AIGX ion gauge user manual
Contents
1. 5 2 Replace the body tube Refer to Figure 5 and use the following procedure to replace the body tube 1 2 Turn off the gauge Switch off the AIGX electrical supply and disconnect the electrical supply cable 3 Remove the AIGX from the vacuum system 4 Using a suitable screwdriver remove the two M3 screws item 2 from the sides of the electronics housing item 1 5 Pull the electronics housing item 1 to remove it from the body tube assembly item 3 6 Fit the new body tube assembly item 3 to the electronics housing item 1 Take care to ensure that the locating lugs item 4 on the body tube assembly item 3 are aligned with the mating recess in the electronics housing item 1 Note that the electronics housing item 1 can only fit one way round on the body tube assembly item 3 7 Refit the two M3 screws to the sides of the AIGX 5 3 Replace the internal fuse If you suspect that the internal fuse has blown you should check that the voltage and polarity of the electrical supply are correct before replacing the fuse To replace the fuse refer to Figure 6 and use the following procedure 1 Switch off the electrical supply and remove the electrical supply connector from the gauge Using a suitable screwdriver remove the four M3 5 screws from the top of the gauge Remove the gauge lid ensuring the pin on the underside of the lid is not bent The fuse will now be visible on the PCB Hold the2. T T E SE Ww gt A 70 a SC A AA sari e SR T N Figure 2 Dimensions mm Active Ion Gauge 3 1 3 2 3 3 Active Ion Gauge INSTALLATION Unpack and inspect Remove all packing materials and protective covers and check the AIGX If the AIGX is damaged notify your supplier and the carrier in writing within three days state the Item Number of the gauge together with your order number and your supplier s invoice number Retain all packing materials for inspection Do not use the AIGX if it is damaged If the AIGX is not to be used immediately replace the protective covers Store the AIGX in suitable conditions as described in Section 6 Fit the AIGX to the vacuum system The AIGX can be mounted in any orientation To avoid the build up of debris or condensable material in the body tube of the AIGX which will probably cause pressure measurement errors we recommend that you install the AIGX vertically with the flange facing down Use a copper gasket and screws to connect the DN16CF and DN40CF flanges of the AIGX to a similar flange on your vacuum system Use an O ring centring ring or Co Seal and metal clamp to connec
3. to 6 6 x 10 mbar 14 5 V to 30 V d c 1A T 7W 14W FCC 68 RJ45 0 7 V to 8 7 V 9 0 V 9 5 V 9 7 V 10 KQ Active Ion Gauge 2 3 3 2 3 4 2 3 5 2 3 6 2 4 Gauge and degas enable Control sense Active low Active level lt 1 5 V Set point Trip level 0 6 V to 8 8 V Hysteresis 500 mV Set point output load rating 30 V d c 100 mA max Back EMF suppression diode Min surge rating 1A Min reverse voltage rating 100 V required when you use an external d c relay connected to the set point output Gauge identification Identification resistance 162 kQ Electrodes Emission current Normal 0 1 or 1 mA Degas 10 mA Grid voltage Normal 180 V Degas 500 V Filament bias voltage 30 V Collector voltage OV Materials exposed to vacuum Collector Tungsten Grid Tantalum Pt Clad Mo Filament Yttria coated iridium Body Stainless Steel Feedthrough Stainless Steel and UHV compatible glass ceramic Active Ion Gauge 7 A NW25 85 DN16CF 106 DN40CF 98 70 o
4. Maximum recommended cable length The common mode signal voltage that is the voltage between signal common and supply common could be as much as 2 5 V with long cables due to the voltage drop in the supply cable You should ensure that the signal voltage measurement will operate correctly Active Ion Gauge 4 OPERATION WARNING Do not use the AIGX to measure the pressure of explosive or flammable gases or mixtures WARNING During operation the surface of the ion gauge tube might become hot To avoid risk of injury do not touch the tube whilst the gauge is operating Switch off the gauge and allow to cool down for few minutes before handling WARNING Disconnect the electrical supply cable from the AIGX before you remove the AIGX from the vacuum system High voltages are generated inside the AIGX 4 1 Enable and disable the AIGX CAUTION The gauge should not be operated at pressures higher than 5 x 107 torr 6 6 x 10 mbar Operating the AIGX at high pressures may reduce the lifetime of the filament If you are using the AIGX with an AGC refer to the AGC instruction manual for details of how to enable the AIGX Alternatively to enable switch on the AIGX connect pin 7 to pin 2 To disable switch off the AIGX disconnect pin 7 from pin 2 When the AIGX is enabled the output signal will remain at 9 0 V whilst the emission current is being stabilised This will take typically 5 seconds may be longer
5. board down and then pull the fuse from it s fuseholder using an appropriate tool for example a small pair of pliers Active Ion Gauge 19 5 4 20 5 The replacement fuse is supplied mounted in a fuseholder Remove the new fuse from its fuseholder and discard the new fuseholder 6 Push the new fuse into the fuseholder on the PCB 7 Refit the gauge lid ensuring that the pin is fitted in the shrouded earth socket next to the main connector Refit the four M3 5 screws 8 Apply power to the gauge and check that the LED is illuminated Replacement fuses are available from BOC Edwards Refer to Section 7 2 Or UU en N N gt gt gt KE zJ C D TU C m
6. degas is three minutes after which the gauge returns automatically to its normal mode The AIGX has a set point facility The set point signal is an open collector transistor output which is on when the pressure measured by the gauge is below a preset pressure The pressure at which the set point operates can be adjusted using the set trip switch on the top of the gauge Figure 1 item 3 The AIGX is fitted with a status LED Figure 1 item 4 This LED indicates the operating status of the gauge Active Ion Gauge sion al view of the AIGX NW25 ver Figure 1 Gener 2 2 2 3 2 3 1 2 3 2 TECHNICAL DATA Mechanical data Dimensions Mass AIGX S NW25 AIGX S DN16CF AIGX S DN40CF Volume of gauge tube Enclosure rating See Figure 1 260 g 3008 510 g 21 cm IP30 3 Performance operating and storage conditions Ambient temperature operation storage Ambient humidity Bakeout temperature Maximum operating altitude Maximum internal pressure Pressure measurement range Electrical data Electrical supply Voltage Internal fuse Maximum power consumption Operating Degas Electrical connector Output signal Measurement range Gauge disabled Emission error Over pressure trip Minimum load impedance 0 to 40 C 30 to 70 C 90 RH non condensing up to 31 C reducing to 50 RH at 40 C 200 C with electronics removed 2000 m 10 bar absolute 5x 107 to 5 x 10 torr 6 6 x 107
7. gauge As the pressure goes down the emission current changes from 0 1 mA to ImA at 2 x 10 torr 2 6 x 10 S mbar As the pressure goes up the emission current changes from 1 mA to 0 1 mA at5 x 10 torr 6 6 x 10 gt mbar Degas the AIGX CAUTION You must degas the AIGX regularly Failure to do so will affect the performance and reduce the lifetime of the gauge During use in contaminating environments the gauge electrodes become coated in insulating layers eventually resulting in premature failure of the product This can be prevented by regular use of the degas feature Typically degas will be required on a weekly basis although the interval will depend on the level of contamination The degas operation is also recommended if measurement of low pressure are required During degas the grid will be heated to high temperature sufficient to remove absorbed gases and some contamination Degas the AIGX when the pressure is below 1x 10 torr 1 3 x 10 mbar The degas is inhibited when the pressure is above 1 x 10 torr 1 3 x 10 S mbar The gauge will automatically return to the normal operation mode after 3 minutes If you are using the AIGX with an AGC or a TIC controller refer to the AGC or TIC instruction manual for details of how to degas the AIGX Otherwise to enable degassing of the AIGX connect pin 6 to pin 2 Over pressure protection The gauge will automatically switch off when the measured pressur
8. the equipment been used tested or operated Failure Date YES _ Go to Section NO J Go to Section 4 Serial Number of Replacement Equipment SECTION 2 SUBSTANCES IN CONTACT WITH THE EQUIPMENT Are any substances used or produced in the equipment Note 1 BOC Edwards will not accept delivery of any equipment that is contaminated with radioactive substances biological infectious agents mercury PCB s dioxins or e Radioactive biological or infectious agents mercury sodium azide unless you poly chlorinated biphenyls PCBs dioxins or sodium azide if YES see Note 1 YES LJ NO e Decontaminate the equipment Hazardous to human e Provide proof of decontamination health and safety YES NO YOU MUST CONTACT BOC EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT SECTION 3 LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT Chemical Precautions required for example Action required after a spill Substance name Symbol use protective gloves etc leak or exposure SECTION 4 RETURN INFORMATION Reason for return and symptoms of malfunction If you have a warranty claim e who did you buy the equipment from e give the supplier s invoice number SECTION 5 DECLARATION Print your name Print your job title Print your organisation Print your address Telephone number Date of equipment delivery have made reasonable enquiry and have su
9. to 200 C after removing the electronics housing Refer to Figure 5 and the procedure in Section 5 2 to remove and refit the electronics housing Ensure that the tube has cooled down before refitting the electronics housing Active Ion Gauge 1 Electronics housing 3 Body tube assembly 2 Fixing screws 4 Locating lugs Figure 5 Separate the electronics housing from the body tube Active Ion Gauge 5 1 18 MAINTENANCE WARNING Disconnect the electrical supply cable before you start any maintenance High voltages are generated inside the AIGX Fault finding guide Symptom Possible Cause Remedy LED Not Lit Supply connection incorrect or faulty Supply polarity reversed Check electrical supply and connections Internal fuse blown Replace fuse Refer to Section 5 3 Over pressure The pressure rose too high Reduce the pressure trip whilst the AIGX was and re enable the operating AIGX Emission error The AIGX was enabled Reduce the pressure when the pressure was too high and re enable the AIGX Filament contaminated Filament open circuit Switch to the other filament If both filaments give the error replace the body tube Refer to Section 5 2 Electrical supply insufficient to drive the AIGX Check that supply voltage current specifications meet requirement in Section 2 3 1 Table 6 Fault finding guide Active Ion Gauge
10. 1 Pins on the AIGX connector 8 2 Maximum recommended cable length 10 3 Gas calibration factors for various gases 12 4 LED status 15 5 Error indication 16 6 Fault finding guide 18 Active Ion Gauge 1 INTRODUCTION 1 1 Scope and definitions This manual provides installation operation and maintenance instructions for the BOC Edwards Active Ion Gauge AIGX You must use the AIGX as specified in the manual Read this manual before you install and operate the AIGX Important safety information is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below WARNING Warnings are given where failure to observe the instruction could result in injury or death to people CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment or process The units used throughout this manual conform to the SI international system of units of measurement The following symbols appear on the AIGX N Warning refer to accompanying documents From August 2005 BOC Edwards will offer European customers a recycling service ya ns 1 2 Description The AIGX is an ion gauge head and gauge controller in a single compact unit The gauge operates as a hot filament ionisation gauge in which the pressure is measured indirectly as a function of the current Active Ion Gauge 1 The measurement rang
11. 65 2766 CANADA BOC EDWARDS 5975 Falbourne Street Mississauga Ontario L5R3W6 Canada Tel 1 800 387 4076 Fax 1 905 501 1225 12055 Cote de Liesse Dorval Quebec H9P1B4 Canada Tel 1 514 631 3501 Fax 1 514 631 3502 CHINA BOC TRADING SHANGHAI Co LTD 23 Fu Te Road N Wai Gao Qiao Free Trade Zone Pudong Shanghai 200131 PRC China Tel 86 21 58669618 Fax 86 21 58669993 GERMANY BOC EDWARDS Ammerthalstra e 36 85551 Kirchheim Munich Tel 49 89 99 19 18 0 Fax 49 89 99 19 18 99 FRANCE BOC EDWARDS 125 Avenue Louis Roche 92238 Gennevillers Cedex Paris Tel 33 1 47 98 24 01 Fax 33 1 47 98 44 54 HONG KONG S A R BOC EDWARDS ASIA 12 Chun Yat Street Tseung Kwan O Industrial Estate Tseung Kwan O Kowloon Hong Kong SAR Tel 852 2372 2640 Fax 852 2796 9095 INDIA BOC EDWARDS DIVIN OF BOC INDIA LIMITED 203 Surya Kiran Building 19 Kasturba Gandhi Marg New Delhi 110 001 India Tel 91 11 237 33087 Fax 91 11 551 0245 ISRAEL EDWARDS ISRAEL VACUUM LTD 5 Habarzel Blvd Gat 2000 Industrial Zone Qiryat Gat 82000 Tel 972 8 681 0633 Fax 972 8 681 0640 ITALY BOC EDWARDS Via Carpaccio 35 20090 Trezzano sul Navigilo Milan Tel 39 2 48 4471 Fax 39 2 48 401638 JAPAN HEADQUARTERS BOC EDWARDS Shwa Shiba Park Building A 3F 2 4 1 Shibakoen Minato ku Tokyo 105 0011 Tel 81 0 3 5470 6530 Fax 81 0 3 5470 6521 KOREA HE
12. ADQUARTERS SONGWON EDWARDS LTD 5th FL Daewoo Engineering Bldg Soonae dong Bundang gu Sungnam City Kyungki do Korea Tel 82 31 716 7070 Fax 82 31738 1001 SONGWON EDWARDS LTD 625 7 Upsong dong Chunan City Chungchong Nam do Korea Tel 82 41 621 7070 Fax 82 41 621 7700 SINGAPORE BOC EDWARDS ASIA 42 Loyang Drive Loyang Indusrial Estate Singapore 508962 Tel 65 546 8408 Fax 65 546 8407 TAIWAN R O C EDWARDS TAIWAN LIMITED No 434 Chung hua Road Toufen Town Miaoli County Taiwan R O C Tel 886 37 611422 Fax 886 37 611401 PLEASE CONTACT ANY OF THE ABOVE FOR DETAILS OF OTHER SALES AND SERVICE CENTERS IN YOUR AREA BOC Edwards is part of BOC Limited BOC Edwards and the stripe symbol are trade marks of The BOC Group BOC Edwards 2004 Publication No C100 04 895 www bocedwards com info bocedwards com M47 BOC EDWARDS
13. D048 50 880 Issue C Instruction Manual Active lon Gauge Description Item Number AIGX S NW25 D048 50 000 AIGX S DN16CF D048 51 000 AIGX S DN40CF D048 52 000 ZC BOC EDWARDS Manor Royal Crawley West Sussex RH10 2LW UK Telephone 44 0 1293 528844 Fax 44 0 1293 533453 http www bocedwards com Declaration of Conformity BOC Edwards Manor Royal Crawley West Sussex RH10 2LW UK declare under our sole responsibility that the product s Active Ion Gauge AIGX S NW25 D048 50 000 AIGX S DN16CF D048 51 000 AIGX S DN40CF D048 52 000 to which this declaration relates are in conformity with the following standard s or other normative document s EN61010 1 2000 Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use EN61326 1997 Electrical Equipment for Measurement Control and Laboratory A1 1998 A2 2001 Use EMC Requirements Industrial environment Class B Emissions following the provisions of 89 336 EEC Electromagnetic Compatibility Directive Pur 2 STE Ben Looy SHonertiAn Dr J D Watson Director of Technology VEMD Date and Place This product has been manufactured under a quality system registered to ISO9001 Wild BOC EDWARDS P900 75 000 IssueE 2B01 010 GEA 0111 CONTENTS Section Title 1 INTRODUCTION 1 1 Scope and definitions 1 2 Description 2 TECHNICAL DATA 2 1 Mechanical data 2 2 Performance operating and st
14. at lower pressures After this time the output signal will indicate pressure If an error occurs then the output signal will indicate the error Active Ion Gauge 11 4 2 4 2 1 12 Pressure measurement If you are using an AIGX with an AGC the pressure measurement is shown on the AGC display Otherwise convert the output signal to pressure using the following equation P 10 TI torr P 10 19399 mbar p 10 V 7875 pa where V is the measured voltage in volts Refer to Figure 4 This formula is valid for the range 0 7 V to 8 7 V Calibration in different gases The equation given in Section 4 2 is for air or nitrogen only For other gases the indicated pressure has to be multiplied by a gas calibration factor GCF The following table list the gas calibration factor for most commonly used gases Gas GCF Helium 5 7 Argon 0 75 Neon 3 3 Krypton 0 5 Xenon 0 35 Hydrogen 2 4 Oxygen 1 Carbon Monoxide 1 15 Carbon Dioxide 0 7 Table 3 Gas calibration factors for various gases Active Ion Gauge Gauge output volts 1E 10 1E 9 1E 8 1E 7 1E 6 1E 5 1E4 1E 3 1E 2 1E 1 1E 0 1E 1 Indicated Pressure torr Pascal Figure 4 Pressure output signal of AIGX Active Ion Gauge 13 4 3 4 4 4 5 14 Emission current To increase the life time of the filament the two levels of emission currents are automatically controlled by the
15. e rises above 5 x 107 torr 6 6 x 10 2 mbar If this occurs then the signal output and LED status will indicate over pressure trip Refer to Section 4 9 Active Ion Gauge 4 6 Filament selection The AIGX has two filaments 1 and 2 To select either of these filaments use the sliding switch at the top of the gauge Make sure that the gauge is turned off before switching between filaments 4 7 LED status The AIGX is fitted with a tri coloured LED which can be used to monitor the status of the gauge according to the following table Colour Status Off No power to the gauge or malfunction Amber Power on gauge disabled Green Amber alternating Emissions start up Green Emission on Green slow flashing Degas on Red flashing Emission error Red Over pressure trip Table 4 LED status 4 8 Set point adjustment To read the voltage at which the set point output signals are activated press the required set trip switch refer to Figure 1 with an appropriate tool The output of the gauge will indicate the set trip level for 3 seconds after which the output will read the normal voltage output To adjust the voltage at which the set point output signal is activated press the required set trip switch and hold it down for more than 3 seconds The set point voltage will start scrolling upwards Remove pressure from the switch as soon as you reach the required trip voltage To make a finer adjustment remove press
16. e of the AIGX is 5x 107 to 5x 10 torr 6 6 x 107 to 6 6 x 10 mbar Three types of vacuum connections are available DNI6CF DN40CF and NW25 The AIGX requires a 14 5 30 V d c power supply it has a 0 to 10 V d c analogue output which is related to pressure The AIGX is compatible with the BOC Edwards Active Gauge Controller AGC Alternatively you can use an independent power supply and you can read the output signal with a voltmeter or analogue to digital converter An 8 way electrical connector socket on the AIGX Figure 1 item 1 is used to connect the AIGX to your AGC or electrical supply and voltmeter Electrical cables fitted with suitable connectors are available as accessories A gauge identification signal is available on the electrical connector this signal is used by BOC Edwards AGC s to identify which type of active gauge is connected The AIGX is supplied with two filaments A switch on top of the gauge selects between filament 1 and 2 Figure 1 item 2 There are two levels of emission currents 0 land 1 mA The gauge will automatically select 1 mA emission current at low pressure and 0 1 mA at high pressure A protection circuit is built into the gauge to prevent operating the gauge at pressures higher than 5 x 10 torr The AIGX can be degassed using the degas feature During degas the grid voltage is 500 V and the emission current is 10 mA The degas is inhibited at high pressure The maximum duration of
17. he AIGX connector are used as shown in Table 1 The specification of the electrical supply d c relay and back EMF suppression diode are given in Section 2 Pin No Use Supply positive Supply common Signal output ID resistor Signal common Degas enable Gauge enable Set point output CONDUFWNH Table 1 Pins on the AIGX connector The connection to Pin 8 is optional Make the connection to Pin 8 if you want to connect the set point output signal to a d c relay You must connect a suppression diode between pins 8 and 1 to protect the AIGX from transient voltage generated when the d c relay is switched off Connect a switch between pins 7 and 2 to enable and disable the gauge Connect a switch between pin 6 and 2 to enable and disable the degas function Active Ion Gauge VOLTAGE SUPPLY VOLTMETER SIGNAL VOLTAGE KEY AIGX connector socket Cable electrical plug Degas enable switch Gauge enable switch Back EMF suppression diode optional D C relay optional View of AIGX connector oaonmoou gt Figure 3 Schematic diagram of recommended electrical connections Active Ion Gauge 9 3 3 3 10 Maximum cable length The maximum cable length is dependent on the conductor cross section and the supply voltage used The following maximum cable lengths are recommended Conductor cross section 24 V Supply 15 V Supply 24 awg 30 m 0 5 m 28 awg 10 m 1m Table 2
18. ies in Belgium Brazil Canada France Germany Great Britain Hong Kong Italy Japan Korea Switzerland U S A and a world wide network of distributors The majority of these centres employ Service Engineers who have undergone comprehensive BOC Edwards training courses Order spare parts and accessories from your nearest BOC Edwards company or distributor When ordering please state for each part required e Model and Item Number of your equipment e Serial number if any e Item Number and description of part 7 2 Spares Description Item Number Electronics housings AIGX S D048 50 800 Body tubes NW25 D048 50 801 DN16CF D048 51 801 DN40CF D048 52 801 Spare fuses pack of 5 D048 50 805 22 Active Ion Gauge 7 3 Accessories Cables suitable for use with the AIGX are as follows These cables are supplied with 8 way male electrical connectors on both ends Note that the 15 m and 30 m cables have a larger conductor cross section Cable length 0 5 m Im 3m 5m 10m 15m 30 m Description Annealed copper gasket DN16CF Hex head nut bolt and washer kit DN16CF Annealed copper gasket DN40CF Hex head nut bolt and washer kit DN40CF Active Ion Gauge Item Number D400 01 005 D400 01 010 D400 01 030 D400 01 050 D400 01 100 D400 05 150 D400 05 300 Item Number C100 01 270 C100 01 630 C100 05 270 C100 05 630 23 24 Active Ion Gauge P900 70 000 Issue K M7 BOC EDWARDS Form HS1 Re
19. ipment is contaminated you must either e Remove all traces of contamination to the satisfaction of laws governing the transportation of dangerous hazardous substances e Or properly classify the hazard mark manifest and ship the equipment in accordance with applicable laws governing the shipment of hazardous materials Note Some contaminated equipment may not be suitable for airfreight PROCEDURE Contact BOC Edwards and obtain a Return Authorisation Number for your equipment Complete the Return of BOC Edwards Equipment Declaration HS2 If the equipment is contaminated you must contact your transporter to ensure that you properly classify the hazard mark manifest and ship the equipment in accordance with applicable laws governing the shipment of contaminated hazardous materials As the person offering the equipment for shipment it is your responsibility to ensure compliance with applicable law Note Equipment contaminated with some hazardous materials such as semiconductor by products may not be suitable for airfreight contact your transporter for advice Remove all traces of hazardous gases pass an inert gas through the equipment and any accessories that will be returned to BOC Edwards Where possible drain all fluids and lubricants from the equipment and its accessories Seal up all of the equipment s inlets and outlets including those where accessories were attached with blanking flanges or for unconta
20. minated product with heavy gauge tape Seal equipment in a thick polythene polyethylene bag or sheet If the equipment is large strap the equipment and its accessories to a wooden pallet If the equipment is too small to be strapped to a pallet pack it in a suitable strong box Fax or post a copy of the Declaration HS2 to BOC Edwards The Declaration must arrive before the equipment Give a copy of the Declaration HS2 to the transporter You must tell your transporter if the equipment is contaminated 10 Seal the original Declaration in a suitable envelope attach the envelope securely to the outside of the equipment package in a clear weatherproof bag WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE M7 BOC EDWARDS Form HS2 Return Authorisation Number Return of BOC Edwards Equipment Declaration You must e Know about all of the substances which have been used and produced in the equipment before you complete this Declaration e Read the Return of BOC Edwards Equipment Procedure HS1 before you complete this Declaration e Contact BOC Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions e Send this form to BOC Edwards before you return your equipment SECTION 1 EQUIPMENT Equipment System Name IF APPLICABLE Part Number Tool Reference Number Serial Number Process Has
21. orage conditions 2 3 Electrical data 2 3 1 Electrical supply 2 3 2 Output signal 2 3 3 Gauge and degas enable 2 3 4 Set point 2 3 5 Gauge identification 2 3 6 Electrodes 2 4 Materials exposed to vacuum 3 INSTALLATION 3 1 Unpack and inspect 3 2 Fit the AIGX to the vacuum system 3 3 Electrical connections 3 3 1 Connect to BOC Edwards AGC 3 3 2 Connect to your own supply and control equipment 3 3 3 Maximum cable length 4 OPERATION 4 1 Enable and disable the AIGX 4 2 Pressure measurement 4 2 1 Calibration in different gases 4 3 Emission current 4 4 Degas the AIGX 4 5 Over pressure protection 4 6 Filament selection 4 7 LED status 4 8 Set point adjustment 4 9 Error indication 4 10 Bakeout Active Ion Gauge Page m m UI UI UI U Di Wb Wb VS SS CON NNN CO 11 11 12 12 14 14 14 15 15 15 16 16 Section Title Page 5 MAINTENANCE 18 5 1 Fault finding guide 18 5 2 Replace the body tube 19 5 3 Replace the internal fuse 19 5 4 Calibration service 20 6 STORAGE AND DISPOSAL 21 6 1 Storage 21 6 2 Disposal 21 7 SPARES AND ACCESSORIES 22 7 1 Introduction 22 7 2 Spares 22 7 3 Accessories 23 RETURN OF BOC EDWARDS EQUIPMENT Illustrations Figure Title Page 1 General view of the AIGX NW25 version 3 2 Dimensions mm 6 3 Schematic diagram of recommended electrical connections 9 4 Pressure output signal of AIGX 13 5 Separate the electronics housing from the body tube 17 6 Fuse replacement 20 Tables Table Title Page
22. pplied accurate information in this Declaration have not withheld any information and have followed the Return of BOC Edwards Equipment Procedure HS1 a it hel the signed form as hard copy Note Please print out this Signed P900 71 000 Issue K This page intentionally blank P800 80 000 Issue K 01A09 010 EUROPE UNITED KINGDOM BOC EDWARDS Manor Royal Crawley West Sussex RH10 9LW Tel 44 1293 528844 Fax 44 1293 533453 AMERICAS USA HEADQUARTERS BOC EDWARDS One Edwards Park 301 Ballardvale Street Wilmington MA 01887 Tel 1 978 658 5410 Toll Free USA only 1800 848 9800 Fax 1 978 658 5410 3901 Burton Drive Santa Clara CA 95054 Tel 1 408 496 1117 Fax 1 408 496 1118 1810 West Drake Drive Suite 101 Tempe AZ 85283 Tel 1 480 777 7007 Fax 1 480 777 2244 4117 Commercial Center Drive Austin TX 78744 Tel 1 512 416 0102 Fax 1 512 328 9846 3501 Island Avenue Philadelphia PA 19153 Tel 1 215 365 8653 Fax 1 978 756 6846 U S National Sales Center Mon 8 30 A M 8 00 P M EST Tues 8 30 A M 8 00 P M EST Wed 8 30 A M 8 00 P M EST Thurs 8 30 A M 8 00 P M EST Fri 8 30 A M 6 30 P M EST BELGIUM BOC EDWARDS Bergensesteenweg 709 B1600 Sint Pieters Leeuw Brussels Tel 32 2 363 0030 Fax 32 2 363 0064 BRAZIL BOC DO BRAZIL LTDA Rua Bernado Wrona 222 02710 Sao Paulo SP Brazil Tel 55 11 3952 5000 Fax 55 11 39
23. t the NW25 flange of the AIGX to a similar flange on your vacuum system Note OT rings are not recommended for systems where UHV pressures are required Electrical connections WARNING The AIGX must be connected to an earthed grounded vacuum system For gauges with a NW25 flange a conductive metallic clamping ring must be used WARNING If the AIGX malfunctions the AIGX pressure output may be incorrect If such a failure could result in damage to equipment or cause injury to people you must install a suitable control system to indicate the failure and if necessary to close down your process system 3 3 1 3 3 2 Connect to BOC Edwards AGC Connect the AIGX to the AGC using a cable which is terminated in suitable connectors Suitable cables are available from BOC Edwards Refer to Section 7 3 Note Your AGC must have a version of software that is compatible with the AIGX If the AGC display shows when the AIGX is plugged in then an upgrade to the AGC software is required Please contact BOC Edwards Note For cable lengths exceeding 10 m cables with a larger conductor cross section are required Connect to your own supply and control equipment Note Do not connect the electrical supply common pin 2 to the signal common pin 5 If you do the AIGX pressure output signal will be inaccurate A schematic diagram of the recommended electrical connections to the AIGX is shown in Figure 3 The pins on t
24. turn of BOC Edwards Equipment Procedure INTRODUCTION Before returning your equipment you must warn BOC Edwards if substances you used and produced in the equipment can be hazardous This information is fundamental to the safety of our Service Centre employees and will determine the procedures employed to service your equipment Complete the Declaration HS2 and send it to BOC Edwards before you dispatch the equipment It is important to note that this declaration is for BOC Edwards internal use only and has no relationship to local national or international transportation safety or environmental requirements As the person offering the equipment for shipment it is your responsibility to ensure compliance with applicable laws GUIDELINES Equipment is uncontaminated if it has not been used or if it has only been used with substances that are not hazardous Your equipment is contaminated if it has been used with any substances classified as hazardous under EU Directive 67 548 EEC as amended or OSHA Occupational Safety 29 CFR 1910 If your equipment has been used with radioactive substances biological or infectious agents mercury polychlorinated biphenyls PCB s dioxins or sodium azide you must decontaminate it before you return it to BOC Edwards You must send independent proof of decontamination for example a certificate of analysis to BOC Edwards with the Declaration HS2 Phone BOC Edwards for advice If your equ
25. ure from the set trip switch and immediately depress the switch as many times as required Each depression will increase the set trip voltage by approximately 10 mV Refer to Section 4 2 to determine the operating voltage which corresponds to a given pressure If required the set point signal can be used to indicate when the gauge is operating correctly Adjust the set point trip level to gt 8 8 V The set point output will then be ON when the AIGX is operating normally The set point output will be OFF if the gauge is disabled or if an error condition is detected Active Ion Gauge 15 4 9 4 10 16 Error indication If an error occurs during operation of the AIGX then the output signal and the LED will indicate the error Refer to Section 5 1 for a fault finding guide Error Condition Output Signal LED AGC Display Emission error 9 5 V Red flashing EM ERR Over pressure trip 9 7 V Red OVERR Table 5 Error indication If an error is indicated then the AIGX will automatically turn off You should disable the AIGX to remove the error indication and correct the error You may then re enable the AIGX if required Note If you are using the AIGX with an AGC then the AGC will display an error message and disable the AIGX when an error occurs In this case the LED status will return to OFF and you should view the AGC display to determine the error Bakeout The AIGX tube can be baked to temperatures up
26. y a C S ES JE Of ele Je Sch 2 ONS SS Alnfnnannn ALLS 1 Fuse holder 2 Shrouded earth socket Figure 6 Fuse replacement Calibration service A calibration service is available for all BOC Edwards gauges Calibration is by comparison with reference gauges traceable to National Standards Contact BOC Edwards for details Active Ion Gauge 6 1 6 2 STORAGE AND DISPOSAL Storage Return the AIGX to its protective packaging and store the AIGX in clean dry conditions until required for use Do not exceed the storage temperature conditions specified in Section 2 When required for use prepare and install the AIGX as described in Section 3 Disposal Disposal of the AIGX in accordance with all local and national safety and environmental requirements Alternatively you may be able to recycle the AIGX and or cables contact BOC Edwards or your supplier for advice also see below The AIGX and associated cables are within the scope of the European Directive on Waste Electrical and Electronic Equipment 2002 96 EC From August 2005 BOC Edwards will offer European customers a recycling service for the AlGX cables at the end of the product s life Contact BOC Edwards for advice on how to return the AIGX cables for recycling Active Ion Gauge 21 7 SPARES AND ACCESSORIES 7 1 Introduction BOC Edwards products spares and accessories are available from BOC Edwards compan
Download Pdf Manuals
Related Search