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Agilent Varian MS-101 X3751A Rotary Vane Pump Manual

1. 398 15 67 win Yd m Dei H E N Li 3 i gt Ht g Be IBSBSRERR RE p 141 5 59 335 13 19 JL 213 8 39 approx from 718 20 51 to 750 28 31 235 9 26 70 2 76 TE Ca g F g i po d x amp 8 E 3 z S S x 3 Pa G Gi N o amp amp N 2 Eu Y I 1 178 7 01 546 21 50 Figure3 MS 101 Outline Dimensions subject to changes depending on motor brand MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 55 110 5 Technical Information Dimensions AT S 9 O Figure 4 56 110 MS 101 Rotational motor direction MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Dimensions mh 50Hz mbar Figure5 MS 101 Graph of delivery capacity vs inlet pressure with 50 Hz motor w
2. Vacuum Products Division Via F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS TEL N FAX N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Ee Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent
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5. In the final length use flexible pipes or pipe fittings WARNING This pipe must be descending to avoid the condensate going back to the tank CAUTION Do not connect ball valves to this pipeline 68 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Electrical Connection WARNING The control panel and electrical connections must be carried out by skilled personnel and conform to the EN 60204 1 rules or any other local regulations in the country of use EOL The electrical equipment must comply with EN 61000 6 4 and 61000 6 2 standards concerning electromagnetic compatibility emission standard and immunity for industrial environments Check the main voltage and frequency in use to correspond to the data stamped on the motor name plate The electrical motor must be protected against overload The full amperage on the motor name plate must be considered when sizing the electrical components and motor protection against overloading Make sure the grounding is correctly done Carry out the electric connection following the diagram shown on the motor terminal box Check direction of rotation by starting the pump for a short time 2 or 3 seconds The correct direction is shown by the arrow on the pump see figure below In case of wrong rotation it is necessary to change the motor rotation by exchanging position of two of the three connections in the motor ter
6. La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche La MS 101 High Capacity Rotary Vane Pump amp una pompa rotative monostadio a palette a tenuta in bagno d olio azionata da un motore elettrico trifase Questa pompa da alto vuoto adatta al pompaggio di gas non corrosivi Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell ap pendice Technical Information Questo manuale utilizza le seguenti convenzioni AVVERTENZA messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali ATTENZIONE messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo 10 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Istruzioni per l uso 1 Immagazzinamento Durante il trasporto e l immagazzinamento della pompa non devono essere superate le seguenti condizioni ambientali temperatura da 1
7. MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 95 110 5 Technical Information Servicing Oil Change Procedure Oil change must be performed when the pump is still warm WARNING Use protective gloves to avoid any injury caused by heat Please refer to Figure Oil change parts identification page 71 Unscrew the oil filling plug E and the discharge plug G only after having placed underneath the pump tank a suitable container proper size and shape for colleting the total amount of oil Once the oil in the tank has completely been discharged tighten both plugs E and G and let the pump run for about one minute so that the lubricating cooling line gets emptied as any oil residual inside the pump Then remove the plugs and discharge the rest of the oil If the oil is polluted or if some water is in the oil clean the pump by letting it run at maximum vacuum level Use for this operation a quantity of oil such as to reach the minimum level reported on the tank Change again the lubricating oil Before filling the pump with fresh oil replace the oil filter Please remember to grease the filter gasket with fresh oil Then screw the new oil filter Fill the pump with fresh oil please see Recommended oil table 96 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Float Valve Cleaning Procedure If the float valve for oil
8. Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next pag Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Date Pg 2 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Vacuum leak High voltage problem Solenoid failure Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full sp
9. by Agilent personnel How to Order Spare Parts When ordering spare parts always state the pump model type serial number year of production electric motor characteristics three phase power voltage frequency position reference on the spare parts list description and quantity needed MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 101 110 5 Technical Information De Commissioning Orderable Parts Tab 9 Orderable parts Description Part number Major Spare Parts Kit for MS 101 models X3751A 60010 Minor Spare Parts Kit for MS 101 models X3751A 60011 Inlet Air Filter with Polyester Cartridge for MS 101 models X3751A 60017 Inlet Air Filter with Polyester Cartridge for 1 1 4 X3751A 60013 gas connection Inlet Air Filter with Polyester Cartridge for 1 1 4 X3751A 60030 NPT connection Inlet Air Filter d Polyester Cartridge with DN 40 X3751A 80014 KF flange connection Connection Fitting Kit for 1 1 4 gas connection X3751A 60015 Connection Fitting Kit for 1 1 4 NPT connection X3751A 60031 Connection Fitting Kit DN 40 ISO K flange X3751A 60016 connection Exhaust filter control pressure switch 9495077 Pump side coupling half for MS 101 SR X3751 20004 Elastic coupling insert for MS 101 SR X3751 40001 Motor side coupling half for MS 101 SR X3751 20003 Electric motor M100L B5 4P 2 2kW 230 400V 50Hz SR X3751 60058 Electri
10. conditions are to be reset Position the selector switch crossway with respect to the flow circuit is closed In this kind of operation the ultimate pressure is better than 0 1 mbar LOS Ld PS Ca ELLE I Figure 9 Gas ballast valve MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 63 110 5 Technical Information Installation and Operation Positioning The pump must be installed in a protected area see SAFETY PRECAUTIONS It must be fastened with support feet on horizontal surface It must be accessible for correct ands easy maintenance by respecting the minimum distances from possible obstructions see following figure and table Figure 10 Positioning Tab 3 Positioning of MS 101 A B C D MS 101 300 mm 300 mm 100 mm 350 mm 64 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 It must be accessible to suitable lifting equipment Air change in the room or inside the machine where the pump has been installed must be ensured Avoid exceeding 40 C ambient temperature The pump must be protected against jets or sprays of water that may penetrate the tank through the exhaust port Whenever the pump is installed outside it must be protected against atmospheric agents Avoid warm air coming from exhaust or the cooling fans
11. environment Used discharged oil from the pump must be disposed in accordance with the regulations in force in the Country of use WARNING Avoid any contact with the pump inlet port during the pump operation Introduce air through the inlet port before every operation cycle Any contact with parts under vacuum can cause injuries 58 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 WARNING The pump tank is pressurized Do not open the oil filling and discharge plugs during operation WARNING All maintenance operations must be carried out with the pump idle disconnected from the electrical supply make sure to cold and vented to atmospheric pressure Prevent unexpected start up e g block the power switch with a lock WARNING Some components of the electrical equipment are electrically charged during operation Any contact may cause serious injuries to persons or objects Connections and controls of the electrical system must be carried out by skilled personnel only The electrical equipment must comply with the EN 60204 1 standard and with any other laws in force in the Country of use Besides electrical equipment must comply with EN 61000 6 4 and EN 61000 6 2 standards concerning electromagnetic compatibility and electromagnetic immunity for industrial environment WARNING The use of the pump in situations unforeseen or not recommended by
12. nearby Take care in draining off waste oils In disposal of these products respect all regulations in force concerning waste oil disposal MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 79 110 5 Technical Information Lubricants The recommended lubricating oil is the Agilent Rotary Vane Fluid MS 01 Type The Rotary Vane Fluid MS 01 Type is a general purpose mechanical pump fluid specifically engineered to provide superior performance in high speed direct drive mechanical pumps These precisely distilled fluids 100 solvent refined neutral paraffinic oil deliver lower base pressure capability faster pump down cycles and reduced maintenance requirements on both the pump and the fluid It is absolutely necessary to continue using the lubricants initially used to fill the tank If this is not possible for organizational or business reasons use only products with the same characteristics as the previous oils Only use of lubricants of suitable quality will guarantee safe operation of the pumps Mineral oils and the PFPE oil are incompatible To change from one type to another the pump must be stripped down completely and all parts washed carefully to eliminate all oil residues If you expect to have to use other lubricants first find out if the two products are compatible In cases of doubt the lubricant used up to that time must be flushed out by way of a pump flushing procedure To avoid the risk of contam
13. screw 2 65 1 4 G Washer 1 76 1 4 G Hexagon socket head plug 1 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 91 110 5 Technical Information Servicing Pos Spare Parts P N Description O ty 77 Base plate 1 78 M10x20 Hexagon screw flanged and 4 knurled 79 M10x30 Stud bolt 4 80 M10 Nut flanged and knurled 4 81 M10x45 Hex socket head screw 2 82 M10 Eyebolt 1 83 M10x30 Hexagon screw flanged and 4 knurled 84 Motor flange 1 85 Fan assembly 1 86 Electric motor 1 87 012 washer 4 88 012 elastic washer 4 89 M12x30 Hex screw 4 90 M10x75 Hex Socket head screw 1 91 1 4 G washer 12 92 Motor side lubrication pipe 1 93 1 4 G Hollow bolt 6 94 Ext Side lubrication pipe 1 95 Helicoidal spring 1 96 Inlet valve plate 1 97 A B OR170 2 98 Inlet valve disk 1 99 A B OR144 1 100 Inlet mesh support 1 101 Inlet filtering mesh 1 102 D 62 Shim ring 1 103 Inlet port 1 104 1 8 G Washer 1 105 1 8 G Plug 1 106 M8 x 35 Hex Socket head screw 4 92 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Pos Spare Parts P N Description O ty 107 1 8 G washer 8 108 Oil recovery pipe 1 109 1 8 G Hollow bolt 4 110 Gas ballast pipe 1 111 1 4 G ball valve 1 112 1 4 G Fitting non return valve 1 113 Silencer
14. to limit the risk of corrosion or scaling due to pollution of the oil by condensed vapors 72 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Safety Rules Personnel responsible for pump operation and maintenance must be well trained and must be aware of the accident prevention rules The accident prevention precautions contained in this section must be respected at all times during operation and maintenance of the pump to avoid damage to operators and to the pump These precautions are provided in the form of WARNING and CAUTION notes Operating procedures technical information and precautions which if not respected and or implemented correctly may cause body harm to operators Operating procedures technical information and precautions which if not respected and or implemented correctly may cause damage to the pump MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 73 110 5 Technical Information Warning Notes Warning Notes 74 110 Death may result from contact with high voltages Always take extreme care and observe the accident prevention regulations in force Always disconnect the power supply to the pump before maintenance work Place a special warning signs over the power supply breaker switch MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON If you are performing maintenance after the pump has been operating for a considerable time a
15. valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e lf ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Sealthe product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 T
16. 1 114 Oil pipe outlet seal ring 1 115 Vibration damping foot 4 116 Vibration damping foot extension 2 117 Casing assembly 1 118 06 Washer 4 119 M6x12 Hex head screw fully threaded 4 120 Pump name plate 1 121 High temperature label 1 122 Oil label 1 Tab 8 Accessories Pump Parts for MS 101 Pos Spare Parts P N Optionals O ty 501 M f 1 4 1 8 G adapter 1 502 Pressure gauge for exhaust filter 1 519 Safety temperature switch 1 507 3 8 G Al Washer 1 508 Silicone cable 1 512 1 4 G Al Washer 2 513 1 4 1 8 G M f Cil Reduction 1 514 Pressure switch 1 518 Cover assembly for oil level switch 1 519 Oil level switch assembly 1 523 MM 1 1 4G Pipe fitting 1 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 93 110 5 Technical Information Servicing Pos Spare Parts P N Optionals O ty 524 A4 1 1 4G Elbow union 1 525 1 1 4 Inlet filter 1 526 Filter element 1 529 OR 147 1 530 DN4OKF Screw in flange 1 531 DN4OKF centering ring 2 532 DNAOKF Clamping ring 2 533 DN4OKF Elbow 90 1 534 DNAOKF Inlet filter 1 322 M f 1 4 1 8 G adapter 1 323 Pressure gauge for exhaust filter 1 324 Safety temperature switch 1 A Part of MS 101 Minor Maintenance Kit P N X3751A 60010 B Part of MS 101 Major Maintenance Kit P N X3751A 60011 94 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Servicing Figure 20 Pumps Major Parts
17. 3 84 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Figure 15 MS 101 Pump parts Exploded View 2 of 3 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 85 110 5 Technical Information Servicing 41 M PEN NZ 23 NG Uf RUE VE 43 Figure 16 MS 101 Pump parts Exploded View 3 of 3 86 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Figure 17 MS 101 Pump accessories Exploded View sheet 1 of 3 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 87 110 5 Technical Information Servicing Figure 18 MS 101 Pump accessories Exploded View sheet 2 of 3 88 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Figure 19 MS 101 Pump accessories Exploded View sheet 3 of 3 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 89 110 5 Technical Information Servicing Pump Parts Tab 7 Pump Parts for MS 101 Pos Spare Parts P N Description O ty 1 Body of pump 1 2 External side cover 1 3 A B OR 4562 2 4 05x24 Pin 4 5 M8x40 Hex Screw flanged and knurled 9 6 D 52 Shim ring 2 7 B Ball bearing 6205 2 8 Rotor 1 9 A B Vane 3 10 B LR 25x30x30
18. 5 C a 70 C umidit relativa 0 95 non condensante Preparazione per l installazione La pompa viene fornita in un imballo protettivo se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Il peso dell imballo comprensivo della pompa di circa 100 Kg Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente La pompa non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comunque di mantenerla chiusa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 11 110 1 Istruzioni per l uso Installazione Installazione Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali temperatura da 12 C a 40 C umidit relativa 0 95 non condensante AVVERTENZA Per proteggere contro corto circuiti o sovraccarichi necessario installare un in
19. Bushing 1 11 Motor side cover 1 12 A B BABSL 30x40x7 Seal ring 1 13 A B BA 30x42x7 Seal ring 1 14 142 Seejer 1 15 Mbx12 Hex Socket set screw 2 16 Riduzione 02 5mm M6x16 2 17 1 8 G Washer 2 18 1 8 G Plug 2 19 06 Lock washer 3 20 M6x10 Hex socket head ground screw 3 21 8x7x30 key 1 29 Plate 1 30 Plate support 1 31 Pump side coupling half 1 32 A B Elastic coupling insert 1 90 A B OR4525 1 34 M8 Nut flanged and knurled 4 35 Sleeve 1 90 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Pos Spare Parts P N Description O ty 36 Vibration damping foot 4 37 Tank 1 38 Motor side lower cover 1 39 A B OR4450 2 40 Motor side upper cover 1 41 A B 0R4512 2 42 Demister support mesh 1 43 Tank demister 1 44 Stay bolt for exhuast filter 1 45 Exhaust filter stay bolt sleeve 1 46 TCEI 08 Elastic washer 16 47 M8 x 25 Hex Socket head screw 16 48 Ext side lower tank cover 1 49 1 2 G Washer 2 50 1 2 G Filling discharge plug 2 51 1 G Washer 1 52 A B 1 Oil sight glass 1 53 Tank micro stretched sheet 1 54 External side upper cover 1 55 A B Exhaust filter 1 56 Disk for exhaust filter 1 57 08 40 Washer 1 58 08 4 13x1 Washer 1 59 M8 x 35 Hex Socket head screw 1 60 Float port 1 61 A B OR4075 1 62 Float valve 1 63 M4x8 Hex Sock Stud bolt 1 64 M5x16 Hex Socket head
20. II Servicing Gene ral Information Before every maintenance operation Ensure that the pump motor is disconnected from the electrical network so that it can t automatically start Make sure the pump has reached an ambient temperature Introduce air in the inlet port In order to keep the pump operating at a high efficiency level it is mandatory to follow all periodical service points listed in the table below However more frequent service operations may be necessary depending on what the pump is used for suction of condensable vapours suction of powders or polluting substances For such cases only direct experience can indicate the correct service frequency needed Please contact Agilent Technical Support for further details The exhausted oil and replaced spare parts must be considered as special waste products and handled according to the local regulations in the country of use Tab 6 Service frequency Description of the operation Authorized personnel 24 hours every day Check oil level before starting Operator Clean the external inlet element with a blast of air refer to Pumps Major Parts figure position A 100 hours every week Operator Clean the cooling surfaces of the pump of oil cooler and the electrical motor with a blast of air 82 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Service frequency Description of the ope
21. MS 101 High Capacity Rotary Vane Pump Model X3751A Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 141 01 07 2012 E Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 141 01 Edition Edition 07 2012 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms cove
22. Pump User Manual 87 900 141 01 53 110 5 Technical Information Technical Data Technical Data Units Value WEIGHT with motor 50 Hz Kg Ib 85 188 60 Hz Kg Ib 89 196 without motor Kg Ib 62 137 OPERATING TEMPERATURE RANGE C 12 40 F 54 105 STORAGE TEMPERATURE RANGE C 15 70 F 5 158 INLET FLANGE DN 1 gas DN40KF 1 4 NPT EXHAUST FLANGE DN 1 gas 1 NPT MAIN VOLTAGES 50 Hz V 230 400 60 Hz V 230 400 V 220 380 COMPLIANCE WITH EN 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements EN 1012 2 2009 Compressors and vacuum pumps Safety requirements Part 2 vacuum pumps EN 12100 1 2005 Safety of machinery Basic concepts general principles for design Part 1 basic terminology methodology EN 12100 2 2005 Safety of machinery Basic concepts general principles for design Part 2 technical principles According to PNEUROP standard 6602 Valid for temperature up to 40 C and altitudes lower than 1000 m 54 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Dimensions The following drawings show the pumps layout dimensions mm and inches in parenthesis and rotational direction
23. a WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 17 110 1 Istruzioni per l uso Smaltimento 18 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 MS 101 High Capacity Rotary Vane Pump User Manual Gebrauchsanleitung Allgemeine Informationen 20 Lagerung 21 Vor der Installation 21 Installation 22 Gebrauch 24 Wartung 25 Entsorgung 27 bersetzung der Originalanleitungen GEB Agilent Technologies 19 110 2 Gebrauchsanleitung Allgemeine Informationen Allgemeine Informationen Dieses Ger t ist f r den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Agilent mitgelieferten Zusatzinformationen genau lesen Bei vollst ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Benutzung unter Missachtung der nationalen Bestimmungen ber nimmt Fi
24. anual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 40 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Instructions for Use 4 Storage When transporting and storing the pump the following environmental requirements should not be exceeded temperature from 15 to 70 C relative humidity 0 95 non condensing Preparation for Installation The pump is supplied in a protective packing If this shows signs of damage which may have occurred during transport contact your local sales office The total weight of the pack including the pump is approx 100 Kg When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust MS 101 High Capacity Rotary Vane P
25. ates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 47 110 4 Instructions for Use Disposal 48 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 MS 101 High Capacity Rotary Vane Pump User Manual ee 5 Technical Information Section 51 Technical Description 51 Technical Data 53 Dimensions 55 Safety Precautions 58 Transport and Handling 60 Lifting 60 Unpacking and Components Control 61 Storage 61 Section Il 62 Installation and Operation 62 Assembling 62 Gas Ballast 63 Positioning 64 Connections to the Inlet and Exhaust Flanges 66 Connection to the Vacuum System 68 Discharge Air Pipe Line Installation 68 Electrical Connection 69 Suggestions for Use 71 Water Vapour Suction 72 Original Instructions A Agilent Technologies 49 110 5 Technical Information Disposal Stopping the Pump 72 Safety Rules 73 Warning Notes 74 Caution Notes 76 Maintenance Actions 77 Section III 82 Servicing 82 General Information 82 Pump Parts 90 Oil Change Procedure 96 Float Valve Cleaning Procedure 97 Exh
26. aust Filters Replacement Procedure 98 Coupling Elastic Element Replacement Procedure 99 Pump Overhaul Procedure 100 Spare Parts 101 Spares Necessary for Normal Servicing 101 How to Order Spare Parts 101 Orderable Parts 102 De Commissioning 102 Return for Repair 103 Troubleshooting 104 50 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Section Technical Description The pump MS 101 is single stage rotary vane vacuum pump lubricated with oil recirculation driven by a flanged electrical motor coupled by means of an elastic coupling Figure 2 MS 101 This Agilent vacuum pump is suitable for pumping non corrosive gases The pump MS 101 can reach lt 0 1 mbar partial pressure without gas ballast valve lt 0 5 mbar ultimate total pressure with gas ballast valve Cooling is achieved by means of an air oil cooler cooled with a centrifugal fan At the pump inlet there is a mesh filter in order to protect it from solid parts having diameter larger than 1 5 mm Furthermore an integrated non return valve prevents the oil coming back and the return of air in the chamber to be pumped down during the stop phase In the tank there is a system of oil smokes separation from the discharged air maximum residual 2 PPM weight corresponding to 2 4 mg m MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 51 110 5 Technical Information Technical Des
27. c motor M100L B5 4P 3 0kW 230 460V 60Hz SR X3751 60059 Electric motor M100L B5 4P 3 0kW 220 380V 60Hz SR X3751 60060 De Commissioning 102 110 Drain the oil from the pump prior to the removal MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 If the oil is polluted flush the pump with fresh oil see Oil Change Procedure paragraph Drain the oil from the tank plug the inlet and the discharge ports and store the pump without oil In case of pump disposal separate the pump parts by materials and trash the parts in accordance with the local regulations in the Country of use Return for Repair In case of pump return for repair to Agilent please provide a list of substances which have come in contact with the pump and advice the risks involved in handling if any Drain the lubricant from the pump prior to shipping the pump back MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 103 110 5 Technical Information Troubleshooting Troubleshooting Tab 10 Troubleshooting Trouble Cause Remedy Who Inlet filters are dirty Clean or replace Customer Inlet pipes or machine are leaking Identify leaking point and seal it Customer Drop in Check oil level and oil conditions performances No or low lubrication Fill with oil to the right level or Customer change the oil Inefficient oil recove
28. causing discomfort to the personnel WARNING Do not install the pump in a dusty area or where other materials may block or cover the cooling surfaces MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 65 110 5 Technical Information Connections to the Inlet and Exhaust Flanges Connections to the Inlet and Exhaust Flanges Remove the protective caps from both flanges Connect the system to be evacuated to the inlet flange using a centering ring with OR and a locking collar For guaranteed reliable sealing use an OR gasket in Perbunan or Viton The inlet duct is equipped with a sieve filter preventing solid particles from entering and damaging the pump When the gases to be pumped out contain dust it is advisable to insert a dust filter before the inlet flange When the gases to be pumped out contain large quantities of vapor it is advisable to include a condense separator before the inlet flange To make best use of the pump s capacity use only short straight piping with a diameter not smaller than that of the inlet flange If rigid piping is used it is good practice to use a flexible joint in order to avoid undue forcing of the connection on the pump The exhaust duct must be connected to a pipe that will take away the pumped out gases Application of an oil trap filter is necessary to avoid pollution of the surrounding atmosphere by the oil present in the exhaust duct during pump ope
29. cription 52 110 The separated oil is recovered automatically by the pump A standard gas ballast valve prevents condensation inside the pump even when pumping down small quantity of vapour Here after are shown symbols used to identify the threaded ports This symbol identifies the inlet port J This symbol identifies the exhaust threaded port z MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Data Technical Information 5 The following table lists the main technical data of the MS 101 High Capacity Rotary Vane Pump Tab 1 Technical Data Technical Data Units Value PUMPING SPEED m3 h at 50 Hz 95 m3 h at 60 Hz 109 ULTIMATE PRESSURE WITHOUT GAS mbar lt 0 1 BALLAST partial Torr 8x 102 ULTIMATE PRESSURE WITH GAS BALLAST mbar lt 05 absolute Torr lt 04 MOTOR POWER kW at 50 Hz 2 2 kW at 60 Hz 3 0 REVOLUTIONS NUMBER RPM at 50 Hz 1500 RPM at 60 Hz 1800 NOISE PRESSURE LEVEL dB A at 50 Hz 66 According to UNI EN ISO 2151 standard dB A at 60 Hz 68 DIMENSIONS approx depending on motor mm at 50 HZ 718 x 405 x 349 brand in at 50 HZ 28 3 x 15 9 x 13 7 mm at 60 HZ 750 x 405 x 349 in at 60 HZ 20 5 x 15 9 x 13 7 WATER VAPOUR TOLERANCE 50 Hz mbar 30 Torr 23 60 Hz mbar 40 Torr 30 WATER VAPOUR CAPACITY 50 Hz Kg h 22 60 Hz Kg h 3 OIL CAPACITY nominal 3 1 MS 101 High Capacity Rotary Vane
30. de mise en marche inopin e de l appareil l air contenu l int rieur de la pompe peut les projeter contre l op rateur et le blesser MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Mode d emploi 3 Pendant l installation faire tr s attention ce que la bride d aspiration soit reli e la chambre vider et que la bride de vidange ne soit pas bouch e voir les figures ci apr s Veiller attentivement ne pas inverser l entr e et la sortie de la pompe La pression maximale l int rieur du r servoir d huile ne doit pas d passer 1 5 bar abs Le non respect de ces pr cautions peut entra ner un danger pour l op rateur et endommager la machine Bride de vidange i3 BEBEDGBDOERCER BEGBEDBBASO Bride d aspiration Figure 1 MS 101 Aunia Contr ler que la tension d alimentation correspond la gamme de tensions indiqu es sur la plaquette du moteur Brancher la pompe la source d alimentation MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 33 110 3 Mode d emploi Utilisation Utilisation La mise en marche de la pompe ne requiert au cune man uvre particuli re il suffit de la brancher l alimentation lectrique pour que la pompe d marre Pour un branchement correct consultez le sch ma lectrique fourni AWTS ESA Site La pompe a t con ue pour fonctionner avec des fluides neutres ou non corrosifs L emploi de substances p
31. der Pumpe betr gt zirka 100 kg Beim Auspacken ist darauf zu achten dass die Pumpe nicht fallengelassen oder St en oder Vibrationen ausgesetzt wird Das Verpackungsmaterial ist ordnungsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r den Umwelt schutz Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht besch digt werden Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 21 110 2 Gebrauchsanleitung Installation Installation Die Pumpe darf nicht in Umgebungen installiert und oder benutzt werden die ungesch tzt vor Witterungsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions oder erh hte Brandgefahr besteht W hrend des Betriebs sollen die folgenden Umgebungsbedingungen gegeben sein Temperatur 12 C bis 40 C Relative Feuchtigkeit 0 95 niederschlagsfrei Um vor Kurzschl ssen oder berlastungen zu sch tzen muss ein automatischer Schalter an der Hauptspeisungsleitung zur Pumpe hin mit einer geeigneten Kapazit t installiert werden Die Kapazit t des Schalters muss mit den auf dem Schild des effektiv installierten Motors angegebenen Daten bereinstimmen und von dem Installateur gew hlt werden Der Anschluss muss bei Einhaltung aller geltenden diesbez gl
32. e ou revendeur pour mettre en uvre le processus de collecte et mise au rebut MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 37 110 3 Mode d emploi Mise au rebut 38 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 MS 101 High Capacity Rotary Vane Pump User Manual Instructions for Use General Information 40 Storage 41 Preparation for Installation 41 Installation 42 Use 44 Maintenance 45 Disposal 47 Original Instructions GEB Agilent Technologies 39 110 4 Instructions for Use General Information General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The MS 101 High Capacity Rotary Vane Pump is single stage rotary vane pump oil sealed driven by a three phase electric motor This high vacuum pumps is suitable for pumping non corrosive gases The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This m
33. ect and file full damage report Storage The pumps must be stored or transported without any oil and protected from the atmospheric agents at temperature between 15 C and 70 C humidity rate 0 95 non condensing CAUTION Pay attention to perform all operation indicated in the following paragraphs before starting the pump in order to prevent serious damages MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 61 110 5 Technical Information Section Il Section Il Installation and Operation Assembling If the pump is supplied without any electrical motor install a motor whose characteristics are the same as stated on the technical sheet constructive form IM B5 WARNING Check that the distance between the two coupling halves is Type 1 B 20 1 mm see figure below Figure 8 Distance between the two coupling halves 62 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Installation and Operation Gas Ballast Pumps of the MS series are fitted with a gas ballast valve in order to exhaust any water vapour present in the rotor When the pump operates with the gas ballast open please follow these instructions Position the selector switch in the flow direction circuit is open The ultimate pressure in this kind of operation is better than 0 5 mbar When water vapour has been removed and the pump original
34. ed to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 MS 101 High Capacity Rotary Vane Pump MS 101 High Capacity Rotary Vane Pump MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 3 110 MS 101 High Capacity Rotary Vane Pump 4 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Contents Contents 1 Istruzioni per l uso 9 Informazioni Generali 10 Immagazzinamento 11 Preparazione per l installazione 11 Installazione 12 Uso 14 Manutenzione 15 Smaltimento 17 2 Gebrauchsanleitung 19 Allgemeine Informationen Lagerung 21 Vor der Installation Installation 22 Gebrauch 24 Wartung 25 Entsorgung 27 3 Mode d emploi Information G n rale Emmagasinage 31 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 20 21 29 30 5 110 Contents 6 110 5 Preparation pour l installation 31 Installation 32 Utilisation 34 Maintenance 35 Mise au rebut 37 Ins
35. eed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact Overtemperature Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Damaged flange SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe Doesn t reach vacuum Over temperature Pump seized Other Section 6 ADDITIONAL TERMS Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other DIFFUSION PUMPS Heater failure Doesn t reach vacuum Vacuum leak Electrical problem Cooling coil damage Other Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do s
36. erme des op rations de maintenance restaurer les dispositifs de s curit MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 35 110 3 Mode d emploi Maintenance AHSA ANR Ne pas effectuer la substitution d huile imm diatement apr s l arr t de la machine car la temp rature de celle l peut tre lev e Avant de retourner une pompe au constructeur pour r paration il est indispensable de remplir et d adresser au bureau local de vente la fiche Health and Safety Certification jointe la pr sente notice Une copie de celle ci devra tre mise dans l emballage de la pompe avant exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales en la mati re 36 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Mode d emploi 3 Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m r
37. es it is recommended to install a progressive starter soft starter or a star delta starter When using a star delta starter the vacuum pump can start exclusively with the inlet vented to atmospheric pressure MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 71 110 5 Technical Information Stopping the Pump Water Vapour Suction In order to pump down any water vapour it is essential to bring the pump temperature to its operating value In case there are other condensates in the oil let the pump run for at least thirty minutes with the gas ballast valves in position open at the end of the working cycle It is advisable to carry out this operation before stopping the pump for a long time The gas ballast valve will allow the elimination of water condensate from lubricating oil For repetitive work cycles with brief time intervals in between it is better not to stop the pump Stopping the Pump There are no special procedures for switching the pump off it needs only to be disconnected from the electric power When the pump is stopped the anti suckback device makes it possible to maintain vacuum in the vessel connected on the inlet flange of the pump If the pump is expected to be stopped for a lengthy period or in any case if it has pumped in large amounts of vapors it is good practice to run it with the gas ballast open and the inlet line closed for a few minutes before switching off in order
38. fort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely CZ d LT Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A
39. h Abschluss der Arbeiten sind die Sicherheitseinrichtungen wieder zu aktivieren Keine lwechsel unmittelbar nach Stillsetzung des Ger tes vornehmen da die ltemperatur sehr hoch sein kann Bevor dem Hersteller eine Pumpe zur Reparatur zur ckgesandt wird ist das Formular Sicherheit und Gesundheit in der Anlage zum vorliegenden Handbuch auszuf llen und der lokalen Verkaufsstelle zuzustellen Eine Kopie des Formulars ist der Pumpenverpackung vor dem Versand beizulegen 26 110 Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschl gigen nationalen Vorschriften zu entsorgen MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Gebrauchsanleitung 2 Entsorgung Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 27 110 2 Gebrauchsanleitung Entsorgung 28 110 MS 101 High Capaci
40. ichen Vorschriften erfolgen VORSICHT Vor dem Pumpenstart muss die Pumpe mit Schmier l gef llt werden da sie ohne geliefert wird Vor Aufnahme jeglicher Arbeiten sind die Schutzkappen an den Saug und Druckflanschen zu entfernen Die im Pumpeninnern enthaltene Luft k nnte diese bei unbeabsichtigter Einschaltung gegen den Bediener schleudern 22 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Gebrauchsanleitung 2 WARNUNG Bei der Installation ist unbedingt darauf zu achten dass der Saugflansch an die zu entleerende Kammer angeschlossen ist und der Ablassflansch nicht verschlossen ist siehe folgende Abbildungen Bitte sehr darauf achten dass der Ablass nicht mit der Ansaugung verwechselt wird Der Druck im lbeh lter darf nicht gr er als 1 5 bar abs sein Bei Nichtbeachtung dieser Anweisungen besteht Schadensgefahr f r die Pumpe und die Bedienper son Ablassflansch um WIESE HEIDE BEGBEDBBASO Abbildung 1 MS 101 hip Vergewissern Sie sich dass die Versorgungsspannung mit dem Wertbereich auf dem Typenschild des Motors bereinstimmt Die Pumpe an das Versorgungsnetz anschlie en MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 23 110 2 Gebrauchsanleitung Gebrauch Gebrauch Das Einschalten der Pumpe fordert keine besonderen Vorg nge es ist ausreichend diese mit Strom zu verbinden damit sie zu pumpen begi
41. inating the oil absolute cleanliness of the pump and surrounding area must be ensured during the lubrication procedures Pumps must be filled with MS 01 Agilent oil only Tab 4 Recommended fluid Ambient temperature Grade Agilent fluid 12 40 C ISO 100 MS 01 For ambient temperature outside the stated range please get in touch with our Customer Service department Tab 5 Agilent Rotary Vane Fluid MS 01 Type characteristics Property Unit of measure Rotary Vane Fluid MS 01 type Vapour pressure 38 C Torr 8 4 10 80 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Vapour pressure 66 C Torr 8 3 10 9 Vapour pressure 93 C Torr 1 0 10 Viscosity 40 C DIN 51550 cSt 98 32 Viscosity 100 C DIN 51550 cSt 2 41 Viscosity index ASTM D2270 202 Density 15 C g ml 0 865 Pour point DIN ISO 3016 C F 48 118 4 Flash point C 0 C DIN 51376 C F 271 519 8 Coefficient of Thermal Expansion 1 F 0 00041 Specific Heat 38 C BTU Ib F 0 51 Specific Heat 66 C BTU Ib F 0 53 Specific Heat 93 C BTU Ib F 0 56 Thermal Conductivity 38 C BTU hr ft2 0 092 Thermal Conductivity 66 C BTU hr ft2 0 091 Thermal Conductivity 93 C BTU hr ft2 0 090 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 81 110 5 Technical Information Section III Section I
42. ithout gas ballast valve with gas ballast m h 60Hz 1000 7 7 FTH 100 0 01 0 1 1 10 100 mbar Figure6 MS 101 Graph of delivery capacity vs inlet pressure with 60 Hz motor without gas ballast valve with gas ballast MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 57 110 5 Technical Information Safety Precautions Safety Precautions CAUTION Despite of all the precautions adopted when designing the equipment there are some risk elements that arise during operation and servicing WARNING The temperature of the pump surfaces may exceed 80 C Install the pump in a protected area accessible only by authorized personnel to prevent possible personal injures due to contact with hot surfaces The pump can be placed inside other machines by adopting the necessary safeguards Before carrying out any maintenance on the pump be sure the pump is cold WARNING The discharged air contains part of traces of oil mist Check the compatibility with the environment A failure of the seal wear can cause an oil leakage Avoid the dispersion to the ground and the pollution of other materials In case that any air containing dangerous substances must be pumped down for example biological or microbiological agents make sure to adopt filtering systems before introducing air in the work
43. llow sufficient time for it to cool as the external surface temperature may be in excess of 80 C Failure to provide the pump with an earth connection may cause serious damage to operators Always ensure that there is an earth connection and that it complies with the standards When cleaning the pump and its component parts avoid the use of flammable or toxic solvents such as benzin benzol ether or alcohol The recommendation is to use a soap and water solution preferably in ultrasound washing machines taking care to dry all the cleaned parts at temperatures under 100 C in order to eliminate residual moisture Prolonged overloads or breakdowns may cause the electric motor to overheat and to release noxious smoke remove the power immediately as a precaution and do not approach the pump at least until you have provided ventilation to drive out the smoke Take care not to breathe in the fumes remaining inside the pump in the course of repair work In case of fire do not throw water on the pump Switch the power off and use CO extinguishers Carefully inspect the flanges to ensure that there is no dust oil dirt or defects of the mating surfaces before making the required connections Ensure that all joints and couplings are locked correctly before starting the pump again after repair work MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Do not wear any objects that may become e
44. minal box MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 69 110 5 Technical Information Connections to the Inlet and Exhaust Flanges AT S Figure 12 Direction of rotation WARNING The pump is supplied without lubricating oil CAUTION The operation without oil causes big damages to the pump Carry out the first oil filling through the plug E up to the half of the sight glass F and close the plug E see following figure 70 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Figure 13 Oil change parts identification Start the pump and let it run at least 2 minutes Stop the pump check again the oil level and add some additional oil if necessary in order to get the correct oil level Suggestions for Use When the room temperature is lower than 10 C it is a good practice to let the pump operate at maximum vacuum level for about 5 minutes During this period the pump may not reach the stated pressure limits Avoid operating the pump for long periods with inlet port vented to atmospheric pressure This will cause a heavy oil loss Avoid frequent stop start cycles as this will lead to premature coupling elastic element wear It is advisable not to exceed 10 cycles hour For more frequent cycl
45. nnt F r den korrekten Anschluss beziehen Sie sich bitte auf den mit der Pumpe gelieferten Schaltplan Die Pumpe ist f r den Betrieb mit neutralen und nicht korrosiven Fluiden konzipiert Der Einsatz mit potentiell explosions oder feuergef hrlichen Substanzen ist streng verboten VORSICHT In den Dreiphasenmotoren ruft eine Polarit tsumkehrung die Umkehrung der Pumpendrehrichtung hervor und kann somit eventuelle mechanische Sch den verursachen 24 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Wartung Gebrauchsanleitung 2 Das f r den Betrieb und die Wartung zust ndige Personal soll geschult sein und ber eine solide Kenntnis der Unfallschutzvorschriften verf gen Hochspannungen k nnen bei Kontakt t dliche Folgen haben Es ist stets mit gr ter Vorsicht und gem den geltenden Unfallschutzvorschriften vorzugehen Bei eingeschaltetem Ger t ist auf Bewegungs und Hochspannungsteile zu achten Falls die Pumpe im Anschluss an den Betrieb gewartet werden soll ist abzuwarten bis sie abgek hlt ist da ihre Oberfl che eine Temperatur von 80 C berschreiten kann MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 25 110 2 Gebrauchsanleitung Wartung WARNUNG Vor Wartungsarbeiten ist die Pumpe stets energiefrei zu schalten Am Netzschalter sind spezielle Warnschilder INSTANDHALTUNG AM GER T NICHT EINSCHALTEN anzubringen Nac
46. nologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 0 2 3452 2455 Fax 82 0 2 3452 3947 Toll free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2012 Printed in ITALY 07 2012 Publication Number 87 900 141 01 Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 32450 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino
47. ntangled in the mechanisms and or act as conductors chains bracelets etc Ensure that the tools to be used are in perfect working condition and have insulating grips where necessary Check that the insulating material of the cables and that the conductors of the test equipment do not show any signs of damage Do not replace the oil immediately after stopping the machine as the oil may still be at high temperature Perform repairs in clean and where possible dust free areas Protect all the clearances of connection points with suitable plastic caps and cover the machined surface areas of all parts stripped down until they are put back on the pump again Do not start the pump if the fan cover sleeve is not properly in place MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 75 110 5 Technical Information Caution Notes Caution Notes 76 110 Before putting the pump back into operation after a breakdown inspect it and check carefully for any other signs of damage Use only tools that are in perfect working order and specially designed for the job use of inappropriate or ineffective tools may cause serious damage Perform repairs in clean and where possible dust free areas Protect all the clearances of connection points with suitable plastic caps and cover the machined surface areas of all parts stripped down until they are put back on the pump again Always check the lubricant and that it is prope
48. o or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861
49. oll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 i Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A L Non Billable L Billable am New PO hard copy must be submitted with this form 3B exchange Repair upgrade Consignment Demo calibration Evaluation return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one El HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic L Corrosive L Reactive L1 Flammable L Explosive LJ Biological L
50. one corrisponda al campo di valori indicati sulla targhetta del motore Collegare la pompa all alimentazione MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 13 110 1 Istruzioni per l uso Uso Uso L accensione della pompa non richiede particolari manovre sufficiente collegarla all alimentazione elettrica perch la pompa inizi ad operare Per il corretto collegamento fare riferimento allo schema elettrico fornito con la pompa A3 r4 La pompa progettata per operare con fluidi neutri o non corrosivi assolutamente vietato l impiego con sostanze potenzialmente esplosive o infiammabili nania roa Nei motori trifase un inversione di polarit provoca l inversione del senso di rotazione della pompa con conseguenti possibili danni di natura meccanica 14 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Istruzioni per l uso 1 Manutenzione Il personale addetto alla condotta ed alla manutenzione della pompa deve essere ben addestrato e deve avere un approfondita conoscenza delle norme antinfortunistiche A4 411172 Le alte tensioni possono causare morte al contatto Operare sempre con la massima cautela e secondo le norme antinfortunistiche in vigore in movimento e di alta tensione AUYA Quando la macchina alimentata prestare attenzione per la presenza di parti NVIT 3 4fA 7Z Nel caso si debba procedere ad operazioni di manutenzione della
51. operation of the pump Only the recommended lubricants or lubricating oils with similar characteristics and known and experimented quality should be used Oil changes must be made with the oil at a sufficiently high temperature after leaving the pump to cool for a few minutes following operation The drain and filler plugs must not be left open any longer than is strictly necessary When performing maintenance look out for all signals that may precede a breakdown in particular traces of corrosion oil leaks slack joints or couplings MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 77 110 5 Technical Information Maintenance Actions 78 110 Maintenance technicians must be aware of all applicable national directives concerning accident prevention during work on motor driven pumps and should know how to apply them have read and understood all the sections on Safety Rules be familiar with the essential design features and operation of the pump know how to use and consult the pump documentation be concerned about proper operation of the pump make a note of any irregularities in operation of the pump and take the necessary action where appropriate Use original spare parts wherever possible and repair a broken part as best as possible on site or send it back to the manufacturer for repairs For all problems arising or to order spare parts refer to our service departmen
52. otentiellement explosives ou inflammables est strictement interdit agaaa Sur les moteurs triphas s une inversion des polarit s entra ne une inversion du sens de rotation de la pompe et comporte des risques de dommages m caniques 34 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Mode d emploi 3 Maintenance Le personnel charg de la conduite et de la maintenance de la pompe doit avoir la formation n cessaire et poss der une connaissance approfondie des normes de pr vention des accidents du travail AVERTISSEMENT Les hautes tensions peuvent entrainer la mort par contact Veiller toujours op rer avec le maximum de prudence et dans le respect des normes de pr vention des accidents du travail en vigueur AVERTISSEMENT Lorsque la machine est sous tension faire attention la pr sence d organes en mouvement et de haute tension AVERTISSEMENT En cas de devoir proc der des op rations de maintenance de la pompe au terme d une longue p riode de fonctionnement il est indispensable de la laisser refroidir car sa temp rature ext rieure peut d passer 80 C AVERTISSEMENT gt gt gt gt Avant toute op ration de maintenance il est imp ratif de toujours couper l alimentation de la pompe Placer les panneaux sp cifiques d avertissement APPAREIL EN COURS DE MAINTENANCE NE PAS BRANCHER L ALIMENTATION pr s de l interrupteur d alimentation Au t
53. pompa al termine di un prolungato periodo di esercizio necessario lasciarla A raffreddare poich la temperatura esterna pu superare gli 80 C MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 15 110 1 Istruzioni per l uso Manutenzione AVVERTENZA Escludere sempre l alimentazione della pompa prima di compiere operazioni di manutenzione Apporre specifici cartelli di avvertenza APPARECCHIATURA IN MANUTENZIONE NON INSERIRE L ALIMENTAZIONE in corrispondenza dell interruttore di alimentazione Al termine ripristinare i dispositivi di sicurezza AVVERTENZA Non effettuare la sostituzione dell olio subito dopo l arresto della macchina in quanto la temperatura dello stesso pu essere elevata Prima di rispedire al costruttore una pompa per riparazioni amp indispensabile compilare e far pervenire al locale ufficio vendite la scheda Health and Safety Certification allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo della pompa prima della spedizione 16 110 Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Istruzioni per l uso 1 Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominat
54. ration 66 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Connections to the Inlet and Exhaust Flanges CAUTION Never block the pump exhaust line This would cause overpressure in the casing with the risk of breaking the glass window of the level indicator and or expelling the oil seal gasket CAUTION For proper operation the filter optional must be mounted in HORIZONTAL position Figure 11 Filter positioning MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 67 110 5 Technical Information Connections to the Inlet and Exhaust Flanges Connection to the Vacuum System The connection to the chamber to be pumped down must be carried out by means of pipes of the same diameter as the inlet port Pipe weights and expansions if any must not rest on the pump It is advisable to make the final connection to the pump with flexible pipes or fittings It is important that all the pipes and the different fittings are tight and if possible check with an Agilent leak detector Very long or small diameter pipes will decrease the pump performances Discharge Air Pipe Line Installation When required it is possible to pipe the pump discharge air to other rooms or outside Use pipes with the same diameter as the tank discharge port with a maximum length of 15 m For longer pipes increase pipe diameter Pipe weights must not rest on the pump
55. ration Authorized personnel 500 1000 hours every 6 months Replace the lubricating oil and oil filter refer to Pumps Major Parts figure position C Doesn t use car air filter but with anti suck back valve See Oil Change Procedure at page 96 If the pressure gauge is fitted to the pump check the Skilled worker oil separator max 0 6 bar if necessary replace it See Exhaust Filters Replacement Procedure at page 98 Clean the silence with a blast of air 2000 hours every 6 months Clean the float valve See Float Valve Cleaning Procedure at page 97 Replace the exhaust filter refer to Pumps Major Parts figure position B See Exhaust Filters Replacement Procedure at page 98 7 Skilled worker Check and if necessary replace the coupling elastic insert refer to Pumps Major Parts figure position D See Coupling Elastic Element Replacement Procedure procedure at page 99 Check the electrical connections 8000 hours every 2 years Grease the electrical motor bearings AGILENT service 30 000 hours every 5 years AGILENT service or Pump overhaul Skilled worker The first oil change has to be done after 500 hours of operation Next oil change must be done within 2000 hours MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 83 110 5 Technical Information Servicing Figure 14 MS 101 Pump parts Exploded View 1 of
56. recovery doesn t operate well there could be oil carry out from the discharge port To clean the float valve follow these instructions 1 Remove the cover position B2 refer to Pumps Major Parts figure page 95 unscrewing the screws position Bl refer to Pump Major Parts page 95 Remove the float valve position Z of the following figure from its grub screw position Z1 of the following figure Clean the float valve and its internal reduction fitting with compressed air by blowing the opposite direction with respect to the normal oil flow Fit the float valve in its housing proceeding the opposite way Check the right operation of the device before closing the cover position B2 refer to Pumps Major Parts figure page 95 Switch the pump without oil in the drip tray and check if the limit pressure could be achieved Fill with oil until the valve opens wait until it closes checking that the ultimate pressure of the pump keeps steady If the ultimate pressure doesn t keep steady change the float valve Fit the discharge cover MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 97 110 5 Technical Information Servicing Figure 21 Exhaust Filters Replacement Procedure Very dirty exhaust filters may cause a considerable pump temperature increase and in extreme cases oil lubricant spontaneous ignition Maximum allowed pressure in the tank is 1 5 bar measured at
57. red take care on account of moving parts and high voltages WARNING If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 80 C MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 45 110 4 Instructions for Use Maintenance WARNING Always disconnect the power supply to the pump before starting maintenance work Place a special warning signs over the power supply breaker switch MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON When finished remove the safety warning WARNING Do not change the oil immediately after stopping the machine as the oil temperature may still be high Before returning the pump to the constructor for repairs the Health and Safety Certification sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the pump package before shipping If a pump is to be scrapped it must be disposed of in accordance with the specific national standards 46 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Instructions for Use 4 Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indic
58. ring the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adher
59. rly distributed through the pump inadequate lubrication may damage the pump seriously Give the parts some form of marking as you strip them down to ensure that you reassemble them again in the proper order Check that there are no scratches or grooves on the machined shafts in their seats inside the pump or on machine ground surfaces Slight scratches and abrasions may be eliminated with very fine emery paper or by a little light grinding Before putting a group together always spread a little oil over inner parts and mating surfaces Replace all seals with original spare parts before reassembling components MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Maintenance Actions Maintenance may be seen as the totality of all scheduled and unscheduled maintenance work Maintenance includes 1 SCHEDULED MAINTENANCE Maintaining the nominal state of operation 2 UNSCHEDULED MAINTENANCE Restoring the nominal state of operation The frequency with which repairs are performed depends on the process and presence of substances that shorten pump life dust abrasives solvents water chemically aggressive substances The pump must be cleaned at regular intervals of time Do not clean with Alcohol the plastic or rubber components of the pump Use only the strictly necessary amount of lubricant an excess of lubricating oil like when there is none may sometimes compromise proper
60. rma Agilent keinerlei Haftung Die Pumpen MS 101 High Capacity Rotary Vane Pump ist eine ist eine Rotationspumpe einstufigen Drehschieber in einem Olbad von einem Dreiphasen Elektromotor abgedichtet Die Hochvakuumpumpe ist geeignet zur F rderung von nicht korrosiven Gasen In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Verwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Diese Warnung weist auf gef hrliche Ar beitsschritte hin die bei unsachgem er Durchf h rung das Risiko von Personensch den bergen VORSICHT Diese Warnung weist auf Arbeitsschritte hin die das Risiko von Sch den am Ger t bergen Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 20 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Gebrauchsanleitung 2 Lagerung W hrend des Transports und der Lagerung der Pumpen sollen die folgenden Umgebungsbedingungen gegeben sein Temperatur 15 C bis 70 C Relative Feuchtigkeit 0 95 niederschlagsfrei Vor der Installation Die Pumpe wird in einer Schutzverpackung gelie fert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Das Gewicht der Verpackung einschlie lich
61. ry system Check the operation of the float Customer float valve valve No lubrication See previous point Customer Replace it following th lied Worn out coupling element an mean Customer Anomalous instructions noise Motor or pump bearings damaged Call Agilent Technical support Agilent Service Worn out vanes Call Agilent Technical support Agilent Service Damaged contact surfaces Pump overhaul Agilent Service Oil leak Worn out shaft oil seal rings Replace oil seal rings Agilent Service il lea Oil recovery system leak Check and clean oil recovery pipe Customer Blocked exhaust filters Replace exhaust filters Customer Motor o No or low lubrication Oil level filling up Customer protection Is tripping Pump seizure and jelly oil Pump overhaul Agilent Service Broken vane Call Agilent Technical support Agilent Service Clogged exhaust filters Replace exhaust filters Customer High t ture due to polluted t i emperature due to pollute Oil change Customer Discharge oil mist High operating temperature due Decrease room temperature by Customer to high ambient temperature allowing a better change of air Inefficient oil recovery system Check and clean the oil recovery Customer float valve line 104 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 XE Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every ef
62. s d avertissement attirent l attention de l op rateur sur une proc dure ou une man uvre sp ciale dont la mauvaise ex cution risque de provoquer de graves l sions ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareil Les notes contiennent des renseignements importants isol s du texte 30 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Mode d emploi 3 Emmagasinage Pendant le transport et l emmagasinage des pompes veiller respecter les conditions environnementales suivantes temp rature de 15 C 70 C humidit relative 0 95 sans condensation Preparation pour l installation La pompe est fournie dans un emballage de protection si l on constate des marques de dommages pouvant s tre produites pendant le transport contacter aussit t le bureau de vente local Le poids total de l emballage avec la pompe est d environ 100 Kg Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration Ne pas jeter l emballage dans la nature Le mat riel est enti rement recyclable et il est conforme la directive CEE 85 399 en mati re de protection de l environnement La pompe ne peut tre endommag e en restant simplement expos e l atmosph re Il est de toute facon con
63. s of the screws CAUTION Use suitable lifting equipment to lift the motor Motor weight 50 Hz approximately 23 kg Motor weight 60 Hz approximately 27 kg MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 99 110 5 Technical Information Servicing WARNING The operation with damaged elastic element causes an anomalous pump noise especially when starting the pump and may lead to coupling and pump shaft failure Pump Overhaul Procedure For this operation please require the proper instructions and direct any questions to our Customer Service department The overhaul consists of a complete disassembly cleaning of all components as well as replacement of parts that are subject to wear pump and motor bearings vanes and gaskets 100 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Spare Parts Spares Necessary for Normal Servicing Agilent recommends the use of spare parts as follows 1 Spare parts included in the Minor Maintenance Kit listed on page 94 with A and indicated in the relevant Pump Parts tables These parts are needed for ordinary maintenance operations to be performed by users or by Agilent personnel 2 Spare parts included in the Major Maintenance Kit listed on page 94 with B and indicated in the relevant Pump Parts tables These parts are needed for more complex maintenance operations to be performed mostly
64. seill de la garder dans son emballage jusqu au moment de sa mise en place sur le syst me afin d viter toute pollution due la poussi re MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 31 110 3 Mode d emploi Installation Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s aux agents atmosph riques pluie gel neige des poussi res des gaz agressifs ainsi que dans des milieux explosifs ou risque lev d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes Temp rature de 12 C 40 C Humidit relative 0 95 sans condensation AVERTISSEMENT Afin de pr venir les risques de courts circuits ou de surcharge il est n cessaire d installer un interrupteur automatique sur la ligne d alimentation principale de la pompe d une capacit appropri e La capacit de l interrupteur doit tre compatible avec les donn es figurant sur la plaque signal tique du moteur effectivement install et doit tre s lectionn par l installateur Le branchement doit tre effectu dans le respect des normes en vigueur ATTENTION Avant toute utilisation de la pompe celle ci doit tre ravitaill e en huile car elle est livr e vide AVERTISSEMENT 32 110 Avant toute autre op ration retirer les bouchons de protection plac s sur les brides d aspiration et de vidange En cas
65. suction Maximum pressure inside the oil container must not exceed 1 5 bar abs Non observance of these precautions may be dangerous for the pump and the operator Outlet Flange PROBERBPERBENBEHE DECORATE EIZO tJ Inlet Flange Figure 1 MS 101 Check that your electrical mains voltage corresponds to the range indicated on motor label Connect the pump to the power supply MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 43 110 4 Instructions for Use Use Use There are no special procedures for switching the pump on Simply connect to the electrical power supply to start it running Refer to the wiring diagram supplied with the pump for correct connection WARNING The pump is designed for operation with neutral or non corrosive fluids It is absolutely forbidden to use potentially explosive or flammable substances CAUTION In three phase motors reversing the phase will reverse the sense of rotation of the pump This may cause mechanical damage 44 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Instructions for Use 4 Maintenance Personnel responsible for pump operation and maintenance must be well trained and must be aware of the accident prevention rules WARNING Death may result from contact with high voltages Always take extreme care and observe the accident prevention regulations in force When machine is powe
66. t MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Lubricants Technical Information 5 It will be readily understood how important adequate lubrication is to high technology pumps like the Agilent vacuum pumps Correct use of appropriate lubricants makes a significant contribution to achieving best performance and warding off defects When handling lubricants the following sanitary protection measures should be observed at all times Avoid prolonged excessive or repeated contact of the skin with products for lubrication and also avoid directly inhaling the fumes or vapors of such products Protect the skin by wearing appropriate clothes and equipment e g special suits glasses or where permitted by the safety regulations gloves or by applying a special protective product Clean the skin carefully after contact with the lubricants by washing freely with water and soap Apply a skin cream after washing Take off and change clothes or shoes on which oil has been spilled Never put rags dripping with oil into the pockets of your clothes When disposing of waste lubricants observe the following environment protection regulations The lubricants risk contaminating the water and the ground Therefore never pour lubricating products on to the ground into water or in the sewage system All violations of these rules are liable to persecution as provided for by law When using lubricants always keep oil can
67. terruttore automatico sulla linea d alimentazione principale verso la pompa di capacit adeguata La capacit dell interruttore deve essere compatibile con i dati indicati sulla targhetta del motore effettivamente installato e deve essere scelto da chi effettua l installazione Il collegamento deve essere effettuato adottando tutte le vigenti norme applicabili ATTENZIONE Prima di avviare la pompa occorre procedere al rifornimento di olio lubrificante poich la pompa viene fornita scarica AVVERTENZA Togliere i tappi di protezione posti sulle flange di aspirazione e scarico prima di ogni operazione L aria contenuta all interno della pompa in caso di accensione involontaria pu proiettarli violentemente contro l operatore e ferirlo 12 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Istruzioni per l uso 1 Durante l installazione prestare la massima attenzione che la flangia di aspirazione sia collegata alla camera da evacuare e che la flangia di scarico non sia tappata vedere le figure seguenti Prestare la massima attenzione a non invertire lo scarico con la mandata La massima pressione interna al contenitore dell olio non deve superare 1 5 bar assoluta L inosservanza di queste precauzioni pu causare danni alla pompa ed all operatore Flangia di scarico Flangia di aspirazione Figura 1 MS 101 FN Controllare che la tensione di alimentazi
68. the maximum capacity when the pump is working with the inlet open to atmospheric pressure If a pressure gauge has been fitted on the tank check the exhaust filter blockage with the pump warm To replace the filter apply the following instructions 1 Remove the cover position B2 refer to Pumps Major Parts figure page 95 by unscrewing its screws position B1 refer to Pump Major Parts figure page 95 2 Unscrew the screw position B4 refer to Pumps Major Parts figure page 95 remove the washer position B5 B6 refer to Pumps Major Parts figure page 95 and then the fixing cartridge disk position B7 refer to Pumps Major Parts figure page 95 98 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 3 Replace all the exhaust filters position B refer to Pumps Major Parts figure page 95 and their gaskets position B8 refer to Pumps Major Parts figure page 95 4 Re assemblethe fixing cartridge disk the washers and tighten the screws 5 Reassemble the discharge cover If necessary replace the gasket position B3 refer to Pumps Major Parts figure page 95 Coupling Elastic Element Replacement Procedure Please refer to figure Pumps Major Parts on page 95 1 Remove the motor assembly position D1 unscrewing the screws position D2 2 Check the elastic element position D conditions If necessary replace it 3 Reassemble by mean
69. this manual as well as lack of correct maintenance may create high risks for overheating or fire In case of a fire do not use water to extinguish but use a powder CO extinguisher or other means compatible with the electric equipment and lubricating oil MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 59 110 5 Technical Information Transport and Handling Transport and Handling Lifting The orientation of the packed components must correspond to the instructions given by the pictograms on the external covering of the packaging For loading and unloading use lifting equipment suitable for the pump weight Use the suitable lifting eyebolts to lift the pump see figure below Figure 7 Lifting 60 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Technical Information 5 Tab 2 WEIGHT UNITS VALUE With 3 ph 50 Hz motor approx depending from Kg Ib 85 188 motor mounted With 3 ph 60 Hz motor approx depending from Kg Ib 89 196 motor mounted Without motor Kg Ib 62 137 Unpacking and Components Control When receiving the pump check that the packaging is intact or shows any signs of damages occurred during transportation If there is no damage proceed to the unpacking and check the pump further In case of damages are found inform immediately Agilent and the carrier A representative will contact you or may be dispatched to the site to insp
70. tructions for Use 39 General Information 40 Storage 41 Preparation for Installation 41 Installation 42 Use 44 Maintenance 45 Disposal 47 Technical Information 49 Section 51 Technical Description 51 Technical Data 53 Dimensions 55 Safety Precautions 58 Transport and Handling 60 Section Il 62 Installation and Operation 62 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Contents Connections to the Inlet and Exhaust Flanges 66 Stopping the Pump 72 Safety Rules 73 Warning Notes 74 Caution Notes 76 Maintenance Actions 77 Lubricants 79 Section III 82 Servicing 82 Spare Parts 101 De Commissioning 102 Return for Repair 103 Troubleshooting 104 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 7 110 Contents 8 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 MS 101 High Capacity Rotary Vane Pump User Manual e Istruzioni per l uso Informazioni Generali 10 Immagazzinamento 11 Preparazione per l installazione 11 Installazione 12 Uso 14 Manutenzione 15 Smaltimento 17 Traduzione delle istruzioni originali E Agilent Technologies 9 110 1 Istruzioni per l uso Informazioni Generali Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura
71. ty Rotary Vane Pump User Manual 87 900 141 01 MS 101 High Capacity Rotary Vane Pump User Manual 3 Mode d emploi Information Generale 30 Emmagasinage 31 Preparation pour l installation 31 Installation 32 Utilisation 34 Maintenance 35 Mise au rebut 37 Traduction de la mode d emploi originale GEB Agilent Technologies 29 110 3 Mode d emploi Information Generale Information Generale Cet appareil a t con u en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice ainsi que toute autre information fournie par Agilent avant de l utiliser Agilent d cline toute responsabilit en cas de non respect total ou partiel des instructions fournies d utilisation incorrecte de la part du personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques La MS 101 High Capacity Rotary Vane Pump est une pompe rotative mono tages palettes tanches en bain d huile actionn es par un moteur lectrique triphas Cette pompe haut vide est adapt es au pompage de gaz non corrosifs Les paragraphes suivants fournissent toute l information n cessaire pour garantir la s curit de l op rateur pendant l utilisation de l appareil Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants AVERTISSEMENT Les message
72. ump User Manual 87 900 141 01 41 110 4 Instructions for Use Installation Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases orin explosive environments or those with a high fire risk During operation the following environmental conditions must be respected temperature from 12 C to 40 C relative humidity 0 95 non condensing A To ensure short circuit or overload protection an automatic circuit breaker of appropriate capacity must be installed on the main power line towards the pump The capacity of the switch must be compatible with the rating plate data of the motor actually installed and must be chosen by the installer Connect by adopting all the current applicable rules and regulations Fill the pump with lubricating oil before starting it The pump is supplied empty Take out the protective caps on the suction and exhaust flanges before doing anything else In the event of an accidental start up the air inside the pump could violently expel the protective caps and harm the operator 42 110 MS 101 High Capacity Rotary Vane Pump User Manual 87 900 141 01 Instructions for Use 4 WARNING During installation pay maximum attention that the suction flange is connected to the vacuum chamber and the exhaust flange is not closed see figures below Be very careful not to invert exhaust and

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