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Keithley User Manual 2651A: englisch

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1. e ee eeeee eere eren nnne 5 1 Introduction to capturing waveformS us cimieaesa kis inda abun E acte ndn EUN d con utto rbi ttis 5 1 Equipment needed for this example cccccseecccesseeceneeecececceceseucesseeeessaseeseeeeseneessagees 5 1 DELIS CNUE O are a e a ue Spec cu SsMM LS ru Pd E UU PA 5 1 Device COSCON TE T IT MU 0 2 Configuring the trigger IHDUel suusuieecrein sinh bt qat otim i rb ut lit ok Rida nm inis 5 2 zi laglelicm program COE EE ee a ee T 5 4 E se ECU crs 0c E E A E EE A A E EAE E A E E AT 5 9 Characterization of power discretes cccccessseeeeeesseeeceenseeeeeenseeeeeeseeeseeeneeeseonenees 6 1 Introduction to power discrete l V curve teSting cccccccsseceseseeeceseeceeseeseaeesseeeseueeeneaees 6 1 Equipment needed for this example cccccceeccceesceceeeeeceeeececececesseecesseeeseeeeeseneeesaaees 6 2 SOEND CODD CAO eia e a a a a a aa eE aai a ae aai a Ra Eia 6 2 Bie Ses I II E A T E 6 4 Configuring the Migger Modelinas inin ir EE 6 5 Model 2651A trigger model operation ccccseccsssceseseccseececsseeceueeseueceeeeesesessueesesesensesensaess 6 7 Series 26xxA instrument s trigger model operation ccccccccsseeecceesecceececceuseecseueeesseseessaees 6 9 Be Poora O eie EE a E aa o a 6 10 Example program RES cscs wes oe pees wos resend Ea wim dan ai i 6 16 Increasing SMU current sourcing ability
2. eese esse 7 1 Mroduction to Comms 111 cm E TT TO OT 7 1 Combining SMUs to increase current sourcing capability esses 7 2 Equipment needed Tor This example esse sce isnsaserensdeciwsusccacdcssiessmontaasiessusnsetesueasbobvssacsbvanicssutuss 1 3 Set up ta NI site el pers cra E ELSE TEE 7 3 FC i TEE TO TUI RTT 1 4 Configuring the trigger FIOBBuosqaen iud piter dla dE UM E Raine quie RU dE Ga UE DRM dd ERR IO n 1 6 Master Model 2651A node 1 trigger model operation seesseeeeeeseeeseeesse 7 8 Model 2651A node 2 trigger model operation ccccccseccscecececeeeceeeeceeeceeceueeceeesseeseueeseeens 7 8 Series 2600A trigger model operation ccccecccecseceeceeeeeeeeeeeeeeeeeeeeseeeeesseeeeeseeeeessaeeeesaeeeesaees 7 9 Example 2 16 8 6216 9S 0 8 een ene eee eee ees o o OO E tere ten here eee reer 1 9 Example progran US aUe TI DEL T DOO DLL TT 7 16 BUN SOR FAQS t 8 1 PAO OME AIG Ul NN EN 8 1 Need different line frequency or voltage cccccsescecceeseeeceeseeceeueecseseeecsenseesssseeessageees 8 1 Can use external trigger lines iesseccu end sextexkte cta tta enc at dE kortdlbaun ble uada id nnam arbor cre iue 8 1 i 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Table of Contents The internal web pa
3. passthrough false count 1 tsplink trigger 1 EVENT ID TSP Link tsplink trigger 2 EVENT ID Bw mode tsplink TRIG FALLING Series 26xxA subordinate node 2 smua trigger IDLE EVENT ID Idle TSP Link 9 Arm layer SWEEPING EVENT ID tsplink trigger 1 arm count 1 EVENT ID arm stimulus SWEEP COMPLETE EVENT ID mode tsplink TRIG SYNCHRONOUSA Trigger layer ARMED EVENT ID IM source stimulus tsplink trigger 2 EVENT ID E SOURCE COMPLETE EVENT ID mode tsplink TRIG FALLING MEASURE COMPLETE EVENT ID endpulse stimulus E Model 260xA Model 261xA or Model 263xA 6 6 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 6 Characterization of power discretes Model 2651A trigger model operation The following figure illustrates this test s Model 2651A trigger model configuration Figure 20 Model 2651A trigger model for IV curve characterization Model 2651A master node 1 smua trigger Idle IDLE EVENT ID SWEEPING EVENT ID e arm count 5 arm stimulus SWEEP COMPLETE EVENT ID Trigger layer iD ARMED EVENT ID passthrough true count 20 ae source stimulus E SOURCE COMPLETE EVENT II trigger timer 2 measure stimulus MEASURE COMPLETE EVENT ID Arm layer trigger timer 1 stimulus EVENT ID 0 03 s
4. Me The instrument web interface requires the web browser plug in Java SE Runtime Environment Version 6 or later The latest version of the plug in is available from http www java com en download manual jsp Installation files are also available on the Model 2651A Product Information CD ROM that came with your instrument The instrument web interface uses Java applets and depending on your browser security settings may require your permission to download and install them To connect to the instrument web interface you must have a LAN connection from the computer to the instrument See LAN concepts and settings in the Model 2651A Reference Manual for more information about configuring the Model 2651A for a LAN connection connecting the Model 2651A to the LAN and establishing a LAN connection to the instrument Section 3 Using the web interface Model 2651A High Power System SourceMeter Instrument User s Manual Once the Model 2651A is configured correctly and connected to the LAN you can use the LXI Discovery Browser to identify the IP addresses of LXI certified instruments that are set up for automatic IP address selection Once identified you can double click the IP address in the LXI Discovery Browser to open the web interface for the instrument The LXI Discovery Browser is available on the Keithley Instruments website http www keithley com To locate the LXI Discovery Browser on the Keithley website 1 Select the Suppor
5. Name CapturePulsel pulseLevel pulseWidth pulseLimit numPulses Descrip mom This function outputs current pulses eb EDI S duty ebbe and perom measurements using the fast ADC to capture each pulse in its entirety At the conclusion of the pulse train the data is returned to the instrument console im a Microsoft Excel compatible format oce amc pulseLevel The current level of the pulse in amps pulseWidth The width of the pulse in seconds 100e 6 lt pulseWidth lt 4e 3 puc mme The voltage limit of the pulse in volts numPulses The number of pulses to output Example Usage CapturePulseT 50 9006 0 10 5 function CapturePulsel pulseLevel pulseWidth pulseLimit numPulses if numPulses nil then numPulses 1 end Configure the SMU reset smua reset Siete sio bia ect DIDI scnua OUlEU RED CAMS Siliel Sedes sila ENDE REMOTE smua source rangel pulseLevel smua source leveli 0 The bias level sma Source Limity 10 The DC limit Use a measure range that is as large as the biggest possible pulse smua measure rangev pulseLimit smua measure rangei pulseLevel Select the fast ADC for measurements smua measure adc SMAD lives IE Set the measure count to be 1 25 times the width of the pulse to ensure we capture the entire pulse plus falling edge smua measure count pulseWidth smua measure interval 1 25 Prepare the reading buffers smua nvbufferl clear emua
6. 2651A 900 01 Rev A March 2011 1 3 Section 7 Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter Instrument User s Manual To set the TSP Link node number using the front panel interface Press the MENU key Select TSPLink Select NODE Use the navigation wheel to adjust the node number Press the ENTER key to save the TSP Link node number EL ple i c On the Model 2651A SMU 1 TSP Link node 1 perform a TSP Link reset to update it with the linked instruments 1 Press the MENU key 2 Select TSPLink 3 Select RESET NOTE If error 1205 is generated during the TSP link reset ensure that the Series 2600A has a unique TSP Link node number You can also perform a TSP Link reset from the remote command interface by sending tsplink reset to the Model 2651A This method is used in the example program Device connections To run the test make the connections as illustrated in the following figure To ensure good contact use care when making connections A CAUTION Carefully consider and configure the appropriate output off state source and compliance levels before connecting the Model 2651A High Power System SourceMeter Instrument to a device that can deliver energy for example other voltage sources batteries capacitors solar cells or other Series 2600A System SourceMeter instruments Program recommended instrument settings before making connections to the device Failure to
7. 9 The Instrument Output box displays any error messages and output from the script 10 If no errors appear but readings do click Run a few times to populate the buffer Each time the script is run readings appear in the Instrument Output box and are also placed in the buffer Script management options Existing scripts are listed in the User Scripts box on the left side of the web interface To delete a script click the name of the script and click Delete The script is deleted from the User Scripts list and from the nonvolatile memory of the instrument To stop operation of a script click Abort Script To export the selected script to the computer click Export to PC Choose the directory in which to save the script and click Save Scripts are saved to a file with the extension tsp TSP files are native to Test Script Builder or TSB Embedded but they can be opened and edited in any text editor To import scripts from the computer click Import to PC Select the directory that contains the file You can only import files with the extension tsp To clear the name box and the box that contains the script click Clear You can type the name of a script in the TSP Script box and click View Script to view the contents of the script 3 6 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 3 Using the web interface Reading buffers The Reading Buffers tab provides access to the Mo
8. Download Reading buffer 3 7 DualSmuRdson 7 16 E Examples Combining SMUs for 100 A current sweep 7 9 7 16 Fast sampling ADC 5 4 6 10 6 16 Exercises Create and run script with TSB Embedded 3 4 Retrieve readings from buffer 3 7 Export script 3 6 F Fast ADC CapturePulsel 5 9 CapturePulseV 5 9 Communication setup 6 2 Device connections 6 4 Example program code 6 10 6 16 High power pulse 5 1 Trigger model 5 2 2651A 900 01 Rev A March 2011 Index Waveforms capturing 5 1 Front panel 2 1 Compliance limit 4 2 Indicators 2 2 Interface 2 1 Measurements 4 1 4 2 Output on off 4 2 Readings 4 3 Source measure procedure 4 2 Using 2 1 Functions CapturePulsel 5 9 CapturePulseV 5 9 DualSmuRdson 7 16 IV Curves 6 16 Selecting 4 2 Import script 3 6 Indicators 2 2 IP address 3 2 8 1 l V Curves 6 1 6 4 6 5 6 6 6 7 6 9 Performance characterization 6 1 6 4 IV Curves 6 16 J Java plug in 3 1 K Keypad 2 4 Keys CONFIG 2 2 DIGITS 2 2 DISPLAY 2 2 ENTER 2 2 EXIT 2 2 FILTER 2 2 LIMIT 2 2 LOAD 2 2 MEAS 2 2 MENU e 2 2 MODE 2 2 Number keys 2 2 RECall 2 2 REL 2 2 RUN 2 2 SPEED 2 2 SRC e 2 2 STORE e 2 2 Index 1 Index Model 2651A High Power System SourceMeter Instrument User s Manual TRIG 2 2 L LabVIEW drivers 8 2 Linear sweep 6 5 LXI Discovery Browser 3 1
9. The following figure illustrates an example of this plot for a power MOSFET device Figure 15 Example set of IV curves for a power MOSFET device 50 45 40 35 D Dp q 30 e Vgs 5 00 S o5 Vgs 6 00 pui sts hs MS RSS hs ts IA amp Vgs 7 00 2 59 Vgs 8 00 E Vgs 9 00 15 10 9 0 0 2 4 6 8 10 12 Vds volts Section 6 Characterization of power discretes Model 2651A High Power System SourceMeter Instrument User s Manual To avoid device self heating this test is usually performed using pulsed measurements This method pulses voltage across the device for a short duration During this pulse after the pulse has settled the current is measured The duration of the pulse and the duty cycle in which the pulses are applied to the device are controlled minimizing self heating A single Model 2651A High Power System SourceMeter Instrument can pulse measurement test with precision timing at currents up to 50 A and pulse widths as low as 100 us This example demonstrates how to perform pulsed measurements and collect l V curves using the Model 2651A High Power System SourceMeter Instrument on a MOSFET The same procedure could be used to test IGBTs Equipment needed for this example To run this test you will need the following equipment e Model 2651A High Power System SourceMeter Instrument e Series 2600A System SourceMeter Instrument see NOTE e TSP Link cable Keithley Instru
10. Welcome Page IP Configuration Instrument Model Manufacturer Set Password Firmware Revision Serial Number Reading Buffers Description Flash Upgrade LXI Class TSP Express LXI Version Log MAC Address Glossary TCP IP Address Erro ae T DE d Pena vee n in aq ee a nn 2 To create the example script enter the name of the TSP script basic_source_measure at the location shown by 1 in the following illustration 3 4 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 3 Using the web interface Figure 5 TSB Embedded page Keithley Instruments Test Script Builder Embedded User Scripts TSP Script basic source measure I Export to PC Import from PC Save Script View Script Clear l Restore Model 2651A defaults Console gt nter Clear Instrument Output smua nvbufferl clear smua nvbufferl appendmode 1 Run Reset Abort Script Export Script to LISB 3 Enter the code below in the script box 2 Restore Model 2651A defaults smua reset Select voltage source function Smue source Lune smua OUTPUT_DCVOLTS Set source range to auto smua source autorangev smua AUTORANGE ON Set voltage source to 5 V smua source levelv 5 Set current limit to 10 mA smua source limiti 10e 3 Set current range to 10 mA smua measure r
11. between the instrument and the computer verify that the computer is set to receive an IP address automatically e If you are using the manual configuration method over a corporate network verify that you have entered the IP address gateway and subnet mask provided by your network administrator e f you are using the manual configuration method and a one to one connection with the computer verify that the subnet mask agrees with the computer s settings e fthe above suggestions do not work see the Model 2651A Reference Manual Communication interfaces Save the present state of the instrument How do save the present state of the instrument You can save the present state of the instrument using the front panel menus or from a command interface See the Model 2651A Reference Manual User setups LabVIEW driver for the Model 2651A Where do find the LabVIEW driver for the Model 2651A The latest NI LabVIEW driver is available from the Keithley Instruments support website http www keithley com support 8 2 2651A 900 01 Rev A March 2011 Section 9 Next steps In this section Additional Model 2651A information eese 9 1 Additional Model 2651A information This manual has prepared you to start using your new Model 26514 for your real world applications For more detailed information about the Model 26514 refer to the Keithley Instruments Model 2651A Reference Manual part numb
12. measure stimulus mO mode tsplink TRIG FALLING MEASURE COMPLETE EVENT ID endpulse stimulus E PULSE COMPLETE EVENT ID Sa stimulus Model 260xA Model 261xA or Model 263xA When the configured trigger model of the Series 2600A instrument is initiated the following occurs 1 The source measure unit SMU trigger model passes through the Arm Layer enters the Trigger Layer reaches the Source Event pauses and then waits for an event trigger from TSP Link trigger 1 2 A TSP Link trigger is received by TSP Link trigger 1 Because TSP Link trigger 1 is configured as a synchronous acceptor it latches the line low and outputs an event trigger to the SMU Source Event 3 The SMU Source Event Detector receives the event trigger from TSP Link trigger 1 sets the SMU output to the step level waits a programmed source delay if any and continues 4 The SMU trigger model moves to the Measure Event where it waits a programmed measure delay if any takes a measurement and then outputs the MEASURE COMPLETE event trigger 5 TSP Link trigger 1 receives the MEASURE COMPLETE event trigger and releases the TSP link trigger line telling the Model 2651A that it has completed its step and that the Model 2651A may begin its sweep 6 The SMU trigger model moves to the End Pulse Event where it stops and waits for an event trigger from TSP Link trigger 2 7 ATSP Link trigger is received by TSP Link trigger 2 indicating that th
13. passes through the arm layer and returns to an idle state Series 2600A trigger model operation In this example the Series 2600A is controlled by script so its trigger model is not used Example program code NOTE The example code is designed to be run from Test Script Builder or TSB Embedded It can also be run from other programming environments such as Microsoft Visual Studio or National Instruments LabVIEW However modification of the example code may be required to do so 2651A 900 01 Rev A March 2011 1 9 Section 7 Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter Instrument User s Manual The following script contains all the code necessary to perform an Rds on sweep up to 100 A using two Model 2651A High Power System SourceMeter Instruments and a Series 2600A System SourceMeter Instrument This script e Initializes the TSP Link connection e Configures the source measure units SMUs e Configures the trigger models of the two Model 2651A instruments e Prepares the reading buffers e Executes the test e Stores the collected data in a format that can be copied from the instrument console and pasted into a Microsoft Excel spreadsheet The script is written using Test Script Processor TSP functions rather than as a single block of inline code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic and
14. 265l1A smua reset SsMmula Source func sible OIUPBIE UL We Oils smua sense Sublets EDS TS REMOTE smua source rangev math max math abs dstart Mantes Ch BOO Select the source range that is large enough to fit all values of the sweep smua source levelv 0 Sets the drain bias level smua source limiti 5 smua measure rangev smua source rangev smua measure rangei pulseLimit off and 50 or pulseLimit Select a measure range large enough to fit pulses up to the current limit 2651A 900 01 Rev A March 2011 6 11 Section 6 Characterization of power discretes Model 2651A High Power System SourceMeter Instrument User s Manual smua measure cl eov ese SUONI QE ONCE smua measure nplc 0 001 NPLC can be increased to improve measurement accuracy However it should remain small enough to fit the measurement within the width of the settled part of the pulse smua measure delay pulseWidth 1 localnode linefreqg smua measure nplc 50e 6 Set the measure delay so that the measurement is taken at the end of the pulse before the falling edge Timer 1 controls the pulse period trigger imer ll Count dsteps lt 1 and 1 or dsteps 1 If dsteps lt 1 then use 1 for the count else use dsteps 1 trigger timer 1 delay pulsePeriod trigger timer 1 passthrough true EeIgeer seme ENT SE OTIO ie Walls ete db ers Lab os en EID CIETS trigger timer 1 c
15. Event where it waits for an event trigger 2 TSP Link trigger 1 receives a trigger from the TSP Link interface and outputs an event trigger to the SMU Source Event 3 The SMU Source Event Detector receives the event trigger from TSP Link trigger 1 begins to output the pulse waits the programmed source delay if any and outputs the SOURCE COMPLETE event to timer 1 before allowing the SMU trigger model to continue 4 Timer 1 receives the SOURCE COMPLETE event trigger from TSP Link trigger 1 and begins its countdown 5 The SMU trigger model continues to the Measure Event where it waits for a programmed measure delay if any takes a measurement and then continues until it stops at the End Pulse Event where it waits for an event trigger 6 The timer 1 countdown expires and timer 1 outputs an event trigger to the SMU End Pulse Event 7 The SMU s End Pulse Event Detector receives the event trigger from timer 1 outputs the falling edge of the pulse and then allows the SMU trigger model to continue 8 The SMU trigger model compares the current trigger layer loop iteration with the trigger count e If the current iteration is less than the trigger count the trigger layer repeats and the SMU trigger model reaches Source Event where it waits for another trigger from TSP Link trigger 1 The trigger model then repeats from step 2 e If the current iteration is equal to the trigger count the SMU trigger model exits the trigger layer
16. V and then sweep the drain of the device from 1 A to 100 A in 100 points The points of this sweep will be gathered using pulsed measurements with a pulse width of 500 us and a pulse period of 50 ms for a 1 percent duty cycle These pulses will be limited to a maximum of 10 V At the end of the sweep all SMU outputs will be turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manua section 8 Troubleshooting FAQs In this section Hee GLOVU AGU otc 21 os 9 eee ann re ator eset ea eRe ae istic peli teen 8 1 Need different line frequency or voltage 8 1 Can use external trigger lines seeeesseeeesssse 8 1 The internal web page of the instrument is not accessible 8 1 Save the present state of the instrument 8 2 LabVIEW driver for the Model 26514 8 2 About this section The intent of this section is to troubleshoot the most common problems encountered with the Model 2651A For additional troubleshooting information please see the Troubleshooting section in the Model 2651A Reference Manual Need different line frequency or voltage I need to use a Model 2651
17. Voltage Combined Current rdson combinedVoltage combinedCurrent Print a row ori daid Ole E Siete T EOE E E sop E Vie eG EE JE is sb gu smua nNvypu fferl timestampsli sourceLevel smua nvbourter2lcv5 smudaenvourter mmi node 2 smua nvbuffer2 i node 2 smua nvbufferl i combinedVoltage combinedCurrent rdson end end 2651A 900 01 Rev A March 2011 7 15 Section 7 Increasing SMU current sourcing abilit Example program usage 1 16 The functions in this script allow the sweep parameters of the test to be adjusted without having to rewrite and rerun the script A test can be executed by calling the function DualSmuRdson gateLevel dstart dstop dsteps pulseWidth pulsePeriod pulseLimit with the appropriate values passed to it in its parameters DualSmuRdson parameters Parmeter Unis C CEN gateLevel Volts The voltage level to hold the gate dstart Amperes The level of the first step in the drain sweep dstop Amperes The level of the last step in the drain sweep dsteps Not The number of steps in the drain sweep applicable pulseWidth Seconds The width of the pulse in the drain sweep pulsePeriod Seconds The time between the start of consecutive pulses in the drain sweep pulseLimit Volts The voltage limit of the pulses in the drain sweep An example call to this function is as follows PDu ualonukdson trO I TO ke OF MODO oT MIO This call will set the gate source measure unit SMU output to 10
18. and local laws The WARNING heading in the user documentation explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product If you are unsure about the applicability of a replacement component call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Products that consist of a circuit boar
19. c sube OUS DEO if errorqueue count 0 then print Errors were encountered reset return end Start the 26xxA trigger model node 2 smua trigger initiate Start the 2651A trigger model smua trigger initiate waitcomplete Wait until the sweeps are complete QuTPpPutsS Off SMUE ONCER OVON sonia OU RET OFE node 2 smua source output zoe cuero NUR He Return she data PrintIVcurveData gsteps dsteps end 6 14 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 6 Characterization of power discretes zo PrintIVcurveData gsteps dsteps Description This function will output the data collected by the I v Omas vss a an ch INA eto a ee e e codon eo a e ce a ela step of the gate this Function will output three Columns that Contain the drain sweep data and the gate data in the first row Parameters s gsteps The number of steps in the gate sweep dsteps The number of steps in the drain sweep Example Usage PrasnmnerveurveData 5 21 xul ourncebpmonePreene Tycunrvebdgvadtdgsteps dsteps linel line2 for i 1 gsteps do linell line 2 sstuine tomar Vgs 2 0028 og gt node 2 smua nvbufferl sourcevalues i node 2 smua nvbuffer2 i node 2 smua nvbufferl i line2 line2 Source Value tVoltage tCurrent t end print linel print line2 for i 1 dsteps do line for 7 1 gsteps do line lime string for
20. consider the output off state source and compliance levels may result in damage to the instrument or to the device under test DUT 7 4 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 7 Increasing SMU current sourcing ability NOTE For best results all connections should be left floating no connections should be tied to ground Figure 25 Connections for Rds on sweep Model 2651A Model 2651A master node 1 subordinate node 2 TSP Link 9 SENSE GUARD S S LOG OUTRUT LO HI SENSE GUARD OUTPUT S S LO HI LOIG GGGHI GGGH 40V 50A MA TSP Link 9 P Gate resistor Series 26xxA if required subordinate node 3 G DQ LORS GRIGG GRGES LO HI Model 260xA Model 261xA or Model 263xA Equivalent SMU master node 1 SMU subordinate node 2 SMU subordinate node 3 Gate resistor if required NOTE During high current pulsing through the channel of the device the gate may begin to oscillate This oscillation creates an unstable voltage on the gate which may cause unstable measurements through the device channel You can install a resistor to dampen this oscillation and stabilize the gate Install the resistor between the gate of the device and the force and sense HI of the Model 2651A If the gate still remains unstable enable High C mode on the Model 2
21. current passing in the appropriate values as parameters The parameters of the CapturePulseV function are in the following table CapturePulseV parameters Parmeter UNS Deseo pulseLevel Volts The voltage level of the pulse pulseWidth Seconds The width of the pulse pulseLimit Amperes The current limit of the pulses to output numPulses Not applicable The number of pulses to output An example call to this function is as follows CapturePulseV 10 3006 26 50 5 This call will output five 10 V pulses with a 300 us pulse width The pulses will be limited to 50 A and have a 1 percent duty cycle At the completion of the pulsed outputs the source measure unit SMU output is turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis The parameters of the CapturePulser function are contained in the following table CapturePulsel parameters pulseLevel Amperes The current level of the pulse pulseWidth Seconds The width of the pulse pulseLimit Volts The voltage limit of the pulses to output numPulses Not applicable The number of pulses to output 2651A 900 01 Rev A March 2011 5 9 Section 5 Capturing high power pulse waveforms Model 2651A High Power System SourceMeter Instrument User s Manual An example call to this function is as follows CapturePulseI 50 300e 6 50 5 Thi
22. how to run scripts and enter commands using the instrument console The script contains comments that describe what is being performed by the lines of code and documentation for the functions in the script za Title Fast ADC Usage Description This script is designed to output pulses and capture both the current and the voltage of the pulse using the fast ADC of the Model 2651A High Power System SourceMeter instrument Equipment Needed 1x 2651A 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 5 Capturing high power pulse waveforms ST Name CapturePulseV pulseLevel pulseWidth pulseLimit numPulses Description This function outputs voltage pulse witha l duty cycle and performs measurements using the fast ADC to capture each pulse in its entirety At the conclusion of the pulse train the data is returned to the instrument console in a Microsoft Excel compatible format Parameters pulseLevel The voltage level of the pulse in volts pulsewidth The width of the pulse in seconds 100e 6 lt pulseWidth lt 4e 3 pulseLimit The current limit of the pulse in amps numPulses The number of pulses to output Example Usage CapturePulseV 5 300e 6 50 5 function CapturePulseV pulseLevel pulseWidth pulseLimit numPulses if numPulses nil then numPulses 1 end Configure the SMU reset smua reset smua source func Silber OUTPUT DCVOLTS
23. is swept through the drain and the voltage is measured The resulting data can be plotted to show drain current versus Rds on for the DUT The following figure is an example of this plot Figure 22 Example Rds on curves for a power MOSFET device 0 019 0 018 0 017 0 016 Vgs 10V 0 015 sey Rds on 0 014 0 013 0 012 0 011 0 01 LL 0 10 20 30 40 50 60 70 80 90 100 Ids amperes Section 7 Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter Instrument User s Manual To avoid device self heating this test is usually performed using pulsed measurements This method pulses current across the device for a short duration During this pulse after the pulse has settled the voltage is measured The duration of the pulse and the duty cycle in which the pulses are applied to the device are controlled minimizing self heating A single Model 2651A High Power System SourceMeter Instrument can pulse measurement test with precision timing at currents up to 50 A and pulse widths as low as 100 us To increase the pulse output you can combine two Model 2651A High Power System SourceMeter Instruments to output a pulse that is greater than that of a single Model 2651A This example demonstrates how to perform an Rds on sweep up to 100 A using two Model 2651A High Power System SourceMeter Instruments Combining SMUS to increase current sourcing capability A CAUT
24. panel Step 1 Select and set source level Perform the following steps to select the voltage source and set its value to 10 V 1 Press the SRC key as needed to select the V Source as indicated by the units in the source field on the display The flashing digit cursor indicates which value is selected for editing 2 Move the cursor to the digit to change then press the navigation wheel to enter the EDIT mode as indicated by the EDIT indicator 3 Use the RANGE keys to select the 10 V range If using a different source value use the lowest possible range for the best accuracy 4 Set the source value to 10 0000 V and then press the ENTER key or the navigation wheel to complete editing Step 2 Set compliance limit Perform the following steps to edit the compliance limit value to 10 mA 1 Press the LIMIT key 2 Move the cursor to the digit to change then press the navigation wheel to enter the EDIT mode as indicated by the EDIT indicator 3 Enter the limit value of 10 000 mA 4 Press the ENTER key or the navigation wheel to complete editing Step 3 Select measurement function and range To select measurement function and range 1 Select the current measurement function by pressing the MEAS key as needed 2 Enable autorange by pressing the AUTO key the AUTO indicator lights Alternatively you can set manual ranging using the up or down RANGE keys Step 4 Turn output on Turn the output on by pr
25. smua trigger measure iv smua nvbufferl smua nvbuffer2 Return the output to the bias level at the end of the pulse smua trigger endpulse action esta OURCH DIL smua trigger endsweep action e olla SOURCE DDE Sade m egens oun numPulses Smudetuggerse7me seams 0 Silla trigger source stimulus ueber eine ib Tode se iS b TET Swan trigger m asure Stimulus rigor emer Toc EVENT ID cmuar er rog re Mpu sie hail lis ra eea a re e EVENTET Smugs trrgger source dction smua ENABLE Shire s SOULCE OQOULPOUT smua OUTPUT ON smua trigger initiate waitcomplete Smua m Sos eem OUTPUT Smua QOUTEUT OPE PrintPulscData end 5 8 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 5 Capturing high power pulse waveforms soci Name poontPulbseDats Description This function prints the data contained in smua nvbufferl and smua nvbuffer2 in a format that is copy and paste compatible with Microsoft Excer Mi function PrintPEuUlseDatal print Timestamp iVoltage tCurrent bor i l Ssmua nmvburieri n doe Pranme Skring formar eg uesg beg SmUa NVbUrterl E1mestempos 2 smua nvbuffer2 i smua nvbufferl il end end Example program usage The functions in this script allow the parameters of the test to be adjusted without rewriting and rerunning the script To execute the test either call CapturePulseV to capture voltage or CapturePulseI to capture
26. sourcing ability ell Name DualSmuRdson gateLevel dstart dstop dsteps pulseWidth pulsePeriod pulseLimit Description This function uses two 2651A SMUs to perform a pulsed Rds on Sweep with currents up to 100A ence te ee gateLevel The gate level to be used during the sweep OUS D CH The starting current level of the drain sweep QUSTEOIO S The ending current level of the drain sweep dsteps The number of steps in the drain sweep pulseWidth The width of the drain pulse in seconds pulsePeriod The time from the start of one drain pulse to the next in seconds pulsehimit The voltage limit of the drain pulse xn volts Note Actual pulse limit will be 10 lower than setting po protect SMUS im a Compliance Condi on Example Usage DualsmuRclson 10 1 100 100 cc MENS 1 function DualSmuRdson gateLevel dstart dstop dsteps pulseWidth pulsePeriod pulseLimit tsplink reset 3 Verify that at least three nodes are present reset Configure 2651A 1 Drain SMU 1 smua reset Smua Source rune ponte OUTPUT She Air Sel sense Siilke EN E eve MOTE smua source offmode smua OUTPUT NORMAL smua source ofirirune ONA U EUF E DO EO qp smua source Ont limites muc c Set off limit SMU 1 will be a OV voltage source with 1mA limit when its output is turned off SMU F2 will be a 0A current Source with a 10V limit when the output is turned off These settings keep the parallel combinatio
27. use TSB Embedded to run some of the application examples in other sections of this manual If you can access the web interface home page but cannot use TSB Embedded or TSP Express make sure you have the Java SE Runtime Environment JRE Version 6 or later installed on your computer Create a script using TSB Embedded Me If you are using TSB Embedded to create scripts you do not need to use the commands loadscript or loadandrunscript and endscript 2651A 900 01 Rev A March 2011 3 3 Section 3 Using the web interface Model 2651A High Power System SourceMeter Instrument User s Manual Exercise Create and run a script with TSB Embedded The following programming example illustrates the setup and command sequence of a basic source measure procedure with the following parameters e Source function and range Volts autorange e Source output level 5 V e Current compliance limit 10 mA e Measure function and range Current 10 mA To create and run a sample script with TSB Embedded 1 From the navigation on the left side of the web interface select TSB Embedded The TSB Embedded page is displayed Figure 4 Select TSB Embedded LXI Keithley Instruments 26514 Main Windows Internet Explorer j IE http 192 168 1 101 File Edit View Favorites Tools Help F Favorites Ee LXI Keithley Instruments 26514 Main KEITHLEY A GREATER MEASURE OF CONFIDENCE LXI Web Interface Welcome Page
28. 1 Equipment needed for this example 4 1 Device connections cccecccecceeceeeceeeeeeceeeeeeeeeteeeeeeeseeeeeeeaes 4 1 Making front panel measurements eeeseesess 4 2 Introduction You can use the Model 2651A High Power System SourceMeter Instrument to make basic measurements from the front panel In this example measurements are made on a 10 kQ resistor Similar measurements can be made on any two terminal device under test DUT if appropriate source values are used Equipment needed for this example To run this example you will need the following equipment e Model 2651A High Power System SourceMeter Instrument e Additional cable and connector assemblies as required to make connections to the DUT for example Model 2651A KIT See Device connections on page 4 1 for a schematic of required connections Device connections Connections from the Model 2651A High Power System SourceMeter Instrument to the DUT are shown in the diagram below Proper care should be taken to ensure good contact through all connections Figure 11 Two wire resistance connections SENSE GUARD OUTPUT S S LO HI LOG G G GHI Section 4 Making basic front panel measurements Model 2651A High Power System SourceMeter Instrument User s Manua Making front panel measurements Use the following procedure to configure the instrument and make measurements from the front
29. 4 at a different line frequency or voltage What do I need to do The Model 2651A supports a line frequency of either 50 Hz or 60 Hz The factory configures the Model 2651A to automatically detect and operate at line frequencies either 50 Hz or 60 Hz each time the instrument power is turned on In noisy environments it may be necessary to manually configure the instrument to match the actual line frequency See the Model 2651A Reference Manual Line frequency configuration Can I use external trigger lines Yes these signals appear on the digital I O connector For information about the digital I O capabilities refer to Controlling digital I O lines in the Model 2651A Reference Manual The internal web page of the instrument is not accessible cannot access the internal web page of the instrument How do fix this Ensure that the instrument has been assigned a valid and unique IP address Section 8 Troubleshooting FAQs Model 2651A High Power System SourceMeter Instrument User s Manual e To view the IP address of the Model 2651A press MENU Select LAN gt STATUS gt IP ADDRESS If a valid IP address is displayed the instrument configuration is correct If 0 0 0 0 is displayed the IP address is not valid e f you are using the automatic configuration method over a corporate network contact your network administrator for assistance e lf you are using the automatic configuration method and you have a one to one connection
30. 51A LAN settings Refer to the Model 2651A Reference Manual for additional information about IP configuration 3 2 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 3 Using the web interface NOTE You must reload the page if you change the gateway or subnet mask from the Modify IP configuration page If you change the IP address you must type the new IP address in the address bar before you can use the web interface again Figure 3 Select IP configuration gt LXI Keithley Instruments 26514 Main Windows Internet Explorer JE http 192 168 1 101 File Edit View Favorites Tools Help x Lp Favorites LXI Keithley Instruments 26514 Main KEITHLEY A GREATER MEASURE OF CONFIDENCE LXI Web Interface Welcome Pag Welcome Page Instrument Model Manufacturer Set Password Firmware Revision TSB Embedded Serial Number Reading Buffers Description a LXI Class TSPO Express LXI Version Log MAC Address Glossary TCP IP Address aE on gta mht aH ut nd oes mills te meh iios agio ag meii TSB Embedded TSB Embedded is a web application that includes a command line interface that you can use to issue commands and interact with the instrument TSB Embedded also provides a convenient way to create and manage user scripts TSB Embedded resides in the instrument You can
31. 651A source measure unit SMU 2651A 900 01 Rev A March 2011 1 5 Section 7 Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter Instrument User s Manual Configuring the trigger model 7 6 When the trigger model is correctly configured you can achieve pulsed measurements with precise timing and current levels up to 100 A for the combined Model 2651A instruments Refer to the Example program code on page 7 9 for an implementation of this trigger model In this trigger model the master Model 2651A node 1 is configured to control the overall timing of the sweep Subordinate Model 2651A node 2 is configured to wait for signals from the master Model 2651A node 1 that prompt it to pulse In this example the Series 2600A is controlled by script so its trigger model is not used The following figure illustrates the overall trigger model configuration of this test which synchronizes the two Model 2651A High Power System SourceMeter Instruments to within 1 us to provide a single 100 A pulse 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 7 Increasing SMU current sourcing abilit Figure 26 Trigger model configuration for Rds on sweep Model 2651A master node 1 smua trigger IDLE EVENT ID Idle Arm layer SWEEPING EVENT ID arm count 1 arm stimulus SWEEP COMPL
32. DF see Adobe Acrobat or Reader help for information about bookmarks The manual sections are also listed in the Table of Contents located at the beginning of this manual Model 2651A applications In addition to being a stand alone instrument the Keithley Instruments Model 2651A High Power oystem SourceMeter Instrument can intelligently connect to other instruments and multiple devices This manual provides application examples that guide you through several common instrument to instrument scenarios These applications are presented after the summary information about the High Power System SourceMeter Instrument and include e Making basic front panel measurements on page 4 1 Demonstrates the basic measurement function using a single Model 2651A and a two terminal device under test DUT e Capturing high power pulse waveforms on page 5 1 Capturing high power pulse waveforms Demonstrates how to use the Keithley Instruments Model 2651A connected to a control computer This example introduces configuration of the instrument s trigger model to make high speed measurements of an LED 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 1 Introduction e Characterization of power discretes on page 6 1 Demonstrates how to use the Keithley Instruments Model 2651A with a second Series 2600A System SourceMeter instrument to characterize power MOSFETs and IGBTs This example intr
33. Downloading from website 3 1 Manuals 1 2 Measure Simultaneous current and voltage 5 1 Measurement Fast sampling ADC 5 1 Front panel 4 1 4 2 Function selecting 4 2 Range selecting 4 2 Waveforms 5 1 N Navigation wheel 2 2 2 3 NBTI 5 1 Node TSP Link 6 2 Number keys 2 2 O Operation keys ENTER 2 2 EXIT 2 2 FILTER 2 2 LIMIT 2 2 LOAD 2 2 MENU e 2 2 RECall 2 2 REL 2 2 RUN 2 2 TRIG 2 2 Oscillation 6 4 Output enable 4 2 OUTPUT ON OFF control 2 2 4 2 4 3 P Parameters CapturePulsel 5 9 CapturePulseV 5 9 Plug in Java 3 1 Power Discrete l V curve testing 6 1 Pulses High power pulses 5 1 H Range Index 2 Selecting auto 4 2 Reading buffer 3 7 Downloading 3 7 Reading buffers 3 7 Displaying readings 3 7 Readings Display 4 3 Observing 3 7 4 3 S Scripts CapturePulsel 5 9 CapturePulseV 5 9 Clearing 3 6 Create in TSB Embedded 3 3 3 4 Deleting 3 6 Examples 5 4 5 9 7 9 7 16 Exporting 3 6 Fast ADC 6 10 6 16 Importing 3 6 Management 3 6 Stopping 3 6 Viewing 3 6 SMU Combining to increase current sourcing 7 1 Source Level 4 2 Speed Fast sampling ADC 5 1 Sweep Parameters adjust 6 16 Voltage 6 5 T Test Script Processor 6 10 Tests Discrete l V curve 6 1 Trigger model Configuring 5 2 6 5 7 6 Described 6 8 7 8 Diagram 6 6 Initiali
34. EITHLEY A GREATER MEASURE OF CONFIDENCE Welcome Page IP Configuration Instrument Model Manufacturer Set Password Firmware Revision TSB Embedded Serial Number Reading Buffers Description ciii cine LXI Class N LXI Version Log MAC Address a Glossary DEMENS CPP Address tiet Mtis dies di mo to atn an 1 From the navigation area on the left side of the web interface select TSP Express The TSP Express page is displayed 2 Click the Launch button The TSP Express window opens 3 There is a help pane on the right side of the main window You can adjust the width of the help pane by sliding the vertical bar Click and follow the step by step example to become familiar with TSP Express there is a link to the example in the TSP Express Introduction s first paragraph 2651A 900 01 Rev A March 2011 3 9 Section 3 Using the web interface Model 2651A High Power System SourceMeter Instrument User s Manua 3 10 Figure 10 TSP Keithley Instruments Inc TSP Express File Edit Instrument View Help WEZ c TSP Ceres Quick amp Easy I V Test Quick Start Tools Single SMU sweeps and measurements Multiple SMU sweeps and measurements m nf Basic Sequential SDM Source Delay Measure nr Advanced Sequential SDM FET Sweep Example Project ajeji KEITHLEY TSP Express View or change instrument configuration Open an existing pr
35. ETE EVENT ID ARMED EVENT ID 50e 3 s Trigger layer trigger timer 1 stimulus EVENT ID passthrough true source stimulus SOURCE COMPLETE EVENT I i D Lr esee COMPLETE EVENT ID Oo PULSE COMPLETE EVENT ID o trigger timer 2 measure stimulus stimulus emelpuuill se stam Lus passthrough false COuime i tsplink trigger 1 EVENT ID TSP Link mode tplink TRIG PALLING stimulus Model 2651A subordinate node 2 smua trigger IDLE EVENT ID Idle TSP Link 9 Arm layer SWEEPING EVENT ID tsplink trigger 1 E arm count 2 1 EVENT ID arm stimulus m SWEEP COMPLETE EVENT ID mode tsplink TRIG FALLING Trigger layer source stimulus SOURCE COMPLETE EVENT ID trigger timer 1 measure stimulus m EVENT ID MEASURE COMPLETE EVENT ID stimulus endpulse stimulus ial PULSE COMPLETE EVENT ID re s passthrough false count 1 2651A 900 01 Rev A March 2011 1 1 Section 7 Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter Instrument User s Manual Master Model 2651A node 1 trigger model operation In the master Model 2651A node 1 trigger model timer 1 controls the period of the pulse while timer 2 controls the pulse width TSP Link trigger 1 prompts Model 2651A subordinate node 2 to output its pulse When the trigger model of the master Model 2651A node 1 is initialize
36. ION Carefully consider and configure the appropriate output off state source and compliance levels before connecting the Model 2651A High Power System SourceMeter Instrument to a device that can deliver energy for example other voltage sources batteries capacitors solar cells or other Series 2600A System SourceMeter instruments Program recommended instrument settings before making connections to the device Failure to consider the output off state source and compliance levels may result in damage to the instrument or to the device under test DUT To combine two Model 2651A High Power System SourceMeter Instruments to output a pulse that is greater than that of a single instrument the current sources are connected in parallel This delivers the sum of the currents to the DUT which allows a sweep of the DUT up to 100 A The following figure illustrates this principle of combining current sources Figure 23 Sum of parallel current sources Because each Model 2651A can produce up to 50 A placing the instruments in parallel can deliver up to 100 A In this example we will sweep the DUT using each Model 2651A to source exactly half of the desired total current level for each point in the sweep 1 2 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 7 Increasing SMU current sourcing ability Equipment needed for this example To run this test you will need the followin
37. Se Timer 1 controls the pulse period by triggering the pulse to begin trigger messe OU i dsteps 1 trigger timer 1 delay pulsePeriod trigger timer 1 passthrough true trigger imer stim lus Sele a E EE ET trigger timer 1 clear Timer 2 controls the pulse width Erigger tamer 72 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false Pewee te je SN d 7 stimulus evils e XUI COMP ETE TEVENT EID trigger timer 2Z clear Configure SMU Trigger Model for Sweep Hach unic will source halt che current SO divide the stare onl e e POO values by eZ smua trigger source lineari dstart 2 dstop 2 dsteps smua trigger source limitv pulseclimit pulseLimit 021 Again keep the limit SMU 1 lower than the limit of SMU 2 to prevent parallel VSsources smua trigger measure iv smua nvbufferl smua nvbuffer2 smua trigger measure action smua ENABLE Return to the bias level at the end of the pulse sweep smua trigger endpulse action em OURE 1 DEE smua trigger endsweep action clita OURCHI MEPIDIES Smllay trrgger count dsteps smua ele IE ORO Ee eee s eI TD s 0 smua trigger source stimulus wie lege eee eV EPI TID smua trigger measure stimulus 0 Sune ase reor ere Sincliou iste 3 Siem bed WS ere e sue e eate E oe RS RR GI ID smua trigger source action smua ENABLE 7 12 2651A 900 01 Rev A March 2011 Model 2651A High Power
38. System SourceMeter Instrument User s Manual Section 7 Increasing SMU current sourcing ability C onr igure 2691A F2 Drain 9 SMU 2 node 2 smua reset node 2 smua source func ze I stmte c OUT Habe Ali node 2 smua sense node nudi node 2 smua source offmode HOC sSnmulsy CU TU EIDHIE NORMAT node l2 sma source ofttunc ode sre UNE GAS nocdel2lsmusassource oftflumitv 10 et Or ke limit SMU will be a OA current source with 10V limit when output is turned off node 2 smua source rangel MatheMeax Matheebs start 2 math abe derop 1 27 node 2 smua source leveli 0 gt Sets the DC bias level node Z smua source limity 10 ers ene DC bias limir node 2 smua measure nplc 0 005 node 2 smua measure rangev pulseLimit node l I emu medsure cs ro noc de omua AUTOZERO TONCE node 2 smua measure delay pulseWidth 1 node 2 linefreg node 2 smua measure nplc 20e 6 Set the delay so that the measurement is near the end of the pulse Prepare the reading buffers node 2Z smua nvoufterl clear node 2 smua nvbufferl collecttimestamps 1 node 2 smua nvbufferl collectsourcevalues 1 node 2 smua nvbufferl fillmode srerere ena bP Lit Ones node 2 smua nvbuffer2 clear node 2 smua nvbuffer2 collecttimestamps 1 node 2 smua nvbuffer2 collectsourcevalues 1 node 2 smua nvbuffer2 fillmode Ole L2 Te sims IE IE TEE c ONCE COMmrgure ToP hink psc modeles p
39. T B Sie dU mg S pug endpulse stimulus E LSE COMPLETE EVENT I tsplink trigger 1 EVENT ID a mode tsplink TRIG SYNCHRONOUSM stimulus TSP Link 9 tsplink trigger 2 EVENT ID a mode tsplink TRIG FALLING stimulus TSP Link bus 2651A 900 01 Rev A March 2011 6 7 Section 6 Characterization of power discretes Model 2651A High Power System SourceMeter Instrument User s Manual 6 8 When the configured trigger model of the Model 2651A is initiated the following occurs 1 10 11 12 13 14 15 The source measure unit SMU trigger model passes through the Arm Layer enters the Trigger Layer then outputs the ARMED event trigger The ARMED event trigger triggers TSP Link trigger 1 which outputs a trigger on TSP Link line 1 This trigger is meant to tell the Series 2600A that it should step the gate SMU The SMU trigger model continues until it reaches the Source Event and then pauses and waits for an event trigger A trigger comes back on TSP Link trigger 1 indicating that the gate step is complete An event trigger is output from TSP Link trigger 1 and input to timer 1 Timer 1 receives the event trigger and begins its countdown while simultaneously passing the event trigger The SMU Source Event Detector receives the event trigger from timer 1 sets the SMU output to the pulse level waits for a programmed source delay if any and outputs the SO
40. The numeric entry method may only be used if the numeric keypad is enabled If the keypad is disabled press the MENU key then select DISPLAY gt NUMPAD gt ENABLE Use the CURSOR arrow keys to move the cursor to the value that you want to edit Press any of the desired number keys 0 9 0000 The cursor moves to the next value on the right Repeat the above steps as required to set the desired values Press the ENTER key to select the value or press the EXIT LOCAL key to cancel the change Optional Press the EXIT LOCAL key to return to the main menu 2 4 2651A 900 01 Rev A March 2011 section 3 Using the web interface In this section Lge eli ee d NN ES 3 1 Connect to the instrument web interface 3 1 Web interface home page cccccseececseeeeeeeeeeeeueeeeeaeeeeesaaeees 3 2 laetae UH eM uoo 3 2 DE f iscop e 3 3 Reading DUNO NE 3 7 TSP EDOS NINE ne ea eee eto we ee 3 8 Introduction The Model 2651A web interface allows you to review instrument status control the instrument and upgrade the instrument over a LAN connection The instrument web page resides in the firmware of the instrument Changes you make through the web interface are immediately made in the instrument Many examples in this manual and in the Model 2651A Reference Manual can be run through the TSB Embedded page of the instrument web interface Connect to the instrument web interface
41. UN PU E Print back data PranebDual SmukRdsonDatat end 7 14 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 7 Increasing SMU current sourcing ability za HUTE at Ora Paint Dual l rb elena 3 Description This function processes the data stored in the SMU reading buffers by function DualsmuRdson and printes back che individual SMU dara and ihe combined SMU data and Rds on readings in a format that is copy and paste compatible with Microsoft Excel ie ae eas exo Ede ae Due re d LOSS eon Dara Print the gate SMU readings print Gate SMU r nSource Value tVoltage tCurrent purge cpssnOtormcu Ec ewer vie ale node 3 smua nvbufferl sourcevalues 1 node S smua nvoutter2 i mode b esmusepvisult rest Print column headers print TimestampNtSource ValueNtVoltage 1 tCurrent 1 tVoltage 2 Current otc a uEbemseesdsqton Loop through the reading buffer printing one row at a time cor i c smua nvbuftterl n olo Combined Source Level SMU1 source level SMU2 source level sourceLevel smua nvbufferl sourcevalues i node 2 smua nvbufferl sourcevalues i Combined Voltage Average SMU1 Voltage reading SMU2 Voltage reading combinedVoltage smua nvbuffer2 i node 2 smua nvbuffer2 i 2 Combined Current SMU1 Current reading SMU2 Current reading combinedCurrent smua nvbufferl i node 2 smua nvbufferl i Rds on Combined
42. URCE COMPLETE event to timer 2 Timer 2 receives the SOURCE COMPLETE event trigger and begins its countdown The SMU trigger model moves to the Measure Event where it waits for a programmed measure delay if any then takes a measurement The SMU trigger model moves to the End Pulse Event where it stops and waits for an event trigger from timer 2 The timer 2 countdown expires and outputs an event trigger to the SMU End Pulse Event The End Pulse Event Detector receives the event trigger from timer 2 sets the SMU output to the bias level and then continues The trigger model checks the current Trigger Layer iteration number against the trigger count e fthe iteration number is less than the trigger count the trigger model stays in the trigger layer and wraps around to the Source Event where it waits again for an event trigger from timer 1 as it did in step 3 This time however timer 2 will not receive an event trigger from TSP Link trigger 1 Despite this the trigger model will continue running because the timer 1 count was set to one less than the trigger count Therefore timer 1 will continue outputting event triggers while the trigger model is in the Trigger Layer outputting one trigger event every time the countdown expires The trigger model continues as described in step 6 e fthe iteration number is greater than the trigger count the SMU trigger model exits the Trigger Layer and goes into the Arm Layer Upon ent
43. accuracy by controlling the measurement aperture Controls relative measurements This allows a baseline value to be subtracted from a reading RUN Rumeimsseecedfacoryoruserdeiedscne TRIG Triggers readings LOCAL to take the unit out of remote operation ENTER Accepts the current selection or brings up the next menu option In most cases PU peta ENTER este same as presai ine vgn whew On Number When enabled the number keys 0 9 0000 allow direct numeric entry in the EDIT mode Press the navigation wheel 9 to enter EDIT mode see To change a value using the numeric keypad on page 2 4 Accesses the main menu The main menu can be used to configure many facets of operation RECALL Recalls data or statistics from CHANA BUFF1 or CHANA BUFF2 2651A 900 01 Rev A March 2011 2 3 Section 2 Using the front panel interface Model 2651A High Power System SourceMeter Instrument User s Manual To change a value using the navigation wheel 1 Turn the navigation wheel to go to the character you want to change the character blinks when selected Press the navigation wheel to edit that character Turn the navigation wheel to change the value Press the navigation wheel to enter the change Repeat these steps as needed to change the value oe p ee ce cfe Press the ENTER key or the navigation wheel C when finished changing all the characters To change a value using the numeric keypad Me
44. angei 10e 3 gt Mun one OU plies smua source output smua OUTPUT ON Print and place current reading in buffer print smua measure i smua nvbufferl c Turn off output smua source output smua OUTPUT_OFF Beep beeper enable beeper ON beeper beep 1 1200 beeper enable beeper OFF 2651A 900 01 Rev A March 2011 3 5 Section 3 Using the web interface Model 2651A High Power System SourceMeter Instrument User s Manual NOJ Commands and parameters for the Model 2651A are case sensitive It is important to type in the commands exactly as shown to avoid syntax and execution errors 4 Click Save Script 3 The script is added to the User Scripts list on the left Standard edit functions such as copy cut and paste work in TSB Embedded 5 Clear the buffer 4 e Inthe console type the following and then press Enter smua nvbufferl clear e lf successful the command will appear in the Instrument Output box 6 Set the buffer to append readings 4 e Inthe console type the following and then press Enter smua nvbufferl appendmode 1 e f successful the command will appear in the Instrument Output box 7 Set the buffer to collect timestamps 4 e Inthe console type the following and then press Enter smua nvbufferl collecttimestamps 1 e lf successful the command will appear in the Instrument Output box 8 Run the script e Select the script in the User Scripts list e Click Run
45. aracterization of power discretes EUM spo iy Curves Example cat Description This script will perform a serves of IV curves on a MOSFET or IGBT device and will return the data in a Microsoft Excel Compatible format for Graphing and analysis Tor hale COn mle EDITO E ele Mola amp Node 1 2651A Node 2 26xxA Master Node Node 1 mas IME CWiovwesS esee c CSCO esie Clsiceicc clog estes pulser end pulsePeriod pulseLimit Description This function will perform a series of pulsed sweeps on a MOSFET or IGBT device to generate a series of IV Curves that characterize the device Note To avoid device oscillations a series resistor on the gate terminal of the device may be required Parameters s Jerart amp The starting voltage of the gate sweep SUE o o The ending voltage of the gate sweep gsteps The number of steps in the gate sweep dotart The starting voltage of the drain sweep dstop The ending voltage of the drain sweep dsteps The number of steps in the drain sweep pulseWidth The width of the drain pulse in seconds pulsePeriod The time in seconds between the start of consecutive drain pulses in the sweep pulseLimit The current limit in amperes of the drain pulse Example Usage IV Curve a DEus con De ME E HOA CO IW IO Uses osse CeCe sess OsEeumes c ester cliceos Tetbrlsee monetae pulsePeriod pulseLimit reset tsplink reset 2 Verify that at least two nodes are present Conrigure the Drain SMU
46. c OURCH EDIE node smua trigger count gsteps node 2 smua trigger arm stimulus 0 node 2 smua trigger source stimulus mots sieejo labile ste entigforete 1b Sia VIS NGE IED node 2 smua trigger measure stimulus 0 incels E21 SmlWel rete tei Scouse ase uiillluUs toxoxele 4 T Gusoligkswencee re 2 la la Nir IID node 2 smua trigger source action smua ENABLE Configure Model 26xxA TsP Link Triggers node Z tsplink erugger L olear t node 2 tsplink trigger 1 mode Texts o sesso ibas Wee SINC T3 ONOS A Mode Z Plink trigger stimulus node memuar ger MEA ULE OMELETTE TEVENT ID nodel2 csplink trigger 2 clear node 2 tsplink trigger 2 mode quo cerod mies WRG E Er D ENG 2651A 900 01 Rev A March 2011 6 13 Section 6 Characterization of power discretes Model 2651A High Power System SourceMeter Instrument User s Manual Prepare the Gate SMU 26xxA reading buffers node 2 smua nvbufferl clear node 2 smua nvbufferl collectsourcevalues 1 if node 2 smua nvbufferl fillmode nil then node 2 smua nvbufferl fillmode oem a ROC end node 2 smua nvbuffer2 clear node 2 smua nvbuffer2 collectsourcevalues 1 if node 2 smua nvbufferl fillmode nil then node 2 smua nvbufferl fillmode cmexere oeste vs Ian Eee ING E end The SMUs are configured and ready to run the test gt QOurtpurcs on node 2 smua source output nNede de smua UEM Sila eee e coe
47. d the following occurs 1 The source measure unit SMU trigger model leaves the idle state flows through the Arm Layer enters the Trigger Layer outputs the ARMED event trigger and then reaches the Source Event where it waits for an event trigger 2 he ARMED event trigger is received by timer 1 which begins its countdown and passes the trigger through to be received by TSP Link trigger 1 timer 2 and the SMU Source Event Detector 3 TSP Link trigger 1 receives the event trigger from timer 1 and sends a trigger through the TSP Link interface to Model 2651A subordinate node 2 to instruct it to output the pulse 4 The SMU Source Event Detector receives the event trigger from timer 1 begins to output the pulse waits the programmed source delay if any outputs the SOURCE COMPLETE event to timer 2 and then allows the SMU trigger model to continue Timer 2 receives the SOURCE COMPLETE event trigger from timer 1 and begins to count down The SMU trigger model continues to the Measure Event where it waits a programmed measure delay if any takes a measurement and continues until it encounters the End Pulse Event where it waits for an event trigger The timer 2 countdown expires and timer 2 outputs an event trigger to the SMU End Pulse Event The SMU End Pulse Event Detector receives the event trigger from timer 2 outputs the falling edge of the pulse and allows the SMU trigger model to continue 9 The SMU trigger mo
48. d with no case or chassis e g a data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes contaminated and operation is affected the board should be returned to the factory for proper cleaning servicing 11 07 Table of Contents iuiigerelbfeii o PER mmm 1 1 MA Ue PEA t vs AT EI E T PEDE PERDE SUE PAPE ON PRONTO HUP T RUE MUSEOS PRI PADRE D SUCRE 1 1 ESIEDEBO OE SED Possession AA E E EXE Na eia A pad RNV xiu tns EEE T 1 1 Sy to Mis Mania MPO TETTE 1 1 GEF O POOO a aes peniteat aD PUMA MERI Mn ME DM E EUM 1 2 Organization or manual SEO IS as ciatn cts eame capa sacnide win vt nd RaDe osa Socr csn acc rd d oup i ane a EE a asi 1 2 Modol 209 A NG UN ie acces ue a eue ashes toan a Sat uuc e Uno gone decani SINE nE rU ate UR RUM EE 1 2 Using the front panel interface 11 lese eese eee eeee nee e eene nnne nennt 2 1 POO ee RR TT T Tm 2 1 miei eie 2 1 Using the web interface 11 eese eeee e ireeniieee nennen nnn n nnn nnmnnn nnnm 3 1 PT i eT PERO eps E nesuneqeersaawesancsnewianssnossaiusrantanpaunerinmaraesamentaemasacsacaswetat 3 1 Connect to the instrument web interface cccceccccsececceceeeeeeesseeeeseeeeseaeeeseeeeesensesseneeees 3 1 Nep imornace NOME atari cnc iu pedimos a tae Au DE am MENU eiaei 3 2 Juss iste E PEE EN ETT eT 3 2 TE ENDE I M RE UU UU ILU UT TR 3 3 Create a script
49. del 2651A reading buffers The data used in this example was created and placed in the buffer by the Exercise Create and run a script with TSB Embedded on page 3 4 Exercise Retrieve readings from a buffer To retrieve readings from a populated buffer 1 From the navigation area on the left side of the web interface select Reading Buffers The Reading Buffers embedded page is displayed Figure 6 Select reading buffer LXI Keithley Instruments 26514 Main Windows Internet Explorer lt j http 192 168 1 101 File Edit view Favorites Tools Help iM Secure Search i Favorites e LXI Keithley Instruments 26514 Main KEI I HLEY A GREATER MEASURE OF CONFIDENCE LXI Web Interface Welcome Pagi Welcome Page IP Configuration Instrument Model Manufacturer Set Password Firmware Revision TSB Embedded Serial Number Description Flash Upgrade LXI Class TSP Express LXI Version Log MAC Address a GlOSSAEV est oa utem PIE me ay ve 4 a Afi o 2 Select smua nvbuffer1 1 3 Inthe Recall Attributes area near the bottom of the page select Values and Time Stamp 2 4 Click Download 3 The table displays the present buffer data 2651A 900 01 Rev A March 2011 3 7 Section 3 Using the web interface Model 2651A High Power System SourceMeter Instrument User s Manual Figure 7 Downloading the reading buffer Keithley Instru
50. del compares the current trigger layer loop iteration with the trigger count e If the current iteration is less than the trigger count the trigger layer repeats and the SMU trigger model reaches Source Event where it waits for another trigger from timer 1 Because timer 1 had its count set to one less than the trigger count timer 1 will continue to output a trigger for each iteration of the Trigger Layer loop The trigger model then repeats from step 3 e If the current iteration is equal to the trigger count the SMU trigger model exits the Trigger Layer passes through the Arm Layer and returns to an idle state Model 2651A node 2 trigger model operation In the Model 2651A instrument subordinate node 2 trigger model timer 1 controls the pulse width and is programmed with the same delay as timer 2 in the Model 2651A master node 1 The pulse period is controlled by TSP Link trigger 1 which gets its triggers from the Model 2651A instrument master node 1 timer 1 so the same timer in the system controls the pulse period 7 8 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 7 Increasing SMU current sourcing ability When the trigger model of Model 2651A subordinate node 2 is initialized the following occurs 1 The source measure unit SMU trigger model leaves the idle state flows through the arm layer enters the trigger layer and reaches the Source
51. e ccccseccssececeseeceseeseseeeneeeeneneeseuess 5 9 Introduction to capturing waveforms The Model 2651A High Power System SourceMeter Instrument offers a unique feature In addition to a traditional integrating ADC the Model 2651A also features a fast sampling ADC The fast ADC of the Model 26514 allows the instrument to take measurements at high speed with capabilities similar to an oscilloscope This allows you to capture data at up to one million samples per second with more than 5000 readings in a single burst This feature allows simultaneous current and voltage measurements without any additional hardware and offers 18 bit resolution providing for high accuracy even at high speed The fast ADC of the Model 2651A allows this instrument to be used in a broad range of applications such as negative bias temperature instability NBTI testing and transient thermal analysis In this example we will demonstrate how to use the fast ADC of the Model 2651A to capture both the current and voltage waveforms of high power pulses Equipment needed for this example To run this test you will need the following equipment e Model 2651A High Power System SourceMeter Instrument e GPIB cable or Ethernet cable to connect the Model 2651A to a computer e Additional cable and connector assemblies as required to make connections to the device under test DUT for example Model 2651A KIT see Device connections on page 5 2 for a schema
52. e Model 2651A instrument sweep has completed and it is safe to go to the next step TSP Link trigger 2 outputs an event trigger to the SMU End Pulse Event Detector 8 The SMU End Pulse Event Detector receives an event trigger from TSP Link trigger 2 completes the End Pulse Action and then continues 2651A 900 01 Rev A March 2011 6 9 Section 6 Characterization of power discretes Model 2651A High Power System SourceMeter Instrument User s Manual 9 The trigger model checks the current Trigger Layer iteration number against the trigger count e If the iteration number is less than the trigger count the trigger model stays in the trigger layer and wraps around to the Source Event where it waits again for an event trigger from TSP Link Trigger 1 The trigger model repeats from step 2 e fthe iteration number is greater than the trigger count the SMU trigger model exits the Trigger Layer and goes into the Arm Layer 10 Because the arm count is set to 1 the trigger model exits the Arm Layer and returns to an idle state Example program code NOTE The example code is designed to be run from Test Script Builder or TSB Embedded It can also be run from other programming environments such as Microsoft Visual Studio or National Instruments LabVIEW However modification of the example code may be required to do so The following is a Test Script Processor TSP script that performs a series of sweeps to collect I V curv
53. e data for power MOSFETs and IGBT devices The script contains all the code necessary to e Initialize the TSP Link connection e Configure the output and trigger models of the source measure unit SMU as described in the previous section e Prepare the reading buffers e Execute the test e Return the collected data in a format that can be copied from the instrument console and pasted into Microsoft Excel The script is written using Test Script Processor TSP functions rather than as a single block of inline code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic and must be called before the code contained in them is executed Because of this running the script alone will not execute the test To execute the test run the script to load the functions into test script memory and then call the functions Refer to the documentation for Test Script Builder or TSB Embedded for directions on how to run scripts and enter commands using the instrument console The script contains comments that describe what is being performed by the lines of code and documents the functions in the script Lines starting with node 2 are commands that are being sent to the Series 26xxA through the TSP Link interface All other commands are executed on the Model 2651A 6 10 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 6 Ch
54. en repeats from step 3 e If the current iteration is equal to the trigger count the SMU trigger model exits the Trigger Layer passes through the Arm Layer and returns to idle Example program code 5 4 Me The example code is designed to be run from Test Script Builder or TSB Embedded It can also be run from other programming environments such as Microsoft Visual Studio or National Instruments LabVIEW However modification of the example code may be required to do so The following script contains all the code necessary to output and capture a current or voltage pulse using the Model 2651A fast ADC The script sets up the source measure unit SMU configures the trigger model prepares the reading buffers executes the test and outputs the collected data in a format that can be copied and pasted from the instrument console to a Microsoft Excel spreadsheet The script is written using Test Script Processor TSP functions rather than as a single block of inline code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic and must be called before the code contained in them is executed Because of this running the script alone will not execute the test To execute the test run the script to load the functions into test script memory and then call the functions Refer to the documentation for Test Script Builder or TSB Embedded on page 3 3 for directions on
55. er 2651A 901 01 For additional information on the Model 26514 refer to The Product Information CD ROM ships with the product Contains software tools drivers and product documentation including documentation for switch cards that are compatible with the Model 2651A The Keithley Instruments website http www keithley com Contains the most up to date information from the website you can access e he Knowledge Center which contains the following handbooks e The Low Level Measurements Handbook Precision DC Current Voltage and Resistance Measurements e Switching Handbook A Guide to Signal Switching in Automated Test Systems e Application notes e Updated drivers e Information on related products including e The Model 4200 SCS Semiconductor Characterization System e The Series 2600A System SourceMeter Instruments Your local Field Applications Engineer can help you with product selection configuration and usage Check the website for contact information A Action keys RECall 2 2 STORE e 2 2 C Communication Set up 5 1 6 2 7 3 Compliance Setting front panel compliance limit 4 2 Connections Device 4 1 5 2 6 4 7 4 Current Increase sourcing capability 7 1 7 2 Curves Example test script 6 10 6 16 l V curves 6 1 6 4 6 5 6 6 6 7 6 9 IV Curves parameters 6 16 D Delete script 3 6 Discovery Browser LXI 3 1 Display Observing readings 3 7 4 3 Documentation 1 2
56. ering the Arm Layer the SMU trigger model outputs the SWEEP COMPLETE event trigger TSP Link trigger 2 receives the SWEEP COMPLETE event trigger and outputs a trigger on TSP Link line 2 This trigger is meant to signal the Series 2600A that it is acceptable to continue and it no longer needs to hold the current gate level The trigger model checks the current Arm Layer iteration number against the arm count e If the iteration number is less than the arm count the trigger model stays in the Arm Layer and begins the entire process again from step 1 e If the iteration number is greater than the arm count the trigger model continues exits the Arm Layer and returns to an ildle state 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 6 Characterization of power discretes Series 26xxA instrument s trigger model operation The following figure illustrates the Series 26xxA trigger model configuration for this test Figure 21 Series 26xxA instrument s trigger model for IV curve characterization TSP Link bus Series 26xxA subordinate node 2 smua trigger PDE EVENT TIH Idle E z TSP Link 9 Arm layer SWEEPING EVENT ID tsplink trigger l 5 arm count 1 EVENT ID arm stimulus SWEEP COMPLETE EVENT ID mode tsplink TRIG SYNCHRONOUSA Trigger layer ARMED EVENT ID Se mA Lvs unt 5 tsplink trigger 2 source stimulus L i EVENT ID SOURCE COMPLETE EVENT ID
57. essing the OUTPUT ON OFF control The OUTPUT indicator light turns on 4 2 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 4 Making basic front panel measurements Step 5 Observe readings on the display 1 Observe the readings on the display Press the TRIG key if necessary to trigger the instrument to begin taking readings The readings are on the top line and source and limit values are on the bottom line For the 10 kQ resistor typical display values are 1 00000mA SEGA 10 0000 V LirmA 010 0000mA 2 Press the MEAS key several times to display measured voltage resistance power and current Typical values for the 10 kQ resistor are 10 0000 V 10 0000 kQ 10 0000 mw and 1 00000 mA Step 6 Turn output off When finished turn the output off by pressing the OUTPUT ON OFF control The OUTPUT indicator light will turn off 2651A 900 01 Rev A March 2011 4 3 section 5 Capturing high power pulse waveforms In this section Introduction to capturing waveforms sseeseseeeess 5 1 Equipment needed for this example 5 1 Set up communication seeesseesssesseeeereeee ener 5 1 Br ie Zewgg cie cq T o o s 5 2 Configuring the trigger model sees 5 2 Example program code asus none cans ei pee a Rt ep E race du bees etas Ep iS 5 4 Example program usag
58. g equipment e Two Model 2651A High Power System SourceMeter Instruments e One Series 2600A System SourceMeter Instrument for this application Series 2600A System SourceMeter Instrument refers to any of the following instrument models Models 2601A 2602A 2611A 2612A or 2635A 2636A e Two TSP Link cables Keithley Instruments part number CA 180 3A e One GPIB cable or Ethernet cable to connect one Model 2651A to a computer e Additional cable and connector assemblies as required to make connections to the device under test DUT for example Model 2651A KIT and Model 2600 KIT see Device connections on page 4 for a schematic of required connections NOTE The Model 2651A High Power System SourceMeter Instruments must be at the same firmware revision Set up communication The communication setup is illustrated in the following diagram GPIB is used as an example but this application can be run using any of the supported communication interfaces for the instruments A TSP Link connection enables communication between the two instruments Commands for the Model 2651A SMU 2 node 2 and the Series 2600A SMU 8 node 3 are sent over the TSP Link interface Figure 24 GPIB communication example for Rds on sweep Model 2651A SMU 1 TSP Link Node 1 Model 2651A SMU 2 TSP Link TSP Link Node 2 Series 26xxA SMU 3 TSP Link Node 3 Model 260xA Model 261xA or Model 263xA
59. ge of the instrument is not accessible seeeessssss 8 1 Save the present state of the instrument ce ecccceececceeceeeeeeeseeeeeseeeesseeeseaeeeseaeeeseeeees 8 2 LabVIEW driver for the Model 26514 ccccccsscccssceceseeceeeeeeeeteeeteeeteneeceueenseeeeeeetaneeteneess 8 2 IN GS Sta e R Q 9 1 Additional Model 2651A information usus aca udedba aka a eR bn UTR xD rbd RR ER E Guru vnd d d nia a 9 1 loo Oc POP EA l 1 2651A 900 01 Rev A March 2011 lil Section 1 Introduction In this section AALE IN PAO EIEE A A E ner ean On A ae eae EM iD ALIAE 1 1 Extended NOI IN oae oe ietetect ciscticaiecabeseitiigenetersse DUO USER DIE 1 1 Introduction to this manual cece ceeeceeeeceeeeeeeeeeeeseeeeeeeeaes 1 1 G18 Feat 3 eesin enon nO cee On EEE 1 2 Organization of manual sections seeeeseeeeeesssss 1 2 Model 2651A applications ece reto titre o ert re keinen bn e net en nes 1 2 Welcome Thank you for choosing a Keithley Instruments product The Model 2651A High Power System SourceMeter Instrument provides manufacturers of electronic components and semiconductor devices a high power source measure unit SMU A SMU is an instrument that combines source and measurement capabilities in a single instrument This combination simplifies test processes by eliminating synchronization and connection is
60. ger timer 2 passthrough false trigger timer 2 er PEIUS olivia ea deer o IEEE OTT IHE TEVENT EID Configure SMU Trigger Model for Sweep Pulse Output Pulses will all be the same level so set start and stop to the same value and the number of points in the sweep to 2 smua trigger source linearv pulseLevel pulseLevel 2 smua trigger source limiti pulseLimit smua trigger measure action smua ASYNC We want to start the measurements before the source action takes place so we must configure the ADC to operate asynchronously of the rest of the SMU trigger model actions Measure I and V during the pulse smua trigger measure iv smua nvbufferl smua nvbuffer2 Return the output to the bias level at the end of the pulse sweep smua trigger endpulse action eile SOURCE 1 DEE smua trigger endsweep action sie SOUR OIE smua trigger count numPulses Silla irigger arm sSCimulus 0 smua trigger source stimulus bees cme LL avn EID SuMUe Eales Wise SUS Se mois wie IE TO crebri EVEN TTD Suniel ELS coro Dude eec Siew NS wie Me Te sees eame EVENT TD smua bEIgger sources action smua ENABLE Siero Obs Oe output T Ma OU UH ON smua trigger initiate waitcomplete Smua S OI Ce OUIE CWE simile 5 OME Uk ORR Print Pulec Dara end 5 6 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 5 Capturing high power pulse waveforms zN
61. ges mter ITE Uk IDC VOLES node 3 smua sense node lo smua EN ESSO node 3 smua source levelv gateLevel node 3 smua source highc node 3 smua ENABLE If you find your gate oscillating even with a dampening resistor in place try enabling high C mode to help stabilize the gate Prepare the reading buffers node 3 smua nvbufferl clear node 3 smua nvbufferl collectsourcevalues 1 if node 3 smua nvbufferl fillmode nil then node 3 smua nvbufferl fillmode Ode le sna ONCE end node 3 smua nvbuffer2 clear node 3 smua nvbuffer2 collectsourcevalues 1 if node 3 smua nvbuffer2 fillmode nil then node 3 smua nvbuffer2 fillmode x Odes stib Vo Ta ETE Ibo ONCE end gt QOurtpurcs on node smua Source output Oe e a OU EU TON node Z smua source ourtpuLr Im exte zu cmu OU LP UM ON Sime SOUICCS Ou cioule smua OUTPUT ON if errorqueue count gt 0 then print Errors were encountered reset return end Give the gate some time to settle before starting the sweep delay 0 001 node 3 smua measure iv node 3 smua nvbufferl node 3 smua nvbuffer2 Start the 2651A 2 trigger model node 2 smua trigger initiate Start the 2651A 1 trigger model smua rigger IinNitidte Walt u until test 1s Complete waitcomplete Qutputs ofi node 3 smua source output snode gt Psmucd OULP UL OEE Smua SOUS ce Olle Cll smua OUTPUT OFF node 2 smua source output Ode durus
62. is configured to sweep the voltage across the drain or collector of the device The Model 2651A is configured to repeat its sweep and will do so as many times as there are steps in the sweep of the Series 2600A For example if the Model 2651A instrument s sweep contains four points and the Series 2600A instrument s sweep contains three points the Model 2651A instrument s sweep will run three times for a total of 12 points To synchronize the sweeps between instruments the trigger lines of the TSP Link interface are used The following figure illustrates the 12 point sweep example Figure 18 SMU output from configured trigger model Gate ov Series 26xxA 4V Drain ni an E or Collector OV Model 2651A 2651A 900 01 Rev A March 2011 6 5 Section 6 Characterization of power discretes Model 2651A High Power System SourceMeter Instrument User s Manual Figure 19 Trigger model configuration for IV curve characterization Model 2651A master node 1 smua trigger Idle IDLE EVENT ID SWEEPING EVENT ID Y arm count 5 Arm layer arm stimulus SWEEP COMPLETE EVENT ID trigger timer 1 stimulus EVENT ID Trigger layer 0 03 s ARMED EVENT ID passthrough true count 20 source stimulus E SOURCE COMPLETE EVENT II rsen EE MEASURE COMPLETE EVENT ID endpulse stimulus LN PULSE COMPLETE EVENT Il trigger timer stimulus EVENT ID
63. l 2651A Quick Start Guide User s Manual and Reference Manual are provided in PDF format on the Model 2651A Product Information CD ROM e Quick Start Guide Provides unpacking instructions describes basic connections and reviews basic operation information If you are new to Keithley Instruments equipment refer to the Quick Start Guide to take the steps needed to unpack set up and verify operation e User s Manual Provides application examples If you need a starting point to begin creation of applications refer to the User s Manual for a variety of specific examples e Reference Manual Includes advanced operation topics and maintenance information Programmers looking for a command reference and users looking for an in depth description of the way the instrument works including troubleshooting and optimization should refer to the Reference Manual A second CD ROM contains the Test Script Builder script development software Keithley Instruments part number KTS 850 Use this CD ROM to install the Test Script Builder Integrated Development Environment This software not only provides an environment to develop a test program but also the ability to load the test program onto the instrument Running a program loaded on the instrument eliminates the need to send individual commands from the host computer to the instrument when running a test Organization of manual sections Bookmarks for each manual section have been provided in the P
64. lear Timer 2 controls the pulse width Ea ggerecaumex2leoumnt 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger tamer 7 ystrmulus menus IET COMI EHE TEST RTT trigger timer 2 clear EEOUONRU UU ESSDEUUmSOMUUCZOSUA Meriteggernnodell Smud straggernesoumrcevlanesdrwtdStcevr e dstop dsteps smua trigger Source l Imiti pulseLimit smua trigger measure action smua ENABLE smua trigger measure iv smua nvbufferl smua nvbuffer2 smua trigger endpulse action Silber s SOUNC gr CIE DEE smua trigger endsweep action menses UE C DF smu ua trigger arm Count gsteps sm a trigger count dsteps Smile Leaggqer arm stimulus 0 smua trigger source stimulus E e secos EENT smua trigger measure stimulus 0 SMe r Ge e ero Oeo bulbi e ei heer Sense Eo eo EVENTET sm a trigger source action smua ENABLE onfigure TSP LInNk Triggers tsplink triggerll clear tsplink tremgqger mode ATG NC IN OMOU Sil topline trigger ik tc ODE ENDS Side ieee ANSI WET IID TSP Link Trigger 1 1s used by the 2651A to command the 2 6 to step the gate and for the 26xxA to report to the 2651A that it has completed the step tsplink trigger 2c clear tsplink trigger Z smode tege vale TU eL Plats eS Olam trigger Ic Cimulus E Sie Lewes Sse CONE MaMa CR HIS NIE ETE TSOP Link Trigger 2 is used by the 26021A to command the AN that it has completed the drain
65. maintenance information carefully before using the product Refer to the user documentation for complete product specifications If the product is used in a manner not specified the protection provided by the product warranty may be impaired The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating properly for example setting the line voltage or replacing consumable materials Maintenance procedures are described in the user documentation The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits perform safe installations and repair products Only properly trained service personnel may perform installation and service procedures Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category and Measurement Category ll as described in the Internatio
66. mat sq tsg tsg t smua nvbufferl sourcevalues 1 dsteps 1l Smursermobur en ay 1 7 dsteps 1l sm a nvbufferli 1 d teps 1 1J end print line end end 2651A 900 01 Rev A March 2011 6 15 Section 6 Characterization of power discretes Model 2651A High Power System SourceMeter Instrument User s Manua Example program usage 6 16 The functions of this script allow the sweep parameters of the test to be adjusted without having to rewrite and rerun the script A test can be executed by calling the function TV Curves gstart gstop gsteps dstart dstop dsteps pulseWidth pulsePeriod pulseLimit with the appropriate values passed to it in its parameters IV Curves parameters Parameror O unne Deseripon gstart Volts The level of the first step in the gate sweep gstop Volts The level of the last step in the gate sweep gsteps Volts The number of steps in the gate sweep dstart Volts The level of the first step in the drain collector sweep dstop Volts The level of the last step in the drain collector sweep dsteps Not The number of steps in the drain collector sweep applicable pulsewidth Seconds The width of the pulse in the drain collector sweep pulsePeriod Seconds The time between the start of consecutive pulses in the drain collector sweep pulseLimit Amperes The current limit of the pulses in the drain collector sweep An example call to this function is as follows a aa MESE E NU SONUS Thi
67. ments Reading Buffers Reading Number Reading smua nvbuffer1 smua nvbuffer2 RECALL ATTRIBUTES Measurement Source Other _j Functions _ Functions values _ Statuses Status Details SAVE _j Ranges _j Ranges X _j Output States C Time Stamp 5 Notice that the Source Value column is not populated To collect source values before taking readings use TSB Embedded to set the following attribute smua nvbufferl collectsourcevalues 1 Figure 8 Sample downloaded reading buffer Reading Number Reading Source Value Timestamp smua nvbutferT 1 1 46675048995 D 2 4BB75048805 208658101081 smuanvbuttert 3 110057605695 38STI4288TM emua nvhbutferz TSP Express The TSP Express tab provides access to the TSP Express Launch page From this page click the Launch button to start TSP Express 3 8 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 3 Using the web interface ae Only one TSB Embedded or TSP Express session can be running and connected to the same instrument To run TSP Express Figure 9 Select TSP Express LXI Keithley Instruments 26514 Main Windows Internet Explorer JE http 192 168 1 101 Fie Edit View Favorites Tools Help x F Favorites LXI Web Interface Welcome Pag e LXI Keithley Instruments 26514 Main K
68. ments part number CA 180 3A e GPIB cable or Ethernet cable to connect the Model 2651A to a computer e Additional cable and connector assemblies as required to make connections to the device under test DUT for example Model 2651A KIT and Model 2600 KIT see Device connections on page 6 4 for a schematic of required connections ae For this application Series 2600A System SourceMeter Instrument refers to any of the following instrument models Models 2601A 2602A 2611A 2612A or 2635A 2636A Set up communication The communication setup is illustrated in the following diagram GPIB is used as an example but this application can be run using any of the supported communication interfaces for the instruments A TSP Link connection enables communication between the two instruments Commands for the Series 2600A on TSP Link node 2 are sent over the TSP Link interface 6 2 2651A 900 01 Rev A March 2011 M odel 2651A High Power System SourceMeter Instrument User s Manual Section 6 Characterization of power discretes Figure 16 GPIB communication overview Model 2651A TSP Link Node 1 5 Controller Series 26xxA TSP Link Node 2 Model 260xA Model 261xA or Model 263xA When using the TSP Link communication interface each instrument must have a unique TSP Link node number Configure the node number for the e Model 2651A to 1 e Series 2600A to 2 To set the TSP Link n
69. mua trigger IDLE EVENT ID Idle Arm layer SWEEPING EVENT ID e arm count 1 arm stimulus SWEEP COMPLETE EVENT ID trigger timer 1 stimulus EVENT ID Trigger layer 0 03 s ARMED EVENT ID passthrough true count 4 count 5 source stimulus E SOURCE COMPLETE EVENT ID trigger timer 2 measure stimulus B NETT EVENT ID l MEASURE COMPLETE EVENT ID zx enel enS remi us 3 ms LN PULSE COMPLETE EVENT ID passthrough false count 1 Local node Since only one instrument is being used in this example the local node is used In this example timer 1 is used to control the time between pulses while timer 2 is used to control the pulse width Timer 1 also controls the start of the measurements starting them at the same time it triggers the pulse and thus overlapping the measurements with the pulse When the trigger model of the Model 2651A is initialized the following occurs 1 The source measure unit SMU trigger model e Leaves the idle state e Flows through the Arm Layer e Enters the Trigger Layer e Outputs the ARMED event trigger e Pauses at the Source Event where it waits for an event trigger 2 Timer 1 receives the ARMED event trigger and begins its countdown while passing the event trigger through to both the SMU s Source Event and Measure Event simultaneously 3 The SMU Measure Event receives the event trigger from timer 1 and begins to take measurements Because measurements have been configured t
70. must be called before the code contained in them is executed Because of this running the script alone will not execute the test To execute the test run the script to load the functions into test script memory and then call the functions Refer to the documentation for Test Script Builder or TSB Embedded for directions on how to run scripts and enter commands using the instrument console The script contains comments that describe what is being performed by the lines of code and document the functions in the script Lines starting with node 2 are commands that are being sent to Model 2651A on node 2 through the TSP Link interface Lines starting with node 3 are commands that are being sent to the Series 2600A through the TSP Link interface All other commands are executed on the master Model 2651A on node 1 SI Title Combining SMUs for 100A Example Description This script is designed to perform an Rds on sweep on a power MOSFET device It combines two 2651A SMUs in parallel to perform a current sweep up to 100A Data collected from the sweep is then returned in a Microsoit Excel compatible format for plorEemnc and analysis Equipment needed 23x 2651A 1x 26xxA ZEE Cable TOP DLAK OnT Due cus LON SINE Node 2651A 1 ji 2651A 42 2 26XXA 3 Master Node PC Interface Node 1 7 10 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 7 Increasing SMU current
71. n safe in case one SMU is turned off smua source rangei math max math abs dstart 2 math abs dstop 2 smua source leveli 0 Sets the DC bias level Smua Source limity 9 Sets the DC bias limit SMU 2 will have a voltage limit of 10V By setting the voltage limit 10 lower than that of SMU 2 we can ensure that only one of the two SMUs will ever go into compliance and become a voltage source This is desirable because if both SMUs went into compliance there would be two voltage sources in parallel Which tS an un are condition smua measure nplc 0 005 smua measure rangev pulseLimit SMU mecs esu e sme AU TOZERO ONCE smua measure delay pulseWidth 1 localnode linefreq smua measure nplc 20e 6 2651A 900 01 Rev A March 2011 1 11 Section 7 Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter Instrument User s Manual Set the delay so that the measurement is near the end of the pulse Prepare the reading buffers smua nvbufferl clear smua nvbufferl collecttimestamps 1 smua nvbufferl collectsourcevalues 1 smua nvbufferl fillmode SU BEEN smua nvbuffer2 clear smua nvbuffer2 collecttimestamps 1 smua nvbuffer2 collectsourcevalues smua nvbuffer2 fillmode onu S Oe Configure ToP Link Trigger tsplink trigger clear tsplink trigger 1 smode E a EE AEG TSP ak ergg r e Semul r a EVENTE TSP Link Trigger signals 2651A 2 ORE
72. nal Electrotechnical Commission IEC Standard IEC 60664 Most measurement control and data I O signals are Measurement Category and must not be directly connected to mains voltage or to voltage sources with high transient over voltages Measurement Category ll connections require protection for high transient over voltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category sources unless otherwise marked or described in the user documentation Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard exists when voltage levels greater than 30 V RMS 42 4 V peak or 60 VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must be protected from electric shock at all times The responsible body must ensure that operators are prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product operators in these circumstances must be trained to protect themselves from the risk of electric shock the circuit is capable of operating at or above 1000V no conductive part of the circuit may be exposed f Do not connect switching cards directly to unlimi
73. ne qose ce am node 2 tsplink trigger 1 mode OC A Ses olin WRG COR TREES T TS Timer 1 controls the pulse width nodelZ2l strrgger crmer l count 1 node 2 trigger timer 1 delay pulseWidth 3e 6 node 2 trigger timer 1 passthrough false Node erro ger semmer i sstamulus oes V4 Is Symb ie cese ctore ese c SOU Cl COMP ETSI a VIE NIE IED node 2 trigger timer 1 clear Configure SMU Trigger Model for Sweep nodel2 smua trigget Source lineari suse a7 stop Ese node 7 smua trigger source limity pulseLimit node 2 smua trigger measure iv node 2 smua nvbufferl node 2 smua nvbuffer2 node 2 smua trigger measure action node 2 smua ENABLE Return the output to the bias level at the end of the pulse sweep node 2 smua trigger endpulse action ode Z sms RIDERS node 2 smua trigger endsweep action Oe decre OUR C E T IDEE node 2 smua trigger count dsteps node Z smuUa trigger jam stimulus 0 node 2 smua trigger source stimulus oneyelS roges lnk ese rorem Ik EVENT TD node 2 smua trigger measure stimulus 0 node ZA smua irigger endpulec stimulus Ode rrigger timer EVENT TD node 2 smua trigger source action node 2 smua ENABLE 2651A 900 01 Rev A March 2011 1 13 Section 7 Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter Instrument User s Manual Configure the 26xxA Gate SMU node 3 smua reset node 3 smua source func ee e
74. o be asynchronous the Measure Event begins its execution before the Source Event has completed and will continue to take measurements even after the End Pulse Event has executed For more information see Using the remote trigger model in the Model 2651A Reference Manual 4 The SMU Source Event receives the event trigger from timer 1 begins to output the pulse and then waits the programmed source delay if any before it outputs the SOURCE COMPLETE event to timer 2 and allows the SMU trigger model to continue 2651A 900 01 Rev A March 2011 5 3 Section 5 Capturing high power pulse waveforms Model 2651A High Power System SourceMeter Instrument User s Manual 5 Timer 2 receives the SOURCE COMPLETE EVENT ID event trigger from timer 1 and begins its countdown 6 The SMU trigger model continues to the End Pulse Event where it pauses and waits for an event trigger from timer 2 The timer 2 countdown expires and timer 2 outputs an event trigger to the SMU End Pulse Event The SMU End Pulse Event receives the event trigger from timer 2 and outputs the falling edge of the pulse after which it allows the SMU trigger model to continue 9 The SMU trigger model then compares the current Trigger Layer loop iteration with the trigger count e If the current iteration is less than the trigger count the Trigger Layer repeats and the SMU trigger model reaches Source Event where it waits for another trigger from timer 1 The trigger model th
75. ode number using the front panel interface Press the MENU key Select TSPLink Select NODE Use the navigation wheel to adjust the node number Press the ENTER key to save the TSP Link node number ae d I o On the Model 2651A SMU 1 TSP Link node 1 perform a TSP Link reset to update it with the linked instruments 1 Press the MENU key 2 Select TSPLink 3 Select RESET Me If error 1205 is generated during the TSP link reset ensure that the Series 2600A has a unique TSP Link node number You can also perform a TSP Link reset from the remote command interface by sending tsplink reset to the Model 2651A This method is used in the example program 2651A 900 01 Rev A March 2011 6 3 Section 6 Characterization of power discretes Model 2651A High Power System SourceMeter Instrument User s Manual Device connections To run the test make the connections as illustrated in the following figure To ensure good contact use care when making connections ae For best results all connections should be left floating no connections should be tied to ground Figure 17 Connections for IV curve characterization Model 2651A master node 1 Equivalent SENSE GUARD OUTPUT S S LO HI LOG GGGHI e Ox nOn OnOnC je SMU master node 1 SMU subordinate node 2 40V 50A MAX Gate resistor if required LO TSP Link 8 Series 26xxA sub
76. oduces the interaction between two instruments trigger models The application performs pulsed measurements collecting IV curve data and placing it in a Microsoft Excel compatible file format for graphic and analysis e Increasing SMU current sourcing ability on page 7 1 Demonstrates how to combine two Keithley Instruments Model 2651A instruments with an additional Series 2600A System SourceMeter instrument and characterizes the resistance of a power MOSFET by sweeping current up to 100 A 2651A 900 01 Rev A March 2011 1 3 section 2 Using the front panel interface In this section ARED EE E RTT T TT T UTUNTUR 2 1 give TETTE RUD 2 1 Introduction Before starting this section complete the tasks outlined in the Model 2651A Quick Start Guide Once you have completed those tasks read this section which provides enough basic information about the Model 2651A front panel interface to work through the examples provided in this manual The front panel of the Keithley Instruments Model 2651A contains the following items 1 The POWER key 2 The display 3 The navigation wheel 4 The OUTPUT ON OFF control 5 The setup and control keys You can use the keys display and the navigation wheel to access view and edit the menu items and set values For additional information about the front panel see the General operation section in the Model 2651A Reference Manual Front panel The front panel
77. of 11 07 the equipment may be impaired Do not exceed the maximum signal levels of the instruments and accessories as defined in the specifications and operating information and as shown on the instrument or test fixture panels or switching card When fuses are used in a product replace with the same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while power is applied to the device under test Safe operation requires the use of a lid interlock Ifa QD screw is present connect it to safety earth ground using the wire recommended in the user documentation The A symbol on an instrument means caution risk of danger The user should refer to the operating instructions located in the user documentation in all cases where the symbol is marked on the instrument The A symbol on an instrument means caution risk of electric shock Use standard safety precautions to avoid personal contact with these voltages The A symbol on an instrument shows that the surface may be hot Avoid personal contact to prevent burns The symbol indicates a connection terminal to the equipment frame If this symbol is on a product it indicates that mercury is present in the display lamp Please note that the lamp must be properly disposed of according to federal state
78. of the Model 2651A is shown below Section 2 Using the front panel interface Model 2651A High Power System SourceMeter Instrument User s Manual 1 2 3 4 5 2 2 Figure 1 Front panel 3 21000V SrcA 20 0000 A LimAL10 0000V The POWER key Press this key to turn the instrument on Press it again to turn the instrument off 0 The display During operation the display provides readings and information about the selected measurement and configuration It also shows the control status local or remote If REM is displayed the instrument is being controlled remotely through GPIB LAN or USB If REM is not displayed control is through the front panel During setup the display shows menu choices that you can use to configure the instrument The items listed below represent the possible display indicators and what they mean Indicator Meaning EDIT Unit is in the source editing mode ERR Questionable reading or invalid calibration step REM Unit is in remote mode TALK Unit is addressed to talk LSTN Unit is addressed to listen SRQ Service request is asserted REL Relative mode is enabled FILT Digital filter is enabled AUTO Source or measure autorange is selected asterisk Readings are being stored in the buffer The navigation wheel Turn the navigation wheel to scroll to a menu option or to change the selected value Push the navigation wheel to open menus or to
79. oject Open an existing script New script Outline view of script A GREATER MEASURE OF CONFIDENCE 15 xl KEITHLEY i v auto navigate x TSP Express Introduction TSP Express is a utility that easily creates runnable scripts for the Keithley Instruments Series 2600A SourceMeter Instruments SMU Click here for a quick step by step example TSP Express may be launched via a web link from any Series 2600A instrument or by using a shortcut on the PC See launching the application for more details The start up screen is the TSP Express project wizard It provides a menu of choices for building new test scripts as well as options for opening existing projects and scripts It also allows the user to view or change instrument configurations The start up screen is shown whenever TSP Express is launched or when an existing project is closed File Close Project To work with scripts or projects select from the following options Quick Start the choices in this section help quickly get started creating scripts n le SMU sweeps and measurements Create a simple project with a single functional segment to generate basic voltage and or current sweeps This is useful for two terminal device characterization and similar applications cu Pal hd 2651A 900 01 Rev A March 2011 section 4 Making basic front panel measurements In this section LES T E PNE TITO TTE 4
80. ordinate node 2 N Channel power MOSFET LIOS G HIG GGS LO HI Gate resistor if required S LO Model 260xA Model 261xA or Model 263xA MOJI During high current pulsing through the channel of the device the gate may begin to oscillate This oscillation creates an unstable voltage on the gate which may cause unstable measurements through the device channel You can install a resistor to dampen this oscillation and stabilize the gate Install the resistor between the gate of the device and the force and sense HI of the Model 2651A If the gate still remains unstable enable High C mode on the Model 2651A source measure unit SMU 6 4 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 6 Characterization of power discretes Configuring the trigger model Correctly configuring the trigger model allows you to achieve pulsed measurements with precise timing and current levels up to 50 A on the Model 2651A The following figure illustrates this test s overall trigger model configuration including the interactions between the Model 2651A and the Series 2600A instrument Refer to the Example program code on page 6 10 for an implementation of this trigger model In this example the trigger model of each instrument is configured to perform a linear sweep The Series 2600A is configured to sweep the voltage applied to the gate of the device The Model 2651A
81. s call sweeps the drain of the device from 0 V to 10 V in 21 points The points of this sweep are gathered using pulsed measurements with a pulse width of 300 us and a pulse period of 30 ms for a 1 percent duty cycle These pulses are limited to a maximum of 50 A This sweep is performed at five different gate voltages Starting with 5 V and ending at 9 V The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis 2651A 900 01 Rev A March 2011 section 7 Increasing SMU current sourcing ability In this section Introduction to combining SMU S secs cscs oe oie doner ntt ande 7 1 Combining SMUs to increase current sourcing capability 7 2 Equipment needed for this example 7 3 Ser p II eie NI E ened 7 3 Device COMO CHO oustsctcensiei E Me Peanut Ir iHe etri DUE eee 7 4 Configuring the trigger model eese 7 6 Example program code cccceeccceccceeeceeeceeeeceeeceueseueeseeessuss 7 9 Example program usage wocsscnacscnsdnscnavecencacwacniaserdconssaaadatsnesices 7 16 Introduction to combining SMUs A common test performed on power MOSFETs characterizes the resistance of the device under test DUT In this test the gate of the DUT is held at a constant voltage representing the on state of the device while a current
82. s call will output five 50 A pulses with a 300 us pulse width The pulses will be limited to 10 V and have a 1 duty cycle At the completion of the pulsed outputs the SMU output is turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis 5 10 2651A 900 01 Rev A March 2011 section 6 Characterization of power discretes In this section Introduction to power discrete l V curve testing 6 1 Equipment needed for this example 6 2 Set up communication seeeeseeesseseseeeneee ener 6 2 Br ele We ea ai ee p cm E peat eres 6 4 Configuring the trigger model eeeeeees 6 5 Example program COUGB csse eost e eo os ta deri en ES usi es ind RS 6 10 Example program USBCIB sep aan REUS ul pda ER a i ap 6 16 Introduction to power discrete I V curve testing A common test performed on power MOSFETs and IGBTs characterizes the l V performance of the device under test DUT at various gate voltages In this test the gate of the device is held at a constant voltage while the voltage on the drain or collector of the device is swept and current is measured This process is repeated for several different gate voltages and the resulting data is plotted to show a series of l V curves for the device
83. select a menu option or a value In most cases pressing the navigation wheel performs the same action as pressing the ENTER key The OUTPUT ON OFF control Press this control to turn the Model 2651A source output on or off The output indicator will light when the source is on The setup and control keys provide front panel control and configuration The following figure illustrates each key s location The table following the figure contains a definition of each key 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 2 Using the front panel interface Figure 2 Setup and control keys 7 8 9 9 QOO GG O zo qj 1 2 3 0000 LOCAL RUN LL 0 LD GUD Q CONFIG Key descriptions Key Description ooo DISPLAY Toggles between the various source measure displays and the user message mode CONFIG Configures a function or operation Key SRC Selects the source function V or A and places the cursor in the source field for editing REL MEAS Cycles through measure functions V A Q or W LIMIT Places the cursor in the compliance limit field for editing Also selects the limit value to edit V A or W Directly controls the mode DIGITS Cycles through display resolution 4 1 2 5 1 2 or 6 1 2 digits Selects either the fast or integrating A D converter When the integrating A D converter is selected this key also sets the measurement speed and
84. smua sense smua SENSE REMOTE smua source rangev pulseLevel smua source levelv 0 The bias level smua source limiti 5 The DG limit Use a measure range that is as large as the biggest possible pulse smua measure rangei pulseLimit smua measure rangev pulseLevel Select the fast ADC for measurements smua measure adc smile ADe FEAST Set the measure count to be 1 25 times the width of the pulse to ensure we capture the entire pulse plus falling edge smua measure count pulseWidth smua measure interval 1 25 Prepare the reading buffers smua nvbufferl clear smua nvbufferl collecttimestamps 1 smua nvbufferl collectsourcevalues 0 smua nvbufferl fillmode eMule Pint OS smua nvoutter2Z clear smua nvbuffer2 collecttimestamps 1 smua nvbuffer2 collectsourcevalues 0 smua nvbuffer2 fillmode Emu SOC Cannot use source values with async measurements 2651A 900 01 Rev A March 2011 9 5 Section 5 Capturing high power pulse waveforms Model 2651A High Power System SourceMeter Instrument User s Manual Configure the Pulsed Sweep setup Timer 1 controls the pulse period trigger timer i count numPulses 1 cu Dury ele trigger timer 1 delay pulseWidth 0 01 trigger timer 1 passthrough true jer olores ceo ed be mes eran D OL nuce aree qe ET MED ENT Timer 2 controls the pulse width trigger warmer Z count 1 trigger timer 2 delay pulseWidth 3e 6 trig
85. snvbutterlocolleocttrmestanmps 1 smua nvbufferl collectsourcevalues 0 smua nvbufferl fillmode smua ETLLUT ONCE smua nvbuffer2 clear smua nvbuffer2 collecttimestamps 1 smua nvbuffer2 collectsourcevalues 0 smua nvbuffer2 fillmode Stites OTI Cannot use source values with async measurements 2651A 900 01 Rev A March 2011 o Section 5 Capturing high power pulse waveforms Model 2651A High Power System SourceMeter Instrument User s Manual Configure the Pulsed Sweep setup Timer 1 controls the pulse period Erigger timer i count numPulses 1l ik D ty Cycle trigger timer 1 delay pulseWidth 0 01 trigger timer 1 passthrough true trigger timer l stimulus a T E PED M2 DUNT Timer 2 controls the pulse width trigger timer 2 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger timerl2 stimulus A e OCE COMET a IS FEVENT TET Configure SMU Trigger Model for Sweep Pulse Output Pulses will all be the same level so set start and stop to the same value and the number of points in the sweep to 2 smua trigger source lineari pulseLevel pulseLevel 2 m a PI2goensourbce l ums pulseLimit smua trigger measure action smua ASYNC We want to start the measurements before the source action takes place so we must configure the ADC to operate asynchronously of the rest of the SMU trigger model actions Measure I and V during the pulse
86. sues associated with multiple instrument solutions A Model 2651A provides a scalable high throughput highly cost effective solution for precision DC pulse and low frequency AC source measure testing that also maintains code compatibility with the Series 2600A Extended warranty Additional years of warranty coverage are available on many products These valuable contracts protect you from unbudgeted service expenses and provide additional years of protection at a fraction of the price of a repair Extended warranties are available on new and existing products Contact your local Keithley Instruments representative for details Introduction to this manual This manual provides detailed tutorials to help you achieve success with your Keithley Instruments Model 26514 In addition the basics of the two simplest interfaces the front panel and the web interface are provided to familiarize you with the instrument Select and run all examples in Sections 5 6 and 7 that are relevant to your intended use and to the equipment you are using some of the examples in this manual may use unfamiliar commands and concepts For detailed information about these refer to the Reference Manual part number 2651A 901 01 on the Product Information CD ROM that came with your instrument Section 1 Introduction Model 2651A High Power System SourceMeter Instrument User s Manual CD ROM contents Two CD ROMs are shipped with each Model 2651A order The Mode
87. sweep and that the 26xxA continue 6 12 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 6 Characterization of power discretes Prepare the Drain SMU 2651A reading buffers smua nvbufferl clear smua nvbufferl collectsourcevalues 1 Ssumulel obs ORDER cere dos tte mode eme d IDs ONCE smua nvbuffer2 clear smua nvbuffer2 collectsourcevalues Sm bL 5 TOS TOXOE E tens Zi dob exo es site e IE Eri OSEE Configure the Gate SMU 26xxA node 2 smua reset node 2 smua source func nede Z ie mice muU pp SI node 2 smua sense ede stud ot TS EE TO do node 2 smua source levelv 0 node 2 smua source limiti 100e 3 node 2 smua measure delay 300e 6 Give gate 300us to settle Do not need to configure any additional measure settings Liming 2S mot Critical om the gate So autorange will do node 2 smua source highc node 2 smua DISABLE If you find the gate to be unstable even with a gate resistor NIE asc etae gebe onode 2 emua ENABLE mnesmpbovesesmel ab va Configure Gate SMU 26xxA Trigger Model node 2 smua trigger source linearv gstart gstop gsteps node Z smudetu meer source limiti 100e 3 node 2 smua trigger measure action node 2 smua ENABLE node 2 smua trigger measure iv node 2 smua nvbufferl node 2 smua nvbuffer2 node 2 smua trigger endpulse action sla SOURCE SOL node 2 smua trigger endsweep action So
88. t tab 2 Inthe model number box type 2651A 3 From the list select Software and click the search icon A list of software applications for the Model 2651A is displayed 4 Seethe readme file included with the application for more information For more information about the LXI Consortium see the LXI Consortium website http www Ixistandard org Alternatively use the following instructions to connect to the instrument web interface 1 Confirm the LAN light on the instrument is illuminated The LAN light is located on the rear panel as part of the LAN RJ 45 connector 2 Openan Internet browser such as Microsoft Windows Internet Explorer version 6 0 or later only 3 If you do not know the IP address press the MENU key on the instrument front panel and then select LAN gt STATUS gt IP ADDRESS 4 Inthe Address box of the Internet browser enter the IP address of the instrument and press Enter The home page of the instrument web interface is displayed Web interface home page The Welcome page of the web interface gives you basic information about the instrument including e The instrument model serial number firmware revision calibration date and LXI information e AnD button to help you locate the instrument e Links to the instrument web applications including TSB Embedded Reading Buffers Flash Upgrade and TSP Express IP configuration tab The IP Configuration tab provides access to the Model 26
89. ted power circuits They are intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protective devices to limit fault current and voltage to the card Before operating an instrument ensure that the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use When installing equipment where access to the main power cord is restricted such as rack mounting a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator For maximum safety do not touch the product test cables or any other instruments while power is applied to the circuit under test ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface capable of withstanding the voltage being measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety
90. tic of required connections Set up communication The communication setup is illustrated in the following diagram GPIB is used as an example but this application can be run using any of the supported communication interfaces for the instrument Section 5 Capturing high power pulse waveforms Model 2651A High Power System SourceMeter Instrument User s Manual Figure 12 GPIB communication example for fast ADC 3 21000V SrcA 20 0000 A LimAL10 O000V Device connections Make the connections as illustrated in the following figure To ensure good contact use care when making connections Figure 13 Connections for fast ADC example Model 2651A SENSE GUARD S S LOG G G GHI 40V 50A MAX Equivalent Configuring the trigger model To output precisely timed high power pulses and accurately capture the pulse with the fast ADC the trigger model of the Model 2651A High Power System SourceMeter Instrument must be used Using the trigger model we can output pulses as large as 50 A with pulse widths as small as 100 us and position our measurements with microsecond resolution The image below is a diagram of the trigger model used in this example 5 2 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Section 5 Capturing high power pulse waveforms Figure 14 Trigger model configuration for fast ADC example Model 2651A Local node s
91. using TSB Embedded tti tro rene Gea RE asse HC Issue Io ER Tac DM EL FUAE REGE 3 3 Exercise Create and run a script with TSB Embedded eeeeeeeeeeereee 3 4 Poan PI ENDE E TO EE 3 7 Exercise Retrieve readings from a buffer eese nnne 3 7 Er ETT cee NU T T NEC TN NC P ENTORNO mee cere aes 3 8 Making basic front panel measurements eeceeeeeeeeeeeeesss 4 1 nie ai eure MEET 4 1 Equipment needed for this example iu eieepe tur ksc ne os nesitbeus dux FU pro do cmi EO ve Lkne I EU pe epe nr at pns 4 1 Br e teegi iled INNER E mm E 4 1 Making front panel measurements sssssssssssssssssssee esee nennen nnn nnns nnn nnns 4 2 Step 1 Select and set source level sseesssesssssssssssssseeeeene nennen nennen nnns 4 2 Step 2 Set ve e m o IR TT RP 4 2 Step 3 Select measurement function and range cccccseececcseeecceeeeccseececceueeecseueeessaeeeesaees 4 2 DURS TUI CUIPUEUD cescisieteiembedisittessiuephen E ENDE PIE UM MM UE 4 2 Step 5 Observe readings on the display cccceccccssseecceececceeeeecseseecceueseeseuseesseuseessaeeessages 4 3 Step 6 Turn output off eussciceseieie turni tnum eret ance aneexdseaeasdnntdnctseniaacbeensenenehsbaaandecsdenedlectusetesatceese 4 3 Table of Contents Model 2651A High Power System SourceMeter Instrument User s Manual Capturing high power pulse waveforms
92. www keithley com Model 2651A High Power System SourceMeter Instrument User s Manual 2651A 900 01 Rev A March 2011 KEITHLEY Model 2651A High Power System SourceMeter Instrument User s Manual 2011 Keithley Instruments Inc Cleveland Ohio U S A All rights reserved Any unauthorized reproduction photocopy or use the information herein in whole or in part without the prior written approval of Keithley Instruments Inc is strictly prohibited All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Inc Other brand names are trademarks or registered trademarks of their respective holders The Lua 5 0 software and associated documentation files are copyright 1994 2008 Tecgraf PUC Rio Terms of license for the Lua software and associated documentation can be accessed at the Lua licensing site http www lua org license html Document number 2651A 900 01 Rev A March 2011 The following safety precautions should be observed before using this product and any associated instrumentation Although some instruments and accessories would normally be used with nonhazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read and follow all installation operation and
93. zation 5 2 Operation 6 7 6 8 6 9 Troubleshooting 8 1 External trigger lines 8 1 IP address 3 1 3 2 8 1 LabVIEW driver 8 2 Line frequency 8 1 Save present state 8 2 Voltage 8 1 Web page 3 1 3 2 8 1 TSB Embedded 3 3 Script create with 3 3 TSP Express 3 8 2651A 900 01 Rev A March 2011 Model 2651A High Power System SourceMeter Instrument User s Manual Index TSP Link Nodes 6 2 V Voltage Source set level 4 2 W Warranty 1 1 Web interface 3 1 Accessing 3 1 Browser requirements 3 1 Home page 3 2 IP address configuration 3 2 Reading buffers 3 7 TSB Embedded 3 3 TSP Express 3 8 Using 3 1 2651A 900 01 Rev A March 2011 Index 3 Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies KEITHLEY A GREAT ER MEAS URE QT CONFIDENCE Keithley Instruments Inc Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY www keithley com 12 06

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