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User Manual PZ160E - Physik Instrumente

1. 621 CR Fig 3 E 621 CR Front Panel www pi ws E 621 CR PZ160E Release 2 3 0 Page 15 Operation www pi ws Piezo Nano Positioning PI Power LED green Permanent glow indicates that the E 621 is powered on Overflow LED yellow Overflow signal indicates power amplifier is so near the end of its range that it is no longer able to follow input changes properly piezo voltage output outside of 30 V to 130 V range If this LED glows in closed loop operation servo ON a zero point adjustment is necessary Follow the instructions for zero point adjustment given in Section 4 1 1 on p 27 To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range see ANALOG INPUT On Target LED green On target signal from E 802 servo control submodule indicates distance from target less than 0 19 of range ANALOG INPUT SMB coaxial GND on outer line Usage of this input line depends on the mode settings made with the Settings DIP switches see below Analog mode ANALOG INPUT is used as control input voltage which gives the target either as voltage or position depending on the servo mode see below The input signal should always be in the range of 2 to 12 V Note that excursions to 3 or 13 V are possible but may cause overflow especially with servo on and reduce actuator lifetime see Lifetime of PICMA Actuators on p 52 for details The control inp
2. rnrennrrnnnnrnrrnnnnnnrrrrnnnnnn 27 412 Open Loop Sensor Range Adjustment rarsrrrnnnrvvrvnnnrvvrnnennr 28 413 Servo Control Static Gain Calibration oorssnnnrrrnrenrrrrrnnnnnn 30 414 Second Order Polynomial Linearization ILS cee 32 42 Servo Control Dynamic Characteristics rrrrrrrrrnnrnrrrrrnnnnrrnr 33 Electronics Details 35 5 1 E 621 CR Block Diegr msasarmanaasunsndlamnib ovune 35 52 Components and Adjustment Elements cece 36 521 JUMPETS sientan aedetevehizd ga nada ARa 37 522 SWICK OS annie dekade 38 523 Potentiometers isso ore neiaa ea ie aaae aaa 39 5 3 E 802 Position Servo Control Board rvrvnrrrnrrrrrvrnrrrnrrrnnrennn 40 Troubleshooting 41 Contents Customer Service 45 Old Equipment Disposal 46 Technical Data 47 91 Specifications rnern arena E E a aaa 47 92 Frequency Response Diagram rnrnrnnnnnnnvrvrnnnnnnnnnnnnrnnnnnnnnnnne 49 93 Pin Assignments sausen 50 93 1 32 Pin Main Connector mrrrnrrrrrnnrnrrrrrrnnrrrrnnrrnrrrrrnnrrnrnnnnenern 50 932 PZT and Sensor Connector rrnnrervrrrrnnrrrrrnrrrrrrrrnnrrrrrnnernenn 51 Appendix 52 10 1 Lifetime of PICMA Actuators rrrnrrnrrnrnrnnnnnnnnnrnnernnnrnnnrnnrnn 52 Piezo Nano Positioning PI Introduction 1 Introduction 1 1 Hardware Overview The E 621 CR amplifier controller is designed as a EURO board plug in module which can be mounted in a 9 5 desktop chassis E 501 621 or
3. inductive loads E 625s can be used for both static and dynamic applications E 621 CRs can be operated in closed loop mode using capacitive position sensors Appropriate sensors are provided by PI and integrated in the mechanics according to the mechanics product specifications Other sensors may be used as position sensors only with permission of PI Observe the safety precautions given in this User Manual E 621 CRs meet the following minimum specifications for operation m Indoor use only m Altitude up to 2000 m m Ambient temperature from 5 C to 40 C m Relative humidity up to 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C m Line voltage fluctuations of up to 10 of the line voltage m Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 Any more stringent specifications in the Technical Data table are of course also met www pi ws E 621 CR PZ160E Release 2 3 0 Page 4 Piezo Nano Positioning PI Introduction 1 3 Safety Precautions 4 High Voltage Read This Before Operation E 621 CR LVPZT Controller Amplifier Modules generate voltages up to 130 V for driving LVPZTs The output power may cause serious injury When working with these devices or using PZT products from other manufacturer
4. ON in analog mode when you want to work with a computer generated signal e g from a DAQ board and the analog LabVIEW driver set from PI see step 5 below To give the E 816 computer interface submodule complete control over the servo mode selection DIP switch 3 on the E 621 front panel must be set to open loop operation right When installing the E 621 ina custom chassis for servo mode selection via the E 816 furthermore make sure that pin 28a on the main connector is not grounded i e not connected to pin 14a or 14c Connect the piezo stages actuators to the proper E 621 CR units If your system was calibrated by PI the controllers and stages are not interchangeable Respect the assignment given by the serial numbers marked on the calibration label of the controller Connect a suitable signal source to the ANALOG INPUT SMB socket Depending on the control mode selection this input signal is either used as control input in analog mode or as trigger signal for wave table output and triggered motion in computer controlled mode See Front Panel Elements on p 15 for signal details In analog mode the control input voltage can also be a computer generated analog signal e g from a DAQ board You can use the PI LabVIEW Analog Driver set provided on the included E 816 CD to generate that analog signal Install that driver set by running Setup on the E 816 CD See the driver documentation on the E 816 CD fo
5. PI frequency in this mode open loop via servo off signal can cause the piezo output voltage to change by as much as 5 To deactivate the notch filter and slew rate limiter use jumper X4 in position 2 3 to remove the E 802 from the circuit entirely see block diagram below www pi ws E 621 CR PZ160E Release 2 3 0 Page 34 Piezo Nano Positioning PI Electronics Details 5 Electronics Details 5 1 E 621 CR Block Diagram Sensor Polarity Jp107 I EG 1 Gain 1 5 I I PZT R143 2 Sensor Monitor 22a I I X17 et Senser yh S Neg SMB Con Sensor _o _ j EN Jaat KS S I 1488e I Jp101 Linearization SS Ext H o Jp 106 R144 ILS pre 9 E 802 5X Servo Conrol Submodule i y reps J ig P I Servo Controller on Target 100kHz sine pg 3 3 Sensor Value va D lt Zero R13 es 20a 100kHz Sync Oscillator Volt Range 1 1 24a 3 2 MHz O Jp109 Jp108 A PEE 200kHz a z S1 sw 30FF right open S rc Master Slave Power Supply g 28a 1 aj 125V Servo ON OFF Ext 12a KE I l Ext omel Ref 10 V 725V Boko Fasc 9 Mono ei I DC Offset 420 Controller out Power Amp Pot 1 nise ee l Analog On o i r 3 S1 sw 1 z I PZT ancl i Si Of out ag Wi i sw 4 S1 sw 2 i ICA fave Table Trigger 10c O wr I Analog I SMB nalogin Trigger Sensor Target i 4a amp c Ext i 6 I I
6. i 1 l I Fig 5 Er E 621 CR zo Block E 816 00 Computer Interface Submodule Diagram NOTE Input signals on the analog input line front panel SMB connector and main connector pin 10c and the position of the external DC offset potentiometer if activated are combined in the preamplifier stage Depending on the DIP switch settings the resultant signal will be used either as control input or as digital input for triggering If the signal on the SMB socket is to be used as trigger DC offset must be deactivated or set to 0 www pi ws E 621 CR PZ160E Release 2 3 0 Page 35 Piezo Nano Positioning PI Electronics Details 5 2 Components and Adjustment Elements See also the E 801 and E 802 User Manuals for adjustment elements on those submodules which are not described here 1 R143 lt Gain Ri44 ILS Adjust re cae Sensor Bre 9 sO settings JP 163 2 m s De X17 PZT see E 802 Sensor X4 Bypass E 802 yes no R13 ZERO F le SL DIP 3 LEDs gr ON TARGET ye OFL gr POKER OM Fig 6 E 621 CR viewed from component side with bottom edge on top component locations adjustment elements shown in default settings all except X4 E 802 bypass are accessible without removing cover plate not shown www pi ws E 621 CR PZ160E Release 2 3 0 Page 36 Piezo Nano Positioning PI Electronics Details 5 2 1 Jumpers Jumpers are also shown on the block diagram on p 35 X4 Servo mo
7. sensor Send Read the value at the POS A SENSOR MONITOR SMB where A is the axis identifier socket on the front panel with a or read the value at the voltmeter SENSOR MONITOR SMB socket on the front panel with a voltmeter 7 Correct zero Adjust the Zero potentiometer on the front panel so that the sensor monitor signal is 1 V After successful zero point adjustment the Overflow LED should no longer glow in closed loop operation Permanent glow of this LED in spite of zero point adjustment may indicate hardware failure To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range 4 1 2 Open Loop Sensor Range Adjustment The object of open loop sensor range calibration is to assure that when the piezo is at nominal expansion the sensor will report the nominal expansion position Note that the voltage required to cause the piezo to expand to its nominal value will not be exactly 100 V but somewhere in the 85 105 V range All piezo positioning systems ordered together with a piezo translator are delivered with performance test documents to verify the system performance The system ordered is calibrated in our labs prior to shipment Normally there is no need for the customer to perform a full calibration Only if the piezo the sensor extension cable or the mechanical setup is changed may new calibration be necessary Open loop sensor range adjustment requires an
8. the E 816 furthermore make sure that pin 28a on the main connector is not grounded i e not connected to pin 14a or 146 Switches 1 2 and 4 determine the control mode computer controlled or analog of the E 621 and hence the applicable control sources See Control Modes on p 18 for details Switch Computer Controlled Analog Mode Mode 1 OFF ON 2 ON OFF 4 ON OFF Unpredictable behavior may result if sw 1 2 and 4 are set incompatibly Zero potentiometer Trim pot accessible with small screwdriver for sensor zero point adjustment Readjustment may become necessary with time or if the load is changed Do the adjustment with Servo OFF See Section Open Loop Zero Point Adjustment on p 27 for more details PZT amp SENSOR Sensor input and piezo actuator drive voltage together on a combi sub D socket The drive voltage output is in the range of 30 to 130 V For pinout see p 51 RS 232 Serial connection to host PC Sub D 9 male industry standard RS 232 See the User Manual for E 816 Computer Interface E 621 CR PZ160E Release 2 3 0 Page 17 Piezo Nano Positioning PI Operation and Command Interpreter Submodule PZ116E for more information USB socket Universal Serial Bus USB Mini B m socket for connection to host PC See the User Manual for E 816 Computer Interface and Command Interpreter Submodule PZ116E for more information 3 2 Modes of Operation Cont
9. 0 Piezo Voltage V Fig 12 Interdependency between the mean MTTF of a PICMA actuator and the value of the voltage applied www pi ws E 621 CR PZ160E Release 2 3 0 Page 52 Appendix www pi ws Piezo Nano Positioning PI Lifetime Factor Ar ne VS hh i hi a H Hhh ii h ha d H ia H iia H h i i h iia H des h ferd 60 80 Temperature C Fig 13 Interdependency between the mean MTTF of a PICMA actuator and the ambient temperature Rel Humidity Fig 14 Interdependency between the mean MTTF of a PICMA actuator and the relative humidity Example The simple formula MTTF Ay Ar Af provides a quick estimate of the reliability in hours For example the values for 75 RH Ar 14 100 VDC Ay 75 and 45 C Ar 100 result in an approximate MTTF of 105 000 h i e more than 11 years see markings on the diagrams Read the Tutorial Piezoelectrics in Positioning in the Pl Catalog for detailed information E 621 CR PZ160E Release 2 3 0 Page 53
10. 1 CR PZ160E Release 2 3 0 Page 50 Technical Data Piezo Nano Positioning PI 9 3 2 PZT and Sensor Connector Special sub D X17 carrying both piezo voltage and sensor lines A1 PZT out A2 Sensor probe ID chip not supported FT AGND target and ID GND PZT GND tied to case so o 30 n c Sensor target ARON www pi ws E 621 CR PZ160E Release 2 3 0 Page 51 Appendix Piezo Nano Positioning PI 10 Appendix 10 1 Lifetime of PICMA Actuators The following factors can have an impact on the actuator lifetime and must be considered Applied voltage Temperature Relative humidity The effect of each individual factor on the lifetime can be read off the diagrams shown below The lifetime calculated in hours simply results as the product of all three values read off the diagrams The impact of the applied voltage is particularly important With decreasing voltage the lifetime increases exponentially This must always be taken into consideration in an application The recommended maximum range of the control input voltage for E 621 therefore is 2 to 12 V resulting in a piezo voltage range of 20 to 120 V in open loop operation A control input range of 3 to 13 V is possible results in 30 to 130 V piezo voltage in open loop operation but will reduce the actuator lifetime accordingly Lifetime Factor Au 1 0E 7 vg erre 1 0 E 6 1 0 E 5 1 0 E 4 1 0 E 3 1 0E 2 Feen 1 0 E 1 1 0 E
11. 4 12a Poo konm EIo v t c Porwiper K Pot 10 kOhm GND Ei Pot 10 kOhm GND also Test GND 16a VCC supply 160 VCC supply 18a VCC supply 18c VCC supply 202 100 kHz in out 20c LVDT Sync In 200 kHz Monitor sensor GND for Sensor Test Analog In 2aa 32 Mhz inout 240 Sensor excitation Overflow Sensor inverting input TTL active low 28a Servo ON OFF select 28c Sensor non inverting input 30a GND for RS 232 30c GND for sensor excitation 32a C SCL signal 32c 17C SDA signal 0 V LOW 5 V HIGH Active LOW LOW servo ON default is HIGH Servo is on if pin 28a is connected to pin 14a or 14c GND In this case switching to open loop operation servo OFF is neither possible with DIP switch 3 on the front panel nor with the SVO command via the E 816 computer interface submodule If E 621s are networked outside a single E 50x 621 chassis the SCL and SDA bus lines are limited to a maximum length of 1 m and a maximum capacitance of 400 pF Sync lines are output if S2 set to Master input if S2 set to Slave The respective sync lines of the single master and the slaves are tied together in newer E 50x 621 chassis manufactured after August 2006 On target signal from E 802 submodule indicates distance from target less than 0 19 of range TTL active low Pins 14a and 14c should be connected to a protective ground www pi ws E 62
12. CR PZ160E this document m User Manual for E 816 Computer Interface and Command Interpreter Submodule PZ116E m User Manual for E 802 Servo Control Submodule PZ150E m CD for E 816 interface devices with software and documentation E 816 CD Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in the event the product needs to be shipped elsewhere www pi ws E 621 CR PZ160E Release 2 3 0 Page 8 Quick Start Piezo Nano Positioning PI 2 Quick Start 2 1 Line Power and Fuses This section is only relevant if the E 621 comes installed in an E 500 621 or E 501 621 chassis provided by PI The power connection and the line fuses are located on the rear panel of the E 500 621 or E 501 621 chassis The chassis is equipped with a wide range power supply and with fuses that are admissible for both 115 V and 230 V operation No settings need be changed when connecting the system to a different supply voltage The orientation of the fuse carrier is irrelevant Connect the AC power cord of the E 500 621 or E 501 621 chassis in which the E 621 is installed to the wall socket 100 to 240 VAC To disconnect the system from the supply voltage completely remove the power plug from the wall socket or remove the power cord from the chassis Install the system near the AC outlet and such that the AC power plug can be reached easily Befo
13. In computer controlled mode the axis motion can be commanded by move commands received via interface or from a running macro by trigger input and wave table output Respect the prioritization of the individual sources see the User Manual of the E 816 computer interface submodule for details Check the DIP switch setting on the front panel for the current control mode Front Panel Elements p 15 No control signal applied or signal out of range 3 In analog mode apply an analog control signal to the ANALOG INPUT SMB socket to command the axis motion The signal should always be in the range of 2 to 12 V excursions to 3 or 13 V may cause overflow especially with servo on and reduce actuator lifetime If you generate the analog signal with a DAQ board in a PC running LabVIEW and using PI s LabVIEW Analog Driver Set check the driver and the DAQ board for proper operation E 621 CR PZ160E Release 2 3 0 Page 41 Piezo Nano Positioning PI Troubleshooting Move commands or wave table commands may provoke errors and are ignored Wrong command or wrong syntax gt Check the error code with the ERR command Note that the response to this command contains only the error code of the master unit See the ERR description in the User Manual of the E 816 computer interface submodule for the complete error reference Wrong axis commanded gt Check if the correct axis identifier is used and if the commanded ax
14. Piezo Nano Positioning PI PZ160E User Manual E 621 CR LVPZT Controller Amplifier Module Release 2 3 0 Date 2010 08 13 This document describes the following product s E E 621 CR LVPZT Controller Amplifier Single Channel for Capacitive Sensors With servo control and computer interface and command interpreter submodules as standard Strain gauge and LVDT sensor E 621 versions are described in a separate manual PZ115E Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws I Piezo Nano Positioning PI Declaration of Conformity ccording to DIN EN ISONEC 17050 200501 to DIN EN ISO IEC 17050 2005 01 medl os kg Pl medl os Manufacturer s Auf der R merstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name LVPZT Controller Amplifier Module Model Numbers E 621 Product Options all complies if installed in compatible chassis from PI E 500 621 or E 501 621 with the following European directives 2006 95 EC Low voltage directive LVD 2004 108 EC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 EN 61010 1 April 09 2009 Karlsruhe Germany fear f i Dr Karl Spanne
15. V Verify this with the external gauge and meter To adjust the SENSOR MONITOR output to exactly 10 000 V use the GAIN Fine Adjust potentiometer on the servo submodule E 802 55 To adjust the expansion without changing the SENSOR MONITOR output servo control is on use the gain adjustment potentiometer R143 on the main board see Section 5 2 p 36 for component location 10 Repeat the last steps several times until stable results are obtained This adjustment can only be done accurately for one control mode analog mode or computer controlled mode If you use the unadjusted mode 1 error in the sensor monitor output voltage can be expected www pi ws E 621 CR PZ160E Release 2 3 0 Page 31 Piezo Nano Positioning PI Calibration 4 1 4 Second Order Polynomial Linearization ILS Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers When a module removed from the chassis must be operated use a 32 pin extension connector P 895 00 not included Voltages of up to 130 V can be exposed Do not touch internal conductors The capacitive sensor electronics on the E 621 CR main board includes a trim pot ILS for minimizing second order polynomial non linearity To adjust the ILS proceed as follows 1 Set DIP switches on the f
16. a 19 rack chassis E 500 621 The E 621 CR amplifier controller is designed to drive and control the displacement of a low voltage piezoelectric stage or actuator LVPZT in a system with capacitive sensor position feedback It comes with an E 802 Servo Controller and an E 816 Computer Interface and Command Interpreter installed as standard Networking of E 621 CR s with each other allows controlling up to 12 devices over a single RS 232 or USB computer interface The modules to be networked must be installed in the same chassis if an E 50x 621 chassis is used it must have been manufactured after August 2006 AA DOA JAGGE DD GA AOE gt SLEP ai KMMau y_ni va ow Fig 1 E 621s installed in compatible PI chassis E 500 621 in this example are automatically networked E 621s for use with SGS or LVDT sensors are described in detail in their own manual PZ115E www pi ws E 621 CR PZ160E Release 2 3 0 Page 3 Piezo Nano Positioning PI Introduction 1 2 Prescribed Use The E 621 CR LVPZT Controller Amplifier Module is designed for installation in a suitable chassis e g the E 500 621 or E 501 621 provided by PI Based on its design and realization the E 621 CR LVPZT Controller Amplifier Module is intended to drive capacitive loads in the present case piezoceramic actuators The E 621 CR must not be used for applications other than stated in this manual especially not for driving ohmic resistive or
17. and pin 28a See E 816 User Manual for command descriptions E 621 CR PZ160E Release 2 3 0 Page 20 Piezo Nano Positioning PI Operation Notes Servo control is implemented on a small PCB submodule E 802 55 This submodule is included with the E 621 and comes already installed The block diagram on p 35 answers most questions about how the various elements interact with each other The usage of the E 802 submodule depends on an on board jumper X4 With X4 in position 1 2 the E 802 is connected factory default and the servo mode can then be controlled by DIP switch 3 by pin 28a of the 32 pin main connector or by the E 816 If jumper X4 is in position 2 3 the E 802 submodule is completely bypassed no matter what the other settings Slew rate limitation and notch filtering remain on even when servo mode is switched off They will only be deactivated if the E 802 servo controller submodule is bypassed with X4 in position 2 3 Normally you do not need to change jumper X4 Access to X4 requires removing the E 621 module from the chassis See Components and Adjustment Elements on p 36 for more information Closed loop operation Any control input control voltage on ANALOG INPUT E 816 input like move commands and wave table output is interpreted as target position Based on this target position and on the position feedback of the corresponding sensor channel the servo loop on the E 802 submodule generat
18. ase 2 3 0 PI Nano Positioning USB RS 232 9 pin Sub D connector 9 6 115 2 kBaud 24 bit A D and 20 bit D A resolution Sub D special Sub D special SMB SMB 0 to 10 V for nominal expansion up to 12 channels Wave table with 256 data points external trigger 16 macros External potentiometer not included adds 0 to 10 V to the analog input 5 to 50 C 10 derated over 40 C Deactivation at 75 C 7HP 3U 0 6 kg 12 to 30 V DC stabilized 2A E 501 621 100 to 240 VAC 50 60 Hz 236 x 132 x 296 mm handles Page 48 Piezo Nano Positioning PI Technical Data 9 2 Frequency Response Diagram 160 17 m ry 140 100 80 60 Amplitude V peak peak 40 0 L I E e NN k 10 10 10 10 Frequency Hz Fig 11 E 621 open loop frequency response with various piezo loads Values shown are capacitance in uF www pi ws E 621 CR PZ160E Release 2 3 0 Page 49 Piezo Nano Positioning PI Technical Data 9 3 Pin Assignments 9 3 1 32 Pin Main Connector Because the DIN 41612 connector standard includes types with more pins the 32 pins of the D version all carry even number designations and are in rows a and c Pezalezroupt EE 4a pzrend f re y 6a rs 2s2RTS Gefrszaers EE Target TTL active RS 232 RX Bae KKK RS 232 TX Analog input trigger input use depends on the settings of DIE switches 1 and
19. be used The interface is not configured correctly gt With the RS 232 interface check port and baud rate set via BDR command The serial port on the E 816 is preset to the following parameters 115 200 baud 8 data bits 1 stop bit no parity RTS CTS It is recommended that the host PC have a genuine RS 232 interface on board If the host PC uses a USB to serial adapter instead data loss could occur during communication especially when transferring large amounts of data gt The first time you connect over the USB interface be sure you are logged on the PC as a user having administrator rights After the E 621 CR is powered on a message will appear saying that new hardware has been detected Follow the on screen instructions and insert the E 816 CD The required hardware driver is found in the JUSB Driver directory Controller was power cycled or rebooted gt With USB connections communication can not be maintained after the E 621 CR is power cycled or the E 816 digital operation module is reset The connection must then be closed and reopened Another program is using the interface gt Close the other program Specific software has problems gt See if the system works with some other software e g a terminal or development environment You can for example test the communication by simply starting a terminal program e g PI Terminal and entering IDN Note that multi character commands are transferred as termi
20. bject of servo control static gain adjustment is to assure that the piezo moves to the nominal travel range end position when that position is commanded in servo on mode in analog mode 10 V control input You will need an external measuring device and a 32 pin extension adapter to access the potentiometers mentioned while the unit is in operation P 895 00 not included Since the servo controller uses the sensor signal as a basis the analog sensor zero point and open loop range should be adjusted before the static servo gain is set This procedure can be carried out with the unit in either computer controlled or analog mode If done in analog mode you will also need a highly accurate voltage source and meter Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers When a module removed from the chassis must be operated use a 32 pin extension connector P 895 00 not included Voltages of up to 130 V can be exposed Do not touch internal conductors www pi ws E 621 CR PZ160E Release 2 3 0 Page 30 Calibration CLOSED LOOP SERVO STATIC GAIN f Make adjustment elements accessible Set DIP switches on the front panel for operating mode Power up Set servo ON Check for oscillation Set external gauge to 0 Command a posit
21. d Do not adjust potentiometers unnecessarily and be aware that many adjustment points are interdependent and effect both computer controlled and analog operating modes Reference to the block diagram p 35 can aid in understanding the scope of the various control elements CAUTION E 621 modules are ESD sensitive electrostatic discharge sensitive devices Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static electricity you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws contact the device circuitry Only the DIP switch block S1 and the Zero potentiometer are accessible without removing the E 621 from the chassis NOTE All front panel connections except of the USB lines are duplicated on the 32 pin main connector So you can use that pins instead of the front panel connections See pinout on p 50 for details 4 1 Sensor Connection and Adjustment www pi ws If you inform PI about your application your E 621 CRs will be fully calibrated before being s
22. de notch filter and slew rate bypass 1 2 Factory setting the servo control mode depends on the setting of DIP switch 3 on the E 621 front panel on pin 28a of the 32 pin main connector or on the SVO command settings The slew rate limitation and notch filter are always ON 2 3 E 802 55 submodule with servo control slew rate limitation and notch filter is completely bypassed No other combination of settings or commands can activate it X8 External DC offset potentiometer not included 1 2 activated do not activate without wiring to the 32 pin main connector p 50 2 3 deactivated JP101 JP106 Sensor Measurement Range measurement range extension factor JP103 JP102 Jumper JP101 Position Fig 7 E 621 CR sensor range jumper settings The jumper group is shown as arranged on the main board see component map p 36 Units are delivered set as required for the attached stages With no information on the stage PI usually sets units to 1 0 www pi ws E 621 CR PZ160E Release 2 3 0 Page 37 Electronics Details PI Piezo Nano Positioning JP107 JP109 shift the voltage range of the sensor processing circuitry They must remain as set at the factory i e for use with an E 802 Servo Control submodule positive polarity 0 10 V Position of the Jurrper JPIO7 Polarity of Output Using with PI s position control electronics Using as a position Typical Application defector Special app
23. ers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws contact the device circuitry Before operation is possible the E 621 must be installed in a suitable chassis Required input and output lines must be connected via the 32 pin main connector To do this you can use the included multipoint socket connector 588 For pinout see 32 Pin Main Connector on p 50 www pi ws E 621 CR PZ160E Release 2 3 0 Page 10 Quick Start Piezo Nano Positioning PI CAUTION E 621 is only compatible with E 50x 621 chassis but incompatible with other chassis of PI s E 500 series For sensor synchronization of multiple E 621 CRs the E 50x 621 must have been manufactured after August 2006 NOTE All front panel connections except of the USB lines are duplicated on the 32 pin main connector For a custom or OEM installation consider the following m Networked units must have the I C networking lines connected to each E 621 in parallel pins 32a and 320 The network bus lines are limited to a maximum length of 1 m and a maximum capacitance of 400 pF See Networking on IC Bus on p 22 for details m If the network includes more than one capacitive sensor unit one must be set to sensor master and the rest to sensor slave and they must have their synchr
24. ervo control submodule also has a notch filter which makes it possible to eliminate vibration at the mechanical resonant frequency of the system Dynamic calibration procedures require an oscilloscope a digital storage oscilloscope is recommended frequency generator to output square and sine functions from 1Hz to 1 kHz and an ohmmeter with a range from 0 1 to 100 kQ and depending on the installation a 32 pin extension adapter to allow access to the trim potentiometers while the board is in operation Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers When a module removed from the chassis must be operated use a 32 pin extension connector P 895 00 not included Voltages of up to 130 V can be exposed Do not touch internal conductors The dynamic calibration procedures are described in the User Manual for the E 802 55 servo control submodule execution in analog mode Using the wave table of the E 816 computer interface module it should also be possible to perform them in computer controlled mode without an external frequency generator Note that the notch filter and slew rate limiter are not deactivated by the servo off line Resetting the notch filter www pi ws E 621 CR PZ160E Release 2 3 0 Page 33 Calibration Piezo Nano Positioning
25. es the control value for the piezo output voltage The servo loop thus maintains the axis position Closed loop operation offers both drift free and hysteresis free positioning as well as immunity to load variations PI s standard calibration procedure assures that the piezo actuator reaches its nominal expansion when that position is commanded www pi ws E 621 CR PZ160E Release 2 3 0 Page 21 Operation Piezo Nano Positioning PI Open loop operation Any control input is interpreted as piezo voltage target Open loop operation omits the servo loop on the E 802 submodule and the control input directly controls the piezo output voltage The slew rate limitation and notch filter remain active unless of course jumper X4 is in position 2 3 When servo mode is OFF the system works like a linear amplifier with the piezo operating voltage proportional to the control signal input The sensor electronics works independently and outputs the current piezo position even in open loop mode provided a sensor is properly connected Since there is some variation among different piezos of the same model the voltage required to bring the piezo to its nominal expansion will differ Note Closed loop operation can be activated using a start up macro See the E 816 User Manual for more information 3 3 Networking on IC Bus www pi ws It is possible to command up to twelve E 621 CRs over a single RS 232 or USB interface fro
26. external measuring device with 0 1 um resolution and a 32 pin extension connector P 895 00 not included Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers When a module removed from the chassis must be operated use a 32 pin extension connector P 895 00 not www pi ws E 621 CR PZ160E Release 2 3 0 Page 28 Calibration www pi ws Piezo Nano Positioning PI included Voltages of up to 130 V can be exposed Do not touch internal conductors OPEN LOOP SENSOR RANGE 1 Make adjustment elements accessible 2 Set DIP switches on the front panel for operating mode 3 Power up 4 Set up for servo off operation 5 Exercise the piezo over the nominal expansion range 6 Command OV 7 Check adjust zero point 8 Expand the piezo to its nominal expansion as indicated by external gauge 9 Adjust sensor gain Computer Controlled Mode Remove E 621 from the chassis and connect via P 895 00 extension connector qualified authorized personal only sw1 OFF sw2 ON sw4 ON connect RS 232 or USB cable to this unit After power on establish communications e g with PITerminal Send SVO AO where A is the axis identifier Make sure that servo is not set on with DIP switch 3 or pin 28a Co
27. he top and the rear of the unit and 5 cm 2 inches from each side Never cover the ventilation slots of the chassis as this will impede ventilation CAUTION E 621 modules are ESD sensitive electrostatic discharge sensitive devices Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static electricity you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Make sure that no conductive particles of any kind metallic dust or shavings broken pencil leads loose screws contact the device circuitry CAUTION The E 621 main connector pinout is not compatible with the PI EURO board modules of the E 500 series e g E 509 servo controller or E 50x amplifier CAUTION For successful operation of two or more E 621 CRs their E 500 621 or E 501 621 chassis must have been manufactured after August 2006 Contact PI if you are not sure about the manufacturing date of your chassis www pi ws E 621 CR PZ160E Release 2 3 0 Page 6 Piezo Nano Positioning PI Introduction CAUTION Calibration should only be done after consultation with PI otherwise the internal configuration data
28. he zero point and gain in the sensor circuitry be properly adjusted The zero point is especially likely to need correction In addition to the adjustments on the analog side there are digital offset and range corrections on the E 816 computer interface submodule The A D converter on the E 816 is always precalibrated and its offset and gain values stored in EPROM are not customer modifiable If the hardware adjustments are exact then the Osen sensor offset digital correction factor should be set to 0 and Ksen the sensor coefficient should be set to a value equal to the travel range in um divided by 10 volts the nominal sensor readout electronics output range See the E 816 User Manual for details E 621 CR PZ160E Release 2 3 0 Page 26 Calibration Piezo Nano Positioning PI 4 1 1 Open Loop Zero Point Adjustment www pi ws Zero point calibration has the following goals m Make the full travel range available If the electrical zero point is adjusted properly the full output voltage range of the amplifier can be used This prevents overflow conditions from occurring m Preserve the piezo actuators in the mechanics The point of zero sensor readout should correspond to zero or a small negative output voltage This technique can reduce the average applied voltage without loss of displacement and thereby increase piezo lifetime There might be some small deviation of the electrical zero point caused by thermal drif
29. hipped It is usually not necessary for you to do anything more than adjust the zero point before operating the system E 621 CR PZ160E Release 2 3 0 Page 25 Calibration www pi ws Piezo Nano Positioning PI CAUTION Calibration should only be done after consultation with PI otherwise the internal configuration data may be destroyed by erroneous operation Capacitive position sensors are connected to the PZT amp Sensor front panel connector pinout on p 51 If you wire your own connector and interchange Target and Probe lines the system will still operate but may not attain the specified accuracy The output from the sensor processing circuitry is an analog signal that is directly proportional to the piezo s expansion and is available at SENSOR MONITOR on the front panel and on pin 22a of the 32 pin main connector See the Sensor Synchronization section starting on p 23 and the Capacitive Sensor User Manual for more details As seen in the block diagram p 35 the sensor signal goes through the sensor range settings JP101 JP106 ILS linearization R144 gain R143 and zero adjust R13 and then branches to the SENSOR MONITOR output the computer interface submodule and the servo control submodule The voltage range setting JP108 JP109 must remain as set at the factory Since the servo control and computer interface submodules see copies of the sensor signal it is important that t
30. inout Sensor master slave settings require removing the E 621 modules from the chassis See Fig 9 on p 39 for the location of the S2 Sensor Master Slave switch Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers E 621 CR units delivered in an E 500 621 or E 501 621 chassis manufactured after August 2006 come synchronized One unit is set to the sensor master and all other units are set to slave 3 5 User Electronics and Sensor Monitor Signal If you are connecting your own electronics to the sensor monitor signal make sure it has sufficient input capacitance to eliminate high frequency interference It may be necessary to add a 4 7 nF ceramic NPO or COC type to the input connector Use shielded cable if possible otherwise make sure the lead pair is tightly twisted www pi ws E 621 CR PZ160E Release 2 3 0 Page 23 Piezo Nano Positioning PI Operation User Electronics Sensor Monitor Output Fig 4 Electronics on Sensor Monitor line with required input capacitance www pi ws E 621 CR PZ160E Release 2 3 0 Page 24 Calibration Piezo Nano Positioning PI 4 Calibration If Pl had sufficient knowledge of your application and you ordered your system components together they will be preinstalled and preconfigure
31. ion equal to the end of the nominal travel range Adjust sensor monitor output Adjust piezo expansion Piezo Nano Computer Controlled Mode Remove E 621 from the chassis and connect via P 895 00 extension connector qualified authorized personal only sw1 OFF sw2 ON sw 4 ON connect RS 232 or USB cable to this unit After power on establish communications e g with PITerminal Send SVO A 1 where A is the axis identifier Positioning PI Analog Mode Remove E 621 from the chassis and connect via P 895 00 extension connector qualified authorized personal only sw1 ON sw2 OFF sw4 OFF Set DIP switch 3 ON or connect pin 28a to pin 14a or 14c If the piezo goes into oscillation you will have to perform the dynamic adjustments especially notch filter first Send MOV AO where A is the axis identifier and set external gauge to 0 e g send MOV A 100 where A is the axis identifier The piezo should expand to the nominal expansion and the output on the SENSOR MONITOR SMB socket should be exactly 10 V Verify this with the external gauge and meter Put 0 V analog input on the ANALOG INPUT SMB socket DC offset must be to 0 or OFF X8 2 3 and set external gauge to 0 Using an appropriately accurate source apply 10 0000 V to the analog input The piezo should expand to the nominal expansion and the output on the SENSOR MONITOR SMB socket should be exactly 10
32. is is that of the desired stage axis identifier also required with single axis systems Incorrect configuration gt Check the parameter settings on the E 816 computer interface module with the SPA command The high voltage output of the E 621 CR is deactivated gt If the internal temperature goes out of range 75 C or higher the high voltage output of the E 621 CR will be deactivated In that case the mechanics will no longer move When the internal temperature falls below 60 C the high voltage output is reactivated automatically How to avoid overheating Keep the ambient temperature at a noncritical value Note that the difference between ambient temperature and internal temperature of the E 621 CR normally is about 20 Centigrade 36 Fahrenheit degrees Place the system in a location with adequate ventilation Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side If this is not possible keep the ambient temperature low When using the wave table output it is recommended to reduce the frequency and or the amplitude and or the output duration to avoid overheating www pi ws E 621 CR PZ160E Release 2 3 0 Page 42 Troubleshooting www pi ws Piezo Nano Positioning PI Communication with controller does not work Communication cable is wrong or defective gt Check cable Does it work properly with another device For RS 232 a null modem cable must
33. lication Position of Jumpers JP108 and JP109 Voltage range of output Fig 8 E 621 CR sensor processing output settings 5 2 2 Switches DIP switch block S1 is accessible through the front panel Do not confuse with the S1 damping control on the E 802 submodule described in the E 802 User Manual sw1 left switch ON down Signal on ANALOG IN WTT line used as analog input OFF up Signal on ANALOG INPUT line not used as analog input sw2 ON down Control input from E 816 computer interface submodule used OFF up Control input from E 816 computer interface submodule not used sw3 ON down Servo on OFF up Servo off can be switched on by E 816 via SVO command or by grounding pin 28a of the 32 pin main connector SW4 ON down Signal on ANALOG INPUT line used as trigger for wave table output or triggered motion OFF up Signal on ANALOG INPUT line not used as trigger for wave table output or triggered motion www pi ws E 621 CR PZ160E Release 2 3 0 Page 38 Piezo Nano Positioning PI Electronics Details Unpredictable behavior may result if sw 1 2 and 4 are set incompatibly For admissible combinations see Front Panel Elements on p 15 Switch S2 master slave for capacitive sensor excitation synchronization do not confuse with the S2 mini DIP block on the E 802 submodule described i
34. m a single host PC The E 621 CR connected to the RS 232 or USB link the master relays commands to the other units slaves on the network Responses from the slaves are then relayed by the master back to the PC The modules to be networked must be installed in the same chassis since networked units must have the I C networking lines connected to each E 621 in parallel pins 32a and 32c of the 32 pin main connector The network bus lines are limited to a maximum length of 1 m and a maximum capacitance of 400 pF With multiple E 621 CRs networking requires also sensor synchronization via pins 20a and 24a of the 32 pin main connector see Sensor Synchronization below for details It may be necessary to power cycle the system for proper detection of the master unit i e the E 621 directly connected to the host PC For details regarding networking e g channel name settings see the User Manual of the E 816 computer interface module E 621 CR PZ160E Release 2 3 0 Page 22 Piezo Nano Positioning PI Operation 3 4 Sensor Synchronization On systems with multiple E 621 CRs synchronization of their capacitive sensor units is required The sensor excitation frequency can be provided internally S2 master setting or externally slave Set one unit to the sensor excitation master the rest to slave and make sure all pins 20a and all pins 24a of the 32 pin main connectors are respectively connected together see p 50 for p
35. may be destroyed by erroneous operation CAUTION Thermally stable systems have the best performance For a thermally stable system switch on the E 621 at least one hour before you start working with it CAUTION If the piezo stage starts oscillating humming noise In closed loop operation switch off the servo immediately The load and or the dynamics of operation probably differ too much from the setup for which the system was calibrated In open loop operation stop the motion immediately Do not operate the piezo stage at its resonant frequency even though the notch filter by default is also active in open loop operation Otherwise the piezo stage could be irreparable damaged www pi ws E 621 CR PZ160E Release 2 3 0 Page 7 Piezo Nano Positioning PI Introduction 1 4 Unpacking According to your order the E 621 CR LVPZT Controller Amplifier Module comes separately or installed in an E 500 621 or E 501 621 chassis Unpack the system with care Compare the contents against the items covered by the contract and against the packing list The following items should be included with an E 621 unit m RS 232 null modem cable for PC connection C 815 34 m USB cable USB A m USB Mini B m for PC connection 000014651 m SMB BNC adapter cables E 692 SMB 1 5 m two units m 32 pin multipoint socket connector DIN 416123 for installing the E 621 module in custom electronics 588 m User Manual for E 621
36. mmand voltages from 0 to 100 V e g with SVA command Command a voltage of 0 volts by sending SVA AO where A is the axis identifier Send POS A where A is the axis identifier or read the value at the SENSOR MONITOR SMB socket on the front panel with a voltmeter If necessary adjust the zero point as described in Section 4 1 1 Use a series of commands like SVA A 90 followed by repeated SVR A 1 A is the axis identifier Analog Mode Remove E 621 from the chassis and connect via P 895 00 extension connector qualified authorized personal only sw1 ON sw2 OFF sw 4 OFF Set DIP switch 3 OFF Make sure that servo is not set on with pin 28a or SVO command Apply an analog signal in the range of 0 10 V to ANALOG INPUT DC offset must be 0 or OFF X8 2 3 Put 0 V on ANALOG INPUT Read the value at the SENSOR MONITOR SMB socket on the front panel with a voltmeter If necessary adjust the zero point as described in Section 4 1 1 Increase analog input voltage slowly Adjust the sensor gain potentiometer on the main board see Section 5 2 p 36 for component location so that the value at the SENSOR MONITOR SMB socket on the front panel is 10 V E 621 CR PZ160E Release 2 3 0 Page 29 Piezo Nano Positioning PI Calibration 10 Recheck It may be necessary to repeat the last steps until stable readings are obtained 4 1 3 Servo Control Static Gain Calibration The o
37. mplifier control signal using an analog proportional integral P l algorithm Fig 10 E 802 servo control submodule lower arrow trim pots accessible through slot upper arrow in shield plate For calibration procedures see Servo Control Static Gain Calibration p 30 and Servo Control Dynamic Characteristics p 33 The E 802 submodule is described in detail in a separate user manual www pi ws E 621 CR PZ160E Release 2 3 0 Page 40 Troubleshooting Piezo Nano Positioning PI 6 Troubleshooting www pi ws Stage does not move Cable not connected properly gt Check the connecting cable s Stage or stage cable is defective gt If a working stage of the same type is available exchange the defective stage to test a new combination of E 621 CR and stage Since stage and E 621 CR always form a calibrated system the performance with the new stage will probably be lower than with the original stage If the new stage is to be used permanently and in normal operation a new calibration is required See Calibration on p 25 for details Incorrect control mode of the piezo channel gt The applicable control sources for the axis motion depend on the current control mode analog or computer controlled mode see Control Modes on p 18 for details In analog mode move commands received via interface or from a running macro trigger input and wave table output are ignored and may provoke an error message
38. n the E 802 User Manual in systems with multiple capacitive sensor units One system remains as sensor master the others must be set as slaves and the sync lines of all must be bused together Fig 9 shows switch S2 in the Master position default For the Slave position turn the switch through 90 using a screwdriver Mini DIPs on E 802 Slit for accessing P1 P6 on E 802 Submodule Fig 9 Master Slave switch S2 circled on PCB soldered perpendicular to main board shown in default Master position Mini DIP switches on the E 802 55 Servo Control submodule see the E 802 manual for description 5 2 3 Potentiometers The calibration procedures involve setting a number of trim pots The R13 Zero potentiometer is accessible through a hole in the front panel It is necessary to remove the E 621 CR from the chassis to adjust others like R143 Sensor Gain and R144 ILS adjust which are located on the main board and the servo control adjustments which are on the E 802 submodule www pi ws E 621 CR PZ160E Release 2 3 0 Page 39 Piezo Nano Positioning PI Electronics Details 5 3 E 802 Position Servo Control Board The E 802 is a small plug in PCB that processes the control signal for the amplifier driving the piezoelectric translators Slew rate limitation notch filter and servo control loop are all implemented on the E 802 The servo loop logic compares the control voltage input and the sensor signal to generate the a
39. nated by a LF line feed character and are executed only after the LF is received E 621 CR PZ160E Release 2 3 0 Page 43 Piezo Nano Positioning PI Troubleshooting Unsatisfactory system performance The sensor values are not reliable and the whole system is instable gt Only thermally stable systems can have the best performance For a thermally stable system power on the E 621 CR at least one hour before you start working with it The stage starts to oscillate or shows nonsatisfying settling behaviour gt Your system will be fully calibrated before being shipped But due to load changes in the application some calibration settings may no longer be suitable See Servo Control Dynamic Characteristics on p 33 for details Overflow LED glows The output of the amplifier is being clipped at one of its limits gt Try to adjust the sensor reading window as described in Open Loop Zero Point Adjustment on p 27 a small deviation of the electrical zero point may be caused by thermal drift or changes in mechanical loading Adjustments to the zero point should not exceed 10 of the stage travel After successful zero point adjustment the Overflow LED should no longer glow in closed loop operation To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range Permanent glow of the Overflow LED in spite of zero point adjustment may indicate hardwa
40. onization lines E 621 CR 32 pin main connector pins 20a and 24a bused together See Sensor Synchronization on p 23 for details m Each unit requires sufficient power A DC DC converter is installed on the main board of the E 621 module with an input voltage range of 12 to 30 VDC recommended supply 15 V This converter generates 25 and 125 V for the power amplifier and 15 V for the sensor and servo controller When powering up the module the DC DC converter needs a peak current of about 1 5 A to start oscillating The power supply should have a buffer capacitor or should be able to supply the 1 5 A per E 621 for at least 1 second The inputs and outputs of the DC DC converter are not connected internally Using a unipolar power supply we recommend connecting the negative supply at pin 18a and 18c with the Test GND at pin 14a and 14c This provides a defined GND level and helps to minimize noise Be sure to connect pin 14a and 14c to a protective ground m If a DC offset potentiometer is to be used not included connect the wiper to pin 12c the zero offset contact presumably CCW to pin 22c 14a or 14c GND and the other contact CW to pin 12a Make sure the external pot is activated with X8 in position 1 2 www pi ws E 621 CR PZ160E Release 2 3 0 Page 11 Piezo Nano Positioning PI Quick Start m By connecting pin 28a on the main connector to pin 14a or 14c GND the E 621 is set to closed loop operation ser
41. output The input signal should always be in the range of 2 to 12 V Note that excursions to 3 or 13 V are possible but may cause overflow especially with servo on and reduce actuator lifetime see Lifetime of PICMA Actuators on p 52 for details The analog control input can be a computer generated analog signal e g from a DAQ board You can use the Pl LabVIEW Analog Driver set provided on the E 816 CD to generate that analog signal This driver set also includes the Hyperbit drivers which make possible position resolution higher than that of the DAQ board used New releases of the LabVIEW Analog Driver set are available from the download area at www pi ws See the E500T001 1 Technical Note and the manual of the LabVIEW Analog Driver set provided on the E 816 CD for instructions For the Hyperbit extension contact your PI Sales Engineer Computer controlled mode Activated with the following settings ON position is on the left 1 OFF 2 ON 4 ON The E 816 computer interface module installed in the E 621 controls the generation of the output voltage Target values for the axis motion can be given by move commands received via computer interface or from a running macro trigger input or wave table output The analog control input voltage on the ANALOG INPUT socket is ignored Note In analog mode the E 816 accepts all commands just as in computer controlled mode The only difference between the mode
42. r President Physik Instrumente PI GmbH amp Co KG Aut der R merstr 1 76225 Karisruhe Germany Moving the NanoWorld WWDLING Phone 40 721 4840 0 Fax 40 721 46 46 200 E mail info piws I Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties Microsoft Windows LabView The products described in this manual are in part protected by the following patents US Patent No 6 950 050 Copyright 1999 2009 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 2010 08 13 Document Number PZ160E Eco BRo Release 2 3 0 E 621CRUserPZ160E230 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws About This Document Users of This Manual This manual is designed to help the reader to install and operate the E 621 CR LVPZT Controller Amplifier Module It assumes that the reader has a fundamen
43. r operation Optional Connect a suitable measurement device to the SENSOR MONITOR SMB socket This socket carries the filtered and processed sensor output value with O to 10 V representing nominal travel range See User Electronics and Sensor Monitor Signal on p 23 for further specifications E 621 CR PZ160E Release 2 3 0 Page 13 Quick Start Piezo Nano Positioning PI 7 Switch on the E 621 8 Command motion of the connected piezo stage actuator Analog mode Change the control input signal on ANALOG INPUT in the range of 0 to 10 V Computer controlled mode Follow the instructions in First Steps in the E 816 Computer Interface Submodule User Manual If at the yellow Overflow LED glows in closed loop operation servo ON then a zero point adjustment is necessary Follow the instructions for zero point adjustment given in Section 4 1 1 on p 27 To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range www pi ws E 621 CR PZ160E Release 2 3 0 Page 14 Operation Piezo Nano Positioning PI 3 Operation 3 1 Front Panel Elements NOTE All front panel connections except of the USB lines are duplicated on the 32 pin main connector por SERVO CONTROLLER amp PI of ae ae ef a F Settings ANALOG INPUT SENSOR Zero e MONITOR RS 232 30 to 130V p ie Gel 4 i n f Er SENSOR
44. re failure Contact your Physik Instrumente Sales Engineer Custom software accessing PI drivers does not run Wrong combination of driver routines Vis gt Check if system runs with Terminal program If yes read the software manual and compare sample code from the E 816 CD to check the necessary driver routines www pi ws E 621 CR PZ160E Release 2 3 0 Page 44 Piezo Nano Positioning PI Customer Service 7 Customer Service Call your PI representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system m Current firmware version of the controller if present m Version of drivers and or host software if present m Operating system on host PC if present www pi ws E 621 CR PZ160E Release 2 3 0 Page 45 Old Equipment Disposal Piezo Nano Positioning PI 8 Old Equipment Disposal www pi ws In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following add
45. re you open the door of the fuse carrier remove the power plug from the wall socket to disconnect the system from the power supply completely CAUTION Both fuses are active and have to be replaced if there is a fault To access the line power fuses proceed as follows 1 Switch the system off and remove the power cord 2 Wait one minute to be sure that all electric circuits are discharged completely www pi ws E 621 CR PZ160E Release 2 3 0 Page 9 Quick Start Piezo Nano Positioning PI 3 Pry open the door that covers the fuse carrier see Fig 2 and pry out the fuse carrier 4 Be sure to replace both fuses with IEC 4 AT slow blow Note that IEC standard fuses are designed to carry the nominal current indefinitely Other fuse rating standards differ 5 Reinstall the carrier and close the door Fig 2 Fuse location on the rear panel and in the carrier 1 of 2 fuses visible 2 2 Installation This section is only relevant if the E 621 modules come without chassis CAUTION E 621 modules are ESD sensitive electrostatic discharge sensitive devices Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static electricity you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport contain
46. ress postage free Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany E 621 CR PZ160E Release 2 3 0 Page 46 Technical Data Nano Positioning P I 9 Technical Data 9 1 Specifications Function Axes Sensor Servo characteristics Sensor type Sensor resolution Amplifier Control input voltage range Min output voltage Peak output power lt 5 ms Average output power Peak current lt 5 ms Average current Current limitation Noise 0 to 100 kHz Ripple of Uout Voltage gain Input impedance www pi ws E 621 CR Piezo Amplifier Servo Controller P I analog notch filter capacitive 20 bit 2 to 12 V 30 to 130 V 12 W 6 W 120 mA 60 mA Short circuit proof 0 8 mVrms 20 mVpp at low frequencies 40 mVpp spikes at 30 kHz 10 0 1 100 kQ E 621 CR PZ160E Release 2 3 0 Page 47 Technical Data www pi ws Interfaces and operation Interface communication Piezo connector Sensor connection Piezo Control input trigger input socket Sensor monitor socket Sensor monitor output Controller network Supported functionality DC Offset Miscellaneous Operating temperature range Overheat protection Dimensions Mass Operating voltage Current consumption Chassis Model E 621 modules max 12 Operating voltage Dimensions E 500 621 100 to 240 VAC 50 60 Hz 450 x 132 x 296 mm handles E 621 CR PZ160E Rele
47. rol modes The E 621 can be operated in either analog mode or computer controlled mode The active mode determines the applicable control sources for the output voltage See Control Modes below for more information Servo modes The current servo mode determines if the motion axis is driven in open loop servo OFF or closed loop servo ON operation In closed loop operation a servo loop participates in the generation of the control value for the output voltage The servo loop thus maintains the current axis position based on a given target position and the position feedback of the corresponding sensor See Servo Modes ON OFF below for more information The individual control and servo modes can be combined arbitrarily 3 2 1 Control Modes The current control mode of the E 621 determines the applicable control sources for the output voltage and hence for the axis motion It is selected with the Settings DIP switches on the E 621 front panel www pi ws E 621 CR PZ160E Release 2 3 0 Page 18 Piezo Nano Positioning PI Operation Analog mode Activated with the following settings ON position is on the left 1 ON 2 OFF 4 OFF The output voltage depends on the input voltage applied to the ANALOG INPUT SMB socket of the E 621 Control input from the E 816 computer interface submodule is ignored i e move commands received via computer interface or from a running macro trigger input or wave table
48. ront panel for analog operating mode sw1 ON sw2 OFF sw4 OFF 2 Make sure the piezo actuator is mounted in the same way and with the same load as during normal operations in the application In multi axis systems make sure the piezos are always connected to the same controller units 3 Mount an external gauge to measure the piezo displacement Only if the external measurement system offers higher precision than the capacitive sensor can the maximum performance be achieved With E 621 powered down the external gauge should read 0 if it does not note the offset and subtract it from subsequent readings 4 Remove the E 621 from the chassis and reconnect through a P 895 00 extension bracket not included To remove the module proceed as follows Loosen the two Phillips screws on the front panel Using the grip at the bottom of the front panel pull the module out of the chassis 5 Power up the E 621 www pi ws E 621 CR PZ160E Release 2 3 0 Page 32 Piezo Nano Positioning PI Calibration 6 Scan the voltage at ANALOG INPUT from 0 V to 10 V and read the piezo displacement using the external gauge 7 Adjust the Integrated Linearization System ILS by turning the ILS potentiometer see p 36 and maximize the linearity of the piezo displacement 4 2 Servo Control Dynamic Characteristics The object of servo control dynamic calibration is to regulate behavior such as overshoot ringing and settling time The s
49. s is the control source selection www pi ws E 621 CR PZ160E Release 2 3 0 Page 19 Operation Piezo Nano Positioning PI 3 2 2 Servo Modes ON OFF www pi ws The current servo mode determines if a motion axis is driven in open loop servo OFF or closed loop servo ON operation The servo mode can be set as follows Using DIP switch 3 on the E 621 front panel OFF right servo off open loop operation ON left servo on closed loop operation Using pin 28a on the 32 pin main connector Servo is on if pin 28a is grounded i e connected to pin 14a or 14c GND In this case switching to open loop operation servo OFF is neither possible with DIP switch 3 on the front panel nor with the SVO command via the E 816 computer interface submodule By default and when installed in an E 50x 621 chassis from PI pin 28a is not connected to pin 14a or 14c and hence set to servo off open loop operation Via SVO command sent over the communications interface or received from a macro running on the E 816 To give the E 816 complete control over the servo mode selection DIP switch 3 on the E 621 front panel must be set to open loop operation right Furthermore make sure that pin 28a on the main connector is not grounded i e not connected to pin 14a or 14c the signal on pin 28a must not be LOW 0 V Using the SVO command you can check the last sent SVO setting SVO does not report the setting of DIP switch 3
50. s we strongly advise you to follow general accident prevention regulations All work done with and on the equipment described here requires adequate knowledge and training in handling High Voltages Any cabling or connectors used with the system must meet the local safety requirements for the voltages and currents carried Procedures which require removing the E 621 module from the chassis should be carried out by authorized qualified personnel only Disconnect the chassis from power when removing modules and when resetting internal switches or jumpers When a module removed from the chassis must be operated use a 32 pin extension connector P 895 00 not included Voltages of up to 130 V can be exposed Do not touch internal conductors Be sure to connect pin 14a and 14c to a Protective Ground Connect the AC power cord of the E 500 621 or E 501 621 chassis in which the E 621 is installed to the wall socket 100 to 240 VAC To disconnect the system from the supply voltage completely remove the power plug from the wall socket or remove the power cord from the chassis Install the system near the AC outlet and such that the AC power plug can be reached easily www pi ws E 621 CR PZ160E Release 2 3 0 Page 5 Piezo Nano Positioning PI Introduction CAUTION Place the chassis with the E 621 s in a location with adequate ventilation to prevent internal heat build up Allow at least 10 cm 4 inches clearance from t
51. t or changes in mechanical loading Let the system warm up for several minutes before setting the zero point This procedure can be carried out either in computer controlled or in analog mode If you use analog mode you will need a voltmeter In computer controlled mode the voltmeter is helpful but not required Before starting install the positioner s with the same loads and in the same positions as they will have in your application OPEN LOOP SENSOR ZERO POINT 1 Set DIP switches on the front panel for operating mode 2 Power up 3 Set up for servo off operation 4 Exercise the piezo over the nominal expansion range 5 Command OV Computer Controlled Mode sw1 OFF sw2 ON sw4 ON connect RS 232 or USB cable to this unit After power on establish communications e g with PITerminal Send SVO AO where A is the axis identifier Make sure that servo is not set on with DIP switch 3 or pin 28a Command voltages from 0 to 100 V e g with SVA command Command a voltage of 0 volts by sending SVA AO where A is the axis identifier E 621 CR PZ160E Release 2 3 0 Analog Mode sw1 ON sw2 OFF sw4 OFF Set DIP switch 3 OFF Make sure that servo is not set on with pin 28a or SVO command Apply an analog signal in the range of 0 10 V to ANALOG INPUT DC offset must be 0 or OFF X8 2 3 Put 0 V on ANALOG INPUT Page 27 Piezo Nano Positioning PI Calibration 6 Read
52. tal understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the E 621 CR LVPZT Controller Amplifier Module as well as the hardware installation procedures which are required to put the associated motion system into operation This document is available as PDF file on the product CD Updated releases are available for download from www pi ws or via email contact your Physik Instrumente Sales Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death Indicates the presence of high voltage gt 50 V Calls attention to 4 a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The hardware components and the software tools which might be delivered with E 621 CR LVPZT Controller Amplifier Modules are described in their own manuals All documents are available as PDF files on the product CD Updated releases are available for download from www pi
53. ut voltage can also be a computer generated analog signal e g from a DAQ board You can use the PI LabVIEW Analog Driver set provided on the E 816 CD to generate that analog signal See Control Modes on p 18 for details Computer controlled mode ANALOG INPUT is used as trigger input signal for wave table operation and triggered motion Active HIGH LOW 0 to 0 5 V HIGH 3 0 to 5 0 V maximum 10 V max freq 400 Hz min width 5 us See the User Manual for E 816 Computer Interface and Command Interpreter Submodule PZ116E for more information SENSOR MONITOR SMB coaxial GND on outer line 0 to 10 V on inner line Filtered and processed sensor output value 0 to 10 V representing nominal travel range E 621 CR PZ160E Release 2 3 0 Page 16 Operation www pi ws Piezo Nano Positioning PI Settings DIP switch block The ON position is on the left Switch Function 1 Usage of ANALOG INPUT socket as control input 2 Control input given by the E 816 computer interface submodule installed in E 621 3 Servo mode selection OFF right servo off open loop operation ON left servo on closed loop operation 4 Usage of ANALOG INPUT socket as trigger input To give the E 816 computer interface submodule complete control over the servo mode selection DIP switch 3 must be set to open loop operation right When installing the E 621 in a custom chassis for servo mode selection via
54. vo ON In this case switching to open loop operation servo OFF is neither possible with DIP switch 3 on the front panel nor with the SVO command via the E 816 computer interface submodule 2 3 First Steps CAUTION Thermally stable systems have the best performance For a thermally stable system switch on the E 621 at least one hour before you start working with it CAUTION If the piezo stage starts oscillating humming noise In closed loop operation switch off the servo immediately The load and or the dynamics of operation probably differ too much from the setup for which the system was calibrated In open loop operation stop the motion immediately Do not operate the piezo stage at its resonant frequency even though the notch filter by default is also active in open loop operation Otherwise the piezo stage could be irreparable damaged 1 Connect the E 621 to the supply power Depending on your system configuration consider the information in Line Power and Fuses on p 9 or Installation on p 10 2 Make sure the E 621 is switched off www pi ws E 621 CR PZ160E Release 2 3 0 Page 12 Quick Start www pi ws Piezo Nano Positioning PI Make the DIP switch settings required for the control mode analog or computer controlled and the servo mode ON or OFF you wish to use See Front Panel Elements on p 15 and Modes of Operation on p 18 for details Notes The servo must be
55. ws or via email contact your Physik Instrumente Sales Engineer or write info pi ws E 802 User Manual PZ150E E 816 User Manual PZ116E E 816 DLL Software Manual PZ120E E 816 LabVIEW Software Manual PZ121E Analog Controller LabView Driver Library Software Manual PZ181E PIMikroMove Software Manual SM148E Contents Introduction 3 11 Hardware Overview rsrrrrrrrrrrrrrrrnnrrnnrrnnnrnnrrrnrrnnnrnnnrrnnnnnnnnnnn 3 12 Prescribed Use Lunde ad E EEE E E 4 13 Safety Precautions uvenn keedendmrm siemkeaden 5 14 Unpacking siesau aa a A a an NE aaa 8 Quick Start 9 2 1 Line Power and FUSes rrrrrrrrrrrrrrrrrrarrrnrrrnrrrnrnrnrrrrnnrnnnnnnnnnnn 9 22 Jhstallatonsuva24q2scusraretudetegurarneetran aan 10 23 First Steps oii cesecorne tien een oie lt A viene nei aed 12 Operation 15 3 1 Front Panel Elements evrrrrnrvrnrrrrrvrrrrrrrvnrrerrsrrrrenrsrrsrsrsssnn 15 3 2 Modes of Operation rrrrrrrrrrrrerrrrrrrrnrrrnrrrnrrrnrrrnrrensrrrsssrnsnnnn 18 321 Control Moge Stnt lie Sec aside efter 18 322 Servo Modes ON OFF 0ccececcceeeeeeeeeeeeeeeeeeeenaeeeeeeneeeeeneaas 20 33 Networking on PC BUS scscicicicsseccetstccsssestaceseaassextunvaasesietecdstents 22 34 Sensor Synehromzatibn srssrvovketanusvesenssstknnie 23 3 5 User Electronics and Sensor Monitor Signal 23 Calibration 25 41 Sensor Connection and Adjustment rrrrrrnrrnrrrrnrrnnrrnnnrnnnn 25 4 11 Open Loop Zero Point Adjustment

User Manual PZ160E - Physik Instrumente

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