ABL1000 Series Stage User`s Manual
Contents
1. At times the buyer may desire to expedite a repair Regardless of warranty or out Rush Service of warranty status the buyer must issue a valid purchase order to cover the added rush service cost Rush service is subject to Aerotech s approval www aerotech com Appendix A 23 Warranty and Field Service On site Warranty Repair On site Non warranty 24 Repair Company Address ABL1000 Series Stage User s Manual If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be warranty related then the following policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs For warranty field repairs the cus tomer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special service rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply If any Aerotech product cannot be made functional by telephone assistance or pur chased replacement parts and cannot be returned to t2. 7 Dimensions 2 22 20 0222 ee ee ee ee eee eee 3 E Electrical Installation 14 Environmental Specifications 15 I Inspection Schedule 02222 21 L Lubrication c c c 24 220 as dese ouattced ede sues 21 P Preparing the Mounting Surface 10 S safety procedures 02 ecceeeeccceeccceees 5 Securing the Stage to the Mounting Surface 11 Specifications 0 0 0 00 02 22222 eee eee 16 Standard Features 0 02 2222 20222 1 U Unpacking and Handling the Stage 9 www aerotech com Index 27 ABL1000 Series Stage User s Manual Index 28 Index www aerotech com Reader s Comments ABL1000 Series Stage Manual P N EDS106 March 2 2011 Revision 1 02 00 Please answer the questions below and add any suggestions for improving this doc ument AEROTECH Is the manual Adequate to the subject O VE Well organized O a Clearly presented O ooo Well illustrated O oo How do you use this document in yourjob Does it meet your needs What improvements if any would you like to see Please be specific or cite examples A ran Re A O I a company Name bate Sie O O e somero o Aerotech Subsidiary Email Order maityour comments to Faxto gt Aerotech Inc 412 967 6870 101 Zeta Drive Pittsburgh PA 15238 U S A service aerotech com
3. ABL10100 100 0 4 00 310 0 12 20 85 0 3 35 140 0 5 51 Figure 1 2 ABL1000 Dimensions www aerotech com Chapter 1 3 Overview ABL1000 Series Stage User s Manual 47 5 1 87 100 0 3 94 SQ DIMENSIONS MILLIMETERS INCHES 5 8 0 228 THRU STAGE MOUNTING HOLES 4 PLACES 5 x 0 8 THD x 5 0 197 DP 8 PLACES 72 5 2 85 260 0 10 23 pArA 260 0 10 23 195 0 A 87 0 3 42 100 0 3 94 eres 140 0 5 51 60 0 2 36 aj 48 7 1 92 67 5 2 66 Hei 0 0 98 260 0 10 23 Figure 1 3 ABL1000 XY Dimensions 4 Chapter 1 www aerotech com ABL1000 Series Stage User s Manual Overview 1 3 Safety Procedures and Warnings The following statements apply throughout this manual Failure to observe these precautions could result in serious injury to those performing the procedures and damage to the equipment This manual and any additional instructions included with the stage should be retained for the lifetime of the stage gt DANGER gt DANGER gt DANGER A DANGER D D D Z Z Z Z Z Z O O O To minimize the possibility of electrical shock and bodily injury or death disconnect all elec trical power prior to making any electrical connections To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit is in use ensure that no person comes in contact with the circui
4. 2 6 for air requirements To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER 4 1 Service and Inspection Schedule Aerotech recommends that the ABL1000 be inspected once per month until a trend develops for the specific application and environment 4 2 Cleaning and Lubrication There are no elements on the ABL1000 that require lubrication Periodic cleaning to remove dust is rec ommended 4 2 1 Recommended Cleaning Solvents Before using a cleaning solvent on any part of the stage it is recommended that clean dry compressed air is used to blow away small particles and dust All encoder surfaces and magnet tracks should be cleaned with isopropyl alcohol Aluminum hardcoated metal surface may be cleaned with acetone Acetone should not be used on magnet tracks because it could break down the epoxy that holds the magnets in place Table 4 1 Recommended Cleaning Solvents hem Recommended Cleaner Encoders Magnets Isopropyl Alcohol www aerotech com Chapter 4 21 Maintenance ABL1000 Series Stage User s Manual 4 2 2 Cleaning Process It is recommended that all air bearing surfaces are cleaned often to prevent damage to the stage or decreased performance The entire stage should be blown with clean dry compressed air often to prevent dust from building up in the linear motors encoders and air bearing surfaces Due to the non
5. ______________ HALLA Hall Effect A Brushless motor commutation track output TTL line driven signal with rotary motor HALL B Hall Effect B Brushless motor commutation track output TTL line driven signal with rotary motor HALL C Hall Effect C Brushless motor commutation track output TTL line driven signal with rotary motor MK Marker Incremental encoder output pulse given once per revolution Typically used for home reference cycle N R Incremental encoder output either the compliment of Marker with a line driven TTL type encoder or 2 5 V DC bias level with amplified sine wave type encoder 3 6 Vacuum Operation The ABL1000 is an air bearing stage and is not compatible with operation in a vacuum environment Please contact Aerotech for alternate solutions 20 Chapter 3 www aerotech com ABL1000 Series Stage User s Manual Maintenance Chapter 4 Maintenance The ABL1000 series stages are designed to be maintenance free positioning systems Due to the non con tact air bearing design there are no friction surfaces or dynamic seals to wear or require lubrication However it is important to clean the bearing surfaces and encoder strips to maintain the accuracy of the stage This chapter will detail the cleaning process and specify recommended cleaning solvents N OTE The bearing area must be kept free of foreign matter and moisture otherwise the performance and life expectancy of the stage will be reduced See Section
6. conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms current consult Aerotech 4 Force Constant and Motor Constant specified at stall 5 All performance and electrical specifications 10 6 Maximum winding temperature is 125 C 7 Ambient operating temperature range 0 C 25 C consult Aerotech for performance in elevated ambient temperatures 8 All Aerotech amplifiers are rated Apk use torque constant in N m Apk when sizing www aerotech com Chapter 3 17 Operating Specifications ABL1000 Series Stage User s Manual 3 3 Load Capability TBD 3 4 Limit Switch Wiring ABL1000 series stages are provided with a hall effect limit switch The limit switch signals when the stage has reached its maximum useable travel distance in all directions The limit switch is mounted to a small cir cuit board within the stage and two magnets used as triggers are mounted to the bottom of the stage table If the stage is driven approximately 7 5mm beyond the electrical limit it will encounter a mechanical stop Although the operating speed of the stage may be relatively slow damage to the stage could result WARNING 3 4 1 Limit Switch Operation The limit switch is mounted on a small printed circuit board Standard ABL1000 Stages include limit switch wiring integrated into the main wiring connec
7. ABL1000 Series Stage User s Manual P N EDS106 Revision 1 02 00 Dedicated to the Science of Motion Aerotech Inc 101 Zeta Drive 7 Pittsburgh PA 15238 AEROTECH Phone 412 963 7470 Fax 412 963 7459 www aerotech com Product Registration Technical Support Revision History Register online at http www aerotech com prodreg cfm United States Headquarters Phone 412 967 6440 Fax 412 967 6870 Email service aerotech com United Kingdom Phone 44 118 940 9400 Fax 44 118 940 9401 Email service aerotech co uk Germany Phone 49 911 967 9370 Fax 49 911 967 93720 Email service aerotechgmbh de Japan Phone 81 0 47 489 1741 Sales Phone 81 0 47 489 1742 Service Fax 81 0 47 489 1743 Email service aerotechkk com jp China Phone 852 3793 3488 Email saleschina aerotech com Revision 1 02 00 March 2 2011 Revision 1 01 00 January 5 2009 Revision 1 00 00 February 9 2006 Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies Aerotech Inc 2011 ABL1000 Series Stage User s Manual Table of Contents Table of Contents Table or ones a o A wee ee a E iii Er Aa V Er IIA E E EE EE EE A E ETAT vii Chapter 1 Overview 0 000 0c coco eee cece cece ec ee cece cece renee renere renere ere nerne 1 1 1 Standard Features 2222 0 o occ ccc ccc nee e cece cece cece cece eee ceeeeeeeeeee
8. Bearing Surfaces Stage Table Shipping Clamp Air Inlet Figure 2 2 ABL1000 Stage Showing Air Inlet www aerotech com Chapter 2 11 Installation ABL1000 Series Stage User s Manual gt Stage Mounting Holes Figure 2 3 The Stage Table Must BE Moved to Access All Mounting Holes 12 Chapter 2 www aerotech com ABL1000 Series Stage User s Manual Installation 2 4 Attaching the Payload to the Stage To prevent damage to payloads test the operation of the stage before the payload is attached to the stage table Proceed with the electrical installation and test the motion control system in accordance with the sys tem documentation Document all results for future reference For information on electrical connections refer toSection 2 5 Chapter 4 Maintenance and the documentation delivered with the stage The payload should be flat rigid and comparable to the stage in quality NOTE For valid system performance the mounting interface should be flat within 1 um per 25 mm There are several mounting holes provided on the stage table to mount payloads Shown in Figure 2 4 are the available mounting holes for payload and fixture mounting The payload mounting holes are M5 x 0 8 and have reinforced threads to allow frequent removal and installation of mounting screws On a single axis stage or the upper axis of a multi axis stage the multi axis stage mounting holes may also be used for payload mounting if necessary It is not re
9. ard Stage Wiring ccc eee cece adira ra eee eceececececceeeeeees 19 3 6 Vacuum Operation 2 222 coe cece ccc cece nnnnnnnnnes 20 Chapter 4 Maintenance saae cece ec Da a aa 222211 21 4 1 Service and Inspection Schedule 22 2 2 ec eee cece cccccecccccccccceeececcccceeecececceeeees 21 4 2 Cleaning and Lubrication 0000 20 cece eee cece cece cece cece cece e ee eee eee eeeeeeeeeeeeaes 21 4 2 1 Recommended Cleaning Solvents 0 0 0 2c cece e eee ce eee e eee e ee eeeeeeeeeees 21 4 2 2 Cleaning Process oo cece cece ccc cc cece cccceccecceccececceceeeeeeeeeeeeeeees 22 Appendix A Warranty and Field Service 2 0 0 0 0 0 cece cece cece cece cece eee 23 Appendix B Technical Changes sure esserne 25 AAA re E e 27 Readers Comments o oo o oo ooo ccc e cece cece eee ccececcececeecececceceseeceeees 29 www aerotech com iii Table of Contents ABL1000 Series Stage User s Manual iV www aerotech com ABL1000 Series Stage User s Manual List Of Figures List of Figures Figure 1 1 Figure 1 2 Figure 1 3 Figure 2 1 Figure 2 2 Figure 2 3 Figure 2 4 Figure 3 1 Figure 4 1 ABL1000 Series Positioning Stage in XY Configuration 0 00000 cece eee ee eee eee 1 ABL1000 Dimensions etica dais tac idan 3 ABL1000 XY Dimensions 1 2 2 2 20 0 cee cccc ccc eeccccceccecccccceceeecccccceceeeecccceeees 4 Results of Flat Versus Non Flat Mounting 20 cc
10. berg Alex Weibel los Neho tb Engineer Verifying Compliance Pittsburgh PA March 2 2011 www aerotech com Chapter 1 7 Overview ABL1000 Series Stage User s Manual 8 Chapter 1 www aerotech com ABL1000 Series Stage User s Manual Installation Chapter 2 Installation This chapter describes the installation procedure for the ABL1000 stage including handling the stage prop erly preparing the stage environment securing the stage to the mounting surface attaching the payload and making the electrical connections Installation must follow the instruction in this chapter Failure to follow these instructions could result in injury and damage to the equipment WARNING 2 1 Unpacking and Handling the Stage Carefully remove the stage from the protective shipping container Before operating the stage it is important to let the stage to stabilize at room temperature for at least 12 hours It is also important to clean the stage by blowing it off with pressurized nitrogen or clean oil less air Before the stage can be operated the shipping clamps must be removed These are the only red anodized parts on the stage and must all be removed see Figure 2 2 Save the shipping clamps to be used for long term storage of the stage or return shipping for service The stage should be lifted from the bottom of the base Do not attempt to lift or move the stage from the table Each stage has a label listing the system part number and
11. ble 4 1 Recommended Cleaning Solvents 00 cece cece cece eee eeeeeeeeeeeeeeeeeeeeeeeeeeees 21 Table B 1 Current Changes 1 02 00 2 00 e cece cece cece ccc ccecceeeeeeeeeeeeeeeeeteeeeeeeeees 25 Table B 2 Archived Changes 2 2 2 eee eee cece cece nn nro ecccccccccccecceccecccceececceeeeeeeeeeeee 26 www aerotech com vii List of Tables ABL1000 Series Stage User s Manual viii www aerotech com ABL1000 Series Stage User s Manual Overview Chapter 1 Overview This chapter introduces standard and optional features of the ABL1000 stages and gives general safety pre cautions The ABL1000 series supports travel distances ranging from 25 mm to 150 mm 1 in to 6 in and are our high est performance miniature air bearing stages 1 1 Standard Features The ABL1000 series stages all incorporate completely non contact air bearing surfaces linear motors and feedback devices to provide a completely maintenance free stage There is no mechanical contact to become worn or require lubrication making these stages ideal for clean room and medical applications The ABL1000 incorporates preload on both vertical and horizontal surfaces This increases the stiffness of the air film The brushless linear motor uses an ironless forcer which means there is zero cogging and no attractive forces resulting in unsurpassed smoothness of motion This is especially useful in applications where velocity control is important N OTE A
12. ccceeeecccceceeccccccecceececcceeees 10 ABL1000 Stage Showing Air Inlet 20 22 2000 c cece cece tence ee eeeeeeeees 11 The Stage Table Must BE Moved to Access All Mounting Holes 0 022 202 12 Available Mounting Holes in Stage Table 2 0 2 2 cece eee cece cece eee ee eee ee ee nerne 13 Limit Switch Wiring 2 2 ccc cece cece cece ec ccccccececcccccceeeeccccceceeeecccceeeeeeeeeees 18 Air Bearing Surfaces Require Periodic Cleaning cccccccecececcccceceeececees 22 www aerotech com V List of Figures vi ABL1000 Series Stage User s Manual www aerotech com ABL1000 Series Stage User s Manual List of Tables List of Tables Table 1 1 Ordering Example ABL10100 LT 2 0 e eee ennen ccc ccecccceceeceeeeeeeeeeeeees 2 Table 1 2 Model Numbers and Ordering Options 0 cece cece cece ee ennen ennen ennen nere 2 Table 3 1 Environmental Specifications 2 0 0c cece ccc ccccceececcccceccccececccececeeeeceerees 15 Table 3 2 ABL1000 Series Specifications 2 2 0 02 e cece ccccccecceccccececceccececeeceececeerees 16 Table 3 3 ABL1000 Motor Specifications 2 0002 e cece ccccceeeeececcececeeceeeceeeceeeecereres 17 Table 3 4 Connector Pinouts for ABL1000 Single Axis Stage 2 20 0 2 ec ceeceeeeecccccececceccceeees 19 Table 3 5 Motor Wiring Pinout Descriptions 2 2 2 2c ccc cce cece ccc cccceecccccccececcccceceeeeececees 20 Ta
13. commended that these holes be used for fixtures or payloads that require constant removal and installation because the threads are not reinforced and may become damaged over time Payload Mounting Holes Q Multi Axis Stage Mounting Holes rx fat o pa e Figure 2 4 Available Mounting Holes in Stage Table www aerotech com Chapter 2 13 Installation ABL1000 Series Stage User s Manual 2 5 Electrical Installation Aerotech motion control systems are adjusted at the factory for optimum performance When the ABL1000 series stage is part of a complete Aerotech motion control system setup involves connecting a stage to the appropriate drive chassis with the cables provided Connect the provided cable to the electrical connector on the stage Labels on the drive indicate the appropriate connections Refer to your drive manuals and doc umentation for additional installation and operation information In some cases if the system is uniquely con figured a drawing showing system interconnects is supplied See Section 3 5 for wiring diagrams connector pin labels and pin descriptions Never connect or disconnect any electrical component or connecting cable while power is applied or serious damage may result WARNING 2 6 Air Requirements The air supply to the air bearing is important for the operation of the system If compressed air is used it must be filtered to 0 25 microns dry to 0 F dewpoint and oil free If nitro
14. contact design these surfaces operate very close together allowing dust to easily buildup and cause damage In order to access the entire length of the air bearing surfaces it will be necessary to move the stage Begin with the stage at one end of travel and remove power Clean all accessible surfaces using a clean lint free cloth soaked in solvent being sure that the correct solvent is used on each surface see Table 4 1 Once the cleaner has dried completely restore power and move the stage to the opposite end of travel This should expose all previously covered surfaces Remove power and repeat the cleaning process Restore power to the stage only once all solvents have dried completely Air Bearing Surfaces Figure 4 1 Air Bearing Surfaces Require Periodic Cleaning Be sure that all solvent is completely evaporated before attempting to move the stage Even the slightest amount of solvent could cause damage to the air bearing surfaces clog the air ducts or damage the electronics of the stage WARNING 22 Chapter 4 www aerotech com ABL1000 Series Stage User s Manual Warranty and Field Service Appendix A Warranty and Field Service Aerotech Inc warrants its products to be free from defects caused by faulty mate rials or poor workmanship for a minimum period of one year from date of shipment from Aerotech Aerotech s liability is limited to replacing repairing or issuing credit at its option for any products that are retur
15. e using this stage perform an operator risk assessment to determine the needed safety requirements Chapter 1 www aerotech com ABL1000 Series Stage User s Manual Overview 1 4 EC Declaration of Incorporation Manufactorer Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 USA AEROTECH Ww herewith declares that the product Aerotech Inc ABL1000 Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006 42 EC as amended does therefore not in every respect comply with the provisions of this directive and that the following harmonized European standards have been applied EN ISO 12100 1 2 2003 A1 2009 Safety of machinery Basic concepts general principles for design ISO 14121 1 2007 Safety of machinery Risk assessment Par 1 Principles EN 60204 1 2005 Safety of machinery Electrical equipment of machines Part 1 General requirements and further more declares that itis not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration Authorized Representative Manfred Besold Address Name Position Location Date AEROTECH GmbH S d West Park 90 D 90449 N m
16. eeeeeees 1 1 1 1 Optional Features 22 cence seat sone se ES er dbeeeds bits 2 IA aan rener eeeeeeeeeeeceeeeeeeeeeeees 3 1 3 Safety Procedures and Warnings 2 2 2 0 2222 oe eee 5 1 4 EC Declaration of Incorporation 2 2 0 2 22 0 2 c ccc c cence ecec cece cceeececececeeeeeeeees 7 Chapter 2 Installati0M occ conocio coco conocio 9 2 1 Unpacking and Handling the Stage ooooccccccccccccccccccccccccccccccccccccnncncnnnnnnnnnnnns 9 2 2 Preparing the Mounting Surface oooooococcccccccccccccccccccccccccocconocononoccocccccccccccccos 10 2 3 Securing the Stage to the Mounting Surface 2 22 2 e cece cece cece ceececeeeeees 11 2 4 Attaching the Payload to the Stage 0 2 2 coco ccc ccc ccc ccc ccc cece cece cece ee eeeeeeees 13 2 5 Electrical Installation arr cc eee e cece aoao aaroo ononon nonan 14 2 6 Air Requirements ns 14 Chapter 3 Operating Specifications 2 00 00 o cece e cece eee ec ec ce cece ec ece eee eee 15 3 1 Environmental Specifications 2 2 2 sense ennen nere ere renerne 15 3 2 Basic Specifications acres ds se ne SENE e eee c cece ccc SR eta SEEST 16 3 3 Load Capability TBD ooooocccccccccccccccccccccccccccccccccnccccn cnn cnn cnn 18 3 4 Limit Switch WiFNQ oooooccccccccccccccccccccccccccccccccnnncnn nn 18 3 4 1 Limit Switch Operation 22 22 c ccc une cece cceececceececceeees 18 3 5 Stand
17. erotech continually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com Figure 1 1 ABL1000 Series Positioning Stage in XY Configuration www aerotech com Chapter 1 1 Overview ABL1000 Series Stage User s Manual 1 1 1 Optional Features For applications where two axis motion is required the ABL1000 is available in an XY configuration shown below in Figure 1 1 Two encoder options are available to meet various motion requirements Table 1 1 Ordering Example ABL10100 LT Travel mm Feedback ABL10 100 LT Table 1 2 Model Numbers and Ordering Options High accuracy linear encoder feedback 2 nm resolution amplified sine output 1 Requires clean dry air supply In line under pressure switch provided 2 ABL10025 can only be used in an XY configuration with the ABL10150 as the lower axis 2 Chapter 1 www aerotech com ABL1000 Series Stage User s Manual Overview 1 2 Dimensions 7 47 5 1 87 100 0 3 94 SQ 30 0 1 18 M5 x 0 8 THD x 5 0 197 DP 8 PLACES 05 8 0 228 THRU 1 STAGE MOUNTING HOLES o 4 PLACES Basic Total Dimensions Millimeters Inches O ll ES a BE RR ABL10025 25 0 1 00 235 0 9 25 35 0 1 38 165 0 6 49 ABL10050 50 0 2 00 260 0 10 24 60 0 2 36 140 0 5 51
18. gen is used it must be 99 99 pure and filtered to 0 25 microns The filtration requirement is to prevent particles from clogging the air bearing ori fices which can be as small as a few thousandths of an inch in diameter Air pressure of 80 psi 5 psi is necessary for use Air should be supplied via a 1 4 OD 1 8 ID polyurethane air hose It is recommended that a pressure switch is installed to remove power from the air bearing if pressure drops below 40 psi because the bearing surfaces could be damaged An air flow rate of 0 5 SCFM at 80 psi should be observed single axis 14 Chapter 2 www aerotech com ABL1000 Series Stage User s Manual Operating Specifications Chapter 3 Operating Specifications This chapter contains general technical information about ABL1000 series stages Included are basic product specifications and general information on limit switches and motor wiring 3 1 Environmental Specifications The environmental specifications for the ABL1000 are listed in the following table Table 3 1 Environmental Specifications Ambient Operating 16 to 25 C 61 to 77 F Temperature The optimal operating temperature is 20 C 2 C 68 F 4 F If at any time the operating tem perature deviates from 20 C degradation in performance could occur Contact Aerotech for information regarding your specific application and environment Storage 0 to 40 C 32 to 104 F in original shipping packaging Sto
19. he Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs and the prevailing labor cost includ ing travel time necessary to complete the repair Aerotech Inc Phone 412 963 7470 101 Zeta Drive Pittsburgh PA Fax 412 963 7459 15238 2897 Appendix A www aerotech com ABL1000 Series Stage User s Manual Technical Changes Appendix B Technical Changes Table B 1 Current Changes 1 02 00 Section s Affected General Information Section 1 4 Added section Section 3 1 Added section Chapter 2 Installation Section 2 1 Sec tion 2 3 and Section 1 3 www aerotech com Appendix B 25 Technical Changes ABL1000 Series Stage User s Manual Table B 2 Archived Changes Section s Affected General Information 0000 NewManual 1 01 00 Section 1 2 Added Dimensions section 26 Appendix B www aerotech com Index ABL1000 Series Stage User s Manual Index WwW A WarningS scener rener vennerne 5 Air Requirements 22 22 002 02 14 Attaching the Payload 13 Cc lete o E 24 oo ccek Sees oe le dee lid sides 14 Cleaning 2 22 cee cece cee cee eeees 21 22 Cleaning Solvents cesser 21 D Declaration of Incorporation
20. m 12 0 3 um 12 0 3 um 12 pin 0 5 um 20 pin pin 2 um pin 2 um 6 5 um 200 3 5 um 200 80 pin 80 pin pin pin Repeatability LN 50 nm 2 pin LT 3 50 nm 2 pin 6 100 nm 4 yin Straightness 0 25 um 25 mm 10 pin in and Flatness Max Devi 0 25 um 10 0 25um 10 0 4 um 16 pin 0 4 um 16 pin ation pin pin 1 Maximum speed based on stage capability maximum application velocity may be limited by system data rate and system res olution 2 Max load for XY configuration is 10 0 kg 3 Values with Aerotech controls and HAL option 4 Dependent on flatness of stage mounting surface 5 To protect air bearing against under pressure an in line pressure switch is required and tied to the controller E stop input 6 Air supply must be clean dry to 0 F dew point and filtered to 0 25 um or better recommend nitrogen at 99 99 purity 16 Chapter 3 www aerotech com ABL1000 Series Stage User s Manual Operating Specifications Table 3 3 ABL1000 Motor Specifications Performance Specifications 1 5 Continuous Force 20 psi 1 4 bar 2 N 40 5 Continuous Force No Cooling 2 23 0 Peak Force 2 161 9 Electrical Specifications BEMF Constant line to line max V m sec 3 78 A rms 3 66 Ib A rms 1 05 Motor Constant 2 4 N VW 3 35 Thermal Resistance 20psi 145a FO 1 Performance is dependent upon heat sink configuration system cooling
21. ned by the original purchaser during the warranty period Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer where or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or sub sequently provided or whether or not Aerotech s products are specifically designed and or manufactured for buyer s use or purpose Aerotech s liability or any claim for loss or damage arising out of the sale resale or use of any of its prod ucts shall in no event exceed the selling price of the unit Aerotech Inc warrants its laser products to the original purchaser fora minimum Laser Products period of one year from date of shipment This warranty covers defects in work manship and material and is voided for all laser power supplies plasma tubes and laser systems subject to electrical or physical abuse tampering such as opening the housing or removal of the serial tag or improper operation as determined by Aerotech This warranty is also voided for failure to comply with Aerotech s return procedures Claims for shipment damage evident or concealed must be filed with the carrier Return Procedure by the buyer Aerotech must be notified within 30 days of shipment of incorrect materials No product may be returned whether in warranty or out of warranty with out first obtaining approval from Aerotech No credit will be given nor repairs made for produc
22. ory If machining is required to achieve the desired flatness it should be performed on the mounting sur face rather than the stage base Shimming should be avoided if possible If shimming is required it should be minimized to improve the rigidity of the system It is important that the stage is mounted to a horizontal surface Vertical or side mounted orientations are not recommended and could affect performance Mounting to a slight angle may be possible depending on other loading conditions please contact the factory for details 10 Chapter 2 www aerotech com ABL1000 Series Stage User s Manual Installation 2 3 Securing the Stage to the Mounting Surface In order to mount the stage to the mounting surface the stage table must be moved The following is the pro cedure for moving the table and mounting the stage see Figure 2 3 The stage must be mounted securely Improper mounting can result in injury and damage to the equipment WARNING 1 2 3 4 Supply air to the stage via the air inlet See Section 2 6 for more information on air supply Manually move the stage to one end of travel revealing half of the mounting holes for the stage Mount the stage to the base using M5 screws The number of mounting holes will depend on stage travel Once half the mounting screws have been installed move the stage to the opposite end of travel to access the remaining screws Repeat the installation process for these holes Air
23. rage 30 percent to 60 percent RH non condensing in original packaging Altitude Operating 0 to 2 000 m 0 to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 m or below sea level Use the system in a low vibration environment Excessive floor or acoustical vibration can affect stage and system performance Contact Aerotech for information regarding your specific appli cation Dust Expo The ABL1000 stages are not suited for dusty or wet environments This equates to an ingress sure protection rating of IPOO Humidity Operating 40 percent to 60 percent RH The optimal operating humidity is 50 percent RH Indoor use only Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment WARNING www aerotech com Chapter 3 15 Operating Specifications ABL1000 Series Stage User s Manual 3 2 Basic Specifications For the most recent specifications see Aerotech s website Stage specifications are given in Table 3 2 and motor specifications are given in Table 3 3 Table 3 2 ABL1000 Series Specifications Resolution LN 0 5 nm 0 04 yin Bima LT 2 5 nm 0 2 pin Overall Accu 0 2 um 8 pin 0 2 um 8 0 2 um 8 pin 0 5 um 20 pin racy 3 1 um 40 pin 3 1 um 3 2 um 80 3 5 um 200 yin 40 pin yin yin LT 2 0 3 u
24. serial number These numbers contain information necessary for maintaining or updating system hardware and software Locate this label and record the infor mation for later reference If any damage has occurred during shipping report it immediately Do not attempt to move the stage until the air supply detailed inSection 2 6 has been installed Moving the stage table without air supplied can cause permanent damage to the stage WARNING Improper stage handling could adversely affect the stage s performance Use care when moving the stage Manually lifting or transporting stages can result in injury WARNING www aerotech com Chapter 2 9 Installation ABL1000 Series Stage User s Manual 2 2 Preparing the Mounting Surface The mounting surface should be flat and have adequate stiffness in order to achieve the maximum per formance from the ABL1000 When an ABL1000 series stage is mounted to a non flat surface the stage can be distorted as the mounting screws are tightened This distortion will decrease the overall accuracy of the stage To maintain accuracy the mounting surface should be flat within 1m per 50mm Adjustments to the mounting surface must be done before the stage is secured The effects of flatness on mounting are illus trated in Figure 2 1 y y y Figure 2 1 Results of Flat Versus Non Flat Mounting NOTE The stage base is precision machined and verified for flatness prior to stage assembly at the fac t
25. tor Limit switches on ABL1000 series stages are typically con figured normally closed The input to the controller is seen as a logic 0 typical 0 4V 12 8mA when no limit condition is present When the limit switch is activated a 5V source through a pull up resistor causes a logic 1 typically 4 8 5V to be seen by the controller input 5V Pull up resistor Limit Input to Controller NC Limit Switch Figure 3 1 Limit Switch Wiring 18 Chapter 3 www aerotech com ABL1000 Series Stage User s Manual Operating Specifications 3 5 Standard Stage Wiring Stages come from the factory completely wired and assembled For reference connector pin outputs pin outs and general wiring information is given in the following figures Pinouts are defined in Table 3 5 N OTE Refer to the other documentation accompanying your Aerotech equipment Call your Aerotech rep resentative if there are any questions on system configuration N OTE If you are using your own cables to connect the stage ensure that motor and ground wires can handle current higher than the continuous current listed in Table 3 3 The voltage rating of the wire insulation must be greater than the maximum bus voltage listed in Table 3 3 Table 3 4 Connector Pinouts for ABL1000 Single Axis Stage www aerotech com Chapter 3 19 Operating Specifications ABL1000 Series Stage User s Manual Table 3 5 Motor Wiring Pinout Descriptions Pin Output Description ___
26. try when the stage is connected to a power source To minimize the possibility of bodily injury or death disconnect all electrical power prior to making any mechanical adjustments Moving parts of the stage can cause crushing or shearing injuries All personnel must remain clear of any moving parts Improper use of the stage can cause damage shock injury or death Read and understand this manual before operating the stage If the stage is used in amanner not specified by the manufacturer the protection provided by the stage can be impaired Stage cables can pose a tripping hazard Securely mount and position all stage cables to avoid potential hazards www aerotech com Chapter 1 5 Overview A A A A A A Z Z Z Z Z Z Z Z Z Z Z Z 0 O 0 Q Q Q ABL1000 Series Stage User s Manual Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified Can cause damage to the equipment The stage must be mounted securely Improper mounting can result in injury and damage to the equipment Use care when moving the stage Manually lifting or transporting stages can result in injury Only trained personnel should operate inspect and maintain the stage This stage is intended for light industrial manufacturing or laboratory use Use of the stage for unintended applications can result in injury and damage to the equipment Befor
27. ts returned without such approval Any returned product s must be accompanied by a return authorization number The return authorization number may be obtained by calling an Aerotech service center Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than 30 days after the issuance of a return authorization number will be subject to review After Aerotech s examination warranty or out of warranty status will be deter Returned Product War mined If upon Aerotech s examination a warranted defect exists then the prod ranty Determination uct s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an airfreight return the product s will be shipped collect Warranty repairs do not extend the original warranty period After Aerotech s examination the buyer shall be notified of the repair cost Atsuch Returned Product time the buyer must issue a valid purchase order to cover the cost of the repair and Non warranty Deter freight or authorize the product s to be shipped back as is at the buyer s mination expense Failure to obtain a purchase order number or approval within 30 days of notification will result in the product s being returned as is at the buyer s expense Repair work is warranted for 90 days from date of shipment Replacement com ponents are warranted for one year from date of shipment
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