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1. auto Idle Ramp O oon Idle Power O Deposition Rate 2 Sensor 1 Output 1 na E ror z Final Thickness 999 Sensor 2 Output 3 na a i Thickness Spt O Sensor 3 Output None x T Density e Sensor 4 Output None z Z Ratio 1 08 Sensor 5 Output None x GEER Max Power 100 Sensor 6 Output None y Sample 0 Sensor 7 Output None z HoldTime Sensor 8 Output None na All Sigma Data settings can be viewed and maintained using this screen Refer to the Sigma manual for further details regarding data set parameters ICON or DATA FIELD ACTION RESULT New Click to activate Creates a new data set Navigation Buttons Click to activate Use these buttons to select the first 1 4 previous last or next data set I Click to activate Deletes the selected data set 3 58 Kurt J Lesker Company Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Export to Excel Exports the selected data set to Excel Export Copy Dataset Click to activate Creates a copy of the selected data set Copy DataSet Update VB Click to activate Updates Visual Basic with any changes Update VB that have been made Kurt J Lesker 3 59 Company Software Operation Operation Manual Oo Configuration Recipes Configuration er 18 x 2 Help EE Recipes Recorded Data Action Log 34 Interlocks Sigma Data Sets Ow Configuration 8 System Us
2. The Operation Vacuum Screen 1s typically the first screen to appear 4 2E 8 12 00 05 PM 12 15 2005 Lesker Logout KJLC Kurt J Lesker 0 00 03 Closed Off Exit Super Use ABORT ee RS Wacuum Deposition Gas Motion Cooling Heating VAC RG Torr 4 2E 8 j LL Iso Valve Open mu or WRG T or n sky 7 5E 2 LL Iso Valve Close sky CLOSED LRP EOT Sy Recipe Database PC Vent Valve Cryo Temperature Regen Pressure Temp K PRNI mT or Run Recipe OFF 011 2 4E 3 PC High Vac Valve Start PC Pump 000 20 Temp deg C 23 1 Start PC Vent PC High Vac Throttle Sra PC E Purge Valve Lo Start LL Pump Start LL Vent PC Cryo Regen Valve T Gas Injection Start Transfer ater ALE LL Turbo Vent oe LL Ci 00 0 Roughing Pump PRNI T orr 1 1E 2 Recording Start Operation System Help LL Turbo Pump gil 3 64 Kurt J Lesker Company Operation Manual Software Operation At system startup the Login Logout Button is in a Login Here X state Clicking on this button will display the dialog box shown Dsl un le Mare here and press Enter 1 Type your user name in the upper window Then use the KILC mouse to set the cursor in the password window Type your password and press the enter key on the keyboard The OK Please key in Password button will then appear 2 Click OK or press the enter key on the keyboard The dialog
3. box will disappear and the Login Logout button will now display the username and the security access level of the logged in user Cancel pumping venting sample loading unloading process selection and process execution It is usually a good idea to pumpdown the system upon startup unless the system has a cryo pump that requires regeneration in which case pumpdown initiation must wait until the pump is ready Running the standard PC Pumpdown process puts the system into a known state that 1s typically desirable before selecting and running a deposition process 3 At this point basic system operation 1s available to the user Prior to running any process assure that all system connections have been properly made and all related documentation has been reviewed Refer to the Overview amp Definitions section of Software Operation for details regarding the function of Icons and Command Button processes Abort AutoRegen Abort Default Abort LL Pump Standard Recipes A A recipe 1s a collection of commands that can be used to perform pre eta a set routine Many recipes are pre programmed for customers These programmed recipes can be modified or copied then modified to suit your specific application The standard recipes involve basic functions such as abort routines pumping venting testing wafer transfer etc Use the Recipe Database screen to view or modify the steps in a recipe SetAutoPurgeBitOn setPoi
4. Magnetic fields may cause irregular performance of pacemakers which can cause abnormal heartbeat or death Persons with pacemakers should avoid exposure to all processes involving the magnetic field hazards Strong magnetic fields can destroy watches or magnetic cards Keep watches magnetic cards and other metal objects away from magnetic field hazards Do not use magnetic tools when performing service or maintenance work on the system 4 Chemical hazards exist when potentially harmful chemicals are introduced or emitted from the system Exhaust gas may be poisonous and may require special measures of elimination Ensure adequate ventilation and appropriate exhaust regulation when working with potentially poisonous exhaust gases Deposition sources may emit poisonous gases if not maintained properly Read all safety data sheets and follow the documented maintenance procedures Some cleaning fluids may leave a flammable or toxic residue Observe all instructions provided with cleaning fluids Kurt J Lesker 1 9 ompany Introduction Operation Manual 5 Mechanical hazards exist because moving parts can cause personal injury or instrument damage Before actuating the hoists or slit valves all personnel must be clear of moving parts Use extreme caution when working around moving parts 6 Compressed gas used for processes can create high pressure hazards throughout the gas plumbing lines and process cham
5. Safety Guidelines l High voltage and electrical energy hazards exist for the power distribution cabinet and all power supplies 4 DANGER High voltage and electrical energy hazards can cause serious injury or death through electrical shock Avoid contact with power supplies and all power distribution hardware All personnel involved with power supply service or maintenance must have appropriate electrical training Service and maintenance personnel must read each component part manual before working on the equipment to determine the potential present on each circuit Power must be disconnected and the equipment must be grounded before service or maintenance work 1s performed Never work alone on live electrical circuits You must be within sight or calling distance of another employee who has the proper qualifications Do not wear rings wristwatches or other jewelry on your person while working on live electrical circuits Wear eye protection while working on live electrical circuitry where a flash might occur DO NOT WEAR CONTACT LENSES 2 High frequency hazards exist at the RF power supplies High frequency fields may cause irregular performance of pacemakers which can cause abnormal heartbeat or death Persons with pacemakers should avoid exposure to all processes involving the high frequency hazards 1 8 Kurt J Lesker Operation Manual Introduction 3 The permanent magnets create magnetic field hazards
6. 4 1 Maintenance Operation Manual Maintenance Personnel Qualifications All personnel performing maintenance procedures must have appropriate training Vendor supplied instructions and operator manuals should be reviewed prior to maintenance or operation of any equipment or hardware 4 2 Kurt Lesker Operation Manual Maintenance Maintenance Materials and Accessories Electrical e ee ee ME TO O Terminal Crimper Sine 22 10 AWG Precision Serewdrivers Standard Assembly AAA SAE Socket Set Sizes 1 4 inch 3 4 inch A Metric Socket Set Sizes 6 mm 17 mm Ratchets 1 4 inch amp 3 8 inch Ratchet Extensions 1 4 inch amp 3 8 inch SAE Wrench Set Sizes 1 4 inch 3 4 inch Metric Wrench Set Sizes 6 mm 17 mm Adjustable Wrench Small amp Large HAR Slotted Screwdriver SAE HexKeySet ini Metric Hex Key Set 1 5 mm 10 mm Slip Joint Pliers Standard Tube Cutter Metal amp Plastic 1 4 inch 3 8 inch sopa Alcohol Used for final cleaning tome Used or initial degreasing O Momo Vaeuum leaning solution pa Wipes Tint ree wipes Mina Disulfide Used for lubrication of hardware DT vacuum Grease Used on o rings to ensure proper seal Boron Nitride High temperature lubricant Please contact the Kurt J Lesker Company for ordering information Recommended Supplies Kurt J Lesker se pany Maintenance Operation Manual General Recommendations Y Y 4 4 Prior
7. Recipes Used Display only Lists the recipes that were used by the Recipes Used corresponding user login name Kurt J Lesker 3 55 a A Company Software Operation Interlocks Operation Manual Recipes Interlocks o E i R Help EE Recipes Recorded Data 4 Action Log Show ALL Hide Skips Seq Type Equipment Interlock Valve Valve Interlock Valve Valve Interlock Pump Valve Interlock Pump Valve Interlock Pump Pump Interlock Valve Valve Interlock Valve Pump Interlock Valve Pump Interlock Valve Valve Interlock Equipmentitem New Operation Only LL Iso Valve Open LL Iso Valve Close New Operation Only LL Iso Valve Close LL Iso Valve Open New Operation Only LL Turbo Pump LL Turbo Vent New Operation Only LL Turbo Pump LL Turbo Back New Operation Only LL Turbo Pump Roughing Pump New Operation Only LL Turbo Vent LL Turbo Back New Operation Only LL Turbo Vent LL Turbo Pump New Operation Only LL Turbo Back LL Turbo Pump New Operation Only LL Turbo Back LL Turbo Vent New Operation Only 34 Interlocks Sigma Data Sets ow Configuration System Users Type a question For help Export Interlocks to XL Update VB Reorder ltems EquipmentltemOperation 000000000000000000000000000 Turn_On Open Opening Check_On Open Opening 000000000000000000000000000 Turn_On Open Opening Check_On Open Opening 000000000000000000000000000 Turn_On Open Opening Check_On Open Opening 00
8. Refer to the SMI User s Manual D Textl0 0 Substrate X Source Y Click text to enter The platen will move to the desired Substrate Position Key the desired station position when the station setpoint is used in setpoint in degrees conjunction with the enable position See example below button Kurt J Lesker DL E A Company Software Operation Operation Manual Substrate X Source Y Example This station setpoint 1s intended for systems with single or multiple platens For example a station setpoint of 14 on a system with one platen signifies that platen 1 the only platen should move to deposition source or position 4 A station setpoint of 25 on a system with 4 platens signifies that platen 2 should move to deposition source or position 5 Setting a new station setpoint places a value in the motor position setpoint in inches or degrees depending on the type of axis but the Move to Position button must be pressed before the motor will actually move 3 32 Kurt J Lesker IA Company Operation Manual Software Operation Operation Heating Screen Kurt J Lesker pee Overtemperature Display only This icon is only visible when the heater is over temperature Temperature Setpoint Click to enter Enter the desired temperature setpoint value Kurt J Lesker 3 33 Software Operation Operation Manual ICON or DATA FIELD ACTION RESULT Auto Mode Setpoint Auto SP deg C Heater Setpoi
9. To set a new user just type in the user details The password will be created the next time they log on To reset a password just clear the current one New User m Recipe Database Access User Log in Name IKILI M Recipes SurName KJLC V Recorded Data First Name KILC M Action Log Initials max 3 KIL V interlocks M Sigma Data Sets Start Form Recipes MV Configuration Password Clear Password M System Users VE Mainform Access VE Other Access Delete User M Operation Y Operate if Running Recipe M System M Can change ANY recipe M Operator MN Process Engineer M Super User This chart defines icons and buttons found on the System Users Screen ICON or DATA FIELD ACTION RESULT Find Click to activate Find Existing System User el New User Click to activate New User Log in Click to activate User Log in Name KJ SurName Last Name SurName KILC First Name First Name KJLC Initials Click to activate Click to activate Click to activate Initials max 3 KIL Kurt J Lesker Company This field displays a list of all users with access to the system software in drop down menu format Click this button to create a new software user using the appropriate boxes below Enter a user s log in name to log in Enter the user s last name 1n this field Enter the user s first name 1n this field Enter the user s initials in t
10. 0000 jooo0 0000 Source3 Material fa E 6 0 2 Sourced Material fa ja 7 0 2 EM po Po Ea ET Power Supply 6 OFF po Watts fo 0000 0000 0000 Shen Operation System Help ICON or DATA FIELD ACTION Shutter Indicators Display only Green Open Gray Closed Source Material Click to enter Target material is displayed on the Material current target Operation Deposition screen and recorded AE ETT gi CI material in process and manual datalogs Source Power Supply Click text to map The mapped source kilowatt hours counter Mapping source to a will increment accordingly when the Target particular power respective power supply is on and has n supply and positive output power switch position if applicable Kurt J Lesker oa ompany Software Operation Operation Manual ICON or DATA FIELD ACTION RESULT Source Kilowatt Hours EHra O DE 1 Power Supply On Off PS Output Setpoint Setpoint PS Ramp Rate Ramp Rate Us Power Supply Feedback Fwd Rf Power Power DC MA Ww Bias Y Watts Volts Amps Displays current kilowatt hours for a particular target Click to zero or preset the kilowatt hours counter Click to activate Click to enter value Click to enter value Display only The kilowatt hours counter increments accordingly based on the output state of the corresponding power supply The counter is set accordingly and increments from the preset
11. 29 AM 0 fw 3 29 2005 9 40 16 AM 4 Ba pre condition Ba pre condition Interlock Thermal Source 6 ON Turn Water On fw 29 2005 10 06 29 AM 12 Ba pre condition Ba pre condition Thermal 1 Al fw 3 29 2005 2 19 41 PM 0 fw 3 29 2005 2 23 01 PM 0 fw 3 29 2005 2 24 12 PM 0 fw 3 29 2005 2 30 36 PM 0 fw 5 29 2005 2 32 31 PM 2 Interlock LLR Isolation Valve Open Stop the Rotation aaaaaa All user actions that have occurred since the last shut down can be viewed and maintained using this screen See the CWare Operation section for further instructions ICON or DATA FIELD ACTION RESULT Delete Click to activate Click to remove all entries in the Action Click to activate Click to export a copy of all entries in the Action Log to C ProgramFiles Lesker Customer Name Excelfiles Person Display only Displays the login name of the person pue using the system for the corresponding login entry Logged In Shows the date and time that the user Logged In logged into the system Logged Out Shows the date and time that the user Logged Out logged out of the system T34 Kurt J Lesker Company Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Time Logged In Display only Shows the elapsed time that the Time Logged In corresponding user was logged into the System Number of Recipes Display only Shows a count of the number of recipes Num Recipes that were used by the corresponding user login name
12. 3 56 Kurt J Lesker Company Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Export Click to activate Exports the interlock data to an Excel Export Interlocks to XL spreadsheet Update VB Click to activate Updates Visual Basic with any changes Update VB that have been made Reorder Items Click to activate Renumbers the steps after changes have been made Reorder Items Kurt J Lesker Software Operation Operation Manual Sigma Data Sets Recipes Sigma Data Sets a 181 x Help EE Recipes Recorded Data 4 Action Log 34 Interlocks C Sigma Data Sets o Configuration amp System Users Type a question For help X LA pl Delete 4 Export All DataSets to XL Copy DataSet Update VB View Material List 3 Bescon Thermal Al substrate ha y Main Material A Full Time values marked can be entered in Seconds e g 120 or as hh mmiss e g 1 23 40 Rise Time 1 i Card Output No 3 P 0 9999 3 Soak Power 1 O Tooling Factor 1 50 1 0 99 9 1 Soak Time 1 O Tooling Factor 2 150 D 0 99 9 0 1 Rise Time 2 O Tooling Factor 3 100 Soak Power 2 0 Tooling Factor 4 100 Process Name Al dual Soak Time 2 O Tooling Factor 5 100 Layer No 1 Shutter Delay m Tooling Factor 6 100 Film Name Al dual Accuracy Tooling Factor 7 100 Material Name Al dual Time Out secs Tooling Factor 8 100 Layer Start Mode
13. Analog Strings Ethernet 10 Discrete Outputs Recipe Database Signal State Is Forced Gas Injection 0 0 Diff Pump Temperature Switch Run Recipe PC Turbo Backing Valve 0 0 PC Turbo At Speed ETL Start PC Pump own PC Turbo Vent Valve 0 0 PC Turbo No Fault Start PC Vent Power Supply 1 0 0 Srel Flow Switch Roughing Pump 0 0 Substrate Heater Not Over Temp Source Shutter 1 0 0 Vacuum Sw PC Source Shutter 2 D 0 Source SW1 0 0 Source 572 0 0 Substrate Heater 0 0 Rotation Start Substrate Heater Auto 0 0 Recording Start Operation System Help TE This screen is primarily used for troubleshooting and selecting datalog items It is recommended that operators other than the system administrator do not have access to this screen Users can be denied access to this screen based upon their login parameters see the System Users Screen and the Security section of this manual Forcing discrete inputs can override interlocks When system troubleshooting is complete you must remember to reset un force signals ICON or DATA FIELD ACTION RESULT Click to select or All Discrete Outputs and Inputs are listed in deselect alphabetical order 3 40 Kurt J Lesker Company Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Initial Value Display only Displays the initial condition of the corresponding discrete output at system Latidos Wels startup Signal Value Click to ac
14. LTE HTE Furnace source 2 Place a loaded crucible into the pocket of the source and ensure that the cover is installed properly into the source base Ensure that the loaded crucible is centralized in the source cover 3 6 Kurt J Lesker es Company Operation Manual Manual Operation Some low temperature evaporation materials are known carcinogens Refer to all MSDS sheets for safe handling and appropriate breathing equipment and ventilation 3 Check to see that LTE HTE Furnace source is positioned correctly to deposit on the substrate 4 Evacuate chamber to lt 5 0e 06 Torr Although the LTE HTE Furnace will work under any high vacuum condition it is recommended to start at a pressure of lt 5 0e 06 Torr 5 Precondition the material in the crucible by raising the temperature of the source to a temperature or power level just below the appearance of rate on the deposition monitor 6 Let source stabilize at precondition temperature for at least 3 minutes 7 Heat source to desired deposition rate by raising the temperature or power level on the supply 8 Open the substrate source shutter and O the thickness monitor Refer to film thickness control monitor s operating manual for detailed instructions 9 When the desired thickness is achieved on the monitor close the shutter and reduce heat in the source 10 Allow source to cool prior to venting system Use caution when removing the substrate from
15. Lesker Company CWare HMI Human Machine Interface consists of two components e System Database e Runtime Software Together these two components give the system operator an interface that provides capabilities such as Process automation Process recipe creation System status Manual control of the system Datalogging Alarms Password protection Interlocks Offline process editing The software operates on a Windows based computer with a mouse keyboard and standard CRT flat screen monitor or optional touchscreen monitor Kurt J Lesker out ompany Software Operation Operation Manual General Guidelines CWare enables the user to run the tool manually or in an automated fashion as well as provides system and process feedback e All actions and selections are done with a single mouse click or single push of the finger in the event of a touchscreen monitor There are NO double click actions on any Runtime screen e All buttons are typically two state radio buttons that can be either up or down When a button is visible it indicates either the state of a request to turn on a device the state of a sequence or the active navigation screens Typically a button that is pressed or down indicates that the user or a process is requesting the respective device to turn on A button that is not pressed or up signifies a device that is being requested to turn off e Devices that can be turned on or off typically have
16. Manual Software Operation ICON or DATA FIELD ACTION RESULT Proportional Coefficient F ME Integral Coefficient ALO D Request O UEG Heater On Manual Button Heater On Auto Button Click to enter value Click to enter value Click to enter value Click to activate Click to activate Enter the Proportional coefficient for the Auto Mode temperature control loop The control loop is immediately changed The P term determines the change in heater output power applied to compensate for differences between actual and desired temperature Typically larger P terms are required for greater thermal mass CAUTION Disable Auto Mode while adjusting PID parameters Enter the Integral coefficient for the Auto Mode temperature control loop The control loop 1s immediately changed CAUTION This term does not typically need to be adjusted from its factory default value Disable Auto Mode while adjusting PID parameters Enter the Derivative coefficient for the Auto Mode temperature control loop The control loop is immediately changed CAUTION Disable Auto Mode while adjusting PID parameters Green Heater On Gray Heater Off Green Auto Mode Enabled Gray Auto Mode Disabled When Auto Mode is enabled the heater is controlled by the temperature setpoint rather than power Refer to the Operation Heating section for descriptions of heater control icons included on the Heating screen Kur
17. Operation System Help ql CWare provides a basic interface for the Sigma controller Refer to the Sigma manual for details regarding function and data set parameters ICON or DATA FIELD ACTION RESULT Sigma Launch 242 Click to activate Initiates the Sigma deposition control software Sigma Simulation Mode Click to activate Simulates Sigma processes in the absence of Sigma hardware Sigma Start Stop Process Click to activate Initiates the currently loaded Sigma o process Kurt J Lesker i4 Company Software Operation ICON or DATA FIELD ACTION RESULT Sigma Zero All Zeros the Sigma thickness Thicknesses OK Indicator Power Supply Mapping PAS Mapping Data Shutter Mapping Delay Shutter Mapping Deposit Shutter Mapping Deposit Shutter Mapping Sigma Data Set Number Control Request New Process Click to activate Display only Click to enter value Click to enter value Click to enter value Click to enter value Click to enter value Operation Manual Lights green when Sigma acknowledges communication with CWare Map the power supply to the corresponding Sigma deposition source number Example If a 1 is entered The Sigma process output Power setpoint will be transferred to the outpoint setpoint for KJLC deposition power supply 1 Map the desired shutter to the Sigma delay shutter control signal Controls the opening and closing of the correspondin
18. Pressure Control Mode method of pressure control whereby effective pumping speed is held constant 1 e fixed position throttle valve and gas flow is varied to achieve a desired pressure The point of gas introduction 1s referred to as being Upstream relative to the means of pumping 3 18 Kurt J Lesker IA Company Operation Manual Software Operation Common Icons These common icons appear throughout the Runtime software screens Some icons appear on every screen others only where specified Time and Date Banner 4 2E 8 12 00 05 PM 12 15 2005 The Time and Date Banner appears at the top left of all runtime screens The current Windows time and date is displayed Running Time Indicator 0 00 03 The Running Time Indicator appears at the top left of all runtime screens The time displayed here 1s the elapsed time that the software has been up and running since the last shut down a Legend Indicators Closed Df The Legend Indicators appear at the top left of all runtime screens The status of a corresponding active or inactive signal 1s indicated here us xit Button E sit E The Exit Button appears at the top right of all runtime screens Pressing this button closes both the runtime engine and the system database Login Logout Button Logout KJLE Super User i The Login Logout Button appears at the top right of all runtime screens This button allows the user to login or logout of the software
19. Pressure Display only Indicates wide range gauge pressure in Moro Torr LRP End of Travel Display only Green LRP is fully retracted End of LRP EOT Travel Iluminates to On color if active and Off color 1f inactive 3 22 Kurt J Lesker A Company Operation Manual Software Operation Operation Deposition Screen 1 0E 1 1 21 19 PM 12 20 2005 x Logout KJLC 0 00 02 Closed Off Exit Super User ABORT Vacuum Deposition Gas Motion Cooling Heating Shutters Heater Control Platen Control Pressure Gas Flow Gun3 Shutter Velocity Wide Range Gauge PC Recipe Database Substrate Heater ON Setpoint MFC1 sP 0 000 0 l Text3 1 0E 1 Tor 0 000 0 Gun2 Shutter Gun4 Shutter OFF Substrate Heater Auto Velocity pclae an Run Recipe RPM 100 00 mTorr MFC3SP 0 000 0 250 0 0 l El Substrate Heater Temp Sp Capman Pressure SP Start PC P Substrate Shutter f 0 Substrate Heater Ramp Rate fo mTorr Gk 24 0 Substrate Heater Temperature Kurt J Lesker Start PC Vent Power Gun Shutter Power ae Poses Power DC Supply Setpoint Units Us Ww Ww BiasY Watts Volts Amps Start LL Pump Power Supply 1 0 Watts fo ooo0 ooo0 ooo0 Start LL Vent Source Configuration Power Supply 2 OFF e Watts b fooo2 0000 foo Sourcel Material e EE Power Supply 3 OFF fo Watts fo 0001 0000 0 0 mt ee alla pa F Ex Power Supply 4 OFF po Watts p
20. Setpoint 4 x ELLE PEEL EE Clear Eure AIRIS PEELE EFEFEF LEFRERE Cancel f i 3 12 Kurt J Lesker E Company Operation Manual Security KJLC CWare security is managed with a user name and password approach Ideally one or two people should be assigned to manage the system security This These System Administrator s will need to assign a login name for each person that will operate the system using the computer interface Each login name will be assigned parameters that dictate that user s access to the software The System Users Screen 1s used to administer this information and is accessed through the System Database Software Operation 1 On the Operation Vacuum Screen click the Recipe Database button 2 Click the Systems Users button on the topmost toolbar of the System Database Screen 3 The following screen should appear Recipes System Users a 3 J 18 x 7 Help FE Recipes Recorded Data Action Log 34 Interlocks 1 Sigma Data Sets Configuration amp System Users Find Existing System User Type a question For he lp xX To set a new user just type in the user details The password will be created the next time they log on To reset a password just clear the current one New User m Recipe Database Access User Log in Name KILO M Recipes SurName We O O M Recorded Data First Name Ke O i M Action Log Initials max 3 a M Interlocks antam Recipes
21. This icon also displays the login name and security level of the current user Abort Button ABORT g The Abort Button appears at the top right corner of all runtime screens Pressing it activates an abort condition Kurt J Lesker Software Operation Operation Manual Light Tower The Light Tower appears in the top right corner of all screens When the topmost bar is illuminated RED a red alarm condition is present The second bar will light YELLOW to indicate a yellow alarm The third bar will light GREEN to indicate that a recipe 1s running The bottom bar will light BLUE to indicate a normal status no alarms are present and no recipes are running Navigation Buttons Runtime Software Operation Vacuum Deposition Motion Cooling Heating Motion System Discrete Analog Strings Ethernet 10 This set of Navigation Buttons appears on the Runtime Software screens They are used to navigate the major screen groups Each button opens a new screen with a different set of information or data Navigation Buttons System Database 7 Help Recipes EN Recorded Data 4 Action Log Interlocks Sigma Data Sets Gr Configuration Gy System Users This set of Navigation Buttons appears at the top of the System Database and is used to navigate throughout the database Each button opens a new screen with a different set of information or data Command Buttons Recipe Database Aun Recipe Start PL Pum
22. be sections of this manual that describe optional features that are not included in your system configuration Please disregard these sections Sample Rotation Setup and Operation 1 Locate the platen rotation control panel on the front of the system 2 Set the rotation speed to O by rotating the speed control knob to the full counter clockwise position 3 Turn the power switch to the ON position 4 Slowly rotate the speed control knob clockwise until desired speed 1s reached Stop the rotation by turning the speed control knob to the full counter clockwise position and turning the power switch OFF Use caution when jogging the platen rotation to avoid serious equipment damage Do not rotate while the system 1s open to avoid injury and or equipment damage Sample Heating Setup and Operation 1 Verify the presence of a substrate on the platen and that the system is under vacuum 2 The temperature will be controlled with a heater controller 3 Refer to heater controller manual for further details on operation Kurt J Lesker E E Company Manual Operation Operation Manual Do not vent while heater temperature 1s gt 80 C to avoid injury or equipment damage Use caution when removing the substrate from the chamber 1t may be extremely hot Gas Flow Setup and Operation Manual Pressure Control Needle Valve l gt 9 If hooking up the system for the first time or changing to a new tank proceed to
23. breaker Verify that the start stop circuit is on and that all EMO buttons are not triggered reset by pulling out and rotating Leave the system in a stopped state when this test is complete Verify that all instrumentation and all devices requiring line power are labeled configured appropriately for the system line voltage 120 or 208 etc Turn off the power switches on all instrumentation and plug strips Start the system power and turn on the breaker s for the instrumentation outlet strip s ONLY Power up and verify per the Power Distribution Schematic that all devices are plugged into appropriate outlets on the power distribution unit or plug strip s in order to satisfy circuit breaker assignments Momentarily engage the rough pump contactors or power strip to verify operation of the motors verify that plumbing into and out of pump is correct and that the pump has been filled with oil if applicable Verify that the chamber motors and shutters are not obstructed and move freely Verify that all required communication and power connections to the system computer are connected and working properly Start up the system control software refer to the Software Operation section Verify all setpoints heaters power supplies etc before starting the pumpdown sequence Kurt J Lesker ora E Company Getting Started Operation Manual 2 10 Kurt J Lesker E Company Operation Manual Operation 3 Operation This chap
24. covered by CUSTOMER s insurance or any other event or occurrence not caused by COMPANY 3 The foregoing warranties shall not apply to Equipment or parts or components thereof which are not manufactured or processed by COMPANY or which are purchased by COMPANY from another party or partied The manufacturer s warranty for such Equipment parts or components if any shall be assigned to CUSTOMER without recourse to COMPANY 4 The foregoing warranties shall not apply to designs materials or specifications furnished or specified by CUSTOMER and incorporated into the Equipment 6 THE EXPRESS WARRANTIES AND REMEDIES SET FORTH IN THIS SECTION ARE EXCLUSIVE AND ARE CONDITIONED UPON TIMELY NOTIFICATION BY CUSTOMER THEY ARE GIVEN BY COMPANY AND ACCEPTED BY CUSTOMER IN LIEU OF ANY AND ALL OTHER REMEDIES WARRANTIES AND GUARANTEES EXTOUCHED OR IMPLIED AND IN LIEU OF ANY IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ALL OF WHICH ARE HEREBY SPECIFICALLY EXCLUDED AND DISCLAIMED 7 COMPANY neither assumes nor authorizes any representative or other person to assume for it any obligation or liability other than such as is expressly set forth in this section Any change modification extension or addition to the foregoing warranties remedies or limitations shall not be binding upon COMPANY unless in writing and duly executed by an authorized officer of COMPANY Kurt J Lesker Operation Manual Preface Tradem
25. direction or approval from KJLC Systems Support can result in termination of the warranty If an authorized KJLC service representative suggests that a system component be returned to KJLC a Return Material Authorization RMA number must be issued The RMA number expedites handling and ensures proper service of the equipment DANGER Many of the referenced maintenance procedures have safety dangers warnings cautions and notes associated with them Read all procedure references and observe all safety measures Preventative Maintenance The individual component manufacturer s recommended preventative maintenance schedules should be reviewed and followed Failure to follow the proper preventative maintenance procedures could result in premature failure of the system or components Process Chamber Cleaning The chamber and internal shielding should be cleaned regularly to remove deposition contaminants and particulates which can affect vacuum integrity and process performance The interval required for cleaning is based upon the amount of deposition processes performed on each system The user should review the system periodically and perform duties as required to set up a scheduled preventative maintenance procedure If required a recommended cleaning procedure can be supplied by an authorized KJLC representative Kurt J Lesker 2 ompany Maintenance Operation Manual As part of the preventative maintenance of the s
26. items will be appended to the new table The data items appear in the table in alphabetical order with a date time stamp on each new record Microsoft Access 02_23_2006 15 11 10 Table IES 2 File Edit View Insert Format Records Tools Window Help Type a question for help xX eZ gt a a oo Vv p Ge 5i ol ral 77 lr ba pX G 43 y a OD 2 23 2006 3 11 14 PMO 000 10 POS oi 2 23 2006 3 11 15 PM 0 a 000 10 gt POS DE 2 23 2006 3 11 20 PM 0 0 0 4 000 10 25 POS CWare Shutdown Pressing the Exit button at the top right of any Runtime Software screen will close both the Runtime Software and the System Database Bel Kurt J Lesker o Software Operation Operation Manual 3 70 Kurt J Lesker E Company Operation Manual Maintenance 4 Maintenance This chapter describes maintenance required on the system CHAPTER CONTENTS Maintenance Personnel Qualifications ccccccssssccssssccssssccsscscccscscccsesces Maintenance Materials and ACCEeSSOLIECS cccccssscccssssccsscsccsscsccesssccesccees General Recommendations ccccssscccscscccscccccscscccscccccscscccesccccescsccesccccesees System Component Repair Replacement ccssssscccccssssssscccccccsssccees Preventative MaintenanCe cccccccccccssscccssccccssscccssscccsscccccscscccscccccsccccesecees Process Chamber Cleaning ccc sececcssexisnascbevstesoeessivistececetecwsaseseveseseacescatvievcceies Kurt J Lesker Company
27. own risk Writing Recipes 1 On the Recipe screen click New in the upper left corner gt Type a name in the white box next to Name EE hd NE E 3 Check the Include in VB List box so that the recipe will be available from the Runtime Software 4 Click on row 0 in the Equipment column and then select an equipment option from the drop down menu 5 Tab to or click on the Equipmentltem column and select an option from the drop down menu The contents of this drop down menu are dependent upon the chosen equipment from step 4 above 6 Tab to or click on the EquipmentltemOperation column and choose the desired action 3 66 Kurt J Lesker A Company Operation Manual Software Operation 7 In the last column Equipment Test Value enter the time or pressure relevant to the chosen action 8 The column labeled GRST allows for Goto sequence number Ramp rate Skip or Timeout steps 9 Repeat steps 1 through 8 for each recipe step You cannot move to the next recipe step until the current one is complete 10 When all steps of the recipe are complete click on the Update VB button to save the recipe This will make the recipe appear on the Run Recipe list from the Runtime Software screens Modifying Recipes Any saved recipe can be modified It is strongly suggested that you copy a recipe and modify the copy using a new recipe name If you need the original recipe it will still be saved as it was before you started
28. the chamber it may be hot Kurt J Lesker ot Manual Operation Operation Manual Thermal Evaporation Source Operation DO NOT operate the Thermal Evaporation Source before reading and understanding all pertinent component manuals l Inspect all electrical connections between the evaporation power supply and transformer and the transformer to feedthrough connections 2 Establish that all safety covers and switches if applicable are in place and satisfied Install the desired evaporation boat and deposition material 4 Evacuate chamber to lt 5 0e 06 Torr Although the source will work under any high vacuum condition it 1s recommended to start at a pressure of lt 5 0e 06 Torr 5 Precondition the material in the crucible by raising the temperature of the source to a temperature or power level just below the appearance of rate on the deposition monitor 6 Let source stabilize at precondition temperature for at least 5 minutes 7 Heat source to desired deposition rate by raising the temperature or power level on the supply 8 Open the substrate source shutter and zero the thickness monitor 9 When the desired thickness is achieved on the monitor close the shutter and reduce heat in the source 10 Allow source to cool prior to venting system Use caution when removing the substrate from the chamber it may be hot 3 8 Kurt J Lesker E Company Operation Manual Manual Operation Film Thicknes
29. to the installation of any assembly it is good practice to review the list of parts and ensure all parts are on hand Prior to installation of any copper gasket or o ring ensure the gasket o ring and sealing surface are free from defects and debris Wipe all gaskets and flanges clean with isopropyl alcohol prior to installation to assure cleanliness When applying vacuum grease to an o ring be cautious not to apply too liberally A thin even film is sufficient Prior to tightening any QF or Conflat type flanges ensure that the o ring or metal gasket is centered and seated properly When assembling be sure to use proper vacuum cleanliness techniques i e wearing clean gloves hair nets and beard masks and using lint free wipes Use a non stick lubricant such as Molybdenum mixed with isopropyl alcohol on all stainless steel to stainless steel hardware mounting For internal mounting only a vacuum compatible lubricant such as Boron Nitride should be used Supplemental Manuals and Information should be reviewed prior to installation or operation of any equipment or hardware Kurt Lesker Operation Manual Maintenance System Component Repair Replacement For repair or replacement of specific components see appropriate schematics and operation manuals These procedures are associated with features critical to proper system function In house performance of component repair or replacement during the warranty period without
30. 00 This screen displays recorded system data and provides the user with a means to maintain the data See the CWare Operation section for further instructions Delete Click to activate Deletes the selected data set Delete Exports the selected data set to Excel Start Time Display only Shows the start time of the corresponding Stop Time Display only Shows the stop time of the corresponding Description Display only Shows the unique system generated name for a data set This name can be edited by test 1 the user Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT View Click to activate Views the selected data set in the table View format of an Access database Delete Sigma Log Files Click to activate Deletes Sigma Log Files Delete Sigma Log Files Kurt J Lesker 3 53 a A Company Software Operation Operation Manual e Action Log Recipes Action and Event Log o 2 2 x Help EE Recipes Recorded Data 4 Action Log 34 Interlocks J Sigma Data Sets ow Configuration y System Users Type a question for help X Person Logged In Logged Out Time Logged in Num Recipes Recipes Used AA 3 27 2005 5 29 59 PM 5 Thermal 1 Al PC Vent PC Pump fw 28 2005 10 20 04 AM 3 PC Pump Thermal 1 Al Abort Default fw 28 2005 10 46 25 AM 0 fw 28 2005 10 48 43 AM 0 fw 28 2005 10 59 02 AM 0 fw 28 2005 11 00 13 AM 13 Thermal 1 Al Thermal 1 Al Thermal 1 Al fw 3 29 2005 9 24
31. 0000000000000000000000000 Turn_On Open Opening Check_Off Closed Clasing 000000000000000000000000000 Turn_On Open Opening Check_Off Closed Closing 000000000000000000000000000 Turn_On Open Opening Check_On Open Opening 000000000000000000000000000 Turn_On Open Opening Check_On Open Opening 000000000000000000000000000 Turn_OfffClosed Closing Check_On Open Opening 000000000000000000000000000 Turn_On Open Opening Check_On Open Opening 000000000000000000000000000 Equipment Test Value LL iso valve closed is active LL iso valve open is active LL turbo vent valve is open LL turbo backing valve is closed Roughing pump is off Turbo backing valve is open Turbo pump is on Turbo pump is on LL turbo vent is open Purge valve is open Valve PC Cryo Regen Valve me DO Pere Pr Sahin Turn_On Open Opening ODChanle Me lt il This screen provides detailed information regarding interlocks Only KJLC Engineers or System Administrators under the direction of a KJLC Engineer should change these interlocks See CWare Operation for further instructions Changes to this screen can damage equipment or cause injury to system users ICON or DATA FIELD ACTION RESULT Show All Click to activate Shows all interlocks Show ALL Hide Skips Hide Skips Reserved for future use Click to activate Choose a piece of equipment to see only the interlocks associated with that equipment Drop Down List ee
32. E M Sigma Data Sets Configuration Password Clear Password M System Users Delete User Adding a New User l 2 Click the New User button VB Mainform Access M Operation M System VB Other Access M Operate if Running Recipe M Can change ANY recipe Operator M Process Engineer Super User Choose a unique Log in Name for the new user and type it in the User Log in Name box This is the field that will get captured during datalogging Complete the SurName last name FirstName and Initials boxes with the person s actual name and initials Using the drop down menu choose which software screen should appear first when this user logs onto the system Kurt J Lesker Company 3 13 Software Operation Operation Manual 5 The password 1s chosen by the user when they log in for the first time and must consist of at least one character 6 In the set of checkboxes labeled Recipe Database Access choose the database screens that this user should be allowed access to Access to the Interlock Screen should only be granted to the Super User level System Administrator No Operators or Process Engineers should be allowed access to the Interlocks Screen 7 In the set of checkboxes labeled VB Mainform Access choose the screens that this user should be allowed access to 8 In the set of checkboxes labeled VB Other Access choose the appropriate boxes e Operate
33. ICON NS E Et di ee Os 3 19 Operation Va nun SCTOCCN sa nes inner rene idea 3 21 Operation Deposition CTC a 3 23 OCT OOM CISCO a os 3 25 Opera On M OOM S TEO dad di dados 3 29 Operaron He tina SCOOT dida ANN 3 33 Operations COONMES CREM ud dla tadas 3 36 Opera On SITEMAP tddi decias 3 37 NA XLS A oa dewticniv ce ina dre O seated eid wa en sen 3 40 DUC SANOIOS S TOE A EE siesta se da eue 3 42 Kurt J Lesker E Company Operation Operation Manual SVS FCT ES RN A AAA A AI II A A de nes 3 44 SV SCOT SETHE IO CEC ia tt il destins tocada 3 46 all AA ead day alerte retenir 3 47 Kec pe Dd dOS CASAR Ad 3 48 TROT ACT T DL A A A AAA road 3 50 Recorded DITA A AA A A iO asada 3 52 ACION LOP tE SAA AA cda 3 54 DIVE CTO CIES ere Lee none ln en ne la peek Soe ca Le kara nc nr ne 3 56 SPOTUS O CORA N mo ncsuerasiaeta ale eacknuaeaGet ca sasaumomameetaaienseaetnaateaatss 3 58 COMTE ese A 3 60 AO A U SOTS 00 OPERA RO RO O O A ON 3 61 COW Abe OPEN is 3 64 CW OIE STATUS AA AAA AAA A 3 64 SAMA RECIO AAA ERA AAA RS 3 65 TUTTI RAR OCICS RAE IA AAA Ee 3 65 WEA ERE CIPSA A 3 66 MOUV E RODEOS AE A EA O 3 67 TAPO ONER O PES A AA AAA SR 3 68 RECOLETA AN AR AAA AAA AAA AAA 3 68 DUETO TRISTAN A GE OEE E 3 68 CW APC SU OWN a tdt tt Mesahuctese 3 69 2 Kurt J Lesker Operation Manual Manual Operation Manual Operation The procedures described on the following pages are for manual operation of the PVD System and its components There may
34. Operation Manual Preface WATER ida ill Trademark S AAA ss a stereo nie di en teosn ds Vv B PME OG CON IA ri 1 1 PVD Thin Film Deposition System Overview ooooooccccnnncnnnnnnnnonnnnnnnnnnnnnnnannnnnnnnnnnnnnnos 1 2 Sonico tonalidad 1 3 RO e APA q ee ee ene em rer tenement ener er emer mere 1 4 Operator Responsible una oido 1 4 Sale ty NO tan ar rer id E 1 5 Walle Oy FAITS a ann ue iii did roca 1 6 ie Fyre MG serris O menmetcdutate nanan 1 8 2 GENE A NON 2 1 Receipt INS Pe CUO I sss aiii 2 2 NIP AG Kai anida iaa cada 2 3 UC ONE CHONG Na ASA ARA AA 2 4 Power Dist OU OM sia 2 5 Dedicated Earth Gro ds la 2 5 Cooline Water ata ia 2 6 Gas and PAU Si A A A A needs 2 7 A o II A A titi 2 9 E O 3 1 Manual per att On sa ne ali anne tan 3 3 Sample Rotation Setup and Operation cccccsscccsscessscciedienueiescsdecdeddesecoussasvebedvecvodeaseaesouievevssebssewceeds 3 3 Sample Heating Setup and Operan 3 3 Gas Flow Setup and Operacion id dad bios 3 4 Manual Pressure Control Needle Valve siens esse 3 4 Torus Sputtering Source Setup and Operation 3 5 SOULE o MUD A o OPE nO PEO O E E 3 5 E Beatir Source Setup and OPSIG ON s os 3 6 LTE EE Furn ce Opera ic dos 3 6 Thermal yvaporation Source Opera ds 3 8 Film Thickness Monitor Controller O eines ne 3 9 Emergency Onl Recovery Proce dule 2 SL aie cel ache ee ees 3 9 O ARS meee em re re en are 3 9 SO Wwato COD EL ATION nia mila 3 11 OS TES Wii o a diri 3 11 Ge
35. Start PC Vent EEE Capman Pressure SP 0 0 mTorr Power Supply Output Current 0 002 Amps Capman Range 100 100 mTorr Power Supply Output Power 0005 Watts MFC Correction Factor 1 39 1 39 Power Supplyl Output Voltage 0000 Volts MFC1 Gas Ar Ar Substrate Heater Current 0 000 4 MFC1 Mode 0 0 Substrate Heater Over Temp 23 0 degC MFC1 Range 100 100 Substrate Heater Temperature 23 2 degC MFC Ratio 50 50 Wide Range Gauge PC O 0E 0 Tor Rotation Start MFC1 SP 0 0 SCCM Recording Start Operation System Help o T T T o a a o This screen is primarily used for troubleshooting datalogging It is recommended that operators other than the system administrator do not have access to this screen Users can be denied access to this screen based upon their login parameters see the System Users Screen and the Security section of this manual Forcing analog inputs can override interlocks When system troubleshooting 1s complete you must remember to reset un force signals ICON or DATA FIELD ACTION RESULT Click to select or All Analog Outputs and Inputs are listed in deselect alphabetical order 3 42 Kurt J Lesker Company Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Outputs Initial Display only Value as Click to activate Outputs Signal Value signal Value Display only Click to activate Inputs Value Value Inputs Status Display o
36. TION RESULT Outputs Initial Display only Value Initial Value Click to activate Signal Value signal Value Display only Display only Inputs Status Status Generate Data Log Click to activate Generate Data Log Suspend Screen Updates Suspend Screen Updates Click to activate Kurt J Lesker Displays the initial condition of the corresponding string output at system startup or shutdown Displays the actual current value of the corresponding string output input Clicking on the signal value will display an alphanumeric keypad that allows the signal value to be changed This will also change the value of the corresponding equipment For example changing the value of the Platen Motor Home Offset is the same as changing the set point on the Operation Motion Screen Displays the corresponding signal s unit of measurement Displays whether or not the current signal 1s forced Forced corresponding signal is forced Normal corresponding signal is forced Generates a table in the folder C Program Files Lesker Company Name Data Datalog mdb The table name is the date and time the table was created Stops the constant screen update to allow the user to easily select signals to be forced Software Operation Operation Manual System Ethernet I O Screen Kurt J Lesker This screen contains information useful only to KJLC engineers and System Administrators It is used in t
37. TOMER s intended use or requirements 4 Warranty Period The warranties set forth in sections and 3 above shall be effective for a period of twelve 12 months from the date of shipment of the Equipment from COMPANY s plant The warranty set forth in section 2 above shall be effective for a period ending twelve 12 months from the date of performance of the services 5 Warranty Conditions and Limitations l CUSTOMER s right to enforce the foregoing warranties is expressly conditioned upon CUSTOMER notifying COMPANY in writing during the Warranty Period of any alleged non conformity or defect stating specifically the nature of the alleged non conformity or defect COMPANY shall have the right upon such notification to review Kurt J Lesker iii E Company Preface Operation Manual inspect and or examine the Equipment indicated by CUSTOMER and CUSTOMER shall make the Equipment available to COMPANY for such purposes 2 The foregoing warranties shall not apply if COMPANY s review inspection or examination discloses that the Equipment 1 has not been installed maintained or operated in accordance with COMPANY s instructions 11 has been used by CUSTOMER in a manner or for applications not recommended by COMPANY 111 has been repaired altered or modified by CUSTOMER 1v has been subjected to other than normal use storage handling installation operation or maintenance or v has been damaged by fire act of God any cause
38. When modifications are complete you must click Update VB for the changes to be applied in the Runtime Software To change the order of the steps in a recipe 1 Use the navigation buttons on the Recipe Database screen to choose the recipe to edit 2 On the Recipe Database screen click the Reorder Items button 3 On the left side of the screen click the recipe step that needs to be moved 4 On the right side of the screen click the recipe step that the chosen step on the left needs to be placed BEFORE 5 Click the Move button Both lists display the changed order and the steps have renumbered automatically 6 Click the Return to Recipe button to return to the main Recipe Database screen To delete a step in a recipe 1 Use the navigation buttons on the Recipe Database screen to choose the recipe to edit 2 Left click in the leftmost block next to the step number of the recipe step you wish to delete the entire row should be highlighted black 3 Press the Delete Key on the keyboard 4 The sequence number for the deleted step is now missing If you wish to renumber the remaining steps use the Reorder Items button then press the Re Number button Kurt J Lesker FoI E Company Software Operation Operation Manual To add a step to a recipe 1 Use the navigation buttons on the Recipe Database screen to choose the recipe to edit 2 You must first add the step AFTER all of the other steps in the recipe 3 When t
39. able Fork lift pallet jack tubes are built into the system framework Only a properly trained forklift operator should remove the deposition system from the shipping base Improper removal of the components can result in equipment damage Be cautious of electrical cables gas lines etc when placing forks under the System framework Kurt J Lesker En E AS Company Getting Started Operation Manual 3 Lift the system up far enough to allow the shipping base to be pulled out from underneath the system DO NOT put any part of your body under the lifted system or serious injuries could occur 4 Gently place the system on the ground Any damage to the system or its components incurred during un crating should be reported to KJLC Systems Support at 412 387 9200 extension 7311 or 7210 System may be shipped under vacuum Therefore extreme care should be exercised while moving and installing the system Utility Connections Refer to the General Assembly Schematic included in the Appendices for utility requirements If required contact the KJLC Assembly and Test Manager at 412 233 4200 x7311 or x7210 for further assistance If a KJLC Installation Technician will be installing your system connect the utilities but do not turn them on 2 4 Kurt J Lesker Operation Manual Getting Started Power Distribution Ensure facility power feed 1s off and locked out prior to installation Follow the National Electri
40. an indicator or icon inside their respective control buttons While the state of the button indicates whether or not a device is requested to turn on or off the color of the indicator or icon inside the button notifies the user of the actual state of the device Color definitions for each button or indicator can be found in the section of the manual that corresponds to the screen on which it appears e All alphanumeric fields will appear as green text with a black background when not accessible by the logged in user and white text when the field is accessible The alphanumeric interface shown here will appear when an available data entry field is clicked The maximum and minimum values for each numeric variable are displayed at the upper right within the pop up screen while the signal name appears at the left of the titlebar e The availability of the Runtime Software Screens is based upon the Ok parameters set for the logged in user See the Security Section for further details This manual is intended to provide information regarding the operation of ALL features currently available in CWare Not all features screens are available on every system Disregard the manual sections for the features screens not included in your system configuration e Tool Tip Text is displayed for all controls and indicators on all screens Without clicking place the mouse cursor over the control or indicator to see the Tool Tip Text Power Supply1 Output
41. anual Receipt Inspection 1 Visually inspect all packages for signs of shipping damage Record any signs of shipping damage on the Bill of Lading prior to signing off on delivery and inform the driver of any concerns 2 Inspect all tip and impact indicators attached to the system Prior to shipment tip indicators are placed on each system b Prior to shipment impact indicators are placed on the system c If any indicator has been set off KJLC Systems Support should be notified immediately at 412 387 9200 x7311 or x7210 3 Assure that the content of each package matches the supplied Packing List Refer to Packing List included with shipment If any discrepancies occur between the received parts and the Packing List KJLC Systems Support should be notified immediately at 412 387 9200 x7311 or 7210 2 2 Kurt Lesker Operation Manual Getting Started Unpacking DO NOT discard any packing materials until receipt inspection bas been completed If any damage 1s found during unpacking notify the carrier and KJLC immediately Caution should be exercised during unpacking to assure no injuries occur from sharp edges or splitting wood Due to the weight of the system and mode of travel contents may shift Extreme caution should be exercised when removing all supports 1 Remove the straps or all thread that holds the system to the pallet 2 Use a fork truck to lift the deposition system off of the shipping base if applic
42. arks Every attempt has been made to identify the owner of product trademarks and registered trademarks that appear in this manual Changes of company ownership affecting the named trademark holder may not be identified ATX Advanced Energy Baratron MKS Instruments Inc Conflat Varian Vacuum Products Convectron Granville Phillips Cryo Torr CTI CR YOGENICS Helix Technology Corp XTC XTM Leybold Inficon Delrin E I DuPont de Nemours amp Co Inc EcoDry Leybold Vacuum Products Inc Fomblin Ausimont Inconel Inco Alloys International Inc KF Leybold Vacuum Products Inc Lexan General Electric Co Magidrive UHV Designs Ltd MagiGear UHV Designs Ltd MDX Advanced Energy Micromaze Kurt J Lesker Co OFHC American Metals Climax Inc On Board CTI CRYOGENICS Helix Technology Corp PBR260 Pfeiffer Pinnacle Advanced Energy Pyrex Corning Glass Works Radak Luxel Corp RFX Advanced Energy SID 242 Sigma Instruments SmartMotor Animatics Corporation Teflon E I DuPont de Nemours amp Co Inc TMH261 Pfeiffer Torus Kurt J Lesker Co VCO Cajon Co VCR Cajon Co Viton E I DuPont de Nemours amp Co Inc Kurt Lesker Preface Operation Manual vi Kurt J Lesker Operation Manual Introduction 1 Introduction This chapter presents an overview of the Kurt J Lesker Company PVD Thin Film Deposition System CHAPTER CONTENTS PVD Thin Film Deposition System Overview sscccsssccccssssssssssss
43. at may result in damage to the equipment This notation is used to highlight any technical requirements operations procedures or conditions that should be emphasized Kurt J Lesker i ompany Introduction Operation Manual Safety Features 1 A Power Distribution Box is included for safe installation and maintenance The box is located in the instrument rack Power Distribution Box 2 At least one Emergency Off EMO button is located on the system If at any time a potentially dangerous situation arises use the EMO button to turn off the system or switch the main disconnect to the OFF position Either of these actions turns off ALL system power All motion stops power supplies pumps and compressors are shut off Resetting the EMO restores the system power See the Emergency Off Recovery procedure for further information i6 Kurt J Lesker Operation Manual Introduction 3 A Dedicated Earth Ground is provided for the system See Utility Connections in the Getting Started chapter for further details Grounding Strap 6 i t 4 f 4 PVD Dedicated Earth Ground 4 Typical System Hardware Interlocks A Deposition Power Supplies e Source cooling flow conditions must be satisfied for the respective source e Chamber vacuum switch must be satisfied B Heater Power Supply e Chamber vacuum switch must be satisfied Kurt J Lesker t ompany Introduction Operation Manual
44. ated with the Runtime software as opposed to the system database forms These are the screens most often used when operating the tool Runtime Software the control software responsible for I O system interface control logic recipe execution and a majority of the HMI Step the part of a recipe that sets and checks system I O Steps can be thought of as the building blocks for recipes System Abort in case of a dangerous situation when the System Abort button is pressed on the HMI or the system is aborted as the result of a Red Alarm or device communications error all processes are stopped and all Discrete and Analog Outputs are set to their default startup state as configured by the system database Typically most Discrete Outputs are turned off and most Analog Output setpoints are set to zero Kurt J Lesker eu E Company Software Operation Operation Manual System Database a Microsoft Access database that contains recipes user information and system configuration details System I O system Inputs Outputs I O refers to the electronic hardware controls for a system nputs are typically device signals that provide system status or feedback Examples of Inputs include flow switches vacuum switches valve positions pressures and motor speeds Outputs are typically device signals that provide system control or manipulation Examples of Outputs include pumps valves flow setpoints and power supply setpoints Upstream
45. ber High pressure can cause personal injury and property damage The compressor unit and associated hoses contain compressed helium and must not be mechanically or thermally stressed Before accessing a cryogenic pump read the operator s manual and follow all safety guidelines Process gas tanks must be kept according to manufacturers specifications and local codes 7 Heating elements quartz lamps composite etc used for sample heating can create high temperature hazards on chamber walls viewport surfaces and chamber internals High temperatures can cause harm to personnel and equipment Do not vent chamber until temperature is low enough to facilitate safe handling of parts High temperatures can also cause damage to materials if the system is vented prematurely 1 10 Kurt J Lesker A Company Operation Manual Getting Started 2 Getting Started This chapter presents an overview of getting started with the PVD Thin Film Deposition System CHAPTER CONTENTS Receipt Inspeccion aro 2 2 UDPa IS cccerecavei var cevsdscestehe cost osevencusseasaesdetvesveusssvscedesteasesseesaaccdssexcesveessesses tens 2 3 Utility COMeEcuAS ri EE ce cvoreeietaeees 2 4 POW DISIDUIOMES A Rd aoe ee 2 5 DCG Care GIG ait GO Ch rd in ie to 2 5 COTS WY AUC Re Se end eee di 2 6 Gras and Pneuma CS ESS ak eshes ie ed sun cl 2 7 S OL PASSER Rene eee Re ee ER PERS 2 9 Kurt J Lesker ar Company Getting Started Operation M
46. c Code or appropriate code for proper wire size power feed and grounding requirements All affected employees should be notified that the equipment 1s being turned on Reference Schematics Power Distribution 1 Install a power cord SO type or use a hardwire setup conduit with individual wires from an appropriately sized and protected distribution panel to the power distribution unit 2 If separate drops are required the General Assembly Schematic should be referenced Dedicated Earth Ground Reference Schematics Power Distribution 1 Run a copper connection from the chamber to a dedicated earth ground Also see Safety Features in the Introduction Chapter Braided wire has a high impedance to radio frequency Do not use braided wire for grounding connection Use the copper conductors indicated below DISTANCE CONDUCTOR 0 20 feet 0 to 6 meters 4 AWG wire 20 60 feet 6 to 28 meters 0 035 x 2 inch 1mm x 5cm strap over 60 feet over 28 meters Consult KJLC personnel Kurt J Lesker En ompany Getting Started Operation Manual Cooling Water 1 Run system cooling water to the BLUE water supply manifold see photo below Although system requirements may vary typical requirements are 25 C water with a 50 psi maximum The General Assembly Schematic should be referenced Supply Manifold Shut off a Valves 22H Return CE Manifold S cA System Cooling Water Supply Return 2 Connect th
47. e RED return manifold to an appropriate drain or chiller 50 Micron water filtration and or deionization of the water supply is required to reduce particulate contamination in the cooling lines and associated components The system vacuum integrity should be verified prior to the flowing of cooling water pump on the chamber prior to opening the water manifold valves Introducing water prior to verifying vacuum integrity may cause system flooding or difficulty locating vacuum leaks in water lines All water connections should be verified prior to the flowing of any water This includes targets in place and any required sealant to be completely cured 2 6 Kurt J Lesker A Company Operation Manual Getting Started Gas and Pneumatics 1 Run the required process gas to the bulk fitting located in the rear of the system Although system requirements may vary the typical requirement is 5 to 7 psi per channel The General Assembly and Process Gas Schematics should be referenced a Water ER ary Es ier r A s 5 i e ijd MFC s 1 E lt a E 7 e ih fi Manifolds Fo 0 4 t j s gt 17 Nitrogen E IB E Vent Process oni a E ME 11 LAA AO Compressed Air Gases 2 It is recommended to plumb process gases with electro polished stainless steel tubing However other suitable tubing could be used 2 Run a supply of dry Nitrogen to the Gas Panel Although system
48. e Runtime Software and updates changes to recipes in the Runtime Software Reorder Items Click to activate Opens a new screen that allows the user to change the order of programmed Reorder Items es Copy Recipe Click to activate Copies the selected recipe and prompts for Copy Recipe a new name Include in VB List Click to activate Check this box to include the selected Include in VE List wj recipe in the Run a Recipe menu Operator Can Use Click to activate Check this box to allow Operators to run Operator Can Use _ the selected recipe Process Engineer Can Click to activate Check this box to allow Process Use Engineers to run the selected recipe Export Process Eng Can Use User Display only Current logged in user of recipe User KILC KILC Display only Original writer of selected recipe Owner KILO KILC Click to enter G Goto sequence number value R Ramp rate S Skip T Timeout Kurt J Lesker Software Operation Operation Manual Reorder Items Recipes KIL ga Q Help EE Recipes Recorded Data Action Log 34 Interlocks Sigma Data Sets Ow Configuration y System Users Type a question For help Chose ltem to MOWE Chose Item to INSERT ABOVE LA al PC Reget Pran Tum_Off Closed Closing PC Regen Pirani Tum_Dff Closed Closing 2 Valve PC Cryo Purge Valve Turn_Off Closed Closing 2 Valve PC Cryo Purge Valve Turn_Off Closed Closing 3 Valve PC Cryo Regen Val
49. e user does not own it Operator Process Engineer Super User Operator the user can only run recipes assigned to Operators Process Engineer the user can only run recipes assigned to Process Engineers Super User The user can run amend any recipe Kurt J Lesker ap ompany Software Operation Operation Manual CWare Operation This section provides general information on how to operate the system using the computer interface Please modify these procedures as necessary to conform to your specific needs Please review the General Information amp Definitions Sections thoroughly prior to operating the system via CWare CWare Startup The system computer 1s configured to automatically start KJLC software every time 5 1t boots up Additionally 1f the Runtime software has been stopped for maintenance ada purposes it can be restarted by double clicking the software icon on the Windows are de sktop Before starting the software or booting the computer 1t is generally a good idea to verify the appropriate system components are on and in the correct state 1 e power supplies on cryo compressors turbo controllers on gauge controller on etc Additionally all gauges should be turned off manually on the system s vacuum gauge controller if applicable prior to starting system software this is to prevent priority conflicts and communication errors between the gauge controller and the system control software
50. ect any or all signals on the Discrete Analog or Strings screens Navigate to the appropriate screen 3 68 Kurt J Lesker IA Company Operation Manual Software Operation 3 Click the Suspend Screen Updates to eliminate any focus jumping that will cause signals to think that they are being forced 4 Click on the signal names that you would like to data log The signal name is highlighted green when selected Deselect a signal by clicking it and then it will return to the standard background color Click the Suspend Screen Updates button to deactivate 6 Click on the Generate Data Log button from any of the signal screens When you click on the Generate Data Log button a table is generated in the folder C Program Files Lesker Company Name Data Datalog mdb The table name is the date and time the table was created Microsoft Access Datalog Database Access 2000 file format ni File Edit wiew Insert Tools Window Help ae E ra Le 3 a 4 a a es M 5 En Ci So a ES 28 7 sl peper E Design heu gt M Es Objects Create table in Design view Create table by using wizard z leh i 3 lees Create table by entering data G pz 23 2006 15 09 53 ei e G 0223 2006 15 11 10 Reports E LastDataTable Pages 1 Macros 2 Modules Groups a Favorites 8 When data logging is initiated from the main program screen the data items selected are appended to this table If a new table is generated data
51. ers Type a question for help X Import Interlock Items Update VB Import Recipe gt Use Name Numeric String import Sigma Daa Se O Y E M ChamberPressweTrip Op CiyoRegenPressweTrip Of CyoRoughingPressweT Of DepositHeightLow ff RecordingRateDefaut Sf RecordingRateMinmum 5 fo UKIOCard1710 1 fiBch nalogiP2chAnalogDP JUKIOCard7230 fO 3 IEC JUKIOCardMoxs 1 BchRS23200 fUKIOCardSigma 2 FIM BaratronPressureTip p Of Eaesim0PScaing0 f on 88 CaesiumOPScaing O02 4 CaesiumOPScaling2 0 03 65 DCHuttingerDCPowerLimi 0 y MMe ak kk la la la ee la lea ek la la la la Ga Gi This screen contains important setup information that affects and enables computer control of the system The only field that customers should change is the RecordingRateDefault Changes to any other data on this screen should only be made by KJLC Engineers or under the guidance of a KJLC Engineer ICON or DATA FIELD ACTION RESULT Recording Rate Click to enter Enter the rate in seconds at which the Default value computer should record system data RecordingA ateDefault 5 3 60 Kurt J Lesker Company Operation Manual System Users Software Operation Recipes System Users A E 18 x Q Help EE Recipes Recorded Data 42 Action Log 34 Interlocks Sigma Data Sets Ow Configuration 8 System Users Type a question for help amp X Find Existing System User LA
52. es creme rennes le 3 67 A cos bimene ln ine rene n ons immo tenons tea 3 68 R cordne DA ne Lens renonce O seront ea 3 68 Data Logo me Sonal sienai O eE lora inn coin deoni ea 3 68 AS A EE D E TDA Da 3 69 du IWEAMICOTIANCE aissa aa E N E S 4 1 Maintenance Personnel Qualifications oooocccnnnccononcnnnnnnnnncnnnonononncnnnnononanonnnnnonaninos 4 2 Maintenance Materials and Accessories si in 4 3 G n ral ReCOMMENAATIONS AS REA a A tend ASET 4 4 System Component Repair Replacement Us 4 5 Preventative Maitena nn ee manner 4 5 Process Chamber Cie anita adria 4 5 Se APPENdI ciislasedessaesecdacdnsbitecdusaecialucetensausncdacduseutaccusnecaaticssenccuensasaduscusacauseecaatuecsenccuenveseuuses 5 1 11 Kurt J Lesker ompany Operation Manual Preface Warranty 1 Equipment Warranty and Remedy COMPANY warrants that the Equipment fabricated and furnished by COMPANY hereunder shall be free from material defects in workmanship and materials If any of the Equipment fabricated and furnished by COMPANY materially fails to conform to the warranty set forth in the preceding sentence CUSTOMER s remedy shall be limited at COMPANY s option to either 1 repair or replacement of the non conforming Equipment F O B point of repair or replacement with shipping charges prepaid by CUSTOMER or 11 repayment of the portion of the contract price paid by CUSTOMER attributable to such non conforming Equipment Dismantling and reinstalling wor
53. g shutter Shutter will open for the Shutter Delay and Deposit phases of the Sigma process only This is typically used to map a source shutter Map the desired shutter to Sigma deposit control signal Controls the opening and closing of the corresponding shutter Shutter will open for the Deposit phase of the Sigma process only This is typically used to map a substrate shutter Transfers the Sigma process setup associated with this number from the Recipe database to the Sigma software Loads the target process Type the name of the process you want to run then Enter If there is an associated process name in the Sigma software this is the process that will run when you click on Sigma Start Process Sigma Last Message Display only Displays the last message sent to ENEE Cware from the Sigma software Kurt Lesker Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Sigma Process Name Display only The current process 1s displayed New Process Sigma Film Name Display only The Sigma specific name of the joe current file is displayed Refer to the Sigma Data Sets section and the Sigma manual for descriptions of additional icons included on the Operation Sigma screen Kurt J Lesker oA Company Software Operation Operation Manual System Discrete Screen 0 0E 0 11 49 53 AM 8 4 2006 Logout KJLC Kurt J Le J Lesker 0 00 01 Closed Off E Super User ABORT Version 2 19 Discrete
54. he difference between desired pressure and actual pressure the greater the proportional term the quicker the flow will change to adjust for pressure differences large P terms can lead to instability This 1s the most critical term for tuning the pressure control loop Typically as the throttle position increases greater conductance higher effective pumping speed the P term must be increased to achieve the desired pressure greater change in gas flow is required to affect a pressure change Sets integral term for pressure control loop This term typically does not need to be changed from its factory default value Sets derivative term for pressure control loop This term typically does not need to be changed from its factory default value Refer to the Operation Vacuum section for descriptions of heater control icons included on the Gas screen Kurt J Lesker Software Operation Operation Manual Gas Control Overview The software supports control of up to 4 MFCs in flow or pressure control modes Only one MFC can be designated as the master for upstream pressure control but any of the remaining MFCs can be slaved to the master Any MFC can be set for independent or slave flow mode at any time The ranges for the gas flow and pressure hardware can be changed in appropriate maintenance levels to accommodate modifications by the customer Additionally pressure control PID values can be changed manual
55. he required step is complete follow the steps above labeled change the order of the steps in the recipe to place the new step in its proper position Importing Recipes l Copy the RecipeD mdb file from the source system to your C Program Files Lesker directory Start the system and access the recipe database Select configuration Click on the Import Recipe drop down box Select the recipe to import by clicking on it You will be prompted to accept the import Click on OK The new recipe 1s imported to your system Click the Update VB button Oe RA A A Recording Data 1 Click on the Recording Start button near the lower right corner of any Runtime Engine screen The caption of this button will change to Recording Stop and it will illuminate green each time data 1s written Clicking 1t again will stop recording data 2 Recorded data is saved in a Microsoft Database format The file path is C Program Files Lesker Customer Name Data RecordingD mdb The data is saved in a table named tblRecordingData 4 Data can be access by opening the database using Microsoft Access and then double clicking the table file 5 The first two fields in this table are generated by the software for system use The remaining fields are the recorded system signals including a Date Time stamp 6 Data can be exported or extracted using Microsoft Access Tools Data Logging Signals 1 First navigate to the System Screen 2 You can sel
56. his field 3 61 Software Operation Operation Manual ICON or DATA FIELD ACTION RESULT Start Form Click to activate Use this drop down list to choose which Start Form Recipes y screen form should be the opening screen for the selected user Password Click to activate Enter the password for the selected user Password Clear Password Click to activate Removes the existing password for the selected user Clear Password Delete User Click to activate Deletes the selected username Delete User Recipe Database Click to activate Use this list of checkboxes to assign Access availability of the System Database Recipe Database Access screens to the selected user Recipes Recorded Data Action Log Interlocks Sigma Data Sets Configuration M System Users VB Mainform Access Click to activate Use this list of checkboxes to assign VB Mainform ccess 7 availability of the Runtime Software i Operation screens to the selected user M System eae Kurt J Lesker E Company Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT VB Other Access Click to activate Use this list of checkboxes to assign VE Other Access availability of software screens to the Operate if Running Recipe selected user e eb Operate if Running Recipe allows the user to operate heaters shutters on the runtime software screens while a recipe is running Can change ANY recipe Can amend any recipe even if th
57. his is requested the channel will be set to Independent Mode with a flow setpoint of zero A circular slave relationship is not allowed If two channels are slaved to each other the highest number MFC is set to Independent Mode with a flow setpoint of zero If the setpoint for a slave channel is greater than its range the setpoint for the slave is limited to its maximum and the corresponding setpoint for the master channel is set such that the desired gas composition is maintained 3 28 Kurt J Lesker IA Company Operation Manual Software Operation Operation Motion Screen Stop All Motion Additional icons appear on the Operation Motion screens for systems equipped with automatic transfer Please disregard descriptions for icons not included with your particular system configuration Indicates the current motor velocity in RPM or IPS depending on motor Kurt J Lesker 3 29 Software Operation Operation Manual ICON or DATA FIELD ACTION RESULT Platen Home Click to activate Home Platen Home Offset Click to enter value Offset Home Velocity Setpoint Click to enter value Welocity SP Referenced Indicator Display only Referenced lo Platen Jog Forward Click to activate Jog Fu Platen Jog Reverse Click to activate Jog Rey Jog Continuous Velocity Click to enter value Jog Cont rl Moving Indicator Display only Moving lo Go To Position Click to activate GoTo Position P
58. if Running Recipe allows the user to operate heaters shutters on the runtime software screens while a recipe is running e Can change ANY recipe Can amend any recipe even if the user does not own the recipe 9 Also in the VB Other Access box choose a level of security for the new user e Operator can only run recipes that have been assigned to Operators e Process Engineer can only run recipes that have been assigned to Process Engineers e Super User can run modify and delete any recipe This is the highest level of security Deleting a User To delete a user simply select that user from the Find Existing System User box and then click the Delete User box The deleted user s recipes and any other associated data will still be available Modifying a User s Access At anytime the access parameters for a user can be changed Simply select that user from the Find Existing System User box and then modify the parameters as required Resetting a Password To change the access parameters for a user simply select that user from the Find Existing System User box and then check the Clear Password button The password will be re chosen by the user when they log in the next time and must consist of at least one character 3 14 Kurt J Lesker A Company Operation Manual Software Operation Software File Structure amp Maintenance KJLC CWare consists of two components Runtime Software and Microsoft Access database file
59. ion of the motor Kurt Lesker Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Motor Position Setpoint Click to enter value Enter the setpoint for the motor to move to set Point when the Go To Position button is activated Motor Forward Click to activate Initiates the motor to move in a forward Ed motion at the Jog Cont velocity The motor will move continuously until the button is clicked again Motor Reverse Click to activate Initiates the motor to move in a reverse 5 motion at the Jog Cont velocity The motor will move continuously until the button is clicked again Motor Error Reset Click to activate Resets motor error conditions Reset Stop Motion Button Click to activate Click to stop all motor motion NOTE The following icons and fields are available for adjustment however 1t is highly recommended that the SMI User s Guide be read prior to adjusting these parameters Changing motor tuning parameters can seriously degrade the performance of your motors peas Acceleration Click to enter value Set or change the motor acceleration Refer to the SMI User s Manual ne E Motor Current Click to enter value Set the maximum motor current Refer to Max Text the SMI User s Manual Motor PID Filter P Term Click to enter value Refer to the SMI User s Manual a PID Filter I Term Click to enter value Refer to the SMI User s Manual Text Man PID Filter D Term Click to enter value
60. k is excluded from this Equipment Warranty and Remedy 22 Services Warranty and Remedy COMPANY warrants that any engineering design or software development and programming services furnished under COMPANY s proposal or quotation will conform to standards of practice generally accepted in the profession and or industry for services of a similar nature If the services provided by COMPANY materially fail to conform to the warranty set forth in the preceding sentence CUSTOMER s remedy shall be limited to revision replacement or reperformance at COMPANY s expense of those services which COMPANY reasonably determines fails to so conform 3 Software Warranty and Remedy COMPANY warrants that any Equipment furnished hereunder which is comprised of software when used with COMPANY specified hardware shall conform with the specifications set forth in COMPAN Y s proposal or quotation or in the case of standard software with published specifications prepared approved and issued by COMPANY s headquarters in Clairton Pennsylvania If any software furnished by COMPANY hereunder materially fails to conform to the warranty set forth in section 3 CUSTOMER s remedy shall be limited to correction of the non conformance by COMPANY without charge to CUSTOMER COMPANY makes no representation or warranty express or implied that the operation of the software will be uninterrupted or error free or that the functions contained therein will meet or satisfy CUS
61. ly on the Operation Gas screen or in a recipe to accommodate various throttle valve positions Master Slave Operation Master Slave relationships are ratiometric based on flow Multiple levels of this relationship are supported so that an MFC slaved to one channel could also be master to another The flow of a given slave channel is based on the actual flow of the corresponding master channel not the setpoint of the master In this way if the master channel is not flowing correctly or 1s otherwise limited the gas composition remains correct Additionally if a given slave flow is limited based on that MFC s range the flow setpoint for the corresponding master 1s limited to maintain the desired gas ratio Pressure Control The software uses closed loop PID control to accomplish upstream pressure control When a given MFC 1s assigned to pressure control mode the software adjusts that MFC s flow rate setpoint accordingly based on the desired pressure setpoint and the actual pressure reading supplied by the capacitance manometer If any additional channels are slaved to the pressure control channel then their flows will also be adjusted respectively EXAMPLE SLAVE MODE Mode 11 for MFC 2 slaves MFC 2 to MFC 1 The flow setpoint for MFC 2 actual flow of MFC1 x the ratio of MFC2 So if MFC1 actual flow 100 sccm and MFC 2 ratio is 50 MFC2 flow setpoint 50 sccm SLAVE MODE NOTES A channel cannot be slaved to itself If t
62. n Pressure 0010 ii Capman Pressure Setpoint Lapman Pressure SP Click to enter value mT orr Capman Range Click to enter text Lapman Range mT orr Wide Range Gauge Display only Wide Range Gauge Eu gt Sets MFC flow as a percent ratio of master channel Slave Mode Sets MFC contribution as a percent of full range PID Pressure Control Mode Sets gas correction factor for corresponding MFC as a function of nitrogen calibration Refer to gas controller manual s or web site s for gas correction factor tables Sets flow range of corresponding MFC in sccm max nitrogen flow Indicates Capman pressure in mTorr Sets desired chamber pressure in mTorr NOTE Requires one MFC in Mode 4 and corresponding gas valve open Sets the range of the capacitance manometer in mTorr NOTE Maximum value is typically 1000 mTorr Indicates wide range gauge pressure in Torr NOTE DO NOT adjust PID values for pressure control loop while in Pressure Control Mode Kurt Lesker Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Capman Pressure Click to enter Proportional Term value Lap Pres P Capman Pressure Click to enter Integral Term value Lap Pres Capman Pressure Click to enter Derivative Term value Lap Pres Do Sets proportional term for pressure control loop The proportional term determines the amount of change in gas flow to compensate for t
63. neral GUS das 3 12 SC CUI nit tente un doi oncle 3 13 Addino New ESS en a 3 13 Del tine USE aaa nono 3 14 Modityins a User s A GOSSES rare nn or cairo ries ii 3 14 Resetinsra PassWord das este ocean loco 3 14 Software File Structure amp Maintenance sii E O AEA 3 15 Bac kin Up OUE Stent ne ee en 3 15 REStOTINS NOURSYS MIS ESS nn den et en 3 15 SOWA DER en due nit na ds 3 16 Terminolosy and DEMOS tale eats 3 17 COMMON o ooo 3 19 Operation Vac uun Sereno 3 21 Operation DeposiOn Sere t Nes 3 23 Operation Gas Serena Ne 3 25 Kurt J Lesker i Preface Operation Manual GasContro ONES de A nn titi 3 28 Master Slave Opera id 3 28 Pressure CoMo dd 3 28 Operation Monon Crearon 3 29 Substrate A SOurCe Y Example dal 3 32 Operation Meane SCree ml essa remit 3 33 Operation COONS Scores 3 36 Operation SII SCRE CM itsa a cose season ss r Ion dia into 3 37 Sy Stemi Derete SCS en dl inten sli elias 3 40 o ANAIOE SCIE RS Sd CS ed nn 3 42 SN A 3 44 System Ethernet IVO Sres eos 3 46 Help Help Or RU ed ocidss 3 47 Recipe Database ss Re ND os 3 48 REM dais 3 50 Recorded Dita ia don 3 52 ACHOR LOS da 3 54 Mtro A eo Ro ion 3 56 Sima Data SES bo 3 58 Cont SIAM da 3 60 II A A nn ste et cons 3 61 EWare Opera A A ane lines 3 64 SI A tacdo dl aads 3 64 SPAM AL CNR COLIC S sas sige i Baise A AI 3 65 Runmne RECIPES Aina A teal a asta UN eee aed 3 65 Wanae Receso a Al aaa 3 66 MOINS Recipes 5 Rd il renn
64. nimum gap between the blade and source of 1 8 2 Determine the best operating direction Rotate the complete assembly to achieve a shutter closed position Tighten the split collar clamp 3 Adjust open close position stops Remove the plastic cover on the end of the shutter assembly Adjust the stop positions by loosening them with a metric socket screw sliding the stop block and tightening the screw Kurt J Lesker a E Company Manual Operation Operation Manual E Beam Source Setup and Operation DO NOT operate or service the e beam before reading and understanding the e beam operation manual 1 Verify the presence of a wafer in the platen and that the system is under high vacuum 2 Verify that the crucible liners and material have been properly loaded in the e beam pocket s for deposition 3 The deposition will be controlled with the e beam controller Refer to the E beam Controller manual for details of operation Although the e beam will work under any high vacuum condition it is recommended to start at a pressure of lt 5 0e 06 Torr Use caution when removing the substrate from the chamber it may be hot LTE HTE Furnace Operation DO NOT operate the LTE HTE Furnace before reading and understanding all pertinent component manuals 1 Inspect all electrical connections between the LTE HTE Furnace power supply and LTE HTE Furnace source and all in vacuum electrical and vacuum connections to the
65. nly Generate Data Log Click to activate Generate Data Log Suspend Screen Click to activate Updates Suspend Screen Updates Kurt J Lesker Company Displays the initial condition of the corresponding analog output at system startup or shutdown Displays the actual current value of the corresponding analog output Clicking on the signal value will display an alphanumeric keypad that allows the signal value to be changed This will also change the value of the corresponding equipment For example changing the value of the MFC1 SP is the same as changing the set point on the Operation Gas Screen Displays the corresponding signal s unit of measurement Displays the current value of the corresponding analog inputs Analog inputs can be forced by clicking on the associated Value for the corresponding signal A pop up alphanumeric keypad is displayed for data entry Displays whether or not the current signal 1s forced Forced corresponding signal is forced Normal corresponding signal is forced Generates a table in the folder C Program Files Lesker Company Name Data Datalog mdb The table name is the date and time the table was created Stops the constant screen update to allow the user to easily select signals to be forced 3 43 Software Operation Operation Manual System Strings Screen 0 0E 0 11 50 57 AM 8 4 2006 E L ker Logout KJLC Kurt esk pooo MO ii ae Acci Version 2 19 Di
66. nt Ramp Rate RAR deg L Min Over Temperature Indicator Owr Temp deg L Temperature Indicator Temp deg L Click to enter value Click to enter value Click to enter value Display only Display only Enter the desired temperature setpoint for Auto Mode When Auto Mode is enabled this value is used in conjunction with the Ramp Rate box to achieve the desired temperature NOTE If a ramp rate is desired it must be entered PRIOR to entering the desired temperature Enter the desired heater output as a percentage of full scale When Auto Mode is disabled the heater can be controlled by power setpoint Enter the desired ramp rate to be used during Auto Mode in degrees C per minute Once a ramp rate is entered followed by a new Temperature Setpoint the heater will ramp to the desired value NOTE The ramp rate starting point is the CURRENT Temperature Setpoint NOT the current actual temperature To avoid delays in achieving the desired ramp temperature be sure to set the Temperature Setpoint close to the actual temperature then set the desired ramp parameters and finally the target temperature Monitors for an over temperature condition When Auto Mode is enabled this field displays the current temperature control setpoint If a ramp rate has been specified this field displays the temperature setpoint as it ramps up rather than the final target temperature Kurt Lesker Operation
67. nt manuals are included The operator must adhere to all safety recommendations presented in each of these manuals 3 Failure to comply with these and all precautions violates the safety standards of intended use of this system and may impair the protection provided by the system 4 The Kurt J Lesker Company assumes no liability for failure to comply with these requirements 5 Please contact KJLC Systems Support prior to attempting any modifications Only qualified personnel should perform component substitutions modifications to or service on the system KJLC assumes no responsibility for equipment additions or modifications without KJLC s written consent In house performance of component repair or replacement during the watranty period without direction or approval from KJLC Systems Support can result in termination of the warranty 1 4 Kurt J Lesker ompany Operation Manual Introduction Safety Notation The following safety notations will be used throughout this manual A DANGER This notation indicates an imminently hazardous situation that may cause serious injury or death 1f not avoided This notation 1s only used for the most extreme situations This notation indicates a potentially hazardous situation that may cause serious injury or death 1f not avoided This notation indicates a potentially hazardous situation that may result in injury 1f not avoided It is also used to alert against unsafe practices th
68. nts Running Recipes A list of available recipes is displayed by pressing the Run Recipe button from any Runtime Engine screen Recipe details can also be viewed from the Recipe screen of the System Kurt J Lesker es Software Operation Operation Manual Database The list of available recipes 1s limited by the access level of the logged in user and if the Include in VB List box is checked See System Users and Recipes screens in the Overview amp Definitions section for further details Abort COC Pump To run a recipe from the Runtime Software screens 1 Click the Run Recipe command button found on the right side of any Runtime Software screen 2 Select the desired recipe from the list with a single left click of the mouse A red box appears below the list just above the Cancel button 3 Click the green box to start running the recipe Clicking Cancel will close the Run Recipe pop up box 4 When the recipe starts a dialog box will appear The top half displays the recipe name and step number The bottom half displays the current action of the running recipe 5 The recipe can be aborted at anytime by right clicking the top half dark red and selecting abort This will run the Abort Default recipe or the Abort recipe assigned to the recipe See Standard Recipes VY ATTINICS FOR Counter Check Value gt 9 0 Skipping certain steps may cause 5 damage to equipment and is done so at the operator s
69. ocedures provided in the individual system component manuals and this Operator s Manual For Service and support within and after the warranty period contact KJLC System Support Phone 412 387 7200 ext 7311 or 7210 Fax 412 384 2745 E mail systemscustomerservice lesker com In addition to the specific problem area and application the following information is required when contacting KJLC Systems Support Platform Part Number o Serial Number Date of Manufacture o o This information can be found on the identification tag located on the system frame Record this information in the box provided above for easy reference A Return Material Authorization RMA number must accompany any equipment being returned to KJLC The RMA number will be issued by KJLC Systems Support This will expedite handling and ensure proper service of your equipment Kurt J Lesker i Introduction Operation Manual Safety Safe use of the system requires familiarity with the individual system components and adherence to the safety precautions presented in this section Each operator must have appropriate training and all supplemental component manuals should be reviewed prior to the use of the equipment Operator Responsibilities Safe operation 1s the responsibility of the system user l The operator must adhere to all safety notes cautions warnings and dangers presented in this manual 2 All system compone
70. oftware revision that may be installed by the customer Some revisions pertaining to software performance and existing features will be available to the customer at no charge other revisions will be available for purchase as an option Typically upgrading the Runtime software involves copying a new Customer Name folder from a CD provided by KJLC to the computers CA drive refer to Software File Structure and Maintenance section Follow the instructions included with the revision CD for loading software upgrades 3 16 Kurt J Lesker E Company Operation Manual Software Operation Terminology and Definitions Access Forms the portion of the HMI associated with the system database These forms or screens are used when developing processes recipes and configuring the Runtime software Analog Inputs Al system Input that can have many different numerical values positive or negative both integer and decimal Analog Inputs include motor speeds gas flows pressure temperatures power supply feedback signals etc Analog Outputs AO system Output that can have many different numerical values positive or negative both integer and decimal Analog Outputs include motor speed setpoints gas flow setpoints heater temperature and ramp setpoints power supply setpoints etc Discrete Input DI system Input that can have only one of two values 1 e on off 1 0 opened closed Discrete Inputs include vacuum switches flow s
71. osition Velocity Click to enter value Velocity oo E Currrent Position Indicator Cur Pos Click to send the motor home The button will stay pressed while the platen is homing Once the platen is homed referenced the button changes to un pressed Enter the desired offset from home that you want the motor to consider it s new home When you home with an offset the motor will go home then move to the offset and consider this location to be 0 Enter the desired home velocity in RPM or IPS depending on motor Indicates when the motor 1s referenced Green 1 referenced Gray 0 not referenced Click and hold to move the motor in the forward direction The motor will stop when the button is released Click and hold to move the motor in the reverse direction The motor will stop when the button 1s released NOTE Some motors are restricted to forward motion only In this case the Jog Rev button 1s not visible Set the jog and continuous velocity for the motor in RPM or IPS Jog and Continuous motion share the same velocity setpoint Indicates when the motor is moving Green 1 moving Gray 0 not moving Sends the motor to the position indicated in the position setpoint box at the velocity shown in the position velocity setpoint box This button stays pressed until the motor reaches the position setpoint Set the velocity at which the motor should move to the desired position Indicates the current posit
72. p Start PC Went Start LL Pump Start LL Went Start Transfer Water Command Buttons appear on all Runtime Software screens and are used to run pre programmed processes as well as user selected processes In addition to standard Command Buttons additional custom buttons are available to be configured by KJLC upon customer request The number of custom buttons available depends upon system configuration Recording Start 3 20 Kurt J Lesker E Company Operation Manual Software Operation Operation Vacuum Screen 4 2E 8 12 00 05 PM 12 15 2005 _ Logout KJLC 0 00 03 Closed Off E Super User ABORT Vacuum Deposition Gas Motion Cooling Heating VAC MEAG Torr 42E 8 ICAP mT orr 000 20 Temp deg C 23 1 Kurt J Lesker Recipe Database PC Vent Valve Cryo Temperature Regen Pressure Temp K PRNI mT orr OFF 011 2 4E 3 Run Recipe Start PC Pump PC High Vac Valve WAG T orr 7 5E 2 LL Iso Valve Close sky CLOSED LRP EOT yy Gas Injection Start PC Vent PC High Vac Throttle de PC ri Purge Valve Y Start LL Pump Start LL Vent PC Cryo Regen Valve Start Transfer afer HAE LL Turbo Vent a LL Turbo Back Roughing Pump Speed 000 LL Tuba Pure PRNI T ort 1 1E 2 Recording Start Operation System Help The chamber representations appear white while at atmosphere and get darker as
73. requirements may vary the typical requirement is 15 psi The General Assembly and the Process Gas Schematics should be referenced 3 Runa supply of compressed air to the Gas Panel Although system requirements may vary the typical requirement is 80 90 psi The General Assembly and the Process Gas Schematics should be referenced Kurt J Lesker Getting Started Operation Manual Nitrogen AAA A Compressed Vent A y 7 B yt Atr A Air and Nitrogen Supply Panel It is recommended to set the vent pressure to 10 psi maximum Drain bowl daily to remove water oil and solid particulates that may have accumulated in the bowl reservoir Filter element should be replaced when the pressure drop across the unit exceeds 10 psi See component service instructions for details 2 8 Kurt J Lesker Company Operation Manual Getting Started Start Up When starting up the system for the first time all utilities should be connected but not turned on A KJLC representative will confirm connections prior to start up Prior to the start up and operation of any system equipment the intended operator should review the individual equipment manuals and this Operation Manual l 10 Before the system is powered up verify that the power input to the system is correct and matches the power distribution schematic With all of the power distribution unit s secondary circuit breakers off turn on the main circuit
74. roubleshooting issues with Ethernet connections and modules 3 46 Kurt J Lesker Operation Manual Software Operation Help Help Screen SERRE EEE EE EERE EERE EEE EEE E TEETER TEES AAA AAA AAA EEE E EEE RENEE EEE ETE TEER EERE EEE EEE TEESE ESTEE EEE ESOS TE EE ESTEE EEE ETE TEESE EEE TEETER ER EES CELEELEEEEELEE EEE EEE EEE EEE CEE EEE EEE ETE TEST EERE EEE EEE EET EEE EE EEE ESE TERT EEE TT EERE TE Luminos Thin Film Deposition System Overview een 1 1 O memes 1 2 A EEE oree A aR 2 1 on dit ni SR TR RE RE 2 1 oO CSN ee 2 2 CLEEELELELEEEEEEECERECECECEEEEE CCE CCCCCCEECEEECCCCEECCECCEEE CCC NAAA A rr nees ee A rr res IS This screen displays KJLC contact information and provides a link to an electronic copy of this Operation Manual Click to activate The System s Operation Manual will be automatically opened using Adobe Acrobat Kurt J Lesker 3 47 Software Operation Operation Manual Recipe Database Y Recipes Recipes lal xi 3 Y Help FElRecipes Recorded Data Action Log 34 Interlocks J Sigma Data Sets ow Configuration System Users Type a question for help v X New 4 gt gt Show All subrecipe Delete Export All Recipes to XL Name Abort AutoRegen Owner Include in VB List v 4 Operator Can Use _ Process Eng Can Use _ User KILC KILC Update VB Reorder Items Copy Recipe Ty Seq ype Equipment Equipmentitem EquipmentltemOpera
75. s The exe and supporting files are located in this folder C Program Files Lesker Your Company Name The data directory in the path mentioned above is where supporting database files and the datalog mdb file is stored To access the datalog mdb file double click it Or if the software is running open MS Access from the Start menu and browse to this file then open it It is the responsibility of the customer to periodically backup the system software and database as well as remove or archive the datalog information KJLC does not recommend using CDRW discs or storing multiple backups on a single CD Backing up your system data 1 Stop the system software from running 2 Launch Nero CD burning software 3 Add the C Program Files Lesker directory of data to be saved to CD 4 Burn the disk Restoring your system data 1 Stop the system software 2 Copy the Lesker directory from the backup disk to C Program Files 3 Right click on the restored Lesker folder and un check the Read Only attribute box 4 Apply this to the current folder sub folders and files Kurt J Lesker a E Company Software Operation Operation Manual Software Upgrades Periodically KJLC will address performance issues with the Runtime Software or add features to the Runtime Software as well as the database Depending on the nature of the changes KJLC may request that the customer send KJLC a recent backup of their software to facilitate creating a s
76. s Monitor Controller Please refer to the Film Thickness Monitor Controller manual for detailed information on operating this device This manual can be found in the supplemental documentation binder Operator is responsible for setting density and z ratio based on material Operator 1s also responsible for calibrating tooling factor based on characterization runs Emergency Off Recovery Procedure 1 Verify that the alarm or emergency condition has been corrected or is no longer a problem 2 Begin with step 1 of the Start Up procedure Shut Down 1 Verify that all gas valves are closed the source and heater supplies are tuned off and that the temperature is below 80 C 2 Close High vacuum valve if applicable Turn off the high vacuum pump and vent the chamber If equipped with a turbo pump vent the turbo and chamber to prevent migration of oil into the chamber 4 Turn off the individual component power switches as required power supplies controllers etc 5 Turn off the individual branch circuit breakers on the main power distribution box At this point the system is at shut down Power can now be removed from the whole system or any of the system components Refer to the manufacturers manuals to make sure that all equipment is in a safe mode Kurt J Lesker ed E Company Manual Operation Operation Manual 10 Kurt Lesker Operation Manual Software Operation Software Operation Overview The Kurt J
77. screte Analog Strings Ethemet 10 String Outputs String Inputs Recipe Database 01501 Mikron Pyrometer 0 0 Counter Run Recipe PC Pfieffer Turbo Pump Controller 0 D 521 PC Pfieffer Turbo Speed 0 Normal Start PC Pump PC Pfieffer Turbo Pump On 0 0 Platen Motor Moving 0 Normal Start PC Vent PC Pfieffer Tubo Pump Speed SP 0 01 Platen Motor Position 200 0 DEG Normal PC Pfieffer Turbo Pump Variable Sp 0 0 Platen Motor Referenced 0 Normal Platen Motor 0 0 Platen Motor Velocity Platen Motor Acceleration 25 25 RPMSS Platen Motor D 550 550 Platen Motor Direction 0 0 Platen Motor Encoder Counts 2000 2000 Rotation Start Platen Motor Gear Ratio 16 16 gt Recording Start Generate Data Log Suspend Screen Updates Operation System Help qu This screen is primarily used for troubleshooting It is recommended that operators other than the system administrator do not have access to this screen Users can be denied access to this screen based upon their login parameters see the System Users Screen and the Security section of this manual Forcing string inputs can override interlocks When system troubleshooting 1s complete you must remember to reset un force signals ICON or DATA FIELD ACTION RESULT Click to select or All String Outputs and Inputs are listed in deselect alphabetical order ae Kurt J Lesker Company Operation Manual Software Operation ICON or DATA FIELD AC
78. seees 1 2 Service es sssini aiseria Sena e EErEE asa aaao 1 3 SOV air E E 1 4 Operator ReSpOnSIDIE dada 1 4 Salety Nota A 1 5 Sale y PCAC mundi dida 1 6 A A ON die Ann Cia NM 1 8 Kurt Lesker 1 1 Introduction Operation Manual PVD Thin Film Deposition System Overview The PVD System is a versatile value engineered R amp D vacuum system which can be configured to suit a variety of thin film deposition applications Standard features include a front loading box chamber Turbomolecular pump package integrated touch screen control and a fully enclosed zero cleanroom footprint when flush wall mounted Source flange options include magnetron sputtering electron beam evaporation thermal evaporation and low temperature evaporation furnaces To ensure product reliability the PVD System is built using proven process modules from other standard Kurt J Lesker Company thin film deposition systems All information illustrations and specifications in this manual are based on the latest product information available at the time of printing KJLC reserves the right to make changes at any time without notice Any duplication of this manual in whole or in part without express written approval from Kurt J Lesker Company is strictly prohibited 1 2 Kurt J Lesker ompany Operation Manual Introduction Service Information SERVICE Prior to contacting KJLC Systems Support for assistance utilize the Troubleshooting pr
79. step 2 If using a previously used set up go to step 6 Use only clean lines to connect gas to the system Purge the gas lines while connecting Pump down the system Pump out the gas supply lines Close the tank or wall supply valve put the throttle valve in the throttle position open system gas valve s and fully open needle valves When finished close all system gas valves open the tank or wall supply valve and adjust line pressure to gt Spsig and lt 15psig Verify that the system 1s under high vacuum Verify that required gas 1s hooked to the system Open the gas inlet valve and the appropriate gas channel valve s and set the gas flow chamber pressure to the desired setting This setting usually lies between 1 5 and 15 mTorr for typical depositions or 100 and 400 mTorr for glow discharge When finished close the gas inlet valve and the gas channel valve s and set gas flow chamber pressure to 0 10 Turn off throttle valve full open Use appropriate safety measures for gas type s selected to prevent personal injury or equipment damage Kurt Lesker Operation Manual Manual Operation Torus Sputtering Source Setup and Operation Please refer to the KJLC Torus manual for detailed information on operating this device This manual can be found in the supplemental documentation binder Source Shutter Setup 1 Install the shutter blade onto the shaft end Adjust insertion depth of the assembly to achieve a mi
80. t J Lesker Software Operation Operation Manual Operation Cooling Screen Kurt J Lesker Green On Gray Off 3 36 Kurt J Lesker Operation Manual Software Operation Operation Sigma Screen Kurt J Lesker a _ Logout KJLC 0 00 05 Closed Off Exit Super User ABORT Version 2 23 Wacuum Deposition Motion Heating Cooling Sigma SQS 242 _ Crystal Status Power and Source Map Output f Sigma Launch 242 Sigma Simulation Mode a Leer Power PWS IS E apping OFF OFF A s KA tut i QUI ER ouput 1 ME BR EA anaes Crystal 2 EE gg El Output 2 00 f Ebeam Sigma States i x 8 Evap Sigma Start Process utput S Proc State Process Stopped LE EL 0000 95 Start PC Pump OFF OK Output 4 Layer Ex Crystal 4 00 gg EJ i Start PC Yent Sigma Stop Process a ices 06 Crystal 5 Shutter Control i _ E ar en 0 Not Mapped Shutter Map 14 Substrate OFF OK Subst Index En ae 1 10 Source Shutter 1 10 15 lon Source 1l XTL1 16 Ebeam Sigma Zero All Thicknesses Interface Status MU yaa 12 XTL2 19 DualxTL1 47 Evyap Iro Crystal 8 13 XTL3 20 DualxTL2 18 XTL4 i Delay Shutter Mapping Sigma Control HEHHE Sigma Delay Process Info Phase OK Sigma Data Set Number Sigma Control Request LEE Sigma Last Message Deposit Shutter Mapping Sigma Sigma Process Name yas Sigma Film Name OK Recording Start
81. ter is intended to provide general instructions for operating the PVD System Please read through and become familiar with all instructions and schematics prior to operating the system Once the system has been successfully installed the required utility connections have been made and the start up procedure completed the PVD System 1s ready for operation CHAPTER CONTENTS Manual O peral TO Sample Rotation Setup and Operation ss 3 3 Sample Heating Setup and Operation ss 3 3 Gas Flow Setup and Operation 3 4 Manual Pressure Control Needle Valve ss 3 4 Torus Sputtering Source Setup and Operation 3 5 SOULCS SAUS SEU do 3 5 E B eam soutcs Setup and Operation risas 3 6 ETE ATEFumaco Operatoria 3 6 Thermal Evaporation Source Operation cialis 3 8 Film Thickness Monitor Controller ss 3 9 Emersency Off Recovery ProCOQUre tissscsaccetscnstvasspendsnedansasieansanccedssnsdaestbendsendabtaseasiendinds 3 9 O 10 RS ene ie rE ne a EN die Un en dc ee ee 3 9 Software Operacion LL TE 1 Wg ead a eee ea ee ee 3 11 GT A aa 3 12 os 3 13 AUS NOW SORT le E aap oa 3 13 Pelete QS CF vost ens ng eee ap A N 3 14 MOdUS MS U NOT Ss ACCESS uni ib 3 14 RESUME DASS WO dins 3 14 Software File Structure amp Maintenance sense 3 15 Backing up vour SY SI CIN QI ira 3 15 RESTOFIN O VOUT SVS TEMO Dad dadas 3 15 DOPE WAI SA dada niet aile dt cabida 3 16 Terminology and ADC TUTO sd 3 17 COMMON
82. the pressure in the chamber decreases The Process Chamber above is at high vacuum black while the Load Lock chamber above is at atmosphere white gi ICON or DATA FIELD ACTION RESULT Valve Icons Click to activate Green Pressed open or active sky Gray Unpressed closed or inactive Valve Indicators Display only Indicates position of valves with real OPEN CLOSED feedback such as the isolation and high vacuum valves Fault Display only This icon will only appear during a fault FAULT condition Speed Display only Indicates the current speed of the LL peed turbo pump Kurt J Lesker a Company Software Operation Operation Manual ICON or DATA FIELD ACTION RESULT Pirani Gauge Display only Indicates Pirani gauge pressure in Torr Display only Indicates the temperature of the Cryo pump in Kelvin Display only Indicates pressure in mTorr of the Cryo pump during regeneration Click to activate Turns on off the Pirani gauge Display only On green animated motion and appear pressed down Off gray no animation and appear un pressed up Process Chamber Vacuum Indicator Display only Gray atmospheric pressure Green some level of vacuum Display only Indicates wide range gauge pressure in Torr Capacitance Manometer Display only Indicates capacitance monometer ERIC pressure in mTorr Temperature Display only Indicates process chamber temperature in degrees Celsius LL Chamber
83. tion Equipment T est Value GRS PC Regen Pirani Turn_Off Closed Closing PC Cryo Purge Valve Turn_Off Closed Closing PC Cryo Regen Valve Turn_Off Closed Closing Source4 Gas Turm_OfffClosed Closing This screen provides the user with an interface for running and maintaining recipes See the CWare Operation section for further instructions ICON or DATA FIELD ACTION RESULT New Recipe Click to activate Starts a new blank recipe Navigation Button Click to activate Use these buttons to select the first MJ previous last or next recipe in the recipe CE CA list Drop Down Recipe List Click to activate Click the arrow to display a list of programmed recipes You can then select one from the list by clicking on it Show All Click to activate Toggles between Show All and Show Sara UE Main and dictates what list of recipes will be shown in the Drop Down Recipe List box Sub Recipe Click to activate Checking this box will allow the chosen Sub Recipe _ recipe to be used as a step in other recipes ais Kurt J Lesker A Company Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Delete Recipe Click to activate Deletes the currently selected displayed aad Export Recipes Click to activate Copies all recipes to C Program Files Lesker Customer Name Excel Files Recipe Sets xls Update VB Click to activate Updates the list of available recipes that Update VB will be seen in th
84. tivate Displays the actual current state of the corresponding discrete output Signal Value Clicking on the signal value will toggle its state and will also change the state of the corresponding equipment For example clicking on the Gun2 shutter Signal Value is the same as clicking on the actual shutter indicator on the Operation Deposition screen Signal State Click to force Displays the current state of the signal corresponding discrete input at system Discrete inputs can be forced by clicking on the corresponding Signal State Is Forced Display only Indicates whether or not the current signal is forced Is Forced False unforced signal True forced signal Generate Data Log Click to activate Generates a table in the folder C Program Dalla Files Lesker Company Name Data Datalog mdb The table name is the date and time the table was created Suspend Screen Click to activate Stops the constant screen update to allow the Updates user to easily select signals to be forced Suspend Screen Updates Kurt J Lesker on a A Company Software Operation Operation Manual System Analog Screen 0 0E 0 11 50 31 AM 8 4 2006 xl k L ker A Logout KJLC Kurt J Lesker or closed it tn AR Version 2 19 Discrete Analog Strings Ethernet 10 Analog Outputs Recipe Database Cap Pres D 05 05 100 00 mTorr Run Recipe Cap Pres I 2 2 000 1 SCCM Start PC Pump own Cap Pres P 6 6 000 0 SCCM
85. value Turns respective power supply on off Enter the desired power supply output setpoint in Watts also see Ramp Rate below Enter the desired power supply ramp rate in units per second NOTE Set Ramp Rate PRIOR to setting the output setpoint Displays current power supply status Refer to the Operation Heating section for descriptions of heater control icons included on the Deposition screen Refer to the Operation Gas section for descriptions of gas and pressure control icons included on the Deposition screen Refer to the Operation Motion section for descriptions of platen control icons included on the Deposition screen Kurt Lesker Operation Manual Software Operation Operation Gas Screen Kurt J Lesker Busing Time USSR MFC Setpoint Click to enter Sets MFC flow in sccm value NOTE Applies to Independent Mode only MFC Flow Display only Indicates gas flow from corresponding MFC Click to enter Sets mode of operation for corresponding value MFC Mode 0 Independent Flow Mode Mode 1X Slave Mode X master Mode 4 Upstream Pressure Control Mode Kurt J Lesker 3 25 Software Operation Operation Manual ICON or DATA FIELD ACTION RESULT MEC Ratio Ratio Click to enter value Click to enter value MEC Correction Factor Corr Factor 1 39 Click to enter value MFC Range Range SCCM Capman Pressure Display only Capma
86. ve Turm_Off Closed Closing 3 Valve PC Cryo Regen Valve Turn_Off Closed Closing 4 Valve Source4 Gas Turn_Off Closed Closing 4 Valve Sourced Gas Turn_Off Closed Closing Return To Recipe Re Number Move Use this screen to correct the order of steps in a saved recipe To access this screen click on Reorder Items on the Recipe Screen See the CWare Operation section for further instructions ICON or DATA FIELD ACTION RESULT Chose Item to Move Click to activate Click the step in the column on the left that Chose Item to MOVE needs to be moved Chose Item to Insert Click to activate Click the step in the column on the right Above that the chosen step from the left table l fore Chose Item to INSERT ABOVE needs to be placed before Click to activate Moves the location of the step selected on the left Re Number Click to activate Clicking this button corrects the numerical order of each command Re Number Kurt J Lesker Operation Manual Software Operation ICON or DATA FIELD ACTION RESULT Return to Recipe Click to activate Click to return to the recipe screen Return To Recipe Kurt J Lesker E E Company Software Operation Operation Manual Recorded Data PJ Recipes Recorded Data a x i Jelp gaf ecipes YR ded Data Actio Log E Interlock Type a question for help X Delete Export fie Delete Sigma Log Files al 1147 2006 4 40 11 PM 1117 2006 4 40 12 PM 0601171640 Sh 0 00
87. witches gate valve positions etc Discrete Outputs DO system Output that can have only one of two values i e on off 1 0 open close Discrete Outputs include valves pumps power supply enable signals heater enable signals shutter open close signals etc String Inputs Can be Discrete or Analog and are used primarily for communication with serial devices String Outputs Can be Discrete or Analog and are used primarily for communication with serial devices Downstream Pressure Control Mode method of pressure control mode whereby effective pumping speed is varied and gas flow is held constant to achieve a desired pressure The point of pumping 1s referred to as being downstream relative to the means of gas introduction HMI Human Machine Interface This refers to the computer control screens utilized by the operator to run the tool and monitor system status MFC Mass Flow Controller This refers to a device for introducing process gas at a controlled variable rate typically in units of sccm standard cubic centimeter per minute PID Control Proportional Integral Derivative Control A type of control used in closed loop feedback systems See Operation Gas section for more information Recipe an automated sequence that consists of one or more steps or recipes The steps specified in a given recipe are executed in a pre defined increasing numerical order Runtime Screens the portion of the AMI associ
88. ystem all heater bulbs should be reviewed for excessive deposition covering and be replaced as required Care should be taken to assure that cleaning agents and cleaning procedures do not form a negative reaction with the materials used in the deposition chamber Refer to MSDS for handling instructions Run off from deposition component cleaning may be poisonous and requires appropriate disposal 4 6 Kurt J Lesker Operation Manual Appendix 5 Appendix This section provides reference materials for the system Kurt J Lesker ast E Company

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