Model FS1015CL
Contents
1. Figure 1 2 FS1015CL pressure drop v s flow rate FS1015CL VA 5 4 8 MEMS Mass Flow Sensors 2 Electrical Interface 2 1 Pin Definition The FS1015CL provides a 5 pin interface The output connecting cable comes with the sensor and it is 0 5m long The sensor pin layout is shown in Figure 2 1 and the cable color code is defined in Table 2 1 Figure 2 1 FS1015CL pin layout Table 2 1 FS1015CL cable color code Pin Color Definition 1 Blue SDA 2 Green Vout Analog output 3 Red VCC Power supply 4 Black GND Ground 5 Yellow SCL JEN 2 2 Pin Description VCC and GND The FS1015CL requires a power supply of 5 1 Vdc The voltage is internally filtered and regulated to power the circuit The accuracy of the power supply will influence the sensor output and the 1 accuracy requirement should be met to ensure the specified performance The sensor consumes less than 10 mAnormally and the minimum supply current must be larger than 10 mA Vout The analog output pin provides 0 5 4 5 Vdc corresponding with the specified flow range O full scale Beyond this range there is still voltage reading but the accuracy is not guaranteed SDA and SCL The IC serial communication is provided for storing and accessing sensor related information such as calibration data SDA is the data pin and SCL is the clock pin For IC communication protocol please contact the manufacturer 3 Mechanical D2. The mechanical interface is the standard ISO 15 mm medical connection that allows the sensor to be readily applied to ventilators and anesthesia equipment The FS1015CL requires a power supply of 5 Vdc and provides a linearized analog output of 0 5 to 4 5 Vdc corresponding with flow rate from 0 to full scale It also Working Principle JEN Siargo Ltd provides a digital interface through IC allowing customers to store and retrieve calibration data or other relevant information The AMP compatible mechanical connector provides reliable connection The response time of the FS1015CL is less than 8 ms which allows customers to monitor instant flow rate variations The calibration is generally performed with air at 20 C and 101 325 kPa pressure rating It can nonetheless be carried out with other gases and conditions upon requests The sensors can be sterilized in medical liquids for reuse or hygienic purposes The sensors can also be applied for various clean gas measurement with low cost and easy installation They can be used as a good alternative to volumetric and or differential pressure type flow sensors The MEMS sensor chip utilizes the calorimetric principle It is packaged on a plate installed inside the flow channel which provides additional flow conditioning from the boundary layer configuration resulting in a laminar flow The mass flow measurement is established as the gas carries heat away from the heater le
3. express or implied and assumes no liability for any special or incidental damage or charges including but not limited to any damages or charges due to installation dismantling reinstallation or any other consequential or indirect damages of any kind To the extent permitted by law the exclusive remedy of the user or purchaser and the limit of Siargo s liability for any and all losses injuries or damages concerning the products including claims based on contract negligence tort strictly liability or otherwise shall be the return of products to Siargo and upon verification of Siargo to prove to be defective at its sole option to refund repair or replacement of the products No action regardless of form may be brought against Siargo more than 365 days after a cause of action has accrued The products returned under warranty to Siargo shall be at user or purchaser s risk of loss and will be returned if at all at Siargo s risk of loss Purchasers or users are deemed to have accepted this limitation of warranty and liability which contains the complete and exclusive limited warranty of Siargo and it shall not be amended modified or its terms waived except by Siargo s sole action This warranty is subject to the following exclusions 1 Products that have been altered modified or have been subject to unusual physical or electrical circumstances indicated but not limited to those stated in this document or any other actions whic
4. JEN Siargo Ltd ace Model FS1015CL SIARGO MEMS FLOW SENSING PRODUCTS MEMS Mass Flow Sensors VA 5 Ce O 2014 Siargo Ltd MEMS Mass Flow Sensors FS1015CL Series User Manual Document No 07 2014 S5 EN Issue date 2014 07 Revision VA 5 Siargo Ltd 2041 Mission College Boulevard Suite 250 Santa Clara CA 95054 USA Tel 1 408 969 0368 Email info siargo com Copyright 2014 by Siargo Ltd Banh jo Siargo Ltd Siargo Ltd and its subsidiaries reserve the rights to change the specifications and or descriptions without prior notice For further information and updates please visit WWW Slargo com MEMS Mass Flow Sensors Model FS1015CL Features Mass flow range O 100 SLPM O 150 SLPM Fast response time 8 ms max Highly sensitive in small flow rate Low power consumption Specially designed for medical equipment Small form factor Description The FS1015CL mass flow sensors are manufactured using Siargo s proprietary MEMS flow sensor and package technology The sensors are specially designed for the application of medical equipment such as ventilators for flow monitoring and control with two flow rate ranges of O 100 SLPM and O 150 SLPM respectively The compact package design enables a large dynamic flow range with a pressure drop of 1300 Pa about 13 cmH O typically This package withstands a maximum pressure of 0 2 MPa 29 psi without compromising performance
5. MC directive 89 336 EEC www siargo com Cautions for Handling and Installations The product at the time of shipment is fully inspected for product quality and meets all safety requirements Additional safety measures during handling and installation should be applied To prevent ESD electrostatic discharge damage and or degradation take customary and statutory ESD precautions when handling Do power the product with the correct polarity voltage amp amperage All precautions and measures for electrical voltage handling must apply The product sealing is ensured to work under working pressure of 0 2MPa and is leakage proof before the shipment But cautions and further leakage test are important at installation as well since any leakage could cause severe safety issue FS1015CL VA 5 6 8 MEMS Mass Flow Sensors This product contains no user serviceable components Do not attempt to disassemble substitute parts or perform unauthorized modifications to the product Doing so will forfeit the terms of the warranty and cause the liability to any damages thereafter It should only be serviced by authorized personnel Upon requests Siargo will provide necessary technical support and or training of the personnel Cautions for Product Applications The product is designed for use with general purpose gases such as air and nitrogen It is advised that the products are best used for non explosive clean gases The sensors cannot be us
6. Sensors 1 3 Flow Characteristics The FS1015CL provides an analog output of 0 5 4 5 Vdc corresponding with O full scale flow rate Using full scale 100 SLPM as an example the nominal analog output v s flow rate is illustrated in Table 1 1 and Figure 1 1 The data is obtained at 5 0 Vdc supply Table 1 1 Nominal output voltage v s flow rate Flow Rate Nominal Voltage SLPM Vdc 20 1 3 40 2 1 60 2 9 80 37 100 4 5 110 4 9 120 4 9 Nominal Output Curve 100 SLPM 40 60 80 100 120 Mass Flow Rate SLPM Figure 1 1 The nominal analog output curve of FS1015CL with the full scale of 100 SLPM The sensor is calibrated 10 above the full scale flow rate to ensure the accuracy within the defined full range during interpolation For example full scale 100 SLPM is calibrated till 110 SLPM Hence at flow rate beyond the defined full scale there is still analog output but the accuracy is not guaranteed www siargo com JEN 1 4 Pressure Drop Characteristics The FS1015CL is packaged with a low pressure drop design The pressure drop is measured throughout the entire measurement range The results are shown in Table 1 2 and Figure 1 2 Table 1 2 FS1015CL pressure drop v s flow rate O 50 100 150 O 200 600 1300 Flow Rate SLPM Presure Drop Pa FS1015CL Pressure Drop Curve 40 60 80 100 120 140 160 Mass Flow Rate SLPM
7. ading to the redistribution of the temperature field Accurate flow rate is obtained by calibration with standard gas at preset conditions Flow direction WWW Siargo com Free stream Time averaged velocity profile boundary layer Turbulent Laminar Sensor FS1015CL VA 5 1 8 ta MEMS Mass Flow Sensors tw Block Diagram The functional block diagram is shown in the following flow rate related voltage to ADC The microcontroller figure The critical component of the FS1015CL is the processes amplifies filters etc the voltage then MEMS sensor chip that is heavily framed in the figure converts into flow rate The flow rate signal is sent out It is powered by the sensor driving circuitry and sends through analog format Gr a 7 FS1015CL Protection Voltage Regulator EEPROM Sensor Driving Circuitry Filtering EEPROM SDA I V 1 Converter l Functional block diagram of the FS1015CL www siargo com FS1015CL VA 5 2 8 fa MEMS Mass Flow Sensors tw 1 Sensor Performance 1 1 Performance Specifications All data unless otherwise noted apply for calibration conditions air 20 C 101 325 kPa absolute pressure horizontal mounting Model FS1015 Flow Range O 100 0 150 SLPM Turn down Ratio gt 100 1 Accuracy 2 0 0 5 FS Repeatability 0 5 Reading Null Shift 30 mV Output Shift 0 12 Yl C Resp
8. ed for gas metrology of fluoride or fluoride containing gases For updates of the product certification information please contact the manufacturer Use for other gases such as extreme corrosive and toxic may cause the product malfunctioning or even severe damages Don t expose the product s electronics other than the inner flow channel to any liquids the unit does not have a water proof electronics For medical sterilization procedure please consult the manufacturer Don t flow gas in conditions that can cause condensing water vapor to be trapped inside the unit during operation as the accuracy could be significantly influenced It is suggested to design your application so that nominal flow rate is approximately 70 of the full scale flow rating of the sensor Don t use a sensor with a flow range at the extreme cases for instance don t use a 150 SLPM sensor for a 1 5 SLPM application Warranty and Liability Effective January 2010 Siargo warrants the products sold hereunder properly used and properly installed under normal circumstances and service as described in this user manual shall be free from faulty materials or www siargo com JEN workmanship for 180 days for OEM products and 365 days for non OEM products from the date of shipment This warranty period is inclusive of any statutory warranty Any repair or replacement serviced product shall bear the same terms in this warranty Siargo makes no other warranty
9. h cannot be deemed as proper use of the products 2 Siargo does not provide any warranty on finished goods manufactured by others Only the original manufacturer s warranty applies 3 Products re sold to the third parties FS1015CL VA 5 7 8 MEMS Mass Flow Sensors Contact Information Headquarters Siargo Ltd 2041 Mission College Blvd Suite 250 Santa Clara California 95054 USA Phone 01 408 969 0368 Email info Siargo com Representative in US Sentech Measurements Inc P O Box 675265 6916 Circo Diegueno Court Rancho Santa Fe California 92067 Phone 01 858 759 0613 Email mpresar sentechmeas com Representative in Japan Marubeni Information Systems Co Ltd Device Solutions Department 3 12 18 Shibuya Shibuya ku Tokyo 150 0002 Japan Phone 81 3 5 778 8661 Representative in Europe IDENTIC Stefanie Trojan Roehlichstrasse 19 68723 Oftersheim Germany Phone 49 0 6202 574198 Email trojan identic de This document is intended for distribution to interested customer s only Siargo and its subsidiaries reserve the rights to change the specifications and or descriptions without prior notice www siargo com FS1015CL VA 5 8 8
10. imensions and Mountings 3 1 Mechanical Interface The FS1015CL provides standard ISO 15mm medical connection and can be readily applied to ventilator and anesthesia equipment The inlet is a male interface and the outlet is a female one See Figure 3 1 for details 3 2 Mechanical Dimensions The sensor has a total size of 70 0 X 44 3 X 25 2 mm as shown in Figure 3 1 www siargo com 29 9 0 1 37 0 amp lt Flow direction Figure 3 1 The FS1015CL mechanical dimensions FS1015CL VA 5 5 8 ta MEMS Mass Flow Sensors tw 4 Cleaning and Sterilization The FS1015CL can be sterilized for reuse The for 30 min Change with clean DI water for another 30 sterilization can be performed with liquid gas and ultra min violet The liquid sterilization is described as the following Dry the sensor in oven at 65 C for 120 min Immerse the FLOW CHANNEL of the sensor into the sterilizing solution Make sure the entire sensor body is within the solution but not the electronic cover for 30 min If sterilize with gas or ultra violet simply put the sensor in the sterilizing environment for 30 min Notice During sterilization the sensor must be powered off Then rinse the sensor by immersing it under DI water 5 Ordering Guide 5 1 Sensor Selection The sensor part number is composed of the product model number and suffix indicating the full scale flow rate mechanical connection output format as well a
11. onse Time 8 max ms Output Linear Analog 0 5 4 5 Vdc Max Pressure Drop 1300 Typ Pa Max Operation Pressure 0 2 MPa Power Supply 5 1 Vdc Operating Current lt 10 no output load mA Power Consumption lt 50 mW Analog Output Load aurana mA Sinking 15 Working Temperature 10 55 C 1 Denotes 2 0 Reading 0 5 Full Scale To obtain accurate flow measurement let the sensor warm up 1 minute at power up 2 The analog output provides linearized voltage of 0 5 4 5 Vdc corresponding with flow rate of O full scale There is an C interface that is for customers to store and access sensor related data 3 The maximum pressure drop is measured at 150 SLPM For pressure drop at 100 SLPM see section 1 4 for details 4 One 5 Vdc power supply with an accuracy of 1 is necessary The minimum supply current must be larger than 10mA 1 2 Additional Specifications Mechanical Connection ISO 15 mm Pins Out 5 Pins NS TECH CD R 5 Calibration Options Air 20 C 101 325 kPa Dimension 70 0 x 44 3 x 25 2 mm Weight 21 5 9 Storage Temperature 20 65 C Humidity lt 95 RH No icing or condensation 1 The 0 5m output connecting cable part number SN5 50 is shipped with the sensor 2 The sensor is normally calibrated with air at 20 C and 101 325 kPa pressure rating Calibrations at other gases and conditions available upon request www siargo com FS1015CL VA 5 3 8 MEMS Mass Flow
12. s the application gas Refer the following for details Gas A air C CO N N O O R Ar for other gases please contact manufacturer Connection ISO ISO 15mm Max scale Flow Rate Selectable 100 or 150 SLPM FS1015CL Max flow rate number only for example 100 meaning full scale flow rate of 100 SLPM For CO selectable 100SLPM without 150 SLPM 5 2 Order Contact and Customer Support The sales offices are listed at the end of this document For small quantities the order can be placed either through Siargo website www siargo com or the convenient sales office For large quantities please contact the sales office distributors or sales representatives Siargo is making every effort to ensure the quality of the products In case of questions and or product supports please contact customer service listed at the end of the document Important Notices Wetted Materials and Compatibility The sensor body is made of medical compatible plastics The sensor chip comprises of silicon silicon nitride and silicon dioxide and the sensor chip surfaces are passivated with silicon nitride and silicon dioxide The electronic sealing is provided by RTV room temperature vulcanizing silicone sealant WR 704 composed of HOCH SiO CH H Compliance Statement All components of this product are RoHS compliant The product fully complies with CE norm EN61000 6 1 through 61000 6 4 EN50081 2 through 50082 2 and E
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