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NC Linear Scale Systems

1. e ST422 10 to 350 Adhesive fixing type e 51422 400 to 3000 Eu uu iu Ui ue ee Koc EM NM ee MET Unit mm v TR i Yu Cable clamp Cable clam 3 5x6 slot z 10 0 4 Z p g3 5 Fa exposed portion of cable and cable d a posed portion of cable and cable clamp Exposed portion of cable and cable damp n Always ground to the machine using 13 540 2 2 i Always ground to the machine using 10 5 0 2 i s T the cable clamp 15 Scil reference point gp the cable camp 15 j Cable clamp Direction to insert cable 1 2 48 E 50mm pitch e Directi to ction to insert cable 1 2 1 8 i 0 05 A g 10 1
2. 1 Pra s Mounting block Mounting block oa a Mounting block Mounting block Fm I i E 1 Mounting block Fb Fe Aluminum frame surface Elastically secured portion Riidy Elastically N Elastically secured portion FLOAT fixed portion secured portion Air purge M5x5 M th leas m a 520 2 640 2 620 2 6 M6 z Cia ative tolerance x E socket headed screw M4x25 R3 5 n ay for Ls and Le 303 a Scale unit JIOR small round plain washer spring washer H E f 1 1 4 NIP eel us a A Vertical direction d II g pa E D XE TES E s mi 2 jai ay x 99 5 through hole longitudinal li alt Iz amp Step between detector head S Mounting mating surface 5 E Es e Detector headh and mounting block MOP P 4 E 2 0 ABS zero point base position Vertical direction Ss Longitudinal direction iu SE Effective range Lo M Maximum travel length L li EE 13 4 pa os 03 H 6 indicates the machine guideway 3 Head cable 2 P indicates t
3. fo Detector head mounting surface i E T E a o i9 I zssscure X We D S 5 g i toya UNEAR SCRLE woo AT353 B X a o Oo ILL A i T fsa ig G Machine guideway Machine guideway 0 i i 011A 0032 90 Effective range Lo Flexible metal type ls Maximum travel length Li rir o2 G ES e ERE 4 o o View from X direction Bee NN f icy E N miea Scale unit mounting surface ABS AT343A signal cable y s EXHS Signal cable Z ot T PVC sheathed type LE 42 The signal cable has set options Part No 09BAA598A C 0 2m 2m 3m Overall length L2 Effective range 300mm to 3000mm Mounting block fixing pitch Ls ge Air supply hole M5 Mounting block fixing pitch La ounting block fixing pitch La z r su 5 AHYe at bor E dj de cea 80 4 d Elastically secured Mounting block Elastically secured portion TOY 23 wn 60 0 2 Ww portion Rigidly fixed porti T rl AE o gidly fixed portion E T Y f a un H F in EIS
4. Unit mm 29 Q Mounting 5 Mounting block Mounting block EE Mounting block bloksufae S N Mi ER Mounting block S Elastically secured portion Rigidly fixed portion Tiatia ly secured portion Elastically secured portion 24 6 Hex socket headed screw M4x25 small round plain washer spring washer 43 L 4 3 3 03 Sp Aluminum L9 11 6 Ki E tame surface 120 2 74 5302 5 Air purge M5x5 ms I 9 Scale unit Cumulative tolerance 7 0 05 1000 hus n 0 1 R for Ls and Ls 0 3 Both ri a mam i Vertical direction ze EEEE D T L3 EM EE 03S SS m D 5 peee ji i c Pl a Longitudinal 99er i through hole g8 countersunk depi iti 16 01 22 a Longitudinal ug 32 6640 2 Hex socket headed screw M4x25 Base positon Step between detector head 44 97 5 through hole En Bt 84 small round plain washer spring washer and aluminum frame Mounting g14 countersunk depth 9 5 Ss 92 Detector nead S mating surface Hex socket headed screw M6x25 i SR Ef
5. Maximum effective length lszlo10 spring washer and flat round washer Effective range Lo R Surface of aluminum frame L 2 465 Il o1 G 0 05 500 EIUS 35 P100 0 2 6 hole through hole Aluminum frame IL I te I ee 9 9 I EJ e jl E M ee X sled m JL Jl Els S 4 JL JI P Mitutoyo WELW I I es F e a Ji Ji Se 4E D itudinal directi Oru E 2 QUT SE y ongitudinal dire sl Y 2 ren Ep in 25 40 02 Detector head 90 19 1922 Effective range Lo 97 through hole Bid Overall length Liz Lo 119 g 5 2 Zi vm pe m x z100 EI 1006 E008 ZPn 10 0 02xn Absolute inienial Cod 2 7P 20 7 20 z 20 zP 20 7P 20 BOUE eee gt a as a e s gt P Mounting mating surface 2xM5 depth 5 10 1 G 7630 2 T 70 05 500 2 lt g p o n ce Notes 1 G indicates the machine guideway 2 P indicates the mating surface for mounting the aluminum frame S indicates the mating surface for mounting the detector head
6. 3 am Y VI Wem uim e i T dis 46 3 _ 10 i e el 1 5202 g ul a ani in L Countersunk depth 6 5 TOTTA J sagas G Machine guideway Signal cable 10 je 02 G ee f 3 i Te a e ie Detector head mounting surface Scale unit is Mounting surface JH x2 View in X direction 3 Order No Code P Ese em eeu yoni oe t A La mm Ls mm Le mm 539 411 30 AT203 100 100 120 248 268 539 412 30 AT203 150 150 170 298 318 539 413 30 AT203 200 200 220 348 368 539 414 30 AT203 250 250 270 398 418 539 415 30 AT203 300 300 330 458 478 539 416 30 AT203 350 350 380 508 528 539 417 30 AT203 400 400 430 558 578 539 418 30 AT203 450 450 480 608 628 539 419 30 AT203 500 500 540 668 688 539 421 30 AT203 600 600 650 718 798 539 423 30 AT203 700 700 760 888 908 539 424 30 AT203 750 750 810 938 958 539 425 30 AT203 800 800 860 988 1008 539 426 30 AT203 900 900 960 088 1108 539 427 30 AT203 1000 1000 1060 1188 1208 594 539 428 30 AT203 1100 1100 1160 1288 1308 644 539 429 30 AT203 1200 1200 1260 1388 1408 694 539 430 30 AT203 1300 130
7. Mounting block Zr Q Mounting block surface NL 17 E Mounting block Mounting block LL i E ee I 77 gi E H b Mounting block Rigidly fixed portion R Aluminum frame surface Elastically secured portion Elastically secured portion OG 43 0 05 1000 b 43 Air purge M5x5 8 Ere ji Both 4 T 67 54 Ls Leso2 24 6 E 3 Cumulative tol m Hex socket headed screw M4x25 2 SI 3 s E Bem i Edi GM JOR 5 round plain washer spring washer Vertical direction Wels 8 d k n a EE c EE ESS EE Qa 236 Z 09 5 through hole de 5 e Step between 5 Mounting mating surface Base position tal EE NEC Detector head detector head HOA Longitudinal Mg E _ 84 __ ABS zero point base position and mounting block Vertical direction direction 22 92 Longitudinal direction Gm Effective range Lo Maximum travel length Li e A a L8 Head cable 65 8 23 1 Interface box gt TL Note Not waterproof Head cable eles m s DL SG M6 through hole l5 sii ASH di qm 45 M2 Hex socket headed screw M4x20 3 arm Oisptoy Small round
8. ABS AT553E AT543E Unit mm 50 L 3m 43 15 Round waterproof connector L 2m LRL I5 P u E 7 d 7 Heat cable minimum bend radius R 50 fixed R 100 moving Signal cable minimum bend radius R 50 fixed R 100 moving PVC sheathed PVC sheathed 194 0 8 103 13 4 80 3 p SE SS es i j i m E mL cE Al 45 7145 e 2xM6 through hole Hex socket headed screw M4x20 small round plain washer spring washer Alarm display LED ABS AT555A AT545E RM 5 5 80 23 1 h P 33 maru sam undo oar o G xS r E JL s tS HIS te WES LE non sn Q p g g D sub 15 pin socket type 68 4 2xM5 through hole Hex socket headed screw M4 x20 spring washer j gt 3 m 2 E qt A S 5 4 HE 2 T CREE CET n d E E Sa ic Head cable 2 m Mounting dimensions HC Type Resolution 0 05um Unit mm
9. ATS43A 11 ATSO3A 11 64 Mounting dimensions HC Type Unit mm 29 Q Mounting block o Mounting block Mounting block in Mounting block Mounting block surface S x P mpm Mounting block PII iad ciara surse Elasticaly secured portion Ejastically secured portion 0 1 G Rigidly fixed portion 4 3 7 0 05 1000 s 43 8 L3 0 3
10. 29 Unit mm 87 Q Mounting block Mounting block Mounting block E Mounting block Mounting block surface cB Z7 Fat 787 T Mounting block gl Rigidly Elastically Elastically R Annur frame surface fixed portion secured portion secured portion 10 1 43 10 0 i 000 b 43 8 10 3 La 0 3 94 6 165 Sg Ls 0 2 Ls0 2 Lot 0 2 E m m m M4x25 Alt purge Vox s a y Njo small round plain washer H B eM x ki 3 emulate totae k 3 Scale unit ZOR spring nashe ai Fg 3 A y 7 p oo 7 t f m 2 Vertical tei ND Mag HE E a UC a 91 5 through hole MEAM E cu a A 6 through hole a8 countersunk depth 5 3 14 k depth 9 5 ZNA Hex socket headed screw M4x25 16 01 22 J countersun ep Longitudinal epe Be small round plain washer spring washer E Hex socket headed screw M6x25 direction xj g5 90 02 N P spring 24 gx 84 Detector head Step between detector lt small round plain washer spring washer Es 92 ABS zero point base position head and aluminum frame S Mounting mating surface aes pons 5e p OTP 38x ective range Lo Vertical direction Interface box Maximum travel length Li ungue C Note Not waterproof 80 23 1 Alarm Em LED
11. e 10 to 80mm Adhesive fixing type e 100 to 3000mm Unit mm a ST i 100098 j ET 8 1 c tH S Lam m 2xM3 depth R Fd m Scale reference point signal output position 2xM3 depth 6 zs Et 2 32301 d And subsequent separate points with 50mm pitch 2 32201 a 16 520 1 T Scale ref int i Overall length Lz 11 07 Ra sna ouput ttn 36 _ mom oa 5928 0 Effective range w BA E EM Mounting surface E E i F Mounting surface 2 NE 2xM3 depth 6 m c oe E 2 T m L m 7 i m a Effecti x it A fective range Li Overall length L2 28 2 e 5 e amp m H l 09 Scale retaining spring A i N 48 710 0216 G Machine guideway 1 Scale fixing pitch Ls Scale fixing pitch Ls Scale retaining spring B Am d 0 0216 Lig Y G Machine guideway VES au TEX ale Sl Em EM IL i Head cable im a Be a 3 I H For information on fixing methods for adhesive fixing type High flex 16 SL S L see Handling linear scales Mounting scales on page 82 Up to 5m available as custom order um z gi ic Head cable can be separated from UF box by removing 6840 2 u cable flange screw and VF cover screw s 10 to 80mm With base Special Specification 2xM5 thr
12. 2xM6 depth 8 T groove nut Cable connector Mounting block Fixture for transportation Rotational freedom 260 Rotational freedom 3609 wo i O wi 9 L wi 0 cx CO l T a T ci c3 z E m a EN c4 de xj m FI A o N Y L Alef E LJ 2xM6 3x7 hole countersunk 11 depth 6 5 i depth T0 Ao 25 T TOG us _ 2x7 hole 20 mino B E 25 Countersunk 211 max L1 7 47 17 epth 6 BINE Scale reference points are output Signal cable starting from here at 50mm pitch S 4 Eo cay ld min 015 _ 910 5 max Lo Mitut j Dimensions of scale units AT181 Effective range Maximum travel length Mounting hole pitch Unit frame length Signal cable length Order No Code Lo mm Li mm ir inm L3 mm m 539 301 AT181 100 100 130 255 270 539 302 AT181 150 150 180 305 320 539 303 AT181 200 200 230 355 370 539 304 AT181 250 250 280 405 420 539 305 AT181 300 300 330 455 470 539 306 AT181 350 350 380 505 520 3 539 307 AT181 400 400 430 555 570 539 308 AT181 450 450 480 605 620 539 309 AT181 500 500 530 655 670 539 310 AT181 550 550 580 705 720 539 311 AT181 600 600 630 755 770 Note 1 We have no high accuracy AT181F JIS Class 0 3 3L0 1000 um models Note 2 The accuracy does not
13. at MSx0 8 ui Fixed reducer external dimensions 18 119 6 Linear scale 58 40 B un Fixed red ixed reducer 9 TEL HH T joint IN Linear scale Eust s si SP a Piping tube SRT M lee OUT diameter H j Qu Tube g6 l Piping tube LJ Y diameter Special included accessories Air unit main unit specially ordered product Start supplying air to the scale approximately 30 minutes prior to the start of processing We also recommend that you continue supplying air for approximately 30 minutes after processing is finished as this will provide more favorable results For details contact your Mitutoyo sales representative Fixed reducer T joint Tube 06 Fixed reducer dryer oll mist fiter Main air unit No Name Specifications 1 Air dryer 2 Air filter Maximum particle diameter nominal filtration rating bum 3 Oil mist filter Maximum particle diameter nominal filtration rating 0 3um Secondary oil concentration 0 1mg m igh efficiency Nominal filtration rating 0 01 1m oil removal ratio 99 999 mist filter Secondary oil concentration 0 01mg m egulator Set pressure 0 1 to 0 7MPa xed reducer Flow rate when pressure is 0 1 MPa 12 7L min Itutoyo specified fixed reducers
14. e 10 to 80mm Adhesive fixing type e 100 to 3000mm Unit mm Toner i mis wot tel it aay 5 as ds 3402 INS M depth 4 1732802 2xM3 depth 4 16 940 1 Tn 14 940 1 Overall length Lz 0 03 0 6 c 0 03 A 11 5 0 6 20 Effective range Li 20 HIO OT5IA ke Head center point at scale reference point signal output oM E 1d 2 Hole fo adjusting pin impe n E Center of detector L2 92 Hole for adjusting pin enter of detector oo 2XM3 depth 4 F gee Lg 2xM3 depth 4 o 3 NE er VA S ur i o X oo Exenur 7 E EET col A Paj ER i a 5 j ji mr L DE o 19 gH ae BEEP E Li Effecti 1 i ls ls 48 CTT E G Machine guideway NO y P G Machine guideway amp Pa 35 E H 25 02 5 al Emma x ask e 3 a el gt 5 mi Ezm 2x45 4 6830 2 Scale retaining spring A 2xM5 through hole 5 80 35 2520 2 5 i a CE eT Head cable 1m High flex 2x045 Up to 2 5 m available as custom order Scale retaining spring B Dimensions of scale units Scale Scale Effective Overall z T Effective Overall z A e Order No Code range length bu Em EUR Order No Code range length As EN EXE Li mm L2 mm L3 mm Li mm L2 mm an 579 501 0L1 ST36Q 10 10 30 579 518 0 ST36 900 900 940 90 1pc 10pcs 579
15. e e e O E Connector and indicator functions Dimensions Unit mm A T No Name Function Fe E 1 CAL light Typically not used 2 ALM light Turns on when broken wires or short circuits are detected or when a signal 2 abnormality is detected 3 0 S light Turns on when over speed is detected un ang 4 PWR light Turns on only when power is supplied to the PSU Power is supplied at wr 5VDC from an external device 7 alt ls 5 PZ light Turns on when the scale goes past the reference point Hg zs 6 PE light Turns on when the 5VDC power supply voltage from the external device a i decreases or if noise is detected H 7 INPUT connector For connecting to the linear scale 8 OUTPUT connector Output connector for connecting to an external device 9 Specifications Item Details of function ud Number of axes 1 axis Input connector DA 15S NR JAE or equivalent Input Input signal 2 phase sinusoidal signals and standard voltage 8 Reference point signal scale alarm signal Output connector MR 20RM Honda Tsushin Output Output signal 2 phase square wave signals Phase A Phase B reference point signal Phase Z Alarm signal alarm reset signal photocoupler Number of divisions 4 8 10 20 40 80 100 200 chosen with switch Setting the number of divisions setting the minimum edge interval and maximum response speed
16. i 0 1 A mH Air supply hole M5 G Machine guideway On both sides 2xM6x1 0 through hole 94 99 both sides countersunk depth 4 5 Effective range Lo Maximum travel length Li Coil spring Head cable L 0 3m or 1m a Possible to mount scale unit on this surface y Reverse mounting direction 2xM4x0 7 depth 5 8010 2 01 G L 0 03 100 e Scale unit mounting surface Standard mounting direction Flexible metal conduit Signal cable Lis 3 5 or 7m ae Bs BM 414 56 4 ce 9 2 la e aml F e L e IEEE Scale alarm display LED Connector for feedback cable Included accessory User provides the cable and NC side connectors Mounting dimensions for multi point fixing type Sedo Effective range Maximum travel length End surface dimensions Overall length No of SE holes on scale unit Lo mm L mm L mm Ls mm pcs AT211 100A 100 120 19 5 239 3 AT211 150A 150 170 44 5 289 B AT211 200A 200 220 19 5 339 4 AT211 250A 250 270 44 5 389 4 AT211 300A 300 330 24 5 449 5 AT211 350A 350 380 49 5 499 5 AT211 400A
17. Connector socket type RDAD 155 LNA Hirose Electric Connector socket type 10220 52A2VC 3M Applicable plug HDAB 15P Hirose Electric Applicable plug 10120 3000VE 3M Pin No Signal Signal function Pin No Signal Signal function i2 OV Signal ground 1 2 ii Up O Signal ground 3 4 5V Power supply 18 19 20 5V 5V power Am 5 PA Phase A 6 8 10 N C Not used f 6 PB Phase B 7 RQ DT Standard phase request data a i Vref Standard voltage 17 RQ DT Reverse phase request data E R 8 PZ Phase Z 3 PA Test signal o 5 9 AL Scale alarm 4 PB Test signal mm 10 14 N C Not used 5 PZ Test signal 15 EG Frame ground 13 16 N C Not used e Terminal block for input of external power Pin No Signal Signal function 1 35V OUT _ 5V power output 2 5V_IN 5V power input 3 OV Signal ground 4 EG Frame ground When using the power supplied by the servo amplifier supplied through output connector short Pin Nos 1 and 2 using the attached shorting link Dimensions Unit mm 65 165202 4840 2 6 6 27 ES e ss 3 ms 9 Absolute Scale Unit Scale Format Resolution Applicable Systems 0 005um 2 0 05um Guinea FANUC Ltd NX ABS AT553 Wendie FS i Series POWER Mate i ABS AT555 ABS AT353 ABS ST758 Mitsubishi Electric Corporation T ABS AT543 MITSUBISHI CNC Series Applicable amplifier
18. Reference poin Phase A Voc Ve Output signal pitch 20m Pe Phase B ATON Voc E Vpp 2v Voc V ref Vcc 2 2 5V Phase difference 90 Typ DLT LE Ba Vol td a ta Edge interval resolut PZ Von 2 5V min sf aie Va 0 5V max Resolution Minimum edge interval Code Resolution Minimum edge interval Ke A 100 ns 450 mm s B 0 05 um 200 ns 225 mm s C os 400 ns 112 mm D 800 ns 56 mm s E 100 ns 900 mm s e Olym 200 ns 450 mm s G 400 ns 225 mm s H 800 ns 112 mm s J 100 ns 2600 mm s E AS m 200 ns 2250 mm s L 400 ns 1125 mm s M 800 ns 562 mm s N 100 ns 2600 mm s R ium 200 ns 2600 mm s Q u 400 ns 2250 mm s R 800 ns 1125 mm s S 100 ns 2600 mm s ji TE 200 ns 2600 mm s U j 400 ns 2600 mm s V 800 ns 2600 mm s phase pulse width 0 8x0 4mm n o E c 2 n c S v oO Q c 2 ST46 EZA Scale unit mounting dimensions e Effective range 10 to 80mm No aluminum base e Effective range 10 to 80mm With aluminum base 2xM2 5 depth 3 Unit mm 2xM2 5 depth 3 30 15 2622 7l 95 A 7 0 02 G m 2xM2 5 depth 3 0222 2xM2 5 depth 3
19. e Glass scale type 100 to 1100mm Glass scale total length L Unit mm Glass scale center position Ls Scale retaining spring pitch La Scale retaining spring pitch Ls Effective range Li Glass scale Scale retaining spring B n 50 Scale retaining spring A Mitutoyo 44 02 logo label Alarm LED J S SZ 3 z S U 4 I SIN R I RSE om M T To3 6 ees wa SP ce 0 1 1000 j eao TEN i i G Machine guideway 16 W Head cable length 1m Serial label 2xM3x0 5 depth 3 Ise on count Detector head N J AI a 25 0 4 25 0 4 35 2x04 5 75 35 2x04 5 is Output connector shape e ST788A C Scale retaining spring A Scale retaining spring B Up U i Select Left L LX Right R E Select oes iiir h Standard g _ asoume senes E S S a Comer E ui pens ce P genre Retaining spring spacer Down DES elect Cable outlet diagram ns Distance from scale surface gy Retaining spring spacer 22 5 0 to detector head a 0 05 G J 0 05 1000 Dimensions e Glass scale type 100 to 1100mm 2 Effective range b i No of scale No of scale No of retaining FE Order No Code Li nim nim nim retaining retaining Spring
20. i 8 Q Mounting Mounting block Mounting block ME Mounting block Mounting block block surface 3 7 A l 7 y a 9e Fi p ERN lounting block a Elastically Rigidly asta Elastically xi H minum frame surface secured portion fixed portion secured Horton secured portion 43 0 Air purge M5x5 2 009 1000 2 4 3 8 ERE L4 0 3 Lss0 2 Lss02X n1 Leo2x n1 94 6 3 Cumulative tolerance i Hex socket headed screw M4x25 d pr ay for Ls and Le 0 5 Scale unit rU TOR KE round plain washer spring washer 9 Me oo 3 ty lur d z Vertical direction RE P PK B 3 7 ATE cc r 0955 through hole Longitudinal Fm olo E Cix n x peus S EH 56 uiis Step between detector head Mounting mating surface B 3 E RCM Detector head and mounting block IL 1 P ZEE ABS zero point base position Vertical direction ES 92 n Longitudinal direction SE Effective range Lo 3 Maximum travel length L J 4 La ae 5 5 80 Q3 1 tr a Interface box 9 Notes mE A Note Not waterproof deh 1 G indicates the machine guideway fel cia ead Cable 2 P indicates the mating surface for mounting the unit Zs E HE S indicates the mating surface for mounting the detector head E Lag Alarm display LED 3 Q and R indicate the datum surfaces for mounting this linear scale 2xM5 through hole 68 4 p Mounting mating surface 4 For th
21. 23 uH K ete Tm S Jl o 0 02 G a 4 naar R ais 3 dr a p zm ls n ail EB Effective range Li 3 A Effective range Lt A 4 6 Machine guideway 2 Overall length L2 A 110 02 G Machine guideway Overall length L2 1 10 02 i 2xR2 75 1 0 02 G Adhesive application section 2xR2 75 10 02 6 5 g Use silicon based adhesive co 1 0 021100 G KE441 i a EIE 2 GY e Ora d Ll amp E JT EER a el 2a e G4 2x02 8 4 0 02 100 G 70 02 100 2 04 ERI 38 inj S Scale mounting diagram 51 bad inl recommended method Scale 2 1 Dimensions of scale units 10 to 80mm No aluminum base 10 to 80 mm With aluminum base Effective range Overall length Effective range Overall length L3 L4 Order No Code Li mim l2 mm Order No Code Ls mm L mm mm mm 579 665 12 ST46EZAB 10B 10 30 579 665 13
22. ABS AT545A 40 414 55 80 234 Mane I RO wodnymi e EE 3l ESH jt nas ER e mos CONE D sub 15 pin socket type 68 4 2xM5 through hole Hex socket headed screw M4x20 spring washer 4n 3m Head cable 2m sm 2 o s own 33 gin 5L ot An 2 ara LIL Mounting dimensions SC Type Unit mm 3 8 s s J t i zm lL a LL cit iL HE TN N Rigidly fixed portion Elastically secured portion 48 b 48 Aluminum frame la Ls 0 3 P 0 2xn R surface 3 95 through hole a US 94 5 through hole 28 3 countersunk depth 9 Hex socket headed screw M4x25 E Hex socket headed screw Mdx 16 smal round plain washer spring washer E small round plain washer spring washer Special leaf spring used long dashed double dotted line Aluminum i 20 02 Aluminum frame frame surface Air purge M5x5 v Cni 1 e OMO HOH TOS RT 3 l pi i ji j y E H E Both XR 23 d E Vertical direction IE on
23. a m d g View from X direction of Scale unit Detector head mounting sur Dimensions of scale units UE Effective range Maximum travel Overall length Mounting block Mounting block Mounting block Signal cable length Order No Code Lo mm length L mm haa ea S an m 3 539 143 30 AT103 3250 3250 3350 3470 135 3200 800 539 144 30 AT103 3500 3500 3600 3720 160 3400 850 539 145 30 AT103 3750 3750 3850 3970 125 3720 930 10 539 146 30 AT103 4000 4000 4100 4220 10 4000 1000 539 147 30 AT103 4250 4250 4350 4470 35 4200 1050 539 148 30 AT103 4500 4500 4600 4720 160 4400 1100 539 149 30 AT103 4750 4750 4850 4970 85 4800 800 539 150 30 AT103 5000 5000 5100 5220 120 4980 830 539 151 30 AT103 5250 5250 5350 5470 125 5220 870 15 539 152 30 AT103 5500 5500 5600 5720 130 5460 910 539 153 30 AT103 5750 5750 5850 5970 135 5700 950 539 154 30 AT103 6000 6000 6100 6220 110 6000 1000 Note Accuracy is 5 8L0 1000 um 24 Mounting dimensions Effective range 100 to 1500mm AT 113 sim spar type The scale reference points are output a a 50mm pitch from the end of the effective range Lo which is shown with the M rk Mid
24. Mitutoyo ABSOLUTE Specifications m Code High rigidity type High accuracy type ABS AT505 SC ABS AT505 HC ABS AT505 HL HR Detection method Electrostatic capacitance type photoelectric type composite ABS linear encoder How to mount the scale unit Multi point elastic fixing 3 or 5 point elastic fixing 3 or 4 point elastic fixing End of effective range Base position Midpoint of effective range HL side of absolute value HR side of absolute value Effective range 00 to 2200mm 100 to 1000mm 100 to 350mm Resolution 0 005um 200m 4096 Maximum response speed 150m min 2 5m 5 72m min 1 2m s ke to ERO ERU Thermal expansion coefficient 8 50 5 x 10 C Vibration resistance 196 m s 20G 55 to 2000Hz 147 m s 15G 55 to 2000Hz Shock resistance 343m s 35G half sine 11ms 196m s 20G half sine 11ms Power supply voltage 5VDC 5 Maximum current consumption 270mA Max Maximum sliding force 4N Operating temperature humidity 0 to 45 C 20 to 80 RH no condensation Storage temperature humidity 20 to 70 C 20 to 80 RH no condensation Protection rating Scale unit Equivalent to IP53 I F box not waterproof Alarm indication Scale alarm indicated by LED on I F Box Head cable length 2m Signal cable length 3m Because the 20pm signal is divided by 4096 the actual value is 0 0048828125um When setting the mi
25. 2xM5 through hole 68 4 Hex socket headed screw M4x20 spring washer UT Mounting mating surfac Head cable Notes n 1 G indicates the machine guideway 2 P indicates the mating surface for mounting the aluminum frame S indicates the mating surface for mounting the detector head 3 Q and R indicate the datum surfaces for mounting this linear scale P 0 1G E 0 05 1000 Dimensions Effective range Maximum travel length Overall length Mounting pitch Lo mm Li mm L2 mm Ls mm La mm Ls mm Le mm 100 120 265 249 124 5 150 170 315 299 149 5 200 220 365 349 174 5 250 270 415 399 199 5 300 320 465 449 224 5 350 370 515 499 249 5 400 420 565 549 274 5 450 470 615 599 299 5 500 520 665 649 324 5 E 600 620 765 749 374 5 204 5 170 700 720 865 849 424 5 224 5 200 750 770 915 899 449 5 224 5 225 800 820 965 949 474 5 244 5 230 900 920 1065 1049 524 5 264 5 260 1000 1020 1165 1149 574 5 284 5 290 Codes and Ord
26. 7 ids 25 1 3 NC Linear Scale Systems Overview 8 Palei Gus Uke e amp T ABS ST700 Compact Type Series 47 52 es sls ae ABS AT500 Series 0 005ym 53 60 E ae ABS AT500 Series 0 05um 6 1 68 J ABS AT500E Series 69 76 E PACELTA ee ABS AT300 Series 77 80 0 ely i R Discontinued models and succession models 81 Assembly Type AT Series specification compatibility tables So ee ee ee AT100 23 26 Handling linear scales 82 83 y SO ENO E ATI 31 36 Technical Information 84 86 E AROS SS Sed Linear Scale is a registered trademark of Mitutoyo Corporation for its linear encoder products Absolute Scale Unit Linear Scales from Mitutoyo are traceable to national standards National standard Technical Information Secondary standard Working standard Instrumental error Linear Scale Linear Scale Traceability System Chart Detection Principle ystems Detection principle of the transmission photoelectric scale Assembly Type Linear Scale Collimator lens Glass scale m Light emitting diode Light receiving device 20um graduation pitch i ME 5 Light receiving device LED M 20um Tn N 2 phase sinusoidal signals Y LU ES Light emitting diode Collimator lens Glass scale cs is Resolution 2 phase square wave signals The assembly type l
27. Assembly Type ABS AT Series Absolute Scale Unit Slim Spar Type ABS AT500 Series Resolution 0 005um Featu res ABS AT500 S Series This scale achieves the Absolute Linear Scale s highest level resolution of 0 005 um e The ABS AT500 S Series realizes vibration resistance of 196m s 20G and shock resistance of 343m s ABS AT500 H Series 35G suitable for use with heavy cutting equipment and for high speed machining The ABS AT500 H Series has high repeatability excellent temperature characteristics and enables highly accurate and stable positioning e Slim shape is suitable for space saving designs Compatible with servo amplifiers from a range of companies high speed serial interfaces How to read the code ABS AT5 5D D OD O00 Effective range o i S position the zero elongation point C Midpoint of effective range L End of effective range side end Interface specification Applicable systems Scale code FANUC Ltd control devices FS i Series POWER Mate i ABS AT555 R End n BEEN End of effective range side end itsubishi Electric Corporation control devices MITSUBISHI CNC Series Note Land Rare oniy n iie ide rn type DS D MDS DH Series ABS ATS45 This refers to the fixed point on the scale around which itsubishi Electric Corporation ABS AT545A clamping arrangements ensure that any expansion or R J4 MR J3 Series ABS AT505 contraction due to tempe
28. Step between detector 23 Z5 92 N Detector head head and aluminum frame Effective range Lo E EZ Maximum travel length L 3 3323 Aluminum frame i Stainless steel bushing Ad Os Mounting mating surface 0 1 P Vertical direction 13 4 Longitudinal direction Alarm display LED ial leaf spring Hex socket headed screw M4x25 small round plain washer spring washer nar through hole Te Details of elastically secured portion Hex socket headed screw M4x16 1 G indicates the machine guideway small round plain washer spring washer 2 P indicates the mating surface for mounting the aluminum frame S indicates the mating surface for mounting the detector head P Mounting mating surface 3 Q and R indicate the datum surfaces for mounting this linear scale o 1G 4 For the values of Lo to Ls P n in the figure refer to the table below E 0 05 500 AD Dimensions Effective range Maximum travel length Overall length Distance to center Mounting pitch No of mounting holes Lo mm Li mm L2 mm Ls mm La mm Ls mm P mm n 100 120 225 112 5 375 150 75 2 200 220 325 162 5 Eb 250 125 2 300 320 425 ZS SS 350 175 2 400 420 525 262 5 62
29. 2000 2010 2080 1040 230 579 321 L 8 ST7 lt gt 8 A 2100A 2100 2110 2180 1090 80 579 322 8 ST7 lt 8 A 2200A 2200 2210 2280 1140 10 130 3 579 323 L 8 ST7 lt 8 A 2300A 2300 2310 2380 1190 180 579 324 8 ST7 lt 8 A 2400A 2400 2410 2480 1240 230 579 325 8 ST7 lt 8 A 2500A 2500 2510 2580 1290 80 579 326 L 8 ST7 lt gt 8 A 2600A 2600 2610 2680 1340 12 130 5 579 327 L18 ST7 lt 8 A 2700A 2700 2710 2780 1390 180 579 328 8 ST7 lt 8 A 2800A 2800 2810 2880 1440 230 579 328 8 ST7 lt 8 A 2900A 2900 2910 2980 1490 14 80 7 579 330 L 8 ST7 lt gt 8 A 3000A 3000 3010 3080 540 130 The X code indicates the interface specification 0 4 5 7 8 The Order No and the code indicate the direction of the head cable R L U D The L in the Order No is as described below ST708A 0 ST748A 4 ST748 3 ST758 5 Mitutoyo z Mounting dimensions 42202 Unit s 2xM3x0 5 depth 5 nit mm Scale base type 3200 to 6000mm 3 rot i Sl l z Scale base length Li Scale base center position Lz a eb EE L02 10 44 02 Jd N 3 peu Mitutoyo H ig 3 ie Y gi S S a Ra l CERE
30. E v nn c m lt uan 24 lt Discontinued models and succession models specification compatibility Compatible AN Compatible with limitations X Not compatible Separate type ST scales Output connector Discontinued models Current model Scale grating pitch Ee Accuracy Mounting dimensions specification pin assignment ST31A ST32A ST36A Q O x Q ST33C ST36C Q O e x x ST41A ST42A ST24C O O OQ X x ST41B ST42B ST24C ST24B a O x x ST52B ST422 ST46 EZA OQ G x x ST62C ST422 ST46 EZA Q AU Q x x ST34C ST36C O O O x ST322 S1422 OQ OQ x x ST44B ST44C ST46 EZA Q x Q ST46 ST46 EZA Q OQ e X 8 LHS21 23C None 1 Up down pulse output cannot be supported Assembly type AT scales Output connector Discontinued models Current model Scale grating pitch UNES Accuracy Mounting dimensions specification pin assignment AT2 N 9 Q 9 2 AT2 FN AT1 03 2 o O 2 AT11 N IK e C ES ATTEN ATTE 7 AT12 N oO Z O Hg AT12 ATE Xe O O INE AT81 C AT181 C x O x AT21 C OQ AC IRE x x AT21 cU x ie 79 x x AT25 AT211 x IRE AXE x x AT102 AT103 Q O AT111 AT113 O Q AT212 AT211 Q Q KE x x 2 This can only be supported with an ada
31. Effective range mm 0010 10 0900 900 E Head cable length 0050 50 1100 1100 Code Length 0075 15 1200 1200 e 1m High flex 0080 80 1300 1300 L B 0 5m High flex 0100 100 1400 1400 7 Special length specification max 2 5m _ 0150 150 1500 1500 Note If there are special details please select Z 0200 200 1600 1600 0250 250 1700 1700 0300 300 1800 1800 Alarm output 0350 350 2000 2000 Code Details 0400 400 2200 2200 e Alarm signal 0450 450 2400 2400 H High impedance 0500 500 2500 2500 OZ When Signal output is A or D 0600 600 2600 2600 0700 700 2800 2800 0800 800 3000 3000 Direction Note For the standard specification the indicated effective range depends on the produci code 1 Code Details a m S ective range 10mm everse PB goes ahea Effective range 250mm ST36 0250 Oz When Signal output is A or D Scale reference point Traveling direction of detector head cas basis 4 Reference point track e 50mm pitch 100 to 3000 Q8 Center point 10 to 3000 4 Special position specification Note For reference positions in the effective range of 10 to 80mm B Center point is the standard specification Resolution Minimum edge interval m Vitine godir 125ns 250ns 500ns 1000ns PB Resolution i 0 01um A 70mm s B 30mm s C 15mm s D 8mm s EN 0 02um E 150mm s F 70mm s G 30mm s H 15mm s PB 0 05um J 360mm s K 180mm s L 90mm s M 45mm s gt e t 0 1 um N 720mm s Q 360mm s
32. are coefficients that are set on each model For example for a linear scale with an accuracy standard value of 3 3L 1000 um and an effective range L of 1000mm a is 6um 2 Note the size of the range between the maximum error and minimum error as a 2 The center value between the maximum error and minimum error is 0 the maximum value is noted as a 2 the minimum value is noted as a 2 and the size of the error range is noted as a 2 This notation is mainly applied to ST scales In notations 1 and 2 a in 1 and a 2 in 2 are the same accuracy standard value Linear scales use a straight line scale that has fixed pitch graduations as the reference to detect the amount of movement and the amount of change in position By detecting graduations a linear scale obtains 2 phase sinusoidal signals that have the same pitch as the graduations The linear scale is designed so that it can perform readings with greater detail than the straight line scale by interpolating this sine wave signal with an electronic circuit Interpolation means that these 2 phase sinusoidal signals are interpolated and the result is divided into pulse signals corresponding to the resolution For example if the graduation pitch is 20um readings can be performed with a resolution of 1um Here error within the graduation pitch range will occur according to the accuracy of this interpolation processing This is called interpolation accuracy T
33. mm pcs pcs 579 670 1 ST46EZA 100A 100 140 50 2 579 6714 1 STA6GEZAC gt 150A 150 190 15 2 579 672 1 ST46EZAC gt 200A 200 240 100 2 579 673 1 ST46EZAC gt 250A 250 290 60 4 579 6744 1 STAGEZAC 300A 300 340 15 4 579 6754 1 ST46EZAQ 350A 350 390 85 4 579 676 1 STA6EZAC gt 400A 400 440 00 4 579 677 1 ST46EZAC gt 450A 450 490 15 6 579 6784 1 ST46EZAC gt 500A 500 540 80 6 579 6794 1 STA6EZAC gt 600A 600 640 00 6 3 579 6804 1 STA6GEZA lt gt 700A 700 740 85 8 E 579 681 1 ST46EZAC gt 800A 800 840 00 8 ms 579 6824 1 STA6GEZAC gt 900A 900 940 90 10 2 579 6834 1 ST46GEZA lt gt 1000A 000 1040 00 10 Em 579 6844 1 ST46EZAC gt 1100A 100 1140 90 1 12 E 579 685 1 STA6EZA lt gt 1200A 200 1240 00 12 E 579 686 1 STA6EZA lt gt 1300A 300 1340 30 10 b 579 687 1 ST46EZAC gt 1400A 400 1440 00 14 579 688 1 ST46EZA lt gt 1500A 500 1540 25 12 579 689 1 STA6GEZA lt gt 1600A 600 1640 00 16 579 690 111 ST46EZAC gt 1700A 700 1740 20 14 579 6914 1 ST46EZA lt gt 1800A 800 1840 00 18 579 6924 1 STAGEZA lt gt 2000A 2000 2040 00 20 579 6934 1 ST46EZA lt gt 2200A 2200 2240 00 p 579 6944 1 ST46EZA lt gt 2400A 2400 2440 00 24 579 695 1 STA6EZA lt gt 2500A 2500 2540 95 26 579 696 1 ST46EZAC gt 2600A 2600 2640 00 26 579 697 1 ST46EZA lt gt 2800A 2800 2840 00 28 579 698 1 STA6EZA lt gt 3000A 3000 3040 00 30 The above code numbers are for recommended items marked with symbol If recommended specifications
34. 10 pcs 579 632 1422 25 25 45 579 649 ST422 1100 1100 1140 90 1pc 12 pcs 579 633 S1422 50 50 70 579 650 ST422 1200 1200 1240 100 1pc 12 pcs 579 634 S1422 75 75 95 579 651 ST422 1300 1300 1340 130 1pc 10pc 579 635 ST422 100 100 120 579 652 ST422 1400 1400 1440 100 1pc 14 pcs 579 636 ST422 150 150 170 579 653 T422 1500 1500 1540 125 1pc 12 pcs 579 637 ST422 200 200 220 579 654 ST422 1600 1600 1640 100 1pc 16 pcs 579 638 ST422 250 250 270 579 655 ST422 1700 1700 1740 120 1pc 14 pcs 579 639 ST422 300 300 320 579 656 ST422 1800 1800 1840 100 1pc 18 pcs 579 640 ST422 350 350 370 579 657 ST422 2000 2000 2040 100 1pc 20 pcs 579 641 ST422 400 400 440 100 1pc 4pc 579 658 ST422 2200 2200 2240 100 1pc 22 pcs 579 642 ST422 450 450 490 75 1pc 6pc 579 659 ST422 2400 2400 2440 100 Ipe 24pc 579 643 ST422 500 500 540 80 1pc 6pc 579 660 ST422 2500 2500 2540 95 1pc 26pcs 579 644 ST422 600 600 640 100 1pc 6pc 579 661 ST422 2600 2600 2640 100 1pc 26pcs 579 645 ST422 700 700 740 85 1pc 8pc 579 662 ST422 2800 2800 2840 100 1pc 28pcs 579 646 ST422 800 800 840 100 1pc 8pc 579 663 T422 3000 3000 3040 100 1pc 30pc 579 647 ST422 900 900 940 90 1pc 10 pcs Assembly Type AT Series a Sinusoidal signal Output Type Scale Unit
35. 2 Hp el mE HeT 5 16 E Scale unit mounting surface f 5 i H i EF fad 1 i L o my i e e Detector head mounting surface Hi S B a ee E E 9 a 3S 4 REN wo ecc X fi NN woa AT353 p Qu X o O Y f 7 col co Q x 463 Qua qa len i A 9 le N Slc k S yle IU ountersunk 15402 36 s 116 N depth 6 5 Jeet 0 z L 60 0 2 G Machine guideway I 0 1 A 90 ignal cable 5m Effective range Lo Di g Flexible metal type Maximum travel length L imensions f Effective range pumuna Overall length Mounting block pitch No of mounting Effective range mm Overall length Mounting block pitch No of mounting Lo mm Li tint L2 mm Ls mm La mm blocks Lo mm Lt nie 12 mm L mm 14 mm blocks 100 120 230 65 100 1100 1160 1270 635 215 150 170 280 65 150 2 1200 1260 1370 685 300 200 220 330 65 200 1300 1360 1470 735 325 250 270 380 65 250 1400 1460 1570 785 350 300 330 440 220 150 1500 1560 1670 835 375 5 350 380 490 245 175 1600 1690 1800 900 400 400 430 540 270 200 1700 1790 1900 950 425 450 480 590 295 225 1800 1890 2000 1000 450 500 540 650 325 250 3 2000 2100 2210 1105 335 600 650 760 380 300 2200 2300 2410 1205 370 7 700 760 870 435 350 2400 2500 2610 1305 400 750 810 920 460 375 2500 2600 2710 1355 315 800 860 970 485 400 2600 2700 2810 1405 325 900 960 1070 535 450 2800 2900 3010 1505 350 2 1000 1060 1170 585 500 3000 3050 3210 1605 315 Mitutoyo Code
36. Code Effective range mm 0100 100 1000 1000 0150 150 1100 1100 0200 200 1200 1200 a 0250 250 1300 1300 2 0300 300 1400 1400 0350 350 1500 1500 0400 400 Q E 2 E Mounting method Code A Multi point fixing B Double end fixing When the scale reference point is at the center point midpoint of effective range Scale reference point 50mm pitch interval Code ven the sal cian EA When the scale reference e 50mm pitch SUBE A point is at the right end c 2 Center point E E 3 Left end D 4 Right end Ene m Ce From the effective range mark Units mm Accuracy 20 C Code s 3 3L0 1000 um Note 1 Lo is the effective range mm H 242L0 1000 um Note 2 Type H is used for effective ranges of 500mm or less Specification combination table resolution response speed and minimum edge interval Minimum edge interval esta cm 9 ns 125 250 333 500 1000 0 1 A 43 710 B 22 360 C 16 260 D 11 180 E 5 4 90 0 2 F 86 1400 G 43 710 H 32 530 J 22 360 K 11 180 0 5 L 120 2000 M 110 1800 N 81 1300 P 54 900 Q 27 450 1 0 R 120 2000 120 2000 T 110 1800 U 54 900 2 5 W 120 2000 X 120 2000 5 0 Y 120 2000 Codes A to Y show the maximum response speed in m min values in ar
37. Detection of broken wires or short circuits and abnormalities alarm detection of signal errors alarm unian Power supply voltage low alarm warning light only switching between high impedance mode and alarm signal output mode Reference position detection light hysteresis width settings directly linked to No of divisions external alarm reset input photocoupler switching directions Power supply 5VDC 5 Current consumption 200mA Storage temperature 20 C to 70 C Operating temperature 0 C to 50 C Dimensions Width 160mm x Thickness 28mm x Depth 100mm Mass Approx 620 Mitutoyo Output specifications Arrangement of cable connections Output connector pin type hi PSU 200 Control device MR 20RM Honda Tsushin Kogyo A 277 P Applicable plug IIIA a Connector MR20F Honda Tsushin Kogyo 1 Hadas SA 16 2 h z Case MR 20L Honda Tsushin Kogyo PA 7 4 Standard accessories PB i E Pin No Signal Signal function mer oom OOX IR 1 to 3 OV Signal GND z i i 4106 5V Power supply alb mo c 00000 8 7 ALM Alarm output i T i d 83 NC iiie A tt RH 2 p WES 10 RET Anode AM26C31 TI E l Ies Reset input 5V 11 RST Cathode g a Hoi pear R
38. E a mm springs A springs B spacers DE 579 351 8 ST7 18A 100C 100 175 87 5 65 so 579 352 8 ST7 L 8A 200C 200 275 137 5 115 2 6 E ES 579 353 8 ST7 18A 300C 300 375 187 5 160 579 354 8 ST7 18A 400C 400 415 25 5 105 579 355 8 ST7 18A 500C 500 575 287 5 127 5 4 10 579 356 8 ST7 18A 600C 600 675 SEIL 1525 1 579 357 8 ST7 18A 700C 700 715 387 5 120 579 358 8 ST7 18A 800C 800 875 431 5 135 6 14 579 359 8 ST7 18A 900C 900 975 487 5 150 579 360 8 ST7 18A 1000C 1000 1075 58 5 125 8 18 579 361 18 ST7 18A 1100C 1100 1200 600 140 The order No and the code indicate the direction of the head cable R L U D The order No and the code specify the interface specification 0 4 5 7 8 Note A thin type adhesive fixing specification is available to special order Mitutoyo Signal Adjusting Method When Mounting ABS ST700 Series e In order to perform signal adjustment and confirmation after the unit is mounted conditioning is necessary using a PC and application software ABS ST700 Signal Adjustment Program For conditioning allow a travel distance of at least 60mm The following settings and confirmation are possible with this software 1 Scale signal automatic adjustment It is necessary to mount the scale base and detector head detector with specified dimensions 2 Scale
39. L2 mm L3 mm La mm Le mm 100 120 265 249 124 5 150 170 315 299 149 5 100 2 200 220 365 349 174 5 130 55 250 270 415 399 199 5 160 2 5 300 320 465 449 224 5 190 e S 350 370 515 499 249 5 220 g n E otc 3a L Codes and Order Numbers ABS AT555 HL ABS AT545 AT545A HL ABS AT505 AT505A HL Order No Code Order No Code Order No Code 539 761 80 AT555 100 HL 539 731 AT545 A 100 HL 539 161 AT505 A 100 HR 539 762 80 AT555 150 HL 539 732 AT545 A 150 HL 539 162 AT505 A 150 HR 539 763 80 AT555 200 HL 539 733 AT545 A 200 HL 539 163 AT505 A 200 HR 539 764 80 AT555 250 HL 539 734 AT545 A 250 HL 539 164 AT505 A 250 HR 539 765 80 AT555 300 HL 539 735 AT545 A 300 HL 539 165 AT505 A 300 HR 539 766 80 AT555 350 HL 539 736 020 AT545 A 350 HL 539 166 000 AT505 A 350 HR The OC in the Order No is as follows AT545 80 The OO in the Order No is as follows AT505 80 AT545A 81 AT505A 81 a iS ED oO Vv wn o 2 s ue 2 lt Nn wo o wn So So iA lt wn sa lt Absolute Scale Unit Slim Spar Type Resolution 0 05um Features Assembly Type ABS AT Series ABS AT500 Series ABS AT500 S Series we I ABSOLUTE T ABS AT500 H Series 7 e High performance Absolute Linear Scale with a resolution of 0 05um and maximum response speed of 150 m min The ABS AT500 S Series realizes vibration resistance
40. MDS D MDS DH Series ABS AT545 ABS AT343 ABS ST748 Mitsubishi Electric Corporation 3 ABS AT543 MELSERVO Series MR J4 MR J3 Series ABS AT545A ABS AT343 ABS ST748A ic Yaskawa Electric Corporation z 3 V Z Series Servopack SGDV SGDS ABS ST788A amp Panasonic Corporation Motor business unit MINAS A5 A5L A5N A5NL Series 2 MINAS Series MINAS Ad A4P AAN AANL Series mucus AEB SUEZA 3 LL g Nikki Denso Co Ltd VCII VC VPS Series E ABS AT503A lt ABS AT303A Servo Amplifier supporting Mitutoyo ENSIS Interface PMAC JAPAN Co Lta UMAC Turbo PMAC 00 do ABS ST708A Other control device manufacturers A poe fee p 1 For details regarding the applicable system please consult with the individual manufacturer 2 For the AT300 series 0 005um resolution is possible to special order 3 Only for the MR J4 MR J3 series Specifications Sais Scale Type MERE Monum reopens Accuracy 20 C 5 ABS ST700 Compact Type Series Separate Type 6000mm 5m s 5 5L0 1000 urn SC Type 2200mm 2 5m s 3 3L0 1000 un ABS AT500 Series HC Type Assembly Type 1000mm 4 HR HL Type 350mm 2 5m s 1 2m s 242L0 1000 urn i 4 3 3L0 1000 um ABS AT300 Series Assembly Type 3000mm 2mfs 1 8m s However at 1600mm or greater stroke is 5 5Lo 1000 um 4 Maximum response speed of 0 005um resolution type 5 Lo effective range mm scale base type accuracy for the ST700 compact type series Mitutoyo
41. No 06ACJ154 PIE 4 5 mnoo Use Mitutoyo Special included accessories Part No Name Remarks 06ACJ154 Air unit Main unit included accessory set for two axes two fixed reducers one 20m 6 urethane tube and two T joints Special ncluded accessory set for three axes three fixed reducers one included 06ACJ162 06ACJ163 5o g6 urethane tube and three T joints accessories 06ACJ155 Fixed reducer 06ACJ159 Air filter element 06ACJ160 Mist separator element o 06ACJ161 Micro mist separator element o Note One air unit can supply up to five axes Therefore there is an included accessory set that supports connections for up to two axes and an included accessory set that supports connections for up to three axes If you combine these two sets you can connect up to four or five axes Technical Information Structure and features of the assembly type linear scale AT 1 AT series detector joint mechanism Adoption of simple joint structure offering high rigidity The detector head and slider sensor of the scale unit are connected by the joint shown in the following figure Because of this structure if values are less than or equal to the scale mounting standard values detector head mounting errors and parallelism differences between the scale unit and the machine guideway are absorbed and normal operation is assured Also the simple and high
42. Shock resistance 147 m s 15G 55 to 2000Hz Power supply voltage DC5V 5 Maximum current consumption 250mA Max Maximum sliding force 5N Operating temperature humidity 0 to 45 C 20 to 80 RH no condensation Storage temperature humidity 20 to 70 C 20 to 80 RH no condensation Protection rating Equivalent to IP53 Signal cable length The AT343A signal cable is sold as an option 0 2 m No 09BAA598A 2 m No 09BAA598B 3 m No 09BAA598C Mitutoyo 5m ABSOLUTE Output specification ABS AT353 AT343 AT303 ABS AT303A Output connector pin type HDAB 15P Hirose Electric Output connector pin type HDAB 15P Hirose Electric Applicable connector included HDAB 155 Hirose Electric Applicable connector included HDAB 15S Hirose Electric Alternately an equivalent product D sub series can be used Alternately an equivalent product D sub series can be used Pin No Signal Pin No Signal 1 OV GND 1 OV GND 2 OV GND 2 OV GND 3 5V 3 5V 4 5V 4 5V 5 DT 5 6 DT 6 Jl REQ REQ DT 8 REQ 8 REQ DT 9 Phase A for testing 9 Phase A for testing 10 Phase B for testing 10 Phase B for testing 11 5V 11 45V 12 N C 12 N C 13 OV GND 13 OV GND 14 N C 14 N C 15 F G 15 F G Connector shel
43. The length is shown in the dimension chart for each type ficat ee Ee ELLLLLLS BEOCUULUL ILG GlG LDCOBOEOHOOLOIO LO B G ALLLLGGIG IBULIOOB LLIC LELULLILVL OLLICLLYE GILUEECZ LCD CPILI LIECSOCLUCGC LLLUL KCLLL ULELLLELULLCDZZAQLOLECLOGUE O UOLCLZCLOL EE2OELECEC R RLOA e Length Part No Remarks 6 aed e auon 2m 09AAA033A utput signal waveform Extension cable sold separately 5m 09AAA033B Conduit type Signal Output signal waveform 7m 09AAA033C 1 Depending on the model we also have high accuracy types available See notes in the scale unit dimension chart 2 For AT103 3250 and above this is 5 8L0 1000 um For AT112 F this is 34 3L0 1000 um Lo mm Phase A Vpp 2V 3 Depends on the control unit electrical unit to which it is connected 4 For AT103 3250 and above this is SOm min 5 PVC sheathed signal cables and extension cables will be made to order Phase B Output signal Phase difference 90 Signal output circuit Signal Phase A Phase B output circuit Reference voltage signal REF output circuit 20210um 100 Scale reference 103 Phase A 425V REF point tecgag _ Phase B UPCB44 xu allele ee ee 2 5V 6 The reference point signal for AT103 and AT113 is Reference point signal Z output circuit Alarm signal output circuit 70um 10um 5V 5V 5 1kQ Z Alarm 1KO AL UPC393 Mounting dimensions Effective range 100 to 3000mm AT1 0 3 Standard type Unit mm The scale reference points are output
44. um Accuracy 20 C Effective range 1600 to 3000mm 5 5Lo 1000 um Effective range 3250 to 6000mm 5 8Lo 1000 um Lo Effective range mm Maximum response speed 11 to 120m min Depends on the resolution and minimum edge interval See separate table Scale reference point pitch 50mm Main scale thermal expansion coefficient 8 1 x10 9 C Power supply voltage 5VDC 5 Maximum current consumption 250mA Operating storage temperature 0 to 45 C 20 to 70 C no condensation Operating storage humidity relative humidity 20 to 8096 RH no condensation Protection rating Equivalent to IP53 Sliding force 5N max Signal cable 3m optional accessory Part No 09AAA353B Signal cable 5m included accessory Part No 09AAA353A Pin assignment Output signal waveform Pin No Function 1 OV PA 2 OV 3 5V PA 4 5V 5 PA PB i 6 PA i uid o 8 PB itt oe 9 P7 i t Minimum edge interval 10 PZ 11 5V PZ 12 N C 13 OV PZ 14 N C 15 FG i ort0um Connector used HDAB 15P Hirose Electric Applicable selectable HDAB 155 Hirose Electric Mitutoyo Maximum response speed Maximum response speed m min Minimum edge interval Resolution 1 ym 0 5 um 0 1 um 500ns 110 50 54 50 11 11 250ns 120 50 110 50 22 22 The x indicates the setting when shipped Values in _ are for effective ranges of 3250mm and more The minimum edge interval
45. wa greed I 005 G 0 05 rae d Cable outlet diagram 7 005 1000 2402 E Lit x azel a P g trj ud Em ch SEES X D 2 istance trom scale 4 ad surface to detector head SS NS NS o Dimensions Maximum No of Effective range Li b L la 5 Order No Code mm Mural mm mm mm n mm mounting holes 579 301 18 ST78 A 100A 100 110 180 90 80 dn 579 302 8 ST7 58 A 200A 200 210 280 140 130 3 S Bs 579 303 18 ST78 A 300A 300 310 380 190 180 we 579 304 8 ST78 A 400A 400 410 480 240 230 2 TA 579 305 8 ST7 lt 8 A 500A 500 510 580 290 80 ph S 579 306 8 ST78 A 600A 600 610 680 340 130 5 5 irs 579 307 18 ST78 A 700A 700 710 780 390 180 E 2 579 308 L 8 ST7 8 A 800A 800 810 880 440 230 579 309 8 ST78 A 900A 900 910 980 490 80 579 310 L 8 ST7 lt 8 A 1000A 1000 1010 1080 540 4 130 j 579 311 L 8 ST7 lt 8 A 1100A 1100 1110 1180 590 180 579 312 L 8 ST7 lt 8 A 1200A 1200 1210 1280 640 230 579 313 L 8 ST7 lt gt 8 A 1300A 300 1310 1380 690 80 579 314 8 ST7 lt 8 A 1400A 1400 1410 1480 740 6 130 9 579 315 8 ST7 lt 8 A 1500A 1500 1510 1580 790 180 579 316 8 ST7 lt 8 A 1600A 1600 1610 1680 840 230 579 317 L 8 ST7 lt 8 A 1700A 1700 1710 1780 890 200 80 579 318 8 ST7 lt gt 8 A 1800A 1800 1810 1880 940 8 130 1 579 319 8 ST7 lt 8 A 1900A 1900 1910 1980 990 180 579 320 L 8 ST7 lt gt 8 A 2000A
46. 3 t i1 Signal cable Lis 3 5 or 7m Scale alarm display LED Connector for feedback cable Included accessory User provides the cable and NC side connectors Unit mm 47 4 56 4 50 Head cable S 50 30 i Lis0 3 or Im Ss _ S9 qu oS C m e J P amp yt poe SE i WE 4 F i Te LT Scale alarm display LED Signal cable Connector for feedback cable Lis 3 5 or 7m Included accessory User provides the cable and NC side connectors Sheath Oil resistant PVC 26 5 Single head cable type no connector Lis 3 5 or 9m Wires pre soldered wn o a o uw lt c E n E Q E co wn an lt There is an extensive selection of specifications for the AT211 Specification e Choose the appropriate numbers and letters below according to specification required If you don t have a specification in mind choose the Selection Method Bearers For special applications not shown in the specifications please contact us Additionally we are also able to meet the 1VP P Sinusoidal signal output specification How to read the code AT211 Effective range list Code Effective range mm Effective range mm
47. 3 Q and R indicate the datum surfaces for mounting this linear scale View from X direction Mounting example 2 Mounting example 3 Mounting example 1 Gl 27 6 as 14 8 Surface of aluminum frame ha Air purge MSx0 8 depth 5 Surface direction ZA a co T a 1 5 0 1 Clearance between the detector head and aluminum frame a Ne MEM HNA 8 7 o1 R Longitudinal direction Vertical direction 3 230 1 Clearance between the detect 37 head and aluminum frame Mounting mating surface LALARI Longitudinal direction Vertical direction Mitutoyo Dimensions of scale units Effective ran verall length Maximum travel length Code RE n ge 0 ia L2 mm E T due E n pcs AT402E 140 140 259 135 150 2 AT402E 240 240 359 185 250 3 AT402E 340 340 459 235 350 4 AT402E 440 440 559 285 450 5 AT402E 540 540 659 335 550 6 AT402E 640 640 759 358 650 i AT402E 740 740 859 435 750 8 AT402E 840 840 985 485 850 9 AT402E 940 940 1059 535 950 10 AT402E 1040 1040 1159 585 1050 1 AT402E 1140 1140 1259 635 1150 12 AT402E 1240 1240 1359 685 1250 13 AT402E 1340 340 1459 735 1350 4 AT402E 1440 440 1559 785 1450 5 AT402E 1540 540 1659 835 1550 16 AT402E 1640 640 1759 885 1650 17 AT402E 1740 1740 1859 935 1750 18 AT402E 18
48. 4 VA p SEE TEES 7 j 7 le iS Mounting block al Elastically secured portion Rigidly fixed portion Elastically secured portions Elastically secured portion 246 Hex socket headed screw M4x25 small round plain washer spring washer 43 b 43 8 L 8 R Aluminum frame surface la oe 3 7 036 1502 745302 3 amp gees it gl al Gm AG ded E Vertical direction 5 I 5j Z 73 ee T Nyy M 2 S 0755 through hole uc Eee do 16 1 22 5 sn Eunana det 95 Longitudinal e E ag 403 x tra cen dhs Base poston Step between detector 4 24 C Hex socket headed screw M6x25 a HE 84 small round plain washer spring washer hean aininn tae small round plain washer spring washer ABS zero point SES 92 Detector head S Mounting mating surface fective range Lo eco head zoi Maximum travel length Li Vertical direction Interface box Longitudinal direction Note Not waterproo 5 5 80 23 1 MEE display LED 2xM5 through hole A 68 4 Hex socket headed screw M4x20 Head cable spring washer gm eis AzS UES Not RB mni a be G indicates the machine guideway 8 2 P indicates the mating surface for mounting the aluminum frame S indicates the mating surface P Mounting mating surface for mounting the detector head 0 1 G 3 Qand R indicate the datum surfaces for mounting this linear scale 177 0 05 1000 E mm g Dimensions Effective range Maximum travel length Overall length Mounting pitch Lo mm L mm
49. 400 430 24 5 549 6 AT211 450A 450 480 49 5 599 6 AT211 500A 500 540 29 5 659 7 AT211 600A 600 640 29 5 759 8 AT211 700A 700 740 29 5 859 9 AT211 750A 750 780 49 5 899 9 AT211 800A 800 840 29 5 959 10 AT211 900A 900 940 29 5 1059 11 AT211 1000A 1000 1040 29 5 1159 12 AT211 1100A 1100 1140 29 5 1259 13 AT211 1200A 1200 1240 29 5 1359 14 AT211 1300A 1300 1340 29 5 1459 15 AT211 1400A 1400 1440 29 5 1559 16 AT211 1500A 1500 1540 29 5 1659 17 Note If the head cable is required to lead from the opposite direction the scale unit can be installed upside down yn ED o 2 FL lt o S 2 co a lt Mounting dimensions for double end fixing type Unit mm Overall length L4 A Loc 22 9 Mounting hole pitch L2 9 1 Middl rt L5 nee Suppo I 02 G 7 01 G Middle support L7 Scale unit mounting surface in Middle support B A 95 hole C Fixed wole Fixed E 2 R x 7 D N A men mms XY ol EE ele i TS mmm A amp 7 Both sides countersunk 14 depth 6 5 1 540 2 19 80 0 2 2xM6x1 0 through hole G Machine guideway 94 99 both sides countersunk 0 1 A dep
50. 502 0 ST360 25 25 45 579 519 0 ST36 1000 1000 1040 100 1pc 10pcs 579 503 0 ST36 gt 50 50 70 579 520 0L ST365 1100 1100 1140 90 1pc 12pcs 579 504 0 ST360 75 75 90 579 521 0L ST36 1200 1200 1240 100 1pc 12pcs 579 505 0 ST360 80 80 100 579 522 0L ST36 1300 1300 1340 130 1pc 10pcs 579 506 0 ST36 gt 100 100 140 50 1pc 2 pcs 579 523 0 ST36 gt 1400 1400 1440 100 1pc 14 pcs 579 507 0 ST36 5 150 150 190 15 1pc 2 pcs 579 524 0 ST36 lt gt 1500 1500 540 125 pc 12pc 579 508 0 ST36 gt 200 200 240 100 1pc 2pc 579 525 0 ST36 gt 1600 1600 1640 100 1pc 16 pcs 579 509 0 ST36 5 250 250 290 60 1pc 4pcs 579 526 0 ST3645 1700 1700 1740 120 1pc 14 pcs 579 510 0 ST36 lt gt 300 300 340 75 1pc 4pcs 579 527 0L_ ST36 gt 1800 1800 1840 100 pc 18 pcs 579 511 0 ST36 lt gt 350 350 390 85 1pc 4pcs 579 528 0 ST36 lt gt 2000 2000 2040 100 1pc 20 pcs 579 512 0 ST36 gt 400 400 440 100 1pc 4pc 579 529 0 ST3645 2200 2200 2240 100 1pc 22 pcs 579 513 0 ST36 lt gt 450 450 490 15 1pc 6 pcs 579 530 0 ST36 lt gt 2400 2400 2440 100 pc 24 pcs 579 514 0 ST36 gt 500 500 540 80 1pc 6 pcs 579 531 0 ST36 lt gt 2500 2500 2540 95 1pc 26pc 579 515 0 ST36 lt gt 600 600 640 100 1pc 6pc 579 532 0 ST36 lt gt 2600 2600 2640 100 1pc 26
51. 565 549 274 5 AS 450 470 615 599 299 5 H 500 520 665 649 324 5 E EA 600 620 765 749 374 5 204 5 170 700 720 865 849 424 5 224 5 200 150 710 915 899 449 5 224 5 225 800 820 965 949 474 5 244 5 230 900 920 1065 1049 524 5 264 5 260 1000 1020 1165 1149 574 5 284 5 290 Codes and Order Numbers ABS AT553 HC ABS AT543 AT543A HC ABS AT573A HC ABS AT503 AT503A HC Order No Code Order No Code Order No Code OnerNo Code 539 761 20 AT553 100 HC 539 731 AT543 A 100 HC 539 871 21 AT573A 100 HC 539 161 AT503 A 100 HC 539 762 20 AT553 150 HC 539 732 AT543 A 150 HC 539 872 21 AT573A 150 HC 539 162 AT503 A 150 HC 539 763 20 AT553 200 HC 539 733 AT543 A 200 HC 539 873 21 AT573A 200 HC 539 163 AT503 A 200 HC 539 764 20 AT553 250 HC 539 734 AT543 A 250 HC 539 874 21 AT573A 250 HC 539 164 AT503 A 250 HC 539 765 20 AT553 300 HC 539 735 AT543 A 300 HC 539 875 21 AT573A 300 HC 539 165 AT503 A 300 HC 539 766 20 AT553 350 HC 539 736 AT543 A 350 HC 539 876 21 AT573A 350 HC 539 166 AT503 A 350 HC 539 767 20 AT553 400 HC 539 737 AT543 A 400 HC 539 877 21 AT573A 400 HC 539 167 AT503 A 400 HC 539 768 20 AT553 450 HC 539 738 AT543 A 450 HC 539 878 21 AT573A 450 HC 539 168 AT503 A 450 HC 539 769 20 AT553 500 HC 539 739 AT543 A 500 HC 539 879 21 AT573A 500 HC 539 169 AT503 A 500 HC 539 771 20 AT553 600 HC 539 741 AT543 A 600 HC 539 881 21 AT57
52. 735 62 AT545E 300 HC 539 766 62 AT555E 350 HC 539 736 62 AT545E 350 HC 539 767 62 AT555E 400 HC 539 737 62 AT545E 400 HC 539 768 62 AT555E 450 HC 539 738 62 AT545E 450 HC 539 769 62 AT555E 500 HC 539 739 62 AT545E 500 HC 539 770 62 AT555E 550 HC 539 740 62 AT545E 550 HC 539 771 62 AT555E 600 HC 539 741 62 AT545E 600 HC 539 772 62 AT555E 650 HC 539 742 62 AT545E 650 HC 539 773 62 AT555E 700 HC 539 743 62 AT545E 700 HC 539 774 62 AT555E 750 HC 539 744 62 AT545E 750 HC 539 775 62 AT555E 800 HC 539 745 62 AT545E 800 HC 539 776 62 AT555E 900 HC 539 746 62 AT545E 900 HC 539 777 62 AT555E 1000 HC 539 747 62 AT545E 1000 HC 539 778 62 AT555E 1120 HC 539 748 62 AT545E 1120 HC 539 779 62 AT555E 1220 HC 539 749 62 AT545E 1220 HC Mounting dimensions HR Type Resolution 0 05 um 0 005 um Unit mm
53. AT103 a AT100 Series Specifications lt gt eM AT181 m Code AT103 AT113 AT112 F AT181 Output specification Photoelectric type transmission linear encoder 0 Detection method Light source Light emitting diode utput connector pin type Light receiving element Phototransistor Photodiode for AT112 F only AE plan Output Two 90 phase shifted sinusoidal signals DA 155 NRUAE or equivalent Main scale grating pitch 20um Pin No Signal Signal output pitch 20um 1 OV aximum effective measurement length 6000mm 1500mm 1020mm 600mm 2 V Accuracy 20 C 5 5L0 1000 um Lo Effective range mm 3 35V A aximum response speed 120m min 120m min 50m min 4 35V Scale reference point With scale reference point 50mm pitch 5 Phase A 2 ain scale thermal expansion coefficient 8 1 x106 C 6 Phase B lt Power supply voltage 5VDC 5 o z 7 Standard voltage Quy aximum current consumption 70mA 60mA 70mA s 54 ROT z 8 Scale reference point Se Operating storage temperature 0 to 45 C 20 C to 70 C 9 ALM Alarm g a Operating storage humidity relative humidity 20 to 80 RH no condensation 10 14 N E ot used aE Head cable length None 0 3m None 15 EG L i i He rating Bs ie In the AT112 F series Pin No 9 is not used Sliding force 5N max 6N max Signal cable Standard accessory
54. AT5 33 HC ABS AT503 HL HR Detection method Electrostatic capacitance type photoelectric type composite ABS linear encoder How to mount the scale unit Multi point elastic fixing 3 or 5 point elastic fixing 3 or 4 point elastic fixing End of effective range Base position Midpoint of effective range HL side of absolute value HR side of absolute value Effective range 00 to 2200mm 100 to 1000mm 100 to 350mm Resolution 0 05um Maximum response speed 150m min 2 5m s Accuracy 20 oes Ree Thermal expansion coefficient 8 5 0 5 x 10 C Vibration resistance 196 m s 20G 55 to 2000Hz 147 m s 15G 55 to 2000Hz Shock resistance 343m s 35G half sine 11ms 196m s 20G half sine 11ms Power supply voltage 5VDC 5 Maximum current consumption 270mA Max Maximum sliding force 4N Operating temperature humidity 0 to 45 C 20 to 80 RH no condensation Storage temperature humidity 20 to 70 C 20 to 80 RH no condensation Protection rating Scale unit Equivalent to IP53 I F box not waterproof Alarm indication Scale alarm indicated by LED on I F Box Head cable length 2m Signal cable length 3m System configuration See instruction manual Configuration example 1 pem mmm mmm HCH EE Mhi y F a F
55. Code compatible a Signal output pitch 20um Maximum response speed 120m min with Sinusoidal signal amplitude of 3db Accuracy 20 C Effective range 140 to 540mm 2um Effective range 640 to 940mm 3um Effective range 1040 to 3040mm 3um m Thermal expansion coefficient 831 x105 C Operating temperature humidity 0 to 45 C 20 to 80 RH no condensation Storage temperature humidity 20 to 70 C 20 to 8096 RH no condensation Vibration resistance 200m s 55 to 2000Hz Shock resistance 400m s half sine 11ms Power supply voltage 5VDC 5 Maximum current consumption 120mA Maximum sliding force 4N Protection rating Equivalent to IP53 Air supply hole With air supply hole end of scale frame detector head Note 1 For details regarding the applicable system please consult with the individual manufacturer Cable configuration Mitutoyo A A Signal cable Ass y EE CRE Signal cable Type A A Signal cable Type B Signal cable Type C E i J Mitutoyo Pin assignment 1 Signal cable A single wire specification Output signal waveform Signal period A 20um 360 Wire color Signal Wire color Signal amp White 35V Yellow Phase XB SUA if No E Black GND Green Phase Z Brown Phase A Blue Phase XZ Red Ph
56. L 2 I 0 05 A E A 30 a rH 3 F TI H 0 05 G A 25 Llin E o sie H i 46 46 2xM2 5 SS m je hec el s em Ir af Scale reference point through hae 4 6 4 6 e i 50mm pitch e WY Th 95 2xM2 5 through hole a y Wem MC i H fp 30 Fon e NE d L L 2 Effective range L1_ B Overall length L2 T n h 2 G Machine guideway e e i 9 E 5 Expand 3 5x6 slot 13 etainng spring A 13 a gw 10 04 L2 L1 2 Effective range Li Retaining spring B 47 93 5 L Overall length L2 J CN Cable clamp 1 I 1 rh X X 1 When stroke is 100mm or longer 4 S 2 One center point when stroke is 10 to 75mm 3 For information on fixing methods for adhesive fixing type see Handling linear scales Mounting scales on page 82 4 l i wn AV EMituteye LINGAR SCALE 4 N S e E ili SPEME E a H i i Head cable 1m L Da TEN 0o d ral fs TE N 2xM5 through hole A Output connector included E RI 5 m B 6820 2 Jo ae F 2540 2 04 15 540 2 o4 15 oH 3 L 35 2x04 5 L 35 2x04 5 E d Retaining spring A Retaining spring B m i C E el Dimensions of scale units Effective Overall Scale fixing Effective Overall Scale fixing T Order No Code range length pitch ERR ening Order No Code range length pitch eas PD Li mm L2 mm Ls mm Pring Spring Li mm L2 mm Ls mm Pring A Spring 579 631 S1422 10 10 30 579 648 ST422 1000 1000 1040 100 1pc
57. Let0 3 6 E 102 50 2 150 2 04 6 cr Ne ee 28 bau s rie Seu A pe Vertical direction x e a 1 SS Oe SS Leni M6 through hole 16 01 2 k Longitudinal e Bm 28 countersunk depth 5 Step between detector 24 X direction F it is E eed eerie head and aluminum frame Mounting mating 7 5 through hole ME ir 92 Detector head S sufae gi4countersunk depth 9 5 5 3 Effective range LABS zero point base position 10 1 P Hex socket headed screw M6x25 i Maximum travel length L Vertical direction small round plain washer spring washer i Longitudinal direction o i izi 19 4 ES 403 e s F Notes Q ai tS a 1 G indicates the machine guideway i de M6 through hole 2 P indicates the mating surface for mounting the unit S indicates the mating 45 Hex socket headed screw M4x16 surface for mounting the detector head rS small round plain washer spring washer 3 Q and R indicate the datum surfaces for mounting this linear scale Alarm display LED 4 For the values of Lo to Ls in the figure refer to the table below P Mounting mating surface 0 1 G 7 0 05 1000 u Dimension Effective range Maximum travel length Overall length Mounting pitch Lo mm Li mm L2 mm Ls mm La mm Ls mm Le mm 100 120 265 249 124 5 150 170 315 299 149 5 200 220 365 349 174 5 m 250 210 415 399 199 5 S D 300 320 465 449 224 5 oS 350 370 515 499 249 5 TA 400 420
58. Mounting block lock surface o gfe CE 3 Mounting bloc N 3 N Rigidly fixed portion Elastically secured portion Elastically secured portion Elastically secured portionN 24 6 97 5 through hole 214 countersunk depth 9 5 Hex socket headed screw M4x25 small round plain washer spring id Hex socket headed screw M6x25 43 small round plain washer spring washer 4 3 _ 8 L203 y 116 3 74530 15 2 02 R tame ace Air purge M5x5 rs mias Cumulative tolerance oo cale unit ZOG Both E S irand ls 03 N Y sam 0 1Rh a 005 1000 eo a j r Vertical directi mem ertical direction aR a SS ee c 3 ED cc a Cm f through hole a8 countersunk depth 5 H aE eni Sl x 1 60 1 A Longitudinal Base position aS ES 6640 2 EX ne Step between detector head NS direction DES 84 Detector head and aluminum frame S Mounting mating surface ES 92 ABS zero point base post Z3 S Z Erecive range Lo zero point base position Vertical direction Maximum travel length L Longitudinal direction L E 19 4 0 8 103 g 13 4 io 30 i t 9 4 Notes j F g u S 1 G indicates the machine guideway H M6 through hole 2 P indicates the mating surface for mounting the unit S indicates 45 71302 Hex socket headed screw M4x 16 the mating surface for mounting the detector head small round plain washer spring washer 3 Q and R indicate the datum surfaces for mounting this linear scale P M
59. at i 50mm pitch from the end of the effective range Lo which is shown with the Y mark E 10 E 10 Middle support BUS Li Scale unit Middle support a Air supply hole M5 10 Lo Tic Mounting surface L Mounting Z 5 TE nfn e S a method A o e e M al xy Vv S UE ma Signal cable H wwe G Machine guideway 15202 36 S amp X Countersunk depth 6 5 reverse 22 s TOTA side has hex countersink depth 5 Mounting Adjustable Middle support CER P A methodB i alt E 9 a em head mounting surface Nous head mounting surface Scale unit Mounting surface Adjustable 285 6 910 5 1 hex Countersunk depth 2 235 6 90 10 21 7 View from X direction Mitutoyo e Dimensions L4 L5 and L6 indicate the recommended mounting positions for the middle Effective range mm Middle support supports included with scale units with an effective range of 1000mm and more The pa
60. in machinery requiring high accuracy high speed control e Compatible with servo amplifiers from a range of companies high speed serial interfaces How to read the code ABS AT30 00 0000 Interface specification NEN Effective range Applicable systems Scale code FANUC Ltd control devices FS i Series POWER Mate i ABS AT353 Mitsubishi Electric Corporation control devices MITSUBISHI CNC Series ABS AT343 Applicable amplifier MDS D MDS DH Series Mitsubishi Electric Corporation MR J4 MR J3 Series Amplifier compatible with the Mitutoyo ENSIS interface Nikki Denso Co Ltd VCII VC VPS Series Servoland Corporation SVF Series PMAC JAPAN Co Ltd UMAC Turbo PMAC2 Other machine types 1 For connection to ABS AT303A ABS AT3 03 L Communication method Blank Full duplex communication A Half duplex communication For details regarding the applicable system please consult with the individual manufacturer Specifications Item Code ABS AT353 AT343 A AT303 A Detection method Electrostatic capacitance type photoelectric type composite ABS linear encoder Effective range 100 to 3000mm Resolution 0 05 um Maximum response speed 120m min 2m s Accuracy 20 C 100 to 1500mm 3 3L0 1000 um 1600 to 3000mm 5519 1000 um Lo Effective range mm Thermal expansion coefficient 8 01 x 10 C Vibration resistance 98m s 10G half sine 11ms
61. leads Wire color Signal Brown Red 5V White Black GND Orange N C Yellow N C Green REQ DT Blue REQ DT Purple Phase A Gray Phase B Shield FG Notes 1 Phase A and Phase B are used as test signals Keep them disconnected during use 2 Connect the shield wire to the grounding conductor Pin No Signal 1 3 1 MR REQ DT 2 MRR REQ DT 4 DT oe 8 LG GND 9 9 EG 3 6 N C j 5 Cable dimensions e ABS AT553 AT543 AT573A AT503 A 50 Signal cable minimum bend radius R 50 fixed PVC sheathed Unit mm Round waterproof connector L 2m En ES er H pum HA Li ji Si 103 8 A el cable minimum bend radius R 50 fixed R 100 moving 80 PVC sheathed ABS AT543A MinieUniversal Mate N Lock Connector 9P pin type TIN s through hole 45 71202 Hex socket headed screw M4x16 small round plain washer spring washer Alarm display LED Applicable housing 172161 9 Tyco Electronics Japan or equivalent 4 0 L 3m L 2m 43 Round waterproof connector Mu c L ai al 7 N EX e i aes OE qe L 3 B e 8 19 4 0 8 103 E Me cable minimum bend radius R 50 fixed R 100 moving sS B
62. o o gr A Qu aoao LIL Mounting dimensions DT Unit mm Scale base type 100 to 3000mm 30 2xM3x0 5 depth 5 g 2a 4 Scale base length Li 722 Scale base center position L2 10 L 0 2 b30 2 xn Lox 0 2 10 44 02 i REN A y SS SSS S 18 LL Bu l TEA count APY x base Detector head e 0 1 G i I 0 1 1000 Output connector shape G Machine guideway ST788A UpU p EI a Head cable 1m let Select fR Es 3 er FF e elec f Domen Iib f Standar Ee E
63. oO a lt uan 22 lt Mounting dimensions HR Type Unit mm 29 8 Mounting block Mounting Mounting block Mounting block block surface gt j 45 i a i ae i 8 al Mounting block qo Rigidly fixed portion Elastically secured portion Elastically secured portion Elastica i 94 6 97 5 through hole 14 countersunk depth 9 5 Secured portion Hey socket headed screw M4x25 small round plain washer spring washer Hex socket headed screw M6x25 4 3 b small round plain washer spring washer 4 3 8 5303 8 P L A Aluminum Ai M5x5 116 3 745102 0 5 02 R frame surface ir purge M5x Al an Cumulative tolerance N Scale unit 0 1 G Goth m hz m 3 Pis L5 and L6 0 3_ M pe 0 1 R 8 0051000 5i U H LII SS a o z d Vertical direction E NR B q n y S I y Sa cool sem T
64. signal amplitude signal strength confirmation 3 Scale origin absolute position data of zero setting 4 Absolute position data confirmation 5 Error history clear 6 ABS resultant error checking effective range 3200mm to 6000mm Required items e Conversion unit application software set Item Quantity Details Notes Set No Applicable model Conversion unit Connection cable B RET 1 DOSN Windows version Provided by user 06ADZ751 ST70L A ST7OL AL USB 485 DS15P main unit MIT cable CUTE USB 485 422 DS15P OGADT457 ST74 LA ST74 LAL USB 485 DSI5P main unit MEL J4 J3 cable System Sacom Industry Corp OGADPA85 17 HA STZ EA USB 485 DSISP main unit Y MAT cable Connection cable A 1 USB cable Option 1 zi Connection cable B 1 RS 485 cable or RS 422 cable bundle 06ADZ752 ST74 0 ST74LIL USB 422 DS15P main unit MDS cable m OGADR760 ST75L ST75CIL USB 422 DST5P main unit FUNAC cable dm 1 ABS ST700 Signal Adjustment Program This program requires a PC with the following operating environment PC DOSN with Pentium 200 MHz or faster with USB port Memory 64MB min 128MB recommended Program size 10MB OS Windows95 or later Monitor 256 colors 800x600 or higher 1024x768 or higher is recommended USB COMI is normally used other ports can also be used e Connection method ion cable A Feedback cable USB port ripe Supplied by user Head cable Detector head Scale base USB 485
65. 0 AT103 2200 2200 2300 2428 2448 800 539 138 30 AT103 2400 2400 2500 2628 2648 1314 1300 650 539 139 30 AT103 2500 2500 2600 2728 2748 1364 1340 670 539 140 30 AT103 2600 2600 2700 2828 2848 1414 1400 700 7 539 141 30 AT103 2800 2800 2900 3028 3048 1514 1500 750 539 142 30 AT103 3000 3000 3100 3228 3248 1614 1600 800 Note 1 For effective ranges of 100 to 2000mm we also have the high accuracy AT103F JIS Class 0 3319 1000 um models available Note 2 The ultra high accuracy AT103S 2 2L0 1000 um models for effective ranges of 100 to 500mm may be custom ordered on request Note 3 The accuracy does not include quantizing error Lo is the effective range mm Mounting dimensions Effective range 3250 to 6000mm AT1 03 Standard type Unit mm Ls la Mounting method 325 i i T Mounting block A 4 53 hU 2x98 hole Mounting block Z i II JI 0 2 G z 9 e L1 g Adjustable NOTET Fixed Adjustable Adjustable 5 5 6630 3 is 15 29 Y Y A 2x7 hole countersunk 11 depth 6 5 47 36 m N Stet 2 Detector head mounting hole pitch 70 1 5 S 55 max Reverse side has hex countersink depth 5 10 i 10 hex gt L Countersunk depth 5 T103
66. 0 1360 1488 1508 744 539 431 30 AT203 1400 1400 1460 588 1608 794 539 432 30 AT203 1500 500 1560 1688 1708 844 539 433 30 AT203 1600 1600 1690 1818 1838 610 539 434 30 AT203 1700 1700 1790 1918 1938 650 539 435 30 AT203 1800 800 1890 2018 2038 670 539 436 30 AT203 2000 2000 2100 2228 2248 740 539 437 30 AT203 2200 2200 2300 2428 2448 800 539 438 30 AT203 2400 2400 2500 2628 2648 1314 1300 650 539 439 30 AT203 2500 2500 2600 2728 2748 1364 1340 670 539 440 30 AT203 2600 2600 2700 2828 2848 1414 1400 700 539 441 30 AT203 2800 2800 2900 3028 3048 1514 1500 150 539 442 30 AT203 3000 3000 3100 3228 3248 1614 1600 800 Mitutoyo AT203 100 to 3000 10 la Middle support Ls gt Ls Ls Unit mm 20 l Mounting surface method A l6 Adjustable Middle support n 2n Ales Ls 2 x c E 10 la 21 Mounting surface method B Adjustable Middle support wo n C oa a 653 1 E E E Dimensions La Ls and Ls indicate the recommended mounting positions for the middle Dri supports included with scale units with an effective range of 1000mm and more m The position of the middle support is adjustable in the measuring direction ge MERDA OMEN M
67. 0 to 1220mm 100 to 350mm Resolution 0 05um 0 005um 20um 4096 Maium poseen EX AD Accuracy 20 C 2 2L 1000 um L Effective range mm Thermal expansion coefficient 8 5 0 5 x 10 C Vibration resistance 147 m s 15G 55 to 2000Hz Shock resistance 353m s 35G half sine 11ms Power supply voltage DC5V 5 Maximum current consumption 270mA Max Maximum sliding force 4N Operating temperature humidity 0 to 45 C 20 to 80 RH no condensation Storage temperature humidity 20 to 70 C 20 to 80 RH no condensation Protection rating Scale unit Equivalent to IP53 I F box not waterproof Alarm indication Scale alarm indicated by LED on I F Box 1 Because the 20m signal is divided by 4096 the actual value is 0 0048828125um When setting the minimum resolution on the controller always enter the actual value System configuration example cable length 1 ABS AT5 3E Unit mm H E ra EJ iz d Round waterproof Shielded wire 43 Connector Single wire to a sil Feedback cable so c Headcable Li Signal cable L2 Minimum bend radius R 50 fixed Minimum bend radius R 50 fixed R 100 moving R 100 moving D sub 15p pin s E gt 6 2o own ES gin E otc A
68. 000mm x3yum m Thermal expansion coefficient 8x1 x 10 C Scale reference point With scale reference point 50mm pitch 10 to 80mm Center point Maximum response speed 2 6m s at sine wave amplitude 3dB Power supply voltage 5VDC 5 Maximum current consumption 250mA Operating temperature humidity 0 to 40 C 20 to 80 RH no condensation Storage temperature humidity 20 to 60 C 20 to 80 RH no condensation To be suppli x ed by customer feedback cable controller Output specification 8 e Connector pin assignment CH Applicable connector Type B ote rede dq HDAB 15S Pin No Signal Pin No Signal 1 2 OV GND 10 PA main signal pulse Normal phase 3 4 45V Vcc 11 PA main signal pulse Reverse phase 5 Reset input AL anode 12 PB main signal pulse Normal phase 6 Reset input AL cathode 13 PB main signal pulse Reverse phase 7 NC 14 PZ reference point pulse Reverse phase 8 _ PZ reference point pulse Normal phase 15 IG 9 ALM alarm Connector pin assignment 1 8 Type C Applicable connector spo included dq HDAB 155 Pin No Signal Pin No Signal 1 2 OV GND 10 PA main signal pulse Normal phase 3 4 5V Vcc 11 PA main signal pulse Reverse phase 5 Phase A sinusoidal signal 12 PB main signal pulse Normal phase 6 Phase B sinusoida
69. 05 A 500 SC 539 771 50 AT555 600 SC 539 741 AT545 A 600 SC 539 171 AT505 A 600 SC 539 773 50 AT555 700 SC 539 743 AT545 A 700 SC 539 173 AT505 A 700 SC 539 775 50 AT555 800 SC 539 745 AT545 A 800 SC 539 175 AT505 A 800 SC 539 776 50 AT555 900 SC 539 746 AT545 A 900 SC 539 176 AT505 A 900 SC 539 777 50 AT555 1000 SC 539 747 AT545 A 1000 SC 539 177 AT505 A 1000 SC 539 778 50 AT555 1100 SC 539 748 AT545 A 1100 SC 539 178 AT505 A 1100 SC 539 779 50 AT555 1200 SC 539 749 AT545 A 1200 SC 539 179 AT505 A 1200 SC 539 780 50 AT555 1300 SC 539 750 AT545 A 1300 SC 539 180 AT505 A 1300 SC 539 781 50 AT555 1400 SC 539 751 AT545 A 1400 SC 539 181 AT505 A 1400 SC 539 782 50 AT555 1500 SC 539 752 AT545 A 1500 SC 539 182 AT505 A 1500 SC 539 783 50 AT555 1600 SC 539 753 AT545 A 1600 SC 539 183 AT505 A 1600 SC 539 785 50 AT555 1800 SC 539 755 AT545 A 1800 SC 539 185 1 AT505 A 1800 SC 539 786 50 AT555 2000 SC 539 756 AT545 A 2000 SC 539 186 AT505 A 2000 SC 539 787 50 AT555 2200 SC 539 757 AT545 A 2200 SC 539 187 AT505 A 2200 SC The OO in the Order No is as follows AT545 50 The OO in the Order No is as follows AT505 50 Mitutoyo nee ATSOSA 51 Mounting dimensions HC Type
70. 265 10 AT112 720F 720 813 825 539 266 10 AT112 770F 770 863 875 539 267 10 AT112 820F 820 913 925 539 268 10 AT112 920F 920 1013 1025 539 269 10 AT112 1020F 1020 1113 1125 Note 1 The ultra high accuracy AT1125 2 2L0 1000 um models for effective ranges of 50 to 320mm may be custom ordered on request Note 2 The accuracy does not include quantizing error Lo is the effective range mm Note 3 For AT112 50F and 70F only there is one scale reference point at the midpoint 26 Assembly Type AT Series 1Vpp Differential Signal Output Type Scale Unit AT402E Features e Ideal for machine tools for heavy cutting as well as linear motors e Has multi point elastic fixing for excellent vibration resistance 200m s shock resistance 400m s and temperature characteristics The adoption of the Absolute Interval Code has enabled a simplified low cost ABS system Specifications AT402E A Type AT402E B Type AT402E C Type E 2 pa Cable configuration 3m single wire 3m European CNC manufacturers specification 3m FANUC LTD specification e Detection method Photoelectric linear encoder Base position of elongation due to T rv TU temperature changes Midpoint of the screws used for rigid fixing near the midpoint of the effective range Effective range 140 to 3040mm E Output signal Signal 1Vpp differential Sinusoidal signal differential reference point pulse Absolute Interval
71. 3A 600 HC 539 171 AT503 A 600 HC 539 773 20 AT553 700 HC 539 743 AT543 A 700 HC 539 883 21 AT573A 700 HC 539 173 AT503 A 700 HC 539 774 20 AT553 750 HC 539 744 AT543 A 750 HC 539 884 21 AT573A 750 HC 539 174 AT503 A 750 HC 539 775 20 AT553 800 HC 539 745 AT543 A 800 HC 539 885 21 AT573A 800 HC 539 175 AT503 A 800 HC 539 776 20 AT553 900 HC 539 746 AT543 A 900 HC 539 886 21 AT573A 900 HC 539 176 AT503 A 900 HC 539 777 20 AT553 1000 HC 539 747 AT543 A 1000 HC 539 887 21 AT573A 1000 HC 539 177 AT503 A 1000 HC The CAC in the Order No is as follows AT543 20 The C1 Tin the Order No is as follows A503 10 Mitutoyo ATS43A 21 ATSO3A 11 Mounting dimensions HR Type Unit mm 22 Mounting block T M o liil NN Mounting block
72. 40 1840 1959 985 1850 9 E AT402E 2040 2040 2159 1085 2050 21 g AT402E 2240 2240 2359 1185 2250 23 a AT402E 2440 2440 2559 1285 2450 25 E AT402E 2640 2640 2759 1385 2650 27 a AT402E 2840 2840 2959 1485 2850 29 re AT402E 3040 3040 3159 1585 3050 31 5 lt Codes and Order Numbers Scale unit single wire cable 3m Scale unit cable with European CNC manufacturer s connector 3m Scale unit Cable with FANUC LTD connector 3m Code A Type B Type C Type Order No Order No Order No AT402E 140 539 371 01 539 371 02 539 371 03 AT402E 240 539 373 01 539 373 02 539 373 03 AT402E 340 539 374 01 539 374 02 539 374 03 AT402E 440 539 375 01 539 375 02 539 375 03 AT402E 540 539 376 01 539 376 02 539 376 03 AT402E 640 539 377 01 539 377 02 539 377 03 AT402E 740 539 378 01 539 378 02 539 378 03 AT402E 840 539 379 01 539 379 02 539 379 03 AT402E 940 539 380 01 539 380 02 539 380 03 AT402E 1040 539 381 01 539 381 02 539 381 03 AT402E 1140 539 382 01 539 382 02 539 382 03 AT402E 1240 539 383 01 539 383 02 539 383 03 AT402E 1340 539 384 01 539 384 02 539 384 03 AT402E 1440 539 385 01 539 385 02 539 385 03 AT402E 1540 539 386 01 539 386 02 539 386 03 AT402E 1640 539 387 01 539 387 02 539 387 03 AT402E 1740 539 388 01 539 388 02 539 388 03 AT402E 1840 539 389 01 539 389 02 539 389 03 AT402E 2040 539 390 01 539 390 02 539 390 03 AT402E 2240 539 391 01 539 391 02 539 391 03
73. 5 400 200 2 500 520 625 312 5 5285 500 125 4 600 620 725 362 5 62 5 600 50 4 700 720 825 412 5 62 5 700 175 4 800 820 925 462 5 62 5 800 200 4 900 920 1025 Sip 62 5 900 150 6 2 1000 1020 125 562 5 B S 1050 175 6 2 E 1100 1120 1225 612 5 875 1050 175 6 a 1200 1220 325 662 5 62 5 1200 200 6 m 1300 1320 1425 712 5 12 1200 150 8 amp x 1400 1420 1525 762 5 62 5 1400 175 8 em ER 1500 1520 1625 812 5 112 5 1400 175 8 1600 1620 725 862 5 62 5 1600 200 8 1800 1820 1925 962 5 87 5 1750 175 10 2000 2020 2125 1062 5 62 5 2000 200 10 2200 2220 2325 1162 5 25 2100 175 12 Codes and Order Numbers ABS AT553 SC ABS AT543 AT543A SC ABS AT573A SC ABS AT503 AT503A SC Order No Code Order No Code Order No Code Order No Code 539 761 10 AT553 100 SC 539 731 AT543 A 100 SC 539 871 11 AT573A 100 SC 539 161 AT503 A 100 SC 539 763 10 AT553 200 SC 539 733 AT543 A 200 SC 539 873 11 AT573A 200 SC 539 163 AT503 A 200 SC 539 765 10 AT553 300 SC 539 735 AT543 A 300 SC 539 875 11 AT573A 300 SC 539 165 AT503 A 300 SC 539 767 10 AT553 400 SC 539 737 AT543 A 400 SC 539 877 11 AT573A 400 SC 539 167 AT503 A 400 SC 539 769 10 AT553 500 SC 539 739 AT543 A 500 SC 539 879 11 AT573A 500 SC 539 169 AT503 A 500 SC 539 771 10 AT553 600 SC 539 741 AT543 A 600 SC 539 881 11 AT573A 600 SC 539 171 AT503 A 600 SC 539 773 10 AT553 700 SC 539 743 AT543 A 700 SC 539 883 11 AT573A 700 SC 539 173 A
74. 574 0L ST2445 1500 1500 1540 125 pc 12 pcs 579 558 0 ST2445 200 200 240 100 1pc 2pc 579 575 0 T24 lt gt 1600 1600 1640 100 1pc 16 pcs 579 559 0 ST2445 250 250 290 60 1pc 4pc 579 576 0 ST2445 1700 1700 1740 120 1pc 14 pcs 579 560 0 ST24 lt gt 300 300 340 Db 1pc 4pc 579 577 0L ST24 lt gt 1800 1800 1840 100 pc 18 pcs 579 561 0 ST24 lt gt 350 350 390 85 1pc 4pc 579 578 0 ST24 lt gt 2000 2000 2040 100 pc 20 pcs 579 562 0 ST2445 400 400 440 100 1pc 4pc 579 579 0 ST2445 2200 2200 2240 100 pc 22pc 579 563 0 ST24 lt gt 450 450 490 75 1pc 6pc 579 580 0 S T24 lt gt 2400 2400 2440 100 1pc 24 pcs 579 564 0 ST2445 500 500 540 80 1pc 6pc 579 581 0 ST2445 2500 2500 2540 95 1pc 26 pcs 579 565 0 ST24 lt gt 600 600 640 100 1pc 6pc 579 582 0 ST247 2600 2600 2640 100 pc 26 pcs 579 566 0 ST24 lt gt 700 700 740 85 1pc 8pc 579 583 0 ST24 lt gt 2800 2800 2840 100 pc 28 pcs 579 567 0 ST24 lt gt 800 800 840 100 1pc 8pc 579 584 0 1 ST2447 3000 3000 3040 100 pc 30pcs The L and symbols in the tables above have the following meanings lt gt gt B Q phase square wave signals external reset input 22 QC 2 phase sinusoidal signals 2 phase square wave signals 153 n ao c ue 24 o ES v oQ 7
75. 5E 300 HR 539 766 32 AT553E 350 HR 539 736 32 AT543E 350 HR 539 766 72 AT555E 350 HR 539 736 72 AT545E 350 HR Mitutoyo Mounting dimensions HL Type Resolution 0 054m 0 005ym Unit mm 29 i 8 Q Mounting rte i i in i T bloksufae S Mounting block Mounting block 2 Mounting block E Vi EIE JL ELI BA Mounting block x R Aluminum frame surface Elastically secured portion Rigidly fixed portion _ Elastically secured portion pi 10 1 43 0 05 1000 L 43 Air purge M5x5 8 Lus Both 24 6 La 24 Hex socket hea
76. 6 539 203 30 AT113 200 200 220 358 342 376 539 204 30 AT113 250 250 270 408 392 426 539 205 30 AT113 300 300 330 468 452 486 E 539 206 30 AT113 350 350 380 518 502 536 539 207 30 AT113 400 400 430 568 552 586 3 539 208 30 AT113 450 450 480 618 602 636 539 209 30 AT113 500 500 540 678 662 696 339 331 539 211 30 AT113 600 600 640 778 762 796 389 381 539 213 30 AT113 700 700 740 878 862 896 439 431 539 214 30 AT113 750 750 780 918 902 936 459 451 539 215 30 AT113 800 800 840 978 962 996 489 481 539 216 30 AT113 900 900 940 1078 1062 1096 539 531 539 217 30 AT113 1000 1000 1040 1178 1162 1196 589 581 539 218 30 AT113 1100 1100 1140 1278 1262 1296 430 539 219 30 AT113 1200 1200 1240 1378 1362 1396 460 5 539 220 30 AT113 1300 1300 1340 1478 1462 1496 490 539 221 30 AT113 1400 1400 1440 1578 1562 1596 530 539 222 30 AT113 1500 1500 1540 1678 1662 1696 560 Note 1 For effective ranges of 100 to 2000mm we also have the high accuracy AT113F JIS Class 0 3 3L0 1000 um models available Note 2 The ultra high accuracy AT113S 2 2L0 1000 um models for effective ranges of 100 to 500mm may be custom ordered on request Note 3 The accuracy does not include quantizing error Lo is the effective range mm Mounting dimensions Effective range 100 to 600mm AT1 8 1 Sealed type Unit mm
77. 63 40 AT553 200 HL 539 733 AT543 A 200 HL 539 873 41 AT573A 200 HL 539 163 AT503 A 200 HL 539 764 40 AT553 250 HL 539 734 AT543 A 250 HL 539 874 41 AT573A 250 HL 539 164 AT503 A 250 HL 539 765 40 AT553 300 HL 539 735 AT543 A 300 HL 539 875 41 AT573A 300 HL 539 165 AT503 A 300 HL 539 766 40 AT553 350 HL 539 736 AT543 A 350 HL 539 876 41 AT573A 350 HL 539 166 AT503 A 350 HL The Din the Order No is as follows AT543 40 The Cin the Order No is as follows AT503 40 AT543A 41 AT503A 41 Mitutoyo ABS AT500 Series Structural Features ABS AT500 S Series combines high vibration resistance with shock resistance 1 Example of vibration resistance characteristics 2 Vibration resistance Vibration resistance Shock resistance characteristics ABS AT500 S resonance characteristics ABS AT500 S Previous type e X axis m Y axis a Z axis direction direction direction 20 PR 3 E amp 5 B ge E EE amp o E o g 5 Q i 8 o Linte ai EES 0 500 1000 1500 2000 Vibration frequency Hz Shock G ABS AT500 H Series combines outstanding thermal characteristics with high repeatability 1 Structural concept 2 Example of thermal characteristics i Stabi
78. 80 2340 200 22 130 25 579 339 18 ST7 lt gt 8 A L 4800A 4800 4810 4880 2440 22 230 25 579 340 18 ST7 lt 8 A L 5000A 5000 5010 5080 2540 24 130 27 579 341 8 ST78 A L 5200A 5200 5210 5280 2640 24 230 2 579 342 8 ST7 28 A L 5400A 5400 5410 5480 2740 26 130 29 579 343 8 ST7 lt 8 A L 5600A 5600 5610 5680 2840 26 230 29 579 344 8 ST78 A L 5800A 5800 5810 5880 2940 28 130 31 579 345 8 ST7 lt 8 A L 6000A 6000 6010 6080 3040 28 230 31 The lt gt code indicates the interface specification 0 4 5 7 8 The Order No and the code indicate the direction of the head cable R L U D The in the Order No ST708AL 0 ST748AL 4 ST 48L 3 ST 58L 5 ST778AL 7 ST788AL 8 is as described below Sm S gt o FE Sun As tes gru EA Qu a LIL Cannot be used Mounting dimensions T
79. 960 400 J C10 EE 20 250 ns 48 120 240 480 200 Reetinput q E 500 ns 24 60 120 240 100 K 1000 ns 12 30 60 120 50 62 5ns 96 240 480 960 400 125 ns 48 120 240 480 200 40 250 ns 24 60 120 240 100 500 ns 12 30 60 120 50 1000 ns 6 15 30 60 25 62 5ns 48 120 240 480 200 125 ns 24 60 120 240 100 80 250 ns 12 30 60 120 50 500 ns 6 15 30 60 25 1000 ns 3 75 15 30 125 62 5ns 384 96 192 384 160 125 ns 192 48 96 192 80 100 250 ns 96 24 48 96 40 500 ns 4 8 12 24 48 20 1000 ns 24 6 12 24 10 62 5ns 192 48 96 192 80 125 ns 96 24 48 96 40 200 250 ns 4 8 12 24 48 20 500 ns 24 6 12 24 10 1000 ns 12 3 6 12 5 The maximum response speed is limited by the scale response speed The minimum edge interval varies 0 to 10 based on the operating environmental conditions Interface Unit Serial conversion unit PSU 250 Series Pur we Loud e The PSU 250 series interface unit converts the sinusoidal signal output by wmm Mitutoyo linear scales to a serial signal The interface outputs serial data equivalent to 400 divisions from the signal sinusoidal OUTPUT e The PSU 251 can be connected to Mitsubishi Electric Corporation s MR JA MR J3 series servo amplifier e The PSU 252 can be connected to Panasonic Corporation Motor business unit s MINAS series servo amplifier C
80. AA ee o s e M6 through hole g8 countersunk depth 5 A e Hex socket headed screw M4x25 16 01 122 x Longitudinal Base position s F smali round plain washer spring washer Step between detector IPEA direction head and aluminum frame 5 Mounting mating surface ABS zero point j Ffsctive range lo Detector head Vertical direction Interface box Maximum travel length L Longitudinal direction Note Not waterproof i 80 23 1 lt oe Alarm display LED 2xM5 through hole 2 68 4 Hex socket headed screw M4x20 Head cable Notes spring washer 7 1 G indicates the machine guideway Sis a S 2 P indicates the mating surface for mounting the aluminum frame S indicates the mating surface for mounting the detector head 3 Q and R indicate the datum surfaces for mounting this linear scale P Mounting mating surface 0 1G E 0 05 1000 Dimensions Effective range Maximum travel length Overall length Mounting pitch Lo mm L mm L2 mm L3 mm La mm Le mm 100 120 265 249 124 5 150 170 315 299 149 5 100 55 200 220 365 349 174 5 130 E D 250 270 415 399 199 5 160 n e 2 300 320 465 449 224 5 190 g n 350 370 515 499 249 5 220 ris Aw Q ca L Codes and Order Numbers ABS AT555 HR ABS AT545 AT545A HR ABS AT505 AT505A HR Order No Code Order No Code Order
81. ABSOLUTE Absolute system linear scale principle e g ABS AT500 Series ABS AT300 Series O Figure 1 vv SN ce Signal period No of interpolations Resolution COA 3768mm 512 736mm w z H I MED 58 88mm 512 0 115mm E s D FIN 0 92mm 512 Approx 1 8m B E wo E 3 o wr S g S 20um 400 0 05um 2 a Sm i 4096 0 005um 2 S lt B uj 3768mm p g As shown in Figure1 when power is supplied to the linear scale the COA signal position is detected and based on this the MED wavelength and position is detected In the same way from the microprocessor that detects the FIN and OPT signal positions an ultimate absolute value of resolution of 0 05um 0 005um is obtained Direction of absolute unit scale data increase e ABS ST700 Compact Type Series ABS AT500 Series ABS AT300 Series OSCE The data will increase when the detector moves in this direction The data will increase when the detector moves in this direction The data will increase when the detector moves in this direction cf zm E pa det RUE Gu NS oO gr D Qu aa LI Separate Type ABS ST Series Absolute Scale Unit High environmental resistance type ABS ST700 Compact Type Series ABSOLUTE Features e Absolute measurement with separate type scales Non contact detection is optimal for high speed and high accele
82. AT402E 2440 539 392 01 539 392 02 539 392 03 AT402E 2640 539 393 0 539 393 02 539 393 03 AT402E 2840 539 394 0 539 394 02 539 394 03 AT402E 3040 539 395 0 539 395 02 539 395 03 Assembly Type AT Series Square Wave Signal Output Type Scale Unit Slim High speed types Mounting method Multi point fixing excellent vibration and shock resistance ina wn Gm vo N H lt c S gt Q E 7 a lt Features This is a slim sealed scale that can be directly connected to the control unit e High speed response up to 120m min making it compatible with a wide range of resolutions from 0 1 to Sum The multi point fixing type has excellent vibration resistance e Scale alarm display makes for easy maintenance Wide range of specifications enables easy choice to best suit your application Single head cable type no connector Specifications Item Code AT211 Effective range Lo 100 150 200 250 300 350 400 450 500 600 700 750 800 900 1000 1100 1200 1300 1400 1500 mm Scale reference point 50mm pitch center point left end right end fixed when shipped 3 3L0 1000 um For Lo 500mm we can also fabricate a high accur 2 2L0 1000 um ITE sU rac OD Vibration resistance 200 m s Conditions 55 to 2000Hz Multi point fixing type Shock resistance 250 m s Condition
83. E Yo wn gt un o ce m ge ED UW un Co m iL a jj o w Ar d ari dand ae arp Catalog No E13005 Linear Encoders for Numerical Motion Position Control System Mitutoyo Integrated Production System for The Utsunomiya Operations Kiyohara Production Department presents a complete manufacturing environment where linear encoders for Mitutoyo measuring equipment as well as linear scales for the general market are produced The whole production process including the manufacturing of glass scales for linear encoders assembly of electronic components and products and inspection is performed here Conditions are continuously being optimized for further enhanced scale accuracy and even higher quality The underground research laboratory at the Kiyohara Production Department has been specially designed and constructed to provide the environment required for the high level scale graduation process as well as for high accuracy measurements Located on a solid bedrock foundation nine meters underground the facility maintains a stable and tightly controlled environment all year round Temperature and humidity fluctuations as well as external vibrations are kept to an absolute minimum In this Sputtering equipment laboratory we produce master scales perform accuracy evaluation and pursue various kinds of research that provide the underpinning for the accuracy and quality of ou
84. L A O S KE 422 DS15P Connection cable B RS 485 cable or RS 422 cable ABS ST700 Series Grounding To prevent the possibility of electric shock the device must be grounded When using Part No 06ADZ751 connect the head cable and the connection cable B together The conversion unit s power source is supplied via connection cable A from the PC USB port n the Applicable model column 1 2 3 4 8 9 apply to 1 Prepare the appropriate conversion unit and connection cable B for the scale to be used Sms S c mt PEs Sun No gru 2 ou ca lt tc Compatibility of Detector Head and Main Scale Note that for the ST700 series compact type with an Main scale Detector head effective range 3000 mm or less or 3200 mm OF MOTE For effective range of 3200mm to 6000mm Compatible 2 For effective range of 3200mm to 6000mm the main scale and the detector head are different so they Wot compati 7 are not compatible For effective range of 3000mm or less Compatible gt For effective range of 3000mm or less e The communication standards are different for the ST7 L and ST7 A L so they are not compatible a iS zt oO Vv wn o 5 s Nn 2 lt Nn wo v mn oO uA lt Nn sa lt
85. Nn Separate Type ST Series Scale Unit Compact Type ST46 EZA Features Ultra compact high accuracy separate type linear scale great for applications where space is limited Detector head mounting and signal adjustment possible without oscilloscope Setup indicator for checking signal strength Auto tuning function activated by push switch e F circuit integrated in connector shell reduces volume to 6096 compared to conventional interface e Self diagnosis function with USB connectivity facilitates signal strength checking and parameter setup e Can be used for metal tape scale manufacture Sinusoidal siqnal amp Square Wave Signal Output System Configuration Main scale Output connector included Feedback cable Td 3 p Controller Detector unit m Specifications Item Code Detection method ST46 EZA Reflective photoelectric linear encoder Scale specifications Grating pitch 20um Material glass Main scale grating pitch 20um Output signal Type B 2 phase square wave signals reference point pulse external reset input Type C 2 phase square wave signals reference point pulse 2 phase sinusoidal signals Effective range 10 to 3000mm Accuracy 20 C Effective range 10 to 300mm x1um Effective range 350 to 500mm 2um Effective range 600 to 1000mm x3um Effective range 1100 to 3
86. No Code 539 761 70 AT555 100 HR 539 731 AT545 A 100 HR 539 161 AT505 A 100 HR 539 762 70 AT555 150 HR 539 732 AT545 A 150 HR 539 162 AT505 A 150 HR 539 763 70 AT555 200 HR 539 733 AT545 A 200 HR 539 163 AT505 A 200 HR 539 764 70 AT555 250 HR 539 734 AT545 A 250 HR 539 164 AT505 A 250 HR 539 765 70 AT555 300 HR 539 735 AT545 A 300 HR 539 165 AT505 A 300 HR 539 766 70 AT555 350 HR 539 736 000 AT545 A 350 HR 539 166 L 1L AT505 A 350 HR The in the Order No is as follows AT545 70 The in the Order No is as follows AT505 70 AT545A 71 AT505A 71 Mitutoyo Mounting dimensions HL Type Unit mm 29 8 Mounting block e Mounting block Mounting block ul Lo Mounting block surface S ee E OM
87. Phase A Reset input anode Phase A 5V Voo 6 Phase B Reset input cathode Phase B N C 7 Vref Vref Vref N C 8 PZ scale reference point PZ scale reference point PZ scale reference point N C 9 N C ALM alarm negative logic ALM alarm negative logic Phase A 10 Vref PA PA Phase B 11 N C PA PA Phase XZ 12 N C PB PB OV GND 13 N C PB PB OV GND 14 N C PZ PZ N C 15 F G F G 0V F G 0V OV GND There is an extensive selection of specifications for ST36 Specification e Choose the appropriate numbers and letters below according to specification required If standard specifications recommended items marked 9 a ecti 0 n M eth od with symbols below meet your requirements please order using the code numbers shown on page 12 How to read the code E 1 A UA A B o 2 Signal output E Code Output cu A Sinusoidal signal a B Square wave signal external reset input E C Sinusoidal signal Square wave signal Special codes D 1Vp p differential EN PESE Q None Standard selection specification Effective rang e Z Special specification Gl Note If there are special details please select Z Code Effective range mm Code
88. Q Oo Alarm functions on the AT scales 5 wave S Alarm function Detected inside the detector head inside the I F on the AT212 Over speed Input signal error Scale code AT203 G 9 AT211 Q AT212 Q 3 Alarm functions on the ST scales sinusoidal signal output type PSU 200 Alarm function Detected inside the I F Disconnection or Over speed Input signal error short circuit in Signal cable Scale code ST24B C 8 G ST36 9 ST422 O ST46 EZA OQ O O j Alarm on the absolute scales Alarm function Detected inside the scale Detected inside the PSU on Disconnection Input Detection m Scale error Over speed of scale de signal error errors circuit in Scale code signal cable ST36A Q ST24 PSU 200 O PSU 250 series O O D D Mitutoyo Alarm function Detected inside the I F Over Input Detector Sale err speed signal error circuit error EU Ger Scale code ABS ST700 series O O 8 ABS AT300 series O Q Q OQ ABS AT500 series C Q D Q Explanation of terms Linear scale accuracy 1 Linear scale accuracy As shown in Figure 1 the linear scale accuracy is determined by using an accuracy inspection device to perform comparisons at fixed intervals between the value measured with the linear scale and the reference value according to a laser length mea
89. Q 180mm s R 90mm s PZ Z When Signal output is A D maximum response speed at Sinusoidal signal 3 dB attenuation is 1 2m s R Von 2 5V min Note The minimum edge interval varies 0 to 10 based on the operating environmental conditions phase pulse width Va 0 5V max 200 000m ta Edge interval resolution 94 gt This is the waveform that results when the detector u oyo head moves as shown in the figure above Mounting dimensions
90. S eran pi e bw 46 t Er ced j S i m NI R 8 2xM3x0 5 depth 3 cum I Vy Scale base Detector head TAAIE P 7 0 1 1000 Output connector shape G Machine guideway ST788AL Head cable 1m Left L Right R Select Standard Down D Eg A 0 QST Select Cable outlet diagram i 2402 2 FERES S i oY Distance from scale f A 33 surface to detector head SS IWS N i i Dimensions Maximum Effective range Li b L3 L4 Order No Code min Sa mim mm nim n mm il 579 331 18 S178 A L 3200A 3200 3210 3280 1640 14 230 17 579 332 8 ST78 A L 3400A 3400 3410 3480 1740 16 130 19 579 333 18 ST7 lt gt 8 A L 3600A 3600 3610 3680 1840 16 230 19 579 334 18 ST7 lt 8 A L 3800A 3800 3810 3880 1940 18 130 24 579 335 8 ST78 A L 4000A 4000 4010 4080 2040 18 230 21 579 336 18 ST7 lt gt 8 A L 4200A 4200 4210 4280 2140 20 130 23 579 337 18 ST7C8 A L 4400A 4400 4410 4480 2240 20 230 23 579 338 8 ST78 A L 4600A 4600 4610 46
91. ST46EZAB 10C 10 30 15 15 579 666 12 ST46EZAB 25B 25 45 579 666 13 ST46EZAB 25C 25 45 25 0 579 667 12 ST46EZAB 50B 50 70 579 667 13 ST46EZAB 50C 50 70 40 5 579 668 12 ST46EZAB 75B 15 90 579 668 13 ST46EZAB 75C 75 90 60 5 579 669 12 ST46EZAB 80B 80 100 579 669 13 ST46EZAB 80C 80 100 70 5 579 665 22 ST46EZAC 10B 10 30 579 665 23 ST46EZAC 10C 10 30 15 53 579 666 22 ST46EZAC 25B 25 45 579 666 23 ST46EZAC 25C 25 45 25 0 579 667 22 ST46EZAC 50B 50 70 579 667 23 ST46EZAC 50C 50 70 40 5 579 668 22 ST46EZAC 75B 15 90 579 668 23 ST46EZAC 75C 15 90 60 5 579 669 22 ST46EZAC 80B 80 100 579 669 23 ST46EZAC 80C 80 100 70 5 Effective range 100 to 3000mm 2xM2 5 depth 3 Unit mm 26 02 3 Overall length L2 i 14 1401 Effective range Lt 75 4 108 2xM2 5 depth 3 a 1i 0 05 AI 3 i 8l B i 700G V 7 A Mounting pitch Ls Mounting pitch L3 G Machine guideway 282 15 48 AL A4 q 0 02 0 02G 25 15 04 25 15 04 2x94 5 35 2x94 5 m Mitutoyo Dimensions of scale units Effective range Overall length Scale fixing pitch Scale retaining spring Scale retaining spring Order No Code Li L2 L3 A B mm mm
92. Servo amplifier Transmission gt Reception T Transmission gt Transmission and reception and reception Reception Transmission Protection rating definition IP53 protection rating Type Protection ratings Summary Definition It is not possible to completely prevent the entry of dust 5 Dustprooftype but dust cannot enter in amounts that interfere with the operation of electrical devices or that pose a safety hazard Protection rating for external objects Protection rating for 3 Protected against Water sprayed at an angle up to 60 from the vertical shall water spraying water have no harmful effect IP54 protection rating Type Protection ratings Summary Definition It is not possible to completely prevent the entry of dust 5 Dustprooftype but dust cannot enter in amounts that interfere with the operation of electrical devices or that pose a safety hazard Protection rating for 4 Protected against Exposure to splashing water from all directions produces water water splashes no harmful effect IP64 protection rating Type Protection ratings Summary Definition Protection rating for extemal objects 6 Dustprooftype Prevents the entry of dust Protection rating for 4 Protected against Exposure to splashing water from all directions produces water water splashes no harmful effect IP65 protection rating Type Protection ratings Summary Defi
93. T343 A 1400 539 605 AT343 A 300 539 622 AT343 A 1500 539 606 AT343 A 350 539 623 AT343 A 1600 539 607 AT343 A 400 539 624 AT343 A 1700 539 608 AT343 A 450 539 625 AT343 A 1800 539 609 AT343 A 500 539 626 AT343 A 2000 539 611 AT343 A 600 539 627 AT343 A 2200 539 613 AT343 A 700 539 628 AT343 A 2400 539 614 AT343 A 750 539 629 AT343 A 2500 539 615 AT343 A 800 539 630 AT343 A 2600 539 6164 AT343 A 900 539 631 AT343 A 2800 539 617 AT343 A 1000 539 632 AT343 A 3000 The in the Order No is as follows AT343 30 AT343A 31 ABS AT303 AT303A Order No Code Order No Code 539 321 AT303 A 100 539 336 AT303 A 1100 539 322 AT303 A 150 539 337 AT303 A 1200 539 323 AT303 A 200 539 338 AT303 A 1300 539 324 AT303 A 250 539 339 AT303 A 1400 539 325 AT303 A 300 539 340 AT303 A 1500 539 326 AT303 A 350 539 341 AT303 A 1600 539 327 AT303 A 400 539 342 AT303 A 1700 539 328 AT303 A 450 539 343 AT303 A 1800 539 329 AT303 A 500 539 344 AT303 A 2000 539 330 AT303 A 600 539 345 AT303 A 2200 539 3314 AT303 A 700 539 346 AT303 A 2400 539 332 AT303 A 750 539 347 AT303 A 2500 539 3334 AT303 A 800 539 348 AT303 A 2600 539 334 AT303 A 900 539 349 AT303 A 2800 539 335 AT303 A 1000 539 350 AT303 A 3000 The in the Order No is as follows AT303 Blank AT303A 01 S E Y wn 7 S 2 a E Nn
94. T503 A 700 SC 539 775 10 AT553 800 SC 539 745 AT543 A 800 SC 539 885 11 AT573A 800 SC 539 175 AT503 A 800 SC 539 776 10 AT553 900 SC 539 746 AT543 A 900 SC 539 886 11 AT573A 900 SC 539 176 AT503 A 900 SC 539 777 10 AT553 1000 SC 539 747 AT543 A 1000 SC 539 887 11 AT573A 1000 SC 539 177 AT503 A 1000 SC 539 778 10 AT553 1100 SC 539 748 AT543 A 1100 SC 539 888 11 AT573A 1100 SC 539 178 AT503 A 1100 SC 539 779 10 AT553 1200 SC 539 749 AT543 A 1200 SC 539 889 11 AT573A 1200 SC 539 179 AT503 A 1200 SC 539 780 10 AT553 1300 SC 539 750 AT543 A 1300 SC 539 890 11 AT573A 1300 SC 539 180 AT503 A 1300 SC 539 781 10 AT553 1400 SC 539 751 AT543 A 1400 SC 539 891 11 AT573A 1400 SC 539 181 AT503 A 1400 SC 539 782 10 AT553 1500 SC 539 752 AT543 A 1500 SC 539 892 11 AT573A 1500 SC 539 182 AT503 A 1500 SC 539 783 10 AT553 1600 SC 539 753 AT543 A 1600 SC 539 893 11 AT573A 1600 SC 539 183 AT503 A 1600 SC 539 785 10 AT553 1800 SC 539 755 AT543 A 1800 SC 539 895 11 AT573A 1800 SC 539 185 AT503 A 1800 SC 539 786 10 AT553 2000 SC 539 756 AT543 A 2000 SC 539 896 11 AT573A 2000 SC 539 186 AT503 A 2000 SC 539 787 10 AT553 2200 SC 539 757 AT543 A 2200 SC 539 897 11 AT573A 2200 SC 539 187 AT503 A 2200 SC The CIT in the Order No is as follows AT543 10 The Cin the Order No is as follows AT503 10
95. T553E 350 HC 539 736 22 AT543E 350 HC 539 767 22 AT553E 400 HC 539 737 22 AT543E 400 HC 539 768 22 AT553E 450 HC 539 738 22 AT543E 450 HC 539 769 22 AT553E 500 HC 539 739 22 AT543E 500 HC 539 770 22 AT553E 550 HC 539 740 22 AT543E 550 HC 539 771 22 AT553E 600 HC 539 741 22 AT543E 600 HC 539 772 22 AT553E 650 HC 539 742 22 AT543E 650 HC 539 773 22 AT553E 700 HC 539 743 22 AT543E 700 HC 539 774 22 AT553E 750 HC 539 744 22 AT543E 750 HC 539 775 22 AT553E 800 HC 539 745 22 AT543E 800 HC 539 776 22 AT553E 900 HC 539 746 22 AT543E 900 HC 539 777 22 AT553E 1000 HC 539 747 22 AT543E 1000 HC 539 778 22 AT553E 1120 HC 539 748 22 AT543E 1120 HC 539 779 22 AT553E 1220 HC 539 749 22 AT543E 1220 HC Mitutoyo Mounting dimensions HC Type Resolution 0 005ym Unit mm
96. UD 134 80 PVC sheathed 45 Signal cable minimum bend radius R 50 fixed R 100 moving 7 PVC sheathed Q 31202 Mitutoyo M6 through hole Hex socket headed screw M4x16 small round plain washer spring washer Alarm display LED 45 71202 5 al Unit mm Mounting dimensions SC Type x aN FTN 8 UMS ui EE mum 5 Rigidly fixed portion K Elastically secured portion E b 4 8 endl L 0 2 PO 2 E OG Saee 95 through hole la 0 05 500 94 5 through hole 28 3 countersunk depth 9 Hex socket headed screw M4x25 f x Hex socket headed screw Mdx16 M small round plain washer sping washer E A small round plain washer spring washer si ise double dotted line uminum n frame surface Tey r EC TRONE HOH Air purge M5x5 E oF i j Both IL m E a Lo v 1 a E E TE i 0 1 R xz mK A ONI s r Vertical drecion LB p Longitudinal direction pE IK M6 L E s Ores depth 5 BS RTT id Hex socket headed screw M4x25 120 1 Bs teo nd ABS zero ont base position 6630 2 small round plain washer spring washer
97. al Square wave signal Z Special specification Head cable length Effective range Ee ee EI Effective Effective Effective A 1m standard Code range mm range mm Code range mm B 0 5m 0010 10 1600 1600 C 2m 0025 25 1700 1700 z Special length specification 0050 50 1800 1800 max 2 5m 0075 15 2000 2000 0080 80 2200 2200 Alarm output Bono 100 2400 2400 Code Details 0150 150 2500 2500 e Alarm signal 0200 200 2600 2600 H High impedance 0250 250 2800 2800 0300 300 3000 3000 Direction 0350 350 Code Details 0400 400 Ru e Normal Note For the standard specification the indicated effective range 2 Reverse depends on the product code Example of standard specification Effective range 10mm ST46EZAL 0010 Effective range 250mm ST46EZAI 0250 Reference point Scale shape Code Details Effective range Details Cross section Effective range Q 50mm pitch 100 to 3000mm Glass separate t4 8 x w22 100 to 3000mm B Center point 10 to 80mm Glass separate t2 8 x w8 10 to 80mm QC Center point 10 to 80mm With aluminum base t5 1 x w23 10 to 80mm Z Special position specification Special shape When the direction is normal the sinusoidal signal the 2 phase square wave output signal Phase A Phase B and the reference point signal waveform are as shown below Traveling direction of detector head Scale track
98. al Co Ltd Remove the protective tape attached to the glass scale and detector head when you install the device G indicates the machine guideway is the reference surface Main scale Remove the scale protective tape 9 2 E E 9 S A D E S E O T i D E Handling linear scales AT scale air supply e One way to improve the environmental resistance coolant resistance and dust resistance of assembly type AT linear scales is to supply the scale unit with clean compressed air through plastic tubing to one of the M5 screw holes that are present on both sides of the scale unit The AT103 AT211 AT203 ABS AT500 series and ABS AT300 series are standard equipped with air supply LE ee Note Supplying air is an ancillary method The mounting posture of the device is of primary importance Be sure to properly orient the device as per the mounting posture described in the user s manual before you implement this method Also when supplying air the air filter must be replaced periodically according to the contamination level of the air source in use Note that a dirty filter continues to be used malfunctions will be caused by dirt entering the scale which is the opposite of the intended effect Air unit option As an option you can purchase an air supply unit Air supply unit specifications 1 A
99. ale also uses a graduated glass scale as measuring length reference An LED and light receiving device together with gratings on an index scale produce and detect changes in light intensity and output a value representing the displacement magnitude Because the change in reflected light intensity of the glass scale is converted into an electrical signal the setup is called a reflective type photoelectric system A parallel light beam generated by the LED and collimator lens is directed onto the index scale gratings and the glass scale gratings The light reflected from the scale gratings produces interference fringes on the photodiode array of the light receiving device When the glass scale is displaced in the measuring direction the interference fringes shift and a sinusoidal signal with a cycle that is the same as or one half of the scale grating pitch is output by the light receiving device Mitutoyo Detection principle of electromagnetic induction system ABS ST700 Basic operation principle of electromagnetic induction system ae Cae ly H if 4 L i e ierra l X 2 Li L i 1 ColB 1 evo Figure 1 Electromagnetic induction system encoder principle When a current I1 that changes over time is passed through coil A a magnetic flux is created in the vicinity of coil A This causes an inductive current I2 to flow in coil B in a direction that cancels out the magnetic field Magnetic permeability b
100. als Type A C 1Vp p differential sinusoidal siqnals Type D Phase A Vref i i Phase A f f Output signal pitch 4um 3 BE E i I 1 1 be Phase B Vref E UNI amp a i Phase XA D Vref 2 2 i I i i 1 N Ej Fu 2 2 Phase difference 90 V 2V Vref 2 5V mE S Typ a i 2 Po E e Scale reference point 200 100um bod Phase B i H Vos 2 4V min INI i Vor 04V max Phase difference 90 10 PA Phase Z Vref z T Phase XZ i Vref 3 a J Ly Ld J iti Von 2 5V min i Vref 2 5V Von 2 5V max i PZ te Edge interval resolution A 100 PZ Note The phase difference between the PZ signal phase pulse width and the PA signal PB signal has no effect 200 100um Output specification 1 Output connector specification Type A B C 2 Output connector specification Type D Output connector pin type RDAD 15P LNA 05 Hirose Output connector pin type RDAD 15P LNA 05 inch screws Hirose Electric or equivalent Electric or equivalent Applicable connector standard accessory D15 403N 110 Applicable connector standard accessory D15 403N 150 inch Technical Electron or equivalent screws Technical Electron or equivalent Pin No Type A Signal Type B Signal Type C Signal Type D Signal 1 OV GND OV GND OV GND Phase XA p OV GND OV GND OV GND Phase XB 3 5V 5V 5V Phase Z 4 5V 5V 5V 5V Vp 5
101. an oa L 2 ABS AT5CI5E j ri Sen AIEME e D sub 15P pin type Shielded wire 5 Feedback cable 474 L Head cable Li Signal cable La Minimum bend radius R 50 fixed Minimum bend radius R 50 fixed R 100 moving R 100 moving D sub 15P pin type x Allowable cable length for feedback cable L3 power supply voltage 5 0V 1 Head cable L 2m recommended standard length Signal cable L2 3m 06ACT652A 5m 06ACT652B 8m 06ACT652C 10m 06ACT652D Allowable length of cable Ls Max 24m 19m 11m VA Total cable length 29m 29m 21m 12m 2 Head cable Li 5m Signal cable L2 3m 06ACT652A 5m 06ACT652B 8m 06ACT652C 10m 06ACT652D Allowable length of cable Ls Max 21m 19m 11m VA Total cable length 29m 29m 24m 15m 3 Head cable Li 10m Sara 3m 06ACT652A 5m 06ACT652B 8m 06ACT652C 10m 06ACT652D Allowable length of cable Ls Max 16m 14m 11m N A Total cable length 29m 29m 29m 20m Notes 1 Feedback cable part numbers 7m 06ACD238B 9m 06ACD238C 10m 06ACD238A 12m 06ACD238D 2 Feedback cable material PVC sheathed standard or high flex type special order 3 Signal cable output side single wire standard or D sub 15P special order 4 Applicable connector for D sub 15P HDAB 15S Hirose Electric or equ
102. arallelism with the machine guideway To adjust the parallelism 1 move the mechanically movable parts such as the slide table to adjust the parallelism of the Scale unit or 2 measure the position from the mechanism s guide rail or from a corresponding reference e Permissible parallelism value Less than 0 1mm or less than 0 2mm This varies depending on the scale model Effective range Dial gauge Up and down directions x wens E i Lever type dial gauge 3 Cautions regarding mounting the ST scale excluding the ABS ST700 Mount the main scale so that the detector head is facing the scale front surface the surface on which rainbow colors are visible when light strikes the surface at an angle Models that have the Mitutoyo logo on the main scale are mounted correctly when the logo can be read from the detector head side Ambient light entering from the back of the main scale will cause incorrect operation so the scale mounting design must ensure that ambient light does not enter Direction from which the Mitutoyo logo can be read Detector head e Use a tool such as a lever type indicator or dial gage to move the head bracket and the scale mounting relatively in order to check whether the scale mounting surface has been prepared as shown in the mounting diagram Use flexible adhesive with adhesive type scales We recommend that you use KE441T manufactured by Shin Etsu Chemic
103. ase XA Shield FG Orange Phase B Phase XA Note 1 Ground the shield to the earth bar 2 Signal cable B European CNC manufacturer s specification 12 pin Type Connector without locking ring Phase B Vref Pin Signal Pin Signal 3 2 12 5V 1 Phase XB Phase 90 10 3 10 11 GND 3 Phase Z 5 Phase A 4 Phase XZ o 6 Phase XA Shel FG Phase XB 8 Phase B 79 Not used 18074909 S oe 8 3 Signal cable C FANUC LTD specification ve S 12 pin Type Connector st Pin Signal Pin Signal zi 12 45V 8 Phase XB Phase XZ vref S 3 4 GND 9 Phase Z et 5 Phase A 10 Phase XZ Vref 2 540 5V 6 Phase XA 11 shell FG nominai A 100 7 Phase B 12 Not used Note 1 Connector used RM15WTP 12P Note 2 Applicable connector RM15WTR 12S Hirose Electric or equivalent product Absolute Interval Code Mitutoyo WAY 45 First reference point output position ZP 20 TP 10 04 Effective range Maximum travel length ZP 20 ZP 20 Tp 10 08 ZP 20 ZPn 10 0 02xn ZP 20 Reference point signal output position AT402E scale unit mounting dimensions Elastically secured portion Special leaf spring M5x0 8 length 25
104. ber and detector head once a year The maintenance interval will vary slightly according to the operating conditions of the scale Apply grease 5mm max i t Detector head Soak cloth paper or other similar material in silicone grease and then apply to the entire length of the contacting area Scale unit Dustproof rubber Durability of cables used with the linear scale The life expectancy of the linear scale cables has been tested using the methods shown below Test method A A Approx 90 Tensile strength Approx 1N Test conditions Bend ulcum Bend angle 90 Test speed 30 times per minute For the number of bends A B A C and then A represents one bend Bend radius R 50mm Evaluation standard value 3 000 000 times No breaks in the signal wires or shield Test methodB P Hard wired band Movable cable Fixed cable S w amp E E Test conditions Bend radius R 40mm Er Speed 2m s Arc length Travel distance 1000mm 80mm Scales Test method Signal cable test result AT100 series A 3 million times AT211 A 3 million times AT202 A 3 million times AT212 A 3 million times AT300 series A 3 million times AT500 series A 3 million times ST700 series B 54 million times or more ST36 B 54 mil
105. compatible model MREKCBL_IM H indicates the cable length 2 5 10m EONDECURR Connector B LF eu f Depending on the signal cable length the encoder cable length is restricted as follows as MEE Signal cable 0 2 m 2 5 10m Ve MR J4 MR J3 E EL E 2 5m Signal cable option Feedback cable Signal cable 3m 2m 0 2 2 3m The feedback cable configuration depends on the system Please contact Mitsubishi Electric Corporation for details Mounting dimensions ABS AT353 AT343 A AT303 A Unit mm Overall length Lz Effective range 100 mm to 250mm m Mounting block fixing pitch Ls Mounting block fixing pitch La AL 25 AT mE B M5 7 8 x lie It bot 23 at both ends S 00202 Mounting block T0216 Elastically secured portion 5 Rigidly fixed portion T 15 cesa HEEE gt Scale unit mounting surface A mA 1 5 302
106. cy type Servoland Corporation SVF Series ABS AT503A PMAC JAPAN Co Ltd UMACTurbo PMAC2 Other machine types ABS AT503 1 For connection to ABS AT503A Note ABS AT503 T Communication method Blank Full duplex communication A Half duplex communication Note For details regarding the applicable system please consult with the individual manufacturer Scale configuration ABS AT500 S Series Im ABS AT503 SC ABS AT503A SC AABS zero pori base poson AT545A signal cable 3m ABS zero point base position VF Box ABS AT500 H Series ABS AT5C13 HC i jae e ABS AT5LI3A HC m SS yp clio v 7 ai y Base position ABS zero point 4 ABS AT553 HL yam 7 i E ABS AT503A HL E ABS AT503 HR ABS AT503A HR Mitutoyo ABSOLUTE Specifications tm Code High rigidity type High accuracy type ABS AT503 SC ABS
107. d otas Jo 4 V UE PB piri 5 2 The connector CNB for signal cables 2 x uu j AMO wes DE ppt E G H and J are half pitch connectors tuetur Minimum edge interval PO a Lu ii Manus Applicable connector CN4 Pl z I O HDAB 155 Hirose Electric or equivalent product D sub series may be used wee Le P2Z 60 10um Head cable Length Flexible Code p metal Connector CN1 Scale alarm display LED L v ieu o Not wat f Waterproof connector special Scale unit A 03m Y Special waterproof OL waterproo dal E enl B B 0 3m No Special waterproof C 1m No Special waterproof e H te if D 3m N5 CNA N CN3 CN2 CN El dm Feedback cable Signal cable Head cable Fl 5m Provided by user Included connector when a signal cable is used No No H 7m J 8m Note The cable is enclosed in a flexible EM CNS Scale unit metal conduit or else is PVC sheathed g lo 9 Single head cable type no connector i o zi Single wires lt 2 Single head cable type no connector M 4 POM 4 E Detector head 45 L Head cable A Wire color White black OV Brown red 45V Orange Yellow Green ALM signal for single head cable type no connector 1kQ i Alarm circuit jn ALM High Equivalent to TC7S08 Tos
108. ded screw M4x25 Leso2 67 5202 Ls 11 6 p z small round plain washer spring washer S Slo S RO Scale unit TOR un EE ag s 3 z A E oof so aL T A NN EPE E Vertical direction is Sig a K NES zi Porites i TE S eB though hole Longitudinal SS Hele E So 4 Voi 220 a direction S E 5622 Detector head Base position Step between detector head 3 T ounting mating surface E gee 84 ABS zero point base position and mounting block HEEL oun Bes 92 Vertical direction 225 Longitudinal direction Erw Effective range Lo Maximum travel length Li E Eo E 19 4 0 8 Ss un 5 5 80 23 1 B4 3 L3 Head cable 5 92 Interface box E 4 Note Not waterproof al T a Head cable i a A oly i H 45 v M through hole 5 Alarm display LED 43 Tia N Hex socket headed screw M4x20 pay small Td plain washer spring washer 2xM5 through hole 68 4 Alarm display LED Hex socket headed screw Notes M4x20 spring washer 1 G indicates the machine guideway 2 P indicates the mating surface for mounting the unit S indicates the mating surface for mounting the detector head P Mounting mating surface 3 Q and R indicate the datum surfaces for mounting this linear scale 01 G 4 For the values of Lo to Ls in the figure refer to the table below 0 05 1000 3 ji P g 77 Dimensions Effective range Maximum travel l
109. dle support Unit mm Mounting method A _ 9 L5 9 i 5 Scale unit mounting x Li surface 4 Middle support 12 95 hole I3 2 1 T 0 216 e 25 hole 1 uj gje uy Bt 5 S m gt ali a 5 VV il ee Ey n E Both si tersunk EM deni Ludi id d 2xM6 through hole countersunk g9 1 5304 19 1 5 on both sides depth 4 5 z Mounting method B G Machine guideway Es dus support d B Fixed Fired 95 hole 2x91 through uH 17 le 914 both sides countersunk depth 6 5 O 410 2 t 2xM4x0 7 depth 5 Scale unit mounting surface Dimensions Ls Le and L7 indicate the recommended mounting positions for the middle Effective range mm Middle support 3 supports included with scale units with an effective range of 500mm and more The 500 1000 A 1 place position of the middle support is adjustable in the measuring length direction 100 590 ue ie Ee E i ET Dimensions of scale units En AT113 Effective range Maximum travel length Mounting hole pitch Mounting hole pitch Overall length Middle support Middle support Middle support Signal cable g o Order No Code Lo mm L1 mm La a in L4 mm Ls ed Le mm L7 mm length m EA E 539 201 30 AT113 100 100 120 258 242 276 lt tc 539 202 30 AT113 150 150 170 308 292 32
110. e mm s Note The minimum edge interval varies 0 to 10 based on the operating environmental conditions Mitutoyo Example AT211 1 5 0 0 A 1 S P1 AIB as to Signal cable Length3m No flexible metal conduit Mounting method Multi point fixing Scale reference point Head cable somm pitch Direction Length 0 3m Standard PA goes ahead With flexible metal conduit RETT um Resolution 0 5um Response speed 54m min Minimum edge interval 500ns Signal cable Flexible metal Code Length L conduit Scale alarm display LED m Ys E Not waterproof Waterproof connector special Scale unit B 3m o g E p n lo ime yon WO C 5m Yes JM UB 3H ps A D 5m o Z CNS CN4 N CN3 N2 CN1 E 7m Yes Feedback cable Signal cable Head cable F 7m o Provided by user Included connector when a signal cable is used E Ge 3m o en 5m o 7 a s b jg Em 5 Connector for signal cable CN3 pin type Output circuit specification g X No signal cable 1 8 eG SNS PA pA E in No igna in No ignal Phase A px PA 1 The cable is enclosed in a flexible TLT ov 2 PB i m AT d my metal conduit or else is PVC sheathe
111. e values of Lo to Le in the figure refer to the table below Hex socket headed screw motel 000 M4x20 spring washer Dimensions Effective range Maximum travel length Overall length Mounting pitch No of mounting holes Lo mm Li mm L2 mm Ls mm La mm Ls mm Le mm n 100 105 251 235 MS 0 150 155 301 285 142 5 0 200 205 351 335 167 5 0 250 255 401 385 192 5 0 300 305 451 435 217 5 0 350 355 501 485 242 5 0 400 405 551 535 267 5 0 450 455 601 585 292 5 0 500 505 651 635 STS 0 e 550 555 701 685 342 5 177 5 165 1 S o 600 605 75 735 367 5 197 5 170 1 oe 650 655 80 785 392 5 197 5 195 1 ga 700 705 85 835 417 5 2175 200 1 P 750 755 90 885 442 5 2175 225 1 EE 800 805 95 935 467 5 2375 230 1 ER 900 905 105 1035 517 5 2515 260 1 lt LL 1000 1005 115 1135 567 5 277 5 290 1 1120 1125 1274 1255 627 5 227 5 200 2 1220 1225 137 1355 677 5 217 5 230 2 Codes and Order Numbers ABS AT555E HC ABS AT545E HC Order No Code Order No Code 539 761 62 AT555E 100 HC 539 731 62 AT545E 100 HC 539 762 62 AT555E 150 HC 539 732 62 AT545E 150 HC 539 763 62 AT555E 200 HC 539 733 62 AT545E 200 HC 539 764 62 AT555E 250 HC 539 734 62 AT545E 250 HC 539 765 62 AT555E 300 HC 539
112. ective range L mm L2 mm L3 mm L4 mm Ls Le L7 AT211 100B 100 120 258 242 276 Effective range mm Middle support AT211 150B 150 170 308 292 326 500 to 1000 A 1 place AT211 200B 200 220 358 342 376 1100 to 1500 B C 2 places AT211 250B 250 270 408 392 426 AT211 300B 300 330 468 452 436 AT211 350B 350 380 518 502 536 AT211 400B 400 430 568 552 586 AT211 450B 450 480 618 602 636 AT211 500B 500 540 678 662 696 339 331 AT211 600B 600 640 778 762 796 389 381 AT211 700B 700 740 878 862 896 439 431 AT211 750B 750 780 918 902 936 459 451 AT211 800B 800 840 978 962 996 489 481 AT211 900B 900 940 1078 1062 1096 539 531 AT211 1000B 1000 1040 1178 1162 1196 589 581 AT211 1100B 1100 1140 1278 1262 1296 430 AT211 1200B 1200 1240 1378 1362 1396 460 AT211 1300B 1300 1340 1478 1462 14966 490 AT211 1400B 1400 1440 1578 1562 1596 530 AT211 1500B 1500 1540 1678 1662 1696 560 Mitutoyo Cable pattern 56 4 50 Head cable E 50 G0 Lis 03 or im Sic filer Sn raa mae ME e Sir i Fs di xm i Scale alarm display LED Signal cable Connector for feedback cable Lis 3 5 or 7m Included accessory User provides the cable and NC side connectors 56 4 Head cable 47 4 50 30 VER or 1m TRAE ries fs g
113. ed AE E Effective range mm Middle support E 1000 to 1500 1 place g 1600 to 2200 B C 2 places E 2400 to 3000 A B C 3 places AT203 3250 to 6000 Overall length L2 ZIE la i la 7 u 7 A 225 2 Elastically secured portion 80 M un T l sial 7 tlasticaly G BEN Air supply hole M5 n H To oe Elastically secured portion Mounting block Rigidly fixed portion Secured portion 0 2 G secured portion SL NI uu 2 d 2 i q mi i TI i i IL p s i 6 tj Ii II Ji 3 Ji ji ji ji S a y II II IL JE jj j i4 ip E d d I i EN AN Y Pt a ES E SZ i J ti s n g i ais 46 3 7 15005 36 L 116 Countersunk depth 6 5 TAST 60102 0 1 A TU 30 G Machine guideway L Effective range Lo Signal cable L Maximum travel length Li l Jl Jl if Bg 13M 7i T F T O ji ji View in X direction i L N um head mounting surface UR
114. ength Overall length Mounting pitch E Lo mm Li mm L2 mm L3 mm La mm Le mm 56 100 105 251 235 117 5 2s 150 155 303 285 142 5 100 S 2 200 205 351 335 165 5 130 LA 250 255 401 385 192 5 160 3 Ec 300 305 451 435 217 5 190 ee 350 355 501 485 242 5 220 lt tc Codes and Order Numbers ABS AT553E HL ABS AT543E HL ABS AT555E HL ABS AT545E HL Order No Code Order No Code Order No Code Order No Code 539 761 42 AT553E 100 HL 539 731 42 AT543E 100 HL 539 761 82 AT555E 100 HL 539 731 82 AT545E 100 HL 539 762 42 AT553E 150 HL 539 732 42 AT543E 150 HL 539 762 82 AT555E 150 HL 539 732 82 AT545E 150 HL 539 763 42 AT553E 200 HL 539 733 42 AT543E 200 HL 539 763 82 AT555E 200 HL 539 733 82 AT545E 200 HL 539 764 42 AT553E 250 HL 539 734 42 AT543E 250 HL 539 764 82 AT555E 250 HL 539 734 82 AT545E 250 HL 539 765 42 AT553E 300 HL 539 735 42 AT543E 300 HL 539 765 82 AT555E 300 HL 539 735 82 AT545E 300 HL 539 766 42 AT553E 350 HL 539 736 42 AT543E 350 HL 539 766 82 AT555E 350 HL 539 736 82 AT545E 350 HL a c zc ED oO c ua w gt O a Q lt wo 5 mn oO e lt Nn sa lt Assembly Type ABS AT Series Absolute Scale Unit Standard Type ABSOLUTE Features Complete absolute type linear scales e Easy operation because no recalibration is required at startup or after a power failure e Suitable for position feedback
115. er Numbers ABS AT555 HC ABS AT545 AT545A HC ABS AT505 AT505A HC Order No Code Order No Code Order No Code 539 761 60 AT555 100 HC 539 731 AT545 A 100 HC 539 161 AT505 A 100 HC 539 762 60 AT555 150 HC 539 732 AT545 A 150 HC 539 162 AT505 A 150 HC 539 763 60 AT555 200 HC 539 733 AT545 A 200 HC 539 163 AT505 A 200 HC 539 764 60 AT555 250 HC 539 734 AT545 A 250 HC 539 164 AT505 A 250 HC 539 765 60 AT555 300 HC 539 735 AT545 A 300 HC 539 165 AT505 A 300 HC 539 766 60 AT555 350 HC 539 736 AT545 A 350 HC 539 166 AT505 A 350 HC 539 767 60 AT555 400 HC 539 737 AT545 A 400 HC 539 167 AT505 A 400 HC 539 768 60 AT555 450 HC 539 738 AT545 A 450 HC 539 168 AT505 A 450 HC 539 769 60 AT555 500 HC 539 739 AT545 A 500 HC 539 169 AT505 A 500 HC 539 771 60 AT555 600 HC 539 741 AT545 A 600 HC 539 171 AT505 A 600 HC 539 773 60 AT555 700 HC 539 743 AT545 A 700 HC 539 173 AT505 A 700 HC 539 774 60 AT555 750 HC 539 744 AT545 A 750 HC 539 174 AT505 A 750 HC 539 775 60 AT555 800 HC 539 745 AT545 A 800 HC 539 175 AT505 A 800 HC 539 776 60 AT555 900 HC 539 746 AT545 A 900 HC 539 176 AT505 A 900 HC 539 771 60 AT555 1000 HC 539 747 AT545 A 1000 HC 539 177 AT505 A 1000 HC The IL in the Order No is as follows AT545 60 The IL in the Order No is as follows AT545 60 AT545A 61 AT545A 61 IS E Y wn 7 D 2 nw E Nn E T v N
116. es can be used utting fluid etc is used please consult our nearest sales department Feedback cable Yaskawa Electric Corporation serial cable can be used as the feedback cable for connecting to the Yaskawa Electric Corporation servo amplifier Cable type number JZSP CLP70 CIC4E 03 05 10 15 20 When wishing to connect a feedback cable to the Mitsubishi Electric Corporation MR J4 MR J3 series please reference the code numbers below and order from our company For the MR J4 MR J3 series 5m No 06ACF117A 10m No 06ACF117B ST748 L ST758 L Output connector pin type D sub 15 pin Applicable connector HDAB 15S Hirose Electric Alternately an equivalent product D sub series can be used Pin No Signal Pin No Signal Pin No Signal 1 5V Vcc 1 OV GND 1 OV GND 2 RQ DT S 2 OV GND 2 OV GND 3 5V Vcc 3 5V 3 5V 4 Ka 4 45V 4 45V 5 OV GND 5 s 5 DT 6 RQ DT S 6 iG 6 DT 7 c 7 RQ DT 7 RQ 8 iG 8 RQ DT 8 RO 9 OV GND 9 iG 9 N C Connector shell E G 10 iG 10 N C Note Leave test terminals Pin No 7 and 8 11 45V 11 5V disconnected during use 12 iC 12 N C 13 OV GND 13 OV GND 14 iG 14 N C 15 F G 15 EG Connector shell EG Connector shell EG Note Leave test terminals Pin No 9 and 10 disconnected during use Note Leave test terminals Pin No 9 and 10 disconnected during use wy 56 EN Su BO
117. etween coils is largely identical in air water or oil Electromagnetic induction type sensor has excellent water resistance and oil resistance P Voltage V T 1 DER Sensor Displacement magnitude imen 1 section A A T ju i i 4 Multi track design allows o 1 configuration of absolute encoder Ed Coils arranged at constant F es pitch on scale d Figure 2 Electromagnetic induction scale detection principle Electromagnetic induction is a phenomenon that occurs for example when two coils are arranged facing each other as shown in Figure 1 and a time varying current I1 is passed through coil A This will cause an induced current 12 to flow in coil B in a direction that cancels out the magnetic field The electromagnetic induction type linear scale uses this phenomenon to convert a displacement magnitude into an electrical signal The operational principle of the sensor section is shown in Figure 2 A number of scale coils are arranged with precise spacing on the main scale The moveable sensor section that detects displacement carries an exciter coil and a corresponding detector coil A current is sent through the exciter coil thereby creating a magnetic flux that induces a current in the facing scale coil The magnetic flux created in turn by that current induces a current in the facing detector coil The degree of inductive coupling between the coils changes according to the di
118. fective range Lo ABS zero point base position 0 1 P small round plain washer spring washer Maximum travel length Li Vertical directi al t longitudinal direction SE 19 4 0 8 103 S 13 4 4 80 a 8 0 e Notes 2 S8 H m ppep r 1 G indicates the machine guideway e M6 through hole 2 P indicates the mating surface for mounting the unit S indicates the mating 45 7120 2 Hex socket headed screw M4x16 surface for mounting the detector head Mounting Mall round plain washer spring washer 3 Q and R indicate the datum surfaces for mounting this linear scale P mating stirface Alarm display LED 4 For the values of Lo to La and Ls in the figure refer to the table below 0 1 G 0 05 1000 l n dem et Dimensions Effective range Maximum travel length Overall length Mounting pitch Lo mm Li mm L2 mm L3 mm La mm Le mm 100 120 265 249 124 5 150 170 315 299 149 5 100 2 200 220 365 349 174 5 130 4 E 250 270 415 399 199 5 160 Ano 300 320 465 449 224 5 190 gin 350 370 515 499 249 5 220 536E otc PAA Qa L Codes and Order Numbers ABS AT553 HL e ABS AT543 AT543A HL ABS AT573A HL ABS AT503 AT503A HL Order No Code Order No Code Order No Code Order No Code 539 761 40 AT553 100 HL 539 731 AT543 A 100 HL 539 871 41 AT573A 100 HL 539 161 AT503 A 100 HL 539 762 40 AT553 150 HL 539 732 AT543 A 150 HL 539 872 41 AT573A 150 HL 539 162 AT503 A 150 HL 539 7
119. gitudinal direction G 7 a j F A cely ES 1 5202 Ss Sy M6 through hole a8 countersunk depth 5 130 1 Gap between detector j uaua m y Her socket fisted screw Miaa fcn bemwendememr Ta ead and aluminum frame Longitudinal Des 0 small round plain washer spring washer Pen b teer oreo i L23 Adjusted with special jig direction ABS zero point baseiposition 84 S Mounting mating surface 92 Detector head Zo Interface ater Effective range Lo Vertical direction i Maximum travel length L Longitudinal direction 5 5 80 23 1 h 3 Aluminum frame i Stainless steel bushing Bor ru Alarm display LED 2x5 through hole E L 6 J4 Hex socket headed screw M4x20 Head cable Special leaf spring spring washer Hex socket headed screw M4x25 d aA l Do dis the machine guideway Desc elc selon m ountin g mating surface 2 Finans n inating siriac r mounting the aluminum frame S indicates the mating su
120. h scale reference point 50mm pitch 10 to 80mm Center point Power supply 5VDC 5 Maximum current consumption 120mA 250mA 190mA Operating temperature humidity 0 to 40 C 20 to 80 RH no condensation Storage temperature humidity 20 to 60 C 20 to 80 RH no condensation Alarm indication A scale alarm is indicated with an LED on the I F box Maximum speed for scale reference point detection is 20mm s Parts Alarm reset transmission reception signal circuit B Type Main scale 10 to 80 I F box side Control device side Foraphotocoupler For a relay At i A a ida 1 2k2 AL Anode L Jel n AL Cathode z DONE ae DX en E r Reset input Connect the alarm reset input circuit so that the current is 3 to 10mA Also the device has an internal resistor 1 2kQ so by applying 5 to 12V with a pulse width of at least 10ms across AL anode AL cathode the alarm can be reset When applying 12V or more add an external resistance to limit the current to within the range stated above Scale retaining spring Output connector included Mitutoyo Output signal waveform Note The phase difference between the PZ signal and the Phase A signal and the Phase B signal are not defined l Phase XB i e 2 phase square wave signals Type B C c Von PA 1180 90 r Va j e 2 phase sinusoidal sign
121. he accuracy standard value of a linear scale includes the aforementioned errors inspected at fixed intervals and interpolation accuracy Accuracy chart error plot Z Accuracy a um a Effective range X Measurement position Figure 2 1 Accuracy notation method 1 Accuracy a 2 um Njo S Effective range J X Measurement position Figure 2 1 Accuracy notation method 2 Serial interface This refers to a communication channel in which digital data is transmitted sequentially 1bit at a time While it has inferior real time characteristics the advantages are that it requires less wiring and has high reliability This is the main communication method for feedback encoders Line driver output This refers to signals that are output as square waves A signal that has the inverted polarity of the output signal is generated and the difference between these signals is set as the signal differential signal output This complies with EIA standards RS 422 and RS 485 RS 422 This was standardized by the Electronic Industries Alliance EIA of the U S It is one of the balanced type serial communications standards and it has excellent noise reducing characteristics The maximum transmission speed is 10Mbps but limitations on the transmission speed arise as the cable length increases RS 485 This was standardized by the Electronics Industries Alliance EIA of the U S It is one of he bala
122. he mating surface for mounting the unit t adu mmm au ETE Pres B koda n sire head a cd cM tere the faure refer o ceri 45 oe Tp Hex socket headed screw M4x20 small round plain washer spring washer WONG surface Alarm display LED 0 05 1000 Dimensions Effective range Maximum travel length Overall length Mounting pitch No of mounting holes Lo mm Li mm L2 mm Ls mm La mm Ls mm Le mm n 100 105 251 235 MS 0 150 155 301 285 142 5 0 200 205 351 335 167 5 0 250 255 401 385 192 5 0 300 305 451 435 217 5 0 350 355 501 485 242 5 0 400 405 551 535 267 5 0 450 455 601 585 292 5 0 S 500 505 651 635 STS 0 S 2 550 555 701 685 342 5 177 5 165 1 ws 600 605 75 735 367 5 197 5 170 1 S e 650 655 80 785 392 5 197 5 195 1 oo 700 705 85 835 417 5 217 5 200 1 E t 750 755 90 885 442 5 2175 225 1 20 800 805 95 935 467 5 237 5 230 1 x 900 905 105 1035 517 5 2515 260 1 1000 1005 115 1135 567 5 UA 290 1 1120 1125 1274 1255 627 5 227 5 200 2 1220 1225 137 1355 677 5 217 5 230 2 Codes and Order Numbers ABS AT553E HC ABS AT543E HC Order No Code Order No Code 539 761 22 AT553E 100 HC 539 731 22 AT543E 100 HC 539 762 22 AT553E 150 HC 539 732 22 AT543E 150 HC 539 763 22 AT553E 200 HC 539 733 22 AT543E 200 HC 539 764 22 AT553E 250 HC 539 734 22 AT543E 250 HC 539 765 22 AT553E 300 HC 539 735 22 AT543E 300 HC 539 766 22 A
123. hiba CMOS Blue PB Purple PZ Low when alarm occurs Direction Code e Standard PA goes ahead Standard PA 2 Reverse PB goes ahead PA goes ahead pp lt Traveling direction of detector head Reverse PA PB goes ahead pp These are settings for when the scale is moving N aw vo Nn lt co S m Q E 7 a lt Assembly Type AT Series Square Wave Signal Output Type Scale Unit Standard type AT203 Features e The maximum effective measurement length of 6000mm enables use on large machines such as for LCD production e The travel length of the linear scale is output with 2 phase square wave signals which can be used as a feedback signal for NC machine tools e The pulse signal unit PSU is no longer needed and the AT203 can be directly connected to the NC machine tool e The maximum response speed is 2000mm s When resolution is 1um and the minimum edge interval is 250ns Specifications Item Code AT203 Detection method Photoelectric type transmission linear encoder Output Two 90 phase shifted square wave signals Output method Differential line driver Signal output pitch 20um Resolution 1 0 5 0 1p1m switched using DIP switches Effective range 100 to 6000mm Effective range 100 to 1500mm 343Lo 1000
124. i Phase B SS Vref ea i Vep Vrp Phase difference 90 1 Vpp 2V Vref 25V Typ Scale reference point 200 100um J f PZ Note The phase difference between the PZ signal and the Phase A signal and the Phase B signal are not defined e 2 phase square wave signals VoH al LI LI l VoL PB eta Von 2 5V min Vor 2 5V max PZ ta Edge interval resolution Z Note The phase difference between the PZ signal m and the PA signal PB signal has no effect Z phase pulse width i 200 100um Maximum response speed Maximum response speed depends on setting as shown below Setting Resolution Minimum edge Maximum response speed mm s number of interval Scale pitch 40m divisions 0 10 125ns 5000 250ns 5000 Suns 500ns 3600 1000ns 1800 125ns 5000 250ns 3600 umo 500ns 1800 1000ns 900 125ns 3600 250ns 1800 Dou EO 500ns 900 1000ns 450 125ns 1500 250ns 700 229m o9 500ns 300 1000ns 150 Note The minimum edge interval varies 0 to 10 based on the operating environmental conditions ST422 Scale unit mounting dimensions
125. i 7 tvi 7f jF re a v XE j5j mm EN 9 Scale unit OK Signal cable Connector A Den oon a E E Esa Control device olas Head cab mn 1 Connector A is to be prepared by the user Grounding conductor 2 Connector A and the grounding conductor are to be connected by the user 3 In the above configuration the maximum cable length is 10m for the head cable and 10m for the signal cable total 20m Specifications other than the standard cable length are special order Configuration example 2 iu A HON ren MON Hi H E E iF 7 SILSNNR v AT800 zi co v 7 Ma Scale unit l F Box Signal cable f E L E e em35H gp Head cable so Notes Connector C Connector B Feedback cable 1 Connectors A B C and the feedback cable are to be prepared by the user 2 Connectors A B C and the grounding conductor are to be connected by the user 3 When fabricating a feedback cable ensure that the total cable signal cable length is 5m ABS AT543A Head cab Notes 1 Connectors A B and the feedback cable are to be prepared by 2 Connectors A B and the grounding conductor are to be connec
126. include quantizing error Lo is the effective range mm Mounting dimensions Effective range 50 to 1020mm E a AT112 F o EX Super slim spar type Ee pe reference points are output starting from here at 50mm pitch g 2 jas A 4 Unit mm oS T Both sides countersunk e Em 6 Li 6 L 15 25 540 215 L T1 5610 2 B3 2xM6x1 80 Both sides countersunk depth 4 2 Dimensions of scale units 0 2 0 3 0 05 A Signal cable length 3m 42 AT112 Effective range Mounting hole pitch Overall length Signal cable length Order No Code Lo mm Li mm L2 mm m 539 251 10 AT112 50F 50 143 155 539 252 10 AT112 70F 70 163 175 539 253 10 AT112 120F 120 213 225 539 254 10 AT112 170F 170 263 Dub 539 255 10 AT112 220F 220 313 325 539 256 10 AT112 270F 270 363 375 539 257 10 AT112 320F 320 413 425 539 258 10 AT112 370F 370 463 475 539 259 10 AT112 420F 420 513 525 539 260 10 AT112 470F 470 563 575 3 539 261 10 AT112 520F 520 613 625 539 262 10 AT112 570F 570 663 675 539 263 10 AT112 620F 620 713 725 539 264 10 AT112 670F 670 763 715 539
127. inear scale uses a graduated glass scale as measuring length reference A light emitting diode LED and light receiving device mounted on opposite sides of the scale serve to detect produce and detect changes in light intensity and output a value representing the displacement magnitude Because the change in transmitted light intensity of the glass scale is converted into an electrical signal the setup is called a transmission photoelectric system A parallel light beam generated by the LED and collimator lens is directed through the scale gratings A light receiving device consisting of a photodiode array on the other side of the scale receives the parallel light beam and produces interference fringes with a cycle that corresponds to the scale grating pitch When the glass scale is displaced in the measuring direction the interference fringes shift and a 2 phase sinusoidal signal with a cycle that corresponds to the 20um pitch of the scale gratings is output by the light receiving device An interpolation circuit electrically divides the output sinusoidal signal resulting in a square wave pulse signal representing the limiting resolution ystem Diagram NC Linear Scale S Applications S Detection principle of the reflective photoelectric scale ST36 etc Light emitting diode LEDy Light receiving device Photodiode array Collimator lens Index scale The separate type photoelectric linear sc
128. inimum edge interval varies 0 to 10 based on the operating environmental conditions 15 Mounting dimensions ST24 Specifications ST24 Mounting dimensions
129. int of effective range Scale unit specifications End of effective range side end Interface specification H High accuracy type R End of effective range side end This refers to the fixed point on the scale around which Applicable systems Scale code damping arrangements ensure that any expansion or FANUC Ltd control devices FS i Series POWER Mate i ABS AT555E Resolution 0 005um contraction due to temperature change occurs ABS AT553E Resolution 0 05um Mitsubishi Electric Corporation control devices MITSUBISHI CNC Series ABS AT545E Resolution 0 005um Applicable amplifier MDS D MDS DH Series ABS AT543E Resolution 0 05ym Scale configuration ABS zero point base position ABS AT5OOE HC ABS zero point Base position c point Base position ABS AT5 T3E HL Base position B zero point ABS AT5 JE HR Mitutoyo ABSOLUTE Specifications Item ode ABS AT5O0OE HC ABS AT E HL HR Detection method Electrostatic capacitance type photoelectric type composite ABS linear encoder How to mount the scale unit 3 5 or 7 point elastic fixing 3 or 4 point elastic fixing End of effective range Base position Midpoint of effective range HL side of absolute value HR side of absolute value Effective range 10
130. ir delivery ISO 85731 1 Maximum particle diameter um 0 1 specifications Class1 4 1 or Minimum pressure dew point C 3 equivalent Oil concentration mg m3 0 01 0 1MPa approx 1kgf cm Adjusted to the pressure stated above with a regulator described under 4 Air supply unit 2 Air delivery pressure 3 Airflow rate 10 to 20L min per axis By using a fixed reducer 06ACJ155 an airflow rate of 12 7L min with a pressure of 0 1MPa can be supplied 4 Air supply to unit Do not supply air directly from a compressor Be sure to supply dry compressed air that has passed through an air drier and a main line air filter The replacement period for the filter elements is approximately one year Install the fixed reducer on the scale side This varies depending on the air quality and usage conditions and on the environment Air equipment configuration Tia 2M 399 Ai m Stem x Feedback cable earth processing Be sure to ground the shield of the feedback cable to an earth conductor using an earth clamp or similar immediately before the control device See the following figure Control device m fg Linear scale side Earth clamp for connection to earth conductor Feedback cable Shielded cable braided Cut away part of the cable s PVC sheathing to expose braiding Unit mm 10 FL uio
131. ivalent Output specification Signal cable with flying leads Signal cable with D sub connector Wire color Signal Pin No Signal Brown Red 45V TAB GND White Black GND 3 4 11 5V Orange SD 2 Yellow SD 7 REQ Green REQ 8 REQ En Blue REQ 9 Phase A E g Purple Phase A 10 Phase B 6 Gray Phase B D EI 4 FG se Shield FG ot use 9 3 Notes Notes Ze 1 Phase A and Phase B are used as test signals i Rescue esee prem en Keep them disconnected during use 2 Applicable connector HDAB 155 Hirose Electric or 2 Connect the shield wire to the grounding conductor 4 equivalent ABS zero point base position and count direction Reference point mark Reference point mark A 9 7 A 9 7 E a A sa A SS E OE IE n Ny E ce Em wA a 1 O ABS zero point base position Increase in serial data Mitutoyo Cable dimensions
132. l EG Connector shell E G Note Phase A and Phase B are used as test signals Note Phase A and Phase B are used as test signals Keep them disconnected during use Keep them disconnected during use ABS AT343A Output connector pin type Tyco Electronics Japan 1 3 MinieUniversal Mate N Lock Connector 9P 172169 9 Housing Black Applicable connector 172161 9 Housing Black Pin No Signal 1 MR RQ DT 2 MRR RO DT 3 N C 4 DT 5 DT 6 N C 7 P5 45V 8 LG GND 9 EG Note Phase A and Phase B are used as test signals Keep them disconnected during use u 2 n ow ae gm Skt emt AN aa atic System configuration see instruction manual ABS AT353 AT343 AT303 AT303A o o e Oo o Notes 1 Connector B and the feedback cable are to be prepared by the user 2 Connectors A B and the grounding bar are to be connected by the user 3 When fabricating a feedback cable ensure that the total cable length is 25m or less PE f Connector A Connector B N V D sub 15 included mi j D pump E Control device cable 5m Feedback cable Notes 1 Connectors A B and the feedback cable are to be prepared by the user i 2 Connectors A B and the grounding bar are to be connected by the user 3 A Mitsubishi Electric Corporation encoder cable can be used as the feedback cable oL JOU Hue cn MR J4 MR J3 series
133. l signal 13 PB main signal pulse Reverse phase J Vref Vcc 2 14 PZ reference point pulse Reverse phase 8 _ PZ reference point pulse Normal phase 15 EG 9 ALM alarm Mitutoyo Output signal waveform and specification e 2 phase square wave signals Type B i uU z Von oo Vo PZ ir Von 2 5V min Vo 0 5V max ta Edge interval resolution Z phase pulse width i 0 8 0 4mm e 2 phase sinusoidal signals 2 phase square wave signals Type C Phase AA Voc Output signal pitch 20um a Phase B PE e Voc E Phase difference 90 Typ VoH PA VoL it a Vou 2 5V min n Vo 0 5V max ta Edge interval resolution ZH phase pulse width 0 8 0 4mm Specification Selection Method How to read the code e There is an extensive selection of specifications for the ST46 EZA e Choose the appropriate numbers and letters below according to specification required If standard specifications recommended items marked with symbol below meet your requirements please order using the code numbers shown on pages 19 20 A A A A A Signal output Special codes Code Details Code Details B Square wave signal external reset input QM None Standard selection Specification E Sinusoidal sign
134. ling direction of detector head 0700 700 2800 2800 Reference point track 0800 800 3000 3000 Note For the standard specification the indicated effective range depends on the product code Example of standard specification Effective range 10mm ST24 0010 Effective range 250mm ST24 0250 Scale reference point Code Details A 50mm pitch 100 to 3000 LL OB Center point 10 to 3000 Z Special position specification Note For reference positions in the effective range of 10 to 80mm B Center point is the standard specification Scale shape Code Detail Cross section Effective range PZ Vox 2 5V min e Glass separate 14 8 x w22 100 to 3000mm phase pulse width Vo 0 5V max e Glass separate t2 8 x w8 10 to 80mm 0 8 04mm_ t Edge interval resolution gt With aluminum base t5 1 x w23 10 to 80mm ee et ee we ae Se Note This is the waveform that results when the detector head moves as shown in the figure above Resolution Minimum edge interval Mitutoyo sies 125ns 250ns 500ns 1000ns Resolution 0 05um A 360mm s B 180mm s C 90mm s D 45mm s 0 1um E 720mm s F 360mm s G 180mm s H 90mm s 0 5um J 1200mm s K 1200mm s L 900mm s M 450mm s 1 um N 1200mm s P 1200mm s Q 1200mm s R 900mm s O7 When Signal output is A D maximum response speed at sine wave 3 dB attenuation is 1200mm s Note The m
135. lion times or more ST24 B 54 million times or more ST422 A 3 million times 1 Also including the head cable 2 Testing still ongoing as of December 2008 Note 1 The test data stated above does not represent guaranteed values Depending on the bend conditions the number of times that the cables can bend without failure may be less than indicated Note 2 When bending cables the recommended bend radius is 100mm or more E Ss 2 E O S amp Ls E f S D E Technical Information Alarm functions 1 Detection of detector disconnection and short circuit errors Disconnection of and short circuits to OV of the phase A and phase B signal lines from the linear scale as well as other similar errors are detected 2 Detection of excess response speed of detector feed over speed The feed speed of the linear scale detector exceeding the maximum feed speed as well as other similar errors are detected 3 Detection of input signal errors The amplitude voltage DC voltage or phase difference of the phase A and phase B signals from the linear scale being outside of the corresponding allowable range as well as other similar errors are detected 4 Drop in line voltage The line voltage supplied to the linear scale PSU and other devices particularly devices that use a DC power supply dropping below the allowable range is detected as an error Alarm detection functions available with each pr
136. lity of base position Aluminum frame riding block ABS ATSOO H i y Scale output Temperature E be ES f amp Se ml block Parallel leaf spring function 8 z 5 Flexible mechanism i S As amp 3 gin i E E 3 Bun i oa ries P ux Frame elongation Elapsed time h 77477 Fixed Flexible mechanism Fixed Note This refers to the fixed point on the scale around which clamping arrangements ensure that any expansion or contraction due to temperature change occurs Rm e zt b wn fe 5 s Nn 2 lt A wo v mn oO uA lt Nn sa lt Assembly Type ABS AT Series Absolute Scale Unit Slim Spar Type ABS AT500E Resolution 0 005um 0 05um ABS AT500E Series Features e High performance Absolute Linear Scale with 0 005um 0 05um resolution and high maximum response speed 72m min 150m min The ABS AT500E Series realizes vibration resistance of 147m s 15G and shock resistance of 343m s 35G suitable for use ith heavy cutting equipment and for high speed machining e The ABS AT500E Series has high repeatability excellent temperature characteristics and enables highly accurate and stable positioning e Slim shape is suitable for space saving designs e Compatible with servo amplifiers from a range of companies high speed serial interfaces How to read the code ABS AT5O0O0E 000 H0O Base position for elongation of scale Effective range C Midpo
137. ly rigid structure provides superior durability l Slider sensor 7 o rod V Coupling spring Detector head 2 Advantage of special waterproof connectors Adopting waterproof and oilproof connectors makes it possible to separate the signal cable In turn this makes installation and maintenance easy 3 Signal cable conduit Signal cables that are enclosed in a stainless steel spiral cover conduit for protection are also available The conduit will not rust or corrode so these signal cables can be used over an extended period 4 Adoption of rubber lip thrust method Mitutoyo s proprietary technology The thrust part see the following figure pushes aside the rubber seal like a ship s keel pushes aside water 5 Adoption of specially formed urethane rubber lip with reinforcing wire Resistance to oil and dust has been improved Available with the AT103 AT203 ABS AT500 and ABS AT300 Can be specially ordered for the AT113 and AT211 Without wire With wire 4 g3 Wire 5 Cc lt awl Rubber lip shape 2 5 10 20 30 Days Elongation of dustproof rubber against coolant exposure 6 Maintenance of the seal To maintain the dustproof property of the rubber seal and extend its life apply a small amount of good quality silicone grease such as G 30L made by Shin Etsu Chemical Co Ltd to the contacting area of the rub
138. meet your requirements please use these code numbers to order gt B Q phase square wave signals external reset input LJ 1 gt C Q phase square wave signals 2 phase sinusoidal signals 12 e Application program Option Part No 06AEF800 Adjustment SW CAL display Reference point display SETUP J L ALARM Mah 389p peee Wei 14V 1 Fe 23 ee o ll 020 Connector control unit has setup indicator he Signal strength checking and parameter setup can be performed on a PC PC to be prepared by customer ee ee I I I I I I I I I I I I I I I I I I I I I I l n v o Nn 24 v ES co Q o ue Separate Type ST Series Sinusoidal signal amp Square wave signal Output Scale Unit Compact Type Features e The maximum response speed is 5000mm s When resolution is 1um and the minimum edge interval is 125ns e Compact detector unit control unit allow use in applications where space saving design is important The maximum effective measurement length of 3000mm enables use on large machines e LED display function for indicating signal errors Specifications Item Code ST422 Detection method Reflective photoelectric linear encoder Main scale grating pitch 40um Signal output pitch 40um Two 90 phase shifted sinusoidal signals and
139. minimum edge interval is 0 10 For some models values other than shown above can also be selected 3 Maximum response speed is 2000mm s for AT113 and 830mm s bOm min for AT112 AT181 AT103 3250 and higher 4 Maximum response speed of H type with 0 005um resolution is 1200mm s wn v 5 nn 24 o o P oO o Q vo nn Separate Type ST Series Sinusoidal siqnal amp Square Wave Signal Output Scale Unit High Accuracy Type ST36 Features e High accuracy type 0 5um class effective range up to 300mm Has a thinner detector head thickness 11 5mm e The maximum effective measurement length of 3000mm enables use on large machines e 4 different types available for each signal output specification e LED display function for indicating signal errors Specifications Item Code ST36A ST36B ST36C ST36D Detection method Reflective photoelectric linear encoder Main scale grating pitch 8um Signal output pitch 4um Output signal 2 phase sinusoidal signals quc M aa 1Vp p differential sinusoidal signals Effective range 10 3000mm Effective range 10 to 300mm 0 5 um Accuracy 20 C Ty E 800 S Effective range 1100 to 3000mm 2 0um m Thermal expansion coefficient 8 1 x1075 C Maximum response speed 1200mm s with sinusoidal signals output For 2 phase square wave signal types see page 11 Scale reference point Wit
140. n extensive selection of specifications for the ST24 e Choose the appropriate numbers and letters below according to specification required If standard specifications recommended items marked with O symbols below meet your requirements please use the code numbers shown on page 16 to order Specification Selection Method How to read the code ST24 B f 0 AA AA A A 3 Special codes m 2 Signal output Code Deals None Standard selection specification Code Output z T e B Square wave signal external reset input apal specication oO es QUareWavellg nw Note If there are special details o C Sinusoidal signal Square wave signal please select 7 wn Head cable length Effective range es cr Code Effective range mm Code Effective range mm e 1m 0010 10 0900 900 B 0 5m 0025 25 1000 1000 Z Special length specification max 2 5m 0050 50 1100 1100 0075 75 1200 1200 Alarm output 0080 80 1300 1300 Code Details 0100 100 1400 1400 L es TEES 0150 150 1500 1500 T ERES 0200 200 1600 1600 0250 250 1700 1700 1 1 0300 300 1800 1800 Direction 0350 350 2000 2000 2 e e ccce 0400 400 2200 2200 e Moral PA goes ahead 0450 450 2400 2400 2 Reverse PB goes ahead 0500 500 2500 2500 0600 600 2600 2600 Trave
141. nced type serial communications standards and it ranks higher than RS 422 RS 422 is upwardly compatible with this standard While RS 422 is a communication standard that supports point to point multi drop connections this standard supports bus type multi point connections and bidirectional communications Minimum edge interval This refers to the minimum time between a rising edge or falling edge of a square wave being output or input and the next edge being output or input For square wave output type linear scales even with the same resolution the shorter the minimum edge interval the faster the response speed Thermal expansion coefficient This refers to the thermal expansion of an object in response to a change in temperature which is measured as elongation per unit length for each 1 C increase in temperature of the material Full duplex communication and half duplex communication Full duplex communication refers to a system in which devices for example a scale and a servo amplifier each have two communication lines and can communicate with each other at the same time On the other hand half duplex communication refers to a system in which devices have a single communication line so devices cannot communicate with each other at the same time and communications can only be sent from a single device at any one time Full duplex communication Half duplex communication Scale Servo amplifier Scale
142. ncremental scale unit ystems ystem Diagram Applications A S 5 72 RE w iS E With square wave signal sinusoidal siqnal simultaneous output High accuracy type ST36 1Vp p differential sinusoidal signal output types also available Please contact us for details Standard type ST24 Compact type ST46 EZA ST422 With sinusoidal siqnal output Standard type AT103 Slim spar type AT113 Super slim spar type AT112 F Sealed type AT181 General type ATA02E 1Vp p differential type With square wave signal output Slim spar and high speed type AT211 Standard type AT203 Please consult us regarding manufacture of 1Vp p differential sinusoidal siqnal output types Absolute scale unit High environmental resistance type ABS ST700 Compact Standard type ABS AT300 Slim spar type ABS AT500 Interface Units Pulse signal unit PSU 200 Serial conversion unit PSU 251 252 Mitutoyo NC Linear Scale Systems Overview Scale name Reference Absolute Mainscale Signal output lt a Maximum Minimum edge 2 Code point function grating pitch pitch Signal unit N
143. nimum resolution on the controller always enter the actual value System configuration See instruction manual Configuration example 1 Ji 9 If ee I I i Mihayo if il i lt xj i8 S Y ji Scale unit Connector A Signal cable Ee Head cable Control device Notes 1 Connector A is to be prepared by the user 2 Connector A and the grounding conductor are to be connected by the user 3 In the above configuration the maximum cable length is 10m for the head cable and 10m for the signal cable total 20m Specifications other than the standard cable length are special order Grounding conductor s E 24 25 own d gin E ToS an oa L Configuration example 2 IL J Mhiy y Connector B Scale unit Connector A Signal cable n E Notes Connector C ing condu 1 Connectors A B C and the feedback cable are to be prepared by the user Feedback cable _ Grounding conducto 2 Connectors A B C and the grounding conductor are to be connected by the user 3 When fabricating a feedback cable ensure that the total cable length is 29m or les
144. nition Protection rating for extraldbiecs 6 Dustprooftype Prevents the entry of dust Protection rating for 5 Protected against Exposure to water projected from a nozzle from all water water jets directions produces no harmful effect IP67 protection rating Type Protection ratings Summary Definition Protection rating for exerndlobecs 6 Dustprooftype Prevents the entry of dust Protection rating for external objects 7 Protection against Ingress of water in a harmful quantity shall not be possible the effects of when the enclosure is temporarily immersed in water immersion in water under defined conditions of pressure and time Note For the test conditions used to evaluate the protection ratings see IEC 60529 2001 and JIS C 0920 Protection rating fo water 9 2 oOo E E 9 S 7 Am Ee D E Note All information regarding our products and in particular the illustrations drawings dimensional and performance data contained in this pamphlet as well as other technical data are to be regarded as approximate average values We therefore reserve the right to make changes to the corresponding designs dimensions and weights The stated standards similar technical regulations descriptions and illustrations of the products were valid at the time of printing Only quotations submitted by ourselves may be regarded as definitive Our products are cla
145. nput type 2 phase sinusoidal signals Effective range 10 to 3000mm Effective range 10 to 300mm 1 0um o Effective range 350 to 500mm 2 0um Accuracy 20 C Effective range 600 to 1000mm 3 0um Effective range 1100 to 3000mm 3 0 um m Thermal expansion coefficient 8 1 x10 9 C 1200mm s with sinusoidal siqnal output For 2 phase square wave signal types see page 15 Maximum response speed Scale reference point With scale reference point 50mm pitch 10 to 80mm Center point Power supply 5VDC 5 Maximum current consumption 250mA Operating temperature humidity 0 to 40 C 20 to 80 RH no condensation Storage temperature humidity 20 to 60 C 20 to 80 RH no condensation Alarm indication LED illumination on the I F box Maximum speed for scale reference point detection is 20mmys Component parts Alarm reset transmission reception signal Main scale 10 to 80 circuit B Type With base I F box side Control device side Foraphotocoupler For a relay Main scale 10 to 80 Aw wi Float glass TIPSA cade AL Anode AX J EE yt we un I pom En I Main scale 100 to 3000 Float glass Reset input Connect the alarm reset input circuit so that the current is 3 to 10mA Also the device has an internal resistor 1 2kQ so by applying 5 to 12V with a pulse width of at least 10ms across AL anode AL cathode the alarm can be
146. o of divisions Resolution esponse speed interval See page 5 2 m qe is ST36C i Meg m KE ST36A Oo x 8um 4um PSU 200 80 0 05um SRR 125ns PQ 12 Pus PED 40 0 1ym 720mm s oes 395 T jo ww mme 5 eae T24 ST24C 9 i ium nu z 20 05m omms 250m 4 6 2 10 um 1200mnys 500ns 3 400 0 05um 900mm s E 200 0 1m 1800mm s a ST46 EZA Oo x 20um 20um 40 ENT GERE 50ns P17 20 8 20 um 2600mm s us 200 0 2um 1500mm s 80 0 5um 3600mm s 125ns ST422 x 40um 40um 10 T 5000mmi s P21 22 8 5um 5000mm s 250ns ABS ST700 Compact type E 3 072mm 3 072mm 30720 0 1m 5000mm s P47 52 200 0 1m 800mm s 100 0 2um 1600mm s AT103 80 0 25ym AT113 40 0 5um AT112 F x 20um 20um PSU 200 125ns P23 26 AT181 j 9 20 tym 2000mm s 10 2um 8 2 5um Es 4 5um E Vp p 2 AT402E A 20um 20um 2000mm s_ differential sine P27 30 g wave a 200 0 1m 710mm s e 100 0 2um 1400mm s 125ns a 40 0 5um 5 AT211 x 20um 20um P31 36 3 20 um 2000mm s 250ns 8 2 5um 500ns 4 5um 1000ns 200 0 1m 333mm s AT203 x 20um 20um 40 0 5um 1833mm s 250ns P37 40 20 um 2000mm s 4096 0 005um ABS AT 20 20 2500mm s P53 76 S AT500 um yum 400 0 05 um mm s ABS AT300 O 20um 20um 400 0 05m 2000mm s P77 80 1 Maximum response speed of pulse output type uses the logical value IC specification with a margin of about 10 2 For information on minimum edge interval see Explanation of Terms on page 86 The guaranteed value for
147. oduct 1 Alarm functions on the AT scales sinusoidal siqnal output 5 Detection of momentary power failures A momentary power failure or voltage drop greater than the allowable range occurring in the power supply that is being supplied to the PSU counter or other device devices that use an AC power supply is detected as an error 6 Detection of scale errors Errors that occur inside the linear scale are detected 7 Detection of detector circuit errors Errors caused by the incremental count or absolute count in absolute linear scales are detected 8 Detection of CPU errors detection of internal errors For linear scales counters and other devices that use CPUs the CPU stopping operating normally is detected as an error Note The alarm functions vary according to the product For details see the alarm functions available with each product Also note that the allowable ranges used to detect alarms vary according to the product 4 Alarm functions on the ST scales square wave signal output type PSU 200 Alarm function Detected inside the scale Detected inside the PSU bonis Detection Disconnection Scale error Over speed PY of scale or short signal error Circuit in errors signal cable Scale code AT103 8 AT113 D AT112 PSU 200 O 8 PSU 250 series
148. of 196m s 20G and shock resistance of 343m s 35G suitable for use with heavy cutting equipment and for high speed machining The ABS AT500 H Series has high repeatability excellent temperature characteristics and enables highly accurate and stable positioning e Slim shape is suitable for space saving designs Compatible with servo amplifiers from a range of companies high speed serial interfaces How to read the code IO ABS AT5 030 an ae Effective range Interface specification f tion th eee inj eS a AP ase position the zero elongation poin Aj licable 3 stems Scale code C Midpoint of effective range FANUC Ltd control devices FS i Series POWER Mate i ABS AT553 L End of effective range side end Mitsubishi Electric Corporation control devices MITSUBISHI CNC Series ABS AT543 R End of effective range side end MDS D MDS DH Series m l and R are only for the high accuracy yoe j Mitsubishi Electri i This refers to the base point of fixed point on the sca e aroun aC MR ABS AT543A which clamping arrangements ensure that any expansion or contraction due to temperature change occurs Panasonic Corporation Motor business unit MINAS A5 A5L A5N A5NL Series ABS AT573A mE MINAS A4 A4P A4N A4NL Series Scale unit specifications Amplifier compatible with the Mitutoyo ENSIS interface S Pe type Nikki Denso Co Ltd VCII VC VPS Series H High accura
149. onditions Humidity 20 to 80 RH T Temperature 20 to 70 C Storage conditions Humidity 20 to 80 RH 5V 10 at the detector head Power supply voltage Ripple and spike noise should not exceed 100mV Current consumption 270mA Max Vibration resistance 300m s 55 to 2000Hz 100m s 55 to 2000Hz Shock resistance 500m s half sine 11ms 150m s half sine 11ms Length cable diameter 1m 23 8mm high flex cable Head cable Connector 1 D sub 15 pin pin type connector not waterproof 2 D sub 9 pin socket type connector not waterproof for ST788A Maximum signal cable length Up to 29m head cable length included Please consult the user s manual Detector mounting 1 location each on top and sides Direction of cable outlet 4 sides top bottom left right can be selected EMC standard CE mark standard Note If considering using in an environment in which c System configuration Detector head Scale base Output specifications ST788A L Output connector socket type D sub 9 pin Applicable connector 17JE 23090 02 D2C DDK Alternately an equivalent product D sub series can be used EM AIC ENA m NE iem 2 Dos Connector 3 ane eee i Supplied by user user ST748A L ST778A L ST708A L Output connector pin type D sub 15 pin Applicable connector HDAB 15S Hirose Electric Alternately an equivalent product D sub seri
150. onig ace Alarm display LED 4 For the values of Lo to L and Ls in the figure refer to the table 0 1G below 7 0 05 1000 ra 7 Dimensions Effective range Maximum travel length Overall length Mounting pitch Lo mm L mm L2 mm Ls mm La mm Le mm 100 120 265 249 124 5 150 170 315 299 149 5 100 200 220 365 349 174 5 130 250 270 415 399 199 5 160 veh 300 320 465 449 224 5 190 5 E 350 370 515 499 249 5 220 PE GA A QR Ern Codes and Order Numbers EP ABS AT553 HR ABS AT543 AT543A HR ABS AT573A HR ABS AT503 AT503A HR p Order No Code Order No Code Order No Code Order No Code 539 761 30 AT553 100 HR 539 731 AT543 A 100 HR 539 871 31 AT573A 100 HR 539 161 AT503 A 100 HR 539 762 30 AT553 150 HR 539 732 AT543 A 150 HR 539 872 31 AT573A 150 HR 539 162 AT503 A 150 HR 539 763 30 AT553 200 HR 539 733 AT543 A 200 HR 539 873 31 AT573A 200 HR 539 163 AT503 A 200 HR 539 764 30 AT553 250 HR 539 734 AT543 A 250 HR 539 874 31 AT573A 250 HR 539 164 AT503 A 250 HR 539 765 30 AT553 300 HR 539 735 AT543 A 300 HR 539 875 31 AT573A 300 HR 539 165 AT503 A 300 HR 539 766 30 AT553 350 HR 539 736 AT543 A 350 HR 539 876 31 AT573A 350 HR 539 166 AT503 A 350 HR The CC in the Order No is as follows A543 30 The LI Tin the Order No is as follows ATS03 30 ATS43A 31 ATSO3A 31 Mounting dimensions HL Type
151. onnector and indicator functions No Name Function 1 INPUT connector To connect the linear scale 2 OUTPUT connector To connect the servo amplifier 3 Terminal block Terminal block for input of 5VDC external power Use when providing power from the servo amplifier 4 Shorting link Do not aes ra providing power from ie servo amplifier 5 PWR light Turns on when power is supplied to the PSU nn em ub vo TAS uo un pon 22 u Resolution and maximum response Specifications speed when the scale is connected Order No 539 006 539 007 Scale model Resolution Maximum response speed Item PSU 251 PSU 252 AT103 0 05 ym 2000mm s 830mm s Number of axes 1 axis 1 axis AT113 0 05 im 2000mm s 2 phase sinusoidal signals and standard voltage reference signal scale AT112 0 05 pm 830mm s Input specifications alarm signal AT181 0 05 pm 830mm s Maximum input frequency 500kHz ST36A 0 01 m 1200mm s ETE Panasonic Corporation ST24C 0 025um 1200mm s Output Mee Corporation MR tor business unit ST46 0 05 m 2600mmy s specifications Highspeed sena data MINAS AS ASL ASN ASNL series ST422 0 01 jm 5000mm s gp MINAS A4 AAP A4N AANL series 2 Response speeds for effective ranges of 3250mm or more Number of divisions 400 divisions Alarm detection Broken wires short circuits in the scale and abnormalities Bunian Alarm output Status data is
152. oue 12 13 N C sv cL ay aie 14 PZ Me p 15 97 Phase Z output es 16 PA ov d i Tg PA Phase A output wv ov f xd ji For a relay For a photocoupler 18 PB i T 3 F i aC iv d 19 BB Phase B output TLP521 X at anode zd BEE i 20 FG Frame GND JE enel XXX wT NL LILLLILLLLLLLLL LL I K LIL II LIIII Reset input T ser T d V EG _ iel Setting Maximum response speed m min Maximum input QUIPUT rect l No of Minimum Scale pitch frequency E i divisions ledge interval 4um 10um 20ym 40um KHz 625ns 120 300 600 1200 500 Connect the alarm reset input circuit so that the current n ns B 2 an ie m is 3 to 10mA Also the device has an internal resistor a TECIREN e RB CORR C 1 2kQ so by applying 5 to 12V with a pulse width of at 1000 ns 60 150 300 600 250 least 100ms across the AL anode AL cathode the alarm 62 5ns 120 300 600 1200 500 can be reset When applying 12V or more add an external 125 ns 120 300 600 1200 500 resistance to limit the current to within the range stated 8 250 ns 120 300 600 1200 500 above Fen E of E 1 a E e Connection of alarm reset input when using a 62 5ns 120 300 600 1200 500 photocoupler 125 ns 120 300 600 1200 500 10 250m 96 240 480 960 400 PSU 200 Control device 500 ns 48 120 240 480 200 1000 ns 24 60 1220 240 100 qV 62 5ns 120 300 600 1200 500 TLP521 12k j 125 ns 96 240 480
153. ough Mirum 9g 15804 m Ls Stroke center point 3230 2 0 05 AF 1 07 9 UU c E ET 2xM3 depth 6 N TAHA i Head cable 1m High flex z INE 4 l E ES ag F ea i A f ex ba A i No BG0001 H 7 e umm e 61 70 06 245 E rn Effective range Li f eeri Pus 1 Scale retaining spring A C 7 0 Effective range Overall length Scale fixing pitch 8 oM L mm L2 mm L3 mm La mm la Ig 10 30 15 15 a amp SS messes 25 45 25 10 3x34 25502 15 04 1 s 3 50 70 40 15 35 La L3 eT 3 8 75 90 60 15 Scale retaining spring 80 100 70 15 Dimensions of scale units Scale Scale Effective Overall z ii Effective Overall 25s E m Order No Code range length nus ied icd Order No Code range length De a ges Li mm L2 mm Ls mm L mm L2 mm 5 mm 579 551 0 ST24 lt gt 10 10 30 579 568 0 ST24 lt gt 900 900 940 90 1pc 10 pcs 579 552 0 ST24 lt gt 25 25 45 579 569 0 ST247 1000 1000 1040 100 1pc 10 pcs 579 553 0 ST24 lt gt 50 50 70 579 570 0 T24 lt gt 1100 1100 1140 90 1pc 12 pcs 579 554 0 ST24 lt gt 75 75 90 579 571 0 ST2445 1200 1200 1240 100 1pc 12 pcs 579 555 0 ST24C 80 80 100 579 572 0 ST2445 1300 1300 1340 130 pc 10 pcs 579 556 0 ST24 lt gt 100 100 140 50 1pc 2pc 579 573 0L_ ST2445 1400 1400 1440 100 pc 14 pcs 579 557 0 ST24 lt 150 150 190 75 1pc 2pc 579
154. output through serial communication and the PWR light blinks Also the PWR light turns on Power supply from the servo amplifier 5VDC 5 External power supply 5VDC 5 Power supply is selected with the shorting link for the terminal block used Power supply to supply external power To choose a servo amplifier or external power supply please refer to the servo amplifier power specifications in particular the maximum supplied current and the power supply specifications of the scale that is used Current consumption 150mA not including the scale Storage temperature 20 C to 70 C Operating temperature 0 C to 40 C 1 For details regarding the applicable system please consult with the individual manufacturer Mitu toyo System configuration e When connecting an AT scale e When connecting an ST scale Control device Mitutoyo linear scale Control device e E yV Vy PSU 250 T o S E PSU 250 d l e d E z Signal cable S i i R i The signal cable is an optional accessory i 3 EP Signal cable 2m Part No 970712 2 ims 3m Part No 970712 3 5m Part No 970712 5 E Output specifications OUTPUT connector Input specifications INPUT connector
155. pc 579 516 0 ST36 lt gt 700 700 740 85 1pc 8pcs 579 533 0 ST36 lt gt 2800 2800 2840 100 pc 28 pcs 579 517 0 ST36 lt gt 800 800 840 100 1pc 8pcs 579 534 0_ ST36 lt gt 3000 3000 3040 100 1pc 30pc The above code numbers are for recommended items marked with amp symbols If recommended specifications meet your requirements use these code numbers to order The LJ and lt gt symbols in the tables above have the following meanings QA 2 phase sinusoidal signals 1 Q B 2 phase square wave signals reset input L122 QC Q phase sinusoidal signals 2 phase square wave signal 3 QD 1Vp p differential 124 Separate Type ST Series Sinusoidal siqnal amp Square Wave Signal Output Scale Unit Standard Type ST24 Features Has a thinner detector head thickness 11mm The maximum effective measurement length of 3000mm enables use on large machines e 2 different types available for each signal output specification e LED display function for indicating signal errors D c ue 24 ES GE co Q c ue Specifications Item Code ST24B ST24C Detection method Reflective photoelectric linear encoder Main scale grating pitch 20ym Signal output pitch 10um 2 phase square wave signals 2 phase square wave signals Output signal reset i
156. plain washer spring washer 2xM5 through hole 68 4 Alarm display LE Hex socket headed screw Notes M4x20 spring washer 1 G indicates the machine guideway 2 P indicates the mating surface for mounting the unit P Mounting mating surface S indicates the mating surface for mounting the detector head 70 1 3 Q and R indicate the datum surfaces for mounting this linear scale 7 0 05 1000 4 For the values of Lo to Ls in the figure refer to the table below n 7 OL 77 A Dimensions Effective range Maximum travel length Overall length Mounting pitch 5 Lo mm Li mm L2 mm L3 mm La mm Le mm 2s 100 150 251 235 117 5 S A 150 155 301 285 142 5 100 LA 200 205 351 335 167 5 130 3 t 250 255 401 385 192 5 160 Ru 300 305 451 435 217 5 190 cx 350 355 501 485 242 5 220 Codes and Order Numbers ABS AT553E HR ABS AT543E HR ABS AT555E HR ABS AT545E HR Order No Code Order No Code Order No Code Order No Code 539 761 32 AT553E 100 HR 539 731 32 AT543E 100 HR 539 761 72 AT555E 100 HR 539 731 72 AT545E 100 HR 539 762 32 AT553E 150 HR 539 732 32 AT543E 150 HR 539 762 72 AT555E 150 HR 539 732 72 AT545E 150 HR 539 763 32 AT553E 200 HR 539 733 32 AT543E 200 HR 539 763 72 AT555E 200 HR 539 733 72 AT545E 200 HR 539 764 32 AT553E 250 HR 539 734 32 AT543E 250 HR 539 764 72 AT555E 250 HR 539 734 72 AT545E 250 HR 539 765 32 AT553E 300 HR 539 735 32 AT543E 300 HR 539 765 72 AT555E 300 HR 539 735 72 AT54
157. pter when connected to an old counter 3 This must be checked for each scale effective range 4 Compatible with the output signal of the pulse signal unit Absolute scale unit Output connector Discontinued models Current model Interface Resolution dub od Mounting dimensions specification pin assignment AT3L2 ABS AT3L 3 x O x d ABS AT500 S series O QO O x KE poU sais ABS AT500 H series O x AS 5 You can control this by changing the NC parameter settings For details contact your NC manufacturer 6 Check that pins No 9 and 10 of the AT353 output connector are not connected before you make the connection S 7 The AT543A is compatible Other current models have flying lead specifications t Pulse signal units 9 Output connector seo Output signal Power supply CENE T Goma E Discontinued models Current model SOS cats Saa Mounting dimensions QD m PSU 1 2 m x x x E FPSUO3 series x x x i FPSUO5 series C x x x FPSU10 series x x x FPSU4 OQ X e FPSU21 series 10 OQ x x x PSU11 PO AS x x AS PSU12 13 KE x x AE PSU14 Q O x PSU21 series A x x ANS PSU 100 series O O Q PDS11 IRE x x AC 8 Only the 2 phase square wave signals output specifications are compatible 9 Only the connector shape is compatible 10 When changing to the PSU 200 the scale may also have to be changed Note 1 The compatibili
158. r linear scales Topsoil Styrofoam insulation Bituminous waterproofing Concrete slabs Space above dropped ceiling Be Laboratory space Mw wd Vibration proof foundation Underground research facility Linear Encoder Accuracy Calibration Technology To assure high accuracy in linear encoders a highly reliable calibration system is indispensable The ultra precision length measuring machine developed by Mitutoyo and installed in the underground research facility at the Kiyohara Production Department benefits from the highly stable underground environment In addition the light path of the laser interferometer used to measure lengths is placed in a vacuum to further eliminate any causes of uncertainty The result is a linear encoder calibration system of world leading precision internationally recognized by mutual interlaboratory comparisons In recognition of the high technological standard realized by this system it received the Best Paper Award of the Japan Society of Precision Engineering in 2004 and the FA Paper Award of the FANUC FA and Robot Foundation in 2005 Ultra precision length measuring machine with vacuum laser interferometer Mitutoyo 2 E c t gt ystem Diagram Applications NC Linear Scale S S NC Linear Scale Systems 5 E Dpeteaitonbr US D AA S A Interface Unit 2 Applications n PSU 200 41 42 amp NC Linear Scale Systems System Diagram
159. ration high speed serial ABS ST788A ST788AL Applicable interfaces FANUC Ltd FS i Series POWER Mate i Series Mitsubishi Electric Corporation MELSERVO MR J4 MR J3 Series Mitsubishi Electric Corporation CNC Series MDS D MDS DH Series Yaskawa Electric Corporation gt V Series gt Series Applicable interfaces ong Corporation Motor business unit MINAS A5 ASL ASN A5NL Series MINAS A4 A4P A4N A4NL eries Mitutoyo Corporation ENSIS Nikki Denso Co Ltd VC II VC VPS Series Servoland Corporation SVF Series PMAC JAPAN Co Ltd UMAC Turbo PMAC2 1 For details connectivity regarding the applicable system please consult with the individual manufacturer 2 ENSIS is a registered trademark of Mitutoyo Corporation Mitutoyo ABSOLUTE Specifications Item Scale Type Scale base type Glass scale type Resolution 0 1um 0 05um special order Detection method Electromagnetic induction Absolute position detection method Shape Separate type scale Effective range accuracy quarantee range 100 to 3000mm 3200 to 6000mm 100 to 1100mm Accuracy 20 C 5 51 1000 um L Effective range mm 3 3L 1000 um L Effective range mm Maximum feed speed 5 m s Thermal expansion coefficient 12 021 5 x10 C when attached to material equivalent to steel 841 0 x10 C Temperature 0 to 50 C Operating c
160. ration of linear motors etc Scale base type e Electromagnetic induction principle means scales are unaffected by contamination The detector head is approximately 1 3 the previous model size 50mm W x 28mm D x 11mm H e Cable outlets can be in four directions with mounting holes on the top and sides e Accuracy 5 5L 1000 um glass scale 3 3L 1000 um is realized previous models 845 1000 um L Effective range mm e Compatible with servo amplifiers from a range of companies high speed serial interfaces FS Glass scale type How to read the code ABS ST7 0 8AL 100A R Absolute oe i Po ies een gt A Scale base type Right C Glass scale type i Left U Up dens Effective range 100mm to 6000mm Separate type Absolute linear scale D Down ABS ST700 compact type series effective range lt 3m Blank 100mm to 3000mm ABS ST700L compact type series 3 2m lt effective range lt 6m L 3200mm to 6000mm Communication method Interface specification A 2 wire 0 For Mitutoyo ENSIS high speed serial Blank 4 wire ABS ST708A ST708AL i Detector head shape and resolution 4 Missam A high speed serial 8 Shape 50mm W x 28mm D x 11mm H ABS ST748 ST748L Resolution O 1um 5 FANUC Ltd high speed serial 9 Resolution 0 05um special order ABS ST758 ST758L 7 Panasonic Corporation Motor business unit high speed serial ABS ST778A ST778AL 8 Yaskawa Electric Corpo
161. rature change occurs Amplifier compatible with the Mitutoyo ENSIS interface ABS AT505A Scale unit specifications aL LLLLLSSSQSRARRRAL L GEXSRAL LLL LLUL LLLULVU T KZ S High rigidity type ote ABS AT505 H High accuracy type i Communication method Blank Full duplex communication A Half duplex communication Note For details regarding the applicable system please consult with the individual manufacturer Scale configuration ABS AT500 S Series ABS zero point base position ABS AT505 SC HOH i i j j OH i ABS AT5 15A SC j N v ATE ce Jl AT5454A signal cable 3m it Een VF Box G ABS AT500 H Series 85 zero point base position ABS AT505 HC ABS AT5LISA HC Jae postion A85 zero point ABS ATSCI5 HR ABS ATSLISA HR Wu UM ii Vas zero point P Pase position ABS AT5CI5 HL ABS ATSCISA HL Wk y Ss
162. reset When applying 12V or more add an external resistance to limit the current to within the range stated above Scale retaining spring Output connector SS Mitutoyo Output signal waveform e 2 phase sinusoidal signals Type C e 2 phase square wave signals Type B C c Von T E dq Bed Yes s 1 PA Output signal pitch 10um i T Vir i b 1 1 o i z PR H Vos 2 5V min 2 Phase B i Vref gt PB L s 2 5V max a set ta Edge interval resolution Phase difference 90 E Vo 2V Vref 2 5V PZ 5 Typ AER E PZ Note The phase difference between the PZ signal e Scale reference point and the PA signal PB signal has no effect 0 8x0 4mm 0 8 0 4mm PZ Note The phase difference between the PZ signal and the Phase A signal and the Phase B signal are not defined Output specification Output connector specification Output connector pin type RDAD 15P LNA 05 Hirose Electric or equivalent Suitable standard accessory D15 403N 110 Technical Electron or equivalent Pin No Type B Signal Type C Signal 1 OV GND OV GND 2 OV GND OV GND 3 5V 5V 4 5V 5V 5 Reset input anode Phase A 6 Reset input cathode Phase B 7 Vref Vref 8 PZ m 9 ALM alarm negative logic ALM alarm negative logic 10 PA PA 11 PA PA 12 PB PB 13 PB PB 14 PZ PZ 15 F G EG e There is a
163. rface 005500 3 Q and R indicate the datum surfaces for mounting this linear scale a K P Dimensions Effective range Maximum travellength Overall length Distance to center ounting pitch No of mounting holes Lo mm Li mm L2 mm L3 mm La mm Ls mm P mm n 100 120 225 112 5 Eb 150 75 2 200 220 325 162 5 37 5 250 125 2 300 320 425 212 5 37 5 350 175 2 400 420 525 262 5 62 5 400 200 2 500 520 625 312 5 62 5 500 125 4 600 620 725 362 5 62 5 600 50 4 700 720 825 412 5 62 5 700 175 4 800 820 925 462 5 62 5 800 200 4 900 920 025 512 5 62 5 900 50 6 E 000 1020 125 5625 375 1050 175 6 4 En 100 1120 1225 612 5 87 5 1050 175 6 aA 2 1200 1220 B25 662 5 62 5 1200 200 6 e 300 1320 1425 712 5 112 5 1200 50 8 as 1400 1420 1525 762 5 62 5 1400 175 8 Be 500 1520 625 812 5 112 5 1400 175 8 1600 1620 725 862 5 62 5 1600 200 8 1800 1820 1925 962 5 87 5 1750 175 10 2000 2020 225 1062 5 62 5 2000 200 10 2200 2220 2325 1162 5 112 5 2100 175 12 Codes and Order Numbers ABS AT555 SC ABS AT545 AT545A SC ABS AT505 AT505A SC Order No Code Order No Code Order No Code 539 761 50 AT555 100 SC 539 731 AT545 A 100 SC 539 161 AT505 A 100 SC 539 763 50 AT555 200 SC 539 733 AT545 A 200 SC 539 163 AT505 A 200 SC 539 765 50 AT555 300 SC 539 735 AT545 A 300 SC 539 165 AT505 A 300 SC 539 767 50 AT555 400 SC 539 737 AT545 A 400 SC 539 167 AT505 A 400 SC 539 769 50 AT555 500 SC 539 739 AT545 A 500 SC 539 169 AT5
164. s However the maximum head cable length is 10m and the maximum signal cable length is 5m x E Control device Head cable ABS AT545A Tf mr DE ren TS J i 1 1 ESS EM A i F Box 7 Scale unit Signal cable Connector B Connector A PB z n Mitsubishi Electric Corporation Head cable ae JL MRJAMRIS otes Feedback cable Grounding conductor 1 Connectors A B and the feedback cable are to be prepared by the user 2 Connectors A B and the grounding conductor are to be connected by the user 3 A Mitsubishi Electric Corporation encoder cable can be used as the feedback cable Model MR JCCBLOM H Cis the cable length 2 or 5m When using the encoder cable ensure that the total cable length is 10m or less The feedback cable configuration depends on the system Please contact Mitsubishi Electric Corporation for details 54 t n 2 ED b wn fe E s a 2 lt wo wo wn So oS uA lt Nn sa lt Output specification ABS AT555 AT545 AT505 flying leads Wire color Signal Brown Red 5V Whi
165. s half sine 11ms Multi point fixing type Air supply hole With air supply hole Multi point fixing type a Type PA PA PB PB PZ PZ Electrical specifications Conforms to RS422 Main scale grating pitch 20ym Minimum resolution 0 1 0 2 0 5 1 2 5 5um fixed when shipped Minimum edge interval 125 250 333 500 1000ns fixed when shipped Maximum response speed 5 4 to 120 m min Determined by minimum resolution and minimum edge interval Power supply voltage 5VDC 5 Maximum current consumption 200 mA Protection rating Equivalent to IP53 when the user s manual is followed Sliding force 5N max Operating temperature 0 to 45 C Storage temperature 20 to 70 C Operating storage humidity 20 to 80 RH no condensation Direction switching Standard Reverse set when shipped Alarm detection Over speed scale signal error Alarm function Alarm output Output for PA PA PB PB and PZ PZ are all high impedance Alarm display Red LED on NC side connector of signal cable turns on this does not include single head cable types Mitutoyo Mounting dimensions for multi point fixing type Unit mm 25 hole countersunk 98 6 on both sides depth 6 Fixing screw Hex bolts M4x25 4 8 Overall length Ls 4 8 L2 100 0 2 100 0 2 100 0 2 l 55 e 5 H Mitutoyo LINEAR SEALE WM Wy iu CE 4610 2
166. s 7 m i BC 2 places position of the middle support is adjustable in the measuring length direction A A EES Dimensions of scale units AT103 Effective range Maximum travel length Mounting hole pitch Overall length Middle support Middle support Middle support Signal cable Order No Code Lo mm L mm L2 mm L3 mm L4 mm Ls mm Le mm length m 539 111 30 AT103 100 100 120 248 268 539 112 30 AT103 150 150 170 298 318 539 113 30 AT103 200 200 220 348 368 539 114 30 AT103 250 250 270 398 418 539 115 30 AT103 300 300 330 458 478 539 116 30 AT103 350 350 380 508 528 539 117 30 AT103 400 400 430 558 578 3 539 118 30 AT103 450 450 480 608 628 oy nn 539 119 30 AT103 500 500 540 668 688 539 121 30 AT103 600 600 650 718 798 539 123 30 AT103 700 700 760 888 908 539 124 30 AT103 750 750 810 938 958 Et 539 125 30 AT103 800 800 860 988 1008 ES 539 126 30 AT103 900 900 960 088 108 A 539 127 30 AT103 1000 1000 060 188 1208 594 x 539 128 30 AT103 1100 1100 160 288 1308 644 amp m 539 129 30 AT103 1200 1200 260 388 1408 694 p e 539 130 30 AT103 1300 1300 360 488 1508 744 s a 539 131 30 AT103 1400 1400 460 488 1608 794 E 539 132 30 AT103 1500 1500 560 688 1708 844 5 BE 539 133 30 AT103 1600 1600 690 818 1838 610 lt lt 539 134 30 AT103 1700 1700 790 918 1938 650 539 135 30 AT103 1800 1800 890 2018 2038 670 539 136 30 AT103 2000 2000 2100 2228 2248 740 539 137 3
167. s and Order Numbers ABS AT353 Order No Code Order No Code 539 541 30 AT353 100 539 558 30 AT353 1100 539 542 30 AT353 150 539 559 30 AT353 1200 539 543 30 AT353 200 539 560 30 AT353 1300 539 544 30 AT353 250 539 561 30 AT353 1400 539 545 30 AT353 300 539 562 30 AT353 1500 539 546 30 AT353 350 539 563 30 AT353 1600 539 547 30 AT353 400 539 564 30 AT353 1700 539 548 30 AT353 450 539 565 30 AT353 1800 539 549 30 AT353 500 539 566 30 AT353 2000 539 551 30 AT353 600 539 567 30 AT353 2200 539 553 30 AT353 700 539 568 30 AT353 2400 539 554 30 AT353 750 539 569 30 AT353 2500 539 555 30 AT353 800 539 570 30 AT353 2600 539 556 30 AT353 900 539 571 30 AT353 2800 539 557 30 AT353 1000 539 572 30 AT353 3000 ABS AT343 AT343A Order No Code Order No Code 539 601 AT343 A 100 539 618 AT343 A 1100 539 602 AT343 A 150 539 619 AT343 A 1200 539 603 AT343 A 200 539 620 AT343 A 1300 539 604 AT343 A 250 539 621 A
168. splacement magnitude of the sensor section allowing a sinusoidal signal with a cycle that corresponds to the pitch of the scale coils to be obtained By using an electrical circuit that performs interpolation division of this sinusoidal signal displacement can be measured with fine resolution ystems NC Linear Scale S ystem Diagram S Applications Applications ystems Semiconductor fabrication equipment Di i Hum AT Series Reference icing saw positioning ystem Diagram Applications Va a o wn ue w E z VU a S Lithography equipment Scanning stage positioning ST Series Reference Electron microscope ST Series Ref Mask observation circuit pattern measurement Ses eS ese defect inspection etc Silicon wafer XY table with integrated linear scales ystems Various NC machine tools AT Series Ref High precision fully closed loop control _AT Series Reference _ Racecar Sliding table Cutting blade ystem Diagram Applications 72 ED I 92 M oO wo VU S Electronic component inserter ST Series Ref High speed high precision mounting of electronic EUST asec components Linear scale FPD inspection equipment p HIP ST Series Reference Defect inspection and repair position Linear scales determination S NC Linear Scale Systems System Diagram Scale Unit I
169. ssified as regulated items under Japanese Foreign Exchange and Foreign Trade Law Please consult us in advance if you wish to export our products to any other country If the purchased product is exported even though it is not a regulated item Catch All controls item the customer service available for that product may be affected If you have any questions please consult your local Mitutoyo sales office Export permission by the Japanese government may be required for exporting our products according to the Foreign Exchange and Foreign Trade Law Please consult our sales office near you before you export our products or you offer technical information to a nonresident Coordinate Measuring Machines Vision Measuring Systems E gt U L Optical Measuring Sensor Systems Test Equipment and Seismometers Digital Scale and DRO Systems Small Tool Instruments and Data Management Mitutoyo Corporation 20 1 Sakado 1 Chome Takatsu ku Kawasaki shi Kanagawa 213 8533 Japan T 81 0 44 813 8230 F481 0 44 813 8231 http Awww mitutoyo co jp Mitutoyo 000 1212 1 X CH X Printed in Japan
170. suring device The inspection environment temperature is 20 C so the accuracy is at this temperature The inspections are performed with other inspection conditions and standard values that comply with Mitutoyo s internal standards Laser length measuring PC device counter Im Vaan Digital counter Cube corner Mounting bracket fo Scale unit 1 Sliding table Interferometer Laser oscillator Laser beam axis o Es gt Figure 1 Linear scale accuracy inspection device overview The accuracy error at each measured point is determined according to the following formula Error reference value of the laser length measuring device value measured by the linear scale Here the words accuracy and error have the same meaning We refer to the plot on a graph of the error at each measured point in the effective range as an accuracy chart Based on this accuracy chart the accuracy of the linear scale is noted as the range between he maximum error and minimum error There are the following two notation methods 1 Note the size of the range between the maximum error and minimum error as a The value a shown in Figure 2 1 indicates the accuracy This standard value is indicated using the conversion formula a 8 L um Here L is the effective range in mm and a and
171. te Black GND Orange DT Yellow DT Green REQ Blue REQ Purple Phase A Gray Phase B Shield FG Notes 1 Phase A and Phase B are used as test signals Keep them disconnected during use 2 Connect the shield wire to the grounding conductor ABS AT545A Output connector pin type Tyco Electronics Japan Mini Universal Mate N Lock Connector 9P 172169 9 Housing Black Applicable connector 172161 9 Housing Black ABS AT505A flying leads Wire color Signal Brown Red 5V White Black GND Orange N C Yellow N C Green REQ DT Blue REQ DT Purple Phase A Gray Phase B Shield FG Notes 1 Phase A and Phase B are used as test signals Keep them disconnected during use 2 Connect the shield wire to the grounding conductor Pin No Signal 3 1 MR REQ DT 2 MRR REQ DT 4 07 E i 8 OV GND 9 EG 36 NC b Mitutoyo Cable dimensions Unit mm ABS AT555 505 474 MA H e i s D sub 15 pin socket type 68 4 Ei Head cable 2m
172. ted by the user 3 A Mitsubishi Electric Corporation encoder cable can be used as the feedback cable he user Model MR JCCBLOM H Cis the cable length 2 or 5m When using the encoder cable ensure that the total cable length is 10m or less ength is 29m or less However the maximum head cable length is 10m and the maximum Connector B Connector A A Mitsubishi Electric Corporation B E Eoo Slee MR J4 MR J3 Feedback cable Grounding conductor i The feedback cable configuration depends on the system Please contact Mitsubishi Electric Corporation for details 62 S 23 D c 92 c O a Ee lt Nn E T v wn ce e lt mn aa lt a i ED b wn fe 5 s a 2 lt z wo v wn oO uA lt wn sa lt Output specification ABS AT553 AT543 AT503 flying leads Wire color Signal Brown Red 45V White Black GND Orange DT Yellow DT Green REQ Blue REQ Purple Phase A Gray Phase B Shield FG Notes 1 Phase A and Phase B are used as test signals Keep them disconnected during use 2 Connect the shield wire to the grounding conductor ABS AT545A Output connector pin type Tyco Electronics Japan Mini Universal Mate N Lock Connector 9P 172169 9 Housing Black Applicable connector 172161 9 Housing Black ABS AT573A AT503A flying
173. th 4 5 EN Effective range Lo m e Maximum travel length L1 i Coil spring Head cable L 0 3m or 1m 1 50 2xM4x0 7 depth 5 800 2 2x07 through hole 402 G 914 both sides countersunk depth 6 5 gt TEE lo amp NS B A 25 C Edi iz M Middesupot Fixed Fixed Loy Fixed s Scale unit mounting surface 1 1 Middle support L7 G0 17 Mounting hole pitch L3 17 AN EZ 15 N D vo Nn lt c S Q E 7 a lt Middle support Le Note If the head cable is required to lead from the opposite direction the scale unit can be installed upside down Flexible metal conduit Signal cable 1 Lis 3 5 or 7m L 1 47 4 56 4 ese LI z Scale alarm display LED Connector for feedback cable Included accessory User provides the cable and NC side connectors 41 2 Mounting dimensions for double end fixing type Effective range Maximum travel Mounting hole pitch Overall Middle support mm e The number of middle supports attached Scale unit Lo mm length m length depends on the eff
174. ties listed above refer to compatibility with the standard specifications Note 2 When you change to a current model check the direction before you make the connection If the direction is different the device may go out of control Note 3 Contact us for information on models not listed here Mitutoyo Handling linear scales Mounting scales 1 AT scale mounting posture The scale unit is designed so that it is difficult for contamination to enter the unit but determine the mounting posture after considering the arrival directions of coolant and dust so that these substances do not come into direct contact with the aperture Also be sure to prepare a scale cover Coolant dust etc Coolant dust etc SS Vertical mounting Horizontal mounting Perpendicular mounting Coolant dust etc Coolant dust etc emm Co laht dust etc dl Recommended Do not install Possible to install like this Mounting direction like this r E 9 When using the device in T css an environment wit coolant or cutting oil mist possible to install e nd do not mount the device in the vertical direction 2 Mounting the AT scale unit As shown in the following figure use dial gauges or similar devices close to the two effective range marks to check and adjust their p
175. two 90 phase shifted Dutputsignal square wave signals scale reference point signal alarm signal Effective range 10 to 3000mm eem range 10 to 300mm 1 0um o Effective range 350 to 500mm 2 0um Accuracy 20 C Effective range 600 to 1000mm 3 0um Effective range 1100 to 3000mm 3 0um m 841 x1075 C 5000mm s depending on setting With scale reference point 50mm pitch 10 to 75mm Center point 5VDC 5 200mA Max 0 to 40 C 20 to 80 RH no condensation Storage temperature humidity 20 to 60 C 20 to 80 RH no condensation Alarm indication LED illumination on the I F box Head cable length 1m For high flex type head cable please contact us Thermal expansion coefficient Maximum response speed Scale reference point Power supply Maximum current consumption Operating temperature humidity e F box output connector pin assignment Output connector pin type RDAD 15P LNA 05 Hirose Electric or equivalent Suitable plug standard accessory D15 403N 110 Technical Electron or equivalent Pin No Signal 1 OV GND 2 OV GND 3 5V Vcc 4 5V Vcc b Phase A Sinusoidal signal 6 Phase B Sinusoidal signal 7 Vref 8 PZ scale reference point 9 ALM alarm negative logic 10 PA 11 PA 12 PB 13 PB 14 PZ 15 EG Mitutoyo Output signal waveform e 2 phase sinusoidal signals i Phase ALZA Vref i i 1 js EUA aa i
176. uu Effective range Maximum travel length Overall length No of mounting Order No Code lo mm 9 li mm o l2 dn L3 mm la mm blocks 539 443 30 AT203 3250 3250 3350 3464 1S 800 539 444 30 AT203 3500 3500 3600 3714 1850 850 539 445 30 AT203 3750 3750 3850 3964 1975 930 539 446 30 AT203 4000 4000 4100 4214 2100 1000 539 447 30 AT203 4250 4250 4350 4464 2225 1050 539 448 30 AT203 4500 4500 4600 4714 2350 1100 539 449 30 AT203 4750 4750 4850 4964 2475 800 539 450 30 AT203 5000 5000 5100 5214 2600 830 539 451 30 AT203 5250 5250 5350 5464 2725 870 7 539 452 30 AT203 5500 5500 5600 5714 2850 910 539 453 30 AT203 5750 5750 5850 5964 2975 950 539 454 30 AT203 6000 6000 6100 6214 3100 1000 Interface Unit Pulse signal conversion unit PSU 200 The PSU 200 splits the sinusoidal signal output by Mitutoyo linear scales into a minimum of four and a maximum of 200 divisions and converts the signal to a square wave signal so that j NC feedback systems measurement control devices etc can be used with linear scales in y order to achieve highly accurate positioning System configuration i d Mitutoyo linear scale PSU 200 Control device z o te To s Supp Ure o AMO on IL 050 oit 5 i
177. varies 0 to 10 based on the operating environmental conditions Direction Internal DIP switches can be used to switch between the standard and reverse directions e T o ue lt o S Q o a lt Standard PA d b PA goes ahead PB OL O UL Reverse PA amp m Traveling direction of detector head PBgoesdhead pg This is in the standard direction when shipped Wiring example Relay cable NC device D S 5V Scale unit GND Note 1 When the shield has a drain wire connect it to Pin 15 Note 2 Note 2 Always ground the shield for relay cables by for example connecting it to an earth conductor R1 560Q R2 1500 Recommended receiver SN75ALS195 TI P1 e 7 ue lt I S Q E 7 a lt AT203 scale unit mounting dimensions e AT203 100 to 3000 ly hole M5 Air suppl Overall length Ls Unit mm i Mounting hole pitch L Maximum travel length L Effective range Lo 02 G Scale unit Mounting surface Jal

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