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MiniVac Controller - Agilent Technologies

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1. 1 2 gt O or ZAN men P Mini Vac LO tL E ak 10 2 R 9 a 1 U Y u 8g T 3 P au 6 T 8 c 5 V T i 205 2058 mA kV fi 7 44 V 1V 1mA NU as LS O O L Figura 2 Pannello frontale del Controller 1 Led High Load si accende quando la corrente assorbita dalla pompa raggiunge il valore di 12 mA LED polarit selezionata in uscita Scala tensione in uscita KV Interruttore ON OFF principale Scala grafica a LED Tensione Corrente LED H V ON Connettore di uscita segnale proporzionale alla corrente 1 V 1 mA log COU IO ejJ wo m Scala in corrente mA 14 70 MiniVac Controller User Manual 87 900 049 01 H Istruzioni per l uso 1 1 FUSE T2A HIGH VOLTA ACCESSORY H V CABLE INTERLOCK Figura 3 Pannello posteriore dei Controller 1 Modulo di ingresso dell alimentazione per il Controller Comprende il fusibile di protezione il cambia tensione la presa di alimentazione di potenza ed il filtro EMC non compreso nel blocco presa cambia tensione 2 Connettore di uscita alta tensione per alimentazione pompa tipo KINGS O FISCHER 3 Connettore di ingresso uscita segnali per accessori 4 Controller cable Interlock 5 Plug Interlock L unit provvista di un selettore per la Tensione di Linea Fare riferimento al paragrafo INSTALLATION della sezione TECHNICAL INFORMATION per i dettagli
2. 44 70 MiniVac Controller User Manual 87 900 049 01 H Instructions for Use 4 FUSE T2A ACCESSORY a 5 H V GABLE INTERLOCK Figure 3 Controller Rear Panel 1 Input module for the controller power supply It includes the protection fuse the voltage changer the power supply plug and the EMC filter not included into the plug voltage switch assembly 2 High voltage output connector for the pump KINGS or FISCHER type power supply 3 Input output signal connector for fittings 4 Controller cable Interlock 5 Plug Interlock The unit is provided with a Line Voltage selector Refer to the INSTALLATION paragraph of TECHNICAL INFORMATION section for details about the Line Voltage selection operation MiniVac Controller User Manual 87 900 049 01 H 45 70 4 Instructions for Use Use Procedure Interlock The Interlock is a safety device designed by Agilent to protect the operator against serious injury caused by the high voltage present on the pump power connector The controller is intended to be used with a HV cable furnished with Interlock If the customer does not wish to use the HV cable with interlock for particular application reguirements the interlock cable of the controller 4 is available Start Up of the Pump To start the pump 1 Connect the pump to the controller using the specific HV cable 2 Connect the Interlock of
3. 22 70 MiniVac Controller User Manual 87 900 049 01 H Gebrauch Gebrauchsanleitung 2 Beim Betrieb m ssen folgende Umgebungs bedingungen eingehalten werden Temperatur von 0 C bis 45 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend F r den Anschlu des Controllers an die Pumpe mu das zum Controller geh rende Kabel benutzt werden Andere Anschl sse und die Installation optionalen Zubeh rs ist im Abschnitt Technical Information beschrieben In diesem Kapitel sind die wichtigsten Betriebsvorg nge aufgef hrt F r weitere Hinweise bez glich Anschl sse und Montage des bestellbaren Zubeh rs siehe Kapitel Use im Anhang zu Technical Information Vor Benutzung des Controllers s mtliche elektrischen und pneumatischen Anschl sse ausf hren und die Betriebsanleitung der angeschlossenen Pumpe durchlesen Steuerungen Anzeigen und Anschl sse des Controllers Nachstehend werden dass Bedienfeld des Controllers sowie die Anschlu felder beschrieben F r weitere Einzelheiten siehe Technical Information MiniVac Controller User Manual 87 900 049 01 H 23 70 2 Gebrauchsanleitung 24 70 1 2 O ot TN HIGH P Mini Vac AD tL E ak 10 2 R 9 a U u 8 T 3 P 7030 6 T 8 i 5 y TOIE E A i 2p mA kV fi 7 Eug V 1V 1mA NU as Abbildung 2
4. 87 900 049 01 H 31 70 3 Mode d emploi Chague contr leur est fourni par Agilent pr quip pour une certaine tension d alimentation Mod le 929 0190 KINGS type High voltage connector 120 Vac 50 60 Hz Mod le 929 0191 FISCHER type High voltage connector 120 Vac 50 60 Hz Mod le 929 0290 FISCHER type High voltage connector 220 Vac 50 60 Hz Mod le 929 0291 KINGS type High voltage connector 220 Vac 50 60 Hz Installation AVERTISSEMENT Le contr leur est dote d un c ble d alimentation trois fils avec une fiche du type approuve au niveau international Utiliser toujours ce c ble d alimentation et introduire la fiche dans une prise pourvue d un branchement appropri a la masse afin d viter toute d charge lectrique A l int rieur du contr leur se d veloppent de hautes tensions qui peuvent provoquer de graves dommages et m me la mort Avant d effectuer toute op ration d installation ou d entretien du contr leur le d brancher de la prise d alimentation Le contr leur doit tre install dans une baie pr vue cet effet ll est en tout cas n cessaire que l air de refroidissement puisse circuler librement l int rieur de l appareil Ne pas installer et ou utiliser le contr leur dans des milieux expos s aux agents atmosph riques pluie gel neige aux poussi res aux gaz de combat ni dans des milieux explosifs ou risque lev d incendie 32 70
5. High voltage can cause severe injury or death Before installing or removing the connector Turn the power off When connecting the cable to 2 I s pumps or larger be sure that the ground spring is in place on the high voltage connection of the pump Install the pump connector and secure it with screws Plug the controller connector 60 70 MiniVac Controller User Manual 87 900 049 01 H Operation Technical Information 5 Make all vacuum manifold and electrical connections and refer to the ion pump instruction manual prior to operating the MiniVac controller The accessory P001 connector should be left in position including the jumper between pin 3 and 7 if no external connection has been made For small ion pumps up to 8 l s with a roughing pump establish a rough pressure suitable to start the ion pump For medium ion pump 20 l s to 60 l s establish a pressure lower than 10 mbar Torr For large ion pumps 120 1 s to 400 1 5 establish a pressure lower than 2 x 10 mbar Torr Before plugging in the controller power cable be sure that the selected operating voltage matches the power source to avoid eguipment damage 1 Plug the controller power cable into a suitable power source 2 Place the ON OFF switch in the ON position 3 Monitor the VacIon pump current and the controller high voltage output by watching the LED lit then read the corresponding current voltage value e g if the third
6. Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 0 2 3452 2455 Fax 82 0 2 3452 3947 Toll free 080 222 2452 Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2012 Printed in ITALY 01 2012 Publication Number 87 900 049 01 H d Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin C
7. Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one L HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed toxic L Corrosive L Reactive L1 Flammable L Explosive LJ Biological L Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next pag Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Date Pg 2 3 Agilent Technologies Vacuum
8. i 205 2058 mA kV fi 7 44 V 1V 1mA NU as LS O O L Figure 2 Tableau avant du Contr leur 1 Led High Load charge lev e il clignote quand le courant consomm par la pompe atteint la valeur de 12 mA LED polarit s lectionn e la sortie Echelle de courant la sortie KV Interrupteur ON OFF principal chelle graphigue LED Tension Courant LED H V ON Connecteur de sortie signal proportionne au courant 1 V 1 mA log coju o gt a e gt co ro Echelle de courant mA 34 70 MiniVac Controller User Manual 87 900 049 01 H Mode d emploi 3 1 FUSE TDA H V CABLE 4 INTERLOCK ACCESSORY Figure 3 Tableau arri re des Controleurs 1 Module d entr e de l alimentation du Contrdleur ll est dot du fusible de protection du dispositif de changement de tension de la prise d alimentation en puissance et du filtre EMC qui n est pas compris dans le bloc prise dispositif de changement de tension 2 Connecteur de sortie haute tension pour l alimentation de la pompe type KINGS O FISCHER 3 Connecteur d entr amp e sortie des signaux pour les accessoires 4 C ble Interlock du contr leur 5 Prise Interlock L unit est dot e d un s lecteur de tension de ligne Pour tout d tail concernant l op ration de s lection de la tension de ligne se reporter au paragraphe INSTALLATION de la sect
9. 1 kV in linear mode Available at pins 4 and 8 of rear panel Accessory connector Operating temperature 0 C to 45 C Storage temperature 20 C to 70 C Radio interference suppression EN 55011 class Group 1 EN 61000 4 2 EN 61000 4 4 EN 61000 4 3 MiniVac Controller User Manual 87 900 049 01 H Technical Information 5 Safety EN 61010 1 Installation category Il Pollution degree 2 Output connector High voltage Accessory FISCHER type part number 105 A049 for model 929 0290 and 929 0191 KINGS type part number 1064 1 for model 929 0190 and 929 0291 J 001 input output signal 9 pin D type socket Cable Mains 3 meters long Weight 2 3 Kg 5 06 Ibs 3 S 4 5 4 3 5 3 2 5 2 1 5 1 0 5 0 1mA 10 mA Pump current Figure 7 Voltage Vs Current Diagram MiniVac Controller User Manual 87 900 049 01 H 55 70 5 Technical Information Controller Outline The outline dimensions of the MiniVac controller are shown in the following figure moeb gt ro lt ACUCO c U R R E N T 3 gt 106 4 41 89 a Figure 8 MiniVac Outline Dimensions Installation Inspect the controller for any shipping damage Models 929 0190 and 929 0191 are fac
10. Abbildung 1 Verpackung der Controller MiniVac Controller User Manual 87 900 049 01 H 21 70 2 Gebrauchsanleitung Alle Agilent Controller sind f r eine bestimmte Anschlu spannung ausgelegt das Modell 929 0190 KINGS type High voltage connector 120 Vac 50 60 Hz das Modell 929 0191 FISCHER type High voltage connector 120 Vac 50 60 Hz das Modell 929 0290 FISCHER type High voltage connector 220 Vac 50 60 Hz das Modell 929 0291 KINGS type High voltage connector 220 Vac 50 60 Hz Installation WARNUNG Der Controller wird mit einem 3 adrigen Netzkabel geliefert das mit einem den internationalen Normen entsprechenden Stecker ausgeriistet ist Es sollte immer dieses Netzkabel benutzt werden das an eine korrekt geerdete Steckdose anzuschlie en ist um Stromentladungen zu vermeiden Im Inneren des Controllers entstehen hohe Spannungen die schwere Sch den verursachen und lebensgef hrlich sein k nnen Vor jedem Montage bzw Wartungseingriff mu deshalb der Netzstecker gezogen werden Der Controller kann auf einen Tisch oder ein Gestell montiert werden In beiden F llen mu auf die ungehinderte Zirkulation der K hlluft im Bereich des Ger ts geachtet werden Der Controller darf nicht in Umgebungen installiert u o benutzt werden die Witterungseinfl ssen Regen Frost Schnee Staub und aggressiven Gasen ausgesetzt sind und in denen Explosions und erh hte Brandgefahr besteht
11. Bedienfeld der Controller 1 LED Hochlast geht an wenn der von der Pumpe absorbierte Strom 12 mA erreicht LED im Ausgang gew hlte Polung Skala Ausgangsspannung kV Hauptschalter ON OFF grafische Skala zur LED Spannung Strom LED H V AN Ausgangsstecker f r Strom proportionales Signal 1 V 1 mA log coju o gt a e gt co ro Stromskala mA MiniVac Controller User Manual 87 900 049 01 H Gebrauchsanleitung 2 FUSE T2A ACCESSORY H V CABLE INTERLOCK Abbildung 3 R cktafel der Controller 1 Eingangsmodul der Controller Stromversorgung mit Sicherung Spannungswahlschalter Leistungsstecker und EMC Filter nicht im Block Stecker Spannungswahlschalter eingeschlossen 2 Hochspannungs Ausgangsstecker zur Pumpenversorgung Typ KINGS oder FISCHER 3 Eingangs Ausgangsstecker fiir Signale fiir Zubeh r 4 Controller Interlock Kabel 5 Interlock Stecker Die Einheit ist mit einem W hlschalter f r die Leitungsspannung versehen F r ausf hrliche Informationen zur Auswahl der Leitungsspannung siehe Abschnitt INSTALLATION im Teil TECHNICAL INFORMATION MiniVac Controller User Manual 87 900 049 01 H 25 70 2 Gebrauchsanleitung Bedienung Interlock Interlock ist eine von Agilent entworfene Sicherheits vorrichtung um den Bediener vor schweren Sch den zu sch tzen die durch die Hochspannung am Stromversorg
12. Instructions for Use Each controller is factory set for a specific power supply Installation Model 929 0190 KINGS type High voltage connector 120 Vac 50 60 Hz Model 929 0191 FISCHER type High voltage connector 120 Vac 50 60 Hz Model 929 0290 FISCHER type High voltage connector 220 Vac 50 60 Hz Model 929 0291 KINGS type High voltage connector 220 Vac 50 60 Hz WARNING The controller is equipped with a 3 wire power cord and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable The controller must be installed inside a rack module but it must be positioned so that free air can flow through the holes Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk 42 70 MiniVac Controller User Manual 87 900 049 01 H Use Instructions for Use 4 During operation the following environmental conditions must be respected temperature from 0 C to 45 C relative humidity 0 95 without condensation To connect the controller to the pump use the specific cable supplied with the controller See
13. MiniVac Controller User Manual 87 900 049 01 H Moded emploi 3 Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes Temp rature 0 C 45 C Humidit relative 0 95 non condensante Pour la connexion du contr leur la pompe correspondante utiliser le c ble du contr leur pr vu cet effet Pour les autres connexions et pour l installation des accessoires en option voir la section Technical Information Utilisation Ce paragraphe d crit les principales proc dures de fonctionnement Pour tout autre compl ment d information et pour les proc dures concernant des connexions ou des l ments en option se reporter au paragraphe Use de la section Technical Information Avant d utiliser le contr leur effectuer toutes les connexions lectriques et pneumatiques et se r f rer la notice de la pompe connect e Commandes Indicateurs et Connecteurs du Contr leur La figure ci apr s repr sente le tableau de commande du Contr leur et les tableaux d interconnexion Pour de plus amples d tails se reporter la section Technical Information MiniVac Controller User Manual 87 900 049 01 H 33 70 3 Mode d emploi 1 2 gt O or ZAN men P Mini Vac LO tL E ak 10 2 R 9 a 1 U Y u 8g T 3 P au 6 T 8 c 5 V T
14. Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REOUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO OUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS TEL N FAX N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Ee Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 8 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxi
15. non sottoporlo ad urti Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Figura 1 Imballo dei controller MiniVac Controller User Manual 87 900 049 01 H 11 70 1 Istruzioni per l uso Ogni controller giunge dalla Agilent predisposto per una certa tensione di alimentazione il modello 929 0190 KINGS type High voltage connector 120 Vac 50 60 Hz il modello 929 0191 FISCHER type High voltage connector 120 Vac 50 60 Hz il modello 929 0290 FISCHER type High voltage connector 220 Vac 50 60 Hz il modello 929 0291 KINGS type High voltage connector 220 Vac 50 60 Hz Installazione Anand Il controller fornito di un cavo di alimentazione a tre fili con una spina di tipo approvato a livello internazionale Utilizzare sempre questo cavo di alimentazione ed inserire la spina in una presa con un adeguato collegamento di massa onde evitare scariche elettriche All interno del controller si sviluppano alte tensioni che possono recare gravi danni o la morte Prima di eseguire qualsiasi operazione di installazione o manutenzione del controller scollegarlo dalla presa di alimentazione Il controller deve essere installato all interno di un apposito rack In ogni caso occorre che l aria di raffreddamento possa circolare liberamente intorno all apparato Non installare e o utilizzare
16. the HV cable to the plug 5 if the HV cable is without the interlock cable connect the interlock cable of the controller 4 to the plug 5 3 Switch on the controller Controller Start up To start up the controller turn the main switch to ON after plugging the power cable into a suitable power source 46 70 MiniVac Controller User Manual 87 900 049 01 H Instructions for Use 4 Starting the Pump The pump is activated only if the controller is powered on and the pump itself is connected to the output connector For further information refer to the Technical Information section Pump Shutdown To shutdown the pump turn the main switch placed on the front panel to OFF Maintenance The MiniVac series controllers do not require any maintenance interventions Any intervention must be performed by authorised personnel only When a fault has occurred it is possible to use the Agilent repair service or the Agilent advance exchange service that allows to obtain a regenerated controller replacing the faulty one WARNING Before carrying out any work on the controller disconnect it from the supply Pins 3 and 7 on the loopback plug provided with the unit are short circuited Remote ON OFF This loopback plug must be fitted to power on the HV unless a Remote Interlock contact is connected MiniVac Controller User Manual 87 900 049 01 H 47 70 4 Instructions for Use The unit is factory
17. the section Technical Information for detailed information about the above mentioned and the other connections and about the options installation This paragraph describes the fundamental operating procedures Detailed information and operating procedures that involve optional connections or options are supplied in the paragraph USE of the section Technical Information Make all vacuum manifold and electrical connections and refer to the pump instruction manual prior to operating the controller Controller Controls Indicators and Connectors The following paragraph illustrates either the front and rear panel with its interconnections More details are contained in the appendix Technical Information MiniVac Controller User Manual 87 900 049 01 H 43 70 4 Instructions for Use 1 2 O ot TN HIGH P Mini Vac LO tL E ak 10 2 R 9 a U u 8 T 3 P 7030 6 T 8 i 5 y TOIE E A i 2p mA kV fi 7 Eug V IN 2 1mA N Figure 2 Controller Front Panel 1 High Load LED comes on when the current absorbed by the pump reaches 12 mA Output selected polarity LED Output voltage scale KV Main ON OFF switch Voltage current LED scale H V LED ON Sim wl pr Output connector of the sSignal proportional to the current 1 V 1 mA log 8 Current scale mA
18. with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like th
19. 7 900 049 01 H Technical Information 5 Maintenance Replacement controllers are available on advance exchange basis through Agilent service sales organization WARNING High voltage in the controller can cause severe injury or death Before servicing turn power off and remove the power cable Troubleshooting a No current voltage LED bar graph lit with mains power ON Verify mains connections and power fuses Verify on P001 that pins 3 7 are shorted b Vaclon pump is operating at pressures higher than 1x10 mbar Torr and only the first LED is lit No high voltage output Replace the unit c Vaclon pump operating at pressure below 1x10 mbar Ton and all LED are lit Switch power off and disconnect the high voltage cable Switch power on and verify that only one LED is lit If this happens the high voltage cable or the pump are shorted If not replace the unit MiniVac Controller User Manual 87 900 049 01 H 63 70 5 Technical Information Controller Spares and Accessories Tab 2 Description Part number Mating accessory connector P001 03 648487 Fuse T 2A 5x20 mm Rack adapter 969 9191 Mains cable 120 Vac USA plug 03 660441 02 Mains cable 220 Vac uropean plug 03 660441 01 Controller to Vacion Pump Cables Tab 3 Description Part number H V bakeable cable 4 m long to connect 929 0191 or 929 0290 to Star 929 0770 Cell and new Vaclon pump series 919 H V c
20. Installation 42 Use 43 Use Procedure 46 Maintenance 47 Disposal 48 Technical Information 49 Minivac Description 50 Controller Outline 56 Installation 56 Operation 61 MiniVac Controller User Manual 87 900 049 01 H Contents Maintenance 63 Controller Spares and Accessories 64 Controller to Vacion Pump Cables 64 MiniVac Controller User Manual 87 900 049 01 H 7 70 Contents 8 70 MiniVac Controller User Manual 87 900 049 01 H MiniVac Controller User Manual 00 ee 1 Istruzioni per l uso Informazioni generali 10 Immagazzinamento 11 Preparazione per l installazione 11 Installazione 12 Uso 13 Comandi Indicatori e Connettori del Controller 13 Procedure di uso 16 Interlock 16 Awio della pompa 16 Accensione del Controller 16 Avvio della Pompa 17 Arresto della Pompa 17 Manutenzione 17 Smaltimento 18 Traduzione delle istruzioni originali E Agilent Technologies 9 70 1 Istruzioni per l uso Informazioni generali ATTENZIONE Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle nor
21. LED is increasing its brightness it means that the pump current is between 2 and 3 mA and the high voltage output is between 5 and 4 kV 4 If only the first LED of the bar graph is lit the current drawn by the pump is less than 1 mA and the voltage output is 5 kV 5 _ If ten LEDs are lit the current drawn by the pump is 10 mA and the voltage output is 2 kV 6 For the correct determination of the voltage value use the voltage vs current diagram shown in the figure MiniVac Controller Rear Panel Controls MiniVac Controller User Manual 87 900 049 01 H 61 70 5 Technical Information Pressure Determination Pressure at the inlet flange of a VacIon pump is proportional to the current drawn by the pump To determine the pressure of the inlet flange of the VacIon pump determine the pump current displayed on the front panel or read the recorder output especially for current lower than 1 mA and find the corresponding pressure value from the current vs pressure curve of the relevant VacIon pump Power Failure In the event of a power failure momentary or long period the controller is switched off When power is restored the controller will automatically restart Remote Control Mode Operation It is possible to remotely switch onb and off the high voltage using a permanent contact connected to pins 3 and 7 of JOO1 accessory connector with the mains power ON OFF switch to ON 62 70 MiniVac Controller User Manual 8
22. MiniVac Controller Models 929 0190 929 0290 929 0191 929 0291 Manuale di Istruzioni Bedienungshandbuch Notice de mode d Emploi User Manual 87 900 049 01 H 01 2012 E Agilent Technologies Notices Agilent Technologies Inc 2012 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 049 01 H Edition Edition 01 2012 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement
23. MiniVac Controller Rear Panel Controls 1 Input module for the controller power supply It includes the protection fuse the voltage changer the power supply plug and the EMC filter not included into the plug voltage switch assembly 2 High voltage output connector for the pump KINGS or FISCHER type power supply 3 Input output signal connector for fittings 4 Controller cable Interlock 5 Plug Interlock MiniVac Controller User Manual 87 900 049 01 H 53 70 5 Technical Information b4 70 Controller Specifications Tab 1 Operation All type and size of Vaclon pump Input Voltage 100 Vac 4 ranges 120 Vac 220 Vac 240 Vac Frequency 50 to 60 Hz Power 50 VA Fuse 2 x T 2A disregarding the mains Output Voltage 5000 Vdc 10 refer to the following figure polarity through internal card Current 15 mA short circuit refer to the following figure Power 21W Dual Current Recorder Output Rec Outl Rec Out2 0 to 10 Vdc 10 V correspond to 10 mA resolution of 10 mV minimum corresponding to 10 pA Available on front panel BNC connector and at pins 1 and 6 of rear panel Accessory connector 0 to 10 Vdc 10 V correspond to 1 mA resolution of 10 mV minimum corresponding to 1 pA Available at pins 2 and 6 of rear panel Accessory connector Voltage Recorder Output Rec Out 0 to 5 V corresponding to 0 to 5 kV with 1 V corresponding to
24. Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact Overtemperature Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe Doesn t reach vacuum Over temperature Other Pump seized DIFFUSION PUMPS Heater failure Electrical problem Doesn t reach vacuum Cooling coil damage Other Vacuum leak Section 6 ADDITIONAL TERMS Please read the terms and conditions below as
25. able 3 5 m long to connect 929 0190 or 929 0291 to Appendage 924 0741 pumps and conventional Vaclon pump series 911 and 912 H V bakeable cable 4 m long to connect 929 0191 or 929 0290 to 929 0780 Appendage and conven tional Vaclon pump series 911 and 912 64 70 MiniVac Controller User Manual 87 900 049 01 H XE Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely CZ d LT Giampaolo LEVI
26. artwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 0 10 64397888 Fax 86 0 10 64391318 Toll free 800 820 3278 Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques ZA de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Sales amp Services GmbH amp Co KG Vacuum Products Division Lyoner Str 20 60 528 Frankfurt am Main GERMANY Tel 49 69 6773 43 2230 Fax 49 69 6773 43 2250 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Products Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037
27. at if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met MiniVac Controller User Manual 87 900 049 01 H MiniVac Controller MiniVac Controller MiniVac Controller User Manual 87 900 049 01 H 3 70 MiniVac Controller 4 70 MiniVac Controller User Manual 87 900 049 01 H Contents Contents 1 Istruzioni per l uso 9 Informazioni generali 10 Immagazzinamento 11 Preparazione per l installazione 11 Installazione 12 Uso 13 Procedure diuso 16 Manutenzione 17 Smaltimento 18 2 Gebrauchsanleitung 19 Allgemeines20 Lagerung 21 Vor der Installation 21 Installation 22 Gebrauch 23 Bedienung 26 Wartung 27 Entsorgung 28 MiniVac Controller User Manual 87 900 049 01 H 5 70 Contents 6 70 Mode d emploi 29 Indications Generales 30 Preparation pour l installation 31 Installation 32 Utilisation 33 Procedures d utilisation 36 Entretien 37 Mise aurebut 38 Instructions for Use 39 General Information 40 Storage 41 Preparation for Installation 41
28. c or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA n
29. c pumps The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the eguipment Detailed information is supplied in the section Technical Information This manual uses the following standard protocol The caution messages are displayed before procedures which if not followed could cause damage to the eguipment The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury 40 70 The notes contain important information taken from the text MiniVac Controller User Manual 87 900 049 01 H Instructions for Use 4 Storage When transporting and storing the MiniVacs the following environmental requirements should be satisfied temperature from 20 C to 70 C relative humidity O 95 without condensation Preparation for Installation The controller is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking ensure that the module is not dropped or subjected to any form of impact Do not dispose of the packing materials in an unauthorised manner The material is 100 recyclable and complies with EEC Directive 85 399 Figure 1 Controller Packing MiniVac Controller User Manual 87 900 049 01 H 41 70 4
30. corder output 1 pin 1 signal out pin 6 ground The output voltage 0 to 10 Vdc is proportional to the pump current 0 to 10 mA e g 10 Vdc correspond to 10 mA The resolution is 10 mV minimum corresponding to 10 uA The front panel REC OUT connector is a duplicate of this signal on a BNC connector Pin 2 6 Current recorder output 2 pin 2 signal out pin 6 ground The output voltage 0 to 10 Vdc is proportional to the pump current 0 to 1 mA e g 10 Vdc correspond to 1 mA The resolution is 10 mV minimum corresponding to 1 uA Pin 4 8 Voltage recorder output pin 4 signal out pin 8 ground The output voltage 0 to 5 V is proportional to the controller high voltage output 0 to 5 kV e g 1 V corresponds to 1 kV in linear mode Pin 5 9 High voltage indication contact This pure contact which carries 1 A at 250 Vac and 0 2 A at 30 Vdc is open when the high voltage is off and closes when the high voltage in on MiniVac Controller User Manual 87 900 049 01 H 59 70 5 Technical Information 1V 1 mA REC OUT GND DI 10V 1 mA REC OUT O REMOTE ON OFF REMOTE ON OFF 1V 1kV AN OUT H V ON SIGNAL H V ON SIGNAL J001 Figure 10 P001 Mating Connector and J001 Accessory Connector Pump Connection The pump is connected to the controller rear panel via the high voltage connector by a coaxial high voltage cable assembly WARNING
31. dell operazione di selezione della Tensione di Linea MiniVac Controller User Manual 87 900 049 01 H 15 70 1 Istruzioni per l uso Procedure di uso Interlock L Interlock un dispositivo di sicurezza progettato dalla Agilent per proteggere l operatore dai gravi danni provocati dall alta tensione presente sul connettore di alimentazione della pompa L uso del controller inteso con cavo alta tensione provvisto di Interlock Qualora il cliente voglia rinunciare per applicazioni particolari al cavo HV con interlock Si rende disponibile il cavo di interlock del controller 4 Awio della pompa Per far partire la pompa necessario 1 Collegare la pompa al controller tramite l apposito cavo HV 2 Collegare l Interlock del cavo HV al plug 5 se il cavo HV e sprovvisto del cavo di interlock collegare il cavo di interlock del controller 4 al plug 5 3 Accendere il controller Accensione del Controller Per accendere il controller portare l interruttore principale in posizione ON dopo aver inserito il cavo di alimentazione nella presa di rete 16 70 MiniVac Controller User Manual 87 900 049 01 H Istruzioni per l uso 1 Avvio della Pompa La pompa si avvia solo se il controller acceso e la pompa connessa al connettore di uscita Per ulteriori informazioni fare riferimento alla sezione Technical Information Arresto della Pompa Per arrestare la pompa portare in posizione OFF l inte
32. formationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den an der Anlage entstehen k nnen Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf eine bestimmte Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnen Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 20 70 MiniVac Controller User Manual 87 900 049 01 H Gebrauchsanleitung 2 Lagerung Beim Transport und bei der Lagerung der Controller miissen folgende klimatische Verh ltnisse eingehalten werden Temperatur von 20 C bis 70 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend Vor der Installation Der Controller wird mit einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den m ssen der zust ndigen rtlichen Verkaufsstelle gemeldet werden Beim Auspacken vorsichtig vorgehen damit der Controller nicht f llt oder St en ausgesetzt wird Das Verpackungsmaterial mu korrekt entsorgt werden Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r Umweltschutz
33. hen City 32450 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 1 12
34. hnical Information Arr t de la Pompe Pour arr ter la pompe mettre l interrupteur principal situ sur le tableau avant sur OFF Entretien Les contr leurs de la s rie MiniVac ne requi rent aucun entretien Toute intervention doit tre effectu e par du personnel autoris En cas de panne il est possible de faire appel au service de r paration Agilent ou au Agilent advance exchange service qui permet d obtenir un contr ler r g n r la place de celui en panne NT 4H ESSAI Avant d effectuer toute intervention sur le contr leur d brancher le cable d alimentation Le connecteur de fermeture fourni avec l unit a les pins 3 et 7 en court circuit Remote ON OFF Pour pouvoir allumer l HV il faut monter ce connecteur si un contact de Remote Interlock n est pas branch MiniVac Controller User Manual 87 900 049 01 H 37 70 3 Mode d emploi L unit est assign e l usine avec polarit de sortie n gative Pour un changement ventuel se r f rer au paragraphe Output Polarity Selection Si un contr leur doit tre mis au rebut l liminer conform ment aux r glementations nationales en la mati re Mise au rebut 38 70 Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel
35. hnologies 49 70 5 Technical Information Minivac Description 50 70 The MiniVac controller is a quarter rack solid state power supply with self protection features which generates high voltage using high frequency switching technology The MiniVac ion pump controller is designed to operate any type of ion pumps Diode Differential Diode Triode and StarCell The MiniVac controller is a very compact and light unit capable of powering any size of pump at different operating pressure Small pumps up to 8 1 s can be operated at any pressure up to 1x 10 mbar Medium pumps 20 1 s to 60 1 s can be operated at any pressure up to 1 x 10 mbar Torr continuous operation Large pumps 120 1 s to 400 1 s can be operated at any pressure up to 2 x 10 mbar Torr continuous operation Medium larger ion pumps must first be started with an appropriate control unit and pumped to a sufficiently low pressure where the current demand is below 8 mA The MiniVac controller is designed to withstand continuous operation at short circuit condition without any damage to the ion pump or to the controller itself The MiniVac controller is available in four versions which differ in the factory set input voltage and in the high voltage output connector type Model 929 0190 KINGS type High voltage connector 120 Vac 50 60 Hz Model 929 0191 FISCHER type High voltage connector 120 Vac 50 60 Hz Model 929 0290 FISCHER type High v
36. il controller in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio 12 70 MiniVac Controller User Manual 87 900 049 01 H Uso Istruzioni per l uso 1 Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali temperatura da 0 C a 45 C umidit relativa 0 95 non condensante Per il collegamento del controller con la relativa pompa utilizzare il cavo specifico del controller stesso Per gli altri collegamenti e l installazione degli accessori opzionali vedere la sezione Technical Information In questo paragrafo sono riportate le principali procedure operative Per ulteriori dettagli e per procedure che coinvolgono collegamenti o particolari opzionali fare riferimento al paragrafo Use della sezione Technical Information Prima di usare il controller effettuare tutti i collegamenti elettrici e pneumatici e fare riferimento al manuale della pompa collegata Comandi Indicatori e Connettori del Controller Di seguito sono illustrati sia il pannello frontale che quello posteriore con le interconnessioni Per maggiori dettagli fare riferimento alla sezione Technical Information MiniVac Controller User Manual 87 900 049 01 H 13 70 1 Istruzioni per l uso
37. il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut MiniVac Controller User Manual 87 900 049 01 H MiniVac Controller User Manual 4 Instructions for Use General Information 40 Storage 41 Preparation for Installation 41 Installation 42 Use 43 Controller Controls Indicators and Connectors 43 Use Procedure 46 Interlock 46 Start Up of the Pump 46 Controller Start up 46 Starting the Pump 47 Pump Shutdown 47 Maintenance 47 Disposal 48 Original Instructions RES Agilent Technologies 39 70 4 Instructions for Use General Information This eguipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the eguipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorised interference with the eguipment or any action contrary to that provided for by specific national standards The MiniVac is a high voltage and low power feeder used to feed the ioni
38. ion TECHNICAL INFORMATION MiniVac Controller User Manual 87 900 049 01 H 35 70 3 Mode d emploi Procedures d utilisation Interlock L Interlock est un dispositif de s curit concu par Agilent pour prot ger l op rateur contre les s rieux dommages provogu s par la pr sence de haute tension au niveau du connecteur d alimentation de la pompe Il est entendu gue le c ble de haute tension du contr leur est guip de l Interlock Si le client ne souhaite pas utiliser le cable HV avec interlock sur certaines installations le cable d interlock du contr leur 4 est disponible Demarrage de la pompe Pour mettre la pompe en marche il faut 1 Relierla pompe au contr leur l aide du cable HV r serv cet effet 2 Brancher l Interlock du cable HV sur la prise 5 si le c ble HV n est pas quip du cable d interlock brancher le cable d interlock du contr leur 4 sur la prise 5 3 Allumer le contr leur Mise sous tension du Contr leur Pour mettre le contr leur sous tension il suffit de mettre Pinterrupteur principal sur ON apr s avoir branch le c ble d alimentation sur la prise du r seau 36 70 MiniVac Controller User Manual 87 900 049 01 H Mode d emploi 3 Mise en marche de la Pompe La pompe d marre uniquement si le contr leur est allum et la pompe est reli e au connecteur de sortie Pour d ult rieurs renseignements se r f rer la section Tec
39. ionnels suivants Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage AVERTISSEMENT Les messages d avertissement attirent l attention de l op rateur sur une procedure ou une manoeuvre speciale qui si elle n est pas effectu e correctement risque de provoquer de graves lesions Les notes contiennent des renseignements importants isol s du texte 30 70 MiniVac Controller User Manual 87 900 049 01 H Moded emploi 3 Emmagasinage Pendant le transport et l emmagasinage des Mini Vac contr leurs il faudra veiller respecter les conditions environnementales suivantes Temp rature de 20 C 70 C Humidit relative 0 95 non condensante Preparation pour l installation Le contr leur est fourni dans un emballage de protection sp cial si vous constatez des margues de dommages pouvant s tre produits pendant le transport adressez vous aussit t au bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le contr leur et ne lui faire subir aucun choc Ne pas jeter l emballage dans la nature Le mat riel est entierement recyclable et il est conforme la directive CEE 83 399 en mati re de protection de l environnement Figure 1 Emballage des Contr leurs MiniVac Controller User Manual
40. ler User Manual 87 900 049 01 H MiniVac Controller User Manual Mode d emploi Indications Generales 30 Emmagasinage 31 Preparation pour l installation 31 Installation 32 Utilisation 33 Commandes Indicateurs et Connecteurs du Contr leur 33 Procedures d utilisation 36 Interlock 36 D marrage de la pompe 36 Mise sous tension du Contr leur 36 Mise en marche de la Pompe 37 Arr t de la Pompe 37 Entretien 37 Mise au rebut 38 Traduction de la mode d emploi originale E Agilent Technologies 29 70 3 Mode d emploi Indications Generales ATTENTION Cet appareillage a t concu en vue d une utilisation professionnelle L utilisateur doit lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant l utilisation de l appareil Agilent d cline toute responsabilit quant au non respect total ou partiel des instructions pour l utilisation mauvais usage par du personnel non form op rations non autoris es usage contraire aux r glementations nationales sp cifiques MiniVac est un alimentateur haute tension faible puissance concu pour alimenter les pompes ioniques Les paragraphes suivants donnent toutes les indications n cessaires pour garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans la section Technical Information Cette notice utilise les signes convent
41. mative nazionali specifiche Il MiniVac un alimentatore ad alta tensione e bassa potenza utilizzato per alimentare le pompe Ioniche Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nella sezione Technical Information Questo manuale utilizza le seguenti convenzioni messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura AVVERTENZA I messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Le note contengono informazioni importanti estrapolate dal testo 10 70 MiniVac Controller User Manual 87 900 049 01 H Istruzioni per l uso 1 Immagazzinamento Durante il trasporto e l immagazzinamento dei MiniVac devono essere soddisfatte le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa 0 95 non condensante Preparazione per l installazione Il controller viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballo prestare particolare attenzione a non lasciar cadere il modulo e a
42. oder der Agilent Advance Exchange Service in Anspruch genommen werden der den defekten Controller durch ein Austauschger t ersetzt WARNUNG Vor jedem Eingriff am Controller mu der Netzstecker gezogen werden Bei dem mit der Einheit gelieferte Abschluss Stecker sind die Stifte 3 und 7 kurzgeschlossen Remote ON OFF Falls kein Remote Interlock Kontakt angeschlossen ist kann die Hochspannung nur angeschaltet werden wenn dieser Stecker montiert ist MiniVac Controller User Manual 87 900 049 01 H 21 10 2 Gebrauchsanleitung Fabrikseitig ist die Einheit mit negativer Ausgangspolung eingestellt Soll das ge ndert werden den Absatz Output Polarity Selection zu Rate ziehen Eine eventuelle Verschrottung muf unter Einhaltung der einschl gigen landes blichen Vorschriften erfolgen Entsorgung 28 70 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat MiniVac Control
43. oltage connector 220 Vac 50 60 Hz Model 929 0291 KINGS type High voltage connector 220 Vac 50 60 Hz A voltage change over allows to select different operating voltages MiniVac Controller User Manual 87 900 049 01 H Technical Information Figure 4 MiniVac Controllers 51 70 MiniVac Controller User Manual 87 900 049 01 H 5 Technical Information b2 70 The MiniVac controller front panel controls are shown in the following figure 1 2 y O A T HIGH P Mini Vac LOAD i gM 10 2 R 9 o SW Y 3 Kn U i P 03 8 c 5 V U 4 o EE i 2058 258 mA kV r JW V 1V z 4mA Ze M O O 6 5 Figure 5 MiniVac Front Panel Controls High Load LED lights up when the pump current is higher than 12 mA Output polarity LEDs selection indicators Voltage output scale kV Controller power ON OFF switch Current voltage LED s bar graph indicator H V ON LED Recorder output connector ol RB wo Pump current scale mA MiniVac Controller User Manual 87 900 049 01 H Technical Information 5 The MiniVac controller rear panel controls are shown in the following figure 1 FUSE T2A HIGH VOLTA ACCESSOR Y H V CABLE d INTERLOCK Figure 6
44. rity Selection The output polarity is selected by the high voltage multiplier card and is factory set for negative output voltage polarity If a change in output polarity is desired proceed as follows 1 Switch off the power and unplug the power cord from the controller rear panel socket 2 Undo the 9 screws and then remove the cover 3 Disconnect the H V white wire 1 from the multiplier board see the following figure remove the board 2 and rotate it 180 horizontally reinstall the board into the socket and reconnect the H V white wire 4 Install the cover and screws 5 Connect the power cord then switch on the unit and check on the front panel the output polarity indication 77 evo 9 mao e I oF EZ ET Figure 9 Output Polarity Selection 58 70 MiniVac Controller User Manual 87 900 049 01 H Technical Information 5 Input Output Interconnections All input output signals are accessible at JOO1 accessory connector With the provided P001 mating connector make the connections with AWG 24 0 2 mm or smaller wire to the pins indicated in the following figure to obtain the desired capability Input Signals Pin 3 7 Remote high voltage ON OFF or high voltage interlock requires a permanent closed pin contact Pin 3 7 must be shorted to allow the high voltage output if no remote interlock contact is connected Output Signals Pin 1 6 Current re
45. rruttore principale posizionato sul pannello frontale Manutenzione I controller della serie MiniVac non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advance exchange service che permette di ottenere un controller rigenerato in sostituzione di quello guasto AVVERTENZA Prima di effettuare qualsiasi intervento sul controller scollegare il cavo di alimentazione Il connettore di richiusura fornito con l unit ha i pin 3 e 7 cortocircuitati Remote ON OFF Per poter accendere l HV necessario montare questo connettore se non connesso un contatto di Remote Interlock MiniVac Controller User Manual 87 900 049 01 H 17 70 1 Istruzioni per l uso L unit settata in fabbrica con polarit di uscita negativa Per un eventuale cambio far riferimento al paragrafo Output Polarity Selection Qualora un controller dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche Smaltimento 18 70 Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domes
46. set with a negative output polarity Refer to the section Output Polarity Selection for instructions on how to change the output polarity Disposal 48 70 If a pump is to be scrapped it must be disposed of in accordance with the specific national standards Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Eguipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale MiniVac Controller User Manual 87 900 049 01 H MiniVac Controller User Manual 5 Technical Information Minivac Description 50 Controller Specifications 54 Controller Outline 56 Installation 56 Line Voltage Change Over 57 Output Polarity Selection 58 Input Output Interconnections 59 Pump Connection 60 Operation 61 Pressure Determination 62 Power Failure 62 Remote Control Mode Operation 62 Maintenance 63 Troubleshooting 63 Controller Spares and Accessories 64 Controller to Vacion Pump Cables 64 Original Instructions RES Agilent Tec
47. they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier reguirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of guotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 Agilent Technologies Vacuum Products Division 121 H
48. tici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita MiniVac Controller User Manual 87 900 049 01 H MiniVac Controller User Manual 2 Gebrauchsanleitung Allgemeines 20 Lagerung 21 Vor der Installation 21 Installation 22 Gebrauch 23 Steuerungen Anzeigen und Anschliisse des Controllers 23 Bedienung 26 Interlock 26 Inbetriebnahme der Pumpe 26 Einschalten des Controllers 26 Pumpenstart 27 Pumpenstopp 27 Wartung 27 Entsorgung 28 Ubersetzung der Originalanleitungen ES Agilent Technologies 19 70 2 Gebrauchsanleitung Allgemeines VORSICHT Dieser Apparat ist f r Fachbetriebe bestimmt Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau lesen Bei auch nur teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der einheimischen hier zur Geltung kommenden Bestimmungen bernimmt die Firma Agilent keinerlei Haftung Der MiniVac ist ein Hochspannungsnetzger t niedriger Leistung das zur Versorgung von Ionenpumpen verwendet wird In den folgenden Abschnitten sind alle erforderlichen In
49. tory set for 120 Vac operation Models 929 0290 and 929 0291 are factory set for 220 Vac operation 56 70 MiniVac Controller User Manual 87 900 049 01 H Technical Information 5 WARNING The MiniVac controller is eguipped with a 3 wire power cord and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable The MiniVac controller can be used as a bench unit or as a rack module but it must be positioned so that free air can flow through the holes Line Voltage Change Over If a change in line voltage operation is desired proceed as follows 1 2 Unplug the power cord from the controller rear panel socket On the power entry module rear panel check back door for voltage selector set Using a small screwdriver pull out the voltage selector and fuses Select the operating voltage then firmly insert the voltage selector and fuses in place Check voltage selector window for correct set and connect the power cord For Line Voltage between 200 and 230 Vac set the voltage selector to 220 Vac for Line Voltage higher than 230 Vac set the voltage selector to 240 Vac MiniVac Controller User Manual 87 900 049 01 H b7 70 5 Technical Information Output Pola
50. umber as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A L Non Billable L Billable mmm New PO hard copy must be submitted with this form 3B exchange Repair upgrade consignment Demo _ J alibration Evaluation return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY
51. ungsstecker der Pumpe hervorgerufen werden k nnen Der Controller muss mit dem Hochspannungskabel mit Interlock zum Einsatz kommen Falls der Auftraggeber bei besonderen Verwendungen auf das Hochspannungskabel mit Interlock verzichten wollen sollte kann das Interlock Kabel des Controllers 4 verwendet werden Inbetriebnahme der Pumpe Um die Pumpe zu starten m ssen vorher folgende Schritte durchgef hrt werden 1 Mit Hilfe des daf r vorgesehenen Hochspannungs kabels die Pumpe an den Controller anschlie en 2 Interlock des Hochspannungskabels mit dem Stecker 5 verbinden falls das Hochspannungs kabel keinen Interlock haben sollte das Interlock Kabel des Controllers 4 mit dem Stecker 5 verbinden 3 Controller einschalten Einschalten des Controllers Zum Einschalten des Controllers gen gt es das Netzkabel an die Steckdose anzuschlie en 26 70 MiniVac Controller User Manual 87 900 049 01 H Gebrauchsanleitung 2 Pumpenstart Die Pumpe startet nur wenn der Controller eingeschaltet und die Pumpe am Ausgangsstecker angeschlossen ist Weitere Informationen finden sich im Abschnitt Technical Information Pumpenstopp Zum Stoppen der Pumpe muf der Hauptschalter auf dem Bedienfeld auf OFF gesetzt werden Wartung Die Controller der MiniVac Serie brauchen keinerlei Wartung Alle Eingriffe diirfen nur von autorisiertem Personal vorgenommen werden Bei Defekten kann der Reparatur Service von Agilent

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