RGV100HL User Manual - Newport Corporation
Contents
1. Dimensions 4 HOLES M4 THD ON SOR 1 89 48 4 HOLES M6 THD ON SOR 1 97 50 DEPTH 24 6 DEPTH 31 8 00063 01 97 0 9 50 10 DEPTH 31 8 an MODEL SHOWN RGV100HL DIMENSIONS IN INCHES AND MILLIMETERS 2 85 72 5 _ power is applied Y 2 56 65 120 5 SUB D15M CONNECTOR 4 HOLES M6 THD DEPTH 47 12 i 93 07 78 i T k 9 146 3 19 37 05 LD p MOTOR amp LIMITS T 1 97 81 VOVPATIBIE olo ooo 50 OW E Y lt HOLE M6 THD DT DEPTH 39 10 us gt FOR GROUNDING 30 25 MADEINFRANCE A T og op 39 10 Y v i am m SOR 4 53 115 gt os gt SUB D15F CONNECTOR 21182 0 30 5 4 HOLES M3 THD ON 01 38 35 PER USABLE DEPTH 24 6 PEN 4 HOLES 0 29 7 5 C BORED 45 11 5 4 HOLES M5 THD ON SOR 3 35 85 ON SOR 3 97 100 8 DEPTH 31 8 gt Newport EDH0325En1013 06 14 14 Experience Solutions 100 High Speed High Torque Precision Rotation Stage m Maintenance RECOMMENDATION Contact Service to determine the appropriate maintenance schedule for your application and duty cycle 9 1 Maintenance The RGV100HL rotation stage requires no particular maintenance Nevertheless this is a pr2. EN 61000 4 2 Ne 6 0 NF EN 61000 4 3 9 4 w NF EN 61000 4 4 gt NS NF EN 61000 4 6 WA lt 59 Ne 6S ORIGINAL DECLARATION 9 yA one in Beaune La Rolande on 13 February 201 N 6S pcd DEUDA pu HE es Quality Director E 2 gt lt gt Newport Experience Solutions V EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur The exclamation symbol may appear warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark presence of the CE Mark on Newport Corporation equipment means t
3. High Speed High Torque Precision Rotation Stage FT i No Compliant XS USER S MANUAL Newport Experience Solutions For Motion Think Newport 100 High Speed High Torque Precision Rotation Stage Warranty A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inad equate packaging if the original packaging is not used N 9 EDH0325En1013 06 14 Newport Corporation warrants this product to be free from defects in mate rial and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument trans portation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or mis use of any product or part CAUTION Warranty does not apply to damages resulting from
4. inertia divided by two without changing parameters The recommended max inertia corresponds to an easy and optimum use of the rotation stage For higher inertia contact us 4 Depend on driver NOTE The following specifications are controller drive dependent Refer to the RGV100HL page on www newport com for specifications achievable with specific Newport controller drive combination MIM e Accuracy Repeatability Max Speed e Max Acceleration D Newport 1 0 Experience Solutions 100 High Speed High Torque Precision Rotation Stage CAUTION To achieve the specifications stated stages must be fixed on a plane surface with a flatness of 10 jim 6 7 Load Capacity Cz Cz Normal centered load capacity 100 Ka Transversal compliance 15 urad Nm Jz Maximum Inertia 0 032 kgm Q Off center load Q Cz 14 D 35 and Q lt Jz Jq D Where D Cantilever distance in mm Jq Inertia of payload CAUTION When RGV100HL rotation stage is integrated an assembly or in system vibration due to the rotation of an off center load at a high speed must be taken into account These events can affect the RGV100HL s performance and the system s performance or damage the stage and assembly D Newport Experience Solutions 1 1 EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage El Connectors and Cables 7 1 Pino
5. RU NO OR PSO TRS KA 4 es RGV100HL es Se EC Declaration of Conformity Newport following 1 Experience Solutions 60 of Directive 2006 42 EC on machinery 2 Xe PS PN PAY MICRO CONTROLE Spectra Physics LE 4 9 rue du Bois Sauvage 7 226 91055 Evry CEDEX FRANCE X v Hereby declares that the machinery ORK ve Description RGV100HL Ce Function High Speed High Torque Precision Rotation Stage 2 oN Se e Models RGVIOOHL Me 69 technical of which was compiled X Mr Dominique DEVIDAL Quality Director x S MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 WA e SS 9 F 45340 Beaune La Rolande France 6 9 gt complies with all the relevant provisions of the Directive 2006 42 EC on machinery AS E complies with all the relevant provisions of the Directive 2004 108 EC relating to electro 5 wA magnetic compatibility PK 5 was designed and built in accordance with following harmonised standards lt lt EN 61326 1 2006 Electrical equipment for measurement control and M laboratory use EMC requirements Part 1 General requirements gt P 6 NF EN 55011 2007 Class A 9 was designed and built in accordance with following other standards ne AY
6. Sensor Positions 170 170 Stage Travel Range gt Negative Home Position mu Positive agl Software Limit Origin Software Limit Direction P EDH0325En1013 06 14 10 End of Run Limit Mechanical Zero 222 Index Pulse Index Pulse me 25 mdeg Direction Motion gt gt Direction 6 6 Mechanical Specifications Travel Range 9 360 continuous inimum Incremental Motion 0 00011 Uni directional Repeatability Guaranteed 9 0 0003 Bi directional Repeatability Guaranteed 0 0011 or 0 00055 Absolute Accuracy Guaranteed 0 01 or 0 005 ax Speed no load s 720 in Scan Speed s 19 Peak Torque Mz Nm 9 65 Continuous Torque Nm 1 43 nertia no load kg m 0 0012 ax Inertia 9 kg m 0 032 Wobble Guaranteed urad 40 or 20 Eccentricity Guaranteed 30 1 5 TBF h 20 000 with 5 kg load 720 s speed and a duty cycle of 30 Weight Ib kg Stage 7 7 3 5 5 meter encoder cable 0 84 0 38 5 meter motor cable 1 72 0 78 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown Typical specifications are about 2X better than the guaranteed values 2 For lower scan speed contact us 3 The default set of parameters permits the use of the rotation stage from no load up to the recommended max
7. e Incorrect usage Load on the stage greater than maximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior writ ten approval of Newport Corporation This manual has been provided for information only and product specifica tions are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions 100 High Speed High Torque Precision Rotation Stage Table of Contents WA m ES ii Declaration Of Leere ia UE Ere ede v Definitions and Symbols Warning isolants CAMA EL OND 10 Introduction 1 2 0 Description 2 3 0 Stage Installation 3 Silk icone rt e DRE uen 3 3 2 Mounting Conditions epoca REED 3 4 0 Connection to Newport Controller
8. or the case is damaged If you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time D Newport EDH0325En1013 06 14 4 Experience Solutions 100 High Speed High Torque Precision Rotation Stage WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product operates with voltages that can be lethal Pushing objects of any kind into stage slots or holes or spilling any liquid on the product may affect voltage points or short out parts Any unauthorized access to internal electronics represents a potential shock hazard and care should be taken 4 3 Connection On each stage there is a label which indicates the stage name and serial number WARNING Always turn the controller s power OFF before connecting or disconnecting to a stage WARNING Ensure the stage is stopped before connecting or disconnecting The rotation can generate voltages and currents dangerous for workers and for the equipment Stages may be connected to the rear panel motor connectors labeled Moto
9. 0 mm diameter through hole allows convenient routing of cables and vacuum lines through the stage index pulse triggered every revolution permits precision homing to a unique home position The RGV100HL also features two limit switches that can be enabled or disabled by an external switch D Newport 2 Experience Solutions 100 High Speed High Torque Precision Rotation Stage Stage Installation 3 1 Unpacking The RGV100HL stage is delivered in packaging designed for safe transport Carefully lift the stage from packaging and handle with care The stage comes with a test report that shows the stage performs within the guaranteed specifications These measurements were taken in a controlled environment under flat mounting conditions 3 2 Mounting Conditions The RGV100HL stage features a four point mounting surface The compactness of its body provides good stiffness however it is recommended that the mounting conditions below be followed for best performance Installation Considerations Mounting surface flatness 10 pm Payload surface flatness 10 um Max M6 mounting screw torque 7 Nm Max M5 mounting screw torque 4 Nm gt Newport Experience Solutions 3 EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage 40 Connection to Newport Controllers NOTE Visit www newport com for compatible Newport controllers 4 1 Operating with Newport Co
10. 325En1013 06 14 6 2 6 3 Design Details Base Material Aluminum Bearings Large diameter steel ball bearings otor High torque brushless DC motor with rare earth magnets no Hall effect sensors otor Initialization otor Commutation Has to be done by the controller without using Hall effect sensors Done by the XPS controller on encoder signals Feedback Glass scale encoder with 15 000 line pairs per revolution 1 Vpp 32768 fold signal subdivision when used with XPS controller Limit Switches Two optical limit switches at approx 168 disabled by external switch No hard stops included Origin Optical fixed at position 0 including mechanical zero signal ESP Compatibility Yes Cable Length m 5 included NOTE This product complies with the RoHS directive Restriction of Hazardous Substances RoHS Compliant Motor characteristics Direct Drive Brushless Motor Magnet pitch Commutation period 30 Motor constant 0 115 Nm2 W Torque sensitivity 1 48 Nm Arms Back emf constant 1 207 V rad s otor resistance 12 61 Q Motor inductance 31 4 mH Thermal resistance 1 5 C W Max speed Max voltage 81 rad s 100 V Peak current 5 6 Arms Peak torque 8 3 Nm Max rms current 1 38 Arms Max rms torque 2 05 Nm CAUTION High RMS current will generate motor heating which will degrade characteristics of the stage including such attributes as repeatability
11. accuracy etc D Newport 8 Experience Solutions 100 High Speed High Torque Precision Rotation Stage Induced Voltages Coil Moving UV VW Amplitude Motion 39 Direction NOTE The values above indicate induced voltage between coils A positive value for U V would indicate a higher voltage on U relative to V 6 4 Encoder Power supply 5 VDC 5 33 mA Output signal Resolution Sine Cosine 15000 lines rev Encoder 0 Phase B Direction Encoder 0 Phase A Reference Signal Interface Encoder Feedback Signal Position ernating shape of the signal Direction lt Motion Sinusoidal voltage signals gt Direction 1 VDC Incremental signals 2 signals with sinusoidal shape A and B Signal range M 0 6 to 1 2 VDC 1 VDC typical Gap of symmetry P 2 lt 0 065 Signal ratio 0 8 to 1 25 Phase difference 1 02 2 90 10 el Reference signal 1 or several peaks of signal R Usable range G 20 2 V Sleeping value H 21 7 V Signal Noise ratio E and F 0 04 to 0 68 V Zero crossing K and L 180 90 el gt Newport Experience Solutions EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage 6 5 Sensor Positions
12. ecision mechanical device that must be kept and handled with caution PRECAUTIONS The RGV100HL rotation stage must be operated and kept in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your RGV100HL every 2000 hours of use for lubrication If your RGV100HL rotation stage is mounted on a workstation and cannot be easily removed please contact our After Sales Service for further instructions 9 2 Repair CAUTION Never attempt to disassemble stage components unless as directed in this manual Disassembly of a non specified component can potentially cause a malfunction and damage to the stage If you observe a malfunction in your rotation stage please immediately contact us to arrange for repair CAUTION Any attempt to disassemble or repair this rotation stage without authorization will void the warranty 9 3 Calibration CAUTION It is recommended to return your rotation stage to Newport once a year to verify and repair as need to meet its original specifications D Newport Experience Solutions 1 5 EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage gt Newport EDH0325En1013 06 14 16 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Coun
13. hat it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user WARNING When the 100 stage is installed or combined with other instruments in a machine additional testing to directive 2006 42 EC may be required It is the responsibility of the end user or integrator to perform a risk analysis and the necessary tests to conform to the EC directives Newport is not liable for damages caused by not executing this responsibility gt Newport EDH0325En1013 06 14 vi Experience Solutions 100 High Speed High Torque Precision Rotation Stage Warnings WARNING The rotation of objects of all types presents potential risks for operators Protect the operators by prohibiting access to the pinch points marked by the icon on the left Supplement this with personnel training of the potential risks involved WARNING The connection of electrical devices must meet safety and electrical standards Grounding methods indicated in this manual must be applied WARNING Due to the nature of this stage the installation use and maintenance of this stage must be performed by trained personnel who are familiar with safety regulations that a
14. liance of the rotation stage only if it is used with a Newport cable and a Newport controller Sub D15M Sub D 15F RGV100HL Connector Connector Sub D15M 31 Y x Encoder Phase 1 11 Encoder Phase A 1 1 1 Encoder Phase B E 9 19 Encoder Phase B 9 14 1 14 Index Pulse 7 1 i 1 7 Index Pulse I 4 1 4 5V 2 y 1 2 Ground Connector 1 Sub D9M Sub D 15M RGV100HL Connector Connector Sub D15F 1 es gt 10 Phase U Motor 2 12 Phase V Motor T g r I 19 Phase W Motor 7 1 5 Ground Connector v Cap 8 Sub D9F Connector 5 1 11 End of Run 25 m i I 1 4 End of Run 3 V VT 1 3 Mechanical Zero Y v Connector 1 Cap NOTE This is the wiring of the cables used with Newport Controllers For third party controllers we recommend using a cable with similar characteris tics sections 7 1 Pinouts and 7 2 RGV100HL Cable Wiring Encoder Cable Motor amp Limits Cable gt Newport Experience Solutions 1 3 EDH0325En1013 06 14 RGV100HL High Speed High Torque Precision Rotation Stage
15. ntrollers Drives Newport provides detailed documentation for connecting and configuring RGV100HL stages with compatible Newport controllers drives Newport controllers proprietary plug and play ESP technology will automatically load configuration parameters for the stage based on best factory settings in a no load condition These configurations can be adjusted for optimal operation under various applications and load conditions Refer to documentation available on the RGV100HL Page for additional information 4 2 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions Specifications listed in this guide are based on operation with Newport Control and Drive Electronics The Newport controllers with ESP technology are delivered with a configuration file that has been developed at the factory for operation in a no load condition for immediate plug and play operation WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged any way If the power plug is damaged any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped
16. p over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics from the power source Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or degrade performance WARNING Do not exceed speed and load limitations as specified in this manual WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport viii Experience Solutions 100 High Speed High Torque Precision Rotation Stage Cautions CAUTION Do not place this RGV in a hostile environment such as X Rays UV or in vacuum Improper use of this rotation stage may cause damage and voids the warranty CAUTION Do not place this RGV in a location with dust oil fumes or steam This may cause an electric shock CAUTION Do not leave this stage in places subject to extreme temperatures This can damage electronics degrade mechanics and is an electric shock hazard Operating temperature 10 to 35 C e Storage Operating Altitude 1000 m Storage Operating Humidity 85 Storage temperature 10 to 40 C in original packaging CAUTION Do not move this RGV if the power is on Make sure that cables to the controller are disconnected before moving the
17. r at any time prior to power up with the supplied cable assemblies NOTE The RGV100HL is an ESP compatible stage Enhanced System ESP Performance is Newport s exclusive technology that enables Newport ESP compatible motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user COMPATIBLE can operate the motion system quickly and safely D Newport Experience Solutions 5 EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage 4 4 Cable The RGV100HL stage is delivered with a set of two 5 meter cables that can be directly connected to the Newport controller WARNING The RGV100HL rotation stage can only operate with cable lengths of 5 m or less WARNING These cables are shielded For correct operation make sure to lock the connectors ground continuity provided by cables WARNING Keep the cables at a safe distance from other electrical cables in your environment to avoid potential cross talk mn Connection to Non Newport Controllers Newport stages can be operated with Non Newport controllers However under such operational conditions Newport makes no guarantee regarding achievable specifications To aid Newport customers using non Newport Controllers with the RGV100HL stage we have provided wiring conventions and motor characteristics below It should be noted damage caused by improper configuration or operation
18. re applicable to this product WARNING Do not use the RGV100HL stage if any abnormal activity is observed The stage should not be used if the motor is hot to the touch emitting smoke emitting an odor or is unusually noisy Stop using the stage immediately switch off the motor power and then disconnect the power source from the control electronics In the event of a failure described above please contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power source Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into the stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the power source from the electronics Contact your Newport service facility for repairs D Newport taperonce Solone vii EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage EDH0325En1013 06 14 WARNING Do not place this RGV100HL stage in unstable locations such as wobbly table or sloping surface where it may fall or ti
19. rect drive technology of the RGV100HL eliminates the worm gear of traditional rotation stages The advantages are higher speeds superior reli ability and enhanced position sensitivity Speed resolution and repeata bility are increased by a factor of up to ten times compared to worm driven rotation stages of the same size A high efficiency brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque vs iner tia for high acceleration with minimal stage heating Precision is ensured by a high resolution glass scale with 15 000 line pairs per revolution that directly measures the position of the rotating platen The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage s rotation axis to minimize position errors induced by eccentricity wobble or axial runout The encoder signals are interpolated by Newport s XPS motion controller with less than 0 1 mdeg resolution for outstanding position sensitivity and stability The RGV100HL features a proprietary 4 point contact ball bearing This unique 2 piece design takes the full benefit of Newport s excellent capabili ties in the design manufacturing and assembly of precision mechanics and integrates multiple functions the bearing ways and the direct drive motor into a minimum number of parts The result is a more compact rotation stage with superior stiffness high reliability and outstanding wobble and eccentricity 3
20. rotation stage Failure to do so may damage cables and or cause an electrical shock CAUTION Be careful that the RGV is not bumped when it is being carried This may cause it to malfunction CAUTION Before handling this RGV always unplug the equipment from the power source for safety CAUTION Contact your Newport service facility to request annual maintenance D Newport Experience Solutions ix EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage gt Newport EDH0325En1013 06 14 x Experience Solutions 100 High Speed High Torque Precision Rotation Stage High Speed High Torque Precision Rotation Stage RGV100HL m Introduction This manual provides operating instructions for RGVIOOHL high speed high torque precision rotation stage RGVIOOHL precision rotation stage RECOMMENDATION Read the chapter Connection to electronics before using the RGV100HL rotation stage D Newport Experience Solutions 1 EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage n Description EDH0325En1013 06 14 The RGV100HL is the high torque version of the RGV100BL a very compact direct drive rotation stage that provides ultra fast rotation with very high resolution and outstanding positioning performance Applications include semiconductor wafer inspection micro robotics and precision metrology The di
21. s 4 4 1 Operating with Newport Controllers Drives eese 4 42 Warnings on Controllers eerie e rd 4 43 ConnectlOn iie te e E da 5 6 5 0 Connection to Non Newport Controllers 6 6 0 Characteristics niri ehe cedere db 1 022 7 6 2 Design Detail aa 8 6 3 Motor characteristics Direct Drive Brushless Motor 8 6 4 Olea a 9 6 5 Sensor POS ON IA 10 6 6 Mechanical Specifications iia 10 67 Load Capacity CZ uu AAA 11 7 0 Connectors and Cables 12 re Ec 12 Motor amp Limits Connector P1 Sub D15 1 12 Encoder Connector P2 Sub D15 12 7 2 RGV10OHL Cable Wiring sense 13 8 0 Dimensions 14 D Newport taperonce Solone iii EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage 9 0 Maintenance 15 91 MaintetiallCe iia 15 92 DS 15 22 15 zia ie a doy gu RTT 17 gt Newport EDH0325En1013 06 14 iv Experience Solutions 100 High Speed High Torque Precision Rotation Stage EC Declaration of Conformity ROO GO RO OCA
22. try Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions I EDH0325En0000 28 02 13 NNevvport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics 5 5 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
23. uts Sub D pin outs for the RGV100HL stage are provided in the following tables Motor amp Limits Connector P1 Sub D15 Female 1 NC 2 Phase V Motor 3 Mechanical Zero 4 End of Run 5 Ground 8 4 6 NC 060000000 I NG 15 9 9 Phase W Motor 10 Phase U Motor 11 End of Run 12 NC 13 NC 14 NOC 15 NC voltage 96 V Max rms Current 1 38 WARNING GROUNDING The stage s protective ground is located on pin 5 of the motor power connector If you are using grounds other than those provided by Newport you must connect pin 5 to a ground connection Encoder Connector P2 Sub D15 Male 1 Encoder Phase B 2 Ground 3 EncoderPhase A 4 Encoder Power 5 V 5 1 8 6 7 ndex Pulse 1 0 6 6 Encoder Phase 15 10 11 Encoder Phase YA 12 13 14 Index Pulse 15 gt Newport EDH0325En1013 06 14 12 Experience Solutions 100 High Speed High Torque Precision Rotation Stage 7 2 RGV100HL Cable Wiring The RGV100HL stage is delivered with the two cables required for operation The wiring diagrams and connectors for these cables are provided below When operating with non Newport controllers it is recommended to adhere to the wiring conventions presented here and to use cabling with similar characteristics WARNING Newport guarantees the comp
24. while in use with non Newport controllers is not covered by the warranty Please refer to Design Details and Specifications for more information to help configure the stage with your controller Newport also provides a tech note on configuring third party stages with Newport controllers on the RGV100HL website which may be useful as a reference WARNING Newport takes no responsibility for improper function or damage to a stage when used with any non Newport controllers QD Newport EDH0325En1013 06 14 6 Experience Solutions 100 High Speed High Torque Precision Rotation Stage m Characteristics 6 1 gt Newport Experience Solutions Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of the position precision and repeatability of the machine tools with CNC This standard provides the definition of position uncertainty which depends on the 3 following quantities Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear error sources Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measurement point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accurac
25. y and on axis accuracy is as follow Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Can be specified as uni directional or bi directional Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Eccentricity Displacement of the geometric center of a rotation stage from the rotation axis in the plane defined by bearings Wobble Tilt of rotation axis during rotation of a stage measured on a reference surface For the RGV100HL stage the flatness of this reference surface is lt 10 pm see chapter Dimensions and Mounting The testing of on axis accuracy repeatability and hysteresis are made systematically with our test equipment in a controlled environment 20 C 1 C The test is comprised of 4 cycles each taking 21 data points in the forward and reverse directions for a total of 164 data points 7 EDH0325En1013 06 14 100 High Speed High Torque Precision Rotation Stage EDH0
Download Pdf Manuals
Related Search