighten the connector jackscrews into the mating screw locks to ensure proper electrical connection and to prevent stress on the connectors 959 Hot Cathode Controller 21 N Turn off the Controller before connecting or disconnecting the cable from the Sensor or Controller Pin 6 of the octal socket is intentionally shorter as a safety measure When the cable is connected or disconnected from the Sensor this feature prevents a voltage overload on the Sensor in case the Controller has not been shut off However it is not possible for this preventative feature to always work so avoid any possible damage by always turning off the Controller before any connections are made In applications for which special cables are required i e where the connection must be routed through restrictive barriers or through a conduit customize a cable using the figures shown the following pages Use a D sub connector with jackscrews for strain relief in all applications 7 3 2 2 Connecting the Series 345 Sensor to the 959 Controller A sensor cable with 9 pin D sub connectors see Accessories page 67 is required for operation but is purchased separately from the 959 system When exerting excessive stress on the cable use separate strain relief to prevent damage to the Sensor or Controller Cables are available in standard lengths of 10 25 50 and in custom lengths up to 500 feet Connect the cable to the rear
35. Limits Reset Value Query Response Related Keywords Examples Query Query Response Command Query Query Response Assigns the set point pressure value Pressures below this value assert the set point signal Pressures above this value de assert the set point signal The set point signal drives a relay with normally open and normally closed outputs The x in the keyword reference refers to the set point being set up Valid values are 1 or 2 The query response returns the current set point SP1 SP2 Command and Query numerical value expressed in scientific notation Min 5 0 x 10 Torr Max Hot Cathode 9 5 x 10 Torr Max Pirani 95 Torr standard Max Pirani 950 Torr convection 5 0E 10Torr numerical value expressed in scientific notation CSP SP1 ACK1 0E 9 SP1 5 0E 5 SP1 ACK5 0E 5 959 Hot Cathode Controller 5 13 6 2 Control Set Point Value CSP Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Query Query Response Command Query Query Response A 6 Assigns the Control Set Point value This is the value at which the controller will supply power to the Hot Cathode sensor filament At pressures above this value power is removed from the Hot Cathode filament at pressures below this value power is applied to the Hot Cathode filament The query response returns the current set point The Control
36. Mode OFF Protect Pressure 1x10 Torr Keyword FD Type Command only Parameter none Limits N A Reset Value N A Query Response N A Related Keywords N A Examples Command FD gt This command removes power from the filament 959 Hot Cathode Controller A 13 13 7 Control Messages These messages are used to coordinate the actual run time operation of the controller 13 7 1 Active Filament AF Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Command Query Response A 14 Selects the active filament Switching filaments can only take place with power removed from the filament circuitry Attempts to switch filaments with power applied will automatically remove power from the filament and the user will have to resend the filament power on command FP Selecting the currently active filament has no affect on the device operation The query returns the currently selected filament AF Command and Query Single digit integer Min 1 Max 2 1 single digit integer FP FS AFH AF ACK1 959 Hot Cathode Controller 13 7 2 Filament Power FP Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Command Turns power on and off to the Hot Cathode emission filament FP Command only Enumerated ASCII text OFF ON Off N A AF FS
37. R mBAR PASCAL Reset Response Factory configured units Related Keywords N A Examples Query U Response ACKmBAR 959 Hot Cathode Controller A 25 13 8 7 Manufacturer Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Query Response A 26 Returns the identifier for the controller manufacturer as a constant ASCII text string MF Query only None HPS HPS MD MF ACKHPS 959 Hot Cathode Controller 13 8 8 Model Designation MD Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Query Response Returns the device controller information MD Query only None 959 959 MF MD ACK959 959 Hot Cathode Controller A 27 13 8 9 Device Type DTx Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Query Response Query Response A 28 Returns constant ASCII text string identifying the sensor type Because the 959 support two sensor modules two forms of this query exist one for the Hot Cathode sensor and one for the Pirani sensor The x in the keyword is either H for the Hot Cathode or P for the Pirani DTH DTP Query only None LPN Low Power Nude MIG Mini ion gauge CEP Convection Enhanced Pirani STP Standard Pirani N A MD MF DTH ACKLPN DTP
38. Set Point operation is not available when to controller is in the Combined mode of operation or when the Pirani sensor is not installed and operational CSP Command and Query numerical value expressed in scientific notation Min 1x10 Torr Max 1x10 Torr 1 0E 2Torr numerical value expressed in scientific notation SPx CSP ACK1 0E 2 CSP 2 0E 3 CSP ACK2 0E 3 959 Hot Cathode Controller 13 6 3 Protect Pressure PRO Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Query Query Response Command Query Query Response Assigns the protection pressure for the Hot Cathode sensor This is the value at which the Hot Cathode sensor s filament will automatically have power removed from it so that it can be protected from exposure to high pressures At pressures above this value power is removed from the Hot Cathode filament and can not be reapplied by the user at pressures below this value power may applied to the Hot Cathode filament The query response returns the current protect pressure A default protect pressure exists at 1x10 Torr The PRO command overrides the default protect pressure with a user selectable value that may be more appropriate for the user s application The protect pressure is not user assignable when the Controller is in the Combined or Control Set Point mode of operation PRO Command and Query numerical value
39. Type Parameter Limits Reset Value Query Response Related Keywords Examples Command Query Response A 18 Enables or disables the referenced set point The x in the key word refers to the set point being enabled or disabled Valid values for x are 1 for set point one 2 for set point two or C for control set point The query returns the current enable state of the referenced set point on or off EN1 EN2 or ENC Command and Query Enumerated ASCII text OFF ON Off OFF ON SP1 5 2 CSP EN1 ON EN1 ACKON 959 Hot Cathode Controller 13 7 6 Emission Current Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Command Query Response Command Query Response Assigns the emission current to be used on the sensor during pressure measurement The Auto setting allows the transducer to automatically control the emission current based on its real time pressure measurement To take the transducer out of Auto emission current mode reprogram the device to the low emission current The low emission current 100uA The query response returns the emission current at the time of the query as well as the ASCII string AUTO if the transducer is in Auto mode EC Command and Query Enumerated ASCII text 100UA AUTO N A 100UA 100UA AUTO 1MA AUTO N A EC 100UA EC ACK100U
40. at the user only needs to associate a set point with a specific sensor under certain operational conditions When these conditions are not present the display operation only allows the user to enable or disable Set Point operation Turning a set point off maintains the assigned value in memory but disables its operation The display depicts the current state of the set point operation enabled ON disabled OFF Pressing the INC and DEC buttons toggles the bottom display between ON and OFF Additionally the display may allow the user to assign the set point to a specific sensor In this case pressing the INC and DEC buttons will sequence the lower read out through the options of ON OFF PIR amp Hot Cathode Sensor assignment is only possible if the following conditions are true Both sensor modules are present Set Point 1 has been assigned a pressure within the sensors overlap range 2 0 x 10 through 9 5 x 10 Torr with Convection Enhanced Pirani Sensor 2 0 x 10 through 9 5 x 10 Torr with Pirani Sensor 959 Hot Cathode Controller 39 8 5 6 Set Point 2 Value Assignment This display allows the user to assign a pressure value to Set Point 2 Each time this menu is entered the current default Set Point 2 value is displayed A value of 5 0 x 107 Torr is the factory default value After an assignment by the user that assignment becomes the default set point value The pressure range available for the set point i
41. atable 103170014SH 15mmx30mm tubing 103170016SH 18mmx30mm tubing 103170018SH 959 Hot Cathode Controller Cable Hot Cathode Mini Gauge 10 ft 3 0m 100011106 25 ft 7 6 m 100011107 50 ft 15 2 m 100011108 Cable Hot Cathode Low Power Nude 10 ft 3 0m 100010909 25 ft 7 6 m 100010910 50 ft 15 2 m 100010911 Cable for 315 Pirani 10 ft 3 0m 103150006 25 ft 7 6 m 103150007 50 ft 15 2 m 103150008 100 ft 30 5 m 103150017 Custom to 500 ft 152 4m 103150009 Cable for 345 Pirani and 317 Convection Enhanced Pirani 10 ft 3 0m 103170006SH 25 ft 7 6 m 103170007SH 50 ft 15 2 m 103170008SH Custom to 500 ft 152 4m 103170009SH Mounting Hardware Kit 1 4 DIN 100005761 Power Cord 115 VAC 103150001 HPS Products Series 959 Hot Cathode Controller User s Manual 100011229 Please call the HPS Products Customer Service Department of MKS Vacuum Products Group at 303 449 9861 or 800 345 1967 to order any of these parts or to receive catalogs for other MKS Products 68 959 Hot Cathode Controller 959 Hot Cathode Controller 69 12 Product Warranty Extent of the Warranty MKS Instruments Inc Vacuum Products Group MKS warrants the HPS Products Series 959 Hot Cathode Controller System and its accessories to be free from defects in materials and workmanship for one 1 year from the date of shipment by MKS or authorized representative to the original purchase PURCHASER Any product or parts
42. ay when both the Pirani and Hot Cathode sensor are located in the same chamber at high vacuum The unit is not in Combined mode of pressure measurement Because the Pirani module is returning a signal analog voltage that indicates it is exposed to a pressure that is beneath its pressure measurement range a LOW is displayed on the Pirani s readout The Hot Cathode readout may display LOW when the sensor is exposed to ultra high vacuum 8 10 2 Over Pressure This example demonstrates the LCD display when both the Pirani and Hot Cathode sensors are located in the same chamber near or above atmosphere The unit is not in Combined mode of pressure measurement This display depicts the read out when the Pirani is exposed to a pressure that is above its pressure range ESO the Hot Cathode sensor readout indicates OFF when the user or a Pirani Sensor has turned the filament off The Hot Cathode readout could also indicate PROT if the sensor s protect set point has been reached and the controller automatically rather than the user manually removed filament power The Hot Cathode read out will never display HI 959 Hot Cathode Controller 55 8 10 3 Low Emission The controller will automatically remove filament power from the Hot Cathode sensor when it detects a low emission current The following display is depicted to inform the user this event has occurred Only the Hot Cathode module s read out is affected The LCD display in
43. basic query format to the controller from the host is as follows lt query field gt lt optional parameter field gt lt terminator field gt The query field is delimited with a question mark Any required parameter data immediately follows the question mark The message is terminated with FF Query Parameter FF or Query FF 13 2 3 Response Syntax The basic command response format from the controller back to the host is as follows lt response field gt lt terminator field gt The response field is prefaced with either the ASCII characters ACK or NAK The ACK sequence signifies the message was processed successfully The NAK indicates there was an error The response to a command if successful is an ACK followed by the terminator The response to a query is an ACK followed by data and then a terminator Messages with errors are responded to with an NAK followed with an error code and a terminator The response message terminator is FF ACK FF or ACKdata FF or NAKerror_code FF A 2 959 Hot Cathode Controller 13 3 Addressed RS232 Traditional RS232 communications depends on serial UARTs to detect communications failures with stop bits parity bits and bit transfers rates This mechanism doesn t always detect data bit errors that generate valid characters but garbled messages Additional robustness can be added to the communications by defining a formal message syntax that unambiguously identifies the start
44. calibration can take place The user requests a user atmospheric calibration either with an ASCII command or via the Front Panel switches 46 959 Hot Cathode Controller 8 7 4 Pirani Atmospheric Calibration This display allows the user to calibrate the Pirani sensor reading for atmospheric pressure This operation is only available when h 1 the Pirani module is installed in the controller The calibration operation makes use of the display s U indicator to depict atmospheric calibration When illuminated the Pirani sensor has been calibrated for atmosphere by the user X 107 ih ard d oo in Pressure Measurement mode the U on the display indicates if the controller has been calibrated for either atmosphere or vacuum The lower readout depicts either the default calibration pressure value if not calibrated or the current atmospheric calibration value Pressing the INC and DEC buttons increments or decrements the lower display value Pressing the SELECT or FUNCTION key will apply the calibration value to the Pirani sensor Limits exist on the allowable range of atmospheric adjust and attempts to calibrate to a pressure outside these limits are not permitted The previous calibration value or default value if not calibrated will be displayed if the user attempts to calibrate the Pirani sensor to a pressure reading outside the allowable limits Valid calibration values will advance the display to the next item in the menu list After a
45. ch attention character resets the controller s parser an attention character in the middle of a message will reset the parser and generate an unrecognized command error The 959 controller will preface each of its responses with just 1 attention character 13 3 2 2 Device Address The device address for the 959 is 1 It cannot be changed Address must be 1 Q1PRP FF 959 Hot Cathode Controller A 3 13 4 Message Handling A message is defined to begin with an attention character and end with a valid terminator There is no time limit between characters Whenever an attention character is detected any current characters in a device receive buffer are flushed and a new message handling sequence is begun Whenever a terminator is detected the current receive buffer is passed on to the message parser If the terminator is not received and the controller s receive buffer becomes full additional characters are ignored until a terminator or an attention character is received 13 5 ASCII Command Set Definition The following template is used to define the controller s commands queries and responses Description Verbose description of the purpose of the command or query message Keyword The actual ASCII characters comprising the command or query field of the message Type Command message item supports the command format Query message item supports the query format Parameters A verbose description
46. ck to the factory default value 8 7 6 Degas Time This display allows the user to adjust the length of time Degas power is applied to the filament Degas time has L minimum and maximum limits LJ J The lower read out displays the current degas time in minutes The INC and DEC buttons adjust this time up or h A down with 1 minute resolution Simultaneously pressing INC and DEC together will reset the controller degas time back to the factory set default value of 3 minutes 8 7 7 Emission Current Assignment This display allows the user to assign the Hot Cathode s emission current mode of operation The controller supports two modes In auto mode the controller determines the optimal emission current based on the pressure conditions Alternatively the user may assign the emission current to be always 100uA The lower readout depicts the current mode Pressing the INC and DEC toggles the bottom display between the two emission current options Auto Auto mode or 100 always 1000 In Auto mode the Controller determines the proper emission current based on real time pressure measurements The Controller uses a 100 emission current at higher pressures and a 1mA emission current at lower pressures The emission current switches to 1mA at 8 0 x 10 Torr going from high pressure to low pressure Emission current switches to 100 pA at 1 0 x 10 Torr going from a low pressure to a higher
47. d If the protective ground connection is lost all accessibly conductive parts may pose a risk of electrical shock Plug the cord into a properly grounded outlet only A Do not exceed the rated line voltage of your unit Electrical shock may result 959 Hot Cathode Controller 33 8 Operating the 959 Hot Cathode Controller 8 1 Front Panel Overview The following picture shows the 959 controller display Not all LCD annunciators depicted are used during the operation of the 959 Controller In addition to the LCD there is a keypad of 7 momentary push button switches on the controller s Front Panel for manual control and configuration of the unit 8 1 1 Front Panel Switch Definitions 1 Power ON OFF This switch serves as the controller power on off switch The Power On Off switch must be 959 HOT CATHODE CONTROLLER pressed on before the other function keys will operate The power on off operation is actuated when the switch is released by the user The power on off switch is a r3 momentary switch that is used only to toggle power to the controller IN Full AC power will be removed when the AC power cord is unplugged from the unit FILAMENT DEGAS 2 Filament Power This momentary switch m FA A toggles power on and off to the currently cD MES selected filament Wear STOP Never attempt to turn the filament on when the system pressure is above 1 0 x 10 Torr Sensor damage will resul
48. de and the user can again select the leak test sensor Pressing the FUNCTION key returns the Controller to Pressure Measurement mode The LCD display reflects the Controller s most recent set up parameters and normal pressure measurement operation resumes 8 8 5 Leak Test Constraints Degas is not allowed while in Leak Test Mode If Degas is active when Leak Test Mode is entered it is automatically terminated Degas can not be invoked while in Leak Test Mode The Hot Cathode filament can be powered on and off during leak test operation If the Hot Cathode sensor is the leak test sensor and the filament is powered off the LCD display indicates the Hot Cathode sensor is off The leak test operation is suspended until the filament is turned back on Relay Set Points are disabled while in Leak Test Mode The controller cannot operate in Combined mode during leak test If Combined mode is active when the Leak Test Mode is entered the controller is automatically placed into normal Pressure Measurement mode The user must re enable Combined mode after the leak test operation 8 8 6 Using the Series 959 as a Leak Detector Leaks in vacuum systems are often difficult to locate and often require the use of mass spectrometer leak detectors and skilled operators While the Series 959 is not intended to replace mass spectrometer leak detectors it offers an ideal inexpensive and simple method for locating leaks in high vacuum systems The leak
49. dicates power is removed from the Hot Cathode filament The Pirani module continues with pressure measurement 56 959 Hot Cathode Controller 8 11 Miscellaneous Displays The following menu displays are used to display and modify controller parameters that do not need to be accessed by the user under normal operating conditions The displays are accessed by pressing pairs of key combinations simultaneously while in Pressure Measurement mode Pressing the FUNCTION key at any time returns the controller to the Pressure Measurement mode 8 11 1 LCD Display Test The Display Test displays is invoked by pressing the FUNCTION and SELECT keys simultaneously while in Pressure Measurement mode This display depicts all possible LCD segments Not all LCD segments are used during the operation of the 959 Controller T d Y 888 PASCAL 959 Hot Cathode Controller 57 8 11 2 Factory Reset The display is invoked by pressing the INC and DEC keys simultaneously while in Pressure Measurement mode This menu display allows the user to reset the controller back to ALL factory set parameter values The controller will lose all the set up values entered by the user after this reset has executed The menu queries to ensure the user really wants to reset the controller Pressing INC or DEC will toggle the lower readout to display YES or NO Pressing the Function or Select key will either reset the controller to fac
50. e Sensor Locate the sensor where it can measure chamber or manifold pressure Installing the sensor away from pumps and gas sources gives the most representative pressure measurement In the case of a nude gauge ensure that there is nothing in the system or mounting location that could damage the electrode structure of the gauge Special consideration should be given to any moving mechanisms within the vacuum system to insure they cannot inadvertently damage the sensor 7 5 2 Preventing Contamination in a Hot Cathode Sensor Locate and orient the sensor where contamination is least likely For example if the sensor is mounted directly above a source of evaporation the vapor could contaminate the gauge structure or feed through and cause the calibration to shift 7 5 3 Cleaning the Hot Cathode Sensor Roughing pump oils and other fluids condensing or decomposing on the gauge structure can contaminate the sensor and cause calibration to shift Although the feed through insulators are shielded in some applications conducting films or paths may form on the insulators In either case the sensor should be replaced See Spare Parts and Accessories page 70 It is not advisable to clean the sensor Trying to clean it may either deform or break the gauge structure 7 5 4 Orienting a Hot Cathode Sensor The HPS Products Hot Cathode Sensors can be installed and operated in any position without compromising accuracy However it is recommended
51. e correct power source Use the properly rated fuse Return to HPS Products for repair Range is 1012 through 102 Torr Ensure all sensors are properly connected to their cable and that the cables are securely attached to the Controller Switch active filaments Degas the Hot Cathode sensor Calibrate the Pirani sensor Change the sensitivity for the sensor type Assign the proper sensitivity for the gas being used Turn off Degas Replace sensor 10 Remove the magnetic field source Lower system pressure before turning on Degas 2 Switch active filaments or replace sensor or cable 3 3 Turn on filament power 959 Hot Cathode Controller 63 9 3 Replacing the Power Fuse The Series 959 controller has a combined fuse holder and power inlet on the rear panel Replace the fuse following the steps below 1 Unplug the power cord from the power source and the Controller 2 Snap out the fuse holder drawer 3 Replace the fuse s with the following time lag fuse T 1 6 A 5 x 22 mm 4 Close and secure the fuse holder drawer 64 959 Hot Cathode Controller 10 Using the 959 Hot Cathode Controller with Other Gases A Hot Cathode ionization sensor measures pressure by the degree of ionization of a gas so the pressure reading depends on the type of gas in the system The Series 959 System is calibrated to read pressure for air or nitrogen The Series 959 System displays a press
52. e on the front panel 9 3 Servicing the Controller The 959 Controller is designed to be maintenance free under normal operation If a problem should occur the following chart lists symptoms possible causes and their remedies With this guide you should be able to diagnose some problems and correct them Those that fall outside the scope of this chart are generally not serviceable by the user and the unit should be returned to HPS Products for repair 959 Controller Trouble Shooting Chart No indication on display Fuse blows repeatedly Pressure reading is inaccurate Degas does not turn on Possible Cause Controller not plugged into proper power source Power switch is off Power fuse blown Improper power source Incorrect fuse rating Defective power supply in the Controller System pressure outside of normal measurement range Sensor not attached to cable or controller Filament is burned out Sensor needs degassing Sensor needs calibration Controller set to wrong sensitivity System gas neither air nor nitrogen Degas is active Contaminated or leaking sensor 0 Sensor interference from external magnetic force 1 Pressure above protection threshold 2 Open grid circuit in sensor or cable 3 Filament power not switched on Verify power source and plug the Controller into the correct one Press the Power On front panel push button Replace the fuse Us
53. e places the Controller in Set Up mode Set Up mode provides access to the controller s non set point configuration parameters While in Set Up configuration mode the user uses the SELECT push button to sequence through the list of configurable set up attributes That is after assigning a value to a parameter the user presses the SELECT button to sequence on to the next attribute in the list The list is dynamic and only those parameters that are appropriate for the controller s configuration are displayed The INC and DEC button are used to modify individual parameter values The following displays are listed in the order the user would sequence through them by repeatedly pressing the SELECT button The Set Up configuration mode is indicated with the text string SET UP on the LCD 8 6 1 Filament Select This is the first controller parameter that is displayed upon entering Set Up mode It allows the user to select one of two Hot Cathode filaments The current or default filament selection is displayed on the bottom read out Pressing the INC and DEC buttons toggles the lower readout between 1 amp 2 Pressing the SELECT key advances the display to the next item in the menu list 8 6 2 Combined Pressure Measurement The Combined mode of operation is an optional mode of operation that combines the Hot Cathode and Pirani pressure measurement reading into one smoothed combined value It is intended to be used when the two sensors a
54. e resistance between the two pins of each filament This applies to any sensor Hot Cathode sensor operated by the 959 Resistance Q Resistance Q good sensor non functioning Between F1 pins 0 5 open gt 100 Ohms Between F2 pins 0 5 open gt 100 Ohms Any pin to ground shell gt 10 Ohms 106 Ohms F1 and F2 are identified on the Low Power Nude gauge itself Use the drawing below to locate F1 and F2 on the Mini BA gauge Locator Key Slot Filament pin locator Mini BA gauge 959 Hot Cathode Controller 27 28 7 6 Sensor Cable Diagrams and Pin Outs 7 6 1 Series 315 PIN NUMBERS FOR OCTAL SOCKET ANY LENGTH UP TO 500ft A TE BLUE STRIPES fa 1 PIN ul 6 gt HL 16 PIN s8 1 BLUE YHITE STRIPES 2 PINS T 17 Y 7 _WHITE DRANGE STRIPES La 3 g 0 pu 1 ORANGE WHITE STRIPES ME 3 1 5 it IWHITE GREEN STRIPES it re PIN 6 AL GREEN WHITE STRIPES pis7 DRAIN WIRE WR FN PIN 3 PIN 16 i V Th MALE 9 PIN D SUB CONNECTOR J CONNECT DRAI SIN IRE FEMALE DCTAL ETAL RAN Mi BOTH ENDS i e8 1p 1 959 Hot Cathode Controller 7 6 2 Series 345 and Series 317 TUBE Any length up to 500 feet CONTROLLER Pin numbers A 1 1 6217 2 a 16 5 6 g 9 9 CAS Connect drain wire to metal hood at both ends Female 9 pin d sub connector 24 AWG 6 conductor 3 twisted pairs Male 9 pin D sub connector
55. e wire and the gas is dependent upon the pressure range For pressures below 10 Torr it is possible to derive an equation showing a linear relationship between the thermal energy loss to the gas Egas and the pressure 15 1 TuTo Egas const 0 48 1 MT P Where for the particular gas Qt is the accommodation coefficient 6 is the ratio of the specific heat at constant pressure to that at constant volume M is the molecular weight of the gas Tw is the temperature of the wire is the temperature of the gas P is the pressure At pressures above about 100 Torr for nitrogen and widely differing values for other gases the gas acts like a insulating layer At still higher pressures and in a large enclosure convection contributes to energy transport In the Convection Enhanced Pirani convection currents are encouraged above 200 Torr and contribute to increased energy transport from the filament for additional sensitivity at these pressures The pressure range between 10 Torr and 100 Torr is a transition region where the slope of the energy loss 959 Hot Cathode 1 curve decreases continuously Figure 16 below shows an energy loss curve for a constant temperature Pirani transducer over the range from 10 4 Torr to atmosphere Egas and a horizontal line indicating the energy loss due to the end loss and radiation terms Eend Erad Note the sum of end and radiation losses is about 10 times the gas transport at
56. ectional area equal to or greater than 0 75 mm The power cable should be approved by a qualified agency such as VDE Semko or SEV N Caution when handling an installed Hot Cathode sensor An installed Hot Cathode sensor especially when installed within a mounting nipple may have areas exposed to the user that get hot enough to burn skin 4 959 Hot Cathode Controller 3 1 Controller Measuring Range Set Point Range Control Set Point Range Protect Set Point range Set Point hysteresis Reproducibility Operating Temperature Range Storage Temperature Range Relative Humidity Altitude Operating Environment Insulation Coordination Power Requirement Mains Voltage Power Consumption max Input Current max 3 Specifications 1 0 x 10 to 1 0 x 102 Torr 1 3 x 10 to 1 3 x 10 mbar 1 3 x 10 to 1 3 x 10 Pa 5 0 x 10 to 9 5 x 10 Torr 6 5 x 10 to 1 2 x 10 mbar 6 5 x 10 to 1 2 x 10 Pa 1 4 5 10 1 1 3 x 10 to 1 3 x10 mbar Lee 1800 Pa 1 0 x10fto 1 0 x 10 Torr 1 3 x 10 to 1 3 x 10 mbar 1 3 x 10 to 1 3 10 Pa 10 of indicated pressure Approximately 5 5 to 40 C 41 to 104 F 10 to 55 C 14 to 131 F 8096 max for T 31 C decreasing linearly to 5096 max at 40 C 2000 m 6562 ft max Indoor use only Installation Overvoltage Category Il Pollution Degree 2 100 240 VAC 50 60 Hz Fluctuations not to exceed 10 70 Watts 1 0 Amp
57. ed The SET response indicates the set point signal is asserted The CLEAR response indicates the set point signal is de asserted The x in the keyword reference refers to the set point being queried Valid values are 1 or 2 SSx Query only None SET CLEAR CLEAR SPx SS1 ACKCLEAR 959 Hot Cathode Controller A 23 13 8 5 Control Set Point Status CSS Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Query Response A 24 The Control Set Point Status query returns the current state of the control set point interlock The SET response indicates the control set point pressure is currently present implying the Hot Cathode is currently off The CLEAR response indicates the control set point pressure is not currently present implying the Hot Cathode sensor is currently on CSS Query only None SET CLEAR CLEAR SPx CSS ACKCLEAR 959 Hot Cathode Controller u 99 13 8 6 Units selection U Description Returns the pressure units to be used when referencing pressure data The units affect all pressure measurements including set value assignment The supported units are TORR mBAR millibar and PASCAL Units are NOT user selectable This query returns the type of units for which the controller is factory configured Keyword U Type Query only Parameter None Query Response TOR
58. ed on the Pirani or Convection Pirani if installed will be measuring pressure pressure value or over under range condition will be indicated on the display The pressure is dispayed on the second display line unless the controller is in the combined pressure mode 8 2 3 36 959 Hot Cathode Controller Because the hot cathode sensor will be damaged if operated attoo high of a pressure the hot cathode remains off until turned on by the front panel filament button or a RS232 command Always make sure the system pressure is below 1x10 Torr before turning on a hot cathode sensor Once turned on the pressure is displayed on the top display line 8 4 Degas Operartion The sensor can become contaminated by process gasses which causes the pressure readings to be inaccurate This is most important when measuring very low pressures lt 10 Torr Degassing the sensor drives the gasses off of the sensor elements improving the sensors accuracy Degassing at high pressures can destroy or damage the sensor so never start a degas operation at pressures above 1x10 Torr To degas the sensor the filament must already be on simply pusth the degas button There will probably be a large pressure burst as the sensor elements heat up which may cause the protect set point to turn off the sensor Degas may need to be started multiple times until enough gas has been driven off the elements so the pressure burst does not exceed the protect set poi
59. ed to use the current pressure value as vacuum Each subsequent pressure reading is corrected by the calibration value There is an upper limit to the calibration value If the pressure read by the sensor during calibration is greater than this limit the calibration is not allowed and an error is returned The user must lower the pressure in the chamber before the sensor can be calibrated The pressure should be in the 10 Torr decade for a Convection Enhanced Pirani and in the 10 Torr decade for a standard Pirani Vacuum pressures too low however prevent proper sensor operation and return an error Keyword VAC Type Command Parameter ON OFF ON USER CAL OFF FACTORY CAL Limits N A Reset Value No adjustment applied to the raw measurement Query Response N A Related Keywords ATM Examples Command VAC ON A 10 959 Hot Cathode Controller 13 6 7 Time to Degas TD Description Keyword Type Parameter Limits Reset Value Query Response Related Keywords Examples Command Query Response Assigns the length of time of the Degas operation in minutes The Time to Degas query returns the assigned time in minutes The Degas Status query returns the amount of time remaining in the current Degas operation in minutes TD Command and Query 1 to 2 digit integer Min 3 3 minutes Max 30 30 minutes 3 minutes 1 to 2 digit integer DG DS TD 15 TD ACK15 959 Hot Cathode Controller
60. emks HPS Products 959 Hot Cathode Controller OPERATION AND MAINTENANCE MANUAL emks HPS Products 959 Hot Cathode Controller PART 100011229 Rev B Part 000000000XX Serial _ Please fill in these numbers and have them readily available when calling for service or additional information The part number can be found on your packing slip and both the part number and serial number are located on the bottom side of the housing For more information or literature contact MKS Instruments Inc HPS Products 5330 Sterling Drive Boulder CO 80301 USA Phone 303 449 9861 800 345 1967 FAX 303 442 6880 1999 MKS Instruments Inc HPS Products All rights reserved Table of Contents Table of Contents Package Contents asus dae 1 2 Safety IOMA 2 2 1 Symbols Used in this Manual nnn nennen nennen eenen eeen 2 2 2 Safety Precautions aanrenden dace o e n an dad 3 3 eee common 3 1 Coniroller docet ce aether SN carre en baa a ein 6 3 3 Convection Enhanced Pirani ocooonooccccccccnnoconcnnccnananoncnnncnnnannnncnnnnanns 7 3 4 Low Power Nude Tube nr Raad een 8 3 5 Mini BA EET 9 4 1 Front VIEW a 10 4 2 Rear VIEW aa nagan aaa a ea egi ducas aan aa Ka ag aia aa 10 4 Feature and Control
61. es The INC and DEC button are used to modify individual parameter values The following displays are listed in the order the user would sequence through them by repeatedly pressing the SELECT button 8 9 1 Leak Sensor Assignment This display is depicted when the user first enters Leak Test mode lt allows the user to select the leak test sensor This is 1 L H H the only configured leak test parameter Pressing the INC and DEC buttons toggles the lower display the Hot Cathode sensor and pressing the INC or DEC buttons has no affect After the leak test sensor has been determined between PIR and Hot Cathode If only the Hot Cathode sensor 2 Ji 2 module is present or operational the leak test sensor defaults to TORA L4 7 X 10 1 LS ES Lf out This example is when the leak test sensor is the Pirani 3 sensor The leak test value is initially all zeros As the leak sensing progresses the value changes The display can be re zeroed at any time and a new base line pressure established by pressing the ZERO button Pressing the AUDIO button activates the audio beeper PIR TORR pressing the SELECT button initiates the leak test operation 8 9 2 Pirani Sensor Leak Test Operation 7 This display is depicted after the leak test sensor has been defined It is the display that is visible during the leak test operation The current pressure measurement is displayed on the upper read out The leak test val
62. et point Y 7 signals relays are de energized J i E If the Pirani pressure reading goes above or below its measurement range the set point signal state remains at the 1 E value determined by the last valid pressure reading 8 5 3 Set Point Configuration Displays TORR Pressing the FUNCTION key once while the controller is in Pressure Measurement mode places the controller in Set Point configuration mode and provides the user access to the numerous Set Point configuration displays While in Set Point configuration mode the user uses the SELECT push button to sequence through the list of configured set point attributes That is after assigning a value to a parameter the user presses the SELECT button to sequence on to the next attribute in the list The list is dynamic and only those parameters that are appropriate for the controller s configuration are displayed The range of allowable assignment values is also dynamic based on the controller configuration The INC and DEC button are used to modify individual parameter values The following displays are listed in the order the user would sequence through them by repeatedly pressing the SELECT button The Set Point configuration mode is indicated with the text string SET POINTS on the LCD 38 959 Hot Cathode Controller 8 5 4 Set Point 1 Value Assignment This display is depicted when the user first enters the Set Point configuration mode lt allows the u
63. g or stopping system processes with relay set points Measuring pressures of backfilled gases Leak checking the vacuum system 959 Hot Cathode Controller 6 About the 959 Hot Cathode Controller The HPS Products Series 959 Hot Cathode Controller provides accurate and reliable pressure measurement from 10 Torr up to 10 Torr or to 1000 Torr with the optional Convection Enhanced Pirani module Designed with versatility and ease of use in mind the large liquid crystal display LCD shows the Pirani and Hot Cathode readouts simultaneously Standard features of the Series 959 Controller include two nonvolatile set points for reliable system control remote enable for Hot Cathode filament and degas and burnout protection for the Hot Cathode filament The protection feature guards the sensor s filament against damage in case of overpressure or a short circuit The protect pressure at which the filament is turned off is adjustable The Series 959 can power either the HPS Products Low Power Nude tube or the new HPS Products Mini BA Gauge With the Pirani option the controller can power either a standard Pirani or Convection Enhanced Pirani with automatic detection of the gauge type The controller s electron beam EB degas conveniently and effectively removes adsorbed gas from the sensor The controller displays the system pressure during degas Relay contacts and an analog output signal are accessible
64. gauge sensitivity 9 then 9 x 1 3 11 7 so user enters 12 A8 959 Hot Cathode Controller 13 6 5 Atmospheric Calibration ATM Description Keyword Type Parameter Limits Reset Value Calibrates the pirani sensor to use the assigned pressure as atmospheric pressure The corrected pressure value is reflected in the controller voltage output the programmed response to the Pressure Measurement command and the Set Point signal operation The calibration is implemented by inputting the desired atmospheric pressure The input pressure value is translated into a voltage adjustment that is applied against the pirani s raw pressure measurement Valid atmospheric pressure calibration values vary with the type of pirani sensor standard or convection enhanced ATM Command and Query Numerical value expressed in scientific notation Min 10 100 Torr Max 100 1000 Torr 7 60 E 2 Torr Connection Enhanced 1 00 E 2 Torr standard Query Response Current pressure reading expressed in scientific notation Related Keywords VAC Examples Command ATM 6 30E 2 Query ATM Query Response ACK6 30 2 959 Hot Cathode Controller A 9 12 6 6 Vacuum Calibration VAC Description Calibrates the Pirani sensor for a baseline vacuum pressure The user places the sensor into a chamber of low pressure and uses this command to signal the controller to perform a vacuum measurement The sensor readings are then calibrat
65. he Hot Cathode sensor will never be automatically turned back on unless the controller is in Control Set Point or Combined mode of operation The controller displays PROT to inform the user that the Hot Cathode has been turned off as a result of reaching the Protect pressure Set Point The Protect Set Point value is stored in nonvolatile memory and recalled after a controller power cycle 8 5 13 Protect Set Point Constraints The Protect Set Point value is not adjustable if the controller is in Combined mode or if a Control Set Point is active 8 5 14 Protect Set Point Assignment This display allows the user to assign a Protect Set Point 7 J The display depicts the currently active protect pressure ae Pressing the INC and DEC buttons modifies the bottom display through the range of allowable Protect Set Point pressures until E the maximum or minimum values are reached The Protect Set i x 10 FA 7 Point can never be turned off The INC and DEC buttons provide for the selection of a specific protect pressure within the range of allowable pressures Pressing the INC and DEC keys simultaneously resets the set point value back to the factory default value of 1 0 x 10 Torr This display is only visible if The controller is notin Combined mode amp A Control Set Point is not enabled 959 Hot Cathode Controller 43 8 6 Set Up Configuration Pressing the FUNCTION key while in Set Points mod
66. hode Controller 13 8 2 Filament Status FS Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Query Response Command Query Response Returns the operational status of the active Hot Cathode filament Off indicates the filament is powered down Normal indicates the filament is powered up and operating normally High indicates the filament is powered up but is requiring an abnormally large amount of power to sustain the emission current This may mean the filament is near failure and should not be used FS Query only None OFF NORMAL HIGH OFF AF FP FS ACKOFF FS ACKNORMAL 959 Hot Cathode Controller 21 13 8 3 Degas Status DS Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Command Command Query Response A 22 The Degas Status query returns the amount of time remaining in the current Degas operation in minutes DS Query only None 1 to 2 digit integer 0 DG TD TD 15 DG ON DS ACK15 959 Hot Cathode Controller 13 8 4 Set Point Status SSx Description Keyword Type Parameter Query Response Reset Response Related Keywords Examples Query Response The Set Point Status query returns the state of the set point signal indicating whether or not the set point pressure has been detect
67. hode gauge only Pirani gauges can only read air nitrogen 959 Hot Cathode Controller 65 66 10 1 Relative Sensitivity Table Symbol Sensitivity Air Argon Carbon Dioxide Deuterium Helium Hydrogen Krypton Kr Neon Ne Nitrogen N Nitrogen Oxide NO Oxygen Sulfur Hexafluoride SF Water H O Xenon Xe Hot Cathode Sensitivities Relative to Nitrogen 959 Hot Cathode Controller 11 Accessories Accessory Connector Kit 100005087 Sensor Hot Cathode Mini BA Gauge Yr Coated Ir Filaments 1 OD Tube 100011085 Mini CF 100011111 2 5 4 CF 100011112 KF25 100011113 KF40 100011114 KF16 100011118 9 4 OD Tube 100011127 Sensor Hot Cathode Low Power Nude KF40 Tungsten Filaments 100005987 2 4 CF Tungsten Filaments 100005980 KF40 Yr coated Ir Filaments 100006841 2 4 CF Yr coated Ir Filaments 100006842 Sensor Pirani 315 KF16 103150010 1 8 NPT M 103150011 8 VCR F 1 2 103150012 1 1 3 CF non rotatable 103150013 2 3 CF non rotatable 103150014 15mmx30mm tubing 103150016 18mmx30mm tubing 103150018 Sensor Pirani shielded 345 KF16 103450010 1 8 NPT M 103450011 8 VCR F 1 2 103450012 1 3 CF non rotatable 103450013 2 3 4 CF non rotatable 103450014 15mmx30mm tubing 103450016 18mmx30mm tubing 103450018 Sensor Convection Enhanced Pirani Shielded KF16 103170010SH 1 8 NPT M 103170011SH 8 VCR F 1 2 103170012SH 1 1 3 CF non rotatable 103170013SH 2 9 4 CF non rot
68. is not present or when the Set Point value is not within the overlap range 195 12C communication verification operation failure Contact Factory B 4 959 Hot Cathode Notes 959 Hot Cathode B 6 959 Hot Cathode 15 Appendix 15 1 Theory of the Thermal Conductivity The HPS Series 959 Hot Cathode Controller is designed for use with Pirani and Convection Enhanced Pirani gauges These sensors are heat loss manometers inferring the pressure of a gas by measuring thermal loss of a heated wire A hot wire suspended from supports in a partial vacuum loses thermal energy in three ways 1 end loss to the supports 2 radiation to surrounding surfaces and 3 gas transport The latter mode gas transport is pressure dependent It is the pressure dependence of thermal energy transport from a hot wire which is utilized in the Pirani and Convection Enhanced Pirani gauges The end loss and radiation terms are constant for a wire at constant temperature and they provide a masking signal which largely determines the low pressure limit of these type gauges Optimizing parameters such as length of wire diameter thermal emissivity thermal conductivity and wire temperature these terms can be controlled although not eliminated The Pirani gauges use the wire as one arm of a balanced Wheatstone bridge A bridge amplifier output is related to the energy loss The mechanism of energy transfer between th
69. isabled upon entering Combined mode Previously assigned pressure values are still valid but the set points need to be re enabled before the relays will actuate The Combined mode Analog Output voltage is only active while in Combined mode The analog output is maintained at O volts when not in Combined mode 8 6 4 Hot Cathode Sensitivity This display allows the user to assign a controller sensitivity value for use with the Hot Cathode sensor readings The value entered is the product of a gas sensitivity times the gauge sensitivity Pressing the INC and DEC buttons modifies the lower display from the current or default Hot Cathode gauge sensitivity value through the range of allowable sensitivity values Valid values range from 0 1 0 2 0 3 0 9 1 2 3 99 See section 10 on Gas Correction and Gauge Sensitivity 959 Hot Cathode Controller 45 8 7 Calibration 8 7 1 Pirani Calibration may be necessary if the vacuum or atmospheric reading of the sensor has drifted or the sensor has been replaced The calibration provided by the 959 controller is designed to improve accuracy of the sensor reading however it does not provide NIST traceable calibration Also this feature is not intended to correct the output of the sensor for different gases There are two types of calibration Factory and User Factory calibration resets the sensor correction back to the factory default values User calibration utilizes the current or assig
70. lange with centering ring containing a screen should be installed see Accessories Page 70 The KF clamp must be tightened properly so the flange contacts the centering ring The flange clamp assembly and gauge tubulation must then be grounded 7 3 Series 315 345 Standard Pirani Sensor Installation 7 3 1 Orienting the Series 315 345 Sensor The Pirani sensor was designed to minimize the effects of convection As a result the indicated pressure changes very little between the horizontal and vertical position and it may be oriented in any position Still the Series 315 345 Pirani sensor exhibits slight convection characteristics near atmosphere Therefore the best accuracy can be achieved above 30 Torr by operating the sensor with it oriented vertically and the port facing down 7 3 2 Connecting the Series 315 345 Sensor 7 3 2 1 Connecting the Series 315 Sensor to the 959 Controller A sensor cable with a standard octal socket see Accessories page 67 is required for operation but is purchased separately from the Pirani System This socket has an integrated polarizing tab The socket has sufficient contact pressure so that strain relief is unnecessary in most applications but when exerting excessive stress on the cable use separate strain relief to prevent damage to the Sensor or Controller Cables are available in standard lengths of 10 25 and 50 feet and in custom lengths up to 500 feet Connect the cable to the rear of the
71. ler 19 DB9 connector on the sensor The two series also have different bakeout temperature ranges with versions of the 315 able to withstand temperatures up to 280 The Convection Pirani sensor design enhances heat transfer at higher pressures through convection This sensor will read continuously from 1x10 to 1000 Torr The 959 supports the Series 317 Convection Pirani sensors The 317 is available in both a CE and a non CE marked version 7 2 2 Locating a Pirani Sensor Locate a Pirani sensor where it can measure chamber or manifold pressure Installing a sensor away from pumps and gas sources gives the most representative values Place a sensor where vibration is minimal 7 2 3 Preventing Contamination in a Pirani Sensor Locate and orient a Pirani sensor to avoid contamination which might affect the sensor s calibration For example if installed directly above a roughing pump in the system oil vapor could contaminate the tube s filament wire and cause the calibration to shift Whenever possible install a Pirani sensor with the vacuum port facing downward to help prevent particulates and liquids entering it Using a screen or porous filter at the port can also be helpful If the gauge has a KF type flange try a HPS Products seal and centering ring assembly with a screen see Accessories page 70 7 2 4 Cleaning the Pirani Sensor Roughing pump oils and other fluids condensing or decomposing on the filament can contaminate
72. ned pressure values as correction factors applied against subsequent readings When user calibration is in effect for either vacuum or atmosphere a U is displayed on the LCD near the Pirani pressure readout 8 7 2 Vacuum Calibration The user places the sensor into a chamber of low pressure 10 Torr decade for a Convection Enhanced Pirani and 10 Torr decade for the standard Pirani and instructs the controller to do a pressure measurement The measurement value is used to calculate a correction factor that is applied against subsequent pressure readings The vacuum calibration value is treated as a graduated offset from the raw data There is an upper limit to the calibration value If the pressure read by the sensor during calibration is greater than this limit the calibration is not allowed The user must lower the pressure in the chamber before the sensor can be calibrated The user requests a user vacuum calibration either with an ASCII command or via the Front Panel switches 8 7 3 Atmospheric Calibration Atmospheric Calibration requires the Controller be given a pressure value that the user chooses to represent atmospheric pressure The Pirani module uses this pressure to calculate a correction ratio that is applied against subsequent pressure readings There is a lower limit to the atmospheric calibration If the user selected pressure calibration value is below this limit the user must raise the desired pressure value before a
73. nnector good sensor sensor with broken filament 7 4 Series 317 Convection Enhanced Pirani Sensor Installation 7 4 1 Orienting the Series 317 Sensor When measuring pressures greater than 1 Torr the Series 317 sensor must be mounted with the tube axis horizontal Measurements below 1 Torr are unaffected by position but readings will be incorrect at higher pressures These readings could result in under or overpressure damaging equipment or injuring personnel The sensor is calibrated at the factory in this position As with any gauge mount the sensor with the vacuum port facing downward to help prevent particulates and liquids entering it 7 4 2 Connecting the Series 317 Sensor 7 4 2 1 Connecting the Series 317 Sensor to the 959 Controller A sensor cable with 9 pin D sub connectors see Accessories page 70 is required for operation but is purchased separately from the 959 system 959 Hot Cathode Controller 23 When exerting excessive stress on the cable use separate strain relief to prevent damage to the Sensor or Controller Cables are available in standard lengths of 10 25 50 and in custom lengths up to 500 feet Connect the cable to the rear of the Controller at the Gauge port Tighten the connector jackscrews into the mating screw locks to ensure proper electrical connection and to prevent stress on the connectors N Turn off the Controller before connecting or disconnecting the cable from the Sensor or Contr
74. nt Pressure is indicated during degas but the reading is very inaccurate and is not intended to be a pressure measurement but to indicate when the sensor has been adequately degassed When the pressue stops changing or is changing very slowly further degassing will be of little benefit and dega should be terminated The degas timer terminates the degas operation after a specified amount of time 3 to 30 minutes Refer to section 8 11 6 The degas operation may shorten filament life so it is recommended that degas only be used when necessary 8 5 Set Point Operation 8 5 1 Relay Set Point Operation Two relay set points are available for applications requiring pressure process control The set point pressure range for the Hot Cathode is 5 x 1019 Torr through 9 5 x 10 Torr If a Pirani module is installed the set point range extends to 9 5 x 10 Torr or 9 5 x 10 Torr depending upon the type of Pirani sensor in use Convection Enhanced or Standard Set point pressures are automatically assigned to the appropriate sensor When both sensors are present and the set point pressure is within the measurement overlap range 10 torr to 10 Torr the user is given the option of selecting the sensor that detects the set point pressure The SPDT relay signals are available on the back panel Accessory connector See section 7 6 for the connector pin outs The relays are energized when the measured pressure falls below the set point pressure When
75. of each new message This can be particularly useful in noisy environments where process operations may occasionally cross couple spurious signals onto the communications lines The 959 Controller implements this addressed RS232 protocol The protocol is essentially the same as in RS485 except the physical connection is point to point and the host computer is only ever communicating with one device 13 3 1 Message Syntax In an addressed RS232 environment the basic command query message format from the host is as follows lt attention character gt lt device address gt lt message gt lt parameter gt lt terminator gt In an addressed RS232 environment the basic response message from the 959 is as follows lt attention character gt lt message gt lt terminator gt 13 3 2 Field Definitions The message field is the actual command or query information being sent to the device The parameter field is the optional parameter data for the message The terminator field signals the end of the message These 3 fields are the same as described above The attention character field announces the beginning of a new message The device address field identifies the device the message is intended for 13 3 2 1 Attention Character A single attention character is required for the controller to detect the start of a message The attention character is 40h The 959 will accept an unlimited number of sequential attention characters As ea
76. of the associated data required to complete the message This information comprises the parameter field in the message Parameters may be ASCII numerals representing numbers or ASCII alpha numeric characters representing a phrase Limits The allowable limits of the parameter values If the parameters are numeric then the minimum and maximum values are listed If the parameters are phrases then the set of allowable phrases are listed Reset Value If the message represents a setup or control value the factory default value for the message is specified here Query Response If the message supports a query format the controller s allowable responses are listed here Related keywords A list of related commands or queries for reference Examples Example uses of the command or query are listed here A4 959 Hot Cathode Controller In the following command definitions words in boldface type indicate exact ASCII text messages parameters or responses issued between the host and the controller Each of the command examples has an assumed ACK FF response To enhance readability that response is not shown Cg The actual terminator in the following examples is FF To enhance readability only the semicolon is depicted 13 6 Setup Messages The Setup commands allow the user to configure various aspects the controller s operation 13 6 1 Set Point Value SPx Description Keyword Type Parameter
77. of the product repaired or replaced by MKS under this warranty are warranted only for the remaining unexpired part of its one 1 year original warranty period After expiration of the applicable warranty period the PURCHASER shall be charged MKS current prices for parts and labor plus any transportation for any repairs or replacement ALL EXPRESS AND IMPLIED WARRANTIES INCLUDING THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE LIMITED TO THE WARRANTY PERIOD NO WARRANTIES EXPRESS OR IMPLIED WILL APPLY AFTER THIS PERIOD Warranty Service The obligations of MKS under this warranty shall be at its option 1 to repair replace or adjust the product so that it meets applicable product specifications published by MKS or 2 to refund the purchase price What Is Not Covered The product is subject to above terms only if located in the country of the seller from whom the product was purchased The above warranties do not apply to l Damages or malfunctions due to failure to provide reasonable and necessary maintenance in accordance with MKS operating instructions Il Damages or malfunctions due to chemical or electrolytic influences or use of the product in working environments outside the specification Fuses all expendable items which by their nature or limited lifetime may function for a year lf such items fail to give reasonable service for a reasonable period of time within the warran
78. oller In applications for which special cables are required i e where the connection must be routed through restrictive barriers or through a conduit customize the cable using the figure shown below For short lengths any cable wired straight through e g pin 1 to pin 1 will suffice For longer lengths a cable with three twisted pairs and an overall shield is recommended Use a D sub connector with jackscrews for strain relief in all applications 7 4 3 Testing the Series 317 Sensor The most common cause of sensor failure is a broken filament This can be caused by physical abuse or sudden venting of the sensor s inlet port to atmosphere Disconnect cable 1 With a 1 Phillips head screwdriver remove the two screws to separate the connector electronics subassembly from the body of the sensor as shown below 2 Check the resistance on the sensor s pins listed in the first column on the table below Use an ohmmeter with less than 5 mA of current The resistance readings of a normal sensor measured at atmospheric pressure and at room temperature 20 C are listed in the middle column If any resistances are greatly out of these bounds the sensor should be replaced F1 to F2 18 to 30 F1 to Sensor body gt 20 x 10 F2 to Sensor body TC1 to Tc2 24 to 36 TC1 to Sensor port gt 20 x 10 24 959 Hot Cathode Controller 7 5 Low Power Nude Tube and Mini BA Hot Cathode Sensor Installation 7 5 1 Locating a Hot Cathod
79. on seal option 4VCR F 1 4 8 VCR F 1 2 1 1 8 CF rotatable 2 3 4 CF rotatable Y 15 0 mm x 30 0 mm tubulation Y 18 0 mm x 30 0 mm tubulation 3148 5 IOP iro 1140 2 11072 1 INS Dal Od RO mban 1 5 OLON FSE WOM Pra 5 0 x 10 to 9 5 x 10 Torr 6 5 x 10 to 1 2 x 10 mbar 6 5 x 10 to 1 2 x 10 Pa 1 0 x 1055 to 1 0 x 10 Torr 1128 z 310 1 18100 Bayard Alpert W or Y 203 9 Torr 20 20 W max 180 VDC 30 VDC 3 VDC 1 8A 3 x 10 Torr Air nitrogen Any 304 SS Inconel X 750 glass tungsten platinum nickel either yttria coated iridium or tungsten 8 959 Hot Cathode Controller Operating Temperature Range Bakeout Temperature Typical Weight with CF Flange Vacuum connection 3 5 Mini BA Pressure range Set Point Range Protect Set Point Range Sensor Type Filament Type Sensitivity Degas Power Operating voltages Grid Filament bias Filament X ray limit Calibration Gas Installation Orientation Materials Exposed to Vacuum Operating Temperature Range 0 to 50 C 32 to 122 60 C with cable attached 300 C max with CF cable removed 150 C max with KF and Viton Seal cable removed 0 9 Ib 0 4 kg 2 3 4 CF non rotatable NW 40 KF 1 0 x 10 to 1 0 x 10 Torr 1 3x 107 to 1 3 x 10 mbar 1 3x 10to 1 3 x 10 Pa 5 0 x 10 to 9 5 x 10 Torr 6 5 x 10 to 1 2 x 10 mbar 6 5 x 10 to 1 2 x 10 Pa 1 0 x 10
80. one Query Response Controller dependent ASCII alpha numeric text Reset Response Controller dependent ASCII alpha numeric text Related Keywords FVx Examples Query HVP Response 100 959 Hot Cathode Controller A 31 959 Hot Cathode Controller Notes 959 14 Appendix Serial Communication Error Codes 14 1 Error Codes The 959 Controller may generate the following error codes during serial communications with a host computer These error codes other then 0 would appear in a NAK responses from the Controller 0 No Error 1 No sensor attached Power down the Controller and attach the cable and sensor 3 The Pirani pressure measurement hardware returns a reading that is above the measure range of the sensor HI 4 The Pirani pressure measurement hardware returned a reading that is below the measure range of the sensor LOW 5 Invalid vacuum calibration pressure The user must lower the vacuum chamber s pressure before a valid vacuum calibration can occur 6 Invalid atmospheric calibration pressure The user must increase the pressure parameter before a valid atmospheric calibration can occur 7 The Pirani pressure measurement hardware returns a reading that indicates the Pirani sensor has a broken filament 22 Hot Cathode filament over power The filament is drawing too much current The user should switch to the alternate filament 23 The Hot Cathode
81. r into a standard 1 4 DIN cutout in a panel up to 3 16 inch thick A dimensioned illustration shows the required cutout Leave at least 3 inches of clearance Panel mounting system with a 1 4 DIN cutout behind the Controller to accommodate the connectors and cables Mount the Controller into the panel by slipping it through the cutout from the front Slide the panel mounting brackets into the slots on either side of the Controller from the rear and secure them with the thumbscrews provided Adhesive backed rubber feet for bench top use are provided with the mounting kit Remove the adhesive backing from each foot and apply one to each corner of the aluminum bottom surface 7 2 Pirani Sensor Installation 7 2 1 General Pirani Information Two types of Pirani sensors can be used with the Series 959 Controller standard and Convection Enhanced In both measurement is based on thermal conductivity of the gas The sensors contain a filament maintained at a constant temperature Heat loss from the filament depends on the amount of gas present Additional information on the theory of these gauges is presented in Appendix C The standard Pirani sensor will read continuously from 1x10 to 100 Torr The 959 supports two series of standard Piranis the 315 and the 345 The Series 315 sensor is not CE marked and uses the traditional octal connector interface on the sensor The Series 345 sensor is CE marked and uses a 959 Hot Cathode Control
82. r than the baseline pressure illuminates the amp symbol on the LCD A negative difference i e the leak test value is less than the baseline pressure illuminates the W symbol on the LCD 8 8 2 Resetting the Baseline Pressure While in Leak Test mode the user can press the ZERO key to re zero the basiline reference pressure Detection of this key press updates the leak test sensor s current pressure on the display and resets this pressure s A D value as the baseline A D value Immediately after this key is pressed the leak test value LCD display is Zero Leak testing then resumes using the new baseline reference values 8 8 3 Audible Operation While in Leak Test mode the user can press the AUDIO key to enable or disable an audible leak test beeper When this option is enabled the controller generates a repetitive beeping tone at a frequency that increases or decreases as the leak measurement increases and decreases The beep frequency is based upon the difference between the baseline A D value and the current A D reading The greater the difference the faster the beep Above a maximum difference the beep is on constantly 959 Hot Cathode Controller 49 8 8 4 Exiting Leak Test Mode The user terminates the leak test operation by pressing either the SELECT key or the FUNCTION key Pressing the SELECT key terminates the operation and re displays the leak test sensor selection display on the LCD The Controller remains in Leak Test Mo
83. rani Pressure to Voltage Table 61 8 17 Hot Cathode Curves nn nnen nennen nee renner vennen anana anan 62 9 Maintaining The 959 Hot Cathode Controller 63 9 1 Cleaning the Controller Front 63 9 3 Servicing the Controller nanne nennen aana anana nana anana nne 63 9 3 Replacing the Power FUSE kana 64 10 Using the 959 Hot Cathode Controller with Other Gases 65 9 1 Adjusting System Sensitivity for Another Gas 65 10 1 Relative Sensitivity Table sse 66 11 ACCESSOMES 67 12 ProduciWarranty aana eaaa cross 70 13 Appendix A Serial Communications aana anane ca 1 13 1 Serial Communications Overview Al 13 1 1 Message Format saga a aga naa 1 13 1 2 Message Compatibility nanne wega ga aa 1 13 1 3 Serial Communications Al 13 2 Message Mii as A2 13 2 1 Command Syntax sss A2 13 2 2 Query SYNTAX uin apu Ree es A2 13 2 3 Response Syntax isa aane ana aana ia aaa aka ag a akan aaa gaga aaa agi A2 13 3 Addressed RS232 nanne enneeren vaneen rennvenennenenvansee reen A3 13 31 Message Syria ai 13 3 2 Field Definition
84. re located in the same pressure chamber It provides a smooth and continuous pressure measurement from atmosphere to high vacuum When the user enables combined pressure a single pressure display on the LCD represents the combined pressure reading and generates the corresponding smoothed DAC output at the Combined Analog Output signal on the Accessory connector The smoothing algorithm uses weighted values more Pirani pressure influence towards 1 0 x 10 Torr amp more Hot Cathode pressure influence towards 1 0 x 10 Torr The algorithm only modifies pressure readings where the two sensor modules measurement is used Below 1 0 x 10 Torr only the Hot Cathode measurement is used Above 1 0 x 10 Torr only in Pirani measurement issued This display allows the user to enable or disable the combined Pressure 44 959 Hot Cathode Controller Measurement mode The lower read out depicts the current value Pressing the INC and DEC button toggles the bottom display between ON and OFF Pressing the SELECT key advances the display to the next item in the menu list 8 6 3 Combined Mode Constraints The controller can only be put into Combined mode when both sensors Hot Cathode and Pirani are installed and operational When in Combined mode the Pirani functions as a control sensor and turns the Hot Cathode on and off based on the Pirani s pressure reading The Combined mode control set point is not adjustable Relay Set Points are d
85. rientation Materials Exposed to Vacuum Repeatability Internal Volume Operating Temperature Range Maximum Bakeout Temperature 0 to 50 32 to 122 F 50 122 F 1 3 in 34 mm 4 4 in 112 mm 0 5 Ib 0 2 kg NW 16 KF NW 25 KF 1 8 NPT M with 1 2 compression seal option 8 VCR F 1 2 1 1 3 CF non rotatable 2 3 4 CF non rotatable 15 0 mm x 30 0 mm tubulation Y 18 0 mm x 30 0 mm tubulation 1 0 x 10 to 1 0 x 10 Torr E SD OH Sa NO 115 5 DA ko 31 59 5 2 0 x 10 to 9 5 x 10 Torr 2 6 x 10 to 1 2x 10 mbar 2 6 x 101 to 1 2 x 10 Pa 10 10 101 0 10 Tor WENO 0 Us WOE moar US Pl tie 118 DO AP Air nitrogen Horizontal 304 Stainless steel platinum glass nickel 5 of indicated pressure T const 2 0 in 33 0 cm maximum 0 to 50 C 32 to 122 F 150 C 302 F 100 C 212 F shielded without cable connector electronics subassembly and Controller 959 Hot Cathode Controller 7 Diameter Length Typical Weight with KF Flange Vacuum Connection 3 4 Low Power Nude Tube Pressure range Set Point Range Protect Set Point Range Sensor Type Filament Type Sensitivity Degas Power Operating voltages Grid Filament bias Filament X ray limit Calibration Gas Installation Orientation Materials Exposed to Vacuum 1 6 41 mm 4 4 in 112 mm 0 5 Ib 0 2 kg NW 16 KF NW 25 KF 1 8 NPT M with 1 2 compressi
86. s dependent upon the sensor modules installed in the controller Set Point 1 and Set Point 2 are completely separate This display depicts the current set point name and value Pressing the INC and DEC buttons modifies the bottom display through the range of pressures available to the controller based on the modules present until the maximum or minimum values are reached Pressing the INC and DEC keys simultaneously resets the set point value back to the factory default value 5 0 x 10 Torr After the user has assigned the set point value pressing the SELECT button brings up the next configurable set point parameter 8 5 7 Set Point 2 Enable This display allows the user to enable Set Point 2 operation Additionally depending upon the pressure value assigned to the set point the user may also need to assign the set point to a specific sensor That is only when the selected sensor detects the pressure assigned to Set Point 2 will the relay energize This aspect of the display is conditional in that the user only needs to associate a set point with a specific sensor under certain operational conditions When these conditions are not present the display operation only allows the user to enable or disable Set Point operation Turning a set point off maintains the assigned value in memory but disables its operation The display depicts the current state of the set point operation enabled ON disabled OFF Pressing the INC and DEC b
87. s nosiris a a aga dan agek kaa 13 3 2 1 Attention Character 13 3 2 2 Device Address ccooccccccononconooonoononnnonnconccnncnnncnnacanccnnn A3 13 4 Message A4 13 5 ASCII Command Set Definition A4 13 6 Setup Messages oocccocncccccnoconcnnnncccnnnancncnann cnn canon apaa cana nnne nnne A5 13 6 1 Set Point Value SPX ss aaa aa aga NANA NGESOK KANAN n 5 13 6 2 Control Set Point Value A6 13 6 3 Protect Pressure PRO A7 13 6 4 Gauge Correction asana sayana A8 13 6 5 Atmospheric Calibration ATM A9 12 6 6 Vacuum Calibration VAC A10 13 6 7 Time to Degas TD nne Ng ANANA A11 13 6 8 Front Panel Lock FPL 12 13 6 9 Factory Default FD nnee ennen neee A13 13 7 Control Messages nnnnnnnnnn ennen nn naas a naa ninang A14 13 7 1 Active Filament A14 13 7 2 Filament Power FP A15 18 7 8 Degas Power er e enti ad vega vaat A16 13 7 4 Combined Pressure Measurement CMB A17 13 7 5 Set Point Enable ENX
88. seline Pressure 49 8 8 3 Audible Operation nnn neneeneneennee aana anana nana nenen 49 8 8 4 Exiting Leak Test Mode nnee NAN aana Kn 50 8 8 5 Leak Test Constraints 50 8 8 6 Using the Series 959 as a Leak Detector 50 8 9 Leak Test Displays 2e e em en 53 8 9 1 Leak Sensor Assignment sss 53 8 9 2 Pirani Sensor Leak Test Operation 53 8 9 3 Hot Cathode Sensor Leak Test Operation 54 8 10 Status Readouts siccis aaia aaa aaa a a aa 55 8 101 Under Pressure aa gah 55 8 10 2 Over Pressure a sasananing a nana an aga NGE KENA as 55 8 10 3 LOW EMISSION ist iue ee BENG lilas 56 8 11 Miscellaneous Displays nennen eenen eee gan Aka ya gaga daha 57 8 11 1 LCD Display Test enne 57 8 11 2 Factory Reset aaa aa aan NA ana AANE a Ba AAK GN KA AA AA ana aa 58 9 11 4 Front Panel LOEK a 58 8 12 Buffered Analog Output 59 8 13 Standard Pirani Pressure to Voltage Curve 60 8 14 Standard Pirani Pressure to Voltage Table 60 8 15 Convection Enhanced Pirani Pressure to Voltage Curve 61 8 16 Convection Enhanced Pi
89. sensor has detected a low emission current and automatically removed filament power 24 The Hot Cathode sensor has detected a pressure above it s protect pressure threshold and automatically removed filament power 25 The Hot Cathode pressure measurement hardware returned a reading that is below the measure range of the sensor LOW B 2 959 Hot Cathode 154 Internal 12 communications failure Contact Factory 161 ASCII Message to Controller missing address field 163 ASCII Message to Controller missing terminator field 1 F 165 ACSIl Message field contains too many characters Check syntax of command 169 ASCII Message contains invalid argument value Review command parameter limitations 171 ASCII Message contains invalid real value Review command parameter limitations 174 Controller can not accept any set up commands in its current mode of operation The Controller can only accept set up commands when it is in Pressure Measurement mode 959 Hot Cathode B 3 184 The Controller is in an operational mode that does not allow use of the Control Set Point The Controller may be in Combined mode or the Pirani module may not be present 190 The Hot Cathode module is inactive The user attempted to read the Hot Cathode s sensor pressure without filament power The user attempted to activate degas without first turning on the filament power 193 The user attempted to assign a Set Point to a sensor that
90. ser to assign a pressure value to Set Point 1 Each time this menu is entered the current default Set Point 1 value is displayed A value of 5 0x10 Torr is the factory default value After an assignment by the user that assignment becomes the default set point value The pressure range available for the set point is dependent upon the sensor modules installed in the controller Typically set points are independent of a particular sensor that is the user selects a pressure and the controller determines the sensor to be used to detect that pressure This display comes up depicting the current set point name and value Pressing the INC and DEC buttons modifies the bottom display through the range of pressures available to the controller based on the modules present until the maximum or minimum values are reached Pressing the INC and DEC keys simultaneously resets the set point value back to the factory default value 5 0 x 10719 Torr After the user has assigned the set point value pressing the SELECT button brings up the next configurable set point parameter 8 5 5 Set Point 1 Enable This display allows the user to enable Set Point 1 operation Additionally depending upon the pressure value assigned to the set point the user may also need to assign the set point to a specific sensor That is only when the selected sensor detects the pressure assigned to Set Point 1 will the relay energize This aspect of the display is conditional in th
91. ssion current which increases the minimum signal available for measurement 959 Hot Cathode C3 Notes C4 959 Hot Cathode
92. surfaces of the packing material for shipping damage Please be sure that your Series 959 package contains these items 1 Series 959 Controller 1 female 15 pin subminiature D Accessory connector kit 1 10 foot power cord 1 HPS Products Series 959 Hot Cathode Controller User Manual A complete Series 959 System includes a Hot Cathode sensor and its connecting cable and optionally a Pirani sensor and cable all of which are sold separately Please refer to page 70 for necessary ordering information sa items are missing from the package call HPS Products Customer Service at 1 303 449 9861 or 1 800 345 1967 Inspect the 959 System for visible evidence of damage If it has been damaged in shipping notify the carrier immediately Keep all shipping materials and packaging for claim verification Do not return the product to HPS Products 959 Hot Cathode Controller 1 2 Safety Information 2 1 Symbols Used in this Manual The first two symbols below that may be located on your Series 959 identify critical safety concerns They are used throughout this manual to further define the safety concerns associated with the product The last two symbols identify other information in this manual that is essential or useful in achieving optimal performance from the 959 CAUTION Refer to manual Failure to read message could result in personal injury or serious damage to the equipment or both CAUTION
93. system gas Helium or argon gas are suitable for probing a system pumping air or nitrogen The probing should be done slowly and methodically with a small amount of search gas Flooding the leak with gas or moving the gas source quickly past the leak can confuse the search since system time lags may be significant While probing the suspect components observe the numerical display The largest value of the numerical display indicates that the search gas is nearest the leak location Once the leak location is determined repeat the test to confirm As with any leak testing many factors can influence the sensitivity of the test These factors include system volume system pressure search gas type of vacuum pump location of the gauge location of the pump and size of tubulation in the system Reducing the search area by minimizing the chamber volume will increase the efficiency of the test Placement of the gauge and the pump in relation to the leak can also be a major factor in optimizing the sensitivity of the leak detection Placing the pump away from the suspected leak source and placing the gauge between the leak and the pump will reduce the gauge response time allowing most accurate pinpointing of the leak location Tubulation between the suspected leak and the gauge tube should be as short and wide as possible to minimize the time required for the search gas to reach the gauge The Series 959 LEAK TEST mode is sensitive to any gas either with
94. t 3 Degas Power This momentary switch toggles degaspower to the gauge 4 Function Pressing this key cycles through a repeating set of controller functions Each controller function has a series of menus that are selected by pressing the Select key The Function key supports a hold operation holding the key down will automatically cycle through the set of controller functions Releasing the key stops the menu at the current function 34 959 Hot Cathode Controller Select Pressing this key cycles through a repeating set of menu items Each set of menus is unique for the particular Function key setting currently selected The Select key supports a hold Operation holding the key down will automatically cycle through the menu items appropriate for the current function Releasing the key stops the menu at the current item Increment Pressing the increment adjusts the currently selected menu item by 1 positive measurement unit The units are unique to the type of value being adjusted The Increment key supports a hold operation holding the key down will automatically increment the selected value The rate of automatic increment increases the longer the INC key is pressed The Increment key has a special definition when the controller is operation in the Leak Test Function mode In this case the Increment key toggles between enabling and disabling the audio operation during a Leak Test Decrement Pressing the decrement adjus
95. t pressures until the maximum or minimum values are reached Pressing the INC and DEC keys simultaneously resets the set point value back to the factory default value of 1 0 x 10 Torr This Display is only visible if Both sensor modules present O The unit is not in Combined mode 8 5 11 Control Set Point Enable This display allows the user to enable Control Set Point operation Turning the Control Set Point off maintains the assigned value in memory but disables its operation The display depicts the current state of the Control Set Point operation enabled ON disabled OFF Pressing the INC and DEC buttons toggles the lower readout between ON and OFF 42 959 Hot Cathode Controller 8 5 12 Protect Set Point Operation The Protect Set Point is the pressure value that automatically turns off the Hot Cathode s filament power The Protect Set Point prevents damage to the Hot Cathode sensor from exposure to high pressure The Protect Set Point can range from 1 0 x 10 Torr through 1 0 x 10 Torr The default Protect Set Point value is 1 0 x 10 Torr The Protect Set Point cannot be disabled it is always active Each Hot Cathode pressure reading is tested against the protect value and filament power is removed whenever a pressure reading is greater than the protect value When the Protect Set Point has removed filament power it can only be reapplied via the Front Panel switch or the filament power ASCII command T
96. the sensor This changes the emissivities of the filament which in turn causes the calibration to change especially at low pressure gt It is not advisable to clean the sensor Trying to clean it may either deform or break the filament A deformed filament would then cause additional error from a shift in the sensor s output Replace the sensor if it becomes contaminated see Spare Parts and Accessories page 67 7 2 5 Connecting a Pirani Sensor to a Vacuum Chamber To fit a NW 16 KF flanged port to an NW 10 KF flanged port use an HPS Products adaptive centering ring HPS Products PN 100315821 See Accessories Page 70 20 959 Hot Cathode Controller To install a Sensor fitted with 1 NPT do not use the case for tightening Use the 9 16 hex flats on the sensor s tubulation with a wrench for tightening Wrap about two turns of Teflon seal tape on the threads of the sensor in the direction of the threading to ensure a leak free seal Do not use a compression adaptor quick connect to attach the Sensor to a system in positive pressure applications Positive pressures might blow the Sensor out of a compression adaptor damaging equipment a possibly injuring personnel A solid electrical connection between the Sensor and the grounded vacuum system must be provided to shield the tube filament from external radiation sources In applications where the system may be exposed to large voltage fluctuations a KF type f
97. to install the sensor with the vacuum port facing down whenever possible to keep particulates or liquids from entering the sensor 7 5 5 Connecting a Hot Cathode Sensor 7 5 5 1 Connecting a Hot Cathode Sensor to a Vacuum Chamber The HPS Products sensors are available with either a CF type metal sealed flange KF type flange or a tubulation Attaching gauges with compression type quick connect adaptors on a tubulation is discouraged In the case of over pressure the gauge could be forced out of the adaptor posing a safety hazard Additonally use of an elastomer 959 Hot Cathode Controller 25 seal is discouraged because outgassing and or permeation through the elastomer can cause errors in the pressure measurement sensor with KF flange and an elastomer O ring is suitable only for pressure measurement down to 1 x 107 Torr When inserting a nude type sensor into a port do not bend damage move the electrodes or feed through pins Do not short the elements to one another the chamber or any components inside the chamber If there is any question about clearance for the electrode structure or the possibility of damage to the electrode structure it is recommended that the nude gauge be mounted in a nipple such as HPS Products Part number 100883069 see Accessories Page 70 This nipple includes a screen to help prevent ion coupling Use of this mounting is also recommended to assure the nominal rated sensitivity of the gauge
98. toggle operation Pressing the pair of keys once locks the controller pressing the pair a second time unlocks the controller s Front Panel 58 959 Hot Cathode Controller 8 12 Buffered Analog Output Up to three separate analog outputs are provided the Hot Cathode sensor s analog output the Pirani sensor s analog output and the combined sensors analog output All analog outputs are log linear le the output will be linear on a semilog plot of pressure vs output voltage All output voltages have identical volts decade scales An analog output representing a valid pressure ranges from 1 to 7 5 VDC with the scale being 0 5V per decade Torr 0 volts shall indicate the sensor is off 0 5 volts represents a pressure that is below the useful measurement range of the sensor 8 0 volts will indicate the pressure is above the useful measurement range of the sensor In the table below the X indicates the voltage and useful pressure ranges of the different analog outputs Voltage Hot volts Cathode Pressure Combined Torr Off Under Pressure 1 0E 10 1 0E 9 1 0E 8 1 0E 7 1 0E 6 1 0E 5 1 0E 4 45 X x 1 0E 3 5 os gt lt gt lt xx al o TE ii h Alle T p a ESTE alo ui i i x lt x lt Ee 1 Standard Pirani only 2 Convection Pirani only One equation is used to convert any analog output to pressure Pressure 100712 Torr Where
99. tory default values or not depending on whether a YES or NO is displayed upon the lower readout and return the controller to Pressure Measurement mode 8 11 4 Front Panel Lock The Front Panel Lock key sequence allows the user to enable He LJ 7 1 or disable ihe front panel key press operation When ihe Front Panel is enabled all of the previous described key P li J press operations are functional When the Front Panel is disabled locked all Front Panel key press operations are C L y ignored The LCD continues to display the results of the PIR 1 K 10 controller operation but controller set up and parameter J ll assignments be modified through the Front Panel keys Serial Communications is still functional and the user can utilize this mechanism to modify the controller s setup parameters The purpose of the Front Panel Lock is to allow the controller to be set up into a configuration suitable for a particular operation and then lock it so that the setup parameters can not be modified from the Front Panel The feature offers a measure of security particularly when the controller is being operated remotely by a process controlling host computer When the Front Panel is locked the annuciator FPLOCK is illuminated on the LCD display Activation of the Front Panel Lock requires the simultaneous pressing of both the FUNCTION and INC keys while in Pressure Measurement mode It is a
100. ts the currently selected menu item by 1 negative measurement unit The units are unique to the type of value being adjusted The Decrement key supports a hold operation holding the key down will automatically decrement the selected value The rate of automatic decrement increases the longer the DEC key is pressed The Decrement key has a special definition when the controller is operating in the Leak Test Function mode In this case pressing the Decrement key zeros the leak test pressure measurement That is the current pressure measurement becomes the baseline against which subsequent pressures are compared 959 Hot Cathode Controller 35 8 2 Pressure Measurement Modes The controller supports 3 kinds of pressure measurement 8 2 1 Normal Pressure Measurement In normal Pressure Measurement mode each sensor operates independently and each has its pressure displayed upon the LCD The two sensors are not linked in any way and can exist in completely separate vacuum chambers When the optional Pirani sensor is not present only a single pressure representing the Hot Cathode is displayed upon the LCD 8 2 2 Control Pressure Measurement In control pressure measurement the Pirani sensor controls the Hot Cathode sensor That is the pressure value measured by the Pirani sensor determines whether or not the Hot Cathode sensor is turned on for pressure measurement This mode facilitates process control by utilizing the Pirani sensor as
101. ty period of the product they will at the option of MKS be repaired or replaced IV Defects or damages caused by modifications and repairs effected by the original PURCHASER or third parties not authorized in the manual Condition of Returned Products MKS will not accept for repair replacement or credit any product which is asserted to be defective by the PURCHASER or any product for which paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemical When products are used with toxic chemicals or in an atmosphere that is dangerous to the health of humans or is environmentally unsafe it is the responsibility of the PURCHASER to have the product cleaned by an independent agency skilled and approved in the handling and cleaning of contaminated materials before the product will be accepted by MKS for repair and or replacement In the course of implementing this policy MKS Customer Service Personnel may inquire of the PURCHASER whether the product has been contaminated with or exposed to potentially corrosive reactive harmful or radioactive materials gases or chemicals when the PURCHASER requests a return authorization Not with standing such inquiries it is the responsibility of the PURCHASER to ensure that no products are returned to MKS which have been contaminated in the aforementioned manner Other Rights and Remedies These remedies are
102. ue is displayed on the lower read 959 Hot Cathode Controller 53 8 9 3 Hot Cathode Sensor Leak Test Operation This example 15 for when the leak sensor is the Hot Cathode sensor If the Hot Cathode sensor is off e g the filament is off the sensor display indicates the sensor is off and the leak display read out does not function The count value on the lower readout indicates the sensor pressure relative to the base line pressure The larger the number the greater the difference The up and down arrows indicate whether the difference is positive up or negative down Pressing the SELECT button again while the leak test is operating will halt the leak test operation and cycle back to the first leak test display that allows the user to select the leak test sensor Pressing the FUNCTION button will change the Controller s mode back to Pressure Measurement mode 54 959 Hot Cathode Controller HE 1 X 10 i T 4 8 10 Status Readouts Normal pressure measurement operation of the controller may occasionally generate status information on the 16 segment displays other than the typical numeric pressure measurement values This information reflects internal operational status or errors pressure over or under range conditions or other situations that do not normally occur and so do not have dedicated annunciators Some examples follow 8 10 1 Under Pressure This example demonstrates the LCD displ
103. ure for other gases corresponding to the equivalent degree of ionization of nitrogen This pressure reading is the nitrogen equivalent pressure of the gas and it can be higher or lower than the true gas pressure depending upon the ionization characteristics of the gas at that pressure Air calibration is indistinguishable from nitrogen The Series 959 Controller can be calibrated to directly indicate pressures of gases other than air or nitrogen The relative sensitivity of the gas measured is multiplied by the sensor s nitrogen sensitivity The calibrated sensitivity range is between 0 1 and 99 Torr 9 1 Adjusting System Sensitivity for Another Gas To adjust the sensitivity control for direct pressure reading of gases other than nitrogen calculate the sensitivity S with the following equation S S rX S sensor where Sr is the sensitivity of the gas used relative to nitrogen S sensor is the sensitivity of the sensor used e g 9 Torr for Series 959 System s Hot Cathode Low Power Nude sensor Approximate values of the relative sensitivities for various gases are shown in the table on the next page To determine more precisely the nitrogen equivalent pressure or the direct pressure reading of gases it is necessary to calibrate the Series 959 System with the gas to be measured This calibration requires a direct pressure sensor such as a spinning rotor gauge to act as the calibration standard Note the above procedure is for a Hot Cat
104. uttons toggles the bottom display between ON and OFF Additionally the display may allow the user to assign the set point to a specific sensor In this case pressing the INC and DEC buttons will sequence the lower read out through the options of ON OFF PIR amp Hot Cathode Sensor assignment is only possible if the following conditions are true Both sensor modules are present o Set Point 2 has been assigned a pressure within the sensors overlap range 2 0 x 10 through 9 5 x 10 Torr with Convection Enhanced Pirani Sensor 2 0 x 10 through 9 5 x 10 Torr with Pirani Sensor 40 959 Hot Cathode Controller 8 5 8 Control Set Point Operation The Pirani sensor can be configured to control the Hot Cathode sensor This mode of operation is only available when both sensors are connected and operational The control function is implemented by having the Pirani turn on or off the Hot Cathode s filament power The Control Set Point is the pressure measurement value used by the Pirani to make its decision At pressures above this value the Pirani removes the Hot Cathode s filament power At pressure readings below this value the Pirani turns on filament power The Control Set Point can range from 1 0 x 10 Torr through 1 0 x 10 Torr depending upon which Pirani sensor is attached The Control SP indicator appears on the LCD when the Hot Cathode filament power has been turned off by the Pirani sensor control function The
105. vice identifying commands to either the 689 or the 959 without generating syntactical errors Once identified the host computer can then send only commands appropriate for the specific device s capabilities and in a fashion with which it is already accustomed 13 1 3 Serial Communications The 959 controller supports 3 wire RS232 serial communications The three signals are Transmit data from the host computer to the controller Receive data from the controller to the host computer and signal ground The RS232 communication protocol is point to point with the user s host computer communicating with one device at a time The 959 Controller implements RS232 serial communications using the following protocol 9600 baud 1 Stop Bit No parity These parameters are not user configured 959 Hot Cathode Controller A 1 13 2 Message Syntax In the following descriptions the lt and gt characters are used as message field delimiters They are not part of the commands and serve only to enhance readability 13 2 1 Command Syntax The basic command syntax to the controller from the host is as follows lt command field gt lt optional parameter field gt lt terminator field gt The command field is delimited with an exclamation point Any required parameter data immediately follows the exclamation point The command message is terminated with FF Command Parameter FF or Command FF 13 2 2 Query Syntax The
106. y features are maintained Use proper electrical fittings gt Dangerous voltages are contained within this instrument All electrical fittings and cables must be of the type specified and in good condition All electrical fittings must be properly connected and grounded The Series 959 Controller contains lethal voltages when on gt High voltage is present in the cable and a Hot Cathode Sensor when the Controller is turned on Use the proper power source gt This product is intended to operate from a power source that applies a voltage between the supply conductors or between either of the supply conductors and ground not more than that specified in the manual gt Use the proper fuse Use only a fuse of the correct type voltage rating and current rating as specified for your product 959 Hot Cathode Controller 3 N Do not operate in explosive environments To avoid explosion do not operate this product in an explosive environment unless it has been specifically certified for such operation N Service by qualified personnel only Operating personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified service personnel only N Use the proper power cord Use only a power cord that is in good condition and which meets the input power requirements specified in the manual Use only a detachable cord set with conductors that have a cross s

959 Hot Cathode Controller Operation and

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