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L116C Manual

1. 90 COMPENSATOR T CHANGING IN AMPLITUDE IN THE LIGHT PATH LT 7 AS THE ROTATES ELLIPTICALLY CIRCULARLY POLARIZED LICHT nd POLARIZED LIGHT ANALYZER PRISM 90 COMPENSATOR IN THE LIGHT PATH SAMPLE WAFER ON THE TABLE The LED meter is not on either arm Figure 1 1 This is the Optical System Functional Diagram for a single wavelength ellipsometer 7109 C 229D 1 7 L116C ELLIPSOMETER DESCRIPTION 50 ELLIPSOMETER COMPONENTS The principle components of the L116C Ellipsometer are identified in Figures 1 2 and 1 3 5 1 Laser A red laser assembly with a fixed wavelength of 6328 632 8 nm is adjusted to provide the low power Class ll which is for under one milliwatt light source built in quarter wave depolarizer in the laser output produces a circular polarization of the beam NOTE When the beam attenuator see below is out the laser beam strikes the sample wafer or table surface both the polarizer and analyzer arms must be at the same angle of incidence Then the ellipsometer can make measurements and will be safe to work with The beam attenuator on any laser supplied to Gaertner is removed when the laser output is adjusted to under one milliwatt 5 2 See Figures 1 1 1 2 Polarizer Drum and Prism The polarizer prism mounted in the polarizer drum is a Glan Thompson calcite prism that converts the circularly polarized light from the laser to linearly
2. band 632 8 nm red laser optical interference filter is installed at the analyzer output and is used to block all of the wavelengths except that of the laser beam Detector and Switch Assembly This unit is inside the photodetector cover with an access hole and consists of a solid state photodetector that produces an output current proportional to the intensity of the light from the analyzer prism a current to voltage converter preamplifier analog output amplifier and three position Mode Switch 1 11 7109 C 229D L116C ELLIPSOMETER DESCRIPTION 56 Electronic Chassis This assembly is in the ellipsometer base and consists of the analyzer motor drive analog digital conversion test jacks and interfaces to the computer 5 7 Instrument Power Supply This assembly is in the vertical enclosure at the rear of the support frame The power supply provides the conversion of various line voltages compensator control and laser drive 58 Sample Stage and Table The sample stage provides a combination rotary and linear manual positioning of the sample table allowing measurement at any point on the sample surface This is achieved by linear translation in the X direction fram center and rotation from 0 to 360 The linear scale is graduated in one 1 mm increments numbered at 10 mm intervals from 0 to 75 mm full scale The rotary scale is graduated in 1 increments numbered at 10 intervals from 0 to 360 See
3. polarized light Any given angle of prism orientation from 0 to 360 can be set by adjusting the polarizer drum The angle can be set to within tenths of a degree by setting a number in whole degrees indicated on the drum just below zero 0 on the 0 to 1 vemier scale and then aligning a graduation on the vernier scale to one on the drum scale For automatic measurements the user should fix the polarizer drum at exactly 45 by inserting the locking screw into the drum s detent Compensator The compensator assembly is at the optical output of the polarizer prism and has a mica quarter wave plate set at 90 When this way plate is put in the laser light path the linearly polarized light from the polarizer prism is changed to circularly polarized light Beam Attenuator The beam attenuator more accurately called a beam blocker lever at the polarizer module output aperture is a manually operated slide device to either block the incident beam or to allow passage of the beam to the sample surface 5 3 Sample Monitor Assembly The Sample Monitor Assembly has both a tilt monitor and 39 power sample surface viewing microscope Using the viewing scope function the user can see the sample surface for damage or imperfections The light source for the surface illumination is built in originating within the sample monitor assembly enclosed in a housing above the objective end of the sample monitor The inten
4. A D converter to accept the photodetector analog output The count pulse is derived from a phototransistor circuit activated by a LED in the encoder in the same manner as previously described for the motor pulse About 30 microseconds later allowing time for A D conversion a peripheral flag PFLG signal Is sent to the computer indicating that a set of readings is ready for the computer The reading in 12 bit digital format is then accepted by the computer The cycle is repeated for each Subsequent count pulse occurring every 5 until 72 readings have been processed and stored by the computer The next reference pulse resets the timer and terminates the measurement cycle Under program control the compensator position is changed and a second set of 72 readings is taken in the same manner as previously described An external PD zero offset adjust is factory preset to set zero light level of the D conversion such that measurements are insensitive to changes in gain of the photodetector output ensuring minimum distortion solenoid operated slide places the 90 compensator in the laser light path and then removes it from the light When a control zero CTL 0 signal from the computer is applied to a switching transistor circuit on the compensator control board the solenoid 1s energized to insert the compensator in the optical path When the CTL 0 signal is at logic 9 the solenoid is de energized to remove the 90 compensator
5. CARD AND SOCKET FOR THE GPIO CABLE TO THE ELLIPSOMETER PARALLEL SOCKET FOR THE CENTRONICS INTERFACE CABLE TO THE PRINTER Figure 5 4 This is the IBM PS 2 25 computer and its connections which is generally used with the L116C Ellipsometer and is the one that Gaertner will supply with that Ellipsometer 5 7 7109 C 229D L116C ELLIPSOMETER INSTALLATION SOFTWARE INSTALLATION AND LOADING NOTE Wherever this instruction tells you to type in some specific characters the characters are in boldface and just after TYPE Type in the Characters and press ENTER Software Installation and Loading The Ellipsometer should be on 15 minutes before using but 30 minutes would be better Turn ON the computer display unit and the printer insert the program disc into drive A and turn ON the computer The program should boot automatically If DOS is already loaded place the program disc in the appropnate disc drive i e 1 2M drive for programs using IBM PC AT and 720k for PS 2 or 360k drive for programs using IBM PC or IBM PC XT For example if A gt is displayed on the screen drive A is the default drive the drive that the computer selects when the computer is turned ON If the program disc is compatible with drive A and inserted into drive A then just type AUTOST and press ENTER The program will load and start running 5 8 7109 C 229D L116C ELLIPSOMETER INSTALLATION COMPUTER CIRCUIT BOARD INSTALLATIO
6. Figure 1 2 on page 1 9 The table is verticalhy adjustable so that the laser beam reflected from the sample surface is maximized when entering the analyzer aperture he vertical position is adjusted by rotating a knurled knob on the support structure clockwise rotation raises the table A locking screw secures the vertical adjustment The standard table will accept samples up to 150 mm 5 9 in diameter and is tiltable up to one 1 degree in both X and Y planes from the predetermined level position established at Gaertner just before the shipment of the ellipsometer See the description of the Sample Monitor Assembly page 1 8 fine motion vertical position adjustment option may be added to the table An attachment for the vacuum pump is on the right side of the stage See Figure 1 2 on page 1 9 Yellow plastic locator strips are supplied for use in centering a wafer sample on the table surface For example A plastic strip can be inserted into either the 3 inch 100 mm 125 mm or 150 mm diameter groove in the surface of the standard table 1 12 7109 C 229D L116C ELLIPSOMETER DESCRIPTION 60 DETERMINATION OF PSI AND DELTA The state of polarization of a beam is determined by the relative amplitude amplitude ratio and the relative phase shift phase difference between the two component plane waves resolved from the eiectric field of the beam If the phase differences between the components is
7. data measurement with previously acquired sample thickness data The compared data should be within 3 2 6 7109 C 229D 1 116C ELLIPSOMETER PERATION VERTICAL POSITION ADJUST PD VERTICAL ADJ CLAMP 77 ES COO TILT ADJUST iis X X PLANE at Lo tw po GP oU Y PLANE ne benk iN oh s Lu ROTATION CONTROL X TRANSLATION CLAMP STAGE X TRANSLATION CONTROL Figure 2 4 This is the L116C Sample Stage and Table 2 7 7109 C 229D L116C ELLIPSOMETER OPERATION 20 MEASUREMENT PROCEDURE Place the sample wafer on the sample table load the program software into the computer and initiate the measurements Once the measurements are started you press the keys as the screen and instructions request then measurements are automatic Some measurements can be made after a 15 minute ellipsometer warmup the stability of the laser improves after a few hours which is better for important measurements If the ellipsometer is in use several times a day the laser should operate continuously WARNING To avoid the hazard of laser beam dispersion the beam attenuator must be closed while you adjust the polarizer or analyzer arm or when the two arms are not at the same angle of incidence 2 1 Standard and Optional Single Point Measurement Programs Valid measurements are dependent upon the selection of a program applicable to the sample being measured an
8. does not exceed one milliwatt and therefore is classified as a Class Il laser product as defined by Radiation Performance Standards 21CFR Subchapter J Federal Register Volume 10 148 July 31 1975 Appropriate WARNING and Conformance labeis are affixed to the ellipsometer to alert personnel of the presence of laser radiation during operation WARNING Logotype Attached to the polarizer arm and reads LASER RADIATION DO NOT STARE INTO BEAM CAUTION LASER RADIATION DO STARE INTO BEAM HELIUM NEOM im CLARI K LAREN PRODUCT CERTIFICATION Label Attached to the left front face of the vertical piate and reads THIS LASER COMPLIES WITH DHEW CDRH RADIATION PERFORMANCE STANDARDS 21CFR SUBCHAPTER J 7109 C 229D APERTURE Label Attached to the exit aperture of the polarizer module and reads AVOID EXPOSURE LASER RADIATION IS EMITTED FROM THIS APERTURE CAUTION Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure L116C ELLIPSOMETER 1 0 Over most of the measurement range SPECIFICATION Net Weight approx Shipping Weight Dimensions approx Height Width Depth Laser Light Sources less than 1 mW accessible radiation Incidence Angles Pre aligned detent Beam Diameter std 1 mm Compensator Polarizer Analyzer Sample Size Method of Measurement Film Thick
9. either 0 or 180 the beam is linearly polarized All other phase differences result in elliptical polarization When a monochromatic beam of polarized light strikes the surface of a sample the reflection of the light causes a change in the relative phases of the component plane waves and a change in the ratio of their amplitudes The angle DELTA is defined as a change in phase difference An angle PSI is the arctangent of the factor by which the amplitude ratio changes The phase difference A and the amplitude ratio V thus characterize the elliptically polarized light reflected from the sample surface These parameters are used to calculate the optical constants of bare surfaces and if film covered the thickness and refractive index of the film The refractive index Nf is used to determine the physical composition of the film and to establish the magnitude of the period i e the thickness interval between the repeating of elipsometric readings Using the measurement data obtained from the two sets of light intensity readings the computer caiculates DELTA for each set The DELTA selected to achieve optimum accuracy in computation of optical constants and film thickness is based on the following criteria Within 45 of 0 or 180 DELTA is found with the 90 compensator in the laser light path More than 45 from 0 or 180 DELTA is found without 90 compensator in the light path PSI is always obtain
10. is 2 The total weighted logic of switches 9 to 12 is 6 decimal place 1523nm 1 BLUE LASER RETARDATION See Figure 5 6 Assume the blue retardation is 103 9 Switches 1 weight 8 and 3 weight 2 are open switches 2 and 4 are closed Total weighted logic is 10 tens place Switches 5 and 6 are closed switches 7 weight 2 and weight 1 are open Total weighted logic is 3 units place Switches 9 weight 8 and 12 weight 1 are open switches 10 and 11 are closed Total weighted logic is 9 decimal place 830nm LR BLUE LASER RETARDATION For the diode infrared laser the value of retardation will be lower around 70 LR BLUE LASER RED LASER WEIGHT 59 LOGIC WEIGHTED LOGIC PLACE gt tens units decimal tens units decimal Figure 5 6 7109 C 229D 5 10 L116C ELLIPSOMETER INSTALLATION IBM PS 2 25 This computer is the one most often used with the L116C Ellipsometer To install the GPIO Interface Card refer to IBM Operations and Starter Diskette first edition June 1987 Section 2 is Installing Your Options The cover is shown removed on pages 2 3 and 2 4 The circuit board installation is shown on pages 2 13 and 2 14 and the GPIO Interface card shouid be installed in the lower expansion slot The cover is reinstalled according to pages 2 16 and 2 17 IBM PS 2 25 286 The differences between this computer a
11. point A2 If the voltage 3V is incorrect at A2 the regulator on the buffer count board may be defective If it is proper the encoder may be defective contact Gaertner If the EBT board or motor board is found to be defective remove the chassis assembly for further fault isolation repair or replacement 7109 C 229D L116C ELLIPSOMETER Table 7 1 SYMPTOM No binary A D data output The measurement cycle all zeros is not initiated 7109 C 229D POSSIBLE CAUSE 7 10 SERVIGE TROUBLESHOOTING GUIDE Continued FAULT ISOLATION Reset and reload the program Initiate the measurement If the symptom persists observe the reference pulse output at the orange test jack With the Mode switch at stall the motor and look for a pulse around 357 to 359 on the analyzer drum If it is present verify that the PCTL logic 1 0 to 1V is proper at the blue test jack If the PCTL voltage is correct the cycle timer may not have tumed on Remove the electronic chassis for trouble analysis of logic board If the PCTL is incorrect the problem may be in the computer If the reference pulse output is not present above at the orange test jack observe the reference pulse output at check point Figure 7 4 If the pulse is present the Mode switch may be defective If the reference pulse output is not at the Optical switch may be defective contact Gaertn
12. the verification of the CTL 0 operation the solenoid logic 1 0 to 1V at the input of the instrument is not activated to insert power supply If the voltage is 3 volts or more the 90 compensator the trouble is in the computer or the computer into the optical path interface If the voltage is less than one voit the compensator control board may be defective The output voltage to the solenoid should be 21 to 24 5V dc steady state while CTL O is at logic 1 to energize the solenoid with the compensator in If the voltage is not correct remove the power supply for furthe analysis If the voltage is proper then the solenoid is in an overheated condition or else defective 7 12 7109 C 229D L116C ELLIPSOMETER SERVICE 1 4 COUNT PULSE MEASUREMENT a Place the Mode switch at A and stop the drive motor by a gentle pressure of the hand on the analyzer drum and then set the analyzer drum to 359 b Observe the count pulses at the yellow test jack Figure 7 3 while manually rotating the analyzer drum slowly The first count pulse should start within of 0 and have a duration of no less than 0 4 or greater than 1 2 During the period of the pulse the voltage should be less than 0 2 volt and jump to at least 4 volts at the end of the pulse The pulse should repeat at 5 intervals of the analyzer rotation a total of 72 pulses during one revolution of the drum Missing and abnormal pulses are
13. tilt adjustment controls are on the underside of the table The Sample Monitor Assembly includes the following e LED Meter Emission Indicator e Electrical Control Group e Key operated ellipsometer and laser power ON OFF switch e illuminator and illumination intensity control 5 4 Reference Sample silicon substrate wafer reference sample with a single layer transparent silicon oxide film thickness of about 780 which is 78 nm is supplied with the ellipsometer Initially the sample should be used for obtaining sample measurements in the process of instrument familiarization Periodically the sample should be used to obtain measurement data for comparison with previous data to verify that the ellipsometer is in proper adjustment 5 5 Analyzer Analyzer Drum and Prism The analyzer prism is in the analyzer drum and in the optical axis of the light reflected from the Sample Wafer Figure 1 1 The analyzer prism is identical to the polarizer prism in that it is a Glan Thompson prism inside a motorized drum During automatic operation the analyzer drum with the analyzer prism inside is constantly rotated by the drive motor Encoder and optical switch assemblies on the analyzer shaft are slotted such as to allow the passage of light pulses at discrete intervals of the analyzer rotation from LED s to phototransistors which in turn generate the pulses used during the measurement process Filter A narrow
14. 92 mm 15um x 43 8 um EE UD ond GU mc mw uw n dm IR E E Em m m C CO E EP E Ee nmn CES mc m ERO EN n m mw ee RU RR E E RE RP PT PE ER e m 1 mm x 3 86 mm 15um x 57 9 um HR GN Pm m h GO GO NP PCR Gm Emm m mw Pd NN PO eee Ee A NN eee m m n um RN HR m m A E E E m m HR p m mcum ee RON 1 mm x 5 76 mm 15um x 86 3 um The Microspot Optlcs are optional components for the polarizer and analyzer arms See the Optional Components Section 1 4 7109 C 229D L116C ELLIPSOMETER 2 0 ABBREVIATIONS AND SYMBOLS Nf Heal value of refractive index for film being measured Kf Extinction value of refractive index for film being measured Ns Real value of refractive index for substrate Ks Extinction value of refractive index for substrate PHI Angle of incidence y PSI Amplitude ratio as determined by measurement DELTA Phase difference as determined by measurement A D Analog to digital ADJ Adjust AEG Analyzer to Electronic Chassis 7109 C 229D AMPL AS Amplifier Autoset A AUTO Automatic cm CTL DET EBT LED LSB Cent
15. Assembly eyepiece turn the illumination control for the desired illumination Move the eyepiece in or out for the sharpest of the 90 crosshairs Rotate either of the Sample Monitor Control knobs in Figure 2 2 so that it brings a reflected image of the two diagonal lines into view if already not in view as seen in the eyepiece Section 1 3 continued on page 2 6 7109 C 229D L116C ELLIPSOMETER SAMPLE ILLUMINATION CONTROL jam LEE EE tete or ER n m g dein _ LED METER This meter uses a row of tiny red lights to show the analog output of the photo dector PD circuit green light on the right shows that the PD output is gverscale A green light at the left means that the PD output is negative During measurements the Mode switch is at A the drum rotates and the LED meter display swings with the rotation Three or less tiny red lights indicate a zero PD output FYEPIECE OPERATION EMISSION INDICATOR O 6 ro ON OFF KEY SAMPLE MONITOR CONTROL 39 POWER MICROSCOPE Figure 2 2 These are the ellipsometer controls and indicators on the Sample Monitor Assembly 2 4 7109 C 229D L116C ELLIPSOMETER OPERATION INNER 5 S GROOVE N 150 mm OUTER GROOVE N N T 2 100 CENTRAL HOLE 3 INCH Figure 2 3 This is a top view of the 150 mm almost 6 inches diameter sample table See Figure 6 1 in the Optional Components
16. INSTRUCTIONS FOR L116C ELLIPSOMETER 7109 C229D GAERTNER SCIENTIFIC CORPORATION 3650 W Jarvis Ave Skokie IL 60076 USA TEL 847 673 5006 FAX 847 673 5009 www GaertnerScientific com WARRANTY ALL OPTICAL AND MECHANICAL COMPONENTS OF THE L116C ELLIPSOMETER ARE WARRANTED FOR TWO YEARS FROM DATE OF DELIVERY ELECTRONIC COMPONENTS INCLUDING THE LASER ARE WARRANTED FOR ONE YEAR ANY DEFECTS IN MATERIAL OR WORKMANSHIP WILL BE CORRECTED BY GAERTNER AT NO COST INCLUDING SHIPPING CHARGES TRAVEL AND LODGING COSTS INCURRED BY SERVICE PERSONNEL ARE NOT COVERED BY THIS WARRANTY WARRANTY ON DEFECTS IN MATERIAL OR WORKMANSHIP FOR COMPUTER EQUIPMENT SUPPLIED WITH THE L116C ELLIPSOMETER IS WARRANTED BY THE COMPUTER MANUFACTURER AND THEIR STANDARD WARRANTY CONDITIONS APPLY THE COMPUTER MANUFACTURER WILL AT THEIR OPTION REPLACE EQUIPMENT THAT PROVES DEFECTIVE DURING THE WARRANTY PERIOD REPAIRS NECESSITATED BY THE MISUSE OF THE EQUIPMENT INCLUDING THE USE OF SOFTWARE OR INTERFACING NOT SUPPLIED BY GAERTNER ARE NOT COVERED BY THIS WARRANTY NO OTHER WARRANTY 15 EXPRESSED OR IMPLIED INCLUDING BUT NOT LIMITED TO IMPLIED WARRANTY OF MERCHANTABILITY AND SUITABILITY FOR A PARTICULAR PURPOSE GAERTNER SHALL NOT BE LIABLE FOR CONSEQUENTIAL DAMAGES 1 1 7109 C 229D L116C ELLIPSOMETER GOVERNING REGULATION DESCRIPTION LASER SAFETY The Gaertner L116C Ellipsometer has a helium neon laser light source The accessible radiation
17. LARIZER DRUM Bormes di Fo 2 N Ah L _ 9 f COMPENSAT OR fy POSITIONER A The positioner s normal position has the B The positioner pulled back has the 90 90 compensator out of the light path compensator in the ilght path Figure 7 7 This is the automatic compensator positioner on the right end of the polarizer arm 2 7 Optical Orientation Checks Continued Set the Mode Switch to AS and open the beam attenuator NOTE Reinstall the two optional microspot stops See Figure 7 6 Adjust the table to the proper vertical position according to the Sample Table Vacuum and Alignment procedure in the Operation Section 2 of this manual 7 20 7109 C 229D L116C ELLIPSOMETER SERVICE 30 COMPONENTS REMOVAL FOR REPAIR REPLACEMENT The removal instructions are limited to service personnel These instructions apply to components requiring either direct replacement or lower level fault isolation and repair Removal of components other than those covered herein should be performed only by Gaertner personnel 3 1 Instrument Power Supply The ellipsometer power supply consists of the following Laser Power Supply e 5V dc Power Supply for the LED Meter e Compensator Control Board e Multi Purpose Transformer 115V ac for the Sample Monitor Assembly 115V ac for the Instrument dc Power Supply and Laser Power Supply 28V ac for the Compensator Control Board The stansdard instr
18. LATION LASER RETARDATION Continued Each set of 12 smail DIP rocker switches is divided into 3 groups of 4 switches Each rocker switch is assigned a weight 1 2 4 or 8 and a logic switch setting ON I open x1 OFF closed 0 The logic multiplied by the weight and added to the products weighted logics of the other switches in a group determines a place digit The taser retardation value is obtained by combining the 3 place digits Rocker switches 1 to 4 determine the tens place 5 to 8 determine the units place and 9 to 12 determine the decimal place in the case of 3 Wavelength Ellipsometers the LR retardation value will be in the software program RED LASER RETARDATION See Figure 5 6 Assume the red laser retardation is 96 6 Switch 1 is open its logic t multiplied by its weight 8 gives a weighted logic of 8 Switch 4 is open logic 1 weight 1 weighted logic is 1 Switches 2 and 3 are closed logic O weighted logic of each is 0 The total weighted logic of switches 1 to 4 is 8 0 0 1 9 tens place Switches 5 and 8 are closed weighted logic 0 Switch 6 weight 4 is open weighted logic is 4 Switch 7 weight 2 is open weighted logic is 2 The total weighted logic of switches 5 to 8 is 6 units place Switches 9 and 12 are closed weighted logic is 0 Switch 10 weight 4 is open weighted logic is 4 Switch 11 weight 2 is open weighted logic
19. N INTRODUCTION NOTE if the computer was supplied by Gaertner along with the L116C then the circuit boards mentioned here were already installed ignore this and the next three pages These instructions are for installing the GPIO Interface Card and Cable assembly into the IBM and IBM compatible computers for use with the L 116C Ellipsometer The computer Interface Card DIP switch settings and installations are described here GPIO DIP SWITCH ADJUSTMENT he GPIO Interface Card is shown in Figure 5 5 This card has three sets of DIP switches The smallest set of DIP switches close to the card connector on the far nght has six or ten tiny slide switches On the six switch unit switches 1 and 2 are OFF and the other four slide switches are ON On the ten switch unit switches 5 and 6 are OFF and the other eight switches are ON LASER RETARDATION The other two sets of DIP switches are on a small board near the middle of the card Each of these two larger sets of DIP switches has 12 tiny rocker switches one unit of 12 switches is for the infrared blue laser and one for the red The rocker switch settings are different for each laser The settings of the infrared blue laser switches should be closed if the instrument has only a red laser RED LASER DIP SWITCHES 6 OR 10 SMALL DIP SWITCHES sy LASER DIP Y SWITCHES Figure 5 5 This is photograph of the GPIO Interface Card 7109 C 229D L116C ELLIPSOMETER INSTAL
20. ONITOR L115VM This option allows the ease of monitoring a wafer pattem display on a CRT screen in addition to the standard viewing microscope An M T switch is usually mounted on the front of the Sample Monitor Assembiy when a video monitor is included with an ellipsometer WAFER HANDLER L116WH Model L 116WH Wafer Handler permits unattended automatic measurement of up to 25 wafers from a cassette The randon access indexer on the Wafer Handler is ultra clean with the mechanism fully contained within the housing so that there are no moving parts near the wafer The frog leg type of motion of the arm is simple clean and gentle 200mm 7 9 inches diameter SAMPLE TABLE This larger table is for 3 76 mm 100 mm 125 mm 150 mm and 200 mm wafers for film measurements See Figure 6 1 for a top view of this table NOTE If an ellipsometer has a 200 mm diameter table and the Microspot Optics it is not possible to move this table out of the two arms so that they can be set at a 80 incidence angle thus ignore any instructions that call for setting the arms at 90 6 2 7109 C 229D L116C ELLIPSOMETER OPTIONAL COMPONENTS FINE MOTION HEIGHT COMPONENTS 1 0 Description This feature may be added to any type of sample table and consists of a rotatable inclined plane acting through a transfer plate and the standard height vertical position adjustment to raise or lower the table 0 254mm 0 010 inch maximum from the mid pos
21. Stages L116HXY6 This stage accommodates 6 inch samples and enables the sample table to be moved by hand in X Y and 8 directions to facilitate at any desired point on the sample surface The X and Y coordinates translation facilitates measurement on a rectangular or grid pattern zero 0 to 2 inch left to right translation X direction 1 inch in the Y direction from center and Ya inch in the Y direction Total rotational travel direction is 0 to 360 If the white plastic retainers are removed from the table translation in the Y direction is increased to 1 inch L116HXY5 This stage is identical to the L116HXY6 stage except that the table will allow measurements on samples no greater than 5 inches in diameter Front to back translation Y direction is t 1 inch from center Micrometer Positioning Stages L116MXY6 This stage is identical to the L116HXY6 stage except micrometer thimbles are added to allow fine motion translation in the X and Y directions to facilitate positioning within rectangular scribe lines One division on the thimble equals 0 001 inch This stage is especially useful with the Microspot Optics Option L116MS accessory L116MXY5 This stage is identical to the L116MXY6 stage except will allow measurements on samples no greater than 5 inches in diameter FINE MOTION HEIGHT ADJUSTMENT L117FM This feature may be added to any type of sample stage and comprises a rotatable inclined plane actin
22. able data for the ellipsometer is contained in Table 7 2 50 REPLACEMENT PARTS A replacement parts list is in the Table 7 3 7 25 7109 C 229D L116C ELLIPSOMETER SERVICE Table 7 2 L116C Computer Interface Cable Data Pin No Input Output Logic Level Function 1 18 24 26 43 49 Ground A D Bit 1 MSB Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 Bit 8 Bit 9 A D Bit 10 A D Bit 11 A D Bit 12 LSB A D Done reading ready Initiate Measuring Cycle Terminate Measuring Cycle Compensator In Compensator Out Increase PD Gain Decrease PD Gain X XOOOOOOOO0000x 4 1 1 1 1 1 1 1 1 1 1 1 1 1 0 1 1 AX X X The Period of the measurement cycle is one revolution of analyzer drum with the duration settable from 0 25 to 1 5 seconds Logic Levels TTL Logic 1 0 to 1 volt Logic 073 to 5 volts 7 26 7109 C 229D L116C ELLIPSOMETER SERVICE Table 7 3 L116C Replacement Parts List Nomenclature Electronic Chassis interface Connector Chassis Mating Connector Cable Test Jack Instrument Power Supply Meter and Cable Assembly Photodetector Board Mode Switch Includes Cables and Connectors Beam Attenuator A D Offset Potentiometer Motor Speed Potentiometer Emission Indicator Lamp Lock Switch Includes key Ellipsometer Fuse Amp SLO BLO Clamp Screw Sample Table Clamp Screw Polarizer Analyzer Arm Clamp Scr
23. able pulse display 7109 C 229D L116C ELLIPSOMETER SERVICE E _ Fiqure 7 4 These are the four Check Points 1 to A4 in Figure 7 1 which does not show Az In order to observe the waveform or measure the voltage carefully pull out the appropriate connector just enough to carefully insert a sharp probe with the common probe at the black test jack 7 6 7109 C 229D L116C ELLIPSOMETER SERVICE 1 3 Troubleshooting Table 1 starting on the next page lists the symptoms of malfunction possible causes and corresponding actions relative to fault isolation The symptoms are listed in a sequence generally reflecting the operating procedure i e premeasurement setup and measurement procedure s a troubleshooting guide the listing assumes all dc power supplies are operative and no discontinuity in wiring Certain fault isolation actions are keyed to intermediate check points A1 to 4 The check points are shown in Figures 7 1 and 7 4 and are just below the photodetector board in the detector switch assembly section of the analyzer module Remove the detector switch assembly cover for access to these four check points 7109 C 229D 1 7 L116C ELLIPSOMETER SERVICE Table 7 1 TROUBLESHOOTING GUIDE SYMPTOM POSSIBLE CAUSE FAULT ISOLATION No power to the ellipsometer No line voltage Verify that the ellipsometer power cord is Key switch at ON seated in an ac power outlet Check the fuse replace if def
24. an indication of a possible defect in the encoder To start the automatic analyzer drum rotating momentarily set the Mode switch at AS and then setit at A 20 ADJUSTMENTS These adjustment should be made by only service personnel These adjustments are to be made on two of the three trimpots on the photodetector circuit board in the analyzer See Figure 7 5 A The lowest trimpot involves only manual operation The PD Zero Offset LED Meter and PD Gain adjustments are preset at Gaertner but may require readiustment if the photodetector board is replaced NOTE Check the PD Zero Offset adiustment before adjusting for the LED meter 7 13 7109 C 229D L116C ELLIPSOMETER SERVICE PD COVER ODE TOGGLE SWITCH ZERO OFFSET GAIN A FS ZE GND VS OO si BC 8 Figure 7 5 upper diagram A shows the photodetector circuit board the analyzer module The lower diagram B shows the two trimpots FS and ZE and the six voltage test points at the rear of the LED meter 7 14 7109 C 229D L116C ELLIPSOMETER SERVICE 2 1 PD Zero Offset This adjustment can be made by removing the black plug from the side of the PD cover a b Close the beam attenuator to block the laser light and set the Mode switch at AS Connect the measuring probe of a voltmeter that reads 10V or 20V dc to the PD Output red test jack and the common probe to the black common jac
25. as instructed in step b of the instrument power supply removal procedure above d Disconnect the 3 and 4 pin electronic chassis Interface Wiring connectors in the power supply e Remcve the two screws from each side of the eilipsometer base to detach the electronic chassis from the base 7 23 7109 C 229D L116C ELLIPSOMETER SERVICE 3 4 Photodetector Board The removal of the photodetector board requires access to the detector and switch assembly Perform the following a b Tum OFF computer and ellipsometer Unplug line cord from ac power outlet Remove the two screws that secure Mode switch to cover of detector and switch assembly Loosen the three screws that secure the cover Pull the cover outward to remove it from the assembly Withdraw the switch assembiy from retainer slots and disconnect the two black white plugs from the receptacles above the photodetector board Remove the four screws that secure the photodetector board and lift out the board carefully To install a photodetector board reverse the procedure of steps b through e 3 5 Beam Attenuator This procedure applies to both the removal and reinstallation or replacement of the beam attenuator Perform the following Loosen table clamp screw and lower the table fully Remove the optional microspot stops from the vertical plate Figure 6 Observe the NOTE at the top of the figure Position the polarizer and analyzer arm
26. ctivated tumed on section 1 1 continued on page 7 4 7109 C 229D L116C ELLIPSOMETER SERVICE me FULL POSITION COMPENSATOR CONTROL BOARD COMPUTER P O INSTRUMENT POWER SUPPLY INTERFACE P O ANALYZER SPEED P O ELECTRONIC MODULE BRN ADJUST CHASSIS MOTOR DRIVE BLU CTL 0 TO ANALYZER PCTL ETE ares SWITCH REFERENCE m DELAY AND BIT 1 MSB PREAMPL P gt TPE TT PD OUT NE AID A D BIT 12 LSB ZERO OFFSET RED OFFSE ADJUST METER ADJUST L22222222222 Figure 7 1 This is the Measurement System Functional Diagram 7109 C 229D 7 2 L116C ELLIPSOMETER SERVICE 5V REFERENCE PULSE BEN MEASUREMENT CYCLE 0 V 5V COUNT PULSE OV 5V PFLG o e FIRST READING LAST READING t M M MM 5V PCTL et STORE DATA PROCESS DATA V MOTOR PULSE ov 355 0 59 ANALYZER DRUM POSITION 3559 n The STORE DATA pulses will not appear in some makes of computers Figure 7 2 These are typical pulses during the Measurement Cycle 7109 C 229D 7 3 L116C ELLIPSOMETER SERVICE 1 1 Mea ment System Continued For the first set of readings count pulses starting at the 0 position of the analyzer rotation trigger the
27. d correct interaction by the user with the computer The standard programs supplied with the ellipsometer are in the Standard Programs section The optional programs available by special order are identified in the Optional Programs section Ideally the table need not be vertically readjusted between measurements on a series of samples if all samples in a given lot are plane parallel about equal in sampie thickness and no dust particles or other foreign matter are deposited on the surface of the table 2 8 7109 C 229D L116C ELLIPSOMETER OPERATION 2 2 Automatic Motor Turnoff An automatic turnoff of the rotating analyzer motor is provided to prolong its life The motor will automatically turn off about five minutes after the last measurement Characteristics 1 If the ellipsometer is on with the computer off and the mode switch is set to the analyzer drum will rotate once and stop 2 If both the ellipsometer and the computer are on and the mode switch is set to A the analyzer drum will rotate for five minutes before auto turn off 3 When stopped the motor will automatically turn on when a measurement is initiated and successive measurements will extend the five minute interval 2 3 Loading Programs a Load the program software into the computer The loading instructions are in the Installation section Use the Film Program or Film Subprogram of the Standard Programs section Place sample under tes
28. ective Itis 75A Slow blow Figure 7 6 Emission indicator does not Lamp burned out Replace the lamp If the problem is still present Illuminate at power turn on the instrument power supply transformer or Monitor assembly transformer may be at fault No light is emitted from the The Beam attenuator Check the position of the attenuator if it is polarizer aperture is closed closed PULL TO OPEN IT Defective laser or laser Need the replacement alignment of a laser or power supply removal of instrument power supply for repair contact Gaertner No LED meter reading during No PD output verify at If the PD output is correct the LED meter may the sample table alignment red test jack on be defective electronic chassis If the PD output is incorrect the PD board may be defective Remove the PD board for analysis replacement 7 8 7109 C 229D L116C ELLIPSOMETER SERVICE Table 7 1 TROUBLESHOOTING GUIDE Continued SYMPTOM POSSIBLE CAUSE The analyzer drum does not There is no motor drive rotate the Mode is at output assumes no NOTE FAULT ISOLATION Observe the motor pulse output at the brown test jack Figure 7 3 If itis proper the motor board may be defective If the motor pulse is incorrect observe the encoder output at check point 1 Figure 7 4 If the pulse is correct at Af the EBT board ma be defective If the pulse is improper at A1 measure the voltage at check
29. ed from the measurements without the 90 compensator in the light path 7109 C 229D L116C ELLIPSOMETER DESCRIPTION 7 0 STANDARD PROGRAM DESCRIPTION One standard single point program STD is supplied with each ellipsometer that has an IBM computer The Standard Single Point Program STD SC6A SC7A GC5A SubCA is for both L115C and L116C Ellipsometers There are four subprograms e GC5A FILM This subprogram determines the thickness and refractive index of single layer transparent non absorbing film of silicon dioxide or silicon nitride on a silicon substrate Data Output Thickness Index PSI DEL and the period There is a fixed index option e SC6A SPECIFIC This is similar to the Film subprogram Oxide or nitride films are evaluated at an incidence angle of only 70 e SCA TWO ANGLE This subprogram for measures the thickness of silicon oxide silicon nitride or other nonabsorbing film on silicon substrate Two angle measurements are at 50 and 70 incidence angles It determines the absolute thickness of thick films based on the order or period from a matched measurement at each angie Data Output Matched thickness values Index and a listing for each angle SubCA SUBSTRATE This subprogram determines the optical constants of a bare substrate These constants must be known before to making thin film measurements Data Output PSI DEL A real NS and extinctio
30. ellipsometer is equipped with the Optional Microspot Optics remove the Two microspot stops See Figure 7 6 b Close the beam attenuator and lower the sample table fully These checks cannot be used with an instrument with both the 200mm diameter table and the Microspot Optics because the table cannot be moved out of the way of the optics to set the arms at 90 Section 2 7 continued on page 7 19 7 17 7109 C 229D L116C ELLIPSOMETER SERVICE CAUTION For 90 Angle of Incidence If the ellipsometer has Mocrospot Optics turn the table so that its notch lifting slot is under the analyzer Move the table to the left and down so that neither Microspot Optic will touch the table when the arms are at 90 COMPENSATOR POSITIONER 0 MICROSPOT STOP OPTIONAL ELLIPSOMETER SLOW BLOW FUSE 75A 115 or 230 GPIO SOCKET FOR THE CABLE TO THE COMPUTER The optional 200 mm dia table cannot be moved out of the way of the optional Microspot Optics Thus the arma cannot be set at 90 with both options Figure 7 6 This is the rear and left view of the L116C 7 18 7109 C 229D L116C ELLIPSOMETER SERVICE 2 8 Optical Orientation Checks Continued C NOTE Place the polarizer and analyzer arms at a 90 angle of incidence Clamp the arms in place Remove the 45 locking screw from the polarizer drum Open the beam attenuator Push in and hold the automatic compensator positione
31. er L116C ELLIPSOMETER SERVICE Table 7 1 TROUBLESHOOTING GUIDE Continued SYMPTOM POSSIBLE CAUSE FAULT ISOLATION No binary data A D output No PD output conversion Observe the count pulse output at the yellow test jack If the puises are present check the PFLG pulses at the green test jack If the PFL pulses are not present the logic board may be defective If the pulses are present the trouble may be in the computer or the interface cable If the count pulses are not present at the yello test jack observe the check point A4 signal Figure 7 4 If the pulses are present the EBT board may be defective Remove the electronic chassis fo analysis repair If the signal is not proper at A4 the encoder may be defective contact Gaertner Mechanical misadiustment Inconsistent or inaccurate Measurements Verify that the polarizer drum is fixed at 45 Check that the polarizer analyzer settings are in precise agreement Recheck the table s vertical position 7109 C 229D L116C ELLIPSOMETER SERVICE Table 7 1 TROUBLESHOOTING GUIDE Continued SYMPTOM POSSIBLE CAUSE FAULT ISOLATION Inconsistent or inaccurate Irregutarity of count Refer to the count pulse measurement measurements continued pulses procedure next page Analyzer drum speed of Refer to the motor speed adjustment procedure rotation Subsection 2 5 Loss of dual mode This requires
32. ew Polarizer Drum IHuminator Bulb Sample Monitor Transformer Monitor Assembly Cable Monitor Power Supply Extension Laser Assembly 632 8 nm 7 27 7109 C 229D GSC Part No 10161 KB A 7108 E118B A 7108 E118A 7108 E 127 Specify Color 10026 KF with 10161 B15 10257 21 10257 10E 10257 30 10026 21 A 7108 E121 A 7108 E121 7108 E266 7 108 E231A B 7108 E 138 10026 A5 10026 15P 10161 C8 with 10161 C10 RE1 M230 F46 7 108 E230A 10259 23M C 10026 20EN
33. from the optical path 1 2 Test Jacks Seven color coded test jacks including a common ground are on the right side of the electronic chassis at the base of the ellipsometer These test jacks are useful in trouble shooting to identify symptoms of malfunction and to isolate faults without first requiring access to the interior of the ellipsometer These test points with a trimpot on each end are identified as follows RED ORANGE YELLOW BLACK GREEN BLUE BROWN o OO 0000 0e AID PD REF COUNT GROUND PFLG PCTL MOTOR MOTOR OFFSET OUTPUT PULSE PULSE PULSE SPEED ADJUST CONTROL Figure 7 3 These are seven test jacks and two trimpots on the right side of the ellipsometer base 7 4 7109 C 229D L116C ELLIPSOMETER SERVICE 1 2 Test Jacks Continued NOTE Logic 1 is less than one 1 volt Logic 0 for reference count and motor pulses is greater than 4 0 volts Logic 0 for PCTL and PFLG is greater than 3 0 volts PD Output Ref Pulse Count Pulse Ground PFLG e PCTL The photodetector amplifier output is sinusoidal with an amplitude of up to 10V peak to peak and a perod of 180 of the analyzer drum rotation This pulse occurs between 356 and 359 of the analyzer drum rotation These pulses are always present as long as the drum is rotating in automatic with the Mode switch at A Logic 1 starts the automatic measurement cycle if the logic 1 PCTL peripheral contro signal is also sent by the com
34. g crate base platform NOTE Store the shipping platform shipping crate components and protective wrapping for use in the event of reshipment to Gaertner for repair WHEN PACKING THE ELLIPSOMETER FOR RESHIPMENT TO GAERTNER FOR REPAIR INCLUDE THE SOFTWARE PROGRAMS AND INTERFACE CABLES WITH GPIO INTERFACE CARD IF APPLICABLE CONTACT GAERTNER FIRST CAUTION In event of reshipment precautions must be taken to ensure that 1 the polarizer arm is set and clamped at 50 angle of incidence and 2 the analyzer arm is set and clamped at 50 angle of Incidence prior to packing This will prevent a possibility of damage to the helium neon red laser and the analyzer module 7109 C 229D L116C ELLIPSOMETER AC POWER PLUGS INSTALLATION Gaertner Ellipsometers are supplied with U S plugs NEMA 5 15P If it necessary to change the plug the following guidelines apply ET TIKIA 5 15 Great Britain Cyprus Nigeria Underwriters Rhodesia and Singapore Laboratory approved for the United States Canada Japan Mexico Philippines and Taiwan AX 312 NELLA W 5 Australia New Zealand UL approved for the U S C E Tun SEV 1011 Eastern and Westem Europe Switzerland Saudi Arabia and United Arab Republic Figure 5 1 NOTE All plugs are for single phase power and are viewed above from the connector end The prongs are L Line or active conductor also called live or hot T
35. g through a transfer plate and the coarse height adjustment to raise or lower the table 0 010 inch maximum from mid position reference after setting of the standard height adjustment One half turn of the adjustment knob equals 0 010 inch The adjustment knob is at mid position when the center line of the reference hole on the knob is coincident with the centerline of the table clamp screw Clockwise rotation of the adjustment knob raises the table counterclockwise rotation of the adjustment knob lowers the table 6 1 7109 C 229D L116C ELLIPSOMETER OPTIONAL COMPONENTS MICROSPOT OPTICS L116CMS Gaertner Installed This option has a projector optic that reduces the normal 1 mm diameter beam at the sample surface down to 0 015 mm to measure very small areas and a receiver optic for added efficiency See the table in Subsection 1 0 Specifications in the Description Section of this user manual NOTE The table in Subsection 1 0 Specifications shows the dimensions of the laser beam on the sample with and without the Microspot Optics at different angles of incidence INTERFACE LRS232 This option enables the user to send or receive serial data via an interface with RS 232C compatible equipment such as a large scale host computer data terminal and modems Includes interface cable modified software and program User instructions Contact Gaertner for details on specific data communication specifications VIDEO M
36. he insulation is black e N Neutral or identified conductor The insulation is white Earth safety ground The insulation ts green 5 2 7109 C 229D L116C ELLIPSOMETER INSTALLATION INSPECTION Thoroughly inspect the Ellipsometer for shipping damage If there is damage from transit notify the Verify that a key is installed keylock switch on the right side of the Sample Monitor Assembly above the sampie table and is off Check that a good fuse is in the Ellipsometer Verify that all of the applicable items have been included in the shipment LOCATION CONSIDERATIONS The L116C Ellipsometer is designed for use in either a production or laboratory facility under relatively constant room temperature and a relatively dry dust free atmosphere The Ellipsometer requires a clean level solid work surface sufficient to also accommodate the interfaced computer The ac line voltage must be free of large transients having harmonics in the range from audio frequencies to severai megahertz Do not obstruct the ventilation holes on any of the equipmant INTERCONNECTIONS DO NOT plug or unplug any component into or from ac power or make connections to other equipment with its power ON OFF switch ON The ac line cable for the Ellipsometer and the laser is on the rear of the instrument and may be labeled INPUT POWER CAUTION Verify that the power switches on all of the components are OFF before connecting o
37. ile removing the cable through the hole in the Sample Monitor Assembly Base To replace or reinstall an LED meter assembly reverse the procedure of steps b through e Support meter assembly while removing three mounting screws that secure meter assembly to support arm This completes removal of the meter assembly and interconnecting wiring To replace a meter assembly reverse the procedure of steps b through g Electronic Chassis The electronic chassis contains the following Motor Board EBT Board Logic Board Analog to Digital A D Board 15V dc Power Suppiy for the A D Board and Photodetector Board 5V dc Power Supply for the A D Board Logic Board and Count Board 4 V dc Power two SV supplies in series for the Motor Board 7 22 7109 2290 L116C ELLIPSOMETER SERVICE 3 3 Electronic Chassis Continued Color coded test jacks and motor speed and D offset adjustments are on the right side of the chassis See Figure 7 3 The computer Interface Cabie receptacle is on the chassis left side The removal of the electronic chassis requires the removal of the instrument power supply for access to the connections of the chassis Interface Wiring Perform the following a Turn OFF the computer and ellipsometer Unplug the ellipsometer line cord from the ac power b Disconnect the computer GPIO Interface Cable from the Electronic Chassis c Detach the instrument power supply from the support panel
38. imeter Control Detector DESCRIPTION PCTL Peripheral Control PD Photodetector PFLG Peripheral Flag Part of PWR Power RECT Rectifier Encoder buffer turnoff Light emitting diode Least significant bit M MAN Manual mm MSB nm Millimeter Most significant bit Nanometer REF Reference SPLY Supply STD Standard SW Switch WIO Without L116C ELLIPSOMETER DESCRIPTION 3 0 INTRODUCTION This section describes the components of the ellipsometer and shows how the ellipsometer analyzes the Effect of reflection on the polarization of the laser light striking the surface of materials such as bare substrates as in Figure 1 1 next page to acquire measurement data identifying properties critical to quality control Interpretation of the data yields the optical constants of the material or if the materiai surface is film covered the thickness and optical constants of the film Once initiated by the user analysis and measurement are automatic utilizing a programmed desktop computer interfaced with the eilipsometer Parameters are entered by the user via the computer keyboard Queries requiring operator computer interaction and actual measurement data are displayed on the computer screen Measurement data may be printed for a permanent record 4 0 OPTICAL SYSTEM See Figure 1 1 next page Ellipsometric measurements involve illuminating the surface of a sample wafer with
39. ition reference after setting the standard vertical position One half turn of the knob moves the table 0 010 inch The knob is at the midposition when the center line of the reference hole on the knob is at the centerline of the table clamp screw A clockwise rotation of the knob raises the table CCW lowers the table 20 Using the Adjustment See Figure 6 2 1 page 6 22 Loosen the table clamp screw e Set the reference hole at mid position e Use the coarse height adjustment to raise or lower the sample table to the approximate height required e Rotate the fine motion up to a one half turn in either direction to obtain the required height Tighten the table clamp screw 6 2 1 7109 C 229D L116C ELLIPSOMETER FINE MOTION HEIGHT ADJUSTMENT L117FM STANDARD SAMPLE TABLE COARSE HEIGHT ADJUSTMENT KNOB L2 REFERENCE HOLE SHOWN IN j J LL MID POSITION 17 t 4 et SS TRANSFER PT PLATE E L Le r Lo FINE MOTION HEIGHT ADJUSTMENT KNOB Figure 6 2 1 Front and side views of the L117FM Fine Motion Height Adjustment Component 6 2 2 7109 C 229D L116C ELLIPSOMETER OPTIONAL COMPONENTS OUTER 176 MM INNER GROOVE 125 MM CENTRAL HOLE CR d 3 INCH HR a om adr m n Figure 6 1 This is a top view of the 200mm 7 9 inches diameter sample table 7109 C 229D L116C ELLIPSOMETER SERVICE 18 T LE ANALYSIS This ellipsometer
40. k in Figure 7 3 Adjust the Zero Offset tnmpot Figure 7 5 A as needed so that the voltmeter reads 0 0 volts dc Disconnect the voltmeter and reinstall the plug in the PD cover unless the gain trimpot adjustment is next 2 2 Amplifier Gain Turn OFF and disconnect the computer from the ellipsometer If the ellipsometer has optional Microspot optics and the 8 table see the next Subsection 2 3 a b Set the Mode Switch to A Gently stop the motor with your hand on the analyzer drum Set the polarizer and the analyzer arms to 90 and open the beam attenuator slowly rotate the analyzer drum for the maximum LED meter reading should be at 45 Adjust the GAIN trimpot CW for more gain Figure 7 5 A for 93 on the LED meter If the LED meter was pegged in the last step decrease the gain and rotate the drum for another maximum reading Use the 780A film layer sample wafer or one of a known film thickness Set the two arms at 70 and adjust the table as needed Set the Mode Switch to AS Slowly tum the analyzer drum for the maximum LED meter reading Adjust the GAIN trimpot CW for more gain Figure 5 A for 93 on the LED meter Set the Mode Switch to A The drum should turn while the LED meter reads 23 maximum 7109 C 229D L116C ELLIPSOMETER SERVICE 24 LED Meter With the beam attenuator closed and the polarizer and analyzer arms at 90 and the Mode Switch at AS follow these f
41. meter and the 632 8 nm red laser turn the key operated power switch on the Sample Monitor Assembly fully clockwise ON Figure 2 2 The Emission Indicator should illuminate A 15 minute minimum warmup of the 632 8 nm laser is recommended before performing ellipsometeric measurements Set the Mode toggle switch Figure 2 1 to AS The following describes the three Mode Switch positions e Manual position This is used during alignment and calibration e Autoset AS position This is used during premeasurement setup Sample Stage alignment e Automatic A position This is used for automatic measurement with the Drum rotating Pull to open the beam attenuator and proceed with the Sample Table Vacuum and Alignment 1 3 Sample Table Vacuum and Alignment Vacuum Alignment a At the center and rear of the table are small 40 80 x 1 8 round head stainless steel plugs that can be removed when a vacuum pump is connected to the ellipsometer Remove only the plugs that will be under the wafer but not the plug under the edge of the wafer see Figure 2 3 Follow this procedure beginning with step a see Figure 2 4 With tweezers air wand etc put a reference sample or single layer nonabsorbing wafer of a known film thickness on the table via the insertion slot Turn on the vacuum pump if connected Loosen the Sample table clamp screw Look into the Sample Monitor
42. monochromatic light of known wavelength and polarization and then analyzing the polarization state of the reflected light The light is projected along a fixed path or angle of incidence 0 The ellipsometer has pin located settings for the angle of incidence at 30 45 50 55 60 65 70 75 80 or 90 The 90 angle cannot be used for measurements only adjustments For measurements the angle of reflection is always set at the same angle as the incidence angle Since the two angle are always equal it is usual to refer to both angles as angles of incidence With the angles thus set their respective optical axes intersect the vertical center line of the plane of incidence at the same point The sample table is raised or lowered so that the intersection of the incidence and reflective Optical axes is on the sample surface and that the sample surface is normal to the vertical centerline of the piane of incidence This ensures that the light from the polarizer aperture is reflected from the sample surface into the analyzer aperture A low power Class II laser light source is employed a helium neon laser having a beam wavelength of 632 8 nm The 632 8 nm red laser is in the line of the optical axis and as the beam passes through a polarizer prism the beam polarization is converted from circular to linear This constant intensity linearly polarized beam is then converted to one of circular polariza
43. n Ks refractive indexes constants of the substrate 7109 C 229D L116C ELLIPSOMETER DESCRIPTION NOTES 7109 C 229D L116C ELLIPSOMETER OPERATION 10 PREMEASUREMENT SETUP The premeasurement setup includes setting the polarizer and analyzer angle of incidence turn on and the warmup of the ellipsometer and initial alignment of the sample stage 1 1 Setting the Angle of Incidence CAUTION Do not grasp the 632 8 nm red laser when setting the polarizer arm That may easily cause laser misalignment a Grasp the polarizer arm but never the laser and at the rear of the arm loosen clamp screw about one turn D Pull outward on spring loaded locator pin next to the clamp screw and move the arm to within va inch of the 70 angle of incidence C Release the locator pin and move the arm slowly until the pin seats in detent on vertical plate Tighten clamp screw This accurately sets the angle of incidence d Repeat steps a through c to set the analyzer arm angle of incidence but do not apply pressure to the PD photodetector cover NOTE Follow steps a to d also when setting the angle of incidence at any other angle The detented angles are 30 45 through 80 at 5 steps There is also 90 which is only for adjustments See page 1 4 of the Description section about the beam size at each angle e Set the polarizer drum to 45 and secure by inserting the locking screw in the hole on
44. nd the one in the paragraph above include the Plus circuitry and a hard disc in this computer The rear panel socket arrangements are virtually the same The GPIO card should go in the lower position See Section 3 pages 3 18 to 3 23 of the Computer Manual IBM Personal System 2 Model 25 286 Guide to Operations 1990 for the card installation IBM PS 2 30 IBM Personal System 2 Mode 30 Guide to Operations booklet copyright 1987 Section 3 is Installing Your Options The cover removal instructions are on pages 3 3 and 3 4 The adapter Interface Card Instructions are on pages 3 6 to 3 8 The GPIO Interface Card with the three DIP switches is mounted in the middie position The cover is reinstalled according to page 3 9 IBM PS 2 30 286 This computer is basically the same a the IBM PS 2 30 Refer to computer manuali IBM Personal System 2 Model 30 286 Guide to Operations 1988 conceming card installation IBM PC AT The Interface Cards are installed vertically according to the IBM PC AT Installation and Setup manual copyright 1884 Section 2 describes the cover removal procedure Section 3 is the Internal Option Installation Page 3 8 shows the eight vertical positions available The GPIO Interface Card can be installed in any of these eight positions Section 4 is for the cover installation 5 11 7109 C 229D L116C ELLIPSOMETER SAMPLE STAGES Hand Positioning
45. ness Range Accuracy Repeatability Refractive Index Line Voltage Standard Program Optional Programs 7109 C 229D DESCRIPTION 30 kg 65 Ibs 43 kg 95 Ibs 45 7 cm 18 inches 83 8 cm 33 inches 38 0 cm 15 inches 632 8 nm Helium Neon Red Laser 50 and 70 are used the most See the next page 1 0 x 1 6 mm at 50 1 0 x 3 0 mm at 70 Quarter wave plate fast axis at 90 to plane of incidence 360 graduated at 1 intervals with 10 part vernier 0 to 1 Up to 150 mm 5 9 dia to 10 mm max thickness Dual mode with and without the compensator in the laser light path the polarizer drum fixed at 45 the rotating analyzer samples 144 data points to 60 000 0 to 6 000 nm 3 Angstroms 3 nm i 1 Angstrom 1nm 0 005 115Vac 50 60Hz std 100Vac 220Vac 230Vac or 240Vac are available See Section 3 of this Manual See Section 4 of this Manual 1 3 L116C ELLIPSOMETER DESCRIPTION 1 0 SPECIFICATIONS Continued This etlipsometer has the detented angles of incidence in the table below for measurement purposes There are also detents for 90 but this angle is only for adjustments Standard Microspots Beam on Sample Beam on Sample 1 mm x 1 15 mm 15 um x 17 2 um 1 mm x 1 15 mm 15 um x 21 1 um 1 mm x 1 55 mm 15 um x 23 2 um 1 mm x 1 74 mm 15 um x 26 0 um 1 mm x 2 00 mm 15 um x 30 0 um 1 mm x 2 37 mm 15um x 35 5 um 1 mm x 2
46. ning at 0 and ending at 355 The readings are taken in the dual mode sequenced under program control via input from the computer One set of readings 72 data points is taken with the 90 compensator in the optical path The other set of readings is taken with the compensator withdrawn from the optical path The output current of the photodetector is converted to an analog voltage varying sinusoidally in amplitude and proportional to the intensity of the reflected light The analog output is amplified and applied to the input of an analog to digital A D converter zero offset adjustment in the photodetector circuit is factory preset to ensure optimum accuracy in measurement especially for very thin films After each set of readings the maximum analog output is checked by the computer software If measurement accuracy can be improved by changing the gain the CTL 1 input logic will switch the gain range and a repeat set of readings will be taken A logic 0 closes the switch decreasing the gain a logic 1 opens the switch increasing the gain reference pulse from an optical switch and between 356 and 359 of the analyzer drum rotation initiates the measurement cycle The reference puise is derived from a phototransistor circuit activated by a LED If a peripheral control PCTL signal from the computer is present during the period of the reference pulse indicating that the computer is ready to accept a reading a timer is a
47. nt of these items 3 1 Cleaning Interior cleaning of the ellipsometer i e the detector and switch assembly monitor assembly and instrument power supply should not be needed These units are designed to keep foreign matter out When not being used the ellipsometer should be enclosed by the dust cover supplied with the instrument Exposed optical surfaces may be cleaned with a camel hair brush or clean dry compressed air not to exceed 5 PSI All other external surfaces may be wiped clean using a soft lint free cloth If a solvent is needed a cloth dampened with wood or isopropyl alcohol is recommended 3 2 Lubrication Periodic lubrication is not required 2 10 7109 C 229D L116C ELLIPSOMETER INSTALLATION The L116C Ellipsometer is shipped fully assembled along with needed items in a single shipping crate e L 116C User Manual e Ellipsometer Computer Interface Cable e GPIO Interface Card for IBM PS 2 25 Series Computers or Equivalent e Software Programs e Silicon Wafer Reference Sample e Dust Cover This component is supplied to customers who have their own computers But computers that are shipped with the Ellipsometer will have the GPIO card already installed UNPACKING Remove the protective wrapping from the Ellipsometer Remove the lag bolts that secure the hold down clamps to base of the Ellipsometer Remove the hold down clamps This allows removing the Ellipsometer from the shippin
48. our steps a The LED display should show one to three red light dots for the zero reference If the meter does not adjust the ZE trimpot Figure 7 5 B so that there is a two dot display b Open the beam attenuator c Connect a voltmeter common probe to the ground black test jack in Figure 7 3 and connect the measuring probe to the PD Output red test jack Slowly rotate the analyzer drum until the voltmeter reads 10V dc d Adjust the FS trimpot as needed so that the LED meter reads 100 as the voltmeter reads 10V 2 5 Motor Speed This adjustment is just to the right of the Motor Pulse brown test jack Figure 7 3 The motor speed control trimpot is preset at the factory but may require a fine adjustment if the electronic chassis is replaced to ensure accurate measurements of very thin films A silicon substrate with a silicon oxide film layer of around 200 20 nm is recommended for this adjustment a With the polarizer and analyzer arms set at 70 angle of incidence and sample in place adjust table vertical position according to Subsection 1 3 Sample Table Vacuum and Alignment in Section 2 Operation b Refer to the The Sample Table Vacuum and Alignment section in the STD instructions and use the same program or subprogram c Adjust the motor speed trimpot 74 turn counterclockwise and rerun the program or subprogram to obtain a second set of measurements d Adjust the motor
49. puter These pulses occur within of the analyzer drum position readings evenly divisible by five between 0 and 355 of the analyzer drum rotation Logic 1 triggers an D converter to accept the photodetector output during the measuring cycle This is the common ground for any measurement at each test jack and check point These pulses the logic 1 peripheral flag signals to the computer only during the measurement cycle and occur about 30 microseconds after the leading edge of each count pulse They indicate that a reading is ready for the computer The pulses end at trailing edge of count puise These are the logic 1 peripheral contro pulses from the computer only during the measurement cycle They signal the system that the computer is ready to accept areading When the pulses are coincident with the reference ref pulse a timer is activated for the duration of the measurement cycle e Motor Pulse These pulses occur to 1 after each count pulse Typical outputs at these test jacks except the PD output are shown in Figure 7 2 The use of an oscilloscope with a high persistancy screen or a storage cathode ray tube would display the waveforms clearer because of the slow sweep across the screen when the reference pulses are observed An oscilloscope with two or more traces is needed to compare the pulses It may be necessary to use the oscilloscope s external trigger on the reference pulse for a more st
50. r disconnecting the interface cabling A connection diagram for the L116C is shown in Figure 5 2 Ellipsometer and Computer See Figure 5 3 Ellipsometer Rear View and Figure 5 4 IBM PS 2 25 Computer 7109 C 229D L116C ELLIPSOMETER INSTALLATION COMPUTER PS 2 25 AND PRINTER HP THINKJET HP2225C OR EQUIVALENT Connect the Centronics Interface Cable 7108 E239T at the parallel receptable at the rear of the computer and the rear of the ThinkJet printer see Figure 5 3 IBM PS 2 25 Hand tighten the connector thumb screws 5 4 7109 C 229D L116C ELLIPSOMETER INSTALLATION IBM DISPLAY UNIT GPIO COMPUTER INTERFACE IBM PC OR PS COILED CABLE MPUTER CABLE DR C 10161 45DB COMPU ELLIPSOMETER IBM L116C KEYBOARD C PARALLEL CENTRONICS INTERFACE CABLE DR 7108 E239T THINKJET PRINTER HP2225C PRINTER Figure 5 2 This is the Ellipsometer L116C Interconnection Diagram The computer that Gaertner will supply with the L116C is the IBM PS 2 25 7109 C 229D L116C ELLIPSOMETER INSTALLATION RED 632 8 nm ELLIPSOMETER LASER SLOW BLOW i FUSE 75A 115 or 230V MICROSPOT STOP GPIO SOCKET FOR THE CABLE TO THE COMPUTER TO AN AC OUTLET Figure 5 3 This is the rear and left view of the L116C Ellipsometer with the 6 Diameter Table and the 632 8nm helium neon laser 7109 C 229D L116C ELLIPSOMETER INSTALLATION pepr rere TO AC POWER RS 232C SOCKET
51. r for steps e through g The 90 compensator is in the optical path See Figure 7 7 next page Set the polarizer drum exactly at 180 and the analyzer drum precisely at 90 Observe the LED meter and rotate the analyzer drum slowly to a setting at which the LED meter indicates the lowest reading This occurs when the analyzer drum setting is at 90 0 4 Set the analyzer drum exactly at 90 With the poiarizer drum set precisely at 180 observe the LED meter and rotate the polarizer drum slowly to a setting at which the LED meter indicates the lowest reading This should occur when the polarizer drum setting is 180 0 4 If the drum settings in steps f and g are within the specified limits the compensator is properly oriented Set the polarizer drum at 45 then insert and tighten the drum locking screw Set the analyzer drum to the position where the LED meter has the lowest reading This should occur where the analyzer drum setting is 135 0 4 or 315 0 4 If the analyzer drum setting is within either of these limits the analyzer prism is properly oriented Close the beam attenuator and fix the polarizer and analyzer arms at a 70 incidence angle If the ellipsometer has both the Microspot Optics and an 8 diameter table the table can t be moved out of the way to set the arms at 90 Thus ignore this Subsection Optical Orientation Checks 7 19 7109 C 229D L116C ELLIPSOMETER SERVICE PO
52. s at 90 degrees angle of incidence Using a 5 32 inch hex key remove the two cap screws that secure polarizer pin hole plate to the inner support of polarizer arrn 7 24 1109 C 229D L116C ELLIPSOMETER SERVICE 3 5 Beam Attenuator Continued d the pin hole plate with the optional microspot optics from support Remove the inoperative beam attenuator from the slotted back surface of plate and install new beam attenuator in slot noting that orientation is the same as for the one removed The end with a hole toward the front e install the pin hole plate with the optional microspot optics on the support using the locating pins as a guide and ensuring that the silver reference dots on pin hole and polarizer inner support are aligned f Insert the two cap screws removed in step c above into the holes in the pin hole plate Turn them until they are almost finger tight Check the plate and locating pins for firm seating and then tighten the screws using 5 32 inch hex key Slide the attenuator in and out to verify that there is no binding If itis too loose bow the slide slightly h Position the polarizer and analyzer arms at the 70 angle of incidence Reinstail the optional microspot stops i Adjust the table for the desired vertical position in accordance with the Sample Stage or Table Alignment procedure in the Operation Section 40 COMPUTER INTERFACE CABLE DATA Computer interface c
53. section for the top view of the Optional 200 mm diameter table 2 5 7109 C 229D L116C ELLIPSOMETER PERATION 1 3 Sample Table Vacuum and Alignment Continued Observe the intersection of the two wide diagonal lines and the intersection of the narrow lines Slowly rotate as needed the X and Y plane tilt adjustment controls to center the diagonals precisely on the crosshairs intersection This makes corrections for the sample surface out of flatness condition The width height of the intersection of the diagonals is four arc minutes This may be used as a reference in determining the approximate tilt adjustment needed Using the adjustment wheel under the rear of the table raise or lower the table to obtain the maximum reading on the LED meter clockwise rotation of the wheel raises the table If the reading from step e overshoots the LED meter upper limit turn the analyzer drum to lower the gain Then readjust the table slightly for a maximum reading Repeat the adjustment of the drum and table vertically as needed for a maximum reading within the range of the LED meter Return to steps c through g as often as needed until each adjustment is correct Tighten the sample table clamp screw See the standard single point program instructions such as STD in the Standard Programs sections for the loading instructions and use the Film program or subprogram Proceed to make a measurement Compare the thickness
54. should have long life trouble free operation In the event of a malfunction symptoms are readily traceable by the use of built in test jacks and intermediate check points This should be done by qualified service personnel Fault isolation involves trouble shooting to identify the cause of failure only to a component or assembly readily removabie for further fault isolation and repair or replacement During automatic operation a malfunction is usually shown by no measurement data inconsistent measurements or even operator induced errors 1 1 Measurement System During automatic operation the analyzer drum with the prism inside rotates at a speed regulated by a closed loop motor speed control system See Figure 7 1 next page Motor pulses originating at discrete intervals from an encoder are amplified and applied to the input of a motor speed controiler Within the encoder the pulses are derived from a phototransistor circuit activated by a light emitting diode LED Actual motor speed is determined by frequency to voltage conversion of the input This voltage is compared to an externally preset reference voltage The result of the comparison controls the drive voltage to the motor keeping the motor speed constant A stall timer prevents motor burn out in the event of a mechanical stall Intensity readings of the reflected light as sensed by the photodetector are taken at 5 intervals during one revolution of the analyzer prism begin
55. sity of illumination is charged by turning a control on the left side of the Sample Monitor Assembly 1 8 7109 C 229D DESCRIPTION L116C ELLIPSOMETER SAMPLE MONITOR X EvEPIECE EMISSION INDICATOR KEY OPERATED AC ASSEMBLY ON OFF SWITCH POLARIZER MODULE ARM 39 POWER MICROSCOPE ANALYZER DRUM MODE TOGGLE pr SWITCH V POLARIZER DRUM PHOTO DETECT OR BEAM ATTENUATOR LEVER COVER MICROSPOT OPTICS Opt ANALYZER MODULE 150 mm DIAMETER TABLE ARM ROTATION STAGE A es AND TRIMPOTS E VACUUM HOSE TRANSLATION STAGE Figure 1 2 These are the front view components of the Ellipsometer L116C 7109 C 229D 1 9 L116C ELLIPSOMETER DESCRIPTION 90 COMPENSATOR POLARIZER DRUM SAMPLE MONITOR ASSEMBLY 3 632 8 nm RED LASER MICROSPOT STOPS OPTIONAL INSTRUMENT POWER SUPPLY FUSE COMPUTER INTERFACE RECEPTACLE TO AC POWER Figure 1 3 These are the Ellipsometer L116C Components in this Rear View 7109 C 229D 1 10 L116C ELLIPSOMETER DESCRIPTION 5 3 Sample Monitor Assembly Continued Using the titt monitor function the operator can detect an out of flatness condition of the sample surface and compensate for this condition The amount of out of flatness is determined by observing a reflected image projected as background on 90 degree crosshairs in the eyepiece Compensation is accomplished by tilt adjustment of the sample table in X and Y planes The
56. speed control turn clockwise from the initial setting used to obtain measurements obtained in step b and rerun the program to obtain a third set of measurements e Compare the measurement data obtained in step c and d with the measurement data obtained in step b The differences should not vary more than 3 to 5 3 to 5 nm 7109 C 229D L116C ELLIPSOMETER SERVICE 2 5 Motor Speed Continued f If the difference is greater than to 5A repeat the variation of speed adjustment and measurements until the measurements are within to 5 g When the adjustments are complete the motor should run smoothly CAUTION void changes in the motor speed that would induce excessive vibration 2 6 A D Offset This adjustment is just to the left of the red PD Output test jack on the electronic chassis The PD ZERO offset is preset at the factory but may require adjustment if the electronic chassis is replaced to ensure measurement insensitivity to PD output changes in gain level An indication of sensitivity is apparent when repeated thickness measurements on the same sample particularly one with a very thin film vary more than to 5 3 to 5 nm A silicon substrate with silicon oxide film of about 550 55 nm is recommended for this adjustment 2 7 Optical Orientation Checks Periodically perform an optical orientation check as follows a Setthe Mode Switch on the analyzer module to M NOTE If the
57. t on the table and proceed with the measurements 2 4 Placement of the Sample a Turn on the vacuum pump if it is connected Remove the tiny plugs in the grooves in the stage that will be under the sample Reinstall any plug that will be under the edge of the sample b Place the sample under test on the stage and raise or lower the polarizer analyzer moduie as needed Refer to Subsection 1 3 Sample Table Vacuum and Alignment steps a through k C Set the Mode Switch to A The analyzer drum should rotate d Proceed with the measurements by initiating data entry according to the desired program in Section 3 or 4 At the completion of the measurement sequence set the Mode Switch to AS and remove the sample from stage Put on the next sample and align the arms as needed with the knob on the top of the elipsometer Set the Mode Switch to A and proceed with the measurements of the next sampie with the analyzer drum rotation 2 9 7109 C 229D L116C ELLIPSOMETER OPERATION 30 CLEANING AND LUBRICATION These maintenance instructions are operator level procedures for routine servicing See the Service Section about trouble analysis and replacement of defective components which are for qualified service personnel instructions are not included for the replacement of any laser or polarizer analyzer optical or precision electro mechanical components Contact Gaertner Scientific about the repair or replaceme
58. the side of drum See the Caution note at the top of Figure 2 1 about the arms with the optional Microspot optics at the 90 angle of incidence Note the statement with the asterisk just above the caption about the fact that with the microspots the arms cannot be set at 90 with the larger table 7109 C 229D 2 1 L116C ELLIPSOMETER OPERATION CAUTION For 90 Angle of Incidence If the L116C has Microspot Optics rotate the 150 mm table so that Its lifting slot is under the analyzer Microspot Move the table to the ieft and down so that neither Microspot Optic will contact the table when both of the arms are at 90 SAMPLE ILLUMINATOR CONTROL 90 COMPENSATOR POSITIONER POLARIZER DRUM DRUM LOCKING SCREW SAMPLE MONITOR ASSEMBLY MODE SWITCH TOGGLE PD COVER 632 8 nm RED LASE ANALYZER ARM POLARIZER ARM ELLIPSOMETER LOCATOR PIN SLOW BLOW FUSE 75A 115 or 230 CLAMP SCREW MICROSPOT STOPS Opt GPIO SOCKET FOR THE CABLE TO THE COMPUTE The optional 200 mm dia table cannot be moved out of the way of the optional Microspot Optics Thus the arms cannot be set at 90 with both of these options Figure 2 1 This is the rear and left view of the L116C Ellipsometer with the standard table 2 2 7109 C 229D L116C ELLIPSOMETER OPERATION 1 2 Turn on and Warmup Connect the ellipsometer and the computer according to the Installation section To turn on the ellipso
59. tion when a quarter wave compensator is inserted in the optical path or remains linear when the compensator is withdrawn from the optical path The insertion and withdrawal of the 90 compensator is automatic under computer program control The resultant beam with or without the 90 compensator in its path is then projector upon the surface of the sample wafer The reflected light with its polarization altered by the optical properties of the sample passes through a rotating analyzer prism in a rotating drum and is then sensed by a photodetector which in turn converts the light energy into an electric current proportional to the intensity of the reflected light passing through the analyzer An optical interference filter between the analyzer prism and the photodetector blocks ail of the wavelengths other than that of the laser beam thus eliminating the effects of ambient illumination 7109 C 229D DESCRIPTION L116C ELLIPSOMETER POLARIZER ARM 632 8 nm RED LASER CIRCULARL Y ATTENUATOR POLARIZED LIGHT POLARIZER DRUM MANUALLY TURNED ANALYZER ARM LED METER u PHOTO 90 COMPENSATOR DETECTOR DEPO NOT IN THE LIGHT PATH ANALYZER DRUM LARIZER u ROTATES IN 5 LINEARLY POLARIZED LIGHT AUTOMATIC T POLARIZER Ad 90 COMPENSATOR PRISM 4 5 7 REMOVED Ul CM LINEARLY poe ANGLE OF INCIDENCE Pd RED FILTER POLARIZ A LIGHT y Pus UNUS POLARIZED f GJE ys LIGHT ROTATING AND
60. ument power supply accepts 115V ac rms line voltage but can be modified to operate with 100V 220V 230V 240V ac input line voltage a Tum OFF the computer and ellipsometer Unplug the ellipsometer line cord from the ac power b Detach the instrument power supply from the vertical support panel of the ellipsometer by removing four mounting screws one at each corner of the power supply base plate Lower the power supply horizontally on a padded support block The padding helps avoid damage to painted surfaces WARNING Exercise care in performing step c as high voltage up to 10 000 volts is in the 632 8 nm laser assembly Unplug the white laser plug from the laser power supply receptacle Discharge the laser voltage by shorting out the two prong plug with a 1K to 2K resistor 7 21 7109 C 229D L116C ELLIPSOMETER 3 2 SERVICE LED Meter Assembly Remove the LED meter and the 8 inch cable at the rear of the meter by performing the following 3 3 a Tum QFF computer and ellipsometer Unplug the line cords from the ac power outlet b h Remove four screws from the top cover of the sample monitor assembly housing and remove the cover for access to the cable connection Disconnect the LED meter cable from 4 monitor to power supply extension cable connector Support the LED meter while removing two screws that secure the meter to the underside of the Sample Monitor Assembly Remove the meter wh

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