Operating Instructions - University of Notre Dame
Contents
1. 9 Rev 1 2 10 3 1 2008 Recipe Creation and Downloading Note A multi step recipe will be built with this procedure You may add or omit portions of this procedure to accommodate your desired process 1 Enter the Recipe screen a Click on the button at the bottom of the screen labeled Recipe 2 To create a XTC controlled process recipe a Click on Edit Create under Termination Configuration i The XTC Configuration window will open b Enter appropriate process parameters i Rise Time 1 Soak Power 1 and Soak Time 1 combined with Rise Time 2 Soak Power 2 and Soak Time 2 will define a pre deposition power profile 1 This type of profile can be use to help remove oxide build up on the surface of the source material and to ensure a proper melt has occurred prior to the actual deposition 2 The following chart demonstrates an example of a pre deposition power profile with the following parameter settings a Rise Time 1 00 45 b Soak Power 1 35 0 c Soak Time 1 1 00 d Rise Time 2 00 30 e Soak Power 2 40 0 f Soak Time 2 00 30 g Atthe completion of Soak Time 2 the process will go into rate control as defined in the Deposition Rate A s box 3 Tooling Factor 1 and Tooling Factor 2 should be set to 87 if using the dome holder in chamber 1 the lower chamber 4 Final Thickness should be entered to desired final th2. minutes time 10 31 2008 10 11 12 13 14 15 16 17 18 19 You may insert your substrate at this time After you are complete with inserting you substrate close and latch the doors Click on the Recipe button at the bottom of the software screen Click on Edit Create under Master Recipe Click on Open under File Options a File selection window will open Select AutoPump dat and click open a File selection window will close and AutoPump dat should be listed in the Master Sequence List b C ACIMPLICITY Integrity_36 Master_Recipe AutoPump dat should be listed in the Master Recipe File Name box Click on the Download button Click on Close to close the Master Recipe Builder window Select the Overview screen by pressing the appropriate button at the bottom of the screen Click on the Start button at the top left of the Overview screen a The AutoPump recipe will start to run Beam Positioning and Sweep Setup RS 11 12 13 Keith Darr Rev 1 2 10 31 2008 Ensure that the key on the sweep controller is in the off position Enter the overview screen on the computer Change the operation mode of the software from Auto to Manual a Click on the Manual button on the top left of the screen i Manual button will turn green and Auto button will turn gray Click on the gray E Beam Status amp Con
3. value less than le 4 or N XTC FILE You only need to enter the 3 digits Crucible Number 1 6 Sweep Pattern Number 1 4 a Default is channel 1 if sweep controller is in manual Process gas flow a Fixed SCCM or PID Pressure in Torr i 0 100 SCCM Nanopositioner XYZ a Inum b X amp Y axis 0 100 000um 11 c Z axis 0 10 000um iii Click Save As 1 Dialog window will open 2 Name must be 7 or less characters with no special characters 3 Click Save a Box will open indicating File will be saved as i Click OK 4 Tocreate an Auto Heat Configuration recipe a On Recipe main screen click Edit Create above Heat Subroutine i Auto Heat Configuration dialog box will open ii Enter desired heat in Heat Setpt box 1 Value in degrees Centigrade 2 Value must be less than 130 C or damage to crystal monitor may occur ili Enter Soak Time in appropriate box 1 The heat subroutine will run for this time after it reaches the desired set point iv Click Yes or No selection box if minimum vacuum required prior to heat subroutine begins 1 If yes is selected enter desired pressure in Torr a Example i le 4 Note PID settings are only available in manual operation v Click Save As 1 Dialog box will open where file name may be entered a File name must be seven characters or less with
4. Thin Film Deposition Using The Denton Explorer 14 E Beam Evaporator University of Notre Dame Department of Electrical Engineering Nanofabrication Facility This user manual is not to be removed from 247 A downloaded copy can be obtained from the web at the following link http www nd edu ee ndnf or contact Keith Darr for a copy of this manual Purpose The Denton Explorer 14 Thin Film Coating System located in the University of Notre Dame s Nanofabrication Facility 247 Fitzpatrick Hall is used to deposit high quality thin films for use in semiconductor manufacturing The Explorer 14 is a fully automated vacuum deposition system equipped with an XYZ Piezo Nano Positioner stage for use in precision photolithography free nano scale patterning This system is capable of MFC controlled reactive depositions as well as PID regulated heating Reference Documents Denton Vacuum Explorer 14 Operating Manual Denton Vacuum LLC 2005 Model TT 8 Electron Beam Source Power Supply Instruction Manual Telemark 2004 Operating Manual XTC C XTC 2 Thin Film Deposition Controller Inficon 2001 Electron Beam Source XY Sweep with Memory Module Instruction Manual Telemark 1998 Additional Equipment Required None Materials Required Substrate to accept film deposition Protective Equipment Required Safety glasses Latex Gloves Engineering and or Administrative Controls Only authorized users may operate this piece of equi
5. gard any channel selection and default to the settings on the Control section ii Typically a single sweep pattern will suffice for similar materials b Center the beam in the source by moving the joystick around slowly c Switch the mode switch Spiral Triangle Manual to the desired pattern i Adjust the beam pattern using the Lateral and Longitudinal controls for the desired sweep pattern 1 The Mod Amp is only used for the Spiral mode a It is used to adjust the depth of the spirals collapse d The control section is now programmed aoe 20 If more than one sweep pattern is desired for multiple deposition material a Ensure that the Sweep Select section s Manual Auto switch located on the far right bottom is in the manual position i If itis in Auto change it to Manual b Rotate the 1 2 3 4 Select knob to the desired channel position c Switch to the desired channels mode switch Spiral __ Manual to Manual i This is a 3 position switch The center position is the Triangle mode however there is no space for labeling d Change the Control Sweep Select switch to Sweep Select e The beam position can now be adjusted by using the Lat and Long Pos knobs i Adjust the beam pattern using the Lateral and Longitudinal controls for the desired sweep pattern f Switch the mode switch Spiral Triangle Manual to the desired pattern i Adjust the beam patte
6. ickness Keith Darr 10 Rev 1 2 10 31 2008 9 10 11 12 13 14 15 Density g cc and Z Ratio should be set for applicable material a Chart is available on computer desktop for density and Z ratio Sensor Source 1 Crucible 0 a Does not need set in an XTC recipe it will be defined in the Deposition Configuration recipe Control Gain 0 001 Control TC 0 1 Control DT 0 1 Max Power 50 Sample 1 Hold Time 00 00 New Rate Rate Ramp Time and Idle Ramp do not need defined ii Once all parameter have been set Click Save As 1 2 A dialog box will open where the file name can be entered The file name must take the form a XTC HH DAT i Where are three numbers 000 999 ii Please select a set of numbers that are not in use unless you are redefining the parameters in a known recipe iii Remember this file name you will need to reference it in future recipe definitions b A dialog box will open stating i File will be saved as 1 Click OK 3 To create a Deposition Configuration recipe a Click on Edit Create above Deposition i The Deposition Configuration window will open ii You will be able to set process criteria in this window Keith Darr Rev 1 2 10 31 2008 1 RR Process Heat Minimum Vacuum Required a Y amp
7. ide x 14 deep 9 Chamber 2 18 high x 14 wide x 14 deep 10 Inficon BPG 400 Wide Range Pressure Sensor 11 Dell Computer and Flat Panel Monitor 12 MKS Mass Flow Controller 13 GE programmable logic controller 14 GE Cimplicity HMI software 15 Telemark X Y Memory sweep control Standby Conditions 1 On Telemark TT 8 controller a Key in the OFF position b Remote Loc Hand switch in REMOTE position c Bias switch in ON position 2 On Telemark XY sweep controller a Control Sweep Select switch in CONTROL position b Power switch in ON position c Joystick in midpoint d Spiral Triangle Manual switch in MANUAL e Manual Auto switch in MANUAL f Sweep Select 1 2 3 4 switch in position 1 g All 4 Channel s Mode Spiral Manual switches in MANUAL 3 Software a Left in Overview screen b System Control in Auto c Under E Beam Control Screen must be in Manual operation mode to verify i Control Mode 1 in XTC ON green Keith Darr Rev 1 2 10 31 2008 Software 1 Overview Six main software screen comprise the ProcessPro Software package a Login i ProcessPro logo in the center ii Start up screen upon computer power up iii No login is needed at this time b Overview i This screen is comprises of the system layout and valve diagram ii Most process parameters are available from this screen c Recipe i This screen show the recipe tree ii It is used to access bui
8. ld dialog boxes for creating automated processing recipes d Alarm View i Allows acknowledgement of system errors e Alarm Recovery i Shows a list of recovered alarms f Datalogger i Opens MS Access ii Most process parameters are stored Access in real time during an automated recipe execution This data can be extracted for manipulation on an external computer Opening the Chamber and Pumping the System Down Pe a Keith Darr Rev 1 2 Verify that the system in Auto on the Overview screen Click on the Recipe button at the bottom of the software screen Click on Edit Create under Master Recipe Click on Open under File Options a File selection window will open Select AutoVent dat and click open a File selection window will close and AutoVent dat should be listed in the Master Sequence List b C CIMPLICITY Integrity_36 Master_Recipe AutoVent dat should be listed in the Master Recipe File Name box Click on the Download button a The gate valve will close at this time and make a noise Click on Close to close the Master Recipe Builder window Select the Overview screen by pressing the appropriate button at the bottom of the screen Click on the Start button at the top left of the Overview screen a The AutoVent recipe will start to run b The vent valve will be actuated automatically c The doors will open after approximately 2
9. m the Overview by clicking on the Start button a Button should turn green and processing will run through completion Keith Darr 13 Rev 1 2 10 31 2008 Jui26 16 17 AUTOPROCESS COMPLETE 2001 Naescpenticns Situs A Comat X Axis 0000 5122 Y Axis 0000 0381 ZAxis 0000 1507 aaas 1 w ARo An P Tt 6 nN Legin Overvecve Reape Mam view aa Fatuo tus DA doge Finar lt Figure 1 Overview Software Screen Main screen for process information and recipe execution Telemark TT 8 10 15 Controller High Voltage and Current Control l LATERAL 1 0 1 Te Ee ONGITUONAL POWER SUPPLY CONTROLLER JHEMARK om z sacr SWEEP SELECT Mitur XY Sweep Controller with Memory Module Sweep Control and Beam Positioning Figure 2 Keith Darr 14 Rev 1 2 10 31 2008 Inficon XTC 2 Deposition Controller Thickness Monitoring and Process Recipe Automation LIFE ZERO XTSW Figure 3 LIFE Displays the percent of crystal life used ZERO Clears the displayed thickness XTSW Changes the active crystal MPWR Places the unit in manual power control or rate control mode START Initiates the sequencing STOP Halts the operation PROG Toggles the display between the program and operate screens ON STBY Switches power of the instrument between On and Standby Green LED Indicates that the unit is set to On ENTER DOWN Cursor control and decreases power i
10. n MPWR 0 N Zero or No also enters communication set up if held during power up 9 Y Nine or Yes used when in program mode CLEAR UP RESET Cursor control raises power in MPWR and resets unit DIGITS 0 9 if the nine key is held during power up LCD segment test Keith Darr 15 Rev 1 2 10 31 2008
11. no special characters 2 Click Save a Dialog box will open indicating File will be saved as b Click OK 5 To create a Master Recipe a On main Recipe screen click Edit Create under Master Recipe b Master Recipe Builder dialog box will open i A single or mulitstep sequence can be built by using the Master Recipe Builder ii A master recipe can be built that has Auto Pump Auto Heat Auto Deposition or Auto Regen for cyro maintenance subroutines or a combination of any or all sequence types c If you need to build a Master Recipe i Click on the pull down arrow next to the Sequence Type box 1 Click on the desired sequence type name on the pull down list a If the sequence type that you need is showing in the Sequence Type box you will need to click on the Keith Darr 12 Rev 1 2 10 31 2008 sequence type name so that the User Defined Sequences list is populated ii Click on the pull down arrow next to the User Defined Sequences box 1 Click on the name of the desired subroutine recipe that you require for you process a The user defined sequence file name should appear under the Master Sequence List 2 Click on the Add button which is below the User Defined Sequences box a Insert can be used to add a subroutine between two previously existing recipes in the master sequence list b Replace
12. pment Training To obtain training on this machine please contact Keith Darr office 221 Cushing phone 631 5497 email kdarr nd edu Problems For problems clarification of procedures or general information pertaining to this machine please contact one of the following personnel Keith Darr 631 5497 kdarr nd edu Mike Thomas 631 7493 Thomas 20 nd edu Mark Richmond 631 6478 Richmond 7 nd edu In Case of Emergency Please Contact Notre Dame Security at MSDS s can be located in the EE Department office or in Room 244 near the door Keith Darr 2 Rev 1 2 10 3 1 2008 Table of Contents Page Contents 4 Authorized Users 5 List of Components 5 Standby Conditions 6 Software Overview 6 7 Opening the Chamber and Pumping the System Down 8 9 Beam Positioning and Sweep Setup 10 13 Recipe Creation and Downloading 14 15 Appendix Keith Darr Rev 1 2 10 31 2008 Authorized Users List Name Email Advisor Date Keith Darr Rev 1 2 10 3 1 2008 List of Components 1 Digital Piezo Controller X YZ Stage interface 2 Inficon XTC 2 quartz crystal rate controller 3 TT 8 Electron Beam Power Supply 4 Cryo Torr 8 cryogenic pump and compressor 5 Varian DS402 rotary vane pump 6 Maxtek MPI 16 crucible indexer 7 Telemark TFI 270 series six pockets 40 cm 3 pocket electron beam gun 8 Chamber 1 30 high x 14 w
13. rn using the Lateral and Longitudinal controls for the desired sweep pattern 1 The Mod Amp is only used for the Spiral mode a It is used to adjust the depth of the spirals collapse g Ifa different material is to be used and a separate channel s pattern is desired the beam must be turned off prior to changing the crucible i Press the XTC 2 handheld button in to turn the beam off ii Press the CLEAR UP RESET button on the Inficon XTC 2 controller 1 This will reset the XTC 2 iii Press the 4 MPWR button on the Inficon XTC 2 controller 1 This will put the XTC 2 into manual power control 2 Ensure that the output power on the XTC 2 reads 00 0 a If it does not press the Reset button again followed by the MPWR button and verify that the output power reads 00 0 iv In the E Beam Control window 1 Click on the number next in the Crucible Control 1 box a Enter the desired crucible to select the proper material b Hit the enter button i The crucible will rotate to the desired material position v Change the 1 2 3 4 Select knob to the desired channel and repeat the setup procedure for this channel 21 Turn gun current and high voltage off after beam position and sweep patterning setup is complete a In the E Beam Control window toggle the Emission HV Pwr and System Power buttons off 22 Return the system to Auto in the Overview screen Keith Darr
14. trol tool bar a The E Beam Control window will open up In the E Beam Control window a Make certain that the following conditions exist i All four System Enable buttons are off grayed out 1 If any are green click on them to turn them off ii Control Mode 1 in XTC green b Click on the number next in the Crucible Control 1 box i Enter the desired crucible to select the proper material ii Press the enter button On the sweep controller turn the power ON Set the Control Sweep Select switch to the control position Set the joystick to the midpoint position Set the Spiral Triangle Manual switch to the manual position Adjust the joystick so that the position indication LEDs are centered Turn the key to the ON position On the software in the E beam control window a Enable system power by clicking the ON button i Button should turn green Wait 30 seconds 14 15 16 17 18 19 Keith Darr Rev 1 2 10 31 2008 a This allows time for the air interlock switch to close Click on the Reset button in the E Beam Control window a A series of LED will illuminate on the HV amp Emission control module i Air Cab Vac Tank Aux under the High Voltage section ii HVAC Water Aux2 under the Source 1 section b This clears and initializes all hardware interlocks c If any of these LED do not stay lit the system will not allow the high voltage po
15. wer supply from energizing Contact lab staff Enable High Voltage power by clicking the ON button next to HV Pwr in the E Beam Control window a Button should turn green b The LCD should read around 8 50 DC Kilovolts on the High Voltage Control module Press the CLEAR UP RESET button on the Inficon XTC 2 controller a This will reset the XTC 2 Press the 4 MPWR button on the Inficon XTC 2 controller a This will put the XTC 2 into manual power control b Ensure that the output power on the XTC 2 reads 00 0 i If it does not press the Reset button again followed by the MPWR button and verify that the output power reads 00 0 c Emission control will be able to be increased by the hand controller at this time While looking through the chamber view port slowly start to increase the emission current until there is a very light beam visible in the crucible a If the beam is visible with no increase of emission current power then do not increase it at this time i You only need to be able to see the beam at this time Keep the emission current very low You only want to be able to see the beam at this time Do not cause the source to start to get hot enough to evaporate e Do not exceed 30 millimaperes as read on the Source 1 LCD If only one sweep pattern is desired then all position and beam patterning can be performed using the left control section i The recipe will disre
16. will replace the selected existing subroutine in the master sequence list iii To add another subroutine to the Master Recipe being built 1 Click in the white space just below the file name that most recently was added to the master sequence list a The blue selection bar will move to the next sequence order position in the master sequence list 2 Perform the steps required to add a subroutine to the master sequence list iv When all desired subroutines are added to the master sequence list 1 Click on the Save As button a The save new master dialog box will open b Enter a master recipe file name c Click on the Save button i A dialog box will open indicating User chooses to save file as 1 Click on OK ii If the file name exists already you will be prompted to replace the file d The master recipe file name will be displayed in the top box on the Master Recipe Builder 2 Click on the Download button a This sends the sequence to the PLC for processing b If the first step to the master recipe is an AutoVent recipe the gate valve will automatically close now A loud sound should be expected this is the gate valve operating 3 Click on the Close button at the bottom left of the Master Recipe Builder 4 Return to the Overview screen by clicking on the appropriately labeled button at the bottom of the screen 6 Execute downloaded Master recipe fro
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