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X-TMF-5851E-MFC-eng Cover.pmd

1. Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet p signalkabel och anslutningskontakter Brooks levererar som standard kablar av h g kvalitet som motsvarar de krav som st lls f r CE godk nnande Om man anv nder en annan signalkabel ska kabeln i sin helhet vara sk rmad till 100 D eller runda typer av anslutningskontakter ska vara skarmade Kabelgenomf ringar ska vara av metall alternativt med metalliserad sk rmning Kabelns sk rm ska i bada ndar vara ansluten till kontakternas metallk por eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en jordf rbindelse Kortkontakter r som standard ej metalliserade kablar som anv nds m ste vara 10096 skarmade f r att verensst mma med CE certifieringen Sk rmen ska avslutas med en jordf rbindelse F r elektrisk anslutning till kontaktstiften h nvisas till medf ljande instruktionsmanual Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 LIMITED WARRANTY
2. CIRCUIT COMMUN TP4 VALVE VOLTAGE TP3 LINEARITY VOLTAGE TP2 SENSOR VOLTAGE TP tMultiplieo by 100t 37 Ca AD ASSTMENT POTENT OME TERS SPAN LINEARITY ANTICIPATE ZERO J4 amp J1 BLUE VALVE FUNCTION J2 HED SOFT START JE Enab ed CIE Normally open valves ore Disabled identified by a label on the Standard O solenoid cover SO97YB4TAMA O CS REY H AND HIGHER Er CS REV H COMPONENT SIDE SHOWN J3 BLACK VALVE DRIVE JUMPER uis als Valve Drive Valve Drive External Valve Return 115 volts 130 Votts Use where Pin 3 is connected to Power Supp u Common at the Power Sopplu foc 15 Volt MODEL 45850 MODEL 585 IE Valve Drive or where Pin 3 is connected to 15 Volts at the Powe ly Por 30 Volt Valve ive Note The SV reference is always enobisd ond is availoble on Pin li Figure 3 4 D Connector PC Board Jumper Location amp Function 3 5 3 6 Section 3 Operation Brooks Model 5851E 3 4 Calibration Procedure Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 To check zero always mount the controller in its final configuration and allow a minimum of 20 minutes for the temperature of the controller and its environment to stabilize Using a suitable voltmeter check the controller output signal If it differs from the factory setting adjust it by removing the lower pot hold plug which is located closest to the controlle
3. Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding
4. Based on 0 C Standard Reference Temperature For Hydrogen from 130 slpm to 200 slpm use 3 60 micron restrictor elements Note If the air equivalent flow is between two sizes choose the larger size 4 19 4 20 Section 4 Maintenance Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 Porous Metal Element 1 2 or 3 Roll Pin 3 1 63 MAX Header Plate Figure 4 5 Restrictor Element Assembly NOTE BYPASS ORIENTATION Lo SURFACE REFERENCE contains two different porosities put the two like porosity elements at the bottom and the unlike element at the top Note If the three element assembly Figure 4 6 Restrictor Element Orientation in Controller Body Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 4 1 General Section 5 Parts List Brooks Model 5851E When ordering parts please specify Brooks serial number model number part description part number and quantity Refer to Figure 5 1 and Table 5 1 and 5 2 5 1 Section 5 Parts List Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 KG ND CONNECTOR VERSION NS See Figure 4 2 Far greater detail 5 2 Figure 5 1 Model 5851E Parts Drawing Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Table 5
5. adjustment and calibration check procedures do not allow the control valve to open when gas flow is not present This situation is not a normal operating mode it will cause the control valve to heat up abnormally A meter with an abnormally warm valve will be difficult to calibrate This situation can be prevented by switching the valve override closed when there is no gas flow or setting the command to less than 1 Also avoid unnecessary periods with the valve override open b Adjust the anticipate potentiometer fully clockwise 20 turns Then adjust the anticipate potentiometer 10 turns counterclockwise to center the potentiometer This will provide a rough adjustment of this circuit and make the flow more stable for calibration Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Section 3 Operation Brooks Model 5851E D TYPE 8 o 0090 oreo o COMPONENT SIDE OF PC BOARD 000060060 PIN OUT TOP VIEW CARD EDGE CIRCUIT SIDE OF PC BOARD COMPONENT SIDE OF PC BOARD Figure 3 5 Model 5851E Calibration Connections C Connect the DVM positive lead to the 0 5 V signal output Terminal 3 Card Edge Pin 2 D Connector and the negative lead to signal com mon TP4 Adjust the zero potentiometer for an output of 0 mV 2 mV Apply pressure to the system and insure that the zero signal repeats within 2 mV of the voltage set in Step c above If the zero d
6. Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 318 549 309 E mail BrooksEu Brooksinstrument com Also completion of Form RPRO003 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the meter is required before any Brooks Personnel can begin processing the equipment Copies of the form can be obtained at one of the locations above 2 4 Gas Connections AAA EA Standard inlet and outlet connections supplied on the Model 5850 are 1 4 compression fittings Optional 1 8 compression VCO and VCR connections are available upon request Prior to installation make certain all piping is clean and free of obstructions Install the piping in such a manner that permits easy removal if the instrument is to be removed for cleaning or test bench troubleshooting 2 5 Installation Refer to Figures 2 1 through 2 4 SSeS Sz AWARNING Do not operate this instrument in excess of the specifications listed below Failure to heed this warning can result in serious personal injury and or damage to the equipment ACAUTION When installing the controller care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps unt
7. Norsk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Vedr rende Vedlegg til h ndbok Referanse CE sertifisering av utstyr for massestramsm ling og regulering Dato Januar 1996 Til den det ang r Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt pr ver som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utforelse av signalkabel og tilhorende plugger e Brooks Instrument tilbyr levert med utstyret egnet kabel som meter de krav som stilles til CE sertifisering e Dersom kunden selv velger kabel m kabel med fullstendig 100 skjerming av lederene benyttes D type og runde plugger og forbindelser ma v re utf rt med kappe i metall og kabelnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m tilknyttes metallet i pluggen eller nippelen i begge ender over 360 tilkoblet elektrisk jord e Kort kantkontakter er normalt utf rt i kunststoff De tilh rende flatkabler m v re utf rt med fullstendig 100 skjerming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfiel
8. sensor tube flow remains constant over the range of the meter Different restrictors have different pressure drops and produce meters with different full scale flow rates The span adjustment in the electronics affects the fine adjustment of the meters full scale flow In addition to the mass flow sensor the Model 5851E Mass Flow Controller has an integral control valve and control circuit as shown in Figure 3 2 The control circuit senses any difference between the flow sensor signal and adjusts the current in the modulating solenoid valve to increase or decrease the flow The Model 5851E has the following features incorporated in the integral control circuit Fast Response Adjusted by the anticipate potentiometer this circuit when properly adjusted allows the high frequency information contained in the sensor signal to be amplified to provide a faster responding flow signal for remote indication and use by the control valve 3 1 3 2 Section 3 Operation Brooks Model 5851E Yo Power Supply 1 T2 Upstream Downstream ere ur y Temperatura San Sensor us Flaw A Approx 10 sccm Max Flow B Full Scale Less 10 seem Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 RESTRICTOR Figure 3 1 Flow Sensor Operational Diagram Soft Start Enabled by moving a jumper on the PC board Provides a slow injection of gas as a protection to the process particular
9. be performed as written Placing the O rings on the sensor before it is installed will result in damage to the O rings causing a leak 3 Place the end block O ring in position and install the end block with the 4 hex socket screws Tighten these screws to 49 inch lbs Do not over tighten A CAUTION The end block screws 31 and the valve screws 3 are not interchangeable The end block screws are stronger and are needed for the pressure rating The end block screws are darker in color and can be attracted by a magnet 4 Press the lubricated sensor O rings 17 into the flow controller body 14 Install the sensor assembly and secure with two screws 18 and washers 19 tightened to 15 in lbs 5 Install the orifice 12 and its O ring 13 using a 3 8 nut driver Insure that the orifice is fully seated but do not overtighten 6 Insert the valve preload spacers 10 if used into the valve cavity in the flow controller body 14 Use care to preserve the correct order 7 Install the valve plunger assembly 7 8 9 and 11 on the preload spacers 10 Install air gap spacers 10 if used on top of the valve springs 8 Install the valve stem assembly 6 secure with the valve retaining plate 4 and four hex socket screws 3 When installing the screws they should first make light contact with the plate which should be checked to insure that it makes full contact around the stem assembly Torque the screws securing th
10. ccccccccinnoccccnooncnnnnnnannnnncccnan anar nan cana enne 3 3 Zero AdjUStment eoo etc eat dee Pea Ru 3 3 Calibration Procedure ooooonooocccccconoooocccccnananononnncnonannnnnnnnnnnnnnnnnnnnnnnnns 3 6 RESPONSE m C gade aat ran ttds 3 9 Section 4 Maintenance O 4 1 TROUDISSMOOUUIAG eco 4 1 SENSOR TUDO issos aa A SSA S R 4 5 Disassembly and Assembly sse 4 5 Gas Conversion Factors dariukna sanasana INR 4 11 Orifice SIZING sara ende an ande ee irre 4 14 Restriet r SIZING scu eres ha eorr Et eben A Ee nets 4 18 Section 5 Parts List General rennen een nennen een een 5 1 Appendix A CE Certification Page CE Certification of Mass Flow Equipment nennen A 1 Figures Brooks Model 5851E Tables Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Figure Page Number Number 1 1 Command Steps Soft Start Disabled 1 2 1 2 100 Command Step Soft Start Enabled 1 2 2 1 Model 5851E Dimensions unne anneer ennennen 2 3 2 2 Model 5851E Card Edge Connector Comparison Guide 2 4 2 3 Model 5851E Card Edge Connector Hookup Diagram 2 5 2 4 D Connector Pin Arrangement n se 2 5 3 1 Flow Sensor Operational Diagram 3 2 3 2 Flow Control System Block Diagram 3 3 3 3 Card Edge PC Board Jumper Location amp Functio
11. disable soft start place the jumper on the controller printed circuit board at J2 in the left hand n position 2 8 Remote Set Point Command Input 2 9 Valve Override If the mass flow controller is to be commanded by an external 0 5 Vdc signal the command potentiometer is not used The command input hookup is as follows A Card Edge Connector Connect the external command voltage to Terminal A and external command return to Terminal B Refer to Figures 2 2 and 2 3 B D Connector Connect the external command voltage to Terminal 8 and external command return to Terminal 1 Refer to Figure 2 4 2 10 Remote Transducer Input The valve override function allows full opening and closing of the valve independent of the command setting The unique command reset feature prevents flow overshoot when the controller goes from valve override closed to normal control The valve override for the mass flow controller is as follows a To open the valve apply 15 Vdc to the valve override terminal b To close the valve apply 15 Vdc to the valve override terminal c Isolating the valve override terminal returns the controller to normal operation A Card Edge The valve override function can be accessed from Terminal 9 Refer to Figure 2 3 Note For normal operation Terminal 9 must be left open floating B D Connector The valve override function is accessed from Terminal 12 Refer to Figure 2 4 Refer to Figures 3 3 and 3 4 To al
12. flow rate 50 0 sipm 48 5 50 Full scale error 100 15 100 i Calculate the TP2 correction voltage error recorded in Step h x 0 450 Volts Example Error 1 596 TP2 correction voltage 1 5 x 0 450 0 675 Volts New TP2 voltage 0 Volts 0 675 0 675 Volts j Set the command potentiometer for 100 flow 5 000 V Connect the DVM positive lead to TP2 and the negative lead to TP4 k Adjust the linearity potentiometer for an output equal to the new calcu lated TP2 voltage Repeat Steps f g and h 1 If the error recorded in Step h is less than 0 596 then the calibration procedure is complete 2 If the error is greater than 0 596 set the command potentiometer for 10096 5 000 V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common Calculate a new TP2 voltage as follows error measured New TP2 voltage recorded in x 0 450V TP2 Step i voltage Example Controller error 0 7 Measured TP2 voltage 0 567 Volts TP2 correction 0 7 x 0 450 0 315 Volts New TP2 correction 0 315 0 567 0 252 Volts Adjust the linearity potentiometer for an output equal to the new TP2 voltage and then repeat Steps f g and h Note The voltage at TP2 can range from 10 to 3 Volts however it is recommended that this voltage stay between 2 5 and 2 5 Volts for proper operation If the recommended voltage range is exceeded the desired accuracy a
13. reinstalled in the system the connections should be leak tested and the system purged with clean dry Nitrogen for 30 minutes prior to start up to prevent the formation of deposits al o 4 3 Sensor Tube The sensor tube is part of a calibrated flow divider that is designed to operate within a preset gas flow range the sensor assembly may be removed or replaced by referring to Section 4 4 Disassembly and Assembly If the sensor assembly is cleaned and reinstalled a calibration check should be performed refer to Section 3 4 4 4 Disassembly and Assembly Note The Model 5851E Mass Flow Controller should be disassembled and assembled in a clean environment to prevent particulate contamination A DISASSEMBLY The numbers in refer to the spare parts exploded view in Figure 5 1 AWARNING If it becomes necessary to remove the controller from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the controller thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to correctly purge the controller could result in fire explosion or death Corrosion or contamination of the mass flow controller upon exposure to air may also occur 1 Remove the jam nut 1 on top of the valve assembly 2 Unplug the valve connector from the electronics cover and remove the coil assembly 2 Remove the hex socket screws 3 securing the valve retaining plate
14. signal is less than 100 5 0 V and the valve voltage is greater than 18 V first check Section 4 6 to insure that the orifice size is correct k Proceed to Section 3 4 and perform calibration procedure if re quired If a mass flow controller is operated on a gas other than the gas it was calibrated with a scale shift will occur in the relation between the output signal and the mass flow rate This is due to the difference in heat capacities between the two gases This scale shift can be approximated by using the ratio of the molar specific heat of the two gases or by sensor conversion factor A list of sensor conversion factors is given in Table 4 3 To change to a new gas multiply the output reading by the ratio of the gas sensor factor for the desired gas by the gas sensor factor for the calibration gas used Sensor Factor of the New Gas Actual Gas Flow Rate Output Reading x 2 72 GAS Sensor Factor of the Calibration Gas Example The controller is calibrated for Nitrogen The desired gas is Carbon Dioxide The output reading is 75 sccm when Carbon Dioxide is flowing Then 75 x 0 773 57 98 sccm In order to calculate the conversion factor for a gas mixture the following formula should be used 100 Sensor Conversion Factor Mixture Pi P P Y L Sensor Sensor Sensor Conversion Conversion Conversion Factor Factor Factor Where P percentage of gas 1 by volume P percent
15. xaz kav va apopmdeder vrs normas ka bu ta onola xAnpodv TIG poburrpag c yu meroroinon CE idv n embori tou Kakm lov o putos river and cac APREL va yprotuonouqoere aho ro omoio va g per curemk mmpes mh yua kot ve mop yer Gep racn 00 I dv eopor r rou D 1 Kuicakoi tev kakesiov apena va Gupaxitovr pe eradducn Gapanion Edv eivat epopu curo ap net va pr uozotobveds petko remodaintes kodmblew zou va SeBirouv axposexty cbv conc tov xA ypatoz tov union 6 Acqua roo KOMD LOV ap rel va OUV RETOL cto pero nepilnu otov mobi kor va Bopakikera kar oro She axpa Kat 360 poipes Hoipaxton apemet vo KOTO NYEL oe KTO aKPOSEKTN yeivong POUVGESUOL KUPTEV EVEL prr uez03A xoi ta KOLO zov preparaten apte 1 g pavv nk ypu Bup rions 100 pt va vaakebouw arv motomoinon CE Bapak on xp nzt vu Kerohijye GE k row axpob xrm VEINE 1a env Pure rov akpodert v Maparthobue ovapep zita cro eedmk eioTo tipiko Orpnibv A 3 Section A CE Certification Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 Italiano Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Oggetto Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennaio 1996 Questa strumentazione elettrica ed elettronica prodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richie
16. 008 J7 GREEN J4 4 JI BLUE REMOTE TRANSCAICER INPUT VALVE FUNCTION Te sn eee i Enon led LI Eg normal Lu Nermal tu Nate Normaity open valves are identified by o tabel on the solenotd cover TEST POINTS CIRCUIT COMMON TRA VALVE VOLTAGE TP LINEARITY OLTAGE TPZ SENSOR VOR TAGE TPL Multiplied by 1001 JZ RED SOFT START ADJUSTMENT POTENT OMETERS SPAN LINEARITY Disabled Standard ANT IC IPATE 4 m ZERO ry U Enabled O SO97YDZAAAA O CS REV J a ond 13 oc between or os shown obove CS REY J AND GE R Permanent omoge COMPONENT SIDE SHOWN to the board will result JE YELLOW 33 BLACK 5 VOLT REFERENCE PIN 10 FUNCTION VALVE DRIVE Jg B B PE Pin IC rs Connected wae c man CI i Qe sv Rer nest ed to Circuit Common J3 33 Ja Sv Fee D ear External Valve Return Use Volve Drive Valve Drive Ee where Pin 10 s connected 115 Volts 30 Volts to Power Supply Common ot the Power supply for 15 volt Valve Drive or where Pin JO is connected to 15 Volts at the Power Supply Cor 30 Vott Volve Drive Ev Ref Disobled MODEL 5850 MODEL SBS E Figure 3 3 Card Edge PC Board Jumper Location amp Function Installation and Operation Manual Section 3 Operation X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E J7 GREEN REMOTE TRANSDUCER INPUT si mim O i ed TEST POINTS est Enabled
17. 1 Model 5851E Replacement Parts List Description Section 5 Parts List Brooks Model 5851E Part Number A A o Aaa S Jam Nut Coil Assembly Screw Valve Retaining Plate O ring Valve Stem Size 016 Valve Stem High Flow Valve Plug Valve Ring Valve O ring Valve Plunger Assy High Flow Lower Guide Spring Small Valve Spacer 0 005 Thick Small Valve Spacer 0 010 Thick Large Valve Spacer 0 005 Thick Large Valve Spacer 0 010 Thick 573B027ACK S185Z271AAA 751C322AWA 715Z169CZ 375B016 S949Z203QOA 953Z068BMT 763Z064 375B016 S622Z165AAA 820Z083BMA 810A362BMA 810A363BMA 810A368BMA 810A361BMA Valve Seat with Viton Insert Valve Seat with Buna Insert Valve Seat with Kalrez Insert Valve Seat Solid 316 Stainless Steel S715Z05TAAG S715Z050AAG S715Z163AAA 715Z181BNT Orifice Refer to Section 4 6 for sizing ID 0 0040 ID 0 0067 ID 0 0091 ID 0 0120 ID 0 0160 ID 0 0210 ID 0 0260 ID 0 0310 ID 0 0360 ID 0 0410 ID 0 0465 ID 0 0550 ID 0 0635 ID 0 0700 ID 0 0760 ID 0 0820 ID 0 0935 ID 0 1065 ID 0 1200 ID 0 1405 Stainless 5772275BMT 5772277BMT 577Z280BMT 577Z283BMT 577Z286BMT 577Z289BMT 577Z293BMT 577Z296BMT 577Z300BMT 577Z305BMT 577Z308BMT 577Z310BMT 577Z312BMT 577Z314BMT 577Z316BMT 577Z319BMT 577Z322BMT 577Z328BMT 577Z333BMT 577C336BMT O ring Orifice Size 011 Controller Body w Weld Studs PC Board Assembly Card E
18. 2 32 Check valve off input Refer to Figures 2 3 and 2 4 for terminal assignments Trouble Output signal tollaws setpoint at higher commands but will not go to zero Output signal follows set point al lower commar ds but does not reach full scale Section 4 Maintenance Brooks Model 5851E Possibie Cause leaky control valve j Excessive resistance 1 valve voltage return line Insuf icient met pressure Or pressure drop Partiatly clogged sensor Partially clogged valye Partially clogged inlet screen Valve out of adjustment Valve guide spring Failure Check Corrective Action Disassemble and repair valve Reter to Section 4 4C Reduce varing resis tance ar reconhgure controller tor Exter nal Valve Return Reier 16 Section 2 13 Adjus pressures Inspect infine filters and clean replace as necessary Check calibration Rele to Section 3 4 Disassemble and repar control valve Refer to Section 4 4 Clean inlet screen Refer 1o Section 4 4 Adiust valve Reter to Section 4 4 Controller Oscillates See below Controller grossly out of calibration flaw 15 higher than desired Partially clogged sensor Clean sensor reler to the cleaning procedure Output signal slays at 6 8V regardless of command and there is flow through the con troller Valve sluck open or leaky 15V applied to the valve override input De
19. 4 attaching the valve stem assembly 6 Co 4 5 Section 4 Maintenance Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 CAUTION When performing the following procedure the valve stem must be removed without cocking it to prevent damage to the valve spring 4 Carefully remove the valve stem assembly 6 5 Remove the plunger assembly 7 8 9 11 6 Remove and note the position of the valve spring spacers 10 which may be located above and or below the lower valve spring 8 7 Unscrew the orifice 12 from the flow controller body 14 using the orifice removal tool See Section 5 Table 5 2 8 Remove the three screws 20 attaching the electronics cover Remove the electronics cover 23 CAUTION Be careful not to stress the sensor lead wire to sensor assembly junction when removing the sensor connector from the PC Board If the sensor lead wires are stressed an open in the sensor wiring could result 9 Unplug the sensor connector from the PC Board Remove the two screws securing the bracket 24 and PC Board 15 Remove the bracket and PC Board 10 Remove the two allen nuts using an 1 8 allen wrench 18 and washers 19 securing the sensor assembly 16 Remove the sensor assembly Note Do not attempt to disassemble the sensor assembly A CAUTION Do not scratch the O ring sealing surface 11 Remove the sensor a
20. 9 16 18 UNF Both Ends Outlet 3 68 93 5 syr Span amp Zero Adjusiments D TYPE Ce ES La 9 16 18 UNF Both Ends Inlet Cuttet eee on nc hes 1 4 Compression 5 70 Millimeters Fitting 145 ve weveo iE 174 Tube VER ED Fitting 148 Kerk u 5 86 8 32 UNC X 1 4 DP 1 2 Tube VCR E Mtg Holes 2 Figure 2 1 Model 5851E Dimensions Section 2 Installation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 CARD EDGE COMPONENT SIDE OF PC BOARD Unit UFC 1000 Brooks 5851E Chassis Ground Chassis Ground Chassis Ground Chassis Ground CIRCUIT OF PC BOARC Terminal Designation Brooks Tylan 5851E FC 260 Command Input Command Input Tylan FC 280 Command Input 0 5 Volt Signal Common 0 5 Volt Signal Common 0 5 Volt Signal Common 0 5 Voit Signal Common Command Common Command Common 0 5 Volt Signal Output 0 5 Volt Signal Output 0 5 Valt Signal Output 0 5 Volt Signal Output Supply Voltage Common Supply Voltage Common Command Common Return Unit UFC 1000 Command Common Supply Voltage Common 15 Vdc Supply 15 Vdc Supply 15 Vdc Supply 15 Vdc Not Used Not Used Not Used Transducer Zener Not Used Test Valve Test Point See Note 1 Not us
21. E MFC eng Part Number 541B104AAG November 2008 Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 3 1 Theory of Operation Section 3 Operation Brooks Model 5851E The thermal mass flow sensing technique used in the Model 5851E works as follows A precision power supply provides a constant power heat input P to the heater which is located at the midpoint of the sensor tube Refer to Figure 3 1 At zero or no flow conditions the heat reaching each temperature sensor is equal When gas flows through the tube the upstream sensor is cooled and the downstream sensor is heated producing a temperature difference The temperature difference T2 T1 is directly proportional to the gas mass flow The equation is AT A P Cp m Where AT Temperature difference T2 T1 CK Cp Specific heat of the gas at constant pressure kJ kg K P Heater power kJ s m Mass flow kg s A Constant of proportionality S K KJ A bridge circuit interprets the temperature difference and a differential amplifier generates a linear 0 5 Vdc signal directly proportional to the gas mass flow rate The flow restrictor shown in Figure 3 1 performs a ranging function similar to a shunt resistor in an electrical ammeter The restrictor provides a pressure drop that is linear with flow rate The sensor tube has the same linear pressure drop flow relationship The ratio of the restrictor flow to the
22. E permits the user to fully open and close the control valve independent of the command setting Refer to Section 2 8 SETPOINT Command permits the user to program the mass flow controller with an external 0 5 Vde command voltage in lieu of a command potentiometer Refer to Section 2 7 LOW COMMAND VALVE INHIBIT Auto Shut off typically prevents the valve from opening whenever the set point is less than 2 of full scale REMOVABLE CLEANABLE SENSOR permits the user to clean or replace the sensor Refer to Section 4 4 OUTPUT LIMITING prevents possible damage to data acquisition devices by limiting the output to 6 8 Vdc and 0 7 Vdc VALVE OFF accessed via Terminal J on the Card Edge or Pin 4 on the D Connector version This feature allows the user to close the control valve independently of the command signal by supplying a TTL level low signal to the proper terminal This function is useful when performing repetitive flow operations or as a safety shutdown Refer to Section 2 11 Section 1 Introduction Brooks Model 5851E Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 COMMAND ACTUAL FLOW MFC OUTPUT PERCENT OF FULL SCALE 16 20 24 28 32 36 40 44 48 52 56 60 TIME SECONDS SOFT START ENABLED 1 SLPM NITROGEN INLET PRESSURE 25PS amp IG COMMAND ACTUAL FLOW MFC OUTPUT PERCENT OF FULL SCALE Figure 1 2 0 100 Co
23. Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Model 5851E Mass Flow Meter Model 5851E Model 5851E Mass Flow Controller Mass Flow Controller with Card Edge Connector with D Connector BROOKS www BrooksInstrument com IN sT RUMENT Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 Essential Instructions Read this page before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards Because these instruments are sophisticated technical products you must properly install use and maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing using and maintaining Brooks Products e Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual telephone 888 554 FLOW or 215 362 3700 and the requested manual will be provided Save this instruction manual for future reference If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Inform and educate your personnel in the proper installation operation and maintenan
24. LOW RATE I5 BASED ON OC STANDARD TEMPERATURE 4 16 Section 4 Maintenance Brooks Model 5851E Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Where Qyitzocen Nitrogen equivalent flow rate sccm Q as Desired flow rate of the gas sccm B rroan Density of Nitrogen at 70 F Bi Density of the gas taken at customer temperature SO je Specific gravity of the gas taken at customer temperature Refer to Table 4 3 for densities Example Qu 2 000 sccm Bo 269 nae Qs 18 _gas Q roger sner 2 000 x 269 538 sccm Nitrogen In order to calculate the orifice conversion factor when using a gas mixture the following formula must be used Orifice Orifice Orifice Orifice Conversion P Conversion P Conversion P Conversion Factor Factor 1 Factor 2 Factor n Mixture 100 Where P u percentage by volume of gas 1 P percentage by volume of gas 2 P B percentage by volume of gas n Example Find the Nitrogen equivalent for 20 slpm of a 20 Helium and 80 Chlorine gas mixture Orifice Conversion 20 378 80 1 598 Factor 100 Mixture nn Oa orifice conversion factor 20 x 1 439 28 78 slpm Nitrogen 2 If inlet and outlet pressures are given in gauge pressure psig add 14 7 to convert to absolute pressure psia Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Sec
25. Not Used Black 15 Vde Input Slot Slot Yellow Not Used Green Not Used Blue uu in Teen Jumper Selectable Valve Override Violet 5 Y Reference Output Command Pot CWU Figure 2 3 Model 5851E Card Edge Connector Hookup Diagram FUNCTION COLOR CODE Cmd Common Command Pot CCW Black 0 5 Volt Signal Output White N C Red Valve Off Green 15 Vdc Supply Orange 15 Vdc Supply Blue Valve Test Point Wht BIk O N DO OI B O ND Cmd Input or Cmd Pot S Red Blk Supply Voltage Common Grn Blk 0 5 Volt Signal Common Org BIk 5 Volt Reference Output Command Pot CW Blu Blk Valve Override Blk Wht Not Used Red Wht Chassis Ground Grn Wht Remote Transducer Input Jumper Selectable Figure 2 4 D Connector Pin Arrangement Blu Wht Valve Off 2 0000000 9 15 Notes 1 Cable shield tied to chassis ground in meter connector Make no connection on customer end All power leads must be connected to power supply 2 7 2 8 Section 2 Installation Brooks Model 5851E 2 7 Soft Start Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Refer to Figures 3 3 3 4 To enable soft start place the jumper on the controller printed circuit board at J2 in the right hand ss position To
26. Pentane n Pentane Phosgene Phosphine Phosphorous Pentafluoride Phosphorous Trifluoride Propane same as CH CH CH Propylene Propene Rhenium Hexafluoride Silane Silicon Tetrachloride Silicon Tetrafluoride Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluoride Sulfur Trioxide Sulfuryl Fluoride Tetrachloromethane Tetrafluoroethylene TFE Tetrafluorohydrazine Trichlorofluoromethane f 11 Trichlorosilane Trimethyloxyborane TMB 1 1 2 Trichloro 1 1 2 Triflouroet f 113 Trimethylamine Tungsten Hexafluoride Uranimum Hexafluoride Vinyl Bromide Vinyl Chloride Vinyl Fluoride Water Vapor Ref No J 836D508 Xenon gasdata doc Vsn 86 4 13 Section 4 Maintenance Brooks Model 5851E 4 6 Orifice Sizing Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Example The desired gas is 20 Helium He and 80 Chlorine Cl by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is 100 Mixt Factor 0 94 ixture Factor 20 80 0 945 1 386 0 876 Nitrogen equivalent flow 20 945 21 16 slpm Nitrogen It is generally accepted that the mass flow rate derived from this equation is only accurate to 596 The sensor conversion factors given in Table 4 3 are calculated based on a gas temperature of 21 C and a pressure of one atmosphere The specific heat of most ga
27. Skeermen ber veere forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et skeermet kabel med hel skaerm med 100 daekning Skeermen ber veere forbundet til jord Forbindelse af stikket venligst referer til vedlagte instruktions manual Med venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r MassedurchfluBger te Datum Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Vertr glichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Ger te elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel f r CE zertifizierte Ger te sind spezielle Anforderungen zu beachten Qualit t der Verbindungskabel AnschluBstecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten daB eine 100 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m glich sollten Kabeldurchf hrungen mit AnschluBm glichkeiten f r die Kabelabschrimung verwendet werden Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzus
28. Tool P N S908Z049AAA 5850 Series Valve Shim Kit P N S810A372BMA Contains 1 010 Large Spacer 2 005 Large Spacers 1 010 Small Spacer 2 005 Small Spacers ote Refer to Brooks publication DS 5800 for additional accessories 5 4 Additional publications available MFC Contamination Control amp Valve Application Guide Service Manual Installation and Operation Manual Section A CE Certification X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E Dansk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Emne Till g til instruktions manual Reference CE meerkning af Masse Flow udstyr Dato Januar 1996 Brooks Instrument har gennemfgrt CE maerkning af elektronisk udstyr med succes i henhold til regulativet om elektrisk staj EMC direktivet 89 336 EEC Der skal dog geres opmeerksom p benyttelsen af signalkabler i forbindelse med CE meerkede udstyr Kvaliteten af signal kabler og stik Brooks lever kabler af h j kvalitet der im dekommer specifikationerne til CE m rkning Hvis der anvendes andre kabel typer skal der benyttes et sk rmet kabel med hel sk rm med 100 deekning Forbindelses stikket type D eller cirkul re skal vaere skeermet med metalhus og eventuelle PG forskruninger skal enten vaere af metal eller metal skaermet Skaermen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader
29. Z668AAA D Connector version listed in Section 5 will make this job much easier 4 1 4 2 Section 4 Maintenance Brooks Model 5851E 4 Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Verify that the process gas connections have been correctly terminated and leak checked If the mass flow controller appears to be functioning but cannot achieve setpoint verify that sufficient inlet pressure and pressure drop are available at the controller to provide the required flow Verify that all user selectable jumpers are in their desired positions refer to Figs 3 3 and 3 4 A CAUTION Any Brooks Instrument mass flow meter or flow controller with a 15 pin D Connector PC Board bearing the CE Mark must use a 100 shielded cable and metal shell mating connectors The shield is tied over 360 degrees to the shell at both ends This is mandatory to be in compliance with the EMC Directive 89 336 EEC Refer to Appendix A Bench Troubleshooting 1 Properly connect the mass flow controller to a 15 Vdc power supply command voltage source and connect an output signal readout device 4 1 2 digit voltmeter recommended to Terminals 2 and 3 or D Con nector Pins 2 and 10 refer to Figs 2 2 and 2 3 Apply power set the command voltage to zero and allow the controller to warm up for 15 minutes Do not connect to a gas source at this time Observe the output signal and if nece
30. age of gas 2 by volume P percentage of gas n by volume 4 11 Section 4 Maintenance Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 Table 4 3 Conversion Factors Nitrogen Base EEZENENN UN NEM NE m FACTOR FACTOR karen Acetylene Air Mure Allene C H Ammonia NH Argon Ar Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f 13B1 1 3 Butadiene Butane 1 Butene CIS 2 Butene Trans 2 Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetrafluoride f 14 Carbonyl Fluoride Carbonyl Sulfide Chlorine Chlorine Dioxide Chlorine Trifluoride 2 Chlorobutane Chlorodifluoromethane f 22 Chloroform Trichloromethane Chloropentafluoroethane f 115 Chlorotrifluoroethylene Chlorotrifluoromethane f 13 Cyanogen Cyanogen Chloride Cyclobutane Cyclopropane Deuterium Diborane Diboromodifluoromethane f 12B2 1 2 Dibromotetrafluoroethane f 114B2 Dichlorodifluoromethane f 12 Dichlorofluoromethane f 21 Dichlorosilane 1 2 Dichloroethane 1 2 Dichlorotetrafluoroethane f 114 2 2 Dichloro 1 1 Difluoro 1 Chloroethane 1 1 Difluoroethane 1 1 Difluoroethylene Diethylsilane Difluoromethane f 32 Dimethylamine Dimethylether 2 2 Dimethylpropane Disilane Ethane Ethanol Ethylacetylene Ethyl Chloride Ethylene Ethylene Oxi
31. ar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados La pantalla deber conectarse a tierra Los conectores estandar de tipo tarjeta Card Edge no son met licos los cables utilizados deber n ser protegidos con un apantallamiento del 10096 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Para ver la configuraci n de los pines Por favor consultar Manual de Instrucciones adjunto Installation and Operation Manual Section A CE Certification X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E Francais Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Sujet Annexe au Manuel d Instructions R f rence Certification CE des Debitmetres Massiques Effet Thermique Date Janvier 1996 Messieurs Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les regles de la Compatibilit Electromagn tique directive CEM 89 336 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du c ble utilis pour v hiculer le signal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cificatio
32. ce of the product Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources To ensure proper performance use qualified personnel to install operate update program and maintain the product When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affectthe product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury CAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of internal circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive bag or other conductive container Boards mus
33. chlieBen Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm Bige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 100 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Erdpotential zu verbinden Die Belegung der AnschluBpins k nnen Sie dem beigelegten Bedienungshandbuch entnehmen A 1 A 2 Section A CE Certification Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 English Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 100 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable
34. d PA 19440 U S A Assunto Adenda ao Manual de Instru es Refer ncia Certificac o CE do Equipamento de Fluxo de Massa Data Janeiro de 1996 O equipamento el ctrico electr nico Brooks com a marca CE foi testado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva CEM 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE ser necess rio ter uma atenc o especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fornece cabo s de qualidade superior que cumprem os requesitos da certificac o CE Se fornecerem o vosso pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 100 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizar se buchas met licas de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado blindagem ou bucha met lica em ambas as extremidades em 360 A blindagem deve terminar com a ligac o massa Os conectores Card Edge n o s o em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 100 nos termos da Certificag o CE A blindagem deve terminar com ligac o massa Relativamente configurac o da cavilha queiram consultar o Manual de Instru es A 5 Section A CE Certification Installation and Operation Manua
35. de Fluorine Fluoroform f 23 Germane Germanium Tetrachloride Halothane R 123B1 Helium Hexafluoroacetone Hexaflorobenzine Hexafluoroethane f 116 Hexafuoropropylene HFP Hexamethyldisilane HMDS 5H Si Ref No J 836D508 Hexane i i gasdata doc Vsn 8 6 Installation and Operation Manual Section 4 Maintenance X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E Table 4 3 Conversion Factors Nitrogen Base continued FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR kg m Hydrogen H 1 008 0 269 0 090 Hydrogen Bromide HBr E 3 645 Hydrogen Chloride HCL 1 639 Hydrogen Cyanide HCN E 1 179 Hydrogen Fluoride HF 5 i 0 893 Hydrogen lodide HI Hydrogen Selenide H Se Hydrogen Sulfide H S lodine Pentafluoride IF Isobutane C H Isobutene Isopentane Krypton Methane Methylacetylene Methyl Bromide 3 Methyl 1 butene Methyl Chloride Methyl Fluoride Methyl Mercaptan Methyl Silane Methyl Trichlorosilane MTS Methyl Vinyl Ether Monoethanolamine Monoethylamine Monomethylamine Neon Nickel Carbonyl Nitric Oxide Nitrogen Nitrogen Dioxide Nitrogen Trifluoride Nitrogen Trioxide Nitrosyl Chloride Nitrous Oxide Octofluorocyclobutane Oxygen Oxygen Difluoride Ozone Pentafluorethane f 125 Pentane n Pentane Perchloryl Fluoride Perfluorobutane Perfluoro 2 Butene Perfluoromethyl vinylether Perfluoropropane
36. de 2 000 meters 6 562 feet For Indoor Use ONLY Mains supply voltage fluctuations not to exceed 10 of the nominal voltage Installation and Operation Manual Section 2 Installation X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E 2 1 Receipt of Equipment ep A A O PA When the equipment is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability A report should be submitted to the Product Service Department Brooks Instrument Hatfield Pennsylvania 19440 0903 Remove the envelope containing the packing list Carefully remove the equipment from the packing case Make sure spare parts are not discarded with the packing materials Inspect for damaged or missing parts Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 318 549 309 E mail BrooksEu Brooksinstrument com 2 2 Recommended Storage Practice Se AA If intermediate or long ter
37. dge D Connector Sensor Assembly O ring Sensor Size 004 Allen Nut Sensor Body Lock Washer Sensor 375B011 S854Z157BMA S097Y824AAA S097Y847AAA S774Z607AAA 375B004 573Q103ACZ 962D005AWA Screw Sensor PC Board Cover 753L056AWZ Restrictor Assembly and Components Refer to Section 4 7 for sizing O ring Restrictor Size 026 Electronics Cover Can Card Edge D Connector Cover Plate D Con Version Only PC Board Mounting Bracket Centrating Ring Card Edge Only Pot Hole Plug QTA Viton SUA Buna TTA Kalrez AR As Required NS Not Shown 375B026 219Z389EA 219Z390EA 852Z209EA 079Z135EAA 106D073MDQ 106D072MDQ 620Z434SXA 5 3 Section 5 Parts List Brooks Model 5851E Table 5 1 Model 5851E Replacement Parts List Continued Description Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Part Number Fittings 1 4 Compression Swagelok 1 4 Male VCR Cajon 1 4 Male VCO Cajon 3 8 Compression Fitting 3 8 Male VCO 3 8 or 1 2 Tube 3 8 Male VCR 3 8 or 1 2 Tube 320B136BMA 315Z036BMA 315Z035BMA 320B150BMA 315Z033BMA 315Z034BMA O ring Fitting Size 906 O ring Fitting Size 010 O ring End Block Size 029 375B906 375B010 375B029 Interconnecting Cables Length Card Edge D Connector Connector on one end with no termination on other end 5 Fee
38. e valve retaining plate in a diagonal pattern Refer to Figure 4 1 to 15 in lbs 4 7 4 8 Section 4 Maintenance Brooks Model 5851E Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 9 Install the coil assembly 2 over the valve stem assembly 6 and secure with jam nut 1 10 Install the printed circuit PC board 15 secure with the bracket 24 and two screws Plug the connector from the sensor assembly onto the PC Board The flow arrow on the connector should be pointing toward the valve assembly 11 Install the electronics cover 23 on the controller secure with three screws 20 Plug the connector from the valve coil into the PC Board through the hole in electronics cover 12 Prior to installation leak and pressure test to any applicable pressure vessel codes C ADJUSTING THE CONTROL VALVE The Model 5851E control valve has been factory adjusted to insure proper operation Readjustment is only required if any of the following parts have been replaced Orifice 12 valve stem 6 plunger 7 lower guide springs 8 valve seat 11 The valve is adjusted in Brooks mass flow controllers by adding spacers 9 and 10 to the control valve assembly to vary the air gap and initial preload Spacers are used to affect the proper adjustment because they provide a reliable and repeatable means for adjustment Screw type adjustment mechanisms can change with pressure or vibra
39. eam of the controller may cause a small shift in accu racy If possible have at least ten pipe diameters of straight tubing upstream of the 5850E MFC Note The control valve in the Model 5851E provides precision control and is not designed for positive shut off If positive shut off is required it is recommended that a separate shut off valve be installed in line A CAUTION Since the Model 5851E control valve is not a positive shut off a separate solenoid valve may have been installed for that purpose It should be noted that a small amount of gas may be trapped between the downstream side of the mass flow controller and the solenoid resulting in a surge upon actuation of the controller This surge can be reduced in magnitude by locating the controller and solenoid valve close together or by moving the solenoid valve upstream of the controller 2 3 2 4 Section 2 Installation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 2 6 In Line Filter ON A A A It is recommended that an in line filter be installed upstream from the controller to prevent the possibility of any foreign material entering the flow sensor or control valve The filtering element should be periodically replaced or ultrasonically cleaned Table 2 1 Recommended Filter Size Maximum Flow Rate Recommended Filter Size 10 to 30 slpm Above 30 slpm Note The above table lists the maxim
40. ed Valve Test Point Not used 15 Vde Supply Not used Valve Test Point Purge Not used 15 Vdc Supply 15 Vdc Supply Slot Siot Slot Slot G Not used Not used Not used Not used Not used Not used Not used H Not used Not used Valve Override Valve Not Used Open Close Nol used Not used 1 SY Ref or Not Used See Note 2 Not used Valve Off Not used Valve Off J Not used Unit designates Pins H J K amp L as G H I amp J Jumper Selectable e Factory Actuated Option Figure 2 2 Model 5851E Card Edge Connector Comparison Guide Note 1 The purge feature is not available on the 5851E Do not ground pin D of the card edge connector 2 The 5851 does not use pin 10 tor valve current return Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brown Rel Connecior Section 2 Installation Brooks Model 5851E Connector Key Supplied Black Ael Connector Pin No _ Function Chassis Ground Coler Code Command Input Command Pol S 0 5 Y Signal Common Orange Command Common Command Pot CCW Yellow 0 5 Y Signal Output Supply Voltage Common Green Blue 15 Vdc Supply Violet Valve Test Point Gray ofo Nuja nsn Remote Transducer Input White Not Used
41. elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen e Brooks levert standaard kabels met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 100 e D of ronde kabelconnectoren moeten afgeschermd zijn met een metalen connector kap Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of wartel verbonden worden Het scherm moet worden verbonden met aarde e Card edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde A 4 Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Installation and Operation Manual Section A CE Certification X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E
42. environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www BrooksInstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E Section 1 Introduction Paragraph Page Number Number giiljeor qe D DEUS 1 1 DESCHPUON EE ee ee ec neigen 1 1 lerem EE 1 3 Section 2 Installation Receipt of Equipment esses eene 2 1 Recommended Storage Practice sss 2 1 Gas Connections iii 2 1 INSTALO e irrita 2 1 In Lne Filter icon eine naeh 2 2 SOIT SLANT anness annemie steden E Ana du ta added a en dk aa 2 6 Remote Set Point Command Input 2 6 ValVEOVBITIAS En 2 7 Remote Transducer Input Factory Installed Option 2 7 Valve Test Pont 22 et san tnt nae 2 7 Valve Off E 2 8 Volt Reference Output Valve Drive Configuration 2 8 Section 3 Operation Theory of Operation itame merten et 3 1 Operating Procedure
43. fective printed circuit board Command input floating Pin D connected lo common Clean and or adjust control valve Refer lo cieamng proce dure and or Section 4 4C Check the valve override terminal Refer to Figures 2 3 and 2 4 for terminal assignments Replace printed circuit board Reler to Section 4 4 Connect command signal Refer to Figures 2 3 and 2 4 lor terminal assignments Remove pin D from common Controller grossly out of calibration flow i lower than desired Partially clogged resinctor Replace restrictor Reler to Section 4 4 Controller oscillates Pressure drop oc n et pressure EXCESSIVE Oversized onlice Valve out of adjustment Anticipate polen tometer oul of adjustment Faulty pressure regulator Detective printed exrcull board Note Do not attempt to disassemble the sensor D Cleaning No routine external cleaning is required for Brooks Thermal Mass Flow Controller Should the Model 5851E require cleaning due to deposition use the following procedures 1 Remove the unit from the system Adjust pressures Check orifice size Refer to Section 44 Adjust valve Refer to Section 4 4 Adjust anticipate potentiometer Re fer lo Section 3 5 Check regulator Capacity Replace printed circuit board Refer to Section 4 4 2 Refer to Section 4 4 to disassemble the controller 4 4 Section 4 Maintenance Installation and Operat
44. fer to the spare parts Section 5 for the correct part number The Model 5851E Mass Flow Controller utilizes porous metal restrictor assemblies for all full scale flow rates Restrictor elements with porosities of 40 and 60 microns are used in different combinations Up to 3 restrictor elements can be placed in one assembly These restrictors are assembled by pressing the porous metal elements into the header plate When sizing a restrictor assembly for gases other than Nitrogen the sensor conversion factor must be included as the restrictor is used to divert a portion of the process flow through the sensor Use the following equation to obtain the desired output in air equivalent units Refer to Table 4 3 for the conversion factor list Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Section 4 Maintenance Brooks Model 5851E Example The desired gas is Silane SiH4 The desired full scale flow rate is 200 sccm Sensor conversion factor is 0 625 from Table 4 3 Nitrogen equivalent flow 2 200 0 625 320 sccm Nitrogen In the example above the restrictor should be sized for a 320 sccm flow rate If a restrictor assembly is being replaced because the original has become contaminated the original may be used as a guide to select the replacement assembly The porosity of the original element or elements is marked on the calibration sheet which was shipped with the flow controller The
45. he instructions in Section 2 of this manual Use a clean dry inert gas such as nitrogen for this procedure Do not apply gas pressure to the controller at this time c Disassemble the control valve following the procedure given in Installation and Operation Manual Section 4 Maintenance X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E AIR GAP UPPER GUIDE SPRING PLUNGER COIL ASSEMBLY AIR GAP SPACER SMALL DIA DECREASES AIR GAP 8 LOWER GUIOE SPRING 7 710 7 i PRELOAD SPACER PRELOAO SPACER SMALL DIA LARGE DIA INCREASES PRELOAD DECREASES PRELOAD P d Pi VALVE SEAT 11 LY Note Bracketed numbers refer to Table 5 1 Parts List Figure 4 2 Valve Adjusting Spacer Locations Section 4 Maintenance Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851 E November 2008 Section 4 4A Note the number locations and thickness of all spacers 9 and 10 d Decrease the preload of the valve by 0 005 inches by either remov ing a 0 005 inches small preload spacer or by adding a 0 005 inches large preload spacer Refer to Figure 4 2 e Reassemble the valve following the assembly procedure in Section 4 4A f Command 0 flow apply normal operating gas pressure and check for valve leak thru by observing the output signal g If the valve leaks thru increase the preload by 0 005 and go to Step h If the valve does not
46. il time of installation Installation and Operation Manual Section 2 Installation X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E ACAUTION Any Brooks Instrument mass flow meter or controller with a 15 pin D Connector PC Board bearing the CE Mark must use a 100 shielded cable and metal shell mating connectors The shield is tied over 360 degrees to the shell at both ends This is mandatory to be in compliance with the EMC Directive 89 336 EEC Refer to Appendix A Recommended installation procedures a The Model 5850E should be located in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for access to the electrical components c Install in such a manner that permits easy removal if the instrument requires cleaning ACAUTION When used with a reactive Sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the controller purged with clean dry N before use d The Model 5850E Mass Flow Controller can be installed in any position However mounting orientations other than the original factory calibration see data sheet will result in a 0 5 maximum full scale shift after re zeroing e When installing controllers with full scale flow rates of 10 slpm or greater be aware that sharp abrupt angles in the system piping directly upstr
47. ion ATTL level high or floating at this pin has no effect 2 13 Five Volt Reference Out Valve Drive Configuration A Card Edge Refer to Figures 2 3 and 3 3 Terminal 10 can be jumper selected as 5 Volt reference output or not used The 5 Volt reference output is required by older Brooks secondary electronics Ex Model 5896 or if a potentiometer is to be used to generate the command signal To enable the 5 Volt reference output on Terminal 10 place the Jumper J8 in the D E position To disable the 5 Volt reference output place Jumper J8 in the E F position CAUTION Do not ground Terminal 10 when 5Volt reference output is enabled Irreparable damage to the PC Board may result To enable the Model 5851E to operate satisfactorily with the larger orifice size used for higher flow rates the P C board must be jumper configured for a high voltage valve drive For Model 5851 E Jumper J3 must be in the A B left most position B D Connector Refer to Figures 2 4 and 3 4 The 5 Volt reference is always available on Pin 11 To enable the Model 5851E to operate satisfactorily with the larger orifice size used for higher flow rates the P C board must be jumper configured for a high voltage valve drive For the Model 5851E Jumper J3 must be in the A B left most position 2 9 2 10 Section 2 Installation Brooks Model 5851E THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5851
48. ion Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 Table 4 2 Sensor Troubleshooting SENSOR SCHEMATIC bonoo FUNCTION Sensor Connector Sensor common Heater Heater common Upstream temperature _ Sensor Su Downstream temperature sensor Sd Flex Circuit Wire Numbers OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL Yellow and white to body Open circuit on ohmmeter If either ground heater yellow or sensor common Pin 1 or 4 to body white are shorted an ohmmeter reading will be obtained White to red Nomina 1100 ohms reading Pin 4 to Pin 2 White to black Depending on temperature and Pin 4 to Pin 3 ohmmeter current Blue to yell Pin ke Pin 1 Nominal 1200 ohm reading Note Remove the sensor connector from the PC Board for this procedure A CAUTION Do not ground Terminal 10 when 5 Volt reference output is enabled Irreparable damage to the PC Board may result 3 Use a hemostat or tweezers to push a 0 007 dia piano wire through the flow sensor tube to remove any contamination For best results push the wire into the downstream end of the sensor tube end closest to the control valve The sensor tube can be flushed with a non residuous solvent Freon TF recommended A hypodermic needle filled with solvent is a convenient means to accomplish this An alternate method for f
49. ions are subject to change without notice TRADEMARKS A NO Brooks Instrument LLC Freon TF E I DuPont deNemours amp Co alzar latido DuPont Dow Elastomers VCO VOR cce cirea ea Cajon Company MRON e DuPont Performance Elastomers Vol U Meter vcd Brooks Instrument LLC Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 318 549 300 T 011 81 3 5633 7100 T 215 362 3700 F 31 318 549 309 F 011 81 3 5633 7101 F 215 362 3745 E Mail BrooksEuGBrooksInstrument com E Mail BrooksAs Brooksinstrument com E Mail BrooksAm Brooksinstrument com www Brooksinstrument com BROOKS Copyright 2008 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
50. l X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 Suomi Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asia Lisays Kayttoohjeisiin Viite Massam r mittareiden CE sertifiointi Paivamaara Tammikuu 1996 Brooksin CE merkill varustetut s hk iset laitteet ovat l p issyt EMC testit direktiivi 89 336 EEC Erityist huomiota on kuitenkin kiinnitettava signaalikaapelin valintaan Signaalikaapelin kaapelin lapiviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita jotka tayttavat CE sertifikaatin vaatimukset Hankkiessaan signaalikaapelin itse olisi hankittava 100 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mikali mahdollista tulisi k ytt metallisia kaapeliliittimi kiinnitett ess suojaa Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa p iss 360 n matkalta Suojan tulisi olla maadoitettu Card Edge Connector it ovat standarditoimituksina ei metallisia Kaapeleiden taytyy olla 100 sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Nastojen liittaminen katso liitteena oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996
51. leak thru repeat Steps d e f and g h Apply the normal operating gas pressure and command 100 flow 5 000 Volts on Terminal A Pin 2 VOLTMETER Valve Yolage 1 1 95 x TP3 33 4 TEST POINTS TP4 Circuit Common TP3 Valve Voltage TP2 Linearity Voltage TP1 Tpp Sensor Voltage span Linearity Anticipate Sensor Response i j Connector Enhanced Response PC Board only lejejejeie ENT eo rei DUST OTENTIOMETERS gt 4 10 Figure 4 3 Voltmeter Connections for Valve Adjustment Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 4 5 Gas Conversion Factors Section 4 Maintenance Brooks Model 5851E Note Due to possible heat capacity and density differences between the test gas and actual process gas for which the MFC was sized it may be necessary to increase the inlet pressure to obtain proper control at 100 flow i Measure the valve voltage by connecting a voltmeter between Test Point 3 TP3 and Test Point 4 TP4 Refer to Figure 4 3 Valve Voltage 1 95 x TP3 33 4 j1 If the flow controller output signal is 10096 5 0 V and the valve voltage is less than 18 V the valve adjustment is complete j2 If the flow controller output signal is 100 5 0 V and the valve voltage is greater than 18 V decrease the air gap with a small 0 005 in air gap spacer Refer to Figure 4 2 Repeat Steps h and i j3 If the flow controller output
52. low the Model 5851E control circuitry and valve to be used with an 0 5 Vdc external transducer signal the jumper at J7 is moved to the lower two pins R With this feature enabled a 0 5 Vdc signal may be applied to the external transducer input terminal The Model 5851E controller circuitry will modulate the valve position to increase or decrease the flow rate to maintain the transducer output at the Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 2 11 Valve Test Point 2 12 Valve Off Section 2 Installation Brooks Model 5851E desired set point The control circuitry is reverse acting e g for an increase in transducer output the flow will correspondingly be decreased Refer to Figures 2 2 2 3 and 2 4 The valve voltage can be monitored on Pin D of the Card Edge version and Pin 7 of the D Connector version This voltage relative to circuit common is approximately proportional to the valve voltage per the following equation when using 15 V valve drive Valve Voltage 1 95 x TP3 33 4 V The Model 5851E does not have a purge feature Do not ground Pin D of the Card Edge version or Pin 7 of the D Connector version Refer to Figures 2 2 2 3 and 2 4 The control valve can be forced closed regardless of command input signal by applying a TTL level low 0 4 Vdc to Terminal L of the Card Edge version or Pin 4 of the Terminal L of the Card Edge version or Pin 4 of the D Connector vers
53. lushing out the sensor is to replace the restrictor element with a low flow plug restrictor This plug forces all the flow through the sensor and may dislodge any obstructions With the valve orifice removed subject the flow controller to a high differential pressure Pressurizing the outlet of the MFC higher than the inlet may help force the obstruction upstream and out of the sensor tube Installation and Operation Manual Section 4 Maintenance X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E 4 Inspect the orifice for clogging by holding it in front of a light source and looking for light through the bore Clean by soaking in a suitable non residuous solvent and directing a stream of compressed clean dry Nitrogen through the bore Deposits of silicon dioxide may be removed by soaking the internal parts in solution of 596 hydrofluoric acid 5 parts hydrofluoric acid and 95 parts water H O followed by Freon TF Sintered type restrictor elements should be replaced as it is not pos sible to adequately remove deposits from them Wire mesh and A C L F E type restrictor elements can be cleaned in an ultrasonic bath Refer to Section 4 7 for the correct restrictor to use 7 Blow all parts dry with clean dry Nitrogen and reassemble Refer to Section 4 4b assembly 8 Purge the assembled controller with clean dry Nitrogen 9 Perform the calibration procedure in Section 3 4 10 When the controller is
54. ly those using a volatile or reactive gas Full gas flow is achieved in approximately 15 seconds Refer to Section 2 6 Precision 5 Volt Reference Allows the direct connection of a command potentiometer to a 0 5 Volt command signal to the controller A precision 10 turn 2 k ohm potentiometer with an integral turns counter is recommended this will permit repeatable adjustments of command to 1 part in 1000 Refer to Section 2 12 for activation Valve Override Allows full opening and closing of the control valve independent of the command setting Refer to Section 2 8 Valve Off Accessed via Terminal J on the Card Edge or Pin 4 on the D Connector version This feature allows the user to close the control valve independently of the command signal by supplying a TTL Level low signal to the proper terminal This function is useful when performing repetitive flow operations or as a safety shutdown Refer to Section 2 11 Valve Test Point Accessed via Terminal D on the Card Edge or Pin 7 on the D Connector version of the Model 5850E only This feature allows the user to monitor the control valve voltage during operation Refer to Section 2 10 Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Section 3 Operation Brooks Model 5851E TE Model S851E VALVE TEST POINT PURGE Figure 3 2 Flow Control System Block Diagram 3 2 Operating Procedure 3 3 Zero Adjustment Remo
55. m storage is required for equipment as supplied by Brooks Instrument it is recommended that said equipment be stored in accordance with the following a Within the original shipping container b Store in a sheltered area with the following conditions 1 Ambient temperature 21 C 70 F nominal 2 Relative humidity 45 nominal 60 maximum 25 minimum Upon removal from storage a visual inspection should be conducted to verify its condi tion is as received If the equipment has been in storage for an excess of ten 10 months or in conditions in excess of those recommended all pressure boundary seals should be replaced and the device subjected to a pneumatic pressure test in accordance with applicable vessel codes 2 1 2 2 Section 2 Installation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 2 3 Return Shipment a Prior to returning any Brooks equipment to the factory contact the factory for a Return Materials Authorization Number RMA This can be obtained at Brooks Instrument Product Service Department 407 West Vine Street Hatfield PA 19440 0903 or call toll free 1 888 554 FLOW 3569 Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument
56. mmand Step Soft Start Enabled VALVE TEST POINT accessed via Terminal D on the Card Edge or Pin 7 on the D Connector version This feature allows the user to monitor the control valve voltage during operation Refer to Section 2 10 REMOTE TRANSDUCER INPUT accessed via Terminal 5 on the Card Edge or Pin 15 on the D Connector version This features allows the use of the integral control electronics and valve to regulate flow in response to the signal from an external 0 5 Vdc signal The mass flow signal from the Model 5851E is still available for process monitoring Installation and Operation Manual Section 1 Introduction X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E 1 33 Specifications ng u nd m AWARNING Do not operate this instrument in excess of the specifications listed below Failure to heed this warning can result in serious personal injury and or damage to the equipment Standard Ranges Any full scale flowrate from 10 slpm to 100 slpm Nitrogen equivalent up to 200 slpm Hydrogen Standard temperature and pressure in accordance with SEMI Semiconductor Equipment and Materials International standard 0 C and 101 3 kPa 760 Torr Accuracy 1 full scale including linearity at calibration conditions Repeatability 0 25 of rate Response Time Less than 3 seconds response to within 2 of full scale final value with a 0 to 100 command step Power Requirement
57. n 3 4 3 4 D Connector PC Board Jumper Location amp Function 3 5 3 5 Model 5851E Calibration Connections 3 7 3 6 Adjustment Potentiometer Location 3 8 3 7 Fast Response Adjustment ssussss 3 11 4 1 Torque Sequence for the Valve Retainer Plate 4 7 4 2 Valve Adjusting Spacer Locations 4 9 4 3 Voltmeter Connections for Valve Adjustment 4 10 4 4 Example Nomograph eee 4 17 4 5 Restrictor Element Assembly 4 20 4 6 Restrictor Element Orientation in Controller Body 4 20 5 1 Model 5851E Parts Drawing sss 5 2 Table Page Number Number 2 1 Recommended Filter Size sessssssssss 2 6 4 1 Bench Troubleshooting sisis aas 4 3 4 2 Sensor Troubleshooting nnen ennen ennen nennen 4 4 4 3 Conversion Factors Nitrogen Base 4 12 4 4 Orifice Sizing Nomograph 4 15 4 5 Restrictor Selection Guide sesssssss 4 19 5 1 Model 5851E Replacement Parts List 5 3 5 2 Tools and Spare Part Kits for Model 5851E 5 4 Installation and Operation Manual Section 1 Introduction X TMF 5851E MFC eng Part Number 541B104AAG No
58. nd or signal stability may not be achieved If one of the limits is reached check the restrictor sizing Refer to section 4 7 Fast Response Adjustment Two methods of adjusting the step response of the Model 5851E mass flow controllers can be used No 1 describes a method that will get the step response close to optimum quickly and without any flow measuring equipment This method should be used when the response time of the 3 10 Section 3 Operation Brooks Model 5851E Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 flow controller is not critical to overall system performance No 2 describes a method that will allow adjustment of your Model 5851E mass flow controller to optimum step response performance This method is the preferred way to adjust the step response Adjustment of the fast response circuit will not affect the accuracy of the flow controller as adjusted in Section 3 4 1 Fast response adjustment 3 seconds response specification not guaranteed Note This procedure requires an oscilloscope chart recorder or a DVM with a sample speed of three samples per second or greater to monitor the rate of change of the output signal a Set the command potentiometer for 100 of flow 5 00 V and wait about 45 seconds for the flow output signal to stabilize b Step the command signal to 0 or activate valve override closed to stop the flow Observe the flow signal outpu
59. ns If this point is between two orifice sizes select the next largest size orifice to ensure adequate flow If the orifice selected falls below 0013 choose 0013 size orifice For the example in Figure 4 4 the 007 size orifice would be selected The restrictor assembly is a ranging device for the sensor portion of the controller It creates a pressure drop which is linear with flow rate This diverts a sample quantity of the process gas flow through the sensor Each restrictor maintains the ratio of sensor flow to restrictor flow however the total flow through each restrictor is different Different restrictors micron porosity and active area have different pressure drops and produce controllers with different full scale flow rates For a discussion of the interaction of the various parts of the meter you are urged to review Section 3 1 Theory of Operation If the restrictor assembly has been contaminated with foreign matter the pressure drop vs flow characteristics will be altered and it must be cleaned or replaced It may also be necessary to replace the restrictor assembly when the mass flow controller is to be calibrated to a new flow rate Restrictor assembly replacement should be performed only by trained personnel The tools required for the removal replacement procedure are as follows Appropriate size wrench for the removal of the inlet process connection Restrictor removal tool Refer to Table 5 2 Restrictor O ring re
60. ns de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind 100 96 Les connecteurs D ou de type circulaire doivent tre reli s la terre Si des presse toupes sont n cessaires ceux ci doivent tre m talliques avec mise la terre Le blindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s la terre Les connecteurs de type card edge sont non m talliques Les c bles utilis s doivent tre blind s 10096 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre Se r f rer au manuel d instruction pour le raccordement des contacts Greek Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A spu SLLPSTUTIKT 070 Eyrerpidlo Udiyii Zxerik H ozonoigen CE rov Opr vov M rpsms Hapoyi Matas Apepopyvia lavov pioz 1996 Cupiag km K proL fa pyova nAexvpici mAekrpovika mc Brooks to onoix q pouv to sue CE amp youv mugg Edepibel o peuva pe Tow KavoviguoUc TMG Hkextpo Mayvqents uybor r tes EMC vnpertifle 89 336 EEC Mmoosinote gpet leres edikt zpooagh Kath riv emo rov Kakwdiou perapop s o o uetos ro oroio add zp xetrat va gproponomdei LE pyava xov pipoy o opa CE lov tnte rov kakndion guares tor srumodamtdv xot tov oyv gnor I Brooks
61. ntil the voltage at TP1 is equal to the value calculated above Recheck the flow rate after the flow is stable at least 2 minutes Repeat this check and adjustment procedure until the measured flow rate is within 1 of the desired flow rate Note The voltage at TPI is 100 times the output voltage of the sensor This voltage can range from 1 2 to 12 Volts however it is recom mended that this voltage stays between 2 0 and 9 0 Volts for proper operation If the recommended voltage range exceeds the desired accuracy signal stability may not be achieved If one of the limits is reached check the orifice and restrictor sizing procedures Refer to Sections 4 6 and 4 7 respectively Set the command potentiometer for 0 of flow Connect the DVM positive lead to flow signal output Terminal 3 Card Edge Pin 2 D Connector and the negative lead to TP4 Readjust the zero potenti ometer for an output of 0 mV 2 mV as necessary Set the command potentiometer for 50 of flow 2 500 V and measure the flow rate Calculate the error as a percentage of full scale Measured Desired Flow Flow Rate Rate Full Scale Error 100 x Full Scale Flow Rate Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 3 5 Response Section 3 Operation Brooks Model 5851E Example What is the percent of full scale error when full scale is equal to 100 sipm Measured flow rate 48 5 slpm Desired
62. oes not repeat check for leakage Note Controllers supplied with all metal valve seats do not provide tight shut off A 0 to 3 leak through is typical For metal seat controllers close a downstream shut off valve and observe the zero signal Setthe command potentiometer connected to Terminals A B and 10 of the Card Edge connector and Terminals 8 1 and 11 of the D Con nector for 10096 of flow 5 000 V Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 signal common Adjust the linearity potentiometer for an output of 0 0 V zero Volts Connect the DVM positive lead to TP1 100x sensor voltage and the negative lead to TP4 circuit common The command potentiometer should still be set at 10096 flow 5 000 V Measure the flow rate using suitable volumetric calibration equipment To adjust the controller to the proper full scale flow calculate a new TP1 voltage using the following equation measured TP1 voltage New TP1 voltage x desired flow rate measured flow rate 3 7 3 8 Section 3 Operation Brooks Model 5851E Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 BROOKS MASS FLOW CONTROLLER Test Polnts TP4 Circuit Common TP3 Valve Voltage TP2 Lin Voltage TP1 Sensor Voltage X 100 Sensor Span q Connector Linearity Anticipate Zero Figure 3 6 Adjustment Potentiometer Location Adjust the span potentiometer u
63. or assembly is defective and must be replaced Refer to Section 4 4 for the disassembly and assembly procedures to use when replacing the sensor Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Table 4 1 Bench Troubleshooting Trouble Actual flow over shoots set point by more than 5 full scale Output stays al volts regardless of command and there is flow through the controller Outpul stays ato volts regardless of command and Ihere 15 no tlow Ihrough the controller Possible Causa Anlicipate polen tiometer oul of adjustment Clogged Sensor Clog ged Control Valve Card Edge Version Internal reference is being used as the command Source and the yellow jumper is in Ihe E F position 15 volts applied lo the valve over ride input Defective printed circuil board Improper valve drive configuration Valve Off Pin Grounded Adjust anticipate potentiometer Reter to Section 3 5 Clean sensor Refer to cleaning procedure Section 4 4 Check TP3 with the command valve at 100 f the voltage IS more negative than 18V drsassem ble and repair the the control valve Reter to Sections 4 AC and 2 11 Refer to Section 2 12 Check valve override input Aefer io Figures 2 3 and 2 4 for terminal assignments Replace printed Circuit board Refer to Section 4 4 Check jumper tor valve configuration Refer to Section
64. r body Adjust the zero potentiometer refer to Figure 3 6 until the desired output signal is obtained Note 1 If the valve has been disassembled and any of the following parts have been replaced the control valve adjusting procedure in Section 4 4C must be performed before the Model 5851E is calibrated orifice valve stem plunger lower guide spring valve seat Note 2 Calibration of the Model 5851E mass flow controller requires the use of a digital voltmeter DVM and a precision flow standard calibrator such as the Brooks Vol U Meter It is recommended that the calibration be performed only by trained and qualified service personnel Note 3 If the mass flow controller is to be used on a gas other than the calibration gas apply the appropriate sensor conversion factor Size the orifice for actual operating conditions CAUTION For the card edge model do not ground Pin 10 with the 5Volt reference enabled Irreparable damage to the PC board may result Note 4 If Brooks secondary electronics are being used as a power supply during the calibration the 5 V reference must be enabled on the Card Edge version for proper operation see Section 2 12 Remember to deactivate the 5 V reference before installing the calibrated mass flow controller in the system where Terminal 10 is grounded a With the controller installed in an unpressurized gas line apply power and allow approximately 45 minutes for warm up During the warm up
65. replacement assembly should be replaced in the same orientation as the original restrictor Assembly Procedure 1 Select the proper restrictor element combination 2 When handling restrictor elements use care to insure that they are not contaminated with dirt grease oil etc The use of rubber gloves is recommended 3 Put a lightly O ring onto the header plate The restrictor assembly can then be installed in the MFC body restrictor element s go in first It is important that the restrictor assembly is put into the body in the correct orientation Refer to Figure 4 6 Push this assembly in with your fingers Do not use an arbor press or hammer to install the restrictor assembly The restrictor assembly should be pushed in until it bottoms out Do not force it beyond this point 4 Place the end block O ring in position and install the end block with the 4 hex socket screws Tighten these screws to 49 inch lbs Do not over tighten CAUTION The end block screws 31 and the valve screws 3 are not interchangeable The end block screws are stronger and are needed to achieve the pressure rating The end block screws are darker in color and can be attracted by a magnet 5 Install the inlet adaptor fitting Table 4 5 Restrictor Selection Guide Range slpm Restrictor Element Part Number Nitrogen Equivalent Flow Combination 4 6 to 15 1 40 micron 1 inch S613E604BMT 15 to 26 S613E636BMT 26 to 42 S613E523BMT S613E526BMT
66. s 15 Vdc 15 350 mA 15 Vdc 5 350 mA 10 5 watts power consumption Class III Equipment The dc Mains input shall be supplied from a SELV Separated Extra Low Voltage source Ambient Temperature Limits Operating 40 F to 150 F 5 C to 65 C Non Operating 13 F to 212 F 25 C to 100 C Working Pressure 1500 psi 10 342 MPa maximum Differential Pressure 10 to 50 psi minimum pressure drop depends on gas and range Refer to Orifice Sizing Section 4 6 Output Signal 0 5 Vdc into 1000 ohms or greater Maximum ripple 3 mV 5 Volt Reference Output 5 Volts 0 2 Maximum load 1 k ohms Temperature Sensitivity Zero Less than 0 075 F S per degree C Span Less than 1 0 F S shift over 10 50 C range Power Supply Sensitivity 0 09 full scale per power supply voltage variation 1 3 Section 1 Introduction Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2008 Mounting Attitude Sensitivity 10 596 maximum full scale deviation after re zeroing Command Input 0 5 Vdc Input resistance 200 k ohm Leak Integrity 1 x 10 Atm scc sec Helium Control Range 50 to 1 Mechanical Connection Refer to Figure 2 1 Electrical Connection Card Edge 20 terminals gold over low stress nickel plated copper D Connector 15 pin DA 15P Environmental Conditions Installation Category I Pollution Degree 2 Humidity 50 8096 Relative Humidity Meter Altitu
67. screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to a earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to a earth ground For pin configuration Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M sico Fecha Enero 1996 Los equipos de Brooks el ctricos electr nicos en relaci n con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magn tica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de sefial cuando se va a utilizar un equipo con marca CE Calidad del cable de se al prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la certificaci n CE Si usted adquiere su propio cable de sefial deber a usar un cable que est completamente protegido en su conjunto con un apantallamiento del 100 Cuando utilice conectores del tipo D Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deber n utiliz
68. se Set command potentiometer for 0 of flow c Repeat Steps a and b until the fast response flowmeter output signal meets the specified response requirements Note With the above equipment the anticipate potentiometer can be adjusted to give optimum response characteristics for any process Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 RDJUST CLOCKHISE D U or a m e OUTPUT VOLTAGE VOLTS bk rm OUTPUT VOLTAGE VOLTS Figure 3 7 Fast Response Adjustment ADJUSTMENT o r E o gt bd ul u c ml o gt 2 a 2 o nor U I foe Y Section 3 Operation Brooks Model 5851E ADJUST COUNTER CLOCKHISE 3 11 3 12 Section 3 Operation Brooks Model 5851E THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Installation and Operation Manual Section 4 Maintenance X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E 4 1 General No routine maintenance is required on the Model 5851E If an in line filter is used the filtering element should periodically be replaced or ultrasonically cleaned 4 2 Troubleshooting A WARNING METER CONTROLLER SEAL COMPATIBILITY Products in this manual may contain metal or elastomeric seals gaskets O rings or valve seats It is the user s responsibility to select ma
69. service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www BrooksInstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas B 1 888 554 FLOW C IsO Europe 31 318 549 290 Within Netherlands Z 0318 549 290 Asia B 011 81 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specificat
70. ses is not strongly pressure and or temperature dependent However gas conditions that vary widely from these reference conditions may cause an additional error due to the change in specific heat caused by pressure and or temperature The Orifice Sizing Nomograph Table 4 4 is used to calculate the control valve s orifice size when changing any or all of the following factors from the original factory calibration gas operating pressure inlet and outlet flow range The flow controller s orifice is factory sized to a preselected gas operating pressure and flow range Note that the orifice is marked with its size in thousandths of an inch When changing the aforementioned factors calculate the new orifice size by following the procedure and example outlined in the following paragraphs Example Determine the orifice size for the following conditions Gas Hydrogen Flow Rate 2 000 sccm Outlet Pressure 30 psig Inlet Pressure 50 psig 1 Determine Nitrogen equivalent flow rate refer to Table 4 3 18 GAS Q Quis x 18 NITROGEN NITROGEN OR SG Q Us SG NITROGEN GAS NITROGEN Installation and Operation Manual Section 4 Maintenance X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E Table 4 4 Orifice Sizing Nomograph De lim BASE LINE Pinlpsial 485 1500 1405 1200 10 CAUTION REPRODUCTION OF THIS CHART MAY SERIOUSLY AFFECT ITS ACCURACY NOTE AIR EQUIVALENT F
71. ssary perform the zero adjust ment procedure Section 3 3 If the output signal will not zero properly refer to the sensor troubleshooting section and check the sensor If the sensor is electrically functional the printed circuit board is defective and will require replacement Connect the controller to a source of the gas on which it was originally calibrated Command 100 flow and adjust the inlet and outlet pres sures to the calibration conditions Verify that the output signal reaches and stabilizes at 5 000 Volts Vary the command voltage over the 2 to 100 range and verify that the output signal follows the setpoint Apply 15 Volts to the valve override input refer to Figs 2 3 and 2 4 for terminal assignments and verify that the output exceeds 5 000 Volts Apply 15 Volts to the valve override terminal and verify that the output signal falls below 0 100 Volts If possible connect a flow measurement device in series with the mass flow controller to observe the actual flow behavior and verify the accuracy of the mass flow controller If the mass flow controller functions as described above it is functioning properly and the problem is most likely elsewhere Table 4 1 lists possible malfunctions which may be encountered during bench troubleshooting C Sensor Troubleshooting If it is believed the sensor coils are either open or shorted troubleshoot using Table 4 2 If any of the steps do not produce expected results the sens
72. ssembly O rings 17 from the flow controller body 14 Using the Brooks O ring removal tool will help prevent scratching the sealing surface 12 Remove the adapter fittings 27 from the flow controller body 14 13 Remove the 4 screws 31 from the end block 30 and carefully remove the end block 14 Remove the restrictor assembly 21 from the inlet side of the flow controller body 14 using the header removal tool Section 5 Table 5 2 Note the rotational position of the restrictor assembly Refer to Section 4 7 B ASSEMBLY A CAUTION Do not get Halocarbon lubricant on the restrictor element 21 or hands Rubber gloves are recommended This is a special inert lubricant which is not easily removed Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Section 4 Maintenance Brooks Model 5851E TOP VIEW Figure 4 1 Torque Sequence for the Valve Retainer Plate Note It is recommended that all O rings be replaced during controller assembly All O rings should be lightly lubricated with Halocarbon lubricant part of O ring kit Section 5 prior to their installation 1 Examine all parts for signs of wear or damage replace as necessary 2 Place the restrictor O ring on the restrictor assembly Screw the restrictor assembly 21 into the inlet side of the flow controller body using the restrictor took tighten hand tight CAUTION The following steps must
73. ste dalla direttiva per la Compatibilit Elettomagnetica Direttiva EMC 89 336 EEC E richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE Qualit dei cavi di segnale e dei relativi connettori Brooks fornisce cavi di elevata qualit che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 100 connettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale per entrambe le estemit Lo schermo deve essere collegato ad un terminale di terra I connettori Card Edge sono normalmente non metallici cavo impiegato deve comunque avere una schermatura del 10096 per soddisfare la certificazione CE Lo schermo deve essere collegato ad un terminale di terra Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento Nederlands Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Onderwerp Addendum voor Instructie Handboek Referentie CE certificering voor Mass Flow Meters amp Controllers Datum Januari 1996 Dames en heren Alle CE gemarkeerde elektrische en
74. t 10 Feet 25 Feet 50 Feet S124Z469AAA S124Z470AAA S124Z471AAA S124Z472AAA S124Z361AAA S124Z362AAA S124Z363AAA S124Z435AAA Connector on one end with Connector for Model 5870 Series Secondary Electronics on other end 5 Feet 10 Feet 25 Feet 50 Feet Card Edge D Connector S124Z669AAA S124Z539AAA S124Z562AAA S124Z670AAA S124Z576AAA S124Z577AAA S124Z578AAA S124Z579AAA 8 32 Mounting Screw Customer Supplied End block with integral inlet screen S079Z200AAA Screw End block 751Z105AA0 QTA Viton SUA Buna TTA Kalrez AR As Required NS Not Shown Table 5 2 Tool and Spare Kits for Model 5851E 5850 Series Service Tool Kit P N S778D017AAA Permits the complete disassembly of the 5850E Series for servicing Contains 1 O ring Removal Tool 1 Potentiometer Adjustment Tool 1 Ball Point Allen Wrench 1 Nut Driver for Orifice 1 Restrictor Removal Tool 1 Common Screw Driver 5850 Series Break Out Board Assembly P N S273Z649AAA for Card Edge version S273Z668AAA for D Connector version Installs directly between mass flow controller and interconnecting cable Allows convenient access to all signals for easy troubleshooting of system Contains 1 Break Out PC Board 1 5 foot Extension Cable 1 Terminal PC Board QTA Viton SUA Buna TTA Kalrez Model 5851 Header Removal Tool P N S817Z036AAA Model 0550 5851 Orifice Removal
75. t as it decays c The behavior of the flow signal during this transition between 10096 and 0 flow indicates the adjustment required of the anticipate potentiometer Refer to Figure 3 7 1 Ifthe flow signal decays to 05 to 5 V then rises to 0 V the anticipate potentiometer is properly adjusted 2 Ifthe flow signal decays rapidly and goes below 5 V before rising to O V the anticipate potentiometer must be adjusted clockwise and Steps a and b repeated 3 Ifthe flow signal decays slowly and does not go below 05 V the anticipate potentiometer must be adjusted counterclockwise and Steps a and b repeated Fastresponse adjustment 3 second response specification guaran teed Adjustment of the anticipate potentiometer to obtain a flow rate perfor mance to be within 296 of flow rate commanded in less than 3 seconds after set point change requires the use of a fast response flowmeter 500 millisecond response to be within 0 2 of final value or better in series with the Model 5851E and a storage oscilloscope or recorder a Make a step in command to the controller from 0 to 100 of full scale flow and record the output signal of the fast response flowme ter b If this signal shows more than 496 overshoot adjust the anticipate potentiometer 1 2 to 1 turn counterclockwise If the signal does not show overshoot but is not within 296 full scale of final value after 3 seconds adjust the anticipate potentiometer 1 2 to 1 turn clockwi
76. t not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS CMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properly exhibit early failure Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG N PIGONSOMIGOSSBS TE Dear Customer We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process
77. te Transducer Input Accessed via Terminal 5 on the Card Edge or Pin 15 on the D Connector version This feature allows the use of the integral control electronics and valve with the signal from an external 0 5 Vdc signal The mass flow signal from the Model 5851E is still available for process monitoring This function is jumper selectable Refer to Section 2 9 a Apply power to the controller and allow approximately 45 minutes for the instrument to warm up and stabilize its temperature b Turn on the gas supply c Command 0 flow and observe the controllers output signal If the output is not 0 mVdc 10 mVde check for leaks and if none are found refer to the zero adjustment procedure in Section 3 3 d Set the command for the desired flow rate to assume normal operation Each Model 5851E is factory adjusted to provide a O 10 mVdc signal at zero flow The adjustment is made in our calibration laboratory which is temperature controlled to 21 1 C 70 F 2 F After initial installation and warm up in the gas system the zero flow indication may be other than the factory setting This is primarily caused by changes in temperature between our calibration laboratory and the final installation The zero flow reading can also be affected to a small degree by changes in line pressure 3 3 and mounting attitude Section 3 Operation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG Brooks Model 5851E November 2
78. terials that are compatible with their process and process conditions Using materials that are not compatible with the process or process conditions could result in the Meter or Controller leaking process fluid outside the pressure boundary of the device resulting in personnel injury or death It is recommended that the user check the Meter or Controller on a regular schedule to ensure that it is leak free as both metal and elastomeric seals gaskets O rings and valve seats may change with age exposure to process fluid temperature and or pressure A CAUTION The end block screws 31 and the valve screws 3 are not interchangeable The end block screws are stronger and are needed to achieve the pressure rating The end block screws are darker in color and can be attracted by a magnet A System Checks The Model 5851E is generally used as a component in gas handling systems which can be quite complex This can make the task of isolating a malfunction in the system a difficult one An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime If possible make the following system checks before removing a suspected defective mass flow controller for bench troubleshooting or return especially if the system is new 1 Verify a low resistance common connection correct power supply voltage and that signals are reaching and leaving the controller The breakout board P N S273Z649AAA Card Edge version or P N S273
79. tion 4 Maintenance Brooks Model 5851E Outlet Pressure 30 psig 14 7 44 7 psia Inlet Pressure 50 psig 14 7 64 7 psia 3 Determine Critical Pressure Drop Critical pressure drop occurs when the outlet pressure psia is less than half the inlet pressure psia or P outlet lt P inlet 2 If these conditions exist the pressure drop Ap should be calculated as follows Ap Pressure drop psi P Inlet pressure psia If these conditions do not exist pressure drop equals the inlet pressure minus the outlet pressure 64 7 psia Is 44 7 psia lt 2 No 2 Then Ap 64 7 44 7 20psi 4 Using the nomograph locate the pressure drop psi on the vertical line marked Ap Point A Figure 4 4 Example Nomograph 4 17 4 18 Section 4 Maintenance Brooks Model 5851E 4 7 Restrictor Sizing Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 5 Locate the Nitrogen equivalent flow rate sccm Nitrogen on the vertical line marked Q Point B 6 Drawa line connecting Ap and Qi and extend it to the baseline Mark this point Point C 7 Locate inlet pressure psia on the vertical line marked P Point D 8 Draw a line connecting P Point D and baseline Point C and then extend this line to the vertical line marked D orifice diameter inches Point E 9 This point on the line is the minimum orifice size for the given conditio
80. tion and introduce an additional dynamic seal that is a potential leak site and source for contamination Refer to Figure 4 2 for spacer locations The preload determines the initial force that is required to raise the valve seat off the orifice and start gas flow If the preload is insufficient the valve will not fully close and gas will leak through If the preload is excessive the magnetic force generated between the plunger and stem will be insufficient to raise the plunger and the valve will not open The airgap is the space between the top of the plunger and stem The airgap determines the force between the plunger and stem at a given voltage and the total travel of the valve If the airgap is too small the plunger travel may be insufficient to fully open the valve also the magnetic force may be too high for a given valve coil voltage If the airgap is too large the magnetic force will be insufficient to raise the plunger and the valve will not open Note Prior to starting the valve adjustment procedure check to insure that the orifice is properly seated and that the valve parts are not bent or damaged 1 Adjustment Procedure Refer to Section 5 Spare Parts for spacer kit a Remove the electronics cover 23 from the controller Insure that the connector from the coil assembly 2 is properly reconnected to the PC Board after the electronics cover is removed b Perform the electrical and gas connections to the controller following t
81. um recommended porosity for each flow range It is recommended that the minimum micron porosity that does not limit the full scale flowrate be used Electrical Interfacing To ensure proper operation the Model 5851E must be connected per Figures 2 3 and 2 4 and configured according to Sections 2 6 and 2 12 At a minimum the following connections must be made for new installations Chassis Ground 0 5 Volt Signal Common 0 5 Volt Signal Output 15 Vdc Supply 15 Vdc Supply Command Input Command Common Supply Voltage Common For installations which replace Unit Instruments UFC 1000 s Card Edge version Pin 10 is frequently grounded In these situations the 5 Volt reference output must be disabled Refer to Section 2 12 For installations which will be connected to Brooks secondary electronics the Card Edge version must have the 5 Volt reference enabled on Pin 10 Refer to Section 2 12 If the Model 5851E was shipped as a system with Brooks secondary electronics then the electronics will already be configured properly Note To obtain access to the jumpers for the following options the electronics cover can must be removed Remove the can by removing the three screws and the valve connector The can must be replaced before returning the unit to service Installation and Operation Manual Section 2 Installation X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E Span Zero Adjustments CARD EDGE
82. vember 2008 Brooks Model 5851E 1 1 Purpose AAA A AAA AA The Brooks Model 5851E Flow Controller is a mass flow measurement device designed for accurately measuring and rapidly controlling flows of gases This instruction manual is intended to provide the user with all the information necessary to install operate and maintain the Model 5851E Mass Flow Controller This manual is organized into five sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance Section 5 Replacement Parts It is recommended that this manual be read in its entirety before attempting to operate or repair the Model 5851E 1 2 Description The Brooks Model 5851 E Mass Flow Controller is used widely in the Semiconductor Industry as well as many others where manual electronic or computer controlled gas handling occurs The Model 5851 E consists of three basic units a flow sensor a control valve and an integral electronic control system This combination produces a stable gas flow which eliminates the need to continuously monitor and readjust gas pressures Standard features include FAST RESPONSE CONTROL permits rapid gas settling times with little or no over undershoot Refer to Figure 1 1 SOFT START provides a flow ramping function which slows down the introduction of the process gas for those processes which cannot tolerate rapid flow transition Refer to Section 2 6 and Figure 1 2 VALVE OVERRID

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